Cooling device

Abstract

We offer cooling devices with superior cooling performance. [Solution] The cooling device comprises a cold plate, a plurality of fins 20, a first flow path 60, and a second flow path 70. The cold plate 10 is in thermal contact with a heat source. The plurality of fins 20 are arranged on one of the two main surfaces of the cold plate 10 and spaced apart from each other in a first direction. The first flow path 60 is located on one side of the main surface in the Y-axis direction intersecting the X-axis direction with respect to the plurality of fins 20, and communicates with a refrigerant inlet 40. The second flow path 70 is located on the other side of the main surface in the Y-axis direction with respect to the plurality of fins 20, and communicates with a refrigerant outlet 50. At least a portion of the fins 20 overlap with the first flow path 60 or the second flow path 70 in a plan view.

Description

Technical Field

[0001] The present disclosure relates to a cooling device.

Background Art

[0002] Conventionally, as a method for cooling a heat-generating body such as a CPU (Central Processing Unit), a cooling method using a refrigerant-type cooling device is known. The refrigerant-type cooling device has a flow path inside, and the refrigerant (for example, water) flowing through such a flow path cools the heat-generating body by transferring the heat of the heat-generating body to the outside.

[0003] Patent Document 1 discloses a cooling device having a cooling channel composed of an inlet channel that communicates with an inlet of a refrigerant, extends in a first direction, an outlet channel that communicates with an outlet of the refrigerant, extends in the first direction, and a lateral channel that communicates with the inlet channel and the outlet channel and extends in a second direction intersecting the first direction. The refrigerant flows through the cooling channel.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, in the cooling device described in Patent Document 1, since the flow path cross-sectional area of the lateral channel is smaller than the flow path cross-sectional areas of the inlet channel and the outlet channel, the flow path resistance becomes high at the inlet and outlet of the lateral channel. Therefore, the circulation efficiency of the refrigerant decreases, and there is a risk that the cooling performance decreases. Therefore, it is expected to provide a cooling device with excellent cooling performance.

[0006] The present disclosure provides a cooling device with excellent cooling performance.

Means for Solving the Problems

[0007] A cooling device according to one aspect of the present disclosure comprises a cold plate, a plurality of fins, a first flow path, and a second flow path. The cold plate is in thermal contact with a heat source. The plurality of fins are arranged on one of the two main surfaces of the cold plate and are spaced apart from each other in a first direction. The first flow path is located on one side of the main surface in a second direction intersecting the first direction with respect to the plurality of fins, and communicates with a refrigerant inlet. The second flow path is located on the other side of the main surface in the second direction with respect to the plurality of fins, and communicates with a refrigerant outlet. At least a portion of the fins overlap with the first or second flow path in a plan view. [Effects of the Invention]

[0008] The cooling device described herein offers excellent cooling performance. [Brief explanation of the drawing]

[0009] [Figure 1] Figure 1 is a schematic perspective view of a cooling device according to the first embodiment. [Figure 2] Figure 2 is a schematic perspective view of the cooling device according to the first embodiment. [Figure 3] Figure 3 is a schematic perspective view of a cold plate according to the first embodiment. [Figure 4] Figure 4 is a schematic perspective view of the intermediate plate according to the first embodiment. [Figure 5] Figure 5 is a schematic perspective view of the intermediate plate according to the first embodiment. [Figure 6] Figure 6 is a schematic plan view of the cooling device according to the first embodiment. [Figure 7] Figure 7 is a cross-sectional view taken along line IV-IV shown in Figure 1. [Figure 8] Figure 8 is a cross-sectional view along the VV line shown in Figure 1. [Figure 9] Figure 9 is a schematic cross-sectional view of the cooling device according to the second embodiment. [Modes for carrying out the invention]

[0010] The embodiments for implementing the cooling device according to this disclosure (hereinafter referred to as "Embodiments") will be described in detail below with reference to the drawings. However, this disclosure is not limited by these embodiments. Furthermore, each embodiment can be combined as appropriate, provided that the processing content is not inconsistent. Also, the same parts are denoted by the same reference numerals in each of the following embodiments, and redundant descriptions are omitted.

[0011] Furthermore, in the drawings referenced below, for the sake of clarity, mutually orthogonal X, Y, and Z axis directions are sometimes defined, and a Cartesian coordinate system is shown with the Z axis direction being vertically upward.

[0012] In the following explanation, the X-axis direction corresponds to the "first direction," the Y-axis direction to the "second direction," and the Z-axis direction to the "third direction." For example, the X-axis and Y-axis directions are horizontal. The Z-axis direction is vertical.

[0013] Furthermore, in the following description, the X-axis, Y-axis, and Z-axis directions include an acceptable error range in the technical field to which the present invention pertains (for example, a range of approximately ±45°). As an example, "extending in the X-axis direction" means not only extending in the X-axis direction in a strict sense, but also extending in a direction shifted by approximately ±45° relative to the X-axis direction.

[0014] (First Embodiment) <Cooling system configuration> First, the configuration of the cooling device 100 according to the first embodiment will be described with reference to FIGS. 1 to 8. FIGS. 1 and 2 are schematic perspective views of the cooling device 100 according to the first embodiment. FIG. 3 is a schematic perspective view of the cold plate 10 according to the first embodiment. FIGS. 4 and 5 are schematic perspective views of the intermediate plate 30 according to the first embodiment. FIG. 6 is a schematic plan view of the cooling device 100 according to the first embodiment. FIG. 7 is a sectional view taken along line IV-IV shown in FIG. 1. FIG. 8 is a sectional view taken along line V-V shown in FIG. 1. For ease of understanding, the cover 80 is omitted in FIG. 6.

[0015] As shown in FIGS. 1 to 8, the cooling device 100 includes a plurality of cold plates 10, a plurality of fins 20, an intermediate plate 30, and a cover 80. The cooling device 100 also includes an inlet 40, an outlet 50, a first flow path 60, and a second flow path 70.

[0016] The cold plate 10 is in thermal contact with a heat source 300 (see FIG. 7) that is the object to be cooled. The cold plate 10 may be in direct contact with the heat source 300, or may be indirectly in contact with the heat source 300 via a heat transfer member such as a heat transfer sheet. The cold plate 10 may be formed of a material having excellent thermal conductivity such as metal.

[0017] As shown in FIG. 2, the cooling device 100 may have a plurality of cold plates 10. The plurality of cold plates 10 are arranged at intervals in the X-axis direction. One heat source 300 may be in thermal contact with each cold plate 10. In the example of FIG. 2, the cooling device 100 has four cold plates 10.

[0018] As shown in FIG. 7, the cold plate 10 has a first surface 10a in contact with the heat source 300 and a second surface 10b located opposite to the first surface 10a.

[0019] Multiple fins 20 are arranged on the second surface 10b of the cold plate 10. The multiple fins 20 are spaced apart from each other in the X-axis direction. Each fin 20 is a rectangular plate-shaped member extending in the Y-axis direction and is arranged perpendicular to the second surface 10b of the cold plate 10. The fins 20 may be formed from a material with excellent thermal conductivity, such as metal. Multiple fins 20 may be formed integrally with the cold plate 10.

[0020] A fin group 21 is formed by multiple fins 20 arranged on a single cold plate 10. As shown in Figure 6, the cooling device 100 has multiple fin groups 21. The multiple fin groups 21 are arranged with spacing between them in the X-axis direction. Note that the spacing between two adjacent fin groups 21 may be greater than the spacing between two adjacent fins 20. In the example in Figure 6, the cooling device 100 has four fin groups 21.

[0021] The intermediate plate 30 is a plate-shaped member extending in the X-axis direction. The intermediate plate 30 has a plurality of through holes 31 (see Figure 4). The plurality of through holes 31 are spaced apart from each other in the X-axis direction. Fins 20, which are integrally formed with the cold plate 10, are fitted into each through hole 31. The intermediate plate 30 also has a plurality of grooves 32. Each groove 32 is located on the lower surface of the intermediate plate 30 (the main surface on the negative Z-axis side) and is provided corresponding to each of the plurality of through holes 31. The cold plate 10 is fitted into each groove 32 to position the cold plate 10.

[0022] The cover 80 is a box-shaped member extending in the X-axis direction and is located on the second surface 10b side of the cold plate 10. The cover 80 is positioned to cover the multiple fins 20. The cover 80 may be made of, for example, metal.

[0023] Furthermore, in a plan view of the cooling device 100, the region R (see Figure 6) between adjacent fin groups 21 and the first flow path 60 and the second flow path 70 is arranged so that the upper surface of the intermediate plate 30 and the lower surface of the cover 80 are in contact with each other.

[0024] The inlet 40 communicates with the first flow path 60 and serves as the inlet for the refrigerant to flow into the cooling device 100. The outlet 50 communicates with the second flow path 70 and serves as the outlet for the refrigerant to flow out of the cooling device 100.

[0025] The inlet 40 and outlet 50 are located in the cover 80. For example, the cover 80 has two openings that penetrate in the Z-axis direction. One end of each cylindrical member 45, 55 is inserted into each of these openings. The other ends of these cylindrical members 45, 55 protrude beyond the cover 80 in the positive Z-axis direction. The cooling device 100 has through holes in the cylindrical members 45, 55 as the inlet 40 and outlet 50, respectively. As shown in Figure 1, the cylindrical members 45, 55 may be curved members.

[0026] The first channel 60 communicates with the inlet 40. As shown in Figures 6 and 7, the first channel 60 is positioned on one side (the positive Y-axis side) in the Y-axis direction relative to the multiple fins 20 on the second surface 10b of the cold plate 10.

[0027] The first flow path 60 has a first individual flow path 61 that communicates with the inlet 40 and a second individual flow path 62 that communicates with the first individual flow path 61. The first individual flow path 61 is a flow path that extends in the positive Y-axis direction from the inlet 40. The second individual flow path 62 is a flow path that is positioned on the positive Y-axis side relative to the plurality of fins 20 and extends in the X-axis direction. The first individual flow path 61 and the second individual flow path 62 are formed by grooves formed in the cover 80. The refrigerant flowing in from the inlet 40 passes through the first individual flow path 61 and the second individual flow path 62 and flows between two adjacent fins 20 from the positive Y-axis side.

[0028] The second channel 70 communicates with the outlet 50. As shown in Figures 6 and 7, the second channel 70 is positioned on the other side (negative Y-axis direction) in the Y-axis direction relative to the plurality of fins 20 on the second surface 10b of the cold plate 10.

[0029] The second flow path 70 has a third individual flow path 71 that communicates with the outlet 50 and a fourth individual flow path 72 that communicates with the third individual flow path 71. The third individual flow path 71 is a flow path that extends in the negative Y-axis direction from the outlet 50. The fourth individual flow path 72 is a flow path that is positioned on the negative Y-axis side relative to the multiple fins 20 and extends in the X-axis direction. The third individual flow path 71 and the fourth individual flow path 72 are formed by grooves formed in the cover 80. The refrigerant that flows between two adjacent fins 20 from the positive Y-axis side to the negative Y-axis side passes through the fourth individual flow path 72 and the third individual flow path 71 and flows out from the outlet 50.

[0030] As described above, in the cooling device 100 according to the first embodiment, the refrigerant flows into the interior of the cooling device 100 from the inlet 40. The refrigerant then flows through the first flow path 60 between two adjacent fins 20. At this time, the refrigerant exchanges heat with the heat source 300 via the fins 20 and the cold plate 10. As a result, the heat source 300 is cooled. The refrigerant then passes between the two adjacent fins 20 and flows into the second flow path 70, and flows out of the cooling device 100 from the outlet 50.

[0031] Here, at least a portion of the fins 20 of the cooling device 100 according to the first embodiment overlaps with the first flow path 60 or the second flow path 70 in a plan view. As shown in Figure 6, one end of the fins 20 in the Y-axis direction overlaps with the first flow path 60 in a plan view. Specifically, one end of the fins 20 in the Y-axis direction overlaps with the second individual flow path 62 of the first flow path 60 in a plan view.

[0032] Similarly, the other end of the fin 20 in the Y-axis direction coincides with the second flow channel 70 in a plan view. Specifically, the other end of the fin 20 in the Y-axis direction coincides with the fourth individual flow channel 72 of the second flow channel 70 in a plan view.

[0033] In this way, since at least a portion of the fins 20 overlaps with the first flow path 60 or the second flow path 70 in a plan view, the refrigerant can pass through the fins 20 not only from the sides but also from above. That is, the amount of refrigerant flowing from the first flow path 60 into the space between two adjacent fins 20, or the amount of refrigerant flowing from between two adjacent fins 20 into the second flow path 70, can be increased, thereby improving the refrigerant flow efficiency. As a result, the cooling device 100 has excellent cooling efficiency.

[0034] The cold plate 10, fins 20, and inlet 40 may be arranged in the order of cold plate 10, fins 20, and inlet 40 in the Z-axis direction. Specifically, as shown in Figure 8, the cold plate 10, fins 20, and inlet 40 may be arranged in the order of cold plate 10, fins 20, and inlet 40 in the positive Z-axis direction. That is, the refrigerant inlet 40 may be positioned above the fins 20 and cold plate 10.

[0035] By arranging the cold plate 10, fins 20, and inlet 40 in this manner, it becomes easier to flow the refrigerant from top to bottom, making it easier to introduce a large amount of refrigerant between two adjacent fins 20.

[0036] Furthermore, as shown in Figure 8, the upper end position P2 of the fin 20 in the Z-axis direction may be located closer to the cold plate 10 than the lower end position P1 of the inlet 40 in the Z-axis direction. In other words, the upper end position P2 of the fin 20 may be located below the lower end position P1 of the inlet 40. With this configuration, since the inlet 40 is located above the fin 20, the refrigerant can easily flow from the inlet 40 over the fin 20. Also, due to the weight of the refrigerant, it is easier to introduce the refrigerant from above the fin 20 between two adjacent fins 20.

[0037] As shown in Figure 8, the inlet 40 and outlet 50 may overlap with the fin 20 in the X-axis direction.

[0038] With this configuration, the width of the fins 20 in the direction in which the fins 21 extend can be reduced compared to the case where the inlet 40 and outlet 50 are positioned on either side of the fin group 21 in the direction in which the fin group 21 extends (here, the Y-axis direction), or where they are positioned on one side of the fin group 21 in the Y-axis direction. Therefore, the cooling device 100 can be made smaller.

[0039] The inlet 40 and outlet 50 may be located between two adjacent fin groups 21. Specifically, as shown in Figure 6, the inlet 40 may be located between two adjacent fin groups 21A and 21B. The outlet 50 may be located between two adjacent fin groups 21C and 21D.

[0040] With this configuration, the width in the direction in which the fin groups 21 are aligned can be reduced compared to the case where the inlet 40 and outlet 50 are positioned to sandwich all (here, four) of the fin groups 21 in the direction in which the fin groups 21 are aligned (here, the X-axis direction), or where they are positioned to one side of all the fin groups 21 in the X-axis direction. Therefore, the cooling device 100 can be made smaller.

[0041] Furthermore, in the direction in which the fin groups 21 are aligned, there may be only one fin group 21 located on the opposite side of the inlet 40 from the outlet 50. In the example shown in Figure 6, fin group 21A is located on the opposite side of the inlet 40 from the outlet 50. That is, one fin group 21A is located on the positive X-axis side of the inlet 40.

[0042] With this configuration, compared to the case where the inlet 40 is located near the center in the direction in which the fin group 21 is aligned, the refrigerant that has flowed between adjacent fins 20 in the fin group 21A is more likely to flow towards the outlet 50 side (from the positive X-axis side to the negative X-axis side) in the second flow path 70.

[0043] Furthermore, in the direction in which the fin groups 21 are aligned, there may be only one fin group 21 located on the opposite side of the outlet 50 from the inlet 40. In the example shown in Figure 6, fin group 21D is located on the opposite side of the outlet 50 from the inlet 40. That is, one fin group 21D is located on the negative X-axis side of the outlet 50.

[0044] With this configuration, compared to the case where the outlet 50 is located near the center in the direction in which the fin group 21 is aligned, the refrigerant that has flowed between adjacent fins 20 in the fin group 21D is more likely to flow towards the outlet 50 side (from the negative X-axis direction to the positive X-axis direction) in the second flow path 70.

[0045] As shown in Figure 7, the dimension S1 of the first channel 60 or the second channel 70 in the Z-axis direction may be twice or more the dimension S2 of the fin 20 in the Z-axis direction.

[0046] With this configuration, by widening the space above the fins 20, the flow resistance is reduced, making it easier for the refrigerant to flow above the fins 20. As a result, more refrigerant can be introduced from above the fins 20 between two adjacent fins 20.

[0047] The dimension S2 of the fin 20 in the Z-axis direction may be smaller than the value obtained by subtracting dimension S2 from the dimension S1 of the first flow path 60 or the second flow path 70 in the Z-axis direction. This increases the space above the fin 20, thereby reducing the flow resistance and making it easier for the refrigerant to flow above the fin 20. As a result, more refrigerant can be introduced from above the fin 20 between two adjacent fins 20.

[0048] As shown in Figure 7, in a cross-sectional view perpendicular to the X-axis, the bottom surface 65 of the first channel 60 may be inclined in a direction that approaches the second surface 10b of the cold plate 10 as it approaches the fins 20 (here, in the negative Z-axis direction). With this configuration, it is easier to guide the refrigerant flowing through the first channel 60 between two adjacent fins 20.

[0049] Similarly, the bottom surface 75 of the second flow path 70 may be inclined to approach the second surface 10b of the cold plate 10 as it approaches the fins 20. With this configuration, the refrigerant flowing between two adjacent fins 20 is easily guided to the second flow path 70 and the outlet 50.

[0050] As shown in Figure 7, in a cross-sectional view perpendicular to the X-axis, the side surface 66 of the first flow path 60 located on the fin 20 may be inclined in a direction that approaches the center of the fin 20 in the Y-axis direction as it approaches the fin 20. With this configuration, by widening the space above the fin 20, the flow resistance is reduced, making it easier for the refrigerant to flow above the fin 20. As a result, more refrigerant can be introduced from above the fin 20 between two adjacent fins 20.

[0051] Similarly, the side surface 76 of the second flow path 70 located on the fin 20 may be inclined to approach the center of the fin 20 in the Y-axis direction as it approaches the fin 20. With this configuration, the space above the fin 20 is widened, reducing the flow resistance and making it easier for the refrigerant to flow above the fin 20. Therefore, it is easier to guide the refrigerant flowing between two adjacent fins 20 to the second flow path 70 and the outlet 50.

[0052] As shown in Figure 7, the dimension of the portion of the fin 20 that overlaps with the first flow path 60 in the Y-axis direction is defined as the first dimension S3, and the dimension of the first flow path 60 in the Y-axis direction is defined as the second dimension S4. In this case, the first dimension S3 may be greater than the value obtained by subtracting the first dimension S3 from the second dimension S4.

[0053] With this configuration, the dimensions of the fins 20 in the Y-axis direction are large, which allows the fins 20 to be made larger and improves the cooling performance of the cooling device 100.

[0054] As shown in Figure 7, the dimension S3 in the Y-axis direction of the portion of the fin 20 that overlaps with the first flow path 60 may be larger than the dimension S2 in the Z-axis direction of that portion.

[0055] With this configuration, the refrigerant can easily flow along the sides of the fins 20. As a result, more refrigerant can be introduced from the sides of the fins 20 between two adjacent fins 20.

[0056] As described above, in the cooling device 100 according to the first embodiment, at least a portion of the fins 20 overlaps with the first flow path 60 or the second flow path 70 in a plan view. This allows the refrigerant to pass not only from the side of the fins 20 but also from above. In other words, it is possible to increase the amount of refrigerant flowing from the first flow path 60 to the space between two adjacent fins 20, or the amount of refrigerant flowing from between two adjacent fins 20 to the second flow path 70, thereby improving the refrigerant flow efficiency. For this reason, the cooling device 100 has excellent cooling efficiency.

[0057] (Second Embodiment) Figure 9 is a schematic cross-sectional view of the cooling device 100 according to the second embodiment. As shown in Figure 9, the dimension in the Y-axis direction of the portion of the fin 20 that overlaps with the first flow path 60 is defined as the first dimension S3, and the dimension in the Y-axis direction of the first flow path 60 is defined as the second dimension S4. In this case, the first dimension S3 may be smaller than the value obtained by subtracting the first dimension S3 from the second dimension S4.

[0058] With this configuration, the amount of refrigerant flowing from the side of the fins 20 can be increased, thereby improving the cooling performance of the cooling device 100.

[0059] Furthermore, this technology can also be configured as follows. (1) A cold plate that is in thermal contact with the heat source, A plurality of fins are arranged on one of the two main surfaces of the cold plate, spaced apart from each other in the first direction, On one of the main surfaces, a first flow path is provided that is arranged on one side of a second direction intersecting the first direction with respect to the plurality of fins and communicates with the refrigerant inlet, On one main surface, a second flow path is positioned on the other side in the second direction relative to the plurality of fins and communicates with the refrigerant outlet. Equipped with, A cooling device wherein at least a portion of the fins overlaps with the first or second flow path in a plan view. (2) One end of the fin in the second direction overlaps with the first flow path in a plan view. The cooling device according to (1), wherein the other end of the fin in the second direction overlaps with the second flow path in a plan view. (3) The cooling device according to (1) or (2), wherein, when the direction intersecting the first and second directions is defined as the third direction, the cold plate, the fins, and the inlet are arranged in the order of cold plate, fins, and inlet in the third direction. (4) The cooling device according to any one of (1) to (3), wherein the inlet and outlet overlap with the fins in the first direction. (5) The fins have multiple fin groups arranged in the first direction, A cooling device according to any one of (1) to (4), wherein the inlet and outlet are located between two adjacent groups of fins. (6) The cooling device according to any one of (1) to (5), wherein, when the direction intersecting the first and second directions is defined as the third direction, the dimension of the first or second flow path in the third direction is at least twice the dimension of the fin in the third direction. (7) The cooling device according to any one of (1) to (6), wherein, in a cross-sectional view perpendicular to the first direction, the bottom surface of the first channel or the bottom surface of the second channel is inclined in a direction that approaches the one main surface as it approaches the fin. (8) The cooling device according to any one of (1) to (7), wherein, in a cross-sectional view perpendicular to the first direction, the side surface of the first flow path located on the fin or the side surface of the second flow path located on the fin is inclined in a direction that approaches the central part of the fin in the second direction as it approaches the fin. (9) The cooling device according to any one of (1) to (8), wherein the dimension of the portion of the fins that overlaps with the first flow path in the second direction is defined as the first dimension, and the dimension of the first flow path in the second direction is defined as the second dimension, and the first dimension is greater than the value obtained by subtracting the first dimension from the second dimension. (10) The cooling device according to any one of (1) to (8), wherein the dimension of the portion of the fins that overlaps with the first flow path in the second direction is defined as the first dimension, and the dimension of the first flow path in the second direction is defined as the second dimension, and the first dimension is smaller than the value obtained by subtracting the first dimension from the second dimension. (11) The cooling device according to any one of (1) to (9), wherein, when the direction intersecting the first and second directions is defined as the third direction, the dimension of the portion of the fin that overlaps with the first flow path in the second direction is greater than the dimension of that portion in the third direction.

[0060] The embodiments disclosed herein should be considered in all respects as illustrative and not restrictive. Indeed, the above embodiments can be embodied in a variety of forms. Furthermore, the above embodiments may be omitted, replaced, or modified in various ways without departing from the scope and spirit of the appended claims. [Explanation of Symbols]

[0061] 10 Cold Plates 10a 1st page 10b 2nd side 20 fins 21 fin group 30 Intermediate plate 31 Through hole 40 Inlet 50 Outlet 60 First channel 65, 75 base 66,76 Side view 70 Second channel 80 Cover 100 Cooling device 300 heat source

Claims

1. A cold plate that is in thermal contact with the heat source, A plurality of fins are arranged on one of the two main surfaces of the cold plate, spaced apart from each other in the first direction, On one of the main surfaces, a first flow path is provided that is arranged on one side of a second direction intersecting the first direction with respect to the plurality of fins, and communicates with the refrigerant inlet, On one main surface, a second flow path is positioned on the other side in the second direction relative to the plurality of fins and communicates with the refrigerant outlet. Equipped with, A cooling device wherein at least a portion of the fins overlaps with the first or second flow path in a plan view.

2. One end of the fin in the second direction overlaps with the first flow path in a plan view. The cooling device according to claim 1, wherein the other end of the fin in the second direction overlaps with the second flow path in a plan view.

3. The cooling device according to claim 1, wherein, when the direction intersecting the first and second directions is defined as the third direction, the cold plate, the fins, and the inlet are arranged in the order of cold plate, fins, and inlet in the third direction.

4. The cooling device according to claim 1, wherein the inlet and outlet overlap with the fins in the first direction.

5. The fins have multiple fin groups arranged in the first direction, The cooling device according to claim 1, wherein an inlet and an outlet are located between two adjacent groups of fins.

6. The cooling device according to claim 1, wherein, when the direction intersecting the first and second directions is defined as the third direction, the dimension of the first or second flow path in the third direction is at least twice the dimension of the fin in the third direction.

7. The cooling device according to claim 1, wherein, in a cross-sectional view perpendicular to the first direction, the bottom surface of the first channel or the bottom surface of the second channel is inclined in a direction that approaches the one main surface as it approaches the fin.

8. The cooling device according to claim 1, wherein, in a cross-sectional view perpendicular to the first direction, the side surface of the first flow path located on the fin or the side surface of the second flow path located on the fin is inclined in a direction that approaches the central part of the fin in the second direction as it approaches the fin.

9. The cooling device according to claim 1, wherein when the dimension of the portion of the fin that overlaps with the first flow path in the second direction is defined as the first dimension, and the dimension of the first flow path in the second direction is defined as the second dimension, the first dimension is greater than the value obtained by subtracting the first dimension from the second dimension.

10. The cooling device according to claim 1, wherein when the dimension of the portion of the fins that overlaps with the first flow path in the second direction is defined as the first dimension, and the dimension of the first flow path in the second direction is defined as the second dimension, the first dimension is smaller than the value obtained by subtracting the first dimension from the second dimension.

11. The cooling device according to claim 1, wherein when the direction intersecting the first and second directions is defined as the third direction, the dimension of the portion of the fin that overlaps with the first flow path in the second direction is greater than the dimension of that portion in the third direction.

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