Data processing device, data processing method, program, and three-dimensional measuring machine

Abstract

This invention provides a data processing device, a data processing method, a program, and a three-dimensional measuring machine that suppress the generation of erroneous signals in accordance with the actual operation of a three-dimensional measuring machine. [Solution] The data processing device (40) includes a probing signal acquisition unit (64) that acquires a probing signal, a first determination unit (67) that determines whether the probing signal is a normal signal or a false signal using a false signal probability distribution that represents the distribution of false signal probabilities in the measurement space, and a determination result processing unit (67) that performs processing to reject probing signals determined to be false signals as measurement data, and performs processing to adopt probing signals determined to be normal signals as measurement data.

Description

[Technical Field]

[0001] The present invention relates to a data processing device, a data processing method, a program, and a three-dimensional measuring machine. [Background technology]

[0002] In the operation of a three-dimensional measuring machine, erroneous probing signals can occur due to vibrations and other factors. Suppressing the occurrence of erroneous probing signals is important from the perspective of the operability of the three-dimensional measuring machine. This is because, each time an erroneous probing signal is input, the user has to interrupt the operation and perform processing such as deleting the measurement point corresponding to the erroneous probing signal.

[0003] The location of probing false signals is influenced by individual user habits and other factors. Probing false signals are primarily caused by vibrations during manual stylus replacement and axis clamping. Individual user habits are directly correlated to the location of probing false signals.

[0004] Conventionally, when identifying false probing signals, the focus is on the probe's movement trajectory when a false probing signal is input. The probe's movement trajectory is monitored, an appropriate movement threshold is set, and the decision is made whether or not to accept the input probing signal.

[0005] Patent Document 1 describes a CNC-type three-dimensional measuring machine. The device described in this document, when operating automatically, stops the movement of the touch probe if a touch signal is recognized during movement mode, and stops automatic operation if a touch signal is recognized again, as it is determined that the touch probe has collided while not measuring. [Prior art documents] [Patent Documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 8-136241 [Overview of the project] [Problems that the invention aims to solve]

[0007] However, conventional methods for handling probing erroneous signals make it difficult to understand the circumstances under which these signals occur, as they are influenced by individual user habits and other factors.

[0008] In the device described in Patent Document 1, automatic operation of the device can be stopped when a probing error signal is detected, but it is difficult to grasp the circumstances under which the probing error signal occurs.

[0009] This invention has been made in view of these circumstances, and aims to provide a data processing device, a data processing method, a program, and a three-dimensional measuring machine that suppress the generation of false signals in accordance with the actual operation of a three-dimensional measuring machine. [Means for solving the problem]

[0010] To achieve the above objective, the following embodiments of the invention are provided.

[0011] The data processing device according to this disclosure is a data processing device comprising: a probing signal acquisition unit that acquires a probing signal representing contact of a probe equipped with a three-dimensional measuring machine to a probing point on an object to be measured; a false signal probability distribution acquisition unit that acquires a false signal probability distribution representing the distribution of false signal probabilities expressed as the number of false signals occurring for each of a plurality of unit regions defined in the measurement space with respect to the total number of false signals occurring in the measurement space of the three-dimensional measuring machine; a first determination unit that uses the false signal probability distribution to determine whether the probing signal acquired by the probing signal acquisition unit is a normal signal or a false signal; and a determination result processing unit that performs processing to reject the probing signal determined to be a false signal by the first determination unit as measurement data, and to adopt the probing signal determined to be a normal signal as measurement data.

[0012] According to the data processing device described herein, the occurrence of erroneous signals during the measurement of an object is suppressed in accordance with the actual operation of a three-dimensional measuring machine.

[0013] In a data processing device according to another embodiment, the false signal probability distribution may store the false signal probability for each unit region for each unit region.

[0014] In this embodiment, it is preferable that the size of the unit area is set according to the measurement conditions.

[0015] In other embodiments of data processing devices, a false signal probability distribution update unit may be provided that updates the false signal probability distribution based on the probing signal determined to be a false signal by the first discrimination unit.

[0016] According to this configuration, when a probing signal determined to be a false signal is acquired, the false signal probability distribution is updated, thereby suppressing the occurrence of false signals in accordance with the latest operational standards.

[0017] In a data processing device according to another embodiment, the false signal probability distribution update unit may update the number of false signals occurring in each unit area, and update the false signal probability for each unit area based on the updated number of false signals occurring in each unit area.

[0018] According to this configuration, the false signal probability distribution is updated in accordance with the update of the number of false signals for each unit region.

[0019] In other embodiments of the data processing device, a false signal probability distribution generation unit may be provided to generate a false signal probability distribution.

[0020] In this embodiment, a false signal probability distribution may be generated based on the history of false signal occurrences.

[0021] In other embodiments of the data processing device, the probing signal acquired using the probing signal acquisition unit may include a probing speed acquisition unit that acquires the speed of the probe when probing the probing point of the object to be measured, and a second determination unit that determines whether the probing signal is a normal signal or an erroneous signal based on the probe speed acquired using the probing speed acquisition unit.

[0022] According to this embodiment, the accuracy of false signal discrimination can be improved compared to the case where only false signal discrimination based on a false signal probability distribution is performed.

[0023] In a data processing device according to another embodiment, the second discrimination unit may determine the probing signal to be a normal signal when the probe speed is within a specified range, and determine the probing signal to be an erroneous signal when the probe speed falls outside the specified range.

[0024] In this embodiment, the system may include a threshold setting unit that sets a threshold value to be applied to the erroneous signal discrimination in the second discrimination unit.

[0025] The data processing method relating to this disclosure includes: a probing signal acquisition step of acquiring a probing signal representing contact of a probe equipped with a three-dimensional measuring machine to a probing point on an object to be measured; a false signal probability distribution acquisition step of acquiring a false signal probability distribution representing the distribution of false signal probabilities expressed as the number of false signals occurring for each of a plurality of unit areas defined in the measurement space with respect to the total number of false signals occurring in the measurement space of the three-dimensional measuring machine; a first determination step of determining whether the probing signal acquired in the probing signal acquisition step is a normal signal or a false signal using the false signal probability distribution; and a determination result processing step of performing a process to reject the probing signal determined to be a false signal in the first determination step as measurement data, and to adopt the probing signal determined to be a normal signal as measurement data.

[0026] The data processing method relating to this disclosure makes it possible to obtain the same effects and advantages as the data processing device relating to this disclosure. The constituent elements of the data processing device relating to other embodiments may be applied to the constituent elements of the data processing method relating to other embodiments.

[0027] The program relating to this disclosure is a program that enables a computer to implement: a probing signal acquisition function that acquires a probing signal representing contact of a probe equipped with a three-dimensional measuring machine to a probing point on an object to be measured; a false signal probability distribution acquisition function that acquires a false signal probability distribution representing the distribution of false signal probabilities expressed as the number of false signals occurring in each of several unit regions defined in the measurement space with respect to the total number of false signals occurring in the measurement space of the three-dimensional measuring machine; a first discrimination function that uses the false signal probability distribution to determine whether the probing signal acquired using the probing signal acquisition function is a normal signal or a false signal; and a discrimination result processing function that performs processing to reject probing signals determined to be false signals using the first discrimination function as measurement data, and to adopt probing signals determined to be normal signals as measurement data.

[0028] The program relating to this disclosure makes it possible to obtain the same effects as the data processing device relating to this disclosure. The constituent elements of the data processing device relating to other embodiments may be applied to the constituent elements of the program relating to other embodiments.

[0029] The three-dimensional measuring machine according to this disclosure comprises: a probe for measuring an object to be measured; a probing signal acquisition unit for acquiring a probing signal representing contact of the probe with a probing point on the object to be measured; a false signal probability distribution acquisition unit for acquiring a false signal probability distribution representing the distribution of false signal probabilities expressed as the number of false signals occurring in each of a plurality of unit regions defined in the measurement space with respect to the total number of false signals occurring in the measurement space; a first discrimination unit for determining whether the probing signal acquired by the probing signal acquisition unit is a normal signal or a false signal using the false signal probability distribution; and a discrimination result processing unit for performing a process to reject the probing signal determined to be a false signal by the first discrimination unit as measurement data, and for performing a process to adopt the probing signal determined to be a normal signal as measurement data.

[0030] The three-dimensional measuring machine described in this disclosure can achieve the same effects as the data processing device described in this disclosure. The constituent elements of the data processing device described in other embodiments can be applied to the constituent elements of the three-dimensional measuring machine described in other embodiments. [Effects of the Invention]

[0031] According to the present invention, the generation of erroneous signals during the measurement of an object is suppressed in accordance with the actual operation of a three-dimensional measuring machine. [Brief explanation of the drawing]

[0032] [Figure 1] Figure 1 is an overall configuration diagram of the three-dimensional measuring machine according to the first embodiment. [Figure 2] Figure 2 is a functional block diagram showing the electrical configuration applied to the three-dimensional measuring machine shown in Figure 1. [Figure 3] Figure 3 is a functional block diagram showing an example configuration of the heatmap acquisition unit shown in Figure 2. [Figure 4] Figure 4 is a functional block diagram showing an example configuration of the mask processing unit shown in Figure 2. [Figure 5] Figure 5 is an explanatory diagram illustrating the concept of a three-dimensional measuring machine according to an embodiment. [Figure 6]Figure 6 is a schematic diagram of the division of the measurable region. [Figure 7] Figure 7 is a schematic diagram of the definition of a three-dimensional array. [Figure 8] Figure 8 is a schematic diagram of the storage array for the number of false signals. [Figure 9] Figure 9 is a schematic diagram of the update process for the number of false signals. [Figure 10] Figure 10 is a schematic diagram of a heat map. [Figure 11] Figure 11 is a schematic diagram of the masking process. [Figure 12] Figure 12 is an explanatory diagram of the masking process when a unit domain probing signal SP represented as (1,1,1) is acquired. [Figure 13] Figure 13 is an explanatory diagram of the masking process when a unit domain probing signal SP represented as (3,3,1) is acquired. [Figure 14] Figure 14 is a flowchart showing the procedure of the data processing method according to the first embodiment. [Figure 15] Figure 15 is a functional block diagram of the discrimination unit applied to the three-dimensional measuring machine according to the second embodiment. [Figure 16] Figure 16 is an explanatory diagram of the discrimination process when a unit domain probing signal SP represented as (1,1,1) is acquired. [Figure 17] Figure 17 is an explanatory diagram of the discrimination process when a unit region probing signal SP represented as (3,3,1) is acquired. [Figure 18] Figure 18 is a flowchart showing the procedure of the data processing method according to the second embodiment. [Figure 19] Figure 19 is an explanatory diagram showing an example of the mask processing settings screen. [Figure 20] Figure 20 is an explanatory diagram showing an example of the heatmap reset screen. [Modes for carrying out the invention]

[0033] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In this specification, identical components are denoted by the same reference numerals, and redundant descriptions are omitted as appropriate.

[0034] [Overall configuration of a three-dimensional measuring machine] Figure 1 is an overall configuration diagram of a three-dimensional measuring machine according to the first embodiment. The three-dimensional measuring machine 10 acquires the coordinate values ​​of the measurement points of the workpiece, which is the object to be measured, and performs measurement of the three-dimensional shape of the workpiece and analysis of the geometric elements contained in the workpiece. A three-dimensional measuring machine is sometimes referred to as a CMM, an abbreviation of the English term Coordinate Measuring Machine.

[0035] The three-dimensional measuring machine 10 shown in the figure comprises a stand 12, a table 14, a right Y carriage 16R, a left Y carriage 16L, an X guide 18, an X carriage 20, a Z carriage 22, and a probe head 24.

[0036] The frame 12 is a support base that supports the underside of the table 14. A surface plate is applied to the table 14. The table 14 has a right Y carriage 16R erected at one end in the X-axis direction of its upper surface, and a left Y carriage 16L erected at the other end.

[0037] The upper and side surfaces of both ends of the table 14 in the X-axis direction have sliding surfaces formed on which the right Y carriage 16R and the left Y carriage 16L slide along the Y-axis direction. Furthermore, the right Y carriage 16R and the left Y carriage 16L are equipped with air bearings at positions facing the sliding surfaces of the table 14. That is, the right Y carriage 16R and the left Y carriage 16L are supported so as to be movable in the Y-axis direction using the table 14. Note that the air bearings provided on the right Y carriage 16R and the left Y carriage 16L are not shown in the illustration.

[0038] The X-guide 18 is supported at one end in the X-axis direction by the right Y-carriage 16R, and at the other end in the X-axis direction by the left Y-carriage 16L. The right Y-carriage 16R, the left Y-carriage 16L, and the X-guide 18 constitute a gantry frame 26. The gantry frame 26 is configured to be movable in the Y-axis direction.

[0039] The X-guide 18 has a sliding surface formed along the X-axis direction on which the X-carriage 20 slides. The X-carriage 20 is equipped with an air bearing at a position opposite to the sliding surface of the X-guide 18. The X-carriage 20 is supported so as to be movable in the X-axis direction using the X-guide 18. Note that the air bearing provided at the position opposite to the sliding surface of the X-guide 18 is not shown in the illustration.

[0040] The Z carriage 22 is supported so as to be movable along the Z-axis direction using the X carriage 20. The X carriage 20 is equipped with an air bearing that guides the Z carriage 22 in the Z-axis direction. Note that the illustration of the air bearing that guides the Z carriage 22 in the Z-axis direction is omitted.

[0041] The probe head 24 is attached to the lower end of the Z carriage 22. The probe head 24 includes a probe 24A. The probe 24A includes a slitus 24B and a contactor 24C. The probe head 24 may be fitted with a five-axis simultaneous control probe head equipped with a stepless positioning mechanism that can position the probe 24A steplessly.

[0042] The three-dimensional measuring machine 10 comprises an X drive unit, a Y drive unit, and a Z drive unit. The X drive unit moves the X carriage 20 along the X axis direction. The Y drive unit moves the gantry frame 26 along the Y axis direction. The Z drive unit moves the Z carriage 22 along the Z axis direction.

[0043] The three-dimensional measuring machine 10 can move the probe head 24 to any position in the mutually orthogonal X-axis, Y-axis, and Z-axis directions by appropriately operating the X-drive unit, Y-drive unit, and Z-drive unit. Note that the X-drive unit, Y-drive unit, and Z-drive unit are not shown in Figure 1. The X-drive unit, Y-drive unit, and Z-drive unit are shown as drive unit 28 in Figure 2.

[0044] The three-dimensional measuring machine 10 includes a first rotation drive unit that rotates the probe 24A around a first rotation axis and a second rotation drive unit that rotates the probe 24A around a second rotation axis perpendicular to the first rotation axis. The first and second rotation drive units can rotate the position of the probe 24A arbitrarily. Note that the first and second rotation drive units are not shown in Figure 1. The first and second rotation drive units are shown as drive units 28 in Figure 2.

[0045] The X-guide 18 is equipped with a linear scale for detecting the position in the X-axis direction. The X-carriage 20 is equipped with an X-axis direction position detection head. The X-axis direction position detection head reads the value of the linear scale for detecting the X-axis direction and outputs an X-axis direction position detection signal.

[0046] Table 14 is equipped with a linear scale for Y-axis position detection on one end of the table in the X-axis direction. The right Y-carriage 16R is equipped with a Y-axis position detection head. The Y-axis position detection head reads the value of the linear scale for Y-axis position detection and outputs a Y-axis position detection signal.

[0047] The Z carriage 22 is equipped with a linear scale for detecting the Z-axis position. The X carriage 20 is equipped with a Z-axis position detection head. The Z-axis position detection head reads the value of the linear scale for detecting the Z-axis position and outputs a Z-axis position detection signal.

[0048] The probe head 24 is equipped with an encoder for detecting the rotation angle of the probe 24A. The rotation angle of the probe 24A can be determined by applying the rotation angle θ1 in the first rotation direction when rotating around a first rotation axis parallel to the X-axis direction, and the rotation angle θ2 in the second rotation direction when rotating around a second rotation axis parallel to the Z-axis direction.

[0049] The probe head 24 is equipped with a contact sensor that detects contact between the probe 24A and the workpiece. The contact sensor outputs a contact detection signal. That is, when the three-dimensional measuring machine 10 detects contact between the contact element 24C and any measurement point on the workpiece, it acquires position detection signals in the X-axis, Y-axis, and Z-axis directions, and also acquires rotation angle detection signals in the first and second rotation directions, and can derive the coordinate values ​​of the contact element 24C.

[0050] The three-dimensional measuring machine 10 includes a controller 30 and a computer 40. The controller 30 and the computer 40 function as the measurement control unit of the three-dimensional measuring machine 10. The controller 30 transmits control signals to the X drive unit, Y drive unit, Z drive unit, first rotation drive unit and second rotation drive unit to control the position and orientation of the probe 24A.

[0051] The controller 30 includes a controller operation unit 32 equipped with a joystick and operation buttons. The controller operation unit 32 is operated when manually operating the probe head 24.

[0052] The controller 30 is equipped with a communication interface. The controller 30 is electrically connected to various position detection heads and contact sensors via the communication interface. The controller 30 acquires various detection signals output by the various position detection heads and contact sensors.

[0053] The controller 30 is connected to the computer 40 via a communication interface. The communication protocol between the controller 30 and the computer 40 can be TCP / IP. TCP is an abbreviation for Transmission Control Protocol, and IP is an abbreviation for Internet Protocol.

[0054] Computer 40 includes a computer-readable medium 82 in which software 81 containing instructions corresponding to various functions of the three-dimensional measuring machine 10 is stored. Computer 40 also includes a processor 83 that executes the various instructions of the software 81. The processor 83 executes the various instructions of the software 81 stored in the computer-readable medium 82, which is a non-temporary, tangible object, to realize the various functions of the three-dimensional measuring machine 10. Note that software is synonymous with program. Hereafter, software will be referred to as a program.

[0055] The computer 40 acquires measurement data, analyzes the acquired measurement data, and outputs the analysis results. The analysis results may be displayed on the display device 50 or printed on paper using a printing device.

[0056] The computer 40 generates a measurement program to be executed during automatic measurement by the three-dimensional measuring machine 10. A measurement program is generated for each type of workpiece and other identification information, associated with the identification information, and stored in the computer-readable medium 82.

[0057] The processor 83 executes various instructions contained in the measurement program from the computer-readable medium 82 to perform automatic measurement of the three-dimensional measuring machine 10. Details of the generation of the measurement program will be described later.

[0058] The three-dimensional measuring machine 10 includes a display device 50 and an input device 52. The display device 50 displays various information from the three-dimensional measuring machine 10 based on display signals transmitted from the computer 40.

[0059] The input device 52 includes a keyboard and a mouse, etc. The input device 52 transmits signals representing various types of information entered by the user to the computer 40. The computer 40 performs various processes based on the signals transmitted from the input device 52. The display device 50 may be configured as an integral part of the operation unit using a touch panel system.

[0060] [Electrical configuration of a three-dimensional measuring machine] Figure 2 is a functional block diagram showing the electrical configuration applied to the three-dimensional measuring machine shown in Figure 1. The computer 40 includes a drive control unit 60. When automatic measurement of a workpiece is performed, the drive control unit 60 transmits a command signal to the controller 30.

[0061] The controller 30 controls the drive unit 28 based on command signals transmitted from the computer 40 to operate the carriage 29 and rotate the probe head 24, thereby performing automatic measurement.

[0062] When manual measurement of the workpiece is performed, the controller 30 controls the drive unit 28 in response to the operation of the controller operation unit 32 to operate the carriage 29 and rotate the probe head 24.

[0063] The drive unit 28 shown in Figure 2 includes the X drive unit, Y drive unit, Z drive unit, first rotational drive unit, and second rotational drive unit. The carriage 29 includes the X carriage 20, right Y carriage 16R, left Y carriage 16L, and Z carriage 22 shown in Figure 1.

[0064] The computer 40 includes a mode setting unit 62. The mode setting unit 62 sets the operating mode of the three-dimensional measuring machine 10. The operating modes of the three-dimensional measuring machine 10 include automatic measurement mode, manual measurement mode, and teaching mode.

[0065] The automatic measurement mode is the operating mode set when a measurement program is executed to perform automatic measurement of the workpiece. The manual measurement mode is the operating mode set when an operator moves the probe head 24 by operating the controller operation unit 32 to measure the workpiece.

[0066] The mode setting unit 62 acquires mode setting information representing the setting of the operating mode and sets the operating mode of the three-dimensional measuring machine 10 according to the mode setting information. The computer 40 may display the set operating mode on the display device 50.

[0067] The computer 40 includes a probing signal acquisition unit 64. The probing signal acquisition unit 64 acquires a probing signal from the probe head 24, which represents the coordinate values ​​of the contactor 24C that is in contact with the measurement point of the workpiece, as measurement data of the workpiece. The measurement point of the workpiece may be called a probing point or the like.

[0068] The probing signal acquisition unit 64 acquires a probing signal representing the coordinate values ​​of the contactor 24C that has been brought into contact with a predetermined measurement point on the workpiece, when the three-dimensional measuring machine 10 is set to automatic measurement mode.

[0069] The probing signal acquisition unit 64 acquires probing signals representing the coordinate values ​​of user-defined measurement points when the three-dimensional measuring machine 10 is set to manual measurement mode. The user can define measurement points by operating the controller operation unit 32.

[0070] The coordinate values ​​of the contactor 24C at the measurement point, acquired via the probing signal acquisition unit 64, are associated with the measurement point identification information and stored. The measurement point identification information may include a sequential number assigned to multiple measurement points, the part name of the measurement point on the object being measured, etc. The measurement point identification information may also include a combination of multiple pieces of information.

[0071] The computer 40 includes a heatmap acquisition unit 66. The heatmap acquisition unit 66 acquires a heatmap, which is a false signal probability distribution representing the distribution of past false signal probabilities in the measurable area of ​​the three-dimensional measuring machine 10. The acquisition of the heatmap includes reading a pre-stored heatmap and generating a heatmap.

[0072] Furthermore, the heatmap acquisition unit 66 updates the heatmap based on the probing signals identified as false signals. In other words, the heatmap acquisition unit 66 functions as a heatmap update unit that updates the heatmap according to the actual operating conditions of the three-dimensional measuring machine 10. Details of the heatmap will be described later. The heatmap acquisition unit 66 described in this embodiment is an example of a false signal probability distribution acquisition unit.

[0073] The computer 40 includes a mask processing unit 67. The mask processing unit 67 performs mask processing on new probing signals. The mask processing unit 67 applies an acceptance probability based on the false signal probability for each unit area defined in the heatmap to determine whether or not to accept the new probing signal for each unit area as measurement data.

[0074] A false signal refers to a probing signal obtained when the contactor 24C cannot be properly made contact with the specified measurement point on the workpiece. False probing signals are not accepted as measurement data.

[0075] On the other hand, a probing signal obtained when the contactor 24C is correctly brought into contact with a specified measurement point on the workpiece is processed as a normal signal. This normal signal is then used as measurement data.

[0076] The computer 40 includes an analysis unit 68. The analysis unit 68 analyzes the probing signals for each measurement point adopted as measurement data for the workpiece and outputs the analysis results as the measurement results for the workpiece.

[0077] The computer 40 includes an input signal acquisition unit 70. The input signal acquisition unit 70 acquires signals representing input information transmitted from the input device 52. The computer 40 performs various controls based on the input information.

[0078] The computer 40 includes a display control unit 72. The display control unit 72 transmits display signals to the display device 50. Based on the display signals transmitted from the display control unit 72, the display device 50 displays various information from the three-dimensional measuring machine 10.

[0079] Various control units, such as the drive control unit 60, are configured using a processor such as a CPU (Central Processing Unit). Each control unit may be configured with a single processor or multiple processors. Furthermore, multiple control units may be configured using a single processor. The multiple processors may be of the same type or of different types.

[0080] The system comprises a computer 40 and a computer-readable medium 82. The computer-readable medium 82 may include a main memory 82A and an auxiliary storage 82B. The computer-readable medium 82 may be a semiconductor memory, a hard disk drive, a solid-state drive, etc. The computer-readable medium 82 may be a combination of multiple devices.

[0081] The computer-readable medium 82 stores various software 81, a heat map 86, and measurement data 88. Specifically, the computer-readable medium 82 includes areas for storing various software 81, areas for storing the heat map 86, and areas for storing the measurement data 88. The computer-readable medium 82 may also include areas for storing various parameters.

[0082] [Example configuration of the heatmap acquisition unit] Figure 3 is a functional block diagram showing an example configuration of the heatmap acquisition unit shown in Figure 2. The heatmap acquisition unit 66 includes a 3D array definition unit 100, a false signal count measurement unit 102, and a false signal probability calculation unit 104.

[0083] The 3D array definition unit 100 defines a 3D array in which the measurable area of ​​the 3D measuring machine 10 is divided into multiple unit areas. The 3D array set for the measurable area is defined according to the measurement conditions, such as for each operator and each workpiece to be measured, and is stored in association with the measurement conditions. The 3D array is shown in Figure 6, etc., using reference numeral 200. The unit area of ​​the 3D array is shown in Figure 6, etc., using reference numeral 202.

[0084] When measuring a workpiece, the probing signal representing a measurement point deleted by the user is defined as a false signal representing a false signal point. The false signal count measurement unit 102 measures the number of false signals for each unit area. The false signal count measurement unit 102 stores the number of false signals for each unit area in association with the unit area.

[0085] The false signal probability calculation unit 104 calculates the false signal probability for each unit area using the number of false signals for each unit area. The number of false signals is the number of times a probing signal was processed as a false signal. The false signal probability is calculated as the ratio of the number of false signals in each unit area to the total number of false signals in the entire measurable area.

[0086] The false signal probability calculation unit 104 generates a heat map 86 that represents the distribution of false signal probabilities in the measurable area. It also updates the heat map 86 in response to the occurrence of false signals during work measurement. For example, the false signal probability calculation unit 104 may update the heat map 86 each time a false signal occurs. The heat map acquisition unit 66 described in this embodiment is an example of a false signal probability distribution update unit that updates the false signal probability distribution, and an example of a false signal probability distribution generation unit that generates the false signal probability distribution.

[0087] The heatmap acquisition unit 66 stores the generated heatmap 86 in memory 82A. Furthermore, if the heatmap 86 is updated, the heatmap acquisition unit 66 appropriately stores the updated heatmap 86 in memory 82A.

[0088] The heatmap acquisition unit 66 may also be configured to include a heatmap reading unit that reads a heatmap 86 previously stored in memory 82A. Note that the illustration of the heatmap reading unit is omitted.

[0089] [Example of mask processing configuration] Figure 4 is a functional block diagram showing an example configuration of the mask processing unit shown in Figure 2. The mask processing unit 67 includes an acceptance / rejection unit 122 and an error signal data storage unit 124.

[0090] The acceptance / rejection unit 122 reads the heatmap 86 from the memory 82A and uses the heatmap 86 to determine whether the probing signal acquired via the probing signal acquisition unit 64 is a normal signal or a false signal. The acceptance / rejection unit 122 stores the probing signal determined to be a normal signal in the memory 82A as measurement data 88. The probing signal stored as measurement data is applied to the analysis of the measurement data in the analysis unit 68 shown in Figure 2. On the other hand, the acceptance / rejection unit 122 stores the probing signal determined to be a false signal in the false signal data storage unit 124 as false signal data 89.

[0091] The erroneous signal data storage unit 124 stores probing signals that have been identified as erroneous signals by the acceptance / rejection unit 122 as erroneous signal data 89. The erroneous signal data 89 is used to update the heatmap 86. The erroneous signal data storage unit 124 shown in Figure 4 may be configured as part of the memory 82A.

[0092] The mask processing unit 67 may reset the heatmap 86 when the measurement conditions change, such as when the workpiece to be measured is changed or when the operator changes, and acquire a new heatmap 86 according to the measurement conditions. When resetting the heatmap 86, processes such as erasing the number of false signals and erasing the probability of false signals may be performed.

[0093] The acceptance / rejection unit 122 described in the embodiment is an example of a first discrimination unit. Furthermore, the acceptance / rejection unit 122 described in the embodiment is an example of a discrimination result processing unit.

[0094] [Concept of a three-dimensional measuring machine] Figure 5 is an explanatory diagram of the concept of a three-dimensional measuring machine according to an embodiment. Figure 5 shows a new probing signal S representing a new probing point. P A schematic diagram illustrates the masking process for this.

[0095] The three-dimensional measuring machine 10 generates a heatmap 86 representing the distribution of false signal probabilities for the measurable region 11, which is the measurement space of the workpiece, and a new probing signal S P Masking process P M This will be implemented.

[0096] Masking process P M Now, the input probing signal S P However, the normal signal S N is or is a false signal S E This determines whether or not it is the case. For illustrative purposes, the heatmap 86 shown in Figure 5 omits the illustration of one dimension out of the three dimensions and is illustrated as a two-dimensional map.

[0097] [Detailed explanation of the heatmap] [Division of the measurable area] Figure 6 is a schematic diagram of the division of the measurable region. Figure 6 schematically illustrates a three-dimensional array 200 applied to the measurable region 11, which is divided into multiple unit regions 202.

[0098] The unit area 202 is defined by mesh-dividing the measurable area 11 by applying a certain interval. For example, the length of each side of the unit area 202 may be 1 millimeter. The certain interval may be appropriately defined according to the measurement conditions of the workpiece, such as for each workpiece or for each operator when there are multiple operators.

[0099] 〔Definition of 3D array〕 FIG. 7 is a schematic diagram of the definition of a 3D array. Hereinafter, for the convenience of illustration, the 3D array 200 applied to the measurable area 11 illustrates a 2D represented by using X and Y among the three dimensions. Note that the length of the unit area 202 in each direction is set to 1. Numerical values such as 1 representing the length of the unit area 202 shown in FIG. 7 are normalized numerical values.

[0100] Any unit area 202 shown in FIG. 7 is defined by using the coordinate values applied to the measurable area 11. Let each of i, j, and k be a positive integer, and any unit area 202 is defined as (i, j, k). For i corresponding to the X coordinate, when 0 < X ≤ 1, i = 1, and when 1 < X ≤ 2, i = 2. Let the maximum value of X be X max Then, max when -1 < X ≤ X max , i = X max . However, when X = 0, i = 1.

[0101] For j corresponding to the Y coordinate and k corresponding to the Z coordinate, they are defined in the same manner as i corresponding to the X coordinate. When 0 < Y ≤ 1, j = 1, and when 1 < Y ≤ 2, j = 2. Let the maximum value of Y be Y max Then, max when -1 < Y ≤ Y max , j = Y max . However, when Y = 0, j = 1.

[0102] Also, when 0 < Z ≤ 1, k = 1, and when 1 < Z ≤ 2, k = 2. Let the maximum value of Z be Z max Then, max when -1 < Z ≤ Z max , k = Z max . However, when Z = 0, k = 1.

[0103] For example, the unit area 202A where the distances from the origin (0, 0, 0) in the X, Y, and Z directions are 0 or more and 1 or less is represented by (1, 1, 1).

[0104] Similarly, the unit area 202B where the distance from the origin (0, 0, 0) in the X direction exceeds 3 and is 4 or less, and the distances from the origin (0, 0, 0) in the Y and Z directions are 1 or less is represented by (4, 1, 1).

[0105] That is, the unit area 202A is defined as an area where the coordinate values (X, Y, Z) satisfy 0 ≤ X ≤ 1, 0 ≤ Y ≤ 1, and 0 ≤ Z ≤ 1. Also, the unit area 202B is defined as an area where the coordinate values (X, Y, Z) satisfy 3 < X ≤ 4, 0 ≤ Y ≤ 1, and 0 ≤ Z ≤ 1.

[0106] [Storage array of error signal counts] FIG. 8 is a schematic diagram of the storage array of error signal counts. The storage array of error signal counts 204 shown in the figure is applied to the three-dimensional array 200 divided into a plurality of unit areas 202 shown in FIG. 7. The storage array of error signal counts 204 shown in FIG. 8 illustrates two dimensions represented by X and Y in three dimensions, similar to the three-dimensional array 200 shown in FIG. 7.

[0107] The storage array of error signal counts 204 stores the error signal counts for each unit area 206 for each unit area 206. The numerical values assigned to each unit area 206 shown in FIG. 8 show examples of the error signal counts for each unit area 206. Note that the error signal counts shown in FIG. 8 are arbitrary numerical values. Here, the term "storage" is synonymous with terms such as memory and storage for storing data.

[0108] The unit area 206 constituting the storage array of error signal counts 204 is defined in the same way as the unit area 202 constituting the three-dimensional array 200 shown in FIG. 7. That is, taking each of i, j, and k as a positive integer, any unit area 206 is defined as (i, j, k). The error signal count stored in any unit area 206 is a (i,j,k)If defined as such, then for example, the number of erroneous signals a in the unit region 206C represented as (3,3,1) shown in Figure 8. (3,3,1) is, a (3,3,1) = 5

[0109] [Update on the number of false signals] Figure 9 is a schematic diagram of the update of the false signal count. The false signal count storage array 204A shown in Figure 9 contains the false signal count a for each unit area 206. (i,j,k) The data is stored there. Measurements are performed using the heatmap 86 shown in Figure 5, and when a measurement point is deleted, the unit region 206 corresponding to the deleted measurement point is identified from the coordinate values ​​(X, Y, Z) of the deleted measurement point.

[0110] For example, if the coordinates (X,Y,Z) of the deleted measurement point are (3.0,2.9,0.5), then the unit region 206C, represented as (3,3,1), is identified as the unit region 206 corresponding to the deleted measurement point.

[0111] In the unit region 206C, the number of false signals a (3,3,1) as a (3,3,1) =5 is stored, and with the deletion of the measurement points (3.0, 3.9, 0.5), the number of erroneous signals a in the unit region 206C is calculated. (3,3,1) =5 is increased by 1, and the number of false signals a is added to the unit region 206C. (3,3,1) =6 is stored. In this way, the false signal count storage array 204A is updated and the false signal count storage array 204B is generated. The false signal count storage array 204B contains the false signal count a of the updated unit region 206C. (3,3,1) Only the number of erroneous signals a stored in the other unit region 206 is shown in the diagram. (i,j,k) The illustration is omitted.

[0112] [Generating a heatmap] Figure 10 is a schematic diagram of the heatmap. For the sake of explanation, each unit region 210 that makes up the heatmap 86 contains the number of erroneous signals a stored in the unit region 206 of the erroneous signal count storage array 204 that corresponds to the unit region 210. (i,j,k) This is illustrated in the diagram.

[0113] Each of the unit regions 210 that make up the heatmap 86 is defined in the same way as each of the unit regions 206 that make up the false signal count storage array 204. That is, any unit region 210 of the heatmap 86 is defined as (i,j,k), where i, j, and k are each positive integers.

[0114] For example, the position in the measurable region 11 of the unit region 210 of the heatmap 86, represented as (1,2,3), coincides with the position in the measurable region 11 of the unit region 206 of the erroneous signal count storage array 204, also represented as (1,2,3).

[0115] The number of erroneous signals a corresponding to each unit region 210 (i,j,k) and the number of erroneous signals a in all unit regions 210 (i,j,k) Total number Σa (i,j,k) Using this, the false signal probability for each unit region 210 is a (i,j,k) / Σa (i,j,k) It is expressed as follows.

[0116] In Figure 10, the degree of false signal probability for each unit region 210 is represented by the application of varying hatching density. Relatively dark hatching represents a relatively high false signal probability, while relatively light hatching represents a relatively low false signal probability.

[0117] The heatmap 86 shows the number of false signals a for each unit region 206 that constitutes the false signal count storage array 204. (i,j,k) It is updated each time it is updated. That is, the number of false signals a per unit area of ​​206 (i,j,k) Each time the data is updated, the false signal probability for each unit region 210 that makes up the heatmap 86 is updated.

[0118] [Specific examples of masking] Figure 11 is a schematic diagram of the masking process. The new probing signal is the probing signal S. P1 If obtained, the probing signal S P1 From the coordinate values ​​of the measurement point, a unit region 210A, represented as (1,1,1), is identified.

[0119] Number of erroneous signals a corresponding to unit region 210A (1,1,1) is, a (1,1,1) =0 Yes, the probability of a false signal in the unit region 210A {a (1,1,1) / Σa (i,j,k)} × 100 is equal to 0 / (0+0+0+1+0+0+1+2+2+0+…)=0.

[0120] Furthermore, the probability of a normal signal in the unit region 210A is (1-0) × 100 = 100 percent, and the probing signal S P1 This is a normal signal S with 100 percent probability. N It is identified as such and adopted as measurement data.

[0121] The denominator in the formula representing the false signal probability is the total number of false signals Σa in all unit regions 210 of the heatmap 86. (i,j,k) Therefore, in the heatmap 86 shown in Figure 11, Σa (i,j,k) = 36

[0122] Figure 12 shows the unit domain probing signal S, represented as (1,1,1). P This is an explanatory diagram of the masking process when the following is obtained. The probing signal S of the unit region 210A is represented as (1,1,1). P If obtained, the result of masking is a 100 percent probing signal S P S is a normal signal. N It is identified as such and adopted as measurement data. On the other hand, the probing signal S in the unit domain 210A P If this is obtained, the probing signal S is identified as a false signal and deleted. P There isn't one.

[0123] Returning to Figure 11, we have a new probing signal: probing signal S. P2 If obtained, the probing signal S P2 From the coordinate values ​​of the measurement point, a unit region 210B, represented as (3,3,1), is identified.

[0124] Number of erroneous signals a corresponding to unit region 210B(3,3,1) is, a (3,3,1) =6, and the false signal probability {a} in the unit region 210B. (3,3,1) / Σa (i,j,k)} × 100 is 6 / (0+0+0+1+0+0+1+2+2+0+…) = 16.7 percent. Also, the probability of a normal signal in the unit region 210B is (1-0.167) × 100 = 83.3 percent.

[0125] Figure 13 shows the probing signal S in the unit region 210B, represented as (3,3,1). P This is an explanatory diagram of the masking process when the following is obtained. When a probing signal of unit region 210B, represented as (3,3,1), is obtained, the result of the masking process is 83.3 percent of the probing signal S P S is a normal signal. N It is identified as such and adopted as measurement data. On the other hand, the 16.7 percent probing signal S P However, it is identified as a false signal and deleted.

[0126] [Data processing method according to the first embodiment] Figure 14 is a flowchart showing the procedure of the data processing method according to the first embodiment. In the heatmap acquisition step S10, the heatmap acquisition unit 66 shown in Figure 2 acquires the heatmap 86.

[0127] In the heatmap acquisition process S10, the heatmap acquisition unit 66 may read a heatmap 86 from among a plurality of heatmaps 86 stored in the memory 82A according to the measurement conditions, etc., and set the heatmap 86 to be applied to the masking process of the mask processing unit 67.

[0128] If the measurement conditions are changed, in the heatmap acquisition step S10, the already set heatmap may be reset, and a new heatmap 86 may be acquired and set according to the measurement conditions. After the heatmap acquisition step S10, the process proceeds to the probing signal acquisition step S12. Note that the heatmap acquisition step S10 described in this embodiment is an example of a false signal probability distribution acquisition step.

[0129] In the probing signal acquisition process S12, the probing signal acquisition unit 64 acquires a probing signal S for each measurement point of the workpiece. P The signal is obtained. After the probing signal acquisition process S12, the process proceeds to the masking process S14.

[0130] In the masking process S14, the masking unit 67 uses a pre-set heatmap 86 to process the probing signal S P Each normal signal S N is either or a false signal S E Determine whether it is true or false.

[0131] In other words, in the masking process S14, the masking unit 67 receives the acquired probing signal S P The system determines whether to accept or delete the data as measurement data. The masking process S14 shown in Figure 14 is the same as the masking process P shown in Figure 5. M It corresponds to.

[0132] In the masking process S14, the masking unit 67 processes the probing signal S to be processed. P is a false signal S E If it is determined that this is the case, the result is No. If the result is No, the process proceeds to the erroneous signal processing step S16. Note that the masking process S14 described in the embodiment is an example of the first determination step.

[0133] In the false signal processing step S16, the mask processing unit 67 processes the false signal S E Probing signal S identified as P False signal processing is performed on the false signal S. E Probing signal S identified as P Based on the coordinate values ​​of the measurement point, the number of false signals a (i,j,k) The unit region 206 to be updated is identified, and the number of erroneous signals a (i,j,k) It will be updated.

[0134] Also, the number of false signals a (i,j,k) With the update, heatmap 86 will be updated. False signal count a (i,j,k) After the update, the incorrect signal SE This is deleted. After the erroneous signal processing step S16, the process proceeds to the measurement completion determination step S20.

[0135] On the other hand, in the masking process S14, the masking unit 67 processes the probing signal S to be processed. P This is a normal signal S N If it is determined that this is the case, the result is Yes. If the result is Yes, the process proceeds to the normal signal processing step S18.

[0136] In the normal signal processing step S18, the mask processing unit 67 processes the normal signal S N The coordinate values ​​of the measurement points of the probing signal that has been determined to be a normal signal are stored as measurement data. After the normal signal processing step S18, the process proceeds to the measurement completion determination step S20. Note that the erroneous signal processing step S16 and the normal signal processing step S18 described in this embodiment are examples of determination result processing steps.

[0137] In the measurement completion determination step S20, the computer 40 determines whether or not to terminate the measurement. The computer 40 may determine to terminate the measurement if the specified measurement termination conditions are met. Examples of the specified measurement termination conditions include when all measurement data for the specified measurement points has been acquired and when an input signal indicating the end of measurement has been acquired.

[0138] In the measurement completion determination step S20, if the computer 40 determines that measurement should continue, it will be determined as No. If the determination is No, the process proceeds to the probing signal acquisition step S12, and each step from the probing signal acquisition step S12 to the measurement completion determination step S20 is repeatedly executed until the measurement completion determination step S20 is determined as Yes.

[0139] On the other hand, in the measurement completion determination step S20, if the computer 40 determines that the measurement should be completed, it will be determined as Yes. If the determination is Yes, the prescribed termination process is performed, and the procedure of the data processing method is completed.

[0140] [Examples of application to data processing equipment] The computer 40 included in the three-dimensional measuring machine 10 according to the first embodiment acquires the probing signal S as measurement data from the three-dimensional measuring machine 10 P and functions as a data processing device that determines whether the probing signal S P is a normal signal S N or an error signal S E .

[0141] That is, the data processing device that performs the discrimination process of the probing signal S P acquired from the three-dimensional measuring machine 10 may include, as components, a probing signal acquisition unit 64, a heat map acquisition unit 66, a mask processing unit 67, a memory 82A, etc. shown in FIG. 2

[0142] [Example of application to a program] It is a program that causes a computer to realize the functions of the probing signal acquisition unit 64, the heat map acquisition unit 66, and the mask processing unit 67, and may constitute a program that realizes the functions of each step shown in FIG. 14

[0143] The computer executes various instructions included in the above program to realize a heat map acquisition function for acquiring a heat map 86, a probing signal acquisition function for acquiring a probing signal, a mask processing function for discriminating the probing signal S P using the heat map, and a discrimination result processing function for performing processing on the normal signal S N and the error signal S E according to the discrimination result of the mask processing

[0144] Further, the computer may realize a heat map generation function for generating a heat map and a heat map update function for updating the heat map. Note that the heat map acquisition function described in the embodiment is an example of an error signal probability distribution acquisition function. The mask processing function described in the embodiment is an example of a first discrimination function

[0145] [Operational effects of the first embodiment] The three-dimensional measuring instrument and data processing method according to the first embodiment can obtain the following effects.

[0146] [1] Using the heat map 86 representing the distribution of the error signal probability in the measurable region 11, the newly input probing signal S P is determined whether it is a normal signal S N or an error signal S E . The probing signal S determined to be the error signal S E is not adopted as measurement data and is deleted. P

[0147] Thereby, the occurrence of the error signal S E is suppressed according to the occurrence situation of the past error signal S E in the measurable region 11. <>

[0148] [2] When the probing signal S determined to be the error signal S E is acquired, the heat map 86 is updated. Thereby, the discrimination process of the probing signal S P reflecting the occurrence situation of the latest error signal S ( E ) can be performed. P

[0149] [3] The heat map 86 is divided into a plurality of unit regions 210, and the error signal probability is stored for each unit region 210. Thereby, the discrimination process of the probing signal S P can be performed for each unit region 210.

[0150] [4] In the measurable region 11, an error signal count storage array 204 divided into a plurality of unit regions 206 is defined. The error signal count storage array 204 stores the number of occurrences of the error signal for each unit region 206. The unit region 206 in the error signal count storage array 204 is defined in the same manner as the unit region 210 in the heat map 86.

[0151] As a result, in accordance with the update of the number of false signals for each unit region 206 in the false signal count storage array 204, the false signal probability for each unit region 210 in the heatmap 86 is generated and updated.

[0152] [5] The heatmap 86 is generated according to measurement conditions such as the type of workpiece and the operator. This generates individual probing signals S for each measurement condition. P The determination process can be performed.

[0153] [Three-dimensional measuring machine according to the second embodiment] Figure 15 is a functional block diagram of the discrimination unit applied to the three-dimensional measuring machine according to the second embodiment. The three-dimensional measuring machine according to the second embodiment includes a mask processing unit 67A shown in Figure 15, instead of the mask processing unit 67 shown in Figure 4.

[0154] The mask processing unit 67A shown in the figure has a speed determination unit 130 and a speed threshold setting unit 132 added to the mask processing unit 67 shown in Figure 4. The speed determination unit 130 receives a probing signal S P A speed determination is performed to determine whether the probing speed at which the data is acquired is within the specified range.

[0155] The speed determination unit 130 determines that the probing signal S is outside the specified range when the probing speed is outside the specified range. P False signal S E It was determined to be a false signal S E Probing signal S identified as P This is stored as erroneous signal data 89 in the erroneous signal data storage unit 124.

[0156] On the other hand, the speed determination unit 130 determines that the probing speed is within a specified range when it receives the probing signal S. P Normal signal S N It was determined that this was a normal signal S N Probing signal S identified as P This is sent to the acceptance / rejection unit 122.

[0157] The speed threshold setting unit 132 sets a speed threshold to be applied to the probing speed determination performed using the speed determination unit 130. The speed threshold setting unit 132 may acquire a speed threshold according to the measurement conditions from among a plurality of speed thresholds stored in advance, or it may set a speed threshold according to user input. Note that the term speed may include the concept of speed expressed as the absolute value of speed.

[0158] The acceptance / rejection unit 122 determines that the probing signal S, which was determined to be within the specified range based on the probing speed determination result performed as a primary determination using the speed determination unit 130, is within the specified range. P For this, a masking process is performed as a secondary discrimination step.

[0159] The acceptance / rejection unit 122 receives a normal signal S from the speed determination unit 130. N Probing signal S identified as P A masking process is performed using the heatmap 86. The acceptance / rejection unit 122 detects the normal signal S N Probing signal S identified as P This is stored in memory 82A as measurement data 88.

[0160] The acceptance / rejection unit 122 detects the erroneous signal S E Probing signal S identified as P This is stored as erroneous signal data 89 in the erroneous signal data storage unit 124. Note that the acceptance / rejection determination unit 122 described in the embodiment is an example of a first determination unit. Also, the speed determination unit 130 described in the embodiment is an example of a second determination unit.

[0161] [Specific examples of discrimination processes] Figure 16 shows the unit domain probing signal S, represented as (1,1,1). P This is an explanatory diagram of the discrimination process when a signal S is obtained. In the discrimination process shown in Figure 16, a primary discrimination of the probing speed is added to the discrimination process shown in Figure 12, and in the primary discrimination, a normal signal S is obtained. N Probing signal S identified as P A secondary determination is performed regarding this.

[0162] Figure 17 shows the unit domain probing signal S, represented as (3,3,1). P This is an explanatory diagram of the discrimination process when a normal signal S is obtained. Similar to the discrimination process shown in Figure 16, the discrimination process shown in Figure 17 adds a first-order discrimination using probing speed to the discrimination process shown in Figure 13, and in the first-order discrimination, a normal signal S is obtained. N Probing signal S identified as P A secondary determination is performed regarding this.

[0163] [Data processing method according to the second embodiment] Figure 18 is a flowchart showing the procedure of the data processing method according to the second embodiment. The flowchart shown in Figure 18 is the same as the flowchart shown in Figure 14, but with the addition of a speed threshold setting step S11 and a speed determination step S13.

[0164] In the speed threshold setting step S11, the speed threshold setting unit 132 shown in Figure 15 sets the speed threshold to be applied in the speed determination step S13. The speed threshold setting step S11 may be performed before the heatmap acquisition step S10 is executed, or the heatmap acquisition step S10 and the speed threshold setting step S11 may be performed in parallel.

[0165] In the speed determination process S13, the speed determination unit 130 acquires the probing signal S in the probing signal acquisition process S12. P It is determined whether the probing speed at the time of acquisition is within the specified range.

[0166] In the speed determination step S13, if the speed determination unit 130 determines that the probing speed is outside the specified range, it will make a No determination. If the determination is No, the process proceeds to the erroneous signal processing step S16, and the probing signal S to be determined is processed. P is a false signal S E It will be processed as such.

[0167] On the other hand, in the speed determination step S13, if the speed determination unit 130 determines that the probing speed is within the specified range, it will make a Yes determination. If the determination is Yes, the process proceeds to the masking step S14, where the masking process is performed.

[0168] The erroneous signal processing step S16, the normal signal processing step S18, and the measurement completion determination step S20 are the same as the erroneous signal processing step S16, the normal signal processing step S18, and the measurement completion determination step S20 in the flowchart shown in Figure 14, and their explanation is omitted here. The mask processing step S14 described in the embodiment is an example of the first discrimination step, and the speed discrimination step S13 described in the embodiment is an example of the second discrimination step.

[0169] [Effects of the second embodiment] The three-dimensional measuring machine and data processing method according to the second embodiment can achieve the following effects.

[0170] [1] Probing signal S P To determine this, a threshold determination of the probing speed is performed. If the probing speed is within the specified range, a normal signal S is received. N It was determined to be a normal signal S N Probing signal S identified as P A masking process is performed on it.

[0171] This enables a unified and threshold-based discrimination using probing speed as an indicator, and past erroneous signals S E A masking process based on the occurrence of the error is applied, and this is used in conjunction with the determination of the error signal S, in accordance with the actual operation of the three-dimensional measuring machine. E This can suppress the occurrence of [unclear].

[0172] [2] By applying only the threshold discrimination of the probing speed, the probing signal S P When the determination is made, the probing signal S P The determination of anomalies depends on information about the probing speed. On the other hand, a masking process based on an index different from the threshold determination of the probing speed is used in conjunction. This results in a multifaceted probing signal S P It is possible to perform a determination.

[0173] [Example of user interface configuration] Figure 19 is an explanatory diagram showing an example of a mask processing settings screen. The mask processing settings screen 300 shown in this figure is displayed using the display device 50 shown in Figure 1. Various settings, such as measurement conditions, are made when measuring a workpiece.

[0174] The display device 50 shows a settings screen as a user interface for performing various settings. The mask processing settings screen 300 shown in Figure 19 is one of these settings screens.

[0175] The mask processing settings screen 300 displays various character information, such as the first character information 302 and the second character information 304. Figure 19 shows an example of the first character information 302, which indicates that this is a screen for setting mask processing. Also, Figure 19 shows an example of the second character information 304, which prompts the user to set the mask processing on or off.

[0176] The mask processing settings screen 300 displays various buttons, such as the first button 310, the second button 312, the third button 314, and the fourth button 316. Figure 19 shows an example of the first button 310, which commands the mask processing to be turned on, and an example of the second button 312, which commands the mask processing to be turned off.

[0177] Furthermore, Figure 19 illustrates an OK button as the third button 314, which commands confirmation of the mask processing settings, and a Cancel button as the fourth button 316, which commands cancellation of the mask processing settings.

[0178] The operator can open the settings screen of the software 81, display the mask processing settings screen 300 on the display device 50, and set whether or not to enable mask processing. The software 81 applies the settings and performs measurement of the workpiece.

[0179] Figure 20 is an explanatory diagram showing an example of a heatmap reset screen. The heatmap reset screen 320 shown in this figure is one of various settings screens and is displayed on the display device 50 when resetting the heatmap 86 shown in Figure 2.

[0180] The heatmap reset screen 320 displays various textual information, such as the third textual information 322, the fourth textual information 324, and the fifth textual information 326. Figure 20 shows an example of textual information as the third textual information 322, indicating that the heatmap 86 will be reset. It also shows an example of textual information as the fourth textual information 324, indicating that the statistical information will be reset. Furthermore, it shows an example of textual information as the fifth textual information 326, indicating that if the heatmap is reset, the original heatmap cannot be restored.

[0181] The heatmap reset screen 320 displays various buttons, such as the 5th button 330, the 6th button 332, and the 7th button 334. Figure 20 shows the 5th button 330 as an example, which is a back button that commands the user to return to the previous screen.

[0182] Furthermore, an OK button, which commands the reset of the heatmap, is provided as the sixth button 332, and a Cancel button, which commands the cancellation of the heatmap reset, is provided as the seventh button.

[0183] The operator can open the settings screen of the software 81, display the heatmap reset screen 320 on the display device 50, and instruct the software 81 to perform actions such as clearing the number of false signals and clearing the probability of false signals. The software 81 can then perform actions such as clearing the number of false signals and clearing the probability of false signals.

[0184] As an example of a user interface applied to the three-dimensional measuring machine 10, Figure 19 shows the mask processing setting screen 300 and Figure 20 shows the heat map reset screen 320, but the normal signal S N Memory and false signals S E You may add screens or other elements to instruct users on how to save their memories, as needed.

[0185] The embodiments of the present invention described above can be modified, added to, or deleted as appropriate without departing from the spirit of the invention. The present invention is not limited to the embodiments described above, and many modifications are possible within the technical concept of the present invention by those with ordinary skill in the art. [Explanation of symbols]

[0186] 10...3D measuring machine, 40...Computer, 64...Probing signal acquisition unit, 66...Heatmap acquisition unit, 67...Mask processing unit, 67A...Mask processing unit, 81...Software, 82...Computer-readable medium, 86...Heatmap

Claims

1. A probing signal acquisition unit that acquires a probing signal representing contact of a probe to a probing point on an object to be measured by a three-dimensional measuring machine, A first determination unit determines whether the probing signal acquired by the probing signal acquisition unit is a normal signal or a false signal, using a false signal probability distribution that represents the distribution of false signal probabilities expressed as the number of false signals occurring in each of a plurality of unit regions defined in the measurement space with respect to the total number of false signals occurring in the measurement space of the three-dimensional measuring machine, The first discrimination unit performs a process to reject the probing signal that it has determined to be an erroneous signal as measurement data, and the discrimination result processing unit performs a process to adopt the probing signal that it has determined to be a normal signal as measurement data, Equipped with, The first discriminant unit is, From the measurement point of the probing signal, the unit region to which the probing signal belongs is identified, A data processing device that identifies a fraction of the erroneous signal probability in the identified unit region as an erroneous signal.

2. The data processing device according to claim 1, wherein the false signal probability distribution is stored for each unit region.

3. The data processing apparatus according to claim 1 or 2, further comprising a false signal probability distribution updating unit that updates the false signal probability distribution based on the probing signal determined to be a false signal in the first discrimination unit.

4. The data processing device according to claim 3, wherein the false signal probability distribution updating unit updates the number of occurrences of false signals for each unit region, and updates the false signal probability for each unit region based on the updated number of occurrences of false signals for each unit region.

5. The data processing device according to any one of claims 1 to 4, further comprising a false signal probability distribution generation unit for generating the false signal probability distribution.

6. With respect to the probing signal acquired using the aforementioned probing signal acquisition unit, a probing speed acquisition unit acquires the speed of the probe when probing the probing point of the object to be measured, A second determination unit determines whether the probing signal is a normal signal or an erroneous signal based on the probe speed acquired using the probing speed acquisition unit, A data processing device according to any one of claims 1 to 5, comprising:

7. The data processing device according to claim 6, wherein the second discrimination unit determines the probing signal to be a normal signal when the speed of the probe is within a specified range, and determines the probing signal to be an erroneous signal when the speed of the probe falls outside the specified range.

8. The data processing device according to claim 1, wherein the first discrimination unit determines whether the probing signal is a normal signal or a false signal using the false signal probability distribution which is set in advance.

9. The data processing device according to claim 1, further comprising a false signal probability distribution setting unit for setting the false signal probability distribution.

10. A probing signal acquisition step, which involves acquiring a probing signal representing contact between the probe of a three-dimensional measuring machine and a probing point on the object to be measured, A first determination step in which a probing signal acquired in the probing signal acquisition step is determined to be a normal signal or a false signal, using a false signal probability distribution that represents the distribution of false signal probabilities expressed as the number of false signals occurring in each of a plurality of unit regions defined in the measurement space with respect to the total number of false signals occurring in the measurement space of the three-dimensional measuring machine, A discrimination result processing step is performed which involves rejecting the probing signal identified as an erroneous signal in the first discrimination step as measurement data, and adopting the probing signal identified as a normal signal as measurement data. Includes, The first discrimination step is, From the measurement point where the probing signal was acquired, the unit region to which the probing signal belongs is identified. A data processing method for determining as false signals a fraction of the false signal probability in the identified unit region.

11. On the computer, A probing signal acquisition function that acquires a probing signal representing contact of the probe to the probing point on the object being measured by a three-dimensional measuring machine. A function for acquiring a false signal probability distribution, which represents the distribution of false signal probabilities expressed as the number of false signal occurrences for each of a plurality of unit regions defined in the measurement space of the three-dimensional measuring machine, with respect to the total number of false signal occurrences in the measurement space of the three-dimensional measuring machine. A first discrimination function that uses the aforementioned false signal probability distribution to determine whether the probing signal acquired using the probing signal acquisition function is a normal signal or a false signal, and A program that implements a discrimination result processing function, which performs a process to reject the probing signal that has been determined to be an erroneous signal using the first discrimination function, and to adopt the probing signal that has been determined to be a normal signal as measurement data, The first discriminative function is, From the measurement point where the probing signal was acquired, the unit region to which the probing signal belongs is identified. A program that identifies a fraction of the probability of a false signal in the identified unit region as a false signal.

12. A probe for measuring the object to be measured, A probing signal acquisition unit acquires a probing signal that represents contact of the probe with a probing point on the object to be measured, A first determination unit determines whether the probing signal acquired by the probing signal acquisition unit is a normal signal or a false signal, using a false signal probability distribution that represents the distribution of false signal probabilities expressed as the number of false signal occurrences for each of a plurality of unit regions defined in the measurement space with respect to the total number of false signal occurrences in the measurement space, The first discrimination unit performs a process to reject the probing signal that it has determined to be an erroneous signal as measurement data, and the discrimination result processing unit performs a process to adopt the probing signal that it has determined to be a normal signal as measurement data, Equipped with, The first discriminant unit is, From the measurement point where the probing signal was acquired, the unit region to which the probing signal belongs is identified. A three-dimensional measuring machine that identifies a fraction of the erroneous signal probability in the identified unit region as an erroneous signal.

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