Electrostatic chuck device and rotating body
The electrostatic chuck device facilitates sample rotation through a rotating mechanism with ionic fluid bearings and a magnet-coil configuration, addressing limitations in existing devices and expanding their use in semiconductor manufacturing.
JP2026084226APending Publication Date: 2026-05-21TOKYO ELECTRON LTD +1
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Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- TOKYO ELECTRON LTD
- Filing Date
- 2024-11-11
- Publication Date
- 2026-05-21
AI Technical Summary
Technical Problem
Existing electrostatic chuck devices are limited in their ability to rotate plate-like samples during semiconductor manufacturing processes, necessitating improvements for broader applications.
Method used
An electrostatic chuck device with a rotating mechanism, comprising a dielectric substrate, internal electrodes, and rotationally symmetric terminals, allows for the rotation of a plate-like sample in the circumferential direction, using ionic liquids for fluid bearings and a magnet-coil configuration for stable rotation.
Benefits of technology
Enables the rotation of held samples, enhancing the device's applicability to various semiconductor processes while maintaining stability and durability in plasma environments.
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Smart Images
Figure 2026084226000001_ABST
Abstract
To provide a novel electrostatic chuck device and a novel rotating body that enable rotation of a plate-shaped sample in the circumferential direction. [Solution] An electrostatic chuck device comprising an electrostatic chuck member, a rotating stage for holding the electrostatic chuck member, a rotating body rotatable in the circumferential direction of a central axis through which it passes, a base positioned in the axial direction of the central axis, and a rotating mechanism for rotating the rotating body in the circumferential direction of the central axis, wherein the electrostatic chuck member comprises a dielectric substrate, an internal electrode enclosed in the dielectric substrate, and terminals connected to the internal electrode, the base has a conductive portion that is in electrical contact with the internal electrode, the internal electrode comprises a first electrode and a second electrode, the terminal comprises one or more first terminals connected to the first electrode and one or more second terminals connected to the second electrode, the conductive portion comprises a first conductive portion that is connected to the first terminal via a first conductive liquid and a second conductive portion that is connected to the second terminal via a second conductive liquid, and the terminals are arranged rotationally symmetrically with respect to the central axis.
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