PCB processing apparatus and PCB processing method

Abstract

To prevent a decline in the quality of electronic devices. [Solution] The circuit board work apparatus includes a processor that sets a mounting angle by rotating a component by a predetermined angle in a first direction relative to a target angle; a mounting unit that mounts the component on the surface of the circuit board at the mounting angle; and a screw tightening unit that, while the component mounted on the surface of the circuit board is held by the mounting unit, rotates a screw in a second direction opposite to the first direction to tighten the screw onto the component from the back of the circuit board.

Description

Technical Field

[0001] The technology disclosed in this specification relates to a substrate working apparatus and a substrate working method.

Background Art

[0002] In the production process of electronic devices, a substrate working apparatus that tightens screws to components mounted on the surface of a substrate may be used. Patent Document 1 discloses a substrate assembly apparatus including a first robot that presses a component placed on the surface of a substrate and a second robot that tightens a screw to the component from the back surface of the substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] When tightening a screw to a component, due to the tightening torque of the screw, the component may deviate from the target angle. If the component is not fixed at the target angle, the quality of the electronic device may deteriorate.

[0005] The technology disclosed in this specification aims to suppress deterioration of the quality of electronic devices.

Means for Solving the Problems

[0006] This specification discloses a substrate working apparatus. The substrate working apparatus includes a processor that sets a mounting angle at which a component is rotated by a predetermined angle in a first direction with respect to a target angle, a mounting unit that mounts the component on the surface of the substrate at the mounting angle, and a screw tightening unit that rotates a screw in a second direction opposite to the first direction and tightens the screw to the component from the back surface of the substrate while the component mounted on the surface of the substrate is held by the mounting unit. [Effects of the Invention]

[0007] The technology disclosed herein helps to suppress the degradation of the quality of electronic devices. [Brief explanation of the drawing]

[0008] [Figure 1] Figure 1 is a perspective view showing a substrate processing apparatus according to an embodiment. [Figure 2] Figure 2 is a schematic diagram showing the mounting head according to the embodiment. [Figure 3] Figure 3 is a side view showing the nozzle and shaft according to the embodiment. [Figure 4] Figure 4 is a side view showing a nozzle according to an embodiment. [Figure 5] Figure 5 is a perspective view showing the internal structure of the nozzle according to the embodiment. [Figure 6] Figure 6 is a cross-sectional view showing a nozzle according to an embodiment. [Figure 7] Figure 7 is a cross-sectional view showing a nozzle according to an embodiment. [Figure 8] Figure 8 is a perspective view illustrating the installation position of the screw tightening unit according to the embodiment. [Figure 9] Figure 9 is a perspective view showing a screw tightening unit according to an embodiment. [Figure 10] Figure 10 is a top view showing a screw tightening unit according to an embodiment. [Figure 11] Figure 11 is a perspective view showing a work head according to an embodiment. [Figure 12] Figure 12 is a front view showing a work head according to an embodiment. [Figure 13] Figure 13 is a cross-sectional view showing a driver tool according to an embodiment. [Figure 14] Figure 14 is a diagram illustrating the function of the transfer unit according to the embodiment. [Figure 15] Figure 15 is a perspective view showing a screw feeding device and a screw delivery mechanism according to an embodiment. [Figure 16] FIG. 16 is a cross-sectional view of a main part showing a feeding mechanism according to an embodiment. [Figure 17] FIG. 17 is a block diagram showing a controller according to an embodiment. [Figure 18] FIG. 18 is a diagram for explaining the behavior of parts in a screwing operation. [Figure 19] FIG. 19 is a diagram for explaining the behavior of parts in a screwing operation. [Figure 20] FIG. 20 is a flowchart showing a method for setting operating conditions of a substrate working apparatus according to an embodiment. [Figure 21] FIG. 21 is a diagram for explaining a method for setting operating conditions of a substrate working apparatus according to an embodiment. [Figure 22] FIG. 22 is a diagram for explaining a method for setting operating conditions of a substrate working apparatus according to an embodiment. [Figure 23] FIG. 23 is a flowchart showing a substrate working method according to an embodiment. [Figure 24] FIG. 24 is a diagram for explaining a substrate working method according to an embodiment.

Embodiments of the Invention

[0009] Hereinafter, embodiments will be described with reference to the drawings. In the embodiments, an XYZ orthogonal coordinate system is set for the substrate working apparatus 100, and the positional relationships of each part will be described while referring to this XYZ orthogonal coordinate system. The direction parallel to the X-axis within a predetermined plane is defined as the X-axis direction. The direction parallel to the Y-axis orthogonal to the X-axis within the predetermined plane is defined as the Y-axis direction. The direction parallel to the Z-axis orthogonal to each of the X-axis and the Y-axis is defined as the Z-axis direction. The rotational direction or inclination direction centered on the X-axis is defined as the θX direction. The rotational direction or inclination direction centered on the Y-axis is defined as the θY direction. The rotational direction or inclination direction centered on the Z-axis is defined as the θZ direction. The plane including the X-axis and the Y-axis is defined as the XY plane. The plane including the Y-axis and the Z-axis is defined as the YZ plane. The plane including the Z-axis and the X-axis is defined as the ZX plane. The predetermined plane is the XY plane. The Z-axis is orthogonal to the predetermined plane. In the embodiments, the predetermined plane is parallel to the horizontal plane. The Z-axis direction is the vertical direction. Note that the predetermined plane may be inclined with respect to the horizontal plane.

[0010] [Substrate Working Apparatus] FIG. 1 is a perspective view showing a substrate working apparatus 100 according to an embodiment. As shown in FIG. 1, the substrate working apparatus 100 includes a base frame 114, a component supply apparatus 200 that supplies a component C, an installation portion 102 where the component supply apparatus 200 is installed, a substrate transfer apparatus 103 that transfers a substrate P to a working position PJb, a substrate holding apparatus 104 that holds the substrate P transferred to the working position PJb, a mounting unit 10 disposed above the substrate holding apparatus 104, a screw tightening unit 20 disposed below the substrate holding apparatus 104, a component recognition apparatus 111 that recognizes the component C, and a nozzle housing member 112 that houses a nozzle 30. The mounting unit 10 mounts the component C on the surface of the substrate P held by the substrate holding apparatus 104. The screw tightening unit 20 tightens a screw SC from the back surface of the substrate P to the component C mounted on the surface of the substrate P.

[0011] The component supply device 200 includes a feeder that sequentially supplies multiple components C. The installation section 102 includes a feeder bank on which the feeder is installed. The installation section 102, the substrate transport device 103, the mounting unit 10, the component recognition device 111, and the nozzle housing member 112 are each supported by a base frame 114. A component supply position PJa is defined for the component supply device 200. The component supply position PJa is the position where a component supply process is performed to supply components C from the component supply device 200 to the mounting unit 10.

[0012] The substrate transport device 103 transports the substrate P to the work position PJb. The work position PJb is the position where mounting operations, such as mounting components C onto the substrate P, and screw tightening operations, such as tightening screws SC onto components C, are performed. The substrate transport device 103 has a transport belt capable of transporting the substrate P. A pair of transport belts are provided in the Y-axis direction. One transport belt supports the +Y side end of the back surface of the substrate P. The other transport belt supports the -Y side end of the back surface of the substrate P. The transport belts include an endless belt. The substrate P is transported in the X-axis direction by rotating the transport belts while supporting the substrate P.

[0013] The substrate holding device 104 holds the edges of the substrate P in the transport path of the substrate transport device 103. The substrate holding device 104 holds the substrate P at the working position PJb. The position of the substrate P held by the substrate holding device 104 is fixed at the working position PJb. The substrate holding device 104 includes a clamping mechanism that grips the edges of the substrate P. The substrate holding device 104 grips and holds both ends of the substrate P in the Y-axis direction from above and below. The substrate holding device 104 holds the substrate P such that the front and back surfaces of the substrate P are parallel to the XY plane. The front surface of the substrate P is the surface facing upwards. The back surface of the substrate P is the surface facing downwards. The normal direction of the front surface of the substrate P is the Z-axis direction.

[0014] The mounting unit 10 includes a mounting head 106 including a nozzle 30, a mounting head moving device 107 that can move the mounting head 106, and a nozzle moving device 140 that can move the nozzle 30.

[0015] The mounting head 106 mounts components C onto the surface of a substrate P held by a substrate holder 104. The nozzle 30 holds the components C in a releaseable manner. The mounting head 106 is movable within the XY plane, which includes the component supply position PJa and the work position PJb. The mounting head 106 holds the components C supplied from the component supply device 200 with the nozzle 30 and mounts them onto the surface of the substrate P located at the work position PJb.

[0016] The mounting head moving device 107 moves the mounting head 106 above the substrate P, component supply device 200, component recognition device 111, and nozzle housing member 112, which are located at the work position PJb. The mounting head moving device 107 is capable of moving the mounting head 106 within the XY plane, which includes the component supply position PJa and the work position PJb.

[0017] The mounting head moving device 107 includes an X-axis guide rail 107a, a Y-axis guide rail 107b, an X-axis drive unit 109, and a Y-axis drive unit 110.

[0018] The mounting head 106 is supported by an X-axis guide rail 107a. The X-axis guide rail 107a guides the mounting head 106 in the X-axis direction. The X-drive unit 109 includes an actuator such as a motor. The X-drive unit 109 generates power to move the mounting head 106, which is supported by the X-axis guide rail 107a, in the X-axis direction. The operation of the X-drive unit 109 causes the mounting head 106 to move in the X-axis direction while being guided by the X-axis guide rail 107a.

[0019] The X-axis guide rail 107a is supported by the Y-axis guide rail 107b. The Y-axis guide rail 107b guides the X-axis guide rail 107a in the Y-axis direction. The Y-drive unit 110 includes an actuator such as a motor. The Y-drive unit 110 generates power to move the mounting head 106 in the Y-axis direction. The Y-drive unit 110 generates power to move the X-axis guide rail 107a, which is supported by the Y-axis guide rail 107b, in the Y-axis direction. Due to the operation of the Y-drive unit 110, the X-axis guide rail 107a moves in the Y-axis direction while being guided by the Y-axis guide rail 107b. As the X-axis guide rail 107a moves in the Y-axis direction, the mounting head 106 moves in the Y-axis direction.

[0020] The component recognition device 111 detects the three-dimensional shape of component C held in the nozzle 30. The component recognition device 111 detects the three-dimensional shape of component C held in the nozzle 30 based on the phase shift method. The component recognition device 111 includes an emission device that emits patterned light of light and dark, and an imaging device that images component C onto which the patterned light is projected. The component recognition device 111 calculates the three-dimensional shape of component C based on the image data of component C captured by the imaging device.

[0021] Component C mounted on substrate P is fixed to substrate P by screws SC. Component C has screw holes CH into which the screws SC are inserted. The 3D data showing the 3D shape of component C detected by component recognition device 111 includes 3D data of the screw holes CH of component C. Screws SC are inserted into the screw holes CH of component C mounted on the surface of substrate P by mounting unit 10 by screw tightening unit 20.

[0022] The nozzle housing member 112 houses multiple nozzles 30. The mounting head 106 is capable of replacing the nozzles 30. The mounting head 106 replaces the nozzles 30 in the nozzle housing member 112. The types of nozzles 30 housed in the nozzle housing member 112 are all different. The nozzles 30 are replaced according to the type of component C to be mounted on the substrate P. The nozzles 30 are mounted on the mounting head 106 according to the type of component C to be mounted on the substrate P. The type of nozzle 30 includes the shape and size of the nozzle 30. The type of component C includes the shape and size of the component C.

[0023] [Implemented Units] Figure 2 is a schematic diagram showing a mounting head 106 according to an embodiment. The mounting head 106 has a nozzle 30 that can releasely hold a component C. At the component supply position PJa, the nozzle 30 holds the component C supplied from the component supply device 200. After holding the component C at the component supply position PJa, the nozzle 30 transports it to the work position PJb and mounts it on the surface of the substrate P. At the work position PJb, after the component C is mounted on the substrate P and the screw SC is tightened onto the component C, the nozzle 30 releases the component C. As a result, the component C is fixed to the substrate P with the screw SC.

[0024] The mounting head 106 has a nozzle moving device 140 that can move the nozzle 30 in the Z-axis direction and the θZ direction. The nozzle 30 is movable in the Z-axis direction and the θZ direction relative to the mounting head 106. The nozzle moving device 140 includes a Z drive unit 150 that moves the nozzle 30 in the Z-axis direction and a θZ drive unit 160 that rotates the nozzle 30 in the θZ direction. The Z drive unit 150 includes an actuator such as a motor. The Z drive unit 150 generates power to move the nozzle 30 in the Z-axis direction. The θZ drive unit 160 includes an actuator such as a motor. The θZ drive unit 160 generates power to move (rotate) the nozzle 30 in the θZ direction.

[0025] The nozzle 30 can be moved in four directions: the X-axis direction, the Y-axis direction, the Z-axis direction, and the θZ direction, by the mounting head moving device 107 and the nozzle moving device 140. Alternatively, the nozzle 30 may be moved in six directions: the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction.

[0026] A camera 113 is provided on the mounting head 106. The camera 113 photographs the surface of the substrate P from above the substrate P. The camera 113 also photographs the components C mounted on the surface of the substrate P from above the components C.

[0027] Figure 3 is a side view showing the nozzle 30 and shaft 34 according to the embodiment. Figure 4 is a side view showing the nozzle 30 according to the embodiment. Figure 5 is a perspective view showing the internal structure of the nozzle 30 according to the embodiment. Figure 6 is a cross-sectional view showing the nozzle 30 according to the embodiment. Figure 7 is a cross-sectional view showing the nozzle 30 according to the embodiment. Figure 3 is a side view of the nozzle 30 and shaft 34 viewed from the -Y side. Figure 4 is a side view of the nozzle 30 viewed from the -X side. Figure 5 is a perspective view of the nozzle 30 viewed from the -X side. Figure 6 is a cross-sectional view of the nozzle 30 parallel to the YZ plane. Figure 7 is a cross-sectional view of the nozzle 30 parallel to the ZX plane.

[0028] In this embodiment, the nozzle 30 is a chuck nozzle that holds a part C by gripping it. The nozzle 30 is mounted on the lower end of the shaft 34. The shaft 34 extends in the Z-axis direction. The central axis of the shaft 34 is parallel to the Z-axis. The nozzle 30 is detachable from the shaft 34. The shaft 34 is movable in the Z-axis direction and the θZ direction. The Z drive unit 150 moves the shaft 34 in the Z-axis direction. The θZ drive unit 160 moves (rotates) the shaft 34 in the θZ direction. The nozzle moving device 140 moves the nozzle 30 in the Z-axis direction and the θZ direction by moving the shaft 34 in the Z-axis direction and the θZ direction.

[0029] The nozzle 30 has a nozzle body 31, an arm 32 connected to the nozzle body 31, and a connecting member 33 connected to the nozzle body 31. The nozzle 30 is attached to and detached from the shaft 34 via a coupling mechanism 35. As described above, multiple nozzles 30 are housed in the nozzle housing member 112. The nozzle 30 attached to the shaft 34 is replaced according to the type of component C mounted on the substrate P. The nozzle 30 is attached to the shaft 34 via the coupling mechanism 35 according to the type of component C mounted on the substrate P.

[0030] The nozzle body 31 has a block portion 31A and a rod portion 31B. The rod portion 31B protrudes upward from the upper surface of the block portion 31A. The block portion 31A and the rod portion 31B are fixed together by a fixing pin 31C.

[0031] A pair of arms 32 are provided. The pair of arms 32 hold part C between them. The arms 32 include a first arm 32A and a second arm 32B positioned on the +X side of the first arm 32A. The lower ends of the first arm 32A and the second arm 32B are positioned below the lower surface of the block portion 31A. The first arm 32A and the second arm 32B are movable toward and away from each other. The arms 32 are connected to the block portion 31A of the nozzle body 31 via a connecting member 321 and a coil spring 322.

[0032] The connecting members 321 are fixed to the arms 32 by screws 323. A pair of connecting members 321 are provided, corresponding to each of the pair of arms 32. The connecting members 321 include a first connecting member 321A fixed to the first arm 32A and a second connecting member 321B fixed to the second arm 32B.

[0033] The coil spring 322 is positioned between the block portion 31A and the connecting member 321. A pair of coil springs 322 are provided, corresponding to each of the pair of connecting members 321. The coil spring 322 includes a first coil spring 322A positioned between the block portion 31A and the first connecting member 321A, and a second coil spring 322B positioned between the block portion 31A and the second connecting member 321B.

[0034] A pair of sliders 324 are arranged in the block portion 31A. At least a portion of the slider 324 is arranged in the internal space of the block portion 31A. A sleeve 31F is arranged in the internal space of the block portion 31A. The slider 324 includes a flange portion 3241 that slides against the inner surface of the sleeve 31F and a rod portion 3242 that protrudes from the flange portion 3241. The slider 324 is fixed to the connecting member 321 by screws 325. A pair of sliders 324 are provided to correspond to each of the pair of connecting members 321. The slider 324 includes a first slider 324A fixed to the first connecting member 321A and a second slider 324B fixed to the second connecting member 321B. The first slider 324A and the second slider 324B are movable toward and away from each other. The first coil spring 322A and the second coil spring 322B generate elastic forces such that the first slider 324A and the second slider 324B are separated from each other.

[0035] A pair of guide members 326 are fixed to the block portion 31A. The guide members 326 guide the slider 324 in the X-axis direction. The guide members 326 have guide holes into which the rod portion 3242 of the slider 324 is inserted. The guide members 326 include a first guide member 326A that guides the first slider 324A and a second guide member 326B that guides the second slider 324B.

[0036] The connecting member 33 is connected to the rod portion 31B. As shown in Figures 6 and 7, the connecting member 33 is inserted into a recess 34C provided at the lower part of the shaft 34. The recess 34C is formed to be recessed upward from the lower surface of the shaft 34. The connecting member 33 is connected to the shaft 34. The connecting member 33 connects the nozzle body 31 and the shaft 34.

[0037] The connecting member 33 has a sleeve portion 33A and a flange portion 33B. The flange portion 33B is positioned in the middle of the sleeve portion 33A in the Z-axis direction. The flange portion 33B protrudes from the outer surface of the sleeve portion 33A to the outside of the sleeve portion 33A. The rod portion 31B is inserted inside the sleeve portion 33A.

[0038] The connecting member 33 movably supports the rod portion 31B. The connecting member 33 and the rod portion 31B can move relative to each other in the Z-axis direction. The rod portion 31B is movable in the Z-axis direction relative to the connecting member 33. A slide pin 31D is provided on the rod portion 31B. The slide pin 31D is fixed to the rod portion 31B. The slide pin 31D protrudes from the outer surface of the rod portion 31B to the outside of the rod portion 31B. A guide groove 33C is provided on the sleeve portion 33A. The guide groove 33C extends in the Z-axis direction. At least a portion of the slide pin 31D is positioned inside the guide groove 33C. The guide groove 33C guides the slide pin 31D in the Z-axis direction. The nozzle body 31 can move in the Z-axis direction relative to the connecting member 33 while being guided by the slide pin 31D. As the nozzle body 31 moves in the Z-axis direction relative to the connecting member 33, the lower surface of the sleeve portion 33A and the upper surface of the block portion 31A move closer to or further apart from each other.

[0039] The guide groove 33C defines the range of motion of the nozzle body 31 relative to the connecting member 33. When the slide pin 31D contacts the upper end of the guide groove 33C, the nozzle body 31 is positioned at the lower end of the range of motion. When the slide pin 31D contacts the lower end of the guide groove 33C, the nozzle body 31 is positioned at the upper end of the range of motion.

[0040] A coil spring 31E is positioned in a small-diameter section located at the top of the rod section 31B. The coil spring 31E is positioned around the small-diameter section at the top of the rod section 31B. The lower end of the coil spring 31E contacts the upper surface of the large-diameter section of the rod section 31B located below the small-diameter section. The upper end of the coil spring 31E contacts a support surface provided on the inner surface of the connecting member 33. The coil spring 31E generates an elastic force that causes the nozzle body 31 to move downward relative to the connecting member 33. The coil spring 31E biases the nozzle body 31 downward relative to the connecting member 33.

[0041] As shown in Figure 7, an internal flow path 34D is formed in the shaft 34. An internal flow path 33E is formed in the connecting member 33. A pipe 38 is positioned inside the rod portion 31B. The lower end of the pipe 38 is fixed to the block portion 31A. The lower end of the pipe 38 is connected to the internal flow path 31G of the block portion 31A. The internal flow path 31G is connected to the space 39 between the flange portion 3241 and the guide member 326. The space 39 includes a first space 39A between the flange portion 3241 of the first slider 324A and the first guide member 326A, and a second space 39B between the flange portion 3241 of the second slider 324B and the second guide member 326B.

[0042] Air is supplied to the internal passage 34D of the shaft 34 from an air supply source (not shown), causing the first arm 32A and the second arm 32B to move closer to each other. The air supplied to the internal passage 34D from the air supply source (not shown) is supplied to the internal passage 31G of the block section 31A via the internal passage 33E of the connecting member 33 and the internal passage of the pipe 38. The air supplied to the internal passage 31G is supplied to the space 39 between the flange section 3241 and the guide member 326. The supply of air to the space 39 increases the pressure in the space 39. In Figure 7, the increase in pressure in the first space 39A causes the first slider 324A to move in the +X direction against the elastic force of the first coil spring 322A. The increase in pressure in the second space 39B causes the second slider 324B to move in the -X direction against the elastic force of the second coil spring 322B. In other words, as the pressure in space 39 increases, the first slider 324A and the second slider 324B move closer to each other. As the first slider 324A and the second slider 324B move closer to each other, the first arm 32A and the second arm 32B move closer to each other.

[0043] When the supply of air from the air source is stopped, the first arm 32A and the second arm 32B move apart from each other. When the supply of air from the air source is stopped, the pressure in space 39 decreases. In Figure 7, as the pressure in the first space 39A decreases, the first connecting member 321A moves in the -X direction due to the elastic force of the first coil spring 322A. As the pressure in the second space 39B decreases, the second connecting member 321B moves in the +X direction due to the elastic force of the second coil spring 322B. That is, as the pressure in space 39 decreases, the first connecting member 321A and the second connecting member 321B move apart from each other. As the first connecting member 321A and the second connecting member 321B move apart from each other, the first arm 32A and the second arm 32B move apart from each other.

[0044] With part C positioned between the first arm 32A and the second arm 32B, part C is held by the arm 32 as the first arm 32A and the second arm 32B move closer to each other. When the first arm 32A and the second arm 32B move further apart from each other, part C held by the arm 32 is released from the arm 32.

[0045] When mounting a component C to the surface of the substrate P, the shaft 34 moves in the -Z direction with the component C held by the arm 32 facing the surface of the substrate P. As the shaft 34 moves in the -Z direction, the component C held by the arm 32 is pressed against the surface of the substrate P. When the component C held by the arm 32 is pressed against the surface of the substrate P, the nozzle body 31 moves in the Z-axis direction relative to the connecting member 33 so that the upper surface of the nozzle body 31 approaches the lower surface of the sleeve portion 33A. The nozzle body 31 moves towards the connecting member 33 against the elastic force of the coil spring 31E. As the component C is pressed against the surface of the substrate P, the nozzle body 31 moves in the Z-axis direction relative to the connecting member 33, so that impacts and excessive stresses are not applied to the component C or the substrate P.

[0046] The coupling mechanism 35 connects and disconnects the connecting member 33 of the nozzle 30 from the shaft 34. The coupling mechanism 35 has a sleeve 35A and a ball 35B. The sleeve 35A is positioned around the lower part of the shaft 34. The ball 35B is held in a retaining hole 34B provided in the sleeve 35A. The retaining hole 34B is formed to penetrate the inner surface of the recess 34C and the outer surface of the shaft 34. The ball 35B is positioned inside the sleeve 35A. A groove 33F is provided on the upper part of the connecting member 33. By inserting the ball 35B into the groove 33F of the connecting member 33, the connecting member 33 is attached to the shaft 34 via the coupling mechanism 35.

[0047] The sleeve 35A and the shaft 34 can move relative to each other in the Z-axis direction. The sleeve 35A is movable in the Z-axis direction relative to the shaft 34. The inner surface of the sleeve 35A includes a small diameter portion 35Aa and a large diameter portion 35Ab positioned below the small diameter portion 35Aa. As the sleeve 35A moves downward relative to the shaft 34, the small diameter portion 35Aa is positioned radially outward of the ball 35B. The small diameter portion 35Aa pushes the ball 35B radially inward so that the ball 35B, held in the holding hole 34B, moves inward into the recess 34C. The ball 35B, pushed radially inward by the small diameter portion 35Aa, is inserted into the groove 33F of the connecting member 33. The small diameter portion 35Aa presses the ball 35B radially inward so that the ball 35B inserted into the groove 33F does not come out radially outward. This mounts the connecting member 33 onto the shaft 34.

[0048] A coil spring 36 is positioned above the sleeve 35A. The coil spring 36 is positioned around the shaft 34. A stopper 37 is provided above the coil spring 36. The stopper 37 is ring-shaped. The stopper 37 is positioned around the shaft 34. A circlip 370 is positioned above the stopper 37. The circlip 370 fits into a groove provided on the outer surface of the shaft 34. The circlip 370 fixes the position of the stopper 37 on the outer surface of the shaft 34. The lower end of the coil spring 36 contacts the upper surface of the sleeve 35A. The upper end of the coil spring 36 contacts the lower surface of the stopper 37. The coil spring 36 generates an elastic force that causes the sleeve 35A to move downward relative to the shaft 34. The coil spring 36 biases the sleeve 35A downward relative to the shaft 34.

[0049] When the connecting member 33 of the nozzle 30 is attached to the shaft 34, the mounting head 106 moves above the nozzle housing member 112. After the mounting head 106 moves above the nozzle housing member 112, the shaft 34 descends so that it approaches the nozzle 30 housed in the nozzle housing member 112. As the shaft 34 descends, the upper part of the connecting member 33 is inserted into the recess 34C of the shaft 34. Once the upper part of the connecting member 33 is inserted into the recess 34C of the shaft 34, the ball 35B is inserted into the groove 33F provided on the upper part of the connecting member 33. Since the sleeve 35A is biased downward by the coil spring 36, after the ball 35B is inserted into the groove 33F, the small diameter portion 35Aa of the sleeve 35A is positioned around the retaining hole 34B. The small diameter portion 35Aa prevents the ball 35B from escaping from the groove 33F. As a result, the connecting member 33 is attached to the shaft 34 via the joint mechanism 35.

[0050] A positioning pin 33D is provided on the upper part of the connecting member 33. The positioning pin 33D is fixed to the upper part of the sleeve portion 33A. The positioning pin 33D protrudes from the outer surface of the sleeve portion 33A to the outside of the sleeve portion 33A. A positioning groove 34A is formed at the lower end of the recess 34C of the shaft 34. The connecting member 33 is mounted on the shaft 34 so that the positioning pin 33D is inserted into the positioning groove 34A. By inserting the positioning pin 33D into the positioning groove 34A, the connecting member 33 and the shaft 34 are positioned at least in the θZ direction. By positioning the positioning pin 33D in the positioning groove 34A, the shaft 34 and the nozzle 30 are positioned in the rotational direction centered on the Z axis. By positioning the positioning pin 33D in the positioning groove 34A, relative rotation between the shaft 34 and the nozzle 30 in the rotational direction centered on the Z axis is suppressed.

[0051] When the connecting member 33 of the nozzle 30 is removed from the shaft 34, the sleeve 35A is moved upward relative to the shaft 34. As the sleeve 35A moves upward, the large-diameter portion 35Ab of the sleeve 35A is positioned around the retaining hole 34B. The positioning of the large-diameter portion 35Ab around the retaining hole 34B allows the ball 35B to escape from the groove 33F. As the ball 35B escapes from the groove 33F, the connecting member 33 is removed from the shaft 34.

[0052] [Screw tightening unit] Next, the screw tightening unit 20 according to the embodiment will be described. Figure 8 is a perspective view illustrating the installation position of the screw tightening unit 20 according to the embodiment.

[0053] The screw tightening unit 20 is supported by the base frame 114. The screw tightening unit 20 is located below the substrate transport device 103 and the substrate holding device 104. The base frame 114 includes an upper frame 114A and a lower frame 114B. The upper frame 114A is located above the lower frame 114B. The upper frame 114A is located at each end of the lower frame 114B in the X-axis direction. The upper frame 114A is wall-shaped along the YZ plane. The upper frame 114A has a gate-like shape with openings that serve as the entrance and exit for the substrate P. As shown in Figure 1, the mounting unit 10 is supported by the upper frame 114A. The lower frame 114B has both ends 114C in the X-axis direction and a central part 114D between the ends 114C. The substrate transport device 103 and the substrate holding device 104 are each positioned so as to pass above the central part 114D and straddle both end parts 114C. The screw tightening unit 20 is positioned in the central part 114D. The screw tightening unit 20 is positioned below the working position PJb of the substrate P. The screw tightening unit 20 tightens screws SC to components C mounted on the surface of the substrate P from below the substrate P held by the substrate holding device 104.

[0054] Figure 9 is a perspective view showing a screw tightening unit 20 according to an embodiment. Figure 10 is a top view showing a screw tightening unit 20 according to an embodiment.

[0055] The screw tightening unit 20 includes a work head 21, a moving mechanism 22 that moves the work head 21 to the screw mounting position, a screw supply device 23, and a delivery mechanism 24 that delivers screws SC to the work head 21 via a delivery path 25 (see dashed line). The screw mounting position is the position where the screw hole CH of the component C is located. The work head 21 uses a screwdriver tool 80 to tighten screws SC into the component C. The work head 21 holds the screwdriver tool 80. The screwdriver tool 80 is held by the work head 21 so as to face the back surface of the substrate P held by the substrate holding device 104. The work head 21 holds the screwdriver tool 80 so as to face the tip of the screwdriver tool 80 and the back surface of the substrate P. The screw SC is positioned at the tip of the screwdriver tool 80. The screw tightening unit 20 tightens the screw SC positioned at the tip of the screwdriver tool 80 into the component C from the back surface of the substrate P.

[0056] <Movement mechanism> The moving mechanism 22 allows the work head 21 to move in a direction parallel to the XY plane on the back side of the substrate P. The moving mechanism 22 moves the work head 21 so that the XY coordinates of the screwdriver tool 80 coincide with the screw mounting position, which is the XY coordinate of the screw hole CH of component C.

[0057] In this embodiment, the moving mechanism 22 is an orthogonal robot (XY robot) that moves the work head 21 in the XY plane. The moving mechanism 22 includes a head support member 40 that supports the work head 21, an X-axis drive unit 41 that moves the work head 21 in the X-axis direction, a Y-axis drive unit 42 that moves the work head 21 in the Y-axis direction, an X-axis guide unit 43 that guides the head support member 40 in the X-axis direction, and a Y-axis guide unit 44 that guides the X-axis guide unit 43 in the Y-axis direction.

[0058] The head support member 40 supports the work head 21. The head support member 40 is movable in both the X-axis direction and the Y-axis direction while supporting the work head 21. The head support member 40 is supported by the X-axis guide portion 43.

[0059] The X-axis guide section 43 includes an X-beam 43A and an X-linear guide 43B. The X-beam 43A is elongated in the X-axis direction. The +X end and -X end of the X-beam 43A are supported by the Y-axis guide section 44. The X-linear guide 43B is fixed to the X-beam 43A and is a guide rail that extends linearly in the X-axis direction. A linear slider 43C, fixed to the head support member 40, is slidably attached to the X-linear guide 43B. The head support member 40 is guided in the X-axis direction by the X-linear guide 43B.

[0060] The X-axis drive unit 41 generates power to move the head support member 40 in the X-axis direction. The X-axis drive unit 41 is an actuator and, in this embodiment, includes an electric motor. The power generated by the X-axis drive unit 41 is transmitted to the head support member 40 via a power transmission mechanism. In the example shown in Figures 9 and 10, the power transmission mechanism is a screw shaft 41A. The screw shaft 41A extends linearly in the X-axis direction. The +X end and the -X end of the screw shaft 41A are rotatably supported by the X-beam 43A, respectively. The X-axis drive unit 41 is located at the -X end of the X-beam 43A and rotates the screw shaft 41A, which is connected to the output shaft via a belt pulley mechanism 41B. A nut member (not shown) fixed to the head support member 40 is attached to the screw shaft 41A. The rotation of the screw shaft 41A moves the nut member that meshes with the screw shaft 41A in the X-axis direction. As a result, the operation of the X-axis drive unit 41 causes the head support member 40 to move in the X-axis direction while being guided by the X-axis guide unit 43. As the head support member 40 moves in the X-axis direction, the work head 21 moves in the X-axis direction. The position of the work head 21 in the X-axis direction is determined by the amount of drive of the X-axis drive unit 41.

[0061] The Y-axis guide section 44 has a pair of Y-linear guides 44A. The pair of Y-linear guides 44A are guide rails that extend linearly along the Y-axis direction. The pair of Y-linear guides 44A support the +X end and the -X end of the X-beam 43A, respectively. A linear slider (not shown) fixed to the X-beam 43A is slidably attached to each of the pair of Y-linear guides 44A. The X-beam 43A is guided in the Y-axis direction by the pair of Y-linear guides 44A.

[0062] The Y-axis drive unit 42 generates power to move the head support member 40 in the Y-axis direction. The Y-axis drive unit 42 is an actuator and, in embodiments, includes an electric motor. The power generated by the Y-axis drive unit 42 is transmitted to the X-beam 43A via a power transmission mechanism. In the example shown in Figures 9 and 10, the power transmission mechanism includes a screw shaft 42A and a belt pulley mechanism 42B. The screw shaft 42A is positioned between a pair of Y linear guides 44A and extends linearly in the Y-axis direction. The +Y and -Y ends of the screw shaft 42A are rotatably supported by supports (not shown) fixed to the base frame 114. The Y-axis drive unit 42 is supported by the base frame 114 and connected to the +Y end of the screw shaft 42A via the belt pulley mechanism 42B. A nut member 42C fixed to the X-beam 43A is attached to the screw shaft 42A. The rotation of the screw shaft 42A causes the nut member 42C, which engages with the screw shaft 42A, to move in the Y-axis direction. As a result, the operation of the Y-axis drive unit 42 causes the X-beam 43A to move in the Y-axis direction while being guided by the Y-axis guide unit 44. The head support member 40 moves in the X-axis direction while being guided by the X-axis guide unit 43. As the X-beam 43A moves in the Y-axis direction, the work head 21 moves in the Y-axis direction. The position of the work head 21 in the Y-axis direction is determined by the amount of drive of the Y-axis drive unit 42.

[0063] <Work head> Figure 11 is a perspective view showing the work head 21 according to the embodiment. Figure 12 is a front view showing the work head 21 according to the embodiment.

[0064] The work head 21 is supported by the head support member 40. The work head 21 has a tool section 50 for tightening screws SC, a transfer section 60, a Z-axis drive section 51, a θZ drive section 52, and a pneumatic section 53. The tool section 50, the transfer section 60, the Z-axis drive section 51, the θZ drive section 52, and the pneumatic section 53 are all supported by the head support member 40.

[0065] The tool section 50 has a mounting section 71 to which the screwdriver tool 80 can be attached and detached. The tool section 50 holds the screwdriver tool 80 at the mounting section 71. The tool section 50 holds the screwdriver tool 80 so that its tip faces upward. The mounting section 71 detachably holds the base end of the screwdriver tool 80. The tool section 50 is interchangeable with multiple types of screwdriver tools 80 that have different tip shapes. The tool section 50 is provided on the movable plate 72.

[0066] The θZ drive unit 52 generates power to rotate the screwdriver tool 80 in the θZ direction. The θZ drive unit 52 is an actuator and, in this embodiment, includes an electric motor. The central axis of the screwdriver tool 80 is parallel to the Z axis. The θZ drive unit 52 rotates the screwdriver tool 80, which is mounted on the mounting part 71, in the θZ direction around the central axis of the screwdriver tool 80. The θZ drive unit 52 is provided on the lower side of the movable plate 72. The output shaft of the θZ drive unit 52 is connected to the mounting part 71. The rotation of the output shaft of the θZ drive unit 52 rotates the screwdriver tool 80 in the θZ direction. As the screwdriver tool 80, to which the screw SC is attached, rotates in the θZ direction, the screw SC is tightened into the part C.

[0067] The Z-axis drive unit 51 generates power to move the screwdriver tool 80 in the Z-axis direction. The Z-axis drive unit 51 is an actuator and, in this embodiment, includes an electric motor. The Z-axis drive unit 51 is fixed to the head support member 40. The output shaft of the Z-axis drive unit 51 is connected to the Z-screw shaft 73. The Z-screw shaft 73 extends linearly along the Z-axis direction. The +Z end and the vicinity of the -Z end of the Z-screw shaft 73 are rotatably supported by support members 73A fixed to the head support member 40, respectively. A nut member fixed to a movable plate 72 is attached to the Z-screw shaft 73. The rotation of the Z-screw shaft 73 moves the movable plate 72 in the Z-axis direction. The movable plate 72 is provided with a linear slider 74A. The linear slider 74A is slidably mounted on a Z-linear guide 74 fixed to the head support member 40. The Z-linear guide 74 is a guide rail that extends linearly along the Z-axis direction. The Z-axis drive unit 51 operates, causing the tool unit 50 (driver tool 80), the θZ drive unit 52, and the movable plate 72 to move in the Z-axis direction along the Z linear guide 74. The Z-axis position of the driver tool 80 is determined by the amount of drive of the Z-axis drive unit 51. The Z-axis drive unit 51 moves the driver tool 80 vertically. The Z-axis drive unit 51 moves the driver tool 80 to a position where its tip is positioned below the transfer unit 60 and to a position where its tip is positioned above the transfer unit 60.

[0068] <Driver Tools> Figure 13 is a cross-sectional view showing a screwdriver tool 80 according to an embodiment. The screwdriver tool 80 includes a screwdriver 81 and a retaining cylinder 82 provided around the screwdriver 81. The screwdriver 81 is positioned inside the retaining cylinder 82. An upper end opening 82A is provided at the upper end of the retaining cylinder 82. An annular rib 82B is formed on the inner surface of the retaining cylinder 82 below the upper end, projecting toward the center of the retaining cylinder 82. The inner diameter of the portion where the rib 82B is formed is smaller than the outer diameter of the head of the screw SC and larger than the outer diameter of the screwdriver 81. The inner diameter of the retaining cylinder 82 in the range from the rib 82B to the upper end opening 82A is larger than the outer diameter of the head of the screw SC. The retaining cylinder 82 can hold the screw SC by the head of the screw SC fitting into the rib 82B. The screw SC is held with its shaft facing upward and its head fitted into the rib 82B. As a result, the head of the screw SC is positioned directly above the tip of the screwdriver 81.

[0069] The lower end of the retaining cylinder 82 is inserted inside the case portion 83. A lower end opening 82C is provided at the lower end of the retaining cylinder 82. The driver 81 passes through the lower end opening 82C and is supported by a bearing located in the case portion 83 so as to be able to rotate relative to it in the θZ direction. The lower end of the driver 81 is supported by the mounting portion 71. The driver 81 rotates in the θZ direction together with the mounting portion 71 as the mounting portion 71 is rotated in the θZ direction by the θZ drive unit 52. The case portion 83 and the retaining cylinder 82 do not rotate.

[0070] The lower end opening 82C of the retaining cylinder 82 connects the inside of the retaining cylinder 82 to the inside of the case portion 83. The case portion 83 is provided with a connector 83A for connection to the pneumatic portion 53. Negative pressure is supplied to the retaining cylinder 82 from the pneumatic portion 53 via the case portion 83. The retaining cylinder 82 draws air in through the upper end opening 82A due to the negative pressure. The retaining cylinder 82 is closed at the annular rib 82B by the head of the screw SC. The retaining cylinder 82 can be fixed in place by the negative pressure, which draws in the screw SC that is fitted into the rib 82B, preventing it from moving.

[0071] The retaining cylinder 82 and the driver 81 are movable relative to each other in the Z-axis direction. The retaining cylinder 82 is biased upward by a spring member 84 located inside the case portion 83. The spring member 84 is a compression coil spring. The lower end of the spring member 84 is supported by a spring holder 85 fixed to the case portion 83.

[0072] As the Z-axis drive unit 51 moves the screwdriver tool 80 upward, the retaining cylinder 82 comes into contact with the back surface of the substrate P. As the screwdriver tool 80 continues to move upward, the retaining cylinder 82 maintains its position without moving as the spring member 84 is compressed by the reaction force from the substrate P. While the spring member 84 is compressed, the screwdriver 81 and case 83 continue to move upward, so the tip of the screwdriver 81 engages with the screw SC held by the rib 82B of the retaining cylinder 82, and moves upward, passing through the inner circumference of the rib 82B. As a result, the screw SC is mounted on the tip of the screwdriver 81 and then inserted into the screw hole CH of the part C. The screwdriver 81 moves upward while being rotated by the θZ drive unit 52. Therefore, when the screwdriver 81 comes into contact with the head of the screw SC, the rotational phase of the engagement groove on the head of the screw SC and the tip of the screwdriver 81 match, causing the engagement groove and the tip to mesh and engage.

[0073] <Handover section> Figure 14 is a diagram illustrating the function of the transfer unit 60 according to the embodiment. As shown in Figure 11, the transfer unit 60 is positioned on the upper part of the head support member 40. The transfer unit 60 is connected to the delivery mechanism 24 via the delivery passage 25. The transfer unit 60 receives the screw SC sent from the delivery passage 25. The transfer unit 60 sets the received screw SC on the tip of the driver tool 80 of the tool unit 50. Therefore, as shown in Figure 14, the transfer unit 60 is positioned above the driver tool 80, which is positioned at the screw setting position ES. Note that Figure 11 shows the state in which the driver tool 80 is positioned in the raised position when tightening the screw SC. Therefore, in Figure 11, the tip of the driver tool 80 is positioned above the transfer unit 60.

[0074] As shown in Figure 11, the transfer unit 60 has a holding unit 61 that releasably holds a screw SC, a drive unit 62 that moves the holding unit 61 to the transfer position, and a connecting unit 63 that is connected to the delivery passage 25. The end of the delivery passage 25 is connected to the connecting unit 63. The holding unit 61 receives the screw SC sent from the delivery passage 25 via the connecting unit 63. The holding unit 61 is connected to a pneumatic unit 53 by an air tube (not shown). The holding unit 61 holds the screw SC by the pressure supplied from the pneumatic unit 53. The holding of the screw SC is released by stopping the pressure supply. The drive unit 62 movably holds the holding unit 61 via a bracket 62A. The drive unit 62 is an actuator, for example, an air cylinder. The drive unit 62 is connected to the pneumatic unit 53 by an air tube (not shown). The drive unit 62 moves the holding unit 61 by the pressure supplied from the pneumatic unit 53. The drive unit 62 moves the holding unit 61 back and forth between the transfer position A2 and the retracted position A1 by moving the piston rod forward and backward. As shown in Figure 14, the transfer position A2 is the position where the screw SC is transferred to the screwdriver tool 80. The retracted position A1 is the position where the holding unit 61 is retracted when the tool unit 50 (screwdriver tool 80) is moved upward by the Z-axis drive unit 51 for screw tightening.

[0075] As shown in Figure 14, the retaining part 61 has a retaining chamber 64 for the screw SC. The retaining chamber 64 is a space shaped to match the shape of the screw SC, and the lower end of the retaining chamber 64 opens to the lower surface of the retaining part 61. The lower opening of the retaining chamber 64 is vertically opposite the opening of the connecting part 63. The connecting part 63 is located directly below the retaining part 61 in the retracted position A1 and is supported by the head support member 40. The connecting part 63 is a cylindrical connector to which the end of the delivery path 25 is connected. The connecting part 63 connects to the delivery path 25 at its lower end and receives the screw SC from the lower end opening. The connecting part 63 transfers the received screw SC to the retaining chamber 64 from the upper end opening. The retaining part 61 receives the screw SC into the retaining chamber 64 from the lower side.

[0076] The screw SC is sent from the delivery passage 25 into the holding chamber 64 with its shaft facing forward in the direction of travel and its head facing rearward in the direction of travel. The upper part of the holding chamber 64 is a small-diameter section 64A into which the shaft of the screw SC is inserted. The holding section 61 has an air passage 65 connected to the small-diameter section 64A. The air passage 65 is connected to the pneumatic section 53. The holding section 61 holds the screw SC in the holding chamber 64 by sucking the shaft of the screw SC received into the holding chamber 64 with the negative pressure supplied to the air passage 65. The bottom surface of the holding chamber 64 is open, but the screw SC is held in place without falling out of the holding chamber 64 while being sucked in by the negative pressure.

[0077] The holding part 61, which holds the screw SC, is moved from the retracted position A1 to the transfer position A2 by the drive unit 62. At the transfer position A2, the lower opening of the holding chamber 64 of the holding part 61 is vertically opposed to the upper end opening 82A of the holding cylinder 82 of the screwdriver tool 80. When the negative pressure supply from the pneumatic unit 53 to the air passage 65 is stopped, the holding of the screw SC is released, and the holding part 61 drops the screw SC from the holding chamber 64. At this time, the screw tightening unit 20 supplies positive pressure to the air passage 65 by the pneumatic unit 53. The positive pressure allows the screw SC to drop smoothly from the air passage 65. The screw SC enters the upper end opening 82A of the holding cylinder 82 with its head facing downward and is held so as to fit into the annular rib 82B. As a result, the holding part 61 positions the screw SC at the tip of the screwdriver tool 80 at the transfer position A2. While the screw is being tightened with the screwdriver tool 80, the next screw to be used, SC, is supplied from the feeding mechanism 24 to the holding chamber 64. By supplying the next screw SC to be used to the holding chamber 64 while the screw is being tightened, the time required for tightening the screw can be reduced.

[0078] After the screw SC is positioned, the holding unit 61 is moved from the transfer position A2 to the retracted position A1 by the drive unit 62. The retracted position A1 is outside the range of motion of the tool unit 50 (driver tool 80). With the holding unit 61 in the retracted position A1, the tool unit 50 performs the screw tightening operation with the driver tool 80. As a result, the screw tightening unit 20 can acquire the screw SC and perform the screw tightening operation without changing the orientation (direction) of the driver tool 80.

[0079] As shown in Figure 11, the pneumatic unit 53 supplies pressure to the transfer unit 60. The pneumatic unit 53 is mounted on the head support member 40 and moves together with the head support member 40. The pneumatic unit 53 is connected to a pneumatic source such as an air pump (not shown). The pneumatic unit 53 supplies pressure to the holding unit 61 and the tool unit 50 (driver tool 80). The pneumatic unit 53 detects the holding and release of the screw SC in the holding unit 61 based on the rise of the negative pressure supplied into the holding unit 61. The pneumatic unit 53 detects the holding and release of the screw SC in the holding cylinder 82 based on the rise of the negative pressure supplied into the holding cylinder 82. These pressure fluctuations in the pneumatic unit 53 are monitored by the controller 120.

[0080] <Delivery mechanism> Figure 15 is a perspective view showing a screw feeding device 23 and a dispensing mechanism 24 according to an embodiment. Figure 16 is a cross-sectional view of the main part of the dispensing mechanism 24 according to an embodiment. Figure 16 shows an XZ cross-section passing through the nozzle portion 91 of the dispensing mechanism 24.

[0081] The screw feeding device 23 and the delivery mechanism 24 are supported by the base frame 114. The screw feeding device 23 and the delivery mechanism 24 are located outside the range of movement of the work head 21 by the moving mechanism 22. The screw feeding device 23 and the delivery mechanism 24 are located on the -Y side relative to the moving mechanism 22. The screw feeding device 23 and the delivery mechanism 24 are located above the moving mechanism 22. The screw feeding device 23 and the delivery mechanism 24 are aligned in the X-axis direction.

[0082] The screw supply device 23 stores a large number of screws SC and supplies them one by one to the screw extraction position B1. The screw supply device 23 includes a screw storage section provided with a screw input port, a stirring mechanism for stirring the screws SC stored in the screw storage section, a rail section for aligning and sending out the screws SC stored in the screw storage section in a line, and a cutting section for cutting out screws SC one by one from the line of screws SC moving along the rail section and moving them to the screw extraction position B1.

[0083] The delivery mechanism 24 uses air pressure to pump the screw SC into the delivery passage 25. The delivery mechanism 24 includes a nozzle section 91, a suction drive section 92 for moving the nozzle section 91, and an inlet holding section 93 for holding the inlet of the delivery passage 25. Note that the delivery passage 25 is not shown in Figure 15. The nozzle section 91 is connected to a switching valve 94 via a pneumatic tube or the like. The switching valve 94 is connected to a pneumatic source such as a pneumatic pump (not shown). The switching valve 94 can selectively supply positive and negative pressure to the nozzle section 91 and can stop the pressure supply. When negative pressure is supplied to the nozzle section 91, it attracts the screw SC located at the screw extraction position B1. When positive pressure is supplied to the nozzle section 91, it sends the attracted screw SC from the delivery position B2 to the delivery passage 25.

[0084] The suction drive unit 92 reciprocates the nozzle unit 91 between the screw extraction position B1 and the delivery position B2 to the delivery passage 25. The suction drive unit 92 includes a lifting drive unit 92A and a horizontal drive unit 92B. The lifting drive unit 92A supports the nozzle unit 91 via a nozzle holding member 95 and moves the nozzle unit 91 linearly up and down. The horizontal drive unit 92B supports the nozzle unit 91 and the lifting drive unit 92A and moves the nozzle unit 91 and the lifting drive unit 92A linearly in the X-axis direction between the screw extraction position B1 and the delivery position B2. Both the lifting drive unit 92A and the horizontal drive unit 92B are actuators, for example, air cylinders. The lifting drive unit 92A and the horizontal drive unit 92B are operated by pressure supplied from the switching valve 94.

[0085] As shown in Figure 16, the nozzle portion 91 is held by the nozzle holding member 95 with its suction discharge opening facing downward. With the nozzle portion 91 positioned in the raised position by the lifting drive unit 92A, it moves between the screw extraction position B1 and the discharge position B2 by the horizontal drive unit 92B. By moving downward from a position above the screw extraction position B1, the nozzle portion 91 comes into contact with the head of the screw SC located at the screw extraction position B1. The nozzle portion 91 attracts the head of the screw SC by negative pressure and moves upward to extract one screw SC from the screw supply device 23.

[0086] The nozzle section 91, which has attracted the head of the screw SC, moves downward from a position above the delivery position B2, thereby inserting the screw SC into the inlet opening of the inlet holding section 93. The inlet holding section 93 is a cylindrical connector to which the end of the delivery path 25 is connected. The nozzle section 91 sends positive pressure into the delivery path 25 via the inlet holding section 93, thereby transporting the screw SC to the transfer section 60 of the work head 21 by air pressure. The nozzle section 91 directs the shaft of the screw SC forward in the direction of travel and sends the screw SC into the inlet of the delivery path 25.

[0087] The delivery passage 25 is a conduit with open ends. The delivery passage 25 is made of, for example, a flexible air tube. One end of the delivery passage 25 is connected to the delivery mechanism 24, and the other end is connected to the work head 21. As described above, one end of the delivery passage 25 is held by the inlet holding part 93 of the delivery mechanism 24. The other end of the delivery passage 25 is held by the connection part 63 of the transfer part 60. The delivery passage 25 has the flexibility to deform as the work head 21 moves. The inner diameter of the delivery passage 25 is designed to correspond to the maximum outer diameter of the screw SC, that is, the outer diameter of the head of the screw SC. The delivery passage 25 has an inner diameter slightly larger than the maximum outer diameter of the screw SC so that the orientation of the screw SC, which is being pumped by air pressure, does not change along the way. Therefore, the screw SC is sent into the holding chamber 64 without changing orientation during transport, with the shaft facing forward in the direction of travel and the head facing rearward in the direction of travel.

[0088] [controller] Figure 17 is a block diagram showing a controller 120 according to an embodiment. The PCB work apparatus 100 has a controller 120. The controller 120 controls the PCB work apparatus 100. The controller 120 includes a computer. The controller 120 includes a processor 120A such as a CPU (Central Processing Unit), a main memory 120B including non-volatile memory such as ROM (Read Only Memory) and volatile memory such as RAM (Random Access Memory), a storage 120C, and an interface 120D including input / output circuits and communication circuits. The functions of the controller 120 are stored in the storage 120C as a computer program. The processor 120A reads the computer program from the storage 120C, loads it into the main memory 120B, and executes processing according to the computer program. The computer program may be distributed to the controller 120 via a network.

[0089] The component recognition device 111, camera 113, display device 130, and input device 131 are each connected to the controller 120. The display device 130 displays display data. The display device 130 provides display data to the user of the board handling device 100. An example of the display device 130 is a flat panel display such as a liquid crystal display or an organic EL display. The input device 131 generates input data when operated by the user of the board handling device 100. The input data generated by the input device 131 is transmitted to the controller 120. An example of the input device 131 is a computer keyboard, mouse, buttons, switches, and touch panel.

[0090] The processor 120A includes a component control unit 121, a board control unit 122, a mounting control unit 123, a screw tightening control unit 124, and an operating condition setting unit 125.

[0091] Storage 120C stores a production program that indicates the operating conditions of the board work apparatus 100. The production program 126 includes data used for the mounting process of component C. The production program 126 includes target position data indicating the target position of component C fixed to the board P, target angle data indicating the target angle θr of component C fixed to the board P, mounting angle data indicating the mounting angle θm of component C when mounting component C on the surface of the board P, screw mounting position data indicating the position of the screw hole CH of component C mounted on the surface of the board P, and target torque data indicating the target torque when tightening the screw SC to component C.

[0092] The component control unit 121 outputs a control command to control the component supply device 200. The component control unit 121 controls the component supply device 200 so that multiple components C are sequentially supplied to the component supply position PJa.

[0093] The substrate control unit 122 outputs control commands to control the substrate transport device 103 and the substrate holding device 104. The substrate control unit 122 controls the substrate transport device 103 so that the substrate P is transported to the work position PJb. The substrate control unit 122 controls the substrate holding device 104 so that the substrate P is held in place at the work position PJb.

[0094] The mounting control unit 123 outputs control commands to control the mounting unit 10. Based on the production program 126, the mounting control unit 123 mounts the components C onto the surface of the substrate P.

[0095] The screw tightening control unit 124 outputs control commands to control the screw tightening unit 20. Based on the production program 126, the screw tightening control unit 124 tightens screws SC from the back surface of the substrate P to the components C mounted on the front surface of the substrate P.

[0096] The mounting control unit 123 outputs a control command to ensure that the nozzle 30 of the mounting unit 10 continues to hold the component C until the screw tightening unit 20 has finished tightening the screw SC. The screw tightening unit 20 tightens the screw SC to the component C from the back side of the substrate P while the component C mounted on the surface of the substrate P is held by the nozzle 30 of the mounting unit 10.

[0097] The screw tightening control unit 124 terminates tightening the screw SC when the tightening torque of the screw SC reaches a predetermined target torque. As described above, the target torque is predetermined in the production program 126. The screw tightening control unit 124 controls the drive current for driving the θZ drive unit 52, which is an electric motor. The screw tightening control unit 124 can calculate the tightening torque of the screw SC based on the current value of the drive current for driving the θZ drive unit 52.

[0098] The mounting control unit 123 controls the mounting unit 10 so that multiple components C are sequentially mounted on the substrate P, based on the production program 126. The screw tightening control unit 124 controls the screw tightening unit 20 so that screws SC are sequentially tightened onto the components C mounted on the substrate P, based on the production program 126. The mounting head 106 holds the component C with the nozzle 30 at the component supply position PJa, then moves to the work position PJb and mounts it on the substrate P. The screw tightening unit 20 acquires the screw SC directly below the screw mounting position of the mounted component C and sets it in the screwdriver tool 80. The screw tightening unit 20 moves the screwdriver tool 80 upward to insert the screw SC into the screw hole CH and rotates the screwdriver 81 to tighten the screw SC onto the component C. The mounting head 106 continues to hold the component C mounted on the surface of the substrate P until the screw tightening of the screw SC by the screw tightening unit 20 is completed. The mounting head 106 receives the tightening torque applied to the component C during the screw tightening operation of the screw SC.

[0099] After the mounting unit 10 has tightened a screw SC onto a component C mounted on the surface of the substrate P, it moves to the component supply position PJa and holds a new component C with the nozzle 30. The mounting head 106 holds the new component C with the nozzle 30 at the component supply position PJa, then moves to the work position PJb and mounts it onto the substrate P. The screw tightening unit 20 moves to the screw mounting position of the newly mounted component C and tightens the screw SC onto the component C. In this way, the mounting unit 10 and the screw tightening unit 20 cooperate to sequentially mount multiple components C and tighten the screws SC.

[0100] The operating condition setting unit 125 sets the operating conditions for the circuit board work apparatus 100. The operating condition setting unit 125 can create or update a production program 126 that indicates the operating conditions for the circuit board work apparatus 100.

[0101] [How to set operating conditions] Figures 18 and 19 are diagrams illustrating the behavior of component C during screw tightening. Figures 18 and 19 are top views of a substrate P positioned at the work position PJb. Screw holes TH are formed in the substrate P. The screw holes TH are formed to penetrate both the front and back surfaces of the substrate P. In the examples shown in Figures 18 and 19, the screw holes TH are elongated in the Y-axis direction.

[0102] Component C is mounted on the surface of the substrate P such that at least a portion of component C is positioned above the screw insertion hole TH. A screw hole CH is formed on the underside of component C. Component C is mounted on the surface of the substrate P such that the screw hole CH and the screw insertion hole TH are aligned. The screw SC is inserted into the screw insertion hole TH from the back side of the substrate P and then tightened into the screw hole CH.

[0103] The target position of component C to be fixed to the substrate P, and the target angle θr of component C to be fixed to the substrate P are predetermined. The target position of component C is the target position in the X-axis and Y-axis directions of component C after the screw SC is tightened onto component C. The target angle θr of component C is the target angle in the θZ direction (rotation direction) of component C after the screw SC is tightened onto component C. Figures 18 and 19 show a virtual frame FL that represents the target position and target angle θr of component C. After the screw SC is tightened onto component C, component C is fixed to the surface of the substrate P so that the outline of component C coincides with the virtual frame FL. Figure 18 shows an example after component C has been mounted on the surface of the substrate P at the target position and target angle θr by the mounting head 106, and before the screw SC is tightened. In the example shown in Figure 18, the outline of component C and the virtual frame FL coincide after component C is mounted and before the screw SC is tightened.

[0104] Figure 19 shows component C after the screw SC has been inserted into the screw hole CH of component C and tightened, starting from the state shown in Figure 18. As shown in Figure 19, component C may deviate from the target angle θr due to the tightening torque of the screw SC. That is, even if the mounting head 106 mounts component C to the surface of the substrate P at the target angle θr, the tightening of the screw SC performed after mounting component C may cause component C to rotate, and component C may not be fixed to the surface of the substrate P at the target angle θr. Figure 19 shows an example in which the screw SC rotates in a second direction (for example, counterclockwise), and component C also rotates in the second direction due to the tightening torque of the screw SC. If component C is not fixed at the target angle θr, the quality of the electronic device may deteriorate.

[0105] According to the inventor's findings, the component C may rotate due to the dimensional difference between the positioning groove 34A of the shaft 34 and the positioning pin 33D of the connecting member 33 of the nozzle 30. To ensure that the positioning pin 33D is smoothly inserted into the positioning groove 34A, the shaft 34 and the nozzle 30 are formed such that the dimension of the positioning groove 34A is larger than the dimension of the positioning pin 33D in the rotational direction (θZ direction). In other words, a small gap is formed between the positioning groove 34A and the positioning pin 33D in the rotational direction. Therefore, even when the component C is mounted on the surface of the substrate P at the target angle θr and the screw SC is tightened while the component C is held in the mounting unit 10, the component C may rotate slightly due to the gap between the positioning pin 33D and the positioning groove 34A.

[0106] In this embodiment, the operating condition setting unit 125 sets the mounting angle θm considering the rotation of component C due to the tightening torque of screw SC. If component C rotates in a second direction (for example, counterclockwise) due to the tightening torque of screw SC, the operating condition setting unit 125 sets the mounting angle θm by rotating component C by a predetermined angle in a first direction (for example, clockwise) opposite to the second direction with respect to the target angle θr.

[0107] Figure 20 is a flowchart illustrating the method for setting the operating conditions of the circuit board handling apparatus 100 according to the embodiment. Figures 21 and 22 are diagrams illustrating the method for setting the operating conditions of the circuit board handling apparatus 100 according to the embodiment. When a screw SC is tightened onto a component C by rotating in a second direction (for example, counterclockwise), as shown in Figure 21, the operating condition setting unit 125 sets a mounting angle θm by rotating the component C by a predetermined angle in a first direction opposite to the second direction with respect to the target angle θr. As described above, the screw tightening unit 20 finishes tightening the screw SC when the tightening torque of the screw SC reaches a predetermined target torque. The operating condition setting unit 125 sets the mounting angle θm so that the component C is at the target angle θr when the tightening of the screw SC is finished.

[0108] The operating condition setting unit 125 sets the initial value of the mounting angle θm (step SA1). The operating condition setting unit 125 may set the initial value arbitrarily. The operating condition setting unit 125 may set the initial value of the mounting angle θm based on input data generated by the user operating the input device 131. The user of the board work device 100 may operate the input device 131 to input the initial value of the mounting angle θm of component C when the mounting head 106 mounts component C on the surface of the board P.

[0109] The mounting control unit 123 controls the mounting unit 10 so that the component C is mounted on the surface of the substrate P at the initial mounting angle θm set in step SA1 (step SA2).

[0110] The screw tightening control unit 124 controls the screw tightening unit 20 so that the screw SC is tightened onto the component C mounted on the surface of the substrate P. The screw tightening control unit 124 calculates the tightening torque of the screw SC based on the current value of the drive current for driving the θZ drive unit 52. The screw tightening control unit 124 terminates tightening the screw SC when the tightening torque of the screw SC reaches a predetermined target torque (step SA3).

[0111] The operating condition setting unit 125 takes a picture of part C with the camera 113 when the tightening of the screw SC is completed (step SA4).

[0112] The operating condition setting unit 125 determines whether the angle of part C after tightening the screw SC is the target angle θr based on the image data of part C captured by the camera 113 (step SA5).

[0113] For the actual angle of part C after tightening screw SC to be the target angle θr, this includes the fact that the actual angle and the target angle θr coincide, and that the actual angle falls within a predetermined allowable angle range based on the target angle θr.

[0114] The operating condition setting unit 125 may compare the actual image of part C captured by the camera 113 with an ideal image of part C positioned at a target angle θr to determine whether the angle of part C after tightening the screw SC is the target angle θr. In other words, the operating condition setting unit 125 may use a template matching method to determine whether the angle of part C after tightening the screw SC is the target angle θr. Alternatively, the operating condition setting unit 125 may extract the edges of part C from the image data of part C captured by the camera 113 and determine whether the angle of part C after tightening the screw SC is the target angle θr based on the edges of part C.

[0115] Image data of component C captured by camera 113 may be displayed on display device 130. The user of the circuit board work apparatus 100 may check component C displayed on display device 130 and determine whether the angle of component C after tightening the screw SC is the target angle θr. The user's determination result may be input from input device 131. The operating condition setting unit 125 may determine whether the angle of component C after tightening the screw SC is the target angle θr based on the input data from input device 131.

[0116] In step SA5, if it is determined that the angle of component C after tightening the screw SC is not the target angle θr (step SA5: No), the operating condition setting unit 125 changes the mounting angle θm (step SA6). After the mounting angle θm is changed, the mounting control unit 123 controls the mounting unit 10 so that component C is mounted on the surface of the substrate P at the mounting angle θm set in step SA7 (step SA2).

[0117] From this point onward, steps SA2 through SA6 are repeated until it is determined that the angle of part C after tightening the screw SC is the target angle θr.

[0118] In step SA5, if it is determined that the angle of part C after tightening the screw SC is the target angle θr (step SA5: Yes), the operating condition setting unit 125 generates or updates the production program 126 based on the initial value of the set mounting angle θm (step SA7). Figure 22 shows an example where the angle of part C after tightening the screw SC is the target angle θr.

[0119] As mentioned above, according to the inventor's knowledge, part C may rotate due to the dimensional difference between the positioning groove 34A of the shaft 34 and the positioning pin 33D of the connecting member 33 of the nozzle 30. Even when the screw SC is tightened while part C is held by the mounting unit 10, part C may rotate due to the gap between the positioning pin 33D and the positioning groove 34A. Therefore, the operating condition setting unit 125 may set the mounting angle θm based on the dimension of the gap between the positioning pin 33D and the positioning groove 34A in the rotation direction (θZ direction). The mounting angle θm may be set to an angle obtained by rotating the target angle θr in the first direction by an angle corresponding to the dimension of the gap between the positioning pin 33D and the positioning groove 34A.

[0120] [Circuit board assembly method] Figure 23 is a flowchart illustrating the substrate processing method according to the embodiment. Figure 24 is a diagram illustrating the substrate processing method according to the embodiment.

[0121] The mounting control unit 123 mounts the component C on the surface of the substrate P based on the production program 126. The operating condition setting unit 125 pre-sets a mounting angle θm obtained by rotating the component C by a predetermined angle in a first direction with respect to the target angle θr, and this is stored as the production program 126. The mounting control unit 123 controls the mounting unit 10 so that the component C is mounted on the surface of the substrate P at the mounting angle θm specified in the production program 126. As explained with reference to Figure 21, the mounting unit 10 mounts the component C on the surface of the substrate P at a mounting angle θm obtained by rotating the component C by a predetermined angle in a first direction with respect to the target angle θr (step SB1).

[0122] The screw tightening control unit 124 starts the tightening operation to fasten screws SC to component C from the back side of the substrate P, based on the production program 126. When fastening screws SC to component C, as shown in Figure 24(A), the screw tightening control unit 124 controls the screw tightening unit 20 so that the screwdriver tool 80 is positioned directly below the screw mounting position. The screw mounting position is the position of the screw hole CH of component C. The screw tightening control unit 124 moves the work head 21 in the XY plane using the moving mechanism 22 to position the screwdriver tool 80 directly below the screw mounting position.

[0123] The screw tightening control unit 124 controls the screw supply device 23 and the delivery mechanism 24 to deliver screws SC to the work head 21. As shown in Figure 16, the screw supply device 23 places one screw SC at the screw extraction position B1. The delivery mechanism 24 attracts the screw SC placed at the screw extraction position B1 by supplying negative pressure to the nozzle section 91. The delivery mechanism 24 moves the nozzle section 91 to the delivery position B2 by the suction drive unit 92. The delivery mechanism 24 sends the attracted screw SC to the delivery path 25 by supplying positive pressure to the nozzle section 91. The delivery mechanism 24 transports the screw SC to the work head 21 via the delivery path 25 using the positive pressure supplied from the nozzle section 91.

[0124] The screw tightening control unit 124 controls the work head 21 (transfer unit 60) to acquire and hold the screw SC sent from the delivery mechanism 24. The screw tightening control unit 124 controls the pneumatic unit 53 to supply negative pressure to the air passage 65 of the holding unit 61. As shown in Figure 14, the holding unit 61 receives the screw SC sent from the delivery mechanism 24 into the holding chamber 64 at the retracted position A1. When the shaft of the screw SC reaches the small diameter portion 64A of the holding chamber 64, the screw SC is held in place by the negative pressure supplied to the small diameter portion 64A via the air passage 65.

[0125] When the screw SC is not placed in the holding chamber 64, the pneumatic section 53 is at a pressure corresponding to atmospheric pressure simply by drawing in air. However, when the shaft portion of the screw SC reaches the small diameter portion 64A, the negative pressure increases rapidly. The screw tightening control unit 124 can detect that the screw SC is held in the holding section 61 based on the change in the pressure value supplied from the pneumatic section 53 to the air passage 65 (the rise in negative pressure).

[0126] The screw tightening control unit 124 controls the transfer unit 60 to set the screw SC in the holding cylinder 82 of the screwdriver tool 80 and retract the holding unit 61. The screw tightening control unit 124 uses the drive unit 62 to move the holding unit 61, which is holding the screw SC, to the transfer position A2. The screw tightening control unit 124 controls the pneumatic unit 53 to stop the supply of negative pressure to the air passage 65 of the holding unit 61, while supplying negative pressure to the holding cylinder 82 of the screwdriver tool 80. The holding unit 61 releases the holding of the screw SC due to the cessation of the negative pressure supply. Due to gravity, the screw SC falls from the lower opening of the holding chamber 64 into the upper end opening 82A of the holding cylinder 82. Because the head of the screw SC, which is close to the center of gravity, is on the lower side, it falls in the same position and gets stuck inside the annular rib 82B of the holding cylinder 82, blocking the inner opening of the rib 82B. The screw SC is fixed to rib 82B because its head, which covers rib 82B, is sucked in by negative pressure.

[0127] When the inner opening of the rib 82B is open, the pneumatic section 53 is at a pressure corresponding to atmospheric pressure simply by drawing in air. However, when the head of the screw SC closes the inner opening of the rib 82B, the negative pressure increases rapidly. The screw tightening control unit 124 can detect that the screw has been correctly set in the retaining cylinder 82 based on the change in the pressure value of the pneumatic section 53 (the rise in negative pressure). After the screw SC is set, the screw tightening control unit 124 moves the retaining section 61 from the handover position A2 to the retracted position A1 using the drive unit 62.

[0128] The screw tightening control unit 124 controls the work head 21 so that the screwdriver 81 rotates and the tool part 50 moves upward while the component C mounted on the surface of the substrate P is held by the mounting unit 10 (step SB2). The screwdriver 81 rotates in a second direction opposite to the first direction. The screw tightening control unit 124 outputs a control command to the θZ drive unit 52 to rotate the screwdriver 81. The θZ drive unit 52 rotates the screwdriver 81 in a second direction about the Z axis. The screw tightening control unit 124 outputs a control command to the Z axis drive unit 51 to move the tool part 50 upward (+Z direction). The Z axis drive unit 51 moves the movable plate 72 upward by rotating the Z screw axis 73. The screwdriver tool 80 (screwdriver 81 and holding cylinder 82) and the θZ drive unit 52 attached to the movable plate 72 move upward together. As the driver tool 80 moves upward, the upper end of the retaining cylinder 82 comes into contact with the back surface of the substrate P, which is held in the working position PJb, as shown in Figure 24(A).

[0129] The screw tightening control unit 124 continues the upward movement by the Z-axis drive unit 51 even after the retaining cylinder 82 has made contact with the back surface of the substrate P. The driver 81 and case portion 83 continue to move upward together with the movable plate 72. The retaining cylinder 82 maintains its position in the Z-axis direction by the compression of the spring member 84, even if the case portion 83 moves further upward. As a result, as shown in Figure 24(B), the driver 81 moves upward inside the retaining cylinder 82 and makes contact with the head of the screw SC fitted into the rib 82B. The rotational phase of the engagement groove on the head of the screw SC and the tip of the driver 81 match, and the tip engages with the engagement groove. As a result, the screw SC is attached to the tip of the driver 81. With the screw SC attached to the tip of the driver 81, the screw SC rotates together with the driver 81 in the second direction.

[0130] As the driver 81 rotates and moves upward, the screw SC is inserted through the screw insertion hole TH in the substrate P into the screw hole CH of component C, as shown in Figure 24(C).

[0131] The screw tightening control unit 124 controls the work head 21 so that the screw SC inserted into the screw hole CH is tightened onto the component C while the component C mounted on the surface of the substrate P is held by the mounting unit 10. The screw tightening control unit 124 rotates the screw SC inserted into the screw hole CH in a second direction to tighten it onto the component C from the back surface of the substrate P (step SB3).

[0132] The screw tightening control unit 124 controls the θZ drive unit 52 and the Z-axis drive unit 51 to rotate the screwdriver 81 and apply an upward force toward the screw hole CH. The mounting control unit 123 controls the mounting unit 10 that holds the component C to support the upward external force acting on the component C.

[0133] The screw tightening control unit 124 calculates the tightening torque of the screw SC based on the current value of the drive current that drives the θZ drive unit 52. The screw tightening control unit 124 determines whether or not the tightening torque of the screw SC has reached the target torque (step SB4).

[0134] In step SB4, if it is determined that the tightening torque of the screw SC has not reached the target torque (step SB4: No), the screw tightening control unit 124 continues to rotate the screw SC. In step SB4, if it is determined that the tightening torque of the screw SC has reached the target torque (step SB4: Yes), the screw tightening control unit 124 determines that the tightening of the screw SC is complete and stops the θZ drive unit 52 and the Z-axis drive unit 51. As a result, as shown in Figure 24(D), the screw SC is tightened into the screw hole CH and the component C is fixed to the substrate P. As explained with reference to Figure 22, the screw tightening unit 20 rotates the screw SC in a second direction opposite to the first direction while the component C mounted on the surface of the substrate P at a mounting angle θm is held by the mounting unit 10, thereby tightening the screw SC onto the component C from the back surface of the substrate P. This allows the component C to be positioned at the target angle θr when the tightening of the screw SC is completed.

[0135] The screw tightening control unit 124 controls the Z-axis drive unit 51 to move the tool unit 50 downward after the tightening of the screw SC is complete. The screw tightening control unit 124 moves the movable plate 72 downward until it reaches the screw set position ES where the upper end of the holding cylinder 82 is below the holding unit 61 of the transfer unit 60. This completes the screw tightening operation for one screw SC.

[0136] If a single component C has multiple screw mounting positions (i.e., if component C has multiple screw holes CH), the screw tightening control unit 124 repeats the process from step SB2 to step SB4.

[0137] [effect] As described above, the substrate work apparatus 100 according to the embodiment includes a processor 120A having an operating condition setting unit 125 that sets a mounting angle θm by rotating the component C by a predetermined angle in a first direction with respect to a target angle θr; a mounting unit 10 that mounts the component C on the surface of the substrate P at the mounting angle θm; and a screw tightening unit 20 that, while the component C mounted on the surface of the substrate P is held by the mounting unit 10, rotates a screw SC in a second direction opposite to the first direction to tighten the screw SC onto the component C from the back surface of the substrate P.

[0138] According to the embodiment, when tightening a screw SC onto a component C, if the tightening torque of the screw SC may cause the component C to deviate from the target angle θr, a mounting angle θm is set that takes into account the deviation angle from the target angle θr caused by the tightening torque of the screw SC. After the component C is mounted on the substrate P at the set mounting angle θm, the screw SC is tightened onto the component C, and when the tightening of the screw SC is completed, the component C is fixed to the substrate P at the target angle θr by the screw SC. Since the component SC is fixed to the substrate P at the target angle θr, a deterioration in the quality of the electronic device is suppressed. [Explanation of Symbols]

[0139] 10…Mounting unit, 20…Screw tightening unit, 21…Work head, 22…Movement mechanism, 23…Screw supply device, 24…Delivery mechanism, 25…Delivery path, 30…Nozzle, 31…Nozzle body, 31A…Block part, 31B…Rod part, 31C…Fixing pin, 31D…Slide pin, 31E…Coil spring, 31F…Sleeve, 31G…Internal flow path, 32…Arm, 32A…First arm, 32B…Second arm, 33…Connecting member, 33A…Sleeve part, 33B…Flange part, 33C…Guide groove, 33D…Positioning pin, 33E…Internal flow path, 33F…Groove, 34…Shaft, 3 4A…Positioning groove, 34B…Holding hole, 34C…Recess, 34D…Internal flow path, 35…Joint mechanism, 35A…Sleeve, 35Aa…Small diameter section, 35Ab…Large diameter section, 35B…Ball, 36…Coil spring, 37…Stopper, 38…Pipe, 39…Space, 39A…First space, 39B…Second space, 40…Head support member, 41…X-axis drive unit, 41A…Screw shaft, 41B…Belt pulley mechanism, 42…Y-axis drive unit, 42A…Screw shaft, 42B…Belt pulley mechanism, 42C…Nut member, 43…X-axis guide section, 43A…X-beam, 43B…X-linear guide, 43C…Linear slider ,44...Y-axis guide section, 44A...Y linear guide, 50...Tool section, 51...Z-axis drive section, 52...θZ drive section, 53...Pneumatic section, 60...Transfer section, 61...Holding section, 62...Drive section, 62A...Bracket, 63...Connection section, 64...Holding chamber, 64A...Small diameter section, 65...Air passage, 71...Mounting section, 72...Movable plate, 73...Z screw shaft, 73A...Support section, 74...Z linear guide, 74A...Linear slider, 80...Driver tool, 81...Driver, 82...Holding cylinder, 82A...Upper end opening, 82B...Rib, 82C...Lower end opening, 83...Case section, 83A...Connector, 84...Spring member, 85...Spring receiver, 91...Nozzle section, 92...Suction drive section, 92A...Lifting drive section, 92B...Horizontal drive section, 93...Inlet holding section, 94...Switching valve, 95...Nozzle holding member, 100...Substrate work device, 102...Installation section, 103...Substrate transport device, 104...Substrate holding device, 106...Mounting head, 107...Mounting head moving device, 107a...X-axis guide rail, 107b...Y-axis guide rail, 109...X drive section, 110...Y drive section, 111...Component recognition device, 112...Nozzle housing member, 113...Camera, 114...Base frame, 114A...Upper frame, 114B...Lower frame,114C...Both ends, 114D...Center, 120...Controller, 120A...Processor, 120B...Main memory, 120C...Storage, 120D...Interface, 121...Component control unit, 122...Board control unit, 123...Mounting control unit, 124...Screw tightening control unit, 125...Operating condition setting unit, 126...Production program, 130...Display device, 131...Input device, 140...Nozzle moving device, 150...Z drive unit, 160...θZ drive unit, 200...Component supply device, 321...Connecting member, 321A...First connecting member, 321B...Second connecting member, 322...Coil spring, 322 A...First coil spring, 322B...Second coil spring, 323...Screw, 324...Slider, 324A...First slider, 324B...Second slider, 325...Screw, 326...Guide member, 326A...First guide member, 326B...Second guide member, 370...Circlip, 3241...Flange part, 3242...Rod part, A1...Retracted position, A2...Transfer position, B1...Screw removal position, B2...Delivery position, C...Component, CH...Screw hole, ES...Screw set position, FL...Virtual frame, P...Substrate, PJa...Component supply position, PJb...Working position, SC...Screw, TH...Screw insertion hole.

Claims

1. A processor that sets the mounting angle by rotating the component by a predetermined angle in a first direction relative to the target angle, A mounting unit that mounts the component on the surface of the substrate at the aforementioned mounting angle, The system includes a screw tightening unit that, while the component mounted on the surface of the substrate is held by the mounting unit, rotates the screw in a second direction opposite to the first direction to tighten the screw onto the component from the back surface of the substrate. Circuit board handling equipment.

2. The screw tightening unit terminates tightening the screw when the tightening torque of the screw reaches a predetermined target torque. The processor sets the mounting angle such that the component is at the target angle when the tightening of the screw is completed. The substrate processing apparatus according to claim 1.

3. The system includes a camera that photographs the part at the point when the tightening of the screw is completed. The processor sets the mounting angle based on the image data of the component captured by the camera. The substrate processing apparatus according to claim 2.

4. The aforementioned implementation unit is A shaft that is movable in the direction normal to the surface of the substrate, It has a nozzle that is detachable from the shaft and holds the part, The nozzle has a positioning pin, The shaft has a positioning groove in which the positioning pin is positioned, The processor sets the mounting angle based on the dimension of the gap between the positioning pin and the positioning groove. The substrate processing apparatus according to claim 2.

5. Setting a mounting angle by rotating the component by a predetermined angle in the first direction relative to the target angle, Mounting the component on the surface of the substrate at the aforementioned mounting angle, This includes, while the component mounted on the surface of the substrate is being held in place, rotating the screw in a second direction opposite to the first direction to tighten the screw onto the component from the back surface of the substrate, Circuit board assembly method.

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