Ultrasonic cleaning system and processing system

Abstract

This provides an ultrasonic cleaning system that can detect the resonant frequency of one ultrasonic transducer using one ultrasonic transducer. [Solution] The cleaning system 30 includes a storage tank 203 in which cleaning liquid W is stored, a vibrator 201 which vibrates the cleaning liquid W and includes a vibrator 201A and a vibrator 201B which is positioned opposite to the side of the storage tank 203 with the vibrator 201A and the cleaning liquid W in between, and a control device 211. The control device 211 includes a cleaning unit 221 which cleans a sample nozzle immersed in the cleaning liquid W by vibrating one of the vibrators 201A and 201B, and a detection unit 222 which detects the resonant frequencies of the vibrators 201A and 201B by vibrating the other vibrator 201 of the vibrators 201A and 201B.

Description

Technical Field

[0001] The present disclosure relates to an ultrasonic cleaning system and a processing system.

Background Art

[0002] An automatic analyzer mixes a sample (such as a biological reagent) such as serum or urine with a reagent, and performs component analysis by measuring the light transmittance of the resulting mixed solution. In an automatic analyzer, the same nozzle is repeatedly used and samples are dispensed. Therefore, before sucking another sample, a nozzle cleaning process is performed to wash away the tip of the nozzle with a water stream. However, in an automatic analyzer with high throughput performance, since the dispensing process is performed at high speed, sufficient time cannot be used for cleaning the nozzle. In addition, dirt derived from the sample components can accumulate at the tip of the nozzle. When dirt accumulates at the tip of the nozzle, variations in the dispensed volume and carry-over of the previous sample into the next sample are likely to occur, and the measurement accuracy decreases. Therefore, for example, the dirt accumulated at the tip of the nozzle is removed by daily cleaning and maintenance.

[0003] Patent Document 1 describes "a Langevin type ultrasonic vibrator 5 used in an ultrasonic cleaning device for cleaning an object to be cleaned through a cleaning liquid to which ultrasonic vibration is applied, which is arranged so as to be laminated with each other and includes a plurality of piezoelectric elements 10 that can expand and contract in the lamination direction, and a part of the plurality of piezoelectric elements is used as a vibration excitation piezoelectric element 11 to expand and contract by applying an alternating voltage, and the other part of the plurality of piezoelectric elements is used as a state monitoring piezoelectric element 12 so that a voltage for state monitoring can be output by the expansion and contraction of the vibration excitation piezoelectric element."

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the ultrasonic cleaning apparatus described in Patent Document 1, a voltage is applied to some of the piezoelectric elements among a plurality of piezoelectric elements, and the vibration state is monitored based on the voltage output from some of the other piezoelectric elements. However, Patent Document 1 does not describe detecting the resonant frequency of some of the piezoelectric elements using some of the piezoelectric elements among a plurality of piezoelectric elements. The problem that this disclosure aims to solve is to provide an ultrasonic cleaning system and processing system that can detect the resonant frequency of one ultrasonic transducer using one ultrasonic transducer. [Means for solving the problem]

[0006] The ultrasonic cleaning system of this disclosure comprises a liquid storage tank in which a cleaning solution is stored, an ultrasonic transducer including a first ultrasonic transducer and a second ultrasonic transducer positioned opposite to the first ultrasonic transducer and the cleaning solution on the side of the liquid storage tank, and a control device, wherein the control device comprises a cleaning unit that cleans a member immersed in the cleaning solution by vibrating the first ultrasonic transducer and the second ultrasonic transducer, and a detection unit that detects the resonant frequency of the other ultrasonic transducer of the first or second ultrasonic transducer by vibrating the other ultrasonic transducer of the first or second ultrasonic transducer. Other solutions will be described later in the embodiments for carrying out the invention. [Effects of the Invention]

[0007] According to this disclosure, an ultrasonic cleaning system and processing system can be provided that can detect the resonant frequency of one ultrasonic transducer using one ultrasonic transducer. [Brief explanation of the drawing]

[0008] [Figure 1] This is a schematic diagram of the ultrasonic cleaning system disclosed herein. [Figure 2A] This is a perspective view of the cleaning device. [Figure 2B] This is a top view of the cleaning device. [Figure 2C] This is a cross-sectional view along line AA in Figure 2B. [Figure 3] This is a block diagram showing the specific hardware configuration of the control device. [Figure 4] This figure illustrates a cleaning mode using the ultrasonic cleaning system disclosed herein. [Figure 5] This is a cross-sectional view of a cleaning device according to another embodiment. [Figure 6] This is a cross-sectional view of a cleaning device according to another embodiment. [Figure 7] This is an example of impedance waveforms measured using different measurement circuits for each of two ultrasonic transducers, illustrating the case where their resonant frequencies are separated by a certain distance. [Figure 8] This is an example of impedance waveforms measured using the same measurement circuit for each of two ultrasonic transducers, illustrating the case where their resonant frequencies are separated by a certain distance. [Figure 9] This is an example of impedance waveforms measured using different measurement circuits for each of two ultrasonic transducers, illustrating the case where their resonant frequencies are relatively close. [Figure 10] This is an example of impedance waveforms measured using the same measurement circuit for each of two ultrasonic transducers, illustrating the case where their resonant frequencies are relatively close. [Figure 11] This table shows the degree of change in frequency from the previous recorded value when the resonant frequency of the ultrasonic transducer changes or does not change. [Figure 12] This table shows the degree of change in the output value of the ultrasonic transducer from the previous recorded value, when the output value has changed or not changed. [Figure 13] This is a flowchart of the ultrasonic cleaning method disclosed herein. [Figure 14A] This is a perspective view showing the processing system of this disclosure. [Figure 14B] This is a top view showing a magnified view of the reaction disk. [Figure 15] Block diagram of the processing system of this disclosure. [Figure 16] This is an example of detecting an abnormality outside the processing system of the present disclosure.

Mode for Carrying Out the Invention

[0009] Hereinafter, a mode (referred to as an embodiment) for implementing the present disclosure will be described while referring to the drawings. The following content is merely one example for implementing the invention according to the present disclosure, and the present disclosure is not limited to the following examples at all. In the description of one embodiment below, the description of another embodiment applicable to one embodiment will be made as appropriate. The present disclosure is not limited to the following one embodiment, and different embodiments can be combined with each other or arbitrarily modified within a range not significantly impairing the effects of the present disclosure. Also, the same members are denoted by the same reference numerals, and duplicate descriptions are omitted. Further, those having the same function are denoted by the same names. The illustrated content is merely schematic, and for the convenience of illustration, it may be changed from the actual configuration within a range not significantly impairing the effects of the present disclosure, or the illustration of some members may be omitted or deformed between the drawings. Also, in the same embodiment, it is not always necessary to include all configurations.

[0010] FIG. 1 is a schematic diagram of an ultrasonic cleaning system (hereinafter referred to as cleaning system 30) of the present disclosure. In FIG. 1, for the convenience of illustration, some members are illustrated as cross-sectional views, and still another part is illustrated as a block diagram. In the illustrated example, the cleaning system 30 is an integral unit, but at least a part of each member constituting the cleaning system 30 may be configured separately. The cleaning system 20 includes a liquid storage tank 203, a vibrator 201, a control device 211, a display device 205, and an input device 213. The cleaning device 200 and the display device 205 are arranged above the cleaning system 30, and the control device 211 and the input device 213 are arranged below the cleaning system 30. The cleaning device 200 includes a liquid storage tank 203 and a vibrator 201.

[0011] Although details will be described later, in the cleaning system 30, a detection mode (abnormality detection mode) is executed by the detection unit 222 to check the driving frequency suitable for driving another vibrator 201 with respect to the driving frequency which is suitable for driving one vibrator 201. Specifically, in the detection mode, the difference in the frequency (for example, resonance frequency) suitable for driving a plurality of vibrators 201 and the output state of the ultrasonic wave is checked. Then, when the difference becomes large, at least one of the controls, such as alarm display or automatic adjustment of the driving frequency, is performed.

[0012] FIG. 2A is a perspective view of the cleaning device 210. The cleaning device 210 includes a liquid storage tank 203 in which a cleaning liquid W is stored. The liquid storage tank 203 is provided in a base 202 (housing). The cleaning liquid W is, for example, water (pure water, ion-exchanged water, etc.), an alkaline aqueous solution, a detergent, etc. For example, by immersing the sample nozzle 22 (described later) in the cleaning liquid W and vibrating the cleaning liquid W using the vibrator 201 described later, the sample nozzle 22 is ultrasonically cleaned in the cleaning liquid W.

[0013] The cleaning device 210 includes a plurality of ultrasonic vibrators (vibrating units. Hereinafter, referred to as vibrators 201). The vibrator 201 is a mechanism for vibrating the cleaning liquid W. The plurality of vibrators 201 are each fixed to the base 202 via a seal 307 made of an elastic material. Therefore, each of the vibrators 201 has a natural frequency.

[0014] The vibrator 201 includes a first ultrasonic vibrator (hereinafter, referred to as vibrator 201A) and a second ultrasonic vibrator (hereinafter, referred to as vibrator 201B) which is disposed opposite to the side of the liquid storage tank 203 with the vibrator 201A and the cleaning liquid W interposed therebetween. The specific configuration of the vibrator 201 will be described later while referring to FIG. 2C. The vibrators 201A and 201B are both disposed on the side of the liquid storage tank 203. Also, in the example of the present disclosure, the vibrator 201B is disposed directly opposite the vibrator 201A, that is, on the same axis (X axis). Note that although two vibrators 201 are provided in the illustrated example, three or more vibrators 201 may be provided.

[0015] Figure 2B is a top view of the cleaning device 210. The transducers 201 are arranged symmetrically on the left and right (X direction) of the bottomed cylindrical liquid storage tank 203. This allows nozzles and other components immersed in the cleaning liquid W in the liquid storage tank 203 to be cleaned from both the left and right sides.

[0016] Figure 2C is a cross-sectional view along line AA of Figure 2B. While Figure 2C primarily describes the components near transducer 201A, the following description also applies to the vicinity of transducer 201B. Transducer 201 is a bolt-clamped Langevin type transducer (BLT). Transducers 201A and 201B have the same structure.

[0017] The transducer 201 comprises a plurality of piezoelectric elements 303 and a plurality of metal plates 304 (e.g., copper plates) for electrodes. The piezoelectric elements 303 and metal plates 304 are fastened together with bolts 305 between the front mass 301 and the back mass 302. The front mass 301 is an annular metal block on the front side (outside the transducer 201 as viewed from the liquid storage tank 203). The back mass 302 is an annular metal block on the back side (inside the transducer 201 as viewed from the liquid storage tank 203).

[0018] A tip portion 301a, which is provided on the front mass 301, is positioned at the tip (outer end) of the transducer 201. The tip portion 301a is part of the front mass 301 and has an elongated cylindrical shape. A through hole 311 is formed in the base 202, which connects the inside and outside of the liquid storage tank 203 on the side of the liquid storage tank 203, and the tip portion 301a is inserted into the through hole 311. As a result, the tip portion 301a is exposed to the inside of the liquid storage tank 203, for example, to vibrate the cleaning liquid W inside the liquid storage tank 203.

[0019] By driving the transducer 201 at its resonant frequency, the amplitude of the tip 301a of the front mass 301 is maximized. This maximizes the vibration inside the liquid storage tank 203, thereby maximizing the cleaning effect. However, as will be described in detail later, in the example of this disclosure, the transducer 201 is driven at a drive frequency that is other than the resonant frequency of the transducer 201, but is close to the resonant frequency.

[0020] The transducer 201 is fixed to the side of the base 202 with a flange 306. A seal 307 is placed between the flange 306 and the base 202. The seal 307 is made of an elastic material such as rubber or elastic resin. The seal 307 is placed near the base of the elongated portion of the front mass 301. The seal 307 can suppress liquid leakage from the through hole 311 (described later).

[0021] In the transducer 201, when the transducer 201 is driven, the vibration nodes (regions with small amplitudes, not shown) are located near the flange 306. Therefore, the influence of contact between the front mass 301 and the seal 307 is small. As a result, the highly deformable tip portion 301a can vibrate freely when the transducer 201 is driven (vibrating).

[0022] In the transducer 201, the resonant frequency of the transducer 201 fixed to the base 202 may change from the resonant frequency of the transducer 201 in its standalone state (e.g., the specifications of the transducer 201, the factory default state, etc.) due to differences in the tightening state of the screws (not shown) used to fix the flange 306, changes in the tightening state, etc. Furthermore, the resonant frequency of the BLT itself that constitutes the transducer 201 may also change over time due to the influence of temperature, etc. In addition to these, changes in the liquid level in the liquid storage tank 203 and the state in which the cleaning liquid W does not fill the through-hole 311 may also cause fluctuations in the resonant frequency and output of the transducer 201. Therefore, in this disclosure, the cleaning device 210 uses some of the transducers 201 to detect the resonant frequency of another transducer 201. This allows the entire group of transducers 201 to be driven near the resonant frequency, increasing the amplitude and thus improving the cleaning effect.

[0023] Furthermore, the liquid level of the cleaning fluid W placed in the storage tank 203 should be above the upper end of the tip 301a (the surface facing the cleaning fluid W) of the front mass 301 of the transducer 201, and preferably as close to the upper end as possible. For example, the liquid level should be such that the height from the tip 301a to the liquid surface is, for example, 0.1 mm or more and 1 mm or less.

[0024] If the tip portion 301a is exposed above the liquid surface, the cleaning solution W may splash around. Also, if the liquid surface is at a high position (the front mass 301 is at a deep position in the liquid), the load on the transducer 201 increases and the output may decrease. Furthermore, the area where the cleaning effect is particularly high is directly in front of the front mass 301 (directly to the side in Figure 2C). For this reason, if the liquid level is high, the sample nozzle 22 is inserted deeper, and the area over which the sample nozzle 22 is wetted by the cleaning solution W becomes wider. By adjusting the arrangement of each component so that the liquid surface is at the above position, it is possible to easily obtain the desired amount of liquid such as reagents dispensed by the sample nozzle 22.

[0025] Returning to Figure 1, the cleaning device 210 includes a vibrator 201, a liquid storage tank 203, a base 202, and a cover 204. The cover 204 is a component that covers the upper surface of the cleaning device 210, such as the upper opening of the liquid storage tank 203. However, the cover 204 has an opening directly above the liquid storage tank 203. Components to be cleaned, such as the sample nozzle 22, can be inserted into the cleaning liquid W through this opening. By providing the cover 204, the possibility of foreign matter (dust, etc.) entering the liquid storage tank 203 can be reduced.

[0026] The display device 205 is located on the top or side of the cleaning device 210. The display device 205, as will be described in detail later, is, for example, an LED, and is a device that displays, for example, an abnormality of the transducer 201 when in detection mode.

[0027] The control device 211 comprises a cleaning unit 221, a detection unit 222, a modification unit 223, a display unit 224, a drive circuit 225, and a recording unit 226. Their detailed functions will be described later. The vibrator 201 is connected to the control device 211 by electrical signal lines.

[0028] Figure 3 is a block diagram showing the specific hardware configuration of the control device 211. The control device 211 is a device that controls the operation of the cleaning device 210. The control device 211 is configured with, for example, a CPU (Central Processing Unit) 601, RAM (Random Access Memory) 602, ROM (Read Only Memory) 603, I / F (Interface) 604, bus 605, etc. The CPU 601, RAM 602, ROM 603, and I / F 604 are connected, for example, via bus 605. The control device 211 is realized when a predetermined control program (for example, the control method, ultrasonic cleaning method, anomaly detection method, etc. of this disclosure) stored in ROM 603 is loaded into RAM 602 and executed by CPU 601. The exchange of signals and information between the control device 211 and various devices (vibrator 201, server, personal computer, etc.), external networks, etc. is performed in hardware terms through I / F 604.

[0029] Figure 4 illustrates a cleaning mode using the cleaning system 30 of this disclosure. The cleaning mode can be performed, for example, by the cleaning unit 221 described above. The cleaning unit 221 is a functional unit that cleans a sample nozzle 22 (an example of a component) immersed in a cleaning liquid W by vibrating (e.g., resonating) transducers 201A and 201B. By simultaneously driving transducers 201A and 201B on both sides of the sample nozzle 22 immersed in the cleaning liquid W, vibrations are propagated to the cleaning liquid W as shown by the solid arrows in Figure 4, and strong cavitation is generated in the cleaning liquid W. In particular, by oscillating from both sides simultaneously, the sound pressure in the cleaning liquid W becomes in phase, and the sound pressure is increased. For this reason, it is desirable that the driving frequencies of the two transducers 201 are the same.

[0030] Returning to Figure 1, the cleaning system 30 includes a control device 211, a cleaning device 210, and an input device 213, in addition to a drive power supply 212. The drive power supply 212 is connected to the control device 211 by an electrical signal line. The drive power supply 212 is, for example, a rechargeable battery, which is charged by an external power supply (e.g., USB power supply). Power supply is performed by connecting to a personal computer (PC) or a charger. Furthermore, when the control device 211 is connected to a PC, the drive frequency and output (e.g., output signal values ​​such as voltage values) in the detection mode described later can be adjusted without using the input device 213. In addition, abnormality detection can also be performed. Furthermore, the detection results can be displayed on the PC monitor (not shown).

[0031] Figure 5 is a cross-sectional view of a cleaning apparatus 210 according to another embodiment. In the example shown in Figure 5, a bottomed cylindrical container 401 is inserted into a liquid storage tank 203. The container 401 contains a cleaning liquid W. Of the container 401, the surface facing the transducer 201 (particularly the tip portion 301a) is thinner than the other surfaces. This makes it easier for the vibrations of the transducer 201 to propagate to the cleaning liquid W inside the container 401. The through-hole 311 is filled with a vibration-transmitting liquid (e.g., silicone oil, water, etc.). Filling the through-hole 311 with liquid reduces the influence on the resonant frequency and output fluctuations of the transducer 201. In addition, the liquid that the sample nozzle 22 directly contacts is limited to the cleaning liquid W in the liquid storage tank 203. Furthermore, since the cleaning liquid W does not enter the inside of the through-hole 311, for example, dirt released into the cleaning liquid W during cleaning also does not enter the inside of the through-hole 311. This makes it easier to clean and maintain the cleaning device 210.

[0032] Figure 6 is a cross-sectional view of a cleaning device 210 according to another embodiment. In the example shown in Figure 6, a liquid surface cover 502 is provided near the liquid surface of the liquid storage tank 203 at a height that touches the liquid surface. If the tip 301a of the front mass 301 is exposed above the liquid surface, the cleaning liquid W may be scattered around as described above. Therefore, by providing the liquid surface cover 502, the exposure of the front mass 301 can be suppressed and the scattering of the cleaning liquid W can be suppressed. An opening (not shown) is formed in the center of the liquid surface cover 502 (directly above the liquid storage tank 203) through which a sample nozzle 22 can pass.

[0033] Returning to Figure 1, the detection unit 222 provided in the control device 211 is a functional unit that executes the detection mode. The detection mode is a mode in which the resonance frequencies fr1 and fr2 of the other transducer 201 of transducers 201A or 201B are detected by vibrating one of the transducers 201A or 201B. Furthermore, as will be described in detail later, vibration anomalies are also detected in the detection mode, so the detection mode can also be called an anomaly detection mode.

[0034] When the detection mode is executed by driving the battery, which is the power supply 212, it is preferable to determine whether it is sufficiently charged and to display on the display device 205 that it will not operate if it is not sufficiently charged or that it is not sufficiently charged. This allows for accurate determination without being affected by the battery charge level of the power supply 212. However, it is preferable to execute the abnormal detection mode while powered by connecting to a PC, charging means, etc.

[0035] The control device 211 drives the vibrator 201 by outputting a signal such as a sine wave (or a waveform approximating a sine wave) at a preset drive frequency. The display device 205, the control device 211, and the input device 213 are connected by signal lines. The user can switch between cleaning mode, adjustment mode, or detection mode by operating the input device 213 (for example, by toggling a switch). In the example of this disclosure, the adjustment mode is a mode in which the drive frequencies of vibrators 201A and 201B are adjusted to eliminate any bias when there is a bias between the vibrations from vibrator 201A and vibrator 201B. The input device 213 is a device to which an instruction (for example, switch operation) is input to start the operation of detecting the resonant frequencies fr1 and fr2 of vibrator 201 by the detection unit 222.

[0036] When the operating state of the transducer 201 is determined to be abnormal (the determination method will be described later), the detection unit 222 notifies the user of the abnormality using the display device 205. The display device 205 is an LED, for example, that emits different colors depending on the selected state of, for example, a switch that makes up the input device 213. For example, it may not light up when the power is off, light up green in cleaning mode (normal), light up blue in adjustment mode (normal), light up red in cleaning mode (abnormal), and light up yellow in adjustment mode (abnormal), etc., to inform the user of the status by changing the color. By making part or all of the cover 204 transparent, the display device 205 (LED, etc.) installed at the bottom of the cover 204 can transmit light to the outside. This allows the user to check the display device 205 without removing the cover 204.

[0037] There may be multiple LEDs, but for example, a different LED may be used to indicate the battery charge status. Furthermore, to improve visibility to the user even when the display device 205 is placed on the transport line 25 (described later), it is preferable that the illuminated state can be seen from two sides and the top surface of the cleaning system 30. Therefore, if the cover 204 has a transparent portion, it is preferable that the transparent portion be on two sides.

[0038] Figure 7 shows an example of impedance waveforms measured using different measurement circuits for each of the two oscillators 201A and 201B, illustrating the case where their respective resonant frequencies fr1 and fr2 are separated by a certain distance. Figure 8 shows an example of impedance waveforms measured using the same measurement circuit for each of the two oscillators 201A and 201B, illustrating the case where their respective resonant frequencies fr1 and fr2 are separated by a certain distance. Figure 9 shows an example of impedance waveforms measured using different measurement circuits for each of the two oscillators 201A and 201B, illustrating the case where their respective resonant frequencies fr1 and fr2 are relatively close. Figure 10 shows an example of impedance waveforms measured using the same measurement circuit for each of the two oscillators 201A and 201B, illustrating the case where their respective resonant frequencies fr1 and fr2 are relatively close.

[0039] In Figures 7 to 10, the dotted lines represent the resonant frequencies fr1 and fr2 of oscillators 201A and 201B, respectively. For example, the dotted line on the left is the resonant frequency fr1 of oscillator 201A, and the dotted line on the right is the resonant frequency fr2 of oscillator 201B. In Figures 7 to 10, the horizontal axis represents frequency, and the vertical axis represents impedance. The impedance waveform can be obtained, for example, by measuring the impedance while sweeping the frequency.

[0040] Figures 7 and 9 show the impedance waveforms of two transducers 201A and 201B, measured separately using a measurement circuit (e.g., an impedance analyzer). Figures 7 and 9 are close to the impedance waveforms obtained during actual cleaning mode. Figures 8 and 10 show a single impedance waveform measured when the two transducers 201A and 201B are connected in parallel in the measurement circuit. When the control device 211 drives the two transducers 201A and 201B, the impedance waveforms shown in Figures 8 and 10 are obtained. As will be explained in detail later, for example, combining the two impedance waveforms shown in Figure 7 will not result in the impedance waveform shown in Figure 8, and combining the two impedance waveforms shown in Figure 9 will not result in the impedance waveform shown in Figure 10.

[0041] As described above, by driving the transducers 201A and 201B using their resonant frequencies fr1 and fr2 as driving frequencies, the transducers 201A and 201B can be made to resonate. This increases the amplitude propagated to the cleaning fluid W, thereby enhancing the cleaning effect. However, if a driving circuit is provided to generate a corresponding driving frequency for each of the resonant frequencies fr1 and fr2 of the transducers 201A and 201B, two driving circuits would be used in the example of this disclosure. Therefore, in the example of this disclosure, in order to simplify the device configuration, one driving circuit is used to generate one driving frequency. The single driving frequency generated is close to the resonant frequencies fr1 and fr2 of the transducers 201A and 201B. Then, by applying a voltage corresponding to one driving frequency to multiple pairs of transducers 201A and 201B, the transducers 201A and 201B can be vibrated in a state close to resonance (or even in resonance).

[0042] Therefore, as shown in Figure 1 above, the control device 211 includes a drive circuit 225 that generates a single voltage applied to the vibrators 201A and 201B. The cleaning unit 221 vibrates the vibrators 201A and 201B by applying the single voltage generated by the drive circuit 225 to them. This simplifies the configuration of the control device 211.

[0043] According to the inventors' research, the driving frequencies for driving the multiple transducers 201A and 201B that result in stable behavior of the cleaning fluid W surface (minimal splashing of the cleaning fluid W) and high cleaning effectiveness are the frequencies f1, f2, and f3, indicated by circles in Figures 8 and 10. This finding was discovered by the inventors through actual experiments. The reason for this is not entirely clear, but according to the inventors' research, it is thought to be due to the following reasons, although not limited to the following.

[0044] The frequencies considered to have the highest cleaning effect are the resonant frequencies fr1 and fr2, which have the largest amplitude. However, since the cleaning liquid W in this disclosure is small in quantity, the liquid level fluctuates greatly due to the scattering or atomization of the liquid by strong ultrasonic waves, resulting in instability of the behavior of the transducer 201 and a decrease in the cleaning effect. Therefore, by deliberately vibrating at frequencies f1, f2, and f3 that are slightly shifted from the resonant frequencies fr1 and fr2, the liquid surface can be stabilized while still obtaining a sufficient cleaning effect.

[0045] The inventors' investigations revealed that when comparing Figures 7 and 8 with Figures 9 and 10, the case of Figures 9 and 10 (where the resonant frequencies fr1 and fr2 are relatively close) showed higher liquid surface stability and cleaning effect. Therefore, it is preferable to use transducers 201A and 201B in the cleaning system 30 whose resonant frequencies fr1 and fr2 are close, specifically, for example, the difference between the two resonant frequencies fr1 and fr2 is below a threshold that can be evaluated as indicating a stable liquid surface and high cleaning capacity. The threshold here is not limited to these, but is for example 300 Hz, preferably 100 Hz, more preferably 50 Hz, even more preferably 30 Hz, and particularly preferably 20 Hz. Most preferably, the difference between the two resonant frequencies fr1 and fr2 is 0, that is, the resonant frequency fr1 and the resonant frequency fr2 are the same. Therefore, when the cleaning system 30 is shipped from the factory (when the transducers 201 are assembled into the cleaning system 30), it is preferable to select a combination of transducers 201 that exhibit the impedance waveforms shown in Figures 9 and 10 and assemble the cleaning system 30.

[0046] Furthermore, as described above, the resonant frequencies fr1 and fr2 of the transducer 201 may change over time from the initial resonant frequencies fr1 and fr2 (for example, the resonant frequencies fr1 and fr2 at the time of factory shipment). Therefore, it is preferable to notify the user of any deviation from the impedance waveforms shown in Figures 9 and 10 while the cleaning system 30 is in operation.

[0047] As mentioned above, driving at resonant frequencies fr1 and fr2 maximizes the amplitude of the transducer 201. However, considering the stability of the liquid level of the cleaning fluid W, a frequency with a large amplitude and small impedance fluctuation is desirable. Small impedance fluctuation here means, for example, that in the impedance waveform shown in Figure 7, the slope of the tangent is small (the rate of change is small; for example, 1 or less, preferably 0.5 or less, more preferably 0.1 or less). In other words, if the slope of the tangent is small, the sensitivity is low, and the impedance value is less affected even if the liquid level or liquid surface fluctuates.

[0048] In the cleaning system 30, after the start of operation of the transducer 201, the load on the transducer 201 fluctuates due to fluctuations in the liquid level of the cleaning fluid W and the generation of water flow within the cleaning fluid W. Therefore, when driven at resonant frequencies fr1 and fr2, changes in impedance occur, causing fluctuations in ultrasonic output and large changes in the liquid level (liquid level instability). However, by driving at frequencies f1, f2, and f3 as shown in Figures 7 to 10, such fluctuations can be suppressed, and since it is possible to drive with a relatively large amplitude, the cleaning effect can be easily obtained.

[0049] Furthermore, regarding Figure 10, when comparing the shapes of the graphs in the frequency band smaller than the resonant frequency fr1 and the graphs in the frequency band larger than the resonant frequency fr2, the latter graph is smoother (the slope of the tangent is smaller). For this reason, a frequency f3 belonging to the latter frequency band is preferable to a frequency belonging to the former frequency band.

[0050] The difference between the resonant frequency fr2 (the larger of the resonant frequencies fr1 and fr2) and the frequencies f1 and f2 is preferably small. Specifically, for example, it is 300 Hz or less, preferably 200 Hz or less, more preferably 100 Hz or less, even more preferably 50 Hz or less, and particularly preferably 30 Hz or less.

[0051] When using multiple transducers 201 that exhibit similar impedance waveforms, i.e., combinations where resonant frequencies fr1 and fr2 are close, it is preferable to check the resonant frequencies fr1 and fr2 of each individual transducer 201 from each manufacturing lot (before assembly into the cleaning system 30) in advance. Then, by rearranging the transducers 201 in order of highest or lowest resonant frequencies fr1 and fr2 and combining those that are close, the magnitude of the difference between resonant frequencies fr1 and fr2 can be kept within the above range.

[0052] Furthermore, the conditions shown in Figures 7 and 8 are, for example, when the difference between the resonant frequency fr1 and the resonant frequency fr2 is 200 Hz or more (preferably 300 Hz or more). In such a state, even when using the control device 211 equipped with the above-mentioned drive circuit 225 which can only output one drive frequency, it is possible to drive using frequencies f1 and f2. However, in this state, a high cleaning effect can be obtained for the wall surface of the sample nozzle 22 on the vibrator 201B side which has a resonant frequency fr2, because the driving frequencies f1 and f2 (driving frequencies) are relatively close to the resonant frequency fr2. However, for the wall surface of the sample nozzle 22 on the vibrator 201A side which has a resonant frequency fr1, only a low cleaning effect can be obtained because the frequencies f1 and f2 are relatively far from the resonant frequency fr2. This is because driving with frequency f2, which is further from the resonant frequency fr1 on the left side, reduces the amplitude of the vibrator 201A. Furthermore, in this state, the amplitude of one of the oscillators 201A and 201B is relatively large, which makes the behavior of the liquid surface prone to instability.

[0053] Therefore, in order to drive multiple oscillators 201 using such a single drive frequency, it is preferable to understand the frequency characteristics of each oscillator 201, particularly the resonant frequencies fr1 and fr2. In this disclosure, even if the state shown in Figures 9 and 10 was the state shown in Figures 9 and 10 at the factory (initial) stage, if it changes to the state shown in Figures 7 and 8 due to changes over time, for example, an abnormality is detected. Then, for example, by changing (correcting) the drive frequency as necessary using the modification unit 223, the state shown in Figures 9 and 10 is restored, and driving at a drive frequency suitable for stable driving is achieved.

[0054] As described above, if the control device 211 is equipped with two electronic circuits capable of generating two drive frequencies corresponding to the resonant frequencies fr1 and fr2, the transducer 201 can be driven at each drive frequency. However, if the ultrasonic output (amplitude of the transducer 201) is not of the same magnitude, the liquid surface may oscillate more, or the difference in cleaning force (left-right balance difference) with respect to the sample nozzle 22 may increase. Furthermore, in the cleaning system 30, a greater cleaning effect can be obtained by generating ultrasonic waves with the same phase at the same drive frequency. For this reason, the drive frequency and output are adjusted.

[0055] Specifically, for example, as an adjustment of the drive frequency, adjustments are made such as using a frequency that is shifted by a predetermined number of frequencies from the lowest impedance frequency (resonant frequencies fr1, fr2) in the impedance waveforms shown in Figures 7 to 10 above. Alternatively, the adjustment can be performed by determining the drive voltage from the magnitude of the impedance and the relationship between the magnitude of the impedance and the drive voltage. When driving the oscillator 201 at each drive frequency, the drive frequency and output are adjusted for each oscillator 201. Therefore, from the viewpoint of ease of control, it is preferable to drive multiple oscillators 201 using a single drive frequency. This allows for easy control. In addition, it allows for miniaturization of the circuit size and is advantageous in terms of cost. However, different drive frequencies may be used for each oscillator 201A.

[0056] As shown in Figure 1 above, the control device 211 includes a cleaning unit 221 and a detection unit 222. The detection unit 222 detects the resonant frequencies fr1 and fr2 of the other transducer 201 of either transducer 201A or transducer 201B by vibrating one of the transducers 201A or transducer 201B, as described above. In this way, the resonant frequencies fr1 and fr2 of the transducers 201 provided in the cleaning system 30 can be measured, and the transducers 201 can be driven according to the actual state of the cleaning system 30. This allows multiple transducers 201 to resonate appropriately, increasing the amplitude and improving cleaning efficiency.

[0057] As for the specific method of detecting the resonant frequencies fr1 and fr2, for example, as described above, when one transducer 201 is vibrated, the driving frequency of the other transducer 201 at which the signal (voltage value, etc.) output from the other transducer 201 is at its maximum can be determined as the resonant frequencies fr1 and fr2 of the other transducer 201. More specifically, the detection unit 222 detects the resonant frequency of the other transducer 201 based on the change in the received signal value of the other transducer 201 when one of the transducers 201A or 201B is vibrated while changing its driving frequency. In this way, the resonant frequencies fr1 and fr2 can be detected. The driving frequency at which the received signal value is, for example, at its maximum can be set as the resonant frequencies fr1 and fr2. However, even if the received signal value is not necessarily at its maximum, if it is a received signal value at which resonance is considered to be occurring, the frequency at that received signal value can also be set as the resonant frequencies fr1 and fr2.

[0058] In the example of this disclosure, the detection unit 222 detects the resonant frequency fr2 (second resonant frequency) of the transducer 201B by vibrating the transducer 201A. Furthermore, the detection unit 222 detects the resonant frequency fr1 (first resonant frequency) of the transducer 201A by vibrating the transducer 201B. That is, the detection unit 222 detects the resonant frequency fr2 of the transducer 201B based on the change in the received signal value of the transducer 201B, which is the receiving side, when the drive frequency of the transducer 201A, which is the transmitting side (vibrating side), is changed. In addition to this, the detection unit 222 further detects the resonant frequency fr1 of the transducer 201A based on the change in the received signal value of the transducer 201A, which is the receiving side, when the drive frequency of the transducer 201B, which is the transmitting side (vibrating side), is changed.

[0059] The cleaning unit 221 then drives both (the entire) transducers 201A and 201B at, for example, a single drive frequency determined from the detected resonant frequencies fr1 and fr2. In this way, transducers 201A and 201B can be driven according to their actual state (actual resonant frequencies fr1 and fr2). As a result, transducers 201A and 201B can be properly resonated, increasing the amplitude and improving cleaning efficiency.

[0060] In this disclosure, the resonant frequencies fr1 and fr2 of the other oscillator 201 are measured by vibrating one oscillator 201 and causing the other oscillator 201 to resonate. As described above, each of the multiple oscillators 201 has an independent resonant frequency fr1 and fr2 (synonymous with natural frequency). When one oscillator 201 is driven (vibrated) at a predetermined drive frequency, another oscillator 201 may vibrate even if no voltage is applied to it. The drive frequency at this time is the resonant frequency fr1 and fr2 of the other oscillator 201. Furthermore, an oscillator 201 vibrated by a disturbance outputs a signal that is an indicator, for example, a voltage value. Therefore, in the example of this disclosure, for example, the drive frequency (drive voltage) of the vibrating oscillator 201 is changed to find the drive frequency that maximizes the signal that is an indicator, for example, a voltage value.

[0061] The detection unit 222 calculates the difference between the resonant frequency fr1 of the transducer 201A and the resonant frequency fr2 of the transducer 201B. The larger this difference, the greater the discrepancy between the resonant frequencies fr1 and fr2, making it difficult to achieve resonance when driven (vibrated) at a single drive frequency. By calculating this difference, the detection unit 222 can determine whether or not transducers 201A and 201B can resonate at a single drive frequency.

[0062] The detection unit 222 notifies the user that a cleaning abnormality has occurred, for example, when the calculated difference is greater than a threshold (e.g., 300 Hz, preferably 100 Hz) that can be evaluated as resonant. If the difference is greater than the threshold, the amplitude of one of the transducers 201 will decrease at a single drive frequency, and there is a high possibility that the cleaning performance will be insufficient. Therefore, by notifying the user in such cases, it is possible to prompt the user to take countermeasures. However, in order to perform cleaning properly, it is preferable to adjust the drive frequency along with the notification, or instead of the notification.

[0063] In addition to the method of driving at frequencies near the resonant frequencies fr1 and fr2 as described above, the drive frequency can also be adjusted by driving at frequencies slightly shifted from the resonant frequencies fr1 and fr2. The magnitude of this slight shift is a predetermined magnitude (e.g., 50 Hz) determined by the design conditions and arrangement of the oscillator 201. In this disclosure, since the change is made based on the change from the resonant frequencies fr1 and fr2 confirmed when determining the drive frequency, either method can be applied. Furthermore, in the method of shifting from the resonant frequencies fr1 and fr2, by pre-memorizing the amount of the shift, it is possible to automatically determine a drive that is shifted by a certain amount from the resonant frequencies fr1 and fr2 during readjustment.

[0064] In another embodiment, the detection unit 222 notifies the user, for example, of an abnormality in the transducer 201 (an abnormality during cleaning using the transducer 201) based on the time-dependent changes in the detected resonant frequencies fr1 and fr2. This point will be explained with reference to Figure 11.

[0065] Figure 11 is a table showing the degree of change in frequency from the previous recorded value when the resonant frequencies fr1 and fr2 of oscillators 201A and 201B changed or did not change.

[0066] Anomalies in the transducer 201 caused by changes in the resonant frequencies fr1 and fr2 are likely to occur when the resonant frequencies fr1 and fr2 of transducers 201A and 201B change significantly from the previously confirmed data. In the cleaning system 30, multiple transducers 201 are used, so a comparison is made with the previously recorded values ​​for each of the transducers 201A and 201B. In other words, anomalies can be determined from the magnitude of the change in the resonant frequencies fr1 and fr2 of each transducer 201A and 201B. The threshold (numerical range) for determining the magnitude of the change in resonant frequencies fr1 and fr2 can be arbitrarily determined. For example, a change of 300Hz or more can be evaluated as a large change, a change of 50Hz or more but less than 300Hz as a moderate change, and a change of less than 50Hz as a small change. However, the range of magnitude of the change is not limited to these numerical ranges; for example, it can be determined based on the magnitude of the difference in resonance when multiple transducers 201A and 201B are driven at a single drive frequency.

[0067] Condition 1 is the case where the resonant frequency fr1 of transducer 201A changes mainly, with a large change in the resonant frequency fr1 of transducer 201A and a small change in the resonant frequency fr2 of transducer 201B. Condition 2 is the opposite case, where the resonant frequency fr2 of transducer 201B changes mainly, with a small change in the resonant frequency fr1 of transducer 201A and a large change in transducer 201B. In these cases, the waveform approaches the shape shown in Figures 7 and 8 above, i.e., the shape in which the impedance waveform splits into two branches, which is a situation that requires attention. Therefore, an alarm is issued (e.g., displayed).

[0068] Here, the alarm type may be switched depending on the magnitude of the change, for example, requiring attention if it is between 50Hz and 300Hz, and requiring immediate action if it is 300Hz or higher (the state in Figures 7 and 8 above). In that case, the LED color of the display device 205 can be changed. Accordingly, the display unit 224 switches the content displayed on the display device 205 according to the abnormal state detected by the detection unit 222.

[0069] Condition 3 is the case where the resonant frequencies fr1 and fr2 of oscillators 201A and 201B change, and the change in the resonant frequencies fr1 and fr2 of both oscillators 201A and 201B is moderate or greater. There are two further types of cases in this category: one in which both oscillators 201A and 201B change in the same direction (decrease or increase), and another in which they change in opposite directions (one oscillator 201 increases while the other decreases). If the frequency changes are of similar magnitude and in the same direction, this can be addressed by shifting the drive frequency by that amount. However, if the changes are in opposite directions, the situation described in Figures 7 and 8 above occurs when the difference between the two resonant frequencies is, for example, 200 Hz or more. Therefore, even if the change in each oscillator 201 is, for example, around 50 Hz, caution is required, and an alarm will be triggered.

[0070] In the case of condition 4, the resonant frequencies fr1 and fr2 of oscillators 201A and 201B do not change, or the change in resonant frequencies fr1 and fr2 of oscillators 201A and 201B is small. Therefore, the state of oscillators 201A and 201B is as shown in Figures 9 and 10 above, and this case is a normal state. For this reason, no alarm is displayed, and the display device 205 shows a normal display.

[0071] Returning to Figure 1, the detection unit 222 calculates a first difference between the resonant frequency fr1 at the evaluation time and the resonant frequency fr1 at a predetermined time prior to the evaluation time. At the same time, the detection unit 222 calculates a second difference between the resonant frequency fr2 at the evaluation time and the resonant frequency fr2 at the predetermined time. The evaluation time here is also the time when it is decided whether or not to notify. The predetermined time here is, for example, the "time when the previous data was acquired" as shown in Figure 11 above. Furthermore, the detection unit 222 calculates a third difference between the first difference and the second difference, and notifies the user if the calculated third difference is greater than or equal to a predetermined value that is evaluated as causing an abnormality in cleaning using the cleaning solution W.

[0072] As shown in condition 3 of Figure 11 above, even if the difference from the previous data is large, if the difference is large for both transducers 201A and 201B (i.e., if the third difference is relatively small), proper cleaning is possible. Therefore, the third difference between the first difference and the second difference is further calculated, and if the third difference is large, it is considered that the state is approaching that shown in Figures 7 and 8 above. In this case, the user is notified. This allows the user to be encouraged to avoid improper cleaning.

[0073] Figure 12 is a table showing the degree of change in the output value from the previous recorded value when the output value of the oscillator 201 changed or did not change.

[0074] Condition 1 is a case where the output value of transducer 201A increases or decreases, with a large change in the output of transducer 201A and a small change in the output of transducer 201B. Condition 2 is a case where the output value of transducer 201B increases or decreases, with a small change in the output of transducer 201A and a large change in the output of transducer 201B. In both cases, the output of one side becomes relatively larger, causing the output of the other side to decrease relatively, resulting in a decrease in cleaning performance. In addition, this condition makes it easier for liquid surface oscillation to increase or for liquid splashing to occur, so the display device 205 displays an alarm. Condition 3 is a case where the output values ​​of both transducers 201A and 201B increase or decrease, with a large change in the output of both transducers 201A and 201B. In the case of an increase, a significant increase in liquid surface oscillation and a large amount of liquid splashing occur, and in the case of a decrease, cleaning performance decreases significantly.

[0075] An imbalance in the output of the two transducers 201 due to a decrease or increase in output (conditions 1 and 2 in Figure 12) can be resolved by adjusting the output of the transducers 201 using the control device 211. Specifically, the control device 211 further includes a modification unit 223. The modification unit 223 is a functional unit that changes the drive voltage used for the vibration of the transducers 201 in the cleaning unit 221 to a drive voltage that allows the output of the ultrasonic waves emitted by transducer 201A and transducer 201B to be evaluated as being the same, based on two voltage values ​​detected by the detection unit 222 (output values ​​of transducers 201A and 201B; an example of the first received signal value and the second received signal value). This adjusts the output balance of transducers 201A and 201B, enabling proper cleaning.

[0076] More specifically, the modification unit 223 can adjust the output of the oscillator 201 by manipulating a variable resistor (not shown) connected to the oscillator 201 to adjust the level of the output signal. Similarly, if the output of both oscillators 201 increases or decreases, the modification unit 223 can adjust the signal levels to the two oscillators 201 up or down to the same level as before.

[0077] In addition, under conditions 1 and 2 in Figure 12, the difference between oscillators 201A and 201B may be simply compared, similar to the matter described for the detection unit 222 above.

[0078] In the example shown in Figure 12, if the problem is judged solely by the voltage value, which is the output level, readjustment may worsen the condition if there is an abnormality in the liquid storage tank 203. For example, if the liquid level in the liquid storage tank 203 is not at the correct level and there is little liquid, the detected output may decrease. In addition, if the liquid level is unstable (fluctuates greatly), the measured value may become unstable. Therefore, if an abnormality is judged solely from the output level, the output may increase too much when the liquid level is set correctly, causing liquid splashing or overloading the transducer 201.

[0079] Therefore, in addition to the voltage value, it is preferable to simultaneously check the change in impedance from the current value flowing through the oscillator 201 being measured. Alternatively, in a system that can automatically fill the storage tank 203 with cleaning solution W and bring the liquid level to a predetermined level, it is desirable to check for abnormal ranges in the output level. Such a system can be realized, for example, by installing a liquid level detection sensor on the sample nozzle 22.

[0080] By analyzing the noise level of the voltage values ​​continuously acquired from the receiving transducer 201, it is possible to infer the state of liquid surface fluctuation and determine if there is a shortage in the liquid level. For example, if multiple voltage data acquired every second fluctuate above a certain level, it can be inferred that the liquid surface is fluctuating significantly. This susceptibility to liquid surface fluctuations is unique to the cleaning system 30 of this disclosure, in which the transducer 201 is positioned near the liquid surface. Therefore, it is easy to distinguish between abnormal liquid levels and abnormalities in the transducer 201.

[0081] In another embodiment, the detection unit 222 vibrates the transducer 201A to measure (actually measure) a voltage value which is an example of a second received signal value used to determine the resonant frequency fr2 of the transducer 201B. This voltage value is a voltage value (output level) that is output from the transducer 201B due to the propagation of vibration from the transducer 201A, even though no voltage is applied to the transducer 201A while it is vibrating in detection mode. Furthermore, the detection unit 222 also measures a voltage value which is an example of a first received signal value used to determine the resonant frequency fr1 of the transducer 201A, by vibrating the transducer 201B. This voltage value is a voltage value (output level) that is output from the transducer 201A due to the propagation of vibration from the transducer 201B, even though no voltage is applied to the transducer 201B while it is vibrating in detection mode.

[0082] The detection unit 222 notifies of an abnormality in the transducer 201 (cleaning abnormality) based on the time-dependent changes in the two measured voltage values ​​(voltage values ​​output from transducers 201A and 201B, respectively). As explained with reference to Figure 12 above, a large difference from the previous data indicates a significant fluctuation in the output value. Therefore, by using the two time-dependent changes as a basis, it is possible to prompt the user to avoid improper cleaning, as explained in the other embodiment above.

[0083] At this time, the detection unit 222 calculates a first difference between the voltage value output from the transducer 201A at the evaluation time (an example of the first received signal value described above) and the voltage value output from the transducer 201A at a predetermined time prior to the evaluation time (an example of the first received signal value described above). Along with this, the detection unit 222 calculates a second difference between the voltage value output from the transducer 201B at the evaluation time (an example of the second received signal value described above) and the voltage value output from the transducer 201B at a predetermined time (an example of the second received signal value described above). Furthermore, the detection unit 222 calculates a third difference between the first difference and the second difference in the same manner as described above. When the calculated third difference is greater than or equal to a predetermined value that is evaluated as causing an abnormality in cleaning using the cleaning solution W, the detection unit 222 notifies the user. This allows the user to be prompted to avoid inappropriate cleaning.

[0084] The first received signal value is the voltage output from transducer 201A when transducer 201B is driven, as described above. The second received signal value is also the voltage output from transducer 201B when transducer 201A is driven, as described above. These index values ​​allow for easy measurement of the received signal value.

[0085] Figure 13 is a flowchart of the ultrasonic cleaning method of the present disclosure (hereinafter referred to as the "cleaning method of the present disclosure"). The cleaning method of the present disclosure includes steps S801 to S813. The cleaning method of the present disclosure is performed by the control device 211 described above.

[0086] The triggers for activating the detection mode (anomaly detection mode) performed by the detection unit 222 include input to the input device 213, input to a PC connected to the cleaning system 30 via USB, wireless communication, etc. The detection unit 222 checks the current drive frequency recorded in the recording unit 226 (step S801). The current drive frequency is, for example, the drive frequency at the time of shipment, a default frequency, or the previously detected resonant frequency. The detection unit 222 then sets the current drive frequency confirmed in step S801 as the center frequency of the frequency range to be checked in detection mode. The detection unit 222 determines a certain range from this center frequency (for example, plus or minus 150 Hz) and determines the frequency range to be output at a predetermined interval (for example, 10 Hz) (step S802).

[0087] The detection unit 222 uses the determined frequency range to sequentially output a signal to either the transducer 201A or the transducer 201B, changing the frequency from high to low frequencies (step S803). As a result, ultrasonic waves are irradiated onto the cleaning liquid W from the transducer 201 that has output the signal. At this time, the transducer 201 installed opposite to it receives (extracts) the signal from the opposite transducer 201 as a voltage value via the cleaning liquid W in the storage tank 203. The detection unit 222 records the voltage value (maximum value) determined from the received signal and the frequency at that time (the driving frequency of the transducer 201 that has outputted the vibration) in the recording unit 226 (step S804). Signal output continues until all frequencies within the determined frequency range have been reached (No. in step S805), and each time an output is made, the frequency is switched to the next frequency, and the driving frequency of the transducer 201 is set to the next frequency (step S806).

[0088] For these steps S803 to S805, the detection unit 222 performs them on both oscillators 201. The detection unit 222 confirms that processing of all oscillators 201 is complete (step S807). If processing is to continue (No), the detection unit 222 switches between the oscillator 201 that outputs a signal (the oscillator 201 that vibrates) and the oscillator 201 that receives a signal (step S808). Through the above process, the output value (voltage value) in the determined frequency range is recorded for all oscillators 201.

[0089] The detection unit 222 uses the data consisting of voltage values ​​and corresponding frequencies recorded in the recording unit 226 to perform abnormality determination of the resonant frequencies fr1 and fr2 (step S809). Specifically, the detection unit 222 estimates the resonant frequencies fr1 and fr2 from the output values ​​(voltage values) recorded for each frequency within the frequency range determined in step S802. Specifically, the frequency at which the recorded output value is maximum is highly likely to be the resonant frequency fr1 or fr2. Therefore, for example, the frequency at which the output value is maximum can be determined as the resonant frequency fr1 or fr2. However, the operation may become unstable due to fluctuations in the liquid surface, and it is possible that the correct output may not be recorded instantaneously. For this reason, when estimating the resonant frequencies fr1 and fr2, it is preferable to confirm the accuracy of the estimation by looking at the change in output values ​​at frequencies before and after the frequency at which the output value is maximum (for example, the slope of the tangent line when graphed). For example, as shown in Figure 7 above, the impedance changes rapidly at frequencies before and after the resonant frequencies fr1 and fr2. Therefore, it is possible that the output value will change significantly at frequencies around the estimated resonant frequencies fr1 and fr2. However, if the change in output value is small at frequencies around the estimated resonant frequencies fr1 and fr2, then the estimated resonant frequencies fr1 and fr2 can be considered incorrect.

[0090] Furthermore, for example, the output value (voltage value) data recorded for a determined frequency range shows a similar trend to the waveform of the oscillator 201 alone, as shown in Figures 7 and 9 above, when divided into predetermined intervals (e.g., 10 Hz). In other words, the output value decreases as you move away from the frequency where the output is strongest. From this trend, the resonant frequencies fr1 and fr2 can be estimated.

[0091] However, comparing Figure 7 and Figure 8, it can be seen that the resonant frequency fr1 of the left-hand oscillator (for example, oscillator 201A) is different between the single oscillator in Figure 7 and the simultaneously driven oscillator in Figure 8. When two oscillators 201 are driven simultaneously, the resonant frequencies fr1 and fr2 are slightly different. This tendency is particularly pronounced when the resonant frequencies fr1 and fr2 of the two oscillators 201 are far apart. Furthermore, the resonant frequency fr1 of oscillator 201A, which has a lower resonant frequency fr1, shifts to the lower side. The reason for this phenomenon is not clear, but it is thought to be due to the following reasons, although not limited to these. That is, from the perspective of the vibrating oscillator 201A, the vibration of the other oscillator 201B is a "disturbance," and from the perspective of the vibrating oscillator 201B, the vibration of the other oscillator 201A is a "disturbance." Therefore, it is thought that oscillators 201A and 201B influence each other, causing this "shift."

[0092] When the resonant frequencies fr1 and fr2 of the two oscillators 201 are far apart, it is preferable to take into account the difference in resonant frequency fr1 during simultaneous operation as shown in Figure 8. However, to avoid complicating the process, the specified value for the difference between resonant frequencies fr1 and fr2 may simply be set to be narrower.

[0093] When the resonant frequencies fr1 and fr2 of two oscillators 201 are far apart, the lower resonant frequency fr1 can be estimated to be lower by the difference between the resonant frequencies fr1 and fr2 (for example, by about 50 Hz), thereby obtaining resonant frequencies fr1 and fr2 that are closer to the actual values. In the example of this disclosure, an abnormality is determined in step S807 when there is a change from the previously recorded value, as shown in Figures 11 and 12 above, or when the difference between the two resonant frequencies fr1 and fr2 exceeds a certain value (for example, 100 Hz).

[0094] If the determination in step S809 confirms an abnormality in the resonant frequencies fr1 and fr2 (Yes), the detection unit 222 records in the recording unit 226 that the resonant frequencies fr1 and fr2 are in an abnormal state (step S808). Similarly, the recorded data is used to perform an abnormality determination of the output value (step S811).

[0095] In step S811, the detection unit 222 refers to the voltage values ​​at the resonant frequencies fr1 and fr2 determined in step S809, or the voltage values ​​at frequencies shifted a certain frequency higher than the determined resonant frequencies fr1 and fr2. For example, if the resonant frequency fr1 is 40.20 kHz, the latter voltage value corresponds to 40.22 kHz, which is shifted by 20 Hz. The detection unit 222 checks for abnormalities by checking if there is a large difference (e.g., 20% or more) between the outputs of the two oscillators 201. If there is a large difference, the detection unit 222 determines that there is an abnormality. As shown in Figure 12 above, an abnormality may also be determined if there is a large change from the previously recorded value.

[0096] If the determination in step S811 confirms an output abnormality (Yes), the detection unit 222 records in the recording unit 226 that the output value is in an abnormal state (step S812). After the above processing is completed, the display unit 224 changes the LED lighting color of the display device 205 according to the normal / abnormal state (step S813). In addition to changing the color, blinking or other methods may also be used.

[0097] Figure 14A is a perspective view showing an automated analyzer 10, which is a processing system of the present disclosure. Figure 14B is a top view showing an enlarged view of the reaction disk 13. An example of the processing system of the present disclosure, the automated analyzer 10, comprises a cleaning system 30 and a sample nozzle 22. The sample nozzle 22 is a nozzle that aspirates and discharges at least one of the liquids of a sample or reagent, and is also cleaned with a cleaning solution W. The cleaning system 30 of the present disclosure, for example, ultrasonically cleans the sample nozzle 22.

[0098] In the processing system of this disclosure, any processing is performed on at least one of the liquids of the sample or reagent using the sample nozzle 22. However, the processing system of this disclosure is not limited to the automated analyzer 10 shown in Figure 14A, etc., but may be any system (including apparatus) that performs any processing, specifically, for example, a DNA sequencer, a nucleic acid extractor, a mass spectrometer, a sample pretreatment device for pre-treating any sample, etc.

[0099] As shown in Figure 14A, the automated analyzer 10 consists of a reagent disk 12 on which multiple reagent containers 11 are placed, a reaction disk 13 on which reagents and samples are mixed and the reaction is measured, a reagent dispensing mechanism 14 for aspirating and dispensing reagents, and a sample dispensing mechanism 15 for aspirating and dispensing samples.

[0100] The reagent dispensing mechanism 14 is equipped with a reagent nozzle 21 for dispensing reagents. The sample dispensing mechanism 15 is equipped with a sample nozzle 22 (an example of a nozzle) for dispensing samples. Here, nozzles such as the reagent nozzle 21 and the sample nozzle 22 are collectively referred to as "dispensing nozzles" as appropriate. The cleaning system 30 may ultrasonically clean the reagent nozzle 21.

[0101] Samples placed in the automated analyzer 10 are placed in sample containers 23 (test tubes) and then placed on racks 24, which are then transported on a transport line 25. Multiple sample containers 23 are placed on racks 24. The samples are blood-derived samples such as serum and whole blood, or urine, etc. In addition, in this example, a washing system 30 is also installed on racks 24.

[0102] The sample dispensing mechanism 15 moves the sample nozzle 22 to a suction position for aspirating a sample from the sample container 23, a discharge position for dispensing into the cell 26 (which, as shown in the enlarged view in Figure 14B, is a container divided into small sections), and a washing position where a washing tank 27 is located to wash the tip of the sample nozzle 22 with water. Furthermore, the sample dispensing mechanism 15 lowers the sample nozzle 22 to match the height of the sample container 23 at the suction position, the height of the cell 26 at the discharge position, and the height of the washing tank 27 at the washing position. In summary, the sample dispensing mechanism 15 is configured to move the sample nozzle 22 to each stop position by rotational and vertical movement.

[0103] The control of the sample dispensing mechanism 15 and other devices such as the transport line 25 is performed by the automatic analyzer control device 1000 (described later). The automatic analyzer 10 also includes a measurement unit (not shown) that analyzes the concentration of predetermined components contained in the sample by photometry of a mixture of sample and reagent contained in the cell 26. The measurement unit includes, for example, a light source and a photometer. The photometer is, for example, an absorbance photometer or a scatter photometer.

[0104] The cleaning system 30 of this disclosure comprises a cleaning device 210 as described above. The cleaning system 30 is used to clean the tip of the sample nozzle 22 that has come into contact with the sample. The timing of use is during the daily maintenance of the automated analyzer 10, and cleaning is often performed before or after analysis. If a large number of samples are handled in a day, the cleaning system 30 may be placed on a rack 24 and sent along the transport line 25 between analyses. This helps to maintain the cleanliness of the sample nozzle 22.

[0105] The cleaning system 30 can clean any sample nozzle 22 or reagent nozzle 21 that can access the transport line 25, without being limited to samples. Furthermore, multiple sample nozzles 22 can be cleaned during a single transport cycle. However, reusing the cleaning solution W after cleaning may cause re-adhesion of contaminated material. Therefore, it is desirable to replace the cleaning solution W for each sample nozzle 22. In this case, methods include running one cleaning system 30 through the transport line 25 multiple times, or running multiple cleaning systems 30.

[0106] Furthermore, the conveying method for the conveying line 25 can include a belt that moves along the conveying line 25, a push claw, or a method that utilizes electromagnetic force. In addition, the cleaning device 210 within the cleaning system 30 can be incorporated into the device, such as the cleaning tank 27.

[0107] The cleaning system 30 is provided with the same transport function as the rack 24. Specifically, the cleaning system 30 has the same external dimensions as the rack 24 and does not interfere with transport on the transport line 25. Furthermore, in accordance with the transport line 25 designed for transporting the rack 24, it is desirable that the parts of the cleaning system 30 that come into contact with the transport line 25 be made of the same material as the rack 24 (especially one with similar transparency and coefficient of friction).

[0108] Figure 15 is a block diagram showing an automated analyzer 10, which is an example of the processing system of the present disclosure. Figure 16 shows an embodiment in which an abnormality is detected outside the processing system. The automated analyzer 10 is controlled by an automated analyzer control device 1001. The user of the automated analyzer 10 can give instructions for analysis and cleaning processes to the automated analyzer control device 1001 from a graphical user interface (GUI 1002). Normal analysis (analysis mode) and cleaning mode (maintenance mode) are performed by a maintenance control device 1003. The maintenance control device 1003 controls the sample dispensing mechanism 15 and the transport line 25.

[0109] The sample dispensing mechanism 15 is controlled by the dispensing arm control device 1004 (dispensing arm control unit). The dispensing arm control device 1004 controls the dispensing arm horizontal movement mechanism 1005 (dispensing arm horizontal movement unit) and the dispensing arm vertical movement mechanism 1006 (dispensing arm vertical movement unit), thereby controlling the position of the sample nozzle 22. The dispensing arm horizontal movement mechanism 1005 and the dispensing arm vertical movement mechanism 1006 are examples of adjustment mechanisms provided in the automatic analyzer 10 that adjust the position of the sample nozzle 22.

[0110] In cleaning mode (maintenance mode), the horizontal and vertical positions of the sample nozzle 22 are controlled so that the cleaning area of ​​the tip of the sample nozzle 22 is immersed in the cleaning solution W in the storage tank 203. The position of the sample nozzle 22 is then determined to a depth in which the part to be cleaned is immersed in the cleaning solution W. The transport line 25 is driven by the rack transport control device 1007 (rack transport control unit) via the rack transport mechanism 1008 (rack transport unit). The reagent nozzle 21 can also be cleaned using a similar configuration if it can access the transport line 25.

[0111] The cleaning system 30 provided in the automated analyzer 10, which is an example of a processing system, includes the configuration shown in Figure 1 above, as well as a nozzle detection mechanism 1021 that detects when the dispensing nozzle is immersed in the cleaning solution W. In the example shown in Figure 15, in detection mode, the control device 211 drives the transducer 201 and detects abnormalities in the resonant frequencies fr1 and fr2, as well as abnormalities in the output. Therefore, the control device 211 is a device that controls the cleaning mode and the detection mode. These two modes can be switched between by operation from the input device 213 or GUI 1002, as described above.

[0112] The GUI1002 (Graphical User Interface) is displayed on the screen of, for example, a personal computer or a mobile communication terminal (tablet, etc.). In other words, the display device 205 is composed of the GUI1002. When the GUI1002 issues instructions to the cleaning system 30, for example, when connected via USB, the instructions are issued at a location other than the transport line 25. Then, according to the content of the instructions from the GUI1002, at least one of the cleaning mode or detection mode is activated. In detection mode, when an abnormality is confirmed after the execution of an abnormality detection judgment, the display unit 224 displays the detection result from the detection unit 222 on the display device 205, which is composed of the GUI1002. Depending on the display content, a message confirming the decision to readjust as described above may also be displayed.

[0113] Furthermore, the data from the recording unit 226 can be displayed on the GUI 1002 or downloaded, and multiple past data sets can be referenced.

[0114] In this disclosure, the cleaning system 30 is a transportable type that can be transported by the transport line 25, and therefore there is limited space for incorporating wireless circuits; therefore, the explanation was given using a wired connection as an example. However, this does not mean that the anomaly detection method of this disclosure cannot be implemented using wireless communication; it can be implemented in the same way.

[0115] Furthermore, this disclosure can also be applied in the same way when the cleaning system 30 is not transported but installed (fixed) inside the automatic analyzer 10. In this case, the display device 205 and input device 213 can be integrated into the automatic analyzer 10. Then, abnormality management and operation are performed through the GUI 1002. In such a configuration, the power supply inside the automatic analyzer 10 is used instead of a battery, such as the drive power supply 212, and the signal lines from the power supply can be used instead of power supply via USB or the like.

[0116] This disclosure describes a case where a reagent nozzle 21 and a sample nozzle 22 are provided separately, but in some automated analyzers 10, the dispensing of reagents and samples may be performed using a single shared nozzle. Even in such devices, the nozzle is washed with a stream of water each time reagents and samples are dispensed, but daily maintenance is necessary, and the washing described in this disclosure can maintain dispensing accuracy. [Explanation of Symbols]

[0117] 10 Automatic analyzer 1000 Automatic analyzer control system 1001 Automatic analyzer control device 1002 GUI 1003 Maintenance control device 1004 Dispensing Arm Control Device 1005 Dispensing Arm Horizontal Movement Mechanism 1006 Dispensing arm vertical movement mechanism 1007 Rack transport control device 1008 Rack transport mechanism 1021 Nozzle detection mechanism 11 Reagent containers 12 Reagent Disks 13 Reaction disk 14 Reagent dispensing mechanism 15. Sample dispensing mechanism 20 Cleaning Systems 200 Cleaning device 201 Oscillator 201A transducer 201B Oscillator 202 Base 203 Liquid storage tank 204 Cover 205 Display device 21 Reagent nozzle 210 Cleaning device 211 Control device 212 Power supply 213 Input device 22 Sample nozzles 221 Cleaning section 222 Detection Unit 223 Changes 224 Display section 225 Drive Circuit 226 Records Section 23 Sample containers 24 racks 25 Conveyor Line 26 cells 27 Washing tank 30 Cleaning Systems 301 Front Mass 301a Tip 302 Backmas 303 Piezoelectric element 304 Metal plate 305 volts 306 Flange 307 Seal 311 Through hole 401 Container 502 Liquid level cover W Cleaning Solution

Claims

1. A storage tank in which the cleaning solution is stored, The ultrasonic transducer vibrates the cleaning liquid and includes a first ultrasonic transducer and a second ultrasonic transducer positioned opposite to the first ultrasonic transducer on the side of the liquid storage tank with the cleaning liquid in between, A control device is provided, The control device is A cleaning unit that cleans a member immersed in the cleaning solution by vibrating the first ultrasonic transducer and the second ultrasonic transducer, A detection unit that detects the resonant frequency of the other ultrasonic transducer of the first ultrasonic transducer or the second ultrasonic transducer by vibrating one of the two ultrasonic transducers, Equipped with An ultrasonic cleaning system characterized by the following features.

2. An ultrasonic cleaning system according to claim 1, The detection unit detects the resonant frequency of the other ultrasonic transducer based on the change in the received signal value of the other ultrasonic transducer when the driving frequency of one of the first or second ultrasonic transducers is changed and the other ultrasonic transducer is vibrated. An ultrasonic cleaning system characterized by the following features.

3. The ultrasonic cleaning system according to claim 2, The detection unit detects the second resonant frequency of the second ultrasonic transducer by vibrating the first ultrasonic transducer, and further detects the first resonant frequency of the first ultrasonic transducer by vibrating the second ultrasonic transducer. The cleaning unit drives the first ultrasonic transducer and the second ultrasonic transducer at a drive frequency determined from the detected first and second resonant frequencies. An ultrasonic cleaning system characterized by the following features.

4. An ultrasonic cleaning system according to claim 1, The detection unit calculates the difference between the first resonant frequency of the first ultrasonic transducer and the second resonant frequency of the second ultrasonic transducer. An ultrasonic cleaning system characterized by the following features.

5. An ultrasonic cleaning system according to claim 1, The detection unit is The second resonant frequency of the second ultrasonic transducer is detected by vibrating the first ultrasonic transducer, and further, the first resonant frequency of the first ultrasonic transducer is detected by vibrating the second ultrasonic transducer. Based on the time-dependent changes in the detected first and second resonant frequencies, an abnormality in the ultrasonic transducer is reported. An ultrasonic cleaning system characterized by the following features.

6. An ultrasonic cleaning system according to claim 5, The detection unit is The first difference between the first resonant frequency at the evaluation time and the first resonant frequency at a predetermined time prior to the evaluation time is calculated, The second difference between the second resonant frequency at the evaluation time and the second resonant frequency at the predetermined time is calculated. Furthermore, a third difference is calculated between the first difference and the second difference, and if the calculated third difference is greater than or equal to a predetermined value that is evaluated as causing an abnormality in cleaning using the cleaning solution, the user is notified. An ultrasonic cleaning system characterized by the following features.

7. An ultrasonic cleaning system according to claim 1, The detection unit is By vibrating the first ultrasonic transducer, the second received signal value used to determine the second resonant frequency of the second ultrasonic transducer is measured. Furthermore, by vibrating the second ultrasonic transducer, the first received signal value used to determine the first resonant frequency of the first ultrasonic transducer is also measured. Based on the time-dependent changes in the measured first received signal value and the second received signal value, an abnormality in the ultrasonic transducer is reported. An ultrasonic cleaning system characterized by the following features.

8. An ultrasonic cleaning system according to claim 7, The detection unit is The first difference between the first received signal value at the evaluation time and the first received signal value at a predetermined time prior to the evaluation time is calculated, The second difference between the second received signal value at the evaluation time and the second received signal value at the predetermined time is calculated. Furthermore, a third difference is calculated between the first difference and the second difference, and if the calculated third difference is greater than or equal to a predetermined value that is evaluated as causing an abnormality in cleaning using the cleaning solution, the user is notified. An ultrasonic cleaning system characterized by the following features.

9. An ultrasonic cleaning system according to claim 8, The first received signal value is the voltage value output from the first ultrasonic transducer when the second ultrasonic transducer is driven. The second received signal value is the voltage value output from the second ultrasonic transducer when the first ultrasonic transducer is driven. An ultrasonic cleaning system characterized by the following features.

10. An ultrasonic cleaning system according to claim 7, The first received signal value and the second received signal value are voltage values. The control device further includes a modification unit that modifies the drive voltage used for the vibration of the ultrasonic transducer in the cleaning unit, based on the first and second received signal values ​​detected by the detection unit, to a drive voltage that results in an output such that the output of the ultrasonic waves emitted by the first ultrasonic transducer and the output of the ultrasonic waves emitted by the second ultrasonic transducer are evaluated to be the same. An ultrasonic cleaning system characterized by the following features.

11. An ultrasonic cleaning system according to claim 1, The ultrasonic cleaning system further includes a display device that indicates an abnormality. The control device further includes a display unit that switches the content displayed on the display device according to the abnormal condition detected by the detection unit. An ultrasonic cleaning system characterized by the following features.

12. An ultrasonic cleaning system according to claim 1, The ultrasonic cleaning system further includes an input device to which an instruction to start the operation of detecting the resonant frequency of the ultrasonic transducer by the detection unit is input. An ultrasonic cleaning system characterized by the following features.

13. An ultrasonic cleaning system according to claim 1, The ultrasonic cleaning system further includes a display unit that displays the detection results from the detection unit on a display device configured with a graphical user interface. An ultrasonic cleaning system characterized by the following features.

14. An ultrasonic cleaning system according to claim 1, The control device includes a drive circuit that generates a single voltage applied to the first ultrasonic transducer and the second ultrasonic transducer, The cleaning unit vibrates the first ultrasonic transducer and the second ultrasonic transducer by applying a single voltage generated by the drive circuit to the first ultrasonic transducer and the second ultrasonic transducer. An ultrasonic cleaning system characterized by the following features.

15. The ultrasonic cleaning system according to claim 1, A nozzle that aspirates and discharges at least one of the liquids of a sample or reagent, and is also washed with the washing solution, The system includes an adjustment mechanism for adjusting the position of the nozzle. A processing system characterized by the following:

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