Valve body drive mechanism, gate valve

Abstract

To reduce the generation of particles due to the twisting of the sealing material. [Solution] The valve body drive device 10 includes: a first movable member 11 that can move in a parallel direction between a starting point A1 and an ending point A3 set on a virtual first straight line extending in a first direction; a second movable member 12 installed on the first movable member 11 that can move between a starting point A1 and a stopping point A2 together with the movement of the first movable member 11; a third movable member 13 installed on the second movable member 12 that can move between a starting point A1 and a stopping point A2 together with the movement of the first movable member 11 and the second movable member 12 between a starting point A1 and a stopping point A2, and can move in a parallel direction between an initial point B1 and a protruding point B2 set on a virtual second straight line extending in a second direction substantially perpendicular to the first direction, in accordance with the movement of the first movable member 11 between a stopping point A2 and an ending point A3; and a valve body 14 fixedly installed on the third movable member 13 that can open and close any opening.

Description

【Technical Field】 【0001】 The present disclosure relates to a valve body driving device and a gate valve including the valve body driving device. 【Background Art】 【0002】 A valve body driving device including a valve body capable of opening and closing an arbitrary opening is known. For example, Patent Document 1 below discloses a valve body driving device including a mechanism for closing an arbitrary opening by rotating a valve rod fixedly installed on the valve body to tilt the valve body. 【Prior Art Documents】 【Patent Documents】 【0003】 【Patent Document 1】 Japanese Patent Application Laid-Open No. 2002-303372 <## 【Summary of the Invention】 【Problems to be Solved by the Invention】 【0004】 However, in the mechanism for closing the opening by rotating and moving the valve rod to tilt the valve body as disclosed in Patent Document 1 above, when the seal member attached to the valve body abuts against the opening, the seal member twists due to the frictional force generated in the rotational direction of the valve body, and there is a problem that particles are generated. The generation of particles causes problems such as an increased likelihood of processing defects in semiconductor products processed in a vacuum state, for example, in a gate valve. Therefore, there has been a demand for realizing a valve body driving device including a mechanism in which particles are hardly generated. 【0005】 The present disclosure has been made in view of the problems existing in the above-described conventional technology, and an object thereof is to provide a valve body driving device in which a valve body for closing an opening applies only a force in a direction perpendicular to the opening so that generation of particles due to twisting of a seal member is difficult, and a gate valve including the valve body driving device. [Means for solving the problem] 【0006】 The valve body drive device according to this disclosure includes, assuming a virtual first straight line extending along a first direction, a first movable member that can move parallel to the first straight line between a start point and an end point set on the first straight line; a second movable member installed on the first movable member and that can move between the start point and a stop point set between the start point and the end point as the first movable member moves; and at least one installed on the second movable member that can move between the start point and the stop point as the first movable member and the second movable member move between the start point and the stop point, and in accordance with the movement of the first movable member between the stop point and the end point, moves parallel to the second straight line between an initial point and a protruding point set on a virtual second straight line extending along a second direction substantially perpendicular to the first direction. A valve drive device comprising a third movable member that is movable in a certain direction, and a valve body fixedly installed on the third movable member and capable of opening and closing any opening, wherein the valve body can close the opening when the third movable member reaches the protruding point, and is characterized in that it is possible to perform an opening closing operation by the valve body including a first stage in which the movement of the second movable member is restricted at the stopping point when the first movable member, the second movable member, and the third movable member, which are located at the starting point, move together and reach the stopping point, and a second stage in which, with the movement of the second movable member restricted, the first movable member moves further from the stopping point to the ending point, and the third movable member, which is located at the initial point, moves to the protruding point, thereby closing the opening. 【0007】 Furthermore, other valve body drive devices according to this disclosure include, assuming a virtual first straight line extending along a first direction, a first movable member that is movable parallel to the first straight line between a start point and an end point set on the first straight line, a second movable member installed on the first movable member and movable together with the movement of the first movable member between the start point and a stop point set between the start point and the end point, and at least one installed on the second movable member that is movable together with the movement of the first movable member and the second movable member between the start point and the stop point, and in accordance with the movement of the first movable member between the stop point and the end point, the second movable member moves between an initial point and a protruding point set on a virtual second straight line extending along a second direction substantially perpendicular to the first direction. A valve drive device comprising a third movable member that can move in a direction parallel to the projection, and a valve body fixedly installed on the third movable member and capable of opening and closing any opening, wherein the valve body can open the opening when the third movable member moves away from the projection point, and is characterized in that it is possible to perform an opening operation of the opening by the valve body including a third stage in which, when the first movable member located at the endpoint moves to the stop point, the third movable member located at the projection point moves to the initial point, causing the valve body that was closing the opening to move away from the opening, and a fourth stage in which, when the first movable member moves further from the stop point to the starting point, the second movable member and the third movable member located at the stop point move together with the first movable member to the starting point. 【0008】 Furthermore, another valve drive device according to this disclosure is installed on an actuator equipped with a drive source and includes a first movable member that is movable in a direction parallel to a virtual first straight line extending along a first direction by being subjected to a driving force from the drive source, a second movable member that is installed on the first movable member via a first straight guide device that guides movement in a direction parallel to the first straight line and is movable in a direction parallel to the first straight line, and a second straight guide device that guides movement in a direction parallel to a virtual second straight line extending along a second direction substantially perpendicular to the first direction A valve drive device comprising: a third movable member installed on a second movable member and movable in a direction parallel to the first straight line and in a direction parallel to the second straight line; a valve body fixedly installed on the third movable member and capable of opening and closing an arbitrary opening; and a stopper member that restricts the movement of the second movable member by contacting the second movable member, wherein the first movable member has a wedge-shaped portion with a sloped surface formed thereon, and the third movable member has a sliding contact body arranged to slide in contact with the sloped surface formed on the wedge-shaped portion, and between the first movable member and the second movable member Between them is a first pressing member which applies a pressing force to maintain the relative position of the second moving member with respect to the first moving member at a predetermined position when no external force is applied to the second moving member, and between the second moving member and the third moving member is a second pressing member which applies a pressing force to maintain the relative position of the third moving member with respect to the second moving member at a predetermined position when no external force is applied to the third moving member, and as the actuator operates, the first moving member moves in a direction parallel to the first straight line, The second moving member installed on the first moving member and the third moving member installed on the second moving member move together with the first moving member, and when the second moving member comes into contact with the stopper member and the movement of the second moving member is restricted, the first moving member moves further against the pressing force exerted by the first pressing member, so that the sliding contact body comes into contact with the gradient surface formed on the wedge-shaped portion, and the third moving member moves in a direction parallel to the second straight line against the pressing force exerted by the second pressing member.The valve body, which is fixedly installed on the third movable member, is characterized by having a mechanism for closing the opening. [Effects of the Invention] 【0009】 According to this disclosure, a valve drive device is provided in which the valve body that closes the opening applies a force only perpendicular to the opening in order to prevent the generation of particles due to the twisting of the sealing member, and a gate valve equipped with the valve drive device is provided. [Brief explanation of the drawing] 【0010】 [Figure 1] This is a schematic diagram of a valve body drive device according to one embodiment of the present disclosure, where subdivision (a) is a front view and subdivision (b) is a left side view. [Figure 2] Figure 1 is a schematic diagram illustrating the operation of the valve body drive device according to this embodiment. Diagram (a) shows the state in which the first moving member, second moving member, and third moving member are located at the starting point. Diagram (b) shows the state in which the first moving member, second moving member, and third moving member have reached the stopping point. Diagram (c) shows the state in which the first moving member has moved to the end point. [Figure 3] Figure 1 is a timing chart illustrating the operation of the valve drive device according to this embodiment, and in particular, it shows the closing operation of the opening. [Figure 4] Figure 1 is a timing chart illustrating the operation of the valve body drive device according to this embodiment, and in particular, it shows the opening operation of the opening. [Figure 5] This is an external perspective view of a valve drive device according to an embodiment that embodies this present invention. [Figure 6] This is an exploded perspective view of the valve drive device according to the embodiment. [Figure 7] This is an exploded perspective view illustrating one form of actuator used in the valve drive device according to the embodiment. [Figure 8]This figure shows a first movable member included in the valve body drive device according to the embodiment. Figure (a) is a perspective view of the first movable member as seen from the front and above, and Figure (b) is a perspective view of the first movable member as seen from the rear and below. [Figure 9] This diagram shows the state in which the second moving member is installed on the first moving member included in the valve body drive device according to the embodiment. [Figure 10] This is an external perspective view illustrating one form of a linear guide, which is a linear guide member used in a valve body drive device according to an embodiment. [Figure 11] Figure 10 is a cross-sectional view illustrating the infinite circulation path provided by the linear guide. [Figure 12] This figure shows a second moving member included in the valve body drive device according to the embodiment. Figure (a) is a perspective view of the second moving member as seen from the front and above, and Figure (b) is a perspective view of the second moving member as seen from the rear and below. [Figure 13] This figure shows a third movable member included in the valve body drive device according to the embodiment. Figure (a) is a perspective view of the third movable member as seen from the front and above, and Figure (b) is a perspective view of the third movable member as seen from the rear and below. [Figure 14] This figure shows the state in which the third movable member shown in Figure 13 is installed on the second movable member shown in Figure 9. [Figure 15] This diagram illustrates the operation of the valve body drive device according to the embodiment. Diagram (a) shows the state in which the first moving member, second moving member, and third moving member are located at the starting point. Diagram (b) shows the state in which the first moving member, second moving member, and third moving member have reached the stopping point. Diagram (c) shows the state in which the first moving member has moved to the end point. [Figure 16] This diagram illustrates the operation of the valve body drive device according to the embodiment, showing the state in which the first moving member is positioned between the stop point and the end point. [Modes for carrying out the invention] 【0011】 Hereinafter, the configuration and operation of the valve body driving device according to the present disclosure will be described with reference to the drawings. In the drawings, for convenience of explanation, the first direction, the second direction, and the third direction are defined. In this specification, the first direction is the vertical direction. In the drawings, the vertical direction is shown as the Z direction. In particular, the upward direction is the +Z direction, and the downward direction is the -Z direction. Also, in this specification, the second direction is the left-right direction. In the drawings, the left-right direction is shown as the X direction. In particular, the leftward direction is the +X direction, and the rightward direction is the -X direction. Further, in this specification, the third direction is the front-back direction. In the drawings, the front-back direction is shown as the Y direction. In particular, the forward direction is the +Y direction, and the backward direction is the -Y direction. However, the Z direction, which is the first direction defined in this specification, the X direction, which is the second direction, and the Y direction, which is the third direction, do not limit the directions during the use of the valve body driving device described below. The valve body driving device of the present disclosure can be used in any direction. 【0012】 Also, the following embodiments do not limit the invention according to each claim, and not all combinations of the features described in the embodiments are essential for the solution of the invention. 【0013】 [Basic Configuration] First, the basic configuration of the valve body driving device 10 according to an embodiment of the present disclosure will be described with reference to FIGS. 1 and 2. Here, FIG. 1 is a schematic diagram of the valve body driving device according to an embodiment of the present disclosure. Sub-diagram (a) in the figure is a front view, and sub-diagram (b) in the figure is a left side view. Also, FIG. 2 is a schematic diagram for explaining the operation of the valve body driving device according to the present embodiment shown in FIG. 1. Sub-diagram (a) in the figure shows a state where the first moving member, the second moving member, and the third moving member are located at the starting point. Sub-diagram (b) in the figure shows a state where the first moving member, the second moving member, and the third moving member have reached the stopping point. Sub-diagram (c) in the figure shows a state where the first moving member has moved to the end point. 【0014】 The valve body driving device 10 according to this embodiment includes a first moving member 11, a second moving member 12 installed on the first moving member 11, a third moving member 13 installed on the second moving member, and a valve body 14 fixedly installed on the third moving member 13 via a rod 141 and capable of opening and closing an arbitrary opening. 【0015】 When assuming a virtual first straight line extending along the first direction, the first moving member 11 can move between a starting point A1 and an end point A3 installed on the first straight line in a direction parallel to the first straight line (+Z direction (upward) and -Z direction (downward)). 【0016】 The second moving member 12 can move between the starting point A1 and a stop point A2 installed between the starting point A1 and the end point A3 as the first moving member 11 moves. 【0017】 At least one third moving member 13 is installed on the second moving member 12 and can move between the starting point A1 and the stop point A2 along with the movement between the starting point A1 and the stop point A2 in the first moving member 11 and the second moving member 12. Also, in response to the movement between the stop point A2 and the end point A3 in the first moving member 11, it can move between an initial point B1 and a protruding point B2 set on a virtual second straight line extending along a second direction substantially orthogonal to the first direction in a direction parallel to the second straight line (+X direction (leftward) and -X direction (rightward)). 【0018】 When the third moving member 13 reaches the protruding point B2, the valve body 14 can be pushed into an opening (not shown) via a seal member (not shown) to close the opening (not shown). Also, when the third moving member 13 moves away from the protruding point B2, the valve body 14 can open the opening (not shown). 【0019】 [Basic operation] Next, with reference to Figures 3 and 4, the basic operation of the valve body drive device 10 according to this embodiment will be described. Here, Figure 3 is a timing chart illustrating the operation of the valve body drive device according to this embodiment shown in Figure 1, and in particular shows the closing operation of the opening. Figure 4 is also a timing chart illustrating the operation of the valve body drive device according to this embodiment shown in Figure 1, and in particular shows the opening operation of the opening. 【0020】 First, with reference to Figures 2 and 3, the closing operation of the valve body 14 of the opening (not shown) will be explained. First, the first moving member 11, the second moving member 12, and the third moving member 13 are located at the starting point A1 (the state shown in Figure 2(a) and time t1 in Figure 3). Then, the first moving member 11, the second moving member 12, and the third moving member 13 all move in a direction parallel to the first straight line (+Z direction (upwards)) and reach the stopping point A2 (first stage: the state shown in Figure 2(b) and time t2 in Figure 3). At the stopping point A2, the movement of the second moving member 12 toward the end point is restricted. Next, with the movement of the second moving member 12 restricted at the stopping point A2, the first moving member 11 moves further in the +Z direction (upward) from the stopping point A2 to the endpoint A3. As a result, the third moving member 13, located at the initial point B1, moves to the protruding point B2 in a direction parallel to the second straight line (+X direction (left)) (second stage: the state shown in Figure 2(c) and time t3 in Figure 3). As the third moving member 13 moves to the protruding point B2, the valve body 14 fixed to the third moving member 13 moves in a direction parallel to the second straight line (+X direction (left)), closing the opening (not shown). With this, the closing operation of the opening (not shown) by the valve body 14 is completed. 【0021】 Next, with reference to Figures 2 and 4, the operation of the valve body 14 to open the unshown opening will be explained. First, when the first movable member 11 moves in the -Z direction (downward) from the state where it is located at the endpoint A3 (the state shown in Figure 2(c) and time t4 in Figure 4) to the stopping point A2, the third movable member 13, located at the protruding point B2, moves in the -X direction (rightward) to the initial point B1, causing the valve body 14, which had been closing the unshown opening, to move away from the opening (unshown) (third stage: the state shown in Figure 2(b) and time t5 in Figure 4). Next, when the first movable member 11 moves further in the -Z direction (downward) from the stopping point A2 to the starting point A1, the second movable member 12 and the third movable member, located at the stopping point A2, move together with the first movable member 11 to the starting point A1 in the -Z direction (downward) (fourth stage: the state shown in Figure 2(a) and time t6 in Figure 4). With these steps, the operation of the valve body 14 to open the unshown opening is completed. 【0022】 As described above, according to the valve drive device 10 of this embodiment, the movement of the valve body 14 does not involve rotation, and when the valve body 14 closes and opens an opening (not shown), the valve body 14 moves linearly in the ±X direction (left-right direction), which is parallel to the second straight line, relative to the opening (not shown). Therefore, the seal member (not shown) attached to the valve body 14 does not twist. Accordingly, according to the valve drive device 10 of this embodiment, the valve body 14 that closes the opening (not shown) is configured to apply force only perpendicular to the opening (not shown), so the generation of particles due to the twisting of the seal member can be effectively prevented, and the opening (not shown) can be opened and closed reliably. 【0023】 The basic configuration and operation of the valve body drive device 10 according to this embodiment have been described above with reference to Figures 1 to 4. In this embodiment, the valve body drive device 10 was capable of both closing and opening an opening (not shown) by the valve body 14, but it may also be capable of performing only one of the closing or opening operations. 【0024】 The valve body drive device 10 according to the embodiment described above can be used in various industrial fields, and specific examples thereof will be explained using Figures 5 to 16. Here, Figure 5 is an external perspective view of the valve body drive device according to an embodiment that embodies this embodiment. Figure 6 is an exploded perspective view of the valve body drive device according to the embodiment. Figure 7 is an exploded perspective view illustrating one form of actuator used in the valve body drive device according to the embodiment. Figure 8 is a diagram showing the first movable member included in the valve body drive device according to the embodiment, with subdivision (a) being a perspective view of the first movable member viewed from the front and above, and subdivision (b) being a perspective view of the first movable member viewed from the rear and below. Figure 9 is a diagram showing the state in which the second movable member is installed on the first movable member included in the valve body drive device according to the embodiment. Figure 10 is an external perspective view illustrating one form of linear guide, which is a linear guide member used in the valve body drive device according to the embodiment. Figure 11 is a cross-sectional view illustrating the infinite circulation path provided by the linear guide shown in Figure 10. Figure 12 shows a second movable member included in the valve body drive device according to the embodiment, with subdivision (a) being a perspective view of the second movable member viewed from the front and above, and subdivision (b) being a perspective view of the second movable member viewed from the rear and below. Figure 13 shows a third movable member included in the valve body drive device according to the embodiment, with subdivision (a) being a perspective view of the third movable member viewed from the front and above, and subdivision (b) being a perspective view of the third movable member viewed from the rear and below. Figure 14 shows the state in which the third movable member shown in Figure 13 is installed on the second movable member shown in Figure 9. Figure 15 is a diagram illustrating the operation of the valve body drive device according to the embodiment, with subdivision (a) showing the state in which the first moving member, second moving member, and third moving member are located at the starting point, subdivision (b) showing the state in which the first moving member, second moving member, and third moving member have reached the stopping point, and subdivision (c) showing the state in which the first moving member has moved to the end point. Furthermore, Figure 16 is a diagram illustrating the operation of the valve body drive device according to the embodiment, showing the state in which the first moving member is located between the stopping point and the end point. 【0025】 [Examples] As shown in Figures 5 and 6, the valve body drive device 50 according to this embodiment includes an actuator 70 equipped with a drive source, a first movable member 100 installed on the actuator 70, a second movable member 200 installed on the first movable member 100, a third movable member 300 installed on the second movable member 200, a valve body 400 fixedly installed on the third movable member 300 via a rod 410 and capable of opening and closing any opening (not shown), and a stopper member 500 fixedly installed on the actuator 70 and restricting the movement of the second movable member 200 by contacting the second movable member 200. 【0026】 Here, an example of the configuration of the actuator 70 used in this embodiment will be described with reference to Figure 7. The actuator 70 according to this embodiment is formed in an elongated box shape, having a pair of side covers 740 that extend along the longitudinal direction and are spanned between a first end member 731 and a second end member 732, a pair of end members consisting of the first end member 731 and the second end member 732 installed at both ends of the side covers 740, and a front cover 750 that closes an opening formed along the longitudinal direction between opposing surfaces of the side covers 740. The second end member 732 is covered by a side cover 733, which forms the external shape of the actuator 70 according to this embodiment. In addition, an inner block 720, which is a moving block that moves back and forth along the longitudinal direction, is attached via a bypass means (not shown) for bypassing the front cover 750 which is located in a position overlapping with the inner block 720. 【0027】 In this embodiment, the actuator 70 has a spiral-shaped screw shaft rolling element track groove 711 formed on its outer surface, and a screw shaft 710 extending along its longitudinal direction is supported in a rotatable state between a first end member 731 and a second end member 732, with one end connected to a drive source (not shown) located in a drive source housing 734 formed in the first end member 731. Furthermore, the screw shaft 710 is inserted through a ball screw nut 722 formed behind the inner block 720, and is engaged between the screw shaft 710 and the inner block 720 via a ball screw rolling element (not shown). The inner block 720 also has two second load rolling element track grooves 725 formed parallel to the screw shaft 710 on each side, for a total of four grooves. Furthermore, an unloaded rolling element track 726 drilled parallel to the screw shaft 710 is formed to correspond to the second load rolling element track grooves 725. Furthermore, a pair of end plates 724 are attached to both ends of the inner block 720. 【0028】 The inner block 720 is guided in its reciprocating motion by the outer rail 780, which is positioned at the rear and serves as a track rail. The outer rail 780 has a bottom portion 783 extending along its longitudinal direction and a pair of side wall portions 782, 782 that rise from both ends of the bottom portion 783 and face both sides of the ball screw nut 722. Furthermore, a movable plate 721 is attached to the inner block 720 so as to sandwich the front cover 750 from above and below. The movable plate 721 can be fixedly installed on the first movable member 100 by passing bolts, which serve as mounting means, through it. 【0029】 Furthermore, a rolling element rolling groove 782a is formed in the side wall portion 782 so as to face the second load rolling element rolling groove 725, and the second load rolling element rolling groove 725 and the rolling element rolling groove 782a constitute a load rolling element rolling path. In addition, the end plate 724 has a through hole 724a through which the screw shaft 710 is inserted, and a direction change passage 724b that connects the load rolling element rolling paths 725, 782a and the unloaded rolling element rolling path 726. 【0030】 The inner block 720 is assembled to the outer rail 780 via a plurality of rolling elements (not shown), and the rolling elements circulate in an infinite loop by rolling in an infinite loop consisting of load rolling element tracks 725, 782a, a direction change track 724b, and an unloaded rolling element track 726, thereby guiding the inner block 720 to move freely back and forth along the outer rail 780. 【0031】 The side cover 740 has an upper plate 741 extending parallel to the front cover 750 and a side plate 742 hanging down from the upper plate 741. A sealing portion 743 is formed at the end of the upper plate 741 to contact the front cover 750. The sealing portion 743 can contact the front cover 750 in any way as long as it can seal the front cover 750, but it is preferable to attach a permanent magnet or the like to magnetically attach it to the front cover 750. It is preferable to use a magnetic stainless steel tape or the like for the front cover 750. Furthermore, the side cover 740 is attached and fixed by fastening the side plate 742 to the outer rail 780 with fastening bolts 781. 【0032】 With the configuration described above, the actuator 70 is able to smoothly and stably guide the movement of the first moving member 100 in the ±Z direction (up and down direction), which is parallel to the first straight line. 【0033】 As shown in Figures 5 and 6, the stopper member 500 is fixedly installed on the side cover 740 of the actuator 70 and has a pair of stopper member sides 510, 510 extending in a direction parallel to the side cover 740, and a plate-shaped stopping portion 511 connecting the pair of stopper member sides 510, 510. The bottom surface of the stopping portion 511 has a stopping reference surface 511a that can contact the contact surface 210a (described later) of the second moving member 200. The position of the stopping point A2 is determined by the stopping reference surface 511a of the stopping portion 511. Furthermore, the stopping reference surface 511a of the stopping portion 511 is formed so as to contact only the second moving member 200, and is positioned so as not to contact the first moving member 100 and the third moving member 300. 【0034】 Figure 8 shows a first movable member 100 fixed to the movable plate 721 of the actuator 70, which is movable in a direction parallel to a virtual first straight line extending along the first direction (+Z direction (upwards) and -Z direction (downwards)) by being driven by a driving force from a drive source, a first linear guide 130, and a first spring member 120. The first linear guide 130 and the first spring member 120 are installed between the first movable member 100 and the second movable member 200. 【0035】 The first movable member 100 comprises a first movable member main body portion 110, a wedge-shaped portion 111, and a first spring member housing portion 112. 【0036】 The wedge-shaped portion 111 has an upper surface formed as a sloped surface 111a, allowing the cam follower 312 of the third movable member 300, which will be described later, to slide against it. The first spring member housing portion 112 is installed so that its bottom surface is flush with the bottom surface of the first movable member main body portion 110, and the first spring member housing portion 112 can also be installed on the side opposite to the bottom surface via bolts. In this embodiment, the wedge-shaped portion 111 and the first spring member housing portion 112 are each formed independently of the first movable member main body portion 110 and are fixed to the first movable member main body portion 110 using bolts, but each part may be integrally molded by injection molding or the like. 【0037】 As shown in Figure 9, the second moving member 200 can be installed on the first moving member 100 via a first linear guide 130, which serves as a first linear guide device that guides movement in directions parallel to the first straight line (+Z direction (upwards) and -Z direction (downwards)). 【0038】 Here, an example of the configuration of the first linear guide 130 used in this embodiment will be described with reference to Figures 10 and 11. The first linear guide 130 according to this embodiment comprises a track rail 131 as a track member and a movable block 133 as a movable member that is slidably attached to the track rail 131 via a plurality of balls 132 installed as rolling elements. 【0039】 The track rail 131 has bolt holes 131b formed at equal intervals for attaching the track rail 131 to the first movable member 100, which serves as the base, by passing bolts, which serve as mounting means, through the bottom surface of the track rail 131. By utilizing these bolt holes 131b, the track rail 131 can be fixedly installed on the first movable member 100. The track rail 131 is a long member with a roughly rectangular cross-section perpendicular to its longitudinal direction, and a first linear guide rolling surface 131a, which serves as the track surface for the ball 132 to roll on, is formed on its surface along the entire length of the track rail 131. 【0040】 In Figures 10 and 11, the first linear guide rolling surface 131a is illustrated with two lines on each side, for a total of four lines, but the number of lines can be changed as needed. 【0041】 On the other hand, the moving block 133 is provided with a first linear guide load rolling element rolling surface 133a as a track surface at positions corresponding to the first linear guide rolling element rolling surface 131a. The first linear guide load rolling element rolling track 137 is formed by the first linear guide rolling element rolling surface 131a of the track rail 131 and the first linear guide load rolling element rolling surface 133a of the moving block 133, and multiple balls 132 are sandwiched between them. In addition, the moving block 133 has four first linear guide rolling element return passages 138 formed inside it, extending parallel to each first linear guide rolling element rolling surface 131a. 【0042】 Furthermore, a pair of cover members 136, 136 are installed at both ends of the moving block 133 in the direction of movement. Each of these cover members 136, 136 is provided with a first linear guide direction change path 139. This first linear guide direction change path 139 is configured to connect the end of the first linear guide rolling element return passage 138 to the end of the first linear guide load rolling element turnover path 137. Therefore, a single infinite circulation path is formed by the combination of one first linear guide load rolling element turnover path 137 and first linear guide rolling element return passage 138, and the pair of first linear guide direction change paths 139, 139 connecting them (see Figure 11). 【0043】 Furthermore, multiple balls 132 are installed in an infinitely circulating manner in an infinite circulation path consisting of a first linear guide load rolling element running path 137, a first linear guide rolling element return passage 138, and a pair of first linear guide direction change paths 139, 139, thereby enabling the moving block 133 to reciprocate relative to the longitudinal direction of the track rail 131. In this embodiment, a second moving member 200 is fixedly installed on the moving block 133. 【0044】 As described above, by fixing the first moving member 100 to the track rail 131 of the first linear guide 130 and fixing the second moving member 200 to the moving block 133 of the first linear guide 130, the first linear guide 130 is able to smoothly and stably guide the movement of the second moving member 200 in directions parallel to the first straight line (+Z direction (upwards) and -Z direction (downwards)). 【0045】 Furthermore, as shown in Figure 9, two first spring members 120, which serve as the first pressing members of this disclosure, are installed between the first spring member housing portion 112 of the first movable member 100 and the first spring member receiving portion 217 of the second movable member 200. The first spring members 120 function as first pressing members that exert a pressing force to maintain the relative position of the second movable member 200 with respect to the first movable member 100 at a predetermined position (initial position) when no external force is applied to the second movable member 200. 【0046】 Figure 12 shows the second moving member 200, the second linear guide 230, and the second spring member 220. The second linear guide 230 and the second spring member 220 are installed between the second moving member 200 and the third moving member 300. 【0047】 The second moving member 200 is installed on the first moving member 100 via the first linear guide 130, and is movable in a direction parallel to a virtual first straight line extending along the first direction (in the +Z direction (upwards) and the -Z direction (downwards)). The second moving member 200 also comprises a second moving member body portion 210, first side portions 211 and second side portions 212 having surfaces perpendicular to the second direction (the left-right direction which is the ±X direction), and a first spring member receiving portion 217 having a surface that contacts the first spring member 120. 【0048】 The second movable member body 210 has a contact surface 210a formed on its upper surface that can come into contact with the stopping reference surface 511a of the stopper member 500. 【0049】 A second spring member through bolt 215 is installed on the first side portion 211, which defines the position of the second spring member 220, and the second spring member 220 can be installed via the second spring member through bolt 215. Also, as shown in Figure 14, the second spring member receiving portion 317 (described later) of the third movable member 300 can be fitted between the first side portion 211 and the second side portion 212 via the second spring member 220 installed on the first side portion 211. In this embodiment, the first side portion 211 and the second side portion 212 are each formed independently of the second movable member main body portion 210 and are fixed to the second movable member main body portion 210 using bolts, but each part may be integrally molded by injection molding or the like. 【0050】 Furthermore, a second linear guide 230 is installed on the second moving member 200 as a second linear guide device that guides movement in directions parallel to the second straight line (+X direction (left) and -X direction (right)). In this embodiment, the second linear guide 230 has the same configuration as the first linear guide 130. That is, the second moving member 200 is fixedly installed on the track rail (131) of the second linear guide 230, and the third moving member 300 is fixedly installed on the moving block (133) of the second linear guide 230. This configuration allows the second linear guide 230 to smoothly and stably guide the movement of the third moving member 300 in directions parallel to the second straight line (+X direction (left) and -X direction (right)). 【0051】 Furthermore, a second spring member 220 is installed between the first side portion 211 of the second movable member 200 and the second spring member receiving portion 317 of the third movable member 300 via a second spring member through bolt 215 installed on the first side portion 211. The second spring member 220 as a second pressing member according to this disclosure functions as a second pressing member that exerts a pressing force to maintain the relative position of the third movable member 300 with respect to the second movable member 200 at a predetermined position (initial position) when no external force is applied to the third movable member 300. 【0052】 As shown in Figure 13, the third movable member 300 is installed on the second movable member 200 via the second linear guide 230, and is therefore movable in a direction parallel to the second straight line (+X direction (left) and -X direction (right)). Furthermore, the third movable member 300 is installed on the second movable member 200, which is installed on the first movable member 100 via the first linear guide 130, and is therefore movable in a direction parallel to the first straight line (+Z direction (up) and -Z direction (down)). In addition, the third movable member 300 comprises a third movable member body 310, a fitting groove 311 formed on the back side so as to be able to fit the movable block (133) of the second linear guide 230, and a cam follower 312 as a sliding contact body. 【0053】 Furthermore, the third movable member 300 is provided with a bolt fitting hole 316 for fitting the second spring member through bolt 215 of the second movable member 200, and this bolt fitting hole 316 is formed in the second spring member receiving portion 317 which constitutes the upper part of the third movable member main body portion 310. Therefore, as is clear from comparing Figures 12 and 13, when the second spring member receiving portion 317 is installed between the first side portion 211 and the second side portion 212, the second spring member through bolt 215 on which the second spring member 220 is installed is fitted into the bolt fitting hole 316 formed in the second spring member receiving portion 317, thereby configuring the third movable member 300 to receive an elastic force as a pressing force from the second spring member 220. In other words, as shown in Figure 14, the third movable member 300, which receives an elastic force as a pressing force from the second spring member 220, is positioned such that when it is not subjected to an external force, the second spring member receiving portion 317, which constitutes the upper part of the third movable member body portion 310, is pressed against the second side portion 212 between the first side portion 211 and the second side portion 212. 【0054】 Furthermore, as shown in Figure 13, the cam follower 312 as a sliding contact body of this disclosure comprises a shaft portion 313 and an outer ring 314 rotatably mounted via a roller positioned on the outer circumferential surface side of the shaft portion 313. The shaft portion 313 is fixed to the third movable member body portion 310 using a fixing nut 315, so that the outer ring 314 is positioned to slide against the gradient surface 111a of the wedge-shaped portion 111 of the first movable member 100. 【0055】 Figure 14 shows the configuration in which the first movable member 100, the second movable member 200, and the third movable member 300, which are components of the valve body drive device 50 according to this embodiment described above, are combined. 【0056】 Next, the closing operation of an unillustrated opening using the valve drive device 50 according to this embodiment will be explained with reference to Figures 15 and 16. First, from a state in which the first movable member 100, the second movable member 200, and the third movable member 300 are located at the starting point A1 (the state shown in Figure 15(a)), the actuator 70 moves the first movable member 100 in a direction parallel to the first straight line (+Z direction (upwards)), causing the second movable member 200 installed on the first movable member 100 and the third movable member 300 installed on the second movable member 200 to move together with the first movable member 100 and move to the stopping point A2. When moving from the starting point A1 to the stopping point A2, the pressing force exerted by the first spring member 120 maintains the relative position of the second moving member 200 with respect to the first moving member 100 at a predetermined position (initial position), and the pressing force exerted by the second spring member 220 maintains the relative position of the third moving member 300 with respect to the second moving member 200 at a predetermined position (initial position). Therefore, the relative positions of the first moving member 100, the second moving member 200, and the third moving member 300 remain in their initial state. 【0057】 When the contact surface 210a of the second moving member 200 comes into contact with the stopping reference surface 511a of the stopper member 500, and the movement of the second moving member 200 is restricted (as shown in Figure 15(b)), the first moving member 100 moves further from the stopping point A2 to the endpoint A3 against the pressing force exerted by the first spring member 120. As the first moving member moves in the +Z direction (upward) from the stopping point A2 to the endpoint A3, the cam follower 312 of the third moving member 300 slides against the gradient surface 111a formed on the wedge-shaped portion 111 of the first moving member 100, so the third moving member 300 moves in the +X direction (leftward) from the initial point B1 to the protruding point B2 by a protruding distance L (as shown in Figure 15(c)) against the pressing force exerted by the second spring member 220. Then, as the third movable member 300 moves in the +X direction (leftward) and reaches the position of the protruding point B2, the valve body 400, which is fixedly installed on the third movable member 300, closes the opening (not shown). With this, the closing operation of the opening (not shown) by the valve body 400 is completed. 【0058】 Here, as shown in Figure 16, when the first moving member 100 is positioned between the stopping point A2 and the endpoint A3, the inclined surface 111a of the wedge-shaped portion 111 of the first moving member 100 is in sliding contact with the outer ring 314 of the cam follower 312 of the third moving member 300. At this time, as the first moving member 100 moves in the +Z direction (upward), the cam follower 312 is pushed out by the wedge-shaped portion 111, and the third moving member 300 moves in the +X direction (leftward). In other words, the inclined surface 111a of the wedge-shaped portion 111 converts the movement of the first moving member 100 in the +Z direction (upward) into movement of the third moving member 300 in the +X direction (leftward). 【0059】 Next, the operation of opening an unillustrated opening using the valve body drive device 50 according to this embodiment will be described. First, from a state in which the first moving member 100 is at the endpoint A3, the second moving member 200 is at the stopping point A2, and the third moving member 300 is at the protruding point B2 (the state shown in Figure 15(c)), as the actuator 70 operates, the first moving member 100 moves in a direction parallel to the first straight line (-Z direction (downward)), and as the cam follower 312 of the third moving member 300 slides against the inclined surface 111a formed on the wedge-shaped portion 111 of the first moving member 100, the force resisting the pressing force from the second spring member 220 exerted on the third moving member 300 gradually decreases, and the third moving member 300 moves in the -X direction (to the right) from the protruding point B2 towards the initial point B1 (the state shown in Figure 15(b)). At this time, the distance the third movable member 300 moves in the -X direction (to the right) corresponds to the protrusion distance L shown in Figure 15(c). Consequently, the valve body 400 fixed to the third movable member 300 moves away from the opening (not shown) and opens the opening (not shown). Then, as the first movable member 100 reaches the stopping point A2 and the third movable member 300 reaches the initial point B1, the pressing force exerted by the second spring member 220 completes the return of the third movable member 300 to the appropriate position (initial position) relative to the first movable member 100 and the second movable member 200. 【0060】 Next, as the first movable member 100 moves further in the -Z direction (downward) from the stopping point A2 to the starting point A1, the second movable member 200 installed on the first movable member 100 and the third movable member 300 installed on the second movable member 200 move together with the first movable member 100 in the -Z direction (downward) and move to the starting point A1 (the state shown in Figure 15(a)). At this time, the second movable member 200 returns to an appropriate position (initial position) relative to the first movable member 100 due to the pressing force exerted by the first spring member 120. As for the third movable member 300, it has already completed returning to an appropriate position (initial position) relative to the first movable member 100 and the second movable member 200 due to the pressing force exerted by the second spring member 220. With the above, the opening operation of the opening (not shown) by the valve body 400 is completed. 【0061】 In this embodiment, the closing and opening operations of the opening (not shown) by the valve drive device 50 are performed in the same manner as shown in the timing charts in Figures 3 and 4. However, in the valve drive device 50 of this embodiment, there may be a slight time lag in the movement start time of the third moving member 300 from the initial point B1 to the protruding point B2 during the closing operation, and in the movement start time of the second moving member 200 and the third moving member 300 from the stopping point A2 to the starting point A1 during the opening operation. This is due to the pressing force of the first spring member 120 and the second spring member 220 and mechanical dimensional errors during manufacturing, but it does not affect the reliability of the opening and closing operation of the opening (not shown). 【0062】 While preferred embodiments of the present disclosure have been described above, the technical scope of the present disclosure is not limited to the embodiments described above. Various modifications or improvements can be made to the above embodiments. 【0063】 For example, in the valve body drive device 50 according to this embodiment, one third moving member 300 was installed on the second moving member 200 via a second linear guide 230. However, in the valve body drive device of this disclosure, two third moving members may be installed via a second linear guide device so as to be movable in opposite directions (+X direction (left) and -X direction (right)). With this configuration, the drive source and the like can be shared, and two openings can be opened and closed in a single operation, and the overall device can be made more efficient and compact. In the valve body drive device of this disclosure, if two third moving members are installed via a second linear guide device so as to be movable in opposite directions (+X direction (left) and -X direction (right)), the two openings can be opened and closed simultaneously in a single operation, or they can be opened and closed with a timing difference in a single operation. One way to shift the timing is to prepare two wedge-shaped sections 111 with different angles on their inclined surfaces 111a, which are positioned between the second and third moving members. This allows for changes in the speed, timing, and stroke of the two third moving members. 【0064】 Furthermore, in the valve body drive device 50 according to this embodiment, a first spring member 120 and a second spring member 220 were used as the first pressing member and the second pressing member, respectively. However, any form of pressing member can be used as long as it can exert an elastic force as a pressing force. 【0065】 Furthermore, in the valve body drive device 50 according to this embodiment, a first linear guide 130 was installed between the first moving member 100 and the second moving member 200 as a first linear guide device to guide the second moving member 200 to move in a direction parallel to the first straight line. Also, a second linear guide 230 was installed between the second moving member 200 and the third moving member 300 as a second linear guide device to guide the third moving member 300 to move in a direction parallel to the second straight line. However, in the valve body drive device of this disclosure, any device involving rolling and sliding motion can be used as a linear guide device, such as rolling bearings in general used in machine tools, lubrication-free bearings used in vacuum, ball spline devices, ball screw devices, etc. 【0066】 Furthermore, in the valve body drive device 50 according to this embodiment, a first spring member 120 and a second spring member 220 were used as the first pressing member and the second pressing member, respectively. However, in the valve body drive device of this disclosure, not only spring members but also wedge-shaped members can be used as the first pressing member and the second pressing member. For example, when a wedge-shaped member is used as the second pressing member, the wedge-shaped member functions to exert a pressing force that maintains the relative position of the third moving member 300 with respect to the second moving member 200 at a predetermined position (initial position) by sliding in contact with the first moving member 100 or the second moving member 200. 【0067】 Furthermore, by incorporating the valve body drive device 50 according to this embodiment, a gate valve capable of reliable opening and closing operations can be obtained. 【0068】 It is clear from the claims that such modified or improved forms may also fall within the technical scope of the present invention. [Explanation of symbols] 【0069】 10 Valve body drive device, 11 First moving member, 12 Second moving member, 13 Third moving member, 14 Valve body, 141 Rod, 50 Valve body drive device (according to the embodiment), 70 Actuator, 100 First moving member (according to the embodiment), 110 First moving member body, 111 Wedge-shaped part, 111a Gradient surface, 112 First spring member housing part, 120 First spring member (first pressing member), 130 First linear guide (first linear guide device), 131 Track rail, 131a First linear guide rolling element running surface, 131b Bolt hole, 132 Ball, 133 Moving block, 133a First linear guide load rolling element running surface, 136 Cover member, 137 First linear guide load rolling element running path, 138 First linear guide rolling element return passage, 139 1 linear guide direction change path, 200 (according to the embodiment) second moving member, 210 second moving member body, 210a contact surface, 211 first side, 212 second side, 215 second spring member through bolt, 217 first spring member receiving part, 220 second spring member (second pressing member), 230 second linear guide (second linear guide device), 300 (according to the embodiment) third moving member, 310 third moving member body, 311 fitting groove, 312 cam follower (sliding contact body), 313 shaft, 314 outer ring, 315 fixing nut, 316 bolt fitting hole, 317 second spring member receiving part, 400 (according to the embodiment) valve body, 410 (according to the embodiment) rod, 500 stopper member, 510 stopper member side, 511 stopping part, 511a 710 Stop reference surface, 711 Screw shaft, 711 Rolling element track groove for screw shaft, 720 Inner block, 721 Moving plate, 722 Ball screw nut, 724 End plate, 724a Through hole, 724b Direction change path, 725 Second load rolling element track groove, 726 Unloaded rolling element track, 731 First end member, 732 Second end member, 733 Side cover, 734 Drive source housing, 740 Side cover, 741 Top plate, 742 Side plate, 743 Sealing section, 750 Front cover, 780 Outer rail, 781 Fastening bolt, 782 Side wall section, 782a Rolling element track groove, 783 Bottom section, A1 Starting point, A2 Stopping point, A3 Ending point, B1 Initial point, B2 Protruding point, L Protruding distance.

Claims

[Claim 1] Assuming a hypothetical first straight line extending along a first direction, a first movable member is provided that can move in a direction parallel to the first straight line between a start point and an end point set on the first straight line, A second movable member is installed on the first movable member and is movable along with the movement of the first movable member between the starting point and a stop point set between the starting point and the ending point. At least one third moving member is provided on the second moving member, and is movable between the starting point and the stopping point along with the movement of the first moving member and the second moving member between the starting point and the stopping point, and is movable in a direction parallel to the second straight line between an initial point and a protruding point set on a virtual second straight line extending along a second direction substantially perpendicular to the first direction, in accordance with the movement of the first moving member between the stopping point and the ending point. A valve body fixedly installed on the third movable member and capable of opening and closing any opening, Equipped with, A valve body drive device in which the valve body can close the opening when the third movable member reaches the protruding point, In the first stage, when the first moving member, the second moving member, and the third moving member, which are located at the starting point, move together and reach the stopping point, the movement of the second moving member is restricted at the stopping point. In a second stage, when the movement of the second moving member is restricted and the first moving member moves further from the stopping point to the endpoint, the third moving member, which is located at the initial point, moves to the protruding point, thereby closing the opening. A valve drive device characterized in that it is capable of performing a closing operation of the opening by the valve body including the valve body. [Claim 2] Assuming a hypothetical first straight line extending along a first direction, a first movable member is provided that can move in a direction parallel to the first straight line between a start point and an end point set on the first straight line, A second movable member is installed on the first movable member and is movable along with the movement of the first movable member between the starting point and a stop point set between the starting point and the ending point. At least one third moving member is provided on the second moving member, and is movable between the starting point and the stopping point along with the movement of the first moving member and the second moving member between the starting point and the stopping point, and is movable in a direction parallel to the second straight line between an initial point and a protruding point set on a virtual second straight line extending along a second direction substantially perpendicular to the first direction, in accordance with the movement of the first moving member between the stopping point and the ending point. A valve body fixedly installed on the third movable member and capable of opening and closing any opening, Equipped with, A valve body driving device in which the valve body can open the opening when the third movable member moves away from the protruding point, When the first moving member located at the endpoint moves to the stopping point, the third moving member located at the protruding point moves to the initial point, causing the valve body that was closing the opening to move away from the opening in a third stage. A fourth stage occurs in which, when the first moving member is further moved from the stop point to the starting point, the second moving member and the third moving member, which are located at the stop point, move together with the first moving member to the starting point. A valve drive device characterized in that it is capable of performing the opening operation of the opening by the valve body including the valve body. [Claim 3] A valve drive device characterized in that it is capable of performing at least the closing operation described in claim 1 and the opening operation described in claim 2. [Claim 4] A first movable member is installed on an actuator equipped with a drive source and is movable in a direction parallel to a virtual first straight line extending along a first direction by being subjected to a driving force from the drive source, A second moving member is installed on the first moving member via a first linear guide device that guides movement in a direction parallel to the first straight line, and is movable in a direction parallel to the first straight line. A third moving member is installed on the second moving member via a second linear guide device that guides movement in a direction parallel to a virtual second straight line extending along a second direction substantially perpendicular to the first direction, and is capable of moving in a direction parallel to the first straight line and parallel to the second straight line. A valve body fixedly installed on the third movable member and capable of opening and closing any opening, A stopper member that restricts the movement of the second moving member by contacting it, A valve body drive device comprising, The first movable member includes a wedge-shaped portion with a sloped surface, The third movable member includes a sliding contact body that is slidably positioned on the inclined surface formed on the wedge-shaped portion, Between the first movable member and the second movable member, a first pressing member is installed that applies a pressing force to maintain the relative position of the second movable member with respect to the first movable member at a predetermined position when no external force is applied to the second movable member, A second pressing member is installed between the second moving member and the third moving member, which applies a pressing force to maintain the relative position of the third moving member with respect to the second moving member at a predetermined position when no external force is applied to the third moving member. A valve drive device characterized by a mechanism in which, due to the operation of the actuator, the first moving member moves in a direction parallel to the first straight line, causing the second moving member installed on the first moving member and the third moving member installed on the second moving member to move together with the first moving member, and when the second moving member comes into contact with the stopper member from this moving state and the movement of the second moving member is restricted, the first moving member moves further against the pressing force exerted by the first pressing member, causing the sliding contact body to slide against the gradient surface formed on the wedge-shaped portion, and the third moving member moves in a direction parallel to the second straight line against the pressing force exerted by the second pressing member, causing the valve body fixedly installed on the third moving member to close the opening. [Claim 5] A valve drive device according to claim 4, The valve body drive device is characterized in that the first pressing member and the second pressing member are spring members capable of exhibiting an elastic force as a pressing force. [Claim 6] A valve drive device according to claim 4 or 5, A valve body drive device characterized in that two third moving members, each movable in opposite directions via the second linear guide device, are installed on the second moving member. [Claim 7] A gate valve comprising the valve body driving device according to claim 4 or 5.

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