sensor

Abstract

To provide a sensor capable of improving its characteristics. [Solution] According to the embodiment, the sensor includes a substrate, a first detection unit, and a controller. The first detection unit includes a first substrate electrode fixed to the substrate, a first fixed part fixed to the substrate, and a first element supported by the first fixed part. The first element includes a first conductive member and a second conductive member. A first air gap is provided between the first substrate electrode and the first element. The controller is configured to perform a first operation and a second operation. In the first operation, the controller is configured to detect a first capacitance signal corresponding to a first capacitance between the first substrate electrode and one of the conductive members, the first conductive member and the second conductive member. In the second operation, the controller is configured to detect a first electrical resistance of the other conductive member, the first conductive member and the second conductive member.

Description

Technical Field

[0001] Embodiments of the present invention relate to sensors.

Background Art

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements or the like. In sensors, improvement of characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments provide a sensor capable of improving characteristics.

Means for Solving the Problems

[0005] According to an embodiment, a sensor includes a substrate, a first detection unit, and a controller. The first detection unit includes a first substrate electrode fixed to the substrate, a first fixing unit fixed to the substrate, and a first element supported by the first fixing unit. The first element includes a first conductive member and a second conductive member. A first gap is provided between the first substrate electrode and the first element. The controller is configured to perform a first operation and a second operation. In the first operation, the controller is configured to detect a first capacitance signal corresponding to a first capacitance between the first substrate electrode and one of the first conductive member and the second conductive member. In the second operation, the controller is configured to detect a first electrical resistance of the other conductive member of the first conductive member and the second conductive member.

Brief Description of the Drawings

[0006] [Figure 1] Figure 1 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Figure 2] Figure 2 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 3] Figure 3 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 4] Figure 4 is a schematic plan view illustrating a sensor according to the first embodiment. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. [Figure 6] Figure 6 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. [Modes for carrying out the invention]

[0007] The embodiments of the present invention will be described below with reference to the drawings. Drawings are schematic or conceptual, and the relationships between the thickness and width of each part, as well as the ratios of the sizes of different parts, are not necessarily identical to those of reality. Even when representing the same part, the dimensions and ratios may be depicted differently in different drawings. In this specification and in each figure, elements similar to those described above are denoted by the same reference numerals with respect to previously shown figures, and detailed explanations are omitted as appropriate.

[0008] (First Embodiment) Figure 1 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. Figures 2 to 4 are schematic plan views illustrating the sensor according to the first embodiment. Figure 1 is a cross-sectional view taken along the line A1-A2 in Figures 2 to 4.

[0009] As shown in Figure 1, the sensor 110 according to this embodiment includes a base 50s, a first detection unit 11D, and a controller 70.

[0010] The first detection unit 11D includes a first substrate electrode 51E fixed to the substrate 50s, a first fixed part 31A fixed to the substrate 50s, and a first element 11EL supported by the first fixed part 31A. The first element 11EL includes a first conductive member 11 and a second conductive member 12. A first air gap g1 is provided between the first substrate electrode 51E and the first element 11EL.

[0011] The controller 70 is configured to perform a first operation and a second operation. In the first operation, the controller 70 is configured to detect a first capacitance signal SC1 corresponding to a first capacitance C1 between the first substrate electrode 51E and one of the conductive members 28 of the first conductive member 11 and the second conductive member 12. In one example, the one of the conductive members 28 of the first conductive member 11 and the second conductive member 12 may be the second conductive member 12.

[0012] In the second operation, the controller 70 is configured to detect the first electrical resistance R1 of the other conductive member 29 of the first conductive member 11 and the second conductive member 12. When one of the conductive members 28 of the first conductive member 11 and the second conductive member 12 is the second conductive member 12, the other conductive member 29 of the first conductive member 11 and the second conductive member 12 is the first conductive member 11. The first conductive member 11 and the second conductive member 12 are interchangeable. The following description will mainly focus on the case where one conductive member 28 is the second conductive member 12 and the other conductive member 29 is the first conductive member 11.

[0013] As described above, in the embodiment, in the first operation, the controller 70 detects a first capacitance signal SC1 corresponding to the first capacitance C1. In the second operation, the first electrical resistance R1 is detected. Thus, two types of detection results are obtained. The object to be detected may be detected based on these detection results.

[0014] For example, the first electrical resistance R1 may be configured to change according to the detection target around the first element 11EL. For example, the thermal characteristics (such as heat dissipation) of the first element 11EL change according to the state of the detection target. This is due to the heat conduction characteristics of the detection target. Due to the change in the thermal characteristics of the first element 11EL, the first electrical resistance R1 of the other conductive member 29 (the first conductive member 11) changes. By detecting the change in the first electrical resistance R1, the detection target (such as a gas) can be detected. The detection target may be, for example, a gas such as carbon dioxide. The sensor 110 functions as, for example, a gas sensor. The value based on the first electrical resistance R1 may correspond to the detection result of the detection target.

[0015] On the other hand, according to the detection target, the distance d1 between the first base electrode 51E and the one conductive member 28 (the second conductive member 12) may change. For example, a connection member or the like described later may change according to the detection target, and the distance d1 may change. A change in the first capacitance signal SC1 corresponding to the first capacitance C1 based on the change in the distance d1 may be detected. By detecting the change in the first capacitance signal SC1, the detection target may be detected.

[0016] In the embodiment, multiple types of detection results can be obtained. A sensor with improved characteristics can be provided.

[0017] Furthermore, for example, using one of the multiple detection results, the other of the multiple detection results may be corrected. In one example, the distance d1 may change due to a temperature change or a change over time. When the distance d1 changes, the heat dissipation characteristics of the first element 11EL through the first gap g1 change. The change in the heat dissipation characteristics due to the change in the distance d1 has an adverse effect on the change in the first electrical resistance R (1) according to the detection target. By compensating for the influence due to the change in the distance d1, the detection of the detection target using the first electrical resistance R1 can be accurately performed.

[0018] As shown in FIG. 1, the controller 70 may be configured to further perform a third operation of outputting an output signal Sg1. The output signal Sg1 is obtained by correcting a value based on the first electrical resistance R1 based on the first capacitance signal SC1. For example, the correction is performed based on information regarding the relationship between the first capacitance signal SC1 and the distance d1 and the relationship between the distance d1 and the first electrical resistance R1. Thereby, a more accurate detection result can be obtained. In the third operation, for example, calibration is performed. The controller 70 may include, for example, a processor.

[0019] In the embodiment, a coefficient regarding the relationship between the first electrical resistance R1 of the other conductive member 29 of the first conductive member 11 and the second conductive member 12 and the concentration of the detection target may be corrected based on the detection result of the capacitance. For example, the detection result of the first electrical resistance R1 is converted into the concentration of the detection target (for example, gas concentration) based on the coefficient. The converted value (concentration) corresponds to the value based on the first electrical resistance R1. Also in this case, by correcting the coefficient based on the detection result of the capacitance, the detection target can be accurately detected.

[0020] The controller 70 may be configured to output information corresponding to the distance d1 between the first base electrode 51E and one conductive member 28 (the second conductive member 12).

[0021] In the second operation, the controller 70 may be configured to supply the first electric power P1 to one conductive member 28 (the second conductive member 12). Due to the first electric power P1, the temperature of the first element 11EL rises, and accordingly, the temperature of the other conductive member 29 (the first conductive member 11) rises. The temperature of the other conductive member 29 (the first conductive member 11) becomes a value corresponding to the state of the detection target. By detecting the first electrical resistance R1 corresponding to the temperature of the other conductive member 29 (the first conductive member 11), the detection target can be detected.

[0022] On the other hand, in the first operation, the controller 70 does not need to supply the first power P1 to one of the conductive members 28 (second conductive member 12). As described above, in the first operation, the first capacitance signal SC1 corresponding to the first capacitance C1 is detected. In such a first operation, the first power P1 does not need to be supplied.

[0023] In this example, one of the conductive members 28 (second conductive member 12) functions as a heater or a capacitance electrode. By applying multiple functions, the characteristics can be improved with a simple structure.

[0024] The above-described multiple operations may be switched by a switch or the like. As shown in Figure 1, the sensor 110 may include a first switch SW1 and a second switch SW2. The first switch SW1 is provided in a first current path cp1 between a part of one conductive member 28 (second conductive member 12) and the controller 70. The second switch SW2 is provided in a second current path cp2 between the other part of one conductive member 28 (second conductive member 12) and the controller 70. The first switch SW1 and the second switch SW2 are in a non-conductive state during the first operation. The first switch SW1 and the second switch SW2 are in a conductive state during the second operation. Due to the operation of these switches, the first power P1 is not supplied during the first operation, and the first power P1 is supplied during the second operation.

[0025] As shown in Figure 1, the sensor 110 may further include a third switch SW3 and a fourth switch SW4. The third switch SW3 is provided in a third current path cp3 between one conductive member 28 (second conductive member 12) and the controller 70. In this example, one conductive member 28 (second conductive member 12) is electrically connected to the third switch SW3 via a first element wiring layer 11CL, which will be described later. The fourth switch SW4 is provided in a fourth current path cp4 between the first substrate electrode 51E and the controller 70. The third switch SW3 and the fourth switch SW4 are in a conductive state during the first operation. The third switch SW3 and the fourth switch SW4 are in a non-conductive state during the second operation. Through the operation of these switches, a first capacitance signal SC1 corresponding to the first capacitance C1 is detected during the first operation.

[0026] As shown in Figure 1, in this example, one conductive member 28 (second conductive member 12) is located between the first substrate electrode 51E and the other conductive member 29 (first conductive member 11) in the first direction D1 from the first substrate electrode 51E to the first element 11EL.

[0027] The first direction D1 is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. The direction perpendicular to both the Z-axis and X-axis directions is defined as the Y-axis direction.

[0028] Figure 2 illustrates the pattern of one conductive member 28 (second conductive member 12). Figure 3 illustrates the pattern of the other conductive member 29 (first conductive member 11). Figure 4 illustrates the pattern of the first substrate electrode 51E. As shown in these figures, the first element 11EL is layered along the XY plane.

[0029] As shown in Figures 1 and 2, the first detection unit 11D may further include a first connecting member 15A. The first connecting member 15A is supported by the first fixing unit 31A. The first connecting member 15A supports the first element 11EL. A portion of the first gap g1 is provided between the base 50s and the first connecting member 15A.

[0030] As shown in Figure 2, the length of the first connecting member 15A along its extending direction is longer than its width along the intersecting direction that intersects the extending direction. The first connecting member 15A may have, for example, a meander structure. The first connecting member 15A may have, for example, a spring structure. For example, heat conduction from the first element 11EL through the connecting member can be suppressed.

[0031] As shown in Figures 1 and 2, the first detection unit 11D may further include a second fixing part 31B fixed to the base 50s and a second connecting member 15B supported by the second fixing part 31B. The second connecting member 15B supports the first element 11EL. The direction from the first connecting member 15A to the second connecting member 15B (for example, the second direction D2) intersects with the first direction D1. The second direction D2 may be, for example, the X-axis direction.

[0032] As shown in Figure 2, the first detection unit 11D may include a third fixing unit 31C, a third connecting member 15C, a fourth fixing unit 31D, and a fourth connecting member 15D. The third fixing unit 31C is fixed to the base 50s. The third connecting member 15C is supported by the third fixing unit 31C. The fourth fixing unit 31D is fixed to the base 50s. The fourth connecting member 15D is supported by the fourth fixing unit 31D. The third connecting member 15C supports the first element 11EL. The fourth connecting member 15D supports the first element 11EL. The direction from the third connecting member 15C to the fourth connecting member 15D (e.g., third direction D3) intersects with the direction from the first connecting member 15A to the second connecting member 15B (second direction D2). The third direction D3 intersects with a plane containing the first direction D1 and the second direction D2, for example.

[0033] The use of the above-mentioned multiple connecting members ensures that the first element 11EL is stably supported.

[0034] As shown in Figures 1 and 2, the first detection unit 11D may include a first element wiring layer 11CL. The first element wiring layer 11CL is electrically connected to one of the conductive members 28 (second conductive member 12). The first element wiring layer 11CL passes through, for example, the first connecting member 15A.

[0035] As shown in Figure 2, in this example, the conductive layer electrically connected to a portion of one conductive member 28 (second conductive member 12) passes through the third connecting member 15C. The conductive layer electrically connected to the other portion of the one conductive member 28 passes through the fourth connecting member 15D.

[0036] As shown in Figure 3, in this example, the conductive layer electrically connected to a portion of the other conductive member 29 (first conductive member 11) passes through the third connecting member 15C. The conductive layer electrically connected to the other portion of the other conductive member 29 passes through the fourth connecting member 15D.

[0037] The position in the Z-axis direction of the conductive layer electrically connected to one conductive member 28 (second conductive member 12) is different from the position in the Z-axis direction of the conductive layer electrically connected to the other conductive member 29 (first conductive member 11).

[0038] In this embodiment, the conductive layer electrically connected to one conductive member 28 or the other conductive member 29 may pass through any of the first connecting member 15A, the second connecting member 15B, the third connecting member 15C, and the fourth connecting member 15D.

[0039] As shown in Figure 1, the first element 11EL may include an insulating member 11i. At least a portion of the insulating member 11i is provided between one conductive member 28 (second conductive member 12) and the other conductive member 29 (first conductive member 11).

[0040] As shown in Figure 4, the first detection unit 11D may include a first substrate wiring layer 51L. The first substrate wiring layer 51L is electrically connected to the first substrate electrode 51E. Preferably, at least a portion of the first substrate wiring layer 51L does not overlap with the first connecting member 15A in the first direction D1. Preferably, at least a portion of the first substrate wiring layer 51L does not overlap with the above-mentioned connecting member in the first direction D1. Interaction between the first substrate wiring layer 51L and the connecting member is suppressed. For example, the influence of irregularities caused by the first substrate wiring layer 51L on the characteristics of the connecting member is suppressed. An example of irregularities caused by the first substrate wiring layer 51L will be described below.

[0041] Figure 5 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. Figure 5 is a cross-sectional view taken along line A3-A4 in Figures 2 and 4. As shown in Figure 5, the first substrate wiring layer 51L is provided on the substrate 50s. A protrusion 51P is formed by the first substrate wiring layer 51L. If such a protrusion 51P overlaps with any of the multiple connecting members, the thermal properties (such as heat dissipation) of that connecting member will be partially altered. By ensuring that the first substrate wiring layer 51L does not overlap with the connecting members, uniform properties can be easily obtained.

[0042] Figure 6 is a schematic cross-sectional view illustrating a sensor according to the first embodiment. Figure 6 is a cross-sectional view corresponding to the line A1-A2 in Figures 2-4. As shown in Figure 6, in the sensor 111 according to this embodiment, the positional relationship between the two conductive members is different from that in sensor 110. The configuration of sensor 111, aside from this, can be the same as that of sensor 110.

[0043] In the sensor 110, the other conductive member 29 (first conductive member 11) is located between the first substrate electrode 51E and one of the conductive members 28 (second conductive member 12) in the first direction D1 from the first substrate electrode 51E to the first element 11EL.

[0044] In this case as well, the first switch SW1 is provided in the first current path cp1 between a part of one conductive member 28 (second conductive member 12) and the controller 70. The second switch SW2 is provided in the second current path cp2 between the other part of one conductive member 28 (second conductive member 12) and the controller 70. The first switch SW1 and the second switch SW2 are in a non-conductive state during the first operation. The first switch SW1 and the second switch SW2 are in a conductive state during the second operation.

[0045] The third switch SW3 is provided in the third current path cp3 between one conductive member 28 (second conductive member 12) and the controller 70. In this example, one conductive member 28 (second conductive member 12) is electrically connected to the third switch SW3 via the first element wiring layer 11CL. The fourth switch SW4 is provided in the fourth current path cp4 between the first substrate electrode 51E and the controller 70. The third switch SW3 and the fourth switch SW4 are in a conductive state during the first operation. The third switch SW3 and the fourth switch SW4 are in a non-conductive state during the second operation.

[0046] In this example, the other conductive member 29 (first conductive member 11) functions as a temperature-sensing resistor or a capacitance electrode. By applying multiple functions, characteristics can be improved with a simple structure.

[0047] In the embodiment, the controller 70 may be configured to repeatedly perform a set including a first operation and a second operation. The controller 70 may be configured to repeatedly perform a set including a first operation, a second operation and a third operation. For example, periodic calibration may be performed.

[0048] The embodiments may include the following technical proposals. (Technical proposal 1) Substrate and, First detection unit, Control unit and Equipped with, The first detection unit is, A first substrate electrode fixed to the substrate, A first fixing part fixed to the base, The first element supported by the first fixed part, Includes, The first element includes a first conductive member and a second conductive member, A first gap is provided between the first substrate electrode and the first element. The control unit is configured to perform the first and second operations. In the first operation, the control unit is configured to detect a first capacitance signal corresponding to the first capacitance between the first substrate electrode and one of the conductive members, the first conductive member and the second conductive member. In the second operation, the control unit is configured to detect a first electrical resistance of the other conductive member of the first conductive member and the second conductive member, wherein the control unit is configured to detect a first electrical resistance of the other conductive member of the first conductive member and the second conductive member.

[0049] (Technical proposal 2) The control unit is configured to further perform a third operation, which outputs an output signal. The output signal is obtained by correcting a value based on the first electrical resistance based on the first capacitance signal, as described in Technical Proposal 1.

[0050] (Technical proposal 3) In the second operation, the control unit is configured to supply first power to the one conductive member, as described in Technical Proposal 1 or 2.

[0051] (Technical proposal 4) In the first operation, the control unit does not supply the first power to the one conductive member, as described in Technical Proposal 3.

[0052] (Technical proposal 5) The sensor according to any one of Technical Proposals 1 to 4, wherein the one conductive member is located between the first substrate electrode and the other conductive member in a first direction from the first substrate electrode to the first element.

[0053] (Technical proposal 6) The sensor according to any one of Technical Proposals 1 to 4, wherein the other conductive member is located between the first substrate electrode and the one conductive member in a first direction from the first substrate electrode to the first element.

[0054] (Technical proposal 7) The first detection unit further includes a first connecting member, The first connecting member is supported by the first fixing portion, The first connecting member supports the first element, and the sensor is as described in Technical Proposal 5 or 6.

[0055] (Technical proposal 8) The first detection unit further includes a first substrate wiring layer electrically connected to the first substrate electrode, The sensor according to Technical Proposal 7, wherein at least a portion of the first substrate wiring layer does not overlap with the first connecting member in the first direction.

[0056] (Technical proposal 9) The first substrate wiring layer is provided on the substrate, The sensor according to Technical Proposal 8, wherein a protrusion is formed by the first substrate wiring layer.

[0057] (Technical proposal 10) The first detection unit further includes a first element wiring layer electrically connected to the one conductive member, The first element wiring layer passes through the first connecting member, and the sensor is as described in any one of Technical Proposals 7 to 9.

[0058] (Technical proposal 11) A portion of the first gap exists between the base and the first connecting member. The sensor according to any one of Technical Proposals 7 to 10, wherein the length of the first connecting member along its extending direction is longer than the width of the first connecting member along the intersecting direction that intersects the extending direction.

[0059] (Technical proposal 12) The first detection unit is, A second fixing part fixed to the base, The second connecting member supported by the second fixing portion, It further includes, The second connecting member supports the first element, The sensor according to any one of Technical Proposals 7 to 11, wherein the direction from the first connecting member to the second connecting member intersects with the first direction.

[0060] (Technical proposal 13) The first detection unit is, A third fixing part fixed to the base, The third connecting member supported by the third fixing portion, A fourth fixing part fixed to the base, The fourth connecting member supported by the fourth fixed portion, It further includes, The third connecting member supports the first element, The fourth connecting member supports the first element, The sensor according to technical proposal 12, wherein the direction from the third connecting member to the fourth connecting member intersects with the direction from the first connecting member to the second connecting member.

[0061] (Technical proposal 14) The sensor according to technical proposal 13, wherein the conductive layer electrically connected to one of the conductive members or the other conductive member passes through any of the first connecting member, the second connecting member, the third connecting member, and the fourth connecting member.

[0062] (Technical proposal 15) Further comprising a first switch and a second switch, The first switch is provided in the first current path between a part of the one conductive member and the control unit, The second switch is provided in the second current path between the other part of the one conductive member and the control unit. The first switch and the second switch are in a non-conductive state during the first operation. The first switch and the second switch are in a conductive state during the second operation, as described in any one of Technical Proposals 1 to 14.

[0063] (Technical proposal 16) Further comprising a third switch and a fourth switch, The third switch is provided in the third current path between the one conductive member and the control unit, The fourth switch is provided in the fourth current path between the first substrate electrode and the control unit, The third switch and the fourth switch are in a conductive state during the first operation. The third switch and the fourth switch are in a non-conductive state during the second operation, as described in any one of Technical Proposals 1 to 15.

[0064] (Technical proposal 17) The sensor according to any one of Technical Proposals 1 to 16, wherein the control unit is configured to output information corresponding to the distance between the first substrate electrode and the one conductive member.

[0065] (Technical proposal 18) The control unit is configured to repeatedly perform the set of the first operation and the second operation, as described in Technical Proposal 1.

[0066] (Technical proposal 19) The control unit is configured to repeatedly perform the set of the first operation, the second operation and the third operation, as described in Technical Proposal 2.

[0067] (Technical proposal 20) The sensor according to any one of the Technical Proposals 1 to 19, wherein the first electrical resistance is configured to change depending on the object being detected around the first element.

[0068] According to the embodiment, a sensor capable of improving its characteristics can be provided.

[0069] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configuration of each element included in the sensor, such as the substrate, detection unit, and controller, is included within the scope of the present invention as long as it can be implemented in the same way and similar effects can be obtained by appropriately selecting from the range known to those skilled in the art.

[0070] Furthermore, combinations of two or more elements from any of the specific examples, to the extent technically feasible, are also included within the scope of the present invention, insofar as they encompass the gist of the invention.

[0071] Furthermore, all sensors that a person skilled in the art can implement by appropriately modifying the design based on the sensors described above as embodiments of the present invention also fall within the scope of the present invention, insofar as they encompass the gist of the present invention.

[0072] Furthermore, within the scope of the concept of the present invention, a person skilled in the art could conceive of various modifications and alterations, and it is understood that such modifications and alterations also fall within the scope of the present invention.

[0073] While several embodiments of the present invention have been described, these embodiments are presented as examples only and are not intended to limit the scope of the invention. These novel embodiments can be carried out in a variety of other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their variations are included in the scope and spirit of the invention, as well as in the claims of the invention and its equivalents. [Explanation of symbols]

[0074] 11, 12: First and second conductive members, 11CL: First element wiring layer, 11D: First detection unit, 11EL: First element, 11i: Insulating member, 15A~15D: First to fourth connecting members, 28: One conductive member, 29: The other conductive member, 31A~31D: First to fourth fixing parts, 50s: Substrate, 51E: First substrate electrode, 51L: First substrate wiring layer, 51P: Protrusion, 70: Controller, 110, 111: Sensor, C1: First capacitance, D1~D3: First to third directions, P1: First power, R1: First electrical resistance, SC1: First capacitance signal, Sg1: Output signal, cp1~cp4: First to fourth current paths, d1: Distance, g1: First air gap

Claims

1. Substrate and, First detection unit, Controller and Equipped with, The first detection unit is, A first substrate electrode fixed to the substrate, A first fixing part fixed to the base, The first element supported by the first fixed part, Includes, The first element includes a first conductive member and a second conductive member, A first gap is provided between the first substrate electrode and the first element. The controller is configured to perform the first and second operations. In the first operation, the controller is configured to detect a first capacitance signal corresponding to a first capacitance between the first substrate electrode and one of the conductive members, the first conductive member and the second conductive member. In the second operation, the controller is configured to detect a first electrical resistance of the other conductive member of the first conductive member and the second conductive member.

2. The controller is configured to further perform a third operation, which outputs an output signal. The sensor according to claim 1, wherein the output signal is obtained by correcting a value based on the first electrical resistance based on the first capacitance signal.

3. The sensor according to claim 1, wherein in the second operation, the controller is configured to supply first power to the one conductive member.

4. The sensor according to claim 3, wherein in the first operation, the controller does not supply the first power to the one conductive member.

5. The one conductive member is located between the first substrate electrode and the other conductive member in a first direction from the first substrate electrode to the first element. The first detection unit further includes a first connecting member, The first connecting member is supported by the first fixing portion, The sensor according to claim 1, wherein the first connecting member supports the first element.

6. The first detection unit further includes a first substrate wiring layer electrically connected to the first substrate electrode, The sensor according to claim 5, wherein at least a portion of the first substrate wiring layer does not overlap with the first connecting member in the first direction.

7. The first substrate wiring layer is provided on the substrate, The sensor according to claim 6, wherein a protrusion is formed by the first substrate wiring layer.

8. Further comprising a first switch and a second switch, The first switch is provided in the first current path between a part of the one conductive member and the controller. The second switch is provided in the second current path between the other part of the one conductive member and the controller. The first switch and the second switch are in a non-conductive state during the first operation. The sensor according to claim 1, wherein the first switch and the second switch are in a conductive state during the second operation.

9. Further comprising a third switch and a fourth switch, The third switch is provided in the third current path between the one conductive member and the controller, The fourth switch is provided in the fourth current path between the first substrate electrode and the controller, The third switch and the fourth switch are in a conductive state during the first operation. The sensor according to claim 8, wherein the third switch and the fourth switch are in a non-conductive state during the second operation.

10. The sensor according to any one of claims 1 to 9, wherein the first electrical resistance is configured to change in accordance with the object to be detected around the first element.

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