Rotary positioning device equipped with a backlash measuring device, and method for measuring backlash of a rotary positioning device.

Abstract

The measurement and evaluation of backlash caused by wear and tear are performed during the operation of the equipment to improve the equipment's operating rate. [Solution] The present invention comprises an electric motor 22 that drives a small gear 24, an operation control device 21 that controls the electric motor 22, and a backlash measuring device 43 that measures the backlash that occurs between a large gear 25 and a small gear 24. The backlash measuring device 43 consists of an angle torque measuring unit 13 that measures the rotation angle and torque of the electric motor 22 based on data obtained from an input shaft angle sensor 12 that acquires data on the rotation angle of the electric motor 22 and data obtained from the operation control device 21, a data selection unit 14 that selects data on the rotation angle and torque of the electric motor 22 during operation from the angle torque measuring unit 13, and a backlash evaluation unit 15 that calculates a measured value of the backlash that occurs between the large gear 25 and the small gear 24 based on the data selected by the data selection unit 14.

Description

Technical Field

[0001] The present invention relates to a rotational positioning device provided with a backlash measuring device and a method for measuring the backlash of a rotational positioning device.

Background Art

[0002] Rotary table drive devices of machine tools, cab swing devices in hydraulic excavators of construction machinery, nacelle swing devices in wind power generation systems, etc. are provided with a large gear integrated with a stage, a small gear meshing with the large gear, and an actuator for rotationally driving the small gear in order to rotate a relatively large stage. Such a device is known as a so-called rotational positioning device.

[0003] In a rotational positioning device, a gap called backlash provided between the teeth of a large gear and a small gear directly affects the angular indexing accuracy of the stage. Therefore, measurement and maintenance management of backlash are required. When measuring the backlash, it is desirable to measure it regularly with the large and small gears incorporated in the device. However, special skills are required for the work of accurately measuring the backlash with the gears incorporated in the device, and it is necessary to perform the work in a state where the device is stopped, and it cannot always be carried out at the necessary timing and frequency.

[0004] In outboard motor assembly equipment, one method for measuring backlash with gears assembled in the device is described in Patent Document 1. Patent Document 1 describes a method for measuring backlash between a first gear connected to a first drive shaft supported by a gearbox and a second gear connected to a second drive shaft, which involves the following steps: a first step of holding the gearbox in a predetermined position; a second step of rotating the first drive shaft forward while applying a load to the second gear; a third step of stopping the forward rotation while suppressing the inertial rotation of the first drive shaft; a fourth step of detecting the rotational status of the first drive shaft 3 while applying a load to the second gear; and a fifth step of calculating the backlash value using an electronic control unit. Furthermore, a rotational position sensor and a rotational torque sensor are used in combination as rotational status sensors in the fourth step. With this configuration, it is possible to measure the backlash between gears assembled in a gearbox without requiring special skills. [Prior art documents] [Patent Documents]

[0005] [Patent Document 1] Japanese Patent Publication No. 2012-149919 [Overview of the project] [Problems that the invention aims to solve]

[0006] On the other hand, in the aforementioned rotary positioning device, there are frequently used parts of the teeth of the large gear corresponding to the rotational position of the stage, such as the standby position at the end of work or the work position where the work object is placed, and backlash may selectively increase in specific parts of the large gear due to wear and other factors. From the standpoint of equipment maintenance, it is necessary to detect the location and amount of backlash increase and take countermeasures, but the technology described in Patent Document 1 does not seem to address such requirements. In other words, Patent Document 1 measures the initial backlash in an outboard motor assembly facility with the gears assembled into the device, and does not take into consideration the measurement of backlash caused by wear and other factors associated with the use of the device.

[0007] The object of the present invention is to provide a rotary positioning device equipped with a backlash measuring device that measures and evaluates backlash caused by wear and tear during the use of the device, thereby improving the operating rate of the device, and a method for measuring backlash of a rotary positioning device. [Means for solving the problem]

[0008] To achieve the above objective, the present invention features a rotary positioning device comprising: a rotary stage to which a workpiece is attached; a driven gear fixed to the output shaft of the rotary stage; a drive gear meshing with the driven gear; an electric motor for driving the drive gear; an operation control device connected to the electric motor for controlling the electric motor; and a backlash measuring device connected to the electric motor and the operation control device for measuring backlash between the driven gear and the drive gear, wherein the backlash measuring device comprises: an input shaft angle sensor for acquiring data on the rotation angle of the electric motor; an angle torque measuring unit for measuring the rotation angle and torque of the electric motor based on data acquired from the input shaft angle sensor and the operation control device; a data selection unit connected to the angle torque measuring unit for selecting data on the rotation angle and torque of the electric motor during operation from the angle torque measuring unit; and a backlash evaluation unit for calculating a measured value of backlash between the driven gear and the drive gear based on the data selected by the data selection unit.

[0009] Furthermore, the present invention is characterized by a backlash measurement method for a rotary positioning device comprising a rotary stage on which a workpiece is attached, a driven gear fixed to the output shaft of the rotary stage, a drive gear meshing with the driven gear, and an electric motor that drives the drive gear, comprising: a first step of detecting, based on data of the rotation angle of the electric motor during operation, a state in which the electric motor has rotated in the forward or reverse direction by an angle greater than a preset angle and stopped; a second step of detecting, based on data of the rotation angle of the electric motor during operation, a state in which the electric motor has rotated in the opposite direction to the first step by an angle greater than a preset angle; and the rotation angle of the electric motor during operation The method for measuring backlash of a rotary positioning device is to perform the following steps: a third step of detecting a section in the second step where the torque of the electric motor in the second step matches a preset torque, based on the data of the rotation angle of the electric motor in operation and the torque data of the electric motor in operation; a fourth step of detecting a state in which the torque increase gradient is within a preset range at the end of the section detected in the third step, based on the data of the rotation angle of the electric motor in operation and the torque data of the electric motor in operation; and a fifth step of calculating the backlash, where the section detected in the third step is set as a free-running section if the first to fourth steps are met. [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a rotary positioning device equipped with a backlash measuring device that measures and evaluates backlash caused by wear and tear during the use of the device, thereby improving the operating rate of the device, and a method for measuring backlash of a rotary positioning device. [Brief explanation of the drawing]

[0011] [Figure 1] This is a configuration diagram of a rotary positioning device equipped with a backlash measuring device according to Embodiment 1 of the present invention. [Figure 2] This figure shows the rotation angle and torque characteristics of the motor shaft 22a of the electric motor 22 when the large gear 25 and small gear 24 are meshed together according to Embodiment 1 of the present invention. [Figure 3] This flowchart shows the backlash measurement method according to Example 1 of the present invention. [Figure 4] This figure shows a configuration in which a backlash measuring device 43 is provided to the swivel device 67 of a wind power generation system according to Embodiment 2 of the present invention. [Figure 5] This figure shows the tooth surface phase state in each of the swivel devices 67a to 67d according to Embodiment 2 of the present invention. [Modes for carrying out the invention]

[0012] The embodiments of the present invention will be described below with reference to the drawings. In principle, the same reference numerals are used for the same elements in all the drawings. Furthermore, descriptions of parts having the same function will be omitted. It should be noted that the configurations described below are merely embodiments, and it is not intended that the embodiments of the present invention are limited to the following specific embodiments. [Examples]

[0013] Embodiment 1 of the present invention will be described with reference to Figures 1 to 3. Figure 1 is a configuration diagram of a rotary positioning device equipped with a backlash measuring device according to Embodiment 1 of the present invention. This embodiment is an example of a configuration using a relatively small-scale rotary positioning device and is suitable, for example, for the rotary stage of a machine tool.

[0014] In Figure 1, the rotary positioning device 42 includes a rotary stage 30 on which the workpiece is mounted, an output shaft 26 connected to the rotary stage 30, a plurality of output shaft bearings 28 that rotatably support the output shaft 26, a large gear 25 (driven gear) positioned between the output shaft bearings 28 and fixed to the output shaft 26 to rotate the output shaft 26, and an output shaft brake 29 for suppressing the rotation of the output shaft 26. The output shaft brake 29 can change its holding force in stages and functions as a braking brake that is used while slipping.

[0015] In addition, the rotational positioning device 42 includes a small gear 24 (drive gear) that meshes with the large gear 25 and has a smaller diameter than the large gear 25, a speed reducer 23 arranged coaxially with the small gear 24, an electric motor 22 arranged coaxially with the speed reducer 23 and driving the small gear 24 via the speed reducer 23, and a backlash measuring device 43 connected to the electric motor 22 and measuring the backlash generated between the large gear 25 and the small gear 24. In this embodiment, the small gear 24 is used as the drive gear, and the large gear 25 having a larger diameter than the small gear 24 is used as the driven gear.

[0016] The speed reducer 23 has its high-speed side connected to the electric motor 22 and its low-speed side connected to the small gear 24, and performs a speed reduction operation when viewed from the electric motor 22. The large gear 25 and the small gear 24 are stored in a gear box 27, and the large gear 25, the small gear 24, and the speed reducer 23 constitute a power transmission mechanism 41.

[0017] The electric motor 22 is controlled by an operation control device 21 electrically connected to the electric motor 22. The operation control device 21 also acquires data such as the input power of the electric motor 22.

[0018] An input shaft angle sensor 12 for acquiring data on the rotation angle (rotation position) of the electric motor 22 is provided on an electric motor shaft 22a serving as the rotation shaft of the electric motor 22. The input shaft angle sensor 12 and the operation control device 21 are each connected to an angle torque measurement unit 13, and measure the rotation angle and torque of the electric motor 22 respectively. That is, the angle torque measurement unit 13 measures the rotation angle and torque of the electric motor 22 based on the data acquired from the input shaft angle sensor 12 and the operation control device 21. Note that the torque of the electric motor shaft 22a of the electric motor 22 may be calculated based on, for example, the current of the electric motor 22 acquired by the operation control device 21.

[0019] A data selection unit 14 is connected to the angle torque measurement unit 13, and a backlash evaluation unit 15 is further connected to the data selection unit 14. The data selection unit 14 selects data on the rotation angle and torque of the electric motor 22 during operation from the angle torque measurement unit 13.

[0020] In this embodiment, a backlash measuring device 43 is constituted by an input shaft angle sensor 12, an angle torque measuring unit 13, a data selection unit 14, and a backlash evaluation unit 15.

[0021] In the rotation positioning device 42 configured as described above, when the electric motor 22 is rotationally driven by a command from the operation control device 21, the rotational motion of the electric motor shaft 22a is decelerated in the power transmission mechanism 41 and transmitted to the output shaft 26 to rotate the rotary stage 30. The rotation angle and torque of the electric motor 22 are respectively acquired by the input shaft angle sensor 12 and the operation control device 21, measured by the angle torque measuring unit 13, the data selection unit 14 selects the available data, and the selected data is calculated by the backlash evaluation unit 15 to obtain a measurement value of the backlash.

[0022] Next, the method for measuring the backlash will be described in detail with reference to FIG. 2. FIG. 2 is a diagram showing the rotation angle and torque characteristics of the electric motor shaft 22a of the electric motor 22 in the meshing state of the large gear 25 and the small gear 24 according to Embodiment 1 of the present invention. In FIG. 2, the measurement result of the rotation angle of the electric motor shaft 22a of the electric motor 22 is used as the rotation angle of the electric motor 22. The relationship between the rotation angle and torque characteristics of the electric motor shaft 22a of the electric motor 22 shown in FIG. 2 is calculated by the angle torque measuring unit 13. In this embodiment, the rotation in the direction in which the left tooth surface 50 of the tooth 24a of the small gear 24 contacts the tooth surface 52 of the tooth 25a of the large gear 25 is defined as the forward rotation, and the rotation in the direction in which the right tooth surface 51 of the tooth 24a of the small gear 24 contacts the tooth surface 53 of the tooth 25b of the large gear 25 is defined as the reverse rotation.

[0023] To measure backlash, the electric motor 22 is first rotated in the forward direction so that the left tooth surface 50 of tooth 24a of the small gear 24 contacts the tooth surface 52 of tooth 25a of the large gear 25, and then stopped. The rotation speed of the large gear 25 is sufficiently low, and when the rotation of the electric motor 22 is stopped, the left tooth surface 50 of tooth 24a of the small gear 24 remains in contact with the tooth surface 52 of tooth 25a of the large gear 25. However, if there is concern about separation of the two, the output shaft brake 29 may be operated to apply a load to the large gear 25. In this state, the right tooth surface 51 of the small gear 24 does not contact the tooth surface 53 of tooth 25b adjacent to tooth 25a of the large gear 25. The state 54 in which the left tooth surface 50 of tooth 24a of the small gear 24 is in contact with the tooth surface 52 of tooth 25a of the large gear 25 is used as the starting point for backlash evaluation.

[0024] Next, the electric motor 22 is rotated in the reverse direction so that the left tooth surface 50 of the tooth 24a of the small gear 24 separates from the tooth surface 52 of the tooth 25a of the large gear. At this point, neither the left tooth surface 50 nor the right tooth surface 51 of the tooth 24a of the small gear 24 is in contact with the tooth surfaces 52 and 53 of the large gear 25, and this is called the free-running section 55. In the free-running section 55, the torque of the rotating shaft of the electric motor 22 is the friction loss of the power transmission mechanism 41, and this value is very small.

[0025] As the rotation of the electric motor 22 continues, the right tooth surface 51 of the tooth 24a of the small gear 24 comes into contact with the tooth surface 53 of the tooth 25b of the large gear 25 (state 56). As the rotation of the electric motor 22 continues, the torque on the rotation shaft of the electric motor 22 increases in order to accelerate the inertia of the large gear 25 and the rotating stage 30. This is called the acceleration section (state 57).

[0026] By correlating the rotation angle of the motor shaft 22a measured from the left tooth surface contact state of the small gear 24 to the acceleration section 57 with the torque of the motor shaft 22a, an angular torque characteristic curve 58 can be obtained. In this angular torque characteristic curve 58, the section in which the torque value is small and approximately constant is the coasting section 55. The rotation angle of the motor 22 in the coasting section 55 is divided by the reduction ratio of the reduction gear, and then multiplied by the meshing radius of the small gear 24 (the radial distance between the meshing point with the large gear 25 and the rotation center of the small gear 24) to obtain the measured value of backlash. The backlash obtained by the above procedure includes the backlash of the reduction gear 23, but since the amount of wear inside the reduction gear 23 is sufficiently small, if the increase in backlash from the start of operation is evaluated, this will be the increase in backlash due to wear between the large and small gears.

[0027] In the procedure described above, the starting point for backlash measurement is the state in which the left tooth surface 50 of the tooth 24a of the small gear 24 is in contact with the tooth surface 52 of the tooth 25a of the large gear 25. However, the starting point may also be the state in which the right tooth surface 51 of the tooth 24a of the small gear 24 is in contact with the tooth surface 53 of the tooth 25a of the large gear 25. Furthermore, an inverter for motor drive is suitable as the operation control device 21, and by utilizing the function of outputting the motor drive current in correspondence with the drive torque value, a torque sensor becomes unnecessary, and system costs can be reduced.

[0028] Furthermore, while a general rotary encoder is preferred as the input shaft angle sensor 12, a combination of an electromagnetic sensor that outputs a sine wave due to a change in the electromagnetic field and a disc-shaped gear may also be used.

[0029] With the above configuration and procedure, by operating the electric motor 22 and measuring the rotation angle of the electric motor shaft 22a (the rotation angle of the electric motor 22) and torque, backlash at any position between the large and small gears can be measured with high frequency, even without the expertise of a skilled person, thereby enabling the detection of the position and amount of backlash increase.

[0030] Here, the measurement of the rotation angle and torque of the motor shaft 22a may be performed at any time, not limited to the aforementioned coasting section 55 and acceleration section 57. Furthermore, backlash evaluation may be performed during normal operation without setting aside down time for the equipment. In this case, the data selection unit 14 can select data similar to the aforementioned operating pattern from the automatically acquired angular torque characteristic curves, and backlash evaluation can be performed using only the usable data.

[0031] Next, the procedure using the data selection unit 14 will be explained with reference to Figure 3. Figure 3 is a flowchart showing the backlash measurement method according to Embodiment 1 of the present invention.

[0032] First, in step S1 (first step), the data selection unit 14 detects a state in which the motor 22 has rotated in the forward or reverse direction by an angle greater than or equal to a preset angle, and then stopped, based on the rotation angle data of the motor 22 during operation acquired by the input shaft angle sensor 12.

[0033] Next, in step S2 (second step), the data selection unit 14 detects a state in which the motor 22 has rotated in the opposite direction to step S1, by a preset angle or more, based on the rotation angle data of the motor 22 during operation acquired by the input shaft angle sensor 12.

[0034] Next, in step S3 (third step), the data selection unit 14 detects a range (range of the motor's rotation angle) in which the torque of the motor 22 in step S2 roughly matches a preset torque, based on the rotation angle data of the motor 22 during operation acquired by the input shaft angle sensor 12 and the torque data of the motor 22 during operation acquired by the operation control device 21.

[0035] Next, in step S4 (the fourth step), the data selection unit 14 detects a state in which the torque increase gradient is within a preset range at the end position of the section detected in step S3, based on the rotation angle data of the motor 22 during operation acquired by the input shaft angle sensor 12 and the torque data of the motor 22 during operation acquired by the operation control device 21.

[0036] Finally, in step S5 (the fifth step), if steps S1 to S4 are met, the backlash evaluation unit 15 sets the section detected in step S3 (the range of rotation angles of the electric motor 22) as the coasting section 55, calculates the backlash, and obtains the backlash.

[0037] As described above, according to this embodiment, since the rotary positioning device 42 is equipped with a backlash measuring device 43, backlash at any position between the large and small gears can be measured at a high frequency regardless of the skill level of the operator. This not only allows for the detection of the position and amount of backlash increase, but also enables backlash evaluation during normal operation, thereby improving the operating rate of the rotary positioning device 42. [Examples]

[0038] Next, Embodiment 2 of the present invention will be described with reference to Figures 4 and 5. Components common to Embodiment 1 are denoted by the same reference numerals, and their detailed descriptions are omitted. Figure 4 is a diagram showing a wind power generation system according to Embodiment 2 of the present invention, in which a backlash measuring device 43 is provided for the swivel device 67.

[0039] The slewing device 67 (rotation positioning device) that rotates the wind turbine nacelle 66 is installed at the top of the cylindrical wind turbine tower 63. The slewing device 67 comprises a slewing brake disc 64, a slewing bearing 62 that rotatably supports the wind turbine nacelle 66, a large gear 25 formed on the stationary outer circumference of the slewing bearing 62, and a small gear 24 positioned to mesh with the large gear 25.

[0040] The nacelle base 61 (rotating stage) is rotatably mounted relative to the wind turbine tower 63 via a slewing bearing 62. A slewing brake caliper 65 that clamps a slewing brake disc 64 and a reduction gear 23 are fixed to the upper part of the nacelle base 61. The slewing brake, consisting of the slewing brake disc 64 and the slewing brake caliper 65, can change its holding force in stages and functions as a braking brake that is used while sliding the slewing brake disc 64.

[0041] The reduction gear 23 is connected to the motor 22 on the high-speed side and to the small gear 24 on the low-speed side, and performs a reduction operation from the perspective of the motor 22.

[0042] The electric motor 22 is controlled by an operation control device 21 electrically connected to the electric motor 22. The rotating shaft of the electric motor 22 is equipped with an input shaft angle sensor 12 that acquires data on the rotation angle of the electric motor 22. The input shaft angle sensor 12 and the operation control device 21 are connected to an angle torque measuring unit 13, respectively, and measure the rotation angle and torque of the rotating shaft of the electric motor 22. A data selection unit 14 is connected to the angle torque measuring unit 13. In this embodiment, external equipment is also connected to the data selection unit 14.

[0043] In this embodiment, the slewing device 67 is configured with the aforementioned equipment. Furthermore, multiple slewing devices 67 (slewing devices 67a to 67d) are provided for one wind turbine, and multiple small gears 24 mesh with one large gear 25 to rotate the wind turbine nacelle 66. In other words, the slewing device 67 in this embodiment consists of one nacelle base 61 (rotating stage) and a large gear 25, multiple small gears 24, a reduction gear 23, an electric motor 22, and a backlash measuring device 43.

[0044] Multiple wind turbines A, B, and C are installed at wind turbine farm 68, and communication lines 69 are drawn out from data selection units 14 located within the wind turbine nacelles 66 and connected to an external network 71. A monitoring computer 73 located at the status monitoring site 72 is also connected to the external network 71, and the monitoring computer 73 and the data selection units 14 are connected to each other via the external network 71 so that they can communicate with each other.

[0045] The angular torque characteristic curve of the electric motor 22 acquired by the data selection unit 14 of the slewing device 67 is transmitted to the monitoring computer 73 via the external network 71, where the backlash is calculated, and the result of the backlash calculation and the date and time the data was acquired are stored in association.

[0046] In this embodiment, the equipment configuration for backlash measurement and the procedure for backlash measurement are generally the same as in Embodiment 1, but it differs from Embodiment 1 in that multiple slewing devices 67 are provided for one wind turbine, and the backlash evaluation unit that performs backlash evaluation is provided in the monitoring computer 73 (external device). In this embodiment, the monitoring computer 73 constitutes the backlash evaluation unit. That is, in this embodiment, the backlash evaluation unit is provided in the monitoring computer 73, which is an external device, and is connected to the data selection unit 14 via an external network 71.

[0047] The differences in the backlash measurement procedure in this embodiment will be explained using Figure 5. Figure 5 shows the tooth surface phase state of each swivel device 67a to 67d according to Embodiment 2 of the present invention.

[0048] In this embodiment, one wind turbine is equipped with four slewing devices 67 (slewing devices 67a to 67d). When the turbine repeatedly performs small slewing movements, the positional relationship of the tooth surfaces of the small gear 24 and large gear 25 of each slewing device (slewing devices 67a to 67d) transitions to a state 81 where the tooth surface positions are uneven due to variations between each slewing device.

[0049] In the slewing device 67a, the left tooth surface 50 of the tooth 24a of the small gear 24 is in contact with the tooth surface 52 of the tooth 25a of the large gear 25, but in the other slewing devices 67b to 67d, the left tooth surface 50 of the tooth 24a of the small gear 24 is not in contact with the tooth surface 52 of the tooth 25a of the large gear 25.

[0050] When all the slewing devices 67a to 67d are rotated in the same direction by a certain angle from a state 81 where the tooth surface positions are uneven, the left tooth surface 50 of the tooth 24a of the small gear 24 comes into contact with the tooth surface 52 of the tooth 25a of the large gear 25 in all of the slewing devices 67a to 67d. In other words, the slewing devices 67a to 67d transition to a state 82 where the tooth surface positions are aligned, and this state can be used as the starting point for backlash evaluation in any of the gears.

[0051] From the state 82 in which the tooth surfaces are aligned, for example, when measuring the backlash of the slewing device 67a, the other slewing devices 67b to 67d are kept stationary, and only the slewing device 67a is rotated in the opposite direction. When the slewing device 67a is rotated in the opposite direction, the right tooth surface 51 of the tooth 24a of the small gear 24 comes into contact with the tooth surface 53 of the tooth 25b of the large gear 25. That is, the slewing device 67a transitions to the measurement state 83 of the slewing device 67a, and the measurement of backlash begins. The method for calculating backlash is the same as in Embodiment 1, so the explanation is omitted.

[0052] In this embodiment, backlash evaluation must be performed for each slewing device to prevent interference with other slewing devices 67b to 67d. In order to transition to a state where the tooth surface positions are aligned, an example is shown in which slewing devices 67a to 67d are rotated in the forward direction, and then only one device (slewing device 67a) is rotated in the reverse direction. However, the rotation direction may be reversed first, and then rotated in the forward direction.

[0053] The wind turbine farm 68 may be installed in remote locations such as mountainous areas, and due to adverse weather conditions such as snowfall, inspectors may not be able to access the wind turbine nacelle 66. For this reason, the angular torque characteristic curve may be transmitted to a monitoring computer 73 connected via an external network 71, and backlash evaluation may be performed remotely. In this case, as shown in the example, the backlash evaluation unit can be integrated into the monitoring computer 73.

[0054] With the above configuration and method, even in large-scale systems with multiple slewing devices, backlash can be measured at any position between large and small gears with high frequency, without the need for skilled personnel, thereby enabling the detection of the location and amount of backlash increase. Furthermore, backlash evaluation can be performed remotely without having to enter the wind turbine for backlash evaluation.

[0055] It should be noted that the present invention is not limited to the embodiments described above, and various modifications are included. For example, the embodiments described above are described in detail for the purpose of explaining the present invention in an easy-to-understand manner, and are not necessarily limited to those having all the configurations described. Furthermore, it is possible to replace parts of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add configurations from other embodiments to the configuration of one embodiment. In addition, it is possible to add, delete, or replace parts of the configuration of each embodiment with other configurations. [Explanation of Symbols]

[0056] 12...Input shaft angle sensor, 13...Angle torque measurement unit, 14...Data selection unit, 15...Backlash evaluation unit, 21...Operation control device, 22...Electric motor, 22a...Electric motor shaft, 23...Reduction gear, 24...Small gear, 24a...Teeth, 25...Large gear, 25a...Teeth, 25b...Teeth, 26...Output shaft, 27...Gearbox, 28...Output shaft bearing, 29...Output shaft brake, 30...Rotating stage, 41...Power transmission mechanism, 42...Rotational positioning device, 43...Backlash measurement device, 50...Left tooth surface, 51...Right tooth surface, 52...Tooth surface, 53...Tooth surface, 54...Left tooth surface contact state, 55...Free-running section 56... Right tooth surface contact state, 57... Acceleration section, 58... Angular torque characteristic curve, 61... Nacelle base, 62... Slewing bearing, 63... Wind turbine tower, 64... Slewing brake disc, 65... Slewing brake caliper, 66... ​​Wind turbine nacelle, 67... Slewing device, 67a... Slewing device, 67b... Slewing device, 67c... Slewing device, 67d... Slewing device, 68... Wind turbine farm, 69... Communication line, 71... External network, 72... Status monitoring site, 73... Monitoring computer, 81... State where tooth surface positions are misaligned, 82... State where surface positions are aligned, 83... Measurement state of slewing device 67a

Claims

1. A rotary positioning device comprising: a rotary stage on which a workpiece is mounted; a driven gear fixed to the output shaft of the rotary stage; a drive gear meshing with the driven gear; an electric motor for driving the drive gear; an operation control device connected to the electric motor for controlling the electric motor; and a backlash measuring device connected to the electric motor and the operation control device for measuring the backlash generated between the driven gear and the drive gear, wherein A rotational positioning device comprising a backlash measuring device comprising: an input shaft angle sensor for acquiring data on the rotation angle of the electric motor; an angle torque measuring unit for measuring the rotation angle and torque of the electric motor based on data acquired from the input shaft angle sensor and the operation control device; a data selection unit connected to the angle torque measuring unit for selecting data on the rotation angle and torque of the electric motor during operation from the angle torque measuring unit; and a backlash evaluation unit for calculating a measured value of backlash occurring between the driven gear and the drive gear based on the data selected by the data selection unit.

2. A rotational positioning device equipped with a backlash measuring device as described in claim 1, A rotational positioning device equipped with a backlash measuring device, wherein the drive gear is a small gear and the driven gear is a large gear with a larger diameter than the small gear.

3. A rotational positioning device equipped with a backlash measuring device as described in claim 2, A rotational positioning device equipped with a backlash measuring device that includes a reduction gear arranged coaxially with the aforementioned small gear.

4. A rotational positioning device equipped with a backlash measuring device according to claim 1 or 2, The backlash evaluation unit is a rotational positioning device equipped with a backlash measuring device, which is provided as an external device and connected to the data selection unit via an external network.

5. A rotational positioning device equipped with a backlash measuring device according to claim 3, The rotary positioning device comprises a rotary stage and a large gear, and a backlash measuring device comprising a plurality of small gears, a reduction gear, an electric motor, and a backlash measuring device.

6. A method for measuring backlash in a rotary positioning device comprising: a rotary stage on which a workpiece is mounted; a driven gear fixed to the output shaft of the rotary stage; a drive gear meshing with the driven gear; and an electric motor for driving the drive gear, A first step involves detecting, based on data of the motor's rotation angle during operation, that the motor has rotated in the forward or reverse direction by more than a preset angle and has stopped. A second step involves detecting, based on data of the rotation angle of the electric motor during operation, a state in which the electric motor has rotated in the opposite direction to the first step, by an angle greater than or equal to a preset angle, A third step involves detecting a section in the second step where the torque of the motor matches a preset torque, based on data of the rotation angle of the motor during operation and data of the torque of the motor during operation. A fourth step involves detecting, based on the rotation angle data of the motor during operation and the torque data of the motor during operation, the state in which the torque increase gradient is within a preset range at the end position of the section detected in the third step, If steps 1 through 4 are met, the section detected in step 3 is designated as the idle section, and a fifth step is performed to calculate the backlash. A method for measuring backlash of a rotary positioning device.

7. A backlash measuring method for a rotary positioning device comprising: a rotary stage on which a workpiece is mounted; a large gear fixed to the output shaft of the rotary stage; a small gear meshing with the large gear and having a smaller diameter than the large gear; an electric motor for driving the small gear; an operation control device connected to the electric motor for controlling the electric motor; and a backlash measuring device connected to the electric motor and the operation control device for measuring the backlash generated between the large gear and the small gear, wherein The backlash measuring device is The system comprises: an input shaft angle sensor for acquiring data on the rotation angle of the electric motor; an angle torque measuring unit for measuring the rotation angle and torque of the electric motor based on data acquired from the input shaft angle sensor and the operation control device; a data selection unit connected to the angle torque measuring unit for selecting data on the rotation angle and torque of the electric motor during operation from the angle torque measuring unit; and a backlash evaluation unit for calculating a measured value of backlash occurring between the large gear and the small gear based on the data selected by the data selection unit. Based on the rotation angle data of the motor during operation acquired by the input shaft angle sensor, the first step is to detect that the motor has rotated in the forward or reverse direction by an angle greater than or equal to a preset angle and has stopped. A second step involves detecting, based on the rotation angle data of the motor during operation acquired by the input shaft angle sensor, that the motor has rotated in the opposite direction to the first step, by an angle greater than or equal to a preset angle. A third step in which, based on the rotation angle data of the motor during operation acquired by the input shaft angle sensor and the torque data of the motor during operation acquired by the operation control device, the torque of the motor in the second step is detected to match a preset torque, A fourth step in which, based on the rotation angle data of the motor during operation acquired by the input shaft angle sensor and the torque data of the motor during operation acquired by the operation control device, a state is detected at the end position of the section detected in the third step in which the torque increase gradient is within a preset range. If steps 1 through 4 are met, the section detected in step 3 is designated as the idle section, and a fifth step is performed to calculate the backlash. A method for measuring backlash of a rotary positioning device.

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