Low-dust transport medium for inspection

Abstract

The present disclosure relates to a system for testing devices, such as semiconductor devices or units under test (UUTs). The system can include a transport media transport system that adjusts to accept transport media of different sizes, resulting in a universal design capable of handling a wide variety of transport media that previously required manual operation or multiple inspection systems. The system can include an inspection system that inspects the UUTs and a positioning system that moves the transport media from a dispenser to the inspection system. The system can include a transport media alignment system that orients and aligns the transport media and UUTs to the inspection system. The systems described herein can enable faster and more accurate UUT placement while improving the testing process and final product quality.

Description

[Technical Field]

[0001]

[0001] Embodiments of the present disclosure relate generally to apparatus and methods for testing units under test (UUTs), such as semiconductor devices. More particularly, embodiments described herein relate to orienting and aligning transport media and UUTs for testing by a metrology system. [Background technology]

[0002] Various systems, such as metrology systems, may be used to test various types of units under test (UUTs) on transport media. UUT types may include semiconductor devices, e.g., whole undiced wafers provided on wafer carriers and / or diced wafers provided on matrix trays. Conventional systems for testing UUTs have limited, if any, capabilities for orienting or aligning the UUTs before testing. Improper alignment of the UUTs can result in inaccurate test results. For example, values ​​measured by a metrology system may not be aligned to the same reference frame as the reference standard being compared. To compensate for this, tight tolerances can be used in the manufacture of the transport media (e.g., matrix transport trays or wafer carriers) to achieve precise angular orientation during testing. Tighter tolerances can result in increased manufacturing costs and difficulty for the transport media. The issue of reference frame alignment becomes more complex for certain types of transport media, such as matrix trays containing multiple UUTs to be tested, because each UUT on the matrix tray may have a different reference frame than the other UUTs. Conventional test systems may not be able to align the reference frame of each UUT on the tray.

[0003]

[0003] Conventional systems for testing UUTs may fail to account for transport media that vary in shape, geometry, and size. As a result, different systems may be used to test, for example, 150 mm wafers, 200 mm wafers, and matrix trays. Using different testing systems can increase the cost of testing a UUT and require more maintenance than a single testing system.

[0004] Therefore, what is needed is a system and method for orienting and aligning transport media and UUTs for testing that solves the above-mentioned problems. Summary of the Invention

[0005]

[0005] The present disclosure relates to a system for testing devices, such as semiconductor devices or units under test (UUTs). The system can include a transport media transport system that adjusts to accept transport media of different sizes, resulting in a universal design capable of handling a wide variety of transport media that previously required manual operation or multiple inspection systems. The system can include an inspection system that inspects the UUTs and a positioning system that moves the transport media from a dispenser to the inspection system. The system can include a transport media alignment system that orients and aligns the transport media and UUTs to the inspection system. The system described herein can enable faster and more accurate UUT placement while improving the testing process and final product quality.

[0006]

[0006] In order that the above-described features of the present disclosure may be understood in detail, the above-summarized disclosure will be more particularly described by reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the accompanying drawings depict only exemplary embodiments and therefore should not be considered as limiting the scope of the present disclosure, which may also admit of other equally effective embodiments. [Brief explanation of the drawings]

[0007] [Figure 1A] 1A-1C are three-view diagrams illustrating a system for testing a unit under test (UUT) according to some embodiments. [Figure 1B] 1A-1C are three-view diagrams illustrating a system for testing a unit under test (UUT) according to some embodiments. [Figure 2A] 1A-1C are three-view diagrams illustrating an adjustment system according to some embodiments. [Figure 2B] 2B is a cross-sectional view of the adjustment system of FIG. 2A, according to some embodiments. [Figure 2C] 2B is a cross-sectional view of the adjustment system of FIG. 2A, according to some embodiments. [Figure 2D] 2B is a three-view diagram illustrating the conditioning system of FIG. 2A with different types of UUTs, according to some embodiments. [Figure 3A] 1A-1C are three-view diagrams illustrating a UUT alignment system according to some embodiments. [Figure 3B] 1A-1C are three-view diagrams illustrating a positioning plate of an adjustment system according to some embodiments. [Figure 3C] 1A-1C are three-view diagrams illustrating a mounting plate of an adjustment system according to some embodiments. [Figure 3D] 1 is a top view of a UUT alignment system according to some embodiments. [Figure 3E] 1 is a top view of a UUT alignment system according to some embodiments. [Figure 3F] 1A and 1B are front and left side views, respectively, of a UUT alignment system according to some embodiments. [Figure 3G] 1A and 1B are front and left side views, respectively, of a UUT alignment system according to some embodiments. [Figure 3H] 1A and 1B are front and left side views, respectively, of a UUT alignment system according to some embodiments. [Figure 3I] 1A and 1B are front and left side views, respectively, of a UUT alignment system according to some embodiments. [Figure 3J]1A and 1B are front and right side views, respectively, of a UUT alignment system according to some embodiments. [Figure 3K] 1A and 1B are front and right side views, respectively, of a UUT alignment system according to some embodiments. [Figure 4] 1A-1C are three-view diagrams illustrating an adjustment system according to some embodiments. [Figure 5A] FIG. 1 is a flow diagram illustrating a method for testing a UUT according to some embodiments. [Figure 5B] FIG. 1 is a flow diagram illustrating a method for testing a UUT according to some embodiments. [Figure 5C] FIG. 1 is a flow diagram illustrating a method for testing a UUT according to some embodiments. [Figure 6A] 1 is a top view of an adjustment system for gripping a UUT according to some embodiments. [Figure 6B] 1 is a top view of an adjustment system for gripping a UUT according to some embodiments. [Figure 6C] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 6D] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 6E] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 6F] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 6G] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 6H] 1 illustrates a UUT being tested by a system for testing a UUT according to some embodiments. [Figure 7A] 1A-1C are three-view diagrams illustrating a vacuum housing on a conditioning system according to some embodiments. [Figure 7B]7B is a cross-sectional top view of a vacuum housing of the conditioning system of FIG. 7A, according to some embodiments. [Figure 7C] 7B is a cross-sectional top view of a vacuum housing of the conditioning system of FIG. 7A, according to some embodiments. [Figure 8] FIG. 1 is a schematic diagram illustrating an example system controller that can be used in accordance with the systems and methods described herein. DETAILED DESCRIPTION OF THE INVENTION

[0008]

[0027] To facilitate understanding, wherever possible, the same reference numerals have been used to designate identical elements common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0009]

[0028] In the following description, numerous specific details are set forth to provide a more thorough understanding of the present disclosure. However, it will be apparent to one skilled in the art that some embodiments of the present disclosure may be practiced without one or more of these specific details. In other instances, well-known features are not described to avoid obscuring one or more embodiments of the present disclosure.

[0010]

[0029] Aspects of the present disclosure provide systems and methods for orienting and aligning transport media and units under test (UUTs) for testing.

[0011]

[0030] Embodiments of systems for UUT testing described herein address the above-mentioned problems. The systems can include a media transport system that adjusts to accept different sized transport media, resulting in a universal design that can handle a wide variety of transport media that previously required manual operation or multiple inspection systems. The systems can include an inspection system that inspects UUTs on the transport media and a positioning system that moves the transport media from a dispenser to the inspection system. The systems can include a transport media alignment system that orients and aligns the UUTs with respect to the inspection system. The systems described herein can enable faster and more accurate UUT placement while improving the testing process and the quality of the final product.

[0012] Example of a system for inspecting a unit under test (UUT)

[0031] 1A and 1B are three-view diagrams illustrating a system for testing a UUT 100 according to some embodiments. In particular, FIG. 1A illustrates how the system for testing a UUT 100 (referred to as system 100 or a UUT testing system) receives a transport medium from a dispenser. In the embodiment illustrated in FIGS. 1A and 1B, the dispenser is a matrix tray dispenser 102. The matrix tray dispenser 102 supplies matrix trays 104 to the system 100. The dispenser may also be a substrate tray dispenser 108, as described with respect to FIG. 2D , that dispenses substrate trays 110 containing substrates 112 to the system 100. The matrix trays 104 and substrate trays 110 are examples of different types of transport medium. The coordinate system is illustrated to facilitate discussion of the positions and orientations of components of the system for testing a UUT 100 (referred to as system 100), but is not intended to define a particular origin.

[0013]

[0032] As shown in FIG. 1A, the system 100 includes a conditioning system 101A, a positioning system 101B, an inspection system 140, and a system controller 199. The conditioning system 101A includes a transport medium transport system 103 and a UUT alignment system 105. The transport medium transport system 103 forms an opening 133 in a central portion of the conditioning system 101A. A transport medium, such as a matrix tray 104, is placed on the conditioning system 101A. The conditioning system 101A moves and rotates the matrix tray 104 to align it with a coordinate system (or any desired coordinate system, such as the coordinate system of the inspection system 140) for inspection by the inspection system 140. The transport medium transport system 103 is further described in conjunction with FIGS. 2A-2D. The UUT alignment system 105 is further described in conjunction with FIGS. 3A-3K.

[0014]

[0033] The positioning system 101B moves the adjustment system 101A around a plane, such as the plane formed by the x-axis and y-axis of a coordinate system. The positioning system 101B includes positioning actuators 114 (e.g., a first positioning actuator 114A and a second positioning actuator 114B), positioning tracks 115 (e.g., a first pair of positioning tracks 115A and a second pair of positioning tracks 115B), and a positioning structure 116.

[0015]

[0034] The positioning structure 116 includes a fixed plate 118 connected to a positioning leg 113 and a movable plate 119. The positioning leg 113 may be connected to a floor, a platform, or other equipment. A first pair of positioning tracks 115A is connected to the fixed plate 118. A second pair of positioning tracks 115B is connected to the movable plate 119 and is positioned substantially perpendicular (or orthogonal) to the first pair of positioning tracks 115A in the x-y plane, for example, at an angle of 90 degrees within ±5 degrees, ±2 degrees, ±1 degree, ±0.5 degrees, or ±0.25 degrees. The tracks 115A and 115B may be connected to the plates 118 and 119 via fasteners, welding, adhesives, etc. The fasteners may include any one of bolts and nuts, screws, anchors, rivets, etc.

[0016]

[0035] The first positioning actuator 114A moves the movable plate 119 along the first pair of positioning tracks 115A. The second positioning actuator 114B moves the adjustment system 101A along the second pair of positioning tracks 115B. In the embodiment shown in FIG. 1A , the first positioning actuator 114A is coupled to the movable plate 119, and the second positioning actuator 114B is coupled to the adjustment system 101A. The positioning actuators 114A and 114B are used to move the adjustment system 101A along the x-axis and y-axis, which advantageously enables the system 100 to accept transport media from different dispensers (e.g., dispensers 102 and 108). For example, the second positioning actuator 114B can move the adjustment system 101A along the y-axis to accept the substrate tray 110. The positioning actuators 114A and 114B move the adjustment system 101A relative to the fixed plate 118. The fixed plate 118 and the movable plate 119 each define an opening 117 in their central portions.

[0017]

[0036] Inspection system 140 includes an inspection device 142, a distance sensor 144, and an imaging system 146. Distance sensor 144 and imaging system 146 are positioned above inspection device 142, as viewed from the side in FIG. 6E. In other words, distance sensor 144 and imaging system 146 are at a distance along the z-axis away from the inspection device. Distance sensor 144 and imaging system 146 are used as inputs to a system controller 199 that controls system 100 to position and align transport media (e.g., matrix tray 104), as described with respect to FIGS. 5A-6H and 8.

[0018]

[0037] A system controller 199 is used to control the system 100. The system controller 199 moves the adjustment system 101A by controlling the positioning actuators 114A and 114B. In some embodiments, the first and second positioning actuators 114A and 114B move the transport medium and the UUT into and out of the inspection system 140. The system controller 199 can also be used to control the inspection system 140 or to use the inspection system 140 as an input to control the positioning actuators 114A and 114B. The system controller 199 is further described in connection with FIG. 8.

[0019]

[0038] 1B illustrates the adjustment system 101A in a position to inspect the matrix tray 104. Positioning actuators 114A and 114B move the adjustment system 101A along the x-axis and y-axis so that the opening 133 at least partially overlaps the opening 117 when viewed from above. Partially aligning the openings 133 and 117 allows the inspection system 140 to obtain a field of view of the UUT (e.g., on the matrix tray 104). For example, a portion of the matrix tray 104 having the UUT to be inspected is positioned above the inspection apparatus 142, and the distance sensor 144 and the imaging system 146 are positioned above the matrix tray 104. In some embodiments, the opening 133 is positioned completely above the opening 117 when viewed from above when the matrix tray 104 is in the position to inspect the matrix tray 104.

[0020]

[0039] The positioning system 101B can position the adjustment system 101A prior to inspection. In some embodiments, the positioning system 101B moves the adjustment system 101A to a general desired area, and the transport medium transport system 103 moves the medium to the desired location. The adjustment system 101A can position the matrix tray 104 with greater precision than the positioning system 101B. In some embodiments, the positioning system 101B can be used to move the matrix tray 104 to a desired location. In such embodiments, the adjustment system 101A can be used to make fine adjustments.

[0021]

[0040] In some embodiments, the positioning actuators 114 can also include a third actuator (not shown) for moving the system 100 along the z-axis. In some embodiments, at least one of the positioning actuators 114 can rotate the system 100 about the x-, y-, and z-axes instead of or in addition to moving the system 100 along the axes. In some embodiments, a single positioning actuator 114 is used. In some embodiments, only the second positioning actuator 114B is used to move the adjustment system 101A along the y-axis, as described with respect to FIG. 6F .

[0022]

[0041] 1A and 1B, the matrix tray 104 includes eyepieces 106. In such an embodiment, the system 100 can inspect each eyepiece 106 in the matrix tray 104 using an inspection system 140, as described with respect to FIGS. 5A-6H.

[0023]

[0042] In some embodiments, the matrix trays 104 are used for handling, transporting, and storing integrated circuits (ICs), modules, and other components. In some embodiments, the matrix trays 104 comply with Joint Electronic Device Engineering Committee (JEDEC) standards and may be referred to as JEDEC trays.

[0024]

[0043] In some embodiments, positioning actuators 114A and 114B may be coupled to other components of system 100, such as fixed plate 118, which remains stationary relative to moving plate 119. In some embodiments, fixed plate 118 uses positioning actuators 114A and 114B to move adjustment system 101A without moving plate 119. In some embodiments, positioning system 101B operates similarly to a gantry system or the motion system of a computer numerically controlled (CNC) router to move adjustment system 101A.

[0025]

[0044] Although dispensers 102 and 108 are described, dispensers for other transport media and UUTs are contemplated that may be inspected by system 100. In some embodiments, a human or robot may place the transport media and UUTs into the system.

[0026] Coordination System Example

[0045] 2A is a three-view diagram illustrating a conditioning system 101A according to some embodiments. In particular, FIG. 2A illustrates a matrix tray 104 disposed on the conditioning system 101A.

[0027]

[0046] Adjustment system 101A includes a first support rail 220 , a second support rail 222 , a first motion system 226 , a second motion system 228 , a mounting rail 230 , a mounting plate 232 , a positioning plate 234 , and a base plate 236 .

[0028]

[0047] The first motion system 226 includes a rail actuator 240 that moves the first support rail 220 toward and away from the second support rail 222 (e.g., along the y-axis), allowing the adjustment system 101A to adjust to accommodate different sizes of transport media and UUTs. For example, the first motion system 226 adjusts the position of the first support rail 220 so that a gap 221 is formed and sized to accommodate the matrix tray 104 (e.g., slightly larger than the width of the matrix tray 104).

[0029]

[0048] The rail actuators 240 are coupled to the mounting rail 230, which is coupled to the mounting plate 232. The second support rail 222 is also fixed to the mounting plate 232 at the end opposite the mounting rail 230. Each of the rail actuators 240 is coupled to a shaft 242. Each shaft 242 includes a threaded portion for engaging one of a plurality of threaded holes 244 formed in the first support rail 220 or a threaded insert (not shown) disposed in the first support rail 220. Each rail actuator 240 rotates its respective shaft 242 about its axis, and the threaded portion of the shaft 242 engages the respective threaded hole 244 to pull the first support rail 220 toward or push the first support rail 220 away from the mounting rail 230. Each shaft 242 moves through one of a plurality of through holes in the second support rail 222 and is secured using a retaining ring (e.g., retaining ring 345 in FIG. 3B ), a clip, or a lock nut or other fastener. Thus, each shaft 242 is fixed against translational movement and constrained to rotate in place. The rotational movement of each shaft 242 is converted into linear movement of the first support rail 220. The linear movement of the first support rail 220 results in an increase or decrease in the axial distance (e.g., the distance along the y-axis) of the gap 221, adjusting the distance between the first support rail 220 and the second support rail 222 to accommodate changes in transport medium (e.g., from a JEDEC tray to a substrate carrier).

[0030]

[0049] First motion system 226 further includes a guide 239 coupled to first support rail 220 to guide movement of first support rail 220. Guide 239 is slidably coupled to track 238, allowing first motion system 226 to move first support rail 220 along track 238. Guide 239 includes corresponding features for mating with track 238. For example, guide 239 may include a protrusion for engaging and sliding along a channel in track 238. In some embodiments, guide 239 may be a C-channel, a U-channel, or a strut channel, and track 238 may be a square tube or beam. In such embodiments, the inner surface of the channel engages the outer surface of the tube or beam.

[0031]

[0050] The guide 239 may be coupled to the first support rail 220 via a fastener (e.g., a set screw, etc.). In some embodiments, the guide 239 is integrally formed with the first support rail 220. For example, the guide 239 may be machined from, welded, glued, or otherwise joined to the first support rail 220 and function as a single piece.

[0032]

[0051] In some embodiments, the track 238, the guide 239, or both may comprise a non-stick or low-friction material, such as ultra-high molecular weight polyethylene, high-density polyethylene, ceramic, polytetrafluoroethylene, non-stick silicone, or enamel, to allow the first support rail 220 to move relative to the track 238. In some embodiments, the non-stick or low-friction material is applied as a coating. In some embodiments, the guide 239 may be a recirculating ball-bearing linear guide. In some embodiments, the non-stick or low-friction material is applied as a tape. In some embodiments, the track 238 or the guide 239 may wear over time and may be replaced.

[0033]

[0052] The first motion system 226 can be used to grip the matrix tray 104 with the support rails 220 and 222, as described with respect to FIG. 6B . For example, the matrix tray 104 can be gripped between the inner sides of the support rails 220 and 222 facing each other. In the illustrated embodiment, the second support rail 222 has a gap 224 formed therein to provide clearance for an end effector of a robot (not shown). The robot can be used to position the UUT on the matrix tray 104, such as by an equipment front-end module (EFEM), which then transports the UUT to the system 100. The gap 224 can provide additional clearance (e.g., along the z-axis) for other equipment, such as inspection optics or an illumination source, to be spaced from above and in contact with the second support rail 222. For example, the gap 224 can provide clearance for the distance sensor 144 or the imaging system 146 when the positioning system 101B moves the adjustment system 101A (as described with respect to Figures 1A and 1B) for inspection of the matrix tray 104.

[0034]

[0053] The second motion system 228 is coupled to the support rails 220 and 222 and is configured to displace the matrix tray 104 axially (e.g., along the x-axis) after the second motion system 228 receives the matrix tray 104 from the matrix tray dispenser 102. In the embodiment shown in FIG. 2A , the second motion system 228 includes conveyor systems 227A and 227B, which will be further described in connection with FIGS. 2B and 2C . Each conveyor system 227A and 227B includes a belt actuator 246 and a belt 248A and 248B. The matrix tray 104 can be positioned on the belts 248A and 248B. For example, the belts 248A and 248B can support outer portions or edges of the matrix tray 104. The belt actuator 246 moves the belts 248A, 248B and the matrix tray 104 toward and away from the matrix tray dispenser 102 (e.g., along the x-axis). The movement of all belts in the system 101A, including the movement of the belts 248A, 248B, should be simultaneous to enable uniform displacement of the matrix tray 104. Such simultaneous movement can be achieved by synchronizing all belt motors or by a single drive shaft connecting the coaxial belt actuators 246. The second motion system 228 can move or retract the matrix tray 104 between the support rails 220 and 222 to adjust the position of the matrix tray 104 (e.g., along the x-axis). The second motion system 228 can be used to present the matrix tray 104 to the inspection system 140 for inspection.

[0035]

[0054] Mounting plate 232 is rotatably coupled to positioning plate 234, which is rotatably coupled to base plate 236 as described with respect to Figures 3A-3I. Mounting plate 232 forms opening 133A, positioning plate 234 forms opening 133B, and base plate 236 forms opening 133C. Openings 133A, 133B, and 133C together form opening 133 (Figure 1A) of adjustment system 101A.

[0036]

[0055] The mounting rail 230, second support rail 222, and track 238 are coupled to the mounting plate 232 via fasteners (e.g., any one of bolts and nuts, screws, anchors, rivets, or a combination thereof), welding, adhesive, or a combination thereof. A rail actuator 240 may be similarly coupled to the mounting rail 230.

[0037]

[0056] In some embodiments, the rail actuator 240 may be coupled to the second support rail 222. In such embodiments, the first motion system 226 may not include the mounting rail 230.

[0038]

[0057] Although the first motion system 226 is illustrated with two rail actuators 240, in some embodiments, only one rail actuator 240 can be used. For example, one rail actuator 240 can use a first shaft 242 (e.g., one of the shafts 242 in FIG. 2A ) to move the first support rail 220. A second shaft 242 (e.g., the other shaft 242 in FIG. 2A ), which is not threaded and is not coupled to the rail actuator 240, can be used to guide the first support rail 220 as it moves.

[0039]

[0058] 2B is a cross-sectional view of the conditioning system 101A of FIG. 2A taken along line 2B-2B, according to some embodiments. As shown in FIG. 2B, the second support rail 222 includes two conveyor systems, a first conveyor system 227A and a second conveyor system 227B, coupled to the second support rail 222. An outer portion or edge of the matrix tray 104 rests on the conveyor systems 227A and 227B. The first and second conveyor systems 227A and 227B are positioned on each side of the gap 224 (e.g., the left and right sides as shown) and are mirror image versions of each other.

[0040]

[0059] The first conveyor system 227A includes a motorized pulley 247A or motorized wheel coupled to a belt actuator 246. The belt actuator 246 rotates the motorized pulley 247A about an axis. The first conveyor system 227A further includes a belt 248A that loops around and travels around the motorized pulley 247A and a free-wheeling pulley 247B or wheel (e.g., an idler pulley). The pulley 247B provides tension and guides the belt 248A around a belt guard 219A on the second support rail 222. The belt guard 219A is configured to contain debris that may be generated by the belt 248A. In some embodiments, the belt 248A is flat and rests within a channel or groove in the motorized pulley 247A, moving due to tension and friction between the belt 248A and the motorized pulley 247A. Pulley 247B may be positioned below and to the left and right of belt guard 219A (as shown). Bearings may be used to assist the rotation of motorized pulley 247A or pulley 247B. In some embodiments, belt 248A is a flat belt, and motorized pulley 247A and free-spinning pulley 247B are crowned pulleys. Having motorized pulley 147A and free-spinning pulley 247B as crowned pulleys controls the position of the belt along the pulley axes. This arrangement keeps the edges of the belt away from the stationary components of conditioning system 101A, reducing dust or particle generation by the belt.

[0041]

[0060] In some embodiments, the inner surface of the belt guard 219A or the second support rail 222 (e.g., the surface facing the first support rail 220) can include a non-stick or low-friction material, such as described with respect to the track 238 in FIG. 2A, to allow the belt 248A to move relative to the belt guard 219A and the second support rail 222.

[0042]

[0061] Conveyor system 227B is similarly configured and includes a motorized pulley 247A, a belt 248B, a pulley 247B, and a belt guard 219B.

[0043]

[0062] 2C illustrates a cross-sectional view of the conditioning system 101A of FIG. 2A taken along line 2C-2C, in accordance with some embodiments. In particular, FIG. 2C illustrates the third conveyor system 227C of the second motion system 228.

[0044]

[0063] First support rail 220 includes conveyor system 227C on which an outer portion or edge of matrix tray 104 rests. The outer portion is on the opposite side of the matrix tray from the outer portions that rest on conveyor systems 227A and 227B. Conveyor system 227C is functionally similar to conveyor systems 227A and 227B described with respect to FIG. 2B. For example, conveyor system 227C includes motorized pulley 247A, belt 248C, pulley 247B, and belt guard 219C. First support rail 220 forms a notch 225 on the side closest to mounting plate 232. Notch 225, similar to gap 224 in second support rail 222 described with respect to FIG. 2A, allows for additional clearance for equipment such as optical inspection elements and illumination sources.

[0045]

[0064] In some embodiments, the first support rail 220 includes multiple conveyor systems 227. Multiple conveyor systems 227 can beneficially improve control of the movement of transport media and UUTs and can account for dimensional variations in transport media and UUTs.

[0046]

[0065] 2D is a three-view diagram illustrating the conditioning system 101A of FIG. 2A with different types of transport media and UUTs, according to some embodiments. In particular, FIG. 2D illustrates a substrate tray 110 positioned on the conditioning system 101A.

[0047]

[0066] A substrate 112 is disposed on a substrate tray 110. A substrate tray dispenser 108 (FIG. 1A) can supply the substrate tray 110 to the system 100 (FIG. 1A). A second motion system 228 is used to receive the substrate tray 110 from the substrate tray dispenser 108. The substrate tray 110 can be disposed on belts 248A, 248B, and 248C. For example, the belts 248A, 248B, and 248C can support an outer portion or edge of the substrate tray 110. A belt actuator 246 moves the belts 248A, 248B, and 248C and the substrate tray 110 toward and away from the matrix tray dispenser 108 (e.g., along the x-axis). The adjustment system 101A moves the substrate tray 110 so that the inspection system 140 (FIGS. 1A and 1B) can inspect the substrate 112 as well as the matrix tray 104.

[0048] Example of a Unit Under Test (UUT) Alignment System

[0067] 3A is a three-view diagram illustrating UUT conditioning system 105, according to some embodiments. Some components of conditioning system 101A (FIG. 2A), such as track 238 and support rails 220 and 222, are not shown for ease of illustration.

[0049]

[0068] The UUT alignment system 105 rotates the transport medium transport system 103 about the x-axis, y-axis, and z-axis. The UUT alignment system 105 includes a first rotation system 350 and a second rotation system 354. The first rotation system 350 rotates the mounting plate 232 about the zp-axis of the positioning plate 234, which also includes the xp-axis and the yp-axis. The second rotation system 354 includes a pivot joint (e.g., a gimbal ball 360) and rotates the mounting plate 232 relative to the base plate 236 via the pivot joint. The pivot joint allows the mounting plate 232 to move about at least two axes (e.g., the x-axis and the y-axis). In the illustrated embodiment, the second rotation system 354 rotates the mounting plate 232 and the positioning plate 234 about the xb-axis and yb-axis of the gimbal ball 360. The gimbal ball 360 is coupled to the base plate 236, and the positioning plate 234 rests on the gimbal ball 360. The mounting plate 232 and the positioning plate 234 rotate relative to the base plate 236. In the illustrated embodiment, the gimbal ball 360 may be coupled to a corner of the base plate 236 by positioning the gimbal ball 360 in a circular cutout (not shown) in the base plate 236.

[0050]

[0069] First rotation system 350 includes first bracket 352A, second bracket 352B, rotational actuator 352C, shaft 352D, compliant mechanism 352E, and third bracket 352F. First bracket 352A is coupled to mounting plate 232, and second bracket 352B and third bracket 352F are coupled to positioning plate 234. Rotational actuator 352C is coupled to positioning plate 234 via third bracket 352F. Alternatively, rotational actuator 352C may be directly coupled to positioning plate 234 using fasteners, welding, adhesive, or a combination thereof. Rotational actuator 352C may be a linear actuator, such as a mechanical, electromechanical, hydraulic, pneumatic, or piezoelectric linear actuator, and is configured to cause rotation of mounting plate 232 relative to positioning plate 234 about the z-axis. The rotational actuator 352C pushes the third bracket 352F axially along the shaft 352D into engagement with the first bracket 352A. The third bracket 352F pushes the first bracket 352A toward the second bracket 352B, compressing the compliant mechanism 352E. Because the positioning plate 234 is fixed relative to the mounting plate 232, pushing the first bracket 352A, which is connected to the mounting plate 232, causes the mounting plate 232 to rotate about the z-axis relative to the positioning plate 234. The compliant mechanism 352E connects the first bracket 352A to the second bracket 352B. The compliant mechanism 352E is compressed as the rotational actuator 352C moves the first bracket 352A toward the second bracket 352B. When the rotational actuator 352C retracts the shaft 352D, the compliant mechanism 352E extends, urging the first bracket 352A away from the second bracket 352B and returning the mounting plate 232 to the starting position. The first rotational system 350 is further described in relation to Figures 3D and 3E.Rotational movement of the mounting plate 232 about the z-axis allows a transport medium, such as the matrix tray 104, to rotate about the z-axis to better position the UUT for testing.

[0051]

[0070] First rotation system 350 further includes at least one arcuate guide 362 for guiding the rotation of mounting plate 232. As shown in Figure 3A, three arcuate guides 362 are used. The arcuate guides 362 include corresponding elements on mounting plate 232 and positioning plate 234. The arcuate guides 362 of first rotation system 350 are further described in relation to Figures 3B-3D.

[0052]

[0071] Second rotation system 354 includes a first actuator 356A having a first shaft 357A, a second actuator 356B having a second shaft 357B, a plurality of compliant mechanisms 358 (such as extension springs), a plurality of compliant mechanism standoffs 359, and a gimbal ball 360. Actuators 356A and 356B are coupled to positioning plate 234 at opposite corners opposite gimbal ball 360. Actuators 356A and 356B may be coupled to positioning plate 234 via brackets, fasteners, welding, adhesive, or a combination thereof. Actuators 356A and 356B and shafts 357A and 357B are used to rotate positioning plate 234 about gimbal ball 360.

[0053]

[0072] Each of the plurality of compliant features 358 is associated with either actuator 356A or 356B. A compliant feature standoff 359 is coupled to a second side of positioning plate 234 adjacent actuators 356A and 356B. One end of each of the plurality of compliant features 358 is coupled to one of the plurality of compliant feature standoffs 359, and the other end of each of the plurality of compliant features 358 is coupled to base plate 236. Thus, compliant feature standoff 359, which interfaces with base plate 236, applies a tension force to each of the plurality of compliant features 358, allowing positioning plate 234 to move closer to base plate 236. Actuators 356A and 356B can then be used to push positioning plate 234 along shafts 357A and 357B. Actuators 356A and 356B push against positioning plate 234, causing it and a UUT disposed thereon, such as matrix tray 104, to rotate about gimbal ball 360, and consequently about the x- and y-axes. Additionally, compliant mechanism 358 provides a compressive force that allows positioning plate 234 to rotate back into position. This rotational movement of positioning plate 234 and the UUT is further described in connection with Figures 3F-3K.

[0054]

[0073] The second rotation system 354 may further include a rotation lock 370 for maintaining the position or orientation of the positioning plate 234 relative to the base plate 236. The rotation lock 370 includes a rotation lock shaft 371A and a rotation lock actuator 371B. The rotation lock shaft 371A is coupled to the base plate 236 via a pivot support, such as a gimbal, that allows rotation of the rotation lock shaft 371A relative to the base plate 236. For example, the end of the rotation lock shaft 371A may include a socket coupled to a ball joint of the base plate 236. In the illustrated embodiment, the rotation lock shaft 371A is coupled to a mounting protrusion 337 of the base plate 236 that protrudes from below the side of the mounting plate 232.

[0055]

[0074] A rotation lock actuator 371B is coupled to the positioning plate 234. The rotation lock actuator 371B engages the rotation lock shaft 371A to lock or secure the orientation or position of the UUT alignment system 105. In the illustrated embodiment, three rotation lock actuators 371B are shown, allowing the actuators 371B to lock the rotation lock shafts 371A in different orientations. The rotation lock actuators 371B are coupled to plate protrusion 335A of the positioning plate 234, which protrudes from below the mounting plate 232 and is positioned above the mounting protrusion 337. The positioning plate 234 also has a first edge 335B and a second edge 335C, as described with respect to Figures 3H and 3I.

[0056]

[0075] 3A, first bracket 352A, second bracket 352B, rotary actuator 352C, shaft 352D, and compliant mechanism 352E are positioned between actuators 356A and 356B on the same side of positioning plate 234 as actuators 356A and 356B. In some embodiments, first bracket 352A, second bracket 352B, rotary actuator 352C, shaft 352D, and compliant mechanism 352E may be positioned on different sides of positioning plate 234 or may not be positioned between actuators 356A and 356B.

[0057]

[0076] In some embodiments, first bracket 352A may be coupled to positioning plate 234, and second bracket 352B may be coupled to mounting plate 232. In some embodiments, rotational actuator 352C may be coupled to mounting plate 232, and first bracket 352A may be coupled to positioning plate 234. In some embodiments, rotational actuator 352C may be coupled directly to first bracket 352A and may directly control the rotation of mounting plate 232 without using compliant mechanism 352E. In such embodiments, shaft 352D may be directly coupled to first bracket 352A, and rotational actuator 352C may extend or retract shaft 352D to rotate mounting plate 232.

[0058]

[0077] In some embodiments, any of plates 232, 234, and 236 may be referred to as an adjusting plate. In some embodiments, any of actuators 352C, 356A, and 356B may be referred to as an adjusting actuator.

[0059]

[0078] In some embodiments, the pivot joint can be any joint that allows rotation about at least two axes, hi some embodiments, the pivot joint can be similar to the pivot support described with respect to the rotation lock shaft 371A.

[0060]

[0079] In some embodiments, the zp axis may also be referred to as the central axis, in which the positioning plate may be disposed on the central axis and the mounting plate may rotate about the central axis.

[0061]

[0080] In the illustrated embodiment, first and second shafts 357A and 357B include balls or spheres at the ends (e.g., ball ends) that contact base plate 236. The ball ends allow shafts 357A and 357B to contact base plate 236 at different angles. The base plate may include areas or contact plates for the ball ends of shafts 357A and 357B to contact. The contact plates wear and can be replaced. The ball ends and contact plates may each include a non-stick or low-friction material, such as described with respect to track 238, to allow movement of the ball ends relative to the contact plates.

[0062]

[0081] FIG. 3B is a three-view diagram illustrating the positioning plate 234 according to some embodiments. The positioning plate 234 includes arcuate guides 362, forming recesses 361. Each arcuate guide 362 includes a guide pad 363A coupled to a guide spacer 363B. The guide spacers 363B are coupled to the positioning plate 234. The guide pads 363A engage with guide channels 364 in the mounting plate 232 as the mounting plate 232 rotates relative to the positioning plate 234, as described with reference to FIGS. 3D and 3E. The guide pads 363A may include a non-stick or low-friction material, such as described with reference to the belt guard 219A of FIG. 2B, to allow the guide channels 364 to move relative to the guide pads 363A. In some embodiments, the guide pads 363A may wear over time and can be replaced. In some embodiments, the guide spacers 363B are not used, and the guide pads 363A are directly coupled to the positioning plate 234.

[0063]

[0082] The recess 361 has a shape corresponding to the shape of the gimbal ball 360 ( FIG. 3A ). For example, the recess 361 in the positioning plate 234 rests on at least a portion of the gimbal ball 360 that fits within the recess 361. The recess 361 moves around the surface of the gimbal ball 360, allowing the positioning plate 234, and any transport media and UUTs disposed thereon, to rotate about the xb and / or yb axes of the gimbal ball 360, as described with respect to FIGS. 3F-3K. In some embodiments, the recess 361 may surround a substantial portion of the gimbal ball 360 such that the gimbal ball 360 is retained within the recess 361 and will not fall out in the absence of the base plate 236. In some embodiments, the recess 361 or the gimbal ball 360 may include a non-stick or low-friction material. In some embodiments, the gimbal ball 360 may be coupled to the positioning plate 234. In such embodiments, the base plate 236 may form the recess 361.

[0064]

[0083] 3B, the plate protrusion 335A is formed with a rotation lock opening 367. A rotation lock shaft 371A is disposed through the rotation lock opening 367.

[0065]

[0084] FIG. 3C is a three-view diagram illustrating a mounting plate 232 according to some embodiments. The mounting plate 232 includes bearing channels 364. The bearing channels 364 are sized to receive guide pads 363A (FIG. 3B). For example, the guide pads 363A slide along the inner surfaces of the bearing channels 364 as the mounting plate 232 rotates. The bearing channels 364 are curved to guide the movement of the guide pads 363A through the bearing channels 364, further constraining the rotation of the mounting plate 232 about the zp axis (FIG. 3A). In the illustrated embodiment, the bearing channels 364 are three arcuate channels, each having a center point coincident with the zp axis. Rotation of the mounting plate 232 and the transport medium with the UUT disposed thereon are further described in conjunction with FIGS. 3D and 3E.

[0066]

[0085] In some embodiments, more or fewer bearing channels 364 may be used. In some embodiments, the guide channel 364 is a single channel adjacent at least two sides of the mounting plate 232 to form a circular channel. In some embodiments, the guide channel 364 may be a single channel formed by connecting three bearing channels 364 as shown in FIG. 3C. In some embodiments, the center point of the bearing channel 364 may not be coincident with the zp axis. In some embodiments, the bearing channel 364 is generally curved about the zp axis. In some embodiments, the bearing channel 364 may be formed by the positioning plate 234 (FIG. 3B), and the arcuate guide 362 (FIG. 3B) may be coupled to the mounting plate 232.

[0067]

[0086] 3D and 3E are top views of UUT alignment system 105 according to some embodiments. In particular, Figures 3D and 3E show first rotation system 350 rotating mounting plate 232, as previously described. In particular, Figure 3D shows mounting plate 232 in a home position (e.g., a first position or a position aligned with positioning plate 234).

[0068]

[0087] Shaft 352D contacts first bracket 352A when mounting plate 232 is in position. Rotary actuator 352C moves shaft 352D toward and away from first bracket 352A to move mounting plate 232 to different positions. As shaft 352D moves toward first bracket 352A, it pushes against first bracket 352A and mounting plate 232. Bearing channel 364 rides on guide pad 363A and converts linear motion of shaft 352D into rotational motion of mounting plate 232, as shown in FIG. 3E.

[0069]

[0088] 3E shows the mounting plate 232 rotated by the first rotation system 350. As the shaft 352D moves the first bracket 352A toward the second bracket 352B, the compliant mechanism 352E is compressed therebetween. As the shaft 352D moves away from the first bracket 352A, the compliant mechanism 352E moves the first bracket 352A, along with the shaft 352D, toward the rotational actuator 352C. In this manner, the rotational actuator 352C is used to rotate the mounting plate 232.

[0070]

[0089] The compliant mechanism 352E includes a resilient body, such as a compression spring, that stores mechanical energy. For example, the compliant mechanism 352E stores mechanical energy when the compliant mechanism 352E is compressed between the first bracket 352A and the second bracket 352B. When the shaft 352D contracts, the compliant mechanism 352E applies the stored mechanical energy (e.g., force) to the first bracket 352A, causing the mounting plate 232 to move relative to the positioning plate 234. The compliant mechanism 352E is therefore "biased" to move the first bracket 352A away from the second bracket 352B and rotate the mounting plate 232 relative to the positioning plate 234 about the z-axis. The rotation of the mounting plate 232 also rotates a transport medium, such as a matrix tray 104 disposed on the adjustment system 101A coupled to the surface of the mounting plate 232 as described above, about the z-axis.

[0071]

[0090] In some embodiments, the rotational actuator 352C moves the positioning plate 234 in a direction opposite to the bias direction of the compliant mechanism 352E. In some embodiments, the rotational actuator 352C is attached directly to the first bracket 352A via a pivotal support, such as a gimbal, that allows rotation of the first bracket 352A relative to the shaft 352D. In such embodiments, the second bracket 352B and compliant mechanism 352E may be unnecessary. In some embodiments, the compliant mechanism 352E may expand and thereby be "biased" to move the first bracket 352A in a direction toward the second bracket 352B.

[0072]

[0091] 3F and 3G are front and left side views, respectively, of UUT alignment system 105 according to some embodiments. In particular, FIGS. 3F and 3G show adjustment system 101A in a start position. In the illustrated embodiment, actuators 356A and 356B simultaneously retract shafts 357A and 357B to rotate or “tilt” first edge 335B of positioning plate 234 downward about the x-axis toward base plate 236, as shown in FIGS. 3H and 3I. Compliant mechanism 358 is coupled to plates 234 and 236 near each actuator 356A and 356B. Compliant mechanism 358 is biased to pull positioning plate 234 toward base plate 236 as shafts 357A and 357B retract, as described with respect to FIGS. 3H and 3I. Actuators 356A and 356B can move positioning plate 234 in a direction opposite to the bias direction of compliant mechanism 358.

[0073]

[0092] Alternatively, actuator 356B can retract shaft 357B while actuator 356A remains stationary on shaft 357A. Such actuation rotates or "tilts" positioning plate 234 and the UUT disposed thereon about the y-axis. This allows the UUT to be optimally positioned during testing, thereby improving testing accuracy.

[0074]

[0093] 3H and 3I are front and left side views, respectively, of UUT alignment system 105 according to some embodiments. In particular, FIGS. 3H and 3I show adjustment system 101A in a first, maximum adjustment position rotated about the xb axis. Shafts 357A and 357B are fully retracted, with the length of first edge 335B closest to base plate 236. When actuators 356A and 356B retract shafts 357A and 357B, recess 361 in positioning plate 234 slides over gimbal ball 360, rotating positioning plate 234 and the transport medium with the UUT disposed thereon.

[0075]

[0094] In some embodiments, only one compliant mechanism 358 is used to bias the positioning plate 234 toward the base plate 236. In some embodiments, a compliant mechanism 358 is not used, and the weight of the adjustment system 101A ( FIG. 1A ) moves the positioning plate 234 toward the base plate 236. In some embodiments, actuators 356A and 356B may be directly coupled to the base plate 236, directly controlling the rotation of the positioning plate 234 about the xb and yb axes of the gimbal ball 360 without using a compliant mechanism 358. In such an embodiment, shafts 357A and 357B may be directly coupled to the base plate 236, and actuators 356A and 356B may extend or retract shafts 357A and 357B to rotate the mounting plate 232.

[0076]

[0095] 3J and 3K are front and right side views, respectively, of UUT alignment system 105 according to some embodiments. In particular, FIGS. 3J and 3K show adjustment system 101A in a second, maximum adjustment position rotated about the yb axis. Second shaft 357B is fully retracted while first shaft 357A is extended (or fully extended). The length of second edge 335C is closest to base plate 236. Recess 361 in positioning plate 234 slides over gimbal ball 360 as actuator 356B retracts second shaft 357B.

[0077]

[0096] 3H-3K are illustrated for rotation about a single axis, UUT alignment system 105 can rotate adjustment system 101A about both the xb and yb axes by retracting second shaft 357B while extending first shaft 357A. Shafts 357A and 357B can be extended and retracted to different positions to rotate adjustment system 101A about both the xb and yb axes and orient positioning plate 234 in different positions.

[0078] Further examples of coordination systems

[0097] 4 is a three-view diagram illustrating adjustment system 401 according to some embodiments. Adjustment system 401 functions similarly to adjustment system 101A, except where noted. For example, adjustment system 401 can be used with positioning system 101B (FIG. 1A).

[0079]

[0098] Adjustment system 401 includes a transport media transport system 403 and a media UUT alignment system 405. Transport media transport system 403 includes a first support rail 420, a second support rail 422 (e.g., sub-rails 422A and 422B), a first motion system 426, a second motion system 428, a mounting rail 230, a mounting plate 232, and a positioning plate 234. UUT alignment system 405 is similar to UUT alignment system 105 described with respect to Figures 3A-3K, except where noted.

[0080]

[0099] The first motion system 426 uses support rails 420 and 422 to grip transport media, such as matrix trays 104. The support rails 420 and 422 include guides 239 that guide the movement of the support rails 420 and 422 along tracks 238. Thus, the support rails 420 and 422 are movably coupled to the tracks 238. Rail actuators 240 move the support rails 420 and 422 using shafts 442 coupled to each rail actuator 240. The rail actuators 240 are also coupled to the mounting rail 230, which is coupled to the mounting plate 232. Each shaft 442 includes a first threaded portion 443A for engaging a first threaded hole 444A formed by the first support rail 420 or a threaded insert (not shown). The threaded hole 444A may be similar to the threaded hole 244 described with reference to FIG. 2A . Each shaft 442 further includes a second threaded portion 443B for engaging a second threaded hole 444B formed by the second support rail 422 or a threaded insert (not shown).

[0081]

[0100] The threads of threaded portions 443A and 443B and threaded holes 444A and 444B are configured such that when rail actuator 240 rotates shaft 442 in a first direction (e.g., clockwise), support rails 420 and 422 move away from each other. When rail actuator 240 rotates shaft 442 in a second direction (e.g., counterclockwise), support rails 420 and 422 move toward each other. This configuration of first and second support rails 420 and 422 is adjusted to a desired width, such as the width of a transport medium, such as matrix tray 104 or substrate tray 110. This capability allows testing of various types of UUTs using only one system, reducing cost and equipment complexity. In some embodiments, threaded portion 443A and threaded hole 444A may be right-handed and threaded portion 443B and threaded hole 444B may be left-handed, or vice versa.

[0082]

[0101] The second support rail 422 includes a first sub-rail 422A and a second sub-rail 422B, forming a gap 424 between the sub-rails 422A and 422B. The gap 424, configured similarly to the gap 224, can provide clearance for an end effector of a robot (not shown). The robot can be used to position the UUT on the matrix tray 104, such as by a front-end equipment module (EFEM). The gap 424 can provide additional clearance (e.g., along the z-axis) for other equipment, such as inspection optics or illumination sources, to maintain a distance from the second support rail 422. In some embodiments, the second support rail 422 is a single support rail or one-piece structure, similar to the second support rail 222 described with reference to FIG. 2A .

[0083]

[0102] A second motion system 428 is coupled to support rails 420 and 422. In the embodiment shown in FIG. 4, second motion system 428 includes conveyor systems 427 (e.g., first conveyor system 427A, second conveyor system 427B, and third conveyor system 427C). Conveyor systems 427 are positioned parallel to one another and operate such that belt movement along the conveyor systems is along the same axis (e.g., the x-axis). Conveyor systems 427 are also similar to conveyor system 227, except as noted. First conveyor system 427A is coupled to first support rail 420 and runs the length of first support rail 420. Second and third conveyor systems 427B and 427C are coupled to second support rail 422. The second conveyor system 427B is coupled to the subrail 422A and travels the length of the subrail 422A. The third conveyor system 427C is coupled to the subrail 422B and travels the length of the subrail 422B. The second motion system 428, like the second motion system 228, is configured to provide linear motion of transport media, such as the matrix tray 104, along an axis of the second motion system 428 (e.g., the x-axis).

[0084] Example of UUT inspection method

[0103] 5A-5C are flow diagrams illustrating methods 500, 520, and 540 for inspecting media, according to some embodiments. FIGS. 6A-6H are different views illustrating system 100 at different stages of methods 500, 520, and 540, according to some embodiments. In particular, FIGS. 6A-6H are schematic diagrams illustrating system 100 at different stages of method 500 shown in FIG. 5A, method 520 shown in FIG. 5B, and method 540 shown in FIG. 5C, using a matrix tray 104 as the media, according to some embodiments. Therefore, for clarity, FIGS. 5A-5C and 6A-6H are described together herein.

[0085]

[0104] As shown in the embodiment of FIG. 6A and steps 502, 522, and 542 of methods 500, 520, and 540 of FIGS. 5A-5C, a transport medium (e.g., matrix tray 104 with UUTs thereon) is positioned on system 100 (FIG. 1A), such as on second motion system 228 of system 100. In particular, matrix tray 104 rests on belts 248A and 248C of conveyor systems 227A and 227B, respectively. Matrix tray 104 may be loaded onto second motion system 228 prior to method 500 by a dispenser (e.g., dispenser 102 or dispenser 108) or by EFEM, as described with respect to FIG. 1A.

[0086]

[0105] In step 504 of FIG. 5A, at least one of conveyor systems 227A, 227B, and 227C is used to move a transport medium (e.g., matrix tray 104) along the length of first and second support rails 220 and 222 to a first position, as shown in FIG. 6A. In the embodiment shown in FIG. 6A, second motion system 228 moves matrix tray 104 toward inspection system 140 ( FIG. 1A ) until matrix tray 104 contacts a barrier 680 (e.g., first barrier 680A), such as extendable member 681A of first barrier 680A. Barrier 680 extends to prevent matrix tray 104 from moving further along conveyor systems 227A and 227B beyond a desired point (e.g., barrier 680). In some embodiments, barrier 680 may be referred to as a gate or fence. The first barrier 680A may be coupled to the first support rail 220 and includes an extendable member 681A coupled to a barrier actuator 681B. The barrier actuator 681B extends and retracts the extendable member 681A perpendicular to the path of movement of the matrix tray 104 along the conveyor systems 227A and 227B. For example, when retracted, the extendable member 681A may retract into the barrier recess 623 of the second support rail 222 to allow the matrix tray 104 to advance through the second motion system 228. When extended, the extendable member 681A may be positioned on or in the area between the belts 248A of the conveyor systems 227B and 227C to restrict the movement of the matrix tray 104 traveling on the second motion system 228. The motorized pulley 247A rotates to move the belt 248A, which in turn moves the matrix tray 104.

[0087]

[0106] Several means can be used to determine whether the matrix tray 104 has contacted the first barrier 680A. In some embodiments, the angular position of the motorized pulley 247A can be monitored, for example, by the system controller 199 (FIG. 1A). The first barrier 680A can be activated when the angular position of the motorized pulley 247A reaches a predetermined value, which depends on the length of the belt, the length of the matrix tray 104, and the circumference of the pulley. In some embodiments, a sensor can be used, for example, as an input to the system controller 199. In some embodiments, the sensor can be a contact sensor that senses electrical contacts or magnetic fields on a circuit board to determine whether the matrix tray 104 has contacted the first barrier 680A. In some embodiments, the stretchable member 681A can use a flexion sensor or strain gauge to detect whether the stretchable member 681A has deformed, such as by a change in resistance of the flexion sensor or strain gauge. In some embodiments, a proximity sensor, such as an inductive, capacitive, ultrasonic, infrared, or magnetic proximity sensor, can be used. In some embodiments, the second motion system 228 can move the matrix tray 104 a predetermined distance to a predetermined position, and the first barrier 680A can act as a backstop to prevent overshooting the predetermined position. For example, the system controller 199 can control the movement of the belt 248A by controlling the rotation of the motorized pulley 247A via an encoder or the like. Alternatively, contact with the barrier 680 can be measured by the row of UUTs on the matrix tray 104 rather than the matrix tray 104 itself. Because belt indexing errors are cumulative, a barrier (e.g., barrier 680) can be used between every row of UUTs on the matrix tray 104, every other row, or any desired number of rows.

[0088]

[0107] The matrix tray 104 includes a plurality of eyepieces 106 (e.g., UUTs). In the embodiment shown in FIG. 6A, the matrix tray 104 includes eight eyepieces (e.g., first through eighth eyepieces 106A-H). Each eyepiece 106 is associated with a coordinate system. For example, the first eyepiece 106A has a coordinate system xe1, ye1, and ze1, and the second eyepiece 106B has a coordinate system xe2, ye2, and ze2. The coordinate systems of each eyepiece 106 may be oriented slightly differently from the other eyepieces 106 due to manufacturing tolerances, etc. For example, the xe1, ye1, and ze1 axes of the first eyepiece 106A may be oriented such that they are not parallel to the corresponding xe2, ye2, and ze2 axes of the second eyepiece 106B. The eyepieces 106A-H and their respective coordinate systems are further described in conjunction with subsequent figures.

[0089]

[0108] In some embodiments, the barrier actuator 681B may be a linear actuator, such as a mechanical, electromechanical, hydraulic, pneumatic, or piezoelectric linear actuator, or a combination thereof, that can move the extendable member 681A linearly into and out of the path of the matrix tray 104, away from and towards the linear actuator.

[0090]

[0109] Alternatively, the barrier actuator 681B may be a rotary actuator such as a servo or servo motor, a stepper motor, a rack and pinion actuator, a vane actuator, a helical actuator, a planetary actuator, a linear cylinder, a scotch yoke actuator, a sprocket actuator, a bladder actuator, or a direct drive motor, to name a few options. In such an embodiment, the rotary actuator may rotate the extendable member 681A into and out of the path of the matrix tray 104.

[0091]

[0110] The extendable member 681A may be any suitable structure. In embodiments where the barrier actuator 681B is a linear actuator, the extendable member 681A may be a rod or shaft that can be moved in and out of the path of the matrix tray 104. In embodiments where the barrier actuator 681B is a rotary actuator, the extendable member 681A may be an L-shaped bracket, with the bottom of the "L" being able to rotate in and out of the path of the matrix tray 104.

[0092]

[0111] 5A-5C include adjusting the distance (e.g., gap 221 in FIG. 2A ) between first support rail 220 and second support rail 222 using rail actuator 240 (FIG. 2A ). In such embodiments, the distance can be adjusted to accommodate transport media on conveyor system 227.

[0093]

[0112] 6B , the first motion system 226 moves the first support rail 220 toward the second support rail 222 to grip the matrix tray 104. In some embodiments of the method 500, the first motion system 226 can grip the matrix tray between the inner sides of the first and second support rails 220 and 222 by using the rail actuators 240 ( FIG. 2A ) to reduce the distance between the first support rail 220 and the second support rail 222 (e.g., the gap 221 in FIG. 2A ). When the matrix tray 104 is secured between the support rails 220 and 222, the matrix tray 104 is essentially secured to the mounting plate 232 such that the matrix tray 104 moves with the mounting plate 232.

[0094]

[0113] The first motion system 226 can use several means to determine whether the matrix tray 104 is secured between the support rails 220 and 222. For example, the current in the rail actuator 240 (FIG. 2A) can be monitored, a sensor can be used, or the first support rail 220 can be moved a predetermined distance as described above in connection with the second motion system 228, the matrix tray 104, and the first barrier 680A.

[0095]

[0114] The stretchable member 681A of the first barrier 680A can be contracted before or after gripping the matrix tray 104. The stretchable member 681A may remain stretched after the matrix tray 104 is gripped.

[0096]

[0115] In method 520, once a transport medium (e.g., matrix tray 104) and associated UUTs have been moved into position for inspection by conveyor systems 227A and 227B, barrier 681 is used to stop the transport medium, preferably at the first row of UUTs in matrix tray 104. In step 524, actuators 114A and 114B adjust an alignment camera (e.g., imaging system 146) to a position to acquire a fiducial image of the first UUT in the first row of matrix tray 104. The alignment camera and fiducial 683 then determine the amount of rotation about the z-axis required to align matrix tray 104 for inspection. Rotational actuator 352C then rotates positioning plate 234, which also rotates matrix tray 104. In step 528, distance sensors are used to determine the distance between matrix tray 104 and inspection system 140 at three distinct points on the UUT. Using this information, the orientation of the matrix tray 104 in the XY plane is determined to determine the required rotation about the x- and y-axes. Then, first and second actuators 357A and 357B correct the angular rotation about the x- and y-axes via pivot joints (e.g., gimbal balls 360). Once the matrix tray 104 is realigned, the UUTs are inspected by the inspection system 140. After inspecting the UUTs, the first and second actuators 114A and 114B adjust the matrix tray 140 so that subsequent UUTs in the same first row as the first UUT are aligned with the inspection system 140. The subsequent UUTs undergo the same realignment procedure as the first UUT. Once all UUTs in the first row have been inspected, the conveyor systems 227A and 227B adjust the matrix tray 140 so that subsequent UUTs can be inspected by the inspection system 140 in the same manner as the first UUT.

[0097]

[0116] 5B step 524 and described with respect to FIGS. 1A and 1B, in some embodiments, the positioning system 101B uses a first positioning actuator 114A to move the movable plate 119 relative to the fixed plate 118. The positioning system 101B also uses a second positioning actuator 114B to move the fixed plate 118 relative to the base plate 236. In such embodiments, the positioning system 101B can move the adjustment system 101A coupled to the movable plate 119.

[0098]

[0117] 6C and 6D, and in steps 504, 524, 526, 528, and 544 of Figures 5A-5C, the inspection system 140 is used in conjunction with the UUT alignment system 105 to position, orient, and align the matrix tray 104 prior to inspection by the inspection device 142. In particular, the distance to the surface of the matrix tray 104 is measured using the distance sensor 144, the matrix tray 104 is reoriented, the alignment of the matrix tray 104 is measured using the imaging system 146, and the matrix tray 104 is realigned.

[0099]

[0118] The UUT alignment system 105 aligns the matrix tray 104 based on each eyepiece 106 (e.g., the first through eighth eyepieces 106A-H in FIG. 6A). While FIGS. 6C and 6D show the first eyepiece 106A being inspected by the inspection system 140, the described steps and processes are also applicable to the second through eighth eyepieces 106B-H. The extendable member 681A of the first barrier 680A is extended, and the second barrier 680B is shown with the extendable member 681A retracted. The second barrier 680B may be coupled to the second support rail 222 and will be described with respect to FIG. 6H.

[0100]

[0119] The matrix tray 104 is reoriented as follows: The distance sensor 144 measures distances to at least three points (e.g., a first distance point 682A, a second distance point 682B, and a third distance point 682C) on the first eyepiece 106A to define an x-y plane. The positioning system 101B moves the adjustment system 101A to a position such that the distance sensor 144 is directly above and approximately perpendicular to the matrix tray 104 at the measurement point on the first eyepiece 106A. For example, the distance sensor 144 is shown above the first distance point 682A in FIGS. 6C and 6D . After the distance sensor 144 measures the distance to the first distance point 682A, the positioning system 101B moves the movable plate 119 and the fixed plate 118 using the first and second positioning actuators 114A and 114B, as described in steps 524 and 526 of FIG. 5B and shown in FIGS. 1A and 1B. The positioning system 101B can then move the adjustment system 101A so that the distance sensor 144 is over the second distance point 682B and measure the distance to the second distance point 682B. This process is repeated for the third distance point 682C. In some embodiments, the distance sensor 144 is movable relative to the first eyepiece 106A.

[0101]

[0120] Based on the measured distance, the system controller 199 determines the orientation of the first eyepiece 106A (e.g., the first eyepiece coordinate system xe1, ye1, and ze1 described with respect to FIG. 6A). In steps 528 and 544 shown in FIGS. 5B and 5C, and as shown in FIGS. 6C-6E, the positioning plate 234 is moved using actuators (e.g., first actuator 356A and / or second actuator 356B) to adjust the orientation of the transport medium (e.g., matrix tray 104). The positioning plate 234 can be moved if the orientation of the eyepiece coordinate system is not aligned with the orientation of the reference coordinate system. The UUT alignment system 105 rotates the matrix tray 104 to align the z-axis (e.g., ze1) of the first eyepiece 106A with the z-axis of the reference coordinate system within ±5 degrees, e.g., within ±2 degrees, e.g., within ±1 degree, e.g., within ±0.5 degrees, e.g., within ±0.25 degrees, e.g., within ±0.08333 degrees (5 arc minutes), etc. In some embodiments, the method 540 of FIG. 5C includes rotating the matrix tray 104 about first and second axes, e.g., the x-axis and the y-axis, of the reference coordinate system to align the z-axis of the first eyepiece 106A. The reference coordinate system is stationary (e.g., fixed) relative to the matrix tray 104 and is a movable part of the UUT alignment system 105.

[0102]

[0121] In the illustrated embodiment, the reference coordinate system is the coordinate system (e.g., xb-axis and yb-axis) of the gimbal ball 360. If the distance to any of the three distance points 682A-C is different from the distance to the other distance points 682A-C, the UUT alignment system 105 rotates the matrix tray 104 about the xb-axis and yb-axis of the gimbal ball 360 to align the matrix tray 104 so that a plane formed by at least a portion of the matrix tray 104 (e.g., the first eyepiece 106A) is approximately parallel to a plane formed by the x-axis and y-axis of the reference coordinate system (e.g., the coordinate system of the inspection system 140). In some embodiments, after adjustment (or when the matrix tray 104 does not require adjustment), the distance to each of the three distance points 682A-C may be within 5 arc minutes. In some embodiments, the distance to each of the three distance points 682A-C is compared to the reference distance, and the matrix tray 104 is rotated until each distance is within 5 arc minutes.

[0103]

[0122] The x-axis and y-axis of the coordinate system are aligned as follows: First and second actuators 356A and 356B move first and second shafts 357A and 357B, respectively, as described with respect to Figures 3F-3K. For example, if the distance to first distance point 682A is greater than the distances to second distance point 682B and third distance point 682C, second actuator 356B can extend second shaft 357B or retract first shaft 357A to align first distance point 682A with second distance point 682B and third distance point 682C. When the distance to the second distance point 682B is greater than the distances to the first distance point 682A and the third distance point 682C, and when the distance to the first distance point 682A is less than the distance to the second distance point 682B and greater than the distance to the third distance point 682C, the first and second actuators 356A and 356B can extend the first and second shafts 357A and 357B so that the first shaft 357A is extended more than the second shaft 357B.

[0104]

[0123] Once the x-axis and y-axis are aligned, the orientation of the matrix tray 104 is maintained by the rotation lock 370. For example, the rotation lock actuator 371B engages with the rotation lock shaft 371A to lock or fix the orientation or position of the matrix tray 104. The rotation lock 370 ensures that the matrix tray 104, and in particular the first eyepiece 106A, remains within a plane formed by at least a portion of the matrix tray 104, even if the matrix tray 104 moves or rotates, for example.

[0105]

[0124] The system controller 199 further determines the alignment of the first eyepiece 106A based on the characteristics of the first eyepiece 106A. If the eyepiece coordinate system is not aligned with the reference coordinate system, the UUT alignment system 105 rotates the matrix tray 104 to align the x- and y-axes (e.g., xe1 and ye1) of the first eyepiece 106A with the x- and y-axes (e.g., xb and yb) of the reference coordinate system so that each axis is within ±5 degrees, each axis is within ±2 degrees, each axis is within ±1 degree, each axis is within ±0.5 degrees, each axis is within ±0.25 degrees, for example, within ±0.08333 degrees (5 arc minutes).

[0106]

[0125] In the illustrated embodiment, the x-axis and y-axis of the coordinate system are aligned as follows: The features of the first eyepiece 106A that serve as the basis for alignment are fiducials (e.g., first fiducial 683A and second fiducial 683B) or fiducial markers. The fiducials 683A-683B are reference points used for measurements. The imaging system 146 determines the alignment of the matrix tray 104 based on the fiducials 683A and 683B. For example, the imaging system 146 compares the actual positions of the fiducials 683A-683B with expected positions stored in the memory of the system controller 199 (e.g., memory 850 in FIG. 8). The imaging system 146 determines the “offset” or angle by which the matrix tray 104 must be moved or rotated to align it. The rotational actuator 352C moves the shaft 352D to rotate the mounting plate 232, as described with respect to FIGS. 3D and 3E. The fiducials may be aligned with a positional or vectorial tolerance (e.g., rotational alignment of the vector connecting the fiducials about the z-axis) within ±5 arc minutes. Some embodiments of the method 520 of FIG. 5B include using a rotational actuator 352C to rotate the mounting plate 232 relative to the positioning plate 234. In some embodiments, the system controller 199 determines the alignment of the matrix tray 104 using the imaging system 146 as an input, as described with respect to FIG. 8.

[0107]

[0126] In some embodiments, positioning system 101B moves adjustment system 101A to align fiducials 683A-683B. In some embodiments, imaging system 146 may be a camera or video camera. In some embodiments, imaging system 146 may be a fiducial camera. In some embodiments, imaging system 146 may image the positions of fiducials 683A-683B using either visible light, infrared light, or ultraviolet light.

[0108]

[0127] 6C and 6D, the second fiducial 683B is near, e.g., co-located with, or overlapping with, the second distance point 682B. In some embodiments, the fiducial 683B and the distance point 682B may be spatially separated, e.g., not co-located or overlapping.

[0109]

[0128] In some embodiments, the positioning system 101B moves the adjustment system 101A so that the imaging system 146 is directly above the first eyepiece 106A and approximately perpendicular to the first eyepiece 106A. In some embodiments, the adjustment system 101A remains in a position from the previous step, for example, the position after aligning the z-axis of the first eyepiece 106A with the z-axis of the reference coordinate system. In some embodiments, the imaging system 146 is movable relative to the first eyepiece 106A.

[0110]

[0129] The matrix tray 104 is inspected by the inspection device 142. In the illustrated embodiment, the matrix tray 104 is inspected after being oriented and aligned by the UUT alignment system 105. The inspection device 142 inspects the surface of the first eyepiece 106A, a surface within the field of view of the inspection device 142. Some embodiments of the method 540 of FIG. 5C further include inspecting the surface of the first eyepiece 106A. In some embodiments, the inspection device 142 measures a profile of the surface. In some embodiments, the inspection device 142 measures properties of the surface, measuring transparency or reflectance, analyzing elemental composition (e.g., performing energy dispersive spectroscopy (EDS)), inspecting for cracks, or creating a two-dimensional or three-dimensional map of the surface, to name a few.

[0111]

[0130] In some embodiments, the inspection device 142 may be a metrology system. In some embodiments, the inspection device 142 may be interfaced with a metrology system. In some embodiments, the inspection device 142 may be at least one of a translucency meter, a reflectance meter, a luminance meter, a scanning electron microscope (SEM), a transmission electron microscope (TEM), a two-dimensional or three-dimensional optical profiler, a laser interferometer, or a laser scanner, to name a few.

[0112]

[0131] In some embodiments, the positioning system 101B moves the adjustment system 101A so that the inspection device 142 is directly below the first eyepiece 106A or approximately perpendicular (or orthogonal) to the first eyepiece 106A. In some embodiments, the inspection device 142 is movable relative to the first eyepiece 106A.

[0113]

[0132] In some embodiments, the distance sensor 144 may be a displacement sensor. In some embodiments, the distance sensor 144 may be a non-contact sensor such as an optical displacement sensor, a linear proximity sensor, a laser displacement sensor, or an ultrasonic displacement sensor, to name a few. In some embodiments, the distance sensor 144 may be a confocal sensor.

[0114]

[0133] The inspection apparatus 142 inspects the eyepieces 106 on the matrix tray 104 using a reference coordinate system. In the illustrated embodiment, the reference coordinate system used to orient and align the matrix tray 104 is the coordinate system of the gimbal ball 360. In such an embodiment, the inspection system 140 can convert the coordinate system of the gimbal ball 360 to the coordinate system of the inspection apparatus 142, such as via the system controller 199 ( FIG. 1A ), if the coordinate systems of the gimbal ball 360 and the inspection apparatus 142 are not aligned. In some embodiments, the reference coordinate system may be the coordinate system of the inspection apparatus 142. In such an embodiment, the matrix tray (e.g., the first eyepiece 106A) may be aligned to the coordinate system of the inspection apparatus 142. In some embodiments, the reference coordinate system may be the coordinate system of the distance sensor 144 or the imaging system 146.

[0115]

[0134] In the illustrated embodiment, because the UUT alignment system 105 aligns the matrix tray 104 before testing each eyepiece 106, the matrix tray 104 can advantageously be manufactured to larger dimensional tolerances than current matrix trays. For example, the matrix tray 104 can have a wider flatness or parallelism tolerance than the JEDEC standard. Furthermore, the transport medium transport system 103 can accommodate matrix trays 104 of various sizes.

[0116]

[0135] In some embodiments, the media alignment system 105 does not align the matrix tray 104 before inspecting each eyepiece 106. For example, the dimensional tolerances of the matrix tray 104 may be such that the matrix tray 104 needs to be aligned to one eyepiece 106, every other eyepiece 106, or only a portion of the eyepieces 106. In some embodiments, the distance points 682A-C may be fiducials 683 or fiducial markers.

[0117]

[0136] Figure 6E illustrates a cross-sectional view of Figure 6C, according to some embodiments. In particular, Figure 6E illustrates the positioning of the matrix tray 104 and the first eyepiece 106A while the distance sensor 144 measures the distance to the first eyepiece 106A. Some components of the system 100, such as the UUT alignment system 105, the track 238, and the guide 239, are not shown for ease of illustration.

[0118]

[0137] The matrix tray 104 is shown resting on the conveyor system 227B and contacting the first barrier 680A. The first eyepiece 106A is shown below the distance sensor 144, which is shown measuring a distance (d) to a distance point on the first eyepiece 106A. Some embodiments of the method 520 of FIG. 5B further include using the distance sensor 144 to measure a first distance to the first distance point 682A ( FIG. 6D ) and a second distance to the second distance point 682B ( FIG. 6D ). The actuators 356A and 356B ( FIG. 3A ) can move the positioning plate 234 via the gimbal ball 360 based on the first and second distance measurements.

[0119]

[0138] First eyepiece 106A is shown above inspection device 142. The field of view of inspection device 142 when inspecting first eyepiece 106A is maintained through openings 133A-C and opening 117 (FIG. 1A).

[0120]

[0139] In some embodiments, components of the inspection system 140 (e.g., the inspection device 142, the distance sensor 144, or the imaging system 146) can be moved left and right (as illustrated on the page) relative to the first eyepiece 106A. In some embodiments, components of the inspection system 140 can be moved into and out of the page relative to the first eyepiece 106A. In some embodiments, components of the inspection system 140 can be moved up and down (as illustrated on the page) relative to the first eyepiece 106A. Components of the inspection system 140 can be moved via actuators, such as rotary or linear actuators similar to the actuators described with respect to FIG. 3A.

[0121]

[0140] Figure 6F illustrates the second eyepiece 106B being inspected in the matrix tray 104. In particular, Figure 6F illustrates the process described with respect to Figures 6C-6E being performed on the second eyepiece 106B adjacent to the first eyepiece 106A.

[0122]

[0141] Inspection system 140 and UUT alignment system 105 are used to orient and align matrix tray 104 prior to inspection by inspection device 142. Positioning system 101B positions second eyepiece 106B, which is measured by inspection system 140, for example, by moving adjustment system 101A along the y-axis (FIG. 1A) using second positioning actuator 114B. Second eyepiece 106B is positioned below distance sensor 144, which measures distances to distance points 682D-F on second eyepiece 106B. The measured distances are used to determine the orientation of second eyepiece 106B (e.g., second eyepiece coordinate system xe2, ye2, and ze2 in FIG. 6A). The UUT alignment system 105 can orient the matrix tray 104 based on the measured distance, for example, by aligning the z-axis (e.g., ze2) of the second eyepiece 106B with the z-axis of the reference coordinate system. The UUT alignment system 105 aligns the second eyepiece 106B using the first and second actuators 356A and 356B similar to how it aligns the first eyepiece 106A, as described with respect to Figures 6C and 6D.

[0123]

[0142] The second eyepiece 106B further includes a first fiducial 683C and a second fiducial 683D. The imaging system 146 determines the alignment of the matrix tray 104 based on the fiducials 683C and 683D. The UUT alignment system 105 uses the rotary actuator 352C to align the x- and y-axes of the coordinate system in a manner similar to the manner in which the first eyepiece 106A is aligned, as described with respect to Figures 6C and 6D. Once the second eyepiece 106B is oriented and aligned, the inspection device 142 inspects the surface of the second eyepiece 106B.

[0124]

[0143] Figure 6G shows the fourth eyepiece 106D of the matrix tray 104 being inspected. In particular, Figure 6G shows the process described with respect to Figures 6C-6E being performed on the fourth eyepiece 106D, which is adjacent to the second eyepiece 106B and diagonally opposite the first eyepiece 106A.

[0125]

[0144] In the illustrated embodiment, the fourth eyepiece 106D is inspected after the second eyepiece 104B and before the third eyepiece 106C. The matrix tray 104 is positioned using the second motion system 228, and the fourth eyepiece 106D is inspected. After the second eyepiece 104B is inspected, the extendable member 681A of the first barrier 680A retracts, the support rails 220 and 222 unclasp or release the matrix tray 104, and the second motion system 228 moves the matrix tray 104 to position the fourth eyepiece 104D below the distance sensor 144. For example, the second motion system 228 moves the matrix tray 104 along the x-axis ( FIG. 1A ) and stops when the fourth eyepiece 104D is properly positioned. The second motion system 228 can position the matrix tray 104 without using the positioning system 101B.

[0126]

[0145] The system controller 199 can use open-loop control to move the matrix tray 104. In some embodiments, a belt actuator 246 moves the belt 248 for a predetermined time, thereby moving the matrix tray 104 a predetermined distance. In some embodiments, the belt actuator 246 includes an encoder that is used to determine the position of the matrix tray 104. In some embodiments, a barrier 680 is used to securely position the fourth eyepiece 106D below the distance sensor 144, similar to the first barrier 680A described with respect to FIG. 6A . In some embodiments, a positioning system 101B is used to move the matrix tray 104 and position the fourth eyepiece 106D below the distance sensor 144.

[0127]

[0146] When the fourth eyepiece 106D is near or below the distance sensor 144, the support rails 220 and 222 grip the matrix tray 104 and secure it to the adjustment system 101A. The distance sensor 144 measures the distance to distance points 682J-L (distance points 682G-I are associated with the third eyepiece 106C, which may be inspected after the fourth eyepiece 106D), and the UUT alignment system 105 can orient the matrix tray 104 based on the measured distance, for example, by aligning the z-axis of the fourth eyepiece 106D with the z-axis of the reference coordinate system. The imaging system 146 determines the alignment of the matrix tray 104 based on the first fiducial 683G and second fiducial 683H of the fourth eyepiece 106D (fiducials 683E and 683F are associated with the third eyepiece 106C), the UUT alignment system 105 aligns the matrix tray 104, and the inspection device 142 inspects the surface of the fourth eyepiece 106D.

[0128]

[0147] The third eyepiece 106C can be inspected before the fifth eyepiece 106E using the process described with respect to Figures 6C-6E. Positioning system 101B positions the second eyepiece 106B, UUT alignment system 105 uses distance points 682G-I to orient the matrix tray 104, and UUT alignment system 105 uses fiducials 683E and 683F to align the matrix tray 104. Inspection device 142 inspects the surface of the fourth eyepiece 106D.

[0129]

[0148] Figure 6H shows the fifth eyepiece 106E of the matrix tray 104 being inspected. In particular, Figure 6H shows the process described with respect to Figures 6C-6E being performed on the fifth eyepiece 106E.

[0130]

[0149] The extendable member 681A of the second barrier 680B is extended to provide a stop for the matrix tray 104. The second motion system 228 moves the matrix tray 104 after the third eyepiece 106C is inspected and the fifth eyepiece 106E is positioned below the distance sensor 144. The second motion system 228 stops the movement of the matrix tray 104 after the matrix tray contacts the second barrier 680B. The second barrier 680B is positioned on the second support rail 222 such that the fifth eyepiece 106E (or in some embodiments, the sixth eyepiece 106F) is positioned below the distance sensor 144 when the matrix tray 104 contacts the second barrier 680B. The first motion system 226 grips the matrix tray 104 between the support rails 220 and 222.

[0131]

[0150] Prior to inspection by the inspection device 142, the adjustment system 101A orients and aligns the matrix tray 104. The distance sensor 144 measures the distance to the distance points 682M-O, and the UUT alignment system 105 orients the matrix tray 104 as needed. The imaging system 146 determines the alignment of the matrix tray 104 using the first and second fiducials 683I and 683K, and the UUT alignment system 105 aligns the matrix tray 104 as needed. The inspection device 142 inspects the surface of the fifth eyepiece 106E.

[0132]

[0151] After the fifth eyepiece 106E, the sixth, seventh, and eighth eyepieces 106F-H may be inspected. Positioning system 101B, second motion system 228, and adjustment system 101A may be used to move, position, orient, and align matrix tray 104 relative to each eyepiece 106F-H, as described with respect to FIGS. 6A-6H. Inspection device 142 inspects the surface of each eyepiece 106F-H. Matrix tray 104 may be returned to matrix tray dispenser 102 after inspection is complete, for example, after each eyepiece 106A-H has been inspected.

[0133]

[0152] 5-6H, a matrix tray 104 is described as the transport medium, but other types of transport mediums may be used in place of the matrix tray 104. In some embodiments, the system 100 may be used to align and inspect substrates 112 in the substrate tray 110 described with respect to FIGS. 1A and 2D.

[0134] Example of a solid particle removal system

[0153] 7A is a three-view diagram illustrating a solid particle removal system 786 for system 100 (FIG. 1A). In particular, FIG. 7A illustrates multiple vacuum housings 788 (e.g., angled vacuum housing 788A and straight vacuum housing 788B) on conditioning system 101A, according to some embodiments.

[0135]

[0154] Solid particle removal system 786 includes a first support rail 720, a second support rail 722, an angled vacuum housing 788A, and a straight vacuum housing 788B. Angled vacuum housing 788A is coupled to first support rail 720, and straight vacuum housing 788B is coupled to second support rail 722.

[0136]

[0155] Support rails 720 and 722 are similar to support rails 220 and 222 described with respect to FIG. 2A , except that support rails 720 and 722 each define a plurality of through-holes, such as vacuum channels 789. Vacuum channels 789 are positioned above and below belt guard 219 (e.g., belt guards 219A-C, 219C are not visible) and provide fluid passage to interior regions of vacuum housings 788A and 788B (e.g., interior regions 791A and 791B in FIGS. 7B and 7C ). Each vacuum channel 789 has a length and a cross-sectional diameter. The length of vacuum channel 789 is desirably significantly greater than the cross-sectional diameter of vacuum channel 789, e.g., by at least five times, at least ten times, or even more. This configuration of vacuum channels 789 restricts the flow of fluid (e.g., air) and provides the primary resistance to flow into the plenum feeding vacuum channel 789. This equalizes flow resistance between the vacuum channels, resulting in laminar flow between the channels and a laminar flow field across the belt. The angled vacuum housing 788A includes a vacuum outlet 790A positioned at the top of the vacuum housing 788A. The straight vacuum housing 788B includes a vacuum outlet 790B located on a side of the vacuum housing 788B (e.g., the side opposite the side coupled to the second support rail 722). This location of the vacuum outlet 790A allows the first motion system 226 to move the first support rail 720 closer to the mounting rail 230 than if the vacuum outlet 790A were positioned on a side of the vacuum housing 788A (e.g., the same side as the vacuum outlet 790B). The interior regions 791A and 791B of the vacuum housings 788A and 788B are fluidly coupled to a vacuum source 792, such as a vacuum pump, through the vacuum outlets 790A and 790B, respectively. The vacuum source 792 can generate a low pressure to draw air through the vacuum channel 789 and the vacuum housings 788A and 788B.

[0137]

[0156] In an embodiment, belt 248 of conveyor system 227 is tensioned between pulleys 247, resulting in a "straight beltline." A straight beltline can be used with a flat belt (e.g., 248A) and a crowned pulley (e.g., pulley 247B). In such a configuration, crowned pulley 247B pulls belt 248A to the top of the crown of crowned pulley 247B, thereby controlling the belt position along the pulley axis. This prevents the belt edge from contacting any adjacent components, resulting in little debris or particle generation and reducing or eliminating the need for belt guards (e.g., belt guard 219).

[0138]

[0157] In other embodiments where the beltline has a pulley engaging the backside of the beltline along the slack side, the "inverted beltline" can generate solid particulate matter. For example, conveyor system 227 can generate solid particulate matter during use. The solid particulate matter can be debris, dust, or shavings from belt 248, support rails 720 and 722, or matrix tray 104, etc. In the illustrated embodiment, belt 248 contacts support rails 720 and 722 (e.g., belt guard 219), and solid particulate matter can be generated from wear on the belt and / or support rails 720 and 722. If not removed, solid particulate matter can adversely affect the performance of measurement systems 144 and 146 or inspection device 142. Vacuum source 792 can be used to generate a negative pressure that draws solid particulate matter through vacuum channel 789 and vacuum housings 788A and 788B. As such, vacuum channels 789 are sized to allow the passage of solid particulate matter, and vacuum housings 788A and 788B evacuate the solid particulate matter from the inside of first support rail 720 or second support rail 722 through the plurality of vacuum channels 789. Some embodiments of method 520 of Figure 5B include using vacuum housings 788A and 788B to remove solid particulate matter from system 100.

[0139]

[0158] In the illustrated embodiment, vacuum channels 789 positioned above belt guard 219 are at the same level as belt 248. For example, vacuum channels 789 are positioned between belts 248A and 248B and second support rail 722. Vacuum channels 789 are also positioned between belt 248C, which is not visible in the figure, and first support rail 720. Vacuum channels 789 positioned below belt guard 219B are above belt 248 (e.g., between belts 248A-C and belt guards 219A-C).

[0140]

[0159] In some embodiments, vacuum channels 789 may be formed only above or only below belt guard 219. In some embodiments, only one of support rails 720 and 722 may form vacuum channels 789. In some embodiments, more or fewer vacuum channels 789 may be used. In some embodiments, a single vacuum housing 788A may be used that spans the length of the first support rail 720.

[0141]

[0160] 7B is a cross-sectional top view illustrating an angled vacuum housing 788A of the adjustment system of FIG. 7A, according to some embodiments. In particular, FIG. 7B shows the angled vacuum housing 788A fluidly coupled to the first support rail 720 through vacuum channels 789 (one of which is labeled with a reference number) positioned above the belt guard 219C. The angled vacuum housing 788A forms an interior region 791A that fluidly couples the vacuum channels 789 to a vacuum outlet 790A. The vacuum outlet 790A is positioned at the top of the vacuum housing 788A and is fluidly coupled to a vacuum source 792.

[0142]

[0161] In the illustrated embodiment, the angled vacuum housing 788A is coupled to the first support rail 720 using screws 791. In some embodiments, the angled vacuum housing 788A may be coupled to the first support rail 720 using other fasteners such as bolts and nuts, anchors, rivets, or via welding or adhesive. In some embodiments, a seal or gasket may be disposed between the vacuum housing 788A and the first support rail 720.

[0143]

[0162] 7C is a cross-sectional top view illustrating a linear vacuum housing 788B of the adjustment system of FIG. 7A, according to some embodiments. In particular, FIG. 7C illustrates the linear vacuum housing 788B fluidly coupled to the second support rail 722 via a vacuum channel 789 positioned above the belt guard 219B.

[0144]

[0163] The straight vacuum housing 788B forms an interior region 791B that fluidly connects the vacuum channel 789 to a vacuum outlet 790B. The vacuum outlet 790B is positioned on a side of the vacuum housing 788B and is fluidly connected to a vacuum source 792. The straight vacuum housing 788B may be connected to the second support rail 722 in a manner similar to the angled vacuum housing 788A and second support rail 722 described with respect to FIG.

[0145] System Controller Example

[0164] FIG. 8 is a schematic diagram illustrating a system controller 199 (also referred to as controller 199) that can be used in accordance with the systems and methods described herein.

[0146]

[0165] System controller 199 includes a processor 860 (e.g., a central processing unit (CPU)) in data communication with memory 850, input devices 870, and output devices 880. Although described separately, it should be understood that the functional blocks described with respect to system controller 199 need not be separate structural elements. For example, processor 860 and memory 850 may be embodied on a single chip. Processor 860 may be a general-purpose processor, a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, or any suitable combination thereof designed to perform the functions described herein. A processor may also be implemented as a combination of computing devices, such as a combination of a DSP and a microprocessor, multiple microprocessors, one or more microprocessors in combination with a DSP core, or any other such configuration.

[0147]

[0166] The processor 860 is coupled to the memory 850 via one or more buses and can read information from or write information to the memory 850. The processor 860 may additionally or alternatively include memory such as processor registers. The memory 850 may include a processor cache, including a multi-level hierarchical cache where different levels have different capacities and access speeds. The memory 850 may also include random access memory (RAM), other volatile storage, or non-volatile storage. The storage may include a hard drive, flash memory, or the like. The memory 850 may also include a computer program product embodied on the memory 850, including code such as a motion control application 852 used to control different motion systems of the system for inspecting the media 100 described with reference to FIG. 1A. The motion control application 852 controls the first motion system 226, such as the rail actuator 240, to accept and grip the media, as described with reference to FIGS. 2A, 4, and 6A-6B. The motion control application 852 can control the second motion system 228, such as the belt actuator 246, to move the media, as described with respect to Figures 2A-2D and 6G. The motion control application 852 can control the first rotational system 350, such as the rotational actuator 352C, to align the media, as described with respect to Figures 3A, 3D-3E, and 5-6H. The motion control application 852 can control the second rotational system 354, such as the first and second actuators 356A and 356B, to orient the media, as described with respect to Figures 3A, 3F-3G, and 5-6H. The motion control application 852 can control the positioning system 101B, such as the positioning actuators 114A and 114B, to position the adjustment system 101A, as described with respect to Figures 1A and 1B.The motion control application 852 can control the rotation lock 370, such as the rotation lock actuator 371B, as described with respect to Figures 3A and 6C-6D.

[0148]

[0167] The code may also include a vacuum system control application 854 used to control a solid particle removal system 786, such as a vacuum source 792, to remove solid particles from the system 100, as described with respect to FIGS. 7A-7C. The control applications 852 and 854 may be code that may be executed by the processor 860. In various cases, memory is referred to as a computer-readable storage medium or a non-transitory computer-readable medium. A computer-readable storage medium is a non-transitory device that may store information and is distinguished from a computer-readable transmission medium, such as an electronic, transient signal, that may convey information from one location to another. The non-transitory computer-readable medium includes computer-executable instructions that, when executed by the processing system, cause the processing system to perform a method that includes grasping an object using an EFEM, as described with respect to FIG. 6. In some embodiments, the method performed by the processing system includes positioning an end effector of the EFEM adjacent to the object via an actuation system. In some embodiments, the method performed by the processing system includes positioning the end effector based on measurements or readings from an input device 870. Computer-readable media as described herein may generally refer to computer-readable storage media or computer-readable transmission media.

[0149]

[0168] The processor 860 may also be coupled to an input device 870 and an output device 880 for receiving inputs from and providing outputs to the system controller 199, respectively. The input device 870 may include, but is not limited to, the inspection device 142, the distance sensor 144, and the imaging system 146, as described with respect to FIGS. 1A-1B and 5-6H. The input device may also include a position sensor, such as a radial or circumferential position sensor, or a rotary or linear encoder, to detect the position of the media relative to the inspection system 140 (e.g., the inspection device 142, the distance sensor 144, or the imaging system 146), as described with respect to FIGS. 1A-6H. The position sensor may be a rotary encoder used to detect the position of the media within the adjustment system 101A, for example, along the first support rail 220 and the second support rail 222. The position sensor is used to detect the position of the adjustment system 101A along the guide tracks (e.g., the positioning tracks 115A and 115B), as described with respect to FIGS. 1A and 1B. 2A-2D, the position sensor can be used to detect the position of the first motion system 226 (e.g., the position of the first support rail 220 relative to the mounting rail 230). The position sensor can be an encoder (e.g., optical or magnetic, capacitive, or inductive encoder), resolver, potentiometer, angle sensor, accelerometer, gyroscope, inertial measurement unit, global positioning system, or motion detector, to name a few, for determining the position of a component or medium of the system 100. The input device can also include various inputs for determining whether the matrix tray 104 is in contact with the first barrier 680A, as described with respect to FIG. 6A.

[0150]

[0169] 7A-7C and solid particle removal system 786. Motion system 882 can include components of first motion system 226 (e.g., rail actuator 240), second motion system 228 (e.g., belt actuator 246), first rotational system 350 (e.g., rotational actuator 352C), second rotational system 354 (e.g., first and second actuators 356A and 356B), positioning system 101B (e.g., positioning actuators 114A and 114B), and rotation lock 370 (e.g., rotation lock actuator 371B), as described with respect to FIGS.

[0151]

[0170] The embodiments of the present disclosure further relate to one or more of the following embodiments 1 to 40.

[0152]

[0171] 1. A transport medium alignment system configured to position a medium, comprising: a base plate; a positioning plate connected to the base plate via a pivot joint, the positioning plate configured to removably connect to the transport medium and rotate relative to the base plate via the pivot joint; and a first actuator connected to the base plate or the positioning plate, the first actuator configured to rotate the positioning plate via the pivot joint.

[0153]

[0172] 2. A transport medium alignment system as described in embodiment 1, wherein a first actuator is coupled to the positioning plate, and the first actuator is configured to contact the base plate and rotate the positioning plate via a pivot joint.

[0154]

[0173] 3. A transport medium alignment system as described in embodiment 1, wherein the first actuator is configured to move the shaft into contact with the base plate and rotate the positioning plate via the pivot joint.

[0155]

[0174] 4. A transport medium alignment system as described in embodiment 1, further comprising a compliant mechanism coupled to the base plate and the positioning plate, the compliant mechanism configured to bias the positioning plate in a direction toward the base plate via a pivot joint, and the first actuator configured to move the positioning plate in a direction opposite to the bias direction of the compliant mechanism.

[0156]

[0175] 5. A transport medium alignment system as described in embodiment 1, further comprising a standoff coupled to the positioning plate, wherein the compliant mechanism is coupled to the positioning plate via the standoff, the positioning plate including a first side and a second side opposite the first side, the base plate being positioned on the first side of the positioning plate, and the standoff being configured to position the first end of the compliant mechanism at a distance from the second side of the positioning plate.

[0157]

[0176] 6. A transport medium alignment system as described in embodiment 1, further comprising a mounting plate coupled to the positioning plate, the positioning plate being coupled to the medium via the mounting plate.

[0158]

[0177] 7. A transport medium alignment system as described in embodiment 1, wherein the pivot joint includes a gimbal ball contacting the positioning plate such that the positioning plate is configured to move around a surface of the gimbal ball and rotate via the pivot joint, and the base plate forms a recess configured to receive the gimbal ball.

[0159]

[0178] 8. A transport medium alignment system as described in embodiment 2, further comprising a second actuator coupled to the positioning plate, the second actuator configured to rotate the positioning plate via the pivot joint.

[0160]

[0179] 9. A transport medium alignment system as described in embodiment 8, wherein the first actuator is positioned at a first corner of the positioning plate and the second actuator is positioned at a second corner of the positioning plate, the first corner and the second corner being on a side of the positioning plate opposite the pivot joint.

[0161]

[0180] 10. A transport medium alignment system as described in embodiment 9, further comprising a first compliant mechanism and a second compliant mechanism coupled to the base plate and the positioning plate, the first compliant mechanism and the second compliant mechanism configured to bias the positioning plate in a direction toward the base plate via a pivot joint, and the first actuator and the second actuator configured to move the positioning plate in a direction opposite to the direction of the first compliant mechanism and the second compliant mechanism.

[0162]

[0181] 11. A transport medium alignment system as described in embodiment 1, further comprising a rotation lock configured to fix an orientation of the positioning plate relative to the base plate.

[0163]

[0182] 12. A transport medium alignment system as described in embodiment 11, wherein the rotation lock includes a rotation lock shaft coupled to the base plate and a rotation lock actuator coupled to the positioning plate configured to engage with the rotation lock shaft to fix the orientation of the positioning plate relative to the base plate.

[0164]

[0183] 13. A transport medium alignment system configured to position a transport medium, the transport medium alignment system comprising: a positioning plate disposed on a central axis; a mounting plate coupled to the positioning plate, the mounting plate configured to removably couple to the transport medium and rotate about the central axis; and a motion system configured to rotate the mounting plate relative to the positioning plate.

[0165]

[0184] 14. The transport medium alignment system of embodiment 13, further comprising a rotation guide disposed between the mounting plate and the positioning plate.

[0166]

[0185] 15. A transport medium alignment system as described in embodiment 13, wherein the motion system includes a rotary actuator configured to rotate the mounting plate.

[0167]

[0186] 16. A transport medium alignment system as described in embodiment 15, wherein the rotational actuator is coupled to the positioning plate, the motion system further includes a first bracket coupled to the mounting plate, and the rotational actuator is configured to rotate the mounting plate via the first bracket.

[0168]

[0187] 17. The transport medium alignment system of embodiment 16, wherein the motion system further includes a second bracket coupled to the positioning plate and further coupled to the first bracket, the compliant mechanism being disposed between the first bracket and the second bracket, the compliant mechanism being configured to bias the mounting plate in a bias direction, and the rotational actuator being configured to rotate the mounting plate in a direction opposite to the bias direction of the compliant mechanism.

[0169]

[0188] 18. A method for positioning a transport medium, the method including: positioning the transport medium on a transport medium alignment system, the transport medium alignment system including a base plate; a positioning plate coupled to the base plate via a pivot joint, the positioning plate configured to removably couple to the transport medium and rotate relative to the base plate via the pivot joint; and a first actuator coupled to the base plate and the positioning plate, the first actuator configured to rotate the positioning plate via the pivot joint; positioning the transport medium on the transport medium alignment system; and moving the positioning plate using the first actuator to adjust an orientation of the transport medium.

[0170]

[0189] 19. The method of embodiment 18, wherein the transport medium alignment system further comprises a second actuator coupled to the base plate and the positioning plate, and wherein moving the positioning plate using the first actuator to adjust the orientation of the transport medium includes rotating the medium around a first axis of the pivot joint using the first actuator, and rotating the transport medium around a second axis of the pivot joint using the first actuator and the second actuator.

[0171]

[0190] 20. The method of embodiment 18, wherein the transport medium alignment system further comprises a mounting plate coupled to the positioning plate and a rotational actuator configured to rotate the mounting plate relative to the positioning plate, and positioning the transport medium on the system for inspection of the medium includes rotating the mounting plate relative to the positioning plate using the rotational actuator.

[0172]

[0191] 21. An inspection system comprising: a fixed plate; a movable plate movably coupled to the fixed plate; an adjustment system movably coupled to the movable plate, the adjustment plate coupled to the movable plate, the adjustment plate detachably coupled to a transport medium holding one or more units under test (UUTs) and rotating via a pivot joint; an adjustment actuator coupled to the adjustment plate, the adjustment actuator configured to rotate the adjustment plate via the pivot joint; a first positioning actuator configured to rotate the movable plate relative to the fixed plate; and a second positioning actuator configured to rotate the adjustment plate relative to the movable plate; and an inspection system configured to inspect a surface of one or more UUTs.

[0173]

[0192] 22. An inspection system as described in embodiment 21, wherein the first positioning actuator and the second positioning actuator are each configured to move the transport medium to and from the inspection system.

[0174]

[0193] 23. The inspection system of embodiment 21, wherein the inspection system includes a metrology system.

[0175]

[0194] 24. An inspection system as described in embodiment 21, wherein the inspection system includes a distance sensor configured to measure a distance to the transport medium, and the adjustment actuator is configured to move the adjustment plate based on the distance measured by the distance sensor.

[0176]

[0195] 25. The inspection system of embodiment 24, wherein the distance sensor includes a confocal sensor.

[0177]

[0196] 26. An inspection system as described in embodiment 21, wherein the inspection system includes an imaging system configured to determine the alignment of the transport medium, and the adjustment actuator is configured to move the adjustment plate based on the alignment determined by the imaging system.

[0178]

[0197] 27. An inspection system as described in embodiment 26, wherein the imaging system is configured to determine alignment of the transport medium based on at least one fiducial of one or more UUTs.

[0179]

[0198] 28. The inspection system of embodiment 26, wherein the imaging system includes a fiducial camera.

[0180]

[0199] 29. An inspection system as described in embodiment 21, wherein the fixed plate includes a first positioning track, the movable plate includes a second positioning track, the first positioning actuator is configured to move the movable plate along the first positioning track, and the second positioning actuator is configured to move the adjustment plate along the second positioning track.

[0181]

[0200] 30. An inspection system comprising: an inspection system configured to inspect a surface of one or more units under test (UUTs) carried by a transport medium; an adjustment system configured to rotate the transport medium about a first x-axis, y-axis, and z-axis for inspection by the inspection system; and a positioning system configured to move the adjustment system about a plane formed by a second x-axis and y-axis.

[0182]

[0201] 31. An inspection system as described in embodiment 30, wherein the adjustment system includes a first plate and a second plate connected through a pivot joint, and an adjustment actuator configured to rotate the first plate via the pivot joint, and the pivot joint is configured to rotate the transport medium about a first x-axis, a y-axis, and a z-axis.

[0183]

[0202] 32. An inspection system as described in embodiment 30, wherein the adjustment system includes a first plate and a second plate connected through a rotating channel, and a rotary actuator configured to rotate the first plate via the rotating channel, and the rotating channel is configured to align the transport medium around the x-axis and y-axis of the third x-axis, y-axis, and z-axis.

[0184]

[0203] 33. An inspection system as described in embodiment 30, wherein the adjustment system includes a first plate configured to fix the transport medium, the positioning system includes a second plate and a positioning actuator configured to move the first plate relative to the second plate, and the positioning actuator is configured to move the first plate around a plane formed by a second x-axis and y-axis.

[0185]

[0204] 34. An inspection system as described in embodiment 30, wherein the inspection system includes a distance sensor configured to measure a distance to the transport medium, and the adjustment system is configured to move the transport medium based on the distance measured by the distance sensor.

[0186]

[0205] 35. An inspection system as described in embodiment 30, wherein the inspection system includes an imaging system configured to determine the alignment of the transport medium, and the adjustment system is configured to move the transport medium based on the alignment determined by the imaging system.

[0187]

[0206] 36. A testing method, comprising: positioning a transport medium on a testing system of one or more units under test (UUTs) carried by the transport medium, the testing system comprising: a fixed plate; a movable plate movably coupled to the fixed plate; and an adjustment system movably coupled to the movable plate, the adjustment system including: a first plate coupled to the movable plate, the first plate configured to fix the transport medium and rotate via a pivot joint; an adjustment actuator coupled to the first plate; and a first positioning actuator and a second positioning actuator. The method includes: positioning a transport medium on a testing system of one or more units under test (UUTs) carried by the transport medium; moving the movable plate relative to the fixed plate using the first positioning actuator; moving the first plate relative to the movable plate using the second positioning actuator; and moving the first plate via the pivot joint using the adjustment actuator.

[0188]

[0207] 37. The method of embodiment 36, wherein the inspection system further comprises an inspection system, and the method further includes inspecting the surface of the one or more UUTs using the inspection system.

[0189]

[0208] 38. The method of embodiment 37, further comprising measuring a first distance to a first distance point and a second distance to a second distance point using an inspection system, and moving the first plate via the pivot joint based on the first distance measurement and the second distance measurement using an adjustment actuator.

[0190]

[0209] 39. The method of embodiment 37, wherein the adjustment system further includes a second plate movably coupled to the first plate and a rotary actuator, the first plate being configured to fix the medium via the second plate, and the method further includes determining alignment of the transport medium using the inspection system and rotating the second plate relative to the first plate using the rotary actuator.

[0191]

[0210] 40. The method of embodiment 36, wherein the inspection system further comprises a vacuum housing connected to a vacuum source, and the method further comprises removing solid particulate matter from the inspection system using the vacuum housing.

[0192]

[0211]

[0013] Embodiments of the present disclosure have been described above with reference to specific embodiments. However, those skilled in the art will understand that various modifications and changes may be made thereto without departing from the broader spirit and scope of the present invention as set forth in the appended claims. Accordingly, the foregoing description and drawings should be interpreted in an illustrative rather than a restrictive sense.

Claims

1. 1. A transport medium transportation system configured to move a transport medium, comprising: A mounting plate; a first support rail and a second support rail each coupled to the mounting plate, the first support rail and the second support rail each have an inner side and an outer side; The inner side of the first support rail faces the inner side of the second support rail. a first support rail and a second support rail; a first conveyor system coupled to the first support rail or the second support rail, the first conveyor system is configured to support the transport medium between an inner side of the first support rail and an inner side of the second support rail; the first conveyor system is configured to move the transport medium along a portion of the length of the first support rail or the second support rail. a first conveyor system; a rail actuator configured to move the first support rail; A transport medium transportation system comprising:

2. 10. The transport medium transport system of claim 1, further comprising a first barrier coupled to the first support rail or the second support rail, the first barrier configured to extend to prevent the first conveyor system from moving the transport medium beyond the first barrier.

3. 3. The transport medium transport system of claim 2, further comprising a second barrier coupled to the first support rail or the second support rail, the second barrier configured to extend at a different location than the first barrier so as to prevent the first conveyor system from moving the transport medium beyond the second barrier.

4. a vacuum housing coupled to the first support rail or the second support rail, Connect to a vacuum source removing solid particulate matter generated by the transport medium transportation system; Vacuum housing configured as follows: The transport medium transportation system of claim 1 further comprising:

5. the vacuum housing is coupled to an exterior of the first support rail or the second support rail; the first support rail or the second support rail defines a plurality of vacuum channels; the vacuum housing is configured to evacuate solid particulate matter from an interior of the first support rail or an interior of the second support rail through the plurality of vacuum channels using the vacuum source. The transport medium transportation system of claim 4 .

6. the rail actuator is configured to move the first support rail in a first direction; the first conveyor system is configured to move the transport medium in a second direction; the first direction is substantially perpendicular to the second direction; The transport medium transportation system of claim 1 .

7. the first conveyor system is coupled to the first support rail; the first conveyor system including a belt, a motorized pulley configured to move the belt, and an idler pulley configured to tension the belt; The transport medium transportation system of claim 1 .

8. the belt is a flat belt, the motorized pulley is a crowned pulley, the idler pulley is a crowned pulley, and the belt is tensioned around the motorized pulley and the idler pulley so as to move only in a linear direction across the motorized pulley and the idler pulley; The transport medium transportation system of claim 7 .

9. the first conveyor system is coupled to the first support rail, the first conveyor system configured to move the transport media along a portion of the length of the first support rail; the transport medium transport system further comprising a second conveyor system coupled to the second support rail, the second conveyor system configured to move the transport medium along a portion of the length of the second support rail. The transport medium transportation system of claim 1 .

10. 1. A transport medium transportation system configured to move a transport medium, comprising: A mounting plate; a first motion system coupled to the mounting plate configured to receive different types of media from a dispenser and grip the transport media for inspection; a second motion system coupled to the first motion system configured to position the transport medium for inspection by an inspection system; and A transport medium transportation system comprising:

11. the first motion system includes a first support rail, a second support rail, and a rail actuator coupled to a shaft; the first support rail is substantially parallel to the second support rail, and an inner surface of the first support rail faces an inner surface of the second support rail; the shaft is substantially perpendicular to the first support rail; the rail actuator is configured to move the shaft such that the shaft moves the first support rail toward or away from the second support rail. The transport medium transportation system of claim 10.

12. The second motion system includes a conveyor system further including a plurality of sub-conveyor systems, at least one of the plurality of sub-conveyor systems coupled to each of the first support rail and the second support rail, each of the plurality of sub-conveyor systems comprising: a belt movably connected to a belt actuator, the belt actuator is coupled to the respective first support rail or second support rail and configured to move the belt; the belt is configured to support the transport medium; The belt is configured to move the transport medium. The transport medium transportation system of claim 11 comprising a belt.

13. 13. The transport medium transportation system of claim 12, wherein the belt is a flat belt, the belt actuator includes a crowned pulley, and the belt is movably coupled to a second crowned pulley.

14. 12. The transport medium transportation system of claim 11, wherein the first motion system further includes a track coupled to the mounting plate, the track being substantially perpendicular to the first support rail, and the first support rail being configured to move along the track.

15. 12. The transport medium transportation system of claim 11, wherein the first motion system is configured to move each of the first support rail and the second support rail toward or away from each other.

16. The transport medium transportation system of claim 11 , wherein the second support rail is fixed to the mounting plate and the first support rail moves relative to the second support rail.

17. 1. A method of moving a transport medium, comprising: positioning the transport medium on a transport medium transportation system, the transport medium transportation system comprising: A mounting plate; a first support rail and a second support rail each coupled to the mounting plate, the first support rail and the second support rail each have an inner side and an outer side; The inner side of the first support rail faces the inner side of the second support rail. a first support rail and a second support rail; a conveyor system coupled to the first support rail or the second support rail, the transport medium being positioned on the conveyor system between an inner side of the first support rail and an inner side of the second support rail; a rail actuator configured to move at least one of the first support rail or the second support rail; positioning the transport medium on a transport medium transportation system; using the conveyor system to move the transport medium along a portion of the length of the first support rail or the second support rail to a first location; A method comprising:

18. 18. The method of claim 17, wherein positioning the transport medium on the transport medium transportation system includes adjusting a distance between the first support rail and the second support rail using the rail actuator, the distance being adjusted to accept the transport medium onto the conveyor system.

19. 18. The method of claim 17, further comprising: using the rail actuator to reduce the distance between the first support rail and the second support rail, thereby gripping the transport medium between an inner side of the first support rail and an inner side of the second support rail at the first position.

20. the transport medium transportation system further comprises a retractable barrier coupled to the first support rail or the second support rail; The method further includes extending a portion of the retractable barrier such that the portion of the retractable barrier contacts the transport media to prevent the conveyor system from moving the transport media over the barrier.

18. The method of claim 17.

Images