Automatic emitter tip cleaning machine equipped with a detection surface cleaning unit.

Abstract

An exemplary automatic emitter tip cleaning system comprises: an emitter tip configured to generate at least one of cations or anions within or near an ionization transport path; an emitter frame configured to hold the emitter tip within or near an ionization transport path; a brush; a motor coupled to the brush and operating to move the brush over the emitter tip; a detection surface coupled to the brush; a sensor configured to detect when the brush is in a predetermined position relative to a reference position by detecting the detection surface; and a detection surface cleaning unit configured to clean the detection surface while the brush moves relative to the emitter frame.

Description

Technical Field

[0001] [Related Applications] This application claims the benefit of U.S. Provisional Patent Application No. 63 / 489,831, filed on March 13, 2023, entitled "Automatic Emitter Point Cleaners with a Detection Surface Cleaner". The entire disclosure of U.S. Provisional Patent Application No. 63 / 489,831 is hereby incorporated by reference in its entirety and made a part of this application (this specification).

[0002] The present disclosure relates generally to ionizers, and more specifically to automatic emitter point cleaners having a detection surface cleaner.

Background Art

[0003] Ionization devices that function as electrostatic removal or neutralization devices can generate ions of both polarities that bind to and neutralize surfaces charged with the opposite polarity. Such devices generally help maintain an electrostatically neutral state associated with the manufacture of electronic devices, particularly semiconductors. Since these ionizers use discharge electrodes to generate an electric field, they tend to accumulate foreign particles at their emitter tips or edges. This particle accumulation can cause an excessive release of ions of one polarity or the other, i.e., an ion imbalance. As a result, the locations where ions of both polarities concentrate tend to be charged rather than electrostatically neutral.

Summary of the Invention

[0004] An automatic emitter point cleaner having a detection surface cleaner is disclosed, which is substantially shown by at least one of the drawings, described in relation to at least one of these drawings, and more fully set forth in the claims.

Brief Description of the Drawings

[0005] [Figure 1]This is a diagram illustrating an example of a DC colon ionizer relating to an aspect of this disclosure.

[0006] [Figure 2] Figure 1 shows an internal diagram of the DC corona ionizer used as an example.

[0007] [Figure 3] This is a diagram illustrating an example fan of a DC corona ionizer attached to an automatic emitter tip cleaning machine according to an aspect of the present disclosure.

[0008] [Figure 4] Another diagram of the fan and automatic emitter tip cleaning machine illustrated in Figure 3.

[0009] [Figure 5] Another diagram of the fan and automatic emitter tip cleaning machine illustrated in Figure 3.

[0010] [Figure 6] Figures 3 to 5 illustrate illustrative embodiments of an automatic emitter tip cleaning machine.

[0011] [Figure 7] Figures 3 to 5 show a perspective view of an example brush and detection surface that can be used to implement the automatic emitter tip cleaning machine.

[0012] [Figure 8] This is a schematic diagram of another exemplary ionizer attached to an automatic emitter tip cleaning machine according to an aspect of the present disclosure, the emitter tip being oriented in the direction of ionization. [Modes for carrying out the invention]

[0013] Drawings are not necessarily to a constant scale. Where appropriate, similar or identical reference numerals are used to refer to similar or identical components.

[0014] Conventional emitter tip cleaning devices for ionizing blowers are connected to the fan's rotating shaft, and the fan speed must be reduced from its operating speed to allow emitter cleaning. As a result, conventional emitter tip cleaning devices require a reduction in the performance of the ionizing blower, or even a complete shutdown, to perform emitter tip cleaning. This reduction in performance or shutdown of the ionizing blower may create an opportunity where charge buildup is more likely to damage precision devices.

[0015] The disclosed exemplary system enables emitter tip cleaning for an ionizing device so that the ionizing device can continue to function (e.g., cleaning air, neutralizing charge, etc.) while being cleaned. The disclosed exemplary system comprises a brush, a first ring coupled to the brush, a second ring engaged with the first ring, and a motor that acts the second ring so that the second ring acts the first ring.

[0016] In some cases, the operation and function of the emitter tip cleaner are controlled, at least partially, by a position sensor that identifies the emitter tip cleaner's location. For example, the emitter tip cleaner can be assigned a predetermined reference position (or home position), and detection of the emitter tip cleaner (or a sensing surface coupled to the emitter tip cleaner) at the reference position signifies that the cleaning procedure is complete. In some cases, the sensing surface used to detect the position of the emitter tip cleaner may become contaminated, dirty, or otherwise make detection using the position sensor more difficult. Failure to detect the sensing surface may result in over-cleaning cycles and / or excessive wear on the emitter tip and / or the emitter tip cleaner.

[0017] An illustrated automated emitter tip cleaning system disclosed comprises: an emitter tip configured to generate at least one of cations or anions within or near an ionization transport path; an emitter frame configured to hold the emitter tip within or near an ionization transport path; a brush; a motor coupled to the brush and operating to move the brush over the emitter tip; a sensing surface coupled to the brush; a sensor configured to detect when the brush is in a predetermined position relative to a reference position by sensing the sensing surface; and a sensing surface cleaning unit configured to clean the sensing surface while the brush moves relative to the emitter frame.

[0018] Some exemplary automated emitter tip cleaning systems further include a controller configured to control a motor to activate a brush and move the brush over the emitter tip. In some exemplary automated emitter tip cleaning systems, the controller is configured to control a motor to activate a brush based on at least one of a decision by the controller or an external signal. In some exemplary automated emitter tip cleaning systems, the controller is configured to control a motor to stop a brush in response to a sensor detecting that the brush is in a predetermined position.

[0019] Some exemplary automatic emitter tip cleaning systems further include a plurality of emitter tips located in the same axial plane as the emitter tip and the brush, the emitter frame is configured to hold the plurality of emitter tips radially inward from the emitter frame in an ionization path, and the motor is configured to move the brush into contact with each of the plurality of emitter tips. In some exemplary automatic emitter tip cleaning systems, the plurality of emitter tips are arranged in a substantially circular or polygonal arrangement. Some exemplary automatic emitter tip cleaning systems further include a first gear coupled to the brush and configured to hold the brush in the same axial plane as the emitter tips and to move the brush into contact with the emitter tips, and a second gear coupled between the motor and the first gear and acting on the first gear in response to the motor, wherein the plurality of emitter tips are located along or adjacent to the inner circumference of the first gear. In some exemplary automatic emitter tip cleaning systems, the substantially circular or polygonal arrangement is substantially coaxial with the fan.

[0020] In some exemplary automated emitter tip cleaning systems, the motor is a bidirectional motor configured to move the brush in both directions. In some exemplary automated emitter tip cleaning systems, the sensing surface cleaning unit is positioned adjacent to a predetermined position on the emitter frame. In some exemplary automated emitter tip cleaning systems, the sensing surface cleaning unit includes a pad configured to wipe contaminants from the sensing surface as the sensing surface moves over the pad. In some exemplary automated emitter tip cleaning systems, the pad is made of a non-abrasive material.

[0021] In some exemplary automatic emitter tip cleaning systems, the inspection surface cleaning unit is positioned along the path of the inspection surface on the emitter frame. In some exemplary automatic emitter tip cleaning systems, the emitter tip is configured to cause ionization. Some exemplary automatic emitter tip cleaning systems further include a first gear coupled to a brush and configured to hold the brush in the same axial plane as the emitter tip and to move the brush into contact with the emitter tip, and a second gear coupled between the motor and the first gear and configured to operate the first gear in response to operation by the motor.

[0022] In some exemplary automatic emitter tip cleaning systems, the inspection surface includes a smooth and electrostatically non-conductive surface configured to resist the attachment of contaminants. In some exemplary automatic emitter tip cleaning systems, the inspection surface is a polished surface. In some exemplary automatic emitter tip cleaning systems, the inspection surface includes a coating configured to resist the attachment of contaminants. Some exemplary automatic emitter tip cleaning systems further include a fan configured to direct a gas flow along an ionization path. In some exemplary automatic emitter tip cleaning systems, the emitter tip is directed in the same direction as the ionization path.

[0023] FIG. 1 is a diagram of an exemplary DC corona ionizer 100. The ionizer 100 includes a housing 102 that holds a fan configured to blow an air flow through an air passage. As will be described in more detail below, the ionizer 100 includes an ion emitter that emits positive and / or negative ions, and the fan blows the air flow through the ion emitter, thereby resulting in the neutralization of any charge that may be present in the air flow.

[0024] The examples disclosed below are described in relation to DC corona ionizers, but aspects of the disclosure can be used further or alternatively with AC corona ionizers and / or combinations of AC / DC corona ionizers.

[0025] Figure 2 is an internal view of the DC corona ionizer 100 illustrated in Figure 1. Figure 2 shows an illustrated fan 202 and an automatic emitter tip cleaner 204. The automatic emitter tip cleaner 204 comprises a unidirectional or bidirectional DC motor 206. The DC motor 206 can receive a drive signal and / or DC current to operate the automatic emitter tip cleaner 204. The illustrated fan 202 comprises a housing 208, and the housing 208 can be used to mount the fan 202 in the housing 102 and / or to attach the automatic emitter tip cleaner 204 to the fan 202.

[0026] The example DC motor 206 may be a brushless DC motor or any other type of AC or DC motor.

[0027] Figure 3 shows an illustrative fan 202 of a DC corona ionizer 100 mounted on an automatic emitter tip cleaning machine 204. The illustrative ionizer 100 comprises an emitter frame 302, which holds a number of ion emitters 304 (sometimes called emitter tips) in place along the inner circumference of the emitter frame 302 within the air passage of the fan 202.

[0028] The exemplary automatic emitter tip cleaning machine 204 comprises a pinion gear 306 and a spur gear 308. The spur gear 308 holds the emitter tip brush. The pinion gear 306 is driven by a DC motor 206 in Figure 2 and meshes with the spur gear 308 to drive the spur gear 308. The exemplary spur gear 308 and emitter frame 302 are mounted on the housing 208 of the fan 202 such that the spur gear 308 is substantially coaxial with the fan and holds the emitter tip brush in the same plane as the ion emitter 304. The exemplary ion emitter 304 is arranged inside the spur gear 308 (e.g., substantially coaxial with the fan 202) in a substantially circular or polygonal arrangement. The arrangement of the ion emitter 304 in Figure 3 causes ionization to occur in the ionization path 310, which flows along the ionization path 310 with the gas flow generated by the fan 202.

[0029] Figure 4 is another illustration of the fan 202 and automatic emitter tip cleaning machine 204 illustrated in Figure 3. Figure 4 shows the fan 202, the housing 208, the illustrated emitter frame 302, the emitter 304, the pinion gear 306, and the spur gear 308. The emitter tip brush 402 is visible in Figure 4. The emitter tip brush 402 is in at least the same axial plane as the emitter tip 304.

[0030] Figure 5 is another diagram of the fan 202 and automatic emitter tip cleaning machine 204 illustrated in Figure 3. Looking at Figure 4, the emitter tip brush 402 is shown in a known initial position, i.e., home position. The automatic emitter tip cleaning machine 204 may include a position detector that identifies (e.g., generates a signal) when the emitter tip brush 402 is in the initial position.

[0031] The exemplary emitter frame 302 includes a detection window 502 through which a visual position detector (e.g., a laser detector) can identify when the emitter tip brush 402 is in close proximity to the detection window 502. Other position detectors include, for example, Hall effect sensors, switches and / or any other type of proximity sensor and / or circuitry.

[0032] As shown in Figures 4 and 5, the spur gear 308 and brush 402 can rotate fully and / or partially along the inner circumference of the emitter frame 302 in one direction 504, 506 or both directions. For example, the motor 206 in Figure 2 drives the pinion gear 306 in one direction or both directions, thereby rotating the spur gear 308 and moving the brush 402 along the inner circumference of the emitter frame 302. The exemplary ionizer 100 can operate the fan 202 and continue generating ions through the emitter 304 while the brush 402 moves and cleans the emitter 304.

[0033] Figure 6 is a diagram illustrating an exemplary embodiment of the automatic emitter tip cleaning machine 204 shown in Figures 3 to 5. The structure of the exemplary pinion gear 306, exemplary spur gear 308, and exemplary emitter tip brush 402 is shown in Figure 6.

[0034] The automatic emitter tip cleaning machine 204 illustrated in Figures 2 to 6 is motor-driven (i.e., not centrifugal like conventional systems). As a result, the automatic emitter tip cleaning machine 204 can operate to perform cleaning independently of the fan 202. For example, the automatic emitter tip cleaning machine 204 can be operated using an internal timer (e.g., in a microprocessor that controls the fan 202 and / or the emission of ions from the emitter 304) and / or from an external signal via an I / O connector.

[0035] During the cleaning process, as the brush 404 is driven along the circumference of the emitter frame 302, the position sensor 602 is configured to detect when the brush 404 reaches a predetermined position. To improve the detection of the position of the brush 404, a detection surface 604 is coupled to the brush 404. In the examples of Figures 5 and 6, the detection surface 604 is an outward-facing surface (e.g., the side of the brush 404 that is farther from the center of the emitter frame 302) and is aligned with the detection window 502. Figure 7 is a perspective view of an exemplary brush 404 and an exemplary detection surface 604 that can be used to implement the automatic emitter tip cleaning machine 204 of Figures 3 to 6. The position sensor 602 is similarly aligned with the detection window 502. When the detection surface 604 is positioned adjacent to the detection window 502, the position sensor 602 detects the detection surface 604.

[0036] The controller 606 controls the motor 608 to actuate the brush 404, for example, via a gear system including gears 306, 308. The controller 606 can actuate the brush 404, for example, in response to the elapsed cleaning cycle time and / or to an external cleaning signal received by the controller 606. After actinguating the brush 404 in one direction 504, 506, if the position sensor 602 detects that the brush 404 is in a predetermined position (for example, based on detection by the detection surface 604), the controller 606 can control the motor 608 to stop the brush 404, or control the motor 206 to actuate the brush 404 in the opposite direction 504, 506 to perform a cleaning cycle (or part of a cleaning cycle) in the opposite direction 504, 506.

[0037] When the detection surface 604 is detected, the controller 606 can stop the motor 206 and terminate the cleaning cycle.

[0038] The exemplary controller 606 may be a general-purpose or application-specific processing device, such as an integrated circuit (IC), a system-on-a-chip (SoC), an integrated controller, a digital signal processor, and / or any other type of analog and / or digital circuitry. The exemplary controller 606 may include input / output ports or interfaces, a power supply circuit, a communication circuit, a volatile and / or non-volatile memory for storing machine-readable instructions for controlling the motor 206, processing inputs from the sensor 602, and / or other aspects of the automatic emitter tip cleaning machine 204, and / or any other auxiliary circuitry.

[0039] During the operation of the fan 202, particles, oil, and / or other contaminants may accumulate on the detection surface 604, which may reduce the reliability of the position sensor 602 that detects the detection surface 604. The exemplary detection surface 604 is a smooth, electrostatically nonconductive surface that can be configured to resist the adhesion of such contaminants. Furthermore or alternatively, the detection surface 604 may be polished and / or have a coating that resists the adhesion of contaminants. However, the detection surface 604 may still become contaminated.

[0040] To improve and / or maintain detection accuracy over the lifespan of the automatic emitter tip cleaning machine 204, the exemplary automatic emitter tip cleaning machine 204 further comprises a detection surface cleaning unit 508 that cleans the detection surface 604 as the brush 404 and detection surface 604 move relative to the emitter frame 302. In the example of Figure 5, the detection surface cleaning unit 508 is a pad (e.g., a non-abrasive material such as felt, velvet, or non-abrasive cloth) that wipes contaminants from the detection surface 604 as the detection surface 604 moves over the pad. The detection surface cleaning unit 508 is positioned on the emitter frame 302 along the path of the detection surface 604, such as around the detection window 502. However, the detection surface cleaning unit 508 may be located at other locations along the inner circumference of the emitter frame 302, from which the detection surface 604 can move over the detection surface cleaning unit 508.

[0041] In the illustrated example, the detection surface 604 is located at the same circumferential position as the brush 404 on the emitter frame 302, but in other examples, the detection surface 604 and the detection window 502 may be located at different circumferential positions on the emitter frame 302 than the brush 404.

[0042] While the examples in Figures 2 to 6 show two gear embodiments, other examples include embodiments of three or more gears, and / or embodiments of a single gear in which the gear holding the emitter tip brush is directly driven by a motor.

[0043] The illustrated automatic emitter tip cleaner 204 can operate in one direction (e.g., clockwise or counterclockwise) and / or can operate in both clockwise and counterclockwise directions to clean the ion emitter 304 in both directions.

[0044] The illustrated automatic emitter tip cleaning machine 204 can clean in any combination of full rotation and / or partial rotation. For example, a controller controlling the motor 206 can perform a specific type of cleaning by executing application-specific cleaning procedures, including full rotation and / or partial rotation.

[0045] The illustrated automatic emitter tip cleaning machine 204 may include a position sensing function to monitor the position of the emitter tip brush 404. For example, the automatic emitter tip cleaning machine 204 may determine if the brush assembly is in its initial position at the start and / or end of the cleaning process. In another example, a controller controlling the motor 206 may track the position of the emitter tip brush 404 along the inner circumference of the emitter frame 302 by using a sensor (e.g., a gyroscope, a travel sensor or encoder coupled to the pinion gear 306 or spur gear 308) and / or by tracking the speed and direction of the motor 206's movement.

[0046] Figure 8 is a schematic diagram of another exemplary ionizer 800 mounted on an automatic emitter tip cleaning machine 802, with the ion emitter 804 oriented along the ionization path 806. The exemplary ion emitter 804 may be similar to or identical to the ion emitter 304 in Figures 3–6. The exemplary ion emitter 804 is positioned within a path for a gas flow (e.g., the ionization path 806) which may be supplied by a fan, a pressurized gas source, a pump, and / or any other gas source.

[0047] The automatic emitter tip cleaning machine 802 comprises a brush 404 and a detection surface 604 coupled to an actuator such as a motor 206. For example, the brush 404 and the detection surface 604 can be mounted on a gear 808 or other rotary or linear motion device, which is driven by the motor 206 to move the brush 404 between contact and non-contact states with the emitter tip 804 via rotation and / or linear motion.

[0048] The illustrative sensor 602 is positioned to detect when the detection surface 604 is in a predetermined position, which may be within or outside the ionization path 806. In the same manner as described above, the sensor 602 provides the controller 606 with an indication of whether the detection surface 604 has been detected (for example, when the brush 404 has completed its entire motion in the rotational or linear direction). When the detection surface 604 is detected, the controller 606 can stop the motor 206 to end the cleaning cycle, or control the motor 206 to operate the brush 404 in the opposite direction to perform a cleaning cycle (or part of a cleaning cycle) in the opposite direction.

[0049] Where used in this application, “and / or” means any one or more of the items in the list that are added by “and / or.” For example, “x and / or y” means any element of the set of three elements {(x), (y), (x,y)}. In other words, “x and / or y” means “one or both of x and y.” Another example is “x, y and / or z” meaning any element of the set of seven elements {(x), (y), (z), (x,y), (x,z), (y,z), (x,y,z)}. In other words, “x, y and / or z” means “one or more of x, y and z.” Where used in this application, the term “exemplary” means to serve as a non-limiting example, illustration, or example. Where used in this application, the term “e.g., and for example” sets off a list of one or more non-limiting examples, illustrations, or examples.

[0050] While the Method and / or System has been described with reference to certain specific embodiments, those skilled in the art will understand that various modifications and substitutions can be made without departing from the scope of the Method and / or System. In addition, many modifications can be made without departing from the scope of the Disclosure to adapt the teachings of the Disclosure to specific circumstances or materials. For example, the blocks and / or components of the disclosed examples can be combined, divided, rearranged, and / or otherwise modified. Thus, the Method and / or System is not limited to the specific embodiments disclosed. Instead, the Method and / or System includes all embodiments that fall within the scope of the appended claims, either literally or under the doctrine of equivalents.

Claims

1. An automatic emitter tip cleaning system, An emitter tip configured to generate at least one of a cation or anion within or near the ionization transport path, An emitter frame configured to hold the emitter tip within or adjacent to the ionization transport path, A brush and A motor coupled to the brush and operating the brush so that it passes over the tip of the emitter, The detection surface attached to the brush, A sensor configured to detect when the brush is in a predetermined position relative to a reference position by detecting the detection surface, A detection surface cleaning unit configured to clean the detection surface while the brush moves relative to the emitter frame, An automatic emitter tip cleaning system equipped with this system.

2. The automatic emitter tip cleaning system according to claim 1, further comprising a controller configured to control the motor to operate the brush so that it passes over the emitter tip.

3. The automatic emitter tip cleaning system according to claim 2, wherein the controller is configured to control the motor to operate the brush based on at least one of a decision made by the controller or an external signal.

4. The automatic emitter tip cleaning system according to claim 2, wherein the controller is configured to control the motor to stop the brush in response to the sensor detecting that the brush is in the predetermined position.

5. The automatic emitter tip cleaning system according to claim 1, further comprising a plurality of emitter tips located in the same axial plane as the emitter tip and the brush, wherein the emitter frame is configured to hold the plurality of emitter tips within the ionization path radially inward from the emitter frame, and the motor is configured to move the brush into contact with each of the plurality of emitter tips.

6. The automatic emitter tip cleaning system according to claim 5, wherein the plurality of emitter tips are arranged in a substantially circular or polygonal arrangement.

7. Furthermore, A first gear coupled to the brush, configured to hold the brush in the same axial plane as the emitter tip, and configured to move the brush to a contact state with the emitter tip, A second gear coupled between the motor and the first gear to actuate the first gear in response to the operation of the motor, wherein the plurality of emitter tips are arranged along or adjacent to the inner circumference of the first gear, The automatic emitter tip cleaning system according to claim 6, comprising:

8. The automatic emitter tip cleaning system according to claim 6, wherein the substantially circular or polygonal arrangement is substantially coaxial with the fan.

9. The automatic emitter tip cleaning system according to claim 1, wherein the motor is a bidirectional motor configured to move the brush in both directions.

10. The automatic emitter tip cleaning system according to claim 1, wherein the detection surface cleaning unit is positioned adjacent to the predetermined position on the emitter frame.

11. The automatic emitter tip cleaning system according to claim 1, wherein the detection surface cleaning unit includes a pad, and the pad is configured to wipe contaminants from the detection surface as the detection surface moves over the pad.

12. The automatic emitter tip cleaning system according to claim 11, wherein the pad is made of a non-abrasive material.

13. The automatic emitter tip cleaning system according to claim 1, wherein the detection surface cleaning unit is positioned on the emitter frame along the path of the detection surface.

14. The automatic emitter tip cleaning system according to claim 1, wherein the emitter tip is configured to generate ionization.

15. Furthermore, A first gear coupled to the brush, configured to hold the brush in the same axial plane as the emitter tip, and configured to move the brush to a contact state with the emitter tip, A second gear is coupled between the motor and the first gear in order to actuate the first gear in response to the operation of the motor, The automatic emitter tip cleaning system according to claim 1, comprising:

16. The automatic emitter tip cleaning system according to claim 1, wherein the detection surface includes a smooth, electrostatically nonconductive surface configured to resist the adhesion of contaminants.

17. The automatic emitter tip cleaning system according to claim 16, wherein the detection surface is a polished surface.

18. The automatic emitter tip cleaning system according to claim 16, wherein the detection surface includes a coating configured to resist the adhesion of contaminants.

19. The automatic emitter tip cleaning system according to claim 1, further comprising a fan configured to guide the gas flow along the ionization path.

20. The automatic emitter tip cleaning system according to claim 19, wherein the emitter tip is oriented in the same direction as the ionization path.

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