Fluid flow components and systems incorporating them

Abstract

Devices that control fluid flow are critical components for supplying process fluids in semiconductor manufacturing. These devices for controlling fluid flow often rely on fluid flow components that incorporate check valves to prevent backflow of fluid within the device. These check valves utilize magnetic fields to bias a closing member against a seat without the need for mechanical biasing elements such as springs. These magnetic fields are generated by one or more magnets, resulting in a wide range of improved operating parameters.

Description

Technical Field

[0001] (Cross - reference to related applications) This application claims priority based on U.S. Provisional Application No. 63 / 492,597 filed on March 28, 2023, which is hereby incorporated herein by reference in its entirety.

[0002] Flow control is one of the important technologies in semiconductor chip manufacturing. Devices for controlling the flow of fluids are important for supplying a known flow rate of process fluids for semiconductor manufacturing and other industrial processes. Such devices are used to measure and precisely control the flow of fluids in various applications. This control depends on components incorporating check valves and can reliably prevent and control the reverse flow of fluids within the system. Such a system can incorporate components with one or more check valves for creating a device to control the flow of fluids and a fluid supply module including one or more devices for controlling the flow of fluids.

Background Art

[0003] As chip manufacturing technology improves, the demand for devices to control flow is also increasing. In semiconductor manufacturing processes, there is an ever - growing demand for performance improvements such as more accurate measurements, reduction of equipment costs, improvement of transient response time, and improvement of the consistency of fluid supply timing. To improve the performance of flow control devices, improvement of components incorporating check valves is desired.

Summary of the Invention

[0004] This technology relates to components incorporating check valves for use in mass flow controllers and other gas or liquid supply devices. One or more of these gas or liquid supply devices can be used in various processes such as semiconductor chip manufacturing and solar panel manufacturing.

[0005] In one embodiment, the present invention is a fluid flow component having a housing and a closing member. The housing has an inlet, an outlet, a cavity, a seat, and a flow path. The longitudinal axis extends along the cavity. The seat is located within the cavity. The flow path extends from the inlet to the cavity and from the cavity to the outlet. The closing member is slidable within the cavity of the housing. The closing member, the seat, is configured to prevent fluid from flowing in the reverse direction through the flow path. A magnetic field biases the closing member in a direction toward contact with the seat.

[0006] In another embodiment, the present invention is a system for processing articles. This system comprises a first fluid flow component, a second fluid flow component, and a seal. The first fluid flow component has a housing and a closure member. The housing has an inlet with a first port, the first port having a seal cavity. The outlet has a second port, the second port having a seal cavity. The housing is further provided with a cavity, a longitudinal axis extending along the cavity, and a sheet provided within the cavity. The flow path extends from the inlet to the cavity and from the cavity to the outlet. The closure member is slidable within the cavity of the housing and is configured to engage with the sheet to prevent fluid from flowing in the reverse direction through the flow path. The second fluid flow component has a first port and a second port, the flow path extending from the first port to the second port. Each of the first and second ports has a seal cavity. When the second port of the second fluid component is aligned with the first port of the first fluid flow component, the seal is positioned within the seal cavity of the second port of the second fluid flow component and within the seal cavity of the first port of the first fluid flow component. The magnetic field biases the closing member in a direction that brings it into contact with the sheet.

[0007] In yet another embodiment, the present invention is a fluid flow component. The fluid flow component comprises a housing, a stopper member, and a closing member. The housing has an inlet, an outlet, and a cavity. A longitudinal axis extends along the cavity. A sheet is positioned within the cavity, and a flow path extends from the inlet to the cavity and from the cavity to the outlet. The stopper member has a first magnet. The closing member is slidable within the cavity of the housing and has a second magnet. The closing member is configured to engage with the sheet to prevent the fluid flowing through the flow path from flowing in the reverse direction. The magnetic fields generated by the first and second magnets bias the closing member to contact the sheet.

[0008] In another embodiment, the present invention is a closing member for a check valve. The closing member has a body extending along its longitudinal axis from a first end to a second end, the body having a cavity formed therein. The closing member further has an enlargement formed at the first end of the body, the enlargement having a sealing surface. A shaft portion extends from the enlargement to the second end. Multiple protrusions extend from the shaft portion. A magnet is arranged in the cavity.

[0009] In a further embodiment, the present invention is a closing member for a check valve. The closing member has a body extending along a longitudinal axis from a first end to a second end. A first portion having a sealing surface is formed at the first end of the body. A plurality of protrusions extend from the first portion along the longitudinal axis, and the plurality of protrusions define a cavity. A magnet is placed inside the cavity.

[0010] Further applications of this technology will become apparent from the detailed description below. While the detailed description and specific examples illustrate preferred embodiments, it should be understood that they are for illustrative purposes only and are not intended to limit the scope of this technology. [Brief explanation of the drawing]

[0011] The invention of the present application will be more fully understood from the detailed description and the accompanying drawings.

[0012] [Figure 1] It is a schematic diagram of a system for manufacturing a semiconductor device using one or more devices for controlling a flow.

[0013] [Figure 2] It is a perspective view of a fluid supply module including at least one flow control device that can be used in the process of FIG. 1.

[0014] [Figure 3] It is a perspective view of a first component that can be used in the fluid supply module of FIG. 2.

[0015] [Figure 4] It is an exploded perspective view of the first component.

[0016] [Figure 5] It is a cross-sectional view of the first component taken along line 5-5 of FIG. 3.

[0017] [Figure 6] It is a perspective view of a closing member of the first component.

[0018] [Figure 7] It is an exploded perspective view of the closing member.

[0019] [Figure 8] It is a front view of the closing member.

[0020] [Figure 9] It is a rear view of the closing member.

[0021] [Figure 10] It is a left side view of the closing member.

[0022] [Figure 11]It is a cross-sectional view of a closure member cut along line 11 of the second component - 11 in FIG. 8.

[0023] [Figure 12] It is a perspective view of the stopper member of the first component.

[0024] [Figure 13] It is an exploded perspective view of the stopper member.

[0025] [Figure 14] It is a front view of the stopper member.

[0026] [Figure 15] It is a rear view of the stopper member.

[0027] [Figure 16] It is a left side view of the stopper member.

[0028] [Figure 17] It is a cross-sectional view of the stopper member cut along line 17 - 17 in FIG. 14.

[0029] [Figure 18] It is a detailed view of region 18 in FIG. 5.

[0030] [Figure 19] It is a perspective view of the second component that can be used in the fluid supply module of FIG. 2.

[0031] [Figure 20] It is an exploded perspective view of the second component. [[ID= 57]]

[0032] [Figure 21] It is a cross-sectional view of the second component cut along line 21 - 21 in FIG. 19.

[0033] [Figure 22]Figure 2 is a perspective view of a third component that may be used in the fluid supply module.

[0034] [Figure 23] This is a disassembled perspective view of the third component.

[0035] [Figure 24] This is a cross-sectional view of the third component, cut along line 24-24 in Figure 22.

[0036] [Figure 25] This is a perspective view of the upper housing member of the third component.

[0037] [Figure 26] This is a bottom perspective view of the upper housing component.

[0038] [Figure 27] This is a top view of the upper housing component.

[0039] [Figure 28] This is a bottom view of the upper housing component.

[0040] [Figure 29] This is a cross-sectional view of the upper housing member cut along line 29-29 in Figure 27.

[0041] [Figure 30] This is a perspective view of the lower housing member of the third component.

[0042] [Figure 31] This is a bottom perspective view of the lower housing component.

[0043] [Figure 32] This is a top view of the lower housing member.

[0044] [Figure 33]This is a bottom view of the lower housing component.

[0045] [Figure 34] This is a cross-sectional view of the lower housing member cut along line 24-24 in Figure 32.

[0046] [Figure 35] Figure 2 is a perspective view of a fourth component that may be used in the fluid supply module.

[0047] [Figure 36] This is a disassembled perspective view of the fourth component.

[0048] [Figure 37] This is a cross-sectional view of the fourth component, cut along line 37-37 in Figure 35.

[0049] [Figure 38] This is a perspective view of the closing member of the fourth component.

[0050] [Figure 39] This is an exploded perspective view of the closing member.

[0051] [Figure 40] This is a left side view of the closing member.

[0052] [Figure 41] This is a cross-sectional view of the closing member cut along line 41-41 in Figure 38.

[0053] [Figure 42] This is a top perspective view of another embodiment of a closing member that can be used as a component of a fluid supply module.

[0054] [Figure 43] This is a bottom perspective view of the closing member.

[0055] [Figure 44]This is a left side view of the closing member.

[0056] [Figure 45] This is a cross-sectional view of the closing member cut along line 45-45 in Figure 44.

[0057] [Figure 46] This is a top perspective view of another embodiment of a closing member that can be used as a component of a fluid supply module.

[0058] [Figure 47] This is a bottom perspective view of the closing member.

[0059] [Figure 48] This is a left side view of the closing member.

[0060] [Figure 49] This is a cross-sectional view of the closing member cut along line 48-48 in Figure 48.

[0061] All drawings are schematic and not necessarily to scale. Parts that are numbered in one drawing and not numbered in another are considered the same unless otherwise specified herein. [Modes for carrying out the invention]

[0062] The description of exemplary embodiments of the present invention based on the principles of the present invention is intended to be read in conjunction with the accompanying drawings, which should be considered as part of the overall description. In the description of embodiments of the present invention disclosed herein, references to direction or position are for illustrative purposes only and are not intended to limit the scope of the invention. Relative terms such as “lower,” “upper,” “horizontal,” “vertical,” “upwards,” “down,” “up,” “down,” “left,” “right,” “top,” and “bottom,” and their derivatives (e.g., “horizontally,” “downwards,” “upwards,” etc.) should be interpreted as referring to the direction described at that time or the direction shown in the drawings discussed. These relative terms are for illustrative purposes only and, unless expressly indicated, do not require the device to be constructed or operated in a particular direction. Terms such as “attached,” “fixed,” “connected,” “joined,” and “interconnected,” unless expressly otherwise stated, refer to relationships in which structures are fixed or attached to each other directly or indirectly through intervening structures, and both movable and fixed attachment relationships. Furthermore, the features and advantages of the present invention are described by reference to preferred embodiments. Therefore, the present invention should not be expressly limited to preferred embodiments showing several non-limiting combinations of features that may exist individually or in combination with other features, and the scope of the present invention is defined by the claims appended herein.

[0063] The present invention relates to a fluid flow component for use in a fluid supply module comprising at least one device for controlling the flow of a fluid. In some embodiments, the fluid supply module may include a mass flow controller that supplies a fluid at a known mass flow rate to a semiconductor process or similar process. Semiconductor manufacturing is one of the industries that demands high performance in controlling fluid flow. As semiconductor manufacturing technology advances, customers have recognized the need for more complex and functional flow control devices. Modern semiconductor processes require precise control of the flow rate of the supplied mass and volume, as well as strict control of the mixture. The present invention provides a fluid flow component with a check valve that can be used for various applications within a fluid supply module.

[0064] Figure 1 shows a schematic diagram of an exemplary processing system 1000. This processing system 1000 may utilize one or more devices 100 for controlling the fluid-coupled flow in the processing chamber 1300. This flow control device 100 is used to supply one or more different processing fluids to the processing chamber 1300. The fluids are supplied by multiple fluid supply sources or fluid sources. These multiple flow control devices 100 collectively belong to a fluid supply module 1400. Optionally, multiple fluid supply modules 1400 may be used in this processing system 1000. These multiple flow control devices 100 are connected to the processing chamber 1300 by an outlet manifold 400. Items such as semiconductors and integrated circuits can be processed within the processing chamber 1300.

[0065] Valve 1100 facilitates a wide variety of processing steps by separating each of the flow control devices 100 from the processing chamber 1300 and allowing each of the flow control devices 100 to be selectively connected to or disconnected from the processing chamber 1300. The processing chamber 1300 includes applicators that utilize process fluids supplied by multiple flow control devices 100, and can selectively or diffusively distribute the fluids supplied by the multiple flow control devices 100. Optionally, the processing chamber 1300 may be a vacuum chamber, or a tank or bath for immersing articles in the fluids supplied by the multiple flow control devices 100. A fluid supply line is formed by the flow paths from each fluid source to the processing chamber 1300.

[0066] Furthermore, the processing system 1000 further includes a drain 1200 separated from the processing chamber 1300 by a valve 1100, enabling the discharge of process fluid or facilitating the purging of one or more flow control devices 100, thereby enabling switching of process fluids within the same flow control device 100. Optionally, the drain 1200 may be a vacuum source or a liquid drain configured to remove liquid from the processing chamber 1300. Optionally, the flow control device 100 may be a mass flow controller, a flow splitter, or other device that controls the flow of process fluid within the processing system. Additionally, the valve 1100 may be incorporated into the flow control device 100 as needed.

[0067] Processes that can be performed with processing system 1000 include wet cleaning, photolithography, ion implantation, dry etching, atomic layer etching, wet etching, plasma ashing, rapid thermal annealing, furnace annealing, thermal oxidation, chemical vapor deposition, atomic layer deposition, physical vapor deposition, molecular beam epitaxy, laser lift-off, electrochemical deposition, chemical mechanical polishing, wafer testing, electroplating, or other processes using fluids.

[0068] Figure 2 shows a schematic diagram of an exemplary fluid supply module 1400. In this embodiment, the fluid supply module 1400 comprises multiple flow control devices 100 having multiple inlets 101 and multiple outlets 102. In some embodiments, the multiple inlets 101 do not correspond one-to-one with the multiple outlets 102. Alternatively, multiple inlets 101 can be coupled to a single outlet 102, or a single inlet 101 can be divided into multiple outlets 102. This can be done to mix or combine different fluids before supplying them to the process chamber 1300. Nevertheless, at least one flow path extends from one of the inlets 101 to one of the outlets 102, and this flow path is formed by various components of the fluid supply module 1400.

[0069] As shown in the figure, each of the flow control devices 100 is arranged in a nearly straight line, with multiple devices 100 arranged in parallel. This is not necessarily required, and any package configuration can be used. The fluid supply module 1400 includes a substrate panel 1402. The substrate panel 1402 functions as a support structure for the fluid supply module 1400, but can also be used simply to facilitate assembly. The support structure 1402, also called a base substrate or base plate, is usually a flat plate or sheet on which one or more flow control devices 100 are mounted. In this example, multiple flow control devices 100 are mounted on the support structure 1402. Each of the flow control devices 100 is modular in design and consists of numerous individual fluid flow components 104, 120, each component being directly or indirectly mounted on the support structure 1402. The support structure 1402 has an upper surface 1403 on which the flow control devices 100 are mounted.

[0070] Components 104 and 120 may include one or more substrate blocks 104 and one or more additional fluid flow components 120. The fluid flow components 120 and the substrate block 104 can be arranged so that the substrate block 104 is in direct surface contact with the upper surface 1403 of the substrate panel 1402. The fluid flow components 120 can be mounted on the substrate block 104 so that the fluid flow components 120 are indirectly mounted to the substrate panel 1402. In other embodiments, the substrate block 104 may be indirectly mounted to the substrate panel 1402, and the additional fluid flow components 120 may be directly mounted to the substrate panel 1402.

[0071] The fluid flow components 104 and 120 can include both active and passive fluid flow components. Passive flow components do not alter the fluid flow, simply connecting one active component to another, or connecting active components to an inlet or outlet. Typically, the substrate block 104 is a passive fluid flow component. Active flow components can alter the fluid flow, monitor the fluid direction, or perform functions beyond simple fluid transport. Active flow components can include temperature sensors, pressure transducers, mass flow controllers, check valves, proportional valves, on / off valves, etc. Furthermore, other components can be active or passive depending on their current usage in the flow control device 100. For example, a temperature sensor can also function as a passive fluid flow component, transporting fluid from one active flow component to another, and may or may not actually be used to measure the temperature. As can be seen, there are a vast number of variations for the fluid flow components 104 and 120, and these fluid flow components 104 and 120 can be used to assemble a wide range of devices for controlling a flow rate of 100.

[0072] The fluid supply module 1400 is equipped with multiple inlets 101 that receive fluid from the fluid supply source 1010 described above. The fluid supply module 1400 is also equipped with at least one outlet 102 that supplies fluid to the processing chamber 1300. Each flow control device 100 may have one inlet 101 and one outlet 102, or it may have multiple inlets 101 or multiple outlets 102. Thus, the fluid may flow through multiple inlets 101 and through a single outlet 102, or it may flow through a single inlet 101 and through multiple outlets 102. The same fluid may flow through multiple inlets 101, or different fluids may flow through each inlet 101. Multiple flow control devices 100 may share the same inlet 101 or outlet 102, or each flow control device 100 may have one or more dedicated inlets 101 and outlets 102.

[0073] The substrate block 104 and the fluid flow component 120 are provided with one or more fluid ports that guide flow between one or more adjacent substrate blocks or fluid flow components 120 having corresponding fluid ports, as will be described in detail below. The fluid flow component 120 can be one or more of the following: a valve, a flow controller, a pressure transducer, a flow measurement sensor, a pressure regulator, a flow limiter, an actuator, an inlet 101 or outlet 102, or other known flow control components. Multiple anchors are used to connect the fluid flow component 120 to the substrate block 104. The anchors can be threaded inserts or threads in the substrate block 104, threaded inserts or threads in the substrate panel 1402, nuts, or other anchoring functions that securely fasten the fluid flow component 120 to the substrate block 104.

[0074] Figure 2A shows a partial cross-section of the fluid supply module 1400. Specifically, it shows how component 120 is attached to the first substrate block 104 and the second substrate block 104. Both the substrate block 104 and component 120 have ports, each port having a seal cavity. Within the respective seal cavities of the substrate block 104 and component 120 are seals 125 that seal the flow paths extending from the first substrate block 104 to component 120, and from component 120 to the second substrate block 104. To achieve this seal, the ports of the substrate block 104 are aligned with the ports of component 120, and the seals 125 are installed in the corresponding seal cavities. Once component 120 is fixed to the substrate block 104, a liquid-tight seal is achieved.

[0075] Referring to Figures 3 to 5, a fluid flow component 130 used in the fluid supply module 1400 is shown. In this embodiment, the fluid flow component 130 is a fluid mixer for mixing two or more fluids and distributing the fluid mixture. As shown, the fluid flow component 130 is a passive component, but in other configurations, it can also be configured as an active component that can actively change the fluid flow. The component 130 has a housing 132, which has a top surface 133, a bottom surface 134, a front surface 135, a rear surface 136, a left surface 137, and a right surface 138. As shown, the rear surface 136 is not flat and has projections extending from adjacent portions of the rear surface 136.

[0076] The upper surface 133 of the housing 132 is provided with a first port 141, a second port 142, and a third port 143. The first port 141 and the second port 142 are configured to receive fluid, and the third port 143 is configured to discharge fluid. However, in some embodiments, different ports among the first port 141, the second port 142, and the third port 143 may function as an inlet and an outlet, respectively. Furthermore, it is conceivable to have three or more ports to allow two or more fluids to be combined or one or more fluids to be divided. Each port 141, 142, and 143 includes a seal cavity 144 configured to receive a seal for easy connection with other components. The housing 132 is further provided with a number of fastener passages 145 to facilitate mounting the housing 132 to a support structure 1402. Furthermore, the fastener passages 145 can facilitate mounting other flow components 104 and 120 to the housing 132. The fastener passage 145 may be a through hole, a threaded hole, or formed in any way that allows for installation.

[0077] The bottom surface 134 of the housing 132 is configured to physically contact the top surface 1403 of the support structure 1402 when the fluid flow component 130 is attached to the support structure 1402. However, in other embodiments, if the fluid flow component 130 is attached to other fluid flow components 104, 120 and these other fluid flow components 104, 120 are directly coupled to the support structure 1402, the top surface 1403 may face the top surface 133.

[0078] The front 135 and left side 137 together form a plurality of assembly ports 147. Each assembly port 147 includes a retaining component 148 that provides a fluid-sealing seal to the assembly port 147 and holds the component installed in the assembly port 147. For example, Figure 4 shows an exploded view of the retaining component 148 removed from the housing 132. A closing member 200 and a stopper member 250 are also shown. The stopper member 250 is held by the retaining component 148 and seals the assembly port 147, preventing fluid leakage from the assembly port 147.

[0079] Figure 5 shows a cross-section of the assembled fluid flow component 130. The fluid flow component 130 has a first channel 151, a second channel 152, and a third channel 153 extending from a first port 141, a second port 142, and a third port 143 to a confluence point 155. A mixing element 190 is located at the confluence point 155. Thus, the fluid can flow from the first port 141 through the first channel 151 to the confluence point 155. The fluid can also flow from the second port 142 through the second channel 152 to the confluence point 155. The fluid can flow from the confluence point 155 through the third channel 153 to the third port 143. The first channel 151, the second channel 152, and the third channel 153 merge at the confluence point 155 to form a T-shape. The first channel 151, the second channel 152, and the third channel 153 together form a channel that extends from the inlets of the first port 141 and the second port 142 to the outlet of the third port 143.

[0080] Specifically, the first channel 151 has a first conduit 156, and the first conduit 156 is adjacent to the confluence point 155. The second channel 152 has a second conduit 157, and the second conduit 157 is adjacent to the confluence point 155. The third channel 153 has a third conduit 158, and the third conduit 158 ​​is adjacent to the confluence point 155. The first conduits 156 and 157 of the first channel 151 and the second channel 152 are on the same straight line, but the third conduit 158 ​​of the third channel 153 is perpendicular to the first conduits 156 and 157 of the first channel 151 and the second channel 152. Therefore, the fluid flows along the first channel 151 and the second channel 152 and merges at the confluence point 155. Next, the fluid flows perpendicularly from both the first conduit 156 and the second conduit 157 of the first channel 151 and the second channel 152, and from the confluence point 155 via the third conduit 158 ​​of the third channel 153.

[0081] Check valves are positioned in the first flow path 151 and the second flow path 152 to prevent backflow of the fluid supplied to the first port 141 and the second port 142. The check valve is formed by a seat 161 formed in the housing 132, a closing member 200, and optionally a stopper member 250. The seat 161 may be a monolithic part formed integrally with the housing 132, or it may be a separate component installed within or coupled to the housing 132. The seat 161 may have a flat surface, or it may incorporate a separate sealing member or function to facilitate an effective seal with the closing member 200. Thus, the check valve ensures that the closing member 200 is sealed against the seat 161, and as a result, prevents backflow from the third port 143 from flowing out of either the first port 141 or the second port 142.

[0082] The closing member 200 is located in a cavity 162 within a housing 132 accessible via an adjacent assembly port 147. The closing member 200 is slidable along longitudinal axes AA and BB within the cavity 162 and is configured to block fluid flow when in contact with the seat 161. Preferably, the closing member 200 moves concentrically or parallel to the respective longitudinal axes AA and BB. The longitudinal axes AA and BB extend along the respective cavities 162. Preferably, the seat 161 is formed concentrically around the respective longitudinal axes AA and BB, and the cavities 162 are formed concentrically around the respective longitudinal axes AA and BB. Each cavity 162 has a cylindrical inner surface 163 formed concentrically around the respective longitudinal axes AA and BB. Similarly, the stopper members 250 are located along the respective longitudinal axes AA and BB and are axially arranged.

[0083] Each closing member 200 is mounted via an assembly port 147 and held by a retaining component 148. The retaining component 148 is threaded, and the assembly port 147 is threaded, thereby allowing the stopper member 250 to be fixed within the assembly port 147. The stopper member 250 can form a seal. Alternatively, in other assembly ports 147, a seal 159 can be used to seal the assembly port 147. Similarly, the mixing element 190 may also incorporate a function to provide a sealing function to seal the assembly port 147. Alternatively, other known retaining means may be used as needed. In yet another configuration, the stopper member 250 may be used instead of the seal 159.

[0084] The assembly port 147 on the left side 137 of the housing 132 contains a leak-preventing seal 159 instead of having a component inserted. The primary purpose of the seal 159 is to seal the assembly port 147. However, one or more assembly ports 147 can be used to allow for additional fluid connections, and the seal can be omitted. As can be seen from the figure, the mixing element 190, the stopper member 250, and the seal 159 each engage with an annular rib 149 within the assembly port 147. This annular rib 149 ensures that a seal is achieved and axially restrains the mixing element 190, the stopper member 250, and the seal 159. Thus, the annular rib 149 and the corresponding annular groove 150 properly hold the component within the assembly port 147 and seal it to prevent fluid leakage.

[0085] Figures 6 to 11 show the closing member 200 in detail. The closing member 200 has a body 215 extending along the longitudinal axis CC from a first end 201 to a second end 203. The closing member 200 has a sealing surface 202 formed on the enlarged portion 204 of the closing member 200 at the first end 201. The shaft portion 205 extends from the enlarged portion 204 to the second end 203. Multiple projections 206 extend from the shaft portion 205. The multiple projections 206 have an arc-shaped outer portion 207, and the multiple projections 206 form part of the first annular ring 208 and the second annular ring 208. The arc-shaped outer portions 207 preferably have the same radius and are arranged around the longitudinal axis CC. This allows the arc-shaped outer portions 207 to engage with the inner surface 163 of the cavity 162.

[0086] The annular ring 208 has gaps 209 between adjacent protrusions 206. This allows fluid to flow through the annular ring 208 while the arc-shaped outer portions 207 of the protrusions 206 are engaged with the inner surface 163 of the cavity 162. The arc-shaped outer portions 207 of the protrusions 206 hold the closing member 200 within the cavity 162. The arc-shaped outer portions 207 of the protrusions 206 are sized so that the closing member 200 does not move laterally, i.e., radially, with respect to the longitudinal axes AA and BB. In other words, the closing member 200 can move freely along the respective longitudinal axes AA and BB, while its radial movement is prevented. When the closing member 200 is within the cavity 162, the longitudinal axes AA and BB are substantially coaxial with the longitudinal axis CC. Preferably, the diameter of the enlarged portion 204 is less than or equal to the diameter of the arc-shaped outer portions 207 of the protrusions 206.

[0087] The closing member 200 further comprises a cavity 210 formed within a recess 211 of the first end 201. The recess 211 is located within the enlarged portion 204, and the cavity 210 extends through the enlarged portion 204 to the shaft portion 205. The recess 211 and the cavity 210 are symmetrical with respect to the vertical axis CC. A magnet 220 is placed within the cavity 210, and a sealing member 212 is installed within the cavity 210 to seal the magnet 220.

[0088] Magnet 220 has a magnetic field 221 extending from the south pole 222 to the north pole 223. Therefore, magnet 220 generates a magnetic field 221. The south pole 222 is adjacent to the second end 203, and the north pole 223 is adjacent to the first end 201. Optionally, the orientation of magnet 220 can be reversed as needed. Furthermore, multiple magnets 220 or other magnetic materials can be used. The magnetic field 221 forms part of the total magnetic field of the fluid flow component 130, although magnetic fields added from other sources may also form part of the total magnetic field of the fluid flow component.

[0089] In other embodiments, a magnetic material may be used as the magnet 220, or other materials may be substituted. For example, iron, nickel, cobalt, rare earth metals, etc., can be used. Alternatively, copper, gold, calcium, aluminum, or similar materials or alloys may be used by utilizing their properties as diamagnetic or paramagnetic materials. In yet another embodiment, an electromagnet may be used instead of the magnet 220.

[0090] Referring to Figures 12 to 17, the stopper member 250 is shown. The stopper member 250 extends along the longitudinal axis DD from a first side 251 to a second side 253. The outer surface 252 is cylindrical and extends from the first side 251 to the second side 253. The first side 251 has a pocket 254 that accommodates two magnets 260. Optionally, the two magnets 260 may be identical. In other embodiments, more or fewer magnets 260 may be used. In yet another configuration, the magnets 260 may be replaced by one large magnet, or larger magnets or multiple smaller magnets may be used. The pocket 254 accommodates the magnets 260 but does not penetrate to the second side 253. As is clear, the magnetic force increases non-linearly as the distance between magnets 220, 260 decreases. Furthermore, the magnetic force is not constant, and not even substantially constant. Therefore, the magnetic force when the closing member 200 is in contact with the stopper member 250 is much greater than when the closing member 200 is in contact with the sheet 161.

[0091] The second side surface 253 incorporates annular grooves 255 and annular ribs 256 that engage with the corresponding annular ribs 149 and annular grooves 150 of the assembly port 147 of the housing 132. The annular grooves 255 and annular ribs 256 seal the assembly port 147 and prevent leakage of fluid within the housing 132. Furthermore, the second side surface 253 incorporates a stop surface 257. When the closing member 200 is inside the cavity, the stop surface 257 acts as a limiter on the movement of the closing member 200. The stop surface 257 can engage with the second end 203 when the closing member 200 is moved toward the stopper member 250. Thus, the closing member is constrained along the longitudinal axis by the sheet 161 and the stop surface 257.

[0092] The magnet 260 generates a magnetic field 263, and the illustrated magnetic field lines extend from the north pole to the opposite south pole. In this embodiment, the magnet 260 has a south pole 261 near the second side surface 253 and a north pole 262 near the first side surface 251. However, this arrangement can be reversed if necessary. As shown in the illustration, the magnetic field 263 extends from one pole, revolves around the magnet 260, and returns to the opposite pole. Similar to the magnetic field 221, the magnetic field 263 forms part of the total magnetic field of the fluid flow component 130. Similar to the magnet 220, the magnet 260 can be replaced with any magnetic, ferromagnetic, diamagnetic, or paramagnetic material or alloy.

[0093] Figure 18 is a detailed view of Figure 5, showing in detail one of the check valve assemblies. As shown, the sealing surface 202 of the closing member 200 is in contact with the seat 161 of the housing 132. The closing member 200 is biased against the seat 161 of the housing 132 as a result of the magnetic fields 221 and 263 generated by the magnets 220 and 260. The resulting combined magnetic field has magnetic field lines such that the magnetic field lines of the magnetic field 221 of magnet 220 are separated from the magnetic field lines of the magnetic field 263 of magnet 260. This is due to the proximity of the south poles 222 and 261 of magnets 220 and 260 to each other.

[0094] In other words, the combined magnetic field produces magnetic field lines of magnetic field 221 that do not intersect with the magnetic field lines of magnetic field 263. This is because the magnets 220 and 260 are oriented in opposite directions and are positioned so that their two south poles 222 and 261 face each other. As a result, a repulsive force is generated between the magnets 220 and 260, pressing the closing member 200 against the sheet 161 of the housing 132. The same effect can be achieved by positioning the opposite north poles of the magnets 220 and 260 in close proximity and reversing both magnets 220 and 260. In yet another configuration, the magnets 220 and 260 may be replaced with other materials or electromagnets to generate the required repulsive force. In yet another configuration, the magnets 220 and 260 may be arranged differently to apply force between the closing member 200 and the sheet 161.

[0095] The sheet 161 of the housing 132 seals the sealing surface 202 of the closing member 200 when the closing member 200 is in contact with the sheet 161. The sheet 161 engages with the sealing surface 202, preventing fluid flow from the third port 143 to the first port 141 or the second port 142. As fluid flows through the first port 141 or the second port 142, the closing member 200 moves away from the sheet 161. The fluid flow causes the closing member 200 to move away from the sheet 161 along the respective longitudinal axes AA and BB, allowing the fluid to pass through the closing member 200 and flow out of the third port 143. By changing the relative distance between the magnets 220 and 260, the sealing contact pressure between the sheet 161 and the sealing surface 202 can be changed. Furthermore, the sealing contact pressure between the sheet 161 and the sealing surface 202 also changes depending on whether the magnetic field strength of the magnets is high or low.

[0096] Referring to Figures 19 to 21, a second fluid flow component 300 is shown. The second fluid flow component 300 can be used as a standalone check valve component within the fluid supply module 1400, or it can be integrated into another component, similar to the fluid flow component 130 which incorporates two check valve assemblies and a mixing element. The fluid flow component 300 may also incorporate an additional housing member to facilitate mounting the second fluid flow component 300 to the substrate block 104 or other component 120. The second fluid flow component has a housing 332, a stopper member 250, and a closing member 200. The stopper member 250 and the closing member 200 are identical to those described above, however they do not need to be identical and may differ in some dimensions or other features if required for a particular fluid flow component.

[0097] The housing 332 has a first port 341 at the inlet and a second port 342 at the outlet. A fluid passage 340 extends from the first port 341 to the second port 342. Each of the first port 341 and the second port 342 has a seal cavity 344. An assembly port 347 is in fluid communication with the passage 340. The assembly port 347 is provided with an annular rib 349 and an annular groove 350. The housing 332 further comprises a cavity 362 extending along the longitudinal axis AA. The cavity 362 is substantially cylindrical and symmetrical about the longitudinal axis AA. The cavity 362 has an inner surface 363 that engages with a closing member 200, thereby allowing the closing member 200 to move along the longitudinal axis AA.

[0098] The cavity 362 terminates at the sheet 361. The sheet 361 engages with the sealing surface 202, blocking the flow of fluid from the second port 342 to the first port 341. The closing member 200 moves away from the sheet 361 as the fluid flows through the first port 341. The fluid flow causes the closing member 200 to move away from the sheet 361 along the longitudinal axis AA, allowing the fluid to pass through the closing member 200 and flow out of the second port 342. By changing the relative distance between the magnets 220 and 260, the sealing contact pressure between the sheet 361 and the sealing surface 202 can be changed. Furthermore, the sealing contact pressure between the sheet 361 and the sealing surface 202 also changes depending on whether the magnetic field strength of the magnets is high or low.

[0099] Figures 22 to 24 show the third fluid flow component 400. The third fluid flow component 400 is a check valve with a port on the opposite side of the fluid flow component 400, which allows for a flexible configuration of the fluid supply module 1400. The third fluid flow component 400 comprises a housing 432, which is formed by an upper housing member 410 and a lower housing member 420. The upper housing member 410 has an upper surface 411, and the lower housing member 420 has a lower surface 422. The upper surface 411 and the lower surface 422 form the upper and lower surfaces of the housing 432. The third fluid flow component 400 also includes a closing member 200, but does not use a separate stopper member 250. The function of the stopper member 250 is incorporated into the housing 432, as will be described in detail below.

[0100] The upper surface 411 of the upper housing member 410 is provided with a first port 441 and a third port 443. The lower surface 422 of the lower housing member 420 is provided with a second port 442 and a fourth port 444. The first fluid passage 440 extends from the second port 442 to the first port 441, with the second port 442 functioning as the inlet and the first port 441 functioning as the outlet. Similarly, the second fluid passage 439 extends from the fourth port 444 to the third port 443. The second fluid passage 439 is separated from the first fluid passage 440. Each of the first port 441, the second port 442, the third port 443, and the fourth port 444 has a seal cavity 445.

[0101] The upper housing member 410 also has a lower surface 412, and the lower housing member 420 has an upper surface 421. The lower surface 412 engages with the upper surface 421 to form a complete housing 432. The lower surface 412 includes an annular ring 446 surrounding each passage 413 in the upper housing member 410 that forms the flow paths 440, 439. Similarly, the upper surface 421 includes an annular groove 447 surrounding each passage 423 in the lower housing member 420 that forms the flow paths 440, 439. The annular groove 447 accommodates the annular ring 446 and provides a seal between the upper housing member 410 and the lower housing member 420, preventing fluid leakage from the passages 413, 423. Multiple fastener holes 448 extend through the upper housing member 410 and the lower housing member 420.

[0102] The upper housing member 420 further incorporates a cavity 462 and a seat 461. The cavity 462 extends from the upper surface 421 to the seat 461. The cavity 462 forms part of the first fluid passage 439. The cavity 462 has a cylindrical inner surface 463 with a substantially constant diameter. The cavity 462 extends along the longitudinal axis AA and is symmetrical about the longitudinal axis AA. As previously mentioned, the seat 461 may be planar, or it may be an insert, a sealing mechanism, or any other shape to facilitate sealing between the seat 461 and the closing member 200.

[0103] The closing member 200 is unable to move radially within the cavity 462 by its inner surface 463, but can move freely along the longitudinal axis AA. The movement of the closing member 200 is restricted in one direction by the seat 461 and in the opposite direction relative to the longitudinal axis AA by the inner surface 414 of the passage 413 of the upper housing member 410. As shown in the figure, the inner surface 414 of the passage 413 has a conical portion and a cylindrical portion. Therefore, the closing member 200 is in contact with the inner surface 414 and can only move a limited distance from the seat 461. The shape of the passage 413 can be modified in any desirable way to achieve the required movement restriction while allowing fluid flow through the closing member 200.

[0104] The upper housing member 410 is further provided with a number of pockets 454 for housing magnets 260. There are three pockets 454 equidistant from the vertical axis AA, and each pocket 454 is configured to house two magnets 260. The depth of the pockets 454 is approximately equal to the height of three magnets 260, but the depth can be made larger or smaller as needed. More or fewer magnets 260 may be used, and the magnets 260 may be larger or smaller than those shown. Preferably, the pockets 454 are arranged at equal intervals around the vertical axis AA to ensure a consistent magnetic field and symmetrical application of the magnetic force to the closing member 200. Optionally, more or fewer than three pockets 454 may be used as needed.

[0105] The magnet 260 generates a magnetic field 263, and the illustrated magnetic field lines extend from the north pole 262 to the opposite south pole 261. In this embodiment, the magnet 260 has a south pole 261 closer to the top surface 411 and a north pole 262 closer to the bottom surface 412. However, this arrangement can be reversed if necessary. As shown, the magnetic field 263 extends from one pole, revolves around the magnet 260, and returns to the opposite pole. Similar to the magnetic field 221, the magnetic field 263 forms part of the overall magnetic field of the fluid flow component 130. Similar to the magnet 220, the magnet 260 can be replaced with any magnetic, ferromagnetic, diamagnetic, or paramagnetic material or alloy.

[0106] As best shown in Figure 24, the sealing surface 202 of the closing member 200 is in contact with the sheet 461 of the lower housing member 420 of the housing 432. The closing member 200 is biased toward the sheet 461 of the housing 432 by the magnetic fields 221 and 263 generated by the magnets 220 and 260. The resulting combined magnetic field has magnetic field lines arranged such that the magnetic field lines of the magnetic field 221 of magnet 220 are spaced apart from the magnetic field lines of the magnetic field 263 of magnet 260. This is due to the fact that the south poles 222 and 261 of magnets 220 and 260 are located in close proximity to each other. The magnets 220 and 260 are arranged substantially parallel to each other, while being offset with respect to the vertical axis.

[0107] In other words, the combined magnetic field produces magnetic field lines of magnetic field 221 that do not intersect with the magnetic field lines of magnetic field 263. This is because the magnets 220 and 260 are oriented in the same direction, offset with respect to the vertical axis, with two S poles 222 and 261 adjacent to each other and two N poles 223 and 262 adjacent to each other. As a result, a repulsive force is generated between the magnets 220 and 260, pressing the closing member 200 against the sheet 461 of the housing 432. The same effect can be achieved by arranging the opposite N poles of the magnets 220 and 260 parallel and offset in opposite directions, thereby reversing both magnets 220 and 260. In yet another configuration, the magnets 220 and 260 can be replaced with other materials or electromagnets to generate the required repulsive force. In yet another configuration, the magnets 220 and 260 can be arranged in a different configuration to apply a force between the closing member 200 and the sheet 461. This arrangement results in a nearly constant magnetic force with respect to distance along the vertical axis, allowing for a more consistent force to be applied to the closing member 200.

[0108] The sheet 461 of the housing 432 seals the sealing surface 202 of the closing member 200 when the closing member 200 is in contact with the sheet 461. The sheet 461 engages with the sealing surface 202, blocking the flow of fluid from the first port 441 to the second port 442. As the fluid flows through the second port 442, the closing member 200 moves away from the sheet 461. The fluid flow causes the closing member 200 to move away from the sheet 461 along their respective longitudinal axes AA, allowing the fluid to pass through the closing member 200 and flow out of the first port 441. By changing the relative distance between the magnets 220 and 260, the sealing contact pressure between the sheet 461 and the sealing surface 202 can be changed. Furthermore, as the magnetic field strength of the magnets increases or decreases, the sealing contact pressure between the sheet 461 and the sealing surface 202 also changes.

[0109] Figures 25 to 34 show the upper housing member 410 and the lower housing member 420 in detail. The lower housing member 420 is shown in Figures 25 to 29, and the upper housing member 410 is shown in Figures 30 to 34. The lower housing member 420 has an upper surface 421 and a lower surface 422. The lower surface 422 has a second port 442 and a fourth port 444, each of which has a seal cavity 445. A passage 423 extends from the second port 442 and the fourth port 444 on the lower surface 422 to the upper surface 421. A cavity 462 is formed in the passage 423, which is fluid-coupled to the second port 442, and this cavity is terminated by a seat 461. The cavity has a cylindrical inner surface 463. A groove 447 is formed in the upper surface 421. The fastener passage 448 penetrates the lower housing member 420 and extends from the upper surface 421 to the lower surface 422.

[0110] The upper housing member 410 has an upper surface 411 and a lower surface 412. A first port 441 and a third port 443 are formed on the upper surface 411. Each of the first port 441 and the third port 443 has a seal cavity 445. The passage 413 extends from the first port 441 and the third port 443 on the upper surface 411 to the lower surface 412. An annular ring 446 is formed on the lower surface 412, which engages with the groove 447 as described above. A pocket 454 is formed on the lower surface 412 surrounding the passage 413 extending from the first port 441. As described above, the pocket 454 is symmetrically arranged around the passage 413 and its corresponding longitudinal axis AA, and a magnetic field generated by the magnet 260 can be applied to it.

[0111] The fastener passage 448 penetrates the upper housing member 410 and extends from the top surface 411 to the bottom surface 412. Furthermore, a fastening mechanism 449 is formed in the upper housing member 410. The fastening mechanism 449 can be a counterbore, a countersunk hole, or a similar mechanism that allows the upper housing member 410 to be fixed to the lower housing member 420. The lower housing member 420 may incorporate a corresponding fastening mechanism, such as a tapped hole, that can receive the fastener installed in the fastening mechanism 449.

[0112] Referring to Figures 35 to 37, a fourth fluid flow component 530 used in the fluid supply module 1400 is shown. In this embodiment, the fluid flow component 530 is a fluid mixer for mixing two or more fluids and discharging the fluid mixture. The fluid flow component 530 is functionally identical to the fluid flow component 130, allowing for some degree of component compatibility between the two fluid flow components. As shown, the fluid flow component 530 is a passive component, but in other configurations, it can be an active component that can actively change the fluid flow. Component 530 has a housing 532, which has a top surface 533, a bottom surface 534, a front surface 535, a rear surface 536, a left side surface 537, and a right side surface 538. As shown, the rear surface 536 is not flat, but has projections extending from adjacent portions of the rear surface 536.

[0113] The upper surface 533 of the housing 532 includes a first port 541, a second port 542, and a third port 543. The first port 541 and the second port 542 are configured to receive fluid, and the third port 543 is configured to discharge fluid. However, in some embodiments, different ports among the first port 541, the second port 542, and the third port 543 may function as inlets and outlets. Furthermore, there may be three or more ports to allow two or more fluids to be combined or one or more fluids to be divided. Each of the ports 541, 542, and 543 includes a seal cavity 544 configured to receive a seal for facilitating connection with other components. The housing 532 is further provided with a number of fastener passages 545 that facilitate mounting the housing 532 to the support structure 1402. Furthermore, the fastener passages 545 facilitate mounting other flow components 104, 120 to the housing 532. The fastener passage 545 may be a through hole, a threaded hole, or formed in any way that allows for installation.

[0114] The bottom surface 534 of the housing 532 is configured to physically contact the top surface 1403 of the support structure 1402 when the fluid flow component 530 is attached to the support structure 1402. However, in other embodiments, if the fluid flow component 530 is attached to another fluid flow component 104, 120 and the other fluid flow components 104, 120 are directly coupled to the support structure 1402, the top surface 1403 may face the top surface 533.

[0115] The front 535 and left side 537 together form a plurality of assembly ports 547. Each assembly port 547 includes a retaining component 548 that provides a liquid-tight seal to the assembly port 547 and holds the components installed in the assembly port 547. For example, Figure 36 shows an exploded view of the retaining component 548 removed from the housing 532. A closing member 600, a magnet 620, and a stopper member 650 are also shown. The stopper member 650 is held by the retaining component 548 and seals the assembly port 547, preventing fluid leakage from the assembly port 547.

[0116] Figure 37 shows a cross-section of the assembled fluid flow component 530. The fluid flow component 530 has a first channel 551, a second channel 552, and a third channel 553 extending from a first port 541, a second port 542, and a third port 543 to a confluence point 555. A mixing element 590 is located at the confluence point 555. Thus, the fluid can flow from the first port 541 through the first channel to the confluence point 555. The fluid can also flow from the second port 542 through the second channel 552 to the confluence point 555. The fluid can flow from the confluence point 555 through the third channel 553 to the third port 543. The first channel 551, the second channel 552, and the third channel 553 merge at the confluence point 555 to form a T-shape. The first channel 551, the second channel 552, and the third channel 553 together form a channel that extends from the inlets of the first port 541 and the second port 542 to the outlet of the third port 543.

[0117] Specifically, the first channel 551 has a first conduit 556, which is adjacent to the confluence point 555. The second channel 552 has a second conduit 557, which is adjacent to the confluence point 555. The third channel 553 has a third conduit 558, which is adjacent to the confluence point 555. The first conduits 556 and 557 of the first channel 551 and the second channel 552 are on the same straight line, while the third conduit 558 of the third channel 553 is perpendicular to the first conduits 556 and 557 of the first channel 551 and the second channel 552. Therefore, the fluid flows along the first channel 551 and the second channel 552 and merges at the confluence point 555. Next, the fluid flows out from the confluence point 555 at right angles from both the first conduit 556 and the second conduit 557 of the first channel 551 and the second channel 552, and through the third conduit 558 of the third channel 553.

[0118] Check valves are positioned in the first flow path 551 and the second flow path 552 to prevent backflow of the fluid supplied to the first port 541 and the second port 542. The check valve is formed by a seat 561 formed in the housing 532, a closing member 600, and optionally a stopper member 650. In some embodiments, the stopper member 650 is omitted, and some or all of the functions of the stopper member 650 may be incorporated into the housing 532. The seat 561 may be a monolithic part formed integrally with the housing 532, or it may be a separate component installed within the housing 532 or coupled to the housing 532. The seat 561 may have a flat surface, or it may incorporate a separate sealing member or function to facilitate effective sealing with the closing member 600. Thus, the check valve prevents backflow from either the first port 541 or the second port 542 as a result of the closing member 600 sealing against the seat 561.

[0119] The closing member 600 is located in a cavity 562 within a housing 532 accessible via an adjacent assembly port 547. The closing member 600 is slidable within the cavity 562 along longitudinal axes AA, BB and is configured to block fluid flow when the closing member 600 is in contact with the seat 561. Preferably, the closing member 600 moves concentrically or parallel to the respective longitudinal axes AA, BB. The longitudinal axes AA, BB extend along the respective cavities 562. The seat 561 is preferably concentric with respect to the respective longitudinal axes AA, BB, and the cavities 562 are arranged concentrically with respect to the respective longitudinal axes AA, BB. Each cavity 562 has a cylindrical inner surface 563 that is concentric with respect to the respective longitudinal axes AA, BB. Similarly, the stopper members 650 are arranged symmetrically along the respective longitudinal axes AA, BB.

[0120] Each closing member 600 is mounted via an assembly port 547 and held by a retaining component 548. The retaining component 548 is threaded, and the assembly port 547 is also threaded, allowing the stopper member 650 to be fixed within the assembly port 547. The stopper member 650 can form a seal. Alternatively, in other assembly ports 547, a seal 559 can be used to seal the assembly port 547. Similarly, the mixing element 590 may also incorporate a function to provide a sealing function that seals the assembly port 547. Alternatively, other known retaining means can be used as needed. In yet another configuration, the stopper member 650 may be used instead of the seal 559.

[0121] The assembly port 547 on the left side 537 of the housing 532 does not have a component inserted into it, but instead contains a leak-preventing seal 559. The primary purpose of the seal 559 is to seal the assembly port 547. However, it is also possible to omit the seal 559 and use one or more assembly ports 147 to allow for the connection of additional fluids. As shown in the figure, each of the mixing element 590, the stopper member 650, and the seal 559 engages with an annular rib 549 in the assembly port 547. This annular rib 549 ensures that a seal is achieved and axially restricts the mixing element 590, the stopper member 650, and the seal 559. Thus, the annular rib 549 and the corresponding annular groove 550 properly hold the component within the assembly port 547 and seal it to prevent fluid leakage.

[0122] Figures 38 to 41 show the closing member 600 in detail. The closing member 600 has a body 615 extending along the longitudinal axis CC from a first end 601 to a second end 603. The closing member 600 has a sealing surface 602 formed on the first portion 604 of the closing member 600 at the first end 601. Multiple projections 606 protrude radially outward from the longitudinal axis CC from the first portion 604 along the longitudinal axis CC. Each of the multiple projections 606 has an arcuate outer portion 607 that forms a cylindrical shape having a first outer diameter. In other words, the arcuate outer portions 607 preferably have the same radius and are centered on the longitudinal axis CC. This allows the arcuate outer portions 607 to engage with the inner surface 563 of the cavity 562. The multiple projections 606 are elongated with respect to the longitudinal axis CC. Preferably, the first outer diameter of the projection 606 is greater than the second outer diameter of the first portion 604. However, in other embodiments, the first and second outer diameters may be equal, or the first outer diameter may be smaller than the second outer diameter.

[0123] Gaps 609 are formed between adjacent protrusions 606. This allows fluid to flow through the protrusions 606 while the arc-shaped outer portions 607 of the protrusions 606 are engaged with the inner surface 563 of the cavity 562. The arc-shaped outer portions 607 of the protrusions 606 then hold the closing member 600 within the cavity 662. The arc-shaped outer portions 607 of the protrusions 606 are sized to prevent the closing member 600 from moving laterally, i.e., radially, with respect to the longitudinal axes AA and BB. In other words, the closing member 600 can move freely along the respective longitudinal axes AA and BB while being prevented from moving radially. When the closing member 600 is within the cavity 562, the longitudinal axes AA and BB are substantially coaxial with the longitudinal axis CC. Preferably, the diameter of the first portion 604 is less than or equal to the diameter of the arc-shaped outer portions 607 of the protrusions 606, as described above.

[0124] The closing member 600 further comprises a cavity 610 formed between a plurality of protrusions 606 and a first portion 604, and defined by these protrusions. The cavity 610 is formed at a second end 603, opens at the second end 603, and opens through gaps 609 between the protrusions 606. The cavity 610 is configured to accommodate the magnet 620 described above. A groove 605 is formed in each protrusion 606, and the groove 605 is located within the cavity 610. The groove 605 receives a protrusion 624 formed on the magnet 620, and the interaction between the groove 605 and the protrusion 624 allows the magnet 620 to be held within the cavity 610. Preferably, the protrusion 624 is formed as a ring to help hold the magnet 620 within the groove 605.

[0125] The main body 615 is further provided with a recess 611 formed at the first end 601. The recess 611 is formed within the first portion 604 but is not connected to the cavity 610. Instead, the first portion 604 forms a barrier between the recess 610 and the cavity 610. This prevents fluid from leaking beyond the sealing surface 602 when the closing member 200 is in contact with the sheet 561. The recess 211 and the cavity 210 are symmetrical with respect to the longitudinal axis CC.

[0126] The magnet 620 has a magnetic field 621 extending from the south pole 622 to the north pole 623. Thus, the magnet 620 generates a magnetic field 621. The south pole 622 is closer to the second end 603, while the north pole 623 is closer to the first end 601. Optionally, the orientation of the magnet 620 can be reversed as needed. Furthermore, multiple magnets 620 or other magnetic materials may be used. The magnetic field 621 forms part of the total magnetic field of the fluid flow component 530, although additional magnetic fields from other sources may also form part of the total magnetic field of the fluid flow component. Optionally, the magnet 620 may be encapsulated in a non-reactive material such as a polymer, and may incorporate protrusions 624 or other features for holding the magnet 620 within the cavity 610.

[0127] In other embodiments, a magnetic material is used as the magnet 620, or other materials are substituted. For example, iron, nickel, cobalt, rare earth metals, etc., can be used. Alternatively, copper, gold, calcium, aluminum, or similar materials or alloys can be used by utilizing their properties as diamagnetic or paramagnetic materials. In yet another embodiment, an electromagnet may be used instead of the magnet 620.

[0128] Figures 42 to 45 show another embodiment of a closure member 700 that can be used in the fluid flow component 530. The closure member 700 has a body 715 extending along the longitudinal axis CC from a first end 701 to a second end 703. The closure member 700 has a sealing surface 702 formed on an enlarged portion 704 of the closure member 700 at the first end 701. A shaft portion 705 extends from the enlarged portion 704 to the second end 703. A plurality of projections 706 extend from the shaft portion 705. The plurality of projections 706 are formed as fins and have an arc-shaped outer portion 707 that defines a generally cylindrical shape. The arc-shaped outer portion 707 preferably has the same radius and is centered on the longitudinal axis CC. This allows the arc-shaped outer portion 707 to engage with the inner surface 563 of the cavity 562. Preferably, the fins are aligned with the longitudinal axis CC and spaced apart from the enlarged portion 704. The multiple protrusions 706 are elongated with respect to the longitudinal axis CC. The multiple protrusions 706 are spaced apart from the enlarged portion 704.

[0129] Gaps 709 are formed between adjacent protrusions 706. This allows fluid to flow through the protrusions 706 while the arc-shaped outer portions 707 of the protrusions 706 are engaged with the inner surface 563 of the cavity 562. Thus, the arc-shaped outer portions 707 of the protrusions 706 maintain the closing member 700 within the cavity 562. The arc-shaped outer portions 707 of the protrusions 706 are sized to prevent the closing member 700 from moving laterally, i.e., radially, with respect to the longitudinal axes AA and BB. In other words, the closing member 700 can move freely along the respective longitudinal axes AA and BB while its radial movement is prevented. The longitudinal axes AA and BB are substantially coaxial with the longitudinal axis CC, and the closing member 700 is located within the cavity 562. Preferably, the diameter of the enlarged portion 704 is equal to the diameter of the arc-shaped outer portions 707 of the protrusions 706. In other embodiments, the diameter of the arc-shaped outer portion 707 may be smaller or larger than the diameter of the enlarged portion 704.

[0130] The closing member 700 further comprises a cavity 710 formed within the main body 715. Although the cavity 710 is shown as being closed with a magnet 720 inside, the cavity 710 can be formed in various ways. For example, the cavity 710 may be closed by being sealed or welded, or the magnet 720 may be overmolded when the closing member 700 is formed. Optionally, the cavity 710 may have an opening at either the first end 701 or the second end 703, similar to the closing member 200 described above.

[0131] The main body 715 has a recess 711 formed at the first end 701. Optionally, the recess 711 and the cavity 710 may be separated from each other as shown, or they may be fluidly connected if the cavity 710 extends to the recess 711. Optionally, the cavity 710 can also be closed by inserting a plug that isolates the cavity 710 from the recess 711, as shown in the closing member 200. The recess 711 and the cavity 710 are symmetrical about the vertical axis CC. The magnet 720 is located inside the cavity 710.

[0132] Magnet 720 has a magnetic field 721 extending from the south pole 722 to the north pole 723. Thus, magnet 720 generates a magnetic field 721. The south pole 722 is adjacent to the second end 703, and the north pole 723 is adjacent to the first end 701. Optionally, the orientation of magnet 720 can be reversed as needed. Furthermore, multiple magnets 720 may be used, and other magnetic materials may be used. The magnetic field 721 forms part of the total magnetic field of the fluid flow component 530, although additional magnetic fields from other sources may also form part of the total magnetic field of the fluid flow component.

[0133] In other embodiments, a magnetic material is used as the magnet 720, or other materials are substituted. For example, iron, nickel, cobalt, rare earth metals, etc., can be used. Alternatively, copper, gold, calcium, aluminum, or similar materials or alloys can be used by utilizing their properties as diamagnetic or paramagnetic materials. In yet another embodiment, an electromagnet may be used instead of the magnet 720.

[0134] Figures 46 to 49 show another embodiment of a closure member 800 that can be used in a fluid flow component 530. The closure member 800 has a body 815 extending along a longitudinal axis CC from a first end 801 to a second end 803. The closure member 800 has a sealing surface 802 formed on an enlarged portion 804 of the closure member at the first end 801. A shaft portion 805 extends from the enlarged portion 804 to the second end 803. A plurality of projections 806 extend from the shaft portion 805. The plurality of projections 806 are formed as fins and have an arc-shaped outer portion 807 that defines a generally cylindrical shape. The arc-shaped outer portion 807 preferably has the same radius and is centered on the longitudinal axis CC. This allows the arc-shaped outer portion 807 to engage with the inner surface 563 of the cavity 562. Preferably, the fins are aligned with the longitudinal axis CC and spaced apart from the enlarged portion 804. The multiple protrusions 806 are formed to be elongated with respect to the vertical axis CC. Furthermore, as shown in the closing member 700, the multiple protrusions 806 are not separated from the enlarged portion 704 but also extend from the enlarged portion 804.

[0135] Gaps 809 are formed between adjacent protrusions 806. This allows fluid to flow through the multiple protrusions 806 while the arc-shaped outer portions 807 of the multiple protrusions 806 are engaged with the inner surface 563 of the cavity 562. Thus, the arc-shaped outer portions 807 of the multiple protrusions 806 hold the closing member 800 within the cavity 562. The arc-shaped outer portions 807 of the multiple protrusions 806 are formed to a size that prevents the closing member 800 from moving laterally, i.e., radially, with respect to the longitudinal axes AA and BB. In other words, the closing member 800 can move freely along the respective longitudinal axes AA and BB while being prevented from moving radially. When the closing member 800 is inside the cavity 562, the longitudinal axes AA and BB are substantially coaxial with the longitudinal axis CC. Preferably, the diameter of the enlarged portion 804 is equal to the diameter of the arc-shaped outer portions 807 of the multiple protrusions 806. In other embodiments, the diameter of the arc-shaped outer portion 807 may be smaller or larger than the diameter of the enlarged portion 804.

[0136] The closing member 800 further comprises a cavity 810 formed within the main body 815. Although the cavity 810 is shown as being closed with a magnet 820 placed inside, the cavity 810 can be formed in various ways. For example, the cavity 810 may be closed by being sealed or welded, or the magnet 820 may be overmolded when the closing member 800 is formed. Optionally, the cavity 810 may have an opening at either the first end 801 or the second end 803, similar to the closing member 200 described above.

[0137] The main body 815 has a recess 811 formed at the first end 801. Optionally, the recess 811 and the cavity 810 may be separated from each other as shown, or they may be fluidly connected if the cavity 810 extends to the recess 811. Optionally, the cavity 810 can also be closed by inserting a plug that isolates the cavity 810 from the recess 811, as shown in the closing member 200. The recess 811 and the cavity 810 are symmetrical about the longitudinal axis CC. The magnet 820 is located inside the cavity 810.

[0138] Magnet 820 has a magnetic field 821 extending from the south pole 822 to the north pole 823. In this way, magnet 820 generates the magnetic field 821. The south pole 822 is adjacent to the second end 803, and the north pole 823 is adjacent to the first end 801. Optionally, the orientation of magnet 820 can be reversed as needed. Furthermore, multiple magnets 820 may be used, and other magnetic materials may be used. The magnetic field 821 forms part of the total magnetic field of the fluid flow component 530, although additional magnetic fields from other sources may also form part of the total magnetic field of the fluid flow component.

[0139] In other embodiments, a magnetic material is used as the magnet 820, or other materials are substituted. For example, iron, nickel, cobalt, rare earth metals, etc., can be used. Alternatively, copper, gold, calcium, aluminum, or similar materials or alloys can be used by utilizing their properties as diamagnetic or paramagnetic materials. In yet another embodiment, an electromagnet may be used instead of the magnet 820.

[0140] The disclosed fluid flow components 130, 300, 400, and 530, which include one or more check valves formed by a cavity, a seat, and a closing member, are considered to be implementable in apparatus 100. These apparatuses 100 may also incorporate additional fluid flow components not disclosed herein, which incorporate similar check valves. The function of the stopper member may be integrally formed with the housing or be a separate component, depending on assembly, design, and packaging requirements. Furthermore, multiple check valves may be utilized in a single fluid flow component as needed. No mechanical biasing element is required to provide a seal between the closing member and the corresponding seat. Instead, a magnetic bias is provided by magnets or other components arranged in these or similar manner. No springs, levers, weights, or other mechanically biasing functions are required to reliably close the check valve.

[0141] (Example claims)

[0142] (Example Claim 1) A fluid flow component, wherein the fluid flow component is It is a housing, The entrance and Exit and A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A closing member that is slidably movable within the cavity of the housing, wherein the closing member is configured to engage with the seat to prevent fluid from flowing in the reverse direction through the flow path, Equipped with, A fluid flow component characterized in that the closing member is biased by a magnetic field to contact the sheet.

[0143] (Exemplary Claim 2) A fluid flow component according to exemplary Claim 1, wherein the magnetic field is configured to push away the closing member.

[0144] (Exemplary Claim 3) A fluid flow component according to exemplary Claim 1 or exemplary Claim 2, further comprising a first magnet, wherein the first magnet generates a first portion of the magnetic field.

[0145] (Exemplary Claim 4) A fluid flow component according to exemplary Claim 3, characterized in that the first magnet is separated from the closing member at a distance.

[0146] (Example Claim 5) A fluid flow component according to example claim 3 or example claim 4, wherein the closing member comprises a second magnet.

[0147] (Example Claim 6) A fluid flow component according to example claim 5, wherein the second magnet generates a second portion of the magnetic field.

[0148] (Exemplary Claim 7) A fluid flow component according to exemplary Claim 6, wherein the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are spaced apart from the second plurality of magnetic field lines.

[0149] (Exemplary Claim 8) A fluid flow component according to any one of exemplary claims 1 to 7, characterized in that the closing member comprises a cavity and the second magnet is located within the cavity of the closing member.

[0150] (Exemplary Claim 9) A fluid flow component according to exemplary Claim 8, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

[0151] (Exemplary Claim 10) A fluid flow component according to any one of exemplary claims 1 to 9, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

[0152] (Exemplary Claim 11) A fluid flow component according to exemplary Claim 10, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the longitudinal axis.

[0153] (Exemplary Claim 12) A fluid flow component according to exemplary Claim 10 or exemplary Claim 11, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the longitudinal axis.

[0154] (Exemplary Claim 13) A fluid flow component according to any one of exemplary claims 1 to 12, characterized in that the fluid flow component is not provided with a mechanical biasing element.

[0155] (Exemplary Claim 14) A fluid flow component according to any one of exemplary claims 1 to 13, characterized in that the sheet is concentric with respect to the vertical axis.

[0156] (Exemplary Claim 15) A fluid flow component according to exemplary Claim 14, wherein the closing member moves within the cavity of the housing in a direction parallel to the longitudinal axis.

[0157] (Exemplary Claim 16) A fluid flow component according to any one of exemplary claims 1 to 15, further comprising a stopper member, wherein the stopper member is aligned with the vertical axis.

[0158] (Exemplary Claim 17) A fluid flow component according to exemplary Claim 16, wherein the stopper member comprises a first magnet.

[0159] (Exemplary Claim 18) A fluid flow component according to exemplary Claim 16 or exemplary Claim 17, characterized in that the stopper member is symmetrical with respect to the vertical axis.

[0160] (Exemplary Claim 19) A fluid flow component according to any one of exemplary claims 16 to 18, wherein the stopper member restricts the movement of the closing member along the longitudinal axis.

[0161] (Exemplary Claim 20) A fluid flow component according to any one of exemplary claims 16 to 19, characterized in that the stopper member is fixed to the housing.

[0162] (Exemplary Claim 21) A fluid flow component according to any one of exemplary claims 16 to 20, characterized in that the stopper member is formed by a part of the housing.

[0163] (Exemplary Claim 22) A fluid flow component according to any one of exemplary claims 1 to 15, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and comprises a first magnet in the first pocket, a third magnet in the second pocket, and a fourth magnet in the third pocket.

[0164] (Exemplary Claim 23) A fluid flow component according to exemplary claim 22, wherein the closing member comprises a second magnet.

[0165] (Exemplary Claim 24) A fluid flow component according to exemplary Claim 23, characterized in that each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

[0166] (Exemplary Claim 25) A fluid flow component according to any one of exemplary claims 22 to 24, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the vertical axis.

[0167] (Exemplary claim 26) A system for processing articles, the system is: The system comprises a first fluid flow component, the fluid flow component is It is a housing, An inlet including a first port, wherein the first port is an inlet having a seal cavity, An outlet including a second port, wherein the second port is an outlet having a seal cavity, A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A closing member that is slidable within the cavity of the housing, wherein the closing member is configured to engage with the seat to prevent fluid from flowing in the reverse direction through the flow path, A second fluid flow component comprising a first port and a second port, wherein the fluid flow component has a flow path extending from the first port to the second port, and each of the first port and the second port has a seal cavity, Stickers and Equipped with, The system is characterized in that the second port of the second fluid flow component is aligned with the first port of the first fluid flow component, the seal is located in the seal cavity of the second port of the second fluid flow component and in the seal cavity of the first port of the first fluid flow component, and the closing member is biased by a magnetic field to contact the sheet.

[0168] (Exemplary claim 27) The system according to claim 26, characterized in that the magnetic field is configured to push away the closing member.

[0169] (Exemplary Claim 28) A system according to exemplary claim 26 or exemplary claim 27, further comprising a first magnet, wherein the first magnet generates a first portion of the magnetic field.

[0170] (Exemplary Claim 29) The system according to exemplary Claim 28, characterized in that the first magnet is separated from the closing member at a distance.

[0171] (Example Claim 30) A system according to example claim 28 or example claim 29, characterized in that the closing member comprises a second magnet.

[0172] (Exemplary Claim 31) The system according to exemplary claim 30, characterized in that the second magnet generates the second portion of the magnetic field.

[0173] (Exemplary Claim 32) A system according to exemplary Claim 31, characterized in that the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are spaced apart from the second plurality of magnetic field lines.

[0174] (Exemplary Claim 33) A system according to any one of exemplary claims 26 to 32, characterized in that the closing member comprises a cavity and the second magnet is located within the cavity of the closing member.

[0175] (Exemplary Claim 34) A system according to exemplary claim 33, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

[0176] (Exemplary Claim 35) A system according to any one of exemplary claims 26 to 34, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

[0177] (Exemplary Claim 36) The system according to exemplary claim 35, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the longitudinal axis.

[0178] (Exemplary Claim 37) A system according to exemplary claim 35 or exemplary claim 36, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the vertical axis.

[0179] (Exemplary Claim 38) A system according to any one of exemplary claims 26 to 37, characterized in that the first fluid flow component is not provided with a mechanical biasing element.

[0180] (Example Claim 39) A system according to any one of the example claims 26 to 38, characterized in that the sheet is concentric with respect to the vertical axis.

[0181] (Exemplary Claim 40) A system according to exemplary claim 39, characterized in that the closing member moves within the cavity of the housing in a direction parallel to the vertical axis.

[0182] (Exemplary Claim 41) A system according to any one of exemplary claims 26 to 15, wherein the first fluid flow component further comprises a stopper member, the stopper member being aligned with the vertical axis.

[0183] (Exemplary claim 42) The system according to exemplary claim 41, wherein the stopper member comprises a first magnet.

[0184] (Example Claim 43) A system according to example claim 41 or example claim 42, characterized in that the stopper member is symmetrical with respect to the vertical axis.

[0185] (Exemplary Claim 44) A system according to any one of exemplary claims 41 to 43, characterized in that the stopper member restricts the movement of the closing member along the vertical axis.

[0186] (Exemplary Claim 45) A system according to any one of exemplary claims 41 to 44, characterized in that the stopper member is fixed to the housing.

[0187] (Exemplary Claim 46) A system according to any one of exemplary claims 41 to 45, characterized in that the stopper member is formed by a part of the housing.

[0188] (Exemplary Claim 47) A system according to any one of exemplary claims 26 to 46, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and comprises a first magnet in the first pocket, a third magnet in the second pocket, and a fourth magnet in the third pocket.

[0189] (Exemplary Claim 48) The system according to exemplary claim 47, wherein the closing member comprises a second magnet.

[0190] (Exemplary Claim 49) A system according to exemplary Claim 48, characterized in that each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

[0191] (Exemplary Claim 50) A system according to any one of exemplary claims 47 to 49, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the vertical axis.

[0192] (Example claim 51) A fluid flow component, wherein the fluid flow component is It is a housing, The entrance and Exit and A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A stopper member equipped with a first magnet, A closure member that is slidable within the cavity of the housing, the closure member comprising a second magnet, and configured to engage with the seat to prevent fluid from flowing in the reverse direction through the flow path, A fluid flow component characterized in that the closing member is biased to contact the sheet by the magnetic field generated by the first magnet and the second magnet.

[0193] (Exemplary Claim 52) A fluid flow component according to exemplary Claim 51, wherein the magnetic field is configured to push away the closing member.

[0194] (Exemplary Claim 53) A fluid flow component according to exemplary claim 51 or exemplary claim 52, wherein the first magnet generates a first portion of the magnetic field.

[0195] (Exemplary Claim 54) A fluid flow component according to any one of exemplary claims 51 to 53, characterized in that the first magnet is separated from the closing member at a distance.

[0196] (Exemplary Claim 55) A fluid flow component according to any one of exemplary claims 51 to 54, characterized in that the second magnet generates a second portion of the magnetic field.

[0197] (Exemplary Claim 56) A fluid flow component according to any one of exemplary claims 51 to 55, wherein the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are spaced apart from the second plurality of magnetic field lines.

[0198] (Exemplary Claim 57) A fluid flow component according to any one of exemplary claims 51 to 57, characterized in that the closing member comprises a cavity and a second magnet is located within the cavity of the closing member.

[0199] (Exemplary Claim 58) A fluid flow component according to exemplary claim 57, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

[0200] (Exemplary Claim 59) A fluid flow component according to any one of exemplary claims 51 to 58, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

[0201] (Exemplary Claim 60) A fluid flow component according to exemplary claim 59, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the longitudinal axis.

[0202] (Exemplary Claim 61) A fluid flow component according to exemplary claim 59 or exemplary claim 60, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the longitudinal axis.

[0203] (Exemplary Claim 62) A fluid flow component according to any one of exemplary claims 51 to 61, characterized in that the fluid flow component is not provided with a mechanical biasing element.

[0204] (Exemplary Claim 63) A fluid flow component according to any one of exemplary claims 51 to 62, characterized in that the sheet is concentric with respect to the vertical axis.

[0205] (Exemplary Claim 64) A fluid flow component according to exemplary Claim 63, wherein the closing member moves within the cavity of the housing in a direction parallel to the longitudinal axis.

[0206] (Exemplary Claim 65) A fluid flow component according to any one of exemplary claims 51 to 64, characterized in that the stopper member is aligned with the vertical axis.

[0207] (Exemplary Claim 66) A fluid flow component according to exemplary Claim 65, characterized in that the stopper member is symmetrical with respect to the vertical axis.

[0208] (Exemplary Claim 67) A fluid flow component according to exemplary claim 65 or exemplary claim 66, wherein the stopper member restricts the movement of the closing member along the longitudinal axis.

[0209] (Exemplary Claim 68) A fluid flow component according to any one of exemplary claims 65 to 67, characterized in that the stopper member is fixed to the housing.

[0210] (Exemplary Claim 69) A fluid flow component according to any one of exemplary claims 65 to 68, characterized in that the stopper member is formed by a part of the housing.

[0211] (Exemplary Claim 70) A fluid flow component according to any one of exemplary claims 51 to 69, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and comprises a first magnet in the first pocket, a third magnet in the second pocket, and a fourth magnet in the third pocket.

[0212] (Exemplary Claim 71) A fluid flow component according to exemplary Claim 70, wherein each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

[0213] (Exemplary Claim 72) A fluid flow component according to exemplary Claim 70 or exemplary Claim 71, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the longitudinal axis.

[0214] (Example claim 73) Closing member for a check valve, A body extending along a vertical axis from a first end to a second end, wherein the body has a cavity formed therein, An enlarged portion formed at the first end of the main body, wherein the enlarged portion has a sealing surface, A shaft portion extending from the enlarged portion to the second end, Multiple protrusions extending from the aforementioned shaft portion, A magnet placed within the cavity, A closing member characterized by comprising:

[0215] (Exemplary claim 74) A closing member according to exemplary claim 73, wherein each of the plurality of protrusions has an arc-shaped outer portion.

[0216] (Exemplary Claim 75) A closing member according to exemplary Claim 74, characterized in that the plurality of protrusions form a part of the first annular ring and the second annular ring.

[0217] (Example Claim 76) A closing member according to any one of the example claims 73 to 75, characterized in that the cavity is formed in the enlarged portion of the main body.

[0218] (Example Claim 77) A closing member according to any one of the exemplary claims 73 to 76, wherein adjacent protrusions among the plurality of protrusions are separated from each other by a gap.

[0219] (Exemplary Claim 78) A closing member according to any one of exemplary claims 73 to 77, wherein a plurality of projections collectively define an outer diameter that is larger than the outer diameter of the enlarged portion.

[0220] (Example Claim 79) A closing member according to any one of the exemplary claims 73 to 78, characterized in that the enlarged portion has a recess and the sealing surface surrounds the recess.

[0221] (Example Claim 80) A closing member according to any one of the example claims 73 to 79, characterized in that the cavity is formed in the recess and extends to the shaft portion.

[0222] (Example Claim 81) A closing member according to the example claim 73, characterized in that the plurality of protrusions are fins.

[0223] (Example Claim 82) A closing member according to the example claim 81, wherein the plurality of protrusions are elongated in line with the vertical axis.

[0224] (Exemplary claim 83) A closing member according to exemplary claim 81 or exemplary claim 82, characterized in that the plurality of protrusions extend from the enlarged portion of the main body.

[0225] (Exemplary claim 84) A closing member according to exemplary claim 81 or exemplary claim 82, characterized in that the plurality of protrusions are separated from the enlarged portion at a distance from each other.

[0226] (Exemplary Claim 85) A closing member according to any one of exemplary claims 81 to 84, wherein the plurality of protrusions collectively define an outer diameter equal to the outer diameter of the enlarged portion.

[0227] (Example claim 86) Closing member for a check valve, A main body extending along the vertical axis from the first end to the second end, The first portion of the body formed at the first end having a sealing surface, A plurality of protrusions extending along the vertical axis from the first portion, wherein the plurality of protrusions define a cavity, Magnets placed inside the cavity, A closing member characterized by comprising:

[0228] (Exemplary Claim 87) A closing member according to exemplary Claim 86, wherein the plurality of protrusions have a first outer diameter, the first portion has a second outer diameter, and the first outer diameter is larger than the second outer diameter.

[0229] (Exemplary claim 88) A closing member according to exemplary claim 86 or exemplary claim 87, wherein the plurality of protrusions define a cylinder as a whole.

[0230] (Example Claim 89) A closing member according to any one of the example claims 86 to 88, characterized in that the plurality of protrusions are elongated along the vertical axis.

[0231] (Exemplary Claim 90) A closing member according to any one of exemplary claims 86 to 89, characterized in that each of the plurality of protrusions is provided with a groove, and the groove is configured to engage with the protrusion of the magnet.

[0232] (Example Claim 91) A closing member according to any one of the example claims 86 to 90, characterized in that the cavity is open at the end of the main body.

[0233] (Exemplary Claim 92) A closing member according to any one of exemplary claims 86 to 91, wherein the cavity is open between the plurality of protrusions.

[0234] Although the present invention has been described in relation to specific examples, including currently preferred modes for carrying out the invention, those skilled in the art will understand that there are numerous variations and substitutions to the systems and techniques described above. It should be understood that other embodiments can be utilized and structural and functional modifications can be made without departing from the scope of the invention. Accordingly, the spirit and scope of the invention should be interpreted broadly as set out in the appended claims.

Claims

1. A fluid flow component, wherein the fluid flow component is It is a housing, The entrance and Exit and A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A closing member that is slidably movable within the cavity of the housing, wherein the closing member is configured to engage with the seat to prevent fluid from flowing in the reverse direction through the flow path, Equipped with, A fluid flow component characterized in that the closing member is biased by a magnetic field to contact the sheet.

2. A fluid flow component according to claim 1, characterized in that the magnetic field is configured to push away the closing member.

3. A fluid flow component according to claim 1 or claim 2, further comprising a first magnet, wherein the first magnet generates a first portion of the magnetic field.

4. A fluid flow component according to claim 3, characterized in that the first magnet is separated from the closing member at a distance.

5. A fluid flow component according to claim 3 or claim 4, characterized in that the closing member comprises a second magnet.

6. A fluid flow component according to claim 5, characterized in that the second magnet generates a second portion of the magnetic field.

7. A fluid flow component according to claim 6, characterized in that the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are separated from the second plurality of magnetic field lines by a distance.

8. A fluid flow component according to any one of claims 1 to 7, characterized in that the closing member comprises a cavity and the second magnet is located within the cavity of the closing member.

9. A fluid flow component according to claim 8, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

10. A fluid flow component according to any one of claims 1 to 9, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

11. A fluid flow component according to claim 10, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the vertical axis.

12. A fluid flow component according to claim 10 or claim 11, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the vertical axis.

13. A fluid flow component according to any one of claims 1 to 12, characterized in that the fluid flow component is not provided with a mechanical biasing element.

14. A fluid flow component according to any one of claims 1 to 13, characterized in that the sheet is concentric with respect to the vertical axis.

15. A fluid flow component according to any one of claims 1 to 14, characterized in that the closing member moves within the cavity of the housing in a direction parallel to the vertical axis.

16. A fluid flow component according to any one of claims 1 to 15, further comprising a stopper member, wherein the stopper member is aligned with the vertical axis.

17. A fluid flow component according to claim 16, wherein the stopper member comprises a first magnet.

18. A fluid flow component according to claim 16 or claim 17, characterized in that the stopper member is symmetrical with respect to the vertical axis.

19. A fluid flow component according to any one of claims 16 to 18, wherein the stopper member restricts the movement of the closing member along the vertical axis.

20. A fluid flow component according to any one of claims 16 to 19, characterized in that the stopper member is fixed to the housing.

21. A fluid flow component according to any one of claims 16 to 20, characterized in that the stopper member is formed by a part of the housing.

22. A fluid flow component according to any one of claims 1 to 15, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and the first pocket comprises a first magnet, the second pocket comprises a third magnet, and the third pocket comprises a fourth magnet.

23. A fluid flow component according to claim 22, wherein the closing member comprises a second magnet.

24. A fluid flow component according to claim 23, characterized in that each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

25. A fluid flow component according to any one of claims 22 to 24, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the vertical axis.

26. A system for processing articles, wherein the system is The system comprises a first fluid flow component, the fluid flow component is It is a housing, An inlet including a first port, wherein the first port is an inlet having a seal cavity, An outlet including a second port, wherein the second port is an outlet having a seal cavity, A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A closing member that is slidable within the cavity of the housing, wherein the closing member is configured to engage with the seat to prevent fluid from flowing in the reverse direction through the flow path, A second fluid flow component comprising a first port and a second port, wherein a flow path extends from the first port to the second port, and each of the first port and the second port comprises a seal cavity, Stickers and Equipped with, The system is characterized in that the second port of the second fluid flow component is aligned with the first port of the first fluid flow component, the seal is located in the seal cavity of the second port of the second fluid flow component and in the seal cavity of the first port of the first fluid flow component, and the closing member is biased by a magnetic field to contact the sheet.

27. The system according to claim 26, characterized in that the magnetic field is configured to push away the closing member.

28. A system according to claim 26 or claim 27, further comprising a first magnet, wherein the first magnet generates a first portion of the magnetic field.

29. The system according to claim 28, characterized in that the first magnet is separated from the closing member at a distance.

30. A system according to claim 28 or claim 29, characterized in that the closing member comprises a second magnet.

31. The system according to claim 30, characterized in that the second magnet generates the second portion of the magnetic field.

32. A system according to claim 31, characterized in that the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are separated from the second plurality of magnetic field lines by a distance.

33. A system according to any one of claims 26 to 32, characterized in that the closing member comprises a cavity and the second magnet is located within the cavity of the closing member.

34. The system according to claim 33, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

35. A system according to any one of claims 26 to 34, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

36. The system according to claim 35, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the vertical axis.

37. A system according to claim 35 or claim 36, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the vertical axis.

38. A system according to any one of claims 26 to 37, characterized in that the first fluid flow component is not provided with a mechanical biasing element.

39. A system according to any one of claims 26 to 38, characterized in that the sheet is concentric with respect to the vertical axis.

40. The system according to claim 39, characterized in that the closing member moves within the cavity of the housing in a direction parallel to the vertical axis.

41. A system according to any one of claims 26 to 15, wherein the first fluid flow component further comprises a stopper member, the stopper member being aligned with the vertical axis.

42. The system according to claim 41, wherein the stopper member comprises a first magnet.

43. A system according to claim 41 or claim 42, characterized in that the stopper member is symmetrical with respect to the vertical axis.

44. A system according to any one of claims 41 to 43, characterized in that the stopper member restricts the movement of the closing member along the vertical axis. [00186]

45. A system according to any one of claims 41 to 44, characterized in that the stopper member is fixed to the housing.

46. A system according to any one of claims 41 to 45, characterized in that the stopper member is formed by a part of the housing.

47. A system according to any one of claims 26 to 46, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and comprises a first magnet in the first pocket, a third magnet in the second pocket, and a fourth magnet in the third pocket.

48. The system according to claim 47, wherein the closing member comprises a second magnet.

49. The system according to claim 48, characterized in that each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

50. A system according to any one of claims 47 to 49, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the vertical axis.

51. A fluid flow component, wherein the fluid flow component is It is a housing, The entrance and Exit and A cavity, wherein the vertical axis extends along the cavity, The sheet in the cavity, A flow path extending from the inlet to the cavity, and from the cavity to the outlet, A housing equipped with, A stopper member equipped with a first magnet, A closing member that is slidable within the cavity of the housing, wherein the closing member comprises a second magnet and is configured to engage with the sheet to prevent fluid from flowing in the reverse direction through the flow path, A fluid flow component characterized in that the closing member is biased to contact the sheet by the magnetic field generated by the first magnet and the second magnet.

52. A fluid flow component according to claim 51, characterized in that the magnetic field is configured to push away the closing member.

53. A fluid flow component according to claim 51 or claim 52, wherein the first magnet generates a first portion of the magnetic field.

54. A fluid flow component according to any one of claims 51 to 53, characterized in that the first magnet is separated from the closing member at a distance.

55. A fluid flow component according to any one of claims 51 to 54, characterized in that the second magnet generates a second portion of the magnetic field.

56. A fluid flow component according to any one of claims 51 to 55, characterized in that the first portion of the magnetic field includes a first plurality of magnetic field lines, the second portion of the magnetic field includes a second plurality of magnetic field lines, and the first plurality of magnetic field lines are separated from the second plurality of magnetic field lines by a distance.

57. A fluid flow component according to any one of claims 51 to 57, characterized in that the closing member comprises a cavity and the second magnet is located within the cavity of the closing member.

58. A fluid flow component according to claim 57, wherein the closing member further comprises a sealing member that seals the cavity of the closing member.

59. A fluid flow component according to any one of claims 51 to 58, characterized in that the cavity of the housing has an inner surface, the closing member has a plurality of protrusions, and the plurality of protrusions engage with the inner surface.

60. A fluid flow component according to claim 59, characterized in that the inner surface of the cavity of the housing has a constant diameter with respect to the longitudinal axis.

61. A fluid flow component according to claim 59 or claim 60, characterized in that the plurality of protrusions prevent the closing member from moving laterally with respect to the vertical axis.

62. A fluid flow component according to any one of claims 51 to 61, characterized in that the fluid flow component is not provided with a mechanical biasing element.

63. A fluid flow component according to any one of claims 51 to 62, characterized in that the sheet is concentric with respect to the vertical axis.

64. A fluid flow component according to claim 63, characterized in that the closing member moves within the cavity of the housing in a direction parallel to the vertical axis. [00206]

65. A fluid flow component according to any one of claims 51 to 64, characterized in that the stopper member is aligned with the vertical axis.

66. A fluid flow component according to claim 65, characterized in that the stopper member is symmetrical with respect to the vertical axis.

67. A fluid flow component according to claim 65 or claim 66, characterized in that the stopper member restricts the movement of the closing member along the vertical axis.

68. A fluid flow component according to any one of claims 65 to 67, characterized in that the stopper member is fixed to the housing.

69. A fluid flow component according to any one of claims 65 to 68, characterized in that the stopper member is formed by a part of the housing.

70. A fluid flow component according to any one of claims 51 to 69, wherein the housing comprises a first pocket, a second pocket, and a third pocket, and the first pocket comprises a first magnet, the second pocket comprises a third magnet, and the third pocket comprises a fourth magnet.

71. A fluid flow component according to claim 70, characterized in that each of the first magnet, the second magnet, the third magnet, and the fourth magnet has a north pole and a south pole, and the south poles of each of the first magnet, the second magnet, the third magnet, and the fourth magnet have the same orientation with respect to the vertical axis.

72. A fluid flow component according to claim 70 or claim 71, characterized in that the first pocket, the second pocket, and the third pocket are arranged equidistant from the vertical axis.

73. A closing member for a check valve, A body extending along the vertical axis from a first end to a second end, wherein the body has a cavity formed therein, An enlarged portion formed at the first end of the main body, wherein the enlarged portion has a sealing surface, A shaft portion extending from the enlarged portion to the second end, Multiple protrusions extending from the aforementioned shaft portion, A magnet placed within the cavity, A closing member characterized by comprising:

74. A closing member according to claim 73, wherein each of the plurality of protrusions has an arc-shaped outer portion.

75. A closing member according to claim 74, characterized in that the plurality of protrusions form a part of the first annular ring and the second annular ring.

76. A closing member according to any one of claims 73 to 75, wherein the cavity is formed in the enlarged portion of the main body.

77. A closing member according to any one of claims 73 to 76, wherein adjacent protrusions among the plurality of protrusions are separated by a gap.

78. A closing member according to any one of claims 73 to 77, wherein the plurality of protrusions as a whole define an outer diameter that is larger than the outer diameter of the enlarged portion.

79. A closing member according to any one of claims 73 to 78, characterized in that the enlarged portion has a recess and the sealing surface surrounds the recess.

80. A closing member according to any one of claims 73 to 79, characterized in that the cavity is formed in the recess and extends to the shaft portion.

81. A closing member according to claim 73, characterized in that the plurality of protrusions are fins.

82. A closing member according to claim 81, characterized in that the plurality of protrusions are elongated in line with the vertical axis.

83. A closing member according to claim 81 or claim 82, characterized in that the plurality of protrusions extend from the enlarged portion of the main body.

84. A closing member according to claim 81 or claim 82, characterized in that the plurality of protrusions are separated from the enlarged portion at a distance from each other.

85. A closing member according to any one of claims 81 to 84, wherein the plurality of protrusions as a whole define an outer diameter equal to the outer diameter of the enlarged portion.

86. A closing member for a check valve, A main body extending along the vertical axis from the first end to the second end, The first portion of the main body formed at the first end having a sealing surface, A plurality of protrusions extending along the vertical axis from the first portion, wherein the plurality of protrusions define a cavity, Magnets placed inside the cavity, A closing member characterized by comprising:

87. A closing member according to claim 86, wherein the plurality of protrusions have a first outer diameter, the first portion has a second outer diameter, and the first outer diameter is larger than the second outer diameter.

88. A closing member according to claim 86 or claim 87, characterized in that the plurality of protrusions define a cylinder as a whole.

89. A closing member according to any one of claims 86 to 88, characterized in that the plurality of protrusions are elongated along the vertical axis.

90. A closing member according to any one of claims 86 to 89, characterized in that each of the plurality of protrusions is provided with a groove, and the groove is configured to engage with the protrusion of the magnet.

91. A closing member according to any one of claims 86 to 90, characterized in that the cavity is open at the end of the main body.

92. A closing member according to any one of claims 86 to 91, characterized in that the cavity is open between the plurality of protrusions.

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