Pump body heating control system and pump body heating control method

Abstract

This application discloses a pump body heating control system and a pump body heating control method, the pump body heating control system comprising: a heating module; a temperature collection module configured to collect the temperature of a vacuum pump; an environmental information collection module configured to collect environmental information within the vacuum pump; and a control module configured to control the heating module to heat the pump body of the vacuum pump based on the temperature collected by the temperature collection module and the environmental information collected by the environmental information collection module.

Description

Technical Field

[0001] "Cross - reference to Related Applications" This application claims the priority of the Chinese patent application with application number 202310390646.4, filed with the China National Intellectual Property Administration on April 13, 2023, and all the contents of the above application are incorporated herein by reference.

[0002] This application relates to the technical field of vacuum pumps, and particularly to a pump body heating control system and a pump body heating control method.

Background Art

[0003] In related technologies, in order to avoid the influence of gas condensation in the vacuum pump on the use of the vacuum pump, it is generally necessary to appropriately heat the vacuum pump during operation. Currently, heating control is generally performed based on the difference between the measured pump body temperature in real time and a unified predetermined temperature value. However, since the gas in the vacuum pump may be doped with impurities and the gas state may also be different, such a heating control method cannot achieve a good gas condensation prevention effect.

Summary of the Invention

Problems to be Solved by the Invention

[0004] This application provides a pump body heating control system and a pump body heating control method to solve the above technical problems.

Means for Solving the Problems

[0005] The present invention provides a pump body heating control system, comprising: a heating module; a temperature collection module configured to collect the temperature of a vacuum pump; an environmental information collection module configured to collect environmental information within the vacuum pump; and a control module connected to the temperature collection module, the environmental information collection module, and the heating module, and configured to control the heating module to heat the pump body of the vacuum pump based on the temperature collected by the temperature collection module and the environmental information collection module.

[0006] The present invention further provides a pump body heating control method, comprising the steps of: obtaining current environmental information inside a vacuum pump and the current temperature of the vacuum pump, wherein the current environmental information includes at least one of the gas type currently flowing inside the vacuum pump, the current pressure value inside the vacuum pump, and the gas flow rate per unit time inside the vacuum pump; determining a target temperature corresponding to the current environmental information based on the current environmental information; and controlling the heating of the pump body of the vacuum pump based on the difference between the current temperature and the target temperature. [Effects of the Invention]

[0007] The beneficial effects of this invention are as follows: By adding an environmental information collection module to the pump body heating control system and controlling the heating module so that the control module heats the vacuum pump based on the collected results from the temperature collection module and the environmental information collection module, the heating control can be made more precise, which helps to improve the effect of preventing gas condensation in the vacuum pump. [Brief explanation of the drawing]

[0008] [Figure 1] This is a structural block diagram of a pump body heating control system provided in one embodiment of the present invention. [Figure 2] Figure 1 is a structural block diagram of the heating module. [Figure 3]Figure 1 is a structural block diagram of the temperature collection module in the pump body heating control system. [Figure 4] This is a circuit diagram of a constant current source unit provided in one embodiment of the present invention. [Figure 5] This is a circuit diagram showing the connection between the pump body temperature sensor (or exhaust tail temperature sensor), the constant current source unit, and the signal processing unit in one embodiment of the present invention. [Figure 6] Figure 1 is a structural block diagram of the analog signal acquisition module. [Figure 7] Figure 1 is a structural block diagram of the environmental information collection module. [Figure 8] This is a circuit diagram of a signal adjustment unit provided in one embodiment of the present invention. [Figure 9] This is a flowchart of the pump body heating control method provided in one embodiment of the present invention. [Modes for carrying out the invention]

[0009] Referring to Figure 1, one embodiment of the present invention provides a pump body heating control system 10 configured to control the heating process of the pump body of a vacuum pump. The pump body heating control system 10 may include a heating module 11, a temperature collection module 13, an environmental information collection module 15, and a control module 17.

[0010] The heating module 11 is configured to be attached to the pump body of the vacuum pump in order to heat the pump body of the vacuum pump. Referring to Figure 2, the heating module 11 may include a heating plate 111 and heating blocks 113. There may be multiple heating blocks 113, and all of the heating blocks 113 may be provided on the heating plate 111. After the heating module 11 is attached to the pump body of the vacuum pump, the heating blocks 113 may be positioned between the heating plate and the pump body of the vacuum pump.

[0011] The temperature acquisition module 13 is configured to acquire the temperature of the vacuum pump.

[0012] Referring to Figure 3, the temperature acquisition module 13 may include a plurality of pump body temperature sensors 131 and one exhaust tail temperature sensor 132. In this case, the pump body heating control system 10 may further include an analog signal acquisition module 12 so that the data acquired by the temperature acquisition module 13 is identified and operated by the control module 17. The analog signal acquisition module 12 may be connected between the pump body temperature sensors 131 and the exhaust tail temperature sensor 132 and the control module 17.

[0013] Multiple pump body temperature sensors 131 may be distributed across the vacuum pump body, and the exhaust tail temperature sensor 132 may be installed in the vacuum pump exhaust pipe. With this setup, the vacuum pump temperature can be collected with relative accuracy.

[0014] The temperature measurement range of the pump body temperature sensor 131 and the exhaust tail temperature sensor 132 may be between 0°C and 175°C, and the temperature measurement accuracy is within ±1°C. This ensures that the temperature measurement requirements for the vacuum pump are met.

[0015] Both the pump body temperature sensor 131 and the exhaust tail temperature sensor 132 can employ thermal resistance temperature sensors. Platinum resistors have characteristics such as high accuracy, reliable performance, and excellent stability in thermal resistance, and the linear characteristics of the relationship curve between the relative rate of change of resistance and temperature of platinum resistors are remarkable. Therefore, in order to ensure the accuracy of temperature measurement, platinum resistors can be selected as the sensing elements for the pump body temperature sensor 131 and the exhaust tail temperature sensor 132.

[0016] For example, the pump body temperature sensor 131 and the exhaust tail temperature sensor 132 may both be PT100 or PT1000 temperature sensors.

[0017] Furthermore, considering that the self-heating of the resistor has an adverse effect on temperature measurement and in order to reduce the influence of this part, both the pump body temperature sensor 131 and the exhaust tail temperature sensor 132 may adopt PT100 temperature sensors.

[0018] In related technologies, when connecting a thermal resistor to a temperature measurement circuit, there are various wiring methods. Among them, three-wire wiring is common. However, after connecting the thermal resistor to the temperature measurement circuit by adopting three-wire wiring, the contact resistance of the adjustable resistor is connected to the resistance of the bridge arm, and furthermore, the zero point of the bridge may become unstable. To avoid this problem, the embodiments of the present application adopt four-wire wiring to connect the thermal resistor to the temperature measurement circuit.

[0019] In one embodiment, the temperature acquisition module 13 may further include a constant current source unit 133. The constant current source units 133 correspond one-to-one to the pump body temperature sensor 131 and the exhaust tail temperature sensor 132. Each constant current source unit 133 is connected between the corresponding pump body temperature sensor 131 or exhaust tail temperature sensor 132 and the analog signal acquisition module 12.

[0020] Since the self-heating effect of the thermal resistor has an adverse effect on temperature measurement, in order to reduce the influence of this part, it is necessary to ensure that the current flowing through the thermal resistor is as small as possible. However, if the current is too small, the temperature measurement is easily interfered by noise. To avoid the above problems, in the present application, the output current of the constant current source unit 133 is between 0.5 mA and 2 mA, for example, 1 mA.

[0021] Exemplarily, the constant current source unit 133 may be a constant current source formed by converting a constant voltage source chip TL431 by using current negative feedback, and its circuit diagram may be as shown in FIG. 4. The accuracy of the constant current source unit 133 is about 0.4%. The operational amplifier U4 in the constant current source unit 133 is configured to increase the load capacity of the current source. For the resistors R2, R3, R9, and R10 in the constant current source unit 133, resistors with an accuracy of 0.1% can be selected.

[0022] In one embodiment, the temperature acquisition module 13 may further include a signal cooking unit 134. The signal cooking unit 134 corresponds one-to-one with a constant current source unit 133. Each signal cooking unit 134 is connected between its corresponding constant current source unit 133 and the analog signal acquisition module 12.

[0023] Referring to Figure 5, as an example, a subtraction circuit can be constructed by using the outputs of two constant current source units 133 (in the figure, the signs of each element of the two constant current source units 133 are distinguished, and the circuit configurations of the two constant current source units 133 are substantially the same) as the differential inputs of the meter amplifier of the signal processing unit 134, thereby obtaining the voltage when the pump body temperature sensor 131 (or exhaust tail temperature sensor 132) changes within the range of 0°C to 175°C. Figure 5 shows the connection relationship between the pump body temperature sensor 131 (or exhaust tail temperature sensor 132), the constant current source unit 133, and the signal processing unit 134.

[0024] Referring to Figure 6, in one embodiment, the analog signal acquisition module 12 includes an analog signal multiplexer 121 and an analog signal collector 122. The analog signal multiplexer 121 is connected between the signal processing unit 134 and the analog signal collector 122, and the analog signal collector 122 is further connected to the control module 17.

[0025] The environmental information collection module 15 is configured to collect environmental information from within the vacuum pump.

[0026] The environmental information collection module 15 may be installed inside the vacuum pump.

[0027] The environmental information collection module 15 may include at least one of a gas type sensor, a gas flow rate sensor, and a pressure sensor. This allows the heating control of the pump body to take into account at least the gas composition, gas flow rate, or gas pressure inside the vacuum pump, thereby providing a certain degree of accuracy to the heating control and improving the effect of preventing gas condensation inside the vacuum pump.

[0028] Compared to voltage-type sensors, which output a voltage signal, current-type sensors, which output a current signal, have relatively strong interference resistance during the signal transmission process. Therefore, both gas flow sensors and pressure sensors may be current-type sensors. Furthermore, gas flow sensors and pressure sensors can be selected as current-type sensors with an output current of 4mA to 20mA.

[0029] Referring to Figure 7, in one embodiment, the environmental information acquisition module 15 may simultaneously include a gas type sensor, a gas flow sensor, and a pressure sensor. The analog signal acquisition module 12 may further be connected between the pressure sensor and the gas flow sensor and the control module 17. Specifically, the analog signal multiplexer 121 is connected between the pressure sensor and the gas flow sensor and the analog signal collector 122. The gas type sensor is connected to the control module 17. Exemplarily, the gas type sensor can transmit various types of gas detected via the I2C bus interface to the control module 17. The control module 17 identifies the gas type according to a predetermined communication protocol.

[0030] Furthermore, the environmental information acquisition module 15 may further include a signal adjustment unit 151. The signal adjustment unit 151 is provided in one-to-one correspondence with the pressure sensor and the gas flow sensor, and is connected between the corresponding sensor and the analog signal multiplexer 121 of the analog signal acquisition module 12. Exemplarily, the circuit structure of the signal adjustment unit 151 may be as shown in Figure 8, where the output signal of the pressure sensor (or gas flow sensor) is input to the signal adjustment unit 151 via the ANA IN port, and the signal adjustment unit 151 outputs the adjusted signal via the ANA OUT port.

[0031] The control module 17 is connected to the temperature acquisition module 13, the environmental information acquisition module 15, and the heating module 11, and is configured to control the heating module 11 to heat the pump body of the vacuum pump based on the temperature acquired by the temperature acquisition module 13 and the environmental information acquisition module 15.

[0032] Referring again to Figure 1, as can be seen, the pump body heating control system 10 may further include a human-computer interaction module 16. The human-computer interaction module 16 is connected to the control module 17. The human-computer interaction module 16 may include a display unit and an input unit. The user can see the temperature information collected by the temperature collection module 13 and the environmental information collected by the environmental information collection module through the display unit of the human-computer interaction module 16, and can set the temperature upper limit and other information for each temperature sensor in the temperature collection module 13 through the input unit of the human-computer interaction module 16.

[0033] In this embodiment, an environmental information collection module is added to the pump body heating control system, and the control module controls the heating module so that the vacuum pump is heated based on the collected results from the temperature collection module and the environmental information collection module. This allows for greater accuracy in heating control and helps to improve the effect of preventing gas condensation inside the vacuum pump.

[0034] Referring to Figure 9, based on the same inventive concept, the embodiment of the present application further provides a method for controlling the heating of a pump body. This method may be configured in the control module 17 of the aforementioned pump body heating control system 10.

[0035] In one embodiment, the method may include the following steps.

[0036] In step S11, the current environmental information inside the vacuum pump and the current temperature of the vacuum pump are obtained. The current environmental information includes at least one of the following: the type of gas currently flowing into the vacuum pump, the current pressure value inside the vacuum pump, and the gas flow rate per unit time inside the vacuum pump.

[0037] Specifically, the control module 17 can obtain current environmental information inside the vacuum pump from the environmental information collection module 15 and the current temperature of the vacuum pump from the temperature collection module 13.

[0038] In step S12, a target temperature corresponding to the current environmental information is determined based on the current environmental information.

[0039] In one embodiment, step S12 may include searching for a target temperature corresponding to the current environmental information from a pre-set correspondence table based on the current environmental information. The pre-set correspondence table may record various correspondences between environmental information and the controlled temperature. For example, the correspondence between the gas type in the vacuum pump and the controlled temperature, the correspondence between pressure and the controlled temperature, the correspondence between gas flow rate and the controlled temperature may be recorded, or the correspondence between both the gas type and pressure in the vacuum pump and the controlled temperature may be recorded, or the correspondence between both the gas type and gas flow rate in the vacuum pump and the controlled temperature may be recorded, or the correspondence between the three elements of the vacuum pump (gas type, pressure and gas flow rate) and the controlled temperature may be recorded, or all of the above-listed correspondences may be recorded. The controlled temperature corresponding to each piece of environmental information is the temperature necessary to obtain the optimal gas condensation prevention effect in the environment corresponding to that environmental information.

[0040] In step S13, the heating of the pump body of the vacuum pump is controlled based on the difference between the current temperature and the target temperature.

[0041] In one embodiment, step S13 may include starting the heating of the pump body if the current temperature is lower than the target temperature, and stopping the heating of the pump body when the temperature reaches the target temperature. Specifically, the heating module 11 is activated to heat the pump body of the vacuum pump when the current temperature is lower than the target temperature, and the heating module 11 is controlled to stop heating the pump body of the vacuum pump when the temperature reaches the target temperature. [Explanation of Symbols]

[0042] Pump body heating control system-10, heating module-11, temperature acquisition module-13, environmental information acquisition module-15, control module-17, heating plate-111, heating block-113, pump body temperature sensor-131, exhaust tail temperature sensor-132, constant current source unit-133, signal cooking unit-134, analog signal acquisition module-12, analog signal multiplexer-121, analog signal collector-122, signal adjustment unit-151, human-computer interaction module-16.

Claims

1. A pump body heating control system, Heating module and A temperature acquisition module configured to collect the temperature of a vacuum pump, An environmental information collection module configured to collect environmental information within the vacuum pump, A pump body heating control system, comprising: a temperature collection module, an environmental information collection module, and a heating module, the heating module and the heating module being connected to the heating module, and the heating module being configured to control the heating module to heat the pump body of the vacuum pump based on the temperature collected by the temperature collection module and the environmental information collection module.

2. The pump body heating control system according to claim 1, wherein the environmental information collection module includes at least one of a gas type sensor, a gas flow sensor, and a pressure sensor.

3. The pump body heating control system according to claim 2, wherein the environmental information collection module includes a gas type sensor, a gas flow sensor, and a pressure sensor, and the pump body heating control system further includes the pressure sensor, the gas flow sensor, and an analog signal collection module connected between the temperature collection module and the control module, and the gas type sensor is connected to the control module.

4. The pump body heating control system according to claim 3, wherein the temperature acquisition module includes a plurality of pump body temperature sensors and one exhaust tail temperature sensor, the pump body temperature sensors are distributed on the pump body of the vacuum pump and are all configured to be connected to the analog signal acquisition module, and the exhaust tail temperature sensor is provided on the exhaust pipe of the vacuum pump and is configured to be connected to the analog signal acquisition module.

5. The pump body heating control system according to claim 4, wherein both the pump body temperature sensor and the exhaust tail temperature sensor are PT100 temperature sensors.

6. The pump body heating control system according to claim 4, wherein the temperature acquisition module further includes a constant current source unit, the constant current source unit corresponds one-to-one with the pump body temperature sensor and the exhaust tail temperature sensor, and each constant current source unit is connected between the corresponding pump body temperature sensor or exhaust tail temperature sensor and the analog signal acquisition module.

7. The pump body heating control system according to claim 6, wherein the output current of the constant current source unit is between 0.5 mA and 2 mA.

8. The pump body heating control system according to claim 6, wherein the temperature acquisition module further includes a signal cooking unit, the signal cooking unit corresponds one-to-one with the constant current source unit, and each signal cooking unit is connected between the corresponding constant current source unit and the analog signal acquisition module.

9. The pump body heating control system according to claim 8, wherein the analog signal acquisition module includes an analog signal multiplexer and an analog signal collector, the analog signal multiplexer is connected between the signal cooking unit and the analog signal collector, and the analog signal collector is further connected to the control module.

10. A method for controlling the heating of the pump body, A step of obtaining current environmental information inside a vacuum pump and the current temperature of the vacuum pump, wherein the current environmental information includes at least one of the gas type currently flowing inside the vacuum pump, the current pressure value inside the vacuum pump, and the gas flow rate per unit time inside the vacuum pump. The steps include determining a target temperature corresponding to the current environmental information based on the current environmental information, A pump body heating control method comprising the step of controlling the heating of the pump body of the vacuum pump based on the difference between the current temperature and the target temperature.

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