MEMS resonator having in-phase and out-of-phase elements
The MEMS resonator design addresses low transduction efficiency and high ESR by mechanically connecting but electrically isolating in-phase and out-of-phase elements, using UHD doping and undoped silicon regions, improving Q factor and robustness.
JP2026518566APending Publication Date: 2026-06-09KYOCERA TECH OY
Patent Information
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- KYOCERA TECH OY
- Filing Date
- 2024-05-02
- Publication Date
- 2026-06-09
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Figure 2026518566000001_ABST
Abstract
The MEMS (Micro Electromechanical System) resonator (200) has in-phase resonant elements (101, 103) and out-of-phase resonant element (102) arranged in parallel with each other. The in-phase resonant elements (101, 103) and out-of-phase resonant element (102) are mechanically connected but electrically isolated.
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