Dust collector

Abstract

A dust collecting device is provided that improves the efficiency of removing harmful substances and reduces production costs. The device includes a particle separation component 1, an airflow output component 2, and a particle collection component 3. One side of the particle separation component extends outward to form a first gas input section 11, one end of the particle separation component extends outward to form a first gas output section 12, and the other end of the particle separation component extends outward to form a foreign matter export section 13. One side of the airflow output component extends outward to form an airflow inlet section, one end of the airflow output component extends outward to form a second gas output section 22, and the other end of the airflow output component extends outward to form a second gas input section 23, and the second gas output section 22 is connected to the first gas input section. The particle collection component is connected to the foreign matter export section.

Description

[Technical field]

[0001] The present invention relates to a dust collector, and more particularly to a dust collector that can capture harmful substances without the consumption of electricity or water. [Background technology]

[0002] In particulate dust waste treatment systems of high-tech manufacturing industries, fine dust needs to be collected in many waste air reduction processes. Fine dust in waste air is extremely fine solid particulate matter that remains suspended in the air for a long time. Particles with a diameter of more than 10 μm are classified as coarse particles, and this type of particulate matter is adsorbed by the nasal hairs and mucous membranes in the nasopharynx. Fine dust with a diameter of less than 10 μm (PM10) belongs to suspended particles, and once inhaled into the human body, it will reach deep into the lungs through the trachea and bronchi.

[0003] In current semiconductor manufacturing process equipment, fine dust particles are removed using local scrubbers. However, local scrubbers not only consume energy (i.e., they require a supply of electricity and water), but also have many internal parts and a complex structure, which means that maintenance costs are considerable. Summary of the Invention [Problem to be solved by the invention]

[0004] The technical problem that the present invention aims to solve is to provide a dust collecting device that addresses the shortcomings of the existing art. [Means for solving the problem]

[0005] In order to solve the above technical problems, one technical measure adopted by the present invention is to provide a dust collection device including at least one particle separation component, at least one airflow output component, and at least one particle collection component, wherein the at least one particle separation component has a body, one side of the body of the at least one particle separation component extends outward to form a first gas input portion, one end of the body of the at least one particle separation component extends outward to form a first gas output portion, and the other end of the body of the at least one particle separation component extends outward to form a foreign matter export portion, the first gas output portion is connected to a first external device, and the first gas input portion, the first gas output portion, and the foreign matter export portion are in communication with each other. At least one airflow output component has a body, one side of the body of the at least one airflow output component extends outward to form an airflow inlet, one end of the body of the at least one airflow output component extends outward to form a second gas output, and the other end of the body of the at least one airflow output component extends outward to form a second gas input. The airflow inlet is connected to an external air source device, the second gas output is connected to the first gas input, and the second gas input is connected to a second external device. The airflow inlet, the second gas output, and the second gas input are in communication with each other. At least one particle collection component is connected to the foreign matter export.

[0006] One beneficial effect of the present invention is that the dust collecting device provided by the present invention can improve the removal efficiency of harmful substances and reduce production costs through the above-mentioned technical means.

[0007] In order to make the characteristics and technical contents of the invention more readily apparent, reference is made to the following detailed description of the invention and the accompanying drawings, which are provided for reference and explanation only and are not intended to limit the scope of the invention. [Brief description of the drawings]

[0008] [Figure 1]1 is a schematic diagram showing a state in which a dust collecting device according to a first embodiment of the present invention is used; [Diagram 2] 1 is an exploded view of a dust collecting device according to a first embodiment of the present invention; [Diagram 3] 1 is a schematic diagram showing the structure of a particle separating component of a dust collecting device according to a first embodiment of the present invention; [Figure 4] 1 is an overhead view of a particle separating component of a dust collecting device according to a first embodiment of the present invention; [Diagram 5] 1 is a cross-sectional view of an airflow output part of a dust collecting device according to a first embodiment of the present invention; FIG. [Figure 6] FIG. 6 is an enlarged view of a portion VI in FIG. 5. [Figure 7] 1 is a schematic diagram showing a state in which a particle separating part of a dust collecting apparatus according to a first embodiment of the present invention is used; FIG. [Figure 8] FIG. 4 is a schematic diagram showing the structure of a dust collecting device according to a second embodiment of the present invention. [Figure 9] FIG. 4 is a schematic diagram showing the structure of a dust collecting device according to a third embodiment of the present invention. [Figure 10] FIG. 11 is a schematic diagram showing the structure of a dust collecting device according to a fourth embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The implementation of the "dust collecting device" of the present invention will be described below through specific embodiments. Those skilled in the art will be able to understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and each detail in this specification can be modified and changed in various ways based on different perspectives and applications without departing from the spirit of the present invention.

[0010] It should be understood that even if the terms "first", "second", "third" and the like are used in the text, these terms should not be used to limit the various elements. These terms are mainly used to distinguish one element from another. In addition, the term "or" used in the text should be understood to include any one or more combinations of the associated listed items according to the actual situation.

[0011] [First embodiment] Please refer to Figures 1 to 7, which show a schematic diagram of the dust collector of the first embodiment of the present invention in use, an exploded view, a schematic diagram of the structure of a particle separating part, an overhead view of the particle separating part, a cross-sectional view of an airflow output part, an enlarged view of part VI in Figure 5, and a schematic diagram of the particle separating part in use. As shown in the figures, the first embodiment of the present invention provides a dust collector Z, which includes at least one particle separating part 1, at least one airflow output part 2, and at least one particle collecting part 3.

[0012] As shown in FIG. 1 to FIG. 4 and FIG. 6, the particle separation component 1 may have a body 10, one side of the body 10 of the particle separation component 1 may extend outward to form a first gas input portion 11, one end of the body 10 of the particle separation component 1 may extend outward to form a first gas output portion 12, and the other end of the body 10 of the particle separation component 1 may extend outward to form a foreign matter export portion 13. The first gas output portion 12 may be detachably connected to a first external device E1 such as a turbo pump, a dry pump, or a central processing device (Central Scrubber; for example, a wet scrubber) of a semiconductor device, but is not limited thereto. The first gas input portion 11, the first gas output portion 12, and the foreign matter export portion 13 are in communication with each other. For example, the particle separation component 1 may have a hollow tubular structure, and the body 10 of the particle separation component 1 may have a hollow cavity portion. A first gas output 12 is provided at the top of the body 10 of the particle separation component 1, the first gas output 12 being of tubular structure and communicating with the inside of the body 10 of the particle separation component 1. A foreign matter export 13 is provided at the bottom of the body 10 of the particle separation component 1, the foreign matter export 13 being of tubular structure and communicating with the inside of the body 10 of the particle separation component 1. A first gas input 11 is provided at the side and near the top of the body 10 of the particle separation component 1, the first gas input 11 being of tubular structure and communicating with the inside of the body 10 of the particle separation component 1. The first gas input 11 is tangentially installed in the body 10 of the particle separation component 1 in a tangential manner. Furthermore, the body 10, the first gas input portion 11 and the first gas output portion 12 of the particle separation component 1 may be straight tubular, the foreign matter export portion 13 may be conical, and the diameter 12D of the first gas input portion 11 and the first gas output portion 12 is less than or equal to the diameter 10D of the body of the particle separation component 1. In an embodiment, the body 10, the first gas input portion 11, the first gas output portion 12 and the foreign matter export portion 13 of the particle separation component 1 may have an integrated structure.

[0013] Further, as shown in FIG. 3, the diameter 10D of the body 10 of the particle separation part 1 is defined as a predetermined value, the range of which is between 5 and 500, and more preferably 15 and 80. The unit is centimeters, but is not limited thereto. The diameter 11D of the first gas input part 11 and the diameter 12D of the first gas output part 12 are in the range of 0.01 to 1 times the predetermined value, and more preferably 0.5 times. That is, the diameters 11D and 12D are in the range of 9 to 220 centimeters, and more preferably 50 centimeters. The length 10L of the body of the particle separation part 1 and the length 13L of the foreign matter export part 13 are in the range of 0.5 to 4 times the predetermined value, and more preferably 2 times. The length 12L of the first gas output part 12 is in the range of 1 to 4.5 times the predetermined value, and more preferably 1.5 times. The predetermined distance 14L between the outer edge of the first gas input section 11 and the top edge of the body 10 of the particle separation component 1 is in the range of 0.1 to 0.5 times the predetermined value, and more preferably 0.125 times. It is noteworthy that when the structure of the body 10 and the foreign matter export section 13 of the particle separation component 1 is designed to be elongated, solid particles with smaller diameters are separated from the gas phase. For example, a gas containing fine particles of 2.5 μm or less can be separated. On the other hand, when the structure of the body 10 and the foreign matter export section 13 of the particle separation component 1 is designed to be short and thick, solid particles with larger diameters are separated from the gas phase. For example, a gas containing suspended particles with a diameter of 2.5 μm or more can be separated.

[0014] Furthermore, as shown in FIG. 3, one end of the foreign matter export part 13 is connected to the body 10 of the particle separation part 1, and the other end of the foreign matter export part 13 extends outward to form a protruding connection part 130. The protruding connection part 130 is connected to the particle collection part 3. The protruding connection part 130 can have a straight tube structure. The diameter 130D of the protruding connection part 130 is in the range of 0.1 to 0.5 times a predetermined value, and more preferably 0.25 times. The length 130L of the protruding connection part 130 is in the range of 0.1 to 0.5 times a predetermined value, and more preferably 0.125 times. In addition, one end of the first gas output part 12 is connected to the body 10 of the particle separation part 1, and the other end of the first gas output part 12 can extend toward the inside of the body 10 of the particle separation part 1 to form an extended lead-out part 120. The diameter of the extension lead-out portion 120 may be the same as the diameter 12D of the first gas output portion 12, and the length 120L of the extension lead-out portion 120 is in the range of 0.1 to 2.5 times a predetermined value, and more preferably 0.75 times.

[0015] 1, 2, 5 and 6, the airflow output part 2 has a main body 20, one side of the main body 20 extends outward to form an airflow inlet 21, one end of the main body 20 extends outward to form a second gas output 22, and the other end of the main body 20 extends outward to form a second gas input 23. The airflow inlet 21 can be detachably connected to an external air source device G (e.g., a supply device for semiconductor equipment that provides general air or special gas (e.g., inert gas)). The second gas output 22 is connected to the first gas input 11, and the second gas input 23 can be detachably connected to a second external device E2 (e.g., a turbo pump, a dry pump, or a central processing unit (Central Scrubber; e.g., a wet scrubber) for semiconductor equipment). The airflow introduction section 21, the second gas output section 22 and the second gas input section 23 are in communication with each other. For example, the body 20 of the airflow output part 2 can have a trapezoid (e.g., a trapezoid with rounded corners), a cone or other similar geometric shape. The body 20 of the airflow output part 2 has a cavity section 200 and a guide ear section 201. The cavity section 200 is a hollow structure, and one end of the cavity section 200 can extend outward to form the second gas output section 22. The cavity section 200 has a flat wall surface 200a and an arc-shaped wall surface 200b, and the flat wall surface 200a is connected to the arc-shaped wall surface 200b, and the arc-shaped wall surface 200b is connected to the inner wall surface of the second gas output section 22. The other end of the cavity section 200 can extend outward to form a first hook section 200c. The outer edge of the first hook portion 200c may include a first arc angle a1, a second arc angle a2, and a third arc angle a3. The first arc angle a1 is an R angle, and is in the range of 1.5 to 2.5 centimeters, and is more preferably 2 centimeters, but is not limited thereto. The second arc angle a2 is an R angle, and is in the range of 2 to 3 centimeters, and is more preferably 2.5 centimeters, but is not limited thereto. The third arc angle a3 is an R angle, and is in the range of 5 to 7 centimeters, and is more preferably 6.51 centimeters, but is not limited thereto.The guide ear portion 201 surrounds the side (i.e., outer edge, outer surface) of the cavity portion 200, the outer edge of the guide ear portion 201 extends outward to form the airflow inlet portion 21, one end of the guide ear portion 201 is connected to the cavity portion 200, the other end of the guide ear portion 201 extends in a rotating manner toward the cavity portion 200 to form a second hook portion 201a, and the second hook portion 201a extends outward to form a second gas input portion 23. A special flow path 2010 is defined between the guide ear portion 201 and the cavity portion 200 (i.e., inside the guide ear portion 201), and the special flow path 2010 communicates with the airflow inlet portion 21 and the inside of the cavity portion 200. The airflow inlet portion 21, the second gas output portion 22, and the second gas input portion 23 are tubular structures.

[0016] 5 and 6, the special flow path 2010 is divided into a guide area 2010a and a discharge area 2010b. The guide area 2010a is connected to the discharge area 2010b, and the cross section of the guide area 2010a is cone-shaped. There is a predetermined angle RA between the inner wall surface of the guide ear portion 201 and the outer wall surface of the cavity portion 200, and the predetermined angle RA is in the range of 8 to 30 degrees, and more preferably 8 degrees, 16 degrees, 19 degrees, and 26.5 degrees, but is not limited thereto. One end of the discharge area 2010b is connected to the guide area 2010a, and the other end of the guide area 2010a is connected to the inside of the cavity portion 200. The cross section of the discharge area 2010b is C-shaped or hook-shaped.

[0017] 1 and 2, the particle collection part 3 is connected to the foreign matter export part 13. For example, the particle collection part 3 is a collection bucket or a collection tank. One end of the particle collection part 3 extends outward to form a foreign matter import part 31, which is connected to the foreign matter export part 13. The diameter of the foreign matter import part 31 is the same as the diameter 130D of the protruding connection part 130.

[0018] Therefore, when the airflow introduction part 21 receives the driving airflow DA supplied from the external air source device G and the second gas input part 23 receives the harmful airflow HA supplied from the second external device E2, the at least one airflow output part 2 causes the harmful airflow HA to flow to the second gas output part 22 by the driving airflow DA. Here, when the first gas input part 11 receives the harmful airflow HA supplied from the second gas output part 22, the first gas input part 11 introduces the harmful airflow HA into the body of the at least one particle separation part 1 and causes the harmful airflow HA to flow in a spiral shape. Due to this flow, at least one harmful substance HS in the harmful airflow HA is separated from the harmful airflow HA, and a purified airflow PA is formed. The at least one particle separation part 1 transports the purified airflow PA to the first external device E1 through the first gas output part 12. The at least one particle separation component 1 collects the at least one harmful substance HS separated from the harmful airflow HA by the foreign matter export section 13 and transports it to the at least one particle collection component 3. When the airflow introduction section 21 receives the driving airflow DA, the guide ear section 201 introduces the driving airflow DA into the cavity section 200 through the special flow path 2010, and causes the harmful airflow HA to flow to the second gas output section 22. The second gas input section 23 is configured to introduce the harmful airflow HA into the cavity section 200 and increase the flow intensity of the harmful airflow HA by combining with the driving airflow DA.

[0019] For example, as shown in Fig. 1 to Fig. 7, the dust collector Z of the present invention can be applied to a semiconductor manufacturing apparatus and function as a highly efficient dust collector. Therefore, when the second external device E2 supplies the harmful airflow HA generated during the semiconductor manufacturing process to the dust collector Z, the dust collector Z can receive the driving airflow DA (e.g., an inert gas airflow) supplied from the external air source device G through the airflow inlet 21 of the airflow output part 2 and introduce it into the special flow path 2010. At this time, the airflow output part 2 makes the driving airflow DA flow in a spiral shape in the special flow path 2010 according to the structural design of the special flow path 2010, and makes it flow into the cavity part 200 through the discharge area 2010b. When the driving airflow DA flows into the cavity part 200, the driving airflow DA flows toward the cavity part 200 and the second gas output part 22 according to the structural design of the discharge area 2010b. At the same time, the driving airflow DA entrains the harmful airflow HA introduced from the second gas input port 23 and combines with the harmful airflow HA to form a strong and stable airflow, which flows toward the second gas output port 22. Finally, the harmful airflow HA combined with the driving airflow DA is transported to the particle separation component 1 through the second gas output port 22.

[0020] Next, the dust collector Z first guides the harmful airflow HA transported from the second gas output part 22 into the body 10 of the particle separating part 1 through the first gas input part 11 of the particle separating part 1. Due to the installation method and connection method of the first gas input part 11 and the body 10 of the particle separating part 1, as well as the structural design of the body 10 of the particle separating part 1, the harmful airflow HA can flow in a spiral shape when it enters the body 10 of the particle separating part 1. During the flow process of the harmful airflow HA, the harmful substances HS contained in the harmful airflow HA fall to the bottom of the body 10 of the particle separating part 1 (i.e., in the direction of the foreign matter export part 13) and are separated from the harmful airflow HA. Then, the particle separating part 1 collects the harmful substances HS separated through the foreign matter export part 13 and transports them to the inside of the body 30 of the particle collecting part 3 through the foreign matter import part 31. The harmful airflow HA becomes a purified airflow PA due to the separation of the harmful substances HS, and moves and flows toward the first gas output part 12.

[0021] Finally, the purified airflow PA is exported through a first gas output 12 to a first external device E1.

[0022] As a result, the dust collector Z of the present invention uses the above-mentioned technical means to first utilize the structural design of the airflow output component 2, and use the airflow (active airflow) supplied from the external air source device G to improve the airflow force of the harmful airflow HA, and then supply it to the particle separation component 1. The particle separation component 1 then captures large and small dust particles in the harmful airflow HA, improving the efficiency of removing harmful substances. This solves the problem of clogged pipes in semiconductor manufacturing equipment, eliminates the need to supply additional electricity and water, and in the future, eliminates the need to add heater tape to the pipes.

[0023] [Second embodiment] Please refer to Figure 8. This is a structural schematic diagram of a dust collecting device according to a second embodiment of the present invention, and please also refer to Figures 1 to 7. The difference between this embodiment and the above-mentioned first embodiment is that in this embodiment, multiple airflow output parts 2 can be installed in the dust collecting device Z of the present invention. In this embodiment, two airflow output parts 2 are exemplified, but are not limited thereto.

[0024] For example, the dust collector Z of the present invention can greatly improve the airflow force (transmission power) of the harmful airflow HA by installing multiple airflow output parts 2 and combining each airflow output part 2 with an external air source device G. Therefore, when the distance (or piping) between the second external device E2 and the particle separation part 1 is too long, or when the distance (or piping) between the airflow output part 2 and the particle separation part 1 is too long, one or more airflow output parts 2 can be installed between the second external device E2 and the particle separation part 1, or between the airflow output part 2 and the particle separation part 1, to prevent the airflow force of the harmful airflow HA from being reduced or slowed down, and prevent the harmful substance removal efficiency of the particle separation part 1 from being reduced.

[0025] [Third embodiment] Please refer to Figure 9. This is a structural schematic diagram of a dust collector according to a third embodiment of the present invention, and please also refer to Figures 1 to 8. The difference between this embodiment and the previous embodiments is that in this embodiment, multiple particle separating elements 1 can be installed in the dust collector Z of the present invention. In this embodiment, two particle separating elements 1 are exemplified, but are not limited thereto.

[0026] For example, the dust collector Z of the present invention can further install one or more particle separation parts 1 between the particle separation part 1 and the first external device E1, and the structural design of the body 10 of each particle separation part 1 can be different (as in the above-mentioned first embodiment) to improve the removal efficiency of multiple harmful substances. Furthermore, when the harmful airflow HA contains harmful substance particles of different sizes, after the airflow output part 2 transports the harmful airflow HA to the particle separation part 1, the dust collector Z of the present invention first removes harmful substances with large particle sizes from the harmful airflow HA using the first particle separation part 1. Then, the first particle separation part 1 transports the harmful airflow HA from which the harmful substances with large particle sizes have been removed to the second particle separation part 1 through the first gas output part 12, and at this time, the dust collector Z of the present invention can remove harmful substances with small particle sizes from the harmful airflow HA using the second particle separation part 1.

[0027] However, the dust collector Z of the present invention is not limited to the above-mentioned implementation method. In actual implementation, the dust collector Z of the present invention can also first use the first particle separation component 1 to remove harmful substances with small particle diameters from the harmful airflow HA, and then use the second particle separation component 1 to remove harmful substances with large particle diameters from the harmful airflow HA.

[0028] [Fourth embodiment] Please refer to Fig. 10. This is a structural schematic diagram of a dust collector according to a fourth embodiment of the present invention, and please also refer to Figs. 1 to 9. The difference between this embodiment and the previous embodiments is that this embodiment can be equipped with multiple dust collectors Z. This embodiment illustrates two dust collectors Z, but is not limited thereto.

[0029] For example, the present invention can improve the removal efficiency of multiple harmful substances and prevent the reduction of the airflow force (transmission power) of the harmful airflow HA by installing multiple dust collectors Z between the first external device E1 and the second external device E2. Furthermore, by making the structural design of the body 10 of the particle separation part 1 of each dust collector Z different (as in the above-mentioned first embodiment), when the harmful airflow HA contains harmful substance particles of different sizes, the airflow output part 2 of the first dust collector Z transports the harmful airflow HA to the particle separation part 1, and then uses the first particle separation part 1 to remove large particles of harmful substances from the harmful airflow HA. Then, the first particle separation part 1 transports the harmful airflow HA from which the large particles of harmful substances have been removed to the airflow output part 2 of the next dust collector Z through the first gas output part 12. At this time, the airflow output part 2 transports the harmful airflow HA to the next particle separation part 1, and uses the next particle separation part 1 to remove small particles of harmful substances from the harmful airflow HA. In this embodiment, the airflow output part 2 is installed between the two particle separation parts 1, which prevents the airflow force of the harmful airflow HA from decreasing or slowing down, and prevents the harmful substance removal efficiency of the particle separation part 1 from decreasing.

[0030] However, the above example is merely one embodiment of the present invention and is not intended to limit the present invention.

[0031] [Beneficial effects of the invention] One of the beneficial effects of the present invention is that the dust collecting device Z provided by the present invention can improve the removal efficiency of harmful substances through the above-mentioned technical solution and reduce production costs.

[0032] Furthermore, the dust collector Z of the present invention uses the above-mentioned technical solution, and utilizes the driving airflow provided by the external device, and does not require the installation of a gas-driven device that consumes additional energy, so no additional power supply is required, and no water resource is consumed. In addition, the dust collector Z of the present invention adopts a simple structural design, which not only effectively improves the efficiency of removing harmful substances, but also greatly reduces the costs and expenses in the maintenance and management of the equipment. In addition, it can solve the problem of pipe clogging in semiconductor manufacturing equipment, and in the future, heat belts will no longer be required for pipes.

[0033] Furthermore, the dust collector Z of the present invention can greatly improve the airflow force (transmission power) of the harmful airflow HA by installing multiple airflow output parts 2. Also, by installing multiple particle separation parts 1 with different structural designs, it is possible to improve the removal efficiency of various harmful substances. Furthermore, by installing multiple dust collectors Z, it is possible to increase the removal efficiency of various harmful substances and prevent a decrease in the airflow force (transmission power) of the harmful airflow HA.

[0034] The above disclosure is merely a preferred embodiment of the present invention, and does not limit the scope of the utility model registration claims of the present invention. Therefore, all equivalent technical modifications made based on the contents of the specification and accompanying drawings of the present invention shall be included in the scope of the utility model registration claims of the present invention. [Explanation of symbols]

[0035] Z dust collector 1 Particle separation part 10. Main Unit 10D diameter 10L Length 11 First gas input section 11D diameter 12 First gas output section 12D diameter 12L Length 120 Extension lead-out part 120L Length 13 Foreign Body Export Department 13L Length 130 Protruding connection part 130D diameter 130L Length 14L specified distance 2 Airflow output parts 20 Main unit 200 Cavity 200a Flat wall 200b Arc Wall 200c First hook part a1 First arc angle a2 Second arc angle a3 Third arc angle 201 Guide Ear Section 201a Second hook part 2010 Special flow path 2010a Guidance Area 2010b Discharge Area 21 Air flow inlet 22 Second gas output section 23 Second gas input 3 Particle collection parts 30 Main unit 31 Foreign body import section DA Driven Airflow E1 First external device E2 Second external device G External air supply device HA Harmful Air Flow HS Hazardous Substances PA Purified Airflow RA Predetermined angle

Claims

1. 1. A dust collection device comprising at least one particle separation component, at least one airflow output component, and at least one particle collection component, the at least one particle separation component has a body, one side of the body of the at least one particle separation component extends outwardly to form a first gas input, one end of the body of the at least one particle separation component extends outwardly to form a first gas output, and the other end of the body of the at least one particle separation component extends outwardly to form a foreign matter export, the first gas output is connected to a first external device, and the first gas input, the first gas output, and the foreign matter export are in communication with each other; the at least one airflow output component has a body, one side of the body of the at least one airflow output component extends outward to form an airflow inlet, one end of the body of the at least one airflow output component extends outward to form a second gas output, and the other end of the body of the at least one airflow output component extends outward to form a second gas input, the airflow inlet is connected to an external air source device, the second gas output is connected to the first gas input, and the second gas input is connected to a second external device, the airflow inlet, the second gas output and the second gas input are in communication with each other, The at least one particle collection component is connected to the foreign object export portion. A dust collecting device characterized by:

2. 2. The dust collection device of claim 1, wherein when the airflow introduction section receives a driving airflow supplied from the external air source device and the second gas input section receives a harmful airflow supplied from the second external device, the at least one airflow output component is driven by the driving airflow to cause the harmful airflow to flow toward the second gas input section, and when the first gas input section receives the harmful airflow supplied from the second gas input section, the first gas input section introduces the harmful airflow into a body of the at least one particle separation component and drives the harmful airflow to flow in a vortex shape, thereby separating at least one harmful substance in the harmful airflow from the harmful airflow to form a purified airflow, the at least one particle separation component sends the purified airflow to the first external device via the first gas input section, and the at least one particle separation component collects the at least one harmful substance separated from the harmful airflow via the foreign matter export section and sends the at least one harmful substance to the at least one particle collection component.

3. the body of the at least one airflow output component has a cavity portion and a guide ear portion, one end of the cavity portion extends outward to form a second gas output portion, the other end of the cavity portion extends outward to form a first hook portion, the guide ear portion surrounds a side of the cavity portion, and an outer edge of the guide ear portion extends outward to form the airflow introduction portion, one end of the guide ear portion is connected to the cavity portion, and the other end of the guide ear portion extends into the cavity portion in a swiveling manner to form a second hook portion, and the second hook portion extends outward to form the second gas input portion; A special flow path is defined between the guide ear portion and the cavity portion, and the special flow path is connected to the airflow introduction portion and the inside of the cavity portion; The special flow path is divided into a guide area and a discharge area, the guide area is connected to the discharge area, the cross section of the guide area is cone-shaped, and the cross section of the discharge area is C-shaped or hook-shaped; When the airflow introduction section receives the driving airflow, the guide ear section introduces the driving airflow into the cavity section through the special flow path, and drives the harmful airflow to flow toward the second gas output section; the second gas input section is arranged to introduce the harmful airflow into the cavity section and combine with the driving airflow to increase the flow intensity of the harmful airflow; The dust collection device of claim 2 , wherein one end of the at least one particle collection component extends outward to form the foreign matter import portion, the foreign matter import portion being connected to the foreign matter export portion.

4. the body of the at least one particle separation component, the first gas input and the first gas output are straight tubular, the foreign matter export section is conical, and the diameters of the first gas input and the first gas output are equal to or less than the diameter of the body of the at least one particle separation component; a diameter of the body of the at least one particle separation component is defined by a predetermined value, a diameter of the first gas input section and a diameter of the first gas output section are 0.01 to 1 times the predetermined value, a length of the body of the at least one particle separation component and a length of the foreign matter export section are 0.5 to 4 times the predetermined value, and a length of the first gas output section is 1 to 4.5 times the predetermined value; One end of the foreign matter export part is connected to the body of the at least one particle separation component, and the other end of the foreign matter export part extends outward to form a protruding connection part, and the protruding connection part is connected to the at least one particle collection component, the diameter of the protruding connection part is 0.1 to 0.5 times the predetermined value, and the length of the protruding connection part is 0.1 to 0.5 times the predetermined value; 2. The dust collection apparatus of claim 1, wherein one end of the first gas output is connected to a body of the at least one particle separation component and the other end of the first gas output extends into the interior of the at least one particle separation component to form an extended outlet, a diameter of the extended outlet being equal to a diameter of the first gas output, and a length of the extended outlet being 0.1 to 2.5 times the predetermined value.

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