Probe holder having a support structure, a probe head, a probe card, and a probe system

Abstract

A probe holder having excellent structural strength and being resistant to deformation due to stress is provided. [Solution] The probe holder 24 comprises upper and lower guide plate units 30, 40, one support structure 50, and one accommodation space 241. The upper guide plate unit has a plurality of upper through holes 35 penetrating its upper side and lower side. The lower guide plate unit has a plurality of lower through holes 45 penetrating its upper side and lower side. The support structure includes a plurality of support columns provided between the upper and lower guide plate units. The accommodation space is formed around the support columns and is located between the upper and lower guide plate units, so that the plurality of probes 25 respectively pass through the upper through holes, the accommodation space, and the lower through holes. The plurality of support columns include a plurality of upper support columns protruding from the lower side 34 of the upper guide plate unit and a plurality of lower support columns protruding from the upper side 43 of the lower guide plate unit. The upper support columns and the lower support columns contact each other.

Description

[Technical field]

[0001] The present invention relates to a probe holder for a probe card, and in particular to a probe holder having a support structure, as well as a probe head, a probe card, and a probe system including the probe holder. [Background technology]

[0002] Generally, a vertical probe head basically includes a number of probes held by at least a pair of flat or substantially parallel flat guide members (or called guide plates). These guide members are provided with specific holes that are a certain distance apart from each other so that a free space or air gap (hereinafter referred to as the accommodation space) remains for the probes to be able to move and deform. The pair of guide members includes one upper guide member and one lower guide member, each of which is provided with a respective guide hole. The probes slide axially through the guide holes. The probes are made of special alloy fine wires with good electrical and mechanical properties. A good connection between the probes and the contact pads of the device under test is ensured by pressing the probe head against the device itself. During the pressure and contact, the probes, which are slidably arranged inside the guide holes of the upper and lower guide members, are bent in the air gap between the two guide members and slide inside the guide holes. Also, the bending of the probes in the air gap can be assisted by a suitable positioning of the probes themselves (i.e., the probes may have a pre-deformed configuration, commonly called cobra needles) or by a suitable positioning of their guide members. As shown in Fig. 15, for the sake of simplicity, only a portion of the multiple probes generally included in one probe head is illustrated in Fig. 15. The probe head is a so-called offset plane type.

[0003] As shown in FIG. 15, a conventional probe card 10 mainly includes a main circuit board 11 and a probe head 13 that is directly connected to the main circuit board 11 or indirectly connected to the main circuit board 11 via a space transformer 12. Specifically, as shown in FIG. 15, the probe head 13 includes at least one upper plate or guide member (hereinafter referred to as upper guide plate 14) and at least one lower plate or guide member (hereinafter referred to as lower guide plate 15), which respectively have upper guide holes 142 and lower guide holes 152, in which at least one probe 16 slides. Alternatively, the probe head 13 further includes one middle plate or guide member (hereinafter referred to as middle guide plate 14). The probe 16 has at least one contact end or tip (hereinafter referred to as contact tip 162). The term "end" or "tip" describes an end and is not necessarily sharp. In particular, the contact tip 162 abuts against the contact pad 182 of the device under test (hereinafter referred to as the device under test 18) to generate electrical and mechanical contact between the device under test 18 and one test device (not shown), and the probe head 13 forms the terminal element. The large-area probe card is mainly used to simultaneously inspect and measure a plurality of devices under test 18, thereby increasing the efficiency of the inspection and measurement and reducing the cost of the inspection and measurement. For this reason, the large-area probe card requires a large-area probe holder (including upper and lower guide plates 14, 15, or upper, middle and lower guide plates 14, 17 and 15) to provide a plurality of probes 16 corresponding to a plurality of devices under test 18 penetrating the device.

[0004] However, regardless of whether the probe holder is composed of upper and lower guide plates 14 and 15, or upper, middle and lower guide plates 14, 17 and 15, the central block of the probe holder (arrangement area of ​​the probes 16) has an accommodation space 19 located between the upper and lower guide plates 14 and 15. The accommodation space 19 may be formed by a hollow middle guide plate 17 as shown in FIG. 15, or may be formed by a combination of a groove at the bottom of the upper guide plate and a groove at the top of the lower guide plate when there is no middle guide plate. The accommodation space 19 is used to accommodate the probe bodies 164 of all the probes 16, allows the deformation of the probes 16 and ensures that the contact tips 162 and heads 166 of the probes 16 contact the contact pads of the object to be measured 18 and the space transformer 12, respectively. Therefore, a probe holder with a large area requires an accommodation space 19 with a large area. In other words, since the span between the portions of the upper and lower guide plates 14, 15 where they are supported by each other, or where the upper and lower guide plates 14, 15 are supported by the intermediate guide plate 17, is large, the strength of the central block structure of the probe holder is weak, and the upper and lower guide plates 14, 15 are easily deformed by external forces pushing inward or pulling outward. Summary of the Invention [Problem to be solved by the invention]

[0005] The present invention has been made in consideration of the above-mentioned problems, and has an object to provide a probe holder having a support structure that has excellent structural strength and is less likely to be deformed by external forces. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, the probe holder with support structure according to the present invention comprises two guide plate units, one support structure, and one accommodating space. The two guide plate units include one upper guide plate unit and one lower guide plate unit. The upper guide plate unit includes one upper side and one lower side, and has a plurality of upper through holes passing through the upper side and the lower side of the upper guide plate unit. The lower guide plate unit includes one upper side and one lower side, and has a plurality of lower through holes passing through the upper side and the lower side of the lower guide plate unit. The support structure includes a plurality of support pillars disposed between the upper guide plate unit and the lower guide plate unit. The accommodating space is formed around the plurality of support pillars and is located between the upper guide plate unit and the lower guide plate unit, such that a plurality of probes pass through the upper through holes, the accommodating space, and the lower through holes, respectively. The multiple support pillars include multiple upper support pillars and multiple lower support pillars, wherein the multiple upper support pillars protrude from the lower side of the upper guide plate unit and the multiple lower support pillars protrude from the upper side of the lower guide plate unit, and the multiple upper support pillars and the multiple lower support pillars contact each other.

[0007] As a result, the probe holder according to the present invention can be provided with an intermediate guide plate, and an accommodation space for accommodating a probe can be formed in the intermediate guide plate. Alternatively, the intermediate guide plate can be omitted, and the upper and lower guide plate units can be directly connected to each other to jointly form an accommodation space for accommodating a probe. The upper and lower support columns are disposed in the accommodation space at a location where no probe is provided. The upper and lower support columns protrude from the upper and lower guide plate units, respectively, and contact each other. Such upper and lower support columns strengthen the structural strength of the upper and lower guide plate units, respectively. In addition, when the upper and lower guide plate units are connected to each other, the upper and lower support columns reinforce the location where the structural strength is weakened due to the formation of the accommodation space in the center of the probe holder. Therefore, even if the probe holder has a large area, it has excellent structural strength and is not easily deformed by stress. Therefore, deformation of the lower guide plate unit caused by the reaction force generated by the object to be measured during testing is reduced.

[0008] Preferably, the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are each defined as a supported surface, and at least some of the support columns of the support structure extend integrally from the supported surface on which they are located.

[0009] As a result, the upper support column is integrally connected to the guide plate of the upper guide plate unit, and the lower support column is integrally connected to the guide plate of the lower guide plate unit. This configuration is simple and advantageous for assembly and manufacturing, and can further increase the structural strength of the upper and lower guide plate units themselves.

[0010] Preferably, at least some of the support columns of the support structure are detachably mounted on the guide plate unit in which they are located.

[0011] Thus, when it is difficult to process the support pillar integral with the guide plate or according to other needs, the support pillar can be an element not integral with the guide plate and assembled to the guide plate unit. The probe holder of the present invention can also include both the integral support pillar and the non-integral support pillar at the same time, and can be installed according to needs.

[0012] Preferably, one of the upper support pillar and the lower support pillar that are in contact with each other is a pillar and the other is a bolt. The pillar and the bolt are provided to penetrate the two guide plate units, a screw hole is formed in the pillar, and the bolt is screwed into the screw hole of the pillar.

[0013] As a result, the upper and lower support columns are directly screwed together to connect. In this way, the structure is simple, easy to manufacture or assemble, and a reliable connection effect is obtained. It is not only able to resist an external force pushing inwards, but also an external force pulling outwards, so it has an excellent effect of preventing deformation of the guide plate unit.

[0014] Preferably, the pillar includes an extension portion protruding from one of the upper side surface of the upper guide plate unit and the lower side surface of the lower guide plate unit, the extension portion being adapted to abut a reinforcing member.

[0015] Thus, the reinforcing member may be another element of the probe card. For example, the reinforcing member may be another element provided on the space transformer, and the extension of the column passes through the space transformer and is inserted into the other element so as to abut thereon. This can further enhance the structural strength of the probe holder, and the extension of the column can be fixed to the reinforcing member by another bolt, so that the column can be fixed more firmly.

[0016] Preferably, each of the plurality of support columns has one end surface, and the upper support column and the lower support column that are in contact with each other abut against each other at their end surfaces.

[0017] Therefore, the structure of the upper and lower support columns is simple and easy to manufacture or assemble. Also, by abutting the end faces of the upper and lower support columns against each other, the probe holder has high rigidity to withstand being pressed inward, and can resist an external force pressing inward, preventing the guide plate unit from being deformed by stress.

[0018] Preferably, the upper and lower support posts which contact each other are bonded and fixed to each other.

[0019] In this way, before the end faces of the upper and lower support columns come into contact with each other, adhesive is applied to at least one of the end faces, so that the end faces of the upper and lower support columns come into contact with each other and are adhesively fixed to each other. This fixing method is simple and strong, so it is possible to further increase the rigidity to withstand pushing and pulling, and it is possible to withstand an external force pushing inward and an external force pulling outward, preventing the guide plate unit from being deformed by stress.

[0020] Preferably, the upper support pillar and the lower support pillar which are in contact with each other are fixed to each other by bolts.

[0021] As a result, the upper and lower support columns have their end faces abutting against each other, increasing their rigidity to withstand pushing, and can withstand external forces pushing inwards. Also, the upper and lower support columns are locked together by additional bolts, increasing their rigidity to withstand pulling, and can withstand external forces pulling outwards. This provides an excellent effect in preventing deformation of the guide plate unit.

[0022] Preferably, the distance between the end face of the upper support pillar and the lower side of the upper guide plate unit is smaller than the distance between the end face of the lower support pillar and the upper side of the lower guide plate unit, and the bolt passes through the upper support pillar and is screwed into the lower support pillar.

[0023] As a result, the bolt locks from the top down, threading through the upper support column and then screwing into the lower support column. This type of locking method allows the bolt head to face the object being measured, preventing the bolt from affecting the object due to loosening. Also, since the length of the lower support column is longer than that of the upper support column, providing a screw hole of sufficient length in the lower support column allows the bolt to be reliably locked.

[0024] Preferably, of the upper support pillar and the lower support pillar which are in contact with each other, one has a protruding block located on the end surface, and the other has a groove located on the end surface, the protruding block and the groove being fitted together.

[0025] As a result, the upper and lower support columns can increase the rigidity to withstand pushing by abutting the end faces with each other, and can withstand an external force pushing inward. In addition, the upper and lower support columns can be fitted to each other by the concave-convex structure, and the rigidity to withstand pushing and pulling can be further increased, and can withstand an external force pushing inward and an external force pulling outward, so that the guide plate unit does not deform due to stress. Before the protruding block and the groove are fitted together, an adhesive is applied to at least one of the protruding block and the groove, so that the protruding block and the groove are fitted together and bonded to each other. This fixing effect is even stronger, so the rigidity to withstand pushing and the rigidity to withstand pulling can be further increased. In addition, there is an effect that alignment and / or positioning is easy during the assembly process.

[0026] Preferably, the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are defined as supported surfaces, and the plurality of support columns include at least one independent support column, which is provided to penetrate one of the upper guide plate unit and the lower guide plate unit and is in contact with the supported surface of the other of the upper guide plate unit and the lower guide plate unit.

[0027] As a result, the center of the probe holder has a weak structural strength due to the storage space provided therein. In addition to the reinforcement provided by the upper and lower support columns described above, it is possible to further reinforce the probe holder by separately installing a separate support column. In particular, the support column can be installed in locations where it is difficult to install a support column integral with the guide plate or where a lock bolt cannot be installed, and the structure of these locations can also be reinforced.

[0028] Preferably, the single support post includes an extension portion protruding from one of the upper side surface of the upper guide plate unit and the lower side surface of the lower guide plate unit, the extension portion being adapted to abut against a reinforcing member.

[0029] Thus, the reinforcing member may be another element of the probe card. For example, the reinforcing member may be another element provided on the space transformer, and the extension of the single support rod passes through the space transformer and is inserted into and abuts against the other element. This can further enhance the structural strength of the probe holder, and the extension of the single support rod can be fixed to the reinforcing member by a bolt, so that the single support rod can be fixed more firmly.

[0030] Preferably, the upper guide plate unit has a connection surface and an upper groove recessed from the connection surface of the upper guide plate unit, and the lower side of the upper guide plate unit is located in the upper groove. The lower guide plate unit has a connection surface and a lower groove recessed from the connection surface of the lower guide plate unit, and the upper side of the lower guide plate unit is located in the lower groove. The connection surface of the upper guide plate unit and the connection surface of the lower guide plate unit are connected to each other, and the upper groove and the lower groove form the accommodating space.

[0031] As a result, the probe holder does not have an intermediate guide plate installed, and the upper and lower guide plate units are directly connected, and the upper and lower grooves of the upper and lower guide plate units jointly form an accommodation space used to accommodate the probe. The upper and lower support columns are arranged in the accommodation space at locations where the probe is not installed. Thus, the upper and lower support columns are located in the upper and lower grooves. This configuration is simple, advantageous for assembly and manufacturing, and has excellent structural strength. Furthermore, it can be ensured that the upper and lower support columns are not easily collided or damaged by being completely protruded outward before the assembly of the probe holder is completed.

[0032] Preferably, each of the plurality of support pillars has an end surface, the end surface of the upper support pillar being flush with the connection surface of the upper guide plate unit, and the end surface of the lower support pillar being flush with the connection surface of the lower guide plate unit.

[0033] This allows the upper and lower support columns and the upper and lower guide plate units to have a simple structure and excellent structural strength. In addition, when the upper and lower support columns extend integrally from the inner surfaces of the upper and lower grooves, the end faces of the upper and lower support columns are flush with the connecting surfaces of the upper and lower guide plate units, respectively, which makes manufacturing relatively easy.

[0034] Preferably, the lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are defined as supported surfaces, and the support structure further includes a plurality of connecting ribs, each connecting rib being connected to two adjacent support columns and the supported surfaces on which it is located.

[0035] Thus, in the space between the support posts where no probe needs to be installed, the connecting rib can be arranged, which can enhance the structural strength of the support posts and the guide plate unit connected thereto, and prevent the probe holder from being deformed under stress.

[0036] Preferably, at least one of the two guide plate units includes two guide plates, each of the guide plates has an abutting surface, the abutting surfaces of the two guide plates are connected to each other, one of the abutting surfaces of the two guide plates has a plurality of protruding blocks and the other has a plurality of grooves, and the plurality of protruding blocks are fitted into the plurality of grooves, respectively.

[0037] As a result, the guide plate unit is constructed by connecting two guide plates, and even if the guide plate unit has a considerable thickness and a large area, it can maintain good structural strength. In addition, it is possible to avoid drilling problems caused by an aspect ratio that is too large when drilling holes in a single thick guide plate. In addition, since the butt surfaces of the guide plates are fitted together by a concave-convex structure, the connection effect of the guide plates can be improved and alignment can be easily performed.

[0038] Preferably, the probe holder includes a plurality of alternating probe regions and a plurality of non-probe regions, the plurality of probe regions and the plurality of non-probe regions being arranged together in a matrix, the plurality of upper through-holes and the plurality of lower through-holes being located in the probe regions, and the plurality of support posts being located in the non-probe regions.

[0039] This makes the probe holder applicable to inspection and measurement methods (usually called jump DUTs) that simultaneously inspect and measure non-adjacent DUTs, and has a non-probe area between two probe areas with support columns, providing excellent structural strength.

[0040] Preferably, the probe holder includes a plurality of non-probe regions and one probe region. The non-probe regions are arranged in a matrix. The probe regions are distributed in a lattice around the peripheries of the non-probe regions and between the non-probe regions. The upper through-holes and the lower through-holes are located in the probe regions, and the support columns are located in the non-probe regions.

[0041] In this way, the probes are distributed in a lattice pattern, forming multiple non-probe regions surrounded by the probes, so that the support columns are more uniformly distributed and good structural strength can be obtained.

[0042] The probe head according to the present invention is used for performing a functionality test on an object to be measured, and includes the above-mentioned probe holder and a plurality of probes extending through the probe holder.

[0043] As a result, the probe head uses a probe holder having the support structure of the present invention described above, and even if the probe head has a large area, it has excellent structural strength and is not easily deformed by external forces.

[0044] The probe card according to the present invention is used for performing functional tests on a device under test and includes an intermediate substrate, a space transformer, and a probe head as described above. The intermediate substrate is configured to connect to a test device. The space transformer is associated with the intermediate substrate and is adapted to provide a space transform in the spacing between contact pads formed on two opposing surfaces. The probe head is associated with the space transformer.

[0045] As a result, the probe card of the present invention can be a large-area probe card, which can improve the efficiency of testing and measurement and reduce the cost of testing and measurement. In addition, the probe head of the probe card uses a probe holder having the support structure of the present invention described above, and even if the area is large, it has excellent structural strength and is not easily deformed by external forces.

[0046] The probe system according to the present invention is used for performing a functionality test on a device under test formed on a substrate, and includes a mounting table configured to support the substrate, a test device used for electrically connecting to the device under test and for constructing an electrical test program, and the above-mentioned probe card. The probe card electrically connects the device under test and the test device to perform a functionality test on the device under test.

[0047] As a result, the probe card of the probe system can be a large-area probe card, which can improve the efficiency of testing and measurement and reduce the cost of testing and measurement. In addition, the probe head of the probe card uses a probe holder having the support structure of the present invention described above, and even if the area is large, it has excellent structural strength and is not easily deformed by external forces.

[0048] Detailed structures, features, assembly, or usage of the probe holder, probe head, probe card, and probe system having the support structure according to the present invention will be described in the following detailed description of the embodiment of the present invention. However, those having ordinary skill in the art of the present invention should understand that such detailed description and the specific embodiments enumerated for carrying out the present invention are merely for the purpose of explaining the present invention, and are not intended to limit the scope of the utility model registration claims of the present invention. [Brief description of the drawings]

[0049] [Figure 1] 1 is a perspective view showing an assembled state of a probe holder with a support structure according to a preferred embodiment of the present invention; [Diagram 2] 2 is a cross-sectional perspective view showing a part of the probe holder shown in FIG. 1. [Diagram 3] FIG. 13 is a three-dimensional combination view showing a lower guide plate unit and a lower support column of the probe holder. [Figure 4] FIG. 13 is a three-dimensional combination view showing an upper guide plate unit and an upper support column of the probe holder. [Figure 5a] 1 is a schematic cross-sectional view of a probe holder according to the present invention, which is applied to a probe card, a test device, a mounting table, a substrate, and a number of objects to be measured; [Figure 5b] FIG. 5b is a schematic cross-sectional view showing the probe card in FIG. 5a. [Figure 6] FIG. 5B is a schematic cross-sectional view similar to FIG. 5B, showing a different embodiment of the probe card in FIG. 5A, without showing the probes. [Figure 7] FIG. 5B is a schematic cross-sectional view similar to FIG. 5B, showing a different embodiment of the probe card in FIG. 5A, without showing the probes. [Figure 8] FIG. 5B is a schematic cross-sectional view similar to FIG. 5B, showing a different embodiment of the probe card in FIG. 5A, without showing the probes. [Figure 9] FIG. 5B is a schematic cross-sectional view similar to FIG. 5B, showing a different embodiment of the probe card in FIG. 5A, without showing the probes. [Figure 10] FIG. 5B is a schematic cross-sectional view similar to FIG. 5B, showing a different embodiment of the probe card in FIG. 5A, without showing the probes. [Figure 11] FIG. 11 is a partial perspective view showing a guide plate unit and a support structure according to another embodiment. [Figure 12a] FIG. 4 is a top view of FIG. [Figure 12b] 13 is a schematic diagram showing a guide plate unit and a part of a support column of a support structure according to still another embodiment. FIG. [Figure 13] FIG. 8 is a schematic cross-sectional view similar to FIG. 7 and showing a different embodiment of the probe holder. [Figure 14a] 3 is a cross-sectional view showing a part of the probe holder shown in FIG. 2. [Figure 14b] FIG. 14b is a cross-sectional view similar to FIG. 14a showing a different embodiment of the support structure, further showing one space transformer and one reinforcement member. [Figure 15] FIG. 11 is a schematic cross-sectional view showing a conventional guide plate and one object to be measured. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0050] The applicant hereby states that in the embodiments and drawings introduced below, the same reference numerals represent the same or similar elements or structural features thereof. It should be noted that the elements and structures in the drawings are not drawn based on actual proportions and quantities for convenience of illustration, and that the features of different embodiments may be applied to each other if possible. In addition, when referring to an element being placed on another element, it means that the aforementioned element is directly placed on the other element, or that the aforementioned element is indirectly placed on the other element, that is, one or more other elements are further placed between the two elements. When an element is "directly" placed on another element, it means that no other element is placed between the two elements.

[0051] As shown in Figures 1-4, 5a and 5b, Figures 1-4 show the actual structure of the probe holder 24 according to one embodiment of the present invention, and for the sake of simplifying the drawings and ease of explanation, the probe holder 24 is diagrammatically shown in Figures 5a and 5b.

[0052] More specifically, FIG. 5a shows a probe system 61. The probe system 61 is used to test a device under test 63 formed on a substrate 62. The probe system 61 includes a mounting table 611 configured to support the substrate 62, and a probe card 20. The probe card 20 includes an intermediate substrate 21 (also called a main circuit board), a space transformer 22, and a probe head 23. The intermediate substrate 21 is configured to connect to a test device 64. The space transformer 22 is associated with the intermediate substrate 21, and the probe head 23 is associated with the space transformer 22. The term "associated" as mentioned above refers to connecting one element to another element (either directly or indirectly), and is not necessarily connected in a rigid manner. The space transformer 22 is suitable for providing a space transformation in a space between contact pads (not shown) formed on two opposing surfaces 221, 222. That is, the intervals of the contact pads on the surface 221 for connecting with the intermediate substrate 21 are different from the intervals of the contact pads on the surface 222 for connecting with the probe head 23. The probe head 23 includes one probe holder 24 and a plurality of probes 25 provided through the probe holder 24. For the sake of simplicity and convenience of explanation, FIG. 5a and FIG. 5b show one probe 25. The probe 25 makes a point contact with a device under test (abbreviated as DUT), and the probe card 20 electrically connects the device under test with the test device 64 to perform a functionality test on the device under test. More specifically, each probe 25 includes a first end, a second end, and a probe body located between the first end and the second end. The first end, i.e., the needle head, is terminated with one contact tip and is configured to be adjacent to a contact pad and / or a protruding block of the device under test integrated on a semiconductor wafer. The second end, or needle tail, terminates in a contact head and is configured adjacent a contact pad of the space transformer 22. The probe body, or needle body, extends along a substantially longitudinal axis of deployment between the first and second ends.The needle tail of each probe 25 penetrates the upper through-hole 35 of the upper guide plate unit 30 and electrically connects to the space transformer 22. The needle head of each probe 25 is used to electrically contact the object to be measured. The needle head of each probe 25 is configured to be capable of electrically contacting and / or communicating with a corresponding contact pad of the object to be measured. In some examples, communication refers to transmitting a test signal of the probe card 20 to the object to be measured and / or receiving a composite signal from the object to be measured. In addition, although the probe 25 shown in FIG. 5a and FIG. 5b is a straight type, this does not limit the type of probe applied to the present invention. In fact, the probe applied to the present invention is a vertical type probe, and can include at least a straight type probe and a pre-bend type probe. Here, examples of the straight type probe include a forming wire (FW), a micro mechatronic probe (MEMS wire, MW), a pogopin, and the like. Examples of the pre-bend type probe include a Cobra probe and a needle body pre-bending forming probe. The so-called vertical probe head basically includes a number of contact probes 25 held by one probe holder 24. The probe holder 24 has certain holes (e.g., guide holes, through holes, or perforations) and one free space or air gap (accommodation space, described later) for the movement and possible deformation of the contact probes 25. Furthermore, by appropriately arranging the probes themselves (e.g., pre-bend type probes) or their guide plates, it is possible to support the contact probes (e.g., forming probes and micro-mechatronic probes in linear probes) to bend in the air gap (not shown). For example, the so-called offset plane type (suitable for forming probes and micro-mechatronic probes in linear probes) is to move the upper guide plate parallel to the lower guide plate. Here, "parallel movement" means that the respective centers of the upper guide hole and the lower guide hole are shifted not along the same vertical direction. In the partial reference system of the drawing, it is indicated as Z.The longitudinal direction Z is perpendicular to the reference plane and corresponds to the lateral development plane of the guide plates. The contact probes accommodated in the guide holes of the upper and lower guide plates are thereby deformed with respect to their longitudinal development axis (corresponding to the longitudinal direction Z of the partial reference system of the drawing). The longitudinal development axis is arranged perpendicular to the reference plane. The upper and lower guide plates are parallel to each other and extend along a reference plane along which the semiconductor wafer, the object to be measured and the plates of the space transformer are also developed. If the probes in the vertical probe head are of the so-called pre-bend type probe type, for example in the example of a conventional Cobra test head, the contact probe has a pre-deformed configuration such that there is an offset between the contact tip and the contact head defined by the stopping condition of the probe head. In particular, in this example, the contact probe has a pre-deformed portion even when the test head is not in contact with the element under test, and this pre-deformed portion assists in the proper bending of the contact probe. The contact probe is further deformed during operation, i.e., it contacts the element under test with pressure. It should be noted that for proper operation of the probe head, the contact probes must have adequate axial freedom of movement inside the guide holes. Such a method allows, in case of failure of a single probe, to extract and replace these contact probes without forcibly replacing the entire probe head. The axial freedom of movement (especially when the probes are sliding inside the guide holes) contrasts with the usual safety requirements during operation of the probe head.

[0053] As shown in FIGS. 1 to 4 and 5b, the probe holder 24 includes two guide plate units (an upper guide plate unit 30 and a lower guide plate unit 40) and one support structure 50. As shown in FIG.

[0054] In this embodiment, the upper guide plate unit 30 is composed of two overlapping guide plates 31, 32, and the lower guide plate unit 40 is composed of two overlapping guide plates 41, 42. However, each guide plate unit only needs to include at least one guide plate. Furthermore, in some applications, only one of the upper guide plate unit 30 and the lower guide plate unit 40 is required.

[0055] The upper guide plate unit 30 includes one upper side 33 and one lower side 34, and has a plurality of upper through holes 35 penetrating the upper side 33 and the lower side 34. In this embodiment, a portion of the upper through hole 35 is located in the guide plate 31, and the remaining portion is located in the guide plate 32. The central axes of the two portions of the upper through hole 35 correspond to each other. The lower guide plate unit 40 includes one upper side 43 and one lower side 44, and has a plurality of lower through holes 45 penetrating the upper side 43 and the lower side 44. In this embodiment, a portion of the lower through hole 45 is located in the guide plate 41, and the remaining portion is located in the guide plate 42. The central axes of the two portions of the lower through hole 45 correspond to each other. The upper and lower through holes 35, 45 of the probe holder 24 are actually small in diameter and numerous. For the sake of simplicity of illustration, the upper and lower through-holes 35, 45 are not shown in FIGS. 1 to 4, and a small number of the upper and lower through-holes 35, 45 are diagrammatically shown in FIG. 5b.

[0056] The support structure 50 includes a number of support columns. The number of support columns includes a number of upper support columns 51 and a number of lower support columns 52 (see FIG. 5b). The number of support columns is disposed between the upper guide plate unit 30 and the lower guide plate unit 40. The lower surface 34 of the upper guide plate unit 30 and the upper surface 43 of the lower guide plate unit 40 mentioned in the present invention refer to the surfaces on which the support columns are located. Therefore, the lower surface 34 of the upper guide plate unit 30 and the upper surface 43 of the lower guide plate unit 40 are respectively defined as supported surfaces.

[0057] In the embodiment shown in FIG. 5b, the upper support column 51 extends integrally from the lower side 34 (i.e., the supported surface) of the upper guide plate unit 30. That is, the upper support column 51 and the guide plate 32 are connected integrally. The lower support column 52 extends integrally from the upper side 43 (i.e., the supported surface) of the lower guide plate unit 40. That is, the lower support column 52 and the guide plate 41 are connected integrally. As a result, the support column and the guide plate are connected integrally, the structure of the probe holder is simple, which is advantageous for assembly and manufacturing, and the structural strength of the guide plates 32, 41 themselves can be further increased. The upper and lower support columns 51A, 52A shown in FIGS. 2 to 4 are similar to the upper and lower support columns 51, 52 shown in FIG. 5b described above. Another type of upper and lower support columns 51B, 52B shown in FIG. 2 will be described later.

[0058] In this embodiment, the upper guide plate unit 30 has one connection surface 36 and an upper groove 37 (see FIG. 4) recessed from the connection surface 36, and the lower surface 34 is located in the upper groove 37. That is, the lower surface 34 is the same as the bottom surface of the upper groove 37. Similarly, the lower guide plate unit 40 has one connection surface 46 and a lower groove 47 (see FIG. 3) recessed from the connection surface 46, and the upper surface 43 is located in the lower groove 47. That is, the upper surface 43 is the same as the bottom surface of the lower groove 47. The connection surface 36 of the upper guide plate unit 30 and the connection surface 46 of the lower guide plate unit 40 are connected to each other, and the upper groove 37 and the lower groove 47 form an accommodating space 241. The accommodating space 241 accommodates the support structure 50 and is used for the penetration of the probe 25. More specifically, the multiple probes 25 of the probe card 20 penetrate through the upper through-holes 35, the accommodation space 241, and the lower through-holes 45. In the accommodation space 241, support columns can be placed in places where the probes 25 are not placed.

[0059] As shown in Fig. 5b, the upper support pillar 51 protrudes from the lower surface 34 of the upper guide plate unit 30, and the lower support pillar 52 protrudes from the upper surface 43 of the lower guide plate unit 40, and the upper support pillar 51 and the lower support pillar 52 contact each other. In the present invention, the contact between the upper and lower support pillars includes various contact methods. For example, they may abut each other as shown in Figs. 5b to 8, fit and hook each other as shown in Fig. 9, or lock each other as shown in Figs. 14a and 14b (will be described in detail later), as long as the upper and lower support pillars are not integrally molded with each other and are connected when the probe holder is assembled.

[0060] As a result, the upper and lower support columns 51, 52 protrude from the upper and lower guide plate units 30, 40, respectively, and contact each other. Such upper and lower support columns 51, 52 strengthen the structural strength of the upper and lower guide plate units 30, 40, respectively. In addition, when the upper and lower guide plate units 30, 40 are connected to each other, the upper and lower support columns 51, 52 reinforce the part where the structural strength is weakened due to the formation of the accommodation space 241 in the center of the probe holder 24. Therefore, even if the probe holder 24 has a large area, it has excellent structural strength and is not easily deformed by stress. Therefore, deformation of the lower guide plate unit 40 due to the reaction force generated by the object to be measured during testing is reduced.

[0061] In the present invention, the upper and lower guide plate units 30, 40 are not limited to the configuration including the upper and lower grooves 37, 47. That is, the support pillars do not have to be located in the grooves. The connection surfaces of the upper and lower guide plate units 30, 40 can be the upper side and the upper side, respectively, and the support pillars can protrude from the connection surfaces. In this case, a hollow intermediate guide plate or other supportable structure can be installed between the upper and lower guide plate units 30, 40 to form an accommodation space 241 for accommodating the support structure 50 and the probe 25. In other words, the accommodation space 241 can be formed around the support pillars (including the upper and lower support pillars 51, 52) and can be formed between the upper and lower guide plate units 30, 40. However, the design in which the upper and lower support pillars 51, 52 are located in the upper and lower grooves 37, 47 of the upper and lower guide plate units 30, 40 has a simple structure, is advantageous for assembly and manufacturing, and has excellent structural strength. Furthermore, before the assembly of the probe holder 24 is completed, the upper and lower support columns 51, 52 are completely protruded outward, which can prevent them from easily colliding or being damaged. In particular, in the embodiment shown in FIG. 5b, the upper and lower support columns 51, 52 have one end surface 511, 521, respectively. The end surface 511 of the upper support column 51 is flush with the connecting surface 36 of the upper guide plate unit 30. The end surface 521 of the lower support column 52 is flush with the connecting surface 46 of the lower guide plate unit 40. This allows the upper and lower support columns 51, 52 and the upper and lower guide plate units 30, 40 to have a simple structure and excellent structural strength. In addition, the upper and lower support columns 51, 52 are completely located in the upper and lower grooves 37, 47, which can further prevent them from colliding or being damaged. Furthermore, in a state where the upper and lower support columns 51, 52 extend integrally from the lower surface 34 and the upper surface 43, it is relatively easy to manufacture the end surfaces 511, 521 of the upper and lower support columns 51, 52 flush with the connecting surfaces 36, 46 of the upper and lower guide plate units 30, 40, respectively. However, the end surfaces 511, 521 of the upper and lower support columns 51, 52 do not have to be flush with the connecting surfaces 36, 46 of the upper and lower guide plate units 30, 40, respectively.For example, in the embodiment shown in Fig. 6, the end faces 511, 521 of the upper and lower support columns 51, 52 are higher than the connecting faces 36, 46 of the upper and lower guide plate units 30, 40, respectively. Or, in the embodiment shown in Fig. 8, the end faces 511, 521 of some of the upper and lower support columns 51, 52 are flush with the connecting faces 36, 46 of the upper and lower guide plate units 30, 40, respectively, and the end faces 511, 521 of some of the upper and lower support columns 51, 52 are lower than the connecting faces 36, 46 of the upper and lower guide plate units 30, 40, respectively.

[0062] In the embodiment shown in FIG. 5b, FIG. 6, and FIG. 8, the upper and lower support columns 51, 52 that contact each other abut each other at their end faces 511, 521. This allows the probe holder 24 to have high rigidity to withstand pushing, resist an external force pushing inward, and prevent the guide plate unit from being deformed by stress. Furthermore, the upper and lower support columns 51, 52 that contact each other are bonded and fixed to each other by adhesive. That is, before the end faces 511, 521 of the upper and lower support columns 51, 52 abut each other, adhesive is applied to at least one of the end faces 511, 521 so that the end faces 511, 521 of the upper and lower support columns 51, 52 abut each other and are bonded and fixed to each other. This fixing method is simple and strong, so that the rigidity to withstand pushing and the rigidity to withstand pulling can be further increased, and the probe holder 24 can withstand an external force pushing inward and an external force pulling outward, preventing the guide plate unit from being deformed by stress.

[0063] As shown in FIG. 7, the upper and lower support columns 51 and 52 that are in contact with each other are fixed to each other by the bolt 53. As a result, the upper and lower support columns 51 and 52 can increase the rigidity to withstand pushing by abutting the end faces 511 and 521 of the upper and lower support columns 51 and 52, and can withstand an external force pushing inward. In addition, the upper and lower support columns 51 and 52 are locked to each other by the additional bolt 53, and can increase the rigidity to withstand pulling, and can withstand an external force pulling outward. Therefore, the effect of preventing the guide plate unit from being deformed is excellent. The bolt 53 is not limited to locking from top to bottom or bottom to top. In the embodiment shown in FIG. 7, the bolt 53 locks from top to bottom. To explain in detail, the upper support column 51 has a through hole 513, and the lower support column 52 has a screw hole 523. The bolt 53 passes through the through hole 513 of the upper support column 51 and is screwed into the screw hole 523 of the lower support column 52. This locking method allows the head of the bolt to face the object to be measured, and prevents the bolt from loosening and affecting the object. In addition, the distance d1 between the end face 511 of the upper support column 51 and the lower side 34 of the upper guide plate unit 30 (i.e., the length of the upper support column 51) is smaller than the distance d2 between the end face 521 of the lower support column 52 and the upper side 43 of the lower guide plate unit 40 (i.e., the length of the lower support column 52). By providing a screw hole with a sufficient length in the lower support column 52, the bolt 53 can be reliably locked.

[0064] 7, the screw hole 523 is formed by tapping the lower support column 52 itself. However, as shown in Fig. 13, a mounting hole 524 may be provided in the lower support column 52 itself, and a sleeve 525 to which the screw hole 523 is fixed may be provided in the mounting hole 524. This allows the bolt 53 to pass through the through hole 513 of the upper support column 51 and be screwed into the screw hole 523 of the sleeve 525.

[0065] The above-mentioned locking structure may be provided on some of the support columns according to the actual structural needs, and need not be provided on all of the support columns. For example, in the probe holder 24 shown in Figs. 1 to 4, some of the upper and lower support columns 51A and 52A are provided with through holes 513 and screw holes 523, and are locked by bolts 53.

[0066] As shown in FIG. 9, the upper and lower support columns 51 and 52 are fitted to each other by a concave-convex structure. More specifically, as shown in FIG. 9, the upper support column 51 includes a protruding block 512 located on an end surface 511, and the lower support column 52 has a groove 522 located on an end surface 521, and the protruding block 512 and the groove 522 are fitted to each other. As a result, the upper and lower support columns 51 and 52 can increase the rigidity to withstand pushing by the end surfaces 511 and 521 abutting each other, and can withstand an external force pushing inward. In addition, the upper and lower support columns 51 and 52 can further increase the rigidity to withstand pushing and pulling by the protruding block 512 and the groove 522 fitting to each other, and can withstand an external force pushing inward and an external force pulling outward, and the guide plate unit can be prevented from being deformed by stress. In addition, the connection surface 36 of the upper guide plate unit 30 and the connection surface 46 of the lower guide plate unit 40 can also be fitted to each other by the concave-convex structure. For example, as shown in FIG. 9, the connection surface 36 of the upper guide plate unit 30 includes a plurality of protruding blocks 361, and the connection surface 46 of the lower guide plate unit 40 includes a plurality of grooves 461, and the protruding blocks 361 and the grooves 461 are fitted to each other. Therefore, the rigidity that can withstand the pushing of the probe holder 24 and the rigidity that can withstand the pulling can be further increased, and the guide plate unit can be prevented from being deformed by stress. Before the protruding blocks and the grooves are fitted to each other, an adhesive is applied to at least one of the protruding blocks and the grooves, so that the protruding blocks and the grooves are fitted to each other and are fixed to each other by adhesion. Since such a fixing effect is even stronger, the rigidity that can withstand the pushing and the rigidity that can withstand the pulling can be further increased. In addition, there is an effect that alignment and / or positioning can be easily performed during the assembly process.

[0067] As shown in FIG. 11, the support structure 50 further includes a plurality of connecting ribs 54. Each connecting rib 54 is connected to two adjacent support columns and the supported surface on which it is located. For example, as shown in FIG. 11, the connecting rib 54 is integrally connected to two adjacent support columns 52A and the upper surface 43 of the lower guide plate unit 40. This allows the connecting rib 54 to be placed in the space between the support columns when the probe 25 does not need to be installed. The connecting rib 54 can enhance the structural strength of the support column and the guide plate unit connected thereto, and prevent the probe holder from being deformed by stress.

[0068] When it is difficult to process the support pillar integral with the guide plate or according to other needs, the support pillar may be an element not integral with the guide plate and assembled to the guide plate unit. In other words, in the support structure 50 of the probe holder 24 of the present invention, all or some of the support pillars are detachably mounted on the guide plate unit in which they are located. In the upper and lower support pillars 51B and 52B shown in Figs. 2 and 14a, the upper support pillar 51B is a pillar (e.g., a steel pillar or a pillar made of other metal materials) and the lower support pillar 52B is a bolt (or the upper support pillar 51B may be a bolt and the lower support pillar 52B may be a pillar). The upper support pillar 51B is provided through the upper guide plate unit 30 and has a screw hole 514. The lower support pillar 52B is provided through the lower guide plate unit 40 and is screwed into the screw hole 514. In other words, the upper and lower support pillars 51B and 52B are connected to each other by directly screwing them together. In this way, the structure is simple, easy to manufacture or assemble, and a reliable connection effect can be obtained. It is strong not only against external forces pushing inward, but also against external forces pulling outward, so it has an excellent effect of preventing deformation of the guide plate unit. As shown in Figure 2, the probe holder of the present invention also includes support columns (i.e., upper and lower support columns 51A, 52A) that are integrally connected to the guide plate, and support columns (i.e., upper and lower support columns 51B, 52B) that are separably connected to the guide plate, and can be installed according to needs.

[0069] As shown in FIG. 14b, the upper support column 51B (column) further extends upward and extends from the upper guide plate unit 30. That is, the upper support column 51B (column) includes an extension portion 515 protruding from the upper side surface 33 of the upper guide plate unit 30. Alternatively, when the lower support column 52B is a column, the lower support column 52B can include an extension portion protruding from the lower side surface 44 of the lower guide plate unit 40. Thereby, the extension portion 515 abuts against the reinforcing member 26, which may be another element of the probe card. For example, in FIG. 14b, the reinforcing member 26 is another element provided on the space transformer 22. The extension portion 515 of the upper support column 51B passes through the space transformer 22, is inserted into the reinforcing member 26, and abuts thereon. Furthermore, the extension portion 515 can be locked to the reinforcing member 26 by another bolt 55. The structural strength of the probe holder can be further increased by having the aforementioned column extension portion 515 protrude from the upper surface 33 of the upper guide plate unit 30 or the lower surface 44 of the lower guide plate unit 40 and abut and lock against the reinforcing member 26.

[0070] The support structure 50 of the present invention may include at least one independent support pillar in addition to the upper and lower support pillars in contact with each other as described above. The independent support pillar is not in contact with another support pillar, and supports the upper side 34 of the upper guide plate unit 30 and the upper side 43 of the lower guide plate unit 40 alone. The independent support pillar may be, as shown in FIG. 14a or 14b, a support pillar 51B that penetrates the upper guide plate unit 30, abuts against the upper side 43 of the lower guide plate unit 40, and is not locked by a bolt provided on the lower guide plate unit 40. Alternatively, the independent support pillar may be a support pillar that penetrates the lower guide plate unit 40, abuts against the lower side 34 of the upper guide plate unit 30, and is not locked by a bolt provided on the upper guide plate unit 30.

[0071] As a result, the center of the probe holder 24 has a structurally weak portion due to the presence of the accommodation space 241. In addition to the reinforcement provided by the upper and lower support columns 51, 52 described above, further reinforcement can be achieved by separately installing a separate support column. In particular, the support column can be installed in locations where it is difficult to install a support column integrally with the guide plate or where a lock bolt cannot be installed, and the structure of these locations can also be reinforced.

[0072] As shown in FIG. 10, when one of the upper and lower guide plate units 30, 40 includes a plurality of guide plates, a matable concave-convex structure can be provided between the overlapping guide plates in the same guide plate unit. For example, 10, the guide plates 31, 32 of the upper guide plate unit 30 each have a pair of mating surfaces 311, 321. The mating surface 311 has a number of protruding blocks 312, and the mating surface 321 has a number of grooves 322. When the mating surfaces 311, 321 of the guide plates 31, 32 are connected to each other, the protruding blocks 312 and the grooves 322 fit together, respectively. Similarly, the guide plates 41, 42 of the lower guide plate unit 40 each have a pair of mating surfaces 411, 421. The abutting surface 421 has a number of protruding blocks 422, and the abutting surface 411 has a number of grooves 412. When the abutting surfaces 411, 421 of the guide plates 41, 42 are connected to each other, the protruding blocks 422 and the grooves 412 are fitted together, respectively.

[0073] As a result, the upper and lower guide plate units 30, 40 are each constructed by connecting two guide plates, and even if the upper and lower guide plate units 30, 40 have a considerable thickness and a large area, good structural strength can be maintained. In addition, it is possible to avoid a drilling problem caused by an aspect ratio that is too large when drilling a hole in a single thick guide plate. In addition, since the butt surfaces 311, 321 of the guide plates 31, 32 of the upper guide plate unit 30 are fitted together by a concave-convex structure, the connection effect of the guide plates 31, 32 can be improved, and the alignment of the guide plates 31, 32 can be easily performed. Similarly, the concave-convex structure of the butt surfaces 411, 421 of the guide plates 41, 42 of the lower guide plate unit 40 can improve the mutual connection effect, and the alignment of the guide plates 41, 42 can be easily performed.

[0074] As can be seen from the above, the probe holder of the present invention is suitable for application to a large-area probe card. For example, a large-area probe block refers to a probe card having good structural strength and inspection and measurement efficiency when the total area of ​​the needle distribution area of ​​the upper and lower guide plate units 30 and 40 is a square of 60 mm x 60 mm or more, and multiple probes are installed to simultaneously inspect and measure multiple objects under test. In particular, in accordance with the current test method for a large number of objects under test, a peripheral probe arrangement method as shown in Figure 12a and a jump DUT probe arrangement method as shown in Figure 12b are adopted, which will be described in detail below.

[0075] FIG. 12a is a plan view of the lower guide plate unit 40 and the lower support column 52A shown in FIG. 3. In FIG. 12a, tiny dots arranged around each non-probe region 242 typically indicate lower perforations for penetrating a probe, and also typically indicate the non-probe region 242 and the probe region 243 of the probe holder 24 shown in FIG. 1 to FIG. 4. The locations where the lower support column 52A is located are each one of the non-probe regions 242, and the four regions shown by virtual lines in the center of the lower guide plate unit 40 are the regions where the upper and lower support columns 51B and 52B are installed, and each of these four regions is also one of the non-probe regions 242. The non-probe regions 242 are arranged in a matrix, and the probes are arranged around these non-probe regions 242. That is, the locations where the probes are provided between adjacent non-probe regions 242 and around all the non-probe regions 242. Since the locations where the probes are inserted are connected to each other in a lattice shape and are not separated, such a probe holder can be defined as including a plurality of non-probe regions 242 and one probe region 243 arranged in a lattice shape between all the non-probe regions 242 and the non-probe regions 242. The upper through-holes 35 of the upper guide plate unit 30 and the lower through-holes 45 of the lower guide plate unit 40 are both distributed in the probe region 243, so that the probes 25 are inserted through the upper and lower through-holes 35 and 45. In other words, the lattice-shaped probe region 243 can be formed between the adjacent non-probe regions 242 and around all the non-probe regions 242, and the non-probe regions 242 can be formed as a lattice mesh. The non-probe regions 242 having this configuration can distribute the support columns more evenly, and the probe holder can have excellent structural strength.

[0076] FIG. 12b similarly illustrates a probe region 243 and a non-probe region 242 using the lower guide plate unit 40. This type of probe holder includes a plurality of probe regions 243 and a plurality of non-probe regions 242 arranged alternately. The probe regions 243 and the non-probe regions 242 are both arranged in a matrix, and the alternating arrangement means that each of the probe regions 243 is adjacent to the non-probe region 242 and not adjacent to the probe region 243, and each of the non-probe regions 242 is adjacent to the probe region 243 and not adjacent to the non-probe region 242. The upper through-holes 35 of the upper guide plate unit 30 and the lower through-holes 45 of the lower guide plate unit 40 are both distributed in the probe region 243, so that the probes 25 are inserted through the upper and lower through-holes 35 and 45 (as shown by the black dots in FIG. 12b). This probe holder is suitable for an inspection and measurement method in which non-adjacent objects under test are simultaneously inspected and measured (usually called a jump DUT). That is, when performing an inspection or measurement, the positions of the probe area 243 and the non-probe area 242 respectively correspond to the object to be measured, and a probe is provided only in the probe area 243, and the object to be measured corresponding to the position of the non-probe area 242 is not inspected or measured. When performing the next inspection or measurement, the probe area 243 can be moved to the position of the non-probe area 242 used in the previous inspection or measurement by simply moving the probe card slightly, and the object to be measured that was not inspected or measured in the previous inspection or measurement can be inspected or measured. Since a considerable area of ​​the non-probe area 242 remains between the probe areas 243, the non-probe area 242 can be provided with a support column (including the lower support column 52 shown in FIG. 12b). Since the non-probe area 242 is provided between each two probe areas 243, the support column can be arranged, and the probe holder can have excellent structural strength.

[0077] Finally, it is reiterated that the components disclosed in the embodiments of the present invention are for illustrative purposes only and do not limit the scope of the present invention, and any replacement or modification of other equivalent elements should be included in the scope of the utility model registration claims of the present invention. [Explanation of symbols]

[0078] 10: Probe card 11: Main circuit board 12: Space Transformer 13: Probe head 14: Upper guide plate 142: Upper guide hole 15: Lower guide plate 152: Lower guide hole 16: Probe 162: Contact tip 164: Probe body 166: Head section 17: Intermediate guide plate 18: Object to be measured 182: Contact pad 19: Containment Space 20: Probe card 21: Intermediate board 22: Space Transformer 221, 222: Surface 23: Probe head 24: Probe holder 241: Containment Space 242: Non-probe region 243: Probe region 25: Probe 26: Reinforcement material 30: Upper guide plate unit 31: Guide plate 311:Mating surface 312: Protruding block 32: Guide plate 321:Mating surface 322: Groove 33:Top side 34: Lower side 35: Upper through hole 36: Connection surface 361: Protruding block 37: Upper groove 40: Lower guide plate unit 41: Guide plate 411:Mating surface 412: Groove 42: Guide plate 421:Mating surface 422: Protruding block 43:Top side 44: Lower side 45: Lower through hole 46: Connection surface 461: Groove 47: Lower groove 50:Support structure 51, 51A, 51B: Upper support column 511: End face 512: Protruding block 513:Through hole 514: Screw hole 515: Stretched part 52, 52A, 52B: Lower support column 521: End face 522: Groove 523: Screw hole 524: Mounting hole 525: Sleeve 53: Bolt 54: Connection rib 55: Bolt 61: Probe system 611: Placement table 62: Circuit board 63: Object to be measured 64: Test device

Claims

1. 1. A probe holder having a support structure, comprising: The present invention includes two guide plate units, a support structure, and a receiving space; The two guide plate units include an upper guide plate unit and a lower guide plate unit; the upper guide plate unit includes an upper surface and a lower surface, and has a plurality of upper through holes penetrating the upper surface and the lower surface of the upper guide plate unit; the lower guide plate unit includes an upper side surface and a lower side surface, and has a plurality of lower through holes passing through the upper side surface and the lower side surface of the lower guide plate unit; The support structure includes a plurality of support columns disposed between the upper guide plate unit and the lower guide plate unit, the accommodation space is formed around the plurality of support columns and is located between the upper guide plate unit and the lower guide plate unit, and a plurality of probes pass through the upper through-hole, the accommodation space, and the lower through-hole, respectively; The plurality of support columns include a plurality of upper support columns and a plurality of lower support columns, the plurality of upper support columns protruding from the lower side surface of the upper guide plate unit, the plurality of lower support columns protruding from the upper side surface of the lower guide plate unit, and the plurality of upper support columns and the plurality of lower support columns contact each other. A probe holder having a support structure comprising:

2. A probe holder having the support structure according to claim 1, The lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are defined as supported surfaces, and at least a part of the support columns of the support structure extend integrally from the supported surfaces on which they are located. A probe holder having a support structure comprising:

3. A probe holder having the support structure according to claim 1, At least a part of the support columns of the support structure is detachably provided on the guide plate unit on which it is located. A probe holder having a support structure comprising:

4. A probe holder having the support structure according to claim 3, Among the upper support pillar and the lower support pillar which are in contact with each other, one is a pillar and the other is a bolt; The pillar and the bolt are provided to penetrate the two guide plate units, a screw hole is formed in the pillar, and the bolt is screwed into the screw hole of the pillar. A probe holder having a support structure comprising:

5. A probe holder having the support structure according to claim 4, The pillar includes an extension portion protruding from one of the upper side surface of the upper guide plate unit and the lower side surface of the lower guide plate unit, and the extension portion is used to abut against a reinforcing member. A probe holder having a support structure comprising:

6. A probe holder having the support structure according to claim 1, Each of the plurality of support columns has one end surface, and the upper support column and the lower support column that are in contact with each other have the end surfaces abutted against each other. A probe holder having a support structure comprising:

7. A probe holder having the support structure according to claim 6, The upper support pillar and the lower support pillar that are in contact with each other are bonded and fixed to each other. A probe holder having a support structure comprising:

8. A probe holder having the support structure according to claim 6, The upper support pillar and the lower support pillar, which are in contact with each other, are fixed to each other by bolts. A probe holder having a support structure comprising:

9. A probe holder having the support structure according to claim 8, The distance between the end face of the upper support column and the lower side of the upper guide plate unit is smaller than the distance between the end face of the lower support column and the upper side of the lower guide plate unit, and the bolt passes through the upper support column and is screwed into the lower support column. A probe holder having a support structure comprising:

10. A probe holder having the support structure according to claim 6, Of the upper support pillar and the lower support pillar that are in contact with each other, one has a protruding block located on the end surface, and the other has a groove located on the end surface, and the protruding block and the groove are fitted together. A probe holder having a support structure comprising:

11. A probe holder having the support structure according to claim 1, The lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are each defined as a supported surface, The plurality of support columns include at least one single support column, and the single support column is provided to penetrate one of the upper guide plate unit and the lower guide plate unit and is in contact with the supported surface of the other of the upper guide plate unit and the lower guide plate unit. A probe holder having a support structure comprising:

12. A probe holder having the support structure according to claim 11, The single support post includes an extension portion protruding from one of the upper side surface of the upper guide plate unit and the lower side surface of the lower guide plate unit, and the extension portion is used to abut against a reinforcing member. A probe holder having a support structure comprising:

13. A probe holder having the support structure according to claim 1, the upper guide plate unit has a connecting surface and an upper groove recessed from the connecting surface of the upper guide plate unit, the lower surface of the upper guide plate unit being located in the upper groove; the lower guide plate unit has a connecting surface and a lower groove recessed from the connecting surface of the lower guide plate unit, the upper surface of the lower guide plate unit being located in the lower groove; The connecting surface of the upper guide plate unit and the connecting surface of the lower guide plate unit are connected to each other, and the upper groove and the lower groove form the receiving space. A probe holder having a support structure comprising:

14. A probe holder having the support structure according to claim 13, Each of the plurality of support columns has an end surface, the end surface of the upper support column is flush with the connection surface of the upper guide plate unit, and the end surface of the lower support column is flush with the connection surface of the lower guide plate unit. A probe holder having a support structure comprising:

15. A probe holder having the support structure according to claim 1, The lower surface of the upper guide plate unit and the upper surface of the lower guide plate unit are each defined as a supported surface, The support structure further includes a plurality of connecting ribs, each of which is connected to two adjacent support columns and the supported surface on which the support columns are located. A probe holder having a support structure comprising:

16. A probe holder having the support structure according to claim 1, At least one of the two guide plate units includes two guide plates, each of the guide plates has an abutting surface, and the abutting surfaces of the two guide plates are connected to each other; One of the mating surfaces of the two guide plates has a plurality of protruding blocks, and the other has a plurality of grooves, and the plurality of protruding blocks are fitted into the plurality of grooves, respectively. A probe holder having a support structure comprising:

17. A probe holder having the support structure according to claim 1, a plurality of alternating probe regions and a plurality of non-probe regions; The plurality of probe regions and the plurality of non-probe regions are both arranged in a matrix, The upper through-holes and the lower through-holes are located in the probe region, and the support posts are located in the non-probe region. A probe holder having a support structure comprising:

18. A probe holder having the support structure according to claim 1, a plurality of non-probe regions and a probe region; The non-probe regions are arranged in a matrix, The probe regions are distributed in a lattice pattern around the non-probe regions and between the non-probe regions, The upper through-holes and the lower through-holes are located in the probe region, and the support posts are located in the non-probe region. A probe holder having a support structure comprising:

19. A probe head used to perform a functionality test on a test object, comprising: A probe holder according to any one of claims 1 to 18; a plurality of probes provided to penetrate the probe holder; A probe head comprising:

20. A probe card used to perform a functionality test on an object to be measured, an intermediate board configured to connect to a test device; a space transformer associated with the intermediate substrate and adapted to provide a space transformation in the spacing between contact pads formed on two opposing surfaces; and a probe head according to claim 19 associated with the spatial transformer. A probe card comprising:

21. A probe system used to perform a functionality test on a single test object formed on a single substrate, comprising: a mounting table configured to support the substrate; a test device that is used to electrically connect to the device under test and that configures an electrical test program; and the probe card according to claim 20, capable of electrically connecting the device under test and performing a functionality test on the device under test. A probe system comprising:

Images