Wet process apparatus having an LED display

Abstract

To provide a wet process apparatus having an LED display that can know the moving position of a carrier and quickly grasp and eliminate equipment failures. 【Solution means】The wet process apparatus includes a process apparatus 10 to which a console 20 is connected, and the process apparatus 10 includes a transfer mechanism 11 and workstations. The transfer mechanism 11 sequentially passes through each workstation, and a first sensor, a second sensor, and an LED display 144 are installed at each workstation. Each first sensor detects the entry of the carrier 8 conveyed by the transfer mechanism 11 into the workstation, and when the carrier 8 is present in the workstation, a first text or pattern is displayed on the LED display 144. Each second sensor detects that an abnormality has occurred in the processing apparatus 9 of the workstation, and when an abnormality occurs in the processing apparatus 9, a second text or pattern is displayed on the LED display 144.

Description

Technical Field

[0001] The present invention relates to the field of wet process apparatuses, and more particularly to a wet process apparatus having an LED display.

Background Art

[0002] In the processing process of a substrate, usually, wet processes such as drying, peeling, etching, developing, and cleaning are performed by various different workstations. Usually, first, the substrate is clamped and positioned by a carrier, and then the processing step is executed. In the processing step, a common substrate is attached to a transfer mechanism in an upright manner and is transferred by the transfer mechanism so that the substrate moves along a predetermined path, thereby facilitating the wet process processing on the substrate.

Summary of the Invention

Problems to be Solved by the Invention

[0003] However, in a conventional wet process apparatus, after the substrate is transported by a transport mechanism to enter the process apparatus, since the process apparatus has a fully closed structure, an operator cannot know at which workstation the substrate is being processed, and the progress of the processing cannot be grasped unless the substrate is taken out of the process apparatus. Further, when the processing apparatuses at each workstation process the substrate, each processing apparatus is inevitably subject to abnormalities such as equipment damage and malfunction, and it is also difficult to accurately grasp the damage of each processing apparatus, resulting in a high defect rate of the product and difficulty in equipment maintenance.

[0004] Therefore, the present inventor considered that the above-mentioned drawbacks can be improved, and as a result of intensive studies, the present invention was proposed to effectively improve the above-mentioned problems through a reasonable design.

[0005] The present invention has been made through the intensive research of the present inventor in view of the above problems, and its purpose is not only to be able to know the moving position of the carrier, but also to quickly grasp the failure of the device and to provide a wet process apparatus having an LED display that can be eliminated.

Means for Solving the Problems

[0006] In order to solve the above-described problems and achieve the above object, a wet process apparatus having an LED display according to an aspect of the present invention includes a process apparatus and a console connected to the process apparatus. The process apparatus includes a transfer mechanism and a plurality of workstations. The transfer mechanism sequentially passes through each of the workstations, and a first sensor, a second sensor, and an LED display are installed in each of the workstations. Each of the first sensors is used to detect whether a carrier conveyed by the transfer mechanism has entered the workstation. When the workstation has the carrier, a first text or pattern is displayed on the LED display. Each of the second sensors is used to detect whether an abnormality has occurred in at least one processing device of the workstation. When an abnormality has occurred in the processing device of each workstation, a second text or pattern is displayed on the LED display.

[0007] The present invention further has an effect that the progress of processing and the failure position can be easily obtained from the display device by installing the display device of the console.

[0008] Other objects, configurations, and effects of the present invention will become apparent from the following description of the embodiments of the invention.

Brief Description of the Drawings

[0009]

Figure 1

Figure 2

Figure 3

Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the following embodiments and can take various forms as long as it belongs to the technical scope of the present invention.

[0011] First, with reference to FIGS. 1 to 3, a wet process apparatus having an LED display according to the present invention will be specifically described.

[0012] A wet process apparatus having an LED display according to the present invention mainly includes a process apparatus 10 and a console 20. Hereinafter, each will be described.

[0013] The process apparatus 10 mainly includes a transfer mechanism 11 and a plurality of workstations 12 to 16. The transfer mechanism 11 sequentially passes through each workstation 12 to 16. In use, a carrier 8 on which a substrate is installed is erected on the transfer mechanism 11 in a hanging manner, and the carrier 8 is driven by the transfer mechanism 11 to move along a specific path, so that the processing apparatuses 9 of each workstation 12 to 16 perform processing on the substrate on the carrier 8 in various different ways.

[0014] Each workstation according to this embodiment mainly includes a drying workstation 12, a peeling workstation 13, an etching workstation 14, a developing workstation 15, and a plurality of cleaning workstations 16. The drying workstation 12, the peeling workstation 13, the etching workstation 14, and the developing workstation 15 are arranged at intervals in sequence, and each cleaning workstation 16 is installed between any two adjacent workstations among the drying workstation 12, the peeling workstation 13, the etching workstation 14, and the developing workstation 15.

[0015] Taking the etching workstation 14 as an example for explanation, a processor 141, a first sensor 142, a second sensor 143, and an LED display 144 are installed in the etching workstation 14. The processor 141 is electrically connected to the first sensor 142, the second sensor 143, the LED display 144, and the console 20. Each first sensor 142 is used to detect whether the carrier 8 conveyed by the conveying mechanism 11 has entered the etching workstation 14. When the etching workstation 14 has the carrier 8, a first text or pattern 1441 is displayed on the LED display 144. Each second sensor 143 is used to detect whether an abnormality has occurred in the processing device 9 of the etching workstation 14. When an abnormality has occurred in the processing device 9 of the etching workstation 14, a second text or pattern 1442 is displayed on the LED display 144. The processing device 9 according to this embodiment is an etching device.

[0016] In addition to synchronously displaying the conveying dynamics of the substrate in multiple colors, the LED display 144 may also display the current state in text, display a warning of a fault occurrence in text, combine the processes of each stage, and achieve a more suitable display effect through the color change of each LED.

[0017] The text part of the first text or pattern 1441, or the second text or pattern 1442, is a text paragraph composed of multiple characters. For example, it can be "during conveyance", "during cleaning", "during etching", "etching completed", "during failure", "during maintenance", etc. The pattern part is composed of symbols, numbers, geometric shapes, or combinations thereof.

[0018] In an embodiment, the first text or pattern 1441 and the second text or pattern 1442 are optical signals of different colors. The first text or pattern 1441 can be set as a green optical signal, and the second text or pattern 1442 can be set as a red optical signal to achieve a more suitable early warning effect.

[0019] Similarly, a processor, a first sensor, a second sensor, and an indicator light are respectively installed in the drying workstation 12, the peeling workstation 13, the developing workstation 15, and the cleaning workstation 16. Incidentally, the processing device 9 of the drying workstation 12 is a dryer, the processing device 9 of the peeling workstation 13 is a peeling device, the processing device 9 of the developing workstation 15 is a developing machine, and the processing device 9 of the cleaning workstation 16 is a cleaning machine. The abnormality of the processing device 9 refers to various abnormal states such as the failure of each of the above devices to operate and the blockage of the water pipe.

[0020] The console 20 is connected to the process device 10 by cable or wirelessly. The console 20 has a display device 21 for displaying the operating status of the drying workstation 12, the peeling workstation 13, the etching workstation 14, the developing workstation 15, and each cleaning workstation 16. Above each of the workstations 12 - 16, schematic diagrams corresponding to the respective LED displays 144 and patterns are provided. By doing so, when the carrier 8 is transported to each of the workstations 12 - 16, it can be known synchronously from the display device 21. Also, even when an abnormality occurs in the processing device 9 of each of the workstations 12 - 16, the operator or the equipment maintenance technician can immediately grasp it, and timely maintenance can be performed on the faulty processing device 9 to eliminate the fault.

[0021] The above embodiments are for facilitating the understanding of the present invention and are not for limiting and interpreting the present invention. It goes without saying that the present invention can be changed and improved without departing from its gist, and equivalents of the present invention are included therein.

Explanation of Reference Numerals

[0022] 10 Process device 11 Conveyor mechanism 12 Drying workstation 13 Peeling workstation 14 Etching workstation 141 Processor 142 First sensor 143 Second sensor 144 LED display 1441 First text or pattern 1442 Second text or pattern 15 Developing workstation 16 Cleaning workstation 20 Console 21 Display device 8 Carrier 9 Processing device

Claims

1. A wet process apparatus comprising: a process apparatus; and a console connected to the process apparatus, the process apparatus including a transport mechanism and a plurality of work stations, the transport mechanism passing through each of the work stations in sequence, each of the work stations being equipped with a first sensor, a second sensor, and an LED display, each of the first sensors being used to detect whether a carrier transported by the transport mechanism has entered the work station, and when the work station has the carrier, a first text or pattern is displayed on the LED display, and each of the second sensors being used to detect whether an abnormality has occurred in at least one processing device of the work station, and when an abnormality has occurred in the processing device of each of the work stations, a second text or pattern is displayed on the LED display.

2. 2. The wet process apparatus according to claim 1, wherein said console has a display device for displaying an operating status of each of said workstations.

3. 2. The wet process apparatus according to claim 1, wherein the console is connected to the process apparatus by a cable or a wireless system.

4. 2. The wet process apparatus of claim 1, wherein each of the workstations further comprises a processor electrically connected to the first sensor, the second sensor, the LED display, and the console.

5. 2. The wet process apparatus of claim 1, wherein the text portion of the first text or pattern is a text paragraph comprised of a plurality of characters, and the pattern portion is comprised of symbols, numbers, geometric shapes, or combinations thereof.

6. 2. The wet process apparatus of claim 1, wherein the text portion of the second text or pattern is a text paragraph comprised of a plurality of characters, and the pattern portion is comprised of symbols, numbers, geometric shapes, or combinations thereof.

7. 2. The wet processing apparatus of claim 1, wherein the first text or pattern and the second text or pattern are light signals of different colors.

8. 2. The wet processing tool of claim 1, wherein each of said workstations is a drying workstation, a stripping workstation, an etching workstation, a developing workstation, and a plurality of cleaning workstations, respectively.

9. 9. The wet processing apparatus of claim 8, wherein the drying workstation, the stripping workstation, the etching workstation, and the developing workstation are arranged in a sequential and spaced apart arrangement.

10. 10. The wet process apparatus according to claim 9, wherein each of the cleaning workstations is installed between any two adjacent workstations among the drying workstation, the stripping workstation, the etching workstation, and the developing workstation.

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