Sheet attachment device

Abstract

To provide a sheet sticking device capable of easily removing an unnecessary part of a sheet after sticking.SOLUTION: A sheet sticking device 1 includes a sheet sticking unit 2 that sticks a sheet 210 to a workpiece 200, and a sheet cutting unit 20 that cuts the sheet 210 from the workpiece 200 along an outer edge 206, the sheet cutting unit 20 includes a chuck table 30 that holds the workpiece 200, a sheet holding unit 40 that detachably holds the outer peripheral portion 213 of the sheet 210, a cutting unit 50 that cuts the sheet 210 along the outer edge 206 of the workpiece 200, and a sheet containing unit 21 containing an unnecessary portion 212 of the sheet 210 that is released from the holding by the sheet holding unit 40 and falls, and the cutting unit 50 includes a cutter 51 and a rotating roller 52 that is a pressing unit that presses the unnecessary portion 212 of the cut sheet 210.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a sheet sticking device. [Background technology]

[0002] When a wafer on which semiconductor devices are formed is ground or processed with a laser beam or cutting blade, a sheet application device is used to apply a sheet of adhesive tape, thermoplastic resin, or the like to the wafer to protect the device (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6312343 Summary of the Invention [Problem to be solved by the invention]

[0004] In the sheet adhering device shown in the above-mentioned Patent Document 1, after adhering a sheet that is wider than the wafer to the wafer, the excess sheet is cut off, but if the sheet is adhered and then cut out while wound on a roll, the cut-out sheet is removed by winding up the roll. However, if the sheet cut from the roll is adhered and then cut out, a mechanism is required to remove the unnecessary cut-out sheet.

[0005] SUMMARY OF THE PRESENT INVETION The present invention has been made in view of the above problems, and an object of the present invention is to provide a sheet sticking device capable of easily removing unnecessary portions of a sheet after sticking. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the sheet application device of the present invention is a sheet application device that applies a sheet to a plate-shaped workpiece to form a workpiece with a sheet, and is equipped with a sheet application unit that applies a sheet having an area larger than the workpiece to the workpiece, and a sheet cutting unit that cuts off the sheet applied by the sheet application unit from the workpiece along the outer periphery of the workpiece, and the sheet cutting unit has a chuck table that holds the workpiece with a holding surface smaller than the workpiece, a sheet holding unit that detachably holds the outer periphery of the sheet applied to the workpiece held on the chuck table, a cutting unit that cuts the sheet along the outer periphery of the workpiece, and a sheet storage unit that stores the cut sheet that is released from the hold of the sheet holding unit and falls, and the cutting unit is characterized in that it is equipped with a cutter and a pressing unit that presses the cut sheet towards the sheet storage unit.

[0007] In the sheet sticking device, the pressing portion may be a rotating roller that presses the sheet while moving relatively to the sheet together with the cutter. Effect of the Invention

[0008] The present invention has an effect of making it possible to easily remove unnecessary portions of a sheet after application. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a cross-sectional view that illustrates a schematic configuration example of a sheet sticking unit and a sheet cutting unit of a sheet sticking device according to a first embodiment. [Diagram 2] FIG. 2 is a perspective view of a workpiece to which a sheet has been stuck by the sheet sticking device according to the first embodiment. [Diagram 3] FIG. 3 is a plan view of the sheet cutting unit shown in FIG. [Figure 4] FIG. 4 is a cross-sectional view that typically illustrates a state in which the cutter of the sheet cutting unit illustrated in FIG. 1 is cutting into the sheet attached to the workpiece held on the chuck table. [Diagram 5]FIG. 5 is a plan view that typically illustrates the sheet cutting unit illustrated in FIG. [Figure 6] FIG. 6 is a cross-sectional view showing a schematic state in which the sheet cutting section shown in FIG. 4 cuts the sheet attached to the workpiece held on the chuck table and stores the unnecessary portion of the sheet in a sheet storage section. [Figure 7] FIG. 7 is a plan view that illustrates the sheet cutting unit illustrated in FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0011] [Embodiment 1] A sheet sticking device according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a cross-sectional view showing a typical example of the configuration of a sheet sticking section and a sheet cutting section of the sheet sticking device according to the first embodiment. Fig. 2 is a perspective view of a workpiece to which a sheet is stuck by the sheet sticking device according to the first embodiment. Fig. 3 is a plan view of the sheet cutting section shown in Fig. 1.

[0012] The sheet adhering device 1 according to the first embodiment shown in Fig. 1 is a device that adheres a sheet 210 to a surface 203 of a workpiece 200 shown in Fig. 2 to form a sheet-attached workpiece 211. The workpiece 200 to which the sheet 210 is adhered by the sheet adhering device 1 according to the first embodiment is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer, with a substrate 201 made of silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), or the like.

[0013] 2, the workpiece 200 has devices 204 formed in each region of a surface 203 partitioned by a plurality of intersecting division lines 202. The devices 204 are, for example, integrated circuits such as ICs (Integrated Circuits) or LSIs (Large Scale Integrations), image sensors such as CCDs (Charge Coupled Devices) or CMOSs ​​(Complementary Metal Oxide Semiconductors), or MEMS (Micro Electro Mechanical Systems).

[0014] In the first embodiment, the workpiece 200 has a sheet 210 attached to its front surface 203 side, and the rear surface 205 behind the front surface 203 is ground in a state in which the front surface 203 side is held on a chuck table of a grinding device via the sheet 210, thereby thinning the workpiece 200 to a predetermined finish thickness. After being thinned, the workpiece 200 is divided into individual devices 204 along the intended division lines 202.

[0015] The sheet 210 is made of a thermoplastic resin and formed into a sheet shape having a planar area larger than the area of ​​the workpiece 200. In the first embodiment, the sheet 210 is formed into a rectangular planar shape having both a width and a length larger than the outer diameter of the workpiece 200. In the first embodiment, the sheet 210 is wound around a cylindrical roll, cut out to a predetermined length, and then attached to the surface 203 of the workpiece 200 by the sheet attachment device 1.

[0016] The sheet 210 is formed with flat surfaces on both the front and back sides. The sheet 210 is made of a flexible and non-adhesive thermoplastic resin, and does not have a glue layer made of an adhesive resin. The thermoplastic resin constituting the sheet 210 is elastic, and softens when heated above its softening point, and shrinks when further heated. In the first embodiment, the sheet 210 is made of a resin that is transparent or translucent to visible light. In the first embodiment, the sheet 210 is a sheet of a polymer synthesized using an alkene as a monomer, and is made of, for example, polyethylene, polypropylene, or polystyrene as the thermoplastic resin. In the first embodiment, the thickness of the sheet 210 is 50 μm or more and 150 μm or less.

[0017] The sheet application device 1 of embodiment 1 is an apparatus that applies a sheet 210, shown by a dotted line in FIG. 2, cut to a predetermined length to a workpiece 200, and cuts the sheet 210 along the outer edge 206, which is the periphery of the workpiece 200, to form a workpiece with the sheet 211, shown by a solid line in FIG. 2.

[0018] 1, the sheet sticking device 1 includes a sheet sticking unit 2 that sticks a rectangular sheet 210 having a planar area larger than that of the workpiece 200 to the workpiece 200, a sheet cutting unit 20 that cuts the sheet 210 stuck by the sheet sticking unit along an outer edge 206 of the workpiece 200 to separate an unnecessary portion 212 (shown in FIG. 6) of the sheet 210 from the workpiece 200, and a conveying unit (not shown) that conveys the workpiece 200 to which the sheet 210 has been stuck from the sheet sticking unit 2 to the sheet cutting unit 20. The unnecessary portion 212 refers to a portion of the rectangular sheet 210 stuck to the workpiece 200 that protrudes from the outer edge 206 to the outer periphery.

[0019] 1, the sheet adhering section 2 includes a reduced pressure chamber 3, a support table 4, and a heating unit 5. The reduced pressure chamber 3 includes an upper housing 6 that fixes the sheet 210 by sandwiching an outer peripheral portion 213 of the sheet 210 (an area on the outer peripheral side of the unnecessary portion 212 of the sheet 210) between them, a lower housing 7, reduced pressure units 8 and 9 connected to the housings 6 and 7, respectively, and atmosphere release units 10 and 11 connected to the housings 6 and 7, respectively.

[0020] In the decompression chamber 3, when the sheet 210 is sandwiched between the housings 6 and 7, airtightness is maintained between the upper housing 6 and the sheet 210 and between the sheet 210 and the lower housing 7. Decompression units 8 and 9 reduce the pressure inside the housings 6 and 7, respectively. Atmosphere opening units 10 and 11 open the insides of the housings 6 and 7 to the atmosphere.

[0021] The support table 4 is disposed in the lower housing 7, and the back surface 205 of the workpiece 200 is placed on the upper surface. The heating unit 5 is installed in the support table 4, and heats the sheet 210 through the support table 4 and the workpiece 200.

[0022] In the sheet adhering unit 2, the workpiece 200 is placed on the upper surface of the support table 4, and the sheet 210 is sandwiched between the housings 6, 7 of the decompression chamber 3 to fix the sheet 210. The sheet adhering unit reduces the pressure inside the housings 6, 7 using the decompression units 8, 9, and heats the workpiece 200 via the support table 4 using the heating unit 5. In the sheet adhering unit 2, the upper housing 6 is opened to the atmosphere using the atmosphere opening unit 10 connected to the upper housing 6, and the sheet 210 is brought into close contact with the surface 203 of the workpiece 200 due to the air pressure difference inside the housings 6, 7, and the sheet 210 is heated and softened by the heating unit 5 to adhere to the surface 203 of the workpiece 200.

[0023] As shown in FIGS. 1 and 3, the sheet cutting unit 20 includes a sheet storage unit 21, a chuck table 30, a sheet holding unit 40, and a cutting unit 50.

[0024] The sheet storage section 21 stores unnecessary portions 212 of the sheet 210 that are cut along the outer edge 206 of the workpiece 200 and fall when the sheet is released from the sheet holding section 40. The sheet storage section 21 includes a bottom plate 22 parallel to the horizontal direction and a plurality of peripheral plates 23 standing upright from the outer edge of the bottom plate 22. The planar shape of the bottom plate 22 of the sheet storage section 21 is formed into a rectangular shape that is larger than the planar shape of the sheet 210 before it is cut along the outer edge 206 of the workpiece 200.

[0025] The chuck table 30 holds the workpiece 200 on a holding surface 31 that is smaller than the workpiece 200. The chuck table 30 is installed at the center of the bottom plate 22 of the sheet storage section 21, and is formed in a disk shape with an outer diameter smaller than that of the workpiece 200. The chuck table 30 has the workpiece 200 placed on its upper surface, and serves as the holding surface 31 that holds the workpiece 200. The chuck table 30 holds the back surface 205 of the workpiece 200, the front surface 203 of which has a sheet 210 attached, on the holding surface 31.

[0026] The sheet holding portion 40 detachably holds the outer peripheral portion 213 of the sheet 210 attached to the workpiece 200 held by the chuck table 30. The sheet holding portion 40 is provided on each of a pair of peripheral plates 23 (hereinafter, indicated by reference numeral 23-1) facing each other of the sheet storage portion 21. Each sheet holding portion 40 includes a pair of sheet holding plates 41 formed in a plate shape parallel to the peripheral plate 23-1 and arranged in a direction parallel to the peripheral plate 23-1. The sheet holding plates 41 of each sheet holding portion 40 move along the peripheral plate 23-1 by a moving unit (not shown) between a holding position shown by a solid line in FIG. 3 where the sheet holding plates 41 are close to each other and hold the outer peripheral portion 213 of the sheet 210 on their upper surfaces, and a holding release position shown by a dotted line in FIG. 3 where the sheet holding plates 41 are spaced apart from each other and do not hold the outer peripheral portion 213 of the sheet 210.

[0027] A plurality of suction holes 42 connected to a vacuum driving source (not shown) are provided on the upper surface of the sheet holding plate 41 of each sheet holding unit 40. The suction holes 42 are arranged on the upper surface of the sheet holding plate 41 at intervals along the longitudinal direction of the sheet holding plate 41. The sheet holding unit 40 suction-holds the outer peripheral portion 213 of the sheet 210 on the upper surface of the sheet holding plate 41 by sucking the suction holes 42 of the sheet holding plate 41 positioned at the holding position with a vacuum suction source.

[0028] The sheet holding unit 40 releases the holding of the outer peripheral portion 213 of the sheet 210 by stopping the suction of the suction holes 42 and positioning the sheet holding plate 41 at the holding release position. In this way, the sheet holding unit 40 detachably holds the outer peripheral portion 213 of the sheet 210 attached to the workpiece 200 held on the chuck table 30 by moving the sheet holding plate 41 between the holding position and the holding release position, suction by the vacuum suction source, and stopping the suction. The upper surface of the sheet holding plate 41 of each sheet holding unit 40 is disposed above the holding surface 31 of the chuck table 30.

[0029] The cutting section 50 cuts the sheet 210 attached to the workpiece 200 held by the chuck table 30 along the outer edge 206 of the workpiece 200. The cutting section 50 includes a cutter 51 that cuts into the sheet 210 to cut the sheet 210, a rotating roller 52 that is a pressing section that presses an unnecessary portion 212 of the cut sheet 210 that is on the outer periphery side of the workpiece 200 toward the sheet storage section 21, a clamping roller 53 that clamps the sheet 210 between the cutter 51 and the chuck table 30, and a moving unit 54 (shown in FIG. 1 ) that raises and lowers the cutter 51, the rotating roller 52, and the clamping roller 53 and moves them in the circumferential direction of the chuck table 30.

[0030] The cutter 51 is supported by the moving unit 54, and the lower end of the cutting blade is disposed on the outer edge 206 of the workpiece 200 held on the chuck table 30. The cutter 51 is moved by the moving unit 54 along the outer edge 206 of the workpiece 200 held on the chuck table 30.

[0031] The rotating roller 52 is rotatably supported on the lower end of a support column 55 supported by a moving unit 54, and is disposed on the outer periphery side of the chuck table 30 relative to the cutter 51. The lower end of the rotating roller 52 is disposed at the same height as the lower end of the cutting blade of the cutter 51.

[0032] The clamping roller 53 is rotatably supported on the lower end of a support column 56 supported by a moving unit 54, and is disposed on the inner peripheral side of the chuck table 30 relative to the cutter 51. The lower end of the clamping roller 53 is disposed above the lower end of the rotating roller 52 and the lower end of the cutting blade of the cutter 51.

[0033] The moving unit 54 raises and lowers the cutter 51, the rotating roller 52, and the clamping roller 53 as a unit, and moves the cutter 51, the rotating roller 52, and the clamping roller 53 as a unit in the circumferential direction of the chuck table 30. The rotating roller 52 and the clamping roller 53 move together with the cutter 51 in the circumferential direction of the chuck table 30 relative to the sheet 210, and the rotating roller 52 rolls on the sheet 210 while moving relatively to the sheet 210, pressing the sheet 210 toward the sheet accommodating section 21, and the clamping roller 53 rolls on the sheet 210 while moving relatively to the sheet 210, pressing the sheet 210 toward the holding surface 31 of the chuck table 30. At this time, since the lower end of the clamping roller 53 is positioned higher than the lower end of the rotating roller 52 and the lower end of the cutting blade of the cutter 51, the rotating roller 52 moves relative to the sheet 210 in the circumferential direction together with the cutter 51 cutting into the sheet 210, thereby pressing the unnecessary portion 212 of the sheet 210 toward the sheet storage section 21.

[0034] The control unit 100 controls each component constituting the sheet sticking device 1 to cause the sheet sticking device 1 to execute a sheet sticking operation of sticking the sheet 210 to the front surface 203 side of the workpiece 200 and cutting the sheet 210 along the outer edge 206 of the workpiece 200. The control unit 100 is a computer that has an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device, and is capable of executing computer programs.

[0035] The arithmetic processing device of the control unit 100 executes a computer program stored in the ROM on the RAM to generate control signals for controlling the sheet sticking device 1. The arithmetic processing device of the control unit 100 outputs the generated control signals to each component of the sheet sticking device 1 via the input / output interface device.

[0036] The control unit 100 is also connected to a display unit configured with a liquid crystal display device or the like that displays the status and images of the machining operation, and an input unit that an operator uses to register machining content information, etc. The input unit is configured with at least one of a touch panel provided on the display unit, a keyboard, etc.

[0037] Next, the sheet sticking operation of the sheet sticking device 1 having the above-mentioned configuration will be described with reference to the drawings. Fig. 4 is a cross-sectional view showing a state in which the cutter is cutting into the sheet stuck to the workpiece held on the chuck table by the sheet cutting unit shown in Fig. 1. Fig. 5 is a plan view showing the sheet cutting unit shown in Fig. 4. Fig. 6 is a cross-sectional view showing a state in which the sheet cutting unit shown in Fig. 4 cuts the sheet stuck to the workpiece held on the chuck table and stores the unnecessary part of the sheet in the sheet storage unit. Fig. 7 is a plan view showing the sheet cutting unit shown in Fig. 6.

[0038] In the sheet sticking device 1 having the above-mentioned configuration, the control unit 100 controls each component to perform a sheet sticking operation. In the sheet sticking operation, the sheet sticking section 2 of the sheet sticking device 1 sticks the sheet 210 to the surface 203 of the workpiece 200 as described above. In the sheet sticking device 1, the transport unit transports the workpiece 200 with the sheet 210 stuck to the surface 203 from the sheet sticking section 2 to the sheet cutting section 20, and places the workpiece 200 on the holding surface 31 of the chuck table 30, and places the outer peripheral portion 213 of the sheet 210 on the upper surface of the sheet holding plate 41 positioned at the holding position. At this time, the sheet sticking device 1 positions the chuck table 30 and the workpiece 200 in positions where they are coaxial with each other.

[0039] The sheet sticking device 1 sucks and holds the outer peripheral portion 213 of the sheet 210 on the upper surface of the sheet holding plate 41 of the sheet holding section 40, and lowers the cutter 51, rotating roller 52 and clamping roller 53 of the cutting section 50 by the moving unit 54, and as shown in Figures 4 and 5, the cutting blade of the cutter 51 cuts into the sheet 210, and presses the rotating roller 52 against the unnecessary portion 212 of the sheet 210, while pressing the clamping roller 53 against the sheet 210 on the holding surface 31 of the chuck table 30. The sheet sticking device 1 rotates the cutter 51, rotating roller 52 and clamping roller 53 of the cutting section 50 at least once in the circumferential direction of the chuck table 30, and cuts the sheet 210 along the outer edge 206 all around the workpiece 200 by the cutter 51. At this time, since the lower end of rotating roller 52 is positioned lower than the lower end of clamping roller 53, unnecessary portion 212 of cut sheet 210 on the outer peripheral side of outer edge 206 of workpiece 200 is positioned lower than the portion attached to workpiece 200. In addition, when cutting sheet 210, rotating roller 52 is positioned behind cutter 51, which moves in the circumferential direction of the chuck table, so that sheet 210 after being cut by cutter 51 is reliably pushed down by the rotating roller toward the sheet storage section.

[0040] The sheet sticking device 1 stops suction of the sheet 210 by the sheet holding plate 41 of the sheet holding part 40, moves the sheet holding plate 41 to a holding release position, and raises the cutter 51, the rotating roller 52, and the pinching roller 53 by the moving unit 54. Then, as shown in Fig. 6 and Fig. 7, the unnecessary part 212 of the workpiece 200 before cutting the sheet 210, which is located on the outer periphery side of the outer edge 206, is dropped into the sheet storage part 21 and stored in the sheet storage part 21. In this way, the sheet sticking device 1 forms a workpiece 211 with a sheet (including the workpiece 200 and the disk-shaped sheet 210 stuck to the workpiece 200 and having the same diameter as the workpiece 200) shown by the solid line in Fig. 2.

[0041] The sheet sticking device 1 according to the first embodiment described above includes the rotating roller 52 which is a pressing section that presses the unnecessary portion 212 of the sheet 210 cut by the cutting section 50 toward the sheet storage section 21, so that the unnecessary portion 212 of the sheet 210 can be reliably separated from the portion forming the sheet-attached workpiece 211 stuck to the workpiece 200. As a result, the sheet sticking device 1 can eliminate the phenomenon in which the unnecessary portion 212 of the sheet 210 after sticking comes into contact with the workpiece 200 and becomes difficult to drop, and has the effect of easily removing the unnecessary portion 212 of the sheet 210 after sticking.

[0042] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0043] 1 Sheet attachment device 2 Sheet attachment section 20 Sheet cutting section 21 Seat storage area 30 Chuck table 31 Holding surface 40 Sheet holding part 50 Cutting section 51 Cutter 52 Rotating roller (pressure part) 200 Workpiece 206 Outer edge (perimeter) 210 seats 211 Sheeted workpiece 212 Unnecessary part 213 Outer area

Claims

1. A sheet sticking device that sticks a sheet to a plate-shaped workpiece to form a sheet-attached workpiece, a sheet adhering unit that adheres a sheet having an area larger than the workpiece to the workpiece; a sheet cutting section that cuts off the sheet adhered by the sheet adhering section from the workpiece along an outer periphery of the workpiece, The sheet cutting section includes: a chuck table having a holding surface smaller than the workpiece for holding the workpiece; a sheet holding section that detachably holds an outer peripheral portion of the sheet attached to the workpiece held on the chuck table; A cutting section that cuts the sheet along the outer periphery of the workpiece; a sheet storage section for storing the cut sheet which is released from the sheet holding section and falls down; The cut portion is A sheet sticking device comprising a cutter and a pressing section that presses the cut sheet toward the sheet storage section.

2. 2. The sheet sticking device according to claim 1, wherein the pressing portion is a rotating roller which presses the sheet while moving relatively to the sheet together with the cutter.

Images