Vacuum pump system and vacuum pump

Abstract

To maintain exhaust performance while restraining the formation of reaction products inside a vacuum pump.SOLUTION: A vacuum pump system 100 comprises a first vacuum pump 1, and a second vacuum pump 3. The second vacuum pump 3 is connected to a first exhaust port 19 of the first vacuum pump 1. The second vacuum pump 3 comprises a pump part 5, and a trap part 7. The pump part 5 comprises a second rotor 51. The trap part 7 accumulates reaction products formed from gas guided to a third internal space S3 from the first exhaust port 19 by air suction of the pump part 5.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a vacuum pump system and a vacuum pump. [Background technology]

[0002] Some vacuum pumps include a turbine vane pump section that is composed of fixed vanes and rotating vanes, and a drag pump section that is provided downstream of the turbine vane pump section in the exhaust direction. A vacuum pump system including this vacuum pump is used as a means for creating a high vacuum in a process chamber that performs processes such as dry etching or CVD (Chemical Vapor Deposition).

[0003] When a vacuum pump system is used to create a high vacuum in a process chamber, reaction products may be generated and deposited on the vacuum pump, other devices (e.g., dry pump) other than the vacuum pump, and / or gas piping included in the vacuum pump system. It is necessary to suppress the generation of reaction products in the vacuum pump system, because if reaction products are deposited inside the vacuum pump, they may come into contact with parts of the vacuum pump (e.g., rotor). In addition, if reaction products are deposited on the other devices and gas piping, the exhaust capacity of the vacuum pump system will be reduced.

[0004] A method of increasing the temperature inside the vacuum pump is known as a method of suppressing the generation of reaction products inside the vacuum pump. For example, in Patent Document 1, the body of the vacuum pump is heated by a heater to increase the temperature inside. In Patent Document 2, a high-temperature purge gas is introduced into the inside of the vacuum pump to increase the temperature. Meanwhile, in Patent Document 3, a filter is provided on the exhaust side of the vacuum pump to suppress the deposition of reaction products in gas piping and equipment connected to the exhaust side of the vacuum pump. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2020-112133 A [Patent Document 2] JP 2020-90922 A [Patent Document 3] JP 2006-74362 A Summary of the Invention [Problem to be solved by the invention]

[0006] However, it is preferable to suppress the temperature rise inside the vacuum pump, because the rotor will heat up and expand as the temperature rises inside the vacuum pump, making it more likely to come into contact with other components, which shortens the life of the vacuum pump, which is determined by the time it takes for the rotor to expand and come into contact with other components.

[0007] Furthermore, when the temperature inside the vacuum pump is increased by the methods of Patent Documents 1 and 2, the exhaust flow rate of the vacuum pump cannot be increased in order to suppress further temperature increase. Specifically, it is necessary to reduce the exhaust flow rate of the vacuum pump to reduce the load on the motor that rotates the rotor and suppress heat generation from the motor.

[0008] Furthermore, when a filter is provided on the exhaust side of the vacuum pump as in Patent Document 3, the gas flow on the exhaust side of the vacuum pump deteriorates as reaction products accumulate on the filter. When the gas flow on the exhaust side of the vacuum pump deteriorates, the pressure on the exhaust side of the vacuum pump (back pressure) increases. As a result, the exhaust performance of the vacuum pump decreases and / or the load on the motor increases, generating more heat.

[0009] An object of the present invention is to maintain the pumping performance in a vacuum pump system while suppressing the generation of reaction products inside the vacuum pump. [Means for solving the problem]

[0010] A vacuum pump system according to one aspect of the present invention includes a first vacuum pump and a second vacuum pump. The second vacuum pump is connected to an exhaust port of the first vacuum pump. The second vacuum pump has a pump section and a trap section. The pump section has a rotor. The trap section deposits reaction products generated from gas guided from the exhaust port of the first vacuum pump to an internal space by the suction of the pump section. Effect of the Invention

[0011] In the vacuum pump system according to the above-mentioned aspect of the present invention, the pump section of the second vacuum pump introduces gas from the exhaust port of the first vacuum pump into the internal space of the trap section of the second vacuum pump by suction. This makes it possible to lower the pressure in the exhaust path from the inside of the first vacuum pump to the second vacuum pump, thereby suppressing the generation of reaction products inside the first vacuum pump and in the exhaust path from the first vacuum pump to the second vacuum pump. As a result, the frequency of maintenance of the first vacuum pump and the gas piping can be reduced. In addition, since reaction products are deposited in the internal space of the trap section of the second vacuum pump, the generation of reaction products in the pump section can be suppressed.

[0012] Furthermore, by suppressing the generation of reaction products in the exhaust path from the first vacuum pump to the second vacuum pump, the conductance of the exhaust path is maintained high. As a result, the ability of the pump section to suck air into the exhaust port of the first vacuum pump does not decrease, so the pressure (back pressure) on the exhaust side of the first vacuum pump can be maintained low. Furthermore, there is no need to increase the temperature inside the first vacuum pump to suppress the generation of reaction products. As a result, the exhaust performance of the vacuum pump system can be maintained high. Also, the exhaust capacity of the first vacuum pump is improved. [Brief description of the drawings]

[0013] [Figure 1] 1 is a diagram showing a configuration of a vacuum pump system according to an embodiment; [Diagram 2] FIG. 2 is a cross-sectional view of a first vacuum pump. [Diagram 3]FIG. 4 is a cross-sectional view of a second vacuum pump. [Figure 4] FIG. 11 is a cross-sectional view of a second vacuum pump having a trap section provided midway through a pump section. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] 1. Vacuum pump system configuration The configuration of a vacuum pump system according to an embodiment will be described below with reference to the drawings. FIG. 1 is a diagram showing the configuration of a vacuum pump system 100 according to an embodiment. The vacuum pump system 100 is a system that exhausts gas inside an exhaust target device CH. The exhaust target device CH is, for example, a process chamber of a semiconductor manufacturing device. The vacuum pump system 100 includes a first vacuum pump 1, a second vacuum pump 3, and a third vacuum pump 9.

[0015] The intake side of the first vacuum pump 1 is connected to the inside of the exhaust target device CH via an on-off valve 2. The on-off valve 2 switches between communicating or blocking the intake side of the first vacuum pump 1 and the inside of the exhaust target device CH by opening and closing the valve. The on-off valve 2 is also a vacuum valve that controls the pressure inside the exhaust target device CH by controlling the opening degree of the valve. The exhaust side of the first vacuum pump 1 is connected to a second vacuum pump 3 via a first gas line L1.

[0016] The second vacuum pump 3 has a pump section 5 and a trap section 7. The suction side of the pump section 5 is connected to the trap section 7. The trap section 7 is connected to the exhaust side of the first vacuum pump 1 via a first gas line L1. The exhaust side of the pump section 5 is connected to the suction side of the third vacuum pump 9 via a second gas line L2, a first valve V1, and a third gas line L3. The third vacuum pump 9 is, for example, a dry pump. In addition, the suction side of the third vacuum pump 9 is connected to the inside of the exhaust target device CH via a fourth gas line L4, a second valve V2, a fifth gas line L5, and a third gas line L3.

[0017] 2. Configuration of the first vacuum pump A specific configuration of the first vacuum pump 1 will be described below with reference to Fig. 2. Fig. 2 is a cross-sectional view of the first vacuum pump 1. The first vacuum pump 1 includes a first intake port 11, a first rotor 13, a first stator 15, a first motor 17, and a first exhaust port 19. The first intake port 11 is on the intake side of the first vacuum pump 1, and is connected to the inside of the exhaust target device CH via an on-off valve 2.

[0018] The first rotor 13 includes a plurality of stages of rotor vanes 13A and a rotor cylindrical portion 13B. The first rotor 13 is rotatably supported by a first base 21 and a first bearing 23. The first rotor 13 is rotated by a first motor 17. The first stator 15 includes a plurality of stages of stator vanes 15A and a stator cylindrical portion 15B. A thread groove is formed on the inner peripheral surface of the stator cylindrical portion 15B (the surface facing the rotor cylindrical portion 13B). In the first vacuum pump 1, the rotor vanes 13A and the stator vanes 15A are alternately arranged to form a turbo molecular pump portion. On the other hand, the rotor cylindrical portion 13B and the stator cylindrical portion 15B are arranged opposite to each other with a small gap provided at the lower portion of the turbo molecular pump portion to form a thread groove pump portion. The first exhaust port 19 communicates with a first internal space S1 at the lower portion of the thread groove pump portion. The first exhaust port 19 is connected to the second vacuum pump 3 via a first gas line L1.

[0019] In the first vacuum pump 1, the first motor 17 rotates the first rotor 13, causing the turbo molecular pump section and the thread groove pump section to suck gas inside the evacuation target device CH into the first intake port 11. The turbo molecular pump section and the thread groove pump section guide the gas sucked into the first intake port 11 to the first internal space S1 and exhaust it from the first exhaust port 19. As a result, the inside of the evacuation target device CH is brought into a high vacuum state. The gas exhausted from the first exhaust port 19 is sucked in by the second vacuum pump 3.

[0020] 3. Second Vacuum Pump Configuration Next, the configuration of the second vacuum pump 3 will be described with reference to FIG. 3. FIG. 3 is a cross-sectional view of the second vacuum pump 3. The arrow in FIG. 3 indicates the vertical direction. As described above, the second vacuum pump 3 includes the pump section 5 and the trap section 7. The pump section 5 includes the second rotor 51 and the second stator 53.

[0021] The second rotor 51 has a shaft 51A. The shaft 51A is rotatably supported by a plurality of second bearings 55A to 55D. The plurality of second bearings 55A to 55D are attached to a second base 57 at a position where the shaft 51A is housed. The second bearing 55A is, for example, a ball bearing. Meanwhile, the other second bearings 55B to 55D are, for example, magnetic bearings. However, the plurality of second bearings 55B to 55D may be other types of bearings such as ball bearings. A second motor 59 is further attached to the second base 57 at a position where the shaft 51A is housed. The second motor 59 rotates the second rotor 51. A second rotor cylindrical portion 51B is formed on the outer periphery of the second rotor 51. The second rotor cylindrical portion 51B extends in the axial direction of the shaft 51A.

[0022] The second stator 53, which corresponds to a casing, is a cylindrical member having a first end 53A and a second end 53B. The first end 53A is connected to the second base 57. The second end 53B forms an opening O1. The second stator 53 houses the second rotor 51 with a small gap formed between the outer circumferential surface of the second rotor cylindrical portion 51B and the inner circumferential surface of the second stator 53. A screw groove is formed on the inner circumferential surface of the second stator 53, i.e., the surface facing the second rotor cylindrical portion 51B. A small gap is formed between the outer circumferential surface of the second rotor cylindrical portion 51B and the inner circumferential surface of the second stator 53, and a screw groove is formed on the inner circumferential surface of the second stator 53, so that the second rotor cylindrical portion 51B and the second stator 53 form a Holbeck pump portion. The Holbeck pump portion is connected to the second internal space S2. The second internal space S2 is a space surrounded by the upper end portion of the second rotor cylindrical portion 51B, the first end 53A side of the second stator 53, and the second base 57.

[0023] In the above Holweck pump portion, the thread groove may be provided on the outer circumferential surface of the second rotor cylindrical portion 51B facing the second stator 53, instead of on the inner circumferential surface of the second stator 53.

[0024] A second exhaust port 61 is provided on the upper part of the second stator 53. The second exhaust port 61 is connected to the second internal space S2. The second exhaust port 61 is on the exhaust side of the second vacuum pump 3, and is connected to the intake side of the third vacuum pump 9 via the second gas line L2, the first valve V1, and the third gas line L3.

[0025] A first heater 63 is provided on the outer circumferential surface of the second stator 53. The first heater 63 heats the pump section 5. By heating the pump section 5 with the first heater 63, it is possible to suppress the generation of reaction products in the pump section 5. The heating temperature of the pump section 5 by the first heater 63 is, for example, 150°C. This heating temperature can be set appropriately depending on the raw materials used in the process carried out in the exhaust target device CH.

[0026] In the pump section 5, the second rotor 51 is rotated by the second motor 59, and the Holweck pump section draws in gas at the opening O1. The Holweck pump section guides the drawn in gas to the second internal space S2 and exhausts it from the second exhaust port 61. The gas exhausted from the second exhaust port 61 is drawn in by the third vacuum pump 9.

[0027] The trap portion 7 has a bottom portion 7A and a side portion 7B. One end of the side portion 7B is connected to the bottom portion 7A. The bottom portion 7A and the side portion 7B form a third internal space S3. The trap portion 7 has, for example, a cylindrical shape with the bottom portion 7A being circular. The cylindrical shape of the trap portion 7 makes it easier for gas to remain in the third internal space S3. Note that the trap portion 7 can have a shape other than a cylindrical shape (for example, a rectangular parallelepiped, a solid with a polygonal bottom portion 7A, etc.) as long as the gas can be retained inside for a certain amount of time.

[0028] Other gas retention structures may be provided in the third internal space S3 of the trap unit 7. For example, a wall surface may be provided in the third internal space S3 to form a portion in the third internal space S3 where gas is less likely to flow. For example, a gas retention structure such as a louver-shaped or spiral-shaped fin may be provided on the bottom surface portion 7A.

[0029] The other end of the side portion 7B is connected to the second end 53B of the second stator 53. The side portion 7B may be fixed to the second stator 53 by welding or the like, or may be connected to the second stator 53 by screws or the like so as to be detachable from the second stator 53. When the side portion 7B is connected to the second stator 53 so as to be detachable from the second stator 53, the side portion 7B and the second stator 53 are gas-tightly connected to each other by, for example, providing a gas seal between the side portion 7B and the second stator 53.

[0030] The third internal space S3 is open on the opposite side to the bottom surface portion 7A and is connected to the opening O1. A second intake port 71 is provided on one of the side surfaces 7B. The second intake port 71 is connected to the third internal space S3. The second intake port 71 is connected to the first exhaust port 19 of the first vacuum pump 1 via the first gas line L1. This allows the opening O1 of the pump section 5 to communicate with the third internal space S3, the second intake port 71, the first gas line L1, and the first exhaust port 19 of the first vacuum pump. This allows the pump section 5 to guide the gas exhausted to the first exhaust port 19 by the first vacuum pump 1 to the third internal space S3 via the first gas line L1.

[0031] The trap portion 7 is a member made of a metal such as aluminum, stainless steel, etc. The trap portion 7 may be formed, for example, by bending a single metal plate, or by forming the bottom portion 7A and the side portion 7B as separate members and connecting the bottom portion 7A and the side portion 7B by welding or the like.

[0032] 3, the pump section 5 has an opening O1 disposed vertically below. The trap section 7 is disposed vertically further below the opening O1. That is, the trap section 7 is disposed vertically below the pump section 5. This allows reaction products deposited on the bottom section 7A and side section 7B of the trap section 7 to remain in the trap section 7 due to gravity and to be less likely to enter the pump section 5.

[0033] The second vacuum pump 3 includes a cooling section 73. The cooling section 73 is attached in contact with the bottom surface 7A of the trap section 7. The cooling section 73 may be attached to the side surface 7B of the trap section 7. The cooling section 73 is, for example, a metal pipe through which a cooling liquid can flow. The cooling section 73 cools the bottom surface 7A and the side surface 7B of the trap section 7. By cooling the bottom surface 7A and the side surface 7B, the gas in the third internal space S3 can be cooled. By cooling the gas in the third internal space S3, the generation of reaction products in the third internal space S3 can be promoted. This is because, when reaction products are generated using the gas introduced into the inside of the exhaust target device CH, that is, the gas exhausted by the vacuum pump system 100, as a raw material, the lower the temperature of the gas, the easier it is to generate reaction products.

[0034] The second vacuum pump 3 includes a plasma generating unit 75. The plasma generating unit 75 is provided in the third internal space S3 of the trap unit 7. The plasma generating unit 75 generates plasma in the third internal space S3. The plasma generated from the plasma generating unit 75 decomposes reaction products accumulated in the third internal space S3 and the like. For example, by generating plasma from the plasma generating unit 75 during maintenance, cleaning (removal of reaction products) of the trap unit 7 and the like can be performed. The plasma generating unit 75 is, for example, a parallel plate type plasma generating device or an inductively coupled plasma (ICP) generating device.

[0035] The second vacuum pump 3 includes a second heater 77. The second heater 77 is provided on the side portion 7B of the trap portion 7. The second heater 77 heats the trap portion 7. This allows the reaction products deposited in the trap portion 7 to be removed by heating the trap portion 7 with the second heater 77. The heating temperature of the trap portion 7 with the second heater 77 is, for example, 150°C. This heating temperature can be set appropriately depending on the raw materials used in the process performed in the exhaust target device CH.

[0036] In the second vacuum pump 3, the position where the trap section 7 is provided is not limited to the opening O1 of the pump section 5. For example, as shown in FIG. 4, the trap section 7 may be provided in the middle of the pump section 5. Specifically, the trap section 7 may be provided so that the third internal space S3 is connected to an opening provided in the second stator 53. FIG. 4 is a cross-sectional view of the second vacuum pump 3 in which the trap section 7 is provided in the middle of the pump section 5. In this modification, the opening O1 of the pump section 5 is connected to the first exhaust port 19 of the first vacuum pump 1.

[0037] In the second vacuum pump 3 having the trap section 7 provided in the middle of the pump section 5, the pump section 5 guides gas from the first exhaust port 19 of the first vacuum pump 1 to the opening O1. The gas guided to the opening O1 passes between the second rotor cylindrical section 51B and the second stator 53 by suction of the pump section 5, and is exhausted from the second exhaust port 61. While the gas guided to the opening O1 passes between the second rotor cylindrical section 51B and the second stator 53, the gas is retained in the third internal space S3 of the trap section 7. Reaction products are generated from the gas retained in the third internal space S3 and are accumulated in the trap section 7.

[0038] 4. Vacuuming the equipment to be evacuated Hereinafter, a description will be given of the evacuation operation for bringing the inside of the evacuation target device CH into a high vacuum state using the vacuum pump system 100. First, the evacuation target device CH is evacuated to a pressure that allows the first vacuum pump 1 to operate. This evacuation can be achieved by operating the third vacuum pump 9 with the second valve V2 open, and sucking air into the inside of the evacuation target device CH with the third vacuum pump 9. During this evacuation, the on-off valve 2 and the first valve V1 are closed.

[0039] After the inside of the exhaust target device CH reaches a pressure at which the first vacuum pump 1 can operate, the first vacuum pump 1 starts evacuation. Specifically, the second valve V2 is closed while the first valve V1 is opened, and then the first vacuum pump 1 and the second vacuum pump 3 are operated. Thereafter, the on-off valve 2 is opened to start evacuation by the first vacuum pump 1. Note that, when the first vacuum pump 1 and the second vacuum pump are constantly operated, the second valve V2 is closed, the first valve V1 is opened, and then the on-off valve 2 is opened to start evacuation by the first vacuum pump 1.

[0040] After the first vacuum pump 1 places the evacuated target device CH in a high vacuum state, various processes are performed inside the evacuated target device CH. For example, a process is performed in which a semiconductor material is produced using the gas introduced into the evacuated target device CH as a raw material. Alternatively, a process is performed in which a substrate or the like is etched using the gas introduced into the evacuated target device CH as an etching gas.

[0041] The gas introduced into the inside of the exhaust target device CH is exhausted by the vacuum pump system 100. Specifically, the gas inside the exhaust target device CH is first sucked by the first vacuum pump 1 and exhausted from the first exhaust port 19. The gas exhausted from the first exhaust port 19 is guided to the third internal space S3 through the first gas line L1 by the suction of the pump section 5 of the second vacuum pump 3. The gas guided to the third internal space S3 is cooled while remaining in the third internal space S3. As a result, reaction products are generated from the gas guided to the third internal space S3 and are deposited in the trap section 7. After generating reaction products, the gas guided to the third internal space S3 is exhausted from the second exhaust port 61 by the pump section 5 and sucked by the third vacuum pump 9.

[0042] In the vacuum pump system 100, the third internal space S3 of the second vacuum pump 3 is connected to the first exhaust port 19 via the first gas line L1. The first exhaust port 19 is connected to the inside of the first vacuum pump 1. Therefore, the pressure inside the first vacuum pump 1 is lowered by the pump section 5 of the second vacuum pump 3. When the pressure inside the first vacuum pump 1 is lowered, the partial pressure of the gas that is the raw material of the reaction product inside the first vacuum pump 1 becomes lower than the saturated vapor pressure, so that the generation and deposition of the reaction product inside the first vacuum pump 1 is suppressed. If the reaction product does not deposit inside, cleaning of the inside of the first vacuum pump 1 becomes unnecessary. In addition, the first exhaust port 19 and the first gas line L1 are also sucked by the pump section 5, so that the generation of the reaction product to the first exhaust port 19 and the first gas line L1 is also suppressed. As a result, the frequency of maintenance of the first vacuum pump 1 and the first gas line L1 can be reduced.

[0043] Moreover, by suppressing the generation of reaction products in the first exhaust port 19 and the first gas line L1, the conductance of the first exhaust port 19 and the first gas line L1 is maintained high. As a result, the ability of the pump unit 5 to suck air into the first exhaust port 19 does not decrease, so the back pressure of the first vacuum pump 1 can be maintained low. As a result, the ability of the vacuum pump system 100 to exhaust the inside of the exhaust target device CH can be maintained high. Furthermore, since it is not necessary to increase the temperature inside the first vacuum pump 1 to suppress the generation of reaction products, the exhaust capacity of the first vacuum pump 1 is improved. Specifically, the amount of gas that the first vacuum pump 1 can exhaust can be increased. Also, the inside of the exhaust target device CH can be made into a higher vacuum than before.

[0044] In the vacuum pump system 100, reaction products are generated and deposited in the trap section 7 of the second vacuum pump 3, and the gas after generating the reaction products is exhausted by the pump section 5. This makes it difficult for reaction products to be generated in the pump section 5. As a result, the frequency of cleaning the pump section 5 can be reduced, making it easier to maintain the second vacuum pump 3. When a large amount of reaction products has deposited in the trap section 7, the trap section 7 is replaced or cleaned.

[0045] In addition, in the second vacuum pump 3 in which the trap section 7 is provided in the large opening O1 of the second stator 53, even if a large amount of reaction products accumulates in the trap section 7, the conductance between the pump section 5 and the third internal space S3 does not decrease, and the suction capacity of the pump section 5 for the third internal space S3 is unlikely to decrease.

[0046] In the vacuum pump system 100, not only can the inside of the exhaust target device CH be evacuated by operating both the first vacuum pump 1 and the second vacuum pump 3, but also the inside of the exhaust target device CH can be evacuated by operating only the second vacuum pump 3. Since the second vacuum pump 3 does not have as high an exhausting capacity as the first vacuum pump 1, the inside of the exhaust target device CH can be evacuated to a high pressure that cannot be achieved by the first vacuum pump 1 by evacuating the inside of the exhaust target device CH using only the second vacuum pump 3. As a result, the types of processes that can be executed in one exhaust target device CH can be increased. For example, a process that requires a high vacuum (e.g., sputtering, etching) and a process that requires a low vacuum (e.g., CVD) can be executed in one exhaust target device CH. When the exhaust target device CH is evacuated using only the second vacuum pump 3, for example, the inside of the first vacuum pump 1 can be heated to make it difficult to generate reaction products inside the first vacuum pump 1.

[0047] 5. Cleaning operation using plasma generating unit Next, a cleaning operation of the vacuum pump system 100 and the like using the plasma generating unit 75 provided in the trap unit 7 of the second vacuum pump 3 will be described. Cleaning using the plasma generating unit 75 is performed by opening the on-off valve 2, the first valve V1, and / or the second valve V2 and generating plasma in the third internal space S3 by the plasma generating unit 75. This allows radicals generated by the plasma to remove reaction products from the third internal space S3 up to a location that the radicals can reach.

[0048] Alternatively, cleaning may be performed by opening the on-off valve 2 and the second valve V2, closing the first valve V1, operating the third vacuum pump 9, and generating plasma in the third internal space S3 by the plasma generating unit 75. In this case, radicals generated by the plasma are likely to reach the first gas line L1, the inside of the first vacuum pump 1, the inside of the exhaust target device CH, the fourth gas line L4, the fifth gas line L5, and the third gas line L3 from the third internal space S3. As a result, cleaning can be performed from the third internal space S3 to the first gas line L1, the inside of the first vacuum pump 1, the inside of the exhaust target device CH, the fourth gas line L4, the fifth gas line L5, and the third gas line L3.

[0049] Alternatively, cleaning may be performed by opening the first valve V1, closing the on-off valve 2 and the second valve V2, operating the third vacuum pump 9, and generating plasma in the third internal space S3 by the plasma generator 75. In this case, radicals generated by the plasma are more likely to reach the second gas line L2 and the third gas line L3 from the third internal space S3. As a result, cleaning can be performed from the third internal space S3 to the second gas line L2 and the third gas line L3.

[0050] In the vacuum pump system 100 according to the present embodiment described above, the pump section 5 of the second vacuum pump 3 draws gas from the first exhaust port 19 of the first vacuum pump 1 into the third internal space S3 of the trap section 7 of the second vacuum pump 3. This allows the pressure in the exhaust path from the inside of the first vacuum pump 1 to the second vacuum pump 3 to be lowered. When the pressure in the exhaust path from the inside of the first vacuum pump 1 to the second vacuum pump 3 is lowered, the partial pressure of the gas that is the raw material of the reaction product at these locations becomes lower than the saturated vapor pressure, so that the generation and deposition of the reaction product in the exhaust path from the inside of the first vacuum pump 1 to the second vacuum pump 3 is suppressed. As a result, the maintenance frequency of the first vacuum pump 1 and the gas piping (first gas line L1) can be reduced. In addition, the reaction product is deposited in the third internal space S3 of the trap section 7 of the second vacuum pump 3, so that the generation of the reaction product in the pump section 5 can be suppressed.

[0051] Moreover, by suppressing the generation of reaction products in the exhaust path from the first vacuum pump 1 to the second vacuum pump 3, the conductance of the exhaust path is maintained high. As a result, the ability of the pump section 5 to suck air into the first exhaust port 19 of the first vacuum pump 1 does not decrease, so the back pressure on the exhaust side of the first vacuum pump 1 can be maintained low. Furthermore, it is not necessary to increase the temperature inside the first vacuum pump 1 to suppress the generation of reaction products. As a result, the exhaust performance of the vacuum pump system 100 can be maintained high. Furthermore, it is not necessary to increase the temperature inside the first vacuum pump 1 to suppress the generation of reaction products, so the exhaust performance of the first vacuum pump 1 is improved.

[0052] Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications are possible without departing from the gist of the invention.

[0053] The second vacuum pump 3 does not have to be previously installed in the vacuum pump system 100. In other words, the second vacuum pump 3 can be used as an independent vacuum pump. In this case, the second vacuum pump 3 can be installed in an existing system including the first vacuum pump 1 and the third vacuum pump 9.

[0054] In the second vacuum pump 3, the positional relationship between the pump section 5 and the trap section 7 does not have to be such that the trap section 7 is provided vertically below the pump section 5, as long as the reaction products accumulated in the trap section 7 are unlikely to enter the pump section 5. For example, the pump section 5 and the trap section 7 may be arranged side by side in the horizontal direction.

[0055] The method of retaining the gas in the third internal space S3 of the second vacuum pump 3 is not limited to forming the third internal space S3 in a shape that allows the gas to easily retain therein. For example, the gas in the third internal space S3 can be retained by rotating the second rotor 51 of the pump section 5 at an appropriate rotation speed.

[0056] The first vacuum pump 1 according to the above embodiment is a pump in which a turbomolecular pump section consisting of multiple stages of rotor blades 13A and multiple stages of stator blades 15A and a thread groove pump consisting of a rotor cylindrical section 13B and a stator cylindrical section 15B are integrated. However, the thread groove pump may be omitted. That is, the first vacuum pump 1 may be a turbomolecular pump. Alternatively, the turbomolecular pump may be omitted. That is, the first vacuum pump 1 may be a thread groove pump.

[0057] It will be appreciated by those skilled in the art that the exemplary embodiments described above are examples of the following aspects.

[0058] (First aspect) A vacuum pump system includes a first vacuum pump and a second vacuum pump connected to an exhaust port of the first vacuum pump. The second vacuum pump has a pump section and a trap section. The pump section has a rotor. The trap section deposits reaction products generated from gas guided from the exhaust port of the first vacuum pump to an internal space by suction of the pump section.

[0059] In the vacuum pump system according to the first aspect, the pump section of the second vacuum pump draws gas from the exhaust port of the first vacuum pump into the internal space of the trap section of the second vacuum pump. This makes it possible to lower the pressure in the exhaust path from the inside of the first vacuum pump to the second vacuum pump, thereby suppressing the generation of reaction products inside the first vacuum pump and in the exhaust path from the first vacuum pump to the second vacuum pump. As a result, the frequency of maintenance of the first vacuum pump and the gas piping can be reduced. In addition, since reaction products are deposited in the internal space of the trap section of the second vacuum pump, the generation of reaction products in the pump section can be suppressed.

[0060] Furthermore, by suppressing the generation of reaction products in the exhaust path from the first vacuum pump to the second vacuum pump, the conductance of the exhaust path is maintained high. As a result, the ability of the pump section to suck air into the exhaust port of the first vacuum pump does not decrease, so the back pressure on the exhaust side of the first vacuum pump can be maintained low. Furthermore, there is no need to increase the temperature inside the first vacuum pump. As a result, the exhaust performance of the vacuum pump system can be maintained high. Also, the exhaust capacity of the first vacuum pump is improved.

[0061] (Second Aspect) The vacuum pump system of the first aspect may further include a cooling section. The cooling section cools the trap section. This cools the gas in the internal space of the trap section 7, making it easier to generate reaction products in the internal space.

[0062] (Third aspect) The trap section may be disposed vertically below the pump section, which makes it difficult for reaction products accumulated in the trap section to enter the pump section.

[0063] (Fourth Aspect) The vacuum pump system may further include a plasma generating unit. The plasma generating unit generates plasma in the internal space of the trap unit. This makes it possible to perform cleaning to remove reaction products generated in the vacuum pump system without disassembling the vacuum pump system.

[0064] (Fifth Aspect) The vacuum pump system may further include a first heater. The first heater heats the pump section. By heating the pump section with the first heater, accumulation of reaction products on the pump section can be suppressed.

[0065] (Sixth Aspect) The vacuum pump system may further include a second heater. The second heater heats the trap section. This allows reaction products accumulated in the trap section to be removed by heating the trap section with the second heater.

[0066] (Seventh Aspect) A vacuum pump includes a pump section and a trap section. The pump section is composed of a rotor and a stator that houses the rotor. The trap section has an internal space connected to the opening of the stator. The trap section accumulates reaction products generated from gas introduced into the internal space by the suction of the pump section. In the vacuum pump according to the seventh aspect, reaction products accumulate in the internal space of the trap section, and the gas after generating the reaction products is exhausted by the pump section. This makes it difficult for reaction products to be generated in the pump section. As a result, the frequency of cleaning the pump section can be reduced, making maintenance of the second vacuum pump easier. In addition, since the trap section is provided in a large opening of the stator, even if a large amount of reaction products accumulate in the trap section, the conductance between the pump section and the internal space does not decrease, and the suction capacity of the pump section for the internal space is unlikely to decrease. [Explanation of symbols]

[0067] 100 Vacuum Pump System 1. First Vacuum Pump 11 First air intake 13 First Rotor 13A Rotor blade 13B Rotor cylinder 15 First stator 15A Stator blade 15B Stator cylinder 17 First motor 19 First exhaust port 21 First Base 23 No. 1 bearing S1 1st internal space S2 2nd internal space 2. On-off valve 3. Second Vacuum Pump 5. Pump section 51 Second rotor 51A Shaft 51B Second rotor cylinder 53 Second stator 53A 1st end 53B 2nd end O1 opening 55A~55D Second bearing 57 2nd Base 59 Second Motor 61 Second exhaust port 63 First Heater 7 Trap section 7A Bottom part 7B Side part S3 3rd internal space 71 Second intake port 73 Cooling section 75 Plasma generating unit 77 Second Heater 9. Third Vacuum Pump CH Exhaust target equipment L1 First gas line L2 Second gas line L3 3rd gas line L4 4th gas line L5 5th gas line V1 First valve V2 Second valve

Claims

1. a first vacuum pump; a second vacuum pump connected to an exhaust port of the first vacuum pump; The second vacuum pump comprises: A Holweck pump section having a rotor and a stator, with a screw groove formed in either the rotor or the stator; a trap section for depositing reaction products generated from the gas introduced into the internal space from the exhaust port by the suction of the Holweck pump section; having The trap section is disposed vertically below the Holweck pump section, The Holweck pump section is A second exhaust port is disposed vertically above the stator of the Holweck pump portion; an opening disposed vertically below the Holweck pump portion and connected to the internal space of the trap portion; A vacuum pump system comprising:

2. The vacuum pump system according to claim 1 , further comprising a cooling section for cooling the trap section.

3. The vacuum pump system according to claim 1 or 2, further comprising a plasma generating unit that generates plasma in the internal space.

4. 4. The vacuum pump system according to claim 1, further comprising a first heater for heating the Holweck pump section.

5. 5. The vacuum pump system according to claim 1, further comprising a second heater for heating the trap portion.

6. The vacuum pump system according to any one of claims 1 to 5, wherein the first vacuum pump includes a turbomolecular pump.

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