Optical equipment moving device

Abstract

The present invention relates to a moving device for optical equipment that precisely moves an optical equipment for measurement or inspection. The moving device for optical equipment according to an embodiment of the present invention includes a moving block to which an optical equipment is coupled at a front side, a fixed block disposed behind the moving block and coupled to a stone surface plate, a wedge stage module disposed on the fixed block and moving the moving block in a vertical direction, a vertical guide disposed on a side end of the moving block and guiding the moving block in a vertical direction, and a horizontal stage module connected between the wedge stage module and the moving block and guiding the movement in a horizontal direction.

Description

[Technical field]

[0001] The present invention relates to a moving device for optical equipment, and more particularly to a moving device for optical equipment for precisely moving the optical equipment for measurement or inspection. [Background technology]

[0002] In manufacturing semiconductors, deposition, photolithography, and etching processes are repeated to successively form patterns on the wafer. When these numerous layers are stacked, if each pattern is stacked precisely in the required position, no defects will occur and the semiconductor will function normally.

[0003] Overlay measurement in an exposure process in which a pattern is formed on a wafer using an exposure tool involves using optical equipment to measure whether a pattern from a previous process and a pattern formed in a current process are accurately aligned and connected as designed.

[0004] As semiconductor processes change and wafer thicknesses become more diverse due to increasing integration density, overlay measurement devices can accommodate this by either vertically moving a chuck containing the wafer or vertically moving optical equipment to adjust the height according to the wafer thickness.

[0005] The method of vertically moving a chuck containing a wafer can cause problems in repeatability of the flatness of the chuck, and therefore, in recent years, a method of moving an optical device using a moving device fixed to a granite surface plate has been explored.

[0006] However, if the distance between the optical equipment and the stone base increases due to the movement device, there is a risk that the safety and accuracy of the optical equipment may decrease, and since the movement device must support the weight of the optical equipment to move it, there is a problem that too much load is placed on the motor. Summary of the Invention [Problem to be solved by the invention]

[0007] SUMMARY OF THE PRESENT EMBODIMENT An object of the present invention is to provide a moving device for optical equipment having a slim structure.

[0008] It is yet another object of the present invention to provide a movement device for an optical equipment which minimizes the movement load.

[0009] The objects of the present invention are not limited to the objects mentioned above, and other objects not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0010] In order to achieve the above object, an optical equipment moving device according to an embodiment of the present invention includes a moving block to which an optical equipment is connected at the front, a fixed block disposed behind the moving block and connected to a stone base, a wedge stage module disposed on the fixed block and moving the moving block vertically, vertical guides disposed on side ends of the moving block and guiding the moving block vertically, and a horizontal stage module connected between the wedge stage module and the moving block and guiding movement in the horizontal direction.

[0011] Other specific details of the embodiments are included in the detailed description and drawings. Effect of the Invention

[0012] The optical equipment moving device of the present invention has one or more of the following advantages.

[0013] First, there is an advantage in that a pair of symmetrically arranged ball nut blocks are moved closer to or farther away from each other, and the wedge block is moved vertically, so that the forces in the driving directions cancel each other out and only the force in the vertical direction is transmitted to the moving block.

[0014] Secondly, the "V" shaped wedge block increases accuracy and reduces the load on the motor caused by the weight of the optical equipment.

[0015] Thirdly, by appropriately arranging and slimming down the driving and guiding mechanical elements for moving the optical equipment, the distance between the optical equipment and the stone base can be minimized, thereby improving safety and accuracy.

[0016] Fourth, since the force is transmitted only in the vertical direction to the optical device, it has two degrees of freedom in the horizontal direction, which is advantageous in improving the measurement accuracy.

[0017] The effects of the present specification are not limited to those mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims. [Brief description of the drawings]

[0018] [Figure 1] 1 is a perspective view of a moving device for an optical equipment according to an embodiment of the present invention; [Diagram 2] 2 is a perspective view of the moving device of the optical equipment shown in FIG. 1 in another direction. [Diagram 3] 2 is a perspective view of the optical equipment moving device shown in FIG. 1 excluding the optical equipment; [Figure 4] FIG. 2 is a side view of a moving device of the optical equipment shown in FIG. [Diagram 5] FIG. 2 is an exploded perspective view of a moving device of the optical equipment shown in FIG. 1; [Figure 6] 1 is a perspective view of a wedge stage module of a moving device of an optical equipment according to an embodiment of the present invention; [Figure 7] FIG. 7 is an exploded perspective view of the wedge stage module shown in FIG. 6. [Figure 8] 1 is a perspective view of a horizontal stage module of a moving device of an optical equipment according to an embodiment of the present invention; [Figure 9] FIG. 9 is an exploded perspective view of the horizontal stage module shown in FIG. 8. [Figure 10] FIG. 9 is a partial perspective view of an upper guide of the horizontal stage module shown in FIG. 8. [Figure 11] 1 is a perspective view of a vertical guide of a moving device of an optical equipment according to an embodiment of the present invention; [Figure 12] 12 is a cutaway perspective view of the vertical guide shown in FIG. 11. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] The advantages and features of the present invention, as well as the methods for achieving them, will become clear from the following detailed description of the embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and may be embodied in various different forms. However, the present embodiments are provided to fully disclose the present invention and fully inform those skilled in the art of the present invention of the scope of the invention, and the present invention is defined only by the scope of the claims. The same reference symbols refer to the same elements throughout the specification.

[0020] Although the terms "first", "second", etc. are used to describe various components, it is understood that these components are not limited by these terms. These terms are used merely to distinguish one component from another, and it is understood that a first component may also be a second component unless otherwise specified.

[0021] Throughout the specification, unless otherwise specified to the contrary, each element may be singular or plural.

[0022] Hereinafter, when an arbitrary structure is arranged on the "top (or bottom)" of a component or "above (or below)" a component, it means that the arbitrary structure is not only arranged in contact with the upper surface (or lower surface) of the component, but also that other structures may be interposed between the component and the arbitrary structure arranged on (or below) the component.

[0023] In addition, when a component is described as being "coupled," "coupled," or "connected" to another component, it should be understood that the components may be directly coupled or connected to each other, but that other components may be "intervening" between each component, or each component may be "coupled," "coupled," or "connected" via other components.

[0024] As used herein, singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "include" should not be interpreted as including all of the multiple components or multiple steps described in the specification, and should be interpreted as including some of the components or steps that may not be included or may further include additional components or steps.

[0025] Throughout the specification, "A and / or B" means A, B, or A and B, unless otherwise specified, and "C to D" means C or more and D or less, unless otherwise specified.

[0026] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described with reference to the drawings to explain a moving device for optical equipment according to an embodiment of the present invention.

[0027] FIG. 1 is an oblique view of an optical equipment moving device according to an embodiment of the present invention, FIG. 2 is an oblique view of the optical equipment moving device shown in FIG. 1 from another direction, FIG. 3 is an oblique view of the optical equipment moving device shown in FIG. 1 without the optical equipment, FIG. 4 is a side view of the optical equipment moving device shown in FIG. 1, and FIG. 5 is an exploded oblique view of the optical equipment moving device shown in FIG. 1.

[0028] The optical equipment moving device according to an embodiment of the present invention includes an upright plate-like moving block 192 to which the optical equipment 10 is connected at the front, an upright plate-like fixed block 191 arranged behind the moving block 192 and connected to a stone surface plate (not shown), a wedge stage module 110 arranged on the fixed block 191 and moving the moving block 192 vertically, a vertical guide 130 arranged on the side end of the moving block 192 and guiding the moving block 192 vertically, and a horizontal stage module 120 connected between the wedge stage module 110 and the moving block 192 and guiding movement in the horizontal direction.

[0029] The movable block 192 is formed in a plate shape and disposed upright. The optical equipment 10 is fixed to the front surface of the movable block 192 to support the optical equipment 10. The movable block 192 is disposed in front of the fixed block 191 so as to be movable in the vertical direction.

[0030] The movable block 192 has both left and right ends connected to the fixed block 191 by a pair of vertical guides 130. The movable block 192 has a pair of vertical guides 130 coupled to the rear surfaces of both ends. The movable block 192 has a long step formed in the vertical direction so that at least two faces thereof are in close contact with the vertical guides 130.

[0031] The moving block 192 is moved vertically by the wedge stage module 110. The moving block 192 is connected to the horizontal stage module 120 by a block connector 197. The moving block 192 has the block connector 197 coupled to its upper end.

[0032] The block connector 197 is coupled to the upper end of the moving block 192 and is disposed so as to protrude rearward. The block connector 197 is formed in a substantially T-shape. A portion of the block connector 197 disposed in the left-right direction is coupled to the upper end of the moving block 192.

[0033] A portion of the block connector 197 disposed in the front-rear direction is coupled to the upper end of the horizontal stage module 120. The block connector 197 is moved in the vertical direction by the wedge stage module 110, and causes the moving block 192 to move.

[0034] The fixed block 191 is formed in a plate shape and is arranged standing up. The fixed block 191 is arranged behind the moving block 192. The plate-shaped fixed block 191 is arranged so that its face faces the plate-shaped moving block 192. The fixed block 191 is arranged so that its front face faces the rear face of the moving block 192.

[0035] The fixed block 191 is connected to the movable block 192 on both left and right sides by a pair of vertical guides 130. The fixed block 191 has a pair of vertical guides 130 coupled to the front of both sides. The fixed block 191 has a long step formed in the vertical direction so that at least two faces thereof are in close contact with the vertical guides 130.

[0036] The fixed block 191 is connected to a stone surface plate (not shown) by a pair of stone surface plate connectors 195. A pair of stone surface plate connectors 195 are respectively coupled to both side ends of the fixed block 191. The pair of stone surface plate connectors 195 are respectively coupled to both side ends of the fixed block 191. The stone surface plate connectors 195 are fixed in close contact with the front and side surfaces of the fixed block 191. The stone surface plate connector 195 protrudes rearward and is coupled to the upper surface of the stone surface plate. The stone surface plate connector 195 is provided with a bolt that can adjust the vertical level of the fixed block 191.

[0037] The fixed block 191 is coupled to and fixed to a stone surface plate. The stone surface plate is disposed behind the fixed block 191 and supports the fixed block 191.

[0038] The wedge stage module 110 is disposed on the upper end of the fixed block 191. The middle part of the upper end of the fixed block 191 is retracted downward, and the wedge stage module 110 is coupled to the retracted part.

[0039] A pair of side covers 193 are coupled to both ends of the fixing block 191. The pair of side covers 193 are coupled to both ends of the fixing block 191, respectively. Each of the pair of side covers 193 is formed in a "C" shape and disposed to protrude forward. The pair of side covers 193 are disposed at both sides of the optical equipment 10 at a distance from each other to protect the optical equipment 10.

[0040] A front cover 194 is coupled to the front ends of the pair of side covers 193. The front cover 194 is coupled to the front ends of the pair of side covers 193 and is disposed apart from the optical equipment 10. The front cover 194 protects the optical equipment 10.

[0041] The wedge stage module 110 is coupled to a recessed portion at the upper end of the fixed block 191 and is disposed behind the fixed block 191. A step is formed at the lower end of the wedge stage module 110 so that at least two surfaces of the wedge stage module 110 are in close contact with the fixed block 191. The wedge stage module 110 is disposed above the stone surface plate.

[0042] The wedge stage module 110 is connected to the moving block 192 and moves the moving block 192 in the vertical direction. The wedge stage module 110 is a motorized stage that moves the moving block 192 in the vertical direction and is provided with two wedges to enable precise movement and minimize motor load. The wedge stage module 110 is coupled to the horizontal stage module 120 at its upper end.

[0043] A more detailed description of the wedge stage module 110 is provided below with reference to FIGS.

[0044] The horizontal stage module 120 guides the moving block 192 in two axes that are perpendicular to each other. The horizontal stage module 120 is configured by connecting two horizontal stages so that their guide directions are perpendicular to each other. The horizontal stage module 120 guides the moving block 192 in the front-back direction and the left-right direction. The horizontal stage module 120 is connected between the moving block 192 and the wedge stage module 110, and gives the moving block 192 degrees of freedom in the front-back direction and the left-right direction.

[0045] When the moving block 192 to which the optical equipment 10 is attached moves vertically, it can move horizontally or rotate around a horizontal or vertical axis due to a repulsive force, thrust, or vibration generated by the vertical guide 130 and / or the wedge stage module 110. If the moving block 192 moves or rotates horizontally, the optical equipment 10 cannot perform accurate measurement. The horizontal stage module 120 rotates the moving block 192 or offsets the force that tries to move it horizontally, so that the moving block 192 can move only vertically.

[0046] The horizontal stage module 120 is disposed behind the moving block 192. The horizontal stage module 120 has a lower end coupled to the wedge stage module 110. The horizontal stage module 120 has an upper end coupled to the underside of the protruding portion of the block connector 197. The horizontal stage module 120 is connected to the moving block 192 by the block connector 197.

[0047] The horizontal stage module 120 will be described in detail below with reference to FIGS.

[0048] The pair of vertical guides 130 are respectively coupled to both side ends of the moving block 192 and to both front sides of the fixed block 191. The pair of vertical guides 130 connect the moving block 192 to the fixed block 191 so that the moving block 192 is movable in the vertical direction. The pair of vertical guides 130 are respectively disposed on both side ends of the moving block 192 to guide the moving block 192 in the vertical direction.

[0049] The vertical guide 130 is a linear guide that provides guidance in the vertical direction, and is preferably a cross roller guide.

[0050] A more detailed description of the vertical guide 130 will be provided below with reference to FIGS.

[0051] FIG. 6 is a perspective view of a wedge stage module of a moving device of an optical equipment according to an embodiment of the present invention, and FIG. 7 is an exploded perspective view of the wedge stage module shown in FIG.

[0052] The wedge stage module 110 according to an embodiment of the present invention includes a motor 111 that provides a driving force, a ball screw 116 that is rotated by the motor, a wedge block 112 that is connected to the horizontal stage module 120 and has an inclined surface formed on its lower side, a pair of ball nut blocks 115 that each have an inclined surface formed on their upper side and move horizontally by rotation of the ball screw 116 and move the wedge block 112 vertically, a plurality of wedge guides 113 that slidably connect the wedge block 112 and the pair of ball nut blocks 115 to each other, a wedge supporter 119 that is connected to the fixed block 191 and supports the pair of ball nut blocks 115 so that they can move horizontally, and a plurality of supporter guides 118 that slidably connect the wedge supporter 119 and the pair of ball nut blocks 115 to each other.

[0053] The motor 111 is an electric motor that generates a rotational force when driven. The rotation shaft of the motor 111 is connected to the ball screw 116 and rotates the ball screw 116 when driven. The rotation shaft of the motor 111 is arranged in the horizontal direction. The rotation shaft of the motor 111 is arranged in the direction of both side ends (left and right directions) of the moving block 192. The motor 111 is seated and coupled to one of a pair of stone surface plate connectors 195. One of the pair of stone surface plate connectors 195 supports the motor 111.

[0054] The wedge block 112 has a symmetrical "V" shaped inclined surface formed on the underside. The wedge block 112 is connected to a pair of ball nut blocks 115 by a plurality of wedge guides 113 so as to be slidable relative to each other. The wedge block 112 is connected to the pair of ball nut blocks 115 so as to be movable in the vertical direction. The wedge block 112 is moved in the vertical direction by the pair of ball nut blocks 115 when the motor 111 is driven.

[0055] The upper end of the wedge block 112 is coupled to the horizontal stage module 120. The wedge block 112 is coupled to the moving block 192 by the horizontal stage module 120 and a block connector 197. When the wedge block 112 moves vertically by being driven by the motor 111, the moving block 192 moves vertically.

[0056] The ball screw 116 is connected to the motor 111 and rotates when the motor 111 is driven. The ball screw 116 has a screw thread formed on its periphery. A pair of ball nut blocks 115 are fitted into the ball screw 116. The ball screw 116 may be of any of a return tube type, a deflector type, and an end cap type.

[0057] It is preferable that the ball screw 116 has threads formed in opposite directions corresponding to the pair of ball nut blocks 115 so that the pair of ball nut blocks 115 can move in different directions when the ball screw 116 rotates.

[0058] The ball screw 116 converts the rotational motion of the motor 111 into linear motion together with the pair of ball nut blocks 115. When rotating in one direction, the ball screw 116 moves the pair of ball nut blocks 115 so that they approach each other, and when rotating in the other direction, the ball screw 116 moves the pair of ball nut blocks 115 so that they move away from each other.

[0059] The pair of ball nut blocks 115 are fitted into the ball screw 116 and move horizontally when the ball screw 116 rotates. When the motor 111 is driven, the pair of ball nut blocks 115 move away from or towards each other.

[0060] The pair of ball nut blocks 115 each have an inclined surface formed on the upper side. The pair of ball nut blocks 115 are disposed symmetrically to each other in correspondence with the "V" shaped inclined surface of the wedge block 112. The pair of ball nut blocks 115 are disposed such that the inclined surfaces are lower than each other.

[0061] The pair of ball nut blocks 115 are connected to the wedge block 112 by a plurality of wedge guides 113 so as to slide relative to each other. The pair of ball nut blocks 115 move the wedge block 112 in the vertical direction when the motor 111 is driven. The pair of ball nut blocks 115, together with the wedge block 112, change the horizontal linear motion into vertical linear motion, and move the moving block 192 in the vertical direction.

[0062] The pair of ball nut blocks 115 are connected to the wedge supporter 119 by a plurality of supporter guides 118 so as to be slidable relative to each other. The pair of ball nut blocks 115 are connected to the wedge supporter 119 so as to be movable in the horizontal direction.

[0063] The wedge supporter 119 is coupled to a recessed portion at the upper end of the fixed block 191. A step is formed at the lower end of the wedge supporter 119 so that at least two surfaces of the wedge supporter 119 are in close contact with the fixed block 191. The step at the lower end of the wedge supporter 119 is in close contact with the upper and rear surfaces of the fixed block 191.

[0064] A plurality of supporter guides 118 are coupled to the upper side of the wedge supporter 119. A hole through which the ball screw 116 passes is formed at each end of the wedge supporter 119. The wedge supporter 119 is coupled to a fixed block 191 and supports the ball screw 116, the pair of ball nut blocks 115, and the wedge block 112.

[0065] The wedge guides 113 slidingly connect the wedge block 112 and the pair of ball nut blocks 115. Each of the wedge guides 113 is a linear guide, and is preferably an LM guide (Linear Motion Guide).

[0066] The multiple wedge guides 113 include a plurality of first wedge rails 1131 each coupled to the “V” shaped inclined surface of the wedge block 112, and a plurality of second wedge rails 1132 each fitted into the multiple first wedge rails 1131, sliding against each other, and coupled to the upper inclined surface of the ball nut block 115.

[0067] The plurality of supporter guides 118 slidably connect the pair of ball nut blocks 115 and the wedge supporter 119. Each of the plurality of supporter guides 118 is a linear guide, and is preferably an LM guide (Linear Motion Guide).

[0068] The multiple supporter guides 118 include a plurality of first supporter rails 1181 each coupled to the underside of a pair of ball nut blocks 115, and a plurality of second supporter rails 1182 each fitted into the multiple first supporter rails 1181, sliding against each other, and coupled to the upper surface of the wedge supporter 119.

[0069] Figure 8 is an oblique view of a horizontal stage module of an optical equipment movement device according to an embodiment of the present invention, Figure 9 is an exploded oblique view of the horizontal stage module shown in Figure 8, and Figure 10 is a partial oblique view of the upper guide of the horizontal stage module shown in Figure 8.

[0070] The horizontal stage module 120 according to an embodiment of the present invention includes a first stage block 121 coupled to the block connector 197, an upper guide 122 coupled to the first stage block 121, a second stage block 125 disposed below the first stage block 121 and coupled to the upper guide 122, a third stage block 123 coupled to the below of the second stage block 125, and a lower guide 124 coupled to the third stage block 123 and the wedge block 112 and guiding in a direction perpendicular to the direction in which the upper guide 122 guides.

[0071] The first stage block 121 is connected to the moving block 192 by a block connector 197. The upper end of the first stage block 121 is coupled to the underside of the protruding portion of the block connector 197. The first stage block 121 is slidingly coupled to the second stage block 125 by an upper guide 122. The underside of the first stage block 121 is coupled to the upper guide 122.

[0072] The upper guide 122 is connected to the moving block 192 and guides the moving block 192 in the left-right direction. The upper guide 122 counterbalances the load in the left-right direction so that the moving block 192 does not move in the left-right direction, rotate around an axis in the front-back direction (rolling), or rotate around an axis in the up-down direction (yawing).

[0073] The upper guide 122 is a linear guide that guides in the horizontal direction, and is preferably a cross roller guide. The upper guide 122 includes a first upper rail 1222 coupled to the first stage block 121, a second upper rail 1221 coupled to the second stage block 125, a plurality of first upper rollers 1223 whose rotation axes are arranged with an inclination toward the front in the vertical direction, and a plurality of second upper rollers 1224 whose rotation axes are arranged with an inclination toward the rear in the vertical direction.

[0074] The first upper rail 1222 and the second upper rail 1221 have a rolling surface formed by a "V" groove that is long in the left-right direction. The first upper rollers 1223 and the second upper rollers 1224 are arranged so that their rotation axes are perpendicular to each other.

[0075] The second stage block 125 is slidingly connected to the first stage block 121 by the upper guide 122. The second stage block 125 is fixedly connected to the third stage block 123.

[0076] The third stage block 123 has an upper end coupled to the second stage block 125. The third stage block 123 is slidingly coupled to the wedge stage module 110 by a lower guide 124. The third stage block 123 has a lower side coupled to the lower guide 124.

[0077] The lower guide 124 guides in a direction perpendicular to the guiding direction of the upper guide 122. The lower guide 124 is connected to the moving block 192 and guides the moving block 192 in the front-rear direction. The lower guide 124 counterbalances the load in the front-rear direction so that the moving block 192 is not moved in the front-rear direction, rotated around an axis in the left-right direction (pitching), or rotated around an axis in the up-down direction (yawing).

[0078] The lower guide 124 is a linear guide that guides in the horizontal direction, and is preferably a cross roller guide. The lower guide 124, like the above-mentioned upper guide 122, is configured to include a first lower rail (not shown), a second lower rail (not shown), a plurality of first lower rollers (not shown), and a plurality of second lower rollers (not shown).

[0079] In the above embodiment, the upper guide 122 guides in the left-right direction, and the lower guide 124 guides in the front-to-rear direction. However, it is also acceptable for the upper guide 122 to guide in the front-to-rear direction, and the lower guide 124 to guide in the left-to-right direction.

[0080] Also, in some embodiments, the second stage block 125 may be omitted, and the upper guide 122 may slidably connect the first stage block 121 and the third stage block 123.

[0081] FIG. 11 is a perspective view of a vertical guide of a moving device for optical equipment according to an embodiment of the present invention, and FIG. 12 is a cutaway perspective view of the vertical guide shown in FIG.

[0082] The vertical guide 130 according to an embodiment of the present invention includes a moving rail 132 that is connected to the side end of a moving block 192 and extends vertically, a fixed rail 131 that is connected to a fixed block 191 and extends vertically, and a plurality of cross rollers 133, 134 whose rotation axes are arranged horizontally and adjacent pairs are arranged so as to be perpendicular to each other.

[0083] The moving rail 132 has a rolling surface formed by a "V" groove that is long in the vertical direction. The moving rail 132 is arranged long in the vertical direction. Two surfaces of the moving rail 132 are in close contact with steps that are long in the vertical direction and formed at the side end of the moving block 192. The surface of the moving rail 132 that is in close contact with the moving block 192 is not parallel or perpendicular to any of the rotation axes of the multiple cross rollers 133, 134.

[0084] The fixed rail 131 has a rolling surface formed by a "V" shaped groove that is long in the vertical direction. The fixed rail 131 is arranged long in the vertical direction. Two surfaces of the fixed rail 131 are in close contact with steps that are long in the vertical direction formed on both front sides of the fixed block 191. The surface of the fixed rail 131 that is in close contact with the fixed block 191 is not parallel or perpendicular to any of the rotation axes of the multiple cross rollers 133, 134.

[0085] The multiple cross rollers 133, 134 are arranged on rolling surfaces formed in a "V" shape on the fixed rail 131 and the movable rail 132. The multiple cross rollers 133, 134 include multiple first cross rollers 133 whose rotation axes are arranged diagonally on the right side in the front-rear direction, and multiple second cross rollers 134 whose rotation axes are arranged diagonally on the left side in the front-rear direction. The multiple first cross rollers 133 and the multiple second cross rollers 134 are arranged in the vertical direction, crossing one another.

[0086] It is preferable that the guiding direction of the horizontal stage module 120 does not coincide with any of the rotation axes of the multiple cross rollers 133, 134. The rotation axes of the multiple cross rollers 133, 134 are arranged diagonally between the front-rear direction and the left-right direction, which do not coincide with the front-rear direction and the left-right direction, which are the directions guided by the horizontal stage module 120. In this way, the horizontal stage module 120 only relieves the horizontal load from the vertical guide 130, and no gap is generated as a result.

[0087] The operation of the optical equipment moving device according to the embodiment of the present invention configured as above will be described as follows.

[0088] When the motor 111 is driven and the ball screw 116 rotates in one direction, the pair of ball nut blocks 115 slide along the supporter guides 118 and move horizontally toward each other. When the pair of ball nut blocks 115 approach each other, the wedge block 112 slides along the wedge guides 113 and moves upward. When the wedge block 112 moves upward, the moving block 192 connected to the wedge block 112 by the horizontal stage module 120 and the block connector 197 moves upward. The moving block 192 moves only vertically relative to the fixed block 191 by the vertical guide 130. When the moving block 192 moves upward, the optical equipment 10 fixed to the moving block 192 moves upward.

[0089] When the motor 111 is driven and the ball screw 116 rotates in the other direction, the pair of ball nut blocks 115 slide along the supporter guides 118 and move horizontally away from each other. When the pair of ball nut blocks 115 move away from each other, the wedge block 112 slides along the wedge guides 113 and moves downward. When the wedge block 112 moves downward, the moving block 192 connected to the wedge block 112 by the horizontal stage module 120 and the block connector 197 moves downward. When the moving block 192 moves downward, the optical equipment 10 fixed to the moving block 192 moves downward.

[0090] When the moving block 192 moves vertically, any reaction, thrust or vibration loads generated by the vertical guides 130 and / or the wedge stage module 110 are countered by the horizontal stage module 120 .

[0091] Although preferred embodiments of the present invention have been shown and described above, the present invention is not limited to the specific embodiments described above, and it goes without saying that various modifications can be made by those having ordinary knowledge in the technical field to which the invention pertains without departing from the gist of the present invention as claimed in the claims, and these modifications should not be understood separately from the technical ideas and perspectives of the present invention. [Explanation of symbols]

[0092] 10 Optical equipment 110 Wedge stage module 111 Motor 112 Wedge Block 113 Wedge Guide 115 Ball nut block 116 Ball screw 118 Supporter Guide 119 Wedge Supporter 120 Horizontal Stage Module 121 1st Stage Block 122 Upper Guide 123 3rd Stage Block 124 Lower Guide 125 2nd Stage Block 130 Vertical Guide 131 Fixed Rail 132 Moving Rail 133 First Cross Roller 134 Second Cross Roller 191 Fixed Block 192 Moving Blocks 195 Stone surface plate connector 197 Block Connector

Claims

1. A moving block to which the optical equipment is attached at the front; a fixed block disposed behind the moving block and connected to a stone base; a wedge stage module disposed on the fixed block for vertically moving the moving block; A vertical guide disposed at a side end of the moving block to guide the moving block in a vertical direction; and a horizontal stage module coupled between the wedge stage module and the motion block to guide motion in a horizontal direction; The horizontal stage module rotates the moving block or counteracts a force tending to move the moving block in a horizontal direction. Optically equipped mobile device.

2. the wedge stage module is disposed rearward of the fixed block; 2. The optical equipment moving device according to claim 1.

3. The wedge stage module is disposed above the stone surface plate.

3. The optical equipment moving device according to claim 2.

4. The wedge stage module includes: a motor providing the driving force; a ball screw rotated by said motor; a wedge block coupled to the horizontal stage module and having an inclined surface formed on a lower side thereof; a ball nut block having an inclined surface formed on an upper side thereof, which moves horizontally by rotation of the ball screw and moves the wedge block vertically; 2. The optical equipment moving device according to claim 1.

5. The wedge block has a V-shaped inclined surface formed symmetrically on the lower side, The ball nut blocks are provided in a pair, The pair of ball nut blocks are disposed symmetrically to each other in correspondence with the V-shaped inclined surfaces of the wedge block.

5. The optical equipment moving device according to claim 4.

6. The pair of ball nut blocks move away from or towards each other when the motor is driven.

6. A moving device for optical equipment according to claim 5.

7. The motor has a rotation shaft arranged horizontally and disposed in the direction of both side ends of the moving block.

5. The optical equipment moving device according to claim 4.

8. The wedge stage module includes: a plurality of wedge guides slidingly connecting the wedge block and the pair of ball nut blocks to one another; 6. The optical equipment moving device according to claim 5.

9. The wedge stage module includes: a wedge supporter coupled to the fixed block for supporting the pair of ball nut blocks so as to be movable in a horizontal direction; 6. The optical equipment moving device according to claim 5.

10. The wedge stage module includes: and a plurality of support guides that slidably connect the wedge supporter and the pair of ball nut blocks to each other.

10. The optical equipment moving device according to claim 9.

11. The wedge supporter has at least two surfaces that are in close contact with the fixed block.

10. The optical equipment moving device according to claim 9.

12. a stone base connector for connecting the fixing block to the stone base; The motor is coupled to the stone base connector.

5. The optical equipment moving device according to claim 4.

13. The stone base connector is coupled to a side end of the fixed block.

13. A device for moving an optical equipment according to claim 12.

14. The vertical guides are provided in pairs, The pair of vertical guides are disposed on both sides of the moving block, respectively.

2. The optical equipment moving device according to claim 1.

15. The vertical guide includes a plurality of cross rollers, the rotation axes of which are arranged horizontally and adjacent pairs are arranged perpendicular to each other.

2. The optical equipment moving device according to claim 1.

16. The vertical guide is a moving rail coupled to a side end of the moving block and extending in a vertical direction; and a fixed rail coupled to the fixed block and extending in a vertical direction; The plurality of cross rollers are disposed between the moving rail and the fixed rail.

16. A device for moving an optical equipment according to claim 15.

17. The moving block has a long step formed in the vertical direction so that at least two surfaces of the moving block are in close contact with the moving rail.

17. A device for moving an optical equipment according to claim 16.

18. The surface of the moving rail that comes into contact with the moving block is not parallel or perpendicular to any of the rotation axes of the multiple cross rollers.

18. A device for moving an optical equipment according to claim 17.

19. The fixed block has a long step formed in the vertical direction so that at least two surfaces of the fixed block are in close contact with the fixed rail.

17. A device for moving an optical equipment according to claim 16.

20. The surface of the fixed block that comes into close contact with the moving rail is not parallel or perpendicular to any of the rotation axes of the multiple cross rollers.

20. A device for moving an optical equipment according to claim 19.

21. The horizontal stage module has a guiding direction that does not coincide with any rotation axis of the plurality of cross rollers.

16. A device for moving an optical equipment according to claim 15.

22. The horizontal stage module guides in two mutually orthogonal axes.

2. The optical equipment moving device according to claim 1.

23. The horizontal stage module includes: an upper guide coupled to the moving block; and a lower guide that guides in a direction perpendicular to a direction in which an upper guide connected to the wedge stage module guides; 2. The optical equipment moving device according to claim 1.

24. The upper guide guides the moving block in a left-right direction, which is the direction of both side ends of the moving block. The lower guide guides in the front-rear direction.

24. A device for moving an optical equipment according to claim 23.

25. The moving block further includes a block connector that is coupled to an upper end of the moving block and is disposed so as to protrude rearward, the horizontal stage module is coupled to an underside of the protruding portion of the block connector; 2. The optical equipment moving device according to claim 1.

26. The horizontal stage module includes: a first stage block coupled to the block connector; an upper guide coupled to the first stage block; a second stage block disposed below the first stage block and coupled to the upper guide; a third stage block coupled to the underside of the second stage block; and a lower guide coupled to the third stage block and the wedge stage module for guiding in a direction perpendicular to a direction in which the upper guide guides; 26. An optical equipment moving device according to claim 25.

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