Table device
The table device uses a base plate with integrated linear motion mechanisms and non-stacked drive units to facilitate smooth movement in multiple directions while minimizing its cross-section and enhancing manufacturability.
Patent Information
- Application Number
- JP2024010899
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2024-01-29
- Publication Date
- 2025-08-08
AI Technical Summary
Existing table devices that allow movement in X, Y, and Z directions require multiple drive sources, leading to a tall and complex structure with complicated cable routing, hindering smooth movement.
A table device with a base plate and multiple linear motion mechanisms, including rails and sliders, driven by non-stacked drive units, allowing horizontal and vertical movement while minimizing the device's cross-section and simplifying cable management.
The device achieves smooth table movement with a reduced cross-section and improved manufacturability, enabling easier assembly and precise control.
Smart Images
Figure 2025116462000001_ABST
Abstract
Description
[Technical Field]
[0001] The present disclosure relates to a table device. [Background technology]
[0002] A table device including a table that is movable in the horizontal direction and in the vertical direction has been disclosed (see, for example, Patent Document 1). [Prior art documents] [Patent documents]
[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2011-112625 Summary of the Invention [Problem to be solved by the invention]
[0004] In table devices, the table may move horizontally, i.e., in the X direction and in the Y direction perpendicular to the X direction within the same plane. Furthermore, the table may move vertically, i.e., in the Z direction perpendicular to the XY plane. If such a table device were to be realized by simply stacking a drive source for movement in the X direction, a drive source for movement in the Y direction, and a drive source for movement in the Z direction, the device would become very tall. Table devices that move the table in the X, Y, and Z directions require a low cross-section. Furthermore, a drive source with a cable attached is required to move the table. Even when the table is moved, it is necessary to avoid the complicated routing of cables extending from the drive source and achieve smooth movement of the table.
[0005] Therefore, one of the objects is to provide a table device that can achieve smooth movement of the table portion while also achieving a low cross section of the device. [Means for solving the problem]
[0006] A table device according to the present disclosure includes a base plate having a base surface, a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction, and a first slider attached to the first rail and movable in the first direction, a first base-side moving unit attached to the first slider, a first drive unit fixed on the base surface and causing the first base-side moving unit to linearly reciprocate in the first direction, a second linear motion mechanism including a second rail attached to the first base-side moving unit and a second slider attached to the second rail and movable in the direction in which the second rail extends, and the base surface. a first table-side moving unit having a first inclined surface inclined with respect to the first direction and attached to the second slider; a third linear motion mechanism including a third rail attached to the first inclined surface and a third slider attached to the third rail and movable in the direction in which the third rail extends; a fourth linear motion mechanism including a fourth rail attached to the base surface and extending in a second direction intersecting the first direction in a plane parallel to the base surface and a fourth slider attached to the fourth rail and movable in the second direction; a second base-side moving unit attached to the fourth slider; a second driving unit fixed at a position different from the first driving unit and configured to linearly reciprocate the second base-side moving unit in a second direction; a fifth linear motion mechanism including a fifth rail attached to the second base-side moving unit and a fifth slider attached to the fifth rail and movable in the direction in which the fifth rail extends; a second table-side moving unit having a second inclined surface inclined with respect to each of the base surface and the first inclined surface and attached to the fifth slider; and a sixth linear motion mechanism including a sixth rail attached to the second inclined surface and a sixth slider attached to the sixth rail and movable in the direction in which the sixth rail extends. a seventh linear motion mechanism including a seventh rail attached to the base surface and extending in a third direction intersecting the first direction and the second direction in a plane parallel to the base surface, and a seventh slider attached to the seventh rail and movable in the third direction; a third base-side moving unit attached to the seventh slider; a third drive unit fixed on the base surface at a position different from each of the first drive unit and the second drive unit, and causing the third base-side moving unit to linearly reciprocate in the third direction; an eighth rail attached to the third base-side moving unit and a seventh slider attached to the seventh rail and movable in the third direction;The apparatus comprises an eighth linear motion mechanism including an eighth slider movable in the direction in which the eighth rail extends, a third table-side moving unit having a third inclined surface inclined with respect to each of the base surface, the first inclined surface, and the second inclined surface and attached to the eighth slider, a ninth rail attached to the third inclined surface, and a ninth linear motion mechanism including a ninth slider attached to the ninth rail and movable in the direction in which the ninth rail extends, and a table unit having a first opposing surface facing the first inclined surface and to which the third slider is attached, a second opposing surface facing the second inclined surface and to which the sixth slider is attached, and a third opposing surface facing the third inclined surface and to which the ninth slider is attached, and which is movable in a direction along the base surface and a direction intersecting the base surface by driving at least one of the first driving unit, the second driving unit, and the third driving unit. [Effects of the Invention]
[0007] According to the table device, the table portion can be moved smoothly while the cross section of the device can be reduced. [Brief explanation of the drawings]
[0008] [Figure 1] FIG. 1 is a schematic perspective view showing a table device according to the first embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic plan view of the table device shown in FIG. [Figure 3] FIG. 3 is a schematic front view of the table device shown in FIG. [Figure 4] FIG. 4 is a schematic rear view of the table device shown in FIG. [Figure 5] FIG. 5 is a schematic side view of the table device shown in FIG. [Figure 6] FIG. 6 is a schematic cross-sectional view of the table device shown in FIG. [Figure 7] FIG. 7 is a schematic cross-sectional view of the table device shown in FIG. [Figure 8] FIG. 8 is a schematic perspective view showing the table device shown in FIG. 1 with a table base, which will be described later, removed. [Figure 9]FIG. 9 is a schematic plan view showing the table device shown in FIG. 2 with a table base and the like, which will be described later, removed. [Figure 10] FIG. 10 is a schematic perspective view showing a state in which the table portion of the table device shown in FIG. 1 has been moved in the direction of arrow Z. As shown in FIG. [Figure 11] FIG. 11 is a schematic front view of the table device shown in FIG. [Figure 12] FIG. 12 is a schematic rear view of the table device shown in FIG. [Figure 13] FIG. 13 is a schematic side view of the table device shown in FIG. DETAILED DESCRIPTION OF THE INVENTION
[0009] [Outline of the embodiment] The table device of the present disclosure includes a base plate having a base surface, a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction and a first slider attached to the first rail and movable in the first direction, a first base-side moving unit attached to the first slider, a first drive unit fixed on the base surface and causing the first base-side moving unit to linearly reciprocate in the first direction, a second linear motion mechanism including a second rail attached to the first base-side moving unit and a second slider attached to the second rail and movable in the direction in which the second rail extends, and a second linear motion mechanism attached to the base surface. a first table-side moving section having a first inclined surface inclined relative to the first direction and attached to the second slider; a third linear motion mechanism including a third rail attached to the first inclined surface and a third slider attached to the third rail and movable in the direction in which the third rail extends; a fourth linear motion mechanism including a fourth rail attached to the base surface and extending in a second direction intersecting the first direction in a plane parallel to the base surface and a fourth slider attached to the fourth rail and movable in the second direction; a second base-side moving section attached to the fourth slider; a second driving unit fixed at a different position and configured to linearly reciprocate the second base-side moving unit in a second direction; a fifth linear motion mechanism including a fifth rail attached to the second base-side moving unit and a fifth slider attached to the fifth rail and movable in the direction in which the fifth rail extends; a second table-side moving unit having a second inclined surface inclined relative to each of the base surface and the first inclined surface and attached to the fifth slider; and a sixth linear motion mechanism including a sixth rail attached to the second inclined surface and a sixth slider attached to the sixth rail and movable in the direction in which the sixth rail extends. a seventh linear motion mechanism including a seventh rail attached to the base surface and extending in a third direction intersecting the first direction and the second direction in a plane parallel to the base surface, and a seventh slider attached to the seventh rail and movable in the third direction; a third base-side moving unit attached to the seventh slider; a third drive unit fixed on the base surface at a position different from each of the first drive unit and the second drive unit and causing the third base-side moving unit to linearly reciprocate in the third direction; an eighth rail attached to the third base-side moving unit and a seventh slider attached to the seventh rail and movable in the third direction;The apparatus comprises an eighth linear motion mechanism including an eighth slider movable in the direction in which the eighth rail extends, a third table-side moving unit having a third inclined surface inclined with respect to each of the base surface, the first inclined surface, and the second inclined surface and attached to the eighth slider, a ninth rail attached to the third inclined surface, and a ninth linear motion mechanism including a ninth slider attached to the ninth rail and movable in the direction in which the ninth rail extends, and a table unit having a first opposing surface facing the first inclined surface and to which the third slider is attached, a second opposing surface facing the second inclined surface and to which the sixth slider is attached, and a third opposing surface facing the third inclined surface and to which the ninth slider is attached, and which is movable in a direction along the base surface and a direction intersecting the base surface by driving at least one of the first driving unit, the second driving unit, and the third driving unit.
[0010] According to the table device of the present disclosure, the first base-side moving unit moves via the first linear motion mechanism, and the first table-side moving unit moves via the second linear motion mechanism, each driven by the first drive unit. The second base-side moving unit moves via the fourth linear motion mechanism, and the second table-side moving unit moves via the fifth linear motion mechanism, each driven by the second drive unit. The third base-side moving unit moves via the seventh linear motion mechanism, and the third table-side moving unit moves via the eighth linear motion mechanism, each driven by the third drive unit. The movement of the first base-side moving unit, first table-side moving unit, second base-side moving unit, second table-side moving unit, third base-side moving unit, and third table-side moving unit allows the table unit to move horizontally and vertically via the third linear motion mechanism, sixth linear motion mechanism, and ninth linear motion mechanism. In this case, the first drive unit, second drive unit, and third drive unit are each fixed at different positions on the base surface of the base plate, so the drive units can be arranged without stacking. This allows for a low cross-section of the device. In addition, because each drive unit is fixed to the base surface, the cables extending from each drive unit are not pulled or their angles change as the table unit moves. Furthermore, because each moving unit is connected by a linear motion mechanism, each moving unit can move smoothly. As a result, with the table device configured as described above, it is possible to achieve a low cross-section of the device while realizing smooth movement of the table unit.
[0011] In the table device, the table unit may include a support unit including a first opposing surface, a second opposing surface, and a third opposing surface, and a table base attached to the support unit and having a table surface on which a predetermined object can be placed. This allows the table unit to be composed of multiple parts, making it easier to manufacture each part. This can improve productivity.
[0012] In the table device, the support unit may include a first block unit having a first opposing surface, a second block unit having a second opposing surface and disposed separately from the first block unit, and a third block unit having a third opposing surface and disposed separately from each of the first block unit and the second block unit. This allows the configuration of each block unit constituting the support unit to be relatively simple, further improving productivity.
[0013] In the above table device, the angle of the second direction relative to the first direction may be 120 degrees. The angle of the third direction relative to the first direction may be -120 degrees. By doing so, the angles of each direction are set at 120-degree intervals, and when the table unit is moved horizontally and vertically, the load on each drive unit can be made relatively uniform. Therefore, smoother movement of the table unit can be achieved.
[0014] In the table device, the base plate may be provided with holes into which portions of the first, second, and third blocks can be placed. This allows portions of the first, second, and third blocks to retreat into the holes when the table moves, reducing the risk of interference between the base plate and each block. This allows for a larger movement distance of the table.
[0015] In the table device, at least one of the first, second, and third block sections may have a wedge shape. This allows the first, second, and third block sections to be configured compactly while the first, second, and third opposing surfaces can be appropriately provided on the respective moving sections. This makes it easier to make the device more compact.
[0016] In the table device, the table surface may be parallel to the base surface. This makes it easier to make the base surface and the table surface parallel when the table device is set up. This improves user convenience during use.
[0017] In the table device, at least one of the first drive unit, the second drive unit, and the third drive unit may include a ball screw having a screw shaft and a nut, and a motor that rotates the screw shaft. This allows the motor to rotate the screw shaft to move the moving unit. Therefore, the movement of the moving unit by the motor can be controlled with high precision, thereby improving the positioning accuracy when moving the table unit.
[0018] In the table device, the support part may be disposed inside the outer shape of the table part when viewed in the thickness direction of the base plate. In this way, the table base can be attached to the entire area of the support part that faces the table base, thereby making it possible to firmly support the table base.
[0019] [Specific example of embodiment] Next, an example of a specific embodiment of the table device of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.
[0020] (Embodiment 1) First, a first embodiment of the present disclosure will be described. FIG. 1 is a schematic perspective view of a table device according to the first embodiment of the present disclosure. FIG. 2 is a schematic plan view of the table device shown in FIG. 1. FIG. 2 is a view of the table device shown in FIG. 1 as viewed in the direction indicated by arrow II. Note that only a portion of the cables described below is illustrated. In FIG. 1, the direction indicated by arrow X is the horizontal direction, the direction indicated by arrow Y is the vertical direction, and the direction indicated by arrow Z is the height direction. Arrow X indicates the direction from the rear of the table device to the front, arrow Y indicates the direction from the left side to the right side of the table device, and arrow Z indicates the direction from the bottom surface of the table device upward. In this embodiment, the direction indicated by arrow Z is the vertical direction of the table device. The X and Y directions are horizontal directions. This also applies to the following drawings. In this embodiment, the first direction is the direction indicated by arrow X. Furthermore, the second direction is the direction indicated by arrow W, which is at an angle of 120 degrees with respect to the first direction. The third direction is the direction indicated by the arrow U, and its angle with respect to the first direction is −120 degrees (see FIG. 2 in particular). That is, the first direction, second direction, and third direction are each spaced 120 degrees apart when viewed from the direction indicated by the arrow Z.
[0021] 3 is a schematic front view of the table device shown in FIG. 1. FIG. 3 is a view of the table device shown in FIG. 1 as viewed in the direction indicated by arrow III. FIG. 4 is a schematic rear view of the table device shown in FIG. 1. FIG. 4 is a view of the table device shown in FIG. 1 as viewed in the direction indicated by arrow IV. FIG. 5 is a schematic side view of the table device shown in FIG. 1. FIG. 5 is a view of the table device shown in FIG. 1 as viewed in the direction indicated by arrow V. FIGS. 6 and 7 are schematic cross-sectional views of the table device shown in FIG. 1. FIG. 6 is a schematic cross-sectional view of the table device shown in FIG. 2 taken along the cross section indicated by VI-VI. FIG. 7 is a schematic cross-sectional view of the table device shown in FIG. 2 taken along the cross section indicated by VII-VII. FIG. 8 is a schematic perspective view of the table device shown in FIG. 1 with a table base, which will be described later, removed. FIG. 9 is a schematic plan view of the table device shown in FIG. 2 with a table base, which will be described later, removed.
[0022] 1, 2, 3, 4, 5, 6, 7, 8, and 9, table device 10a according to the first embodiment of the present disclosure includes a base plate 11a and a table portion 12a. Base plate 11a is flat and rectangular when viewed in the thickness direction (Z direction). In this embodiment, the outer shape of base plate 11a is square when viewed in the thickness direction. Base plate 11a has a base surface 13a located on one side in the thickness direction and a lower surface 14a located on the other side in the thickness direction. Base surface 13a is a surface on which a first linear motion mechanism 41a (described later) and the like are placed. Base surface 13a is flat and parallel to the XY plane. Table device 10a is used by placing the lower surface 14a of base plate 11a on it. A hole 15a is provided in the center of base plate 11a. In this embodiment, hole 15a penetrates base plate 11a in the thickness direction. In this embodiment, the outer shape of the hole 15a is square when viewed in the thickness direction.
[0023] The table unit 12a includes a table base 16a and a support portion 17a. The table base 16a is attached to the support portion 17a. The table base 16a is flat and rectangular when viewed in the thickness direction. In this embodiment, the external shape of the table base 16a is square when viewed in the thickness direction. The table base 16a has a table surface 18a located on one side in the thickness direction and a table attachment surface 19a located on the other side in the thickness direction. A predetermined object can be placed on the table surface 18a of the table base 16a, and a predetermined object can also be attached to the table surface 18a. The table device 10a is capable of moving the table unit 12a in the X, Y, and Z directions. Note that the table base 16a may have a recess or hole for attaching an object, for example, recessed from the table surface 18a.
[0024] In this embodiment, the support portion 17a includes a first block portion 21a, a second block portion 22a, and a third block portion 23a. The first block portion 21a, the second block portion 22a, and the third block portion 23a each have a wedge shape. The first block portion 21a, the second block portion 22a, and the third block portion 23a are attached so that the pointed tip of the wedge shape faces downward, i.e., faces opposite the direction indicated by the arrow Z. Other detailed configurations of the support portion 17a will be described later.
[0025] Table device 10a includes a first drive unit 31a, a first base-side moving unit 31b, a first table-side moving unit 31c, a second drive unit 32a, a second base-side moving unit 32b, a second table-side moving unit 32c, a third drive unit 33a, a third base-side moving unit 33b, and a third table-side moving unit 33c. Table device 10a also includes a first linear motion mechanism 41a, a second linear motion mechanism 42a, a third linear motion mechanism 43a, a fourth linear motion mechanism 44a, a fifth linear motion mechanism 45a, a sixth linear motion mechanism 46a, a seventh linear motion mechanism 47a, an eighth linear motion mechanism 48a, and a ninth linear motion mechanism 49a.
[0026] First, the structure around the first drive unit 31a will be described. The first drive unit 31a is fixed on the base surface 13a. The first drive unit 31a includes a ball screw (first ball screw) 51a having a screw shaft (first screw shaft) 51b and a nut (first nut) 51c, and a motor (first motor) 51d that rotates the screw shaft 51b. The screw shaft 51b is provided to extend along the first direction (X direction). A cable 51e extends from the side of the motor 51d.
[0027] In this embodiment, the first base-side moving section 31b is block-shaped and rectangular. The first base-side moving section 31b is attached to a nut 51c included in a ball screw 51a. The first table-side moving section 31c is also block-shaped. The first table-side moving section 31c has a first inclined surface 31d inclined relative to the base surface 13a. The first inclined surface 31d is inclined at an angle of 60° relative to the base surface 13a, as indicated by angle θ1 in FIG. 4. This angle facilitates control of the movement of the table base 16a. Note that in this embodiment, the angle θ1 of the first inclined surface 31d is 60°, but this is not limited thereto and may be an angle greater than or less than 60°. The same applies to the second inclined surface 32d and the third inclined surface 33d described below. Note that it is preferable to keep the angles of the first inclined surface 31d, the second inclined surface 32d, and the third inclined surface 33d the same.
[0028] The first linear motion mechanism 41a includes a first rail 41b, a first slider 41c, and multiple rollers (not shown) serving as rolling elements. The first rail 41b is attached to the base surface 13a so as to extend in a first direction (X direction). The first slider 41c is attached to the first rail 41b and is movable in the first direction. The first base-side moving unit 31b is attached to the first slider 41c. The first driving unit 31a causes the first base-side moving unit 31b to linearly reciprocate in the first direction. Specifically, by rotating the screw shaft 51b using the motor 51d, the first base-side moving unit 31b is linearly reciprocated along the first direction together with the nut 51c attached to the screw shaft 51b. At this time, the first base-side moving unit 31b is guided along the first direction by the first linear motion mechanism 41a, which includes multiple rollers, ensuring smooth linear reciprocation.
[0029] The second linear motion mechanism 42a includes a second rail 42b, a second slider 42c, and a plurality of rollers (not shown) as rolling elements. The second linear motion mechanism 42a is disposed above the first linear motion mechanism 41a in the Z direction. The second rail 42b is attached to the first base-side moving unit 31b. The second rail 42b is attached so as to extend in the Y direction perpendicular to the X direction. The second slider 42c is attached to the second rail 42b. The second slider 42c is movable in the Y direction, which is the direction in which the second rail 42b extends. The first table-side moving unit 31c is attached to the second slider 42c. That is, the first table-side moving unit 31c is configured to be movable in the X direction and the Y direction.
[0030] The third linear motion mechanism 43a includes a third rail 43b, a third slider 43c, and a plurality of rollers (not shown) as rolling elements. The third rail 43b is attached to the first inclined surface 31d. The third rail 43b is attached so as to extend in the direction in which the first inclined surface 31d is inclined. The third slider 43c is attached to the third rail 43b. The third slider 43c is movable in the direction in which the first inclined surface 31d is inclined, which is the direction in which the third rail 43b extends.
[0031] The first block portion 21a included in the support portion 17a described above has a first opposing surface 21b that faces the first inclined surface 31d. In this embodiment, the first opposing surface 21b is parallel to the first inclined surface 31d. The first block portion 21a is attached to a third slider 43c. The third slider 43c is attached to the first opposing surface 21b of the first block portion 21a. In other words, the first block portion 21a is configured to be movable in the direction in which the first inclined surface 31d is inclined. The first block portion 21a has a first block mounting surface 21c that is attached to the table mounting surface 19a of the table base 16a. The table base 16a is attached to the first block portion 21a so that the first block mounting surface 21c faces the table mounting surface 19a.
[0032] Next, the structure around the second drive unit 32a will be described. The second drive unit 32a is fixed onto the base surface 13a. The second drive unit 32a is disposed at a position on the base surface 13a different from that of the first drive unit 31a. The second drive unit 32a includes a ball screw (second ball screw) 52a having a screw shaft (second screw shaft) 52b and a nut (second nut) 52c, and a motor (second motor) 52d that rotates the screw shaft 52b. The screw shaft 52b is provided to extend along the second direction (W direction). A cable 52e extends from the side of the motor 52d.
[0033] In this embodiment, the second base-side moving section 32b is block-shaped and rectangular, similar to the first base-side moving section 31b. The second base-side moving section 32b is attached to a nut 52c included in the ball screw 52a. The second table-side moving section 32c is also block-shaped. The second table-side moving section 32c has a second inclined surface 32d that is inclined with respect to both the base surface 13a and the first inclined surface 31d. The second inclined surface 32d, like the first inclined surface 31d, is inclined at an angle of 60° with respect to the base surface 13a.
[0034] The fourth linear motion mechanism 44a includes a fourth rail 44b, a fourth slider 44c, and a plurality of rollers (not shown) serving as rolling elements. The fourth rail 44b is attached to the base surface 13a so as to extend in a second direction (W direction) that intersects with the first direction within a plane parallel to the base surface 13a. In this embodiment, the angle of the fourth rail 44b relative to the first rail 41b is 120° as viewed in the Z direction. The fourth slider 44c is attached to the fourth rail 44b and is movable in the second direction. The second base-side moving unit 32b is attached to the fourth slider 44c. The second driving unit 32a linearly reciprocates the second base-side moving unit 32b in the second direction. Specifically, by rotating the screw shaft 52b using the motor 52d, the second base-side moving unit 32b linearly reciprocates along the second direction together with the nut 52c attached to the screw shaft 52b. At this time, the second base-side moving section 32b is guided along the second direction by the fourth linear motion mechanism 44a including a plurality of rollers, so that smooth linear reciprocating motion can be ensured.
[0035] The fifth linear motion mechanism 45a includes a fifth rail 45b, a fifth slider 45c, and a plurality of rollers (not shown) serving as rolling elements. The fifth linear motion mechanism 45a is disposed above the fourth linear motion mechanism 44a in the Z direction. The fifth rail 45b is attached to the second base-side moving unit 32b. The fifth rail 45b is attached so as to extend in a direction perpendicular to the W direction. The fifth slider 45c is attached to the fifth rail 45b. The fifth slider 45c is movable in a direction perpendicular to the W direction, which is the direction in which the fifth rail 45b extends. The second table-side moving unit 32c is attached to the fifth slider 45c. That is, the second table-side moving unit 32c is configured to be movable in the W direction and in a direction perpendicular to the W direction.
[0036] The sixth linear motion mechanism 46a includes a sixth rail 46b, a sixth slider 35c, and a plurality of rollers (not shown) as rolling elements. The sixth rail 46b is attached to the second inclined surface 32d. The sixth rail 46b is attached so as to extend in the direction in which the second inclined surface 32d inclines. The sixth slider 46c is attached to the sixth rail 46b. The sixth slider 46c is movable in the direction in which the second inclined surface 32d inclines, which is the direction in which the sixth rail 46b extends.
[0037] The second block portion 22a included in the support portion 17a described above has a second opposing surface 22b that faces the second inclined surface 32d. In this embodiment, the second opposing surface 22b is parallel to the second inclined surface 32d. The second block portion 22a is attached to the sixth slider 46c. The sixth slider 46c is attached to the second opposing surface 22b of the second block portion 22a. In other words, the second block portion 22a is configured to be movable in the direction in which the second inclined surface 32d is inclined. The second block portion 22a has a second block mounting surface 22c that is attached to the table mounting surface 19a of the table base 16a. The table base 16a is attached to the second block portion 22a so that the second block mounting surface 22c faces the table mounting surface 19a.
[0038] Next, the structure around the third drive unit 33a will be described. The third drive unit 33a is fixed on the base surface 13a. The third drive unit 33a is disposed at a position on the base surface 13a different from that of the first drive unit 31a and the second drive unit 32a. The third drive unit 33a includes a ball screw (third ball screw) 53a having a screw shaft (third screw shaft) 53b and a nut (third nut) 53c, and a motor (third motor) 53d that rotates the screw shaft 53b. The screw shaft 53b is provided to extend along the third direction (U direction). A cable 53e extends from the side of the motor 53d.
[0039] In this embodiment, the third base-side moving section 33b is block-shaped and rectangular, similar to the first base-side moving section 31b. The third base-side moving section 33b is attached to a nut 53c included in the ball screw 53a. The third table-side moving section 33c is also block-shaped. The third table-side moving section 33c has a third inclined surface 33d that is inclined with respect to the base surface 13a, the first inclined surface 31d, and the second inclined surface 32d. The third inclined surface 33d is inclined at an angle of 60° with respect to the base surface 13a, similar to the first inclined surface 31d.
[0040] The seventh linear motion mechanism 47a includes a seventh rail 47b, a seventh slider 47c, and a plurality of rollers (not shown) serving as rolling elements. The seventh rail 47b is attached to the base surface 13a so as to extend in a third direction (U direction) that intersects with the first and second directions within a plane parallel to the base surface 13a. In this embodiment, the angle of the seventh rail 47b with respect to the first rail 41b is −120° as viewed in the Z direction. The seventh slider 47c is attached to the seventh rail 47b and is movable in the third direction. The third base-side moving unit 33b is attached to the seventh slider 47c. The third driving unit 33a linearly reciprocates the third base-side moving unit 33b in the third direction. Specifically, by rotating the screw shaft 53b by the motor 53d, the third base-side moving unit 33b is caused to linearly reciprocate along the third direction together with the nut 53c attached to the screw shaft 53b. At this time, the third base-side moving unit 33b is guided along the third direction by the seventh linear motion mechanism 47a including a plurality of rollers, ensuring smooth linear reciprocation.
[0041] The eighth linear motion mechanism 48a includes an eighth rail 48b, an eighth slider 48c, and a plurality of rollers (not shown) serving as rolling elements. The eighth linear motion mechanism 48a is disposed above the seventh linear motion mechanism 47a in the Z direction. The eighth rail 48b is attached to the third base-side moving unit 33b. The eighth rail 48b is attached so as to extend in a direction perpendicular to the U direction. The eighth slider 48c is attached to the eighth rail 48b. The eighth slider 48c is movable in a direction perpendicular to the U direction, which is the direction in which the eighth rail 48b extends. The third table-side moving unit 33c is attached to the eighth slider 48c. That is, the third table-side moving unit 33c is configured to be movable in the U direction and in a direction perpendicular to the U direction.
[0042] The ninth linear motion mechanism 49a includes a ninth rail 49b, a ninth slider 49c, and a plurality of rollers (not shown) as rolling elements. The ninth rail 49b is attached to the third inclined surface 33d. The ninth rail 49b is attached so as to extend in the direction in which the third inclined surface 33d is inclined. The ninth slider 49c is attached to the ninth rail 49b. The ninth slider 49c is movable in the direction in which the third inclined surface 33d is inclined, which is the direction in which the ninth rail 49b extends.
[0043] The third block portion 23a included in the support portion 17a has a third opposing surface 23b that faces the third inclined surface 33d. In this embodiment, the third opposing surface 23b is parallel to the third inclined surface 33d. The third block portion 23a is attached to the ninth slider 49c. The ninth slider 49c is attached to the third opposing surface 23b of the third block portion 23a. In other words, the third block portion 23a is configured to be movable in the direction in which the third inclined surface 33d is inclined. The third block portion 23a has a third block mounting surface 23c that is attached to the table mounting surface 19a of the table base 16a. The table base 16a is attached to the third block portion 23a so that the third block mounting surface 23c faces the table mounting surface 19a.
[0044] In this embodiment, first block portion 21a, second block portion 22a, and third block portion 23a are all the same shape, but are attached at different locations and in different orientations. First base-side moving portion 31b, second base-side moving portion 32b, and third base-side moving portion 33b are all the same shape, but are attached at different locations and in different orientations. First table-side moving portion 31c, second table-side moving portion 32c, and third table-side moving portion 33c are all the same shape, but are attached at different locations and in different orientations.
[0045] In some cases, portions of the first block portion 21a, the second block portion 22a, and the third block portion 23a, as well as portions of the third rail 43b, the sixth rail 46b, and the ninth rail 49b, are accommodated within the hole portion 15a (see FIG. 7 in particular). In particular, when the table base 16a is lowered, i.e., moved in the direction opposite to the direction indicated by the arrow Z, portions of the first block portion 21a and the like are accommodated within the hole portion 15a. Furthermore, when viewed in the thickness direction (Z direction) of the base plate 11a, the support portion 17a is positioned inside the outer shape of the table base 16a. In other words, the first block mounting surface 21c, the second block mounting surface 22c, and the third block mounting surface 23c do not protrude from the outer shape of the table base 16a when viewed in the Z direction. The entire surface of the first block mounting surface 21c, the entire surface of the second block mounting surface 22c, and the entire surface of the third block mounting surface 23c are in contact with the table mounting surface 19a of the table base 16a.
[0046] Next, the operation of the table device 10a configured as described above will be described. Driven by the first drive unit 31a, the first base-side moving unit 31b and the first table-side moving unit 31c are guided by the first linear motion mechanism 41a and move in the direction indicated by arrow X or the opposite direction. Driven by the second drive unit 32a, the second base-side moving unit 32b and the second table-side moving unit 32c are guided by the fourth linear motion mechanism 44a and move in the direction indicated by arrow W or the opposite direction. Driven by the third drive unit 33a, the third base-side moving unit 33b and the third table-side moving unit 33c are guided by the seventh linear motion mechanism 47a and move in the direction indicated by arrow U or the opposite direction.
[0047] At this time, the first table-side moving unit 31c is attached to the first base-side moving unit 31b via the second linear motion mechanism 42a, and therefore is movable in the Y direction. The second table-side moving unit 32c is attached to the second base-side moving unit 32b via the fifth linear motion mechanism 45a, and therefore is movable in a direction perpendicular to the W direction. The third table-side moving unit 33c is attached to the third base-side moving unit 33b via the eighth linear motion mechanism 48a, and therefore is movable in a direction perpendicular to the U direction. The first block unit 21a supporting the table base 16a is movable along the first inclined surface 31d by the third linear motion mechanism 43a attached to the first inclined surface 31d of the first table-side moving unit 31c. The second block unit 22a supporting the table base 16a is movable along the second inclined surface 32d by the sixth linear motion mechanism 46a attached to the second inclined surface 32d of the second table-side moving unit 32c. The third block portion 23a supporting the table base 16a is movable along the third inclined surface 33d via the ninth linear motion mechanism 49a attached to the third inclined surface 33d provided on the third table-side moving portion 33c. Therefore, by adjusting the driving of the first driving portion 31a, the second driving portion 32a, and the third driving portion 33a, the table portion 12a can be moved to any position in the X, Y, and Z directions.
[0048] As a specific operation, for example, when the table portion 12a is moved in the direction indicated by the arrow X, the first drive unit 31a moves the first base side moving unit 31b in the direction indicated by the arrow X, the second drive unit 32a moves the second base side moving unit 32b in the direction opposite to the direction indicated by the arrow W, and the third drive unit 33a moves the third base side moving unit 33b in the direction opposite to the direction indicated by the arrow U.
[0049] Furthermore, for example, if it is desired to move the table portion 12a only upward in the Z direction without moving it in the X and Y directions, this can be achieved by using the first drive unit 31a, the second drive unit 32a, and the third drive unit 33a to move the first base-side moving unit 31b, the second base-side moving unit 32b, and the third base-side moving unit 33b by the same length toward the center, i.e., in the direction opposite to the direction indicated by the arrow X, the direction opposite to the direction indicated by the arrow W, and the direction opposite to the direction indicated by the arrow U, respectively.
[0050] 10 to 13 are views showing a state in which the table base 16a has been moved in the direction indicated by arrow Z. That is, FIGS. 10 to 13 show a state in which the table portion 12a has been raised in the table device 10a. FIG. 10 is a schematic perspective view showing a state in which the table portion 12a has been moved in the direction of arrow Z in the table device 10a shown in FIG. 1. FIG. 11 is a schematic front view of the table device 10a shown in FIG. 10. FIG. 11 is a view of the table device 10a shown in FIG. 10 as seen in the direction indicated by arrow XI. FIG. 12 is a schematic rear view of the table device 10a shown in FIG. 10. FIG. 12 is a view of the table device 10a shown in FIG. 10 as seen in the direction indicated by arrow XII. FIG. 13 is a schematic side view of the table device 10a shown in FIG. 10. FIG. 13 is a view of the table device 10a shown in FIG. 10 as seen in the direction indicated by arrow XIII.
[0051] 10 to 13, the first drive unit 31a moves the first base-side moving unit 31b in the direction opposite to the direction indicated by the arrow X. As a result, the first table-side moving unit 31c also moves in the direction opposite to the direction indicated by the arrow X. Then, the first block unit 21a is pushed out in the direction indicated by the arrow Z by the third linear motion mechanism 43a. Similarly, the second drive unit 32a moves the second base-side moving unit 32b in the direction opposite to the direction indicated by the arrow W. As a result, the second table-side moving unit 32c also moves in the direction opposite to the direction indicated by the arrow W. Then, the second block unit 22a is pushed out in the direction indicated by the arrow Z by the sixth linear motion mechanism 46a. Similarly, the third drive unit 33a moves the third base-side moving unit 33b in the direction opposite to the direction indicated by the arrow U. As a result, the third table-side moving unit 33c also moves in the direction opposite to the direction indicated by the arrow U. Then, the third block portion 23a is pushed out in the direction of the arrow Z by the ninth linear motion mechanism 49a. As a result, the table portion 12a including the table base 16a moves in the direction indicated by the arrow Z.
[0052] In the table device 10a, the first base-side moving unit 31b moves via the first linear motion mechanism 41a, and the first table-side moving unit 31c moves via the second linear motion mechanism 42a, driven by the first drive unit 31a. The second base-side moving unit 32b moves via the fourth linear motion mechanism 44a, and the second table-side moving unit 32c moves via the fifth linear motion mechanism 45a, driven by the second drive unit 32a. The third base-side moving unit 33b moves via the seventh linear motion mechanism 47a, and the third table-side moving unit 33c moves via the eighth linear motion mechanism 48a, driven by the third drive unit 33a. The first base-side moving unit 31b, the first table-side moving unit 31c, the second base-side moving unit 32b, the second table-side moving unit 32c, the third base-side moving unit 33b, and the third table-side moving unit 33c move the table unit 12a horizontally and vertically via the third linear motion mechanism 43a, the sixth linear motion mechanism 46a, and the ninth linear motion mechanism 49a. In this case, the first drive unit 31a, the second drive unit 32a, and the third drive unit 33a are fixed to different positions on the base surface 13a of the base plate 11a, respectively, so the drive units can be arranged without stacking. This allows for a low profile device. Furthermore, because each drive unit is fixed to the base surface 13a, the cables 51e, 52e, and 53e extending from each drive unit are not pulled or their angles change as the table unit 12a moves. Furthermore, since each moving part is connected by a linear motion mechanism, the movement of each moving part can be performed smoothly. As described above, with the table device 10a configured as described above, it is possible to realize smooth movement of the table part 12a while also achieving a low cross-section of the device.
[0053] In this embodiment, the table portion 12a includes a support portion 17a including a first opposing surface 21b, a second opposing surface 22b, and a third opposing surface 23b, and a table base 16a attached to the support portion 17a and having a table surface 18a on which a predetermined object can be placed. Therefore, the table portion 12a can be configured with multiple parts, making it easy to manufacture each part. This can improve productivity.
[0054] In this embodiment, the support portion 17a includes a first block portion 21a having a first opposing surface 21b, a second block portion 22a having a second opposing surface 22b and disposed separately from the first block portion 21a, and a third block portion 23a having a third opposing surface 23b and disposed separately from each of the first block portion 21a and the second block portion 22a. Therefore, the configuration of each block portion constituting the support portion 17a can be made relatively simple. This further improves productivity.
[0055] In this embodiment, the angle of the second direction relative to the first direction is 120 degrees. The angle of the third direction relative to the first direction is -120 degrees. Therefore, by setting the angles of each direction at 120-degree intervals, the load on each drive unit can be made relatively uniform when moving the table unit 12a in the horizontal and vertical directions. This allows for smoother movement of the table unit 12a.
[0056] In this embodiment, the base plate 11a is provided with holes 15a into which portions of the first block portion 21a, the second block portion 22a, and the third block portion 23a can be placed. Therefore, when the table portion 12a moves, portions of the first block portion 21a, the second block portion 22a, and the third block portion 23a can be retracted into the holes, reducing the risk of interference between the base plate 11a and the respective block portions. This allows the table portion 12a to move a larger distance.
[0057] In this embodiment, the first block portion 21a, the second block portion 22a, and the third block portion 23a each have a wedge shape. Therefore, the first block portion 21a, the second block portion 22a, and the third block portion 23a can be configured compactly, while the first opposing surface 21b, the second opposing surface 22b, and the third opposing surface 23b can be appropriately provided on the respective moving portions. This makes it easy to make the device compact.
[0058] In this embodiment, the table surface 18a is parallel to the base surface 13a. Therefore, when the table device 10a is set, it is easy to make the base surface 13a and the table surface 18a parallel. This improves user convenience during use.
[0059] In this embodiment, the first drive unit 31a, the second drive unit 32a, and the third drive unit 33a each include ball screws 51a, 52a, and 53a having screw shafts 51b, 52b, and 53b and nuts 51c, 52c, and 53c, respectively, and motors 51d, 52d, and 53d that rotate the screw shafts 51b, 52b, and 53b. Therefore, the screw shafts 51b, 52b, and 53b can be rotated by the motors 51d, 52d, and 53d to move the moving unit. Therefore, the movement of the moving unit by the motors 51d, 52d, and 53d can be controlled with high precision, thereby improving the positioning accuracy when moving the table unit.
[0060] In this embodiment, when viewed in the thickness direction of the base plate 11a, the support portion 17a is disposed inside the outer shape of the table base 16a. Therefore, the table base 16a can be attached to the entire area of the support portion 17a that faces the table base 16a, thereby making it possible to firmly support the table base 16a.
[0061] (Other embodiments) In the above embodiment, the first direction, the second direction, and the third direction do not necessarily intersect at 120° angles each other. That is, for example, the angle of the second direction relative to the first direction may be greater or smaller than 120°.
[0062] In the above embodiment, the support portion may be an integrated unit, and not divided into the first, second, and third block portions. This eliminates the need to attach the first, second, and third block portions to the table, thereby improving workability during production.
[0063] In the above-described embodiment, at least one of the first drive unit, the second drive unit, and the third drive unit may include a ball screw having a screw shaft and a nut, and a motor for rotating the screw shaft. This makes it easier to more precisely control the linear reciprocating motion of at least one of the first base-side moving unit, etc. Therefore, precise positioning of the table unit can be more easily achieved.
[0064] In the above embodiment, the hole penetrates the base plate in the thickness direction, but this is not limited thereto. The hole may be recessed from the base surface of the base plate. This also allows the first block and other components to be temporarily retracted when the table is moved. Furthermore, the outer shape of the hole as viewed in the thickness direction is not limited to a square shape, and may be, for example, a rectangular, round, or elliptical shape.
[0065] The present invention is intended to cover a wide range of applications, including those related to the present invention, including those related to the present invention. [Explanation of symbols]
[0066] 10a table device, 11a base plate, 12a table portion, 13a base surface, 14a lower surface, 15a hole portion, 16a table base, 17a support portion, 18a table surface, 19a table mounting surface, 21a first block portion, 21b first opposing surface, 21c first block mounting surface, 22a second block portion, 22b second opposing surface, 22c second block mounting surface, 23a third block portion, 23b third opposing surface, 23c third block mounting surface, 31a first drive portion, 31b first base side moving portion, 31c first table side moving portion, 31d first inclined surface, 32a second drive portion, 32b second base side moving portion, 32c second table side moving portion, 32d second inclined surface, 33a third drive portion, 33b third base side moving portion, 33c Third table-side moving portion, 33d third inclined surface, 41a first linear motion mechanism, 41b first rail, 41c first slider, 42a second linear motion mechanism, 42b second rail, 42c second slider, 43a third linear motion mechanism, 43b third rail, 43c third slider, 44a fourth linear motion mechanism, 44b fourth rail, 44c fourth slider, 45a fifth linear motion mechanism, 45b fifth rail, 45c fifth slider, 46a sixth linear motion mechanism, 46b sixth rail, 46c sixth slider, 47a seventh linear motion mechanism, 47b seventh rail, 47c seventh slider, 48a eighth linear motion mechanism, 48b eighth rail, 48c eighth slider, 49a ninth linear motion mechanism, 49b ninth rail, 49c No. 9 slider, 51a, 52a, 53a ball screws, 51b, 52b, 53b screw shafts, 51c, 52c, 53c nuts, 51d, 52d, 53d motors, 51e, 52e, 53e cables.
Claims
1. a base plate having a base surface; a first linear motion mechanism including a first rail attached to the base surface and extending in a first direction, and a first slider attached to the first rail and movable in the first direction; a first base side moving unit attached to the first slider; a first driving unit fixed on the base surface and configured to linearly reciprocate the first base-side moving unit in the first direction; a second linear motion mechanism including a second rail attached to the first base-side moving section and a second slider attached to the second rail and movable in an extending direction of the second rail; a first table-side moving unit having a first inclined surface inclined with respect to the base surface and attached to the second slider; a third linear motion mechanism including a third rail attached to the first inclined surface and a third slider attached to the third rail and movable in an extending direction of the third rail; a fourth linear motion mechanism including a fourth rail attached to the base surface and extending in a second direction intersecting the first direction in a plane parallel to the base surface, and a fourth slider attached to the fourth rail and movable in the second direction; a second base side moving unit attached to the fourth slider; a second driving unit that is fixed on the base surface at a position different from that of the first driving unit and that causes the second base-side moving unit to linearly reciprocate in the second direction; a fifth linear motion mechanism including a fifth rail attached to the second base side moving section and a fifth slider attached to the fifth rail and movable in an extending direction of the fifth rail; a second table-side moving unit attached to the fifth slider, the second table-side moving unit having a second inclined surface inclined relative to the base surface and the first inclined surface; a sixth linear motion mechanism including a sixth rail attached to the second inclined surface and a sixth slider attached to the sixth rail and movable in an extending direction of the sixth rail; a seventh linear motion mechanism including: a seventh rail attached to the base surface and extending in a third direction intersecting the first direction and the second direction in a plane parallel to the base surface; and a seventh slider attached to the seventh rail and movable in the third direction; a third base-side moving unit attached to the seventh slider; a third drive unit that is fixed on the base surface at a position different from that of the first drive unit and the second drive unit, and that causes the third base-side moving unit to linearly reciprocate in the third direction; an eighth linear motion mechanism including an eighth rail attached to the third base-side moving section and an eighth slider attached to the eighth rail and movable in an extending direction of the eighth rail; a third table-side moving unit attached to the eighth slider, the third table-side moving unit having a third inclined surface inclined relative to the base surface, the first inclined surface, and the second inclined surface; a ninth linear motion mechanism including a ninth rail attached to the third inclined surface and a ninth slider attached to the ninth rail and movable in an extending direction of the ninth rail; a table unit having a first opposing surface facing the first inclined surface and on which the third slider is attached, a second opposing surface facing the second inclined surface and on which the sixth slider is attached, and a third opposing surface facing the third inclined surface and on which the ninth slider is attached, and which is movable in a direction along the base surface and a direction intersecting the base surface by driving at least one of the first driving unit, the second driving unit, and the third driving unit.
2. The table portion is a support portion including the first opposing surface, the second opposing surface, and the third opposing surface; The table device according to claim 1 , further comprising: a table base attached to the support portion and having a table surface on which a predetermined object can be placed.
3. The support portion is a first block portion provided with the first opposing surface; a second block portion provided with the second opposing surface and arranged separately from the first block portion; The table device according to claim 2 , further comprising: a third block portion provided with the third opposing surface and disposed separately from the first block portion and the second block portion.
4. the angle of the second direction relative to the first direction is 120 degrees; 3. The table apparatus according to claim 1, wherein the angle of the third direction relative to the first direction is −120 degrees.
5. The table device according to claim 3 , wherein the base plate is provided with holes into which a portion of each of the first block portion, the second block portion, and the third block portion can be placed.
6. 4. The table device according to claim 3, wherein at least one of the first block portion, the second block portion, and the third block portion has a wedge shape.
7. The table device according to claim 2 , wherein the table surface is parallel to the base surface.
8. At least one of the first driving unit, the second driving unit, and the third driving unit, a ball screw having a screw shaft and a nut; The table device according to claim 1 or 2, further comprising: a motor that rotates the screw shaft.
9. The table device according to claim 2 , wherein the support portion is disposed inside an outer shape of the table top when viewed in a thickness direction of the base plate.
Citation Information
Patent Citations
Two-axis orthogonal guide device, three-axis orthogonal guide device, three-axis orthogonal / rotational guide device, and table device
JP2011112625A