Inclination adjusting device

Abstract

An inclination adjusting device (100) is provided with a positioning mechanism (50), a control device (70), and an inclination detection sensor (80). The control device (70) is provided with an actuator control unit (71) configured to control a plurality of actuators provided in the positioning mechanism (50). The actuator control unit (71) drives the plurality of actuators so that a first crimping tool end surface (10a) is parallel to a reference surface (S) on the basis of a measurement result obtained by the inclination detection sensor (80).

Description

Tilt adjustment device

[0001] The present disclosure relates to a tilt adjustment device.

[0002] Conventionally, a bonding device in a semiconductor manufacturing device that bonds a workpiece to a reference stage includes a copying device. The copying device adjusts the inclination of the tool so that the tool and the reference stage are parallel. The tool includes a crimping tool end face.

[0003] For example, Patent Document 1 discloses a copying device including an apparatus base and a copying member. The apparatus base has a concave hemispherical surface. The copying member includes a rocking body and a tool. The rocking body has a convex hemispherical surface. The radius of curvature of the convex hemispherical surface is the same as the radius of curvature of the concave hemispherical surface. The copying device disclosed in Patent Document 1 also includes a holding member that engages with the copying member and an actuator that presses the copying member against the apparatus base via the holding member. The copying member is attached to the apparatus base so that the convex and concave hemispherical surfaces overlap and can rotate along the concave hemispherical surface. The copying device rotates the copying member along the concave hemispherical surface of the apparatus base by pressing the tip surface of the tool, which is the end surface of the crimping tool, against the upper surface of the reference stage. The copying device rotates the copying member along the concave hemispherical surface to make the copying member parallel to the reference stage. The copying device maintains the copying state of the copying member by pressing the copying member, which is parallel to the reference stage, against the device base via the holding member using an actuator.

[0004] Patent No. 4081247

[0005] In the conventional copying apparatus, there is a risk of a load being generated on the reference stage during a copying operation in which the tip surface of the tool is made parallel to the reference stage.

[0006] A tilt adjustment device according to one aspect of the present disclosure includes a rocker, a drive shaft, a device base, a tip spherical portion, a positioning mechanism, a tilt detection sensor, and a control device. The rocker has a first rocker end face and a second rocker end face that is a convex spherical surface. The drive shaft protrudes from the second rocker end face. The crimping tool has a second crimping tool end face attached to the first rocker end face and has a first crimping tool end face that is different from the second crimping tool end face. The device base has a first base end face that is a concave spherical surface that engages with the second rocker end face and a second base end face that is different from the first base end face, and has a base inner circumferential surface that defines an insertion hole through which the drive shaft is inserted and connects the second base end face and the first base end face. The tilt adjustment device is configured to adjust the tilt of the oscillator by swinging the second oscillator end face along the first base end face so that the first crimping tool end face is parallel to a reference plane. The tip spherical portion is provided at an axial end of the drive shaft protruding from the second base end face. The positioning mechanism is provided at the second base end face and configured to position the tip spherical portion. The tilt detection sensor is configured to measure the tilt of the first crimping tool end face relative to the reference plane. The control device is configured to control the positioning mechanism. The positioning mechanism includes a plurality of actuators arranged to surround the tip spherical portion along the second base end face. The plurality of actuators is configured to change the position of the tip spherical portion in a plane parallel to the second base end face. The control device includes an actuator control unit configured to drive the plurality of actuators so that the first crimping tool end face is parallel to the reference plane based on the measurement results obtained by the tilt detection sensor.

[0007] FIG. 1 is a perspective view showing an inclination adjustment device. FIG. 2 is a vertical cross-sectional view showing the inclination adjustment device of FIG. 1. FIG. 3 is an exploded view showing the positioning mechanism of FIG. 1. FIG. 4 is an exploded view showing the drive shaft and drive body of FIG. 1. FIG. 5 is a block diagram showing the relationship between the control device, the inclination detection sensor, and the first to fourth bellows actuators. FIG. 6 is a horizontal cross-sectional view showing the positioning mechanism of FIG. 1. FIG. 7 is a horizontal cross-sectional view showing the positioning mechanism of FIG. 1. FIG. 8 is a vertical cross-sectional view showing the inclination adjustment device of FIG. 1. FIG. 9 is an enlarged vertical cross-sectional view showing the locking mechanism of FIG. 1. FIG. 10 is a vertical cross-sectional view schematically showing the operation of the inclination adjustment device of FIG. 1. FIG. 11 is a horizontal cross-sectional view of a positioning mechanism in a modified example.

[0008] An embodiment of the tilt adjustment device will be described below with reference to Figures 1 to 10. <Overall Image of the Tilt Adjustment Device> As shown in Figures 1 to 5, the tilt adjustment device 100 includes a crimping portion oscillator 20, a device base 30, a locking mechanism 40, a positioning mechanism 50, a control device 70, and a tilt detection sensor 80.

[0009] 2, 4, and 9, the crimping portion oscillator 20 is integrally formed with the crimping tool 10, oscillator 21, drive shaft 22, and spherical tip portion 23. The crimping tool 10 crimps a workpiece. The direction in which the crimping portion axis LP of the crimping portion oscillator 20 extends coincides with the direction in which the crimping tool 10, oscillator 21, drive shaft 22, and spherical tip portion 23 are aligned.

[0010] The crimping tool 10 is columnar. The crimping tool 10 has two end faces, i.e., a first crimping tool end face 10a and a second crimping tool end face 10b. The first crimping tool end face 10a is opposite the second crimping tool end face 10b in the axial direction of the crimping tool 10. Therefore, the crimping tool 10 has the second crimping tool end face 10b, as well as a first crimping tool end face 10a that is a different end face from the second crimping tool end face 10b. The first crimping tool end face 10a faces a reference plane S, which will be described later. The second crimping tool end face 10b faces a first oscillator end face 21a, which will be described later. In other words, the crimping tool 10 has a second crimping tool end face 10b attached to the first oscillator end face 21a, as well as a first crimping tool end face 10a that is a different end face from the second crimping tool end face 10b.

[0011] The oscillator 21 is cylindrical. It has a first oscillator end face 21a to which the crimping tool 10 is attached, and a second oscillator end face 21b that is a convex spherical surface. The oscillator 21 has an oscillator insertion hole 21d that opens to the second oscillator end face 21b. The oscillator 21 has an oscillator inner circumferential surface 21c that defines the oscillator insertion hole 21d. The oscillator inner circumferential surface 21c has a female thread. A male thread formed on a first drive shaft end 22a of the drive shaft 22 (described later) is threaded into the female thread on the oscillator inner circumferential surface 21c. The drive shaft 22 protrudes from the second oscillator end face 21b of the oscillator 21. The axial direction of the oscillator 21 coincides with the direction in which the crimping portion axis LP extends. The axial direction of the oscillator insertion hole 21d coincides with the axial direction of the oscillator 21. The first oscillator end face 21 a and the second oscillator end face 21 b are located on opposite sides of the oscillator 21 in the axial direction.

[0012] The drive shaft 22 is cylindrical. The drive shaft 22 extends from the first drive shaft end 22a to the second drive shaft end 22b. The axial direction of the drive shaft 22 coincides with the direction in which the crimping portion axis LP extends. The drive shaft 22 has an intermediate spherical portion 22d between the first drive shaft end 22a and the second drive shaft end 22b. The intermediate spherical portion 22d is a portion of the drive shaft outer surface 22c that bulges in the radial direction of the drive shaft 22. The intermediate spherical portion 22d has a convex hemispherical surface whose diameter decreases in the direction from the second drive shaft end 22b toward the first drive shaft end 22a.

[0013] The drive shaft 22 has a spherical tip portion 23 at its second drive shaft end 22b. That is, the spherical tip portion 23 is provided at the second drive shaft end 22b, which is the axial end of the drive shaft 22 opposite the oscillator 21. The intermediate spherical portion 22d is located on the drive shaft 22 between the oscillator 21 and the spherical tip portion 23. The spherical tip portion 23 is spherical. The axial direction of the spherical tip portion 23 coincides with the direction in which the crimping portion axis LP extends. The spherical tip portion 23 has an insertion hole defined by the spherical tip portion inner surface 23a. The insertion hole extends in the direction of the crimping portion axis LP. The insertion hole penetrates the spherical tip portion 23. The second drive shaft end 22b of the drive shaft 22 is inserted into the insertion hole.

[0014] <Device Base> As shown in Figures 2, 3, and 9, the device base 30 is columnar. The device base 30 has a first base end face 30a, which is a first end face in the axial direction, and a second base end face 30b, which is a second end face in the axial direction. The device base 30 has a second base end face 30b, which is an end face different from the first base end face 30a. The device base 30 has an extension portion 30e. The extension portion 30e increases the area of ​​the second base end face 30b compared to the area of ​​the first base end face 30a. The extension portion 30e is a portion of the device base 30 that extends outward in a flat plate shape from the first base end face 30a. A base axis LB of the device base 30 is perpendicular to the first base end face 30a and the second base end face 30b. In the following description, the direction in which the base axis LB extends will be referred to as the axial direction of the device base 30. The device base 30 has a base inner peripheral surface 30c that defines a base insertion hole 30d that extends in the axial direction of the device base 30. The base inner peripheral surface 30c connects the second base end face 30b and the first base end face 30a. As will be described later, the drive shaft 22 is inserted through the base insertion hole 30d. The device base 30 has a base inner peripheral surface 30c that defines the base insertion hole 30d through which the drive shaft 22 is inserted and connects the second base end face 30b and the first base end face 30a.

[0015] The first base end surface 30a is a concave spherical surface. The radius of curvature of the first base end surface 30a matches the radius of curvature of the second oscillator end surface 21b, which is a convex spherical surface. The first base end surface 30a engages with the second oscillator end surface 21b. The device base 30 has the first base end surface 30a, which is a concave spherical surface, engaging with the second oscillator end surface 21b. Almost the entire first base end surface 30a is formed of an annular porous material 37 that functions as an air bearing. Therefore, the first base end surface 30a is the air bearing surface of the air bearing.

[0016] The second base end surface 30b is a flat surface. The second base end surface 30b is provided on the extension portion 30e. The device base 30 has an air bearing air supply / discharge chamber 32. The air bearing air supply / discharge chamber 32 communicates with the outside of the device base 30 via a plurality of holes in the annular porous material 37.

[0017] As shown in FIG. 9 , the base inner surface 30c includes a first base inner surface 301c and a second base inner surface 302c. The first base inner surface 301c is located on the portion of the base inner surface 30c closer to the first base end surface 30a. The second base inner surface 302c is located on the portion of the base inner surface 30c closer to the second base end surface 30b. The inner diameter of the second base inner surface 302c is larger than the inner diameter of the first base inner surface 301c. The first base inner surface 301c is connected to the second base inner surface 302c via a base step surface 303c. The base step surface 303c is perpendicular to both the first base inner surface 301c and the second base inner surface 302c. The base step surface 303c is parallel to the second base end surface 30b. The base step surface 303c faces the opposite side to the first base end surface 30a in the axial direction of the device base 30. The base step surface 303c faces the same direction as the second base end surface 30b in the axial direction of the device base 30.

[0018] The device base 30 includes a locking port 33 and an air bearing port 34. The locking port 33 communicates with a portion of the base insertion hole 30d defined by the second base inner peripheral surface 302c. The air bearing port 34 communicates with the air bearing air supply / discharge chamber 32.

[0019] 6, the device base 30 has first to fourth drive base ports 351 to 354 that supply air to first to fourth bellows actuators A1 to A4, respectively, which will be described later. The first to fourth drive base ports 351 to 354 are located on the extension portion 30e.

[0020] 2, the device base 30 has a ventilation port 36 in the extension portion 30e. In other words, the ventilation port 36 is provided in the device base 30. The ventilation port 36 communicates with an actuator accommodating space 54, which will be described later.

[0021] 2 and 9, the locking mechanism 40 includes a support member 42, a locking member 43, and a holding portion 44. The locking mechanism 40 includes a magnet 41, a first seal 42e, and a second seal 43d. The locking mechanism 40 does not necessarily have to include the magnet 41, the first seal 42e, and the second seal 43d.

[0022] The axial direction of the support member 42 coincides with the axial direction of the device base 30. The support member 42 is housed in the base insertion hole 30d. The support member 42 is fixed to the device base 30. The support member 42 has a support member inner circumferential surface 42a. The support member inner circumferential surface 42a defines a support member insertion hole 42d extending in the axial direction of the support member 42. The support member inner circumferential surface 42a has a recessed portion 421a.

[0023] The support member 42 has a protrusion 42c that protrudes from the support member outer peripheral surface 42b in the radial direction of the support member insertion hole 42d. The support member outer peripheral surface 42b has a first support member outer peripheral surface 421b that faces the first base inner peripheral surface 301c and a second support member outer peripheral surface 422b that faces the second base inner peripheral surface 302c. The second support member outer peripheral surface 422b includes the protrusion 42c. The second support member outer peripheral surface 422b has a support member recessed portion 423b. An end of the support member 42 closer to the first support member outer peripheral surface 421b holds a magnet 41. The magnet 41 is fixed to the support member 42.

[0024] The support member 42 is positioned in the base insertion hole 30d. The support member 42 is fixed to the device base 30 by abutting against the first base inner peripheral surface 301c and the first support member outer peripheral surface 421b.

[0025] The axial direction of the locking member 43 coincides with the axial direction of the device base 30. The locking member 43 is housed in the base insertion hole 30d. The locking member 43 is reciprocable in the axial direction of the device base 30 along the base inner peripheral surface 30c.

[0026] The locking member 43 has a locking member inner circumferential surface 43a that defines the locking member insertion hole 43c. The locking member inner circumferential surface 43a includes a first locking member inner circumferential surface 431a and a second locking member inner circumferential surface 432a. The first locking member inner circumferential surface 431a is the portion of the locking member inner circumferential surface 43a closer to the first base end face 30a. The second locking member inner circumferential surface 432a is the portion of the locking member inner circumferential surface 43a closer to the second base end face 30b. The inner diameter of the first locking member inner circumferential surface 431a is smaller than the inner diameter of the second locking member inner circumferential surface 432a. The first locking member inner circumferential surface 431a and the second locking member inner circumferential surface 432a are connected by a locking member step surface 433a. The locking member step surface 433a faces away from the first base end face 30a in the axial direction of the device base 30. The locking member step surface 433a faces the same direction as the base step surface 303c and the second base end surface 30b in the axial direction of the device base 30.

[0027] The locking member 43 has a locking member outer peripheral surface 43b. The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The locking member 43 has a locking member recess 431b on the locking member outer peripheral surface 43b.

[0028] A portion of the first locking member inner peripheral surface 431a faces the second support member outer peripheral surface 422b and the support member recessed portion 423b. The first seal 42e is located in the support member recessed portion 423b. The first seal 42e provides a seal between the first locking member inner peripheral surface 431a and the second support member outer peripheral surface 422b. The first seal 42e provides a seal between the support member 42 and the locking member 43. In other words, the locking mechanism 40 has the first seal 42e that provides a seal between the support member 42 and the locking member 43.

[0029] The locking member outer peripheral surface 43b faces the second base inner peripheral surface 302c. The second seal 43d is located in the locking member recess 431b. The second seal 43d seals between the locking member outer peripheral surface 43b and the second base inner peripheral surface 302c. In other words, the locking mechanism 40 has the second seal 43d that seals between the locking member 43 and the device base 30.

[0030] The protrusion 42c is located between the base step surface 303c and the locking member 43 in the axial direction of the device base 30. The protrusion 42c restricts the movement of the locking member 43 in the base insertion hole 30d, thereby preventing contact between the locking member 43 and the base step surface 303c.

[0031] The locking member 43, the second base inner peripheral surface 302c, the base step surface 303c, and the second support member outer peripheral surface 422b form a locking air supply / discharge chamber 46. The locking air supply / discharge chamber 46 communicates with the outside of the device base 30 via the locking port 33. The locking port 33 is configured to be able to supply and discharge air to and from the locking air supply / discharge chamber 46 by connecting it to a pressure supply source (not shown) described below. In other words, the locking air supply / discharge chamber 46 is defined by the locking member 43, the device base 30, and the support member 42. The locking mechanism 40 includes the locking air supply / discharge chamber 46 and the locking port 33.

[0032] The axial direction of the holding portion 44 coincides with the axial direction of the device base 30. The holding portion 44 is housed in the locking member insertion hole 43c. The holding portion 44 has a holding portion inner circumferential surface 44a that engages with the spherical surface of the intermediate spherical portion 22d. The holding portion inner circumferential surface 44a defines a holding portion insertion hole 44c that extends in the axial direction of the holding portion 44. The drive shaft 22 is inserted into the holding portion insertion hole 44c. In other words, the drive shaft 22 is inserted into the holding portion 44, and the holding portion 44 has the holding portion inner circumferential surface 44a that engages with the intermediate spherical portion 22d.

[0033] The holder outer peripheral surface 44b has a first holder outer peripheral surface 441b and a second holder outer peripheral surface 442b. The first holder outer peripheral surface 441b is located on the portion of the holder outer peripheral surface 44b closer to the first base end face 30a. The second holder outer peripheral surface 442b is located on the portion of the holder outer peripheral surface 44b closer to the second base end face 30b. The outer diameter of the first holder outer peripheral surface 441b is smaller than the outer diameter of the second holder outer peripheral surface 442b. The first holder outer peripheral surface 441b and the second holder outer peripheral surface 442b are connected by a holder step surface 443b.

[0034] The holding portion 44 is provided at a position where the first holding portion outer peripheral surface 441b faces the first locking member inner peripheral surface 431a, and where the second holding portion outer peripheral surface 442b faces the second locking member inner peripheral surface 432a. The holding portion step surface 443b faces the locking member step surface 433a. The holding portion 44 is configured so that the holding portion step surface 443b can come into contact with the locking member step surface 433a. When the locking member step surface 433a is in contact with the holding portion step surface 443b, the holding portion 44 is supported by the locking member 43.

[0035] The first locking member inner peripheral surface 431a, the second locking member inner peripheral surface 432a, and the support member inner peripheral surface 42a define a locking chamber 47. The locking chamber 47 communicates with the actuator accommodating space 54 via a gap between the locking member 43 and the retaining portion 44.

[0036] <Positioning Mechanism and Linear Slide Mechanism> As shown in Figures 1 to 3 and 6, the positioning mechanism 50 includes a positioning mechanism housing 51, which is a housing portion. The positioning mechanism 50 includes an actuator accommodating top plate 51a. The positioning mechanism 50 includes first to fourth bellows actuators A1 to A4, which are a plurality of actuators. The positioning mechanism 50 includes first to fourth linear slide mechanisms 61 to 64, which are a plurality of linear slide mechanisms. The positioning mechanism 50 includes a driver 55. The driver 55 has a cylindrical bearing 52 and a bearing holder 53.

[0037] 2 to 4 and 6, the axial direction of the positioning mechanism housing 51 coincides with the axial direction of the device base 30. The positioning mechanism housing 51 has a polygonal shape when viewed from the axial direction of the device base 30. The positioning mechanism housing 51 of this embodiment has a substantially rectangular shape with four long sides and four short sides arranged alternately in the circumferential direction when viewed from the axial direction of the device base 30. The positioning mechanism housing 51 is attached to the second base end surface 30b of the device base 30.

[0038] The positioning mechanism housing 51 is shaped like a rectangular pillar. The positioning mechanism housing 51 has an end face facing the second base end face 30b. A cross section of the positioning mechanism housing 51 perpendicular to the axial direction of the positioning mechanism housing 51 is a substantially rectangular shape with four sets of opposing sides. The positioning mechanism housing 51 has first to eighth side walls W1 to W8.

[0039] The positioning mechanism housing 51 has first to fourth isosceles trapezoidal portions T1 to T4. Each of the first to fourth isosceles trapezoidal portions T1 to T4 is a trapezoidal prism. Each of the first to fourth isosceles trapezoidal portions T1 to T4 has an isosceles trapezoid shape when viewed from the axial direction of the positioning mechanism housing 51.

[0040] The first isosceles trapezoid portion T1 is an isosceles trapezoid whose lower base is the portion that runs along the first side wall W1, and whose two portions extending from the lower base are perpendicular to the eighth side wall W8 and the second side wall W2, respectively.

[0041] The second isosceles trapezoid portion T2 is an isosceles trapezoid whose lower base is along the third side wall W3, and whose two portions extending from the lower base are perpendicular to the second side wall W2 and the fourth side wall W4, respectively.

[0042] The third isosceles trapezoid portion T3 is an isosceles trapezoid whose lower base is along the fifth side wall W5, and whose two portions extending from the lower base are perpendicular to the fourth side wall W4 and the sixth side wall W6, respectively.

[0043] The fourth isosceles trapezoid portion T4 is an isosceles trapezoid whose lower base is along the seventh side wall W7, and whose two portions extending from the lower base are perpendicular to the sixth side wall W6 and the eighth side wall W8, respectively.

[0044] Each of the first to fourth isosceles trapezoidal portions T1 to T4 is configured to accommodate a bearing holder 53, which will be described later. The inner surface of the positioning mechanism housing 51 includes the side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4. The side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4 and the second base end surface 30b define an actuator accommodating space 54, which is an accommodating space. When viewed in the axial direction of the positioning mechanism housing 51, the actuator accommodating space 54 is cross-shaped. The tilt adjustment device 100 has the actuator accommodating space 54 defined by the side surfaces of the first to fourth isosceles trapezoidal portions T1 to T4 and the second base end surface 30b. The actuator accommodating top plate 51a covers the actuator accommodating space 54 in the axial direction of the device base 30. The actuator accommodating space 54 accommodates the first to fourth bellows actuators A1 to A4 and the first to fourth linear slide mechanisms 61 to 64. The actuator accommodating space 54 accommodates the cylindrical bearing 52 , the bearing holder 53 , the second drive shaft end 22 b , and the spherical tip portion 23 .

[0045] The axial direction of each of the first to fourth bellows actuators A1 to A4 is perpendicular to the base axis LB. The first to fourth bellows actuators A1 to A4 have first to fourth drive ports A11 to A14 at their first ends, respectively. The first to fourth bellows actuators A1 to A4 have first to fourth connection portions A21 to A24 at their second ends, respectively. The first to fourth drive ports A11 to A14 communicate with corresponding first to fourth drive base ports 351 to 354, respectively. The first to fourth drive base ports 351 to 354 are located on the extension portion 30e of the device base 30. Each of the first to fourth bellows actuators A1 to A4 has a bellows portion. The first bellows actuator A1 has a bellows portion between the first drive port A11 and the first connection portion A21. The second bellows actuator A2 has a bellows portion between the second drive port A12 and the second connection portion A22. The third bellows actuator A3 has a bellows portion between the third drive port A13 and the third connection portion A23. The fourth bellows actuator A4 has a bellows portion between the fourth drive port A14 and the fourth connection portion A24.

[0046] When the pressure of the air supplied from the corresponding first to fourth drive ports A11 to A14 increases, the internal pressure of the first to fourth bellows actuators A1 to A4 increases. When the pressure of the air supplied from the corresponding first to fourth drive ports A11 to A14 decreases, the internal pressure of the first to fourth bellows actuators A1 to A4 decreases. When the internal pressure of each of the first to fourth bellows actuators A1 to A4 increases, the bellows portion expands in the axial direction. When the internal pressure of each of the first to fourth bellows actuators A1 to A4 decreases, the bellows portion contracts in the axial direction.

[0047] The first bellows actuator A1 and the third bellows actuator A3 constitute a first bellows actuator pair AA1. The first bellows actuator pair AA1 is composed of opposing bellows actuators. The second bellows actuator A2 and the fourth bellows actuator A4 constitute a second bellows actuator pair AA2. The second bellows actuator pair AA2 is composed of opposing bellows actuators.

[0048] A first end of the first bellows actuator A1 is fixed to the second side wall W2. The first bellows actuator A1 expands in a direction toward the sixth side wall W6 within the space between the first isosceles trapezoidal portion T1 and the second isosceles trapezoidal portion T2 in response to an increase in the pressure of the air supplied from the first driving port A11. The first bellows actuator A1 contracts in a direction away from the sixth side wall W6 within the space between the first isosceles trapezoidal portion T1 and the second isosceles trapezoidal portion T2 in response to a decrease in the pressure of the air supplied from the first driving port A11.

[0049] A first end of the second bellows actuator A2 is fixed to the fourth side wall W4. The second bellows actuator A2 expands in a direction toward the eighth side wall W8 within the space between the second isosceles trapezoidal portion T2 and the third isosceles trapezoidal portion T3 in response to an increase in the pressure of the air supplied from the second drive port A12. The second bellows actuator A2 contracts in a direction away from the eighth side wall W8 within the space between the second isosceles trapezoidal portion T2 and the third isosceles trapezoidal portion T3 in response to a decrease in the pressure of the air supplied from the second drive port A12.

[0050] A first end of the third bellows actuator A3 is fixed to the sixth side wall W6. The third bellows actuator A3 expands in a direction toward the second side wall W2 within the space between the third isosceles trapezoidal portion T3 and the fourth isosceles trapezoidal portion T4 in response to an increase in the pressure of the air supplied from the third drive port A13. The third bellows actuator A3 contracts in a direction away from the second side wall W2 within the space between the third isosceles trapezoidal portion T3 and the fourth isosceles trapezoidal portion T4 in response to a decrease in the pressure of the air supplied from the third drive port A13.

[0051] A first end of the fourth bellows actuator A4 is fixed to the eighth side wall W8. The fourth bellows actuator A4 expands in a direction toward the fourth side wall W4 within the space between the fourth isosceles trapezoidal portion T4 and the first isosceles trapezoidal portion T1 in response to an increase in the pressure of air supplied from the fourth drive port A14. The third bellows actuator A3 contracts in a direction away from the fourth side wall W4 within the space between the fourth isosceles trapezoidal portion T4 and the first isosceles trapezoidal portion T1 in response to a decrease in the pressure of air supplied from the third drive port A13.

[0052] Both ends of the first bellows actuator pair AA1 are fixed to the second side wall W2 and the sixth side wall W6, respectively. The axial direction of the first bellows actuator pair AA1 coincides with the expansion and contraction directions of the first and third bellows actuators A1 and A3. Both ends of the second bellows actuator pair AA2 are fixed to the fourth side wall W4 and the eighth side wall W8, respectively. The axial direction of the second bellows actuator pair AA2 coincides with the expansion and contraction directions of the second and fourth bellows actuators A2 and A4. In other words, the positioning mechanism 50 is attached to the second base end surface 30b and houses the first to fourth bellows actuators A1 to A4. The positioning mechanism 50 further includes a positioning mechanism housing 51 that is polygonal when viewed from the axial direction of the device base 30. Furthermore, both ends of the first and second bellows actuator pairs AA1 and AA2 are fixed to the respective corners of the positioning mechanism housing 51.

[0053] The axis of the first bellows actuator pair AA1 and the axis of the second bellows actuator pair AA2 are perpendicular to each other at the position of a bearing holder 53, which will be described later. In other words, the first to fourth bellows actuators A1 to A4 are arranged so that the axes of the first and second bellows actuator pairs AA1, AA2 are perpendicular to each other.

[0054] The bearing holder 53 has a rectangular prism shape. The bearing holder 53 has an inner peripheral surface 53a that holds the cylindrical bearing 52. The axial direction of the bearing holder 53 coincides with the axial direction of the device base 30. The bearing holder 53 has four flat side walls K.

[0055] Each of the first to fourth linear slide mechanisms 61 to 64 includes a linear guide unit S1 and a rectangular parallelepiped slide connection unit S11. Each linear guide unit S1 includes a slide plate 661 and a slide unit 662. The slide plate 661 can move relative to the slide unit 662. The slide plate 661 moves linearly. The slide unit 662 has a slide surface 651 facing away from the slide plate 661.

[0056] The slide surface 651 is connected to the second end of each of the first to fourth bellows actuators A1 to A4. Each slide plate 661 is attached to each of the first to fourth bellows actuators A1 to A4 via a slide portion 662. Each slide plate 661 is attached to each of the first to fourth bellows actuators A1 to A4 so as to be movable in a direction perpendicular to the extension / contraction direction of the corresponding bellows actuator A1 to A4 and perpendicular to the axial direction of the bearing holder 53.

[0057] Furthermore, the slide portion 662 is attached to each side wall K of the bearing holder 53 via a slide connection portion S11 attached to the slide plate 661. The driver 55 is surrounded by the first to fourth bellows actuators A1 to A4 when viewed from a direction perpendicular to the base axis LB. In other words, the first to fourth bellows actuators A1 to A4 are arranged so as to surround the driver 55 along the second base end surface 30b. The driver 55 is connected to the first to fourth bellows actuators A1 to A4 via first to fourth linear slide mechanisms 61 to 64. The driver 55 is arranged between the two bellows actuators that make up each of the first and second bellows actuator pairs AA1, AA2.

[0058] In the driver 55, a bearing holder 53 holds a cylindrical bearing 52. Specifically, the cylindrical bearing 52 is inserted into the bearing holder 53. The axial direction of the cylindrical bearing 52 coincides with the axial direction of the device base 30. The cylindrical bearing 52 has a cylindrical bearing inner circumferential surface 52a that defines a cylindrical bearing insertion hole 52d that extends in the axial direction of the cylindrical bearing 52. The driver 55 includes the cylindrical bearing 52 that defines the cylindrical bearing insertion hole 52d, and a bearing holder 53 that holds the cylindrical bearing 52. Furthermore, the central axis LC of the cylindrical bearing 52 extends in the axial direction of the device base 30.

[0059] Before the cylindrical bearing 52 is inserted into the bearing holder 53, in other words, before the tip spherical portion 23 is inserted into the cylindrical bearing 52, the inner diameter of the cylindrical bearing inner circumferential surface 52a is smaller than the diameter of the tip spherical portion 23. The cylindrical bearing 52 has a cylindrical bearing outer circumferential surface 52b. The cylindrical bearing outer circumferential surface 52b faces the bearing holder inner circumferential surface 53a.

[0060] The cylindrical bearing 52 has a gap 52c extending in the axial direction of the cylindrical bearing 52 on the cylindrical bearing inner circumferential surface 52a and the cylindrical bearing outer circumferential surface 52b so that the inner diameter of the cylindrical bearing 52 can be expanded. The cylindrical bearing 52 has an inner diameter smaller than the diameter of the tip spherical portion 23, and has the gap 52c extending in the axial direction of the cylindrical bearing 52 so that the inner diameter of the cylindrical bearing 52 can be expanded.

[0061] The cylindrical bearing 52 inserted into the bearing holder 53 has a diameter expanded by the gap 52c, thereby accommodating the spherical tip portion 23 within the cylindrical bearing insertion hole 52d. The outer surface of the spherical tip portion 23 is in sliding contact with the cylindrical bearing inner circumferential surface 52a. The positioning mechanism 50 has a driver 55. The driver 55 defines the cylindrical bearing insertion hole 52d into which the spherical tip portion 23 is inserted and has the cylindrical bearing inner circumferential surface 52a against which the spherical tip portion 23 is in sliding contact. The bearing holder 53 is interlocked with the drive shaft 22 via the cylindrical bearing 52 and the spherical tip portion 23. Therefore, the positioning mechanism 50 drives the first to fourth bellows actuators A1 to A4, thereby driving the oscillator 21 via the first to fourth linear slide mechanisms 61 to 64, the driver 55, and the drive shaft 22. That is, the positioning mechanism 50 is provided on the second base end surface 30 b and positions the spherical tip portion 23 .

[0062] <Positional Relationship Between the Crimping Section Oscillator, Device Base, and Positioning Mechanism> The relationship between the crimping section oscillator 20, device base 30, and positioning mechanism 50 will be described with reference to FIGS. 2 to 5 and 9. FIG.

[0063] The drive shaft 22 included in the crimping part rocking body 20 is inserted into the base insertion hole 30d so that the tip spherical portion 23 protrudes from the second base end face 30b. The tip spherical portion 23 is provided at the second drive shaft end portion 22b. The device base 30 defines a base insertion hole 30d, which is an insertion hole through which the drive shaft 22 is inserted. The rocking body 21 included in the crimping part rocking body 20 has a second rocking body end face 21b that is a convex spherical surface, and the second rocking body end face 21b faces the first base end face 30a that is a concave spherical surface. The second rocking body end face 21b has the same radius of curvature as the first base end face 30a, and therefore can rock along the first base end face 30a. In the base insertion hole 30d defined by the base inner peripheral surface 30c, the drive shaft 22 is inserted through the support member 42, the lock member 43, and the holding portion 44.

[0064] The locking member inner peripheral surface 43a faces the drive shaft outer peripheral surface 22c and is spaced from the drive shaft outer peripheral surface 22c in the radial direction of the drive shaft 22. The locking member 43 has the locking member inner peripheral surface 43a that surrounds the drive shaft 22. The support member 42 is located between the locking member inner peripheral surface 43a and the drive shaft outer peripheral surface 22c. The support member 42 has the support member inner peripheral surface 42a that surrounds the drive shaft 22 at a position spaced from the drive shaft 22.

[0065] A packing 45 is provided in the recessed portion 421a of the support member 42 to seal the gap between the drive shaft outer peripheral surface 22c and the support member 42. The packing 45 is expandable and contractible in the radial direction of the base inner peripheral surface 30c. The packing 45 allows the drive shaft 22 to oscillate. The packing 45 allows air to flow from the first base end surface 30a to the second base end surface 30b.

[0066] The spherical tip portion 23 protrudes from the second base end face 30b and is accommodated in the cylindrical bearing insertion hole 52d. The spherical tip portion 23 expands the gap 52c in the circumferential direction of the cylindrical bearing 52, thereby increasing the diameter of the cylindrical bearing insertion hole 52d. The cylindrical bearing 52 is inserted into the bearing holder 53, and together with the bearing holder 53, constitutes the driver 55. The spherical tip portion 23 is inserted into the driver 55.

[0067] The driver 55 is accommodated in the actuator accommodating space 54. Air is supplied to and exhausted from the actuator accommodating space 54 via a ventilation port 36. The ventilation port 36 communicates with the actuator accommodating space 54. The ventilation port 36 also communicates with the space defined by the locking member inner circumferential surface 43 a and the retaining portion outer circumferential surface 44 b, and the space defined by the drive shaft outer circumferential surface 22 c and the support member inner circumferential surface 42 a.

[0068] The ventilation port 36 communicates with the outside of the tilt adjustment device 100 via the actuator accommodating space 54 and the gap between the positioning mechanism housing 51 and the actuator accommodating top plate 51a.

[0069] The first to fourth drive base ports 351 to 354 are each connected to a pressure supply source (not shown). The first to fourth drive base ports 351 to 354 supply air from the pressure supply source to the first to fourth drive ports A11 to A14, respectively. The first to fourth drive ports A11 to A14 then supply the supplied air to the first to fourth bellows actuators A1 to A4, respectively. The first to fourth bellows actuators A1 to A4 expand and contract in response to increases or decreases in the pressure of the supplied air, thereby positioning the spherical tip portion 23 via the first to fourth linear slide mechanisms 61 to 64 and the driver 55, respectively. In other words, the positioning mechanism 50 uses the first to fourth bellows actuators A1 to A4 to position the spherical tip portion 23 in a plane parallel to the second base end surface 30b. In other words, the positioning mechanism 50 includes first to fourth bellows actuators A1 to A4 that change the position of the spherical tip portion 23 in a plane parallel to the second base end surface 30b via the driver 55. The positioning mechanism 50 includes the first to fourth bellows actuators A1 to A4 that are arranged to surround the driver 55 and the spherical tip portion 23 along the second base end surface 30b.

[0070] Changes in the position of the spherical tip portion 23 in a plane parallel to the second base end face 30b are accompanied by movement of the spherical tip portion 23 in the direction along the central axis LC within the cylindrical bearing insertion hole 52d. Changes in the position of the spherical tip portion 23 by the positioning mechanism 50 induce oscillation of the oscillator 21, which is guided by the first base end face 30a. Movement of the spherical tip portion 23 in the direction along the central axis LC occurs because the spherical tip portion 23 is linked to the oscillation of the oscillator 21 via the drive shaft 22.

[0071] <Control Device and Tilt Detection Sensor> The control device 70 controls the positioning mechanism 50. As shown in Fig. 5, the control device 70 includes an actuator control unit 71 that drives the first to fourth bellows actuators A1 to A4, a drive amount calculation unit 72, and first to fourth electro-pneumatic regulators E1 to E4.

[0072] The control device 70 includes a processor and a storage unit (not shown). The processor is, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The storage unit is, for example, a ROM (Read-Only Memory) or a RAM (Random Access Memory). The processor functions as an actuator control unit 71 and a drive amount calculation unit 72 by executing instructions included in a program stored in the storage unit. Therefore, the control device 70 includes the actuator control unit 71 and the drive amount calculation unit 72.

[0073] The drive amount calculation unit 72 determines a target value for the angle of inclination of the crimping portion oscillator 20 relative to the device base 30 based on parallelism information transmitted by a tilt detection sensor 80 (described later). The drive amount calculation unit 72 determines the target value in order to make the first crimping tool end face 10a parallel to the reference plane S. The parallelism information includes the tilt angle of the first crimping tool end face 10a relative to the reference plane S at the time of measurement. The tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a relative to the reference plane S. The drive amount calculation unit 72 calculates the pressure of air to be supplied to each of the first to fourth bellows actuators A1 to A4 based on the parallelism information and the target value. The pressure values ​​to be supplied to each of the first to fourth bellows actuators A1 to A4 can be determined using the following equations (1) to (4).

[0074]

[0075]

[0076]

[0077] P １_Ａ１ , P １_Ａ２ , P １_Ａ３ , P １_Ａ４ are the pressure values ​​supplied to the first to fourth bellows actuators A1 to A4, respectively, in the posture in which the crimping portion axis LP and the base axis LB are aligned. ２_Ａ１ , P ２_Ａ２ , P ２_Ａ３ , P ２_Ａ４are the pressure values ​​supplied to the first to fourth bellows actuators A1 to A4, respectively, when the crimping portion rocking body 20 assumes an inclined posture at the target value relative to the device base 30.

[0078] As shown in FIGS. 6 to 8, α １ is the angle between the crimping portion axis LP and the base axis LB. １ is measured by the tilt detection sensor 80. １ is the inclination direction of the crimping portion axis LP in a plane perpendicular to the base axis LB. １ is measured by the tilt detection sensor 80. The tilt direction is the azimuth angle when the base axis LB is set as the origin and the first azimuth axis LA1 is set as the reference axis. The first azimuth axis LA1 is a line that bisects the angle between the first bellows actuator A1 and the fourth bellows actuator A4. The line that bisects the angle between the first bellows actuator A1 and the second bellows actuator A2 is set as the second azimuth axis LA2. α ２ is the target value of the angle between the crimping portion axis LP and the base axis LB. ２ is the target value of the tilt direction of the crimping portion axis LP in a plane perpendicular to the base axis LB. K is a proportional gain value. K is a predetermined proportionality constant. C is a proportionality constant. C is determined by the rigidity and cross-sectional area of ​​each of the first to fourth bellows actuators A1 to A4. Note that C may be different for each of the first to fourth bellows actuators A1 to A4. L is the distance from the center of oscillation of the oscillator 21 to the center of the tip spherical portion 23. φ is the angle between the axis of the first bellows actuator pair AA1 and the axis of the second bellows actuator pair AA2. Each of FIGS. 6 and 7 shows the first azimuthal axis LA1 and the second azimuthal axis LA2, as well as the tilt direction θ. The first azimuthal axis LA1 and the second azimuthal axis LA2 are each perpendicular to the base axis LB. The first azimuthal axis LA1 is perpendicular to the second azimuthal axis LA2 and is parallel to the third sidewall W3 and the seventh sidewall W7.

[0079] Therefore, the drive amount calculation unit 72 calculates the pressure to be supplied to each of the first to fourth bellows actuators A1 to A4 based on the inclination of the first crimping tool end face 10a relative to the reference plane S measured by the inclination detection sensor 80. The pressure to be supplied to each of the first to fourth bellows actuators A1 to A4 is the pressure required to make the first crimping tool end face 10a parallel to the reference plane S.

[0080] The actuator control section 71 drives the first to fourth electropneumatic regulators E1 to E4 based on the calculation results of the drive amount calculation section 72, thereby supplying air at an appropriate pressure to the first to fourth bellows actuators A1 to A4.

[0081] The tilt detection sensor 80 is a sensor that detects the parallelism between the first crimping tool end face 10a and the reference plane S. The tilt detection sensor 80 is, for example, a plurality of laser sensors attached to a plurality of locations on the crimping portion oscillator 20. For example, the tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a with respect to the reference plane S by measuring the distance between the first crimping tool end face 10a and the reference plane S at a plurality of locations.

[0082] The tilt detection sensor 80 is electrically connected to the control device 70. After detecting the parallelism between the first crimping tool end face 10a and the reference plane S, the tilt detection sensor 80 transmits parallelism information relating to the parallelism to the control device 70. Based on the measurement results obtained by the tilt detection sensor 80, the control device 70 drives the first to fourth bellows actuators A1 to A4 using the actuator control unit 71 so that the first crimping tool end face 10a becomes parallel to the reference plane S.

[0083] <Operation and Function of Tilt Adjustment Device> The operation of the tilt adjustment device 100 will be described using Figure 2 and Figures 6 to 8. The tilt adjustment device 100 is in an initial position as shown in Figure 2. The tilt adjustment device 100 is attached, for example, to a transport device (not shown). The tilt adjustment device 100 is in a position where the first crimping tool end surface 10a faces the reference plane S and the crimping tool 10 is separated from the reference plane S. In the initial position, the crimping portion axis LP and the base axis LB coincide. The reference plane axis LS, which extends in a direction perpendicular to the reference plane S, is not parallel to the crimping portion axis LP and the base axis LB. Figure 6 shows the positioning mechanism 50 in the initial position, as viewed from the axial direction of the device base 30. In the initial position, the centers of the positioning mechanism 50 and the driver 55 coincide when viewed from the axial direction of the device base 30.

[0084] In the initial position, air is supplied from a pressure supply source to each of the first to fourth bellows actuators A1 to A4. This air is supplied via each of the first to fourth drive base ports 351 to 354 and each of the first to fourth drive ports A11 to A14. When the tilt adjustment device 100 is in the initial position, air at the same pressure is supplied to the first to fourth bellows actuators A1 to A4. In other words, in the initial position, the first bellows actuator A1 and the third bellows actuator A3 press the drive body 55 with the same pressure. Furthermore, the second bellows actuator A2 and the fourth bellows actuator A4 press the drive body 55 with the same pressure.

[0085] The tilt detection sensor 80 measures the tilt of the first crimping tool end face 10a relative to the reference plane S. The tilt detection sensor 80 transmits the measured tilt to the control device 70 as current angle information. The control device 70 receives the current angle information transmitted from the tilt detection sensor 80. The control device 70 determines a target value using a drive amount calculation unit 72. The target value is the tilt of the crimping part oscillator 20 relative to the device base 30 that is required for the first crimping tool end face 10a to become parallel to the reference plane S. To achieve the target value, the drive amount calculation unit 72 determines the increase / decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 by using equations (1) to (4).

[0086] Once the increase or decrease in air pressure has been determined, the pressure supply source supplies air to the air bearing port 34. The supplied air is supplied between the first base end face 30a and the second oscillator end face 21b via the air bearing air supply / discharge chamber 32 and the multiple holes in the annular porous material 37. In other words, the annular porous material 37 receives air supply from the air bearing port 34. The air supply pressurizes the gap between the second oscillator end face 21b and the first base end face 30a. As a result, the second oscillator end face 21b moves away from the first base end face 30a. At the same time, the oscillator 21 is attracted toward the first base end face 30a by the magnetic attraction of the magnet 41. As a result, a small gap is maintained between the second oscillator end face 21b and the first base end face 30a. Therefore, the device base 30 supports the oscillator 21 so that the oscillator 21 can oscillate while being spaced apart from the first base end surface 30a.

[0087] The actuator control unit 71 supplies the first to fourth bellows actuators A1 to A4 with the air necessary to achieve the amount of pressure increase or decrease determined by the drive amount calculation unit 72. The actuator control unit 71 supplies air at an appropriate pressure to the first to fourth bellows actuators A1 to A4 by driving the pressure supply source and the first to fourth electropneumatic regulators E1 to E4.

[0088] Each of the first to fourth bellows actuators A1 to A4 expands or contracts along the second base end surface 30b in accordance with the increase or decrease in the pressure of the supplied air. Each of the first to fourth bellows actuators A1 to A4 expands or contracts to push or pull the driver 55. In other words, as each of the first to fourth bellows actuators A1 to A4 expands or contracts, the driver 55 moves in a direction along the second base end surface 30b.

[0089] For example, assume that the positioning mechanism 50 moves the driver 55 along the axial direction of the first bellows actuator pair AA1, from the first bellows actuator A1 toward the third bellows actuator A3. In this case, the pressure supply source increases the pressure of the air supplied to the first bellows actuator A1 and decreases the pressure of the air supplied to the third bellows actuator A3. The amount of pressure reduction due to the reduction in pressure is equal to the amount of increase in pressure supplied to the first bellows actuator A1. In other words, when the first bellows actuator A1 expands, the third bellows actuator A3 simultaneously contracts by a distance equal to the expansion amount of the first bellows actuator A1. As a result, the driver 55 moves a distance corresponding to the expansion amount of the first bellows actuator A1 and the contraction amount of the third bellows actuator A3. The driver 55 of the second bellows actuator pair AA2 can also be moved in the same manner as the first bellows actuator pair AA1. By combining the first bellows actuator pair AA1 and the second bellows actuator pair AA2, the positioning mechanism 50 can move the driver 55 in any direction along the second base end surface 30b. The positioning mechanism 50 can move the driver 55 in a direction different from the axial direction of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2.

[0090] 3, 6, and 7, as the driver 55 moves along the second base end surface 30b, the slide plate 661 moves relative to the corresponding slide portion 662. The positioning mechanism 50 uses the first to fourth actuators A1 to A4 to push and pull the driver 55 via the first to fourth linear slide mechanisms 61 to 64, respectively. As a result, the positioning mechanism 50 moves the driver 55.

[0091] As shown in Figures 2, 8, and 9, the driver 55 moves in a direction along the second base end surface 30b, thereby changing the position of the spherical tip portion 23 in a plane parallel to the second base end surface 30b. As the position of the spherical tip portion 23 changes in a plane parallel to the second base end surface 30b, the oscillator 21 oscillates along the first base end surface 30a. The oscillation of the oscillator 21 guides the movement of the spherical tip portion 23 along the central axis LC within the cylindrical bearing insertion hole 52d via the drive shaft 22. In other words, the movement of the driver 55 by the positioning mechanism 50 guides the movement of the spherical tip portion 23 along the second base end surface 30b and along the central axis LC within the cylindrical bearing 52. Therefore, the cylindrical bearing 52 prevents the tip spherical portion 23 from interfering with the first to fourth bellows actuators A1 to A4 in the direction of the central axis LC. When the oscillator 21 oscillates, air is supplied from the air bearing port 34. By supplying air from the air bearing port 34, the oscillator 21 is oscillatably supported on the device base 30 without the second oscillator end surface 21b coming into contact with the first base end surface 30a. At this time, the pressure supply source draws air from the locking air supply / discharge chamber 46 via the locking port 33, thereby creating a negative pressure in the supply pressure to the locking air supply / discharge chamber 46. As a result of the negative supply pressure, the locking member 43 is pressed against the protrusion 42c and separated from the holding portion 44. At this time, the inner peripheral surface 44a of the holding portion 44 is not strongly pressed against the spherical surface of the intermediate spherical portion 22d. The holding portion 44 has an inner peripheral surface 44a that engages with the drive shaft 22 to allow the drive shaft 22 to swing.

[0092] The first base end face 30a is a concave spherical surface that engages with the second oscillator end face 21b, which is a convex spherical surface. Therefore, a change in the position of the tip spherical portion 23 in a plane parallel to the second base end face 30b causes the oscillator 21 to oscillate relative to the first base end face 30a. As a result of the oscillation of the oscillator 21, the first crimping tool end face 10a becomes parallel to the reference plane S. Therefore, the tilt adjustment device 100 adjusts the tilt of the oscillator 21 so that the reference plane S and the first crimping tool end face 10a become parallel by oscillating the second oscillator end face 21b along the first base end face 30a.

[0093] Next, the operation of the tilt adjustment device 100 to maintain the first crimping tool end face 10a parallel to the reference plane S will be described with reference to FIGS. 8 to 10. After the first crimping tool end face 10a becomes parallel to the reference plane S, the pressure supply source stops the supply of air to the air bearing port 34. After stopping the air supply, the pressure supply source sucks air from the air bearing port 34. The annular porous material 37 receives the exhausted air from the air bearing port 34. The pressure supply source performs vacuum suction on the air bearing air supply / discharge chamber 32 via the air bearing port 34. The pressure supply source creates a negative pressure in the air bearing air supply / discharge chamber 32 by vacuum suction. The second oscillator end face 21b of the oscillator 21 is adsorbed to the first base end face 30a of the apparatus base 30 while maintaining the parallel orientation of the first crimping tool end face 10a with respect to the reference plane S. As a result, the tilt adjustment device 100 performs a temporary lock to maintain the orientation of the first crimping tool end surface 10a parallel to the reference plane S. In other words, the tilt adjustment device 100 fixes the orientation of the oscillator 21 by vacuum suctioning the air bearing air supply / discharge chamber 32 via the air bearing port 34.

[0094] As shown in FIG. 10 , during the provisional locking process, the crimping portion rocking body 20 moves along the base axis LB of the device base 30 in a direction from the first base end face 30a to the second base end face 30b. The crimping portion rocking body 20 moves by the gap between the second rocking body end face 21b and the first base end face 30a. As the crimping portion rocking body 20 moves in the axial direction of the device base 30, the second drive shaft end portion 22b and the spherical tip portion 23 are guided by the cylindrical bearing inner circumferential surface 52a. As a result, the position of the spherical tip portion 23 does not change in a plane parallel to the second base end face 30b. In other words, during the provisional locking process, the crimping portion rocking body 20 moves in the axial direction of the device base 30 while maintaining the angle α between the crimping portion axis LP and the base axis LB. Therefore, the first crimping tool end surface 10 a remains parallel to the reference plane S.

[0095] After the temporary locking, the pressure supply source switches the air pressure supplied to the locking port 33 from negative to positive. The pressure supply source pressurizes the locking air supply / discharge chamber 46, which is connected to the locking port 33. Pressurizing the locking air supply / discharge chamber 46 moves the locking member 43 in a direction from the first base end face 30a toward the second base end face 30b, as shown by the two-dot chain line in FIG. 9 . This movement brings the locking member 43 into contact with the holding portion 44. The locking member step surface 433a is then pressed against the holding portion step surface 443b of the holding portion 44. As a result, the holding portion inner circumferential surface 44a tightly engages with the spherical surface of the intermediate spherical portion 22d. As a result, the crimping portion rocking body 20 is pressed in a direction from the first base end face 30a toward the second base end face 30b. Due to the provisional lock, the oscillator 21 of the crimping part oscillator 20 is in contact with the first base end face 30a at the second oscillator end face 21b. In other words, pressurization of the locking air supply / discharge chamber 46 generates a normal force against the pressure at the contact portion between the second oscillator end face 21b and the first base end face 30a. This normal force induces a static friction force at the contact portion. The static friction force prevents the oscillator 21 from oscillating relative to the device base 30. This limits the oscillation of the crimping part oscillator 20 relative to the device base 30. As a result, the tilt adjustment device 100 performs a final lock, in addition to the provisional lock, to maintain the first crimping tool end face 10a parallel to the reference plane S.

[0096] The ventilation port 36 is connected to a pressure supply source. The ventilation port 36 is in communication with the actuator accommodating space 54 and the lock chamber 47. The ventilation port 36 is in communication with the gap formed by the oscillator 21 and the annular porous material 37 via the lock chamber 47. The ventilation port 36 is in communication with the air bearing port 34 via the annular porous material 37. The ventilation port 36 is in communication with the outside of the tilt adjustment device 100 via the actuator accommodating space 54 and the gap formed by the positioning mechanism housing 51 and the actuator accommodating top plate 51a. In other words, when the pressure supply source exhausts air from the ventilation port 36, particles present in the actuator accommodating space 54 and the lock chamber 47 are exhausted to the outside of the tilt adjustment device 100. When the pressure supply source exhausts air from the ventilation port 36, particles in the gap formed by the oscillator 21 and the annular porous material 37 are exhausted to the outside of the tilt adjustment device 100.

[0097] [Advantages of this embodiment] The advantages of this embodiment will be described below. (1) The tilt adjustment device 100 changes the position of the tip spherical portion 23 in a plane parallel to the second base end surface 30b using the first to fourth bellows actuators A1 to A4. The change in the position of the tip spherical portion 23 leads to the tilt of the crimping portion oscillator 20 with respect to the base axis LB.

[0098] The control device 70 drives the first to fourth bellows actuators A1 to A4 by controlling the actuator control section 71 based on the results of measurement by the tilt detection sensor 80. This driving makes the first crimping tool end surface 10a parallel to the reference plane S.

[0099] Therefore, by using the positioning mechanism 50, the control device 70, and the tilt detection sensor 80, the tilt adjustment device 100 makes the first crimping tool end face 10a of the crimping portion oscillator 20 parallel to the reference plane S. As a result, the tilt adjustment device 100 can make the reference plane S and the first crimping tool end face 10a parallel without bringing the reference plane S into contact with each other. The tilt adjustment device 100 can adjust the tilt of the first crimping tool end face 10a so that the first crimping tool end face 10a is parallel to the reference plane S without generating a load on the reference plane S. As described above, the tilt adjustment device 100 can adjust the tilt without being limited by the properties, physical characteristics, shape, or dimensions of the object to be crimped.

[0100] (2) The driver 55 is composed of a cylindrical bearing 52 and a bearing holder 53. The driver 55 holds the spherical tip portion 23 by the cylindrical bearing 52 so that the spherical tip portion 23 can reciprocate within the cylindrical bearing insertion hole 52d and contact the cylindrical bearing 52. The crimping portion oscillator 20, which has been set to a desired position by the positioning mechanism 50, is attracted to the device base 30 by the temporary lock while maintaining the inclination of the crimping portion axis LP relative to the base axis LB. Therefore, the tilt adjustment device 100 can fix the crimping portion oscillator 20, which has been adjusted to a desired inclination, to the device base 30 by moving the crimping portion oscillator 20 in the axial direction of the cylindrical bearing 52 while maintaining the inclination. As a result, the tilt adjustment device 100 can maintain the inclination of the oscillator 21 with high precision while fixing the inclination by the temporary lock, compared to when the driver 55 does not include the cylindrical bearing 52.

[0101] (3) The cylindrical bearing 52 has a gap 52c. The cylindrical bearing insertion hole 52d is fitted with a tip spherical portion 23 having a diameter larger than the inner diameter of the cylindrical bearing inner circumferential surface 52a. Inserting the tip spherical portion 23 into the cylindrical bearing insertion hole 52d expands the diameter of the cylindrical bearing 52 due to the gap 52c. The cylindrical bearing 52, into which the tip spherical portion 23 is inserted while expanding in diameter, applies a preload to the tip spherical portion 23. In other words, the cylindrical bearing 52 having the gap 52c can accommodate the tip spherical portion 23 in the cylindrical bearing insertion hole 52d while applying a preload. As a result, the tilt adjustment device 100 can reduce rattle of the tip spherical portion 23 relative to the cylindrical bearing 52. Therefore, the tilt adjustment device 100 can perform positioning and parallel adjustment of the crimping portion oscillator 20 with higher precision than when the cylindrical bearing 52 does not have the gap 52c.

[0102] (4) The tilt adjustment device 100 can oscillate the crimping part oscillating body 20 while separating the second oscillating body end face 21b from the first base end face 30a by using the air bearing of the first base end face 30a. The tilt adjustment device 100 can perform parallel adjustment of the crimping part oscillating body 20 with high precision compared to when the crimping part oscillating body 20 is oscillated while the oscillating body 21 is in contact with the device base 30. Furthermore, the tilt adjustment device 100 can suppress the generation of particles between the second oscillating body end face 21b and the first base end face 30a when oscillating the crimping part oscillating body 20.

[0103] (5) When the driver 55 moves along the second base end surface 30b, the relative positions of the driver 55 and each of the first to fourth bellows actuators A1 to A4 change with the movement of the driver 55. The first to fourth linear guide units S1 to S4 move the slide plate 661 with respect to the slide unit 662 by a distance corresponding to the change in the relative position of the driver 55 with respect to each of the first to fourth bellows actuators A1 to A4. In other words, the first to fourth linear slide mechanisms 61 to 64 eliminate distortions that occur in the first to fourth bellows actuators A1 to A4 as the driver 55 moves. Furthermore, by eliminating these distortions, the first to fourth linear slide mechanisms 61 to 64 prevent the first to fourth bellows actuators A1 to A4 from influencing each other via the driver 55. As a result, the tilt adjustment device 100 can adjust the tilt of the crimping portion oscillator 20 with high precision compared to a case in which the positioning mechanism 50 does not include the first to fourth linear slide mechanisms 61 to 64. The first to fourth linear slide mechanisms 61 to 64 can reduce the load generated in each of the first to fourth bellows actuators A1 to A4 as the driver 55 moves.

[0104] (6) The tilt adjustment device 100 adjusts the tilt of the crimping portion oscillator 20 using each of the first to fourth bellows actuators A1 to A4. The first to fourth bellows actuators A1 to A4 have a higher thrust than electric actuators when compared at the same volume. Therefore, by using the first to fourth bellows actuators A1 to A4, the tilt adjustment device 100 can position the driver 55 with high efficiency.

[0105] The positioning mechanism 50 includes a first bellows actuator pair AA1 and a second bellows actuator pair AA2. The positioning mechanism 50 can position the driver 55 and adjust the inclination of the crimping portion oscillator 20 with high precision, compared to when the first to fourth bellows actuators A1 to A4 surround the tip spherical portion 23 without forming pairs of opposing bellows actuators.

[0106] (7) The positioning mechanism 50 is attached to the second base end surface 30b and includes a positioning mechanism housing 51 that houses the first to fourth bellows actuators A1 to A4. Furthermore, both ends of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 are fixed to corners of the positioning mechanism housing 51. This allows the cross-sectional shape of the positioning mechanism housing 51, as seen from the base axis LB, to be changed by changing the angle formed by the first bellows actuator pair AA1 and the second bellows actuator pair AA2. In other words, the cross-sectional shape of the tilt adjustment device 100, as seen from the base axis LB, can be selected depending on the situation in which the tilt adjustment device 100 is to be used.

[0107] In this embodiment, the angle formed by the first bellows actuator pair AA1 and the second bellows actuator pair AA2 is 90 degrees. The directions of movement of the driver 55 by the first bellows actuator pair AA1 and the second bellows actuator pair AA2 are independent of each other. Therefore, the tilt adjustment device 100 can improve the accuracy of positioning the driver 55 by the first bellows actuator pair AA1 and the second bellows actuator pair AA2.

[0108] (8) The control device 70 drives each of the first to fourth bellows actuators A1 to A4 based on the measurement results of the tilt detection sensor 80, with the aim of making the reference plane S and the first crimping tool end face 10a parallel to each other. Therefore, the tilt adjustment device 100 can automatically adjust the parallelism of the first crimping tool end face 10a with respect to the reference plane S.

[0109] (9) The first base end surface 30a can adsorb the second oscillator end surface 21b. This adsorption achieves a temporary lock that limits the oscillation of the oscillator 21 relative to the device base 30. The temporary lock allows the first base end surface 30a to maintain the inclination of the crimping portion oscillator 20 relative to the base axis LB.

[0110] (10) The locking mechanism 40 can maintain the inclination of the crimping portion rocking body 20 relative to the base axis LB by moving the locking member 43 by pressurizing the locking air supply / discharge chamber 46 via the locking port 33 .

[0111] (11) The actuator accommodating space 54 and the lock chamber 47 communicate with the outside of the tilt adjustment device 100 via the ventilation port 36. The ventilation port 36 communicates with the outside of the tilt adjustment device 100 via the gap formed by the positioning mechanism housing 51 and the actuator accommodating top plate 51a and the actuator accommodating space 54. As a result, the tilt adjustment device 100 can discharge particles generated in the actuator accommodating space 54 and the lock chamber 47 to the outside of the tilt adjustment device 100 by discharging air from the ventilation port 36.

[0112] (12) The ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a via the lock chamber 47. The ventilation port 36 communicates with the air bearing air supply / discharge chamber 32 via the gap and the annular porous material 37. In other words, when air is supplied from the air bearing port 34, the ventilation port 36 can discharge particles generated in the gap and the lock chamber 47 to the outside of the tilt adjustment device 100. Furthermore, when air is supplied from the air bearing port 34, the ventilation port 36 can discharge particles generated in the actuator accommodating space 54 to the outside of the tilt adjustment device 100.

[0113] [Modifications] The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other within the scope of technical compatibility.

[0114] The tilt adjustment device 100 does not need to include the packing 45. In this case, the ventilation port 36 communicates with the gap formed by the second oscillator end surface 21b and the first base end surface 30a via the lock chamber 47. The ventilation port 36 communicates with the air bearing air supply / discharge chamber 32 via the gap and the annular porous material 37. In other words, air supplied from the air bearing port 34 is discharged from the ventilation port 36 to the outside of the tilt adjustment device 100 via the gap and the lock chamber 47. Therefore, even in this case, the ventilation port 36 can discharge particles generated in the actuator accommodating space 54 to the outside of the tilt adjustment device 100.

[0115] The tilt adjustment device 100 does not need to include the ventilation port 36. The actuator accommodating space 54 may be sealed. The tilt adjustment device 100 does not need to include the locking mechanism 40. In this case, the crimping portion oscillator 20 is held relative to the device base 30 by the driver 55 holding the tip spherical portion 23.

[0116] The control device 70 does not have to include the drive amount calculation unit 72. In this case, the control device 70 may include a map that determines the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 based on the measurement results of the tilt detection sensor 80. The control device 70 may derive the increase or decrease in air pressure required for each of the first to fourth bellows actuators A1 to A4 by comparing the measurement results of the tilt detection sensor 80 with the map.

[0117] The axis of the first bellows actuator pair AA1 and the axis of the second bellows actuator pair AA2 do not have to be perpendicular to each other. In this case, φ in equations (1) to (4) is changed depending on the angle between the axis of the first bellows actuator pair AA1 and the axis of the second bellows actuator pair AA2.

[0118] The cross section of the positioning mechanism housing 51 as viewed from the base axis LB does not have to be substantially rectangular. The ends of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 do not have to be located at the corners of the positioning mechanism housing 51.

[0119] Both ends of each of the first bellows actuator pair AA1 and the second bellows actuator pair AA2 may be located at a position spaced apart from the side wall of the positioning mechanism housing 51. In other words, each of the first to fourth drive ports A11 to A14 may be located at a position spaced apart from the side wall of the positioning mechanism housing 51. In this case, the first to fourth drive base ports 351 to 354 communicate with the first to fourth drive ports A11 to A14, respectively, via the inside of the device base 30.

[0120] The first and third bellows actuators A1 and A3 do not have to form the first bellows actuator pair AA1. Also, the second and fourth bellows actuators A2 and A4 do not have to form the second bellows actuator pair AA2. That is, the first bellows actuator A1 does not have to be positioned opposite the third bellows actuator A3. Also, the second bellows actuator A2 does not have to be positioned opposite the fourth bellows actuator A4.

[0121] The positioning mechanism 50 may use two bellows actuators as the multiple actuators. For example, the positioning mechanism 50 may include only a first bellows actuator A1 and a second bellows actuator A2 as the multiple actuators. The first bellows actuator A1 and the second bellows actuator A2 do not need to be positioned opposite each other. In this case, the positioning mechanism 50 includes a first linear slide mechanism 61 and a second linear slide mechanism 62 as the multiple linear slide mechanisms. The positioning mechanism 50 also positions the driver 55 in the direction in which each of the two bellows actuators expands and contracts. The two bellows actuators are preferably positioned so that their respective axes are perpendicular to each other.

[0122] The positioning mechanism 50 does not have to use a bellows actuator as the actuator. The actuator may be, for example, an electric actuator. The positioning mechanism 50 may use three bellows actuators as the multiple actuators. In this case, it is preferable that the three bellows actuators are arranged at equal intervals so as to surround the driver 55.

[0123] The positioning mechanism 50 may include two ball screw actuators B as the plurality of actuators. The plurality of actuators may be, for example, two linear motors, two ultrasonic linear motors, or two voice coil motors.

[0124] As shown in FIG. 11 , the ball screw positioning mechanism B50 is attached to the second base end surface 30b. The two ball screw actuators B each include a ball screw shaft B11a, B11b, a ball screw motor B12a, B12b, and a ball screw nut B13a, B13b. The two ball screw actuators B are inserted into two mutually orthogonal ball screw side walls B51 of the side walls of the ball screw positioning mechanism B50. That is, the ball screw shafts B11a, B11b are orthogonal to each other. The two ball screw shafts B11a, B11b are rotated by the ball screw motors B12a, B12b, respectively. Ball screw nuts B13a, B13b are threaded onto the ball screw shafts B11a, B11b, respectively. The two ball screw nuts B13a, B13b move along the rotating ball screw shafts B11a, B11b, respectively. The ball screw nuts B13a and B13b include connection plates B14a and B14b, respectively. The ball screw shafts B11a and B11b are inserted through the two connection plates B14a and B14b, respectively. The two connection plates B14a and B14b include linear guides B15a and B15b, respectively. The linear guides B15a and B15b extend from the connection plates B14a and B14b at locations where the ball screw shafts B11a and B11b are inserted. The linear guide B15a is movable in the direction in which the ball screw shaft B11b extends. The linear guide B15b is movable in the direction in which the ball screw shaft B11a extends. The connection plates B14a and B14b are connected to the driver B60 via the linear guides B15a and B15b, respectively. That is, the connection plates B14a and B14b are connected to the ball screw nuts B13a and B13b and the corresponding side surfaces of the driver B60 on the surfaces that do not face the ball screw side wall B51.

[0125] The direction in which the ball screw nut B13a moves coincides with the direction in which the linear guide B15b moves relative to the driver B60. The direction in which the ball screw nut B13b moves coincides with the direction in which the linear guide B15a moves relative to the driver B60. Therefore, each of the linear guides B15a, B15b reduces the influence that one of the ball screw nuts B13a, B13b has on the other via the driver B60.

[0126] With the above configuration, the two ball screw actuators B move the driver B60 via the connection plates B14a and B14b, respectively, so that the ball screw positioning mechanism B50 positions the driver B60 in a plane perpendicular to the two ball screw side walls B51.

[0127] The cylindrical bearing 52 does not have to have the gap 52c. In this case, the tip spherical portion 23 has an outer diameter that matches the inner diameter of the cylindrical bearing 52. The cylindrical bearing 52 and the bearing holder 53 do not have to be separate bodies. The cylindrical bearing 52 and the bearing holder 53 may be integrated.

[0128] The driver 55 may be formed only by a member that defines an insertion hole into which the spherical tip portion 23 is inserted. This member is configured to hold the spherical tip portion 23. The shape of the insertion hole of this member is arbitrary. In this case, the driver 55 is formed only by the bearing holder 53 that holds the spherical tip portion 23, and does not include the cylindrical bearing 52. In other words, the spherical tip portion 23 is inserted into and held by the bearing holder 53.

[0129] The tilt adjustment device 100 does not need to include the driver 55. In this case, the first to fourth bellows actuators A1 to A4 included in the positioning mechanism 50 are directly connected to the tip spherical portion 23.

[0130] 10... Crimping tool, 10a... First crimping tool end surface, 10b... Second crimping tool end surface, 21... Oscillator, 21a... First oscillator end surface, 21b... Second oscillator end surface, 22... Drive shaft, 22a... First drive shaft end surface, 22b... Second drive shaft end surface, 22d... Middle spherical portion, 23... Tip spherical portion, 30... Apparatus base, 30a... First base end surface, 30b... Second base end surface, 30c... Inner peripheral surface of base, 30d...base insertion hole as insertion hole, 33...locking port, 34...air bearing port, 36...ventilation port, 37...annular porous material as air bearing, 40...locking mechanism, 42...support member, 42e...first seal, 43...locking member, 43a...locking member inner peripheral surface, 43d...second seal, 44...holding portion, 46...locking air supply / discharge chamber, 47...lock chamber, 50...positioning mechanism, 51...positioning mechanism housing as housing portion, 52...cylindrical bearing, 52c...gap, 52d...cylindrical bearing insertion hole as insertion hole, 53...bearing holding portion, 54...actuator accommodating space as accommodating space, 55...drive body, 61-64...first to fourth linear slide mechanisms as multiple linear slide mechanisms, 70...control device, 71...actuator control portion, 72...drive amount calculation portion, 80...tilt detection sensor, A1-A4...first to fourth bellows actuators as multiple actuators, AA1-AA2...first bellows actuator pair and second bellows actuator pair as two bellows actuator pairs, LC...center axis, S...reference plane.

Claims

1. A tilt adjustment device comprising: a rocker having a first rocker end face and a second rocker end face which is a convex spherical surface; a drive shaft protruding from the second rocker end face; a crimping tool having a second crimping tool end face attached to the first rocker end face and which is different from the second crimping tool end face; and an apparatus base having a first base end face which is a concave spherical surface which engages with the second rocker end face and a second base end face which is different from the first base end face, the apparatus base having a base inner circumferential surface which defines an insertion hole through which the drive shaft is inserted and which connects the second base end face and the first base end face; the tilt adjustment device being configured to adjust the tilt of the rocker so that a reference plane and the first crimping tool end face are parallel to each other by rocking the second rocker end face along the first base end face, a positioning mechanism provided on the second base end face and configured to position the tip spherical portion; a tilt detection sensor configured to measure the inclination of the first crimping tool end face relative to the reference plane; and a control device configured to control the positioning mechanism, wherein the positioning mechanism comprises a plurality of actuators arranged to surround the tip spherical portion along the second base end face, the plurality of actuators being configured to change the position of the tip spherical portion within a plane parallel to the second base end face, and the control device comprises an actuator control unit configured to drive the plurality of actuators so that the first crimping tool end face is parallel to the reference plane based on the measurement results obtained by the tilt detection sensor.

2. The tilt adjustment device described in claim 1, wherein the positioning mechanism includes a driver having an inner surface that defines an insertion hole into which the spherical tip portion is inserted, the spherical tip portion being adapted to slide against the inner surface, and the multiple actuators are arranged to surround the driver along the second base end face and are configured to change the position of the spherical tip portion in a plane parallel to the second base end face via the driver.

3. A tilt adjustment device as described in claim 2, wherein the driving body comprises a cylindrical bearing that defines the insertion hole and a bearing holding portion that holds the cylindrical bearing, and the central axis of the cylindrical bearing extends in the axial direction of the device base.

4. A tilt adjustment device as described in claim 3, wherein the cylindrical bearing has an inner diameter smaller than the diameter of the tip spherical portion when the tip spherical portion is not inserted, and the cylindrical bearing has a gap extending in the axial direction of the cylindrical bearing so that the inner diameter of the cylindrical bearing can be expanded.

5. A tilt adjustment device as described in any one of claims 1 to 4, wherein the equipment base comprises: an air bearing port; and an air bearing configured to supply and exhaust air from the air bearing port, the first base end face being an air bearing surface of the air bearing, and the equipment base is configured to supply air to the air bearing from the air bearing port to support the oscillating body so that it can oscillate away from the air bearing surface, and to fix the inclined attitude of the oscillating body by sucking air from the air bearing via the air bearing port.

6. A tilt adjustment device as described in claim 2 or claim 3, wherein the driving body is connected to the multiple actuators via multiple linear slide mechanisms, and the positioning mechanism moves the driving body by pushing and pulling the driving body via the multiple linear slide mechanisms using the multiple actuators.

7. A tilt adjustment device as described in claim 2 or 3, wherein the plurality of actuators include four bellows actuators, the four bellows actuators form two bellows actuator pairs each consisting of two opposing bellows actuators, and the driver is disposed between the two bellows actuators forming each of the two bellows actuator pairs.

8. The tilt adjustment device of claim 7, wherein the positioning mechanism is attached to an end face of the second base and comprises a housing portion that is polygonal when viewed in the axial direction of the device base and that houses the four bellows actuators, and both ends of each of the two bellows actuator pairs are fixed to corners of the housing portion.

9. The tilt adjustment device according to claim 8, wherein the four bellows actuators are arranged so that the axes of the two bellows actuator pairs are perpendicular to each other.

10. The tilt adjustment device described in claim 9, wherein the control device includes a drive amount calculation unit configured to calculate the pressure to be supplied to each of the four bellows actuators required to make the reference plane and the first crimping tool end face parallel based on the inclination of the first crimping tool end face relative to the reference plane measured by the inclination detection sensor, and the actuator control unit is configured to drive the four bellows actuators based on the calculation result of the drive amount calculation unit.

11. A tilt adjustment device as described in any one of claims 1 to 4, further comprising a locking mechanism including: an intermediate spherical portion of the drive shaft located between the oscillating body and the tip spherical portion; a locking member capable of reciprocating in the axial direction of the device base along the inner peripheral surface of the base and having a locking member inner peripheral surface that is spaced from the outer surface of the drive shaft and surrounds the drive shaft; and a retaining portion through which the drive shaft passes and has an inner surface that engages with the intermediate spherical portion.

12. The tilt adjustment device described in claim 11, wherein the locking mechanism comprises: a support member located between the inner surface of the locking member and the outer surface of the drive shaft, and having an inner surface that is spaced from the drive shaft and surrounds the drive shaft; a first seal configured to seal between the support member and the locking member; a second seal configured to seal between the locking member and the device base; and a locking air supply and exhaust chamber defined by the locking member, the device base and the support member, wherein the device base is provided with a locking port that supplies and exhausts air to and from the locking air supply and exhaust chamber.

13. A tilt adjustment device as described in claim 12, comprising: a storage space that stores the multiple actuators; a lock chamber formed by the inner circumferential surface of the locking member and the inner circumferential surface of the support member, and communicating with the storage space via a gap between the locking member and the retaining portion; and a ventilation port provided on the device base and communicating with the storage space, an air bearing port, and an air bearing configured to supply and exhaust air from the air bearing port, wherein the first base end surface is an air bearing surface of the air bearing, and the device base is configured to support the oscillating body so that it can oscillate at a distance from the air bearing surface, and the ventilation port communicates with the gap formed by the oscillating body and the air bearing via the lock chamber, and communicates with the outside of the tilt adjustment device via the storage space.

14. A tilt adjustment device as described in claim 12, comprising: an accommodation space that accommodates the multiple actuators; a lock chamber formed by the inner circumferential surface of the locking member and the inner circumferential surface of the support member, and communicating with the accommodation space via a gap between the locking member and the retaining portion; and an air bearing provided on the device base, configured to receive air supply and exhaust from a ventilation port, an air bearing port, and the air bearing port, the first base end surface being an air bearing surface of the air bearing, the device base being configured to support the oscillator so that it can oscillate at a distance from the air bearing surface, and the accommodation space communicating with the outside of the device base via the ventilation port, and communicating with the air bearing port via the lock chamber.

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