Contact terminal, inspection tool, and inspection device

Abstract

This contact terminal comprises: a cylindrical body; and a first conductor having a first insertion part. The cylindrical body has: an end-section-side cutout that is disposed in an end section on one side in an axial direction of the cylindrical body so as to have a shape that is obtained by cutting toward the other side in the axial direction from an end surface on the one side in the axial direction; a hole part open to the end section on the one side in the axial direction; and a pair of arm parts sandwiched between the end-section-side cutout and the hole part. The first insertion part has: an inclination section having an outer diameter that increases toward the one side in the axial direction; and a first straight section that is contiguous to the one side in the axial direction of the inclination section and that has a fixed outer diameter along the axial direction. The outer diameter of the first straight section is greater than the inner diameter of the cylindrical body. The first straight section is in contact with the arm parts. A wall surface portion disposed on an end on the one side in the axial direction of the first straight section can be brought into contact with the hole part.

Description

[Technical field]

[0001] The present invention relates to a contact terminal used for testing an object to be tested. [Background technology]

[0002] 2. Description of the Related Art Conventionally, there has been known a contact terminal that is brought into contact with an object to be inspected. Such a contact terminal is configured by inserting a conductive rod-shaped member into a cylindrical body having a spring portion formed at the middle position.

[0003] In the above-mentioned contact terminal, the rod-shaped member is fixed to the tip of the cylindrical body with the end of the rod-shaped member protruding from the cylindrical body. As an example of a method for such fixing, a contact terminal in which the rod-shaped member is fixed to the cylindrical body by press-fitting is known (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2019-15542 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the contact terminal in which the rod-shaped member is fixed by press-fitting as described above, there is room for improvement in the ease of assembling the rod-shaped member to the cylindrical body.

[0006] In view of the above circumstances, an object of the present invention is to provide a contact terminal that enables improved assembly of a conductor to a cylindrical body, and an inspection jig and an inspection device that use the same. [Means for solving the problem]

[0007] The exemplary contact terminal of the present invention includes a conductive tubular body extending in an axial direction of the contact terminal, and a conductive rod-shaped first conductor.

[0008] The cylindrical body has an end side notch at one axial end of the cylindrical body, which is cut out from the end face at one axial end toward the other axial end, a hole portion opening at the one axial end, and a pair of arms sandwiched between the end side notch and the hole portion.

[0009] The first conductor has a first protruding portion protruding from the cylindrical body to one axial side, and a first insertion portion connected to the other axial side of the first protruding portion and disposed inside the cylindrical body.

[0010] The first insertion portion has an inclined portion whose outer diameter increases toward one axial side, and a first straight portion connected to the one axial side of the inclined portion and having a constant outer diameter along the axial direction.

[0011] The outer diameter of the first straight portion is larger than the inner diameter of the cylindrical body, the first straight portion contacts the arm portion, and a wall portion located at one axial end of the first straight portion is capable of contacting the hole portion. Effect of the Invention

[0012] According to the exemplary contact terminal of the present invention, and the inspection jig and inspection device using the same, it is possible to improve the ease of assembling a conductor into a cylindrical body. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a schematic diagram showing the overall configuration of an inspection device according to an exemplary embodiment of the present invention. [Diagram 2] FIG. 2 is a side view illustrating a contact terminal according to an exemplary embodiment of the present invention. [Diagram 3] FIG. 3 is a side cross-sectional view showing the configuration of FIG. 2 cut along a plane parallel to the paper surface. [Figure 4] FIG. 4 is a side cross-sectional view showing a state in which a load is applied to the contact terminal in the state of FIG. [Diagram 5] FIG. 5 is an enlarged view showing a part of the configuration of FIG. [Figure 6] FIG. 6 is a perspective view of the exploded state of the structure according to the first embodiment for fixing a first conductor to a tubular body, as viewed from the notched end side. [Figure 7] FIG. 7 is a perspective view of the exploded state of the structure according to the first embodiment for fixing the first conductor to the tubular body, as viewed from the hole side. [Figure 8] FIG. 8 is a perspective view showing a state in which the first conductor is assembled into the cylindrical body in FIG. [Figure 9] FIG. 9 is a perspective view showing a state in which the first conductor is assembled into the cylindrical body in FIG. [Figure 10] FIG. 10 is a side view showing a state in which the first conductor of FIG. 8 is assembled into a cylindrical body. [Figure 11] FIG. 11 is a perspective view showing a modified example of the first embodiment. [Figure 12] FIG. 12 is a perspective view of an exploded state of a structure for fixing a first conductor to a tubular body according to a second embodiment, as viewed from the cut-out end side. [Figure 13] FIG. 13 is a perspective view of a disassembled state of a structure according to a second embodiment for fixing a first conductor to a cylindrical body, as viewed from the hole side. [Figure 14] FIG. 14 is a perspective view showing a state in which the first conductor is assembled into the cylindrical body in FIG. [Figure 15] FIG. 15 is a perspective view showing a state in which the first conductor in FIG. 13 is assembled into the cylindrical body. [Figure 16] FIG. 16 is a side view showing a state in which the first conductor of FIG. 14 is assembled into a cylindrical body. [Figure 17] 17 is a side view of the first conductor of FIG. 14 assembled into a cylindrical body as viewed from the cut-out end side. [Figure 18] 18 is a side view of the first conductor of FIG. 14 assembled into a cylindrical body, as viewed from the hole side. [Figure 19] FIG. 19 is a perspective view showing an exploded state of a structure according to a comparative example in which a first conductor is fixed to a cylindrical body. [Figure 20] FIG. 20 is a perspective view showing a completed state of a structure according to a comparative example in which a first conductor is fixed to a cylindrical body. [Figure 21] FIG. 21 is a side view showing a completed state of a structure according to a comparative example in which a first conductor is fixed to a cylindrical body. [Figure 22] FIG. 22 is a perspective view of the exploded state of the structure for fixing the second conductor to the tubular body, as viewed from the notched end side. [Diagram 23] FIG. 23 is a perspective view of the structure for fixing the second conductor to the cylindrical body in an exploded state, as viewed from the hole side. [Figure 24] FIG. 24 is a perspective view of the second conductor assembled into the tubular body, as viewed from the cut-out end side. [Diagram 25] FIG. 25 is a perspective view of the second conductor assembled into the cylindrical body, as viewed from the hole side. [Figure 26] FIG. 26 is a perspective view showing a modified example of the other axial end portion of the cylindrical body. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An exemplary embodiment of the present invention will be described below with reference to the drawings. In the following, a direction parallel to the central axis J (see FIG. 2) of the contact terminal is referred to as the "axial direction", and in the drawings, the axial direction is referred to as X, one axial side is referred to as X1, and the other axial side is referred to as X2. In the drawings, a direction perpendicular to the axial direction X is referred to as the first direction Y, one first direction side is referred to as Y1, and the other first direction side is referred to as Y2. As will be described later, the end-side notch 31 side of the cylindrical body 20 is the first direction side Y1 side, and the hole portion 32 side is the first direction side Y2 side. In the drawings, a direction perpendicular to the axial direction X and the first direction Y is referred to as the second direction Z, one second direction side is referred to as Z1, and the other second direction side is referred to as Z2. In addition, a direction around the central axis J is referred to as the "circumferential direction".

[0015] <1. Overall Configuration of the Inspection Apparatus> The overall configuration of an inspection apparatus 10 according to an exemplary embodiment of the present invention will be described with reference to Fig. 1. In Fig. 1, the contact terminal 2 is assembled to the inspection apparatus 10 so that the one axial direction X1 side faces downward.

[0016] 1 performs an electrical inspection of an inspection object 100. The inspection device 10 includes an inspection tool 8 and an inspection processing section 9. The inspection tool 8 is configured as, for example, a so-called probe card.

[0017] The inspection object 100 is, for example, a semiconductor wafer in which a plurality of circuits are formed on a semiconductor substrate such as silicon. The semiconductor wafer is diced into individual semiconductor chips each having each of the above circuits. Note that the inspection object 100 can be, in addition to a semiconductor wafer, an electronic component such as a semiconductor chip, a CSP (Chip size package), a WLP (Wafer Level Package), a FOWLP (Fan Out Wafer Level Package), or a semiconductor element.

[0018] Furthermore, the inspection object 100 may be a substrate. In this case, the inspection object 100 may be a substrate such as a printed wiring board, a glass epoxy board, a flexible board, a ceramic multilayer wiring board, a package board for a semiconductor package, an interposer board, a film carrier, or the like, or may be an electrode plate for a display such as a liquid crystal display, an EL (Electro-Luminescence) display, or a touch panel display, or an electrode plate for a touch panel.

[0019] Also, a product using a packaging technology called EMIB (Embedded Multi-die Interconnect Bridge) may be used as the inspection target 100. In EMIB, a small silicon substrate called a silicon bridge is embedded in a package resin substrate, and fine, high-density wiring is formed on the surface of the silicon bridge, so that adjacent silicon dies are closely mounted on the package resin substrate.

[0020] 1, the inspection jig 8 includes a probe head 1, a pitch conversion unit 6, and a connection plate 7. The probe head 1 has contact terminals (probes) 2 and a support member 3.

[0021] The inspection jig 8 includes a plurality of contact terminals 2 and a support member 3 that supports the plurality of contact terminals 2.

[0022] The pitch changing unit 6 is disposed above the support member 3 and fixed to the support member 3. The contact terminal 2 has one end 2A on one axial direction X1 side and the other end 2B on the other axial direction X2 side. The other end 2B is connected to each first electrode 61 (see FIG. 5) provided at the lower end of the pitch changing unit 6.

[0023] The pitch changing unit 6 changes a first pitch between the contact terminals 2 to a second pitch between second electrodes formed on an upper end of the pitch changing unit 6. The second pitch is longer than the first pitch. The pitch changing unit 6 is formed of, for example, a multi-layer wiring board such as MLO (Multi-Layer Organic) or MLC (Multi-Layer Ceramic).

[0024] The connection plate 7 is configured to allow the pitch conversion unit 6 to be detachably attached. The pitch conversion unit 6 is electrically connected to the inspection processing section 9 via the connection plate 7.

[0025] The inspection processing unit 9 includes, for example, a power supply circuit, a voltmeter, an ammeter, a microcomputer, etc. The inspection processing unit 9 controls a drive mechanism (not shown) to move the inspection jig 8 relatively to the inspection target 100.

[0026] When the inspection object 100 is, for example, a semiconductor wafer, inspection points such as a plurality of pads or a plurality of bumps are formed in the inspection object 100 for each circuit corresponding to each semiconductor chip formed after dicing. The inspection processing unit 9 sets a partial area of ​​the plurality of circuits formed in the inspection object 100 as an inspection area, and moves the inspection jig 8 relatively to a position where each inspection point in the inspection area faces the contact terminal 2 in the vertical direction. At this time, the inspection jig 8 is in a state where one end 2A of the contact terminal 2 faces the inspection object 100 side.

[0027] Then, the inspection processing section 9 moves the inspection jig 8 downward to bring the contact terminals 2 into contact with each inspection point in the inspection area. As a result, each inspection point and the inspection processing section 9 are electrically connected to each other.

[0028] In the above state, the inspection processing unit 9 supplies an inspection current or voltage to each inspection point of the inspection object 100 via each contact terminal 2, and performs inspection of the inspection object 100 based on the voltage signal or current signal obtained from each contact terminal 2.

[0029] That is, the inspection device 10 includes an inspection jig 8 and an inspection processing unit 9 that inspects the inspection object 100 based on an electrical signal obtained by contacting the contact terminal 2 with an inspection point provided on the inspection object 100.

[0030] When the inspection of the inspection area of ​​the inspection object 100 is completed, the inspection processing unit 9 moves the inspection jig 8 upward, moves the inspection jig 8 relatively in parallel to a position corresponding to the new inspection area, and moves the inspection jig 8 downward to bring the contact terminals 2 into contact with each inspection point in the new inspection area to perform the inspection. In this manner, the entire inspection object 100 is inspected by performing the inspection while sequentially changing the inspection area.

[0031] 2. Configuration of Contact Terminal> A more detailed description will now be given of the configuration of the contact terminal 2. Figures 2 and 3 show the case where no load is applied to the contact terminal 2 and the first spring portion 22 and the second spring portion 23 are in their natural lengths.

[0032] The contact terminal 2 includes a conductive cylindrical body 20 extending in the axial direction of the contact terminal 2, a conductive rod-shaped first conductor (plunger) 40, and a conductive rod-shaped second conductor (plunger) 50. The first conductor 40 and the second conductor 50 are formed of a conductive material such as a palladium alloy.

[0033] The cylindrical body 20 is formed in a cylindrical shape, and is formed using a nickel or nickel alloy tube having an outer diameter of about 25 to 300 μm and an inner diameter of about 10 to 250 μm. In addition, it is preferable that a conductive layer such as gold plating is formed on the inner peripheral surface of the cylindrical body 20. This can reduce the contact resistance at the sliding contact CP (FIG. 4) described later. Furthermore, the outer peripheral surface of the cylindrical body 20 may be insulated as necessary.

[0034] The cylindrical body 20 has a first body portion 21, a first spring portion 22, a second spring portion 23, and a second body portion 24. The first body portion 21, the first spring portion 22, the second body portion 24, and the second spring portion 23 are arranged in this order from one axial direction X1 side to the other axial direction X2 side.

[0035] The first spring portion 22 and the second spring portion 23 are formed as helical bodies that extend helically along the circumferential surface of the cylindrical body 20. The first body portion 21 and the second body portion 24 are cylindrical and not configured in a helical shape.

[0036] To manufacture a cylindrical body having such a spiral body, for example, a gold plating layer is formed on the outer periphery of a core material by plating, and then a nickel electroforming layer is formed on the outer periphery of the gold plating layer by electroforming. A resist layer is formed on the outer periphery of the nickel electroforming layer, and then a part of the resist layer is removed in a spiral shape by exposure to a laser. Etching is performed using the resist layer as a masking material, and the nickel electroforming layer is removed in the area where the resist layer has been removed in a spiral shape. Then, after removing the resist layer, the gold plating layer is removed in the area where the nickel electroforming layer has been removed in a spiral shape, and the core material is removed while leaving the gold plating layer on the inner periphery of the nickel electroforming layer to form a cylindrical body.

[0037] The first conductor 40 has a first protruding portion 41 that protrudes from the cylindrical body 20 on one axial direction X1 side, and a first insertion portion 42 that is connected to the first protruding portion 41 on the other axial direction X2 side and is disposed inside the cylindrical body 20 (FIG. 3). The first conductor 40 and the second conductor 50 have a shape of a body of revolution about the axial direction. Thus, the first conductor 40 and the second conductor 50 can be formed by cutting using a lathe.

[0038] The first protrusion 41 has a rod-shaped main body 411 and a flange 412 connected to the other axial direction X2 side of the rod-shaped main body 411. The rod-shaped main body 411 has a tip end 411A on the one axial direction X1 side. The tip end 411A is brought into contact with an inspection point of the inspection object 100 as described below.

[0039] In the example of FIG. 3, tip portion 411A is conical, but is not limited thereto and may be, for example, a truncated cone, a hemisphere, or a cylinder.

[0040] The first insertion portion 42 is connected to the other axial direction X2 side of the flange portion 412 and fixed to the first body portion 21. More specifically, the first insertion portion 42 is fixed to one axial side end portion 201 of the cylindrical body 20. The one axial side end portion 201 is included in the first body portion 21. The fixing structure for fixing the first insertion portion 42 to the first body portion 21 will be described later.

[0041] The second conductor 50 has a second protruding portion 51 and a second insertion portion 52 disposed inside the cylindrical body 20 (FIG. 3). The second insertion portion 52 is connected to one axial direction X1 side of the second protruding portion 51. The second insertion portion 52 is fixed to the other axial side end portion 202 of the cylindrical body 20. Note that a fixing structure for fixing the second insertion portion 52 to the cylindrical body 20 will be described later.

[0042] In this manner, the first conductor 40 and the second conductor 50 are fixed to the cylindrical body 20 to form the contact terminal 2.

[0043] 3, the second insertion portion 52 extends axially through the inside of the cylindrical body 20 to the first body portion 21 via the second spring portion 23, the second body portion 24, and the first spring portion 22. This allows the second insertion portion 52 to come into contact with the first body portion 21.

[0044] 4 shows a state in which the first spring portion 22 and the second spring portion 23 are compressed by applying a load to the contact terminal 2. In this case, the second conductor 50 moves relatively to the first conductor 40 in the one axial direction X1 compared to the state in FIG. 3. As a result, the second insertion portion 52 moves to the one axial direction X1 while contacting the first body 21. Meanwhile, the first insertion portion 42 is fixed to the first body 21. Therefore, a sliding contact CP is formed by the contact between the second insertion portion 52 and the first body 21. The current path in the contact terminal 2 is a path via the first insertion portion 42, the first body 21, the sliding contact CP, and the second insertion portion 52.

[0045] 3, in the contact terminal 2, the axial length of the first conductor 40 is shortened and the axial length of the second conductor 50 is lengthened, thereby making it possible to reduce the difference between the lengths of the first conductor 40 and the second conductor 50. This makes it easier to manufacture the first conductor 40 and the second conductor 50.

[0046] Fig. 5 is a diagram showing a state in which the contact terminal 2 is supported by the support member 3. As shown in Fig. 5, the support member 3 has an upper support 301, an intermediate support 302, and a lower support 303. Here, a configuration in which the contact terminal 2 is supported by the support member 3 will be described.

[0047] The lower support 303 has a support hole 303A which is a through hole penetrating in the thickness direction. The cross-sectional area of ​​the support hole 303A as viewed in the axial direction is slightly larger than the cross-sectional area of ​​the rod-shaped main body 411 as viewed in the axial direction and smaller than the cross-sectional area of ​​the flange 412 as viewed in the axial direction. This allows the rod-shaped main body 411 to be inserted into the support hole 303A, and the flange 412 prevents the contact terminal 2 from falling off.

[0048] The intermediate support 302 is disposed above the lower support 303, and has a support hole 302A which is a through hole coaxial with the support hole 303A. The cross-sectional area of ​​the support hole 302A as viewed in the axial direction is slightly larger than the outer cross-sectional area of ​​the second body 24 as viewed in the axial direction. This allows the second body 24 to be inserted into the support hole 302A.

[0049] The upper support 301 is disposed above the intermediate support 302, and has a support hole 301A which is a through hole coaxial with the support hole 302A. The cross-sectional area of ​​the support hole 301A as viewed in the axial direction is slightly larger than the outer cross-sectional area of ​​the other axial end 202 of the cylindrical body 20 and the second protruding portion 51 as viewed in the axial direction. This allows the other axial end 202 and the second protruding portion 51 to be inserted into the support hole 301A.

[0050] When contact terminal 2 is supported by supporting member 3, rod-shaped main body 411 is inserted from above into supporting hole 301A, supporting hole 302A, and supporting hole 303A in that order. Support holes 301A and 302A have cross sections in the axial direction that allow flange portion 412 to be inserted therethrough.

[0051] In this state in which contact terminal 2 is supported by support member 3, rod-shaped main body 411 is accommodated in support hole 303A. Flange 412 abuts against upper surface 303B of lower support 303. Second trunk 24 is accommodated in support hole 302A. Other axial end 202 and second protrusion 51 are accommodated in support hole 301A.

[0052] Then, the upper surface of the upper support 301 is pressed against the lower surface of the pitch changing unit 6 while the tip portion 511 of the second protrusion 51 is brought into contact with the first electrode 61 exposed on the lower surface of the pitch changing unit 6. This fixes the support member 3 to the pitch changing unit 6. At this time, the first spring portion 22 and the second spring portion 23 are compressed in the axial direction. As a result, the tip portion 511 is pressed against the first electrode 61 by the elastic force of the spring portions 22, 23, and the tip portion 511 and the first electrode 61 are maintained in a stable conductive contact state.

[0053] Furthermore, when inspecting the inspection target 100, the tip 411A of the rod-shaped main body 411 is brought into contact with the inspection point 100A of the inspection target 100. At this time, a force is applied to the tip 411A toward the other axial direction X2, and the first spring portion 22 and the second spring portion 23 are compressed in the axial direction. As a result, the elastic force of the spring portions 22 and 23 presses the tip 411A against the inspection point 100A, and the tip 411A and the inspection point 100A are maintained in a stable conductive contact state.

[0054] In the contact terminal 2, the spring portion has a first spring portion 22 and a second spring portion 23 arranged on the other axial direction X2 side of the first spring portion 22, and the cylindrical body 20 has a second body portion 24 that is not configured in a spiral shape and arranged between the first spring portion 22 and the second spring portion 23. This allows the second body portion 24 located in the middle of the cylindrical body 20 to be supported by the intermediate support body 302, and buckling of the cylindrical body 20 can be suppressed.

[0055] <3. Fixing the conductor to the cylindrical body><3-1. First embodiment of fixing structure for fixing the first conductor to the cylindrical body> Next, a first embodiment of a fixing structure for fixing the first conductor 40 in the contact terminal 2 to the cylindrical body 20 will be described. Fig. 6 and Fig. 7 are diagrams showing a disassembled state before the first conductor 40 is fixed to the cylindrical body 20.

[0056] An end-side notch 31 and a hole 32 are provided at one axial end 201 of the cylindrical body 20 .

[0057] The end-side notch 31 (FIG. 6) is formed in a shape cut away from the one axial end face 201A of the one axial end 201 toward the other axial end X2. The hole 32 (FIG. 7) opens at the one axial end 201. The end-side notch 31 is provided on the one first direction Y1 side. The hole 32 is provided on the other first direction Y2 side. The circumferential center position of the end-side notch 31 is shifted 180° in the circumferential direction from the circumferential center position of the hole 32. However, the two circumferential center positions may be slightly shifted from 180°.

[0058] That is, the cylindrical body 20 has an end side notch 31 at one axial end 201 of the cylindrical body 20, which is cut out from the one axial end face 201A toward the other axial side X2, and a hole portion 32 that opens into the one axial end 201.

[0059] The first insertion portion 42 (FIG. 6) of the first conductor 40 has an inclined portion 421, a first straight portion 422, a narrowed portion 423, and a second straight portion 424. The inclined portion 421 has an outer diameter that increases toward one axial direction X1. The first straight portion 422 is connected to the inclined portion 421 on one axial direction X1 side, and has a constant outer diameter along the axial direction.

[0060] The outer diameter D2 of the first straight portion 422 is larger than the inner diameter D1 of the cylindrical body 20 (FIG. 6).

[0061] The narrowed portion 423 is connected to the first straight portion 422 on the one axial direction X1 side, and is connected to the flange portion 412 on the other axial direction X2 side.

[0062] The second straight portion 424 is connected to the inclined portion 421 on the other axial direction X2 side, and has a constant outer diameter along the axial direction.

[0063] When assembling the first conductor 40 to the cylindrical body 20, the second straight portion 424 is inserted into the cylindrical body 20 from the one axial side end face 201A. As the insertion proceeds, the inclined portion 421 comes into contact with the inner circumference of the one axial side end face 201A. When the first conductor 40 is pushed in as is, the one axial side end face 201 expands, and the first straight portion 422 is inserted into the cylindrical body 20.

[0064] If the insertion continues as is, the flange portion 412 comes into contact with the one axial end face 201A, thereby restricting the insertion of the first conductor 40. Figures 8 and 9 show a state in which the first conductor 40 is pushed into the tubular body 20 and the flange portion 412 comes into contact with the one axial end face 201A. Figure 8 shows a state in which the first conductor 40 has been inserted into the tubular body 20 in Figure 6. Figure 9 shows a state in which the first conductor 40 has been inserted into the tubular body 20 in Figure 7.

[0065] 8 and 9, the first straight portion 422 is sandwiched from both sides in the second direction Z by a pair of arms 211, 212 of the cylindrical body 20. The arms 211, 212 are sandwiched between the end-side notch 31 and the hole 32.

[0066] Since the outer diameter D2 of the first straight portion 422 is larger than the inner diameter D1 of the cylindrical body 20, the first straight portion 422 is pressed by the pair of arm portions 211, 212. That is, the first straight portion 422 comes into contact with the arm portions 211, 212. As a result, the first conductor 40 is fixed to the cylindrical body 20.

[0067] Further, a wall surface portion 425 is formed at a step between the first straight portion 422 and the narrowed portion 423 (FIG. 6). Here, as shown in FIG. 9, the distance L1 between the wall surface portion 425 and the flange portion 412 is longer than the distance L2 between the hole portion 32 and the one axial direction end face 201A. As a result, in the state shown in FIG. 9, the narrowed portion 423 fits between the hole portion 32 and the one axial direction end face 201A. The wall surface portion 425 can come into contact with the axially protruding edge portion 321 included in the hole portion 32. The axially protruding edge portion 321 is an edge portion of the axially protruding portion 201B that protrudes toward the other axial direction X2 side at the one axial direction end portion 201.

[0068] That is, the wall surface portion 425 arranged at one axial side end of the first straight portion 422 can come into contact with the hole portion 32. This makes it difficult for the first conductor 40 assembled to the tubular body 20 to come out of the tubular body 20. Also, since the wall surface portion 425 can come into contact with the axially protruding edge portion 321 (FIG. 7), the first conductor 40 becomes even more difficult to come out of the tubular body 20. Furthermore, it is possible to prevent the wall surface portion 425 from coming into contact with the vicinity of both circumferential ends of the axially protruding edge portion 321.

[0069] Here, if no hole is provided in one axial end 201 of the tubular body 20X, but only the end-side notch S20 is provided, as shown in Fig. 19, when the first conductor 40 is assembled to the tubular body 20X, it will be in the state shown in Fig. 20. At this time, since only the end-side notch S20 is provided, the one axial end 201 is unlikely to expand when the first conductor 40 is inserted into the tubular body 20X.

[0070] In contrast, in the contact terminal 2 according to the present embodiment, the end notch 31 and the hole 32 are provided in the cylindrical body 20, so that the one axial end 201 can easily expand. Therefore, the first conductor 40 can be easily pushed in, and the first conductor 40 can be easily assembled.

[0071] 8 and 9, the first protrusion 41 has a flange 412 that faces one axial end face 201A of the tubular body 20 in the axial direction. This makes it possible to prevent the first conductor 40 from being inserted too far into the tubular body 20.

[0072] In addition, when the first conductor 40 is inserted into the cylindrical body 20X shown in FIG. 19, the first straight portion 422 having an outer diameter D2 larger than the inner diameter D1 of the cylindrical body 20X acts to expand the one axial side end 201 of the cylindrical body 20X. At this time, a portion of the one axial side end 201 near the other axial side X2 end of the end side notch S20 moves in the circumferential direction of the cylindrical body 20X. In addition, a portion of the cylindrical body 20X that comes into contact with the first straight portion 422 moves toward the radial outside of the cylindrical body 20X. Therefore, the one axial side end 201 of the cylindrical body 20X is expanded. At this time, the axis of the one axial side end 201 is shifted from the axis when the first conductor 40 is not inserted. When the first conductor 40 is inserted until the flange portion 412 comes into contact with the one axial side end face 201A as shown in FIG. 20, the deviation of the axis near the one axial side end face 201A is large. For this reason, the first conductor 40 is likely to tilt from the direction along the axis of the cylindrical body 20X when the first conductor 40 is not inserted. The first conductor 40 tilts toward the end-side cutout S20. Fig. 21 shows a state in which the first conductor 40 tilts at an angle θ.

[0073] 10 , in the contact terminal 2 according to the first embodiment, a part of the first straight portion 422 is exposed from the hole 32 along the axial direction from one axial side end 422A to the other axial side end 422B. That is, a part of the first straight portion 422 is exposed from the hole 32. As a result, the exposed portion of the first straight portion 422 does not contact the tubular body 20, and therefore, the inclination of the first conductor 40 with respect to the tubular body 20 can be suppressed.

[0074] Further, the outer diameter D3 (FIG. 6) of the second straight portion 424 and the inner diameter D1 of the cylindrical body 20 are substantially the same. Thereby, the inclination of the first conductor 40 with respect to the cylindrical body 20 can be suppressed. If the relationship between the outer diameter D3 and the inner diameter D1 is 0 < D1 - D3 ≤ 6 μm, the above effect can be obtained. For example, when the inner diameter D1 of the cylindrical body 20 is 47 μm and the outer diameter is 58 μm, if the outer diameter D3 of the second straight portion 424 is 45 μm, the above effect can be obtained.

[0075] Also, as shown in FIG. 7, one axial end portion 201 has a pair of circumferential protrusions 201C and 201D that protrude in the circumferential direction approaching each other. The hole portion 32 includes circumferential protrusion edges 322 and 323 that are the edges of the circumferential protrusions 201C and 201D. By holding the first conductor 40 by the circumferential protrusions 201C and 201D, the inclination of the first conductor 40 can be suppressed (FIG. 9).

[0076] As a modification of the present embodiment, as shown in FIG. 11, the distance L1 between the wall surface portion 425 and the flange portion 412 may be made substantially equal to the distance L2 between the hole portion 32 and the one axial end surface 201A. Thereby, the axial movement of the first conductor 40 with respect to the cylindrical body 20 can be suppressed. If the relationship between the distances L1 and L2 is 0 ≤ L1 - L2 ≤ 30 μm, the above effect can be obtained.

[0077] Also, as shown in FIG. 8, the end side notch 31 has a constant width portion 311 whose width Wz is constant along the axial direction. The constant width portion 311 extends from the one axial end surface 201A to a position overlapping the inclined portion 421 when viewed in the first direction Y. Thereby, the first conductor 40 is held by a portion near the constant width portion 311 in the cylindrical body 20, and the inclination of the first conductor 40 can be suppressed.

[0078] 3-2. Second embodiment of structure for fixing first conductor to tubular body Figs. 12 to 18 are diagrams showing a second embodiment of a structure for fixing a first conductor 40 to a tubular body 20. In the first conductor 40 and the tubular body 20 according to the second embodiment, the same reference numerals as those in the first embodiment are used for components corresponding to those in the first embodiment. Therefore, the second embodiment can achieve the same effects as those achieved by the characteristic configuration of the first embodiment described above. Here, the shapes of the end-side notch 31 and the hole 32, which are different from the first embodiment, will be described in detail with reference to Figs. 17 and 18.

[0079] 17, the end-side cutout 31 has a constant width portion 31A and a wide width portion 31B. The constant width portion 31A has a width Wz that is constant along the axial direction from the one axial end face 201A. The wide width portion 31B is connected to the other axial direction X2 side of the constant width portion 31A, and the width Wz increases toward the other axial direction X2 side.

[0080] That is, the end-side notch 31 has a wide portion 31B in which the width Wz increases toward the other axial direction X2. By making the end-side notch 31 larger, the one axial end 201 of the tubular body 20 can be made to widen more easily. Also, the inclination of the first conductor 40 with respect to the tubular body 20 can be suppressed.

[0081] 18, the hole 32 has a narrow portion 32A in which the circumferential width Wz decreases toward the other axial direction X2. This allows the shape of the hole 32 to fit the shape of the inclined portion 421.

[0082] 3-3. Fixing structure of second conductor to tubular body Next, a fixing structure for fixing the second conductor 50 in the contact terminal 2 according to this embodiment to the tubular body 20 will be described. Fig. 22 and Fig. 23 are diagrams showing a disassembled state before the second conductor 50 is fixed to the tubular body 20. Fig. 22 shows a view from the end-side notch 202B side of the tubular body 20, and Fig. 23 shows a view from the hole 202C side of the tubular body 20.

[0083] The other axial end 202 of the cylindrical body 20 is provided with an end-side notch 202B and a hole 202C.

[0084] The end-side notch 202B is formed in a shape cut out along the axial direction from the other-axial-side end face 202A of the other-axial-side end 202. The hole 202C opens at the other-axial-side end 202. The end-side notch 202B and the hole 202C face each other in a direction perpendicular to the axial direction (radial direction).

[0085] That is, the cylindrical body 20 has an end side notch 202B at the other axial end 202 of the cylindrical body 20, which is cut out from the other axial end face 202A toward the one axial side X1, and a hole portion 202C opening into the other axial end 202.

[0086] The second conductor 50 has a second protruding portion 51 protruding from the cylindrical body 20 toward the other axial direction X2, and a second insertion portion 52 connected to the one axial direction X1 side of the second protruding portion 51 and disposed inside the cylindrical body 20. The second protruding portion 51 has a flange portion 512 on the one axial direction X1 side.

[0087] The second insertion portion 52 has an inclined portion 521, a third straight portion 522, a narrowed portion 523, and a fourth straight portion 524. The inclined portion 521 has an outer diameter that increases toward the other axial direction X2. The third straight portion 522 is connected to the inclined portion 521 on the other axial direction X2 side, and has a constant outer diameter along the axial direction.

[0088] That is, the second insertion portion 52 has an inclined portion 521 whose outer diameter increases toward the other axial direction X2, and a third straight portion 522 connected to the other axial direction X2 side of the inclined portion 521 and whose outer diameter is constant along the axial direction.

[0089] The outer diameter of the third straight portion 522 is larger than the inner diameter of the cylindrical body 20 .

[0090] The narrowed portion 523 is connected to the other axial direction X2 side of the third straight portion 522, and is connected to the one axial direction X1 side of the flange portion 512. The outer diameter of the narrowed portion 523 is smaller than the outer diameter of the third straight portion 522.

[0091] The fourth straight portion 524 is connected to the inclined portion 521 on one axial direction X1 side, and has a constant outer diameter along the axial direction.

[0092] When assembling the second conductor 50 to the cylindrical body 20, the fourth straight portion 524 is inserted into the cylindrical body 20 from the other axial end face 202A. As the insertion proceeds, the inclined portion 521 comes into contact with the inner circumference of the other axial end face 202A. When the second conductor 50 is pushed in as is, the other axial end face 202 expands, and the third straight portion 522 is inserted into the cylindrical body 20.

[0093] If the insertion continues, the flange 512 comes into contact with the other axial end face 202A, thereby restricting the insertion of the second conductor 50. In Figures 22 and 23, the second conductor 50 is pushed into the cylindrical body 20 and the flange 512 comes into contact with the other axial end face 202A is shown in Figures 24 and 25.

[0094] 24 and 25, the third straight portion 522 is sandwiched from both sides in a direction perpendicular to the axial direction by a pair of arms 202D, 202E of the cylindrical body 20. The arms 202D, 202E are sandwiched between the end-side cutout 202B and the hole 202C.

[0095] Since the outer diameter of the third straight portion 522 is larger than the inner diameter of the cylindrical body 20, the third straight portion 522 is pressed by the pair of arm portions 202D, 202E. That is, the third straight portion 522 comes into contact with the arm portions 202D, 202E. As a result, the second conductor 50 is fixed to the cylindrical body 20.

[0096] Since the cylindrical body 20 is provided with the end notch 202B and the hole 202C, the other axial end 202 can easily expand, making it easier to push in the second conductor 50, and thus facilitating assembly of the second conductor 50.

[0097] Further, a wall surface portion 525 is formed at a step between the third straight portion 522 and the narrowed portion 523 (FIG. 22). Here, as shown in FIG. 25, the distance between the wall surface portion 525 and the flange portion 512 is longer than the distance between the hole portion 202C and the other axial end surface 202A. As a result, in the state shown in FIG. 25, the narrowed portion 523 fits between the hole portion 202C and the other axial end surface 202A. And the wall surface portion 525 is capable of contacting the hole portion 202C.

[0098] That is, the wall surface portion 525 arranged at the other axial end of the third straight portion 522 can come into contact with the hole portion 202C. This makes it difficult for the second conductor 50 assembled to the tubular body 20 to come out of the tubular body 20.

[0099] In this manner, the fixing structure of the second conductor 50 to the tubular body 20 has a similar configuration to the fixing structure of the first conductor 40 described above, and can achieve the same effects.

[0100] In addition, since the fourth straight portion 524 is inserted inside the tubular body 20 and extends in the axial direction so as to be able to contact the first body portion 21 (Figure 3), the axial length of the fourth straight portion 524 is long, which increases the effect of suppressing the inclination of the second conductor 50 relative to the tubular body 20.

[0101] The other axial end 202 may have a configuration as shown in Fig. 26. In Fig. 26, in a front view of the hole 202C, the hole 202C is formed symmetrically with respect to the central axis of the cylindrical body 20. The hole 202C has a recess 202C1 on the one axial direction X1 side, and a protruding edge 202C2 on the other axial direction X2 side. The recess 202C1 is recessed on the one axial direction X1 side. The other axial end 202 has a protruding portion 202F protruding on the one axial direction X1 side. The protruding edge 202C2 is an edge of the protruding portion 202F.

[0102] <4. Others> Although the embodiment of the present invention has been described above, various modifications of the embodiment are possible within the scope of the spirit of the present invention.

[0103] For example, the above-mentioned conductor fixing structure can be applied to a contact terminal in which the conductor and the body form two sliding contacts at the body at the intermediate position of the cylindrical body into which the conductors arranged on both axial sides are inserted. The above fixing structure may also be applied to a contact terminal configured by fixing only one conductor to the cylindrical body.

[0104] The present invention can be used, for example, in electrical testing of various test objects. [Explanation of symbols]

[0105] 1. Probe head 2...Contact terminal 2A...One end 2B...Other end 20, 20X... Cylindrical body 201... One end in the axial direction 201A... End face on one side in the axial direction 201B...Axial protrusion 201C, 201D... Circumferential protrusion 202...Other axial end 202A... End surface on the other side in the axial direction 202B...End side notch 202C...hole 202C1...Concave 202C2...Protruding edge 202D, 202E...Arm 202F...Protrusion 21...First body 211, 212...Arm 22... First spring section 23 Second spring section 24...Second body 3. Support member 301...Upper support 301A...Support hole 302...Intermediate support 302A...Support hole 303...lower support 303A...Support hole 303B...Top surface 31...End side notch 31A...Constant width part 31B...Wide part 311...Constant width part 32...hole 32A...Narrow part 321...Axial protruding edge 322, 323... circumferential protruding edge 40...First conductor 41...1st protrusion 411 Rod-shaped main body 411A...Tip 412...Flange 42...First insertion part 421...Slope part 422···First straight section 422A... One end in the axial direction 422B...Other axial end 423... Narrowed section 424···Second straight section 425...Wall section 50...Second conductor 51...Second protrusion 511...Tip 512...Flange 52...Second insertion part 521...Slope part 522···Third straight section 523 Narrowed section 524···Fourth straight section 525 Wall section 6. Pitch conversion unit 61...1st electrode 7. Connection plate 8. Inspection fixture 9. Inspection processing section 10. Inspection equipment 100...Inspection subject 100A···Inspection point CP···Sliding contact D1: Inner diameter D2, D3: Outer diameter J ··· Central axis L1, L2 ··· Distances S20 ··· End - side notch Wz ··· Width X1 ··· One - side in the axial direction X2 ··· The other - side in the axial direction Y1 ··· One - side in the first direction Y2 ··· The other - side in the first direction Z1 ··· One - side in the second direction Z2 ··· The other - side in the second direction θ ··· Angle

Claims

1. a cylindrical body extending in an axial direction of the contact terminal and having electrical conductivity; A first conductor having a rod shape and electrical conductivity; Equipped with The cylindrical body is an end side notch provided at one axial end of the cylindrical body such that the end side is cut out from the end surface at one axial end toward the other axial end; a hole portion opening at one axial end portion; A pair of arms sandwiched between the end-side notches and the hole; having The first conductor is A first protruding portion protruding from the cylindrical body toward one axial direction; a first insertion portion connected to the other axial side of the first protrusion and disposed inside the cylindrical body; having The first insertion portion is a sloped portion having an outer diameter that increases toward one axial side; a first straight portion connected to one axial side of the inclined portion and having a constant outer diameter along the axial direction; having The outer diameter of the first straight portion is larger than the inner diameter of the cylindrical body, the first straight portion contacts the arm portion, a wall surface portion disposed at one axial end of the first straight portion is capable of coming into contact with the hole portion; contact terminal.

2. The contact terminal according to claim 1 , wherein the first protrusion has a flange portion that faces the one axial end face of the cylindrical body in the axial direction.

3. The contact terminal according to claim 2 , wherein a distance between the wall portion and the flange portion is substantially equal to a distance between the hole portion and the one axial end face.

4. The contact terminal according to claim 1 , wherein a portion of the first straight portion is exposed from the hole portion.

5. the first insertion portion has a second straight portion connected to the other axial side of the inclined portion and having a constant outer diameter along the axial direction, The outer diameter of the second straight portion and the inner diameter of the cylindrical body are substantially the same. The contact terminal according to any one of claims 1 to 4.

6. the hole portion includes an axially protruding edge portion that is an edge portion of an axially protruding portion that protrudes to the other axial side at the one axial side end portion, The contact terminal according to claim 1 , wherein the wall portion is capable of coming into contact with the axially protruding edge portion.

7. the one axial end portion has a pair of circumferential protruding portions that protrude in the circumferential direction and approach each other, The contact terminal according to claim 1 , wherein the hole includes a circumferential protruding edge portion that is an edge portion of the circumferential protruding portion.

8. The end-side notch has a constant width portion whose width is constant along the axial direction, The contact terminal according to claim 1 , wherein the constant width portion extends from the one axial end face to a position overlapping with the inclined portion when viewed in a first direction perpendicular to the axial direction.

9. The contact terminal according to claim 1 , wherein the hole has a narrow portion whose circumferential width decreases toward the other axial side.

10. The contact terminal according to claim 1 , wherein the end-side notch has a wide portion whose width increases toward the other axial side.

11. The contact terminal according to claim 1 , wherein the first conductor has a shape of a solid of revolution about the axial direction.

12. Further comprising a rod-shaped second conductor having electrical conductivity; the second conductor has a second insertion portion disposed inside the cylindrical body, The cylindrical body is a second end side notch provided in the other axial end of the cylindrical body so as to be cut out from the other axial end surface toward the one axial side; A second hole portion that opens to the other axial end portion; a pair of second arm portions sandwiched between the second end side cutouts and the second hole portion; having The second insertion portion is a second inclined portion having an outer diameter increasing toward the other axial side; a third straight portion connected to the other axial side of the second inclined portion and having a constant outer diameter along the axial direction; having The outer diameter of the third straight portion is larger than the inner diameter of the cylindrical body, the third straight portion is in contact with the second arm portion, a wall surface portion disposed at the other axial end of the third straight portion is capable of coming into contact with the second hole portion; The contact terminal according to any one of claims 1 to 11.

13. A plurality of contact terminals according to any one of claims 1 to 12; a support member for supporting the contact terminals; An inspection fixture comprising:

14. The inspection tool according to claim 13 , an inspection processing unit that inspects the inspection object based on an electrical signal obtained by contacting the contact terminal with an inspection point provided on the inspection object; An inspection device comprising:

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