Component packaging substrate structure and method for manufacturing same

Abstract

To provide a component package substrate structure and a manufacturing method thereof.SOLUTION: A method includes: fitting a component on a first temporary bearing plate; applying a first medium layer 400, so that the component 300 is embedded in the first medium layer; applying a second temporary bearing plate and removing the first temporary bearing plate; forming a connection pad 310 connected to a terminal of the component on the first medium layer, the connection pad including an annular ring structure; and laminating a second medium layer 200 on the first medium layer, and laminating a circuit board 100 on the second medium layer, a surface of the circuit board laminated with the second medium layer including a circuit layer. The method also includes: removing the second temporary bearing plate; making a hole to form a stepped hole, the stepped hole including a first via hole penetrating the first medium layer, an opening of an annular ring structure of the connection pad and a second via hole penetrating the second medium layer, and exposing the circuit layer by the first via hole, the opening and the second via hole; and electroplating the stepped hole to form a via pillar, the via pillar rendering the connection pad conductive with the circuit layer.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present application relates to the technical field of semiconductor packaging, and in particular to a component packaging substrate structure and a method for fabricating the same. [Background technology]

[0002] With the rapid development of electronic technology, the performance requirements of electronic products are becoming more and more advanced, and the size of electronic products needs to be smaller and thinner. Therefore, the trend toward high-density integration and miniaturization of electronic components such as chips, packaging substrates and packaging structures has become an inevitable trend.

[0003] In the conventional technical solution, the components are embedded in the packaging material in the packaging substrate, and generally the components are mounted in the cavity before packaging and build-up. However, the method and process of making the cavity are relatively complicated, especially when making a small-sized cavity, the copper pillar etching method by pattern transfer is required, which makes the process even more complicated, and significantly increases the process cost and processing time. In addition, the method of embedding the components and then building up causes the loss of components because the circuit of the outer substrate is discarded, which significantly increases the manufacturing cost. Summary of the Invention [Problem to be solved by the invention]

[0004] In view of this, the objective of the present application is to propose a component packaging substrate structure and a method for fabricating the same. [Means for solving the problem]

[0005] For the above purpose, the present application: Providing a first temporary placement plate; Attaching a component to the first temporary mounting plate; applying a first medium layer to the surface of the first temporary mounting plate to which the components are attached, and embedding the components in the first medium layer; providing a second temporary mounting plate to the first medium layer; removing the first temporary mounting plate to expose a terminal surface of the component and a first surface of the first medium layer; forming a connection pad on the first surface for connection to a terminal of the component, the connection pad including an annular ring structure; laminating a second medium layer to the first surface and laminating a circuit board to the second medium layer, the circuit board including a circuit layer on a surface laminated to the second medium layer; removing the second temporary mounting plate to expose a second surface of the first medium layer; drilling a stepped hole in the second surface, the stepped hole including a first via hole penetrating the first medium layer, an opening in an annular ring structure of the connection pad, and a second via hole penetrating the second medium layer, the first via hole, the second via hole, and the opening being coaxially disposed to expose the circuit layer; A method for fabricating a component packaging substrate structure includes electroplating the stepped hole to form a via pillar, the via pillar providing electrical continuity between the connection pad and the circuit layer.

[0006] The present embodiment also provides a circuit board having a surface with a circuit layer; a second medium layer provided in the circuit layer of the circuit board and having a second via hole penetrating the second medium layer and exposing the circuit layer; a component, a terminal surface of the component facing the second medium layer, a connection pad connected to a terminal of the component being provided on the terminal surface, the connection pad including an annular ring structure having an opening, the opening exposing the second via hole; a first medium layer provided on the second medium layer and having the component embedded therein, the first medium layer having a first via hole penetrating the first medium layer and exposing the opening; A component packaging substrate structure is provided, which includes at least a via pillar that fills the second via hole and an opening of the connection pad to electrically connect the connection pad and the circuit layer.

[0007] The component packaging substrate structure may be manufactured by the fabrication method described in the present invention. Effect of the Invention

[0008] As can be seen from the above, the component packaging substrate structure and manufacturing method thereof provided by the present application allows components to be embedded after the substrate circuit is completed, so that the component embedding process can be postponed; by forming a stepped hole, the electrical connection between the component and the substrate circuit can be delayed, thereby avoiding the disposal of components due to defects in the substrate circuit, improving the yield rate of component packaging, reducing the cost of the component packaging process to a certain extent, and shortening the processing time; and since components can be embedded after the circuit quality inspection of the outer substrate is performed, the problem of components being discarded due to defects in the substrate circuit is resolved. [Brief description of the drawings]

[0009] In order to more clearly describe the technical solutions in the present application or related art, the following briefly introduces the drawings used in the description of the embodiments or related art. Needless to say, the drawings described below are only the embodiments of the present application, and those skilled in the art can obtain other drawings from these drawings without novel work. [Figure 1] FIG. 1 is a schematic cross-sectional view of an exemplary component packaging substrate structure according to an embodiment of the present application. [Diagram 2] FIG. 2 is a schematic diagram of another exemplary component packaging substrate structure of an embodiment of the present application. [Figure 3(a)]FIG. 3(a) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method for a component packaging substrate structure according to an embodiment of the present application. [Figure 3(b)] FIG. 3(b) shows schematic cross-sectional views of intermediate structures in each step of the manufacturing method of the component packaging substrate structure according to the embodiment of the present application. [Figure 3(c)] FIG. 3(c) shows schematic cross-sectional views of intermediate structures in each step of the manufacturing method of the component packaging substrate structure according to the embodiment of the present application. [Figure 3(d)] FIG. 3(d) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(e)] FIG. 3(e) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(f)] FIG. 3(f) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(g)] FIG. 3(g) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method for a component packaging substrate structure according to an embodiment of the present application. [Figure 3(h)] FIG. 3(h) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(i)] FIG. 3(i) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method for a component packaging substrate structure according to an embodiment of the present application. [Figure 3(j)] FIG. 3(j) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(k)] FIG. 3(k) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. [Figure 3(l)] FIG. 3(l) shows schematic cross-sectional views of intermediate structures in each step of a manufacturing method of a component packaging substrate structure according to an embodiment of the present application. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, the present application will be described in more detail using specific embodiments and with reference to drawings, so as to make the objectives, technical solutions and advantages of the present application more apparent.

[0011] Unless otherwise defined, technical or scientific terms used in the embodiments of the present application have the common meanings understood by those skilled in the art. The terms "first", "second" and similar terms used in the embodiments of the present application do not denote any order, quantity or importance, but are used to distinguish different components. The term "comprises" or similar terms means that the element or object appearing before the term covers the elements or objects listed after the term and their equivalents, but does not exclude other elements or objects. The term "connected" or similar terms is not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. The terms "upper", "lower", "left", "right", etc. are used to express only relative positional relationships, and if the absolute position of the object being described is changed, the relative positional relationships may change accordingly.

[0012] The most common technical solution for semiconductor packaging is to make a blind cavity or a through cavity, and then mount components in the cavity, and then perform packaging and build-up. In this method, components are generally placed on the innermost side, and the waste of the outer side directly causes the loss of the inner embedded components. In particular, as the integration density of embedded chips becomes higher and higher, the decrease in the yield rate of the substrate circuit will increase the cost due to the waste of the embedded components. On the other hand, the process of making the cavity itself is complicated, which increases the process cost of the entire packaging process and lengthens the processing time. Therefore, the conventional technical solutions have problems such as high process cost, long processing time, and the waste of the circuit on the outer substrate will cause the waste of components.

[0013] In view of this, the embodiments of the present application provide a component packaging substrate structure and a method for fabricating the same, which enables the component embedding process to be performed later by completing the circuit on the outer substrate before embedding components, and enables the electrical connection between the component and the substrate circuit to be performed later by forming a stepped hole, thereby avoiding the disposal of components due to defects in the substrate circuit, improving the yield rate of component packaging, reducing the cost of the component packaging process to a certain extent, and shortening the processing time. Furthermore, since components can be embedded after the circuit quality of the outer substrate is inspected, the problem of components being discarded due to defects in the substrate circuit is resolved.

[0014] FIG. 1 shows a schematic diagram of an exemplary component packaging substrate structure of an embodiment of the present application.

[0015] As shown in the drawings, the component packaging substrate structure provided by the embodiments of the present application may include a circuit board 100 , a second medium layer 200 , a component 300 , and a first medium layer 400 .

[0016] The circuit board 100 includes at least one circuit layer. It can be understood that the circuit layer is provided at least on a surface of the circuit board 100 close to the component 300. The number of circuit layers can be specifically set according to the needs of actual use. For example, the circuit layers may include a first circuit layer 110 and a second circuit layer 120 provided on a side of the circuit board 100 far from the component 300 (i.e., the lower surface of the circuit board 100) and a side of the circuit board 100 close to the component 300 (i.e., the upper surface of the circuit board 100), respectively. In some embodiments, as shown in FIG. 1, the circuit layer may further include a third circuit layer 130 provided between the first circuit layer 110 and the second circuit layer 120. The circuit board 100 may be a multi-layer board having multiple circuit layers. It can be understood that a corresponding interlayer via pillar 140 may be provided between two adjacent circuit layers. The number of the interlayer via pillars 140 may be set to one or more, and may be determined according to needs.

[0017] The second medium layer 200 may be provided on the side of the circuit board 100 that has a circuit layer (for example, the upper surface of the circuit board 100). As shown in Fig. 3(l), the second medium layer 200 has a second via hole 210 that penetrates the second medium layer 200 and exposes the second circuit layer 120 on the circuit board 100.

[0018] The number of the second via holes 210 may correspond to the number of the annular ring structures 311 of the connection pads 310 of the component 300, for example, set to two. The installation positions of the second via holes 210 may respectively correspond to the positions of the corresponding interlayer via pillars 140 between the circuit layers of the circuit board 100. The hole diameter of the second via holes 210 may be the same as the diameter of the openings 312 of the annular ring structures 311.

[0019] The component 300 has a terminal surface facing the second medium layer 200, on which connection pads 310 are provided to be connected to terminals of the component 300, and as shown in Figures 3(e) and 3(f), the connection pads 310 include annular ring structures 311 with openings 312 that expose the second via holes 210 (see Figure 3(l)) and the second circuit layer 120 of the circuit board 100. The number of annular ring structures 311 of the connection pads 310 may correspond to the number of the second via holes 210. The openings 312 of the annular ring structures 311 and the second via holes 210 may be arranged coaxially.

[0020] The first medium layer 400 is provided on the second medium layer 200, and the first medium layer 400 covers the component 300 to embed the component 300 in the first medium layer 400. The first medium layer 400 has a first via hole 410 that penetrates the first medium layer 400 and exposes the opening 312 of the annular ring structure 311 of the connection pad 310 (see FIG. 3(k)). The first via hole 410 may be provided coaxially with the opening 312 of the annular ring structure 311 and the second via hole 210. The hole diameter of the first via hole 410 may be larger than the hole diameter of the opening 312 of the annular ring structure 311. As a result, the first via hole 410, the opening 312, and the second via hole 210 form a stepped hole 530 in the vertical direction (see FIG. 3(i)), forming a passage that communicates between the component 300 and the circuit board 100. The first medium layer 400 may be a packaging layer for the component 300 .

[0021] The stepped hole 530 is filled to form a via pillar 500b, which penetrates at least the second via hole 210 and the opening 312, allowing the connection pad 310 to be electrically connected to the circuit layer of the circuit board 100 through the via pillar 500b.

[0022] The component packaging substrate structure provided by the embodiment of the present application has a connection pad 310 with an annular ring structure 311, so that even if the component 300 is embedded after the circuit board 100 (i.e., the substrate) is completed, a via pillar 500b can be formed to electrically connect the connection pad 310 to the circuit layer. This allows the embedding process of the component 300 to be postponed, thereby reducing the cost of the component packaging process to a certain extent, shortening the processing time, and resolving the problem of components being discarded due to defects in the substrate circuit.

[0023] 1, the via pillar can fill the first via hole 410, the opening 312 and the second via hole 210, i.e., through the first medium layer 400, the annular ring structure 311 and the second medium layer 200. The first medium layer 400 may have a windowed pad 510 formed therein that is connected to the via pillar 500b.

[0024] In some embodiments, the via pillar 500b may only fill the second via hole and the opening 312 of the annular ring structure 311 of the connection pad 310, and the windowed pad 510 may not be formed in the first media layer 400, and the inner circuit conduction may be realized only by the via pillar 500b. As shown in FIG. 2, the top surface of the via pillar 500b may be higher than the top surface of the second media layer. In some embodiments, the top surface of the via pillar 500b may be flush with the top surface of the second media layer.

[0025] In some embodiments, the thickness of the first medium layer 400 may be greater than the thickness of the second medium layer 200, thereby better encapsulating the components and providing a "plastic package" like function.

[0026] The first media layer 400 and / or the second media layer 200 may be a resin film or a liquid packaging material, such as RCC, RCF or ABF.

[0027] The via pillar 500b / interlayer via pillar 140 referred to in this embodiment may include at least one copper pillar with a through via hole as an IO channel, thereby realizing conduction between layers, and the sizes and / or shapes of the multiple copper pillars with through via holes may be the same or different, and the copper pillar with a through via hole may be a solid copper pillar or a hollow pillar with copper plating on the surface.

[0028] It should be noted that certain embodiments of the present application have been described above, and other embodiments are within the scope of the following claims.

[0029] Referring to FIG. 3(a) to FIG. 3(l), schematic cross-sectional views of intermediate structures at each step of a method for fabricating the component packaging substrate structure of FIG. 1 are shown.

[0030] The manufacturing method includes the following steps: Step (a) provides a first temporary mounting plate 600, as shown in Fig. 3(a). The material of the first temporary mounting plate 600 is not limited and can be specifically selected according to needs. For example, metallic aluminum, copper, stainless steel, FR4 resin material, etc. can be selected.

[0031] 3(b), the component 300 is attached to the first temporary placement plate 600 - step (b). Generally, an adhesive film 610 may be formed on the surface of the first temporary placement plate 600, and then the component 300 may be attached thereto.

[0032] In general, bonding the component 300 to the first temporary mounting plate 600 may specifically include the following sub-steps. (b1) An adhesive film 610 is formed on the first temporary placement plate 600. In general, one layer of adhesive film 610 may be formed on one side of the first temporary placement plate 600 by a coating or film pressing method. The material of the adhesive film 610 may be a double-sided tape or an adhesive resin film, etc.

[0033] (b2) The component 300 is attached to a predetermined position on the adhesive film 610, and the terminal surface of the component 300 is attached to the adhesive film 610 to fix the component 300 and prevent misalignment. In general, the component 300 may be attached to a predetermined position on the first temporary mounting plate 600 by alignment, whereby the component can be temporarily fixed to the surface of the first temporary mounting plate 600 by the adhesive film 610.

[0034] Next, as shown in Fig. 3(c), the first medium layer 400 and the second temporary mounting plate 700 are laminated onto the surface of the part 300 - step (c). In general, this step may include the following sub-steps. (c1) Laminate the first medium layer 400 on the surface of the component 300. In general, an insulating layer is placed on the surface of the first temporary mounting plate 600 on which the component 300 is attached, and the first medium layer 400 is formed after pressure bonding, so as to provide packaging protection for the component. The first medium layer 400 can be selected from resin films or liquid packaging materials, such as RCC, RCF, or ABF. In some embodiments, the thickness of the first medium layer 400 exceeds the thickness of the component 300, and the component 300 can be embedded in the first medium layer 400.

[0035] (c2) A second temporary mounting plate 700 is laminated on the surface of the first medium layer 400, and the second temporary mounting plate 700 includes a support plate 710, a second copper layer 720, and a first copper layer 730 which are sequentially laminated on the support plate 710. In general, the first copper layer 730 is bonded to the first medium layer 400. The second temporary mounting plate 700 can be used to support the packaged components 300 after the first temporary mounting plate 600 is separated. The material of the second temporary mounting plate 700 can be selected from metals such as aluminum, copper, stainless steel, or FR4 resin. The first copper layer 730 and the second copper layer 720 can be bonded by physical pressure bonding, so that the first copper layer 730 and the second copper layer 720 can be easily separated to remove the second temporary mounting plate 700.

[0036] 3(d), the first temporary mounting plate 600 is removed to expose the terminal faces of the components 300 and the first surface of the first medium layer 400--step (d). Generally, the first temporary mounting plate 600 and the adhesive film 610 can be removed by a separator.

[0037] Then, as shown in Fig. 3(e), a connection pad 310 is formed on the first surface, which is connected to a terminal of the component 300, and the connection pad 310 has an annular ring structure 311 - step (e). In general, the process of forming the connection pad 310 may be: preparing a seed layer - preparing a circuit pattern - electroplating the circuit pattern - film peeling - etching, and includes the following sub-steps: (e1) forming a metal seed layer on the first surface. Generally, the metal seed layer can be formed by a sputtering process. The material of the metal seed layer is not specifically limited and can be determined according to actual needs, and generally can be titanium, copper, or titanium copper.

[0038] (e2) A pattern with windows is formed on the surface of the metal seed layer to create the connection pads 310. In general, the pattern with windows can be created by applying a photoresist layer on the surface of the metal seed layer.

[0039] As shown in part (e3)A, electroplating is performed in the windowed pattern to form a connection pad 310. The connection pad 310 has an annular ring structure 311, and the annular ring structure 311 has an opening 312, and its enlarged cross-sectional view is shown in FIG. 3(f). The opening 312 may be provided in the center of the annular ring structure 311, that is, the center of the connection pad 310 has an opening 312, which can satisfy the connection between the connection pad 310 (i.e., the pin fan-out circuit) of the I / O connection terminal of the flip chip and the circuit layer (i.e., the circuit layer of the substrate) of the subsequent circuit board 100. The opening 312 of the connection pad 310 can be designed according to the size requirement of the laser hole diameter.

[0040] (e4) The photoresist layer is subjected to a film stripping process to remove the photoresist layer.

[0041] (e5) Etching process.

[0042] Then, as shown in FIG. 3(g), the circuit board 100 is prepared - step (f). Alternatively, the circuit board 100 is formed before any of steps (a) to (e). The circuit board 100 includes at least one circuit layer on the surface. It will be understood that the circuit layer is provided at least on the surface of the circuit board 100 close to the component 300, thereby conducting and interconnecting with the component 300. The number of circuit layers can be specifically set according to the needs of actual use. For example, the circuit layer may include a first circuit layer 110 and a second circuit layer 120 provided on the side of the circuit board 100 far from the component 300 (i.e., the lower surface of the circuit board 100) and the side of the circuit board 100 close to the component 300 (i.e., the upper surface of the circuit board 100), respectively. In some embodiments, as shown in FIG. 3(g), the circuit layer may further include a third circuit layer 130 provided between the first circuit layer 110 and the second circuit layer 120. Correspondingly, the circuit board 100 can be set to 1.5 layers, 2 layers or more layers. It should be understood that a corresponding interlayer via pillar 140 may be provided between two adjacent circuit layers. The number of the interlayer via pillars 140 can be set to one or more, and can be determined according to needs.

[0043] 3(h), a second medium layer 200 and a circuit board 100 are laminated on the first surface, the circuit board 100 including at least one circuit layer, and the second temporary mounting plate 700 is removed to expose a second surface of the first medium layer 400 remote from the terminal surface - step (g). In general, the packaged component 300 may be flip-chip mounted on the circuit board 100. The material of the second medium layer 200 may be selected from resin film or liquid packaging material, such as RCC, RCF or ABF.

[0044] In some embodiments, the physical bond between the first copper layer 730 and the second copper layer 720 can be exploited to separate the first copper layer 730 and the second copper layer 720 by simply tearing them apart, and then the first copper layer 730 can be etched away to completely remove the second temporary mounting plate 700.

[0045] 3(i), a stepped hole 530 is formed, the stepped hole 530 including a first via hole 410 penetrating the first medium layer 400, an opening 312 of the annular ring structure 311, and a second via hole 210 penetrating the second medium layer 200 - step (h). It can be understood that the first via hole 410, the second via hole 210, and the opening 312 may be arranged coaxially in a direction perpendicular to the circuit board 100, and the first via hole 410 and the second via hole 210 are stepped. In general, this step may include the following sub-steps. (h1) As shown in Fig. 3(j), the first medium layer 400 is treated with a laser to form first via holes 410 penetrating the first medium layer 400, as shown in Fig. 3(k). The diameter of the first via holes 410 may be larger than the hole diameter of the annular ring structure 311. The number of the first via holes 410 may correspond to the number of the connection pads 310 of the component 300.

[0046] (h2) Referring to Fig. 3(l), the second medium layer 200 is treated with a laser to form a second via hole 210 penetrating the second medium layer 200. The positions of the first via hole 410 and the second via hole 210 corresponding to the same annular ring structure 311 correspond to each other. As a result, referring to Fig. 3(i), the first via hole 410, the opening 312 of the annular ring structure 311, and the second via hole 210 form a stepped hole 530 in the vertical direction, forming a passage that communicates between the component 300 and the circuit board 100.

[0047] 1 or 2, the stepped holes 530 are filled to form via pillars 500b for electrically connecting the connection pads 310 of the components 300 to the circuit layers on the surface of the circuit board 100, and the via pillars 500b electrically connect the connection pads 310 to the circuit layers through at least the openings 312 and the second via holes 210--step (i). The number of the via pillars 500b may correspond to the number of the annular ring structures 311. In general, this step may include the following substeps. (i1) Electroplating is performed on the first via hole 410 and the second via hole 210 to form a via pillar penetrating the first via hole 410 and the second via hole 210, to obtain the structure shown in Figure 1. In the first media layer 400, the via pillar 500b includes a windowed pad 510.

[0048] In some embodiments, the method may further include a sub-step (i2), which is to remove the windowed pad 510 and form a via pillar 500b that passes only through the second via hole 210 and the opening 312, to obtain the structure shown in Fig. 2. Generally, blind drilling may be performed by a mechanical deep hole drilling method to remove the local metal of the stepped hole 530, for example, to remove the windowed pad 510 in the first via hole 410 or to remove a part of the windowed pad 510 in the first via hole 410, thereby conducting only the inner circuit.

[0049] The component packaging substrate structure and its manufacturing method provided by the embodiment of the present application embeds the component 300 after completing the circuit substrate 100 (i.e., substrate), so that the embedding process of the component 300 is postponed, and the stepped hole 530 realizes the electrical connection between the component 300 and the substrate circuit, avoiding the scrapping of the component due to the failure of the substrate circuit, and improving the yield rate of the packaging of the component 300. The stepped hole 530 realizes the electrical connection between the component 300 and the inner circuit and the back fan-out of the component 300, and has a high degree of freedom in wiring, so that the packaging of multiple components can be realized and the integration degree of the packaging can be improved. The via pillar in the stepped hole realizes the electrical connection and interconnection, which can shorten the length of the signal circuit and reduce the signal loss during transmission.

[0050] In some cases, the actions or steps recited in the claims may be performed in a different order than in the examples given above and still achieve the desired results. Also, the processes illustrated in the figures do not necessarily require the particular order or sequence shown to achieve the desired results. In some embodiments, multitasking and parallel processing may be or may be useful.

[0051] Those skilled in the art will understand that the discussion of any of the above embodiments is merely illustrative, and does not imply that the scope of the present application (including the claims) is limited to these examples. Within the spirit of the present application, the technical features of the above embodiments or different embodiments may be combined with each other, steps may be performed in any order, and there may be many other variations of different aspects of the above embodiments of the present application, which are not provided in the detailed description for the sake of simplicity.

[0052] Also, for ease of explanation and discussion, and to avoid obscuring the understanding of the embodiments of the present application, the drawings provided may or may not show known power / ground connections of integrated circuit (IC) chips and other components. Also, to avoid obscuring the understanding of the embodiments of the present application, devices may be shown in block diagram form, and this takes into consideration the following fact: The details of the embodiment of these block diagram devices are highly dependent on the platform on which the embodiments of the present application are implemented (i.e., these details are entirely within the understanding of those skilled in the art). When details (e.g., circuits) are specifically stated to describe the exemplary embodiments of the present application, it will be apparent to those skilled in the art that the embodiments of the present application can be implemented without these details or with changes in these details. Therefore, these descriptions are for illustrative purposes, not for limiting purposes.

[0053] Although the present application has been described using specific embodiments of the present application, many permutations, modifications, and variations of these embodiments will be apparent to those skilled in the art in light of the above description. For example, the embodiments discussed can be used in other memory architectures (e.g., dynamic RAM (DRAM)).

[0054] The embodiments of the present application are intended to include all such replacements, amendments and modifications that fall within the broad scope of the claims, and therefore any omissions, amendments, equivalent replacements, improvements, etc. that fall within the spirit and principles of the embodiments of the present application are intended to be included within the scope of the claims of the present application. [Explanation of symbols]

[0055] 100 circuit board, 110 first circuit layer, 120 second circuit layer, 130 third circuit layer, 140 interlayer via pillar, 200 second medium layer, 210 second via hole, 300 component, 310 connection pad, 311 annular ring structure, 312 opening, 400 first medium layer, 410 first via hole, 500b via pillar, 510 windowed pad, 530 stepped hole, 600 first temporary mounting plate, 610 adhesive film, 700 second temporary mounting plate, 710 support plate, 720 second copper layer, 730 first copper layer

Claims

1. 1. A method for making a component packaging substrate structure, comprising: Providing a first temporary placement plate; Attaching a component to the first temporary placement plate; applying a first medium layer to the first temporary placement plate and embedding the component in the first medium layer; providing a second temporary mounting plate to the first medium layer; removing the first temporary mounting plate to expose a terminal surface of the component and a first surface of the first medium layer; forming a connection pad on the first surface for connection to a terminal of the component, the connection pad including an annular ring structure; laminating a second medium layer on the first surface and laminating a circuit board on the second medium layer, the circuit board including a circuit layer on the surface to which the second medium layer is attached; removing the second temporary mounting plate to expose a second surface of the first medium layer; drilling a stepped hole in the second surface, the stepped hole including a first via hole passing through the first medium layer, an opening in an annular ring structure of the connection pad, and a second via hole passing through the second medium layer, the first via hole, the opening, and the second via hole exposing the circuit layer; a step of electroplating the stepped hole to form a via pillar, the via pillar providing electrical continuity between the connection pad and the circuit layer.

2. 2. The method of claim 1, further comprising forming a pad in the first media layer that is connected to the via pillar.

3. The method of claim 2 , further comprising removing a portion of the via pillar in the first via hole.

4. forming a connection pad on the first surface to be connected to a terminal of the component, forming a metal seed layer on the first surface; forming a pattern in the metal seed layer with windows for creating connection pads; 2. The method of claim 1, further comprising electroplating within the windowed pattern to form the connection pads.

5. 2. The method of claim 1, wherein the circuit board is a multi-layer board having at least one circuit layer.

6. The bonding of the component to the first temporary mounting plate includes: Forming an adhesive film on the first temporary placement plate; The method according to claim 1, further comprising: attaching the component to a predetermined position on the adhesive film; and attaching a terminal surface of the component to the adhesive film.

7. The method according to claim 1, characterized in that the second temporary mounting plate includes a support plate, a second metal layer on the support plate, and a first metal layer physically pressed onto the second metal layer, the first metal layer being laminated onto the first medium layer.

8. 8. The method of claim 7, wherein the first metal layer and the second metal layer comprise copper layers.

9. 8. The method of claim 7, wherein the support plate is selected from the group consisting of plastic, aluminum, stainless steel, and copper.

10. A component packaging substrate structure, comprising: a circuit board having a surface with a circuit layer; a second medium layer provided in the circuit layer of the circuit board and including a second via hole penetrating the second medium layer and exposing the circuit layer; a component, a terminal surface of the component facing the second medium layer, a connection pad connected to a terminal of the component being provided on the terminal surface, the connection pad including an annular ring structure having an opening, the opening exposing the second via hole; a first medium layer provided on the second medium layer and embedding the component therein, the first medium layer including a first via hole penetrating the first medium layer and exposing the opening; A component packaging substrate structure comprising at least a via pillar that fills the second via hole and an opening of the connection pad to electrically connect the connection pad and the circuit layer.

11. The component packaging substrate structure according to claim 10 , wherein a pad connected to the via pillar is formed on the first medium layer.

12. The component packaging substrate structure according to claim 10 , wherein the circuit board comprises a multi-layer board having at least one circuit layer.

13. 11. The component packaging substrate structure according to claim 10, wherein the first via hole, the opening of the connection pad and the second via hole are coaxially arranged.

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