Flow Inverter and Power Semiconductor Components

Abstract

A flow inverter (1) for a refrigerant material (18) for a power semiconductor component (16) is identified, comprising a first plate (2) extending along a main extension plane of the flow inverter (1), a second plate (3) extending along the main extension plane, a first wall (4) provided on the first plate (2) and the second plate (3) from a first main surface of the flow inverter (1), and a second wall (5) provided on the first plate (2) and the second plate (3) from a second main surface of the flow inverter (1) opposite the first main surface, the first plate (2) being provided next to the second plate (3), at least one first recess (6) being provided between the first plate (2) and the second plate (3), and at least one second recess (7) being provided between the first plate (2) and the second plate (3). Additionally, a power semiconductor component (16) is identified.

Description

[Technical field]

[0001] The present disclosure relates to a flow inverter for a refrigerant material for a power semiconductor component, and to the power semiconductor component. [Background technology]

[0002] An embodiment of the present disclosure relates to a flow inverter that can provide improved cooling efficiency. Further embodiments of the present disclosure relate to a power semiconductor component. Summary of the Invention [Means for solving the problem]

[0003] This is achieved by the subject matter of the independent claims. Further embodiments are evident from the dependent claims in the following description.

[0004] A first aspect relates to a flow inverter for a coolant material for a power semiconductor component. The term "power" herein and hereinafter refers to power semiconductor components, power semiconductor modules, and / or power semiconductor chips adapted to handle, for example, voltages and currents of more than 100V and / or more than 10A, illustratively voltages up to 6.5kV and currents up to 3600A amperes.

[0005] The coolant material may be, for example, a liquid coolant or a gas coolant. Illustratively, heat generated during operation of the power semiconductor module can be effectively dissipated through the coolant material.

[0006] The flow inverter, for example, has a main plane of extension, the lateral direction is aligned parallel to the main plane of extension, and the vertical direction is aligned perpendicular to the main plane of extension.

[0007] According to one embodiment, the flow inverter comprises a first plate extending along a main extension plane of the flow inverter. For example, the first plate extends substantially along a transverse direction. In this specification and below, "substantially" means that the first plate can form an angle of at most 30° or 15°, for example 5° or 1°, with the main extension plane. Illustratively, the first plate extends parallel to the transverse direction.

[0008] For example, the first plate includes or consists of a metal or a polymer. Illustratively, the metal is a weldable metal.

[0009] According to one embodiment, the flow inverter comprises a second plate extending along the main extension plane. For example, the second plate extends substantially along a transverse direction. In this specification and below, "substantially" means that the second plate can form an angle of at most 30° or 15°, for example 5° or 1°, with the main extension plane.

[0010] Illustratively, the first plate and the second plate include or consist of the same material, i.e., the second plate includes or consists of the metal or polymer of the first plate. For example, the first plate and the second plate are integrally formed. Alternatively, the first plate and the second plate include different materials.

[0011] According to one embodiment, the flow inverter comprises a first wall disposed on the first plate and the second plate from a first major surface of the flow inverter, the first wall illustratively extending in a vertical direction from a top surface of the first plate facing away from the first plate.

[0012] The first wall illustratively comprises or consists of a metal or a polymer. For example, the first wall comprises the same material as the first plate. Alternatively, the first wall comprises a different material than the first plate.

[0013] The first wall may, for example, be integrally formed with the first plate. Alternatively, the first wall may be welded to the first plate or the first wall may be secured to the first plate by other joining methods.

[0014] According to one embodiment, the flow inverter comprises a second wall disposed on the first plate and the second plate from a second major surface of the flow inverter opposite the first major surface, the first wall illustratively extending in a vertical direction from a bottom surface of the second plate facing away from the second plate.

[0015] That is, the first plate has a top surface and a bottom surface arranged opposite to each other. The top surface of the first plate and the bottom surface of the first plate are connected via the side surface of the first plate. Furthermore, the second plate has a top surface and a bottom surface arranged opposite to each other. The top surface of the second plate and the bottom surface of the second plate are connected via the side surface of the second plate. The top surface of the first plate is arranged opposite to the bottom surface of the second plate.

[0016] For example, the first plate and the second plate are connected to each other by a first wall and a second wall. For example, the first wall is provided on the first plate in a lateral region of the flow inverter, and the first wall is provided on the second plate in a central region of the flow inverter. Exemplarily, the second wall is provided on the first plate in a central region of the flow inverter, and the second wall is provided on the second plate in a lateral region of the flow inverter. That is, in the extension direction of the flow inverter, the first wall protrudes laterally beyond the first plate, and the second wall protrudes laterally beyond the second plate.

[0017] According to an embodiment of the flow inverter, the first plate is provided next to the second plate. Exemplarily, the first plate is directly adjacent to the second plate. For example, the second plate and the first plate are arranged successively next to each other in the extension direction of the flow inverter, for example in the order shown. For example, the first plate and the second plate are in direct contact with each other. Exemplarily, the first plate and the second plate are connected to each other in a mechanically stable manner.

[0018] According to one embodiment of the flow inverter, at least one first recess is provided between the first plate and the second plate.

[0019] According to a further embodiment of the flow inverter, the at least one first recess is provided in a central region of the flow inverter.

[0020] Exemplarily, the second plate includes a first recess in a central region of the flow inverter. For example, the first recess completely penetrates the second plate vertically from the top surface to the bottom surface. The central region is positioned in a region between the first plate and the second plate. Further, the central region has a distance to, for example, a side surface that defines the flow inverter.

[0021] According to an embodiment of the flow inverter, at least one second recess is provided between the first plate and the second plate.

[0022] According to a further embodiment of the flow inverter, the at least one second recess is provided in at least one lateral region of the flow inverter.

[0023] For example, the first plate includes at least one second recess in at least one lateral region of the flow inverter. Illustratively, the at least one second recess completely penetrates the first plate vertically from the top surface to the bottom surface. The at least one lateral region is positioned in at least one side region defining the flow inverter. Further, the at least one lateral region is, for example, directly adjacent to at least one side of the flow inverter.

[0024] In summary, such a flow inverter for a coolant material for power semiconductor components, with such a first recess and at least one second recess, can provide, inter alia, the following advantages: If such a flow inverter is used in a cooling chamber in which the power semiconductor modules are arranged, the power semiconductor modules can be effectively cooled, as will be explained in more detail below, so that the current rating is advantageously achieved. Exemplarily, only the cooling of the last power semiconductor module in the row is improved, which power semiconductor module defines the maximum permissible losses and thus the current capability of the complete setup. Furthermore, the uniformity of the cooling of all power semiconductor modules can be improved. This is also advantageous with regard to a reduced demand on the power modules and a higher reliability. As a result, costs are reduced due to the opportunity to reduce the number of chips in the power modules.

[0025] The positive effect can be evident in low flow regions where the temperature rise of the coolant material is very high. For example, in a situation where the low coolant material temperature is below 0°C at the inlet port, such a temperature rise of over 60K can occur between the outlet and inlet ports.

[0026] According to a further embodiment of the flow inverter, the first plate and the second plate extend parallel to each other. For example, the first plate and the second plate extend in a common plane. Exemplarily, the common plane extends laterally parallel.

[0027] According to a further embodiment of the flow inverter, the first wall extends completely along a width of the first plate, the width of the first plate being exemplarily defined by a minimum extent of the first plate in a lateral direction perpendicular to the extension direction.

[0028] In this embodiment, the first wall extends completely from the first side of the first plate to the second side of the first plate. The first side of the first plate is illustratively disposed opposite the second side of the first plate. The first side and / or the second side can extend parallel to the extension direction. Alternatively, the first side and / or the second side can be at an angle to the extension direction.

[0029] The second plate includes a first side extending in the extension direction and a second side extending in the extension direction. The first side of the second plate is illustratively disposed opposite the second side of the second plate. Furthermore, the first side of the first plate and the second plate extend in a common direction, and the second side of the first plate and the second plate further extend in a common direction.

[0030] Illustratively, the flow inverter comprises a first side defining the flow inverter in a first lateral region formed from the first side of the first plate and the first side of the second plate, and further comprises a second side defining the flow inverter in a second lateral region formed from the second side of the first plate and the second side of the second plate.

[0031] For example, the first wall terminates flush with the first side of the first plate and the second side of the first plate.

[0032] According to a further embodiment of the flow inverter, the second wall extends completely along a width of the second plate, the width of the second plate being exemplarily defined by a minimum extent of the second plate in a lateral direction perpendicular to the extension direction.

[0033] In this embodiment, the second wall extends completely from the first side of the second plate to the second side of the second plate, e.g., the second wall terminates flush with the first side of the second plate and the second side of the second plate.

[0034] According to a further embodiment of the flow inverter, the first wall has a first curved shape in plan view, for example the first curved shape has the form of a semicircle, half a polygon, or a triangle with no base.

[0035] For example, the first wall comprises at least two first partial walls connected to each other. When there are two partial walls, the connecting portion is located in the middle portion. Each of the at least two first partial walls extends laterally in a straight or curved manner. For example, the at least two first partial walls form an angle with each other of less than 180°, illustratively 160°. For example, the angle formed by the at least two first partial walls faces the first plate.

[0036] For example, the first wall comprises three or more first partial walls. The directly adjacent first partial walls form an angle of less than 180° with respect to each other. The angles formed by the directly adjacent first partial walls can be different from each other. For example, the first partial wall and the respective angles formed by the directly adjacent first partial walls are formed symmetrically with respect to the extension direction extending through the central region. Alternatively, the first partial wall and the respective angles formed by the directly adjacent first partial walls are formed asymmetrically with respect to the extension direction extending through the central region.

[0037] For example, the first wall comprises an even number of first partial walls, for example four first partial walls. Alternatively, the first wall comprises an odd number of first partial walls, for example three first partial walls.

[0038] According to a further embodiment of the flow inverter, an outer surface of the first curved shape faces the second plate. The first curved shape illustratively comprises an outer surface and an inner surface opposite the outer surface. The inner surface faces in a direction toward a center of the first curved shape.

[0039] The shape of the first wall effectively directs the refrigerant material to the side regions of the flow inverter.

[0040] According to a further embodiment of the flow inverter, the region of the first curved shape with the greatest curvature faces the second plate. For example, the region of the first curved shape with the greatest curvature is positioned in the central region. Exemplarily, directly adjacent first partial walls in the central region form the smallest angle and therefore have the greatest curvature.

[0041] According to a further embodiment of the flow inverter, the second wall has a second curved shape in plan view, for example the second curved shape has the shape of a semicircle or half of a polygon.

[0042] For example, the second wall comprises at least two second partial walls connected to each other. Each of the at least two second partial walls extends laterally in a straight or curved manner. For example, the at least two second partial walls form an angle of less than 180° with each other, illustratively 160°. For example, the angle formed by the at least two second partial walls faces the second plate.

[0043] For example, the second wall comprises three or more second partial walls. Directly adjacent second partial walls form an angle of less than 180° with respect to each other. The angles formed by the directly adjacent second partial walls can be different from each other. For example, the second partial wall and the respective angles formed by the directly adjacent second partial walls are formed symmetrically with respect to the extension direction extending through the central region. Alternatively, the second partial wall and the respective angles formed by the directly adjacent second partial walls are formed asymmetrically with respect to the extension direction extending through the central region.

[0044] For example, the second wall comprises an even number of first partial walls, for example four second partial walls. Alternatively, the second wall comprises an odd number of first partial walls, for example three second partial walls.

[0045] According to a further embodiment of the flow inverter, an outer surface of the second curved shape faces towards the first plate. The second curved shape illustratively comprises an outer surface and an inner surface opposite the outer surface.

[0046] The shape of the second wall effectively directs the refrigerant material towards a central region of the flow inverter.

[0047] According to a further embodiment of the flow inverter, the region of the second curved shape with the greatest curvature faces the first plate. For example, the region of the second curved shape with the greatest curvature is positioned in at least one lateral region. Exemplarily, directly adjacent second partial walls in the at least one lateral region form the smallest angle and thus have the greatest curvature.

[0048] According to a further embodiment of the flow inverter, two second recesses are provided between the first and second plates in two opposing lateral regions of the flow inverter, for example a central region is arranged perpendicular to the extension direction between the two opposing lateral regions, illustratively between the first and second lateral regions of the flow inverter.

[0049] According to a further embodiment of the flow inverter, the first recess is provided between two second recesses, for example a first of the two second recesses is provided in a first lateral region and a second of the two second recesses is provided in a second lateral region.

[0050] According to a further embodiment of the flow inverter, the first wall and the second wall at least partially overlap each other in a plan view and at least partially define a first recess and at least one second recess. For example, the first wall and the second wall have two overlapping points in a plan view. The overlapping points define the extent of the first recess in a lateral direction perpendicular to the extension direction in the central region. Furthermore, the first wall and the second wall define the extent of the first recess in a lateral direction perpendicular to the extension direction in the central region. That is, the first recess is defined by the first wall and the second wall in the central region.

[0051] One of the overlapping points and the first side or the second side of the flow inverter closer to the overlapping point define an extent of at least one second recess in a lateral direction perpendicular to the extension direction in a plan view. Additionally, the second wall and the first wall define an extent of at least one second recess in a lateral direction of the extension direction in at least one lateral region.

[0052] According to a further embodiment of the flow inverter, the first recess is provided in the first wall on a side facing the first plate.

[0053] According to a further embodiment of the flow inverter, at least one second recess is provided in the first wall on a side facing the second plate.

[0054] A second aspect relates to a power semiconductor component that may comprise a flow inverter as described herein above, and therefore features as described in relation to the flow inverter are also applicable to the power semiconductor component and vice versa.

[0055] According to one embodiment, the power semiconductor component comprises at least two power semiconductor modules, each power semiconductor module being connected to a respective cooling structure. For example, each power semiconductor module comprises a bottom surface on which one of the cooling structures is provided. Exemplarily, in a plan view, each cooling structure at least partially or completely overlaps with the respective power semiconductor module.

[0056] Each power semiconductor module is illustratively in direct contact with the cooling structure. Alternatively, a bonding layer is disposed between each power semiconductor module and the cooling structure. Each cooling structure is configured, for example, to increase the area of ​​the bottom surface of the respective power semiconductor module. For example, the cooling structure includes or consists of copper, aluminum, or a composite material including AlSiC or MgSiC.

[0057] For example, each cooling structure includes a plurality of pin fins. For example, one pin fin of the cooling structure faces away from each power semiconductor module in the vertical direction. Each pin fin is formed, for example, from a pillar extending in the vertical direction. Illustratively, all the pin fins have a common extension direction parallel to the vertical direction. For example, each pillar has a conical or cylindrical shape.

[0058] Alternatively, each cooling structure comprises a lamella or rib structure. Each lamella extends vertically with an end pointing away from the power semiconductor module. Furthermore, each lamella extends laterally across the width or length of the respective power semiconductor module. Each lamella or each rib is illustratively straight or each lamella or each rib has a particular shape, for example a wavy or zigzag shape, or an irregular shape.

[0059] According to one embodiment, the power semiconductor component comprises a cooling chamber having an inlet port and an outlet port. For example, the cooling chamber comprises a cover and at least two side walls, a front, a rear and a bottom, forming a cooling cavity. Illustratively, the at least two side walls are laterally connected via the front and the rear. Illustratively, the cover and the bottom are vertically connected via the at least two side walls, the front and the rear.

[0060] For example, the cooling structure is part of a power semiconductor module. In this case, the cooling chamber, e.g. a cover, comprises at least two openings, on each of which one of the power semiconductor modules with one of the cooling structures is arranged, each cooling structure protruding through a respective opening.

[0061] Alternatively, the cooling structure is part of the cooling chamber. In this case, all of the cooling structure is illustratively part of the cover. For example, the cooling structure is integrally formed with the cooling chamber. Illustratively, the cooling chamber is a closed cooler.

[0062] One of the at least two cooling structures may protrude into the cooling chamber through the at least one opening, and another of the at least two cooling structures may be integrally formed with the cooling chamber.

[0063] According to an embodiment of the power semiconductor component, the cooling chamber is adapted to a flow direction of the coolant material in the cooling chamber from the inlet port to the outlet port, the flow direction of the coolant material being, for example, parallel to the extension direction of the flow inverter, and furthermore, the flow direction of the coolant material being, for example, parallel to the main extension direction of the cooling chamber, i.e. along the main extension direction of the side walls, the cover and the bottom.

[0064] Exemplarily, the inlet port is provided at the front and the outlet port is provided at the rear. Alternatively, the inlet and outlet ports are provided at the bottom. For example, the inlet port is provided at the bottom in a region closer to the front and the outlet port is provided at the bottom in a region closer to the rear.

[0065] According to an embodiment of the power semiconductor component, each of the at least two cooling structures is provided in the cooling chamber in succession in the direction of the flow direction, for example each of the at least two cooling structures extends vertically in the cooling chamber, i.e. in the cavity, for example the cooling structures extend in a direction from the plane of the cover towards the bottom in the cavity.

[0066] Illustratively, a gap is formed between the cooling structures, for example between the ends of the cooling structures and the bottom of the cooling chamber. That is, a bottom portion of the cooling chamber close to the bottom is free of the cooling structures. The gap has a vertical height of, for example, up to 2 mm, for example 0.8 mm. Alternatively, there is no gap and the cooling structures are in direct contact with the bottom of the cooling chamber.

[0067] For example, each cooling structure is configured to create a flow resistance to the coolant material flowing from the inlet port to the outlet port, such that the flow resistance is higher in the top portion, where the cooling structures are located, closer to the cover than in the bottom portion, where no cooling structures are located, i.e., the velocity of the coolant material is faster in the bottom portion than in the top portion.

[0068] According to one embodiment of the power semiconductor component, the cooling chamber comprises a flow inverter arranged between two of the at least two cooling structures. If the power semiconductor component comprises more than two power semiconductor modules and thus more than two coolant structures, the flow inverter is arranged between two adjacent cooling structures closer to the outlet port. Exemplarily, the flow inverter is arranged between two adjacent cooling structures closest to the outlet port.

[0069] For example, the power semiconductor component may include two or more flow inverters, each of which is illustratively provided between two adjacent cooling structures. In this case, each flow inverter has the same shape. Alternatively, at least one of the flow inverters is different from the remaining flow inverters.

[0070] Illustratively, the flow inverter is part of the cooling chamber, in which case the flow inverter is an integral part of the cooling chamber.

[0071] Alternatively, the flow inverter can be mounted as a separate part in the cooling chamber, in which case it is welded, for example by a laser welding process, brazed or glued in the cooling chamber, or alternatively, it is clamped or simply placed in the cooling chamber.

[0072] Illustratively, a first major surface of the flow inverter faces the cover of the cooling chamber and a second major surface of the flow inverter faces the bottom of the cooling chamber.

[0073] According to a further embodiment of the power semiconductor component, the flow inverter is configured to redirect the coolant material flowing in the flow direction in a bottom part of the cooling chamber before the flow inverter to an upper part of the cooling chamber after the flow inverter in the flow direction.

[0074] According to a further embodiment of the power semiconductor component, the flow inverter is configured to redirect the refrigerant material flowing in an upper part of the cooling chamber before the flow inverter in the flow direction to a region closer to a bottom part of the cooling chamber after the flow inverter in the flow direction.

[0075] Exemplarily, the refrigerant material has a temperature gradient in the vertical direction. For example, the refrigerant material has a first average temperature in an upper portion of the cooling chamber before the flow inverter in the flow direction and a second average temperature in a bottom portion of the cooling chamber before the flow inverter in the flow direction. Exemplarily, the first average temperature is higher than the second average temperature because the cooling structure dissipates more heat to the refrigerant material in the upper portion. Advantageously, the flow inverter is configured to vertically invert portions of the refrigerant material having different average temperatures.

[0076] Exemplarily, a portion of the refrigerant material with a higher average temperature flowing through the top portion in the flow direction before the flow inverter is blocked by a first wall, which directs the refrigerant material to the at least one second recess, and a portion of the refrigerant material with a lower average temperature flowing through the bottom portion in the flow direction before the flow inverter is blocked by a second wall, which directs the refrigerant material to the at least one first recess.

[0077] A portion of the refrigerant material directed to the at least one second recess is redirected in the flow direction after the flow inverter to a bottom portion of the cooling chamber, and a portion of the refrigerant material directed to the first recess is redirected in the flow direction after the flow inverter to an upper portion of the cooling chamber.

[0078] Furthermore, a portion of the refrigerant material directed to the first recess is redirected in the flow direction after the flow inverter towards a central portion of the cooling chamber, and a portion of the refrigerant material directed to the at least one second recess is redirected in the flow direction after the flow inverter towards a lateral portion of the cooling chamber.

[0079] Advantageously, the power semiconductor module arranged after the flow inverter in the flow direction can be cooled more effectively due to such reversal of the coolant material in the top and bottom parts compared to an arrangement without a flow inverter. Exemplarily, a more uniform cooling is achieved, e.g. the cooling of the last power semiconductor module in the flow direction, which defines the maximum permissible current of the complete setup.

[0080] According to a further embodiment of the power semiconductor component, the flow inverter of the power semiconductor component is a flow inverter as described herein above.

[0081] According to a further embodiment of the power semiconductor component, the first plate is closer to the outlet port and the second plate is closer to the inlet port, i.e. the extension direction of the flow inverter faces in the flow direction.

[0082] According to a further embodiment of the power semiconductor component, the first plate extends parallel to the cover and to the bottom of the cooling chamber.

[0083] According to a further embodiment of the power semiconductor component, the second plate extends parallel to the cover and to the bottom of the cooling chamber.

[0084] According to a further embodiment of the power semiconductor component, the first wall extends perpendicularly to the cover and the bottom of the cooling chamber. Alternatively, the first wall extends obliquely to the cover and the bottom of the cooling chamber.

[0085] According to a further embodiment of the power semiconductor component, the second wall extends perpendicularly to the cover and the bottom of the cooling chamber. Alternatively, the second wall extends obliquely to the cover and the bottom of the cooling chamber.

[0086] According to a further embodiment of the power semiconductor component, the first wall extends from the first side of the cooling chamber to the second side of the cooling chamber. Illustratively, the first side of the flow inverter is in direct contact with the first side of the cooling chamber. Furthermore, the second side of the flow inverter is in direct contact with the second side of the cooling chamber. For example, due to manufacturing tolerances, the first wall is in only partial direct contact with the first side of the cooling chamber and the second side of the cooling chamber. Alternatively, the first wall is not in direct contact with the first side of the cooling chamber and the second side of the cooling chamber.

[0087] For example, the first wall extends to a cover of the cooling chamber. Illustratively, the first wall is in direct contact with the cover of the cooling chamber. For example, the first wall is in direct contact with the cover of the cooling chamber at least partially due to manufacturing tolerances. Alternatively, the first wall is not in direct contact with the cover of the cooling chamber.

[0088] According to a further embodiment of the power semiconductor component, the second wall extends from the first side of the cooling chamber to the second side of the cooling chamber. For example, due to manufacturing tolerances, the second wall is only partially in direct contact with the first side of the cooling chamber and the second side of the cooling chamber. Alternatively, the second wall is not in direct contact with the first side of the cooling chamber and the second side of the cooling chamber.

[0089] For example, the second wall extends to the bottom of the cooling chamber. Illustratively, the second wall is in direct contact with the bottom of the cooling chamber. For example, the second wall is in direct contact with the bottom of the cooling chamber at least partially due to manufacturing tolerances. Alternatively, the second wall is not in direct contact with the bottom of the cooling chamber.

[0090] That is, the flow inverter divides the cooling chamber, e.g., cavity, into a first portion closer to the inlet port and a second portion closer to the outlet port, illustratively the first and second portions being connected to each other only by the first recess and at least one second recess of the flow inverter.

[0091] Furthermore, methods for manufacturing power semiconductor components are described herein that are capable of or that manufacture power semiconductor components as described above, and therefore features relating to the power semiconductor components are also disclosed in relation to the methods and vice versa.

[0092] According to one embodiment of the method, at least two power semiconductor modules are provided, each connected to a respective cooling structure.

[0093] According to one embodiment of the method, a cooling chamber having an inlet port and an outlet port is provided.

[0094] According to one embodiment of the method, at least two power semiconductor modules are arranged on a cooling chamber.

[0095] According to one embodiment of the method, a flow inverter is disposed between two of the at least two cooling structures.

[0096] For example, the flow inverter may be integrally formed and disposed within the cooling cavity, in which case the flow inverter may be welded or glued to the cooling chamber, or alternatively the flow inverter may be clamped or simply placed within the cooling chamber.

[0097] Alternatively, the flow inverter is at least partially formed from a portion of the cooling chamber. For example, the first wall is part of the cover and / or the second wall is part of the bottom. The first wall and / or the second wall are illustratively welded, bonded, brazed or clamped to the first plate and / or the second plate. Furthermore, the first wall is illustratively welded, brazed or bonded to the cover or integrally formed therewith. Furthermore, the second wall is illustratively welded, brazed or bonded to the bottom or integrally formed therewith.

[0098] According to a further embodiment of the method, the flow inverter is configured to redirect the refrigerant material flowing in the flow direction in a bottom part of the cooling chamber before the flow inverter to an upper part of the cooling chamber after the flow inverter in the flow direction.

[0099] According to a further embodiment of the method, the flow inverter is configured to redirect the refrigerant material flowing in the flow direction in an upper part of the cooling chamber before the flow inverter to a region in the flow direction closer to a bottom part of the cooling chamber after the flow inverter.

[0100] According to a further embodiment of the method, the flow inverter is positioned in the cooling chamber by at least one of welding, soldering, clamping, brazing, gluing, or insertion as a separate piece.

[0101] The accompanying drawings are included to provide a further understanding. In the drawings, elements of the same structure and / or function may be referenced with the same reference numerals. It is understood that the embodiments shown in the drawings are illustrative representations and are not necessarily drawn to scale. [Brief description of the drawings]

[0102] [Figure 1] FIG. 2 is a three-dimensional schematic top view of a flow inverter according to an exemplary embodiment. [Diagram 2] FIG. 2 is a three-dimensional schematic bottom view of a flow inverter in accordance with an exemplary embodiment. [Diagram 3] 1 is a cross-sectional view of a flow inverter in accordance with an exemplary embodiment; [Figure 4] 1 is a cross-sectional view of a flow inverter in accordance with an exemplary embodiment; [Diagram 5] 1 is a cross-sectional view of a power semiconductor component according to an exemplary embodiment. [Figure 6] FIG. 2 is a three-dimensional schematic top view of a power semiconductor component according to an exemplary embodiment; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0103] The flow inverter 1 according to Fig. 1 comprises a first plate 2 and a second plate 3. The second plate 3 and the first plate 2 are arranged successively adjacent to one another along the extension direction D in the order shown. A first wall 4 is arranged on the first plate 2, for example at the edges of the first plate 2 from a first main face to two lateral regions 13 of the flow inverter 1, and on the second plate 3, for example at the edges of the second plate 3 from a second main face to a central region 12. Furthermore, a second wall 5 is arranged on the second plate 3 in the lateral regions 13 of the flow inverter 1 and on the first plate 2 in the central region 12 of the flow inverter 1.

[0104] The first plate 2 has a first side 8 and a second side 9, and the second plate 3 has a first side 10 and a second side 11. The first side 8 and the second side 9 of the first plate 2 are arranged opposite each other. Furthermore, the first side 10 and the second side 11 of the second plate 3 are arranged opposite each other. The first side 8 of the first plate and the first side 10 of the second plate form a first side of the flow inverter 1. Furthermore, the second side 9 of the first plate and the second side 11 of the second plate form a second side of the flow inverter 1. Both the first side of the flow inverter 1 and the second side of the flow inverter 1 extend along the extension direction D.

[0105] The first wall 4 extends completely from the first side 8 of the first plate to the second side 9 of the first plate. Additionally, the second wall 5 extends completely from the first side 10 of the second plate to the second side 11 of the second plate.

[0106] The first wall 4 comprises four first partial walls 14, where immediately adjacent first partial walls 14 are directly connected to one another, for example formed integrally. The immediately adjacent first partial walls 14 are angled with one another, where the angles are all the same. Thus, the first wall 4 has a first curved shape in plan view. In this exemplary embodiment, the first curved shape is half of an octagon. The outer surface of the first curved shape 30 faces the second plate 3.

[0107] A first recess 6 is provided between the first plate 2 and the second plate 3 in the central region 12. The first recess 6 completely penetrates the second plate 3 in the central region 12. Furthermore, two second recesses 7 are provided between the first plate 2 and the second plate 3. Each of the two second recesses 7 completely penetrates the first plate 2 in the side regions 13. The first recess 6 is provided between two second recesses 7 perpendicular to the extension direction D.

[0108] The first wall 4 and the second wall 5 at least partially overlap each other in a plan view and at least partially define a first recess 6 and two second recesses 7. Thus, the first recess 6 is defined by the first wall 4 and the second wall 5 in the central region 12.

[0109] According to Fig. 2, the second wall 5 comprises three second partial walls 15, where directly adjacent second partial walls 15 are directly connected to one another, for example formed integrally. Directly adjacent second partial walls 15 are angled with one another, where the angles are all the same. The second wall 5 therefore has a second curved shape in plan view. The outer surface of the second curved shape 31 faces towards the first plate 2.

[0110] Furthermore, in plan view, each second recess 7 is defined by a first wall 4 and a second wall 5 in a respective lateral region 13 and a protrusion on the outer surface of the flow inverter.

[0111] The flow inverter 1 according to figures 3 and 4 comprises a first plate 2 and a second plate 3, which extend in a common plane.

[0112] Each of the first wall 4 and the second wall 5 extends in a direction perpendicular to the extension direction D of the flow inverter 1 .

[0113] The first plate 2 and the second plate 3 as well as the first wall 4 and the second wall 5 are, for example, formed integrally.

[0114] The power semiconductor component 16 of FIG. 5 comprises three power semiconductor modules 17 each connected to a cooling structure 21 , each cooling structure 21 being part, for example an integral part, of a respective power semiconductor module 17 .

[0115] The power semiconductor modules 17 are provided on a cooling chamber (not shown in FIG. 5) which will be described in more detail in relation to FIG. 6, and the respective cooling structures 21 are provided in the cooling chamber. The cooling chamber has an inlet port 19 and an outlet port 20 (not shown in FIG. 5) which will be described in more detail in relation to FIG. 6. Furthermore, the cooling chamber is adapted for a flow direction FD of the coolant material 18 in the cooling chamber from the inlet port 19 to the outlet port 20.

[0116] The power semiconductor modules 17 are arranged in the cooling chamber successively along the flow direction FD. Thus, the cooling structures 21 are arranged in the cooling chamber successively in the direction of the flow direction FD.

[0117] Furthermore, the flow inverter 1 according to Figures 1 to 4 is provided in the cooling chamber between two of the at least two cooling structures 21. The area in which the flow inverter 1 is arranged is indicated by two dashed lines in Figure 5. Within the two dashed lines, the flow inverter 1 is arranged. In this exemplary embodiment, the flow inverter 1 is arranged between the directly adjacent power semiconductor modules 17 closest to the outlet port 20.

[0118] The refrigerant material 18 has a first average temperature in an upper portion X of the cooling chamber before the flow inverter 1 in the flow direction FD and a second average temperature in a bottom portion X' of the cooling chamber before the flow inverter 1 in the flow direction FD, where the average first average temperature is higher than the second average temperature because the cooling structure 21 dissipates more heat to the refrigerant material 18 in the upper portion X.

[0119] The flow inverter 1 reverses the refrigerant material 18 after the flow inverter 1 in the flow direction FD in the vertical direction. Thus, a portion of the refrigerant material in the top portion X is redirected to the bottom portion Y' of the cooling chamber after the flow inverter 1 in the flow direction FD, and a portion of the refrigerant material in the bottom portion X' is redirected to the top portion Y of the cooling chamber after the flow inverter 1 in the flow direction FD. Thus, the power semiconductor module 17 closest to the outlet port 20 can be effectively cooled.

[0120] The power semiconductor component 16 of Figure 6 has a cooling chamber with a cover 25, two side walls 24, a front portion 22, a rear portion 23 and a bottom portion 26 that form a cooling cavity. A cooling structure 21 is located within the cooling cavity.

[0121] The flow inverter 1 is positioned between the immediately adjacent cooling structures 21 closest to the outlet port 20, as already described in relation to Figure 5. The second plate 3 faces the inlet port 19 and the first plate 2 faces the outlet port 20. [Explanation of symbols]

[0122] 1 Flow Inverter 2. First Plate 3. Second Plate 4. The First Wall 5. The Second Wall 6 First recess 7 Second recess 8 First side of first plate 9 Second side of the first plate 10 First side of second plate 11 Second side of second plate 12 Central area 13 Lateral area 14 First partial wall 15 Second partial wall 16 Power Semiconductor Components 17 Power Semiconductor Module 18 Refrigerant substances 19 Inlet Port 20 Exit Port 21 Cooling structure 22 Front 23 Rear 24 Side wall 25 Cover 26 Bottom 28 First Principal Surface 29 Second main surface 30 Outer surface of first curved shape 31 Outer surface of second curved shape X Upper part in front of flow inverter X' Bottom part in front of the flow inverter Upper part after Y flow inverter Y' Bottom part after flow inverter D Extension direction FD Flow direction

Claims

1. A flow inverter (1) for a coolant material (18) for a power semiconductor component (16) having at least two power semiconductor modules (17) and a cooling chamber, comprising: a first plate (2) extending along a main extension plane of the flow inverter (1); a second plate (3) extending along said main plane of extension; a first wall (4) provided on the first plate (2) and on the second plate (3) from a first main surface of the flow inverter (1); a second wall (5) provided on the first plate (2) and the second plate (3) from a second main surface of the flow inverter (1) opposite to the first main surface; Equipped with - said first plate (2) is arranged next to said second plate (3), at least one first recess (6) is provided between said first plate (2) and said second plate (3); and at least one second recess (7) is provided between said first plate (2) and said second plate (3); Flow inverter (1).

2. - said at least one first recess (6) is provided in a central region (12) of said flow inverter (1); and - said at least one second recess (7) is provided in at least one lateral region (13) of said flow inverter (1); A flow inverter (1) according to claim 1.

3. 3. A flow inverter (1) according to claim 1 or 2, wherein the first plate (2) and the second plate (3) extend parallel to each other.

4. - said first wall (4) extends completely along the width of said first plate (2); and - said second wall (5) extends completely along the width of said second plate (3); A flow inverter (1) according to claim 1 or 2.

5. - said first wall (4) has a first curved shape in plan view and an outer surface of said first curved shape faces towards said second plate (3); the second wall (5) has a second curved shape in plan view, and the outer surface of the second curved shape faces towards the first plate (2); 3. A flow inverter (1) according to claim 1 or 2, characterized in that

6. 3. A flow inverter (1) as claimed in claim 1 or 2, wherein two second recesses (7) are provided between the first plate (2) and the second plate (3) in two opposing lateral regions (13) of the flow inverter (1).

7. 7. A flow inverter (1) according to claim 6, wherein the first recess (6) is provided between the two second recesses (7).

8. 3. The flow inverter (1) according to claim 1 or 2, wherein the first wall (4) and the second wall (5) at least partially overlap each other in a plan view and at least partially define the first recess (6) and the at least one second recess (7).

9. - the first recess (6) is provided on the side of the first wall (4) facing the first plate (2), - said at least one second recess (7) is provided on the side of said first wall (4) facing said second plate (3); A flow inverter (1) according to claim 1 or 2.

10. at least two power semiconductor modules (17), each connected to a respective cooling structure (21); a cooling chamber having an inlet port (19) and an outlet port (20); Equipped with - said cooling chamber is adapted to a flow direction (FD) of the refrigerant material (18) in said cooling chamber from said inlet port (19) to said outlet port (20); at least two of said cooling structures (21) are each provided in said cooling chamber successively in the direction of said flow direction (FD), - comprising a flow inverter (1) according to claim 1 or 2, in which the cooling chamber is provided between two of the at least two cooling structures (21), A power semiconductor component (16).

11. - the flow inverter (1) is a flow inverter (1) according to claim 1, - said first plate (2) is closer to said outlet port (20), and - said second plate (3) is closer to said inlet port (19); A power semiconductor component (16) according to claim 10.

12. - said first plate (2) extends parallel to the cover and the bottom of the cooling chamber; - said second plate (3) extends parallel to the cover and the bottom of the cooling chamber; - said first wall (4) extends perpendicularly to the cover of the cooling chamber, and - said second wall (5) extends perpendicularly to the bottom of the cooling chamber; The power semiconductor component (16) according to claim 10, characterized in that it is at least one of:

13. - said first wall (4) extends from a first side of said cooling chamber to a second side of said cooling chamber; and - the second wall (5) extends from the first side of the cooling chamber to the second side of the cooling chamber; A power semiconductor component (16) according to claim 10.

14. - providing at least two power semiconductor modules (17), each connected to a respective cooling structure (21); - providing a cooling chamber having an inlet port (19) and an outlet port (20); - placing said at least two power semiconductor modules (17) in said cooling chamber; - placing a flow inverter according to claim 1 or 2 between two of the at least two cooling structures (21); A method for manufacturing a power semiconductor component (16), comprising:

15. 15. The method according to claim 14, wherein the flow inverter (1) is positioned in the cooling chamber by at least one of welding, soldering, clamping, brazing, gluing or insertion as a separate part.

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