Manufacturing method of cylindrical sputtering target package and package

Abstract

To provide a manufacturing method of a packed body in which a cylindrical sputtering target is packed with a sheet-shaped cushioning material, the packed body being capable of easily unpacking with the cylindrical sputtering target kept laid.SOLUTION: A manufacturing method manufactures a packed body in which a cylindrical sputtering target is packed with a sheet-shaped cushioning material, comprises: covering a cylindrical part of the cylindrical sputtering target with at least two-layered sheet-shaped cushioning material; and packing it by overlapping or butting both edges of the sheet-shaped cushioning material at a length of a half or less than a circumference of the cylindrical part in a cross section including the peripheral direction of the cylindrical part of the cylindrical sputtering target.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a method for manufacturing a package for a cylindrical sputtering target, and more particularly to a method for manufacturing a package in which a cylindrical sputtering target is packaged in a sheet-like cushioning material, and to such a package. [Background technology]

[0002] A cylindrical sputtering target (also referred to as a cylindrical sputtering target or a rotary sputtering target) has a main body portion that is cylindrical in shape (hereinafter, a main body portion having a cylindrical shape is also referred to as a cylindrical portion). By sputtering the surface of the cylindrical portion while rotating the cylindrical sputtering target, a film derived from the sputtered material can be formed on an object that is transported facing the cylindrical sputtering target.

[0003] Cylindrical sputtering targets are generally protected by a protective film, and cylindrical targets protected by the protective film are distributed in a state where they are packed in a sheet-like cushioning material, and are transported, stored, etc. Cylindrical sputtering targets are protected by being packed in a sheet-like cushioning material, which can prevent the surface of the sputtering target (particularly the surface of the cylindrical portion, which is the sputtering surface) from being scratched by impact, etc.

[0004] More specifically, as shown in FIG. 6, in a conventional cylindrical sputtering target package 70, a cylindrical sputtering target 61 is wrapped around one sheet-like cushioning material 63 twice in the circumferential direction R (in the illustrated embodiment, gaps are shown between the cylindrical sputtering target 61 and the sheet-like cushioning material 63 and between the layers of the sheet-like cushioning material 63 for easy identification. Such gaps may or may not exist), and the outer end E (the end of the winding extending along the length direction L) of the sheet-like cushioning material 63 in the circumferential direction is fixed and packaged by adhering it to the underlying sheet-like cushioning material 63 along the length direction L with tape 67 (having an adhesive layer on one side). In addition, at both ends in the length direction of the cylindrical sputtering target 61, excess sheet-like cushioning material 63 is appropriately folded and fixed (not shown), and the cylindrical sputtering target 61 is packaged. As the sheet-like cushioning material 63, a bubble cushioning material is used. Summary of the Invention [Problem to be solved by the invention]

[0005] In the above-mentioned conventional cylindrical sputtering target packaging, in order to improve impact resistance (or cushioning), the sheet-like cushioning material is wrapped around the cylindrical sputtering target 61 twice, instead of once, as shown in FIG. 6(b). In such a conventional cylindrical sputtering target packaging 70, the sheet-like cushioning material 63 is wrapped around the cylindrical sputtering target 61 twice, so that the cylindrical sputtering target 61 cannot be immediately removed from the sheet-like cushioning material 63 by simply peeling off the tape 67 when opening the package. Therefore, it is necessary to unfold the sheet-like cushioning material 63 that is wrapped around twice to remove the cylindrical sputtering target 61. Since it is difficult to freely move the long cylindrical sputtering target 61 due to its own weight, the sheet-like cushioning material 63 that is wrapped around twice can be unfolded by laying the cylindrical sputtering target 61 on its side and rolling it on the sheet-like cushioning material 63. However, when opening the package in this manner, the cylindrical sputtering target 61 is ultimately rolled on the sheet-like cushioning material 63 having a thickness equivalent to one sheet, and therefore there is a risk that the cylindrical surface of the sputtering target 61, which is the sputtering surface, may be damaged. This risk becomes more pronounced as the cylindrical sputtering target 61 becomes longer (i.e., heavier). Therefore, a package of a long cylindrical sputtering target is opened by cutting the sheet-like cushioning material 63, which is wound twice around the cylindrical sputtering target 61, together with the cylindrical sputtering target 61 while the cylindrical sputtering target 61 is lying down (without rotating the target), with a cutter (the cut portion is shown diagrammatically by dotted line C in FIG. 6(b)), and cutting the target open in the length direction L. However, when opening the package in this manner, there is a risk that the cylindrical surface of the sputtering target 61 may be damaged by the cutter when the target is cut and opened with the cutter. Furthermore, when cutting and opening the sheet-like cushioning material 63 with a cutter, dust may be generated from the sheet-like cushioning material 63. For example, if the sheet-like cushioning material 63 is opened in a clean room (by cutting and opening the sheet-like cushioning material 63), this may cause a problem of reducing the cleanliness of the clean room.

[0006] The present invention has been made in consideration of such conventional problems, and aims to provide a package in which a cylindrical sputtering target is packed in sheet-like cushioning material, and a manufacturing method for the package, which can be easily opened while the cylindrical sputtering target is in a lying position, and the package. [Means for solving the problem]

[0007] According to the present invention, there is provided a method for manufacturing a package in which a cylindrical sputtering target is packaged with sheet-like cushioning material, in which the cylindrical portion of the cylindrical sputtering target is covered with at least two layers of sheet-like cushioning material, and the cylindrical portion is packaged by overlapping or butting both ends of the sheet-like cushioning material over a length of less than half the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target.

[0008] Furthermore, according to the present invention, there is provided a package in which a cylindrical sputtering target is packaged in sheet-like cushioning material, wherein the cylindrical portion of the cylindrical sputtering target is covered with at least two layers of sheet-like cushioning material, and in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target, both ends of the sheet-like cushioning material overlap or butt together for a length of less than half the circumference of the cylindrical portion.

[0009] In the present invention, the term "packaging" may be understood to have the same meaning as "covering" or "wrapping". In addition, in the present invention, the term "butted" means that the end faces of both ends of the sheet-like cushioning material are in contact (abutting) or close to each other. In the present invention, the term "circumferential direction" means the circumferential direction with respect to the central axis of the cylindrical part of the cylindrical sputtering target, and is indicated by the symbol "R" in the drawings. In the present invention, the term "cross section including the circumferential direction" means a cross section when the cylindrical part of the cylindrical sputtering target is cut on a plane including the circumferential direction, in other words, a cross section perpendicular to the central axis of the cylindrical part of the cylindrical sputtering target.

[0010] In one embodiment of the present invention, the sheet-like cushioning material may be folded to form two or more layers.

[0011] In one embodiment of the present invention, both ends of the sheet-like cushioning material may overlap with each other by contacting the outer surface of one end with the inner surface of the other end, or may overlap with each other by contacting the inner surface of one end with the inner surface of the other end.

[0012] In one embodiment of the present invention, both ends of the sheet-like cushioning material may be fixed to each other discontinuously in the longitudinal direction of the cylindrical sputtering target.

[0013] In one embodiment of the present invention, both ends of the sheet-like cushioning material may be fixed to each other by at least one selected from the group consisting of a tape, an adhesive, and a pressure-sensitive adhesive.

[0014] In one embodiment of the present invention, the sheet-type cushioning material may be a bubble cushioning material.

[0015] In one embodiment of the present invention, the cylindrical sputtering target may have a length of 500 mm or more and a mass of 20 kg or more.

[0016] In one embodiment of the present invention, a protective film may be present between the cylindrical sputtering target and the sheet-like cushioning material. Effect of the Invention

[0017] According to the present invention, there is provided a method for manufacturing a package in which a cylindrical sputtering target is packaged in a sheet-like cushioning material, in which the cylindrical portion of the cylindrical sputtering target is covered with at least two layers of the sheet-like cushioning material, and both ends of the sheet-like cushioning material are overlapped or butted together by a length equal to or less than half the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target, thereby providing a package that can be easily opened while the cylindrical sputtering target is in a lying state. Also provided according to the present invention is a package having a configuration corresponding to such a manufacturing method. [Brief description of the drawings]

[0018] [Figure 1] 1 is a schematic diagram showing a package of a cylindrical sputtering target in one embodiment of the present invention, where (a) is an oblique view and (b) is a cross-sectional view perpendicular to the longitudinal direction L (a view of a cross-section including the circumferential direction). [Diagram 2] 1(a) to 1(d) are schematic cross-sectional views along the length direction L showing exemplary variations in the configuration of a cylindrical sputtering target that can be used in the present invention. [Diagram 3] FIG. 1(b) is a schematic diagram showing a package of a cylindrical sputtering target in another embodiment of the present invention, and is a cross-sectional view corresponding to FIG. [Figure 4] FIG. 1(b) is a schematic diagram showing a package of a cylindrical sputtering target in another embodiment of the present invention, and is a cross-sectional view corresponding to FIG. [Diagram 5] FIG. 1(b) is a schematic diagram showing a package of a cylindrical sputtering target in another embodiment of the present invention, and is a cross-sectional view corresponding to FIG. [Figure 6] 1A and 1B are schematic diagrams showing a package of a conventional cylindrical sputtering target, in which (a) is a perspective view and (b) is a cross-sectional view perpendicular to the length direction L. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Some embodiments of the present invention will be described in detail below with reference to the drawings, but the present invention is not limited to these embodiments.

[0020] (Embodiment 1) As shown in FIG. 1, the present embodiment relates to a package 10 in which a cylindrical sputtering target 1 is packaged with a sheet-like buffer material 3 and a manufacturing method thereof, in which the cylindrical portion of the cylindrical sputtering target 1 is covered with at least two layers of the sheet-like buffer material 3, and both ends of the sheet-like buffer material 3 are butted against each other in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1. In the illustrated embodiment, gaps are shown between the cylindrical sputtering target 1 and the sheet-like buffer material 3 and between the layers of the sheet-like buffer material 3 for easy identification, but such gaps may or may not exist. In the embodiment shown in FIG. 1, only the cylindrical portion, which is the main body of the cylindrical sputtering target 1, is illustrated, but as will be described later with reference to FIG. 2, an adapter or the like may be provided at one or both of the longitudinal ends of the cylindrical portion.

[0021] More specifically, in FIG. 1(b), at least two individually separated layers (layers are formed from the same number of sheets as the number of layers. For example, two layers are formed from two sheets, rather than from one sheet. In the illustrated embodiment, two layers are used, an inner layer 3a and an outer layer 3b), and in a cross section including the circumferential direction, the inner layer 3a has both ends A1, A2, and the outer layer 3b has both ends B1, B2. One end A1, B1 of the two overlapping layers of the sheet-like cushioning material 3 is butted against the other end A2, B2. However, the present invention is not limited to the illustrated embodiment, and the sheet-like cushioning material 3 may form three or more individually separated layers, and the sheet-like cushioning material 3 may be overlapped in three or more layers, with both ends in a cross section including the circumferential direction butted against each other.

[0022] In the present invention, the fact that both ends of the sheet-like cushioning material are "butted" means that the end faces of both ends are in contact or close to each other, which can be achieved, for example, by applying a fixing method described later. In Fig. 1(b), the end faces of one end A1, B1 of the sheet-like cushioning material 3 are in contact with the end faces of the other end A2, B2, but as long as the cylindrical target can be sufficiently protected, the end faces of both ends of the sheet-like cushioning material 3 may be close to each other with a gap provided between them. Whether the end faces of both ends are in contact with each other or in close proximity may differ for each layer (for example, in the case of two layers, the end faces (A1, A2) of the inner layer 3a may be in contact with each other and the end faces (B1, B2) of the outer layer 3b may be in contact with each other, the end faces of the inner layer 3a may be in contact with each other and the end faces of the outer layer 3b may be in close proximity to each other, the end faces of the inner layer 3a may be in close proximity to each other and the end faces of the outer layer 3b may be in contact with each other, or the end faces of the inner layer 3a may be in close proximity to each other and the end faces of the outer layer 3b may be in close proximity to each other). When such gaps exist in a plurality of layers, the gaps between the end faces of each layer may be substantially the same or different. The gaps between the end faces may be continuous or discontinuous, and when they are discontinuous, for example, gaps may exist only in the unfixed portions. The gaps between the end faces are 20 mm or less, preferably 15 mm or less, more preferably 10 mm or less, and even more preferably 5 mm or less.

[0023] Furthermore, in this embodiment, as shown in FIG. 1(a), both ends of the sheet-like cushioning material 3 (typically, in the illustrated embodiment, end B1 and end B2 of the outer layer 3b) are discontinuously adhered and fixed to each other in the longitudinal direction L of the cylindrical sputtering target 1, for example, by tape (usually, but not limited to, having an adhesive layer on one side). The fixing method is not limited to such tape, and for example, at least one selected from the group consisting of tape, adhesive, and pressure-sensitive adhesive may be applied. Although less preferable than the above, fusion may also be applied as a fixing method.

[0024] In the present invention, the term "discontinuously" fixed in the length direction of the cylindrical sputtering target means that the cylindrical sputtering target is not fixed continuously from one end to the other end in the length direction (for example, like the tape 67 shown in FIG. 6(a)), in other words, the cylindrical sputtering target is fixed in a plurality of dispersed parts (or places or regions) in the length direction (for example, like the tape 5 shown in FIG. 1(a)), and for example, the total length of the fixed parts (length along the length direction L) is 50% or less, preferably 30% or less, more preferably 20% or less, and even more preferably 10% or less of the total length of the unfixed parts. Although this embodiment is not limited to this embodiment, more specifically, it is preferable that the cylindrical sputtering target is fixed at three or more places in the length direction, and is fixed at equal intervals including both ends.

[0025] Bubble cushioning material can be used as the sheet-like cushioning material 3. Bubble cushioning material is also called air cap, and is a cushioning material that usually has a plurality of bags containing air bubbles on one sheet surface. Bubble cushioning material is preferred because it is easy to obtain, does not generate dust or debris when cut with a blade such as a cutter or scissors, and is easy to peel off the fixing means such as tape.

[0026] Each layer of the sheet-like cushioning material 3 may have a thickness of, for example, 1 mm or more and 15 mm or less, preferably 1 mm or more and 10 mm or less, and more preferably 2 mm or more and 5 mm or less. When the thickness of the sheet-like cushioning material 3 is equal to or greater than the lower limit, the sheet-like cushioning material 3 can have sufficient impact resistance to prevent scratches on the surface of the cylindrical sputtering target 1 (particularly, the cylindrical surface, which is the sputtering surface). When the thickness of the sheet-like cushioning material 3 is equal to or less than the upper limit, the cushioning material is flexible, so that the packaging work of the cylindrical sputtering target 1 becomes easy, and the effect is particularly remarkable when the diameter of the cylindrical sputtering target 1 is small. When the thickness of the sheet-like cushioning material 3 is not constant (or when the thickness changes locally, for example, in the case of bubble cushioning material, the bag part where the air bubbles are enclosed is thick and the other parts are thin), the thickness of the sheet-like cushioning material 3 means the thickness (air grain height) of the part where the thickness is maximum in the sheet surface (for example, the bag part in the case of bubble cushioning material).

[0027] The number of layers of the sheet-type cushioning material 3 should be at least two, and can be appropriately selected depending on the desired impact resistance (cushioning properties) and the thickness per layer of the sheet-type cushioning material actually used.

[0028] When bubble cushioning material is used as the sheet-like cushioning material 3, the arrangement of the at least two layers of sheet-like cushioning material is not particularly limited, but it is preferable to stack them so that the bag portions (hereinafter also referred to as convex portions) in which the air bubbles of the sheet-like cushioning material are sealed are in contact with each other. This allows the unevenness between the at least two layers of sheet-like cushioning material to get caught (intertwined), preventing the sheet-like cushioning material from shifting during transportation. In addition, if bubble cushioning material that has convex portions only on one sheet surface is stacked so that the convex portions are in contact with each other, the outermost layer does not have any unevenness due to the sheet-like cushioning material, and the accumulation of dust and dirt can be prevented.

[0029] In addition, when packaging a cylindrical sputtering target having a large mass using a bubble cushioning material having a convex portion only on one sheet surface, it is preferable to stack at least two layers of the sheet cushioning material so that the surfaces opposite to the surfaces having the convex portions (i.e., the flat surfaces) of the sheet cushioning material are in contact with each other. This makes it easier to ensure the thickness of the cushioning material and to ensure sufficient impact resistance even for heavy objects.

[0030] When the cylindrical sputtering target is protected by a protective film described later, it is preferable to arrange the protective film so that the flat surface of the sheet-like cushioning material (i.e., the surface opposite to the surface having the convex portion) is in contact with the sheet-like cushioning material. This increases the contact area between the films, and prevents the sheet-like cushioning material from shifting on the protective film.

[0031] The length of the sheet-like cushioning material 3 (the length along the length direction L) can be appropriately selected depending on the length of the cylindrical sputtering target 1 to be packed and the shape of the box it is stored in. In order to prevent the cylindrical sputtering target 1 from being scratched, it is preferably equal to or longer than the length of the cylindrical portion, and more preferably is longer than the length of the cylindrical sputtering target 1 and is long enough to pack both ends of the cylindrical sputtering target 1 in the length direction.

[0032] The width of one layer of the sheet-like cushioning material 3 (the length along the circumferential direction R) can be appropriately selected according to the outer diameter of the cylindrical part of the cylindrical sputtering target 1 to be packed. In this embodiment, since the inner layer 3a is located radially outward from the outer layer 3b, the width of the outer layer 3b may be larger than the width of the inner layer 3a by an amount resulting from the difference in radius. In the illustrated embodiment, the butt joints at both ends of the sheet-like cushioning material 3 are substantially flush with the other parts (without steps) (the outer surface of the sheet-like cushioning material 3 is substantially circular in a cross section perpendicular to the length direction), but the butt joints may be slightly raised outward (the outer surface of the sheet-like cushioning material 3 is substantially teardrop-shaped in a cross section perpendicular to the length direction). In the former case, the package 10 may be packed on, for example, a U-shaped base arranged in the box or on U-shaped cushioning material laid out in the box so as not to roll in the circumferential direction. In the latter case, even if such a U-shaped base or U-shaped cushioning material is not provided, the raised portion (hereinafter also referred to as the raised portion) can be used to fix the packaged body 10 in the box in the circumferential direction, for example, by filling the gap between the packed cylindrical sputtering target and the box with the raised portion, or by arranging the raised portion obliquely downward, and the packaged body 10 can be packed in the box. In addition, in the latter case, the packaged body 10 can be prevented from rolling when it is taken out of the box and placed on a flat surface such as a floor or a table. In addition, in the latter case, it is preferable that the sheet-like cushioning material 3 that packs the cylindrical sputtering target 1 has a raised portion toward the outside in one place. For example, it is preferable that the two layers of the inner layer 3a and the outer layer 3b shown in FIG. 1(b) are one sheet that are not separated from each other. By providing only one raised portion, the packaged body 10 can be packed in the box without any extra space.

[0033] The length of the cylindrical sputtering target 1 is not particularly limited, but the present invention can be suitably used for a long cylindrical sputtering target. The length of the cylindrical sputtering target 1 is, for example, 500 mm or more, preferably 1000 mm or more, more preferably 2000 mm or more, even more preferably 2200 mm or more, and particularly preferably 2500 mm. The upper limit is not particularly limited, but may be, for example, 4500 mm or less, particularly 4000 mm or less.

[0034] The outer diameter of the cylindrical portion of the cylindrical sputtering target 1 is not particularly limited, but may be, for example, 120 mm or more and 300 mm or less. The inner diameter of the cylindrical portion of the cylindrical sputtering target 1 is not particularly limited, but may be, for example, 70 mm or more and 250 mm or less.

[0035] The material of the cylindrical sputtering target 1 is not particularly limited as long as it is a material that is usually used for film formation by a sputtering method. Examples of such materials include Al, Cu, Cr, Fe, Ta, Ti, Zr, W, Mo, Nb, Ag, Co, Ru, Pt, Pd, Ni, and alloys containing these metals, as well as ceramics such as tin-doped indium oxide (ITO), aluminum-doped zinc oxide (AZO), gallium-doped zinc oxide (GZO), titanium-doped zinc oxide, and In-Ga-Zn-based composite oxide (IGZO). Among these, aluminum (pure Al with a purity of 99.99% (4N) or more, preferably a purity of 99.999% (5N) or more), aluminum alloy (additive elements include Si, Cu, Nd, Mg, Fe, Ti, Mo, Ta, Nb, W, Ni, Co, etc., and preferably contains Si and / or Cu as an additive element. Furthermore, the Al purity of the base material excluding the additive elements is 99.99% or more, preferably 99.999% or more), or copper (purity of 99.99% (4N) or more) is preferred.

[0036] The mass of the cylindrical sputtering target 1 is not particularly limited, but in order to more effectively achieve the effects of the present invention, it is 20 kg or more, preferably 30 kg or more, more preferably 40 kg or more, even more preferably 50 kg or more, and particularly preferably 60 kg or more. The upper limit is not particularly limited, but from the viewpoint of preventing damage to the sheet-like cushioning material, it is 500 kg or less, preferably 350 kg or less, and more preferably 300 kg or less. According to the cylindrical sputtering target package 10 of this embodiment, even if the mass of the cylindrical sputtering target is very large, it can be easily opened while it is lying down.

[0037] The configuration of the cylindrical sputtering target 1 is not particularly limited, but generally includes a sputtering target material (cylindrical part) processed into a cylindrical shape and an adapter (joint) for mounting to a sputtering device. Exemplary variations of the configuration of the cylindrical sputtering target that can be used in the present invention are shown in Figs. 2(a) to 2(d) (all are schematic cross-sectional views along the length direction L). The sputtering target material 11 processed into a cylindrical shape only needs to have at least its main body processed into a cylindrical shape, and either one or both of the ends in the cross section along the length direction may be appropriately processed. More specifically, the adapter 12 may be in the form of, for example, a flange 21 (see Fig. 2(a)), an adapter ring 23 (see Fig. 2(b)), an adapter part 24 (see Fig. 2(c)), a backing tube 25 (see Fig. 2(d)), or the like, and is not particularly limited. In addition, backing tube 25 (FIG. 2(d)) may have a cylindrical sputtering target support portion and an adapter portion (more specifically, a flange portion) provided at the end of the support portion, and the support portion is inserted into the hollow portion of sputtering target material 11 processed into a cylindrical shape, and the adapter portion is used for attachment to a sputtering apparatus.

[0038] The sputtering target material 11 processed into a cylindrical shape is as described above as the material of the cylindrical sputtering target 1. The material of the adapter 12 may be different from the material of the sputtering target material 11 processed into a cylindrical shape, and typically, a metal with higher strength (one type of metal or two or more types of alloy) may be used. When the material of the adapter 12 is different from the material of the sputtering target material 11 processed into a cylindrical shape, these materials may be fixed with a fixing part 13 (see Figs. 2(a), (b), and (d)). The fixing method is not particularly limited, and examples thereof include welding such as tungsten-inert gas welding (TIG welding), electron beam welding (EB welding), metal inert gas welding (MIG welding), and laser welding, friction stir welding, soldering, and brazing. Alternatively, the material of the adapter 12 may be the same as the material of the sputtering target material 11 processed into a cylindrical shape, and may be in the form of an adapter portion 24 obtained by processing at least one end of the sputtering target material 11 processed into a cylindrical shape (see FIG. 2(c)).

[0039] The cylindrical sputtering target 1 may further include a cap 22 in addition to the sputtering target material 11 processed into a cylindrical shape and the adapter 12. More specifically, as shown in Fig. 2(a) , a flange 21 may be fixed as the adapter 12 to one end of the sputtering target material 11 processed into a cylindrical shape, and a cap 22 may be fixed to the other end. The method of fixing the flange 21 and the cap 22 is not particularly limited, and any appropriate fixing method as described above may be applied.

[0040] When the cylindrical sputtering target 1 has a flange 21 (or a flange portion), the package can be opened more easily with the cylindrical sputtering target 1 lying down. The flange 21 (or the flange portion) has a convex portion (brim portion) that protrudes outward from the cylindrical portion at its base, and this convex portion creates a space between the cylindrical sputtering target 1 and the sheet-like buffer material 3 (not shown in FIG. 2). When both ends of the sheet-like buffer material 3 are fixed, if a portion where both ends of the sheet-like buffer material 3 are not fixed is provided in the region where such a space exists (in this specification, the portion where both ends of the sheet-like buffer material 3 are fixed and the portion where they are not fixed are also referred to as the fixed portion and the non-fixed portion, respectively), a worker can insert his / her finger from the non-fixed portion to release the fixation of the fixed portion (in other words, open the sheet-like buffer material 3), and this makes it possible to open the package of the cylindrical sputtering target 1 more easily.

[0041] According to the cylindrical sputtering target packaging body 10 of this embodiment, first, the cylindrical sputtering target 1 is covered with at least two layers of the sheet-like buffer material 3, so that sufficient impact resistance (or cushioning properties) can be obtained to protect the cylindrical sputtering target 1. According to the cylindrical sputtering target packaging body 10 of this embodiment, both ends of the sheet-like buffer material 3 are butted against each other in a cross section including the circumferential direction, so that when opening the package, the cylindrical sputtering target 1 can be immediately removed from the sheet-like buffer material 3 simply by releasing the fixation of the sheet-like buffer material 3, more specifically, by peeling off the tape 5 in this embodiment. Such opening can be easily performed even in the case of a long (or larger) cylindrical sputtering target, and there is no risk of damaging the cylindrical surface, which is the sputtering surface of the cylindrical sputtering target. In addition, such opening can be performed without cutting the sheet-like buffer material 3, so that no dust originating from the sheet-like buffer material 3 is generated, and even when opening the package in a clean room, for example, there is no problem of reducing the cleanliness of the clean room.

[0042] Although one embodiment of the present invention has been described above, this embodiment can be modified in various ways. As examples of such modifications, other embodiments of the present invention will be described below, but unless otherwise specified, the same description as this embodiment can be applied.

[0043] (Embodiment 2) The present embodiment relates to a package in which a cylindrical sputtering target 1 is packaged in a sheet-like cushioning material 3 and a manufacturing method thereof, in which the cylindrical portion of the cylindrical sputtering target 1 is covered with at least two layers of sheet-like cushioning material 3, and both ends of the sheet-like cushioning material 3 are butted against each other in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1.

[0044] More specifically, as shown in Fig. 3, the sheet-like cushioning material 3 is folded to form at least two layers. At this time, the sheet-like cushioning material 3 is folded so that the sizes of the layers formed by folding are approximately equal, preferably equal (for example, in the case of two layers, the sheet-like cushioning material 3 has a width dimension that is approximately twice, preferably twice, the circumference of the cylindrical sputtering target 1 when unfolded and spread out, and is folded approximately at the center in the width direction, preferably at the center). That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the folding portion F to form two layers, an inner layer 3a and an outer layer 3b, and in a cross section including the circumferential direction, the inner layer 3a has both ends A1 and A2, the outer layer 3b has both ends B1 and B2, and the end A2 of the inner layer 3a and the end B2 of the outer layer 3b form the folding portion F (end surface on the end A2, B2 side). One end A1, B1 of the two overlapping layers of sheet-like cushioning material 3 abuts against the other end A2, B2 (i.e., the folded portion F). However, the present invention is not limited to the illustrated embodiment, and the sheet-like cushioning material 3 may be further folded to form three or more layers, and both ends in a cross section including the circumferential direction of the sheet-like cushioning material 3 in a folded state or more may abut against each other. Alternatively, the sheet-like cushioning material 3 may be a combination of at least two layers formed by folding and at least one layer separated individually, and both ends in a cross section including the circumferential direction of the sheet-like cushioning material 3 in a folded state and in a separated state may abut against each other.

[0045] As described above in the first embodiment, the two ends of the sheet-like cushioning material "butt against each other" means that the end faces of the two ends are in contact with each other or in close proximity to each other, and can be realized, for example, by applying the fixing method described above in the first embodiment. In FIG. 3, the end faces of one end A1, B1 of the sheet-like cushioning material 3 are in contact with the end faces of the other end A2, B2 (folded portion F), but as long as the cylindrical target can be sufficiently protected, the end faces of both ends of the sheet-like cushioning material 3 may be in close proximity to each other with a gap provided between them. Otherwise, the same explanation as in the first embodiment also applies to this embodiment.

[0046] According to this embodiment, in addition to the effects described above in the first embodiment, at least one sheet-like cushioning material 3 is folded at least once for use, so that packaging can be achieved without worrying about size matching of each layer of the sheet-like cushioning material 3 or misalignment during packaging. Furthermore, since the sheets rub against each other less frequently than when multiple individually separated sheets are stacked, the generation of static electricity can be suppressed and the risk of dust and dirt being mixed in during packaging can also be reduced.

[0047] (Embodiment 3) This embodiment relates to a package in which a cylindrical sputtering target 1 is packaged in sheet-like cushioning material 3 and a manufacturing method thereof, in which the cylindrical portion of the cylindrical sputtering target 1 is covered with at least two layers of sheet-like cushioning material 3, and in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1, both ends of the sheet-like cushioning material 3 overlap by a length equal to or less than half the circumference of the cylindrical portion.

[0048] More specifically, as shown in FIG. 4, the sheet-like cushioning material 3 is folded to form at least two layers. That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the folding portion F to form two layers, an inner layer 3a and an outer layer 3b, and in a cross section including the circumferential direction, the inner layer 3a has both ends A1 and A2, the outer layer 3b has both ends B1 and B2, and the end A2 of the inner layer 3a and the end B2 of the outer layer 3b form the folding portion F. The overlapping length of one end A1, B1 of the sheet-like cushioning material 3 and the other end A2, B2 in a cross section including the circumferential direction is set to a length of half or less of the circumference of the cylindrical portion of the cylindrical sputtering target 1. When the overlapping lengths of the layers are different, for example, in the illustrated embodiment, the overlapping length d between the end A1 and the end A2 of the inner layer 3a is set to a length of half or less of the circumference of the cylindrical portion of the cylindrical sputtering target 1. A and the overlap length d between the end B1 and the end B2 of the outer layer 3b. Bare different, all overlap lengths are set to a length equal to or less than half the circumference of the cylindrical portion of the cylindrical sputtering target 1. However, the present invention is not limited to the embodiment shown in the drawings, and the sheet-like cushioning material 3 may be further folded to form three or more layers, and the overlap lengths of both ends in a cross section including the circumferential direction of the sheet-like cushioning material 3 folded into three or more layers may be set to a length equal to or less than half the circumference of the cylindrical portion of the cylindrical sputtering target 1.

[0049] Furthermore, in this embodiment, as shown in Figure 4, both end portions of the sheet-like cushioning material 3 overlap with each other by contacting the outer surface of one end portion (one end portion of the sheet-like cushioning material 3 in the folded state, more specifically, the end portion located on the side of ends A1, B1) with the inner surface of the other end portion (the other end portion of the sheet-like cushioning material 3 in the folded state, more specifically, the end portion located on the side of ends A2, B2 forming the folding portion F).

[0050] For example, the outer surface of one end of the outermost layer of the sheet-like cushioning material 3 (in the illustrated embodiment, the outer surface of the end B1 of the outer layer 3b) may come into contact with the inner surface of the other end of the innermost layer (in the illustrated embodiment, the inner surface of the end A2 of the inner layer 3a). However, the present invention is not limited to this, and any combination of contacts may be used as long as the outer surface of a layer of the sheet-like cushioning material 3 comes into contact with the inner surface of the same or different layer. For example, the sheet-like cushioning material 3 can be prevented from loosening by inserting the folded portion F of the sheet-like cushioning material 3 between the opposite ends, first fixing the inner layer and the folded portion, and then fixing the outer layer by arranging the fixed portion so as to cover it from above.

[0051] In the present invention, the circumference of the cylindrical portion of the cylindrical sputtering target means the outer periphery of the cylindrical portion (the same applies to the following embodiments). In this embodiment, the overlap length may be half or less of the circumference of the cylindrical portion of the cylindrical sputtering target, for example, 1 / 3 or less, preferably 1 / 4 or less, and more preferably 1 / 8 or less. By setting the overlap length in such a range, the package can be easily opened while the target is laid down.

[0052] According to the present embodiment, in addition to the effects described above in the first embodiment, it is possible to achieve an effect that the raised portion can be easily formed by the sheet-type cushioning material 3.

[0053] (Embodiment 4) This embodiment relates to a package in which a cylindrical sputtering target 1 is packaged in a sheet-like cushioning material 3 and a manufacturing method thereof, in which the cylindrical portion of the cylindrical sputtering target 1 is covered with at least two layers of sheet-like cushioning material 3, and in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target 1, both ends of the sheet-like cushioning material 3 overlap by a length equal to or less than half the circumference of the cylindrical portion.

[0054] More specifically, as shown in FIG. 5, the sheet-like cushioning material 3 is folded to form at least two layers. That is, in the illustrated embodiment, the sheet-like cushioning material 3 is folded at the folding portion F to form two layers, an inner layer 3a and an outer layer 3b, and in a cross section including the circumferential direction, the inner layer 3a has both ends A1 and A2, the outer layer 3b has both ends B1 and B2, and the end A2 of the inner layer 3a and the end B2 of the outer layer 3b form the folding portion F. The overlapping length of one end A1, B1 of the sheet-like cushioning material 3 and the other end A2, B2 in a cross section including the circumferential direction is set to a length of half or less of the circumference of the cylindrical portion of the cylindrical sputtering target 1. When the overlapping lengths of the layers are different, for example, in the illustrated embodiment, the overlapping length d between the end A1 and the end A2 of the inner layer 3a is set to a length of half or less of the circumference of the cylindrical portion of the cylindrical sputtering target 1. A and the overlap length d between the end B1 and the end B2 of the outer layer 3b. B are different, all overlap lengths are set to a length equal to or less than half the circumference of the cylindrical portion of the cylindrical sputtering target 1. However, the present invention is not limited to the embodiment shown in the drawings, and the sheet-like cushioning material 3 may be further folded to form three or more layers, and the overlap lengths of both ends in a cross section including the circumferential direction of the sheet-like cushioning material 3 folded into three or more layers may be set to a length equal to or less than half the circumference of the cylindrical portion of the cylindrical sputtering target 1.

[0055] Furthermore, in this embodiment, as shown in Figure 5, both end portions of the sheet-like cushioning material 3 overlap with each other by contacting the inner surface of one end portion (one end portion of the sheet-like cushioning material 3 in the folded state, more specifically, the end portion on the side of ends A1, B1) with the inner surface of the other end portion (the other end portion of the sheet-like cushioning material 3 in the folded state, more specifically, the end portion on the side of ends A2, B2 forming the folding portion F).

[0056] For example, the inner surface of one end of the innermost layer of the sheet-like cushioning material 3 (in the illustrated embodiment, the inner surface of end A1 of the inner layer 3a) may be in contact with the inner surface of the other end of the innermost layer (in the illustrated embodiment, the inner surface of end A2 of the inner layer 3a).

[0057] In this embodiment, the overlap length may be half or less of the circumference of the cylindrical portion of the cylindrical sputtering target, for example, 1 / 3 or less, preferably 1 / 4 or less, and more preferably 1 / 8 or less. By setting the overlap length in this range, not only can the package be easily opened while the target is lying down, but the packaged cylindrical target can also be packed into a box without any extra space.

[0058] According to this embodiment, in addition to the effects described above in the first embodiment, it is possible to obtain an effect that it is easy to form a raised portion by the sheet-like cushioning material 3. Furthermore, since fasteners such as clips and bag closures can be used instead of a fastening method using an adhesive such as tape, it becomes easier to open the package, and since there is no adhesive, it is easier to reuse the sheet-like cushioning material 3.

[0059] (Other embodiments) As in the modification of embodiment 2 to embodiment 1, embodiments 3 and 4 may also be modified by using at least two individually separated layers as the sheet-like cushioning material 3, or by using a combination of at least two layers formed by folding and at least one individually separated layer. In particular, when a cylindrical sputtering target is packed using two or more individually separated sheet-like cushioning materials 3, the outermost layer, which is at high risk of contamination by dust and dirt, can be removed before transporting the target into a clean room, thereby preventing contamination of the clean room. In addition, in order to further prevent contamination of the clean room by dust and dirt, the sheet-like cushioning material 3 may have an antistatic function.

[0060] In addition, in an embodiment of the present invention, a protective film may be provided between the cylindrical sputtering target and the sheet-like buffer material in order to prevent the cylindrical sputtering target from being contaminated by dust or dirt. This can further prevent the surface of the cylindrical sputtering target, particularly the sputtering surface and the surface (sealing surface) attached to the sputtering device, from being scratched by rubbing against the sheet-like buffer material 3. The protective film is not particularly limited as long as it can protect the surface of the cylindrical sputtering target and is a peelable film. Examples of the protective film include polyester-based resin films such as polyethylene terephthalate, polybutylene terephthalate, and polyethylene naphthalate; polyolefin-based resin films such as polyethylene and polypropylene films, and acrylic resin films, and are preferably selected from the group consisting of polyolefin-based resin films, polyethylene terephthalate-based resin films, and acrylic resin films.

[0061] The length of the protective film can be appropriately selected depending on the length of the cylindrical sputtering target, but from the viewpoint of preventing scratches on the cylindrical sputtering target, it is preferable that it is the same as the sheet-like cushioning material 3 shown above. The width of the protective film can be appropriately selected depending on the diameter of the outer circumference of the cylindrical sputtering target, but it is preferable that the overlap length between the protective films is less than half the circumference of the cylindrical part of the cylindrical sputtering target, more preferably less than 1 / 3, even more preferably less than 1 / 4, and particularly preferably less than 1 / 8. In addition, multiple protective films may be attached to cover the entire circumference of the cylindrical sputtering target, and for example, when two protective films are used, the protective films are arranged so as to cover each half of the circumference of the cylindrical part. When multiple protective films are used, the overlap length between the protective films is preferably less than half the circumference of the cylindrical part of the cylindrical sputtering target, more preferably less than 1 / 3, even more preferably less than 1 / 4, and particularly preferably less than 1 / 8.

[0062] When a cylindrical sputtering target is protected by a protective film, it is preferable that the fixing positions of both ends of the protective film, or one end and the outer peripheral surface of the protective film, be close to the positions of the fixing parts of the sheet-like cushioning material 3, from the standpoint of ease of unpacking, and the distance between each fixing part is 1 / 3 or less of the circumference of the cylindrical part of the cylindrical sputtering target, preferably 1 / 4 or less, more preferably 1 / 8 or less, and even more preferably at approximately the same position, and it is particularly preferable that they are at the same position.

[0063] Furthermore, in an embodiment of the present invention, when it is required to suppress deterioration (e.g., oxidation) of the cylindrical sputtering target during long-term storage, the cylindrical sputtering target may be vacuum-packaged before being packed in the sheet-like cushioning material. Also, from the viewpoint of preventing scratches during vacuum packaging, the cylindrical sputtering target protected with the above-mentioned protective film may be vacuum-packaged in a packaging material. The packaging material used for vacuum packaging preferably has properties that make it difficult for oxygen and water to pass through. This makes it possible to suppress deterioration such as oxidation of the surface of the cylindrical sputtering target. The property of being difficult to pass through oxygen and water means an oxygen transmission rate of 100 cc / m 2 ·atm·day or less, preferably 80cc / m 2 ·atm·day or less, preferably 70cc / m 2 ·atm·day or less, and the moisture permeability is 20g / m 2 day or less, preferably 15g / m 2 ·day or less, preferably 10g / m 2 ·day or less. Oxygen permeability and moisture permeability are values ​​measured using methods conforming to JIS K 7126 and JIS K 7129.

[0064] For example, specific materials for packaging materials used in vacuum packaging include resin films. Examples of resins include polypropylene, polyethylene, nanocomposite-coated polyethylene terephthalate, polyethylene terephthalate (PET) or non-oriented polypropylene (CPP) with aluminum vapor deposition, PET or biaxially oriented nylon (ONY) with silica or alumina vapor deposition, polyvinylidene chloride (PVDC), nylon, PVDC-coated biaxially oriented nylon (KON) or biaxially oriented polypropylene (KOP), PET, polyvinyl chloride (PVC), biaxially oriented polypropylene (OPP), high density polyethylene (HDPE), low density polyethylene (LDPE), ethylene-vinyl alcohol copolymer resin (EVOH), etc., but are not limited thereto. In addition, laminated films, coextruded multilayer films, etc. of these resins may be used. The packaging material used in vacuum packaging is preferably a laminated or multilayer film. By adopting such a film layer embodiment, it is easy to combine multiple functions such as moisture resistance, oxygen permeability resistance, heat resistance, heat sealability, mechanical strength, and flexibility. EXAMPLES

[0065] Example 1 Example 1 relates to the package of the cylindrical sputtering target described above in embodiment 2 with reference to FIG. 3 and a method for manufacturing the package. A cylindrical sputtering target (total length 2950 mm) was prepared, which had a length of 2750 mm, an outer diameter of 165 mm, an inner diameter of 126 mm, a cylindrical part made of high-purity (99.999%) aluminum, and an aluminum alloy flange part (end diameter 175 mm) and a cap part at both ends of the cylindrical part in the longitudinal direction. The mass of the target was 73 kg. The cylindrical surface of the cylindrical sputtering target was protected with a protective film ("Mitsui Masking Tape" (registered trademark), manufactured by Mitsui Chemicals Tocello Inc.). As the sheet-like cushioning material, a polyethylene bubble cushioning material "Air Cap" (registered trademark) C-800 (manufactured by Sakai Chemical Industry Co., Ltd.) with a length of 3700 mm and a width of 1100 mm was folded at the center in the width direction to form two layers. On the upper layer (corresponding to the inner layer) of the sheet-like cushioning material folded into two layers, the cylindrical sputtering target whose cylindrical surface was protected as described above was placed with their length directions aligned. Then, the folded two-layered sheet-like cushioning material was placed along the cylindrical surface of the cylindrical sputtering target so that both ends of the sheet-like cushioning material butted against each other in a cross section including the circumferential direction, and these both ends were fixed with tape at 500 mm intervals in the length direction of the cylindrical sputtering target. The total length of the parts fixed with tape was fixed to 4% of the total length of the parts not fixed (the length in the length direction of the cylindrical target) (see FIG. 1(a)). The fixing portion of the protective film and the fixing portion of the sheet-like cushioning material were arranged so as to be at approximately the same position in the circumferential direction. This resulted in a package in which the cylindrical sputtering target was packaged in the sheet-like cushioning material.

[0066] Comparative Example 1 Comparative Example 1 relates to the conventional cylindrical sputtering target package and its manufacturing method described above with reference to FIG. As in Example 1, a cylindrical sputtering target (total length 2950 mm) was prepared, which had a length of 2750 mm, an outer diameter of 165 mm, an inner diameter of 126 mm, a cylindrical portion made of high-purity (99.999%) aluminum, and a flange portion and a cap portion made of an aluminum alloy at both longitudinal ends of the cylindrical portion. As in Example 1, the cylindrical surface of the cylindrical sputtering target was protected with a protective film ("Mitsui Masking Tape" (registered trademark), manufactured by Mitsui Chemicals Tohcello Inc.). The cylindrical sputtering target whose cylindrical surface was protected as described above was placed on one end in the width direction of a polyethylene bubble cushioning material "Air Cap" (registered trademark) C-800 (manufactured by Sakai Chemical Industry Co., Ltd.) with a length of 3700 mm and a width of 1100 mm as the sheet-like cushioning material, with their lengths aligned. Then, while lifting the cylindrical sputtering target, the sheet-like cushioning material was wound twice around the cylindrical surface of the cylindrical sputtering target, and the end of the winding was fixed with tape along the length direction (see FIG. 6). This resulted in a package in which the cylindrical sputtering target was packaged in the sheet-like cushioning material.

[0067] The package of Example 1 could be opened by simply peeling off the tape (for example, while the cylindrical sputtering target was placed on a U-shaped base or a U-shaped cushioning material in a box), without rotating the cylindrical sputtering target in the circumferential direction, and without cutting the sheet-like cushioning material. Such opening can be easily performed even in the case of a long and heavy cylindrical sputtering target, and there is no risk of damaging the cylindrical surface, which is the sputtering surface of the cylindrical sputtering target. In addition, since such opening can be performed without cutting the sheet-like cushioning material, there is no risk of dust originating from the sheet-like cushioning material being generated and scattered, which may contaminate the clean room. Furthermore, such opening can be easily performed by an operator inserting his or her fingers from the non-fixed portion (for example, the side of the tape) along between both ends of the sheet-like cushioning material and peeling off the tape of the fixed portion. In order to open the package of Comparative Example 1, it was necessary to either peel off the tape and rotate the cylindrical sputtering target in the circumferential direction, or cut the sheet-like cushioning material. [Industrial Applicability]

[0068] The packaging for the cylindrical sputtering target obtained by the present invention can be easily unpacked with the cylindrical sputtering target lying down, and further, there is no risk of contaminating a clean room, and it can be used to protect the cylindrical sputtering target from impacts and the like that may be applied during transportation and storage. [Explanation of symbols]

[0069] 1 Cylindrical sputtering target 3. Sheet-type cushioning material 3a, 3b layer 5. Tape 10 Packaging 11 Cylindrical sputtering target material 12 Adapters 13 Fixed part 21 Flange 22 Cap 23 Adapter ring 24 Adapter part 25 Backing Tube L Length direction R circumferential direction F Folding section A1, A2, B1, B2 (in cross section including circumferential direction) Ends

Claims

1. A method for manufacturing a package in which a cylindrical sputtering target is packaged in a sheet-like cushioning material, the cylindrical sputtering target having a length of 1000 mm or more and a mass of 20 kg or more, the cylindrical portion of the cylindrical sputtering target being covered with at least two layers of the same sheet-like cushioning material, and the two ends of the sheet-like cushioning material being overlapped or butted together by a length of less than half the circumference of the cylindrical portion in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target, and fixed to each other by at least one selected from the group consisting of tape, adhesive, and pressure-sensitive adhesive, thereby packaging the package.

2. The method for manufacturing a package according to claim 1, wherein the sheet-like cushioning material is folded to form two or more layers.

3. 3. The method for manufacturing a package according to claim 1, wherein both ends of the sheet-like cushioning material are overlapped such that an outer surface of one end is in contact with an inner surface of the other end.

4. 3. The method for manufacturing a package according to claim 1, wherein both end portions of the sheet-like cushioning material are overlapped such that an inner surface of one end portion contacts an inner surface of the other end portion.

5. The method for manufacturing a package according to any one of claims 1 to 4, wherein both ends of the sheet-like cushioning material are fixed to each other discontinuously in the longitudinal direction of the cylindrical sputtering target.

6. The method for manufacturing a package according to any one of claims 1 to 5, wherein the sheet-like cushioning material is a bubble cushioning material.

7. The method for manufacturing a package according to any one of claims 1 to 6, further comprising the step of: providing a protective film between the cylindrical sputtering target and the sheet-like cushioning material.

8. A package in which a cylindrical sputtering target is packaged in a sheet-like cushioning material, the cylindrical sputtering target having a length of 1000 mm or more and a mass of 20 kg or more, the cylindrical portion of the cylindrical sputtering target is covered with at least two layers of the same sheet-like cushioning material, and in a cross section including the circumferential direction of the cylindrical portion of the cylindrical sputtering target, both ends of the sheet-like cushioning material overlap or butt against each other for a length of less than half the circumference of the cylindrical portion, and are fixed to each other by at least one selected from the group consisting of tape, adhesive, and pressure-sensitive adhesive.

9. 9. The package according to claim 8, wherein the sheet-like cushioning material is folded to form two or more layers.

10. 10. The package according to claim 8, wherein both end portions of the sheet-like cushioning material are overlapped with an outer surface of one end portion being in contact with an inner surface of the other end portion.

11. 10. The package according to claim 8, wherein both end portions of the sheet-like cushioning material are overlapped with an inner surface of one end portion being in contact with an inner surface of the other end portion.

12. The package according to any one of claims 8 to 11, wherein both ends of the sheet-like cushioning material are fixed to each other discontinuously in the longitudinal direction of the cylindrical sputtering target.

13. The package according to any one of claims 8 to 12, wherein the sheet-like cushioning material is a bubble cushioning material.

14. The packaging body according to any one of claims 8 to 13, wherein a protective film is present between the cylindrical sputtering target and the sheet-like cushioning material.

Images