Semiconductor device and its manufacturing method

Abstract

To improve the performance of a memory cell including a ferroelectric film and to ensure the reliability of the memory cell.SOLUTION: A semiconductor device having a memory cell MC includes a plurality of semiconductor layers SI1 constituting a channel area, a pair of semiconductor layers SI2, provided to sandwich the plurality of semiconductor layers SI1 in the X direction, connected to the plurality of semiconductor layers SI1, and constituting a source area and a drain area, a plurality of normal dielectric films IL, each of which covers a periphery of the plurality of semiconductor layers SI1, a lower electrode BE covering the periphery of the plurality of normal dielectric films IL between the pair of semiconductor layers SI2, a ferroelectric film FE formed on the lower electrode BE, and an upper electrode TE formed on the ferroelectric film FE.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present invention relates to a semiconductor device and a manufacturing method thereof, and more particularly to a semiconductor device having a memory cell with a ferroelectric film and a manufacturing method thereof. [Background technology]

[0002] In recent years, nonvolatile memory cells using ferroelectric films such as HfZrO films (commonly known as HZO films) have been developed. As structures of such memory cells, MFIS-FET (Metal Ferroelectric Insulator Semiconductor - FET) structures in which an HZO film is formed on the gate insulating film of a MIS-FET (Metal Insulator Semiconductor - Field Effect Transistor), or MFMIS-FET (Metal Ferroelectric Metal Insulator Semiconductor - FET) structures in which an electrode is formed between the gate insulating film and the HZO film have been proposed. For example, Patent Document 1 discloses a memory cell with an MFIS-FET structure. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-201172 A Summary of the Invention [Problem to be solved by the invention]

[0004] Fig. 22 to Fig. 25 show memory cells of MFMIS-FET structure studied by the present inventors, which are memory cells in the study examples. Fig. 23 is a cross-sectional view taken along line DD in Fig. 22, Fig. 24 is a cross-sectional view taken along line EE in Fig. 22, and Fig. 25 is an equivalent circuit diagram of the memory cell.

[0005] Such a memory cell is manufactured as follows. First, a paraelectric film IL, a lower electrode BE, an amorphous HZO film, and an upper electrode TE are sequentially deposited on a semiconductor substrate SUB partitioned by an element isolation part STI. Next, an orthorhombic HZO film is formed by subjecting the amorphous HZO film to a heat treatment at 600 to 800°C. Since the orthorhombic HZO film has ferroelectricity, the orthorhombic HZO film can be used as the ferroelectric film FE.

[0006] Next, the paraelectric film IL, the lower electrode BE, the amorphous HZO film, and the upper electrode TE are patterned using a mask pattern of a polycrystalline silicon film, etc. This patterning determines the areas of the paraelectric film IL and the lower electrode BE.

[0007] Next, the ferroelectric film FE and the upper electrode TE are patterned using a mask pattern such as a polycrystalline silicon film. The areas of the ferroelectric film FE and the upper electrode TE are determined by this patterning. That is, the areas of the paraelectric film IL and the lower electrode BE are larger than the areas of the ferroelectric film FE and the upper electrode TE.

[0008] Thereafter, impurities are introduced into the semiconductor substrate SUB by ion implantation to form the source region SR and the drain region DR. In this manner, a memory cell having an MFMIS-FET structure is manufactured.

[0009] During write and erase operations of the memory cell, a gate voltage Vg is applied to the top electrode TE, a source voltage Vs is applied to the source region, and a drain voltage Vd is applied to the drain region. If the memory cell is an n-type FET, when a positive bias is applied to the top electrode TE, the polarization in the ferroelectric film FE is directed downward, and the threshold voltage is lowered. On the other hand, when a negative bias is applied to the top electrode TE, the polarization in the ferroelectric film FE is directed upward, and the threshold voltage is raised.

[0010] As shown in FIG. 25, during the write operation and erase operation of the memory cell, the gate voltage Vg is applied to the upper electrode TE, and the gate voltage Vg is divided into the gate voltage Vg_FE and the gate voltage Vg_IL in the ferroelectric film FE and the paraelectric film IL. In order to apply a higher voltage to the ferroelectric film FE, it is effective to relatively reduce the capacitance of the ferroelectric film FE and relatively increase the capacitance of the paraelectric film IL. As one method for achieving this, it is effective to change the area ratio of the upper electrode TE and the lower electrode BE. In the case of the above-mentioned memory cell, it is effective to reduce the areas of the ferroelectric film FE and the upper electrode TE, and to increase the areas of the paraelectric film IL and the lower electrode BE. In other words, it is effective to reduce the contact area between the ferroelectric film FE and the lower electrode BE, and to increase the contact area between the paraelectric film IL and the lower electrode BE.

[0011] However, if the area of ​​the lower electrode BE is set to the minimum processing dimension, the area of ​​the upper electrode TE cannot be made smaller than the area of ​​the lower electrode BE. On the other hand, if the area of ​​the upper electrode TE is set to the minimum processing dimension, the area of ​​the lower electrode BE becomes large, so that the planar size of the memory cell becomes large and miniaturization of the memory cell is hindered. Thus, the memory cells of Figures 22 to 25 have a problem that the area ratio of each electrode cannot be freely designed so that the capacitance of the ferroelectric film FE is relatively small and the capacitance of the paraelectric film IL is relatively large.

[0012] 22 to 25, in order to manufacture electrode structures with different area ratios, the ferroelectric film FE is exposed to plasma during dry etching. That is, there is also a problem that the orthorhombic HZO film is damaged by plasma, which reduces the reliability of the memory cell.

[0013] The main object of the present application is to improve the performance of the memory cell by making the capacitance of the ferroelectric film FE relatively small and the capacitance of the paraelectric film IL relatively large so as not to hinder the miniaturization of the memory cell. Another object of the present application is to ensure the reliability of the memory cell by preventing the ferroelectric film FE from being exposed to plasma during the manufacturing process.

[0014] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0015] In one embodiment, a semiconductor device having a nonvolatile memory cell includes a plurality of first semiconductor layers each extending in a first direction and each constituting a channel region of the nonvolatile memory cell, a pair of second semiconductor layers arranged to sandwich the plurality of first semiconductor layers in the first direction, connected to the plurality of first semiconductor layers, and constituting a source region and a drain region of the nonvolatile memory cell, a plurality of paraelectric films covering the outer peripheries of the plurality of first semiconductor layers between the pair of second semiconductor layers, a lower electrode covering the outer peripheries of the plurality of paraelectric films between the pair of second semiconductor layers, a ferroelectric film formed on the lower electrode, and an upper electrode formed on the ferroelectric film.

[0016] In one embodiment, a method for manufacturing a semiconductor device having nonvolatile memory cells includes: (a) forming a stack of dummy layers extending in a first direction and first semiconductor layers extending in the first direction by alternately stacking the dummy layers and the first semiconductor layers in a second direction intersecting the first direction; (b) forming a dummy pattern covering a portion of the stack after the step (a); (c) forming a pair of sidewall spacers covering a portion of the stack exposed from the dummy pattern so as to sandwich the dummy pattern in the first direction after the step (b); (d) removing the dummy pattern and the first semiconductor layers exposed from the pair of sidewall spacers after the step (c); (e) removing the first semiconductor layers after the step (d); and (f) forming a first insulating layer and a second insulating layer in a space where the first semiconductor layers were present after the step (e). (g) after the step (f), a step of forming a pair of second semiconductor layers connected to the plurality of first semiconductor layers so as to sandwich the plurality of first semiconductor layers and the pair of sidewall spacers in the first direction; (h) after the step (g), a step of removing the dummy pattern and the plurality of first insulating films covered by the dummy pattern between the pair of sidewall spacers to expose the plurality of first semiconductor layers; (i) after the step (h), a step of forming a plurality of paraelectric films on the periphery of the plurality of first semiconductor layers; (j) after the step (i), a step of forming a lower electrode on the periphery of the plurality of paraelectric films; (k) after the step (j), a step of forming an amorphous film on the lower electrode; (l) after the step (k), a step of forming an upper electrode on the amorphous film; and (m) after the step (k), a step of forming a ferroelectric film by performing a heat treatment on the amorphous film. Here, the plurality of first semiconductor layers each constitute a channel region of the nonvolatile memory cell, and the pair of second semiconductor layers constitute a source region and a drain region of the nonvolatile memory cell. Effect of the Invention

[0017] According to one embodiment, it is possible to improve the performance of a memory cell having a ferroelectric film, and also to ensure the reliability of the memory cell. [Brief description of the drawings]

[0018] [Figure 1] 1 is a perspective view showing a semiconductor device having a memory cell according to a first embodiment. [Diagram 2] 1 is a cross-sectional view showing a semiconductor device having a memory cell in a first embodiment. [Diagram 3] 1 is a cross-sectional view showing a semiconductor device having a memory cell in a first embodiment. [Figure 4] 1 is a cross-sectional view showing a semiconductor device having a memory cell in a first embodiment. [Diagram 5] 2 is a perspective view showing dimensions of a portion of a memory cell in the first embodiment. FIG. [Figure 6] 2 is a perspective view showing dimensions of a portion of a memory cell in the first embodiment. FIG. [Figure 7] 1 is a perspective view showing a manufacturing method of the semiconductor device in the first embodiment. [Figure 8] 8 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 7. [Figure 9] 9 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 8. [Figure 10] 10 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. [Figure 11] 11 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 10. [Figure 12] 12 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 11. [Figure 13] 13 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 12. [Figure 14] 14 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 13. [Figure 15] 15 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 14. [Figure 16] 16 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 15. [Figure 17] 17 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 16. [Figure 18] 18 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 17. [Figure 19] 19 is a perspective view showing the method of manufacturing the semiconductor device subsequent to FIG. 18. [Figure 20] FIG. 11 is a perspective view showing a semiconductor device having a memory cell according to a second embodiment. [Figure 21] FIG. 11 is a perspective view showing a manufacturing method of a semiconductor device in the second embodiment. [Figure 22] FIG. 13 is a plan view showing a memory cell in the study example. [Diagram 23] FIG. 13 is a cross-sectional view showing a memory cell in the study example. [Figure 24] FIG. 13 is a cross-sectional view showing a memory cell in the study example. [Diagram 25] FIG. 11 is an equivalent circuit diagram showing a memory cell in the study example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019] Hereinafter, the embodiments will be described in detail with reference to the drawings. In all the drawings for explaining the embodiments, the same reference numerals are used for the members having the same functions, and the repeated explanations are omitted. In the following embodiments, the explanations of the same or similar parts will not be repeated as a rule unless it is particularly necessary.

[0020] In addition, the X, Y, and Z directions described in this application intersect and are perpendicular to each other. The expression "planar view" described in this application means that the plane formed by the X and Y directions is viewed from the Z direction. In addition, in the numerical range described in this application, for example, an expression such as "1 to 3 nm" means "1 nm or more and 3 nm or less."

[0021] (Embodiment 1) <Configuration of Memory Cell in Semiconductor Device> An overview of the semiconductor device in the first embodiment will be described below with reference to Figures 1 to 4. Figure 2 is a cross-sectional view taken along line AA in Figure 1, Figure 3 is a cross-sectional view taken along line BB in Figure 1, and Figure 4 is a cross-sectional view taken along line CC in Figure 1.

[0022] The semiconductor device is, for example, a semiconductor chip, and includes a plurality of memory cells MC, a CPU, a RAM, an analog circuit, an I / O circuit, etc. The memory cells MC are non-volatile memory cells having a ferroelectric film FE, and have an MFMIS-FET structure.

[0023] The semiconductor substrate (semiconductor wafer) SUB is made of p-type single crystal silicon (Si) having a resistivity of, for example, about 1 to 10 Ωcm. An element isolation part STI is formed in the semiconductor substrate SUB. The element isolation part STI is made of a trench formed in the semiconductor substrate SUB and an insulating film such as a silicon oxide film embedded in the trench. The memory cells MC are formed on the semiconductor substrate SUB and on the element isolation part STI.

[0024] As shown in Figures 1 to 4, a memory cell MC includes all or some of a plurality of semiconductor layers SI1, a pair of semiconductor layers SI2, a plurality of paraelectric films IL, a ferroelectric film FE, a lower electrode BE, an upper electrode TE, a pair of sidewall spacers SW, conductive layers PG1 to PG3, and insulating films IF2 to IF4.

[0025] Each of the semiconductor layers SI1 extends in the X direction and constitutes a channel region of a memory cell MC. Each of the semiconductor layers SI1 is made of silicon (Si). The thickness of each of the semiconductor layers SI1 is, for example, 5 to 30 nm. The semiconductor layers SI1 are provided adjacent to each other and spaced apart in the Z direction. Here, a case where the number of the semiconductor layers SI1 is four is illustrated, but the number of the semiconductor layers SI1 can be changed as appropriate.

[0026] The pair of semiconductor layers SI2 are provided to sandwich the multiple semiconductor layers SI1 in the X direction, are connected to the multiple semiconductor layers SI1, and form the source region and drain region of the memory cell MC. The pair of semiconductor layers SI2 are each made of silicon (Si) and are integrated with the multiple semiconductor layers SI1. Here, the memory cell MC is an n-type memory cell. Therefore, impurities exhibiting n-type conductivity, such as arsenic (As) or phosphorus (P), are introduced into the pair of semiconductor layers SI2.

[0027] The plurality of paraelectric films IL cover the outer peripheries of the plurality of semiconductor layers SI1 between a pair of semiconductor layers SI2. In other words, the plurality of paraelectric films IL are formed on the upper surface, the lower surface and both side surfaces of the plurality of semiconductor layers SI1. Also, the plurality of paraelectric films IL are each formed of a silicon oxide film (SiO 2 film), silicon oxynitride film (SiON film) or monoclinic hafnium oxide film (HfO 2 Each of the plurality of paraelectric films IL has a thickness of, for example, 1 to 3 nm.

[0028] The lower electrode BE covers the outer periphery of the plurality of paraelectric films IL between a pair of semiconductor layers SI2. The lower electrode BE is provided so as to fill the space between the plurality of semiconductor layers SI1 via the plurality of paraelectric films IL. For example, two paraelectric films IL and a lower electrode BE are provided between two adjacent semiconductor layers SI1 in the Z direction. The lower electrode BE is made of a metal material, for example, titanium nitride (TiN).

[0029] The ferroelectric film FE is formed on the bottom electrode BE. As shown in Fig. 4, the ferroelectric film FE is also formed on part of the side surface of the bottom electrode BE in the Y direction, and as shown in Fig. 2 and Fig. 3, the ferroelectric film FE is also formed on the side surface of the sidewall spacer SW in the X direction. The ferroelectric film FE is made of rectangular HfO 2A film or a rectangular HfO doped with at least one of zirconium (Zr), silicon (Si), nitrogen (N), carbon (C) and aluminum (Al). 2 It is a membrane.

[0030] The upper electrode TE is formed on the ferroelectric film FE. As shown in FIG. 4, the upper electrode TE is also formed on the side surface of the ferroelectric film FE in the Y direction. The upper electrode TE is made of a metal material, for example, titanium nitride (TiN). The multiple semiconductor layers SI1 and the pair of semiconductor layers SI2, the lower electrode BE, and the upper electrode TE are electrically insulated from each other.

[0031] Each of the insulating films IF2 is formed on the upper surface and the lower surface of the semiconductor layer SI1 in the vicinity of the end of the semiconductor layer SI1. That is, in the vicinity of the end of the semiconductor layer SI1, the insulating films IF2 and the semiconductor layers SI1 are alternately stacked in the Z direction. The insulating films IF2 are made of, for example, a silicon oxide film (SiO 2 membrane).

[0032] The pair of sidewall spacers SW are provided to sandwich the ferroelectric film FE and the upper electrode TE in the X direction. Although not visible here, the sidewall spacers SW are also provided around the insulating films IF2 and the semiconductor layers SI1 near the end of the semiconductor layer SI1. The insulating films IF2 and the semiconductor layers SI1 are exposed from the sidewall spacers SW in the X direction and are in contact with the pair of semiconductor layers SI2. The sidewall spacers SW are made of an insulating film, for example, a silicon nitride film (SiN film).

[0033] The pair of insulating films IF3 are provided to sandwich the sidewall spacer SW in the X direction and cover the pair of semiconductor layers SI2 so that the pair of semiconductor layers SI2 is not exposed. 2 membrane).

[0034] The pair of insulating films IF4 are provided so as to sandwich the lower electrode BE in the Y direction. The upper surface of the insulating film IF4 is located at a position lower than the upper surface of the lower electrode BE, and the upper portion of the lower electrode BE is exposed from the insulating film IF4. A ferroelectric film FE and an upper electrode TE covering the side surface of the lower electrode BE are provided on the insulating film IF4. The insulating film IF4 is formed of, for example, a silicon oxide film (SiO 2 membrane).

[0035] Although not shown, the memory cell MC is covered with an interlayer insulating film. A conductive layer (plug) PG1 and two conductive layers (plugs) PG2 are provided in the interlayer insulating film. The conductive layer PG1 and the two conductive layers PG2 are each made of a laminated film of a barrier metal film, such as a titanium nitride film, and a tungsten film.

[0036] The conductive layer PG1 is provided to apply a gate voltage to the upper electrode TE. The conductive layer PG1 is formed on the upper electrode TE and is electrically connected to the upper electrode TE. The two conductive layers PG2 are provided to apply a source voltage or a drain voltage to the pair of semiconductor layers SI2. The two conductive layers PG2 are formed on the pair of semiconductor layers SI2 through the insulating film IF3 and are electrically connected to the pair of semiconductor layers SI2.

[0037] <Rewrite operation of memory cell MC> The write, erase and read operations of the memory cell MC will be described below. The equivalent circuit of the memory cell MC is the same as that shown in FIG.

[0038] Here, the case where the polarization state of the ferroelectric film FE is the first polarization state (upward) is referred to as the "written state". Also, the case where the polarization state of the ferroelectric film FE is a second polarization state (downward) different from the first polarization state is referred to as the "erased state". Note that the threshold voltage of the memory cell MC in the written state is higher than the threshold voltage of the memory cell MC in the erased state.

[0039] In a write operation, a negative gate voltage is applied to the upper electrode TE, and the same source or drain voltage is applied to the pair of semiconductor layers SI2. For example, a gate voltage of -3V is applied to the upper electrode TE, a source voltage of 0V is applied to one semiconductor layer SI2, and a drain voltage of 0V is applied to the other semiconductor layer SI2. No voltage is applied to the lower electrode BE. That is, the lower electrode BE is in a floating state. This causes the polarization state of the ferroelectric film FE to be the first polarization state. That is, the memory cell MC is in a write state.

[0040] In the erase operation, a positive gate voltage is applied to the upper electrode TE, and the same source or drain voltage is applied to the pair of semiconductor layers SI2. For example, a gate voltage of 3V is applied to the upper electrode TE, a source voltage of 0V is applied to one semiconductor layer SI2, and a drain voltage of 0V is applied to the other semiconductor layer SI2. The lower electrode BE is in a floating state. This causes the polarization state of the ferroelectric film FE to be the second polarization state. That is, the memory cell MC is in an erased state.

[0041] In the read operation, a gate voltage of a predetermined value is applied to the upper electrode TE, and source or drain voltages of different values ​​are applied to the pair of semiconductor layers SI2. For example, a gate voltage of 0V is applied to the upper electrode TE, a source voltage of 1V is applied to one semiconductor layer SI2, and a drain voltage of 0V is applied to the other semiconductor layer SI2. The lower electrode BE is in a floating state.

[0042] The voltage applied to the top electrode TE during a read operation is set to be greater than the threshold voltage of the memory cell MC in the erased state and less than the threshold voltage of the memory cell MC in the written state. This causes no current to flow in the memory cell MC in the written state, and causes a current to flow in the memory cell MC in the erased state. In this way, the state of the memory cell MC is read based on the magnitude of the current flowing in the memory cell MC.

[0043] <Major Effects of the First Embodiment> As described above, the gate voltage Vg is divided into the gate voltage Vg_FE and the gate voltage Vg_IL in the ferroelectric film FE and the paraelectric film IL. Therefore, in order to apply a higher voltage to the ferroelectric film FE, it is effective to relatively reduce the capacitance of the ferroelectric film FE and relatively increase the capacitance of the paraelectric film IL. In other words, it is effective to reduce the contact area between the ferroelectric film FE and the lower electrode BE and increase the contact area between the paraelectric film IL and the lower electrode BE.

[0044] The contact area between the plurality of paraelectric films IL and the lower electrode BE will be described below with reference to FIG. 5, and the contact area between the ferroelectric film FE and the lower electrode BE will be described with reference to FIG.

[0045] As shown in Fig. 5, the contact area between the plurality of paraelectric films IL and the lower electrode BE is calculated by the following formula 1. Here, "n" is the number of the plurality of semiconductor layers SI1. As shown in Fig. 6, the contact area between the ferroelectric film FE and the lower electrode BE is calculated by the following formula 2.

[0046] (2×L IL W IL +2×L IL H IL ) × n (Formula 1)

[0047] L FE W FE +2×L FE H FE ...(Formula 2)

[0048] In the memory cell MC in the first embodiment, a plurality of semiconductor layers SI1 that become channel regions are provided and are stacked in the Z direction. Therefore, by adjusting the number of the plurality of semiconductor layers SI1, the contact area between the plurality of paraelectric films IL that cover the outer peripheries of the plurality of semiconductor layers SI1 and the lower electrode BE can be freely designed. That is, the more the number of the plurality of semiconductor layers SI1 is, the larger the contact area between the plurality of paraelectric films IL and the lower electrode BE can be without increasing the planar size of the memory cell MC.

[0049] On the other hand, the contact area between the ferroelectric film FE and the lower electrode BE is determined by the dimension L of the lower electrode BE. 2 , W 2 and H 2 By changing the dimensions appropriately, you can freely design the product. 2 Since the position of the upper surface of the insulating film IF4 and the position of the upper surface of the lower electrode BE can be adjusted by adjusting the amount of etching for recessing the insulating film IF4, the contact area between the ferroelectric film FE and the lower electrode BE can be easily reduced.

[0050] As described above, according to the first embodiment, the contact area between the ferroelectric film FE and the lower electrode BE can be made smaller than the contact area between the plurality of paraelectric films IL and the lower electrode BE. Therefore, the performance of the memory cell MC can be improved without impeding the miniaturization of the memory cell MC.

[0051] <Method of Manufacturing Semiconductor Device> A method for manufacturing the semiconductor device in the first embodiment will be described below with reference to FIGS.

[0052] First, as shown in FIG. 7, dummy layers DL extending in the X direction and semiconductor layers SI1 extending in the X direction are alternately stacked in the Z direction to form a laminate LM consisting of a plurality of dummy layers DL and a plurality of semiconductor layers SI1.

[0053] Specifically, first, the dummy layers DL and the semiconductor layers SI1 are alternately laminated on the semiconductor substrate SUB by epitaxial growth. The semiconductor layers SI1 are made of, for example, silicon, and the dummy layers DL are made of a semiconductor material different from that of the semiconductor layers SI1, for example, silicon germanium. The thickness of the semiconductor layers SI1 is, for example, 5 to 30 nm, and the thickness of the dummy layers DL is, for example, 10 to 30 nm.

[0054] Next, a laminated film made of a silicon nitride film and a silicon oxide film is formed on the topmost dummy layer DL, for example, by a CVD (Chemical Vapor Deposition) method. Next, the laminated film is patterned to form a mask layer. Next, a dry etching process is performed using the mask layer as an etching mask to pattern the laminated body LM, and further a groove is formed in the semiconductor substrate SUB. Next, a silicon oxide film is embedded in the groove, for example, by a CVD method.

[0055] Next, the silicon oxide film is polished by, for example, a chemical mechanical polishing (CMP) method to expose the dummy layer DL, which is the top layer of the laminate LM. Next, the silicon oxide film is recessed by, for example, a wet etching process or a dry etching process using hydrofluoric acid to expose the side surfaces of the laminate LM (the side surfaces of the multiple dummy layers DL and the side surfaces of the multiple semiconductor layers SI1). As a result, an element isolation part STI consisting of the groove and the silicon oxide film is formed in the semiconductor substrate SUB.

[0056] Next, for example, by performing thermal oxidation treatment, an insulating film IF1 made of, for example, a silicon oxide film is formed on the side surface of the laminate LM and the upper surface of the uppermost dummy layer DL of the laminate LM. The thickness of the insulating film IF1 is, for example, 1 to 3 nm.

[0057] Next, a conductive film such as a polycrystalline silicon film is formed by, for example, a CVD method so as to cover the laminate LM. The thickness of the conductive film is, for example, 100 nm. Next, although not shown, the conductive film is patterned so that the conductive film is divided between adjacent memory cells MC in the Y direction. Next, an insulating film such as a silicon nitride film is filled between the conductive films adjacent in the Y direction. Next, a part of the conductive film is patterned in the X direction to form a dummy pattern DP that covers a part of the laminate LM. In the following description, the element isolation part STI is omitted from the illustration for simplification.

[0058] Next, as shown in FIG. 8, an insulating film is formed by, for example, a CVD method so as to cover the laminated body LM and the dummy pattern DP. The insulating film is made of a silicon nitride film or a laminated film of a silicon nitride film and a silicon oxide film. Next, an anisotropic dry etching process is performed on the insulating film to form a pair of sidewall spacers SW so as to sandwich the dummy pattern DP in the X direction. The pair of sidewall spacers SW are also formed so as to cover a part of the laminated body LM exposed from the dummy pattern DP.

[0059] Next, the dummy layers DL and the semiconductor layers SI1 exposed from the dummy pattern DP and the pair of sidewall spacers SW are removed. After that, although not shown in detail, an isotropic etching process is performed on the semiconductor layers SI1 to set back the ends of each of the semiconductor layers SI1.

[0060] Next, as shown in Fig. 9, the multiple dummy layers DL are subjected to an isotropic etching process to remove the multiple dummy layers DL. Next, as shown in Fig. 10, an insulating film IF2 such as a silicon oxide film is filled into the spaces where the multiple dummy layers DL were previously present, for example, by an ALD (Atomic Layer Deposition) method. At this time, the insulating film IF2 is formed in spaces other than the spaces where the multiple dummy layers DL were previously present, and such insulating film IF2 is removed by performing anisotropic etching.

[0061] In this embodiment, the laminate LM is formed by alternately stacking the dummy layer DL and the semiconductor layer SI1 by epitaxial growth, but the state of FIG. 10 can also be formed by alternately stacking the insulating film IF2 and the semiconductor layer SI1 from the beginning. In that case, it is considered to use a polycrystalline silicon layer formed by a CVD method as the semiconductor layer SI1. However, the semiconductor layer SI1 is used as a channel region. The polycrystalline silicon layer has more crystal defects than the epitaxial layer, so the channel mobility is lowered. Therefore, it is effective to form the dummy layer DL and the semiconductor layer SI1 by epitaxial growth as in the first embodiment.

[0062] Next, as shown in FIG. 11, a pair of semiconductor layers SI2 connected to the plurality of semiconductor layers SI1 are formed so as to sandwich the plurality of semiconductor layers SI1 and the pair of sidewall spacers SW in the X direction. The pair of semiconductor layers SI2 are formed as silicon layers containing impurities, for example, by epitaxial growth. The impurities are, for example, phosphorus (P) or the like that exhibit n-type conductivity. In order to form such a pair of semiconductor layers SI2, for example, monosilane (SiH 4 ), disilane (Si 3 H 6 ), dichlorosilane (SiH 2 Cl 2 ) or trichlorosilane (SiHCl 3 ) and other major gases, and POSP (PH 3 After the pair of semiconductor layers SI2 are formed, an impurity such as arsenic (As) may be selectively injected into the pair of semiconductor layers SI2 using a resist pattern or the like.

[0063] Here, as described in FIG. 8, the ends of each of the multiple semiconductor layers SI1 are recessed. In FIG. 11, a pair of semiconductor layers SI2 are grown using silicon at these ends as nuclei. Here, the semiconductor layer SI2 is grown containing impurities such as phosphorus (P), and therefore the lattice spacing of the semiconductor layer SI2 is different from that of the semiconductor layer SI1. For this reason, tensile stress is generated in the semiconductor layer SI1 from the pair of semiconductor layers SI2. This tensile stress improves the mobility of electrons flowing through the channel region.

[0064] 12, an insulating film IF3 such as a silicon oxide film is formed by, for example, a CVD method so as to cover the dummy pattern DP, the sidewall spacers SW, and the pair of semiconductor layers SI2. Next, the insulating film IF3 is polished by a CMP method to expose the dummy pattern DP and the sidewall spacers SW.

[0065] 13, the dummy pattern DP and the insulating films IF2 covered by the dummy pattern DP are removed between the pair of sidewall spacers SW by wet etching. The insulating films IF1 formed on the side surfaces of the semiconductor layers SI1 are also removed together with the insulating films IF2. This exposes the semiconductor layers SI1 between the pair of sidewall spacers SW. The exposed semiconductor layers SI1 may be heat-treated in a hydrogen atmosphere to round off the corners of the semiconductor layers SI1.

[0066] Next, as shown in FIG. 14, a plurality of paraelectric films IL are formed on the periphery of the plurality of semiconductor layers SI1. In other words, a plurality of paraelectric films IL are formed on the upper surface, the lower surface and both side surfaces of the plurality of semiconductor layers SI1. The paraelectric films IL can be formed by, for example, the ISSG oxidation method or the ALD method. Here, the area of ​​the plurality of paraelectric films IL is the contact area between the plurality of paraelectric films IL and the lower electrode BE as described in FIG. 5.

[0067] Next, as shown in FIG. 15, a lower electrode BE is formed on the outer periphery of the plurality of paraelectric films IL. The lower electrode BE is formed as follows. First, a titanium nitride film is formed by, for example, a CVD method so as to cover the plurality of paraelectric films IL. Next, the titanium nitride film is patterned so that the titanium nitride film is left as the lower electrode BE between the pair of sidewall spacers SW. At this time, a part of the lower electrode BE may not be completely removed and may remain on the side surfaces of the pair of sidewall spacers SW. In this state, two paraelectric films IL and a lower electrode BE are provided between two adjacent semiconductor layers SI1 in the Z direction.

[0068] 16, an insulating film IF4 such as a silicon oxide film is formed by, for example, a CVD method so as to cover the lower electrode BE. Next, the insulating film IF4 is polished by a CMP method to expose the sidewall spacer SW and the insulating film IF3. Thereafter, the lower electrode BE may be recessed by performing an isotropic etching process on a part of the lower electrode BE remaining on the side surfaces of the pair of sidewall spacers SW.

[0069] 17, the insulating film IF4 is recessed by performing an anisotropic etching process on the insulating film IF4. As a result, the position of the upper surface of the insulating film IF4 becomes lower than the position of the upper surface of the lower electrode BE, and the upper part of the lower electrode BE is exposed. Here, the area of ​​the exposed lower electrode BE becomes the contact area between the ferroelectric film FE and the lower electrode BE as described in FIG.

[0070] Next, as shown in FIG. 18, an amorphous film AM is formed on the lower electrode BE. The amorphous film AM is formed by, for example, the ALD method so as to cover the lower electrode BE. At this time, a part of the amorphous film AM is formed also on the side surfaces and upper surfaces of the pair of sidewall spacers SW and the upper surface of the insulating film IF3. Note that the lower electrode BE formed on the side surfaces of the pair of sidewall spacers SW is covered with a part of this amorphous film AM.

[0071] Next, as shown in FIG. 19, an upper electrode TE is formed on the amorphous film AM. The upper electrode TE is formed as follows. First, a titanium nitride film is formed by, for example, a CVD method so as to cover the amorphous film AM and the sidewall spacer SW. Next, the titanium nitride film and the amorphous film AM formed on the upper surfaces of the pair of sidewall spacers SW and the upper surface of the insulating film IF3 are polished by a CMP method. This exposes the sidewall spacer SW, the insulating film IF3, and the amorphous film AM formed on the side surface of the sidewall spacer SW.

[0072] Next, the amorphous film AM is subjected to a heat treatment at 600 to 800° C. to form a ferroelectric film FE as an insulating film having ferroelectricity. In this manner, the memory cell MC is manufactured. Before this heat treatment, the amorphous film AM is not exposed to plasma. This heat treatment is performed in a state where the ferroelectric film FE is covered by the upper electrode TE. Therefore, in the manufacturing process of the first embodiment, the ferroelectric film FE can be formed without being exposed to plasma, and therefore the reliability of the memory cell MC can be ensured.

[0073] Thereafter, the semiconductor device shown in FIGS. 1 to 4 is manufactured through the following manufacturing steps. First, an interlayer insulating film (not shown) is formed by, for example, a CVD method so as to cover the memory cells MC. Next, a plurality of contact holes are formed in the interlayer insulating film. Next, a laminated film of a barrier metal film, such as a titanium nitride film, and a tungsten film is embedded in the plurality of contact holes to form a plurality of conductive layers (plugs).

[0074] For example, a conductive layer PG1 for applying a gate voltage to the upper electrode TE is formed on the upper electrode TE, and a conductive layer PG2 for applying a source voltage or a drain voltage to the pair of semiconductor layers SI2 is formed on the pair of semiconductor layers SI2.

[0075] (Embodiment 2) The semiconductor device in the second embodiment will be described below with reference to Figures 20 and 21. In the following description, differences from the first embodiment will be mainly described, and descriptions of points that overlap with the first embodiment will be omitted.

[0076] In the first embodiment, the bottom electrode BE is not electrically connected to the conductive layers PG1, PG2, etc., and is in a floating state during the write operation, erase operation, and read operation of the memory cell MC.

[0077] 20, in the second embodiment, a part of the lower electrode BE is also formed as an extension portion BEa on each side surface of a pair of sidewall spacers SW. The lower electrode BE is electrically connected to a conductive layer (plug) PG3 via the extension portion BEa. During a write operation and an erase operation of the memory cell MC, a gate voltage is applied to the upper electrode TE from the conductive layer PG1, while a voltage different from the gate voltage is applied to the lower electrode BE from the conductive layer PG3.

[0078] In the second embodiment, the values ​​of the source voltage and the drain voltage during the write operation, the erase operation, and the read operation are the same as those in the first embodiment.

[0079] In a write operation, a negative gate voltage is applied to the upper electrode TE, and a positive voltage is applied to the lower electrode BE. For example, a gate voltage of -3V is applied to the upper electrode TE, and 3V is applied to the lower electrode BE. In an erase operation, a positive gate voltage is applied to the upper electrode TE, and a negative voltage is applied to the lower electrode BE. For example, a gate voltage of 3V is applied to the upper electrode TE, and -3V is applied to the lower electrode BE. In a read operation, a gate voltage of a predetermined value is applied to the upper electrode TE, and the same voltage as the gate voltage is applied to the lower electrode BE. For example, a gate voltage of 0V is applied to the upper electrode TE, and 0V is applied to the lower electrode BE.

[0080] In this way, even in the second embodiment, the write operation, the erase operation, and the read operation of the memory cell MC can be performed. In the second embodiment, the voltages applied to the upper electrode TE and the lower electrode BE can be controlled independently, so that the controllability of the memory cell MC can be improved. That is, the division of the gate voltage Vg into the gate voltage Vg_IL in the paraelectric film IL can be reduced, so that a higher voltage can be applied to the ferroelectric film FE.

[0081] The lead-out portion BEa can be formed as follows. As shown in Fig. 21, when the titanium nitride film is patterned in Fig. 15, the titanium nitride film is left on each side surface of the pair of sidewall spacers. Moreover, the step of retracting the bottom electrode BE performed in Fig. 16 is not performed in the second embodiment. In this way, a part of the bottom electrode BE is also formed as the lead-out portion BEa on each side surface of the pair of sidewall spacers SW.

[0082] Then, after the process of forming the ferroelectric film FE and the upper electrode TE, a conductive layer PG3 for applying a voltage different from the gate voltage to the lower electrode BE is formed on the extension portion BEa in the same manner as the process of forming the conductive layers PG1 and PG2, thereby electrically connecting the conductive layer PG3 and the lower electrode BE.

[0083] Although the present invention has been specifically described above based on the above embodiment, the present invention is not limited to the above embodiment and can be modified in various ways without departing from the spirit of the present invention. [Explanation of symbols]

[0084] AM amorphous film BE Lower electrode BEa Drawer section DL Dummy layer (SiGe layer) DP Dummy Pattern DR Drain region FE Ferroelectric film IF1~IF4 insulating film IL Paraelectric film LM laminate MC memory cell PG1~PG3 Conductive layers (plugs) SI1, SI2 Semiconductor layer (Si layer) SR Source Region STI element isolation section SUB Semiconductor Substrate SW Sidewall spacer TE Upper Electrode

Claims

1. A semiconductor device having a non-volatile memory cell, a plurality of first semiconductor layers each extending in a first direction and each constituting a channel region of the non-volatile memory cell; a pair of second semiconductor layers provided to sandwich the first semiconductor layers in the first direction, connected to the first semiconductor layers, and constituting a source region and a drain region of the nonvolatile memory cell; a plurality of paraelectric films covering the outer peripheries of the plurality of first semiconductor layers between the pair of second semiconductor layers; a lower electrode covering the outer periphery of the plurality of paraelectric films between the pair of second semiconductor layers; a ferroelectric film formed on the lower electrode; an upper electrode formed on an upper surface and a side surface of the ferroelectric film; a pair of sidewall spacers provided to sandwich the ferroelectric film and the upper electrode; Equipped with a contact area between the lower electrode and the ferroelectric film is smaller than a contact area between the lower electrode and the plurality of paraelectric films.

2. 2. The semiconductor device according to claim 1, the first semiconductor layers are spaced apart from one another in a second direction intersecting the first direction; In the second direction, two of the paraelectric films and the lower electrode are provided between two of the first semiconductor layers.

3. 2. The semiconductor device according to claim 1, In a write operation and an erase operation of the nonvolatile memory cell, a gate voltage is applied to the upper electrode, and the lower electrode is in a floating state.

4. 2. The semiconductor device according to claim 1, In a write operation and an erase operation of the nonvolatile memory cell, a gate voltage is applied to the upper electrode, and a voltage different from the gate voltage is applied to the lower electrode.

5. 2. The semiconductor device according to claim 1, The paraelectric film is a silicon oxide film, a silicon oxynitride film, or a monoclinic HfO ２ A membrane, The ferroelectric film is a rectangular HfO ２ A film of HfO or a rectangular crystal with at least one of Zr, Si, N, C, and Al added thereto. ２ The semiconductor device is a film.

6. 2. The semiconductor device according to claim 1, The semiconductor device, wherein the plurality of first semiconductor layers and the pair of second semiconductor layers are each made of silicon.

7. 2. The semiconductor device according to claim 1, The lower electrode and the upper electrode are each made of titanium nitride.

8. A method for manufacturing a semiconductor device having a nonvolatile memory cell, comprising the steps of: (a) forming a stacked body including a plurality of dummy layers and a plurality of first semiconductor layers by alternately stacking dummy layers extending in a first direction and first semiconductor layers extending in the first direction in a second direction intersecting the first direction; (b) forming a dummy pattern covering a part of the laminate after the step (a); (c) after the step (b), forming a pair of sidewall spacers to sandwich the dummy pattern in the first direction and cover a portion of the stack exposed from the dummy pattern; (d) after the step (c), removing the plurality of dummy layers and the plurality of first semiconductor layers exposed from the dummy pattern and the pair of sidewall spacers; (e) removing the plurality of dummy layers after the step (d); (f) after the step (e), filling a plurality of first insulating films into spaces in which the plurality of dummy layers were previously present; (g) after the step (f), forming a pair of second semiconductor layers connected to the plurality of first semiconductor layers so as to sandwich the plurality of first semiconductor layers and the pair of sidewall spacers in the first direction; (h) after the step (g), removing the dummy pattern and the first insulating films covered by the dummy pattern between the pair of sidewall spacers to expose the first semiconductor layers; (i) after the step (h), forming a plurality of paraelectric films on the outer periphery of the plurality of first semiconductor layers; (j) after the step (i), forming a lower electrode on the outer periphery of the plurality of paraelectric films; (k) after the step (j), forming an amorphous film on the lower electrode; (l) after the step (k), forming an upper electrode on the upper surface and side surfaces of the amorphous film; (m) after the step (l), performing a heat treatment on the amorphous film while the amorphous film is disposed between the pair of sidewall spacers and covered by the upper electrode, thereby forming a ferroelectric film; Equipped with the first semiconductor layers each constitute a channel region of the nonvolatile memory cell; the pair of second semiconductor layers constitute a source region and a drain region of the nonvolatile memory cell; a contact area between the lower electrode and the ferroelectric film is smaller than a contact area between the lower electrode and the plurality of paraelectric films after the step (m).

9. 9. The method for manufacturing a semiconductor device according to claim 8, the dummy layer is made of a semiconductor material different from that of the first semiconductor layer, The method for manufacturing a semiconductor device, wherein in the step (a), the dummy layer and the first semiconductor layer are each formed by an epitaxial growth method.

10. 9. The method for manufacturing a semiconductor device according to claim 8, (n) between the step (d) and the step (e), a step of recessing an end portion of each of the plurality of first semiconductor layers; Further comprising: In the step (g), the pair of second semiconductor layers are formed as silicon layers containing impurities by epitaxial growth.

11. 11. The method of manufacturing a semiconductor device according to claim 10, The method for manufacturing a semiconductor device, wherein the plurality of first semiconductor layers are each made of silicon.

12. 9. The method for manufacturing a semiconductor device according to claim 8, The method for manufacturing a semiconductor device, wherein in the step (f), the first insulating film is formed by an ALD method.

13. 9. The method for manufacturing a semiconductor device according to claim 8, after the step (j), two of the paraelectric films and the lower electrode are provided between two of the first semiconductor layers in the second direction.

14. 9. The method for manufacturing a semiconductor device according to claim 8, (o) after the step (m), forming a first conductive layer on the upper electrode for applying a gate voltage to the upper electrode; (p) after the step (m), forming a second conductive layer on the pair of second semiconductor layers for applying a source voltage or a drain voltage to the pair of second semiconductor layers, The method for manufacturing a semiconductor device further comprises:

15. 15. The method of manufacturing a semiconductor device according to claim 14, In the step (j), a part of the lower electrode is also formed on each of the side surfaces of the pair of sidewall spacers as an extension portion; (q) after the step (m), forming a third conductive layer on the drawn-out portion for applying a voltage different from the gate voltage to the lower electrode; The method for manufacturing a semiconductor device further comprises:

16. 9. The method for manufacturing a semiconductor device according to claim 8, The paraelectric film is a silicon oxide film, a silicon oxynitride film, or a monoclinic HfO ２ A membrane, The ferroelectric film is a rectangular HfO ２ A film of HfO or a rectangular crystal having at least one of Zr, Si, N, C, and Al added thereto. ２ A method for manufacturing a semiconductor device,

17. 9. The method for manufacturing a semiconductor device according to claim 8, The method for manufacturing a semiconductor device, wherein the lower electrode and the upper electrode are each made of titanium nitride.

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