Electrostatic transducer and method for manufacturing the same

Abstract

[Problem] To provide an electrostatic transducer, as well as a method for manufacturing the electrostatic transducer, that is applicable to various sensors, capable of achieving a high SN ratio, and capable of increasing the flexibility in the arrangement and structure of a part for detecting a change in capacitance. [Solution] A displacement plate 12 comprises a fixed part 12a fixed to a support 11 and a movable part 12b that is movable relative to the fixed part 12a. A detection means 13 is attached so as to be at least partially movable along with the movable part 12b and is capable of detecting the movement of the movable part 12b as a change in capacitance. The detection means 13 is disposed in a vacuum or low-pressure space 19.

Description

[Technical field]

[0001] The present invention relates to an electrostatic transducer and a method for manufacturing an electrostatic transducer. [Background technology]

[0002] Electrostatic transducers are one of the basic elements that make up MEMS. Their basic operating principle is to place opposing electrodes with a gap between them, apply a bias voltage between them, and detect the change in the relative distance between each electrode as a change in capacitance. This can also be used as an actuator that applies a voltage between two electrodes and drives one or both of them by electrostatic attraction. Using this electrostatic transducer, it is possible to detect or control the minute movements of MEMS.

[0003] On the other hand, because MEMS are so tiny, the detection limit of electrostatic transducers is dominated by noise. Among the various types of noise, there is one that originates from damping due to the gas (air) that exists in the gap between the two electrodes mentioned above, i.e., the electrostatic gap. This is the dominant noise in electrostatic MEMS microphones, for example.

[0004] To eliminate noise due to gas damping in the electrostatic gap, the sensor can be vacuum sealed. This is possible and common for inertial sensors, for example. However, there are other devices that are difficult to vacuum seal, such as microphones, ultrasonic sensors, mass sensors, and scanning probes.

[0005] Among these, there is a microphone in which a capacitance detection unit is placed between two diaphragms, the diaphragms are connected by a pillar, and the closed space between each diaphragm is made into a vacuum (see, for example, Patent Documents 1 and 2). In this microphone, the pillar synchronizes the movement of the two diaphragms and prevents the closed space between the diaphragms from collapsing due to the pressure difference between the atmosphere and the vacuum. This reduces noise caused by gas damping, increases the signal-to-noise ratio, and achieves a high voice recognition rate as a microphone.

[0006] In other microphones, the diaphragm and the capacitance detection unit are separated within the device plane, the latter is placed in a vacuum space, and the two are connected by a link mechanism (see, for example, Non-Patent Documents 1 and 2). In this microphone, the diaphragm is connected to one end of the link, and the detection unit is connected to the other end, and a hinge that serves as a support unit is placed in the center of the link. The capacitance detection unit is a parallel plate type, and moves like a seesaw, that is, in the out-of-plane direction, due to the link mechanism.

[0007] Some MEMS microphones (acoustic transducers) utilize the piezoelectric effect. For example, there is a piezoelectric MEMS microphone in which a plate to which pressure is applied has a structure in which four triangular cantilevers are formed with a piezoelectric layer sandwiched between a pair of electrode layers, and these are arranged to form a rectangle (see, for example, Patent Documents 3 to 5 or Non-Patent Document 3). In a piezoelectric MEMS microphone, if the plate to which pressure is applied is made into a diaphragm shape with the periphery fixed, the performance will deteriorate due to the stress of the piezoelectric film, so such a structure is adopted. A piezoelectric transducer does not have an electrode gap, and therefore noise originating from gas damping in the electrode gap is not generated. However, noise caused by dielectric loss of the piezoelectric film is generated, and therefore a high signal-to-noise ratio like that of the MEMS microphone described in Patent Documents 1 or 2 is not obtained. [Prior art documents] [Patent documents]

[0008] [Patent Document 1] U.S. Patent No. 9181080 [Patent Document 2] U.S. Patent Application Publication No. 2016 / 0066099 [Patent Document 3] Patent No. 5936154 [Patent Document 4] U.S. Patent No. 9055372 [Patent Document 5] Japanese Patent Publication No. 2011-4129

Non-licensed documents

[0009]

Non-patent document 1

Non-patent document 2

Non-patent document 3

[0010] The MEMS microphones described in Patent Documents 1 and 2 have an extremely high S / N ratio, but the arrangement of the detection unit that detects the change in capacitance is limited to the space between the diaphragms, so there is a problem that the degree of freedom in the structure is small. Therefore, while this structure is effective for microphones and ultrasonic sensors, there is a problem that it cannot be applied to other sensors, such as mass sensors and scanning probes. Also, even when this is used as a microphone, there is a problem that the size of the detection unit is limited to be equal to or smaller than the size of the diaphragm, which limits the improvement of the sensitivity or S / N ratio.

[0011] In the MEMS microphones described in Non-Patent Documents 1 and 2, the size of the diaphragm and the size of the capacitance detection part are independent, and these sizes can be freely designed according to the desired specifications. However, the link that transmits the movement of the diaphragm to the detection part is connected from the atmosphere to the vacuum through a diaphragm at the hinge part, so there was a problem that the movement of the link was hindered by the diaphragm, resulting in a decrease in the S / N ratio. In addition, if the diaphragm is made thinner or larger, the rigidity of the diaphragm decreases and, in principle, the link becomes easier to move, but the diaphragm becomes distorted by the pressure difference between the atmosphere and the vacuum, which causes sensor errors, and the stress of the distorted diaphragm ultimately makes it difficult for the link to move, resulting in a decrease in the S / N ratio.

[0012] The present invention has been made in light of these problems, and aims to provide an electrostatic transducer and a manufacturing method for an electrostatic transducer that can be applied to various sensors, can obtain a high signal-to-noise ratio, and can increase the freedom of arrangement and structure of the part that detects changes in capacitance. [Means for solving the problem]

[0013] In order to achieve the above-mentioned object, the electrostatic transducer of the present invention comprises a support, a displacement plate having a fixed portion fixed to the support and a variable portion arranged to be movable relative to the fixed portion, and a detection means, at least a portion of which is attached to be movable together with the variable portion and arranged to detect the variation of the variable portion as a change in electrostatic capacitance, and is characterized in that the detection means is arranged in a vacuum or low-pressure space.

[0014] The electrostatic transducer according to the present invention is preferably a MEMS device. The electrostatic transducer according to the present invention is less susceptible to damping and other effects caused by surrounding fluids such as gases, such as air, and liquids, because the detection means capable of detecting the fluctuation of the moving part of the displacement plate as a change in capacitance is disposed in a vacuum or low-pressure space. This makes it possible to reduce noise and obtain a high signal-to-noise ratio.

[0015] Furthermore, in order to detect the fluctuation of the fluctuation part, it is sufficient that at least a part of the detection means is movably attached together with the fluctuation part, and the other part of the detection means (hereinafter referred to as the "fluctuation detection part") may be disposed in the fluctuation part or in a stable location other than the fluctuation part. Furthermore, by disposing the fluctuation detection part in a position that does not interfere with the fluctuation of the fluctuation part, the structure of the fluctuation detection part can be configured relatively freely. In this way, the electrostatic transducer according to the present invention can increase the degree of freedom in the arrangement and structure of the detection means that detects the change in electrostatic capacitance.

[0016] In the electrostatic transducer according to the present invention, the fluctuation detection unit can be arranged in a location other than the fluctuation unit, and the fluctuation unit and the fluctuation detection unit can be separated, so that each can be designed independently according to the required performance, and the degree of freedom in design is high. For example, a structure can be created in which the fluctuation unit is made small to increase resistance to excessive pressure input and mechanical shock, while the fluctuation detection unit is made large to increase its sensitivity. In this case, since the fluctuation detection unit is arranged in a vacuum or low-pressure space, an increase in noise can be suppressed even if the sensitivity of the fluctuation detection unit is increased.

[0017] Furthermore, in the electrostatic transducer according to the present invention, since the detection means is disposed in a vacuum or low pressure space, there is no need for a structure such as a diaphragm separating the atmosphere from the vacuum or reduced pressure space in the middle of the detection means as described in Non-Patent Documents 1 and 2, and such a structure does not impede the movement of the detection means. Also, in Non-Patent Documents 1 and 2, the part that detects the capacitance is a parallel plate type that moves in the out-of-plane direction, but in the electrostatic transducer according to the present invention, the part that detects the capacitance can be designed to move, for example, in either the in-plane direction or the out-of-plane direction, or in both directions.

[0018] In the electrostatic transducer according to the present invention, as a configuration in which the fluctuation detection unit is disposed at a location other than the fluctuation unit, for example, the detection means may have a long and thin connecting part having one end fixed to the fluctuation unit and the other end extending toward the fixed part, and a fluctuation detection unit connected to the other end of the connecting part and arranged so as to be able to detect fluctuations at the other end as fluctuations of the fluctuation unit. In this case, the connecting part can amplify the fluctuations of the fluctuation unit and transmit them to the fluctuation detection unit. The fluctuation detection unit may be arranged anywhere other than the fluctuation unit, and may be arranged, for example, on the fixed part or the support body.

[0019] In the electrostatic transducer of the present invention, the fluctuation detection section may have any configuration as long as it is capable of detecting the fluctuation of the fluctuation section as a change in capacitance, for example, it may be configured in such a way that the spacing or overlap of the electrodes for detecting the capacitance changes due to the fluctuation of the fluctuation section, or it may be a differential configuration.

[0020] The electrostatic transducer according to the present invention may have a reinforcing portion provided so that the fluctuating portion undergoes uniaxial bending displacement in the thickness direction of the displacement plate. In this case, the uniaxial bending displacement in the thickness direction of the displacement plate can be accurately captured. In addition, it is possible to prevent the displacement plate from fluctuating in a direction other than the desired direction and being twisted and damaged.

[0021] In the electrostatic transducer according to the present invention, the displacement plate may be provided in a cantilever shape, with the fixed portion at one end and the variable portion at the other end. The displacement plate may also be provided in a double-supported beam shape, with the fixed portions provided to sandwich the variable portion. The displacement plate may also be provided in a diaphragm shape, with the fixed portion at the periphery and the variable portion inside the periphery.

[0022] In the electrostatic transducer according to the present invention, when the displacement plate is provided in a cantilever shape, the support may have an opening in the center, and the displacement plate may be provided so that the variable portion protrudes toward the opening side to cover or almost cover the opening. Alternatively, the electrostatic transducer according to the present invention may be composed of a plurality of plates, each of which may be arranged so that the variable portion is on the inside, the support surrounds each variable portion, and each variable portion covers or almost covers the space surrounded by the support. In these cases, the plate may be used as, for example, an electrostatic microphone, as if it were a virtual diaphragm. In addition, in order to prevent a fluid such as air from leaking when the variable portion is displaced, it is preferable that the gap between the variable portion and the support, or the gap between the variable portions of adjacent displacement plates, is 10 μm or less.

[0023] The electrostatic transducer according to the present invention can be used as various sensors, such as acoustic transducers such as microphones and ultrasonic sensors, mass sensors, mass detection type or frequency detection type chemical sensors, displacement sensors, displacement detection type chemical sensors, flow rate sensors, and scanning probes. In addition, since the detection means is disposed in a vacuum or low pressure space, it can be used not only in gas but also in liquid. The electrostatic transducer according to the present invention can also be used as an actuator instead of a sensor to drive a displacement plate and send out sound waves.

[0024] The manufacturing method of the electrostatic transducer according to the present invention is a manufacturing method of the electrostatic transducer for manufacturing the electrostatic transducer according to the present invention, and is characterized in that, for a laminate having a first layer, a second layer, and a third layer stacked in this order on a surface of a base layer, the third layer is processed from the surface side opposite the second layer to form a structure of the detection means and one or more first through holes penetrating to the second layer, a fourth layer and a fifth layer are formed in this order on the surface of the processed third layer opposite the second layer, and one or more second through holes penetrating to the fourth layer are formed in the fifth layer from the surface side opposite the fourth layer, the third layer constitutes the detection means and the detection means is disposed in a vacuum or low-pressure space, and then the fourth layer and parts of the second layer are removed through the second through hole formed in the fifth layer and the first through hole formed in the third layer, and the second through hole formed in the fifth layer is blocked, and the base layer corresponding to the position of the moving portion is removed so that the first layer constitutes a displacement plate.

[0025] The method for manufacturing an electrostatic transducer according to the present invention can suitably manufacture the electrostatic transducer according to the present invention. The method for manufacturing an electrostatic transducer according to the present invention may manufacture an electrostatic transducer while depositing each of the first to fifth layers, or may manufacture an electrostatic transducer using a commercially available double SOI wafer or SOI wafer. When laminating the first to fifth layers, the lamination process of at least one of the layers may be performed by wafer bonding. In the method for manufacturing an electrostatic transducer according to the present invention, for example, the first, third and fifth layers may be made of silicon (Si), and the second and fourth layers may be made of silicon oxide (SiO2).

[0026] In the method for manufacturing an electrostatic transducer according to the present invention, it is preferable that the fifth layer is made of silicon, and the second through-hole formed in the fifth layer is blocked by surface flow of the silicon. In this case, the second through-hole can be easily blocked by heat treatment alone. It is also preferable that the fifth layer is made of single crystal silicon. This makes it possible to manufacture a high-quality electrostatic transducer without changing mechanical properties even when heat treatment is performed for surface flow.

[0027] In addition, in the method for manufacturing an electrostatic transducer according to the present invention, the second through hole formed in the fifth layer is formed by filling a silicon, silicon oxide, silicon nitride (Si x N y ) or a metal film may be formed to close the second through-hole. Alternatively, a silicon film may be formed on the second through-hole, and then heat treatment may be performed to close the second through-hole by the surface flow of the silicon.

[0028] In the method for producing an electrostatic transducer according to the present invention, after the second through hole is blocked, annealing may be performed in an environment with a low hydrogen partial pressure, such as a nitrogen atmosphere. In this case, hydrogen in the space in which the detection means is disposed can be discharged by diffusion, and the degree of vacuum can be increased. Effect of the Invention

[0029] According to the present invention, it is possible to provide an electrostatic transducer and a manufacturing method for an electrostatic transducer that can be applied to various sensors, can obtain a high signal-to-noise ratio, and can increase the freedom of arrangement and structure of the part that detects changes in capacitance. [Brief description of the drawings]

[0030] [Figure 1] 1A is a plan view showing an electrostatic transducer according to an embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line A-A'. [Diagram 2] 2 is a plan view of the electrostatic transducer shown in FIG. 1 with a sealing cover removed. [Diagram 3] 2A to 2D are cross-sectional views showing a manufacturing method of an electrostatic transducer according to an embodiment of the present invention. [Figure 4] 5A to 5F are cross-sectional views showing a continuation of FIG. 3, illustrating the method for producing an electrostatic transducer according to the embodiment of the present invention. [Diagram 5] 1. FIG. 4 is a plan view showing a modification in which a plurality of electrostatic transducers shown in FIG. 1 are used to arrange a moving part in the shape of a diaphragm. [Figure 6] 1A and 1B are cross-sectional views showing a modified example of an electrostatic transducer according to an embodiment of the present invention in which the movement detection part moves along the thickness direction of the displacement plate, in which (a) is a cross-sectional view of the moving part when not moving, and (b) is a cross-sectional view of the moving part when moved. [Figure 7] 1A is a plan view showing a modified example of an electrostatic transducer according to an embodiment of the present invention in which a fluctuation detection section is provided in a fluctuation section, and FIG. 1B is a cross-sectional view taken along line BB'. [Figure 8] 8 is a plan view of the electrostatic transducer shown in FIG. 7 with a sealing cover removed. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0031] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 to 8 show an electrostatic transducer and a method for manufacturing the electrostatic transducer according to an embodiment of the present invention. As shown in FIGS. 1 and 2, the electrostatic transducer 10 is made up of a MEMS device, and has a support 11, a displacement plate 12, a detection means 13, a sealing frame 14, a reinforcing portion 15, and a sealing cover 16.

[0032] The support 11 is in the form of a rectangular plate having a predetermined thickness. The displacement plate 12 is in the form of a thin plate, and has a fixed portion 12a at one end that has a rectangular planar shape, and a variable portion 12b at the other end that has a triangular shape with one long side of the fixed portion 12a as its base. The displacement plate 12 is fixed by attaching one surface of the fixed portion 12a to one surface of the support 11 so that the variable portion 12b protrudes from the support 11. As a result, the variable portion 12b of the displacement plate 12, which is provided by extending the fixed portion 12a, forms a cantilever shape that can move relative to the fixed portion 12a.

[0033] The detection means 13 is provided along the surface of the displacement plate 12 opposite to the support 11 with a gap between it and the surface. The detection means 13 has a long and thin connecting portion 21 and a movement detection portion 22. One end of the connecting portion 21 is disposed at the apex of the triangular moving portion 12b, and the other end extends to the fixed portion 12a at the center of the base of the moving portion 12b. The movement detection portion 22 is disposed at the fixed portion 12a and has a first comb-shaped electrode 23 connected to the other end of the connecting portion 21, and a second comb-shaped electrode 24 provided to mesh with the first comb-shaped electrode 23. The second comb-shaped electrodes 24 are arranged in a row, and two pairs of them are symmetrically provided on the left and right of the extension line of the connecting portion 21. The first comb-shaped electrodes 23 are arranged in a row, and are provided on the left and right of each second comb-shaped electrode 24, and a total of five are provided symmetrically with respect to the extension line of the connecting portion 21.

[0034] Each of the first comb-tooth electrodes 23 has a support portion 23a extending parallel to the length direction of the connecting portion 21, and a number of teeth 23b arranged so as to extend perpendicularly to the length direction of the connecting portion 21 from the left and right sides of the support portion 23a (the three in the middle of each of the first comb-tooth electrodes 23) or from either the left or right side (the two at both ends of each of the first comb-tooth electrodes 23). Of each of the first comb-tooth electrodes 23, the second and fourth first comb-tooth electrodes 23 have a spring-like connecting portion 23c extending in a spring-like manner from the end of the support portion 23a opposite the connecting portion 21. Each of the second comb-tooth electrodes 24 has a support portion 24a extending parallel to the length direction of the connecting portion 21, and a number of teeth 24b arranged so as to extend perpendicularly to the length direction of the connecting portion 21 from the left and right sides of the support portion 24a. The variation detection unit 22 is configured such that adjacent teeth 23b of the first comb-like electrode 23 and teeth 24b of the second comb-like electrode 24 mesh with each other, and detects a change in the distance between the adjacent teeth as a change in capacitance.

[0035] The sealing frame 14 is provided along and in contact with the surface of the displacement plate 12 opposite the support 11. The sealing frame 14 is provided at a distance between the connecting portion 21 and the fluctuation detection portion 22 so as to surround both sides of the connecting portion 21 and the periphery of the fluctuation detection portion 22. The sealing frame 14 is also connected to one end of the connecting portion 21. The sealing frame 14 has the spring-like connecting portions 23c connected to it near two corners of the fixed portion 12a opposite the fluctuation portion 12b in the portion surrounding the periphery of the fluctuation detection portion 22.

[0036] The reinforcing portions 15 are made up of multiple parts, and are arranged to extend outward from the sealing frames 14 provided on both sides of the connecting portion 21, at predetermined intervals along the length of the connecting portion 21, and perpendicular to the length of the connecting portion 21.

[0037] The detection means 13 has one end of the connection portion 21 fixed to the movable portion 12b of the displacement plate 12 via the first spacer 17. Also, the detection means 13 has the support portion 24a of the second comb-shaped electrode 24 fixed to the fixed portion 12a of the displacement plate 12 via the first spacer 17. The sealing frame 14 and the reinforcing portion 15 are fixed to the displacement plate 12 via the first spacer 17. In this way, the electrostatic transducer 10 is configured such that the movable portion 12b is uniaxially displaced in the thickness direction of the displacement plate 12 by the reinforcing portion 15.

[0038] In addition, in the electrostatic transducer 10, one end of the connecting portion 21 fluctuates together with the variable portion 12b, so that the connecting portion 21 is bent and the other end of the connecting portion 21 is pulled along its length direction. This also changes the interval between the teeth 23b of the adjacent first comb-like electrode 23 and the teeth 24b of the second comb-like electrode 24, and the capacitance changes. In this way, the electrostatic transducer 10 is capable of detecting the fluctuation of the variable portion 12b as a change in capacitance. In the specific example shown in Figs. 1 and 2, the fluctuation detection unit 22 is configured such that, when the connecting portion 21 is bent and pulled, the interval between the teeth 24b of the second comb-like electrode 24 on the left and right sides of the extension line of the connecting portion 21 and the teeth 23b of the adjacent first comb-like electrode 23 (the interval between the teeth for detecting the capacitance) becomes wider, and the interval becomes narrower in the other two second comb-like electrodes 24. This allows the electrostatic transducer 10 to perform differential detection.

[0039] The sealing cover 16 is in the form of a thin plate, and is shaped to cover the detection means 13, and is disposed at a distance from the detection means 13 so that the detection means 13 and the sealing frame 14 are sandwiched between the displacement plate 12 and the sealing cover 16. The sealing cover 16 is fixed to one end of the connecting portion 21, the support portion 24a of the second comb-tooth electrode 24, and the sealing frame 14 via a second spacer 18. A part of the reinforcing portion 15 is made of a thin plate that constitutes the sealing cover 16. In this part, the thin plate that constitutes the sealing cover 16 is fixed to the displacement plate 12 via the second spacer 18.

[0040] In the electrostatic transducer 10, the detection means 13 is sealed at intervals around the periphery by the displacement plate 12, the first spacer 17, the sealing frame 14, the second spacer 18, and the sealing cover 16. In addition, in the electrostatic transducer 10, the space 19 around the detection means 13 is a vacuum or low pressure, and the detection means 13 is disposed in the vacuum or low pressure space 19.

[0041] The electrostatic transducer 10 can be suitably manufactured by the manufacturing method of the electrostatic transducer according to the embodiment of the present invention. That is, as shown in Fig. 3 and Fig. 4, in the manufacturing method of the electrostatic transducer according to the embodiment of the present invention, first, a laminate is prepared by laminating a first layer 31, a second layer 32, and a third layer 33 in this order on the surface of a base layer 30 (see Fig. 3(a)). In the specific example shown in Fig. 3(a), a double SOI wafer is used as the laminate, but the laminate may be formed by depositing each layer. Also, the base layer 30 corresponds to a Si layer and a SiO2 layer, the first layer 31 corresponds to a Si layer (thickness 0.5 μm), the second layer 32 corresponds to a SiO2 layer (thickness 0.1 μm), and the third layer 33 corresponds to a Si layer (thickness 0.5 μm).

[0042] Next, the third layer 33 is patterned from the surface side opposite to the second layer 32 to form the structure of the detection means 13, the sealing frame 14, and the reinforcing portion 15, and one or more first through holes 41 penetrating to the second layer 32 (see FIG. 3(b) and FIG. 1). Next, the fourth layer 34 and the fifth layer 35 are formed in this order on the surface of the processed third layer 33 opposite to the second layer 32 (see FIG. 3(c) and (d)). In a specific example shown in FIG. 3(c) and (d), an SOI wafer is substrate-bonded to the surface of the third layer 33 (see FIG. 3(c)), and the handle layer 42 and the BOX layer 43 of the SOI wafer are removed to form the fourth layer 34 and the fifth layer 35 (see FIG. 3(d)). However, each layer may be formed by film deposition. Moreover, the fourth layer 34 corresponds to a SiO2 layer (thickness 0.1 μm), and the fifth layer 35 corresponds to a Si layer (thickness 0.5 μm).

[0043] Next, one or more second through holes 44 are formed in the fifth layer 35 from the surface side opposite to the fourth layer 34 to the fourth layer 34 (see FIG. 4(a) and FIG. 1). Next, parts of the fourth layer 34 and the second layer 32 are removed by etching through the second through hole 44 formed in the fifth layer 35 and the first through hole 41 formed in the third layer 33 so that the third layer 33 constitutes the detection means 13, the sealing frame 14, and the reinforcing portion 15, the detection means 13 is disposed in the vacuum or low-pressure space 19, the second layer 32 constitutes the first spacer 17, the fourth layer 34 constitutes the second spacer 18, and the fifth layer 35 constitutes the sealing cover 16 (see FIG. 4(b)), and then the second through hole 44 formed in the fifth layer 35 is blocked (see FIG. 4(c)). 4(c), since the fifth layer 35 is made of silicon, the second through-hole 44 is sealed by a so-called silicon migration seal (SMS) due to surface flow of the silicon in the fifth layer 35 caused by heat treatment in hydrogen. After that, heat treatment is performed in an atmosphere with a sufficiently low hydrogen concentration, whereby hydrogen gas is discharged from the space 19 in which the detection means 13 is disposed by a thermal diffusion phenomenon, and the space 19 is made vacuum or low pressure.

[0044] Next, the second layer 32 to the fifth layer 35 are shaped from the fifth layer 35 side so as to form the structure of the displacement plate 12 on the first layer 31 and to form terminal holes 45 for the first comb-like electrode 23 and the second comb-like electrode 24 of the displacement detection section 22 on the third layer 33 (see FIG. 4(d)). Metal terminals 46 electrically connected to the teeth of the first comb-like electrode 23 and the teeth of the second comb-like electrode 24 are formed in the formed terminal holes 45 (see FIG. 4(e)). Next, the base layer 30 corresponding to the position of the displacement section 12b is removed by deep recess etching (DRIE) so that the first layer 31 constitutes the displacement plate 12 (see FIG. 4(f)). The base layer 30 constitutes the support 11. In this manner, the electrostatic transducer 10 can be manufactured.

[0045] In the electrostatic transducer 10, the detection means 13, which is provided so as to be able to detect the fluctuation of the fluctuating portion 12b of the displacement plate 12 as a change in capacitance, is disposed in a vacuum or low-pressure space 19, and therefore is less susceptible to damping and other effects caused by surrounding fluids such as gases, such as air, or liquids. This makes it possible to reduce noise and obtain a high signal-to-noise ratio.

[0046] In addition, the electrostatic transducer 10 has the fluctuation detection unit 22 disposed on the fixed portion 12a fixed to the support 11, and is stable without interfering with the fluctuation of the fluctuation unit 12b. This allows the structure of the fluctuation detection unit 22 to be configured relatively freely, and increases the degree of freedom in the arrangement and structure of the detection means 13 that detects the change in capacitance. In addition, since the fluctuation unit 12b and the fluctuation detection unit 22 can be separated, they can be designed independently according to the required performance, and the degree of freedom in design is high. For example, the fluctuation unit 12b can be made small to increase resistance to the input of excessive pressure and mechanical shock, and the number of teeth of the first comb-like electrode 23 and the second comb-like electrode 24 of the fluctuation detection unit 22 can be increased to increase the sensitivity. At this time, since the fluctuation detection unit 22 is disposed in a vacuum or low-pressure space 19, an increase in noise can be suppressed even if the sensitivity of the fluctuation detection unit 22 is increased.

[0047] Moreover, in the electrostatic transducer 10, since the movement detection section 22 is disposed at a position different from the movement section 12b, it is possible to prevent the movement section 12b from becoming hard. Furthermore, it is possible to reduce the weight of the portion that moves together with the movement section 12b, and it is possible to increase the resonance frequency of the movement section 12b. Since the electrostatic transducer 10 can prevent the movement section 12b from bending in a direction other than the length direction of the displacement plate 12 by the reinforcing section 15, it is possible to accurately capture the uniaxial bending displacement of the displacement plate 12. It is also possible to prevent the displacement plate 12 from moving in a direction other than the desired direction and being twisted and damaged.

[0048] Furthermore, in the electrostatic transducer 10, the second through-hole 44 can be easily blocked by heat treatment alone due to the surface flow of silicon in the fifth layer 35, and the detection means 13 can be disposed in the vacuum or low-pressure space 19. In this case, by forming the fifth layer 35 from single crystal silicon, the mechanical properties and the like do not change even when heat treatment for surface flow is performed, and a high-quality electrostatic transducer can be obtained. Note that the planar shape of the moving part 12b of the electrostatic transducer 10 is not limited to a triangular shape, and may be any shape, such as a rectangular shape or a long and thin rod shape.

[0049] Furthermore, since the detection means 13 of the electrostatic transducer 10 is disposed in a vacuum or low-pressure space 19, there is no need for a structure such as a diaphragm separating the atmosphere from the vacuum or reduced-pressure space in the middle of the detection means as described in Non-Patent Documents 1 and 2, and such a structure does not impede the movement of the detection means 13.

[0050] As shown in FIG. 5, the electrostatic transducer 10 may be made up of four, with each variable part 12b facing inward, each support 11 surrounding each variable part 12b, and the apexes of the triangular variable parts 12b may be concentrated in the center of the space surrounded by the supports 11, so that each variable part 12b may be arranged to almost cover the space surrounded by the supports 11. In a specific example shown in FIG. 5, the apex of each triangular variable part 12b is 90°, and each variable part 12b is arranged with a small gap 12c between the sides of the adjacent variable parts 12b. In this case, it can be used as a virtual diaphragm, for example, as a microphone. In addition, in order to prevent a fluid such as air from leaking and reducing sensitivity when the variable parts 12b fluctuate, the gap 12c between the sides of the adjacent variable parts 12b is preferably 10 μm or less, and the gap 12c may be eliminated to completely cover the space 19 surrounded by the supports 11. The number of electrostatic transducers 10 is not limited to four, and may be any number as long as it is plural. The planar shape of the moving part 12b is not limited to a triangle, and may be any shape as long as it can completely cover or almost cover the space 19 surrounded by the support 11.

[0051] The electrostatic transducer 10 may be made of one piece, the support 11 having an opening in the center, and the displacement plate 12 may be provided so that the variable portion 12b protrudes toward the opening side to cover or almost cover the opening. In this case, it can be used as a microphone, for example, by virtually treating it like a diaphragm. In addition, in order to prevent a decrease in sensitivity due to leakage of a fluid such as air when the variable portion 12b fluctuates, the gap between the variable portion 12b and the support 11 is preferably 10 μm or less, and the opening of the support 11 may be completely covered by eliminating the gap. The planar shape of the variable portion 12b may be any shape depending on the shape of the opening of the support 11. The displacement plate 12 may be provided in the form of a double-supported beam so as to cover the opening of the support 11, and the fixed portion 12a may be provided so as to sandwich the variable portion 12b. In addition, the displacement plate 12 may be provided in the form of a diaphragm so as to cover the opening of the support 11, and may have the fixed portion 12a on the periphery and the variable portion 12b inside the periphery.

[0052] In addition, the electrostatic transducer 10 may have any arrangement of the first comb-shaped electrode 23 and the second comb-shaped electrode 24, not limited to the arrangement shown in Fig. 1 and Fig. 2. In addition, the electrostatic transducer 10 shown in Fig. 1 and Fig. 2 is configured so that when the variable part 12b varies, the connecting part 21 bends together with the variable part 12b, and the first comb-shaped electrode 23 of the variation detection part 22 moves in the in-plane direction along the surface of the variable part 12b. However, as shown in Fig. 6, when the variable part 12b varies, the connecting part 21 may not bend, and the variation detection part 22 connected to the other end of the connecting part 21 may be configured to be movable in the out-of-plane direction along the thickness direction of the displacement plate 12. In this case, the variation of the variable part 12b may be detected as a change in the overlap of the first comb-shaped electrode 23 and the second comb-shaped electrode 24 in the thickness direction, or may be detected as a change in electrostatic capacitance due to a change in the distance between the variation detection part 22 and the fixed part 12a.

[0053] 7 and 8, the electrostatic transducer 10 may not have the connecting portion 21, and the fluctuation detection portion 22 of the detection means 13 may have a plurality of fixed electrodes 51 arranged in a line along the surface of the variable portion 12b and fixed to the variable portion 12b, and a mesh electrode 52 that is not fixed to the variable portion 12b and is arranged to surround the periphery of each fixed electrode 51 along the surface of the variable portion 12b with a gap between each fixed electrode 51, and is not fixed to the variable portion 12b, and the sealing frame 14 is provided along the periphery of the variable portion 12b to surround each fixed electrode 51 and the mesh electrode 52. In this case, the fluctuation detection portion 22 is provided in the variable portion 12b, but the gap between each fixed electrode 51 and the mesh electrode 52 changes due to the fluctuation of the variable portion 12b, and the electrostatic capacitance changes, so that the fluctuation of the variable portion 12b can be detected as a change in electrostatic capacitance.

[0054] In addition, in the manufacturing method of the electrostatic transducer according to the embodiment of the present invention shown in Figures 3 and 4, after forming the third layer 33, patterning processing is performed only on the third layer 33 (see Figure 3(b)), and after forming the fifth layer 35, a second through hole 44 is formed in the fifth layer 35 (see Figure 4(a)), and the fourth layer 34 and the second layer 32 are etched (see Figure 4(b)). However, each layer from the second layer 32 to the fifth layer 35 may be patterned each time it is formed, and after the second through hole 44 is formed in the fifth layer 35, the fourth layer 34 and the second layer 32 may be further etched.

[0055] Furthermore, in the method shown in FIG. 3 and FIG. 4, the first layer 31, the second layer 32, and the third layer 33 are formed on the base layer 30 (see FIG. 3(a)), and then etching and the like are performed. However, the connecting portion 21, the second comb-shaped electrode 24, the spring-shaped connecting portion 23c, and the displacement plate 12 may be connected to each other using the material of the third layer 33 as the first spacer 17. In this case, the third layer 33 may be formed after the second layer 32 is partially etched. The same can be said about the fourth layer and the fifth layer. The connecting rod 21, the second comb-shaped electrode 24, the spring-shaped connecting portion 23c, and the sealing cover 16 may be connected to each other using the material of the fifth layer 35 as the second spacer 18. In this case, the fifth layer 35 may be formed after the fourth layer 34 is partially etched. In the sacrificial layer etching of FIG. 4(b), the first spacer 17 and the second spacer 18 are controlled to remain, and this method makes it easier to do so. [Explanation of symbols]

[0056] 10 Electrostatic Transducer 11 Support 12 Displacement plate 12a Fixed part 12b Variable section 13. Detection Methods 21 Connecting part 22 Fluctuation detection section 23 First comb-shaped electrode 23a Support part 23b Teeth 23c Spring-type connection 24 Second comb electrode 24a Support part 24b Teeth 14 Sealing frame 15 Reinforcement 16 Sealing cover 17 First spacer 18 Second spacer 19 Space 30 Base layer 31 1st layer 32 2nd layer 33 3rd layer 34 4th layer 35 5th layer 41 First through hole 42 Handle layer 43 BOX layer 44 Second Through Hole 45 holes 46 Metal terminal 51 Fixed electrode 52 Mesh electrode

Claims

1. A support; a displacement plate having a fixed portion fixed to the support and a movable portion provided movable relative to the fixed portion; a detection means having a slender connecting portion, at least a portion of which is movably attached together with the variable portion and is provided so as to be capable of detecting a variation in the variable portion as a change in capacitance, one end of which is fixed to the variable portion and the other end of which extends toward the fixed portion, and a variation detection portion connected to the other end of the connecting portion and provided so as to be capable of detecting a variation in the other end as a variation in the variable portion, The detection means is disposed in a vacuum or low pressure space. Electrostatic transducer characterized by:

2. 2. The electrostatic transducer according to claim 1, wherein the fluctuation detection section is provided on the fixed section or the support.

3. 2. An electrostatic transducer according to claim 1, wherein said detection means is attached to said moving part.

4. 4. The electrostatic transducer according to claim 1, wherein the movable portion has a reinforcing portion provided so as to be displaced by bending in a single axis in a thickness direction of the displacement plate.

5. 5. The electrostatic transducer according to claim 1, wherein the displacement plate is provided in a cantilever shape, has the fixed portion on one end side, and has the movable portion on the other end side.

6. 5. The electrostatic transducer according to claim 1, wherein the displacement plate is provided as a double-supported beam, and the fixed portions are provided so as to sandwich the movable portion.

7. 5. The electrostatic transducer according to claim 1, wherein the displacement plate is provided in a diaphragm shape, has the fixed portion on a periphery, and has the variable portion inside the periphery.

8. The support has a central opening, The displacement plate is provided so that the variable portion protrudes toward the opening and covers or almost covers the opening.

6. An electrostatic transducer according to claim 5.

9. An electrostatic transducer as described in claim 5, characterized in that it consists of a plurality of supports, each of which has its variable portion on the inside, each support surrounding each variable portion, and each variable portion being arranged to cover or almost cover the space surrounded by each support.

10. 10. The electrostatic transducer according to claim 8, wherein a gap between the movable portion and the support, or a gap between the movable portions of adjacent displacement plates, is 10 [mu]m or less.

11. 11. An electrostatic transducer according to any one of claims 1 to 10, characterized in that it is a MEMS device.

12. A method for manufacturing an electrostatic transducer according to any one of claims 1 to 11, comprising the steps of: a laminate having a first layer, a second layer, and a third layer laminated in this order on a surface of a base layer, the third layer being processed from a surface side opposite to the second layer to form a structure of the detection means and to form one or a plurality of first through holes penetrating to the second layer; forming a fourth layer and a fifth layer in this order on a surface of the processed third layer opposite to the second layer; forming one or more second through holes penetrating through the fifth layer from a surface side opposite to the fourth layer; removing a portion of the fourth layer and the second layer through the second through hole formed in the fifth layer and the first through hole formed in the third layer so that the third layer constitutes the detection means and the detection means is disposed in a vacuum or low pressure space, and then closing the second through hole formed in the fifth layer; removing the base layer corresponding to the position of the fluctuating portion so that the first layer constitutes a displacement plate; A method for manufacturing an electrostatic transducer.

13. the fifth layer is made of silicon; The second through hole formed in the fifth layer is blocked by a surface flow of the silicon. A method for manufacturing an electrostatic transducer according to claim 12.

14. A support, a displacement plate having a fixed portion fixed to the support and a movable portion provided movable relative to the fixed portion; a detection means at least a part of which is attached so as to be movable together with the variable portion and is provided so as to be able to detect the variation of the variable portion as a change in capacitance; A method for manufacturing an electrostatic transducer, in which the detection means is disposed in a vacuum or low pressure space, comprising the steps of: a laminate having a first layer, a second layer, and a third layer laminated in this order on a surface of a base layer, the third layer being processed from a surface side opposite to the second layer to form a structure of the detection means and to form one or a plurality of first through holes penetrating to the second layer; forming a fourth layer and a fifth layer in this order on a surface of the processed third layer opposite to the second layer; forming one or more second through holes penetrating through the fifth layer from a surface side opposite to the fourth layer; removing a portion of the fourth layer and the second layer through the second through hole formed in the fifth layer and the first through hole formed in the third layer so that the third layer constitutes the detection means and the detection means is disposed in a vacuum or low pressure space, and then closing the second through hole formed in the fifth layer; removing the base layer corresponding to the position of the fluctuating portion so that the first layer constitutes a displacement plate; A method for manufacturing an electrostatic transducer.

15. The fifth layer is made of silicon, The second through hole formed in the fifth layer is blocked by a surface flow of the silicon. A method for manufacturing an electrostatic transducer according to claim 14.

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