Gas analysis device and gas analysis method

Abstract

This gas analysis device (10) comprises: a laser light source (11) which irradiates a gas to be measured with laser light; a laser control means (14) which controls the laser light source (11) so that the wavelength of the laser light is changed in each prescribed wavelength band; a light detection means (19) which photoelectrically converts the laser light that have passed through the gas to be measured and outputs an electrical signal; and an interpretation means (23) which analyzes, on the basis of the electrical signal, an absorption wavelength of the gas to be measured. In the gas analysis device (10), the laser control means (14) controls the laser light source (11) so that the intensity of the laser light changes into a shape (for example, a rectangular shape or a trapezoidal shape) having at least a substantially constant flat part in a prescribed time period, and the wavelength of the laser light changes in the time period.

Description

[Technical field]

[0001] The present invention relates to a gas analysis apparatus and a gas analysis method for analyzing a target gas by using a laser beam. [Background technology]

[0002] 2. Description of the Related Art In recent years, from the viewpoint of preventing global warming, the depletion of fossil fuels, environmental pollution, etc., interest has been growing in various fields in protecting the global environment and making effective use of energy, and as a result, research into various environmental technologies is being conducted.

[0003] In such environmental technology, it is important to clarify in detail the combustion structure and its transient behavior of combustion phenomena in engines, burners, etc. In recent years, measurement technology using semiconductor laser absorption method has been developed as a means of measuring the temperature and concentration distribution in combustion gases over time with high response.

[0004] In general, the absorption method is a measurement method that utilizes the property of gas molecules absorbing infrared light at wavelengths specific to the chemical species, and the temperature and concentration dependence of the amount of absorption. The intensity of incident light (I λ0 ) and transmitted light (I λ ) intensity ratio (I λ / I λ0 ), it is possible to measure the concentration and temperature of the target gas (see, for example, Non-Patent Documents 1 and 2). In particular, a method of analyzing a target gas using a tunable semiconductor laser and utilizing the phenomenon in which laser light of a specific wavelength is absorbed is called tunable diode laser absorption spectroscopy (TDLAS).

[0005] Patent Documents 1 to 3 and the like disclose techniques for detecting the properties (concentration and temperature) of a gas to be measured by utilizing an absorption method using a semiconductor laser.

[0006] For example, Patent Document 1 discloses a method in which a laser beam is split into a measurement laser beam and a reference laser beam by a splitter, the measurement laser beam is transmitted through a gas and received by a photodetector, and an absorption spectrum absorbed by gas components in the gas is determined from the light intensity of the received measurement laser beam and the light intensity of the reference laser beam.

[0007] Furthermore, Patent Document 2 discloses a method for determining an accurate gas concentration by modulating the oscillation wavelength of laser light with a modulation signal of a predetermined frequency, the method including a first period in which an absorption wavelength specific to the gaseous substance to be measured is modulated with a predetermined frequency, and a second period in which a wavelength deviating from the specific absorption wavelength is modulated with a predetermined frequency, and subtracting an offset signal measured in the second period from a gas concentration signal including an offset signal measured in the first period.

[0008] Furthermore, in Patent Document 3, the gas analyzer includes a first and a second laser light source that output a first and a second laser light, a laser control means that controls the first and the second laser light source so that the wavelengths of the first and the second laser light are changed within a predetermined wavelength band, a combining means that mixes the first and the second laser light and irradiates the gas to be measured with the mixed light, a light receiving means that receives the laser light that has passed through the gas to be measured, and an analyzing means that analyzes the temperature and / or the concentration of the gas to be measured based on an electric signal from the light receiving means. Here, when changing the wavelength of the laser light, the laser control means makes the amplitude of the first laser light and the amplitude of the second laser light different from each other and changes the intensity of the first laser light and the intensity of the second laser light in opposite directions. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] JP 2008-051598 A [Patent Document 2] JP 2011-158426 A [Patent Document 3] JP 2015-040747 A [Non-patent literature]

[0010] [Non-Patent Document 1] Maximilian Lackner, "TUNABLE DIODE LASER ABSORPTION SPECTROSCOPY (TDLAS) IN THE PROCESS INDUSTRIES - A REVIEW," Reviews in Chemical Engineering, Vol. 23, Issue 2, April 2007. [Non-Patent Document 2] Akihiro Murata, "Introduction to Process Laser Gas Analyzers," Kangikyo, Japan Environmental Technology Association, pp. 18-19, January 2010. Summary of the Invention [Problem to be solved by the invention]

[0011] The techniques disclosed in Patent Documents 1 to 3 cannot eliminate the influence of the decrease in laser light intensity due to window dirt provided in the optical path. Specifically, when measuring a gas to be measured based on an absorption spectrum, it is important to detect the position (wavelength) and magnitude of the portion of the signal intensity decrease (hereinafter also referred to as an "absorption line") appearing in the absorption spectrum. The laser light irradiated to the gas to be measured may fluctuate due to factors other than the original absorption, such as dirt on a window provided in the optical path of the laser light. In such a case, the magnitude of the portion of the signal intensity decrease (absorption line) appearing in the absorption spectrum differs from that due to the original absorption, resulting in a problem of reduced gas analysis accuracy.

[0012] In particular, in Patent Document 3, there is a problem in that minute fluctuations occur in the mixed signal, making it difficult to achieve high sensitivity and high accuracy.

[0013] An object of the present invention is to provide a gas analysis apparatus and a gas analysis method capable of analyzing gas with higher accuracy than the prior art. [Means for solving the problem]

[0014] The gas analyzer according to the present invention comprises: a laser light source that irradiates a measurement target gas with a laser light; a laser control means for controlling the laser light source so as to change the wavelength of the laser light in a predetermined wavelength band; a light detection means for photoelectrically converting the laser light transmitted through the gas to be measured and outputting an electrical signal; a gas analyzer comprising an analysis means for analyzing an absorption wavelength of the measurement target gas based on the electrical signal, The laser control means controls the laser light source so that the intensity of the laser light varies in a shape having at least a substantially constant plateau during a predetermined time period, and so that the wavelength of the laser light varies during the time period. Effect of the Invention

[0015] Therefore, according to the present invention, the laser control means controls the laser light source so that the intensity of the laser light varies in a shape having at least a substantially constant plateau during a predetermined time period, and the wavelength of the laser light varies during the time period, thereby improving the detection accuracy of gas analysis compared to the prior art. [Brief description of the drawings]

[0016] [Figure 1A] 1 is a block diagram showing an example of the configuration of a gas analyzer 10 according to a first embodiment. [Figure 1B] FIG. 2 is a block diagram showing details of the laser control device 14 and the laser 11 of FIG. 1A. [Diagram 2] 1B is a diagram showing the operation of the gas analyzer 10 of FIG. 1A, and is a schematic waveform diagram of the intensity of the laser light 1, the wavelength of the laser light 1, and the output voltage of the electrical signal Sd from the photodetector 19. FIG. [Diagram 3] FIG. 11 is a block diagram showing an example of the configuration of a gas analyzer 10A according to a second embodiment. [Figure 4]4 is a diagram showing the operation of the gas analyzer 10A of FIG. 3, and is a schematic waveform diagram of the intensities of the laser beams 1 and 2, the wavelengths of the laser beams 1 and 2, and the output voltage of the electrical signal Sd from the photodetector 19. FIG. [Diagram 5] FIG. 11 is a block diagram showing an example of the configuration of a gas analyzer 10B according to a third embodiment. [Figure 6] 5 is a waveform diagram showing the intensity of the laser light 1 according to the modified examples of the first to third embodiments. FIG. [Figure 7] FIG. 2 is an absorption spectrum diagram showing wavelength characteristics of absorbance when the target gas is H20 in the gas analyzers 10, 10A, and 10B according to the first to third embodiments. [Figure 8] FIG. 2 is an experimental result of an example of the gas analyzer 10 according to the first embodiment, showing a waveform of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 100 Torr. [Figure 9] FIG. 2 is an experimental result of an example of the gas analyzer 10 according to the first embodiment, showing a waveform of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 50 Torr. [Figure 10] FIG. 2 is an experimental result of an example of the gas analyzer 10 according to the first embodiment, showing a waveform of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 10 Torr. [Figure 11] FIG. 11 is a block diagram showing an example of the configuration of a two-dimensional gas analyzer 10C according to a fourth embodiment. [Figure 12] 12 is a schematic diagram showing a first application example of the two-dimensional gas analyzer 10C of FIG. 11 to a burner 100. FIG. [Figure 13] 12 is a schematic diagram showing a second application example of the two-dimensional gas analyzer 10C of FIG. 11 to an engine 200. FIG. [Figure 14] 12 is a schematic diagram showing an application example 3 of the two-dimensional gas analyzer 10C of FIG. 11 to a jet engine 300. FIG. [Figure 15] FIG. 12 is a schematic diagram showing a fourth application example of the two-dimensional gas analyzer 10C of FIG. 11 to a semiconductor process. [Figure 16] 16 is a flowchart showing application example 4 of FIG. 15 . [Figure 17]12 is a schematic diagram showing a fifth application example of the two-dimensional gas analyzer 10C of FIG. 11 to a denitration device 400. FIG. [Figure 18] 12 is a flowchart showing a sixth application example of the two-dimensional gas analyzer 10C of FIG. 11 to an exhaust gas denitration system 500. [Figure 19] 1 is an experimental result of Example 1 of the gas analyzer 10 according to the first embodiment, showing a waveform diagram of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 10 Torr (1.3 kPa). [Figure 20] FIG. 13 is an experimental result of Example 2 of the gas analyzer 10A according to the second embodiment, showing a waveform diagram of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 10 Torr (1.3 kPa). [Figure 21] FIG. 11 is a waveform diagram of the output voltage of the photodetector 19, showing the experimental results of Example 2 of the gas analyzer 10A according to the second embodiment, and indicating that the amplification factor as an AC signal can be improved. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. Note that the same or similar components are denoted by the same reference numerals.

[0018] <Features of the embodiment> In the embodiment and the modified example according to the present invention, a tunable distributed active distributed feedback (TDFB) type semiconductor laser is used to analyze a gas to be measured using the TDLAS method to detect the concentration and temperature. Here, in the present embodiment, as will be described in detail later, in particular, the intensity of the laser light is changed in a shape having at least a substantially constant flat portion during a predetermined time period (e.g., a rectangular shape or a trapezoidal shape) and the wavelength of the laser light is changed during the time period. R The feature of this system is that it controls the laser light source.

[0019] <Embodiment 1> (Gas analyzer configuration) Fig. 1A is a block diagram showing a configuration example of a gas analyzer 10 according to embodiment 1, and Fig. 1B is a block diagram showing details of a laser control device 14 and a laser 11 in Fig. 1A. Fig. 2 is a diagram showing the operation of the gas analyzer 10 in Fig. 1A, and is a schematic waveform diagram of the intensity of the laser light 1, the wavelength of the laser light 1, and the output voltage of an electric signal Sd from a photodetector 19.

[0020] 1A, a gas analyzer 10 includes a semiconductor laser (hereinafter, referred to as a laser) 11 which is a laser light source, a laser control device 14, a collimator 17, a photodetector 19, an AC amplifier 21 which amplifies an electric signal Sd from the photodetector 19, and an analyzer 23. Note that, as will be described in detail later, the AC amplifier 21 is not limited to an AC amplifier, and may be any amplifier which can amplify the laser light based on a flat portion where the intensity of the laser light is constant.

[0021] 1B, the laser control device 14 is configured to include a controller 60, a waveform generator 61, and a current power supply 62. The controller 60 controls the waveform generator 61 to set the period, duty ratio, voltage, etc. of the voltage signal generated by the waveform generator 61. In response to this, the waveform generator 61 generates a predetermined voltage signal having, for example, a rectangular wave or trapezoidal wave shape, and outputs it to the current power supply 62. The current power supply 62 includes a voltage / current conversion circuit, and converts the input voltage signal into a predetermined drive current having, for example, a rectangular wave or trapezoidal wave shape, and supplies it between the pair of electrodes 41, 42 of the laser 11.

[0022] 1B, laser 11 is configured by sandwiching a p-type cladding layer 43, an active layer 44, an n-type cladding layer 45, and an n-type substrate 46 between a pair of electrodes 41, 42, and has a reflecting surface 51 formed on one side. In response to a current flowing through the pair of electrodes 41, 42, active layer 44 generates laser light, and the laser light reflected by reflecting surface 51 is emitted in the lateral direction of FIG. 1B.

[0023] That is, the laser 11 is a laser light source capable of outputting laser light 1 in a predetermined wavelength band, and in this embodiment, the laser 11 is a known tunable distributed active distributed feedback (TDFB) type semiconductor laser, as are the lasers 12 and 13 described below. Generally, a TDFB laser can output laser light of a predetermined intensity by inputting an excitation current exceeding a threshold current. Here, the current value flowing through the laser 11 is determined by the drive current. the law of nature For example, the output of the laser light changes when the waveform of the laser light changes in a rectangular wave or trapezoidal wave form, and at this time, the temperature of the laser 11 changes. This changes the diffraction grating interval inside the laser 11, and the wavelength of the laser light changes.

[0024] In this embodiment, the laser control device 14 changes the excitation current value for the laser 11 in synchronization with a clock signal of a predetermined frequency, thereby changing the intensity of the laser light 1, for example, in a rectangular pulse shape with a duty ratio of 50% (time period T1=T2), as shown in Fig. 2. By controlling the laser 11 in this way, the intensity of the laser light 1 becomes almost constant at the maximum intensity E1 of the rectangular pulse during the time period T1, and has a flat portion Lf1. Here, the intensity fluctuation of the flat portion Lf1 may be, for example, 10% with respect to the maximum intensity E1 in order to achieve high accuracy in moisture detection in a semiconductor process device, which will be described later. -6 It is preferable to set the threshold value to be equal to or less than that.

[0025] At this time, the wavelength of the laser light 1 is slightly delayed from the rise of the light intensity. 1 As the temperature rises, the wavelength scanning range Lw1 from wavelength λ1 to wavelength λ2 changes in a generally proportional and monotonically increasing manner with time. That is, the laser control device 14 controls the laser 11 to output the laser light 1 from the laser 11 while changing (scanning) the wavelength of the laser light 1 over time.

[0026] 2, the dotted line in the illustration of the wavelength of the laser light 1 indicates that the wavelength of the laser light 1 is not fixed and is indefinite, and the same applies to Fig. 4 described later. Here, by setting the absorption wavelength of the measurement target gas between wavelengths λ1 and λ2, a drop portion Ld1 of the output voltage of the electrical signal Sd from the photodetector 19 occurs at a predetermined wavelength λa.

[0027] The laser light 1 from the laser 11 is irradiated to the gas to be measured via a collimator 17 that collimates and focuses the laser light 1, and then input to the photodetector 19. The photodetector 19 receives the laser light that has passed through the gas to be measured, and photoelectrically converts it into an analog electric signal Sd containing an AC component according to the intensity of the received laser light. The AC amplifier 21 has an amplification band capable of sufficiently amplifying the AC component of the electric signal Sd (particularly, since the intensity of the laser light 1 rises or falls rapidly, and therefore contains high-order harmonic components), and is an amplifier that can amplify the electric signal Sd with a flat portion where the intensity of the laser light is constant as a reference. In particular, the AC amplifier 21 is configured to amplify the flat portions located on the left and right of the drop portion Ld1 in the output voltage of the electric signal Sd in FIG. 2 by applying a predetermined offset to the electric signal Sd, for example, with a reference voltage of 0 V. The AC amplifier 21 amplifies the analog electric signal Sd from the photodetector 19 as described above, and outputs the amplified electric signal Sda to the analysis device 23. Next, the analysis device 23 receives the analog electric signal Sda from the AC amplifier 21, converts it into an analog signal using a built-in AD converter, and then analyzes the waveform (absorption spectrum) of the electric signal Sda as is well known, to analyze the concentration and temperature of the gas to be measured (see, for example, Non-Patent Documents 1 and 2). The analysis device 23 can be realized by, for example, a computer (information processing device).

[0028] In the gas analyzer 10 configured as above, the laser light 1 output from the laser 11 is irradiated onto the gas to be measured while scanning the wavelength of the laser light 1 in a predetermined wavelength band of, for example, wavelengths λ1 to λ2 including the estimated absorption wavelength λa, and the concentration and temperature of the gas to be measured are measured by analyzing the absorption spectrum of the laser light related to the electrical signal Sda obtained at that time, which includes absorption information of the gas to be measured. Here, by repeating the rectangular pulse wave of the laser light 1, an analysis is performed by integrating multiple times corresponding to the multiple rectangular pulse waves, and the average value is calculated, thereby improving the analytical accuracy.

[0029] The analysis device 23 analyzes the concentration and temperature of the target gas based on the signal waveform of the input electrical signal Sda. The analysis is performed, for example, by the following method. The analysis device 23 is previously provided with information on theoretical values ​​of the signal waveform of the measured light receiving intensity signal (electrical signal) for various concentrations and temperatures of the target gas. The analysis device 23 compares the signal waveform actually obtained by measurement with the theoretical value of the signal waveform, and identifies the theoretical value of the signal waveform when the error between them is the smallest. Then, the concentration and temperature related to the identified theoretical value are obtained, thereby making it possible to obtain the measured values ​​of the concentration and temperature of the target gas.

[0030] The analysis of the gas concentration and temperature is preferably synchronized based on a clock signal in the laser control device 14. Here, instead of the clock signal in the laser control device 14, a clock signal may be reproduced from the received electrical signal Sda, and the analysis of the gas concentration and temperature may be performed in synchronization with the reproduced clock signal.

[0031] 7 is an absorption spectrum diagram showing the wavelength characteristic of absorbance when the gas to be measured in the gas analyzer 10 is H20. An example of the relationship between the gas to be measured and the absorption wavelength λ is shown in Table 1. The amplitude E1 of the intensity of the laser light 1 is set so that the wavelength λa corresponding to the drop portion Ld1 in FIG. 2 becomes the absorption wavelength shown in FIG. 7 or Table 1 within the wavelength scanning range Lw1.

[0032] [Table 1]

[0033] As described above, according to this embodiment, the laser control device 14 changes the excitation current value for the laser 11 in synchronization with a clock signal of a predetermined frequency, thereby changing the intensity of the laser light 1 in a rectangular pulse shape as shown in Fig. 2. At this time, the intensity of the laser light 1 becomes almost constant at the maximum intensity E1 of the rectangular pulse during the time period T1, and has a flat portion Lf1. At this time, the wavelength of the laser light 1 is slightly delayed from the rise of the light intensity, and the laser light 1 1 As the temperature of the gas increases, the wavelength of the laser beam 1 changes approximately proportionally over time in a wavelength scanning range Lw1 from wavelength λ1 to wavelength λ2. That is, the laser control device 14 controls the laser 11 to output the laser beam 1 from the laser 11 while changing (scanning) the wavelength of the laser beam 1 over time. Here, by setting the absorption wavelength λa of the gas to be measured between wavelengths λ1 and λ2, a drop portion Ld1 of the output voltage of the electrical signal Sd from the photodetector 19 is generated at the predetermined absorption wavelength λa. By analyzing the electrical signal Sda in this drop portion Ld1 as described above, the concentration and temperature of the gas to be measured can be measured.

[0034] That is, the laser control device 14 controls the laser 11 so that the intensity of the laser light 1 changes in a rectangular shape having an amplitude E1 of at least a substantially flat flat portion Lf1 during a predetermined time period T1, and the wavelength of the laser light 1 changes during the time period T1. This makes it possible to significantly improve the detection accuracy and detection sensitivity of gas analysis compared to the prior art. In addition, the gas analyzer 10 in FIG. 1A is configured using one laser, and can be simplified in configuration compared to the gas analyzer of Patent Document 3, which uses two lasers.

[0035] (Modification of the first embodiment) In the above embodiment 1, T1=T2, but by setting T1>T2, the wavelength scanning range Lw1 of the laser light 1 can be made larger than when T1=T2. However, as shown in Fig. 2, in the rising and falling of the intensity of the laser light 1, the wavelength of the laser light 1 reaches the wavelength scanning range Lw1 with a slight delay, and then goes out of the range via the wavelength scanning range Lw1, so it is desirable to set the duty ratio of the intensity of the laser light 1 to, for example, 80% or less. However, if the duty ratio is lowered too much, the wavelength scanning range Lw1 becomes narrow, so there is a trade-off between them, and for example, the duty ratio is preferably 30% or more.

[0036] In addition, by setting the absorption wavelength λa at approximately half the wavelength scanning range Lw1, the output voltage drop portion Ld1 can be set at approximately half the wavelength scanning range Lw1, which allows the measurement target gas to be analyzed with high accuracy without falling into the portion where the wavelength is unstable. EXAMPLES

[0037] (Example according to embodiment 1) 8 to 10 are experimental results of examples of the gas analyzer 10 according to embodiment 1, and are waveform diagrams of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressures are 100 Torr, 50 Torr, and 10 Torr. The specification conditions in the application tests according to the examples are shown below.

[0038] ---------------------------------------------------------------------------------- Water vapor concentration: 0.7% (absolute concentration) Temperature range: 300K Laser path length: 100mm Modulation frequency: 50kHz Accumulation count: 654 times (13 ms) Laser wavelength: 1392.5nm Frequency band of AC amplifier 21: 20MHz AD converter in the analysis device 23: Sampling frequency 100MHz, 14-16 bits Pressure: 10 Torr (1.3 kPa) to 100 Torr (103 kPa) Atmospheric pressure equivalent concentration: 92 ppm ----------------------------------------------------------------------------------

[0039] As is clear from Figs. 8 to 10, the wavelength scanning A drop portion Ld1 occurs within the range Lw1, which indicates that the measurement target gas can be analyzed by the analysis device 23.

[0040] In the gas analyzer 10 according to this embodiment, the following measures can be considered to improve the sensitivity and detection accuracy.

[0041] (1) The integration time will be set to 1 second, approximately 10 times that of the conventional technology. Also, the number of integration times will be increased. (2) A cooled photodetector is used as the photodetector 19, and the detection sensitivity of the cooled photodetector is about 10 times that of the conventional technology. (3) The amplification degree of the AC amplifier 21 is about 10 times that of the conventional technology. (4) The intensity of the laser light 1 from the laser 11 is about 10 times that of the prior art. (5) Noise in other electric circuits is reduced compared to conventional techniques.

[0042] <Embodiment 2> Fig. 3 is a block diagram showing an example of the configuration of a gas analyzer 10A according to embodiment 2. Fig. 4 is a diagram showing the operation of the gas analyzer 10A of Fig. 3, and is a schematic waveform diagram of the intensities of the laser beams 1 and 2, the wavelengths of the laser beams 1 and 2, and the output voltage of the electric signal Sd from the photodetector 19. The gas analyzer 10A according to embodiment 2 differs from the gas analyzer 10 according to embodiment 1 in Fig. 1A in the following points.

[0043] (1) Further comprising a laser 12 that emits laser light 2. (2) Instead of the laser control device 14, a laser control device 14A is provided that controls the two lasers 11 and 12. Here, the laser control device 14A is configured to include the controller 60 in FIG. 1B, two signal generators 61 (FIG. 1B), and two current power sources 62 (FIG. 1B). (3) A multiplexer 15 is provided between the lasers 11 and 12 and the collimator 17. (4) Instead of the analyzer 23, an analyzer 23A is provided which analyzes each portion of the electrical signal corresponding to the two laser beams 1 and 2 in a time-division manner. The differences will be explained below.

[0044] The laser control device 14A changes the excitation current value for the laser 11 in synchronization with a clock signal of a predetermined frequency, thereby changing the intensity of the laser light 1, for example, in a rectangular pulse shape with a duty ratio of 50% (time period T1=T2), as shown in Fig. 4. By controlling the laser 11 in this way, the intensity of the laser light 1 becomes almost constant at the maximum intensity E1 of the rectangular pulse during the time period T1, and has a flat portion Lf1.

[0045] Moreover, the laser control device 14A changes the excitation current value for the laser 12 in synchronization with an inverted clock signal generated by inverting the clock signal, thereby changing the intensity of the laser light 2, for example, in a rectangular pulse shape with a duty ratio of 50% (time period T1=T2), as shown in Fig. 4. By controlling the laser 12 in this way, the intensity of the laser light 2 becomes almost constant at the maximum intensity E2 of the rectangular pulse during the time period T2, and has a flat portion Lf2.

[0046] 4, the laser control device 14A controls the lasers 11 and 12 so as to alternately change the laser light 1 and the laser light 2 in a rectangular pulse shape with substantially identical maximum intensities E1 and E2 (E1≈E2). Here, it becomes possible to obtain the intensities of E1 and E2 from the difference between the maximum intensities E1 and E2, and control is performed as follows. (1) In order to achieve high accuracy in detecting moisture in a semiconductor processing device, which will be described later, it is preferable to set the intensity fluctuations of the flat portions Lf1 and Lf2 to, for example, a threshold value of 10 −6 or less with respect to the maximum intensities E1 and E2. (2) The difference between E1 and E2 is, for example, 10 -6 It is preferable to set the threshold value to be equal to or less than that.

[0047] At this time, the wavelength of the laser light 1 is slightly delayed from the rise of the light intensity, as in the first embodiment. 1 As the temperature rises, the wavelength scanning range Lw1 from wavelength λ1 to wavelength λ2 changes in a generally proportional and monotonically increasing manner with time. That is, the laser control device 14A controls the laser 11 to output the laser light 1 from the laser 11 while changing (scanning) the wavelength of the laser light 1 over time.

[0048] In addition, the wavelength of the laser light 2 is slightly delayed from the rise of the light intensity. 1 As the temperature of laser 12 rises, the wavelength of laser light 2 changes, for example, in a wavelength scanning range Lw2 from wavelength λ3 to wavelength λ4 (Lw1 ≈ Lw2, but may differ slightly) in a generally proportional manner with time, monotonically increasing. That is, the laser control device 14A controls the laser 12 to output the laser light 1 from the laser 11 while changing (scanning) the wavelength of the laser light 2 over time.

[0049] Here, by setting the absorption wavelength of the first gas to be measured between the wavelengths λ1 and λ2 associated with the laser light 1, a drop portion Ld1 is generated in the output voltage of the electrical signal Sd from the photodetector 19 at a predetermined wavelength λa1. Also, by setting the absorption wavelength of the second gas to be measured between the wavelengths λ3 and λ4 associated with the laser light 2, a drop portion Ld2 is generated in the output voltage of the electrical signal Sd from the photodetector 19 at a predetermined wavelength λa2 (λa1 ≈ λa2, but may differ slightly).

[0050] The two laser beams 1 and 2 from the lasers 11 and 12 are multiplexed by a multiplexer 15, and the multiplexed beam 4 is irradiated onto the gas to be measured via a collimator 17 that collimates and focuses the multiplexed beam 4, and then input to a photodetector 19. The photodetector 19 receives the laser beam that has passed through the gas to be measured, and photoelectrically converts the laser beam into an analog electric signal Sd containing an AC component according to the intensity of the received laser beam. The AC amplifier 21 has an amplification band capable of sufficiently amplifying the AC component of the electric signal Sd (particularly, since the intensity of the laser beam 1 rises or falls rapidly, it contains high-order harmonic components), amplifies the analog electric signal Sd from the photodetector 19, and outputs the amplified electric signal Sda to an analyzer 23. Next, the analyzer 23 inputs the analog electric signal Sda from the AC amplifier 21 and performs AD conversion using a built-in AD converter, and then analyzes the waveform (absorption spectrum) of the electric signal Sda as is well known, to analyze the concentration and temperature of the gas to be measured (see, for example, Non-Patent Documents 1 and 2). The analysis device 23 can be realized by, for example, a computer (information processing device).

[0051] Here, the analyzer 23A according to the second embodiment performs analysis of gas concentration and temperature by time-sharing the electrical signal Sda in synchronization based on a clock signal in the laser control device 14 or a clock signal reproduced by the analyzer 23A. That is, in the time period T1, an analysis process (including signal integration) for a measurement target gas having an absorption wavelength λa1 is performed, and in the time period T2, an analysis process (including signal integration) for a measurement target gas having an absorption wavelength λa2 is performed. This allows the analysis of two measurement target gases to be performed substantially simultaneously.

[0052] In the gas analyzer 10A configured as above, the laser light 1 is irradiated to the gas to be measured while scanning the wavelength of the laser light 1 output from the laser 11 in a predetermined wavelength band of wavelengths λ1 to λ2 including the estimated absorption wavelength λa1, and the laser light 2 is irradiated to the gas to be measured while scanning the wavelength of the laser light 2 output from the laser 12 in a predetermined wavelength band of wavelengths λ3 to λ4 including the estimated absorption wavelength λa2. The concentration and temperature of the gas to be measured are measured by analyzing the absorption spectrum of the laser light related to the electrical signal Sda including the absorption information of the gas to be measured obtained at that time. Here, by repeating the rectangular pulse waves of the laser lights 1 and 2, an analysis is performed by integrating multiple times corresponding to the multiple rectangular pulse waves of each of the laser lights 1 and 2, and the average value is calculated, thereby improving the analysis accuracy.

[0053] In addition, as in the second embodiment, by irradiating a target gas with a combined light obtained by combining two laser beams 1 and 2 having different maximum intensities E1 and E2, it is possible to detect a change in the amount of absorption with a simpler configuration and higher accuracy than the conventional technology. Also, the number of integrations per given time can be doubled, and the analytical accuracy can be improved compared to the conventional technology.

[0054] (Modification of the second embodiment) In the above-described second embodiment, the same measurement target gas is analyzed in roughly the same absorption wavelength band, with E1≈E2, but the present invention is not limited to this. Different measurement target gases may be analyzed in different absorption wavelength bands, with E1≠E2. In this case, the measurement target gas components of In addition to the laser light in a wavelength band including the wavelength at which the gas component to be measured absorbs, the laser light in a wavelength band including the wavelength at which the gas component to be measured absorbs can be used to simultaneously measure a plurality of gas components. In order to analyze different gas components to be measured in the time periods T1 and T2 in the analyzer 23A, it is preferable to set the wavelength scanning ranges Lw1 and Lw2 so that the absorption wavelength λa1 of one gas to be measured exists in the wavelength scanning range Lw1 and the absorption wavelength λa2 of the gas to be measured exists in the wavelength scanning range Lw2.

[0055] In the above-described second embodiment, T1=T2 is set, but T1≠T2 may be set. This allows the wavelength scanning range Lw1 of the laser light 1 and the wavelength scanning range Lw2 of the laser light 2 to be different from each other. However, as described in the modified example of the first embodiment, the wavelength scanning range L w It is preferable to set Lw2 taking into consideration the duty ratio of the rectangular pulse wave.

[0056] Furthermore, by setting the absorption wavelength λa1 to approximately half the wavelength scanning range Lw1, the output voltage drop portion Ld1 can be set to approximately half the wavelength scanning range Lw1. By setting the absorption wavelength λa2 to approximately half the wavelength scanning range Lw2, the output voltage drop portion Ld2 can be set to approximately half the wavelength scanning range Lw2. This allows the measurement target gas to be analyzed with high accuracy without falling into the portion where the wavelength is indefinite.

[0057] <Embodiment 3> 5 is a block diagram showing a configuration example of a gas analyzer 10B according to the embodiment 3. The gas analyzer 10B according to the embodiment 3 is the same as that shown in FIG. 2 The present invention differs from the gas analyzer 10A according to the above in the following respects.

[0058] (1) Further comprising a laser 13 that emits laser light 3. (2) A laser control device 14B that controls the three lasers 11, 12, and 13 is provided in place of the laser control device 14A. (3) Instead of the analyzer 23A, an analyzer 23 that analyzes each part of the electrical signal corresponding to the three laser beams 1, 2, and 3 in a time-division manner is used. B Equipped with.

[0059] With the above-mentioned configuration, the rectangular pulse waves of the laser beams 1, 2, and 3 are repeatedly emitted in a sequential manner without overlapping, and an analysis is performed by integrating the data multiple times corresponding to each of the multiple rectangular pulse waves of the laser beams 1, 2, and 3, and the average value is calculated, thereby improving the analysis accuracy.

[0060] Here, the maximum intensities E1, E2, and E3 of the laser beams 1, 2, and 3 may be the same or different from each other, or at least two of them may be the same. This allows the wavelength bands including the absorption wavelengths corresponding to the wavelength setting range to be the same or different from each other, or at least two of them to be the same.

[0061] In addition, the time periods E1, E2, and E3 of the laser beams 1, 2, and 3 may be the same as each other, may be set to be different from each other, or may be set so that at least two of them are the same. However, as in the second embodiment, the wavelength scanning range changes depending on the length of the time periods E1, E2, and E3, and the points to note regarding the settings in the second embodiment are also the same.

[0062] In the third embodiment, three laser beams 1, 2, and 3 are multiplexed using three lasers 11, 12, and 13. However, the present invention is not limited to this. Four or more laser beams may be multiplexed to analyze, for example, four or more different target gases.

[0063] <Modifications of the First to Third Embodiments> Fig. 6 is a waveform diagram showing the intensity of the laser light 1 according to the modified examples of the embodiments 1 to 3. As shown in Fig. 6, the laser 11 and the like may be controlled so that the intensity shape of the laser light 1 and the like is trapezoidal instead of rectangular. This is widely applicable to the embodiments 1 to 3 and their modified examples.

[0064] However, in order to make the wavelength scanning range Lw1 as long as possible, it is preferable that the trapezoidal rising portion Lfa and the falling portion Lfb have a large inclination so as to rise or fall sharply. Also, one of the trapezoidal rising portion Lfa and the falling portion Lfb may be configured at an angle of substantially 90° or −90°.

[0065] <Embodiment 4> 11 is a block diagram showing a configuration example of a two-dimensional gas analyzer 10C according to embodiment 4. In embodiments 1 to 3, the configurations of the gas analyzers 10, 10A, and 10B that have one path (optical path) and measure the state of the measurement target gas one-dimensionally have been described. In embodiment 4, a configuration of a two-dimensional gas analyzer that enables measurement in multiple paths to enable two-dimensional measurement of the concentration and temperature of the measurement target gas will be described.

[0066] The well-known X-ray CT (Computed Tomography) is a technique that uses X-rays to scan an object, divide its cross section into smaller parts, measure the amount of X-ray absorption for each divided part, and collect information on the amount of X-ray absorption equal to the number of unknowns to construct the cross section of the object. When the gas being measured contains a large amount of components such as water vapor and carbon dioxide, the irradiated light is partially absorbed at a certain wavelength and attenuated when passing through these chemical species with their own absorption spectrum. In the absorption method, the amount of absorption is measured as the integral value of the light path that passes through the measurement field. Two-dimensional temperature distribution can be measured by irradiating the measurement field with multiple laser beams and reconstructing a two-dimensional image using CT technology.

[0067] (Configuration of two-dimensional gas analyzer) The two-dimensional gas analyzer 10C in FIG. 11 is a two-dimensional gas analyzer capable of two-dimensionally measuring the concentration and temperature of a gas to be measured, and includes two lasers 11 and 12, a laser control device 14A, a multiplexer 15, a fiber splitter 31, a measurement cell 30, and an analyzer 23. C Here, the AC amplifier 21 is configured to include an analysis device 23. C It is assumed to be built into the

[0068] The measurement cell 30 has an opening and a substantially circular frame 33. To the frame 33, 16 collimators 17 and 16 photodetectors 19 arranged opposite each collimator 17 are attached to measure the transmitted light intensity of 16 optical paths. Therefore, in the measurement cell 30, a pair of collimators 17 and photodetectors 19 form a path at the opening. That is, the measurement cell 30 has 16 paths. Each path is configured to be included in the same plane, and two-dimensional measurement is possible within this plane. In the following, the normal direction of the plane including each path is referred to as the "normal direction of the measurement cell 30."

[0069] The measurement cell 30 having such a configuration is placed in a measurement field containing a gas to be measured, and the two-dimensional gas analyzer 10C measures the gas components in the opening area of ​​the measurement cell 30.

[0070] Laser 11 outputs laser light 1 in a wavelength band including an absorption wavelength λa1 absorbed by a component of a first gas to be measured, and laser 12 outputs laser light 2 in a wavelength band including a specific wavelength λa2 at which the component of the first gas to be measured is not absorbed, or an absorption wavelength λa2 absorbed by a component of a second gas to be measured that is different from the component of the first gas to be measured. Laser 11 and laser 12 output laser light 1 and 2 whose directions of intensity change are different from each other, or whose maximum intensities E1 and E2 are different.

[0071] The laser beams 1 and 2 emitted from the lasers 11 and 12 are input to the multiplexer 15 and multiplexed, and the multiplexed beam is input to the fiber splitter 31. The fiber splitter 31 splits the multiplexed beam into 16 branch beams and inputs them to the 16 collimators 17, respectively. Each branch beam is irradiated onto the measurement field via the collimator 17. The laser beams transmitted through the measurement field are received by the photodetectors 19 and photoelectrically converted into electric signals, and then input to the analysis device 23.

[0072] The analysis device 23 analyzes the signal waveforms of the electrical signals from each photodetector 19, and reconstructs a two-dimensional image showing the concentration and / or temperature distribution of the gas components. The reconstruction of the two-dimensional image can be performed using existing CT technology.

[0073] In the above fourth embodiment, an example in which the number of paths (optical paths) is 16 has been described, but the number of paths (optical paths) is not limited to 16 and may be 8, 12, or the like.

[0074] The two-dimensional gas analyzer 10C according to the fourth embodiment configured as described above can two-dimensionally measure the temperature and concentration distribution of the gas to be measured. In particular, by providing a difference between the amplitudes of the two laser beams, it is possible to cancel the effect of attenuation of the laser beam intensity due to factors other than the intended absorption of the target gas component, such as dirt on the window, and prevent a decrease in the gas analysis accuracy.

[0075] <Application Examples> The following describes application examples of the two-dimensional gas analyzer 10C according to embodiment 4. Note that in the following application examples, the gas analyzers 10 to 10B according to embodiments 1 to 4 may also be used.

[0076] (Application example 1) FIG. 12 is a schematic diagram showing a first application example of the two-dimensional gas analyzer 10C of FIG.

[0077] As shown in Fig. 12, the two-dimensional gas analyzer 10C can be applied to detection of the combustion state (temperature and concentration of target gas) in the combustion chamber of a boiler burner 100 used in a thermal power plant or the like. For example, by disposing the measurement cell 30 in Fig. 11 in the combustion chamber 110 of the boiler, it becomes possible to grasp the combustion state in the combustion chamber 110 of the burner 100 in a two-dimensional manner. Furthermore, by disposing a plurality of measurement cells 30 in a line normal to the combustion chamber 110, it becomes possible to measure the combustion state in a three-dimensional manner.

[0078] ( Application example 2 ) FIG. 13 is a schematic diagram showing a second application example of the two-dimensional gas analyzer 10C of FIG.

[0079] As shown in Fig. 13, the two-dimensional gas analyzer 10C can be applied to detection of the combustion state (temperature and concentration of target gas) of a vehicle engine. As shown in Fig. 13, for example, by providing the measurement cell 30 of Fig. 11 in a cylinder 210 of an engine 200, it becomes possible to detect the combustion state inside the cylinder 210. Also, the measurement cell 30 of Fig. 11 may be provided in an exhaust pipe 220, which is a flow path of exhaust gas discharged from the cylinder 210. This makes it possible to detect the temperature and concentration of the exhaust gas. Also, by providing a plurality of the measurement cells 30 of Fig. 11 in the cylinder 210 or the exhaust pipe 220 in a line in the normal direction, it becomes possible to measure the state of gas three-dimensionally.

[0080] Application example 2 configured as described above makes it possible to detect the temperature and concentration of various gases in the cylinder 210 or exhaust system of the engine 200, which is useful for elucidating the transient phenomenon of combustion and the behavior of unburned fuel emissions.

[0081] (Application example 3) FIG. 14 is a schematic diagram showing a third application example of the two-dimensional gas analyzer 10C of FIG.

[0082] As shown in FIG. 14, the two-dimensional gas analyzer 10C can be applied to the detection of the combustion state (temperature and concentration of the target gas) of a jet engine or an industrial gas turbine. In a jet engine 300 (or a gas turbine), the airflow taken in is compressed by a compressor using the rotational force of a turbine 303 as a driving force, and is mixed with fuel in a combustor 301 and combusted. The combustion gas generated by the combustion rotates the turbine 303 and is exhausted to the outside from an injection port. For example, as shown in FIG. 13, the measurement cell 30 may be provided near the injection port 305 of the jet engine 300. This makes it possible to detect the combustion state inside the combustor 301 of the jet engine 300. This technology is useful for elucidating the vibration phenomenon caused by the flow field and fuel non-uniformity. In addition, a plurality of the measurement cells 30 of FIG. 11 may be arranged in the vicinity of the injection port 305 in the exhaust direction of the combustion gas. This makes it possible to detect the combustion state three-dimensionally.

[0083] According to Application Example 3 configured as described above, by applying the configuration of a gas analyzer that combines CT technology and a laser to a method for measuring temperature distribution and concentration distribution in two or three dimensions, it is possible to simplify the device, quantify it, and increase its sensitivity, while also enabling it to be applied to combustion equipment such as boilers, engines, and gas turbines.

[0084] (Application example 4) FIG. 15 is a schematic diagram showing a fourth application example of the two-dimensional gas analyzer 10C of FIG. 11 to a semiconductor process, and FIG. 16 is a flow chart showing the fourth application example.

[0085] In FIG. 15 and FIG. 16, vinegar The process includes, for example, a wafer manufacturing process (S1), a pre-process (S2), and a post-process (S3). In the wafer manufacturing process (S1), a semiconductor wafer is manufactured, and in the pre-process (S2), the wafer is placed on a mounting table in a chamber and a predetermined semiconductor film is formed on the wafer using a film forming device. Furthermore, in the post-process (S3), the wafer is cut and individual semiconductor chips are assembled.

[0086] In the above semiconductor processing, particularly in the front-end process (S2), moisture in the chamber prevents formation of a high-purity semiconductor, so moisture detection and measurement are necessary to ensure this. By removing moisture while measuring it using the gas analyzers 10 to 10C according to the first to fourth embodiments, a substantially moisture-free environment in the chamber can be achieved.

[0087] (Application example 5) FIG. 17 is a schematic diagram showing a fifth application example of the two-dimensional gas analyzer 10C of FIG.

[0088] In FIG. 17, a denitrification device 400 is a device that denitrifies gases such as NOx, and is configured to have a gas analyzer 10 installed in an exhaust pipe 410 and to control the amount of NH3 injected through an injection valve 430 in an NH3 injection pipe 420 based on the NH3 measurement value.

[0089] Conventional indirect NOx NH3 measurement meters, such as those using the chemiluminescence method or the dual ion electrode method, had problems such as a heavy maintenance burden due to the need to install a sample line using a heated pipe to prevent NH3 adsorption and a complex measurement system, as well as slow response.

[0090] 17, the NH3 measurement is performed by directly installing the device in the exhaust pipe 410, which is the process line, and therefore the responsiveness and maintainability can be significantly improved compared to the conventional technology. Furthermore, the measurement signal of the NH3 concentration, which has good responsiveness, can be utilized for controlling the amount of NH3 injection, thereby enabling optimization of the NH3 injection.

[0091] (Application example 6) FIG. 18 is a flow chart showing a sixth application example of the two-dimensional gas analyzer 10C of FIG.

[0092] In FIG. 18, the exhaust gas denitrification system 500 includes a boiler 501 and an eco ofThe system includes a nitriding device 502, a denitration device 503, an air heater 504, a dust collector 505, and an exhaust chimney 506. The denitration device 503 is provided for the purpose of improving the dust collection rate of the dust collection equipment and preventing corrosion. In Fig. 17, the injection point of NH3 is basically the denitration device 503, but when the denitration device 503 is not provided, it is provided between the air heater 504 and the dust collector 505 as shown in Fig. 18. Here, the two-dimensional gas analyzer 10C is provided at 511, 512, 513, for example.

[0093] In the application example 6 configured as described above, NH3 can be measured with high accuracy to perform exhaust gas denitration. In particular, by using the two-dimensional gas analyzer 10C, it is possible to obtain high component selectivity, high-speed response, and improved maintainability compared to the conventional technology.

[0094] (Application example 7) For example, in a thermal power plant, the gas analyzers 10 to 10C according to the embodiments can be used to achieve the following configuration. (1) In a boiler, by performing gas analysis and control using the gas analyzers 10 to 10C, NOx, CO, and excess O2 can be reduced, thereby significantly improving combustion efficiency as compared to the conventional technology. (2) In a gas treatment device for gas exhausted from a boiler, the denitration efficiency can be improved, ammonia slip can be reduced, and the life of the denitration catalyst can be extended, compared to the conventional technology.

[0095] (Summary of application examples) As described above, the application examples using the gas analyzers 10 to 10C according to the embodiments provide higher component selectivity, faster response, and improved maintainability compared to the conventional techniques. Here, the gas analyzers are widespread for various industrial processes, such as not only NH3 measurement but also CO and O2 measurement under optimal combustion control, and trace moisture measurement in electrolysis plants or semiconductor processes, and can contribute greatly to environmental conservation and running cost reduction by linking them with process control rather than simply monitoring.

[0096] Additional Examples EXAMPLES

[0097] 19 is an experimental result of Example 1 of the gas analyzer 10 according to the embodiment 1, and is a waveform diagram of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 10 Torr (1.3 kPa). Here, the specification conditions in the applicability test according to Example 1 are shown below.

[0098] ---------------------------------------------------------------------------------- Water vapor concentration: 0.7% (absolute concentration) Laser path length: 100mm Modulation frequency: 50kHz Accumulation count: 654 times (13 ms) Laser wavelength: 1392.5nm Pressure: 10 Torr (1.3 kPa) Atmospheric pressure equivalent concentration: 92 ppm ----------------------------------------------------------------------------------

[0099] According to the test results of Example 1 in Fig. 19, the signal-to-noise power ratio (S / N) is 129 dB, and a concentration of 1 ppb can be achieved in atmospheric pressure conversion. As is clear from Fig. 19, laser light can be generated so that each flat portion has a drop portion Ld1. EXAMPLES

[0100] 20 is an experimental result of Example 2 of the gas analyzer 10A according to the embodiment 2, and is a waveform diagram of the output voltage of the photodetector 19 when the target gas is H2O and the chamber pressure is 10 Torr (1.3 kPa). Here, the specification conditions in the applicability test according to Example 2 are shown below.

[0101] ---------------------------------------------------------------------------------- Water vapor concentration: 0.7% (absolute concentration) Laser path length: 100mm Modulation frequency: 50kHz Accumulation count: 654 times (13 ms) Laser wavelength: 1392.5nm Pressure: 10 Torr (1.3 kPa) Atmospheric pressure equivalent concentration: 92 ppm ----------------------------------------------------------------------------------

[0102] According to the test results of Example 2 in FIG. 20, as is clear from FIG. 20, laser light can be generated so as to have drop portions Ld1 and Ld2 at different flat portions. EXAMPLES

[0103] FIG. 21 is an experimental result of Example 2 of the gas analyzer 10A according to the second embodiment, and is a waveform diagram of the output voltage of the photodetector 19, which shows that the amplification factor as an AC signal can be improved.

[0104] In the conventional example, when measuring using a laser beam having a sawtooth wave laser intensity, if the amplification factor of the AC signal is increased, a saturation state occurs at the top and bottom of the AC signal, making the generation of the laser beam unstable, and there is a problem that there is an upper limit to the amplification factor for stable operation. In contrast, the test results of the second embodiment show that by generating laser beams so that each flat portion has a drop portion, the amplification factor of the AC signal can be significantly improved, and in particular, the amplification factor of the voltage signal at the flat portions can be increased. Degree Therefore, the gas analysis capability can be improved by about 100 times. [Industrial Applicability]

[0105] As described above in detail, according to the present invention, the laser control means controls the laser light source so that the intensity of the laser light varies in a rectangular or trapezoidal shape having at least a substantially flat amplitude during a predetermined time period, and the wavelength of the laser light varies during the time period, thereby improving the detection accuracy of gas analysis compared to the prior art.

[0106] Moreover, application examples using the gas analyzer according to the present invention provide higher component selectivity, faster response, and improved maintainability compared to the conventional technology. In particular, in a semiconductor process, the gas analyzer according to the present invention can detect moisture in a chamber in which a predetermined film is formed on a semiconductor wafer with higher accuracy than the conventional technology, contributing to moisture removal, and providing extremely high industrial benefits.

[0107] Furthermore, the gas analyzer according to the present invention can be used in the following industrial applications. (1) In the automobile industry, it can be used for exhaust gas management and combustion control. In particular, it can be used as an exhaust gas measurement device and a tool for automobile manufacturers in developing new engines. (2) It is possible to manage and control process in various industrial equipment. (3) It can be used for process monitoring and control in various plants. For example, it can be used for quality management and control in the production processes of synthetic chemical plants, steel plants, etc., and can monitor specific components contained in gases of raw materials, products, etc. [Explanation of symbols]

[0108] 1,2,3 Laser light 4 Combined light 10, 10C, 10B Gas analyzer 10C Two-dimensional gas analyzer 11,12,13 Laser 14, 14A, 14B Laser control device 14b Measurement and control equipment 15 Multiplexer 17 Collimator 19 Photodetector 21 AC Amplifier 23,35 Analyzer 30 Measurement cell for two-dimensional gas analyzer 31 Fiber Splitter 33 Frame 41,42 electrode 43 p-type cladding layer 44 Active layer 45 n-type cladding layer 46 n-type substrate 51 Reflective surface 60 Controller 61 Waveform Generator 62 current power supply 100 Burner 110 Combustion chamber 200 Vehicle Engine 210 Cylinder 220 Exhaust pipe 300 Jet Engine 301 Combustor 303 Turbine 305 Nozzle 400 Denitration equipment 410 Exhaust pipe 420 Injection tube 430 Injection valve 500 Exhaust Gas Denitrification System 501 Boiler 502 Ecomizer 503 Denitration equipment 504 Air heater 505 Dust collector 506 Exhaust chimney 511 Gas analyzer 512 Gas analyzer 513 Gas analyzer

Claims

1. a laser light source that irradiates a measurement target gas with a laser light; a laser control means for controlling the laser light source so as to change the wavelength of the laser light in a predetermined wavelength band; a light detection means for photoelectrically converting the laser light transmitted through the gas to be measured and outputting an electrical signal; a gas analyzer comprising an analysis means for analyzing an absorption wavelength of the measurement target gas based on the electrical signal, The laser control means a signal generator for generating a square wave or trapezoidal wave voltage signal; a current power supply that converts the voltage signal into a rectangular wave or trapezoidal wave drive current and supplies the drive current to the laser light source; the laser control means controls the laser light source only by current control using the signal generator and the current power supply so that the intensity of the laser light changes in a shape having a flat portion that is at least substantially constant over a predetermined time period, thereby changing the output of the laser light, changing the temperature of the laser light source, changing a diffraction grating spacing of the laser light source, and changing the wavelength of the laser light over the time period with a delay from the rise in intensity of the laser light and approximately proportional to time as the temperature of the laser light source increases.

2. The shape is a rectangular shape or a trapezoidal shape.

2. The gas analyzer of claim 1.

3. A plurality of laser light sources each outputting a plurality of laser beams; a laser control unit that controls each of the plurality of laser light sources so as to change the wavelengths of the plurality of laser beams within a predetermined wavelength band; a combining means for combining the plurality of laser beams and irradiating the combined beam onto a gas to be measured; a light detection means for photoelectrically converting the laser light transmitted through the gas to be measured and outputting an electrical signal; a gas analyzer comprising an analysis means for analyzing an absorption wavelength of the measurement target gas based on the electrical signal, The laser control means a signal generator for generating a square wave or trapezoidal wave voltage signal; a current power supply that converts the voltage signal into a rectangular wave or trapezoidal wave drive current and supplies the drive current to the plurality of laser light sources; the laser control means controls the multiple laser light sources only by current control using the signal generator and the current power supply so that the multiple laser light beams are output repeatedly and sequentially without overlapping with each other, and the intensity of each laser light beam changes in a shape having a flat portion that is at least substantially constant over a predetermined time period, thereby changing the output of each laser light beam, changing the temperature of each laser light source, changing the diffraction grating spacing of each laser light source, and changing the wavelength of each laser light beam over the time period with a delay from the rise in intensity of each laser light beam and approximately proportional to time as the temperature of each laser light source increases.

4. The shape is a rectangular shape or a trapezoidal shape.

4. A gas analyzer as claimed in claim 3.

5. the light intensities of the plurality of laser beams are substantially the same and have a difference therebetween of a predetermined threshold or less; 5. A gas analyzer according to claim 3 or 4.

6. the plurality of laser light sources include a first laser light source and a second laser light source, the first laser light source outputs a first laser light; the second laser light source outputs a second laser light, the laser control means controls the first and second laser light sources so as to alternately and repeatedly output the first and second laser beams; A gas analyzer according to any one of claims 3 to 5.

7. The gas analyzer further includes a splitting unit that splits the combined light into a plurality of optical paths and irradiates the measurement target gas with the split light, the light detection means includes a plurality of light detection units provided corresponding to the plurality of optical paths, each of which performs photoelectric conversion on the laser light transmitted through the gas to be measured and outputs an electrical signal; The analyzing means analyzes the measurement target gas based on the plurality of electrical signals output from each of the light detecting units, the laser control means controls the first and second laser light sources so as to make the amplitude of the first laser light and the amplitude of the second laser light different from each other; the analyzing means cancels the influence of fluctuations due to factors other than the inherent absorption in the waveforms of the electrical signals from the light detecting units based on the difference in amplitude between the first laser light and the second laser light.

7. A gas analyzer according to claim 6, which recites claim 3 or 4.

8. the laser control means controls each of the laser light sources so that the fluctuation of the flat portion is equal to or smaller than a predetermined threshold value. A gas analyzer according to any one of claims 1 to 7.

9. Further comprising an amplifier means provided between the light detection means and the analysis means for amplifying the electrical signal. A gas analyzer according to any one of claims 1 to 8.

10. the laser control means controls the plurality of laser beams so that amplitudes of the plurality of laser beams become substantially identical to each other during the time period, and so that the plurality of laser beams change in substantially the same wavelength band to each other during the time period. A gas analyzer according to any one of claims 3 to 6.

11. the laser control means controls the plurality of laser beams such that amplitudes of the plurality of laser beams are different from one another during the time period, and the plurality of laser beams change in substantially different wavelength bands from one another during the time period. A gas analyzer according to any one of claims 3 to 6.

12. A step of irradiating a measurement target gas with a laser light source; controlling the laser light source so as to change the wavelength of the laser light in a predetermined wavelength band; a step of photoelectrically converting the laser light transmitted through the gas to be measured and outputting an electrical signal; and analyzing an absorption wavelength of the measurement target gas based on the electrical signal, The gas analysis method includes: A signal generator generates a square wave or trapezoidal wave voltage signal; A current power supply converts the voltage signal into a square wave or trapezoidal wave drive current and supplies the square wave or trapezoidal wave drive current to the laser light source; the step of controlling the laser light source includes controlling the laser light source so that, by only current control using the signal generator and the current power supply, the intensity of the laser light changes in a shape having a plateau that is at least substantially constant over a predetermined time period, thereby changing an output of the laser light, changing a temperature of the laser light source, changing a diffraction grating spacing of the laser light source, and changing a wavelength of the laser light over the time period with a delay from a rise in intensity of the laser light and approximately proportional to time as the temperature of the laser light source increases.

13. The shape is a rectangular shape or a trapezoidal shape.

13. The method of gas analysis according to claim 12.

14. A step of outputting a plurality of laser beams from a plurality of laser light sources, respectively; controlling the plurality of laser light sources so as to change the wavelengths of the plurality of laser beams in respective predetermined wavelength bands; a step of combining the plurality of laser beams and irradiating the combined beam onto a gas to be measured; a step of photoelectrically converting the laser light transmitted through the gas to be measured and outputting an electrical signal; and analyzing an absorption wavelength of the measurement target gas based on the electrical signal, The gas analysis method includes: A signal generator generates a square wave or trapezoidal wave voltage signal; a current power supply converting the voltage signal into a square wave or trapezoidal wave drive current and supplying the square wave or trapezoidal wave drive current to the plurality of laser light sources; the step of controlling the plurality of laser light sources includes controlling the plurality of laser light sources so that the plurality of laser light sources are outputted sequentially and repeatedly so as not to overlap with each other, solely by current control using the signal generator and the current power supply, and the intensity of each of the laser light sources changes in a shape having a flat portion that is at least substantially constant over a predetermined time period, thereby changing the output of each of the laser light sources, changing the temperature of each of the laser light sources, changing a diffraction grating interval of each of the laser light sources, and changing the wavelength of each of the laser light sources over the time period with a delay from a rise in intensity of each of the laser light sources and approximately proportional to time as the temperature of each of the laser light sources increases.

15. The shape is a rectangular shape or a trapezoidal shape.

15. The method of gas analysis according to claim 14.

16. the light intensities of the plurality of laser beams are substantially the same and have a difference therebetween of a predetermined threshold or less; 16. The gas analysis method according to claim 14 or 15.

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