Measurement equipment

Abstract

To provide a measurement device which achieves highly accurate measurement by applying a sufficient amount of light to a measurement object with high efficiency.SOLUTION: A measurement device includes: a holding table for holding a measurement object; and a measurement unit for measuring the height or thickness of the measurement object held by the holding table. The measurement unit includes: a light source unit; an optical fiber for guiding light emitted by the light source unit; and a condenser for condensing the light guided by the optical fiber on the measurement object held by the holding table. The light source unit includes: an excitation light source; a fluorescent substance which, when receiving excitation light emitted by the excitation light source, emits fluorescent light with a wavelength different from that of the excitation light; and a first condensing lens for condensing the excitation light emitted by the excitation light source on the fluorescent substance.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a measuring device that irradiates a measurement object with light and measures the height position and thickness of the measurement object from the reflected light. [Background technology]

[0002] In the manufacturing process of device chips used in electronic devices such as mobile phones and personal computers, first, a number of mutually intersecting planned division lines (streets) are set on the front surface of a wafer made of a material such as a semiconductor. Then, devices such as ICs (Integrated Circuits) and LSIs (Large-scale Integrations) are formed in each area partitioned by the planned division lines. After that, the wafer is ground from the back side to thin it, and divided along the planned division lines to form individual device chips.

[0003] A grinding device for thinning a wafer includes a holding table capable of holding the wafer, and a grinding unit equipped with a grinding wheel capable of grinding the wafer. The grinding device further includes a measuring device capable of monitoring the height position of the upper surface of the wafer held on the holding table and the thickness of the wafer. The grinding device uses the measuring device to measure the thickness of the wafer while grinding the wafer, thereby thinning the wafer to a predetermined thickness (see Patent Document 1).

[0004] The division of the wafer is carried out, for example, by a laser processing device capable of laser processing the wafer by irradiating the wafer with a laser beam. The laser processing device includes a holding table for holding a workpiece such as a wafer, and a laser beam irradiation unit for irradiating the workpiece held by the holding table with a laser beam to laser process the workpiece. The laser processing device further includes a measuring device for measuring the height position of the upper surface of the workpiece held by the holding table and the thickness of the workpiece.

[0005] The laser beam irradiation unit, for example, focuses a laser beam having a wavelength that is transparent to the workpiece (a wavelength that can pass through the workpiece) at a predetermined depth position in the workpiece, and forms a modified layer that serves as a division starting point inside the workpiece. In the laser processing device, when the workpiece is irradiated with a laser beam, the height position of the top surface of the workpiece held on the holding table is measured by a measuring device. Then, based on the measured height position of the top surface of the workpiece, the focusing point of the laser beam is positioned at a predetermined height position.

[0006] The measurement device includes a light source, an optical fiber that serves as a path for the light (probe light) emitted by the light source, and a light collector that collects the light guided by the optical fiber onto the object to be measured.The light is branched, one of which is collected onto the object to be measured and the other is irradiated onto a predetermined reference surface, and the light reflected from the upper and lower surfaces of the object to be measured and the light reflected from the reference surface are combined and travel back along the optical fiber.

[0007] The measurement device further includes a branching section provided midway along the optical fiber, and a diffraction grating provided in the path of the reflected light branched from the optical fiber at the branching section, and a detector that detects the reflected light diffracted by the diffraction grating, and a calculation section that calculates the height positions of the upper and lower surfaces of the wafer, the thickness of the wafer, and the like from the intensity distribution of the reflected light obtained by the detector (see Patent Document 2).

[0008] Alternatively, the measurement device includes a light source, an optical fiber that is a path for light emitted by the light source, and a condenser including a chromatic aberration lens that condenses the light guided by the optical fiber onto an object to be measured. When the light is condensed onto the object to be measured, the reflected light reflected from the upper surface of the object to be measured returns to the optical fiber and travels backward.

[0009] The measurement device further includes a branching section provided midway along the optical fiber, and a spectroscope that separates the reflected light branched from the optical fiber at the branching section into wavelengths.The measurement device also includes a detector that detects the reflected light separated into wavelengths by the spectroscope, and a calculation section that calculates the height position of the upper surface of the wafer, the thickness of the wafer, and the like from the wavelength of the reflected light obtained by the spectroscope and the detector (see Patent Document 3). [Prior art documents] [Patent documents]

[0010] [Patent Document 1] JP 2011-143488 A [Patent Document 2] JP 2011-122894 A [Patent Document 3] JP 2008-170366 A Summary of the Invention [Problem to be solved by the invention]

[0011] Conventional measurement devices use white LEDs (Light Emitting Diodes) or halogen lamps as the light source for the probe light irradiated to the object being measured. The spot diameter of the light emitted from white LEDs, etc. is large, making it difficult to focus the light on one end of an optical fiber. This makes it difficult to pass a sufficient amount of probe light through the optical fiber, and the probe light cannot be irradiated to the object being measured with a sufficient amount of light, resulting in insufficient measurement accuracy and resolution.

[0012] In contrast, if a high-output light source such as a super continuum light source is used as the light source of the probe light, the probe light can be irradiated to the object under test with a sufficient amount of light. However, in this case, the light source becomes expensive and large in size.

[0013] The present invention has been made in view of the above problems, and an object of the present invention is to provide a highly efficient measuring device capable of irradiating a sufficient amount of light onto an object to be measured. [Means for solving the problem]

[0018] The present invention One According to one aspect, there is provided a measuring device including a holding table for holding an object to be measured, and a measuring unit for measuring the height or thickness of the object to be measured held on the holding table, wherein the measuring unit includes a light source unit, an optical fiber for guiding light emitted by the light source unit, and a focusing device for focusing the light guided by the optical fiber onto the object to be measured held on the holding table, wherein the light source unit includes an excitation light source, a phosphor that emits fluorescence having a wavelength different from that of the excitation light when it receives excitation light emitted by the excitation light source, and a first focusing lens for focusing the excitation light emitted by the excitation light source onto the phosphor, wherein the phosphor is disposed on a transparent substrate that transmits the excitation light and the fluorescence, and wherein the light source unit further includes a second focusing lens for focusing probe light that includes the fluorescence emitted by the phosphor and a portion of the excitation light that has transmitted through the phosphor and that has transmitted through the transparent substrate onto the optical fiber.

[0019] good Preferably, the phosphor is arranged in a shape including an annular region on the circular transparent substrate having a rotation axis, and the light source unit further includes a rotation drive source that suppresses a temperature rise of the phosphor by rotating the transparent substrate around the rotation axis.

[0020] Furthermore, preferably, the phosphor is arranged in a shape including an annular region on the circular reflective substrate having a rotation axis, and the light source unit further includes a rotational drive source that suppresses a temperature rise of the phosphor by rotating the reflective substrate around the rotation axis.

[0021] According to another aspect of the present invention, there is provided a measurement device including a holding table for holding an object to be measured, and a measurement unit for measuring a height or thickness of the object to be measured held on the holding table, the measurement unit including a light source unit, an optical fiber for guiding light emitted by the light source unit, and a condenser for focusing the light guided by the optical fiber on the object to be measured held on the holding table, the light source unit including an excitation light source, a phosphor that emits fluorescence having a wavelength different from that of the excitation light when receiving excitation light emitted by the excitation light source, and a first condensing lens for focusing the excitation light emitted by the excitation light source on the phosphor, The phosphor is embedded in the optical fiber. A measuring device is provided, characterized in that .

[0023] Also preferably, the excitation light source is a laser diode. Effect of the Invention

[0024] A measuring device according to an aspect of the present invention includes a light source unit having an excitation light source, a phosphor, and a first condensing lens. The excitation light output from the excitation light source is condensed on the phosphor by the first condensing lens, causing the phosphor to generate fluorescence having a wavelength different from that of the excitation light. The fluorescence can then be irradiated onto the object to be measured through an optical fiber and a condenser.

[0025] In this case, a high-output monochromatic light source with a small spot diameter can be used to generate fluorescence containing a wide wavelength band that can be used for measurement. This fluorescence also has a small diameter, making it easy to focus on the end face of the optical fiber. Therefore, the measurement device according to one aspect of the present invention can irradiate the object to be measured with a sufficient amount of light containing the fluorescence (probe light) with high efficiency, without using an expensive and large light source such as a supercontinuum light source.

[0026] Therefore, according to one aspect of the present invention, a highly efficient measurement device capable of irradiating a sufficient amount of light onto an object to be measured is provided. [Brief description of the drawings]

[0027] [Figure 1] FIG. 1 is a perspective view showing a schematic diagram of a laser processing apparatus incorporating a measuring device. [Diagram 2] FIG. 2 is a block diagram illustrating a basic configuration of a measurement device. [Diagram 3] FIG. 3A is a side view showing a schematic diagram of an example of an optical system of a measurement device, and FIG. 3B is a side view showing a schematic diagram of another example of an optical system of a measurement device. [Figure 4] FIG. 4A is a side view showing a schematic diagram of an example of an optical system of a measurement device, and FIG. 4B is a side view showing a schematic diagram of another example of an optical system of a measurement device. [Diagram 5]FIG. 5(A) is a side view showing a schematic diagram of an example of an optical system of a measurement device, and FIG. 5(B) is a side view showing a schematic diagram of another example of an optical system of a measurement device. [Figure 6] FIG. 6A is a side view showing a schematic diagram of an example of an optical system of a measurement device, and FIG. 6B is a side view showing a schematic diagram of another example of an optical system of a measurement device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0028] A measuring device according to one aspect of the present invention will be described with reference to the accompanying drawings. The measuring device according to this embodiment is used by being incorporated in a processing device that processes a workpiece such as a semiconductor wafer. In the processing device, the measuring device measures the height position or thickness of the top or bottom surface of the workpiece. That is, the measuring device measures the height position or thickness of the top or bottom surface of the workpiece processed by the processing device as the measured object.

[0029] First, the object to be measured by the measuring device according to this embodiment will be described. The object to be measured is the workpiece of the processing device. Fig. 2 includes a perspective view of a wafer 1 to be the object to be measured (workpiece). The object to be measured is, for example, a disk-shaped wafer 1 made of Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductor material.

[0030] Alternatively, the object to be measured may be a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz. The glass may be, for example, alkali glass, non-alkali glass, soda-lime glass, lead glass, borosilicate glass, or quartz glass. The object to be measured may be a package substrate, a ceramic substrate, or the like. Below, an example will be described in which the object to be measured is a disk-shaped wafer 1.

[0031] The front surface 1a of the wafer 1 is partitioned by a plurality of dividing lines 3 arranged in a grid pattern. Devices 5 such as ICs and LSIs are formed in each area partitioned by the dividing lines 3 on the front surface 1a of the wafer 1. The wafer 1 is then ground from the back surface 1b to thin it, and divided along the dividing lines 3 to obtain individual device chips.

[0032] The wafer 1 is ground by a grinding machine equipped with a grinding wheel. The wafer 1 is divided by a laser processing machine that irradiates the wafer 1 with a laser beam to perform laser processing on the wafer 1. The measuring device according to this embodiment is incorporated into a processing machine such as a grinding machine or a laser processing machine for use. Hereinafter, a laser processing machine will be described as an example of a processing machine in which the measuring device according to this embodiment is incorporated.

[0033] For example, the wafer 1 is attached to the tape 7 which is previously attached to the annular frame 9. That is, the wafer 1, the tape 7, and the annular frame 9 are previously integrated to form a frame unit 11. Then, the wafer 1 in the state of the frame unit 11 is carried into a laser processing device and processed.

[0034] 1 is a perspective view showing a schematic diagram of a laser processing device 2. The laser processing device 2 includes a base 4 that supports each of the components. A pair of X-axis guide rails 6 parallel to the X-axis direction are provided on the front part of the upper surface of the base 4, and an X-axis moving plate 8 is slidably attached to the X-axis guide rails 6.

[0035] A nut portion (not shown) is provided on the underside of the X-axis moving plate 8, and an X-axis ball screw 10 parallel to the X-axis guide rail 6 is screwed into this nut portion. An X-axis pulse motor 12 is connected to one end of the X-axis ball screw 10. A support base 16 that supports a holding table 14 is disposed on the X-axis moving plate 8, and the holding table 14 is disposed on the support base 16. The holding table 14 includes a porous member exposed above, and a frame that houses the porous member in a recess.

[0036] A suction passage is formed inside the frame, which connects the porous member to a suction source. When a workpiece (object to be measured) is placed on the porous member and the suction source is operated, negative pressure acts on the workpiece, and the workpiece is sucked and held on the holding table 14. In other words, the upper surface of the porous member becomes the holding surface 14a. Clamps 14b are provided around the holding table 14 to fix the annular frame 9 that holds the workpiece via tape 7.

[0037] When the X-axis ball screw 10 is rotated by the X-axis pulse motor 12, the X-axis moving plate 8 moves in the X-axis direction along the X-axis guide rails 6. The pair of X-axis guide rails 6, the X-axis moving plate 8, the X-axis ball screw 10, and the X-axis pulse motor 12 function as an X-axis moving mechanism that moves the workpiece held on the holding table 14 in the X-axis direction.

[0038] A pair of Y-axis guide rails 18 are provided along the Y-axis direction perpendicular to the X-axis direction at the rear of the upper surface of the base 4 of the laser processing device 2. A support 20 is slidably attached to the Y-axis guide rails 18. The support 20 includes a base 20a attached to the Y-axis guide rails 18 and a wall 20b erected on the base 20a.

[0039] A nut portion (not shown) is provided on the lower surface side of the base portion 20a of the support body 20, and a Y-axis ball screw 22 parallel to the Y-axis guide rail 18 is screwed into this nut portion. A Y-axis pulse motor 24 is connected to one end of the Y-axis ball screw 22.

[0040] When the Y-axis ball screw 22 is rotated by the Y-axis pulse motor 24, the support 20 moves in the Y-axis direction along the Y-axis guide rails 18. The pair of Y-axis guide rails 18, the Y-axis ball screw 22, and the Y-axis pulse motor 24 function as a Y-axis movement mechanism that moves a laser processing unit 32 (described later) in the Y-axis direction.

[0041] A pair of Z-axis guide rails 26 are disposed on the rear surface side of the wall portion 20b of the support body 20 along the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction. A unit holder 28 is slidably attached to the Z-axis guide rails 26. A nut portion (not shown) is provided on the surface of the unit holder 28 facing the wall portion 20b, and a Z-axis ball screw (not shown) parallel to the Z-axis guide rails 26 is screwed into this nut portion. A Z-axis pulse motor 30 is connected to one end of the Z-axis ball screw.

[0042] When the Z-axis ball screw is rotated by the Z-axis pulse motor 30, the unit holder 28 moves in the Z-axis direction along the Z-axis guide rails 26. The pair of Z-axis guide rails 26, the Z-axis ball screw, and the Z-axis pulse motor 30 function as a lifting unit that raises and lowers the laser processing unit 32 in the Z-axis direction.

[0043] Some of the components of a laser processing unit 32 are fixed to the unit holder 28. The laser processing unit 32 has a function of irradiating a laser beam onto a workpiece held on the holding surface 14a of the holding table 14, and laser processing the workpiece.

[0044] The laser processing unit 32 includes a laser oscillator that includes a medium such as Nd:YAG or Nd:YVO4 and emits a laser beam. The laser processing unit 32 can irradiate the workpiece with a laser beam having a wavelength that can pass through the workpiece (a wavelength that is transparent to the workpiece).

[0045] The laser processing unit 32 includes a processing head 34 located above the holding table 14, and an imaging unit 36 ​​adjacent to the processing head 34. The imaging unit 36 ​​can image the surface of the workpiece held on the holding table 14, and is used when performing alignment so that the laser beam can be irradiated onto the workpiece along the planned division lines 3. The laser processing unit 32 also incorporates a measuring device according to this embodiment, and the measuring device shares a portion of its optical system with the laser processing unit 32.

[0046] Furthermore, the laser processing device 2 includes a control unit 38 that controls each component of the laser processing device 2. The control unit 38 is configured by a computer including a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. By operating the processing device and the like in accordance with software stored in the auxiliary storage device, the control unit 38 functions as a concrete means in which the software and the processing device (hardware resources) work together.

[0047] The laser processing unit 32 focuses a laser beam at a predetermined height position inside the workpiece held by the holding table 14. In order to position the focusing point of the laser beam at a predetermined depth position in the workpiece, the laser processing device 2 measures the height position or thickness of the upper surface of the workpiece held by the holding table 14 with a measuring device.

[0048] A focal point is positioned inside the workpiece at a position overlapping the planned division line 3, and the holding table 14 and the laser processing unit 32 are moved relatively in a direction parallel to the holding surface 14a (X-axis direction or Y-axis direction) while the laser beam is focused on the focal point. Then, the laser beam is irradiated onto the workpiece along the planned division line, the workpiece is laser processed along the planned division line, and a modified layer that becomes the starting point of division is formed inside the workpiece.

[0049] Next, the measuring device according to this embodiment will be described. The measuring device measures the height or thickness of the upper surface of the object to be measured held on the holding table. When the measuring device is incorporated in a laser processing device 2 for use, the holding table 14 of the laser processing device 2 may also function as the holding table of the measuring device. Figure 2 is a block diagram showing a schematic basic configuration of a measuring device 40 according to this embodiment. However, the holding table is omitted in Figure 2.

[0050] The measuring device 40 includes a measuring unit 42 that measures the height or thickness of a measurement object held on the holding table. The measuring unit 42 includes a light source unit 44, an optical fiber 46 that guides light emitted by the light source unit 44, and a condenser 48 that focuses the light (probe light) guided by the optical fiber 46 on the measurement object. The condenser 48 includes a focusing lens that can focus the probe light on the measurement object held on the holding table.

[0051] In the measurement device 40, the probe light emitted by the light source unit 44 is collected and made to enter one end of an optical fiber 46. The probe light emitted from the other end of the optical fiber 46 is collected on the object to be measured by a condenser 48. The probe light irradiated on the object to be measured is reflected by the object to be measured, and part of the reflected light proceeds to the condenser 48.

[0052] A branching section 50 is provided midway along the optical fiber 46, and the reflected light traveling backward through the optical fiber 46 is branched by the branching section 50. The measuring device 40 detects this reflected light to measure the height of the top surface of the object to be measured, and identifies the thickness of the object to be measured.

[0053] For example, a diffraction grating 52 and a detector (image sensor) 54 are provided at the tip of the branched optical fiber 46, and the height position, etc. of the upper surface of the object to be measured can be calculated by analyzing the reflected light detected by the detector 54. Alternatively, for example, a spectroscope (not shown) that disperses the reflected light and specifies the wavelength of the reflected light is provided at the tip of the branched optical fiber 46, and the height position, etc. of the object to be measured can be calculated from the wavelength of the reflected light.

[0054] The detector 54 or the spectroscope is connected to a control unit 38 (see FIG. 1) of the laser processing device 2 in which the measuring device 40 is incorporated, and the control unit 38 analyzes the reflected light and calculates the height position of the top surface of the object to be measured, etc. In other words, the control unit 38 can also function as a calculation section of the measuring device 40.

[0055] Conventional measurement devices have used white LEDs or halogen lamps as light sources for the probe light. The spot diameter of the light emitted from white LEDs, etc. is large, making it difficult to focus the light on one end of the optical fiber 46. This makes it difficult to transmit a sufficient amount of light through the optical fiber, and the probe light cannot be irradiated to the object to be measured with a sufficient amount of light, resulting in insufficient measurement accuracy and resolution.

[0056] In contrast, if a high-output light source such as a supercontinuum light source is used as the light source of the probe light, it is possible to irradiate the object under test with a sufficient amount of white light. However, in this case, the light source becomes expensive and large in size.

[0057] Therefore, in the measurement device 40 according to the present embodiment, a high-output light source with a small spot diameter, such as a blue or purple LD (laser diode), is used, and the light emitted from the light source is irradiated onto the phosphor as excitation light to obtain high-output probe light containing the generated fluorescence. Since the spot diameter of the fluorescence thus obtained is small, it is easy to focus the light on the end face of the optical fiber 46.

[0058] Although the light emitted by the LD is high-power, the light of a specific wavelength (monochromatic light) is not suitable for measuring the height position of the top surface of the object to be measured. Therefore, the light emitted by the LD is irradiated onto a phosphor as excitation light, generating fluorescence with a broader wavelength band than the excitation light, and the probe light containing this fluorescence is irradiated onto the object to be measured.

[0059] The configuration of the light source unit 44 of the measurement device 40 according to this embodiment will be described below. Fig. 3(A) is a side view showing an example of the optical system of the measurement device 40 according to this embodiment. Fig. 3(A) shows the light source unit 44 and an end of an optical fiber 46.

[0060] The light source unit 44 includes an excitation light source 56, a phosphor 60 that emits fluorescence having a different wavelength from the excitation light 58 when it receives excitation light 58 emitted by the excitation light source 56, and a first focusing lens 62 that focuses the excitation light 58 emitted by the excitation light source 56 on the phosphor 60. The phosphor 60 on which the excitation light 58 is focused is provided, for example, on one surface of a transparent substrate 64 that can transmit light in a wavelength band of the visible light region. The light source unit 44 further includes a second focusing lens 68 that focuses the fluorescence emitted by the phosphor 60 toward the end face of the optical fiber 46.

[0061] An LD that generates light of a short wavelength, such as blue or purple, is used as the excitation light source 56. A material that receives excitation light 58 emitted by the excitation light source 56 and emits fluorescence in a wavelength band that is different from and longer than the wavelength of the excitation light 58 is used as the phosphor 60. More specifically, a material that generates fluorescence of a long wavelength, such as green, yellow, or red, when receiving excitation light 58 of a short wavelength, such as blue or purple, can be used.

[0062] More specifically, the phosphor 60 contains yttrium aluminum oxide:cerium (YAlO 12 :Ce) and yttrium gadolinium aluminum oxide:cerium ((Y,Gd)3AlO 12 However, the material of the phosphor 60 is not limited to these.

[0063] When the excitation light 58 is irradiated onto the phosphor 60, fluorescence is generated. Then, a probe light 66 containing this fluorescence is transmitted through the transparent substrate 64. Note that the probe light 66 may contain a portion of the excitation light 58 that has transmitted through the phosphor 60. A second focusing lens 68 focuses this probe light 66 toward an end face of the optical fiber 46. A focusing device 48 (see FIG. 2) is connected to the end face of the optical fiber 46 opposite to the end face, and the probe light 66 containing the fluorescence emitted by the phosphor 60 is irradiated onto the object to be measured.

[0064] Here, in order to specify the height position, etc. of the top surface of the object to be measured with high accuracy using the measurement device 40, it is desirable for the probe light 66 to be light such as white light with a wide wavelength band. However, the probe light 66 does not need to be white light strictly according to the definition, and the probe light 66 does not need to contain light of all wavelengths with an equal intensity distribution or a specific intensity distribution.

[0065] That is, the probe light 66 must be non-monochromatic light that is not monochromatic light consisting of at least a specific wavelength component, and is preferably light having multiple wavelength components regardless of intensity distribution. Here, light having multiple wavelength components regardless of intensity distribution can also be called light having a wavelength band. The phosphor 60 emits fluorescence having a wavelength band when exposed to the excitation light 58 emitted by the excitation light source 56. The probe light 66 is light having a wavelength band that includes this fluorescence, and is light different from the excitation light 58.

[0066] Next, a description will be given of another example of the optical system of the measurement device 40 according to the present embodiment. Fig. 4(A) shows a schematic diagram of the optical system according to the other example of the measurement device 40. In the light source unit 44a shown in Fig. 4(A), a phosphor 60 is disposed on a reflective substrate 72.

[0067] The light source unit 44a includes a dichroic mirror 70a disposed between the first condensing lens 62 and the phosphor 60. The dichroic mirror 70a is incorporated into the light source unit 44a and has optical properties that allow the excitation light 58 to pass through and reflect the fluorescence generated by the phosphor 60. The light source unit 44a further includes a second condensing lens 68 that condenses the probe light 66, which includes the fluorescence reflected by the dichroic mirror 70a, into the optical fiber 46.

[0068] The excitation light source 56, the first condenser lens 62, the phosphor 60, and the second condenser lens 68 of the light source unit 44a shown in FIG. 4(A) are configured similarly to the light source unit 44 shown in FIG. 3(A).

[0069] In the light source unit 44a, when the excitation light 58 generated by the excitation light source 56 travels through the first condenser lens 62 and the dichroic mirror 70a and is irradiated onto the phosphor 60, fluorescence is generated. Then, the probe light 66 containing this fluorescence travels to the dichroic mirror 70a. Note that the probe light 66 may contain a portion of the excitation light 58 reflected by the reflective substrate 72.

[0070] The probe light 66 is reflected by the dichroic mirror 70a and travels to the second condenser lens 68. The second condenser lens 68 then condenses the probe light 66 toward the end face of the optical fiber 46. In this manner, the light source unit 44a shown in FIG. 4(A) can also condense the probe light 66 containing the fluorescence generated in the phosphor 60 onto the end face of the optical fiber 46.

[0071] A further example of the optical system of the measurement device 40 according to the present embodiment will be described. Fig. 4(B) shows a schematic diagram of the optical system according to the further example of the measurement device 40. In the light source unit 44b shown in Fig. 4(B) as well, the phosphor 60 is disposed on the reflective substrate 72.

[0072] The light source unit 44b includes a dichroic mirror 70b disposed on the optical path between the first condensing lens 62 and the phosphor 60. The dichroic mirror 70b is incorporated into the light source unit 44b and has optical properties that enable it to reflect the excitation light 58 and transmit the fluorescence generated by the phosphor 60. The light source unit 44b further includes a second condensing lens 68 that condenses the fluorescence that has transmitted through the dichroic mirror 70b into the optical fiber 46.

[0073] The excitation light source 56, the first condenser lens 62, the phosphor 60, and the second condenser lens 68 of the light source unit 44b shown in FIG. 4(B) are configured similarly to the light source unit 44a shown in FIG. 4(A).

[0074] In the light source unit 44b, excitation light 58 generated by the excitation light source 56 travels through the first condenser lens 62, is reflected by the dichroic mirror 70b, and is irradiated onto the phosphor 60. When the excitation light 58 is collected on the phosphor 60, fluorescence is generated. Then, the probe light 66 containing this fluorescence passes through the dichroic mirror 70b and travels to the second condenser lens 68. Note that the probe light 66 may contain a portion of the excitation light 58 reflected by the reflective substrate 72.

[0075] Then, the second focusing lens 68 focuses the probe light 66 toward the end face of the optical fiber 46. In this manner, the light source unit 44b shown in FIG. 4B can also focus the probe light 66 containing the fluorescence generated in the phosphor 60 onto the end face of the optical fiber 46.

[0076] Here, if the excitation light 58 generated by the excitation light source 56 continues to be focused on the phosphor 60 by the first focusing lens 62, the phosphor 60 may be heated and damaged, causing changes in the characteristics of the generated fluorescence, such as the intensity. Therefore, the measuring device 40 may be provided with a cooling mechanism that cools the phosphor 60 and suppresses a rise in temperature of the phosphor 60.

[0077] 4(A) and 4(B), a cooling mechanism 74 such as a heat sink made of a material with high thermal conductivity such as metal is provided on a reflective substrate 72 supporting the phosphor 60. Since the heat generated by the phosphor 60 is continuously removed by the cooling mechanism 74, the temperature rise of the phosphor 60 irradiated with the excitation light 58 is suppressed.

[0078] However, the cooling mechanism for cooling the phosphor 60 is not limited to this. For example, the cooling mechanism 74 may be configured with a cooling fan driven by a power source in addition to a heat sink made of metal or the like. By operating the cooling fan to blow air onto the heat sink, heat can be efficiently removed from the heat sink, and the phosphor 60 can be actively cooled.

[0079] The measuring device 40 according to this embodiment may further include a cooling mechanism of another aspect. Fig. 5(A) shows a light source unit 44c including a cooling mechanism 74a of another aspect instead of the cooling mechanism 74 formed of a heat sink of the light source unit 44a shown in Fig. 4(A). Fig. 5(B) shows a light source unit 44d including a cooling mechanism 74a of another aspect instead of the cooling mechanism 74 formed of a heat sink of the light source unit 44b shown in Fig. 4(B).

[0080] In the light source units 44c and 44d shown in Fig. 5(A) and Fig. 5(B), the phosphor 60a is disposed in an annular shape on a circular reflective substrate 72a having a rotating shaft 76. Fig. 5(A) and Fig. 5(B) include cross-sectional views of the phosphor 60a and the reflective substrate 72a. A rotation drive source (not shown) is connected to the base end of the rotating shaft 76.

[0081] When the light source units 44c and 44d operate the excitation light source 56, they rotate the reflecting substrate 72a around the rotation axis 76. In this case, the position of the phosphor 60a arranged in a ring shape on the reflecting substrate 72a that is irradiated with the excitation light 58 is constantly changing. Therefore, the excitation light 58 is not focused on a specific point of the phosphor 60a and the specific point is not continuously heated. Then, the specific point of the phosphor 60a is cooled during the period from when the excitation light 58 is irradiated to the specific point until the next time the excitation light 58 is irradiated to the specific point. That is, the temperature rise of the phosphor 60a is suppressed.

[0082] The phosphor 60a provided on the reflective substrate 72a does not have to be annular. For example, the phosphor 60a may be provided on the reflective substrate 72a in a shape including an annular region that serves as a moving path on the reflective substrate 72a of the irradiated position of the excitation light 58 when the reflective substrate 72a is rotated. The cooling mechanism that rotates the phosphor with a rotary drive source may be incorporated in a light source unit 44 in which the phosphor 60 is supported on a transparent substrate 64 as shown in FIG. 3(A). FIG. 3(B) shows a schematic diagram of a light source unit 44e including a cooling mechanism 74b.

[0083] In the light source unit 44e shown in Fig. 3(B), the phosphor 60a is disposed in a shape including an annular region on a circular transparent substrate 64a having a rotating shaft 76. Fig. 3(B) includes a cross-sectional view of the phosphor 60a and the transparent substrate 64a. A rotation drive source (not shown) is connected to the base end of the rotating shaft 76.

[0084] When the light source unit 44e operates the excitation light source 56, it rotates the transparent substrate 64a around the rotation axis 76. In this case, the position of the phosphor 60a arranged on the transparent substrate 64a that is irradiated with the excitation light 58 is constantly changing. Therefore, the excitation light 58 is not continuously focused on a specific part of the phosphor 60a, and the specific part is not continuously heated. The part of the phosphor 60a is cooled during the period from when the excitation light 58 is irradiated to the part until the next time the excitation light 58 is irradiated to the part. In other words, the temperature rise of the phosphor 60a is suppressed.

[0085] In the measuring device 40 according to this embodiment, the phosphor that generates the fluorescence used in the probe light 66 when irradiated with the excitation light 58 generated by the excitation light source 56 does not have to be supported by the transparent substrate 64 or the reflective substrate 72. For example, the phosphor may be provided directly on the optical fiber 46.

[0086] In the light source unit 44f shown in Fig. 6(A), a phosphor 60b is embedded in an optical fiber 46a, and excitation light 58 generated by an excitation light source 56 is focused on the phosphor 60b embedded in the optical fiber 46a by a first focusing lens 62. The light source unit 44f shown in Fig. 6(A) can be formed, for example, by connecting an optical fiber 46a formed of a quartz tube with phosphor 60b embedded therein to an end of the optical fiber 46. The fluorescence generated by the phosphor 60b proceeds directly to the end face of the optical fiber 46.

[0087] 6(B), a phosphor 60c is disposed on the end face of the optical fiber 46, and excitation light 58 generated by the excitation light source 56 is focused by a first focusing lens 62 on the phosphor 60c disposed on the end face of the optical fiber 46. Fluorescence generated by the phosphor 60c proceeds directly to the end face of the optical fiber 46. In this way, when the phosphors 60b and 60c are directly disposed on the optical fiber 46, loss of the probe light containing fluorescence is reduced.

[0088] As described above, the measurement device 40 according to this embodiment includes a light source unit 44 having an excitation light source 56, a phosphor 60, and a first condensing lens 62. The excitation light 58 output from the excitation light source 56 is condensed by the first condensing lens 62 onto the phosphor 60, causing the phosphor 60 to generate fluorescence having a wavelength different from that of the excitation light 58. Then, light containing this fluorescence (probe light 66) can be irradiated onto the object to be measured through the optical fiber 46 and the condenser 48.

[0089] In this case, a high-output monochromatic light source with a small spot diameter can be used to form light that includes a wide wavelength band that can be used for measurement. Since the fluorescence contained in this light (probe light 66) also has a small diameter, it is easy to focus on the end face of the optical fiber 46. Therefore, the measurement device 40 according to this embodiment can irradiate the object to be measured with a sufficient amount of light with high efficiency without using an expensive and large light source such as a supercontinuum light source.

[0090] The present invention is not limited to the above-described embodiment, and can be modified in various ways. For example, in the above-described embodiment, the measurement device 40 is incorporated into the laser processing device 2 for use, but the present invention is not limited to this embodiment. For example, the measurement device 40 according to one aspect of the present invention may be incorporated into a grinding device that grinds the wafer 1, which is the workpiece, from the back surface 1b side for use. The measurement device 40 according to one aspect of the present invention may be used independently of a processing device or the like.

[0091] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0092] 1 wafer 1a surface 1b back side 3. Planned division line 5 Devices 7 Tape 9 Annular Frame 11 Frame unit 2 Laser processing equipment 4 Foundation 6,18,26 Guide rail 8 X-axis moving plate 10,22 Ball screw 12,24,30 Pulse motor 14 Holding table 14a Holding surface 14b Clamp 16 Support stand 20 Support 20a base 20b Wall section 28 Unit Holder 32 Laser Processing Unit 34 Processing head 36 Imaging unit 38 Control Unit 40 Measuring Equipment 42 Measurement Unit 44, 44a, 44b, 44c, 44d, 44e, 44f, 44g Light source unit 46,46a Optical fiber 48 Concentrator 50 Branch 52 Diffraction Grating 54 Detector 56 Excitation Light Source 58 Excitation Light 60, 60a, 60b, 60c Phosphor 62 First focusing lens 64, 64a Transparent substrate 66 Probe Light 68 Second focusing lens 70a,70b Dichroic mirror 72,72a Reflective board 74,74a,74b Cooling mechanism 76 Rotational Axis

Claims

1. A measuring device including a holding table for holding an object to be measured and a measuring unit for measuring a height or thickness of the object to be measured held on the holding table, the measurement unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the object to be measured that is held on the holding table; The light source unit comprises: An excitation light source; a phosphor that emits fluorescence having a wavelength different from that of the excitation light when it receives the excitation light emitted by the excitation light source; a first condenser lens that condenses the excitation light emitted by the excitation light source onto the phosphor; The phosphor is disposed on a transparent substrate that transmits the excitation light and the fluorescent light; The light source unit further includes a second focusing lens that focuses the probe light, which includes the fluorescence emitted by the phosphor and a portion of the excitation light that has passed through the phosphor and has passed through the transparent substrate, onto the optical fiber.

2. the phosphor is disposed in a shape including an annular region on the circular transparent substrate having a rotation axis; 2. The measuring device according to claim 1, wherein the light source unit further includes a rotation drive source that rotates the transparent substrate about the rotation axis to suppress a temperature rise of the phosphor.

3. A measuring device including a holding table for holding an object to be measured and a measuring unit for measuring a height or thickness of the object to be measured held on the holding table, the measurement unit includes a light source unit, an optical fiber that guides light emitted by the light source unit, and a light collector that focuses the light guided by the optical fiber on the object to be measured that is held on the holding table; The light source unit comprises: An excitation light source; a phosphor that emits fluorescence having a wavelength different from that of the excitation light when it receives the excitation light emitted by the excitation light source; a first condenser lens that condenses the excitation light emitted by the excitation light source onto the phosphor; The measuring device is characterized in that the phosphor is embedded in the optical fiber.

4. 4. The measuring device according to claim 1, wherein the excitation light source is a laser diode.

Images