Bonding device and bonding installation having said device

Abstract

To provide a bonding apparatus that overcomes at least one drawback of the prior art and bonding equipment including the bonding apparatus.SOLUTION: Bonding equipment that bonds an adhering pad A4 to a base member includes a feeding and holding frame that feeds / holds a base member to a conveying route, a suspending carrier placed above the conveying route, and a bonding device 3 disposed on the suspending carrier and moving with the suspending carrier. The bonding device 3 includes a feeding reel 322 on which a tape assembly A44 is disposed, and from which an attaching head 3281, and an operating portion of the tape assembly A44 is pulled from the feeding reel 322 and supplied to a feeding route, and the attaching head 3281 is disposed in the feeding route and is configured to partition the operating portion into an input side and an output side. When the attaching head 3281 is moved toward the input side, the adhering pad A4 is removed from a carrier tape A41 and attached to the base member.SELECTED DRAWING: Figure 12

Description

[Technical field]

[0001] The present invention relates to a bonding apparatus, and more particularly to a bonding apparatus for bonding an adhesive pad to a base member. [Background technology]

[0002] In the traditional IC packaging process, the process involves applying adhesive to the substrate, gluing the die to the substrate, applying thermal glue to the die, and then attaching a heat sink to cover the substrate and die. Alternatively, instead of applying thermal glue, a thermal pad made of thermally conductive material can be used. In this case, the cover film on the lower surface of the thermal pad is peeled off and the lower surface is glued to the upper surface of the die, and then the cover film on the upper surface of the thermal pad is peeled off and the heat sink is glued to the upper surface. However, this process of manually gluing the thermal pad is not suitable for mass production and may lead to product quality degradation.

[0003] Meanwhile, for example, Patent Document 1 discloses a bonding method and bonding equipment for automatically bonding a thermal conductive pad to the upper surface of a die on a substrate. The conventional bonding method and bonding equipment employ a two-step process in which a rotating cylindrical bonding head is brought into contact with a carrier tape to which a thermal conductive pad is bonded to a base member, and then the bonding head returns to its original position and the carrier tape is peeled off from the thermal conductive pad, leaving room for further efficiency improvement. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Taiwan Patent No. I716906 Specification Summary of the Invention [Problem to be solved by the invention]

[0005] It is therefore an object of the present invention to provide a bonding device and a bonding installation having such a bonding device, which overcomes at least one of the disadvantages of the prior art. [Means for solving the problem]

[0006] In order to achieve the above object, the present invention provides a bonding device for bonding a plurality of adhesive pads, which are releasably attached to a flexible carrier tape and covered with a cover tape to form a tape assembly, to a base member, the bonding device comprising: a transport means; and a bonding means attached to the transport means for bonding the adhesive pads to an upper surface of the base member, the bonding means being configured to have a supply reel on which the tape assembly is disposed, and a bonding head, an operating unit which is a portion of the tape assembly pulled out from the supply reel is supplied to a supply path, the bonding head being disposed on the supply path and configured to divide the operating unit into an input side and an output side, and when the bonding head is actuated to move to the input side of the tape assembly, one surface side of the adhesive pad is separated from the carrier tape, and the other surface side of the adhesive pad is bonded to the upper surface of the base member.

[0007] The present invention also provides a bonding apparatus for bonding a plurality of adhesive pads, which are releasably bonded to a flexible carrier tape and covered with a cover tape to form a tape assembly, to a base member, the apparatus comprising: a supply and holding frame having a transport path that holds the base member and extends along a predetermined X direction; transport rail means having a suspending carrier attached to the transport path and configured to be movable in a predetermined Y direction; and a suspending carrier disposed on the suspending carrier so as to be movable together with the suspending carrier, which connects the adhesive pads to the upper surface of the base member along the X direction relative to the suspending carrier. and a bonding device for attaching the tape assembly to the carrier tape, the bonding device being configured to have a supply reel on which the tape assembly is arranged and a bonding head, an operating unit which is a portion of the tape assembly pulled out from the supply reel is supplied to a supply path, the bonding head being arranged on the supply path and configured to divide the operating unit into an input side and an output side, and when the bonding head is actuated to move to the input side of the tape assembly, one surface side of the adhesive pad is separated from the carrier tape and another surface side of the adhesive pad is adhered to the upper surface of the base member. Effect of the Invention

[0008] The bonding equipment of the present invention has a conveying path extending in the X-direction, and is equipped with a supply and holding frame for supplying / holding a base member, and a conveying rail means having a suspending carrier arranged above the conveying path and movable in the Y-direction, and the bonding device is arranged on the suspending carrier so as to move together with the suspending carrier, and moves in the X-direction relative to the suspending carrier to bond an adhesive pad to the upper surface of the base member, thereby having higher efficiency than conventional bonding methods and bonding equipment. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2 is a schematic diagram showing a chip package structure. [Diagram 2] FIG. 2 is a schematic diagram showing a base member and a thermal conduction pad. [Diagram 3] FIG. 2 is a schematic diagram of a tape assembly. [Figure 4] FIG. 1 is a perspective view showing a bonding facility according to an embodiment of the present invention. [Diagram 5] 3 is a schematic diagram showing a fixing device and an operating means for the fixing device in the embodiment. FIG. [Figure 6] FIG. 2 is an exploded perspective view showing the bonding device in the embodiment. [Figure 7] FIG. 2 is an exploded perspective view showing a conveying means in the bonding device. [Figure 8] FIG. 2 is a perspective view showing a bonding means in the bonding device. [Figure 9] 11 is a perspective view of the bonding means in the bonding device at another angle. FIG. [Figure 10] FIG. [Figure 11] 2 is a perspective view of the bonding device with a tape assembly attached thereto; FIG. [Figure 12] FIG. 2 is a front schematic view of the bonding device with a tape assembly attached thereto. [Figure 13] FIG. 2 is a schematic diagram showing the input and output paths of the tape assembly. [Figure 14] 13 is a schematic diagram showing a state in which a shift lever presses a tape assembly. FIG. [Figure 15] FIG. 11 is a partially enlarged perspective view showing a guide wheel in a bonding device according to another embodiment. [Figure 16] FIG. 2 is a partially enlarged perspective view showing an adhesive means in the embodiment. [Figure 17] FIG. 11 is a perspective view showing a bonding facility according to still another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Before going into a specific description, components that play the same role in the present invention are assigned the same reference numerals even if they are not exactly the same. Furthermore, terms such as "front", "rear", "left", "right", "upper", "lower", "X direction", "Y direction", and "Z direction" in the following description are used to easily explain the relative positional relationship between each component, and do not limit the configuration of the present invention.

[0011] As shown in FIG. 1, the bonding equipment of the present invention bonds a pad to a base member A, which is, for example, a die arranged on a wafer A1. The wafer A1 is arranged on a film A2 having a surrounding frame A3 surrounding the wafer A1. The wafer A1 is divided into a plurality of base members A arranged in a matrix. The plurality of base members A are arranged on a horizontal plane so as to be spaced apart from each other. In the pad bonding process, as shown in FIG. 2, a bonding pad A4, for example, a thermal conductive pad, is bonded to the upper surface of each base member A.

[0012] As shown in FIG. 3, in one embodiment, a plurality of adhesive pads A4 are releasably attached to a flexible carrier tape A41 (hereinafter also simply referred to as "carrier tape") so as to be arranged along a predetermined length direction, and are covered with a cover tape A42. That is, each adhesive pad A4 is sandwiched between the carrier tape A41 and the cover tape A42, and adjacent adhesive pads A4 in the length direction are arranged with a space between them. The two surfaces of each adhesive pad A4 are releasably attached to the carrier tape A41 and the cover tape A42, respectively. A row of pinholes A411 is formed near each of the peripheries on both sides of the carrier tape A41, and the distance between the two rows of pinholes A411 is wider than the width of the adhesive pad A4, and each adhesive pad A4 is attached to the carrier tape A41 at a location corresponding to the space between the two rows of pinholes A411. This carrier tape A41 is wound around a sleeve A43 having an axial hole A431 to form a tape assembly A44.

[0013] As shown in FIG. 4, one embodiment of the bonding equipment includes a machine base 100, a supply and holding frame 1 having a conveying path 10 extending along the X direction to supply and hold a base member A, a conveying rail means 2 arranged above the conveying path 10 and having a suspending carrier 22 that can move along the Y direction, a bonding device 3, and a lower detection unit 4.

[0014] The supply and holding frame 1 has a fixture 11. The fixture 11 has a plurality of suction parts 111, which are a plurality of annular grooves sharing the same circular center, and exert a suction effect by providing negative pressure. The supply and holding frame 1 has two side frames 12 spaced apart from each other in the Y direction, and two belts 13 arranged on each side frame 12, which together with the corresponding side frame 12 constitute a total of two rails 14. The conveying path 10 is formed between the two rails 14, and conveys the film A2 having the surrounding frame A3 and the wafer A1 shown in FIG. 1 along the X direction and supplies it to the fixture 11. The film A2 is held by the suction parts 111 of the fixture 11 and moves along the Z direction together with the fixture 11.

[0015] The transport rail means 2 has two gantry cranes 21 that are spaced apart from each other in the X direction and cross the transport path 10 .

[0016] Each gantry crane 21 has two support legs 211 extending along the Z direction and arranged on both sides of the transport path 10, and a suspending beam 212 supported by the two support legs 211 so as to extend along the Y direction. A Y-axis driver 213, for example, a linear motor, is arranged on the suspending beam 212. The suspending carrier 22 is arranged on the suspending beam 212 so as to extend along the X direction. Both ends of the suspending carrier 22 are driven by the Y-axis driver 213, respectively, to move along the Y direction relative to the suspending beam 212. An X-axis driver 221, for example, a linear motor, is arranged on the suspending carrier 22.

[0017] The bonding device 3 is movably disposed on the suspending carrier 22 above the supply and holding frame 1. The bonding device 3 is driven by an X-axis driver 221 to move relative to the suspending carrier 22 along the X direction to perform bonding of the bonding pads A4.

[0018] The lower detection unit 4 has an image capture section 41 having a lens for photographing upward and an image sensor (eg, a CCD), and a light source 42 disposed adjacent to the image capture section 41.

[0019] 4 and 5, the fixture 11 has a heating member 112 that indirectly heats the base member A (see FIG. 1) held by the suction part 111. The base 113 has a plurality of vertical spacers 1131. These plurality of vertical spacers 1131 are arranged to support the fixture 11, and are configured to move together with a plurality of rotating shafts 1141 of a moving member 114 arranged below the machine base 100. Each of the rotating shafts 1141 is movably inserted into a plurality of rotating sleeves 1151 of a positioning member 115 arranged on the machine base 100.

[0020] The positioning member 115 is fixed to the positioning table 116 by a plurality of support members 1161. A driver 117 constituted by, for example, a motor is disposed below the positioning table 116, and drives the movement of the base 113 and the fixing device 11 by rotating a screw shaft 1171 to move the moving member 114 along the Z direction.

[0021] As shown in FIG. 6, the bonding device 3 has a conveying means 31 and a bonding means 32 disposed on the conveying means 31 and moving together with the conveying means 31 to perform a bonding process on the adhesive pad A4.

[0022] As shown in Figures 6 and 7, the conveying means 31 includes a plate-shaped vertical conveying table 311, a vertical rail table 312 to which the vertical conveying table 311 is attached so as to be movably mounted along the Z direction, a reel assembly 313 attached to the vertical conveying table 311 so as to be movable along the X direction relative to the vertical conveying table 311, and a deviation calibration assembly 314 that is arranged on the vertical conveying table 311 and drives the deviation of the vertical conveying table 311 relative to the vertical rail table 312.

[0023] The vertical conveying platform 311 has two slide rails 3111 each extending along the X direction and spaced apart from each other in the Z direction, and a screw bolt 3113 disposed between the two slide rails 3111 and driven by a driver 3112. The vertical conveying platform 311 has a passage workspace 3114 and a support bracket 3115 disposed on one side of the passage workspace 3114. The support bracket 3115 has two rotating protrusions 31151 protruding from the vertical conveying platform 311 and positioned respectively above and below the passage workspace 3114, and a rotating shaft 31152 extending along the Z direction and connected to the two rotating protrusions 31151. The vertical conveying platform 311 further has an upper detection unit 3116. The upper detection unit 3116 has an image capture unit 31161 having a lens and an image sensor for taking pictures downward, and a light source 31162 disposed below the image capture unit 31161.

[0024] The vertical rail base 312 is disposed on the suspending carrier 22 of the conveying rail means 2, and has two slide rails 3121 extending along the Z direction, and a slide sheet 3123 driven by a drive motor 3122 to move along the slide rails 3121. The slide sheet 3123 has a protruding sheet 3124 which penetrates the passage working space 3114 of the vertical conveying base 31 along the Y direction, and to which the rotating shaft 31152 is rotatably attached, thereby enabling the slide sheet 3123 to move in the Z direction while holding the vertical conveying base 311.

[0025] The reel assembly 313 has a plate-shaped vertical reel base 3131 that is movably attached to the slide rail 3111 of the vertical conveyor base 311 and moves along the X direction together with the screw bolt 3113, a first reel 3132 that is rotatably attached to the vertical reel base 3131 and winds up the carrier tape A41 (see FIG. 3) from which the cover tape A42 and the adhesive pad A4 are peeled off, and a second reel 3133 that is rotatably attached to the vertical reel base 3131 and winds up the cover tape A42 peeled off from the carrier tape A41. Furthermore, the reel assembly 313 has a driver 3134 that is, for example, an air cylinder that operates along the Z direction, and an elastic member 3135 that is, for example, a compression spring.

[0026] The deviation calibration assembly 314 has a drive motor 3141 and a linkage means 3142 constituted by a four-bar link mechanism driven by the drive motor 3141. A fixed bar 31421 is attached to the output end of the drive motor 3141, and a rotating shaft 31152 attached to an axial hole 31423 formed in a movable bar 31422 parallel to the fixed bar 31421 extends along the Z direction. Two holders 3143 arranged on both sides of the drive motor 3141 in the X direction are fixed to both sides of a protruding sheet 3124 of the vertical rail base 312, so that the deviation calibration assembly 314 moves together with the protruding sheet 3124.

[0027] As shown in Fig. 8 and Fig. 9, the bonding means 32 has a plate-shaped vertical bonding base 321, a supply reel 322 rotatably attached to one side of the vertical bonding base 321, and a positioning base 323 attached to the opposite side of the one side of the vertical bonding base 321. The tape assembly A44 is disposed on the supply reel 322 (see Fig. 11), and is supplied to the supply path by operating an operation unit which is a part of the tape assembly A44 pulled out from the supply reel 322. The supply reel 322 rotatably passes through the vertical bonding base 321 along the Y direction, and has a reel shaft 3221 attached to the positioning base 323. The reel shaft 3221 is intermittently rotated by a driver 3231, for example a motor, which is disposed on the positioning base 323. The positioning base 323 is fixedly attached to the lower part of the vertical reel base 3131 of the reel assembly 313 (see Fig. 7), so that the bonding means 32 can move together with the reel assembly 313 along the X direction. In addition, when the first reel 3132 and the second reel 3133 are held immovably relative to the supply reel 322, the vertical adhesive base 321 can swing about the rotation axis of the reel shaft 3221 relative to the positioning base 323 and the vertical reel base 3131 (see FIG. 7). Furthermore, the adhesive means 32 has a shift lever 324 at the bottom of the vertical adhesive base 321 (see FIG. 9). The shift lever 324 extends from the vertical adhesive base 321 along the Y direction away from the supply reel 322. The shift lever 324 is driven by a driver 3241, for example an air cylinder, disposed on the vertical adhesive base 321, and moves relative to the vertical adhesive base 321 along the Z direction and away from the supply reel 322. Furthermore, an adjustment member 3211 disposed on one side of the vertical adhesive base 321 is adjacent to the supply reel 322 and has a vertical male screw portion. The bonding means 32 further includes a carrier bracket 325 disposed on the same side of the vertical bonding table 321 as the supply reel 322 .

[0028] As shown in FIG. 10, the carrier bracket 325 is configured to define a lower input path 3251 through which the operating part of the tape assembly A44 passes, and an upper output path 3252 through which the operating part of the tape assembly A44 passes. Specifically, a plurality of converting rollers 3253 are attached to the lower input path 3251, and one converting roller 3254 is attached to the upper output path 3252. A guide wheel 326 extending in the Y direction is disposed on the vertical adhesive base 321 so as to be located on the upper output path 3252. The guide wheel 326 has two encircling pin portions 3261 on two end faces, and a rotating portion 3262 is disposed between the two encircling pin portions 3261. The guide wheel 326 is driven to rotate by a drive motor 3263. A tape pressing bracket 327 is disposed so as to be adjacent to the guide wheel 326. The tape pressing bracket 327 is rectangular and includes a central shaft 3272 extending along the Y direction, two wheel sleeves 3271 attached to both ends of the central shaft 3272 and corresponding to the two surrounding pin portions 3261, and two pressing shafts 3273 disposed on both sides of the central shaft 3272 and extending in the Y direction. Two connectors 3274 are disposed on both ends of the central shaft 3272. One connector 3274 adjacent to the vertical adhesive base 321 is fixed to a slider 3276 slidable along two slide rails 3275 on the vertical adhesive base 321, so that the tape pressing bracket 327 can move radially away from / closer to the guide wheels 326. In addition, the engagement pin 3277 arranged on the inside of this connector 3274 can be elastically inserted into a lock hole 3278 formed between two slide rails 3275 on the vertical adhesive base 321, thereby maintaining the tape holding bracket 327 close to the guide wheel 326.

[0029] The carrier bracket 325 has a side mounting part 3256 separated from the vertical bonding base 321 across the supply space 3255, and a plurality of cross members 3257 arranged between the side mounting part 3256 and the vertical bonding base 321. The conversion roller 3253 is also arranged between the side mounting part 3256 and the vertical bonding base 321. The uppermost one of the plurality of cross members 3257 has a first connecting member 32571 and a second connecting member 32572, and the lower end of the cylinder piston 31341 of the driver 3134 and the lower end of the elastic member 3135 (see FIG. 7) are connected to the first connecting member 32571 and the second connecting member 32572, respectively, thereby connecting the bonding means 32 to the reel assembly 313, and moving the bonding means 32 in the Z direction in response to the movement of the reel assembly 313. The bonding means 32 further includes a mounting bracket 328 disposed at an end of the carrier bracket 325 remote from the supply reel 322 (see FIG. 8). A bonding head 3281 formed in a rod shape and extending in the Y direction is attached to the mounting bracket 328. The bonding head 3281 is disposed within the supply path and within the supply space 3255, and is located at the intersection of the lower input path 3251 and the upper output path 3252. The lower input path 3251 and the upper input path 3252 intersect with each other at an angle of less than 90 degrees.

[0030] As shown in FIGS. 11 to 13, the vertical adhesive base 321 of the adhesive means 32 can swing around the rotation axis of the reel shaft 3221.

[0031] As shown in FIG. 12, in a normal state, the adhesive head 3281 is disposed on the left side in the clockwise direction of a vertical line Z passing through the reel shaft 3221 along the Z direction. A line L passing through the adhesive head 3281 and the reel shaft 3221 intersects with the vertical line Z at an angle θ within a range of 45 degrees to 90 degrees. The cylinder piston 31341 of the driver 3134 is spaced from the reel shaft 3221 and operates to push the adhesive means 32 downward in the counterclockwise direction as viewed from the reel shaft 3221 to apply a first torque to the adhesive head 3281, thereby abutting the adjustment member 3211 against the lower edge of the vertical reel base 3131. At this stage, the adhesive head 3281 is located below the working position 3282 in the clockwise direction as viewed from the reel shaft 3221. At this time, the elastic member 3135, which is a compression spring, supports a part of the weight of the adhesive means 32. Therefore, the elastic member 3135 applies a second torque in a clockwise direction as viewed from the reel shaft 3221 to the bonding head 3281. The first torque opposes the second torque. The displacement of the bonding head 3281 by the first torque determines the height of the working position, and this working position is adjustable by the adjustment member 3211.

[0032] When the tape assembly A44 is wound onto the supply reel 322, the cover tape A42 is peeled off from the carrier tape A41 and wound onto the second reel 3133. The carrier tape A41, with the adhesive pad A4 facing downward, is supplied to pass through each conversion roller 3253 and the adhesive head 3281 along the lower input path 3251, and then passes through the encircling pin portion 3261 of the guide wheel 326 along the upper output path 3252, and is wound onto the first reel 3132. As shown in FIG. 11, the pressing shaft 3273 operates to press down the carrier tape A41 passing through the guide wheel 326.

[0033] As shown in FIG. 4, FIG. 12, and FIG. 13, in the bonding process, the upper detection unit 3116 photographs an image of the base member A downward, and then the bonding device 3 approaches the lower detection unit 4, so that the lower detection unit 4 detects the adhesive pad A4 on the lower side of the carrier tape A41 upward. In the process of photographing the image of the adhesive pad A4, as shown in FIG. 14, the shift lever 324 disposed between the supply reel 322 and the bonding head 3281 presses the operation part of the carrier tape A41 downward along the lower input path 3251 to shift the operation part of the carrier tape A41 from an oblique state to a horizontal state (see dotted line) on the input side. Therefore, the lower detection unit 4 can accurately detect the posture of the adhesive pad A4. Then, the shift lever 324 moves upward to return to the original position, and the carrier tape A41 returns to the oblique state (it is also possible to maintain the carrier tape A41 in a horizontal state in some cases). When the upper detection unit 3116 and the lower detection unit 4 detect the presence of a deviation between the posture of the base member A and the adhesive pad A4, the deviation calibration assembly 314 moves the vertical conveying table 311 diagonally and horizontally relative to the vertical rail table 312 to displace the adhesive head 3281 and calibrate the posture of the adhesive pad A4 to correspond to the base member A.

[0034] 12 and 13, the vertical rail base 312 drives the vertical conveyor base 311 downward to move the reel assembly 313 and the bonding means 32 to a predetermined position above the base member A. At this stage, one surface side of the bonding pad A4 is aligned with and in contact with the bonding head 3281 at the working position. The upward reaction force generated as a result of the downward movement of the bonding head 3281 along the Z direction, which presses the carrier tape A41 and the bonding pad A4 against the base member A, causes the cylinder piston 31341 of the driver 3134 to rise slightly to relieve the downward pressing force, and the bonding head 3281 can be turned upward in the clockwise direction to move to the bonding position 3283. At this stage, the adjustment member 3211 is away from the vertical reel base 3131. Therefore, the operation portion of the carrier tape A41 passes through the adhesive head 3281, and is partitioned by the adhesive head 3281 into an input side on the lower input path 3251 and an output side on the upper output path 3252 side.

[0035] The supply movement of the carrier tape A41 stops at the lower input path 3251, and the vertical reel base 3131 of the reel assembly 313 moves along the slide rail 3111 (see FIG. 7) in the X direction to move the first reel 3132, the second reel 3133 and the bonding means 32 along the X direction. The bonding head 3281 moves in the X direction while rolling, passes the carrier tape A41, indirectly presses the bonding pad A4 below the carrier tape A41, and rolls from the side adjacent to the upper output path 3252 to the opposite side of the lower input path 3251. At this stage, the guide wheel 326 and the first reel 3132 take up the carrier tape A41, and the bonding pad A4 is transported by the carrier tape A41 to the underside of the bonding head 3281. Therefore, when the carrier tape A41 is moved from the lower input path 3251 to the upper output path 3252, one surface side of the adhesive pad A4 is separated from the carrier tape A41, while the other surface side of the adhesive pad A4 is adhered to the upper surface of the base member A.

[0036] As shown in Fig. 15 and Fig. 16, in a modified embodiment of the present invention, the bonding equipment includes a tape assembly having a carrier tape G and a bonding pad. For example, the carrier tape is formed without pinholes and relatively narrow. A driver 51 formed of an air cylinder is disposed on the vertical bonding table 321 adjacent to the guide wheel 326. The tape pressing member 52 has a pressing roller 521 that is driven by the driver 51 and abuts against and presses the carrier tape G passing through the rotating part 3262. The stabilizing member 53 disposed on the mounting bracket 328 so as to be located in the upper output path 3252 has a passage 531 through which the carrier tape G supplied from the lower input path 3251 can pass. The carrier tape G is supplied to the upper output path 3252 by passing under the bonding head 3281 and through the passage 531.

[0037] As shown in FIG. 17, in another embodiment, the bonding equipment is for bonding a bonding pad to a die H2 of a substrate H1. As shown in FIG. 4, the bonding equipment includes a conveying rail means 2 and a bonding device 3 similar to the above embodiment. The bonding equipment includes two supply and holding frames 6 arranged on a machine base 100 so as to be spaced apart from each other in the X direction. Each supply and holding frame 6 includes a fixture 61. The fixture 61 includes a plurality of rectangular suction sections 611, each of which is configured to provide negative pressure. Each supply and holding frame 6 includes two side frames 62 each of which is spaced apart from each other in the X direction, and two belts 63 respectively arranged on the two side frames 62. Each side frame 62 and the belts 63 arranged on the side frames 62 together define two rails 64. A conveying path 60 extending in the Y direction is formed between the two rails 64. The conveying path 60 can convey a base member H having a die H2 and bond it to the substrate H1 at the fixture 61. The base member H is held by the suction portion 611 of the fixture 61 and can move in the Z direction together with the fixture 61. The movable rail bracket 7 arranged at the tip of the two supply and holding frames 6 can move on the X-direction rail base 8 along the X direction. The movable rail bracket 7 has two side frames 71 spaced apart from each other in the X direction and two belts 72 arranged on the two side frames 71, respectively. The two belts 72 define a total of two rails 73 together with the corresponding side frames 71. The conveying path 70 formed between the two rails 73 extends in the Y direction. The movable rail bracket 7 moves along the conveying path 70 together with the conveying path 60 of any one of the supply and holding frames 6. The lower detection unit 4 has a movable arrangement table 43 arranged between the conveying paths 60 of the supply and holding frames 6 and selectively moves above the light source 42 to align the upper detection unit 3116 with the lower detection unit 4.

[0038] As shown in the figure, the adhesive head 3281 is disposed in the supply path and divides the operation section of the carrier tape A41 into an input side and an output side. The adhesive head 3281 moves obliquely with respect to the rotation axis of the reel shaft 3221 of the supply reel 322 to reach the working position 3282. The adhesive pad A4 is separated from the carrier tape A41 and adhered to the base member A. Therefore, when the carrier tape A41 is supplied, the adhesive pad A4 is separated from the carrier tape A41 and adhered to the base member A by the adhesive head 3281, so that there is no need to rotate the adhesive head 3281 back and forth for adhesion efficiency.

[0039] Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modifications are possible without departing from the gist of the present invention. [Explanation of symbols]

[0040] 1. Supply and Retention Frame 10 Transport Route 100 Machine Base 11 Fixtures 111 Suction part 112 Heating member 113 Pedestal 1131 Vertical spacer 114 Moving parts 1141 Rotating shaft 115 Positioning member 1151 Rotating Sleeve 116 Positioning table 1161 Support material 117 Driver 12 Side frame 13 Belt 14 Rail 2. Conveyor rail means 21 Gantry Crane 211 Support legs 212 Suspending Beam 213 Y-axis driver 22 Suspending Carrier 221 X-axis driver 3 Gluing device 31 Means of transport 311 Vertical conveyor 3111 Slide rail 3112 Driver 3113 Screw bolt 3114 Passage work space 3115 Support bracket 31151 Rotating protrusion 31152 Rotating shaft 3116 Upper detection unit 31161 Image capture unit 31162 Light source 312 Vertical rail stand 3121 Slide rail 3122 Drive motor 3123 Slide Sheet 3124 Projection sheet 313 Reel Assembly 3131 Vertical reel stand 3132 First Reel 3133 Second Reel 3134 Driver 31341 Cylinder piston 3135 Elastic members 314 Displacement Calibration Assembly 3141 Drive motor 3142 Linkage means 31421 Fixed bar 31423 Shaft hole 3143 Holder 32 Adhesion means 321 Vertical adhesive stand 3211 Adjustment parts 322 Supply Reel 3221 Reel shaft 323 Positioning table 3231 Driver 324 Shift lever 3241 Driver 325 Carrier Bracket 3251 Lower input path 3252 Upper output path 3253 Conversion roller 3254 Conversion roller 3255 Supply Space 3256 Side mounting part 3257 Cross member 32571 First connecting member 32572 Second connecting member 326 Guide Wheel 3261 Encircling pin section 3262 Rotating part 3263 Drive motor 327 Tape Holder Bracket 3271 Wheel Sleeve 3272 Central Shaft 3273 Pressing shaft 3274 Connector 3275 Slide Rail 3276 Slider 3277 Engagement pin 3278 Lock hole 328 Mounting bracket 3281 Adhesive Head 3282 Working position 4. Bottom detection unit 41 Image capture section 42 Light source 43 Movable array stand 51 Driver 52 Tape pressing member 521 Pressure Roller 53 Stabilizing member 531 Aisle 6 Supply and Retention Frame 60 Transport Route 61 Fixtures 611 Suction part 62 Side Frame 63 Belt 64 Rail 7 Movable Rail Bracket 71 Side frame 72 Belt 73 Rail 8 X-direction rail stand A Base material A1 Wafer A2 Film A3 Enclosure A4 adhesive pad A41 Flexible carrier tape A411 Pinhole A42 Cover Tape A43 Sleeve A431 Shaft hole A44 Tape Assembly G Carrier Tape H1 Board H2 Die

Claims

1. 1. A bonding apparatus for bonding a plurality of adhesive pads, the adhesive pads being releasably attached to a flexible carrier tape and covered by a cover tape to form a tape assembly, to a base member, the apparatus comprising: A conveying means; and an adhesive means attached to the carrier means for adhering the adhesive pad to an upper surface of the base member; the bonding means is configured to include a supply reel on which the tape assembly is disposed and a bonding head; a manipulation portion that is a portion of the tape assembly pulled out from the supply reel is supplied to a supply path; The bonding head is disposed in the supply path and configured to divide the operation unit into an input side and an output side, when the adhesive head is actuated to move toward the input side of the tape assembly, one surface side of the adhesive pad is released from the carrier tape and another surface side of the adhesive pad is adhered to the upper surface of the base member; As a result of the downward movement of the adhesive head, one surface side of the adhesive pad abuts against the adhesive head, thereby pressing the carrier tape and the adhesive pad against the base member, The bonding head moves from a working position to a bonding position by rotating about a reel shaft of the supply reel as a rotation axis.

2. The bonding means has a vertical bonding base, the reel shaft is disposed on one side of the vertical bonding base, passes through the vertical bonding base rotatably along a predetermined Y direction, and is attached to a positioning base attached to the opposite side of the vertical bonding base, and is intermittently rotated by a driver attached to one side of the positioning base; 2. The bonding apparatus according to claim 1, wherein the transport means comprises a reel assembly having a vertical reel base, and the positioning base is fixed to the vertical reel base, so that the bonding means moves together with the vertical reel base.

3. The conveying means includes a vertical conveying platform and a reel assembly attached to the vertical conveying platform so as to be movable relative to the vertical conveying platform; the reel assembly is configured to include a vertical reel base, a first reel rotatably attached to the vertical reel base for winding up the carrier tape from which the cover tape and the adhesive pad have been peeled off, and a second reel rotatably attached to the vertical reel base for winding up the cover tape that has been peeled off from the carrier tape, 2. The bonding device according to claim 1, wherein the bonding means has a vertical bonding base to which the supply reel is rotatably attached, the vertical bonding base is configured to be movable relative to the vertical reel base, and holds the first reel and the second reel so as not to be movable relative to the supply reel.

4. 4. The bonding apparatus of claim 3, wherein the reel assembly includes a driver or resilient member coupled to the bonding means for moving the bonding means in response to movement of the reel assembly in the predetermined Z direction.

5. 2. The bonding device according to claim 1, wherein the bonding means has a shift lever disposed between the supply reel and the bonding head, and when the shift lever is operated by a driver, the shift lever moves along a predetermined Z direction to press the operating portion of the tape assembly and move the operating portion on the input side to a horizontal state.

6. 2. The bonding device according to claim 1, wherein the bonding head moves around the rotation axis under a first torque and a second torque that are opposite to each other, and the rotational movement of the bonding head driven by the first torque is adjustable.

7. 3. The bonding device according to claim 2, wherein the bonding head is formed in a cylindrical shape and is disposed at an intersection of a lower input path through which the operating unit of the tape assembly passes and an upper output path through which the operating unit of the tape assembly passes, the lower input path and the upper output path intersect with each other at an angle less than 90 degrees, and a line passing through the bonding head and the reel axis forms an angle within a range of 45 degrees to 90 degrees with a vertical line that passes through the reel axis and extends in a predetermined Z-axis direction.

8. 1. A bonding station for bonding a plurality of adhesive pads to a base member, the adhesive pads being releasably attached to a flexible carrier tape and covered by a cover tape to form a tape assembly, the station comprising: a supply and holding frame having a conveying path that holds the base member and extends along a predetermined X direction; A transport rail means having a suspending carrier attached to the transport path and configured to be movable in a predetermined Y direction; a bonding device disposed on the suspending carrier for movement therewith, the bonding device bonding the bonding pad to an upper surface of the base member along the X direction relative to the suspending carrier; The bonding device is configured to include a supply reel on which the tape assembly is disposed and a bonding head; a manipulation portion that is a portion of the tape assembly pulled out from the supply reel is supplied to a supply path; The bonding head is disposed in the supply path and configured to divide the operation unit into an input side and an output side, when the adhesive head is actuated to move toward the input side of the tape assembly, one surface side of the adhesive pad is released from the carrier tape and another surface side of the adhesive pad is adhered to the upper surface of the base member; As a result of the downward movement of the adhesive head, one surface side of the adhesive pad abuts against the adhesive head, thereby pressing the carrier tape and the adhesive pad against the base member, The bonding head moves from a working position to a bonding position by rotating about a reel shaft of the supply reel as a rotation axis.

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