Laser shutter unit and laser system

Abstract

To provide a laser shutter unit capable of reducing the size of a shutter unit while increasing the certainty of switching between laser light emission and cutoff, and a laser system.SOLUTION: The laser shutter unit includes: an acoustic optical element that switches the outgoing direction of an incident laser beam to a first direction or a second direction; and a multiple-reflection optical element that reflects first light emitted from the acoustic optical element in the first direction and second light emitted from the acoustic optical element in the second direction, and repeatedly reflects at least one of the first light and the second light.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to a laser shutter unit and a laser system. [Background technology]

[0002] Some laser shutter units that switch between emitting and blocking a laser have an acousto-optic element (AOM). The acousto-optic element (AOM) has a transparent acousto-optic crystal (AO crystal). When ultrasonic waves are applied to the AO crystal, the optical axis of the laser that passes through the AO crystal changes. In other words, the AOM can switch the optical axis of the laser that passes through depending on whether ultrasonic waves are applied or not.

[0003] A laser shutter unit with an AOM utilizes this principle to switch the emission direction of the incident laser, directing the laser that passes through the AOM either to the outside of the laser shutter unit or to a light receiving unit such as a damper. In this way, the laser shutter unit switches between emitting and blocking the laser.

[0004] For example, Patent Document 1 discloses a laser switching device that guides laser light passing through an AO crystal to either an output unit or a light receiving element that detects the laser light depending on whether or not ultrasonic waves are applied to the AO crystal. The laser light guided to the output unit is output to the outside of the laser switching device, and the light guided to the light receiving element is not output to the outside of the laser switching device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2019-86266 A Summary of the Invention [Problem to be solved by the invention]

[0006] In the laser switching device of Patent Document 1, in order to reliably switch between outputting the laser light to the outside and blocking the laser light, it is necessary to spatially separate the optical axis of the laser light toward the output unit from the optical axis of the laser light toward the light receiving element sufficiently from each other. To achieve this, it is necessary to ensure a sufficient optical path length for the laser light after passing through the AOM.

[0007] If the distance between the AOM and the output section and the distance between the AOM and the light receiving element are increased, the optical path length of the laser light after passing through the AOM is sufficiently ensured, but the laser switching device becomes larger.

[0008] An object of the present disclosure is to provide a laser shutter unit and a laser system that can reduce the size of the shutter unit while increasing the reliability of switching between emitting and blocking laser light. [Means for solving the problem]

[0009] The laser shutter unit of the present disclosure includes an acousto-optical element that switches the emission direction of incident laser light to a first direction or a second direction, and a multiple-reflection optical element that reflects a first light that is emitted from the acousto-optical element in the first direction and a second light that is emitted from the acousto-optical element in the second direction, and repeatedly reflects at least one of the first light and the second light.

[0010] The laser system of the present disclosure comprises a laser oscillation unit that oscillates a laser, the laser shutter unit, an output section that outputs the first light to the outside of the laser shutter unit, and a light receiving section that receives the second light, and the laser shutter unit receives the laser light output from the laser oscillation unit. Effect of the Invention

[0011] According to the present disclosure, it is possible to provide a laser shutter unit and a laser system that can reduce the size of the shutter unit while increasing the reliability of switching between emitting and blocking laser light. [Brief description of the drawings]

[0012] [Figure 1] FIG. 1 is a schematic diagram showing a laser system according to a first embodiment of the present disclosure. [Diagram 2] A diagram explaining the operating principle of an acousto-optical element. [Diagram 3] 3A to 3C are diagrams illustrating examples of output waveforms of a laser beam, a modulated signal, a zeroth-order diffracted beam, and a first-order diffracted beam. [Figure 4] FIG. 1 is a schematic diagram showing a laser system according to a second embodiment of the present disclosure. [Diagram 5] FIG. 13 is a schematic diagram showing a laser system according to a third embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] Hereinafter, embodiments and modifications of the present disclosure will be described with reference to the drawings.

[0014] (First embodiment) 1 is a schematic diagram showing a laser system 100 according to the first embodiment. The laser system 100 includes a laser oscillation unit 101, a laser shutter unit 102, a light receiving section 106, and an output section 107.

[0015] The laser oscillation unit 101 oscillates and outputs a laser beam RA to the laser shutter unit 102. The laser beam RA output by the laser oscillation unit 101 of this embodiment has a single central wavelength and is a parallel beam.

[0016] The laser light RA emitted from the laser oscillation unit 101 does not necessarily have to be a single wavelength, and may be a laser light RA having a spread from a central wavelength. The laser light RA emitted from the laser oscillation unit 101 does not have to be a completely parallel light. In other words, the laser light RA may be a laser light that can be switched into a zeroth-order diffracted light A0 and a first-order diffracted light A1 by an acousto-optic element 104 (described later) of the laser shutter unit 102.

[0017] The laser oscillation unit 101 includes a laser oscillator that oscillates a laser beam RA. In addition to the laser oscillator, the laser oscillation unit 101 may include an optical element such as a lens that guides the laser beam RA oscillated by the laser oscillator to the outside, and an optical fiber such as a transmission fiber.

[0018] The laser shutter unit 102 is a switching device that receives the laser light RA output from the laser oscillation unit 101 and switches between emitting and blocking the laser light RA. The laser light output from the laser shutter unit 102 is used for laser processing.

[0019] The laser shutter unit 102 includes a modulation signal generating section 103 , an acousto-optic element (AOM) 104 , and a multi-reflection optical element 105 .

[0020] The modulation signal generating unit 103 is a device that generates a modulation signal S that modulates the output signal of the laser light RA, and is, for example, a pulse generator.

[0021] The AOM 104 is an optical element that switches the emission direction of the incident laser beam RA.

[0022] 2 is a diagram for explaining the operating principle of the AOM 104. The AOM 104 includes an ultrasonic wave generating unit 141 and an AO crystal 142.

[0023] The ultrasonic wave generating unit 141 is a device that applies ultrasonic waves to the AO crystal 142 in response to the modulation signal S from the modulation signal generating unit 103. The AO crystal 142 is a transparent acousto-optic crystal, and is a crystal whose refractive index changes when ultrasonic waves are applied to it.

[0024] It is preferable that the AOM 104 is positioned while its orientation is adjusted so that the deflection angle θ satisfies the following equation (1) using the laser central wavelength λ of the laser light RA, the central frequency fC of the ultrasound generated by the ultrasound generating unit 141, and the propagation speed V of the ultrasound within the AO crystal 142.

[0025]

number

[0026] In the following description, it is assumed that the AOM 104 is disposed so as to satisfy the formula (1).

[0027] While the ultrasonic generator 141 is not applying ultrasonic waves to the AO crystal 142, the laser light RA passes through the AO crystal 142 without its optical axis being deflected. That is, the laser light RA, which has a laser central wavelength λ and is incident on the AO crystal 142 at a deflection angle θ, is emitted as zero-order diffracted light A0 in a direction in which the optical axis does not change (hereinafter referred to as the first direction).

[0028] On the other hand, while the ultrasonic generator 141 is applying ultrasonic waves to the AO crystal 142, the laser light RA is deflected by a predetermined angle when passing through the AO crystal 142. That is, the laser light RA, which has a laser central wavelength λ and is incident on the AO crystal 142 at a deflection angle θ, is emitted as first-order diffracted light A1 in a direction shifted from its optical axis by an angle 2θ (corresponding to twice the deflection angle θ) (hereinafter referred to as the second direction).

[0029] In this manner, the AOM 104 switches the incident laser beam RA to either the zeroth-order diffracted beam A0 or the first-order diffracted beam A1.

[0030] FIG. 3 is a diagram showing an example of output waveforms of the laser beam RA, the modulation signal S, the zeroth-order diffracted beam A0, and the first-order diffracted beam A1.

[0031] The top, upper middle, lower middle, and bottom rows of Figure 3 are waveforms showing the output IR of the laser light RA, the output IS of the modulation signal S, the output IA0 of the zeroth-order diffracted light A0, and the output IA1 of the first-order diffracted light A1, respectively, and the vertical and horizontal axes of each waveform represent output and time, respectively.

[0032] Assume that the output waveform of the laser light RA emitted from the laser oscillation unit 101 is the waveform shown in the top row of Figure 3, and the output waveform of the modulation signal S output from the modulation signal generating unit 103 to the AOM 104 is the waveform shown in the middle upper row of Figure 3.

[0033] In this case, as shown in FIG. 3, while the laser light RA is being output and the modulation signal S is not being output, the zeroth-order diffracted light A0 is output from the AOM 104, and while the laser light RA is being output and the modulation signal S is being output, the first-order diffracted light A1 is output from the AOM 104.

[0034] The modulation signal generating unit 103 may be provided separately from the laser shutter unit 102 .

[0035] Returning to the explanation of Figure 1.

[0036] The multiple reflection optical element 105 is an optical element that repeatedly reflects the zeroth-order diffracted light A0 and the first-order diffracted light A1 emitted from the AOM 104, and emits the zeroth-order diffracted light A0 and the first-order diffracted light A1 toward the output unit 107 and the light receiving unit 106, respectively. As shown in Fig. 1, in this embodiment, the multiple reflection optical element 105 emits the zeroth-order diffracted light A0 and the first-order diffracted light A1 in the same direction relative to the position of the multiple reflection optical element 105. The multiple reflection optical element 105 will be described in detail later.

[0037] The light receiving unit 106 receives the first-order diffracted light A1, i.e., light not used for laser processing. The light receiving unit 106 is, for example, a damper or a light receiving sensor of an instrument that measures the output of the laser light RA. In this embodiment, the light receiving unit 106 is located on the same side as the output unit 107 with respect to the position of the multiple reflection optical element 105. For example, as shown in FIG. 1, if the output unit 107 is located on the right side of the multiple reflection optical element 105, the output unit 107 is also located on the right side of the multiple reflection optical element 105.

[0038] The output unit 107 outputs the zeroth-order diffracted light A0, i.e., the light used for laser processing, to the outside of the laser shutter unit 102. The output unit 107 is, for example, a focusing optical system, and focuses the zeroth-order diffracted light A0 on a processing optical system outside the laser shutter unit 102 or on a transmission fiber that transmits the light to the processing optical system.

[0039] 2, the angle between the optical axis of the zeroth-order diffracted light A0 and the optical axis of the first-order diffracted light A1 emitted from the AOM 104 is 2θ. When formula (1) is satisfied, 2θ is usually on the order of several mrad or more and several tens of mrad or less.

[0040] In other words, 2θ is a very small value, and the distance between the optical axis of the zeroth-order diffracted light A0 and the optical axis of the first-order diffracted light A1 is very short. Accordingly, if the light receiving section 106 and the output section 107 are arranged close to each other, the following problems (a) and (b) occur. (a) The light that should be received by the light receiving unit 106 is not properly received by the light receiving unit 106. (b) Light that should be guided to the output section 107 is not guided to the output section 107 appropriately.

[0041] In order to avoid the above-mentioned problems (a) and (b), it is necessary to arrange the light receiving unit 106 and the output unit 107 at a relatively long distance from each other. To achieve this, the laser shutter unit 102 needs to have a structure in which the optical paths of the zeroth-order diffracted light A0 and the first-order diffracted light A1 are separated by a relatively long distance from each other. In other words, it is necessary to ensure a sufficient optical path length for the zeroth-order diffracted light A0 and the first-order diffracted light A1 from when they are emitted from the AOM 104 until they reach the output unit 107 or the light receiving unit 106.

[0042] The laser shutter unit 102 of this embodiment has a multiple reflection optical element 105, which can ensure sufficient optical path lengths for the zeroth-order diffracted light A0 and the first-order diffracted light A1 from the time they are emitted from the AOM 104 until they reach the output unit 107 or the light receiving unit 106. The multiple reflection optical element 105 will be described in detail below.

[0043] The multi-reflection optical element 105 includes a pair of mirrors 5A and 5B. The pair of mirrors 5A and 5B are arranged such that the reflective surfaces OS of their outer surfaces face each other and are parallel to each other.

[0044] The zeroth-order diffracted light A0 emitted from the AOM 104 is reflected by the mirror 5A and then by the mirror 5B. The zeroth-order diffracted light A0 is repeatedly reflected by the mirror 5A and then by the mirror 5B, and moves toward the output section 107 along the mirrors 5A and 5B. Then, after being reflected by the mirror 5B, the light is guided to the output section 107.

[0045] The first-order diffracted light A1 emitted from the AOM 104 is reflected by the mirror 5A and then by the mirror 5B, similar to the zeroth-order diffracted light A0. The first-order diffracted light A1 is repeatedly reflected by the mirror 5A and then by the mirror 5B, and approaches the light receiving unit 106 along the mirrors 5A and 5B. After being reflected by the mirror 5B, it is guided to the light receiving unit 106.

[0046] 1 shows that the zeroth-order diffracted light A0 and the first-order diffracted light A1 are reflected a total of ten times (five times each at mirrors 5A and 5B) by the multiple reflection optical element 105. The distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1 in the direction along the reflecting surface OS becomes longer as the number of reflections by the multiple reflection optical element 105 increases. Note that in this embodiment, the multiple reflection optical element 105 reflects the zeroth-order diffracted light A0 and the first-order diffracted light A1 at least two times.

[0047] 1 is the distance between the center position of the zeroth-order diffracted light A0 on the reflecting surface OS when the zeroth-order diffracted light A0 is finally reflected and the center position of the first-order diffracted light A1 on the reflecting surface OS when the first-order diffracted light A1 is finally reflected. The distance h is a value that indicates the distance between the final optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1.

[0048] The distance h is determined to be a desired value depending on the beam diameter of the laser light RA (i.e., the beam diameters of the zeroth-order diffracted light A0 and the first-order diffracted light A1) and the size of the light receiving unit 106. For example, when the beam diameter of the laser light RA is 5 mm, the distance h may be determined to be 10 mm. The value of 10 mm is based on the fact that when the zeroth-order diffracted light A0 and the first-order diffracted light A1 are irradiated onto the same surface, the distance between the irradiation area of ​​the zeroth-order diffracted light A0 and the irradiation area of ​​the first-order diffracted light A1 must be 5 mm, and for that, the distance between the beam center of the zeroth-order diffracted light A0 and the beam center of the first-order diffracted light A1 must be 10 mm. The reason why the size of the light receiving unit 106 should be taken into consideration when determining the distance h is to guide the first-order diffracted light A1 to the light receiving unit 106 and prevent the zeroth-order diffracted light A0 from being irradiated onto the light receiving unit 106.

[0049] Moreover, the arrangement position, orientation, size, etc. of each component of the laser shutter unit 102 are appropriately adjusted so that the distance h becomes a desired value.

[0050] d in Figure 1 represents the amount of movement of the diffracted lights A0, A1 along the reflecting surface OS from when they are reflected by one of the mirrors 5A, 5B, to when they are reflected once by the other mirror, and then when they reach one of the mirrors again.

[0051] It is preferable that the movement amount d satisfies the following formula (2).

[0052]

number

[0053] That is, the angles of incidence θ0 and θ1 of the zeroth-order diffracted light A0 and the first-order diffracted light A1 with respect to the mirror 5A are adjusted so that the amount of movement d satisfies the formula (2). At this time, the orientation of the mirror 5A is mainly adjusted, and the orientation of the mirror 5B is also adjusted accordingly. The larger the angles of incidence θ0 and θ1, the larger the amount of movement d.

[0054] When the amount of movement d satisfies the formula (2), it is preferable that the angles of incidence θ0, θ1 of the zeroth-order diffracted light A0 and the first-order diffracted light A1 with respect to the mirror 5A satisfy the formulas (3) and (4).

[0055]

number

[0056]

number

[0057] In equations (3) and (4), L1 is the distance from the output end of AOM104 for the zeroth-order diffracted light A0 to the center of the arrival position of the zeroth-order diffracted light A0 on mirror 5A, and L2 is the distance between the reflecting surface OS of mirror 5A and the reflecting surface OS of mirror 5B.

[0058] When the incident angles θ0 and θ1 satisfy the formulas (3) and (4), respectively, the distance h is preferably approximated by the formula (5). N in the formula (5) is the number of times that the zeroth-order diffracted light A0 and the first-order diffracted light A1 are reflected by the multiple reflection optical element 105, and is a value of 2 or more.

[0059]

number

[0060] The first term of equation (5) represents the extended length between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1 in the direction along the reflecting surface OS from the first reflection by the multiple reflection optical element 105 to the last reflection.

[0061] The second term of equation (5) represents an approximation of the distance between the central positions of the zeroth-order diffracted light A0 and the first-order diffracted light A1 on the reflecting surface OS when they are first reflected by the multi-reflection optical element 105. Specifically, the second term of equation (5) represents the distance w0 in FIG.

[0062] Furthermore, when the distance h can be approximated by equation (5) and the number of times N is an even number, it is preferable that the length LA of mirror 5A and the length LB of mirror 5B are approximated by equations (6) and (7.1), respectively.

[0063]

number

[0064]

number

[0065] In addition, L2tanθ1 in the first term of equations (6) and (7.1) represents the amount of movement of the first-order diffracted light A1 in a direction along the reflecting surface OS from the time it is reflected by one of mirrors 5A and 5B to the time it is reflected by the other mirror.

[0066] The reason why the third term (i.e., h) is included in equations (6) and (7.1) is to ensure an excess length taking into account the beam diameters of the zeroth-order diffracted light A0 and the first-order diffracted light A1.

[0067] The second term of equation (7.1) (see w1 in Figure 1) represents an approximation of the distance between the center position of the zeroth-order diffracted light A0 and the center position of the first-order diffracted light A1 on the reflecting surface OS when reflected a second time by the multi-reflection optical element 105.

[0068] Equation (7.2) is equation (7.1) transformed using equation (3).

[0069] Furthermore, when formula (5) is satisfied and N is an odd number, it is preferable that the length LA of mirror 5A and the length LB of mirror 5B are approximated by formulas (8) and (9.1), respectively.

[0070]

number

[0071]

number

[0072] The reason why the third term (i.e., h) is included in equations (8) and (9.1) is to ensure an excess length taking into account the beam diameters of the zeroth-order diffracted light A0 and the first-order diffracted light A1.

[0073] Equation (9.2) is equation (9.1) transformed using equation (3).

[0074] As described above, the multiple reflection optical element 105 repeatedly reflects the zeroth-order diffracted light A0 and the first-order diffracted light A1. This makes it possible to ensure sufficient optical path lengths for the zeroth-order diffracted light A0 and the first-order diffracted light A1 from the AOM 104 to the output unit 107 and the light receiving unit 106, respectively. Therefore, the distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1 when last reflected by the multiple reflection optical element 105 is sufficiently large, so that the light receiving unit 106 can be disposed at a relatively long distance from the output unit 107. Therefore, the zeroth-order diffracted light A0 can be reliably guided to the output unit 107, and the first-order diffracted light A1 can be reliably guided to the light receiving unit 106. That is, it is possible to increase the reliability of switching between emission and blocking of the laser light RA by the laser shutter unit 102.

[0075] Moreover, the laser shutter unit 102 of this embodiment ensures the optical path length from the AOM 104 to the output unit 107 or the light receiving unit 106 by reflecting the diffracted light A0, A0 multiple times. Therefore, it is not necessary to increase the distance between the AOM 104 and the light receiving unit 106 and the distance between the AOM 104 and the output unit 107, and the distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1 can be sufficiently large in a narrow space. Therefore, the laser shutter unit 102 can be made compact.

[0076] Therefore, it is possible to reduce the size of the shutter unit while increasing the reliability of switching between emitting and blocking the laser light.

[0077] The multiple reflection optical element 105 of this embodiment has a pair of mirrors 5A and 5B arranged with their reflecting surfaces OS facing each other, and can therefore reflect the diffracted light A0 and A1 back and forth between the mirrors 5A and 5B. For this reason, the multiple reflection optical element 105 of this embodiment can easily reflect the diffracted light A0 and A1 multiple times. This makes it easier to further increase the distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1.

[0078] The pair of mirrors 5A, 5B are arranged so that the reflecting surfaces OS are parallel to each other, which makes it easy to miniaturize the laser shutter unit 102. In addition, it is easy to control the traveling directions of the zeroth-order diffracted light A0 and the first-order diffracted light A1, and to adjust the positions of the light receiving section 106 and the output section 107.

[0079] Second embodiment The second embodiment will be described below, focusing mainly on the differences from the first embodiment.

[0080] FIG. 4 is a schematic diagram showing a laser system 100 according to the second embodiment.

[0081] The multiple reflection optical element 105 has a structure in which the reflecting surface OS that reflects the zeroth-order diffracted light A0 last is different from the reflecting surface OS that reflects the first-order diffracted light A1 last. To realize this structure, the relative length of the mirror 5B to the mirror 5A of the second embodiment is changed from the relative length of the mirror 5B to the mirror 5A of the first embodiment. For example, even if the length LA of the mirror 5A of the second embodiment is equal to the length LA of the mirror 5A of the first embodiment, as shown in Figures 1 and 4, the length LB of the mirror 5B of the second embodiment is shorter than the length LB of the mirror 5B of the first embodiment.

[0082] As a result, the number of times that the zeroth-order diffracted light A0 is reflected differs from the number of times that the first-order diffracted light A1 is reflected by the multiple reflection optical element 105. Fig. 4 shows that the zeroth-order diffracted light A0 is reflected a total of ten times by the multiple reflection optical element 105 (five times each by mirrors 5A and 5B), and the first-order diffracted light A1 is reflected a total of nine times by the multiple reflection optical element 105 (five times by mirror 5A and four times by mirror 5B).

[0083] As a result, the traveling direction of the 1st-order diffracted light A 1 emerging from the multi-reflection optical element 105 becomes opposite to the traveling direction of the 0th-order diffracted light A 0 emerging from the multi-reflection optical element 105 .

[0084] In this embodiment, the number of reflections N1 of the 1st-order diffracted light A1 by the multiple reflection optical element 105 satisfies formula (10) using the number of reflections N0 of the 0th-order diffracted light A0 by the multiple reflection optical element 105.

[0085]

number

[0086] In this embodiment, the number of reflections N0 of the zeroth-order diffracted light A0 by the multiple reflection optical element 105 is two or more, and the number of reflections N1 of the first-order diffracted light A1 is one or more.

[0087] In Figure 4, h is the distance between the center position of the zeroth-order diffracted light A0 on the reflecting surface OS when the zeroth-order diffracted light A0 is last reflected, and the center position of the first-order diffracted light A1 when it passes through the surface formed by extending the reflecting surface OS after being last reflected.

[0088] When the above expressions (2), (3), and (4) are satisfied, this distance h can be approximately expressed as expression (11) using the number of reflections N0 of the zeroth-order diffracted light A0 by the multi-reflection optical element 105.

[0089]

number

[0090] Furthermore, when equation (11) is satisfied and N0 is an even number, it is preferable that the length LA of mirror 5A and the length LB of mirror 5B are approximated by equations (12) and (13.1), respectively.

[0091]

number

[0092]

number

[0093] L2tanθ0 in the first term of equation (13.1) represents the amount of movement of the first-order diffracted light A1 in the direction along the reflecting surface OS after it is reflected by one of mirrors 5A and 5B until it is reflected by the other mirror.

[0094] The reason why the third term (i.e., h) is included in equation (12) and the second term (i.e., h) is included in equation (13.1) is to ensure an excess length taking into account the beam diameters of the zeroth-order diffracted light A0 and the first-order diffracted light A1.

[0095] When equation (13.1) is transformed using equation (3), we obtain equation (13.2).

[0096] Furthermore, when equation (11) is satisfied and N0 is an odd number, it is preferable that the length LA of mirror 5A and the length LB of mirror 5B are approximated by equations (14.1) and (15.1), respectively.

[0097]

number

[0098]

number

[0099] The reason why the second term (i.e., h) is included in equation (14.1) and the third term (i.e., h) is included in equation (15.1) is to ensure an excess length taking into account the beam diameters of the zeroth-order diffracted light A0 and the first-order diffracted light A1.

[0100] Equation (14.2) is the equation obtained by transforming equation (14.1) using equation (3). Equation (15.2) is the equation obtained by transforming equation (15.1) using equation (3).

[0101] Since the zeroth-order diffracted light A0 and the first-order diffracted light A1 emitted from the multiple reflection optical element 105 travel in opposite directions, the positional relationship between the light receiving section 106 and the output section 107 also differs from that in the first embodiment.

[0102] The light receiving section 106 and the output section 107 are located on both sides of the multi-reflection optical element 105. That is, the light receiving section 106 is located on the opposite side to the position of the output section 107 with respect to the multi-reflection optical element 105. For example, as shown in FIG. 4, if the output section 107 is located on the right side of the multi-reflection optical element 105, the light receiving section 106 is located on the left side of the multi-reflection optical element 105.

[0103] The multiple reflection optical element 105 of this embodiment has a structure in which the reflecting surface OS that lastly reflects the zeroth-order diffracted light A0 is different from the reflecting surface OS that lastly reflects the first-order diffracted light A1. Therefore, the number of times that the zeroth-order diffracted light A0 is reflected by the multiple reflection optical element 105 is different from the number of times that the first-order diffracted light A1 is reflected by the multiple reflection optical element 105. This allows the traveling direction of the first-order diffracted light A1 emitted from the multiple reflection optical element 105 to be significantly changed relative to the traveling direction of the zeroth-order diffracted light A0 emitted from the multiple reflection optical element 105.

[0104] Therefore, the laser shutter unit 102 can more reliably switch between the destination of the zeroth-order diffracted light A0 and the destination of the first-order diffracted light A1. Also, the degree of freedom in the arrangement positions of the light receiving section 106 and the output section 107 is further increased.

[0105] Third embodiment The third embodiment will be described below, focusing mainly on the differences from the second embodiment.

[0106] FIG. 5 is a schematic diagram showing a laser system 100 according to the third embodiment.

[0107] The multiple reflection optical element 105 of this embodiment has a prism 5C. The prism 5C has a pair of transmitting surfaces TS facing each other and a pair of reflecting surfaces BS facing each other. The transmitting surface TS is an interface between the outside and the inside of the prism 5C, and is a surface through which the zeroth-order diffracted light A0 and the first-order diffracted light A1 transmit. The reflecting surface BS is an interface between the outside and the inside of the prism 5C, faces the inside of the prism 5C, and is a surface that reflects the zeroth-order diffracted light A0 and the first-order diffracted light A1. The pair of reflecting surfaces BS are parallel to each other. The shape of the prism 5C of this embodiment is a rectangular parallelepiped shape.

[0108] The zeroth-order diffracted light A0 and the first-order diffracted light A1 emitted from the AOM 104 enter the prism 5C from one of the transmitting surfaces TS, and while being repeatedly reflected by the reflecting surfaces BS, BS inside the prism 5C, approach the other transmitting surface TS. As a result, the distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1 increases. Then, the zeroth-order diffracted light A0 and the first-order diffracted light A1 are emitted from the other transmitting surface TS toward the output unit 107 and the light receiving unit 106, which are located outside the prism 5C, respectively.

[0109] As in the second embodiment, the prism 5C has a structure in which the reflecting surface BS that reflects the zeroth-order diffracted light A0 last is different from the reflecting surface BS that reflects the first-order diffracted light A1 last. Therefore, as shown in FIG. 5, the number of times that the zeroth-order diffracted light A0 is reflected by the multiple reflection optical element 105 is different from the number of times that the first-order diffracted light A1 is reflected. In this embodiment, as in the second embodiment, the number of times that the zeroth-order diffracted light A0 is reflected is two or more, and the number of times that the first-order diffracted light A1 is reflected is one or more. As a result of the difference in the number of times that the zeroth-order diffracted light A0 is reflected and the number of times that the first-order diffracted light A1 is reflected, the traveling direction of the first-order diffracted light A1 is significantly different from the traveling direction of the zeroth-order diffracted light A0 emitted from the prism 5C.

[0110] Accordingly, the light receiving section 106 and the output section 107 are located on both sides of the multi-reflection optical element 105, similar to the second embodiment.

[0111] The multiple reflection optical element 105 of this embodiment reflects the zeroth-order diffracted light A0 two or more times and reflects the first-order diffracted light A1 at least once inside the prism 5C, so that only one member needs to be prepared. Therefore, it is easier to adjust the position and orientation of the multiple reflection optical element 105 with respect to the optical axes of the zeroth-order diffracted light A0 and the first-order diffracted light A1 than when the multiple reflection optical element 105 has mirrors 5A and 5B.

[0112] The pair of reflecting surfaces BS of the prism 5C face each other, so that the zeroth-order diffracted light A0 and the first-order diffracted light A1 can be easily reflected multiple times back and forth between the reflecting surfaces BS, BS. Therefore, the multiple reflection optical element 105 of this embodiment can easily reflect the diffracted light A0 and A1 multiple times, and can easily increase the distance between the optical path of the zeroth-order diffracted light A0 and the optical path of the first-order diffracted light A1.

[0113] Since the pair of reflecting surfaces BS of the prism 5C are parallel to each other, it is easy to control the traveling directions of the zeroth-order diffracted light A0 and the first-order diffracted light A1, and to adjust the positions of the light receiving section 106 and the output section 107.

[0114] (Modification) The multiple reflection optical element 105 may have a structure that reflects the zeroth-order diffracted light A0 two or more times and reflects the first-order diffracted light A1 one or more times. Modifications of the multiple reflection optical element 105 will be described below.

[0115] <Pattern with reflective outer surface> When the multiple reflection optical element 105 has a pair of mirrors 5A and 5B facing each other, the reflecting surfaces OS do not necessarily have to be arranged parallel to each other. If the reflecting surfaces OS are arranged facing each other, the zeroth-order diffracted light A0 and the first-order diffracted light A1 can be reflected multiple times to go back and forth between the mirrors 5A and 5B.

[0116] In addition, if the multiple reflection optical element 105 has a pair of mirrors 5A and 5B facing each other and it is sufficient that the zeroth-order diffracted light A0 and the first-order diffracted light A1 are each reflected about twice, the reflective surfaces OS do not have to face each other. For example, the mirrors 5A and 5B may be arranged so that the reflective surface OS of the mirror 5B extends in a direction perpendicular to the reflective surface OS of the mirror 5A.

[0117] The multi-reflection optical element 105 may have three or more mirrors. For example, the multi-reflection optical element 105 may have two mirrors arranged so that their reflective surfaces OS face each other and are parallel to each other, and a mirror arranged so that its reflective surface OS extends perpendicular to the reflective surfaces OS of the first mirrors.

[0118] Moreover, mirror 5A may be composed of a plurality of mirrors arranged at intervals in the extending direction, and mirror 5B may be composed in the same manner as mirror 5A.

[0043]

[0119] The multiple reflection optical element 105 does not necessarily have to have a mirror, and may have, for example, a plurality of reflecting members each having a reflecting surface OS formed on its outer surface for reflecting the zeroth-order diffracted light A0 and the first-order diffracted light A1. The reflecting members are, for example, prisms.

[0120] Moreover, the multiple reflection optical element 105 may have a reflective member that is formed in a hollow shape and has a plurality of reflective surfaces OS formed on the outer surface facing the internal space.

[0121] <Pattern with reflective interface> The multiple reflection optical element 105 may have a structure in which the reflecting surface BS that lastly reflects the zeroth-order diffracted light A0 and the reflecting surface BS that lastly reflects the first-order diffracted light A1 are the same surface. In other words, the multiple reflection optical element 105 may have a prism 5C and emit the zeroth-order diffracted light A0 and the first-order diffracted light A1 in the same direction relative to the position of the multiple reflection optical element 105.

[0122] For example, the reflecting surface BS of the prism 5C in the third embodiment, which reflects the zeroth-order diffracted light A0 last, may be formed to be slightly longer. In this case, the first-order diffracted light A1 is reflected last by the reflecting surface BS formed to be slightly longer. Also, similar to the first embodiment, the light receiving unit 106 is located on the same side as the output unit 107 with respect to the position of the multiple reflection optical element 105. In this case, the number of reflections of the zeroth-order diffracted light A0 and the number of reflections of the first-order diffracted light A1 are the same.

[0123] The two reflecting surfaces BS, BS of the prism 5C do not have to be parallel to each other. If the two reflecting surfaces BS, BS face each other, the zeroth-order diffracted light A0 and the first-order diffracted light A1 can be reflected multiple times to travel back and forth between the mirrors 5A and 5B.

[0124] The multiple reflection optical element 105 only needs to have at least a transmitting surface TS through which the 0th-order diffracted light A0 and the 1st-order diffracted light A1 transmit, and a reflecting surface BS that reflects the 0th-order diffracted light A0 and the 1st-order diffracted light A1.

[0125] Therefore, the prism 5C may have only one transmitting surface TS. For example, the prism 5C may have a rectangular parallelepiped shape and only one surface may be the transmitting surface TS. The prism 5C may have three or more reflecting surfaces BS.

[0126] The shape of the prism 5C is not limited to a rectangular parallelepiped, but may be a cube, a triangular prism, a quadrangular prism with a trapezoidal base, a quadrangular prism with a parallelogram base, or other polygonal prism, as well as a polygonal pyramid shape such as a triangular pyramid.

[0127] In each of the above-described embodiments and modifications, the zeroth-order diffracted light A0 and the first-order diffracted light A1 are respectively guided to the output unit 107 and the light receiving unit 106. However, the laser system 100 may guide the zeroth-order diffracted light A0 and the first-order diffracted light A1 to the light receiving unit 106 and the output unit 107, respectively.

[0128] In the second and third embodiments, the number of reflections of the zeroth-order diffracted light A0 is greater than the number of reflections of the first-order diffracted light A1. However, the number of reflections of the zeroth-order diffracted light A0 may be less than the number of reflections of the first-order diffracted light A1. That is, the multiple reflection optical element 105 only needs to have a structure that reflects the zeroth-order diffracted light A0 and the first-order diffracted light A1 and repeatedly reflects at least one of the zeroth-order diffracted light A0 and the first-order diffracted light A1. [Industrial Applicability]

[0129] The present disclosure can be suitably used for a laser shutter unit and a laser system that can reduce the size of the shutter unit while increasing the reliability of switching between emitting and blocking laser light. The laser shutter unit and the laser system can be applied to laser devices such as laser processing devices and laser measurement devices. [Explanation of symbols]

[0130] 100 Laser System 102 Laser shutter unit 103 Modulation signal generator 104 Acousto-optic element (AOM) 141 Ultrasonic generator 142 AO crystal 105 Multiple reflection optical elements 5A Mirror 5B Mirror 5C Prism 106 Light receiving part 107 Output section RA laser light S modulated signal A0 0th order diffracted light A1 1st order diffracted light IR laser light RA output IS Output of modulated signal S IA0 Output of 0th order diffracted light IA0 IA1 Output of 1st order diffracted light IA1 θ deflection angle OS reflective surface BS reflective surface TS transparent surface LA Mirror 5A Length LB Mirror 5B Length

Claims

1. an acousto-optic element that switches an emission direction of an incident laser beam between a first direction and a second direction; a laser shutter unit comprising: a multi-reflection optical element having a pair of plane mirrors that reflects a first light, which is light emitted in the first direction from the acousto-optical element, and a second light, which is light emitted in the second direction from the acousto-optical element, and repeatedly reflects at least one of the first light and the second light.

2. The multiple reflection optical element includes a plurality of reflecting members having outer surfaces that reflect the first light and the second light.

2. The laser shutter unit according to claim 1.

3. The pair of plane mirrors are arranged such that the outer surfaces of the pair of plane mirrors face each other.

3. The laser shutter unit according to claim 2.

4. The pair of plane mirrors are arranged such that the outer surfaces of the pair of plane mirrors are parallel to each other.

4. The laser shutter unit according to claim 3.

5. The multiple reflection optical element includes an optical element having a transmission surface through which the first light and the second light transmit, and an interface that reflects the light transmitted through the transmission surface.

2. The laser shutter unit according to claim 1.

6. The optical element is a prism having a pair of the transmitting surfaces facing each other and a pair of the interface surfaces facing each other.

6. The laser shutter unit according to claim 5.

7. The pair of interfaces are parallel to each other.

7. The laser shutter unit according to claim 6.

8. the multiple reflection optical element has a structure in which a surface that lastly reflects the first light is different from a surface that lastly reflects the second light, 8. A laser shutter unit according to claim 1.

9. a laser oscillation unit that oscillates a laser; A laser shutter unit according to any one of claims 1 to 8, an output section that outputs the first light to an outside of the laser shutter unit; A light receiving unit that receives the second light; Equipped with the laser shutter unit receives the laser light output from the laser oscillation unit; Laser system.

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