Substrate transport device and substrate transport method

Abstract

To provide a substrate transfer device capable of sending out only a substrate to be pushed from a magazine.SOLUTION: A substrate transfer device 10 includes a magazine 20 that has a pair of side plates 21 formed with a plurality of grooves 22 extending in a first direction, and in which the grooves 22 support the substrate 1 and guide the movement of the substrate 1, an end effector 30 for pushing the substrate 1 supported in the groove 22 of the magazine 20, and a guide portion 50 provided facing the carry-out surface of the magazine 20 and guiding the substrate 1 pushed out from the magazine 20 by the end effector 30. The substrate 1 pushed by the end effector 30 is referred to as a first substrate 1a, and the substrate 1 supported in the groove 22 next to the groove 22 supporting the first substrate 1a is referred to as a second substrate 1b. The guide portion 50 includes an opening 54 that allows passage of the first substrate 1a, and a stopper 55 that blocks passage of the second substrate 1b.SELECTED DRAWING: Figure 2

Description

[Technical field]

[0001] The present disclosure relates to a substrate transport apparatus and a substrate transport method. [Background technology]

[0002] Conventionally, a plasma cleaning device for a substrate is known (for example, Patent Document 1). The plasma cleaning device of Patent Document 1 includes a substrate transport device for transporting a substrate along a predetermined transport path. This substrate transport device has a sending-out means for pushing and feeding the substrates one by one by a rod from a magazine that holds a plurality of substrates in a stacked state. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 9-129581 Summary of the Invention [Problem to be solved by the invention]

[0004] However, as described above, multiple substrates are stacked in a magazine. When one of such stacked substrates is pushed forward by a rod, the substrate next to the substrate being pushed forward may also be sent out at the same time. This phenomenon is likely to occur when the substrates are warped and adjacent substrates are in contact with each other. In such a situation, one of the objectives of the present disclosure is to provide a substrate transport device that can send out only the substrate being pushed forward from the magazine. [Means for solving the problem]

[0005] One aspect of the present disclosure relates to a substrate transport device, the substrate transport device including a magazine having a pair of side plates in which a plurality of grooves extending in a first direction are formed side by side in a second direction intersecting the first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction, an end effector for pushing the substrate supported in the grooves of the magazine in the first direction, and a guide section provided opposite to an ejection surface of the magazine and guiding the substrate pushed from the magazine by the end effector in the first direction, the substrate pushed by the end effector being a first substrate, the groove supporting the first substrate being a first groove, the groove adjacent to the first groove being a second groove, and the substrate supported in the second groove being a second substrate, the guide section having an opening for allowing passage of the first substrate and a stopper for preventing passage of the second substrate.

[0006] Another aspect of the present disclosure relates to a substrate transport method, the substrate transport method being provided in a substrate transport device including a magazine having a pair of side plates in which a plurality of grooves extending in a first direction are formed side by side in a second direction intersecting the first direction, the grooves supporting both side ends of the substrate along the first direction and guiding movement of the substrate in the first direction, an end effector for pushing the substrate supported in the grooves of the magazine in the first direction, and a guide part provided opposite to an ejection surface of the magazine and guiding the substrate pushed from the magazine by the end effector in the first direction, the substrate transport method including a pushing step of pushing the first substrate by the end effector, the substrate supported in one of the plurality of grooves being a first substrate and the substrate supported in the groove adjacent to the groove supporting the first substrate being a second substrate, the pushing step allowing the first substrate to pass through the guide part while preventing the second substrate from passing through the guide part by a stopper. Effect of the Invention

[0007] According to the present disclosure, a substrate transport device and a substrate transport method are obtained that can send out from a magazine only substrates that are to be pushed. [Brief description of the drawings]

[0008] [Figure 1] 1 is a front view showing a schematic configuration of a substrate transport device according to a first embodiment. [Diagram 2] 1 is a front view illustrating a schematic view of a main part of a substrate transport device according to a first embodiment. [Diagram 3] 4 is a schematic side view for explaining the positional relationship between the magazine and a guide portion according to the first embodiment. FIG. [Figure 4] 11 is a schematic side view for explaining the positional relationship between a magazine and a guide portion according to the second embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] The substrate transport apparatus and the substrate transport method according to the present disclosure will be described below with reference to examples. However, the present disclosure is not limited to the examples described below. In the following description, specific numerical values ​​and materials may be exemplified, but other numerical values ​​and materials may be applied as long as the effects of the present disclosure are obtained.

[0010] (Substrate transport device) A substrate transport apparatus according to the present disclosure includes a magazine, an end effector, and a guide unit.

[0011] The magazine has a pair of side plates in which a number of grooves extending in a first direction are formed. The pair of side plates are arranged parallel to each other. The grooves are formed side by side in a second direction intersecting the first direction. Such grooves support both side ends of the substrate along the first direction and guide the movement of the substrate in the first direction. The first direction may be a horizontal direction, and the second direction may be a vertical direction.

[0012] The end effector pushes the substrate supported in the groove of the magazine in the first direction. The end effector may have, for example, a rod-shaped main body extending along the first direction. The end effector may be driven, for example, by air pressure.

[0013] The guide portion is provided facing the discharge surface of the magazine. The guide portion guides the substrate pushed out of the magazine by the end effector in a first direction. The guide portion may have a rail-shaped member extending along the first direction. The guide portion has an opening that allows the first substrate to pass through and a stopper that prevents the second substrate from passing through. The stopper may be formed of, for example, a plate-shaped member such as a bracket, or a block-shaped member.

[0014] Here, the first board is the board pushed by the end effector. In other words, the first board is the board to be pushed. The second board is the board supported by the second groove, with the groove supporting the first board being the first groove and the groove adjacent to the first groove being the second groove. In other words, the second board is the board adjacent to the board to be pushed and is the board that may be unintentionally sent out of the magazine.

[0015] Because the guide section has the opening and the stopper, the first board, which is the board to be pushed, can pass through the guide section, but the second board next to it cannot pass through the guide section. This allows only the board to be pushed out of the magazine.

[0016] (Substrate transport method) A substrate transport method according to the present disclosure can be used, for example, in the above-mentioned substrate transport apparatus, and includes a pushing step.

[0017] In the pushing process, the end effector pushes the first board. In the pushing process, the first board is allowed to pass through the guide section, while the stopper prevents the second board from passing through the guide section. This allows only the first board, i.e., only the board to be pushed, to be sent out of the magazine.

[0018] As described above, according to the present disclosure, a substrate transport device and a substrate transport method are obtained that can send out from a magazine only substrates that are to be pushed.

[0019] The opening may include the first groove when viewed from the first direction, one end of the stopper in the second direction may coincide with the end of the second groove on the first groove side or be located between the first groove and the second groove when viewed from the first direction, and the other end of the stopper in the second direction may coincide with the end of the second groove opposite the first groove or be located farther from the first groove than the opposite end when viewed from the first direction. With this configuration, the first board coming out of the first groove easily enters the opening, and the second board coming out of the second groove easily hits the stopper. Therefore, it is even easier to realize sending out only the board to be pushed out from the magazine.

[0020] The stopper may include a bottom of the second groove when viewed from the first direction, so that even if the second substrate is about to come out of the second groove, both side edges of the second substrate hit the stopper, preventing the second substrate from passing through the guide portion.

[0021] The stopper may block the passage of the third substrate, with the groove adjacent to the second substrate on the opposite side to the first substrate being the third substrate, thereby preventing not only the second substrate supported by the second substrate adjacent to the first substrate, but also the third substrate supported by the third substrate adjacent to the second substrate from passing through the guide portion.

[0022] In the following, an example of the substrate transport apparatus and the substrate transport method according to the present disclosure will be specifically described with reference to the drawings. The above-mentioned components and steps can be applied to the components of the substrate transport apparatus and the steps of the substrate transport method of the example described below. The components of the substrate transport apparatus and the steps of the substrate transport method of the example described below can be modified based on the above description. In addition, the matters described below may be applied to the above embodiment. Among the components of the substrate transport apparatus and the steps of the substrate transport method of the example described below, the components and steps that are not essential to the substrate transport apparatus and the substrate transport method according to the present disclosure may be omitted. Note that the figures shown below are schematic and do not accurately reflect the shapes and numbers of actual members.

[0023] First Embodiment A first embodiment of the present disclosure will be described. A substrate transport apparatus 10 of the present embodiment is an apparatus for transporting a substrate 1 along a predetermined transport direction (first direction). The substrate transport apparatus 10 is applicable to, for example, a substrate processing apparatus (not shown) for subjecting the substrate 1 to a plasma cleaning process. In the following, first, the configuration of the substrate transport apparatus 10 will be described, and then a substrate transport method using the substrate transport apparatus 10 will be described.

[0024] (Substrate transport device) As shown in FIGS. 1 and 2, the substrate transport apparatus 10 includes a magazine 20, an end effector 30, a moving unit 40, and a guide unit 50. The magazine 20 includes a magazine, an end effector 30, a moving unit 40, and a guide unit 50.

[0025] The magazine 20 has a pair of side plates 21 in which a plurality of grooves 22 extending in a first direction (the transport direction of the substrate 1) are formed (see FIG. 3). The pair of side plates 21 are connected to each other by a top plate 23 and a bottom plate 24. The plurality of grooves 22 are formed side by side in a second direction (e.g., the vertical direction) intersecting the first direction. The plurality of grooves 22 may be formed at equal intervals. In the magazine 20, the grooves 22 support both side ends (left and right ends in FIG. 3) of the substrate 1 along the first direction and guide the movement of the substrate 1 in the first direction.

[0026] The magazine 20 is configured to be movable in the vertical direction by a lifting mechanism (not shown). The magazine 20 may be configured to feed out the substrates 1 in sequence from the bottom, or may be configured to feed out the substrates 1 in sequence from the top. In the former case, the magazine 20 moves downward while feeding out the substrates 1 in sequence, whereas in the latter case, the magazine 20 moves upward while feeding out the substrates 1 in sequence.

[0027] The end effector 30 pushes the substrate 1 supported in the groove 22 of the magazine 20 in a first direction. The end effector 30 may be configured of a rod-shaped member extending along the first direction. The end effector 30 may push the substrate 1 while moving in the first direction with its tip portion in contact with the substrate 1.

[0028] The moving unit 40 moves the end effector 30 along the first direction. In this embodiment, the moving unit 40 is configured with a pneumatic actuator, but is not limited to this. For example, the moving unit 40 may be configured with another driving mechanism such as an electric actuator.

[0029] The guide unit 50 is provided facing the discharge surface (the right side surface in FIG. 1) of the magazine 20. The guide unit 50 guides the substrate 1 pushed out of the magazine 20 by the end effector 30 in a first direction. The guide unit 50 has an upper member 51, a lower member 52, and a stopper 55.

[0030] The upper member 51 and the lower member 52 are members that extend along the first direction. A movement space 53 in which the substrate 1 coming out of the magazine 20 moves is formed between the upper member 51 and the lower member 52. The entrance of the movement space 53 is tapered so as to widen toward the magazine 20. This makes it easy for the substrate 1 coming out of the magazine 20 to enter the movement space 53.

[0031] Here, definitions of terms in this disclosure will be explained. That is, the substrate 1 pushed by the end effector 30 is the first substrate 1a, and the groove 22 supporting the first substrate 1a is the first groove 22a. The groove 22 adjacent to the first groove 22a is the second groove 22b, and the substrate 1 supported by the second groove 22b is the second substrate 1b. Furthermore, the groove 22 adjacent to the second groove 22b on the opposite side to the first groove 22a is the third groove 22c, and the substrate 1 supported by the third groove 22c is the third substrate 1c.

[0032] The stopper 55 is a plate-like member that prevents the second substrate 1b from passing through. The stopper 55 is fixed to the upper member 51. As shown in Fig. 2, the stopper 55 blocks approximately the upper half of the entrance of the movement space 53 in a front view. An opening 54 that allows the first substrate 1a to pass through is formed below the lower end of the stopper 55.

[0033] As shown in Fig. 3, the opening 54 encompasses the first groove 22a when viewed from the first direction (side view). Therefore, the first substrate 1a coming out of the first groove 22a easily enters the opening 54 and passes through the guide portion 50. In Fig. 3, the area of ​​the opening 54 is indicated by a two-dot chain line. In Fig. 3, the ranges in which the end effector 30 and the stopper 55 exist are each hatched.

[0034] One end of the stopper 55 in the second direction (in this example, the lower end) is located between the first groove 22a and the second groove 22b when viewed from the first direction. Note that one end of the stopper 55 in the second direction may coincide with the end of the second groove 22b on the first groove 22a side when viewed from the first direction.

[0035] The other end of the stopper 55 in the second direction (in this example, the upper end) is located farther from the first groove 22a than the end of the second groove 22b on the opposite side to the first groove 22a side when viewed from the first direction. Specifically, the other end of the stopper 55 in the second direction is located between the second groove 22b and the third groove 22c when viewed from the first direction. Note that the other end of the stopper 55 in the second direction may coincide with the end of the second groove 22b on the opposite side to the first groove 22a side when viewed from the first direction.

[0036] One end (in this example, the end toward the center of magazine 20) of stopper 55 in the third direction (a direction intersecting with the first direction and the second direction, the left-right direction in FIG. 3) is located closer to the center of magazine 20 than the bottom surface of second groove 22b when viewed from the first direction. Also, one end of stopper 55 in the third direction is located near the opening of second groove 22b when viewed from the first direction.

[0037] The other end of stopper 55 in the third direction (in this example, the end farther from the center of magazine 20) is located farther from the center of magazine 20 than the bottom surface of second groove 22b when viewed from the first direction. Also, the other end of stopper 55 in the third direction is located between the bottom surface of second groove 22b and the outer surface of side plate 21 when viewed from the first direction. Note that the other end of stopper 55 in the third direction may coincide with the bottom surface of second groove 22b when viewed from the first direction.

[0038] As can be seen from the above description of the positions of each end of the stopper 55, the stopper 55 encompasses the bottom of the second groove 22b when viewed from the first direction. Here, the bottom of the second groove 22b refers to a region near the bottom of the second groove 22b (for example, a region from the bottom to D / 3, where D is the depth of the second groove 22b). Therefore, even if the second substrate 1b is about to come out of the second groove 22b, the stopper 55 can easily prevent the second substrate 1b from passing through. Note that the stopper 55 does not need to encompass the bottom of the second groove 22b as long as it can prevent the second substrate 1b from passing through.

[0039] (Substrate transport method) A description will now be given of a substrate transport method using the above-mentioned substrate transport device 10. The substrate transport method includes a pushing step.

[0040] In the pushing process, the first substrate 1a is pushed by the end effector 30. At this time, the end effector 30 is moved in the first direction by the moving portion 40. In the pushing process, the first substrate 1a is sent into the movement space 53 through the opening 54. In this way, in the pushing process, the first substrate 1a is allowed to pass through the guide portion 50.

[0041] On the other hand, the second substrate 1b is not pushed by the end effector 30, but may unintentionally move in the first direction in association with the movement of the first substrate 1a. Even in such a case, the second substrate 1b collides with the stopper 55 and the movement is restricted. Thus, in the pushing step, the second substrate 1b is prevented from passing through the guide portion 50 by the stopper 55.

[0042] Second Embodiment A second embodiment of the present disclosure will be described. This embodiment differs from the first embodiment in the configuration of the stopper 55. The following mainly describes the differences from the first embodiment.

[0043] 4, the other end of the stopper 55 in the second direction (in this example, the upper end) is located farther from the second groove 22b than the end of the third groove 22c on the opposite side to the second groove 22b side when viewed from the first direction. Note that one end of the stopper 55 in the second direction may coincide with the end of the third groove 22c on the opposite side to the second groove 22b side when viewed from the first direction.

[0044] The stopper 55 of this embodiment is longer vertically than the stopper 55 of the first embodiment, and includes the bottom of the second groove 22b and the bottom of the third groove 22c when viewed from the first direction. It can easily prevent not only the passage of the second substrate 1b that is about to come out of the second groove 22b, but also the passage of the third substrate 1c that is about to come out of the third groove 22c. Note that the stopper 55 does not have to include the bottom of the second groove 22b and the bottom of the third groove 22c as long as it can prevent the passage of the third substrate 1c. [Industrial Applicability]

[0045] The present disclosure can be used for a substrate transport apparatus and a substrate transport method. [Explanation of symbols]

[0046] 1: Substrate 1a: First substrate 1b: 2nd board 1c: 3rd board 10: Substrate transport device 20: Magazine 21: Side panel 22: Groove 22a: 1st groove 22b: 2nd groove 22c: 3rd groove 23: Tabletop 24: Bottom plate 30: End effector 40: Mobile section 50: Guide section 51: Upper member 52: Lower part 53: Moving Space 54:Aperture 55: Stopper

Claims

1. a magazine having a pair of side plates with a plurality of grooves extending in a first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction; an end effector for pushing the substrate supported in the groove of the magazine in the first direction; a guide portion provided opposite to a discharge surface of the magazine and configured to guide the substrate pushed out of the magazine by the end effector in the first direction; Equipped with the substrate pushed by the end effector is a first substrate, the groove supporting the first substrate is a first groove, the groove adjacent to the first groove is a second groove, and the substrate supported by the second groove is a second substrate, the guide portion has an opening that allows passage of the first substrate and a stopper that prevents passage of the second substrate, The opening includes the first groove when viewed from the first direction, one end of the stopper in the second direction coincides with an end of the second groove on the first groove side as viewed from the first direction or is located between the first groove and the second groove, A substrate transport device, wherein the other end of the stopper in the second direction coincides with the end of the second groove opposite the first groove when viewed from the first direction or is located farther from the first groove than the opposite end.

2. The substrate transport apparatus according to claim 1 , wherein the stopper encompasses a bottom of the second groove when viewed from the first direction.

3. the groove adjacent to the second groove on the opposite side to the first groove is a third groove, and the substrate supported by the third groove is a third substrate; The substrate transport apparatus according to claim 1 , wherein the stopper prevents the third substrate from passing through.

4. a magazine having a pair of side plates with a plurality of grooves extending in a first direction, the grooves supporting both side ends of a substrate along the first direction and guiding movement of the substrate in the first direction; an end effector for pushing the substrate supported in the groove of the magazine in the first direction; a guide portion provided opposite to a discharge surface of the magazine and configured to guide the substrate pushed out of the magazine by the end effector in the first direction; A substrate transport method for transporting a substrate in a substrate transport apparatus comprising: the substrate supported by one of the plurality of grooves is a first substrate, the groove supporting the first substrate is a first groove, the groove adjacent to the first groove is a second groove, and the substrate supported by the second groove is a second substrate; The substrate transport method includes a pushing step of pushing the first substrate by the end effector, The guide portion has an opening and a stopper, The opening includes the first groove when viewed from the first direction, one end of the stopper in the second direction coincides with an end of the second groove on the first groove side as viewed from the first direction or is located between the first groove and the second groove, the other end of the stopper in the second direction coincides with an end of the second groove on an opposite side to the first groove as viewed from the first direction or is located farther from the first groove than the opposite end of the second groove; In the pushing step, the opening allows the first substrate to pass through the guide portion, while the stopper prevents the second substrate from passing through the guide portion.

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