Pulse Power Supply

Abstract

A pulse power supply device (1) has: a plurality of first inductors (Li1) that are located in a first column and that are connected in series; a plurality of second inductors (Li2) that are located in a second column and that are connected in series; a plurality of capacitors (Ci-1, Ci, Ci+1); a plurality of negative-electrode-side switching elements (Nswi1); a plurality of positive-electrode-side switching elements (Pswi2); a first positive-electrode terminal switching element (Pcon2) connected to the first inductor (Li1) located at one end among the plurality of first inductors (Li1) and a first output terminal (41); and a first negative-electrode terminal switching element (Ncon2) connected to the second inductor (Li2) located at one end among the plurality of second inductors (Li2) and the first output terminal (41).

Description

[Technical field]

[0001] The present disclosure relates to a pulsed power supply utilizing a Marx circuit. [Background technology]

[0002] Power supply devices that generate high-voltage pulses are used, for example, in sterilizers that use electric discharge, water treatment devices, laser oscillators, exhaust gas purification devices, ozone generators, and extreme ultraviolet light sources. These devices need to instantaneously generate extremely high pulse power by emitting electrical energy called pulse power for an extremely short period of time.

[0003] Conventionally, gas discharge switches used in pulse power sources have the problems of short life span and low stability. In recent years, switching circuits using semiconductor devices have come into use, making it possible to generate high-voltage pulses with short pulse widths without using a compression circuit that compresses the pulse waveform in time, and enabling higher frequency power sources.

[0004] In particular, a dielectric barrier discharge used in an ozone generator or a discharge excimer lamp requires an AC high frequency power supply.

[0005] The pulse generating circuit disclosed in Patent Document 1 has a first pulse generating unit that includes a first Marx circuit using a first switch element made of a rectifying element and generates a first pulse voltage, a second pulse generating unit that includes a second Marx circuit using a second switch element made of a rectifying element and generates a second pulse voltage having a different voltage polarity from the first pulse voltage, and a pulse combining unit that connects the first pulse generating unit and the second pulse generating unit and includes a third switch element made of a rectifying element whose forward direction is from the first pulse generating unit to the second pulse generating unit. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] JP 2006-135947 A Summary of the Invention [Problem to be solved by the invention]

[0007] Conventionally, there is a problem in that it is not possible to provide a small-sized pulse power supply device capable of generating pulse voltages of both polarities.

[0008] The present disclosure has been made in view of the above, and has an object to provide a small-sized pulse power supply device capable of generating pulse voltages of both polarities. [Means for solving the problem]

[0009] In order to solve the above problems and achieve the object, the pulse power supply according to the present disclosure includes a plurality of first inductors connected in series in a first row, a plurality of second inductors connected in series in a second row, a plurality of capacitors, a plurality of negative pole side switching elements, and a plurality of positive pole side switching elements. The pulse power supply according to the present disclosure further includes a first positive pole end switching element connected to a first inductor located at one end of the plurality of first inductors and a first output terminal, a first negative pole end switching element connected to a second inductor located at one end of the plurality of second inductors and a first output terminal, a second positive pole end switching element connected to a first inductor located at the other end of the plurality of first inductors and a second output terminal, a second negative pole end switching element connected to a second inductor located at the other end of the plurality of second inductors and a second output terminal, and a DC power supply connected to the second positive pole end switching element and the second negative pole end switching element. The pulse power supply device according to the present disclosure further includes a control unit that controls the on and off timing of all of the plurality of negative pole side switching elements, the plurality of positive pole side switching elements, the first positive pole end switching element, the first negative pole end switching element, the second positive pole end switching element, and the second negative pole end switching element.The i-th capacitor of the plurality of capacitors is connected to a second end of a first inductor located in the i-th row and the first column of the plurality of first inductors and a second end of a second inductor located in the i-th row and the second column of the plurality of second inductors, where i is an integer equal to or greater than 1. The i-th negative switching element of the plurality of negative switching elements is connected to a second end of a first inductor located in the i-th row and the first column of the plurality of first inductors and a first end of a second inductor located in the i-th row and the second column of the plurality of second inductors. The i-th positive switching element of the plurality of positive switching elements is connected to a first end of a first inductor located in the i-th row and the first column of the plurality of first inductors and a second end of a second inductor located in the i-th row and the second column of the plurality of second inductors. Before the pulse voltage is generated, all of the capacitors are charged by the DC power source, and when the pulse voltage is generated, all of the capacitors are connected in series. An end of the second positive pole termination switching element that is not connected to the first inductor and an end of the second negative pole termination switching element that is not connected to the second inductor are connected to the positive side of the DC power source and the second output terminal, and are also grounded. An end of the second positive pole termination switching element that is connected to the first inductor and an end of the second negative pole termination switching element that is connected to the second inductor are connected to the negative side of the DC power source. An output pulse is output from the first output terminal and the second output terminal. The control unit repeatedly performs the following operations: after turning on the first positive terminal switching element and the second positive terminal switching element, turning on the multiple positive side switching elements, then turning off the multiple positive side switching elements, then turning off the first positive terminal switching element and the second positive terminal switching element, then turning on the first negative terminal switching element and the second negative terminal switching element, turning on the multiple negative side switching elements, then turning off the multiple negative side switching elements, and turning off the first negative terminal switching element and the second negative terminal switching element. Effect of the Invention

[0010] The pulse power supply device according to the present disclosure has the advantage of being compact and capable of generating pulse voltages of both polarities. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 shows a configuration of a pulse power supply device according to a first embodiment. [Diagram 2] FIG. 1 is a diagram showing the configuration of a pulse power supply device when explaining the operation of the pulse power supply device according to the first embodiment; [Diagram 3] FIG. 1 is a diagram for explaining an example of a sequence of operations of a control unit included in a pulse power supply device according to the first embodiment. [Figure 4] FIG. 1 is a diagram showing an example of a waveform of an output voltage of a pulse power supply device according to a first embodiment; [Diagram 5] FIG. 1 is a diagram showing an example of a waveform of an output voltage of a pulse power supply device according to a first embodiment; [Figure 6] FIG. 1 shows a configuration of a pulse power supply device according to a second embodiment. [Figure 7] FIG. 13 is a diagram showing an example of a waveform of an output voltage of a pulse power supply device according to a second embodiment; [Figure 8]FIG. 1 is a diagram showing a processor in the case where a control unit of a pulse power supply device according to a first embodiment is realized by a processor. [Figure 9] FIG. 1 is a diagram showing a processing circuit in the case where a control unit of a pulse power supply device according to a first embodiment is realized by the processing circuit; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, a pulse power supply device according to an embodiment will be described in detail with reference to the drawings.

[0013] Embodiment 1 Fig. 1 is a diagram showing the configuration of a pulse power supply 1 according to a first embodiment. The pulse power supply 1 has a pulse generating section 2, a DC power supply 3, a first positive / negative switching section 4, a second positive / negative switching section 5, and a control section 6. The pulse generating section 2 has a plurality of capacitors. Fig. 1 shows capacitors Ci-1, Ci, and Ci+1 as examples of the plurality of capacitors. i is an integer equal to or greater than 1.

[0014] The pulse generating unit 2 further includes a plurality of first inductors Li1 located in a first row and connected in series, and a plurality of second inductors Li2 located in a second row and connected in series. The plurality of capacitors are connected in parallel via the plurality of first inductors Li1 and the plurality of second inductors Li2.

[0015] The pulse generating unit 2 further includes a plurality of negative pole side switching elements Nswi1 and a plurality of positive pole side switching elements Pswi2. The i-th negative pole side switching element Nswi1 of the plurality of negative pole side switching elements Nswi1 is connected to a second end of the first inductor Li1 located in the i-th row and the first column of the plurality of first inductors Li1 and a first end of the second inductor Li2 located in the i-th row and the second column of the plurality of second inductors Li2. The i-th positive pole side switching element Pswi2 of the plurality of positive pole side switching elements Pswi2 is connected to a first end of the first inductor Li1 located in the i-th row and the first column of the plurality of first inductors Li1 and a second end of the second inductor Li2 located in the i-th row and the second column of the plurality of second inductors Li2. The i-th negative pole side switching element Nswi1 and the i-th positive pole side switching element Pswi2 are provided at positions sandwiching the i-th capacitor Ci. The i-th capacitor Ci is one of the multiple capacitors that the pulse generating section 2 has.

[0016] The i-th capacitor Ci among the multiple capacitors possessed by the pulse generating unit 2 is connected to a second end of a first inductor Li1 located in the i-th row and first column among the multiple first inductors Li1, and a second end of a second inductor Li2 located in the i-th row and second column among the multiple second inductors Li2.

[0017] The pulse generating unit 2 further includes a diode Dsw1 arranged in parallel with each of the negative switching elements Nswi1 and a diode Dsw2 arranged in parallel with each of the positive switching elements Pswi2. The DC power source 3 charges the capacitors with a voltage that does not exceed the withstand voltages of the capacitors and the switching elements.

[0018] The first positive / negative switching unit 4 has a first positive terminal switching element Pcon2 and a first negative terminal switching element Ncon2 corresponding to the direction of the current in order to generate an AC voltage. The first positive terminal switching element Pcon2 is connected to a first inductor Li1 located at one end of a plurality of first inductors Li1 and a first output terminal 41. The first negative terminal switching element Ncon2 is connected to a second inductor Li2 located at one end of a plurality of second inductors Li2 and a first output terminal 41. The first positive / negative switching unit 4 further has a diode Dcon21 arranged in parallel with the first positive terminal switching element Pcon2 and a diode Dcon22 arranged in parallel with the first negative terminal switching element Ncon2.

[0019] The second positive / negative switching unit 5 has a second positive terminal switching element Pcon1 and a second negative terminal switching element Ncon1 corresponding to the direction of the current in order to generate an AC voltage. The second positive terminal switching element Pcon1 is connected to the first inductor Li1 located at the other end of the multiple first inductors Li1 and the second output terminal 51. The second negative terminal switching element Ncon1 is connected to the second inductor Li2 located at the other end of the multiple second inductors Li2 and the second output terminal 51. The second positive / negative switching unit 5 further has a diode Dcon11 arranged in parallel with the second positive terminal switching element Pcon1 and a diode Dcon12 arranged in parallel with the second negative terminal switching element Ncon1.

[0020] The DC power supply 3 is connected to the second positive terminal switching element Pcon1 and the second negative terminal switching element Ncon1. The control unit 6 controls the on and off timings of all the switching elements.

[0021] For each of the above-mentioned multiple switching elements, if the switching element has a diode, the diode arranged in parallel with the switching element may not be provided. If the switching element has a diode, the diode is used instead of the diode arranged in parallel with the switching element. For example, if the switching element is realized by a metal oxide semiconductor field effect transistor, the switching element may have a diode.

[0022] Next, the operation of the pulse power supply 1 will be described. Fig. 2 is a diagram showing the configuration of the pulse power supply 1 when explaining the operation of the pulse power supply 1 according to the first embodiment. In the following, it is assumed that i is 1. The pulse generating section 2 has a capacitor C0, a capacitor C1, and a capacitor C2.

[0023] The pulse generating unit 2 further includes an inductor L11 and an inductor L21 connected in series. The inductor L11 and the inductor L21 are examples of a plurality of first inductors Li1 connected in series. The pulse generating unit 2 further includes an inductor L12 and an inductor L22 connected in series. The inductor L12 and the inductor L22 are examples of a plurality of second inductors Li2 connected in series.

[0024] The pulse generating unit 2 has a negative side switching element Nsw11 and a negative side switching element Nsw21. The negative side switching element Nsw11 and the negative side switching element Nsw21 are examples of a plurality of negative side switching elements Nswi1. The pulse generating unit 2 has a positive side switching element Psw12 and a positive side switching element Psw22. The positive side switching element Psw12 and the positive side switching element Psw22 are examples of a plurality of positive side switching elements Pswi2.

[0025] FIG. 3 is a diagram for explaining an example of the sequence of the operation of the control unit 6 of the pulse power supply device 1 according to the first embodiment. In FIG. 3, "P_SW" means the positive switching element Psw12 and the positive switching element Psw22, "Pcon_SW" means the first positive terminal switching element Pcon2 and the second positive terminal switching element Pcon1. "N_SW" means the negative switching element Nsw11 and the negative switching element Nsw21, and "Ncon_SW" means the first negative terminal switching element Ncon2 and the second negative terminal switching element Ncon1. First, it is assumed that all switching elements are in the off state and that the capacitors C0, C1, and C2 are each charged with 1 kV.

[0026] The control unit 6 turns on the first positive terminal switching element Pcon2 of the first positive / negative switching unit 4 and the second positive terminal switching element Pcon1 of the second positive / negative switching unit 5, and then turns on the positive side switching element Psw12 and the positive side switching element Psw22 of the pulse generating unit 2. In this case, a voltage of +3 kV is output to the output terminal Vout. Next, the control unit 6 turns off the positive side switching element Psw12 and the positive side switching element Psw22 of the pulse generating unit 2. In this case, the voltage of the output terminal Vout becomes 0V.

[0027] Next, the control unit 6 turns off the first positive terminal switching element Pcon2 of the first positive / negative switching unit 4 and the second positive terminal switching element Pcon1 of the second positive / negative switching unit 5, and then turns on the first negative terminal switching element Ncon2 of the first positive / negative switching unit 4 and the second negative terminal switching element Ncon1 of the second positive / negative switching unit 5. The control unit 6 turns on the negative side switching element Nsw11 and the negative side switching element Nsw21 of the pulse generating unit 2. In this case, a voltage of -3 kV is output to the output terminal Vout. Next, the control unit 6 turns off the negative side switching element Nsw11 and the negative side switching element Nsw21 of the pulse generating unit 2. In this case, the voltage of the output terminal Vout becomes 0V.

[0028] Next, the control unit 6 turns off the first negative terminal switching element Ncon2 of the first positive / negative switching unit 4 and the second negative terminal switching element Ncon1 of the second positive / negative switching unit 5. The control unit 6 repeatedly performs the above-mentioned operation, so that the pulse power supply 1 can generate an AC voltage at the output terminal Vout.

[0029] In order to obtain a desired pulse width for each of the multiple switching elements in the pulse generating unit 2, if an element capable of operating at a relatively high speed, such as a metal oxide semiconductor field effect transistor, is selected, the pulse power supply 1 can generate a high frequency AC voltage.

[0030] In Fig. 2, an example is shown in which the pulse generating unit 2 has three capacitors, but it is possible to easily increase the voltage by providing capacitors, switching elements, and inductors for the desired voltage. If there are n capacitors, the voltage generated at the output terminal Vout will be an AC voltage of ±charging voltage × n [kV], where n is an integer equal to or greater than 2. By changing the charging voltage of the capacitors, the voltage generated at the output terminal Vout can be changed.

[0031] The control unit 6 may have a state quantity observation unit that observes, as state quantities, a current waveform or a voltage waveform between the first output terminal 41 of the first positive / negative switching unit 4 and the second output terminal 51 of the second positive / negative switching unit 5, and, for example, a command signal output from the control unit 6 to each of the multiple switching elements of the pulsed power supply device 1. The control unit 6 may have a learning device that learns the relationship between the current waveform or the voltage waveform between the first output terminal 41 and the second output terminal 51 and the command signal output from the control unit 6 to each of the multiple switching elements of the pulsed power supply device 1 based on the above state quantities. The control unit 6 may have a decision-making unit that determines the command signal output from the control unit 6 to each of the multiple switching elements of the pulsed power supply device 1 based on the learning result. The control unit 6 can determine, for example, a command signal suitable for part or all of the performance, load, and connection status of the switching elements with a small number of trials by performing machine learning. The connection status is the status of the connection terminals and wiring.

[0032] The control unit 6 may have a trained learning machine that uses the results of the above-mentioned learning. When the control unit 6 has a trained learning machine, a pulsed power supply device different from the pulsed power supply device 1 that performed the learning can determine a command signal suitable for some or all of the performance, load, and connection status of the switching elements.

[0033] In recent years, the development of devices using silicon carbide semiconductors, a new semiconductor material, has progressed, making it possible to use semiconductor devices with higher voltages and currents, making it possible to realize a pulse power supply 1 with a much smaller number of devices than when silicon devices are used.

[0034] When the output pulse width is relatively long, on the order of ms, or when continuous pulse driving is performed, as shown in Fig. 4, a droop occurs in the capacitor voltage, causing the output voltage of the pulse power supply device 1 to drop over time. Fig. 4 is a diagram showing an example of the waveform of the output voltage of the pulse power supply device 1 according to the first embodiment. That is, the charging voltage of the capacitor drops as a result of a current flowing from the capacitor to the load, causing the output voltage to drop. In order to improve the drop in output voltage, it is necessary to increase the capacitance of the capacitor; to halve the droop, the capacitance of the capacitor must be doubled; if the pulse width becomes 1000 times, the capacitance must be increased 1000 times. In other words, the capacitance of the capacitor should be selected according to the load.

[0035] The control unit 6 does not necessarily have to operate all of the multiple switching elements of the pulse generating unit 2 at the same time, and it is possible to arbitrarily change the waveform of the output voltage by consciously changing the operation timing. Therefore, the pulse power supply 1 has a feature that the switches are less likely to break down even if a switch malfunction occurs. The control unit 6 does not have to turn all of the switches on, and when the switching elements are off, current flows through the diodes connected in parallel.

[0036] Therefore, by changing the charging voltage, the number of switching elements to be turned on, the pulse width of the switching elements, and the timing of turning the pulse on and off, the pulse power supply 1 can form a variety of output pulses as shown in Fig. 5. Fig. 5 is a diagram showing an example of the waveform of the output voltage of the pulse power supply 1 according to the first embodiment.

[0037] As described above, the pulse power supply 1 according to the first embodiment can easily generate a high-voltage AC pulse and is composed of fewer parts than in the past, so that the manufacturing cost can be reduced and it is possible to contribute to miniaturization. Furthermore, the pulse power supply 1 has the effect of being compact while being capable of generating pulse voltages of both polarities.

[0038] Embodiment 2 The pulse power supply device 1 according to the first embodiment is a device that outputs a high-voltage pulse by charging a plurality of capacitors in parallel and discharging them in series, and has a plurality of first inductors Li1 and a plurality of second inductors Li2 in order to suppress discharge when the capacitors are connected in series. The capacitors are charged when the switching elements are in the off state, and it takes a certain amount of time to charge them. Furthermore, the later the stage, the larger the inductance is, so the longer the charging time is. Therefore, if the repetition frequency of the high-voltage pulse is increased, a problem occurs in that the absolute value of the peak value of the output voltage becomes smaller than n times the absolute value of the ±charging voltage of the DC power supply voltage.

[0039] Therefore, in the second embodiment, as shown in FIG. 6, the first inductor Li1 in FIG. 1 is replaced with a supersaturated inductor MSi1, and the second inductor Li2 in FIG. 1 is replaced with a supersaturated inductor MSi2. FIG. 6 is a diagram showing the configuration of a pulse power supply 1A according to the second embodiment. Hereinafter, the supersaturated inductor MSi1 and the supersaturated inductor MSi2 are described as "supersaturated inductors MS". The supersaturated inductor MS uses the extreme difference in permeability between the unsaturated and saturated states of a magnetic material to block current with a relatively high inductance and to pass current with a relatively low inductance. For example, the supersaturated inductor MS is realized by a magnetic material with a relatively high permeability, such as a nanocrystalline soft magnetic material.

[0040] When a saturable inductor MS is used, as shown in Fig. 7, an AC current flows through the inductor during AC pulse driving, so that the inductor does not saturate, a high inductance is maintained, charging of the capacitor is suppressed, and a discharging operation is performed. On the other hand, if AC pulse driving is not performed, a current flows only in one direction to charge the capacitor, so that the magnetic material of the inductor becomes saturated and is almost in a conductive state, so that charging of the capacitor is performed abruptly. Fig. 7 is a diagram showing an example of a waveform of the output voltage of the pulse power supply 1A according to the second embodiment.

[0041] As a result, the pulse power supply device 1A according to the second embodiment can output a stable AC pulse even if the repetition frequency of the high-voltage pulse is high.

[0042] Fig. 8 is a diagram showing a processor 91 in the case where the control unit 6 of the pulse power supply 1 according to the first embodiment is realized by the processor 91. That is, the function of the control unit 6 may be realized by the processor 91 that executes a program stored in a memory 92. The processor 91 is a CPU (Central Processing Unit), a processing device, an arithmetic device, a microprocessor, or a DSP (Digital Signal Processor). The memory 92 is also shown in Fig. 8.

[0043] When the functions of the control unit 6 are realized by the processor 91, the functions are realized by the processor 91 and software, firmware, or a combination of software and firmware. The software or firmware is written as a program and stored in the memory 92. The processor 91 realizes the functions of the control unit 6 by reading and executing the program stored in the memory 92.

[0044] When the functions of the control unit 6 are realized by the processor 91, the pulse power supply 1 has a memory 92 for storing a program that results in the steps executed by the control unit 6. It can also be said that the program stored in the memory 92 causes the control unit 6 to be executed by a computer.

[0045] The memory 92 may be, for example, a non-volatile or volatile semiconductor memory such as a RAM (Random Access Memory), a ROM (Read Only Memory), a flash memory, an EPROM (Erasable Programmable Read Only Memory), an EEPROM (registered trademark) (Electrically Erasable Programmable Read-Only Memory), a magnetic disk, a flexible disk, an optical disk, a compact disk, a mini disk, or a DVD (Digital Versatile Disk).

[0046] 9 is a diagram showing a processing circuit 93 in the case where the control unit 6 of the pulse power supply 1 according to the first embodiment is realized by the processing circuit 93. In other words, the control unit 6 may be realized by the processing circuit 93. The processing circuit 93 is a dedicated hardware. The processing circuit 93 is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field-Programmable Gate Array), or a combination of these.

[0047] Some of the functions of the control unit 6 may be realized by software or firmware, and the remaining functions may be realized by dedicated hardware. In this way, the functions of the control unit 6 can be realized by hardware, software, firmware, or a combination of these.

[0048] The control unit 6 of the pulse power supply device 1A according to the second embodiment may be realized by a processor or a processing circuit. The processor is the same as the above-mentioned processor 91. The processing circuit is the same as the above-mentioned processing circuit 93.

[0049] The configurations shown in the above embodiments are merely examples, and may be combined with other known technologies, or the embodiments may be combined with each other. Also, parts of the configurations may be omitted or modified without departing from the spirit of the invention. [Explanation of symbols]

[0050] 1, 1A pulse power supply device, 2 pulse generating section, 3 DC power supply, 4 first positive / negative switching section, 5 second positive / negative switching section, 6 control section, 41 first output terminal, 51 second output terminal, 91 processor, 92 memory, 93 processing circuit, Ci-1, Ci, Ci+1, C0, C1, C2 capacitors, Dcon11, Dcon12, Dcon21, Dcon22, Dsw1, Dsw2 diodes, Li1 first inductor, Li2 second inductor, L11, L12, L21, L22 inductor, MS oversaturated inductor, Ncon1 second negative terminal switching element, Ncon2 first negative terminal switching element, Nswi1, Nsw11, Nsw21 negative side switching element, Pcon1 second positive terminal switching element, Pcon2 first positive terminal switching element, Pswi2, Psw12, Psw22 Positive switching element, Vout output terminal.

Claims

1. a plurality of first inductors connected in series and positioned in a first row; a second series of inductors connected in series to each other; A plurality of capacitors; A plurality of negative switching elements; A plurality of positive switching elements; a first positive terminal switching element connected to a first inductor located at one end of the plurality of first inductors and to a first output terminal; a first negative terminal switching element connected to a second inductor located at one end of the plurality of second inductors and to the first output terminal; a second positive terminal switching element connected to a first inductor located at the other end of the plurality of first inductors and to a second output terminal; a second negative terminal switching element connected to a second inductor located at the other end of the plurality of second inductors and to the second output terminal; a DC power source connected to the second positive terminal switching element and the second negative terminal switching element; A control unit that controls the on and off timing of all of the negative pole side switching elements, the positive pole side switching elements, the first positive pole terminal switching element, the first negative pole terminal switching element, the second positive pole terminal switching element, and the second negative pole terminal switching element, an i-th capacitor of the plurality of capacitors is connected to a second end of a first inductor located in the i-th row and the first column of the plurality of first inductors and a second end of a second inductor located in the i-th row and the second column of the plurality of second inductors; i is an integer equal to or greater than 1; an i-th negative pole side switching element of the plurality of negative pole side switching elements is connected to a second end of a first inductor located in the i-th row and the first column of the plurality of first inductors and a first end of a second inductor located in the i-th row and the second column of the plurality of second inductors; an i-th positive pole side switching element of the plurality of positive pole side switching elements is connected to a first end of a first inductor located in the i-th row and first column of the plurality of first inductors and a second end of a second inductor located in the i-th row and second column of the plurality of second inductors; Before a pulse voltage is generated, all of the plurality of capacitors are charged by the DC power source, and when a pulse voltage is generated, all of the plurality of capacitors are connected in series; An end of the second positive terminal switching element that is not connected to the first inductor and an end of the second negative terminal switching element that is not connected to the second inductor are connected to the positive side of the DC power supply and the second output terminal, and are grounded. An end of the second positive terminal switching element that is connected to the first inductor and an end of the second negative terminal switching element that is connected to the second inductor are connected to the negative side of the DC power supply. An output pulse is output from the first output terminal and the second output terminal. The control unit turns the first positive terminal switching element and the second positive terminal switching element on, then turns the positive side switching elements on, then turns the positive side switching elements off, then turns the first positive terminal switching element and the second positive terminal switching element off, then turns the first negative terminal switching element and the second negative terminal switching element on, turns the negative side switching elements on, then turns the negative side switching elements off, and repeatedly performs the operation of turning the first negative terminal switching element and the second negative terminal switching element off. A pulse power supply device characterized by:

2. Each of the plurality of second inductors is a saturable inductor.

2. The pulse power supply according to claim 1.

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