LAMP, LIGHT SOURCE DEVICE, EXPOSURE DEVICE, AND ARTICLE MANUFACTURING METHOD

Abstract

To provide an advantageous technique for allowing a lamp to stably emit light.SOLUTION: A lamp has an arc tube having a luminescent spot, shells connected to end parts of the arc tube, and fins provided around the shell. The fin has a first surface closer to the luminescent spot, and a second surface which is farther from the luminescent spot and is on the opposite side of the first surface, a distance between a luminescent spot face being a flat surface orthogonal to the central axis of the shell including the luminescent spot and a first inner edge on the first surface is shorter than a distance between the luminescent spot face and a first outer edge on the first surface, and a distance between the first inner edge and the first outer edge on the first surface is a distance between a second inner edge and a second outer edge on the second surface or more.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a lamp, a light source device, an exposure device, and an article manufacturing method. [Background technology]

[0002] An exposure apparatus is used in a lithography process for manufacturing devices such as semiconductor devices or display devices. A light source device is built into the exposure apparatus, and the light source device may include a replaceable lamp. The lamp may include, for example, a pair of bases, a light emitting tube arranged between the pair of bases, and a pair of electrodes arranged in the light emitting tube and connected to the pair of bases, and mercury or the like may be enclosed in the light emitting tube as a light emitting material. An arc discharge occurs between the pair of electrodes by supplying power between the pair of electrodes through the pair of bases, and the lamp may emit light. When the lamp is emitting light, the temperature of the base becomes high, so it is necessary to cool the base. Patent Document 1 describes a light source device in which fins for improving cooling efficiency are provided on the base portion and cooling the base portion is cooled by blowing cooling air against the fins. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2003-17003 A Summary of the Invention [Problem to be solved by the invention]

[0004] As lamps become more powerful, the temperature of the base tends to rise. In order to cool the base sufficiently, it is necessary to blow gas onto the base at a sufficient flow rate. However, if the arc tube is cooled excessively by the gas, the luminous substances such as mercury in the arc tube cannot be evaporated sufficiently, which may cause the lamp to fail to light.

[0005] The present invention provides an advantageous technique for making a lamp emit light stably. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a lamp comprising: an arc tube having a bright spot; a base connected to an end of the arc tube; and fins provided around the base, wherein the fins have a first side close to the bright spot and a second side opposite the first side farther from the bright spot, wherein the distance between a bright spot surface, which is a plane perpendicular to the central axis of the base and including the bright spot, and a first inner edge on the first side is shorter than the distance between the bright spot surface and a first outer edge on the first side, and the distance between the first inner edge and the first outer edge on the first side is greater than the distance between a second inner edge and a second outer edge on the second side. Effect of the Invention

[0007] According to the present invention, an advantageous technique for stably emitting light from a lamp is provided. [Brief description of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram illustrating a configuration of an exposure apparatus. [Diagram 2] FIG. 2 is a diagram illustrating a configuration of a light source device. [Diagram 3] FIG. 4 is a diagram showing an example of lead wire arrangement. [Figure 4] FIG. 2 is a diagram illustrating a configuration of a light source device. [Diagram 5] FIG. 4 is a diagram illustrating a nozzle in the light source device. [Figure 6] FIG. 2 is a diagram showing a schematic configuration of a base of a lamp. [Figure 7] A diagram explaining the gas flow around the nozzle. [Figure 8] FIG. 1 shows the configuration of the experimental system. [Figure 9] FIG. 13 is a diagram showing the shapes of multiple fins used in a comparative experiment. [Figure 10] FIG. 13 is a diagram showing the air flow velocity distribution with the nozzle removed. [Figure 11] 6A and 6B are diagrams illustrating differences in air flow velocity distribution due to differences in fin shapes. [Figure 12] 13A and 13B are diagrams showing modified examples of the fin shape. [Figure 13] FIG. 2 is a diagram illustrating a configuration of a light source device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments will be described in detail with reference to the attached drawings. Note that the following embodiments do not limit the invention according to the claims. Although the embodiments describe a number of features, not all of these features are essential to the invention, and the features may be combined in any manner. Furthermore, in the attached drawings, the same reference numbers are used for the same or similar configurations, and duplicated descriptions are omitted.

[0010] In this specification and the accompanying drawings, directions are indicated in an XYZ coordinate system with the horizontal plane as the XY plane. In general, the substrate to be exposed is mounted on a substrate stage so that its surface is parallel to the horizontal plane (XY plane). Therefore, in the following, the directions that are perpendicular to each other in a plane along the substrate surface are referred to as the X-axis and Y-axis, and the direction perpendicular to the X-axis and Y-axis is referred to as the Z-axis. In the following, the directions that are parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are referred to as the X-direction, Y-direction, and Z-direction, respectively.

[0011] First Embodiment FIG. 1 shows the configuration of an exposure apparatus 100 according to a first embodiment of the present invention. The exposure apparatus 100 is an apparatus that forms a latent image pattern corresponding to the pattern of an original on a substrate coated with a photosensitive agent by projecting the pattern of the original on the substrate via a projection optical system. The exposure apparatus 100 may include, for example, a light source device 110, a shutter device 120, an illumination optical system 130, an original holding unit 140, a projection optical system 150, and a substrate holding unit 160. The light source device 110 may include a holding unit 20 that holds a lamp 10. The original holding unit 140 holds an original 142. The original holding unit 140 is positioned by an original positioning mechanism (not shown), and the original 142 can be positioned thereby. The substrate holding unit 160 holds a substrate 162. The exposure apparatus 100 is supplied with a substrate 162 coated with a resist (photosensitive material) by a resist coating device. The substrate holder 160 is positioned by a substrate positioning mechanism (not shown), whereby the substrate 162 can be positioned.

[0012] The shutter device 120 is disposed so as to be able to block a light beam in the optical path between the light source device 110 and the original holding unit 140. The illumination optical system 130 illuminates the original 142 using light from the light source device 110. The projection optical system 150 projects the pattern of the original 142 illuminated by the illumination optical system 130 onto the substrate 162, thereby exposing the substrate 162. As a result, a latent image pattern is formed in the resist applied to the substrate 162. The latent image pattern is developed by a developing device (not shown), thereby forming a resist pattern on the substrate 162.

[0013] 2 shows the configuration of light source device 110. Light source device 110 may include a holder 20 that holds lamp 10, a condensing mirror 50 that condenses light generated by lamp 10, and nozzles 42a, 42b having injection holes that inject gas for cooling bases 11a, 11b of lamp 10. Light source device 110 may also include a power supply unit (lamp power supply) 30 that supplies power to lamp 10 through lead wires (cables) 32a, 32b, and a gas supply unit 40 that supplies gas to nozzles 42a, 42b through supply pipes 41a, 41b, respectively.

[0014] The lamp 10 may be, for example, a short-arc type lamp such as a mercury lamp, a xenon lamp, or a metal halide lamp. The light collecting mirror 50 may be, for example, an elliptical mirror having two focal points FP1 and FP2. The bright spot AP of the lamp 10 is located at or near the first focal point FP1, and the light collecting mirror 50 may reflect the light emitted from the bright spot AP and collect it at the second focal point FP2. The diameter of the opening of the light collecting mirror 50 may depend on the size of the lamp 10, but may be, for example, 300 to 400 mm. The lamp 10 may be disposed on the optical axis OAX (the axis connecting the first focal point FP1 and the second focal point FP2) of the light collecting mirror 50. The nozzles 42a and 42b may be disposed so as to blow high-pressure air supplied from the gas supply unit 40 onto the bases 11a and 11b, respectively. This cools the bases 11a and 11b. The nozzle 42a can be disposed outside the effective light beam 52 so as not to block the effective light beam 52 reflected by the collecting mirror 50. The bases 11a and 11b may be cooled using a cooling medium other than air, such as a gas such as nitrogen or helium.

[0015] The lamp 10 may include an arc tube 13 having a bright point AP, a pair of bases 11a, 11b connected to both ends of the arc tube 13, and stems 14a, 14b extending from the bases 11a, 11b, respectively. The arc tube 13 may be disposed between the stems 14a, 14b. The stems 14a, 14b and the arc tube 13 may be integrally configured. The lamp 10 may further include a pair of electrodes 12a, 12b disposed within the stems 14a, 14b and the arc tube 13. In one example, the base 11a may be an anode base, the base 11b may be a cathode base, the electrode 12a may be an anode, and the electrode 12b may be a cathode.

[0016] The base 11a and the electrode 12a may be connected by a connecting part such as molybdenum foil. Similarly, the base 11b and the electrode 12b may be connected by a connecting part such as molybdenum foil. A rare gas such as neon or xenon, or a metal such as mercury, sodium, or scandium, or a mixture of these may be enclosed inside the light emitting tube 13. Light is emitted by an arc discharge between the pair of electrodes 12a and 12b. The bases 11a and 11b may be connected to a power supply unit 30 by lead wires 32a and 32b, respectively. FIG. 2 shows an example in which the lead wires 32a and 32b are connected to the side surfaces of the bases 11a and 11b, respectively, but as illustrated in FIG. 3(a), the lead wires 32a and 32b may be connected to the end surfaces of the bases 11a and 11b, respectively. 3(b), the lead wires 32a, 32b may be connected to the bases 11a, 11b via connectors 11c, 11d such as a lead wire connection terminal, an adapter, or a fixing metal fitting, respectively. The lead wires 32a, 32b may be made of a conductive wire material or other conductive material.

[0017] In the following, when the bases 11a and 11b are described without distinction, they are referred to as base 11. The description of the base 11 refers to the base 11a and / or base 11b. Similarly, when the lead wires 32a and 32b are described without distinction, they are referred to as lead wire 32. The description of the lead wire 32 refers to the lead wire 32a and / or lead wire 32b. Similarly, when the nozzles 42a and 42b are described without distinction, they are referred to as nozzle 42. The description of the nozzle 42 refers to the nozzle 42a and / or nozzle 42b. Similarly, when the supply tubes 41a and 41b are described without distinction, they are referred to as supply tube 41. The description of the supply tube 41 refers to the supply tube 41a and / or supply tube 41b.

[0018] FIG. 4 shows a schematic arrangement example of the base 11, the nozzle 42, and the collecting mirror 50. FIG. 4(a) shows a plan view seen from the Z direction, that is, an orthogonal projection onto the XY plane. FIG. 4(b) shows a side view seen from the Y direction, that is, an orthogonal projection onto the XZ plane, which is a plane parallel to the central axis CAX of the base 11. The base 11 may have a cylindrical surface CS and at least one cooling fin 15 extending radially outside the cylindrical surface. The nozzle 42 has an injection hole 45 that injects gas for cooling the base 11. The injection hole 45 has a central axis HAX. For example, when the injection hole 45 has a cylindrical shape, the central axis HAX of the injection hole 45 coincides with the central axis of the cylindrical shape. The nozzle 42 is arranged at a position where the central axis HAX intersects with the center of the base 11 or at least a part of the base 11 or the fin 15. The flows of gas injected from the injection hole 45 are shown diagrammatically as F1, F2, and F3.

[0019] 5 illustrates an example of the structure of the nozzle 42 and the supply pipe 41. The nozzle 42 can be joined or coupled to the supply pipe 41 so that no air or gas leaks occur. The injection hole 45 of the nozzle 42 can be, for example, a circular opening with a diameter ΦD in the range of 1 mm or more and 2 mm or less. The flow velocity distribution of the air or gas injected from the injection hole 45 can be symmetrical about the central axis HAX of the injection hole 45. The flow rate of the air or gas injected from the injection hole 45 can be set to, for example, in the range of 0.02 cubic meters per minute or more and 0.2 cubic meters per minute or less when converted to 20° C. and 1 atmospheric pressure.

[0020] In one example, the base 11, the fins 15, and the nozzle 42 are disposed at a position higher than the open end 50a of the collector mirror 50, as shown in FIG. 4(b). In this case, the nozzle 42 is disposed so that a straight line including the central axis HAX of the injection hole 45 is perpendicular to the central axis CAX of the base 11. In one example, the elevation angle of the central axis HAX of the injection hole 45 of the nozzle 42 may be within a range of −10° or more and +10° or less, and the angle of the central axis CAX of the base 11 with respect to the vertical direction (Z-axis direction) may be within a range of −10° or more and +10° or less. From another perspective, in a plane including the central axis HAX of the injection hole 45 and parallel to the central axis CAX of the base 11, an angle formed by a straight line L1 including the central axis HAX of the injection hole 45 and a plane perpendicular to the central axis CAX of the base 11 may be within a range of −10° or more and +10° or less.

[0021] FIG. 6 shows an example of the configuration of the base 11 and the fin 15. The first surface 15a and the second surface 15b are surfaces that essentially constitute the fin, and can be regarded as one surface including discontinuous surfaces. The inner edge (inner circumference) refers to a curved portion where the cylindrical surface CS of the base 11 intersects with the first surface 15a, or a curved portion where the cylindrical surface CS of the base 11 intersects with the second surface 15b. The outer edge (outer circumference) refers to a curved portion on the first surface 15a and the second surface 15b that is far from the central axis CAX of the base. That is, on the first surface 15a or the second surface 15b, the inner edge is a curved portion close to the central axis CAX of the base, and the outer edge is a curved portion far from the central axis CAX of the base and located outside the inner edge.

[0022] The fin 15 may have a first surface 15a close to the lamp's bright spot AP and a second surface 15b on the opposite side to the first surface 15a, far from the lamp's bright spot AP. The fin 15 may have a shape that is axially symmetrical with respect to the central axis CAX of the base 11. Here, in FIG. 6, a plane that includes the bright spot AP and is perpendicular to the central axis CAX of the base 11 is defined as a bright spot surface P. The bright spot surface P may typically be a horizontal plane. If the distance between an inner edge 151 (first inner edge) of the first surface 15a and the bright spot surface P is h1, and the distance between an outer edge 152 (first outer edge) of the first surface 15a and the bright spot surface P is h2, then h1 and h2 have a relationship of h2>h1. That is, when the first surface 15 ahas a shape in which the distance from the bright spot surface P, which is a plane perpendicular to the central axis CAX of the base 11 including the bright spot AP, is shorter at the inner edge 151 than at the outer edge 152. In other words, the distance between the bright spot surface P and the inner edge 151 is shorter than the distance between the bright spot surface P and the outer edge 152.

[0023] The first surface 15a may include a slope that slopes away from the bright spot surface P from the inner edge 151 toward the outer edge 152. In the example of FIG. 6, the slope may form a part of a conical surface with the central axis CAX of the base 11 as the conical axis. On the other hand, the second surface 15b is, for example, a plane perpendicular to the central axis CAX of the base 11. If the distance between the inner edge 151 and the outer edge 152 on the first surface 15a is R1, and the distance between the inner edge 153 (second inner edge) and the outer edge 154 (second outer edge) on the second surface 15b is R2, R1 and R2 have a relationship of R1≧R2. In other words, the distance between the inner edge 151 and the outer edge 152 on the first surface 15a is equal to or greater than the distance between the inner edge 153 and the outer edge 154 on the second surface 15b.

[0024] The flow of gas around the base 11 in this embodiment will be described with reference to Figures 7(a) and 7(b). Figure 7(a) is a plan view of the base 11 seen from the Z direction, and Figure 7(b) is a side view of the base 11 seen from the Y direction, and each is an enlarged view of the vicinity of the fin 15 in Figures 4(a) and 4(b).

[0025] According to FIG. 7(a), the air flow F1 ejected from the nozzle 42 is divided into two flows F2 at the side of the nozzle 11, and after flowing along the side of the nozzle 11, the two flows F2 merge again to form a flow F3. Referring to FIG. 7(b), when focusing on the flows on the upper and lower surfaces of the fin 15, the air flow F1 ejected from the nozzle 42 is separated vertically by the outer peripheral portion 15c of the fin 15 (corresponding to the outer edges 152 and 154 in FIG. 6) and forms a flow F2 along the circumference of the cylindrical surface CS. Downstream of the flow F2, the flow along the second surface 15b does not change height and becomes a flow F22, and the flow along the first surface 15a changes direction due to the Coanda effect and becomes an upward flow F21. The flow F22 and the flow F21 merge at the outer peripheral portion 15c' on the opposite side of the outer peripheral portion 15c to form an upward flow F3.

[0026] 6 and 7, the number of fins provided on the base 11 is three, but the present invention is not limited to this. The number of fins 15 may be one or more. Furthermore, a plurality of nozzles 42 may be provided corresponding to the plurality of fins 15. Furthermore, the fins 15 may be integrally formed with the base 11, or may be joined to the base 11 by a method such as bonding or press-fitting. Furthermore, the fins 15 may be provided on the connector 11c or 11d shown in FIG. 3(b) and connected to the bases 11a and 11b.

[0027] FIG. 8 shows a side view of an experimental system used to measure the flow of air injected from the nozzle 42. A straight line L1 including the central axis HAX of the injection hole 45 is perpendicular to the central axis CAX of the nozzle 11, and passes through the center of the nozzle in the height direction (Z direction). D1 indicates the distance between the tip of the nozzle 42 and the cylindrical surface CS1. F1 indicates the air flow from the injection hole 45 to the cylindrical surface CS1, and F3 indicates the air flow after passing through the cylindrical surface CS1. A position separated by a distance D2 in the X direction from the cylindrical surface CS1 was set as the measurement position for the flow velocity distribution, and the flow velocity distribution in the Z direction was measured. The diameter Φ of the cylindrical surface CS was 40 mm, the ΦD of the injection hole 45 of the nozzle 42 was 1.5 mm, and the flow rate of the air injected from the nozzle 42 was 0.05 cubic meters per minute (converted to 20°C and 1 atmospheric pressure).

[0028] FIG. 9 shows a side view of a number of fins used in a comparative experiment. FIG. 9(a) shows the shape of the fin based on this embodiment. Here, the thickness FH1 of the fin is 3 mm, the height dimension FH2 of the cylindrical part between the upper and lower fins is 3 mm, and the extension length FL from the diameter Φ of the cylindrical surface CS1 is 6 mm. The lower first surface and the upper second surface of the fin are the same as those in the example of FIG. 6. That is, the first surface of the fin is, for example, a slope that constitutes a part of a conical surface with the central axis CAX as the conical axis, and the second surface of the fin is, for example, a plane perpendicular to the central axis CAX.

[0029] Fig. 9(b) shows the shape of the fin of the comparative example. The thickness FH1 of the fin of this comparative example is 3 mm, the height dimension FH2 of the cylindrical part between the fins is 3 mm, and the extension length FL from the diameter Φ of the cylindrical surface CS1 is 6 mm. In addition, the lower first surface and the upper second surface of the fin are flat surfaces parallel to each other, and the outer peripheral side surface of the fin is a cylindrical surface. The number of fins is six for both.

[0030] FIG. 10 shows the results of measuring the flow velocity distribution of the air jetted from the nozzle 42 at a position at a distance D1=120 mm from the tip of the nozzle 42. When this measurement was performed, the base 11 shown in FIG. 8 was removed. In other words, there was nothing blocking the flow of air jetted from the nozzle 42. The horizontal axis of the graph in FIG. 10 indicates the position centered on the straight line L1 including the central axis HAX, and the vertical axis indicates the air flow velocity. It can be seen that the air flow velocity distribution is symmetrical with respect to the straight line L1 including the central axis HAX. The distance D1=120 mm is the minimum distance at which the tip of the nozzle 42 does not block the effective light beam 52 shown in FIG. 2 when the diameter of the collector mirror 50 is 300 mm and the diameter Φ of the cylindrical surface CS of the base 11 is 40 mm.

[0031] FIG. 11 shows the results of measuring the flow velocity distribution in the ±Z direction at a position at a distance D2=100 mm from the cylindrical surface CS1. The horizontal axis of the graph in FIG. 11 indicates the position in the Z direction centered on the straight line L1 including the central axis HAX, and the vertical axis indicates the air flow velocity. FIG. 11(a) shows the flow velocity distribution when the fin shape shown in FIG. 9(a) of this embodiment is used, and FIG. 11(b) shows the flow velocity distribution when the fin shape shown in FIG. 9(b) having parallel surfaces is used. It can be seen that the spread of the flow velocity distribution in the ±Z direction is narrower in FIG. 11(a) than in FIG. 11(b), and the maximum flow velocity is higher. It can also be seen that the flow velocity distribution has moved to the +Z side (upper side).

[0032] In one example, the heightwise distance (length of stem 14) between base 11 and arc tube 13 of lamp 10 is approximately 80 mm, and the heightwise distance (Z direction) between upper base 11a and the upper end (opening end) of condensing mirror 50 can be set to approximately 50 mm. Therefore, by adopting the configuration of this embodiment, it is possible to prevent air blown to base 11 from diffusing to areas other than base 11. This prevents air blown to base 11 from directly cooling arc tube 13 of lamp 10 or from flowing into the inner space of condensing mirror 50 to indirectly cool arc tube 13, thereby preventing poor lighting, non-lighting, etc. due to overcooling of lamp 10. Therefore, according to the first embodiment, lamp 10 can emit light stably.

[0033] Furthermore, according to this embodiment, the thickness of the fin is thin at the outer periphery 15c and thickens toward the cylindrical surface CS of the base 11. In other words, the flow path through which the air ejected from the nozzle 42 flows gradually narrows. Therefore, the flow speed of the air ejected from the nozzle 42 increases from the outer periphery 15c of the fin toward the cylindrical surface CS. This improves the cooling efficiency of the base 11.

[0034] Furthermore, as the output of the lamp 10 increases, the lead wire 32a that supplies power to the base 11a is irradiated with the light flux reflected by the collecting mirror 50, which may increase the temperature of the lead wire 32a, resulting in oxidation and deterioration of the lead wire 32a. If a dedicated air blowing mechanism is provided to cool the lead wire 32a, this may increase the cost of the light source device 110 or the running cost of the exposure apparatus 100 due to an increase in the air flow rate. By arranging the lead wire 32a so that an air or gas flow F3 is formed in the portion of the lead wire 32a that is irradiated with the light flux (the portion where the temperature rises), the relevant portion of the lead wire 32a can be cooled at low cost.

[0035] <Second embodiment> The second embodiment will be described below. Matters not mentioned in the second embodiment may follow the first embodiment. Modified examples of the shape of the fins 15 provided on the base 11 in the light source device 110 will be described with reference to Fig. 12. Figs. 12(a) to (i) are cross-sectional views of the base 11 passing through the central axis CAX of the base 11. The shape of each of the fins 15 in Figs. 12(a) to (i) may be axially symmetrical with respect to the central axis CAX.

[0036] Fig. 12(a) shows the shape of the fin shown in the first embodiment. The fin 15 in Fig. 12(a) has a first surface 15a close to the luminous point AP of the lamp and a second surface 15b on the opposite side to the first surface 15a, far from the luminous point AP of the lamp. The first surface 15a may include a slope that slopes away from the luminous point surface P (see Fig. 6) from the inner edge to the outer edge. This slope may, for example, constitute a part of a conical surface with the central axis CAX of the base 11 as the conical axis. In Fig. 12(a), the second surface 15b forms a plane parallel to a plane perpendicular to the central axis CAX of the base 11.

[0037] Figures 12(b) to (i) show modifications of Figure 12(a). Note that in Figures 12(b) to (i), the reference symbols are omitted from the perspective of ease of viewing, and the following describes differences and features from Figure 12(a).

[0038] In FIG. 12(b), the first surface 15a includes a spherical surface, a toroidal surface, or a free-form surface that connects the inner edge and the outer edge. In FIG. 12(c), the first surface 15a is configured by a combination of a conical surface (inclined surface) and a flat surface perpendicular to the central axis CAX of the base 11. In Fig. 12(d), the first surface 15a has a stepped shape that combines a cylindrical or conical surface with a flat surface. This stepped shape may be understood as essentially forming the inclined surface shown in Fig. 12(a) as a whole. This stepped shape is advantageous in that it can be easily manufactured to realize the inclined surface of the first surface 15a in Figs. 12(a) to (c).

[0039] 12(e)-(g) differ from FIG. 12(a)-(d) in the configuration of the second surface 15b. In FIG. 12(a)-(d), the second surface 15b is formed by a plane perpendicular to the central axis CAX of the base 11. In contrast, in FIG. 12(e), the second surface 15b may include a slope that slopes from the inner edge toward the bright spot surface P toward the outer edge. This slope may, for example, constitute a part of a cone surface having the central axis CAX of the base 11 as the cone axis. In FIG. 12(f), the second surface 15b may include a slope that slopes from the inner edge toward the outer edge toward the bright spot surface P. This slope may constitute a part of a cone surface of a cone having the central axis CAX of the base 11 as the cone axis. However, the slope of the cone surface is gentler than that of the first surface 15a. In contrast, in Fig. 12(g), the inclination degree of second surface 15b is the same as that of first surface 15a. In other words, second surface 15b in Fig. 12(g) includes a slope that slopes from the inner edge toward the outer edge at the same inclination degree as first surface 15a in the direction away from bright spot surface P. In other words, fin 15 in Fig. 12(g) is a plate-like fin having a uniform thickness.

[0040] In FIG. 12(h), the side surface of the outer circumferential portion 15c of the fin 15 is formed of a cylindrical surface or a conical surface. In FIG. 12(i), the side surface of the outer circumferential portion 15c of the fin 15 is formed of a toroidal surface or a free curved surface.

[0041] As described above, the fin 15 may have various shapes. Here, in all of these shapes, the distance R1 between the inner edge and the outer edge of the first surface 15a and the distance R2 between the inner edge and the outer edge of the second surface 15b have a relationship of R1≧R2, as shown in Figs. 12(e) and (f). The shape of the fin 15 may be any combination of the first surface 15a and the second surface 15b shown in Figs. 12(a) to (i). At least one of the first surface 15a and the second surface 15b may have an axisymmetric shape with respect to the central axis CAX of the base 11.

[0042] According to the second embodiment, in addition to obtaining the same effects as the first embodiment, it is possible to optimize the flow of gas around the base 11. In addition, it is possible to easily manufacture the fins and reduce costs. Furthermore, it is possible to reduce the risk of injury to a person or object caused by contact with the tip of the fin.

[0043] <Third embodiment> Hereinafter, the configuration of the light source device 110 in the exposure apparatus of the third embodiment will be described with reference to Fig. 13. Matters not mentioned as the third embodiment may follow the first embodiment. Fig. 13 shows a side view showing an example of the arrangement of the base 11, the nozzle 42, and the collector mirror 50 in the light source device 110 of the third embodiment.

[0044] In FIG. 4(b) according to the first embodiment, the base 11, the fins 15, and the nozzle 42 are disposed at a position higher than the opening end 50a of the collector mirror 50. However, in order to increase the efficiency of the collector mirror 50 in capturing light from the lamp 10, the collector mirror 50 may be enlarged, and the position of the opening end 50a of the collector mirror 50 may be higher in the vertical direction (Z-axis direction) than the base 11 of the lamp 10. That is, at least a part of the base 11 and the fins 15 may be disposed at a position lower than the opening end 50a of the collector mirror 50. However, the nozzle 42 is disposed at a position higher than the opening end 50a of the collector mirror 50. FIG. 13 shows such an example.

[0045] In Fig. 13, the nozzle 11 may have a cylindrical surface CS and at least one fin 15 extending radially outward from the cylindrical surface CS. The nozzle 42 has an injection hole 45 that injects gas for cooling the nozzle 11. The injection hole 45 has a central axis HAX. For example, when the injection hole 45 has a cylindrical shape, the central axis HAX of the injection hole 45 coincides with the central axis of the cylindrical shape. The nozzle 42 is disposed at a position where the central axis HAX intersects with the center of the nozzle 11 or at least a part of the nozzle 11 or the fin 15. The flows of gas injected from the injection hole 45 are shown typically as F1, F2, and F3.

[0046] In this embodiment, as described above, the base 11 is disposed below the opening end 50a of the collector mirror 50 (-Z side), while the nozzle 42 is disposed above the opening end 50a of the collector mirror 50 (+Z side). In this configuration, the nozzle 42 is disposed so that a straight line including the central axis HAX of the injection hole 45 intersects with a side surface of the base 11. In one example, the elevation angle of the central axis HAX of the injection hole 45 of the nozzle 42 may be within a range of -30° or more and 0° or less, and the angle of the central axis CAX of the base 11 with respect to the vertical direction (Z-axis direction) may be within a range of -10° or more and +10° or less. From another perspective, in a plane including the central axis HAX of the injection hole 45 and parallel to the central axis CAX of the base 11, an angle formed by a straight line L1 including the central axis HAX of the injection hole 45 and a plane perpendicular to the central axis CAX of the base 11 may be within a range of -30° or more and 0° or less.

[0047] In this embodiment, the configuration of the base 11 and the fins 15 is the same as in the first or second embodiment. As in the first embodiment, a flow F3 in a direction away from the luminous point AP of the lamp can be obtained in the air flow after passing through the cylindrical surface CS of the base 11. Therefore, as shown in FIG. 13, even if the base 11 is disposed below (on the -Z side) the opening end 50a of the collector mirror 50, the air blown onto the base 11 can be prevented from excessively flowing into the inner space of the collector mirror 50. Therefore, in this embodiment, as in the first embodiment, the air blown onto the base 11 is prevented from diffusing to areas other than the base 11, and this makes it possible to prevent poor lighting or non-lighting due to overcooling of the lamp 10.

[0048] <Embodiment of the article manufacturing method> The article manufacturing method of the embodiment will be described below. The article manufacturing method is suitable for manufacturing articles such as devices (semiconductor elements, magnetic storage media, liquid crystal display elements, etc.) and color filters. The article manufacturing method may include an exposure step of exposing a substrate (coated with a photosensitive agent) using the above-mentioned exposure apparatus, a development step of developing the substrate exposed in the exposure step, and a processing step of processing the substrate that has been through the development step to obtain an article. The processing step may include, for example, well-known steps (oxidation, film formation, deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The article manufacturing method of the present embodiment is advantageous in at least one of the performance, quality, productivity, and production cost of the article compared to conventional methods.

[0049] The invention is not limited to the above-described embodiments, and various modifications and variations are possible without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0050] 11a, 11b: base, 10: lamp, 15: fin, 20: holder, 42: nozzle, 45: injection hole, 50: light collecting mirror, 110: light source device, AP: lamp bright spot

Claims

1. a light emitting tube having a bright spot; a base connected to an end of the light emitting tube; and a fin provided around the base, The fin has a first surface close to the bright spot and a second surface opposite the first surface and far from the bright spot, a distance between a bright spot surface, which is a plane perpendicular to a central axis of the base and includes the bright spot, and a first inner edge of the first surface is shorter than a distance between the bright spot surface and a first outer edge of the first surface; a distance between the first inner edge and the first outer edge on the first surface is equal to or greater than a distance between the second inner edge and the second outer edge on the second surface; A lamp characterized by:

2. 2. The lamp according to claim 1, wherein the first surface includes an inclined surface that slopes away from the bright spot surface from the first inner edge toward the first outer edge.

3. 3. The lamp according to claim 2, wherein the inclined surface constitutes a part of a conical surface having the central axis as a cone axis.

4. 4. The lamp according to claim 2, wherein the first surface includes the inclined surface and a flat surface perpendicular to the central axis.

5. 2. The lamp of claim 1, wherein the first surface includes a spherical or toroidal surface connecting the first inner edge and the first outer edge.

6. 6. The lamp according to claim 1, wherein the second surface is a plane perpendicular to the central axis.

7. 6. The lamp according to claim 1, wherein the second surface includes an inclined surface that is inclined in a direction approaching the bright spot surface from the second inner edge toward the second outer edge.

8. 6. The lamp according to claim 1, wherein the second surface includes an inclined surface that is inclined in a direction away from the bright spot surface from the second inner edge toward the second outer edge.

9. 4. The lamp of claim 2 or 3, wherein the second surface includes an inclined surface that slopes in a direction away from the bright spot surface from the second inner edge toward the second outer edge at the same degree of inclination as the first surface.

10. 10. The lamp according to claim 1, wherein at least one of the first surface and the second surface has an axisymmetric shape with respect to a central axis of the base.

11. A holder for holding the lamp according to any one of claims 1 to 10; a focusing mirror for focusing light generated by the lamp; a nozzle having an injection hole for injecting gas for cooling the die; A light source device comprising:

12. 12. The light source device according to claim 11, wherein the nozzle is disposed outside an effective light beam emitted from the lamp and reflected by the condenser mirror.

13. 13. The light source device according to claim 11, wherein a flow velocity distribution of the gas injected from the injection hole is symmetrical with respect to a central axis of the injection hole.

14. 14. The light source device according to claim 11, wherein the light collecting mirror is an elliptical mirror.

15. A light source device according to any one of claims 11 to 14, an illumination optical system that illuminates an original using light from the light source device; a projection optical system that projects the pattern of the original onto a substrate; An exposure apparatus comprising:

16. an exposure step of exposing a substrate using the exposure apparatus according to claim 15; a developing step of developing the substrate exposed in the exposure step; a processing step of processing the substrate that has undergone the developing step to obtain an article; A method for manufacturing an article, comprising:

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