Probe pins, inspection jigs and inspection jig units

Abstract

To provide a probe pin capable of suppressing interference between adjacent linear parts when stretching an elastic part.SOLUTION: A probe pin comprises an elastic part, a first contact part disposed at one end of the elastic part, and a second contact part disposed at the other end of the elastic part. The elastic part includes: a first elastic piece and a second elastic piece; and a through hole provided between the first elastic piece and the second elastic piece. Each of the first elastic piece and the second elastic piece includes a plurality of linear parts and a curved part connected to any one of both ends of each of the adjacent linear parts. A first linear part disposed closest to the first contact part is connected from one end side in a second direction to the first contact part, and a second linear part disposed closest to the second contact part is connected from the same side as the first contact part to the second contact part. Intermediate parts of outer curved parts disposed away from a centerline of the elastic part of the curved part of the first elastic piece and the curved part of the second elastic piece have a greater width than a width of linear parts to which the outer curved parts are connected.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present disclosure relates to a probe pin, an inspection jig, and an inspection jig unit. [Background technology]

[0002] In the manufacturing process of electronic component modules such as cameras or liquid crystal panels, continuity tests and performance characteristic tests are generally performed. These tests are performed by using probe pins to connect terminals for connecting to a main body substrate installed on the electronic component module to terminals of an inspection device.

[0003] An example of such a probe pin is described in Patent Document 1. The probe pin in Patent Document 1 includes an elastic portion having a through hole, a first contact portion disposed at one end of the elastic portion in the longitudinal direction, and a second contact portion disposed at the other end of the elastic portion in the longitudinal direction. The elastic portion of the probe pin has a serpentine shape in which straight portions and curved portions are alternately arranged in succession. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2017-223628 A Summary of the Invention [Problem to be solved by the invention]

[0005] The probe pin has room for improvement in terms of suppressing interference between adjacent straight portions when the elastic portion expands and contracts.

[0006] An object of the present disclosure is to provide a probe pin capable of suppressing interference between adjacent straight portions when an elastic portion expands and contracts. [Means for solving the problem]

[0007] The probe pin according to one aspect of the present disclosure includes: An elastic portion that expands and contracts along a first direction; a first contact portion disposed at one end of the elastic portion in the first direction; a second contact portion disposed at the other end of the elastic portion in the first direction; Equipped with The elastic portion is A first elastic piece and a second elastic piece, a through hole provided between the first elastic piece and the second elastic piece; having Each of the first elastic piece and the second elastic piece is A plurality of straight line portions extending along a second direction intersecting the first direction; a curved portion connected to either of both ends in the second direction of each of the adjacent straight portions; having the straight portions and the curved portions are alternately arranged along the first direction, a first straight portion that is the straight portion disposed closest to the first contact portion in the first direction is connected to the first contact portion from one end side in the second direction; a second straight portion that is the straight portion disposed closest to the second contact portion in the first direction is connected to the second contact portion from the same side as the first contact portion in the second direction, Of the curved portions of the first elastic piece and the second elastic piece, an intermediate portion of an outer curved portion that is positioned away in the second direction from a center line passing through the center of the elastic portion in the second direction has a width greater than the width of the straight portion to which the outer curved portion is connected.

[0008] An inspection tool according to one aspect of the present disclosure includes: The probe pin according to the above aspect, a housing having an accommodating portion therein for accommodating the probe pin with a part of the first contact portion and a part of the second contact portion exposed to the outside; Equipped with The probe pin is a connection portion that connects the first contact portion and the first straight portion, The first straight portion and the connection portion are accommodated in the accommodating portion in a state in which they are in contact with an inner surface of the housing that constitutes the accommodating portion in the first direction.

[0009] An inspection jig unit according to one aspect of the present disclosure includes: A plurality of the inspection jigs of the above aspect are provided. Effect of the Invention

[0010] According to the above-described probe pin, it is possible to realize a probe pin capable of suppressing interference between adjacent linear portions when the elastic portion expands and contracts.

[0011] According to the inspection jig, it is possible to realize an inspection jig capable of suppressing interference between adjacent straight portions of the elastic portion when the probe pin expands and contracts.

[0012] According to the inspection jig unit, it is possible to realize an inspection jig unit that can suppress interference between adjacent straight portions of an elastic portion when a probe pin expands and contracts by using the inspection jig. [Brief description of the drawings]

[0013] [Figure 1] FIG. 1 is a perspective view showing an inspection jig according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a cross-sectional view taken along line II-II in FIG. [Diagram 3] 2 is a first partial plan view of a probe pin accommodated in the inspection jig of FIG. 1; [Figure 4] 2 is a second partial plan view of the probe pin accommodated in the inspection jig of FIG. 1; [Diagram 5] FIG. 2 is a plan view of an inspection jig unit equipped with the inspection jig of FIG. 1. [Figure 6] 1. FIG. 4 is a partial plan view showing a modified example of the probe pin housed in the inspection jig of FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] An example of the present disclosure will be described below with reference to the accompanying drawings. In the following description, terms indicating specific directions or positions (e.g., terms including "upper", "lower", "right" and "left") are used as necessary, but the use of these terms is for the purpose of facilitating understanding of the present disclosure with reference to the drawings, and the meanings of these terms do not limit the technical scope of the present disclosure. In addition, the following description is essentially merely illustrative, and is not intended to limit the present disclosure, its application, or its uses. Furthermore, the drawings are schematic, and the ratios of the dimensions do not necessarily correspond to the real ones.

[0015] As shown in Fig. 1, an inspection jig 10 according to an embodiment of the present disclosure has a housing 20 and a probe pin 30 accommodated inside the housing 20. In this embodiment, the inspection jig 10 has a plurality of probe pins 30. Each probe pin 30 is, for example, an elongated thin plate formed by electroforming using a conductive material, and expands and contracts along a first direction (for example, the Y direction). The probe pins 30 are arranged side by side at intervals in the plate thickness direction (for example, the Z direction) and are accommodated in the housing 20 in a state in which they are electrically independent from each other.

[0016] The housing 20 is, for example, insulating and has a generally rectangular parallelepiped shape, and includes a housing main body 21 and a lid portion 22 as shown in FIG.

[0017] 2, the housing body 21 has a concave accommodation portion 23 provided therein for accommodating the probe pin 30, a first opening 24 provided at one end in the first direction Y, and a second opening 25 provided at the other end in the first direction Y. In this embodiment, the housing body 21 has a plurality of accommodation portions 23. When viewed along the plate thickness direction Z of the accommodated probe pin 30, each accommodation portion 23 has a substantially rectangular shape extending in the longitudinal direction thereof, and is connected to the first opening 24 and the second opening 25.

[0018] The first opening 24 is configured so that only the first contact portion 32 of the probe pin 30 described later can be inserted from the first direction Y. The first opening 24 is connected to a through hole 212 that penetrates a wall portion 211 of the housing main body 21 that constitutes a bottom surface 231 of the storage portion 23 in the first direction Y. One end of the through hole 212 in a second direction (for example, the X direction) intersecting the first direction Y is connected to one side surface 232 of the storage portion 23. The other end of the through hole 212 in the second direction X is connected to the bottom surface 231 of the storage portion 23. A corner portion 233 where the through hole 212 and the bottom surface 231 of the storage portion 23 are connected is C-chamfered. This prevents the probe pin 30 from coming into contact with the housing main body 21 and being damaged when it expands and contracts.

[0019] The second opening 25 is configured so that the entire probe pin 30 can be inserted from the first direction Y. One end of the second opening 25 in the second direction X is connected to one side surface 232 of the accommodating portion 23 in the second direction X, and the other end of the second opening 25 in the second direction X is connected to the other side surface 234 of the accommodating portion 23 in the second direction X.

[0020] The lid portion 22 is attached to the end face of the housing main body 21 on the second opening 25 side, and covers the second opening 25. The lid portion 22 has a through hole 26 capable of accommodating only the second contact portion 33. When the lid portion 22 is attached to the housing main body 21, the through hole 26 is disposed on a virtual straight line L1 that passes through the first opening 24 and extends along the first direction Y. In other words, the through hole 212 of the housing main body 21 and the through hole 26 of the lid portion 22 are disposed coaxially with the virtual straight line L1 as an axis. In this embodiment, the virtual straight line L1 passes through the center in the second direction X of the main body portion 321 of the first contact portion 32 and the third contact portion 332 of the second contact portion 33. One end of the through hole 26 in the second direction X is connected to one side surface 232 of the accommodation portion 23 in the second direction X.

[0021] The probe pin 30 accommodated in the accommodation section 23 has a first straight portion 41 constituting an elastic portion 31 of the probe pin 30, which will be described later, in contact with an inner surface of the housing main body 21, which will be a bottom surface 231 of the accommodation section 23. A part of the first contact portion 32 is exposed to the outside of the housing 20 through the first opening 24. Also, the probe pin 30 accommodated in the accommodation section 23 has a second straight portion 45 and a connection portion 70 constituting an elastic portion 31 of the probe pin 30, which will be described later, in contact with a surface 221 of the lid portion 22 constituting the accommodation section 23, which faces the housing main body 21. A second contact portion 33 of the probe pin 30, which will be described later, is exposed to the outside of the housing 20 through the second opening 25.

[0022] As shown in FIG. 2, the probe pin 30 includes, for example, an elastic portion 31 that expands and contracts along a first direction Y, a first contact portion 32 arranged at one end of the elastic portion 31 in the first direction Y, and a second contact portion 33 arranged at the other end of the elastic portion 31 in the first direction Y.

[0023] As an example, the elastic portion 31 has a meandering shape as a whole, as shown in Fig. 2. The elastic portion 31 has a first elastic piece 40, a second elastic piece 50, and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50, as shown in Figs.

[0024] Each of the first elastic piece 40 and the second elastic piece 50 has a plurality of straight portions and at least one curved portion, and the straight portions and the curved portions are alternately arranged along the first direction Y. Each straight portion extends along the second direction X. The curved portion is connected to either of both ends in the second direction X of each of the adjacent straight portions.

[0025] The multiple straight line portions include a first straight line portion 41, a second straight line portion 45, and third straight line portions 42, 51. The first straight line portion 41 is disposed closest to the first contact portion 32 in the first direction Y. The second straight line portion 45 is disposed closest to the second contact portion 33 in the first direction Y. The third straight line portion 42 is disposed between the first straight line portion 41 and the second straight line portion 45 in the first direction Y. In this embodiment, the first straight line portion 41 and the second straight line portion 45 each constitute a part of the first elastic piece 40. The first straight line portion 41, the second straight line portion 45, and the third straight line portions 42, 51 have approximately the same width W1 (in other words, the length in the first direction Y).

[0026] As shown in FIG. 3, the first linear portion 41 is connected to the first contact portion 32 from one end side in the second direction X (for example, the left side in FIG. 3).

[0027] 4, the second straight portion 45 is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction X (for example, the left side in FIG. 4). In this embodiment, the second straight portion 45 is connected to the second contact portion 33 via a connection portion 70. The connection portion 70 has approximately the same width as the length from the outer end of the straight portion of the first elastic piece 40 to the outer end of the second elastic piece 50 in the first direction Y (in other words, the length in the first direction Y), and no through hole 60 is provided.

[0028] The curved portion includes outer curved portions 43, 52 and inner curved portions 44, 53. The outer curved portions 43, 52 constitute the curved portions of the first elastic piece 40 and the curved portions of the second elastic piece 50 that are disposed away from the center line CL passing through the center of the elastic portion 31 in the second direction X. The inner curved portions 44, 53 constitute the curved portions of the first elastic piece 40 and the curved portions of the second elastic piece 50 that are disposed near the center line CL in the second direction X. In this embodiment, the intermediate portions of the inner curved portions 44, 53, excluding both end portions where the straight portions are connected, have a width W3 that is smaller than the width W2 of the intermediate portions of the outer curved portions 43, 52.

[0029] 3, the intermediate portions 432, 522 of the outer curved portions 43, 52 have a width W2 (in other words, a radial length with respect to the center of curvature of the outer curved portions 43, 52) that is larger than the width W1 of the straight portion to which the outer curved portions 43, 52 are connected. That is, in the outer curved portions 43, 52, the width of the intermediate portions 432, 522 is larger than the width of the end portions 431, 521 to which the straight portions are connected. In this embodiment, the width W2 of the outer curved portions 43, 52 is largest at a width W21 of the intermediate portions 432, 522 that is the farthest from the center line CL in the second direction X, and gradually becomes smaller from this portion toward the center line CL.

[0030] 4, the intermediate portions 442, 532 of the inner curved portions 44, 53 have a width W3 (in other words, a radial length with respect to the center of curvature of the inner curved portions 44, 53) that is larger than the width W1 of the straight portion to which the inner curved portions 44, 53 are connected. That is, the width of the intermediate portions 442, 532 of the inner curved portions 44, 53 is larger than the width of the end portions 441, 531 to which the straight portions are connected. In this embodiment, like the outer curved portions 43, 52, the width W3 of the inner curved portions 44, 53 is also largest at the portion of the intermediate portions 442, 532 that is farthest from the center line CL in the second direction X, and gradually becomes smaller as the portion approaches the center line CL.

[0031] 2, the through hole 60 extends continuously from one end to the other end in the direction in which the elastic portion 31 extends along the shape of the elastic portion 31. That is, the through hole 60 between the straight portion of the first elastic piece 40 and the straight portion of the second elastic piece 50 and the through hole 60 between the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 are connected to each other. In this embodiment, the through hole 60 in the curved portion has a width W5 that is equal to or smaller than the width W4 of the through hole 60 in the straight portion. The widths W4 and W5 of the through hole 60 are, for example, the length of the linear distance between the first elastic piece 40 and the second elastic piece 50.

[0032] 2, the first contact portion 32 has a main body portion 321 to which the first straight portion 41 of the elastic portion 31 is connected, and a first leg portion 322 and a second leg portion 323 each extending from the main body portion 321 in a direction away from the first straight portion 41 along the first direction Y. The first leg portion 322 and the second leg portion 323 are each disposed with a gap 324 therebetween in the second direction X.

[0033] The first leg 322 has a pair of first contact portions 325 provided at an end far from the main body 321 in the first direction Y and spaced apart in the second direction X. A protrusion 326 protruding in a direction approaching the second leg 323 in the second direction X is provided at an end of the first leg 322 far from the main body 321 in the first direction Y. The first contact portions 325 are respectively disposed at both ends of the protrusion 326 in the second direction X. A portion of the protrusion 326 between the pair of first contact portions 325 is recessed in a direction toward the main body 321 along the first direction Y.

[0034] The second leg 323 has a pair of second contact portions 327 provided at an end far from the main body 321 in the first direction Y and spaced apart in the second direction X. A protrusion 328 protruding in a direction approaching the first leg 322 in the second direction X is provided at an end of the second leg 323 far from the main body 321 in the first direction Y. The second contact portions 327 are respectively disposed at both ends of the protrusion 328 in the second direction X. A portion of the protrusion 328 between the pair of second contact portions 327 is recessed in a direction toward the main body 321 along the first direction Y.

[0035] In this embodiment, the pair of first contact portions 325 and the pair of second contact portions 327 are disposed on an imaginary straight line L2 extending along the same second direction X. The gap 324 between the first leg portion 322 and the second leg portion 323 is smallest in the second direction X at the portion where the protrusions 326, 328 are provided.

[0036] 2, the second contact portion 33 has a main body portion 331 to which the connection portion 70 is connected, and a third contact portion 332 provided on the main body portion 331. The main body portion 331 has, for example, a substantially rectangular shape extending along the first direction Y. The third contact portion 332 is provided at an end of the main body portion 331 far from the elastic portion 31 in the first direction Y, and has a curved shape protruding in a direction away from the elastic portion 31 along the first direction Y. A notch 333 is provided at an end of the main body portion 331 close to the elastic portion 31 in the first direction Y. The notch 333 is provided at an end opposite to the end of the main body portion 331 to which the connection portion 70 is connected in the second direction X.

[0037] The probe pin 30 can provide the following effects.

[0038] The probe pin 30 includes an elastic portion 31 that expands and contracts along a first direction, a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction, and a second contact portion 33 disposed at the other end of the elastic portion 31 in the first direction. The elastic portion 31 has a first elastic piece 40 and a second elastic piece 50, and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50. Each of the first elastic piece 40 and the second elastic piece 50 has a plurality of straight portions extending along the second direction and a curved portion connected to either of both ends in the second direction of each of the adjacent straight portions. The straight portions and the curved portions are alternately arranged along the first direction. The first straight portion 41 disposed closest to the first contact portion 32 in the first direction is connected to the first contact portion 32 from one end side in the second direction. The second straight portion 45 disposed closest to the second contact portion 33 in the first direction is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction. Among the curved portions of the first elastic piece 40 and the second elastic piece 50, the intermediate portions 432, 522 of the outer curved portions 43, 52 arranged away from the center line CL in the second direction have a width W2 larger than the width W1 of the straight portion to which the outer curved portions 43, 52 are connected. With this configuration, when the probe pin 30 expands and contracts along the first direction, contact between adjacent straight portions of the elastic portion 31 can be avoided. As a result, the probe pin 30 can be realized in which interference between adjacent straight portions when the elastic portion 31 expands and contracts can be suppressed. In addition, when the probe pin 30 is compressed, the stress applied to the elastic portion 31 can be distributed from the curved portions to the straight portions as a whole, thereby improving the durability of the probe pin 30.

[0039] The through hole 60 in the curved portion has a width W5 that is equal to or smaller than the width W4 of the through hole 60 in the straight portion. With this configuration, when the probe pin 30 expands and contracts along the first direction, contact between adjacent straight portions of the elastic portion 31 can be more reliably avoided. Also, when the probe pin 30 is compressed, the stress applied to the elastic portion 31 can be more reliably dispersed.

[0040] Of the curved portions of the first elastic piece 40 and the second elastic piece 50, the middle portions 442, 532 of the inner curved portions 44, 53 arranged near the center line CL in the second direction have a width W3 smaller than the width W2 of the middle portions 432, 522 of the outer curved portions 43, 52. With this configuration, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be more reliably dispersed.

[0041] Of the curved portions of the first elastic piece 40 and the second elastic piece 50, the intermediate portions 442, 532 of the inner curved portions 44, 53 arranged near the center line CL in the second direction have a width W3 larger than the width W1 of the straight portion to which the inner curved portions 44, 53 are connected. With this configuration, the stress applied to the elastic portion 31 when the probe pin 30 is compressed can be more reliably dispersed.

[0042] The first contact portion 32 has a main body portion 321 to which the first straight portion 41 is connected, and a first leg portion 322 and a second leg portion 323 each extending from the main body portion 321 in a direction away from the first straight portion 41 along the first direction and each arranged with a gap 324 in the second direction. The first leg portion 322 is provided at an end far from the main body portion 321 in the first direction and has a pair of first contact portions 325 arranged at an interval in the second direction. The second leg portion 323 is provided at an end far from the main body portion 321 in the first direction and has a pair of second contact portions 327 arranged at an interval in the second direction. With this configuration, the pair of first contact portions 325 and the pair of second contact portions 327 can slide in the second direction while making contact (wiping) with the test object or the test device, thereby removing foreign matter attached to the test object or the test device. Moreover, the foreign matter removed by wiping can be discharged from the gap 324 between the first leg portion 322 and the second leg portion 323. As a result, the contact reliability of the probe pin 30 can be improved.

[0043] The inspection tool 10 can provide the following effects.

[0044] The inspection jig 10 includes a probe pin 30 and a housing 20 having an internal storage section 23 for storing the probe pin 30 with a part of the first contact section 32 and a part of the second contact section 33 exposed to the outside. The probe pin 30 has a connection section 70 connecting the second contact section 33 and the second straight section 45, and is stored in the storage section 23 with the second straight section 45 and the connection section 70 in contact with the inner surface of the housing 20 constituting the storage section 23 in a first direction. This makes it possible to realize an inspection jig 10 capable of suppressing interference between adjacent straight sections of the elastic section 31 when the probe pin 30 expands and contracts. In addition, it is possible to ensure the strength of the inspection jig 10 when the probe pin 30 is pressed from the first contact section 32 toward the second contact section 33 while ensuring the springiness of the elastic section 31.

[0045] The outer curved portion of the accommodated probe pin 30 has a width extending in the second direction of the curved portion from the outer surface far from the center line CL toward the center line CL. With this configuration, even if the space in the accommodation portion 23 is limited, the probe pin 30 can be operated normally.

[0046] The inspection jig 10 and the probe pin 30 can also be configured as follows.

[0047] 5, an inspection jig unit 1 can be configured with a plurality of inspection jigs 10. The inspection jig unit 1 may include a housing that accommodates and positions the plurality of inspection jigs 10.

[0048] In the above embodiment, the probe pin 30 includes an elastic portion 31 in which the outer curved portion (e.g., curved portion 52) disposed near the virtual straight line L1 and the outer curved portion (e.g., curved portion 43) disposed away from the virtual straight line L1 have substantially the same shape, and the width W21 of the portion farthest from the center line CL in the second direction X is substantially the same, but this is not limited thereto. As shown in FIG. 6, the probe pin 30 may include an elastic portion 31 in which the outer curved portion (e.g., curved portion 52) disposed near the virtual straight line L1 and the outer curved portion (e.g., curved portion 43) disposed away from the virtual straight line L1 have different shapes. In the probe pin 30 of FIG. 6, the width W22 of the portion farthest from the center line CL in the second direction X of the curved portion 52 is larger than the width W23 of the portion farthest from the center line CL in the second direction X of the curved portion 43. The width W2 of the intermediate portion 432 of the curved portion 43 is slightly larger than the width W1 of the straight portion to which the curved portion 43 is connected. With this configuration, the elastic portion 31 can be stretched linearly, and the first contact portion 32 and the second contact portion 33 can be prevented from sliding sideways (that is, from moving in the second direction X).

[0049] It is sufficient that the elastic portion 31 has a plurality of straight portions. It is sufficient that the elastic portion 31 has at least one curved portion.

[0050] The first contact portion 32 and the second contact portion 33 may have any configuration depending on the design of the probe pin 30, etc. For example, the first contact portion 32 and the second contact portion 33 may have contacts of any shape and configuration depending on the object to be inspected or the inspection device. In other words, not only the first contact portion 32 has the first leg portion 322 and the second leg portion 323, but also the second contact portion 33 may have the first leg portion 322 and the second leg portion 323. Both the first contact portion 32 and the second contact portion 33 may have the first leg portion 322 and the second leg portion 323.

[0051] The housing 20 may have any configuration capable of accommodating at least one probe pin 30 .

[0052] The connection portion 70 may be provided on the first straight portion 41 side, not on the second straight portion 45 side. In other words, the probe pin 30 may be accommodated in the accommodating portion 23 in a state in which the first straight portion 41 and the connection portion 70 are in contact with the bottom surface 231 of the housing 20 that constitutes the accommodating portion 23 in the first direction Y.

[0053] Various embodiments of the present disclosure have been described above in detail with reference to the drawings. Finally, various aspects of the present disclosure will be described. In the following description, reference symbols will be used as examples.

[0054] The probe pin 30 according to the first embodiment of the present disclosure is An elastic portion 31 that expands and contracts along a first direction; a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction; a second contact portion 33 disposed at the other end of the elastic portion 31 in the first direction; Equipped with The elastic portion 31 is A first elastic piece 40 and a second elastic piece 50, A through hole 60 provided between the first elastic piece 40 and the second elastic piece 50; having Each of the first elastic piece 40 and the second elastic piece 50 is A plurality of straight line portions extending along a second direction intersecting the first direction; a curved portion connected to either of both ends in the second direction of each of the adjacent straight portions; having the straight portions and the curved portions are alternately arranged along the first direction, a first straight portion 41 that is the straight portion disposed closest to the first contact portion 32 in the first direction is connected to the first contact portion 32 from one end side in the second direction; a second straight portion 45 that is the straight portion disposed closest to the second contact portion in the first direction is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction, Of the curved portions of the first elastic piece 40 and the second elastic piece 50, the intermediate portion of the outer curved portion positioned away in the second direction from the center line CL passing through the center of the elastic portion 31 in the second direction has a width W2 that is larger than the width W1 of the straight portion to which the outer curved portion is connected.

[0055] The probe pin 30 according to the second embodiment of the present disclosure is The through hole 60 in the curved portion has a width W5 which is equal to or smaller than the width W4 of the through hole 60 in the straight portion.

[0056] The probe pin 30 according to the third aspect of the present disclosure is Of the curved portions of the first elastic piece 40 and the second elastic piece 50, the intermediate portion of the inner curved portion located near the center line CL in the second direction has a width W3 that is smaller than the width W2 of the outer curved portion.

[0057] The probe pin 30 according to the fourth aspect of the present disclosure is The elastic portion 31 has a plurality of the outer curved portions, Of the multiple outer curved portions, the intermediate portion of the outer curved portion that is positioned near a virtual straight line L1 that passes through the first contact portion and the second contact portion and extends along the first direction has a width W22 that is larger than a width W23 of the outer curved portion that is positioned away from the virtual straight line.

[0058] The probe pin 30 according to the fifth aspect of the present disclosure is Of the curved portions of the first elastic piece 40 and the second elastic piece 50, the intermediate portion of the inner curved portion that is located near the center line CL in the second direction has a width W3 that is larger than the width W1 of the straight portion to which the inner curved portion is connected.

[0059] The probe pin 30 according to the sixth aspect of the present disclosure is At least one of the first contact portion 32 and the second contact portion 33 is A main body portion 321 to which the straight portion is connected; a first leg portion 322 and a second leg portion 323 each extending from the main body portion 321 in a direction away from the straight portion along the first direction and each disposed with a gap 324 in the second direction; having the first leg portion 322 has a pair of first contact portions 325 provided at an end farther from the main body portion 321 in the first direction and spaced apart in the second direction; The second leg portion 323 is provided at an end farther from the main body portion 321 in the first direction and has a pair of second contact portions 327 spaced apart in the second direction.

[0060] The inspection jig 10 according to the seventh aspect of the present disclosure is The probe pin 30 of the above embodiment, a housing having an accommodating portion for accommodating the probe pin with a part of the first contact portion and a part of the second contact portion exposed to the outside; Equipped with The probe pin 30 is a connecting portion 70 that connects the first contact portion 32 and the first straight portion 41 or the second contact portion 33 and the second straight portion 45; The first straight portion 41 and the connection portion 70 or the second straight portion 45 and the connection portion 70 are accommodated in the accommodating portion 23 in a state in which they are in contact with the inner surface of the housing 20 that constitutes the accommodating portion 23 in the first direction.

[0061] The inspection jig 10 according to the eighth aspect of the present disclosure is The outer curved portion has a width extending in the second direction of the curved portion from an outer surface farther from the center line CL toward the center line CL.

[0062] The inspection jig unit 1 according to the ninth aspect of the present disclosure includes: A plurality of the inspection jigs 10 of the above-mentioned embodiment are provided.

[0063] Any of the above-mentioned various embodiments or modifications may be combined as appropriate to achieve the effects of each of them. In addition, combinations of embodiments, combinations of examples, or combinations of embodiments and examples are possible, and combinations of features of different embodiments or examples are also possible.

[0064] Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various changes and modifications will be apparent to those skilled in the art, and such changes and modifications should be understood to be included within the scope of the present disclosure as defined by the appended claims unless they depart therefrom. [Industrial Applicability]

[0065] The socket of the present disclosure can be applied to, for example, modules that have a business-to-business (BtoB) connector as a connection medium, such as a camera module, and to inspection jigs used to inspect semiconductor packages, such as small outline packages (SOPs), quad flat packages (QFPs), and ball grid arrays (BGAs). [Explanation of symbols]

[0066] 1 Inspection fixture unit 10 Inspection fixture 20. Housing 21 Housing body 211 Wall section 212 Through hole 22 Lid 221 sides 23 Storage unit 231 Bottom 232, 234 Side 233 Corner 24 First opening 25 Second opening 26 Through hole 30 Probe Pins 31 Elastic part 32 1st contact part 321 Main body 322 1st leg 323 Second leg 324 Gap 325 First contact part 326, 328 protrusion 327 Second contact part 33 Second contact part 331 Main body 332 Third contact part 333 Notch 40 First elastic piece 41 1st straight section 42 3rd straight section 43 Outer curved part 431 End 432 Middle section 44 Inner curve 441 End 442 Middle section 45 2nd straight section 50 Second elastic piece 51 3rd straight section 52 Outer curved part 521 End 522 Middle 53 Inner curve 531 End 532 Middle section 60 Through Hole 70 Connection

Claims

1. An elastic portion that expands and contracts along a first direction; a first contact portion disposed at one end of the elastic portion in the first direction; a second contact portion disposed at the other end of the elastic portion in the first direction; Equipped with The elastic portion is A first elastic piece and a second elastic piece, a through hole provided between the first elastic piece and the second elastic piece; having Each of the first elastic piece and the second elastic piece is A plurality of straight line portions extending along a second direction intersecting the first direction; a curved portion connected to either of both ends of each of the adjacent straight portions in the second direction; having the straight portions and the curved portions are alternately arranged along the first direction, a first straight portion that is the straight portion disposed closest to the first contact portion in the first direction is connected to the first contact portion from one end side in the second direction; a second straight portion that is the straight portion disposed closest to the second contact portion in the first direction is connected to the second contact portion from the same side as the first contact portion in the second direction, Among the curved portions of the first elastic piece and the curved portions of the second elastic piece, an intermediate portion of an outer curved portion disposed away in the second direction from a center line passing through a center in the second direction of the elastic piece and extending along the first direction has a width larger than a width of the straight portion to which the outer curved portion is connected, The probe pin, wherein the through hole in the curved portion has a width equal to or smaller than the width of the through hole in the straight portion.

2. 2. The probe pin of claim 1, wherein an intermediate portion of an inner curved portion of the first elastic piece and an intermediate portion of the outer curved portion of the second elastic piece that is disposed near the center line in the second direction has a width smaller than a width of the intermediate portion of the outer curved portion.

3. The elastic portion has a plurality of the outer curved portions, 3. The probe pin of claim 1, wherein an intermediate portion of the outer curved portion that is disposed near an imaginary line that passes through the first contact portion and the second contact portion and extends along the first direction has a width larger than a width of the outer curved portion that is disposed away from the imaginary line.

4. 4. The probe pin of claim 1, wherein an intermediate portion of an inner curved portion of the curved portion of the first elastic piece and the curved portion of the second elastic piece that is disposed near the center line in the second direction has a width greater than a width of the straight portion to which the inner curved portion is connected.

5. At least one of the first contact portion and the second contact portion is A main body portion to which the straight portion is connected; a first leg portion and a second leg portion each extending from the main body portion along the first direction in a direction away from the straight portion and each being disposed with a gap in the second direction; having the first leg portion has a pair of first contact portions provided at an end farther from the body portion in the first direction and spaced apart in the second direction; 5. The probe pin of claim 1, wherein the second leg portion has a pair of second contact portions provided at an end farther from the body portion in the first direction and spaced apart in the second direction.

6. A probe pin according to any one of claims 1 to 5; a housing having an accommodating portion therein for accommodating the probe pin with a part of the first contact portion and a part of the second contact portion exposed to the outside; Equipped with The probe pin is a connecting portion that connects the first contact portion and the first straight portion or the second contact portion and the second straight portion, An inspection jig that is accommodated in the accommodating portion with the first straight portion and the connecting portion or the second straight portion and the connecting portion in contact with an inner surface of the housing that constitutes the accommodating portion in the first direction.

7. 7. The inspection tool of claim 6, wherein the outer curved portion has a width extending in the second direction of the curved portion from an outer surface remote from the centerline toward the centerline.

8. An inspection jig unit comprising a plurality of the inspection jigs according to claim 6 or 7.

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