Inspection fixtures and inspection equipment

Abstract

To provide an inspection jig capable of easily simplifying a configuration for bending a plurality of contact elements in a same direction and an inspection device.SOLUTION: An inspection jig includes: a plurality of rod-shaped contact elements Pr; a first support unit 311 for supporting one end side of the plurality of contact elements Pr; and a second support unit 312 for supporting the other end side of the plurality of rod-shaped contact elements Pr. The first support unit 311 has an opposing support plate B2 that is arranged in an opposed fashion and spaced apart from the second support unit 312 and on which a plurality of through holes E2H through which the plurality of contact elements Pr are inserted. A cross section of each of the through holes E2H has an elliptical shape in which a long axis extends in a predetermined specific direction along a surface direction of the opposing support plate B2.SELECTED DRAWING: Figure 5

Description

[Technical field]

[0001] The present invention relates to an inspection tool having a contact and an inspection device using the same. [Background technology]

[0002] Conventionally, there has been known a probe card that includes a support member having an upper support hole and a lower support hole that respectively position and support the upper and lower parts of a wire probe, and a flexible guide film that supports the middle part of the wire probe by bending it in one direction (see, for example, Patent Document 1). The lower support hole of this support member is formed in a first bottom plate and a second bottom plate that are laminated together. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2012-103125 A Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, in addition to support members that position and support the upper and lower parts of the wire probe, a guide film is required that supports the middle part of the wire probe by bending it in one direction.

[0005] An object of the present invention is to provide an inspection tool and an inspection device that can easily simplify the configuration for bending a plurality of contacts in the same direction. [Means for solving the problem]

[0006] An inspection jig according to one example of the present invention comprises a plurality of rod-shaped contacts, a first support portion supporting one end side of the plurality of contacts, and a second support portion supporting the other end side of the plurality of contacts, the first support portion being arranged opposite and spaced apart from the second support portion and comprising an opposing support plate having a plurality of through holes formed therein through which the plurality of contacts are inserted, the cross section of each of the through holes having an elliptical shape with its major axis extending in a predetermined specific direction along the surface direction of the opposing support plate.

[0007] Moreover, an inspection jig according to one example of the present invention comprises a plurality of rod-shaped contacts, a first support portion supporting one end side of the plurality of contacts, and a second support portion supporting the other end side of the plurality of contacts, the first support portion being arranged opposite and spaced apart from the second support portion and comprising an opposing support plate having a plurality of through holes formed therein through which the plurality of contacts are inserted, the cross section of each of the through holes having an elongated shape in a predetermined specific direction along the surface direction of the opposing support plate, and the inner wall of one end side of each of the through holes in the specific direction comes into contact with the contacts inserted into each of the through holes at two points or two lines.

[0008] An inspection device according to one example of the present invention includes the above-mentioned inspection jig and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected. Effect of the Invention

[0009] The inspection jig and inspection device having such a configuration can easily simplify the configuration for bending a plurality of contacts in the same direction. [Brief description of the drawings]

[0010] [Figure 1] 1 is a conceptual diagram illustrating an example of the configuration of an inspection device 1 that uses an inspection jig 3 according to an embodiment of the present invention. [Diagram 2] 2 is a plan view of the inspection jig 3 shown in FIG. 1 as viewed from the tip side of the contact Pr. [Diagram 3] 3 is an end view taken along line III-III of the inspection jig 3 shown in FIG. 2. [Figure 4] 4 is an end view of the inspection jig 3 shown in FIG. 2 along line IV-IV. [Diagram 5] 13 is a plan view of the opposing support plate B2 viewed from the Z direction with the second support portion 312 and the spacer S removed from the inspection jig 3. FIG. [Figure 6] 6 is a plan view showing a modified example of the opposing support plate B2 shown in FIG. 5. [Figure 7] 1 is an explanatory diagram showing an example of a state in which an inspection jig 3 is in contact with a substrate 100. FIG. [Figure 8] 13 is an enlarged view of a through hole B2H and a contact Pr in opposing support plates B2 and B2a. [Figure 9] 9 is an explanatory diagram showing a modified example of the through hole B2H shown in FIG. 8. FIG. [Figure 10] 13 is an explanatory diagram showing an example of a polygonal through hole B2H. FIG. [Figure 11] 10 is an explanatory diagram conceptually showing the behavior of a plate PL when a contact Pr is pressed into it. FIG. [Figure 12] 4 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in the plate PL. FIG. [Figure 13] 13 is an explanatory diagram conceptually showing the behavior of the plate PL when the pressing load of the contact Pr is released. FIG. [Figure 14] 4 is an enlarged explanatory view of a through hole PLH and a contact Pr formed in the plate PL. FIG. [Figure 15] 13 is an enlarged end view showing the vicinity of a through hole B2H of an opposing support plate B2. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In addition, components with the same reference numerals in each drawing are the same, and their description will be omitted. XYZ orthogonal coordinate axes are appropriately described to indicate the orientation of each drawing. The inspection device 1 shown in FIG. 1 is a device for inspecting a substrate 100, which is an example of an object to be inspected.

[0012] The substrate 100 may be various substrates such as a printed wiring board, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a semiconductor substrate, a package substrate or a film carrier for a semiconductor package, etc. The object to be inspected is not limited to a substrate, but may be an electronic component such as a semiconductor element (IC: Integrated Circuit), or any other object that can be subjected to electrical inspection.

[0013] The inspection device 1 shown in Fig. 1 includes inspection units 4U and 4D, a substrate fixing device 6, and an inspection processing unit 8. The substrate fixing device 6 is configured to fix a substrate 100 to be inspected at a predetermined position. The inspection units 4U and 4D include inspection jigs 3U and 3D. The inspection units 4U and 4D are capable of moving the inspection jigs 3U and 3D in three mutually orthogonal axis directions of X, Y, and Z by a drive mechanism (not shown), and further capable of rotating the inspection jigs 3U and 3D around the Z axis.

[0014] The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection units 4U and 4D are configured to be able to detachably mount inspection jigs 3U and 3D for inspecting the circuit pattern formed on the substrate 100. Hereinafter, the inspection units 4U and 4D are collectively referred to as the inspection unit 4.

[0015] Each of the inspection jigs 3U and 3D includes a plurality of contacts Pr, a support member 31 that holds the tips of the plurality of contacts Pr toward the substrate 100, and a base plate 321. The base plate 321 is provided with electrodes that are in contact with and conductive with the rear ends of the contacts Pr. The inspection units 4U and 4D include a connection circuit (not shown) that electrically connects the rear ends of the contacts Pr to the inspection processing unit 8 via the electrodes of the base plate 321 and switches the connection.

[0016] The contact Pr is a so-called wire probe that is composed of a single member having a substantially rod-like shape. A plurality of through holes that support the contact Pr are formed in the support member 31. Each through hole is arranged so as to correspond to the position of an inspection point set on the wiring pattern of the board 100 to be inspected. This allows the tip of the contact Pr to come into contact with the inspection point of the board 100. The inspection point is, for example, a wiring pattern, a pad, a solder bump, a connection terminal, a through hole, a via, or the like.

[0017] The inspection jigs 3U and 3D are configured similarly to each other, except that they are attached to the inspection units 4U and 4D upside down. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as the inspection jig 3. The inspection jig 3 is replaceable depending on the substrate 100 to be inspected.

[0018] The inspection processing unit 8 includes, for example, a power circuit, a voltmeter, an ammeter, and a microcomputer. The inspection processing unit 8 controls a drive mechanism (not shown) to move and position the inspection units 4U and 4D, and brings the tips of the contacts Pr into contact with the respective inspection points of the board 100. This electrically connects each inspection point to the inspection processing unit 8. In this state, the inspection processing unit 8 supplies an inspection current or voltage to each inspection point of the board 100 via each contact Pr of the inspection jig 3, and performs an inspection of the board 100, such as for a break or short circuit in the circuit pattern, based on a voltage signal or current signal obtained from each contact Pr. Alternatively, the inspection processing unit 8 may measure the impedance of the inspection target based on a voltage signal or current signal obtained from each contact Pr by supplying an AC current or voltage to each inspection point.

[0019] 2, 3 and 4, the support member 31 includes a first support portion 311 that supports the rear end side of the contact Pr, a second support portion 312 that supports the tip side of the contact Pr, a spacing retaining member 7 that retains the first support portion 311 and the second support portion 312 at a distance from each other, and a spacer S.

[0020] The first support portion 311 is configured by stacking an opposing support plate B2 and support plates C1, D, E1, and E2 in the Z direction. The opposing support plate B2 and support plates C1, D, E1, and E2 are stacked in this order from the side closer to the second support portion 312. In other words, the opposing support plate B2 is disposed opposite the second support portion 312, and the plate closest to the second support portion 312 among the multiple plates configuring the first support portion 311 is the opposing support plate B2.

[0021] The first support portion 311 may be composed of a single opposing support plate B2. The first support portion 311 may be composed of four or less plates or six or more plates including the opposing support plate B2.

[0022] The opposing support plate B2 has a through hole B2H for supporting each of the contacts Pr. The support plates C1, D, E1, and E2 have through holes C1H, DH, E1H, and E2H for supporting each of the contacts Pr.

[0023] The rear end side of the contact Pr is inserted into the through holes B2H, C1H, DH, E1H, and E2H. As a result, the rear end side of the contact Pr is supported by the first support portion 311.

[0024] 3 and 4, a spacer S having a substantially rectangular frame shape is laminated on the outer periphery of the opposing support plate B2.

[0025] The second support portion 312 is formed by stacking support plates A, A2, and A3. The support plates A, A2, and A3 are stacked in this order from the side farthest from the first support portion 311. The support plates A, A2, and A3 are formed with through holes AH, A2H, and A3H for supporting the respective contacts Pr. The second support portion 312 may be formed with two or less or four or more support plates.

[0026] The tip side of the contact Pr is inserted into the through holes AH, A2H, and A3H. As a result, the tip side of the contact Pr is supported by the second support portion 312.

[0027] A generally rectangular tubular spacing member 7 extends from the outer periphery of the support plate A3. The support plate A3 and the spacing member 7 are integrally formed. As a result, the support plate A3 and the spacing member 7 form a spacing block B. Note that the support plate A3 and the spacing member 7 may be separate bodies.

[0028] An end face of the spacing member 7 is attached to the surface of the spacer S facing the second support portion 312. As a result, the opposing support plate B2 and the support plate A3, i.e., the first support portion 311 and the second support portion 312, are held apart by a distance equal to the sum of the length of the spacing member 7 in the Z direction and the thickness of the spacer S. The support plates A, A2, A3, the opposing support plate B2, and the support plates C1, D, E1, E2 are held in parallel.

[0029] The spacer S is a member for finely adjusting the distance between the first support portion 311 and the second support portion 312, and the inspection jig 3 does not necessarily need to include the spacer S.

[0030] Furthermore, the spacing member 7 is not limited to a rectangular tubular member. Any spacing member may be used as long as it can keep the first support portion 311 and the second support portion 312 apart from each other. For example, a rod-shaped support may be used as the spacing member.

[0031] The through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are provided perpendicular to the support plates A, A2, and A3, the opposing support plate B2, and the support plates C1, D, E1, and E2 so that one and the same contact Pr is inserted through the through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H. The positions of the corresponding through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H are shifted in the X direction with respect to the perpendicular direction (Z direction) of each plate so that the contact Pr is inclined with respect to the perpendicular direction (Z direction) of each plate.

[0032] As a result, each contact Pr is supported at an incline in the same direction in the X direction with respect to the Z direction. The tip of each contact Pr protrudes from the support plate A when not in contact with the substrate 100. Hereinafter, through holes AH, A2H, A3H, B2H, C1H, DH, E1H, and E2H will be collectively referred to as through hole H. Note that through hole H may penetrate each plate at an incline with respect to the perpendicular direction.

[0033] 5, the through hole B2H of the opposing support plate B2 has an elliptical cross section along the surface direction of the opposing support plate B2.

[0034] The multiple through holes B2H are distributed in a first region P1 and a second region P2 each extending in a generally rectangular shape elongated in the Y direction. The Y direction corresponds to an example of the first direction, and the X direction corresponds to an example of the second direction.

[0035] Each through hole B2H has an elliptical shape with its major axis extending in the X direction. The X direction corresponds to an example of a specific direction along the surface direction of the opposing support plate B2. The major axes of each through hole B2H are aligned in the X direction. In other words, the specific direction is the X direction (second direction).

[0036] The through holes B2H are arranged at equal intervals in the first region P1 and the second region P2. The first region P1 and the second region P2 are spaced apart by a distance greater than the intervals between the through holes B2H in the same region.

[0037] The through holes B2H are arranged in odd-numbered rows Lo and even-numbered rows Le that extend parallel to each other along the Y direction (first direction). Each through hole B2H in the even-numbered row Le is located between each straight line Lxo in the X direction (second direction) that passes through the center of each through hole B2H in the odd-numbered row Lo.

[0038] In each odd-numbered row Lo, the distance Dyo between the centers of adjacent through holes B2H in the Y direction (first direction) is shorter than the distance Dxo between the centers of through holes B2H in adjacent odd-numbered rows Lo in the X direction (second direction). In each even-numbered row Le, the distance Dye between the centers of adjacent through holes B2H in the Y direction (first direction) is shorter than the distance Dxe between the centers of through holes B2H in adjacent even-numbered rows Le in the X direction (second direction).

[0039] In the opposing support plate B2a shown in Fig. 6, the major axes of the through holes B2H are aligned in the Y direction. That is, in the example shown in Fig. 6, the specific direction is the Y direction (second direction), and the X direction corresponds to the first direction.

[0040] The through holes B2H are arranged in odd-numbered rows Lo and even-numbered rows Le that extend parallel to each other along the X direction (first direction). Each through hole B2H in the even-numbered row Le is located between each straight line Lyo in the Y direction (second direction) that passes through the center of each through hole B2H in the odd-numbered row Lo.

[0041] In each odd-numbered row Lo, the distance Dxo between the centers of adjacent through holes B2H in the X direction (first direction) is equal to the distance Dyo between the centers of through holes B2H in adjacent odd-numbered rows Lo in the Y direction (second direction). In each even-numbered row Le, the distance Dxe between the centers of adjacent through holes B2H in the X direction (first direction) is equal to the distance Dye between the centers of through holes B2H in adjacent even-numbered rows Le in the Y direction (second direction).

[0042] 6, the contacts Pr are inclined in the Y direction. The positions of the through holes H of each plate are shifted in the Y direction with respect to the Z axis so that the contacts Pr are inclined in the Y direction with respect to the Z direction.

[0043] The opposing support plate B2 shown in Figure 5 satisfies the following conditions: the long axis of each through hole B2H is aligned in the X direction, and the distance Dyo between the centers of adjacent through holes B2H in the Y direction (first direction) in each odd row Lo is shorter than the distance Dxo between the centers of through holes B2H in adjacent odd rows Lo in the X direction (second direction), and the distance Dye between the centers of adjacent through holes B2H in the Y direction (first direction) in each even row Le is shorter than the distance Dxe between the centers of through holes B2H in adjacent even rows Le in the X direction (second direction).

[0044] As a result, the opposing support plate B2 shown in Fig. 5, which satisfies this condition, has a larger adjacent interval between the contacts Pr in the direction in which the contacts Pr tilt and bend (the X direction for the opposing support plate B2, and the Y direction for the opposing support plate B2a), compared to the opposing support plate B2a in Fig. 6, which does not satisfy this condition. By increasing the adjacent interval between the contacts Pr in the direction in which the contacts Pr bend, the opposing support plate B2 can reduce the risk of the contacts Pr coming into contact with each other more than the opposing support plate B2a.

[0045] 5, the through holes B2H are provided in five zigzag rows in the X direction (specific direction) and twenty zigzag rows in the Y direction (third direction) in the first region P1. Similarly, the through holes B2H are provided in five zigzag rows in the X direction (specific direction) and twenty zigzag rows in the Y direction (third direction) in the second region P2.

[0046] That is, in the first region P1 and the second region P2 in which the through holes B2H are arranged at equal intervals, the number of rows of the through holes B2H corresponding to the X direction (specific direction) is smaller than the number of rows of the through holes B2H corresponding to the Y direction (third direction). Note that the through holes B2H are not limited to being arranged in a zigzag pattern, and may be arranged linearly in the X direction and the Y direction, that is, in a lattice pattern. Also, although an example in which there are two regions in which the through holes B2H are arranged at equal intervals has been shown, there may be one such region, or three or more such regions.

[0047] As described above, the position of each through hole H is shifted in the X direction (specific direction) with respect to the perpendicular direction (Z direction), so the direction of shift of the through holes H is along the X direction (specific direction) in which the number of rows of the through holes H is small.

[0048] When the inspection jig 3 is brought into contact with the substrate 100 to inspect the substrate 100, the tip of each contact Pr is pressed into the second support portion 312, as shown in Fig. 7. At this time, since each contact Pr is supported at an inclination in the same direction in the X direction, it bends in the X direction to absorb the amount of pressing of the contact Pr.

[0049] Here, the bending direction of the contact Pr is along the X direction (specific direction) which is the major axis direction of the through hole B2H, so the inclination direction and bending direction of the contact Pr are also the X direction in which the number of rows of the through holes H is small.

[0050] When the contacts Pr bend, there is an increased risk that the contacts Pr adjacent to each other in the bending direction will come into contact with each other. However, in the inspection jig 3, since each contact Pr bends along the X direction (specific direction) in which the number of rows of the through holes B2H is small, there is a reduced risk that the contacts Pr will come into contact with each other compared to when the contacts Pr bend along the Y direction (third direction) in which the number of rows of the through holes B2H is large.

[0051] For example, as in the case of using the opposing support plate B2a shown in FIG. 6, the specific direction which is the long axis direction of the through holes B2H does not necessarily have to be along the direction in which the number of rows of the through holes B2H is small (the X direction in FIG. 6).

[0052] 8, each contact Pr has a cylindrical shape with a radius r1. The radius of curvature r2 of both ends T in the long axis direction (specific direction) of the cross section of the through hole B2H is smaller than the radius r1 of each contact Pr. As a result, the inner wall of one end side in the long axis direction (specific direction) of the through hole B2H comes into contact with the contact Pr at two contact positions P.

[0053] In this case, if the contact Pr is inclined inside the through hole B2H, the contact Pr will contact the inner wall of the through hole B2H at two points. If the contact Pr extends in the Z direction, i.e., in the axial direction of the through hole B2H, the contact Pr will contact the inner wall of the through hole B2H at two lines.

[0054] In this way, the radius of curvature r2 of both ends T of the through hole B2H is smaller than the radius r1 of each contact Pr, so that the contact Pr can be brought into contact with the inner wall of the through hole B2H at two points or two lines. By bringing the contact Pr into contact with the inner wall of the through hole B2H at two points or two lines, the movement of the contact Pr in the minor axis direction of the through hole B2H (the direction perpendicular to the specific direction) can be reduced.

[0055] In addition, when the radius of curvature r2 of both ends T of the through hole B2H is smaller than the radius r1 of each contact Pr, and each through hole B2H in the even-numbered row Le is positioned between each straight line Lxo passing through the center of each through hole B2H in the odd-numbered row Lo, that is, when the through holes are arranged in a staggered arrangement, the following effect can be obtained. That is, in this case, compared to the case where through holes having an oval cross-sectional shape formed by a pair of parallel lines and a pair of semicircles are arranged in a staggered arrangement, the interval between adjacent through holes B2H in the diagonal direction becomes wider even when the centers of the holes are arranged at the same position. As a result, it becomes easier to narrow the adjacent pitch of the through holes B2H while maintaining the wall thickness between the through holes B2H.

[0056] The cross-sectional shape of the through hole B2H is not necessarily limited to an ellipse. The contact Pr is supported at an angle with respect to the perpendicular line of the opposing support plates B2, B2a. Therefore, the contact Pr contacts only one of both end portions T. Therefore, for example, as shown in FIG. 9, only one end portion T on the contact side of the contact Pr may have a curvature radius r2 smaller than the radius r1 of each contact Pr.

[0057] Furthermore, for example, the cross-sectional shape of the through hole B2H may be polygonal, as shown in Fig. 10. As for the polygonal through hole B2H shown in Fig. 10, only one end T on the side where the contact Pr comes into contact may be polygonal, similar to the through hole B2H shown in Fig. 9.

[0058] That is, the cross section of the through hole B2H has a shape that is elongated in a specific direction along the surface direction of the opposing support plates B2, B2a, and the inner wall of one end side of the through hole B2H in the specific direction and the contact Pr inserted into each through hole B2H are in contact at two points or two lines. If each through hole B2H has such a shape, the contact Pr comes into contact with the inner wall of the through hole B2H at two points or two lines, so that the movement of the contact Pr in the minor axis direction of the through hole B2H can be reduced.

[0059] Furthermore, by having the cross-sectional shape of each through hole B2H be a shape that is elongated in the specific direction, such as an ellipse, the bending directions of each contact Pr are easily aligned. As a result, the variation in the amount of bending of each contact Pr in the direction perpendicular to the specific direction is reduced, making it easy to narrow the interval at which the through holes H are arranged in the direction perpendicular to the specific direction. As a result, it becomes easy to narrow the interval at which the contacts Pr are arranged in the direction perpendicular to the specific direction. Furthermore, since there is no need to use a guide film that supports the middle parts of multiple contacts by bending them in one direction, as in the technology described in Patent Document 1, it becomes easy to simplify the configuration of the inspection jig.

[0060] 3 and 4, the support plates A, A2, A3, the spacing member 7, the spacer S, the opposing support plate B2 (B2a), and the support plates C1, D, E1, E2 are made of an insulating material, for example, a resin material. The opposing support plate B2 (B2a) has a higher bending strength than the support plates C1, D, E1, E2. The opposing support plate B2 (B2a) can be made of a material such as ceramics or fine ceramics.

[0061] The bending strength of the opposing support plates B2, B2a can be evaluated, for example, in accordance with JIS R 1601 "Test method for bending strength at room temperature of fine ceramics" or ISO 14704. The bending strength of the support plates C1, D, E1, E2 can be evaluated, for example, in accordance with JIS K 7171 "Plastics - Determination of bending properties" or ISO 178.

[0062] The bending strength of each plate is evaluated as follows. The two locations sandwiching the through hole through which the contact is expected to pass when the support plate is assembled into the inspection jig, where the stack of the opposing support plates faces the spacing member, are set as external supports, and the approximate center of the two external supports is set as the load point. If the plate shape is such that an opening larger than the indenter of the load measuring instrument is located approximately at the center of the two external supports and the load of the load measuring instrument cannot be applied, the load point may be set as a location where the load can be applied to the plate near the approximate center of the two external supports. The stroke of the load measuring instrument is measured when a predetermined load is applied to the load point to the extent that the plate is not destroyed. The smaller the stroke, the stronger the bending strength can be evaluated. The predetermined load may be any value and is not restricted by the measurement conditions in the above standard. Regardless of the provisions of the above standard for the shape, dimensions, surface roughness, etc. of the test piece, it is sufficient to evaluate the bending strength with the shape and dimensions of the plate as they are without processing it. Regardless of the number of test pieces specified in the above standard, only one plate is required for the evaluation of bending strength.

[0063] The opposing support plates B2 and B2a have a greater bending strength than the support plates C1, D, E1, and E2. As a result, the opposing support plates B2 and B2a reduce the deflection of the support plates C1, D, E1, and E2, and the stress applied to the support parts that support the contacts can be reduced.

[0064] Hereinafter, a mechanism by which stress is applied to the support portions that support the contacts in an inspection jig in which the bending strength of the opposing support plates B2, B2a is not high will be described.

[0065] Specifically, when the inspection jig is brought into contact with the inspection object and the contacts Pr are pushed in and bent, the plate PL is pushed and bent by the bent contacts Pr as shown in Fig. 11. More specifically, as shown in Fig. 12, the bent contacts Pr hit and get caught on the opening edges of the through holes PLH of the plate PL, and strongly press the plate PL.

[0066] In this state, when the inspection jig is separated from the inspection object and the contacts Pr try to return to their original position, the plate PL is pulled by the contacts Pr and bent in the opposite direction, as shown in Fig. 13. More specifically, the bent contacts Pr are pressed strongly against the inner wall of the through hole PLH. Therefore, as shown in Fig. 14, a large frictional force is generated between the contacts Pr and the through hole PLH, and when the contacts Pr return to their original position, the contacts Pr pull the plate PL, causing the plate PL to bend in the opposite direction. In this manner, the bending of the plate PL applies stress to the plate PL, which is a support part that supports the contacts Pr.

[0067] On the other hand, since the inspection jig 3 is provided with the opposing support plates B2, B2a having a bending strength stronger than that of the support plates C1, D, E1, E2, the deflection of the opposing support plates B2, B2a themselves is reduced, and the deflection of the support plates C1, D, E1, E2 is suppressed by the opposing support plates B2, B2a. As a result of the reduction in the deflection of the opposing support plates B2, B2a and the support plates C1, D, E1, E2, it becomes easy to reduce the stress applied to the opposing support plates B2, B2a and the support plates C1, D, E1, E2, which are the support parts that support the contacts Pr.

[0068] 15, the opening edge of the through hole B2H of the opposing support plates B2, B2a is chamfered to form chamfered portions H1, H2. The portion of the inner surface of the through hole B2H excluding the chamfered portions H1, H2 forms a through hole main body portion H3. That is, the inner surface of the through hole B2H includes the through hole main body portion H3 and the chamfered portions H1, H2. In the opposing support plates B2, B2a, for example, a large diameter portion H4 that is coaxial with the through hole B2H and has a diameter larger than that of the through hole B2H is connected to the through hole B2H.

[0069] When the contact Pr is bent, most of the load applied to the first support portion 311 due to the bending is applied to the chamfered portion H1 of the through hole B2H of the opposing support plates B2, B2a. Therefore, the frictional force of the contact Pr is the largest in the through hole B2H among the through holes B2H, C1H, DH, E1H, and E2H.

[0070] Therefore, by chamfering the chamfered portions H1, H2 of the through holes B2H of the opposing support plates B2, B2a, it is possible to reduce the risk of the contacts Pr being damaged by friction with the chamfered portions H1, H2. The chamfering can be a rounded surface with rounded corners, an angular surface with beveled corners, or various other chamfer shapes.

[0071] Of course, the opening edge of the through hole H in the support plates other than the opposing support plates B2, B2a may also be chamfered. As with the through hole B2H, the through hole H in each plate may have a large diameter portion and a small diameter portion connected to each other. In this case, it is preferable that the opening edge of the small diameter portion of the through hole H is chamfered.

[0072] In addition, it is preferable that a lubricating layer 33, for example a coating layer, for reducing friction is formed on the inner surface of each through hole H of the opposing support plates B2, B2a and each of the support plates A, A2, A3, C1, D, E1, and E2 in the inspection jig 3. As shown in Fig. 15, the lubricating layer 33 may be formed on the entire surface of each plate, including the inner surface of each through hole H. However, since the contact Pr does not come into contact with parts other than the inner surface of each through hole H, the lubricating layer 33 does not have to be formed on parts other than the inner surface of each through hole H.

[0073] Moreover, the slip layer 33 may be formed on at least one of the inner surfaces of each through hole H, that is, the through hole main body portion H3 and the chamfered portion H1.

[0074] The thickness of the sliding layer 33 is, for example, about 1 μm. The friction coefficient of the sliding layer 33 with respect to the contact Pr is smaller than the friction coefficient of the base portion 34 of the sliding layer 33 on each plate. The sliding layer 33 can be formed by, for example, vapor deposition of a material with a small friction coefficient. The magnitude of the friction coefficient may be compared by comparing either the kinetic friction coefficients with each other or the static friction coefficients with each other.

[0075] The material of the slip layer 33 may be, for example, a paraxylylene-based polymer, and is preferably an insulating material with a small coefficient of friction, such as Parylene (registered trademark), fluorine, polyester, or acrylic.

[0076] By forming the lubricating layer 33 on the inner surface of the through hole H in this manner, the friction between the through hole H and the contact Pr can be reduced.

[0077] Since the contact Pr bends on the second support portion 312 side of the opposing support plates B2, B2a, the friction between the chamfered portion H1 on the second support portion 312 side and the contact Pr is greater than the friction between the chamfered portion H2 on the support plate C1 side and the contact Pr. Therefore, although an example in which both chamfered portions H1, H2 are chamfered is shown in Fig. 15, of the chamfered portions H1, H2, only the chamfered portion H1 on the second support portion 312 side, which has greater friction with the contact Pr, may be chamfered.

[0078] Alternatively, the chamfered portions H1, H2 in the through holes B2H of the opposing support plates B2, B2a may not be chamfered.

[0079] Furthermore, the contact Pr bends on the side of the second support portion 312 of the opposing support plate B2, B2a. Therefore, the contact pressure between the through hole B2H of the opposing support plate B2, B2a and the contact Pr tends to be larger than the contact pressure between the through hole H of the other support plate and the contact Pr, and friction tends to occur. Therefore, it is sufficient that the lubricating layer 33 is formed on the inner surface of at least each through hole B2H of the opposing support plate B2, B2a, and the lubricating layer 33 does not need to be formed on the other plates.

[0080] Furthermore, it is preferable that the through holes H of the plates other than the support plates A and E2 have a shape similar to that of the through holes B2H of the opposing support plates B2 and B2a. However, when the contact Pr is bent, the load applied to the through holes B2H of the opposing support plates B2 and B2a due to the bending is larger than the load applied to the through holes H of the other plates. Therefore, the shape of the through holes H of the support plates other than the opposing support plates B2 and B2a may be different from that of the through holes B2H, and may be, for example, a circular cross-sectional shape.

[0081] The through hole H of the support plate A, E2 may have the same shape as the through hole B2H of the opposing support plate B2, B2a. However, it is more preferable that the through hole H of the support plate A, E2 has a circular or square cross section from the viewpoint of positioning the ends of the contacts Pr to the test points and the electrodes, respectively.

[0082] The positions of the through holes H of the plates do not necessarily have to be shifted, and the contact Pr is not limited to being supported at an angle. The opposing support plates B2, B2a are not limited to having a bending strength greater than that of the support plates C1, D, E1, E2.

[0083] That is, an inspection jig according to one embodiment of the present invention comprises a plurality of rod-shaped contacts, a first support portion supporting one end side of the plurality of contacts, and a second support portion supporting the other end side of the plurality of contacts, the first support portion being arranged opposite and spaced apart from the second support portion and comprising an opposing support plate having a plurality of through holes formed therein through which the plurality of contacts are inserted, and the cross section of each of the through holes has an elliptical shape with its major axis extending in a predetermined specific direction along the surface direction of the opposing support plate.

[0084] According to this configuration, the rod-shaped contacts are inserted into the through holes with an elliptical cross section, and the long axis direction of the elliptical shape of each through hole is aligned in a specific direction. As a result, the bending direction of each contact is easily aligned in a specific direction. Therefore, unlike the technology described in Patent Document 1, it is easy to align the bending direction of each contact without using a guide film that supports the middle parts of multiple contacts by bending them in one direction, and it is easy to simplify the configuration of the inspection jig.

[0085] It is also preferable that the plurality of contacts have a cylindrical shape, and that the radius of curvature of both ends of the cross section in the specific direction is smaller than the radius of each of the contacts.

[0086] According to this configuration, the contacts come into contact with the inner wall at one end of the through hole in the long axis direction at two points or two lines, thereby reducing the movement of each contact in a direction perpendicular to the specific direction.

[0087] Moreover, an inspection jig according to one example of the present invention comprises a plurality of rod-shaped contacts, a first support portion supporting one end side of the plurality of contacts, and a second support portion supporting the other end side of the plurality of contacts, the first support portion being arranged opposite and spaced apart from the second support portion and comprising an opposing support plate having a plurality of through holes formed therein through which the plurality of contacts are inserted, the cross section of each of the through holes having an elongated shape in a predetermined specific direction along the surface direction of the opposing support plate, and the inner wall of one end side of each of the through holes in the specific direction comes into contact with the contacts inserted into each of the through holes at two points or two lines.

[0088] According to this configuration, the rod-shaped contacts are inserted into through holes having a cross-sectional shape elongated in a specific direction, and the cross-sectional shape of each through hole is aligned in the specific direction. As a result, the bending direction of each contact is easily aligned in the specific direction. Therefore, it is easy to align the bending direction of each contact without using a guide film that supports the middle parts of multiple contacts by bending them in one direction, as in the technology described in Patent Document 1, and it is easy to simplify the configuration of the inspection jig. Furthermore, the inner wall on one end side of each through hole in the specific direction and the contact inserted in each through hole are in contact at two points or two lines. As a result, the movement of each contact in a direction perpendicular to the specific direction can be reduced.

[0089] It is also preferable that the multiple through holes are arranged in odd and even rows extending parallel to each other along a predetermined first direction, and that each through hole in the even rows is located between each straight line in a second direction that passes through the center of each through hole in the odd rows and is perpendicular to the first direction.

[0090] According to this configuration, the contacts can be arranged in a so-called staggered arrangement, which makes it easy to narrow the intervals between the contacts.

[0091] Furthermore, it is preferable that the distance between the centers of the through holes adjacent in the first direction in each odd row is shorter than the distance between the centers of the through holes adjacent in the odd row in the second direction, and the distance between the centers of the through holes adjacent in the first direction in each even row is shorter than the distance between the centers of the through holes adjacent in the even row in the second direction, and the specific direction is the second direction.

[0092] According to this configuration, the specific direction in which the contacts are likely to bend is the second direction. The distance between the centers of adjacent through holes in the second direction is longer than the distance between the centers of adjacent through holes in the first direction. As a result, the distance between adjacent contacts in the direction in which the contacts bend is greater than in the direction perpendicular to the bending direction. By increasing the distance between adjacent contacts in the direction in which the contacts bend, the risk of the contacts coming into contact with each other due to bending can be reduced.

[0093] In addition, it is preferable that an opening edge portion of each of the through holes on the second support portion side is chamfered.

[0094] The contactor bends between the first support portion and the second support portion. That is, the contactor bends on the second support portion side of the opposing support plate located on the second support portion side of the first support portion. Therefore, a load caused by the bending of the contactor is likely to be applied to the opening edge portion on the second support portion side of each through hole of the opposing support plate. With this configuration, the opening edge portion on the second support portion side of each through hole of the opposing support plate, which is likely to be subjected to a load, is chamfered, thereby reducing friction between the opening edge portion of the through hole and the contactor.

[0095] It is also preferable that a lubricating layer is formed on the inner surface of each through hole to reduce friction, and the coefficient of friction of the lubricating layer with respect to the contact is smaller than the coefficient of friction of a base portion of the lubricating layer on the opposing support plate.

[0096] This configuration can reduce friction between the contacts and the inner surfaces of the through holes.

[0097] In addition, the opening edge portion of each of the through holes on the side of the second support portion is chamfered, and a lubricating layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which are the portions of the inner surface of each of the through holes including the chamfered portion, excluding the chamfered portion, and it is preferable that the friction coefficient of the lubricating layer with respect to the contact is smaller than the friction coefficient of the base portion of the lubricating layer on the opposing support plate.

[0098] According to this configuration, it is possible to reduce friction between at least one of the through-hole main body portion and the chamfered portion in each through-hole and the contact.

[0099] Moreover, it is preferable that the first support portion includes a support plate located on the opposite side of the opposing support plate from the second support portion, and that the opposing support plate has a bending strength greater than that of the support plate.

[0100] According to this configuration, the first support portion includes an opposing support plate and a support plate. Since the contactor bends significantly between the first support portion and the second support portion, the opposing support plate closest to the second support portion is most susceptible to the force caused by the bending of the contactor. The opposing support plate that is most susceptible to the force caused by the bending of the contactor has a high bending strength, which makes it easy to reduce the stress applied to the first support portion.

[0101] Further, the first support portion includes a support plate located on the opposite side of the opposing support plate from the second support portion, and the support plate has a plurality of corresponding through holes formed therein so that the same contact is inserted into the plurality of through holes of the opposing support plate, and the corresponding through holes of the opposing support plate and the corresponding through holes of the support plate are offset in position from the direction of the perpendicular line to the opposing support plate so as to incline the contact with respect to the perpendicular line, and it is preferable that the direction of the offset is along the specific direction.

[0102] According to this configuration, it becomes easy to support the contacts at an inclination in a specific direction by the opposing support plate and the through holes of the support plate.

[0103] Furthermore, it is preferable that the multiple through holes are arranged in multiple rows along the specific direction and also in multiple rows along a third direction intersecting the first direction, and that in a region in which the through holes are arranged at equal intervals, the number of rows lined up in the specific direction is less than the number of rows lined up in the third direction.

[0104] According to this configuration, the number of rows of the contacts in the specific direction in which the contacts are more likely to bend is smaller than the third direction in which the contacts are less likely to bend. Therefore, since the contacts are more likely to bend in the direction in which the number of rows of through holes is smaller, i.e., the number of rows of contacts is smaller, the risk of the contacts coming into contact with each other is reduced compared to when the contacts bend along the third direction in which the number of rows is greater.

[0105] An inspection device according to one example of the present invention includes the above-mentioned inspection jig and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by contacting the contactor with an inspection point provided on the object to be inspected.

[0106] According to this configuration, it is easy to simplify the configuration of the inspection jig used for the inspection. [Explanation of symbols]

[0107] 1. Inspection equipment 3,3U,3D inspection fixture 4,4U,4D Inspection Department 6 Board fixing device 7 Spacing member 8 Inspection processing section 31 Support member 33 Slippery layer 34 Base part 100 Circuit board (inspection object) 311 First support part 312 Second support part 321 Base Plate A, A2, A3, C1, D, E1, E2 Support plate H,AH,A2H,A3H,B2H,C1H,DH,E1H,E2H Through hole B Separation block B2, B2a Opposite support plate C1, D, E1, E2 Support plate Dxe, Dxo, Dye, Dyo Distance H1,H2 chamfered part H3 Through hole main body H4 Large diameter section Le even number column Lo Odd number row Lxo,Lyo straight line P Contact position P1 First area P2 Second area PL Plate PLH through hole Pr contact S Spacer T end r1 radius r2 Radius of curvature

Claims

1. A plurality of rod-shaped contacts; A first support portion that supports one end side of the plurality of contacts; a second support portion supporting the other end side of the plurality of contacts, the first support portion includes an opposing support plate disposed opposite to and spaced apart from the second support portion and having a plurality of through holes formed therein through which the plurality of contacts are inserted; An inspection jig in which the cross-section of each of the through holes has an elongated shape in a predetermined specific direction along the surface direction of the opposing support plate, and the inner wall of one end side of each of the through holes in the specific direction comes into contact with a contactor inserted into each of the through holes at two points or two lines.

2. The plurality of through holes are arranged in odd-numbered rows and even-numbered rows extending parallel to each other along a predetermined first direction, The inspection jig according to claim 1 , wherein each of the through holes in the even-numbered rows is positioned between each of straight lines in a second direction that passes through a center of each of the through holes in the odd-numbered rows and is perpendicular to the first direction.

3. a distance between centers of the through holes adjacent to each other in the first direction in each odd-numbered row is shorter than a distance between centers of the through holes adjacent to each other in the second direction in each odd-numbered row, a distance between centers of the through holes adjacent to each other in the first direction in each of the even-numbered rows is shorter than a distance between centers of the through holes adjacent to each other in the second direction in each of the even-numbered rows, The inspection tool according to claim 2 , wherein the specific direction is the second direction.

4. The inspection jig according to any one of claims 1 to 3, wherein an opening edge portion of each of the through holes on the second support portion side is chamfered.

5. A lubricating layer is formed on the inner surface of each of the through holes to reduce friction; 5. The inspection jig according to claim 1, wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer on the opposing support plate.

6. An opening edge portion of each of the through holes on the second support portion side is a chamfered portion, A slip layer for reducing friction is formed on at least one of the through hole main body portion and the chamfered portion, which is a portion of the inner surface including the chamfered portion of each of the through holes excluding the chamfered portion, and 5. The inspection jig according to claim 4, wherein the coefficient of friction of the sliding layer with respect to the contact is smaller than the coefficient of friction of a base portion of the sliding layer on the opposing support plate.

7. The first support portion includes a support plate located on the opposite side of the opposing support plate from the second support portion, The inspection jig according to any one of claims 1 to 6, wherein the opposing support plate has a bending strength greater than that of the support plate.

8. The first support portion includes a support plate located on the opposite side of the opposing support plate from the second support portion, The support plate is formed with a plurality of through holes corresponding to the plurality of through holes of the opposing support plate such that the same contacts are inserted therethrough, the corresponding through holes of the opposing support plate and the corresponding through holes of the support plate are offset from each other with respect to a direction of a perpendicular line to the opposing support plate so that the contacts are inclined with respect to the perpendicular line, The inspection tool according to any one of claims 1 to 7, wherein the direction of the deviation is along the specific direction.

9. An inspection jig as described in any one of claims 1 to 8, wherein the multiple through holes are arranged in multiple rows along the specific direction and also in multiple rows along a third direction intersecting the first direction, and within a region in which the through holes are arranged at equal intervals, the number of rows lined up in the specific direction is less than the number of rows lined up in the third direction.

10. An inspection tool according to any one of claims 1 to 9, and an inspection processing unit that inspects the object to be inspected based on an electrical signal obtained by bringing the contactor into contact with an inspection point provided on the object to be inspected.

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