How to shape a cutting blade

Abstract

To provide a cutting blade shaping method capable of shaping the shape of a cutting blade easily at low cost.SOLUTION: The cutting blade shaping method comprises: a shaping preparation step of configuring a state where a tip of a cutting blade 21 being rotating is cut, by a predetermined amount 201, into a dresser board 200 held on a chuck table 10; and a shaping step of moving up the cutting blade 21 while moving the cutting blade 21 in a center direction of a spindle, after performing the shaping preparation step, so as to form an inclined surface 28 on one side (surface 26) of the tip of the cutting blade 21. The cutting blade shaping method repeats the shaping preparation step and the shaping step until an angle and width of the inclined surface 28 of the cutting blade 21 reach a desired angle and width.SELECTED DRAWING: Figure 8

Description

[Technical field]

[0001] The present invention relates to a method for shaping a cutting blade. [Background technology]

[0002] Cutting devices (dicers) are used to cut various plate-shaped workpieces such as semiconductor device wafers, ceramic substrates, glass substrates, and resin package substrates with a cutting blade and divide them into individual chips. In normal dicing, the substrate is fully cut and divided, but in some cases, dicing or grooving is performed using a cutting blade with a V-shaped tip to prevent chipping of the chips or to form V-grooves or inclined surfaces on the chips (see, for example, Patent Documents 1, 2, and 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2004-039906 A [Patent Document 2] JP 2012-044096 A [Patent Document 3] JP 2019-160887 A Summary of the Invention [Problem to be solved by the invention]

[0004] In this case, the tip of the blade is easily deformed due to wear, and if the cutting blade is replaced with a new one every time the shape is deformed, the cost of the cutting blade becomes enormous. Therefore, a processing device for shaping the cutting blade was devised, but it was necessary to introduce new equipment, and there was a problem that it was not easy to implement. In addition, when a shaped blade with an angle at the tip is purchased from a blade manufacturer and attached to a spindle, the center of rotation of the spindle and the center of the cutting blade are misaligned, resulting in a slight eccentricity. In addition, if dressing is performed to correct the eccentricity, the shape of the cutting edge changes quickly due to wear of the cutting blade, so dressing is not possible, and there was also the problem that the eccentricity cannot be corrected.

[0005] The present invention has been made in consideration of the above problems, and an object of the present invention is to provide a method for shaping a cutting blade that can shape the cutting blade easily and at low cost. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, the method of shaping a cutting blade of the present invention is a method for shaping a cutting blade using a cutting device including a chuck table that holds a workpiece on a holding surface, a cutting unit that cuts the workpiece held on the chuck table by attaching a circular cutting blade to a spindle having an axis parallel to the holding surface, and a moving unit that moves the chuck table and the cutting unit relatively, the method including a shaping preparation step of cutting a predetermined amount of the tip of the rotating cutting blade into a dresser board held by the chuck table, and a shaping step of, after the shaping preparation step, lifting the cutting blade while moving it in the axial direction of the spindle to form an inclined surface on one side of the tip of the cutting blade, and repeating the shaping preparation step and the shaping step until the inclined surface of the cutting blade reaches the desired angle or width.

[0007] The shaping step may be performed in both positive and negative directions along the axis of the spindle to form inclined surfaces at the tips of both one and the other sides of the cutting blade.

[0008] After the shaping step is performed and before the shaping preparation step is performed again, a wear amount measuring step is provided for measuring the wear amount of the cutting blade, and even if the cutting blade is worn, the cutting blade may cut in a predetermined amount in the shaping preparation step. Effect of the Invention

[0009] The present invention allows for easy and low-cost shaping of cutting blades. [Brief description of the drawings]

[0010] [Figure 1] FIG. 1 is a perspective view showing an example of the configuration of a cutting device for carrying out a cutting blade shaping method according to an embodiment. [Diagram 2] FIG. 2 is an exploded perspective view showing a cutting unit of the cutting device of FIG. [Diagram 3] FIG. 3 is a flowchart illustrating an example of a process procedure of a cutting blade shaping method according to the embodiment. [Figure 4] FIG. 4 is a cross-sectional view illustrating a method for shaping a cutting blade according to an embodiment. [Diagram 5] FIG. 5 is a perspective view illustrating the shaping preparation step of FIG. [Figure 6] FIG. 6 is a perspective view illustrating the shaping preparation step of FIG. [Figure 7] FIG. 7 is a cross-sectional view illustrating the shaping preparation step of FIG. [Figure 8] FIG. 8 is a cross-sectional view illustrating the shaping step of FIG. [Figure 9] FIG. 9 is a cross-sectional view illustrating the shaping step of FIG. [Figure 10] FIG. 10 is a cross-sectional view illustrating an example of the inclined surface determination step of FIG. [Figure 11]FIG. 11 is a top view illustrating an example of the inclined surface determination step of FIG. [Figure 12] FIG. 12 is a top view illustrating an example of the wear amount measuring step in FIG. [Figure 13] FIG. 13 is a cross-sectional view illustrating a method for shaping a cutting blade according to the first modification. [Figure 14] FIG. 14 is a cross-sectional view illustrating a method for shaping a cutting blade according to the second modification. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] The form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiment. Furthermore, the components described below include those that a person skilled in the art can easily imagine and those that are substantially the same. Furthermore, the configurations described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the configurations can be made without departing from the gist of the present invention.

[0012] [Embodiment] A cutting blade shaping method according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a cutting device 1 for carrying out the cutting blade shaping method according to the embodiment. Fig. 2 is an exploded perspective view showing a cutting unit 20 of the cutting device 1 of Fig. 1. As shown in Fig. 1, the cutting device 1 includes a chuck table 10, a cutting unit 20, a moving unit 30, an imaging unit 40, and a control unit 50.

[0013] In this embodiment, the workpiece 100 to be cut by the cutting device 1 is, for example, a disk-shaped semiconductor device wafer or an optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. As shown in FIG. 1, the workpiece 100 has a flat surface 101 on which devices 103 are formed in areas partitioned by a plurality of planned division lines 102 formed in a lattice pattern. In this embodiment, the workpiece 100 has an adhesive tape 105 attached to a back surface 104 on the back side of the front surface 101, and an annular frame 106 attached to the outer edge of the adhesive tape 105, but the present invention is not limited to this. In addition, in the present invention, the workpiece 100 may be a rectangular package substrate having a plurality of devices sealed with resin, a ceramic plate, a glass plate, or the like.

[0014] The chuck table 10 has a disk-shaped frame body with a recess formed therein and a disk-shaped suction part fitted in the recess. The suction part of the chuck table 10 is formed of a porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The upper surface of the suction part of the chuck table 10 is a holding surface 11 on which the workpiece 100 is placed and which suction-holds the placed workpiece 100. In this embodiment, the holding surface 11 is a surface on which the workpiece 100 is placed with its front surface 101 facing upward, and suction-holds the placed workpiece 100 from its back surface 104 side via an adhesive tape 105. The holding surface 11 and the upper surface of the frame body of the chuck table 10 are arranged on the same plane and are formed parallel to the XY plane, which is a horizontal plane. The chuck table 10 is movable in the X-axis direction, which is one horizontal direction, by the X-axis moving unit 31 of the moving unit 30, and is rotatable around an axis parallel to the Z-axis direction, which is vertical and perpendicular to the holding surface 11, by a rotary drive source not shown.

[0015] As shown in FIG. 2, the cutting unit 20 includes a spindle 22 to which a cutting blade 21 is attached at its tip, and a mount flange 24. The cutting blade 21 is a cutting grindstone having an annular cutting edge 21-1 formed to a predetermined thickness, in which abrasive grains such as diamond or CBN (Cubic Boron Nitride) are fixed with a bonding material such as metal or resin. The cutting blade 21 sharpens itself as the cutting edge 21-1 wears as cutting is performed, and a certain level of sharpness is always maintained. The cutting blade 21 is a hubless blade in the example shown in FIG. 2, but the present invention is not limited to this, and may be a hub blade in which the annular cutting edge 21-1 is fixed to the outer periphery of an annular base.

[0016] The spindle 22 has an axis parallel to the Y-axis direction, which is another horizontal direction and perpendicular to the X-axis direction, that is, an axis parallel to the holding surface 11. The mount flange 24 sandwiches the cutting blade 21 and fixes it to the tip of the spindle 22. The cutting blade 21 attached to the tip of the spindle 22 is rotated about an axis parallel to the Y-axis direction by the rotation of the spindle 22, and cuts the workpiece 100 held on the chuck table 10. As shown in FIG. 1, the cutting unit 20 is provided so as to be movable in the Y-axis direction by the Y-axis moving unit 32 of the moving unit 30 with respect to the workpiece 100 held on the chuck table 10, and is also provided so as to be movable in the Z-axis direction (up and down direction) by the Z-axis moving unit 33 of the moving unit 30.

[0017] 1, the moving unit 30 includes an X-axis moving unit 31, a Y-axis moving unit 32, and a Z-axis moving unit 33. The X-axis moving unit 31 moves the chuck table 10 along the X-axis direction (machining feed direction) relative to the cutting unit 20. The Y-axis moving unit 32 moves the cutting unit 20 along the Y-axis direction (indexing feed direction) relative to the chuck table 10. The Z-axis moving unit 33 moves the cutting unit 20 along the Z-axis direction (cutting feed direction) relative to the chuck table 10. In this way, the moving unit 30 moves the chuck table 10 and the cutting unit 20 relatively.

[0018] The X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33 each include a well-known ball screw rotatably provided about its axis, a well-known pulse motor for rotating the ball screw about its axis, and a well-known guide rail for supporting the chuck table 10 or the cutting unit 20 movably in the X-axis, Y-axis or Z-axis direction. The X-axis moving unit 31, the Y-axis moving unit 32 and the Z-axis moving unit 33 each include a well-known position detector for detecting the position of the chuck table 10 or the cutting unit 20 in the X-axis, Y-axis or Z-axis direction, and output the position detected by the position detector to the control unit 50.

[0019] The cutting device 1 sets the cutting blade 21 attached to the tip of the spindle 22 by the moving unit 30 at a predetermined position relative to the workpiece 100 held on the chuck table 10, and while rotating the cutting blade 21, moves it relative to the workpiece 100 held on the chuck table 10 along the planned division line 102, thereby cutting the workpiece 100 along the planned division line 102 with the cutting blade 21.

[0020] In this embodiment, the imaging unit 40 is attached to the cutting unit 20 and moves together with the cutting unit 20. The imaging unit 40 includes an imaging element that images the workpiece 100 held on the chuck table 10 before and after machining. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 40 images the workpiece 100 held on the chuck table 10 to obtain an image for performing alignment for positioning the workpiece 100 and the cutting blade 21, and outputs the obtained image to the control unit 50. The imaging unit 40 images the workpiece 100 held on the chuck table 10 to obtain an image for performing a kerf check for checking the quality of the cut groove formed in the workpiece 100, and outputs the obtained image to the control unit 50.

[0021] The control unit 50 controls the operation of various components of the cutting device 1 to cause the cutting device 1 to perform the cutting process of the workpiece 100 and the process of the cutting blade shaping method according to the embodiment. In this embodiment, the control unit 50 includes a computer system. The computer system included in the control unit 50 includes an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit), a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input / output interface device. The arithmetic processing device of the control unit 50 performs arithmetic processing according to a computer program stored in the storage device of the control unit 50, and outputs a control signal for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the control unit 50.

[0022] Next, this specification will explain the operation of the process of the cutting blade shaping method according to the embodiment with reference to the drawings. FIG. 3 is a flowchart showing an example of the procedure of the process of the cutting blade shaping method according to the embodiment. FIG. 4 is a cross-sectional view explaining the cutting blade shaping method according to the embodiment. FIGS. 5 and 6 are perspective views explaining the shaping preparation step 1001 in FIG. 3. FIG. 7 is a cross-sectional view explaining the shaping preparation step 1001 in FIG. 3. FIGS. 8 and 9 are cross-sectional views explaining the shaping step 1002 in FIG. 3. FIGS. 10 and 11 are cross-sectional and top views explaining an example of the inclined surface determination step 1003 in FIG. 3, respectively. FIG. 12 is a top view explaining an example of the wear amount measurement step 1004 in FIG. 3.

[0023] The cutting blade shaping method according to the embodiment is an example of an operation process performed by the cutting device 1, and includes, as shown in Fig. 3, a shaping preparation step 1001, a shaping step 1002, an inclined surface determination step 1003, and a wear amount measurement step 1004. The cutting blade shaping method according to the embodiment is performed on the cutting blade 21, for example, before the cutting blade 21 is attached to the spindle 22 and used to cut the workpiece 100.

[0024] In this embodiment, the cutting blade shaping method is described as follows. For example, the cutting blade 21 is a vitrified bond blade with abrasive grains of synthetic diamond (SD), a grain size of #800, a concentration of 100, an outer diameter of 58 mm, and a thickness of 0.2 mm. The cutting blade 21 is shaped in a cross section along the radial direction from a rectangular shape to a shape in which an inclined surface 28 having a predetermined angle θ1 and a predetermined width W1 with respect to the radial direction is formed on one side 26 of the tip (outer peripheral surface) of the cutting blade 21-1, and an inclined surface 29 having a predetermined angle θ2 and a predetermined width W2 with respect to the radial direction is formed on the other side 27, as shown in FIG. Here, the widths W1 and W2 of the inclined surfaces 28 and 29 are the lengths along the thickness direction of the cutting blade 21-1 on the inclined surfaces 28 and 29 as shown in FIG. 4. It should be noted that the method of shaping the cutting blade is not limited to this in the present invention, and can be implemented when shaping a cutting blade 21 of any abrasive grain, grain size, concentration, outer diameter, and thickness into a shape in which inclined surfaces 28, 29 of desired angles θ1, θ2 are formed on either side of faces 26, 27.

[0025] In this embodiment, one surface 26 of the tip of the cutting blade 21-1 of the cutting blade 21 is the positive side of the axial direction of the spindle 22 (-Y direction in FIG. 4), and the other surface 27 of the tip of the cutting blade 21-1 of the cutting blade 21 is the negative side of the axial direction of the spindle 22 (+Y direction in FIG. 4). In this embodiment, the shaping method of the cutting blade is performed separately for both the positive and negative directions of the axial direction of the spindle 22. That is, in this embodiment, the shaping step 1002 is performed separately for both the positive and negative directions of the axial direction of the spindle 22 to form inclined surfaces 28, 29 at the tips of both the one surface 26 and the other surface 27 of the cutting blade 21-1 of the cutting blade 21, and a shaping preparation step 1001 is performed before the shaping step 1002 for each of these separate shaping steps 1002.

[0026] The shaping preparation step 1001 is a step in which the tip of the cutting edge 21-1 of the rotating cutting blade 21 is caused to cut into the dresser board 200 held by the chuck table 10 by a predetermined amount 201 (see FIG. 7). In the shaping preparation step 1001, first, in this embodiment, as shown in FIG. 5, for example, one side of the plate-shaped dresser board 200 is attached to the adhesive surface of the adhesive tape 105 attached so as to cover the opening on the back side of the annular frame 106, thereby housing the dresser board 200 on the adhesive tape 105 within the opening of the annular frame 106. In the shaping preparation step 1001, the dresser board 200 accommodated within the opening of the annular frame 106 on the adhesive tape 105 is placed with the exposed surface opposite to one surface of the dresser board 200 facing upward and the adhesive tape 105 side facing the holding surface 11 of the chuck table 10, and the dresser board 200 is suction-held on the holding surface 11 of the chuck table 10 via the adhesive tape 105.

[0027] Here, the dresser board 200 used in the cutting blade shaping method is a plate-shaped board with abrasive grains fixed with a bond material, used for dressing (rounding and sharpening) the cutting blade 21. By cutting with the cutting blade 21, the cutting edge 21-1 of the cutting blade 21 is worn, and the dresser board 200 itself is also cut and removed by the cutting edge 21-1 of the cutting blade 21 to form a cutting mark. Here, rounding means aligning the center of rotation of the spindle 22 with the center of the outer edge of the cutting edge 21-1 of the cutting blade 21, and sharpening means wearing down the cutting blade 21 to cause the abrasive grains to protrude and restore the sharpness. In this embodiment, the dresser board 200 is, for example, a white alundum (WA) grindstone with a grain size of #800 and a concentration of 50, which is solidified into a plate shape with a resin bond, in accordance with the above-mentioned example of the cutting blade 21. However, the dresser board 200 is not limited to this in the present invention, and any grindstone, grain size, concentration, and bonding agent can be used in accordance with the cutting blade 21.

[0028] In the shaping preparation step 1001, after the dresser board 200 is sucked and held on the holding surface 11 of the chuck table 10 via the adhesive tape 105, the control unit 50 aligns the cutting blade 21 attached to the tip of the spindle 22 by the moving unit 30 to a predetermined position (for example, a position near the center of the dresser board 200 where no cutting marks are formed) with respect to the dresser board 200 held on the chuck table 10. In the shaping preparation step 1001, the control unit 50 then rotates the aligned cutting blade 21 at a predetermined rotation speed (for example, 10,000 rpm (rotations per minute) in this embodiment), and moves the cutting blade 21 by the Z-axis moving unit 33 in a direction approaching each other along the cutting feed direction relative to the dresser board 200, and causes the cutting edge 21-1 of the cutting blade 21 to cut into the dresser board 200 by a predetermined amount 201, as shown in FIG. 6 and FIG. 7.

[0029] Here, when the shaping step 1002 is performed in the positive axial direction of the spindle 22, the predetermined amount 201 is appropriately determined based on the radial length of the desired inclined surface 28 to be formed on one surface 26 of the cutting edge 21-1 of the cutting blade 21, and the predetermined amount 201 is set to be larger as the radial length of the inclined surface 28 increases. When the shaping step 1002 is performed in the negative axial direction of the spindle 22, the predetermined amount 201 is appropriately determined based on the radial length of the desired inclined surface 29 to be formed on the other surface 27 of the cutting edge 21-1 of the cutting blade 21, as in the positive direction. In this embodiment, the predetermined amount 201 is set to, for example, 0.7 mm.

[0030] The shaping step 1002 is a step in which, after the shaping preparation step 1001, the cutting blade 21 is raised while moving the cutting blade 21 in the axial direction of the spindle 22, and the inclined surface 28, 29 is formed on one side (either surface 26, 27) of the tip of the cutting edge 21-1 of the cutting blade 21. In the shaping step 1002, when the inclined surface 28 is formed on one side 26 of the tip of the cutting edge 21-1 of the cutting blade 21, the control unit 50 rotates the cutting blade 21 at a predetermined rotation speed (for example, 10,000 rpm in this embodiment), as shown in FIG. 8, while moving the cutting blade 21 from the position positioned in the shaping preparation step 1001 in the direction toward the one side 26 side (positive direction of the axial direction of the spindle 22) by the Y-axis moving unit 32, and raising the cutting blade 21 by the Z-axis moving unit 33. That is, in this shaping step 1002, the control unit 50 raises the cutting blade 21 in an oblique direction while pressing the surface 26 side of the rotating cutting blade 21 against the dresser board 200 toward the positive axial direction of the spindle 22. As a result, in the shaping step 1002, as shown in Fig. 8, one surface 26 side of the tip of the cutting edge 21-1 of the cutting blade 21 is worn in an oblique direction by the dresser board 200 to form an inclined surface 28, and the dresser board 200 is cut and removed by the cutting edge 21-1 of the cutting blade 21 to form a cutting mark 202 on the dresser board 200.

[0031] In the shaping step 1002, when the inclined surface 29 is formed on the other surface 27 side of the tip of the cutting edge 21-1 of the cutting blade 21, the control unit 50 rotates the cutting blade 21 at a predetermined rotation speed (for example, 10,000 rpm in this embodiment) as shown in Fig. 9, while moving the cutting blade 21 from the position positioned in the shaping preparation step 1001 in the direction toward the other surface 27 side (negative direction of the axis of the spindle 22) by the Y-axis moving unit 32, and raising it by the Z-axis moving unit 33. That is, in this shaping step 1002, the control unit 50 raises the cutting blade 21 in an oblique direction while pressing the surface 27 side of the rotated cutting blade 21 against the dresser board 200 toward the negative direction of the axis of the spindle 22. As a result, in the shaping step 1002, as shown in Figure 9, the other surface 27 side of the tip of the cutting edge 21-1 of the cutting blade 21 is worn diagonally by the dresser board 200 to form an inclined surface 29, and the dresser board 200 is cut and removed by the cutting edge 21-1 of the cutting blade 21 to form a cutting mark 203 on the dresser board 200.

[0032] Here, the relationship between the moving speed of the cutting blade 21 in the axial direction of the spindle 22 in the shaping step 1002 and the moving speed of the cutting blade 21 in the ascending direction is appropriately determined based on the angles θ1, θ2 of the desired inclined surfaces 28, 29 to be formed, taking into consideration the rigidity of the cutting edge 21-1 of the cutting blade 21. For example, the ratio between the moving speed in the axial direction and the moving speed in the ascending direction is determined based on the tangent of the angles θ1, θ2. In this embodiment, for example, the angles θ1, θ2 are both 45°, and the moving speed of the cutting blade 21 in the axial direction of the spindle 22 in the shaping step 1002 and the moving speed of the cutting blade 21 in the ascending direction are both set to 0.1 mm / s.

[0033] In the shaping step 1002, the control unit 50 may raise the cutting blade 21 while moving the cutting blade 21 in the axial direction of the spindle 22, and may further move the chuck table 10 holding the dresser board 200 relative to the cutting blade 21 along the X-axis direction by the X-axis moving unit 31. As a result, in the shaping step 1002, the cutting blade 21-1 of the cutting blade 21 can be made to have a perfect circle while forming inclined surfaces 28, 29 on either surface 26, 27 side of the tip of the cutting blade 21-1 of the cutting blade 21. Here, the moving speed of the chuck table 10 relative to the cutting blade 21 is set to, for example, 0.3 mm / s in this embodiment.

[0034] The inclined surface determination step 1003 is a step for determining whether or not the shape of the inclined surfaces 28, 29 formed on either surface 26, 27 of the cutting edge 21-1 of the cutting blade 21 in the immediately preceding shaping step 1002 is a desired shape after the shaping step 1002 is performed. In the inclined surface determination step 1003, in this embodiment, as shown in Fig. 10, a cutting process is performed on a predetermined board 300 held on the chuck table 10 by the cutting blade 21 after the shaping step 1002, cutting in the X-axis direction, and the board 300 after the cutting process is carried out from the cutting device 1. As shown in Fig. 11, the board 300 after the cutting process is observed from the side along the X-axis direction with a microscope or the like, and the inclined surfaces 302, 303 of the groove 301 cut in the X-axis direction formed in the board 300 are observed to determine whether or not the shape of the inclined surfaces 28, 29 is a desired shape.

[0035] Here, the predetermined board 300 used in the inclined surface determination step 1003 is a plate-shaped board made of a material having a sufficiently lower hardness than the cutting edge 21-1 of the cutting blade 21, and by cutting with the cutting blade 21, the board 300 itself is cut and removed by the cutting edge 21-1 of the cutting blade 21 without wearing down the cutting edge 21-1 of the cutting blade 21, forming a cutting mark 302. In this embodiment, the predetermined board 300 is, for example, a carbon plate or a silicon plate in accordance with the above-mentioned example of the cutting blade 21. Note that the predetermined board 300 is not limited to this in the present invention, and any material having a sufficiently lower hardness than the cutting edge 21-1 of the cutting blade 21 in accordance with the cutting blade 21 can be used.

[0036] In the inclined surface determination step 1003, the determination of the shape of the inclined surfaces 28, 29 is performed by the operator of the cutting device 1 in this embodiment, but the present invention is not limited to this, and the measurement results of the angles θ1, θ2 and widths W1, W2 of the inclined surfaces 28, 29 obtained by the operator's observation may be input to the cutting device 1 from an input unit (not shown), and the control unit 50 of the cutting device 1 that has received this input may determine whether the measurement results are the desired angles θ1, θ2 and widths W1, W2. In this way, when the control unit 50 performs the inclined surface determination step 1003, the control unit 50 automatically performs the subsequent wear amount measurement step 1004 and the next shaping preparation step 1001 and shaping step 1002 based on the determination result, as described later.

[0037] In the present invention, the inclined surface determination step 1003 is not limited to observing the inclined surfaces 302, 303 of the groove 301 cut in the X-axis direction in the board 300, and the inclined surfaces 28, 29 may be determined by using the end of a groove formed by so-called chopper cutting, in which the cutting blade 21 cuts into a similar predetermined board 300 to a certain depth. Also, the inclined surface determination step 1003 may determine the inclined surfaces 28, 29 by observing the tip of the cutting edge 21-1 of the cutting blade 21 from the circumferential direction after the immediately preceding shaping step 1002 is performed using a side-view microscope (not shown) provided in the cutting device 1, or may determine the inclined surfaces 28, 29 by observing the groove 301 formed in the board 300 from the side of the board 300.

[0038] In the cutting blade shaping method according to the embodiment, when it is determined in the inclined surface determination step 1003 that the shape of the inclined surfaces 28, 29 on the side shaping in the immediately preceding shaping step 1002 is the desired shape (Yes in the inclined surface determination step 1003 in FIG. 3), a series of processes for forming the inclined surfaces 28, 29 on the side of the surfaces 26, 27 determined to match is terminated. On the other hand, in the cutting blade shaping method according to the embodiment, when it is determined in the inclined surface determination step 1003 that the shape of the inclined surfaces 28, 29 on the side shaping in the immediately preceding shaping step 1002 is not the desired shape (No in the inclined surface determination step 1003 in FIG. 3), a series of processes (shaping preparation step 1001 and shaping step 1002) for forming the inclined surfaces 28, 29 on the side of the surfaces 26, 27 determined not to be the desired shape is repeated through the wear amount measurement step 1004 described later. In this way, the cutting blade shaping method of the embodiment repeats the shaping preparation step 1001 and the shaping step 1002 for each surface 26, 27 at the tip of the cutting edge 21-1 of the cutting blade 21 until the inclined surfaces 28, 29 have the desired shape (angles θ1, θ2 and widths W1, W2).

[0039] The wear amount measuring step 1004 is a step of measuring the wear amount of the cutting edge 21-1 of the cutting blade 21 after the shaping step 1002 is performed and before the shaping preparation step 1001 is performed again. In this embodiment, the wear amount measuring step 1004 is performed when the shaping preparation step 1001 and the shaping step 1002 are performed again based on the result of the inclined surface determination step 1003 performed after the shaping step 1002 is performed.

[0040] In this embodiment, the wear amount measuring step 1004 is performed using a cutting blade detection unit 60 that the cutting device 1 shown in Fig. 12 has below the cutting unit 20. As shown in Fig. 12, the cutting blade detection unit 60 has a groove member 61, a light emitting unit 62, a light receiving unit 63, a light source 64, a photoelectric conversion unit 65, a reference voltage setting unit 66, a voltage comparison unit 67, an end position detection unit 68, a calculation unit 69, and a position correction unit 70.

[0041] The groove member 61 has a groove 61-1 formed along the X-axis direction into which the cutting edge 21-1 of the cutting blade 21 can enter, and a light-emitting unit 62 and a light-receiving unit 63 having optical axes along the Y-axis direction are disposed facing each other on both sides of the groove 61-1. The light-emitting unit 62 is optically connected to a light source 64 by an optical fiber or the like, and emits light from the light source 64 toward the light-receiving unit 63. The light-receiving unit 63 is optically connected to a light-receiving element by an optical fiber or the like, and the light-receiving element detects light emitted from the light-emitting unit 62 and reaching the light-receiving unit 63. The light-receiving unit 63 is optically connected to a photoelectric conversion unit 65 by an optical fiber or the like, and sends light received from the light-emitting unit 62 to the photoelectric conversion unit 65.

[0042] The photoelectric conversion unit 65 outputs a voltage corresponding to the amount of light sent from the light receiving unit 63 to the voltage comparison unit 67. As the tip of the cutting edge 21-1 of the cutting blade 21 enters the groove 61-1, the amount of light blocked by the cutting edge 21-1 of the cutting blade 21 between the light emitting unit 62 and the light receiving unit 63 increases, and the output voltage from the photoelectric conversion unit 65 gradually decreases. In this embodiment, the photoelectric conversion unit 65 outputs a voltage of 5V (maximum voltage) when the light receiving rate, which is the ratio of the amount of light received by the light receiving unit 63 to the amount of light emitted by the light emitting unit 62, is 100%, and a voltage of 0V (minimum voltage) when the light receiving rate is 0%. The photoelectric conversion unit 65 is set so that the output voltage becomes a predetermined reference voltage (3V in this embodiment) when the amount of light received by the light receiving unit 63 becomes a predetermined amount of light, that is, when the tip of the cutting edge 21-1 of the cutting blade 21 reaches a predetermined position between the light emitting unit 62 and the light receiving unit 63. The reference voltage setting unit 66 outputs the set predetermined reference voltage to the voltage comparison unit 67. In this embodiment, the predetermined reference voltage is 3V as described above.

[0043] The voltage comparison unit 67 compares the output from the photoelectric conversion unit 65 with the reference voltage set by the reference voltage setting unit 66, and when the output from the photoelectric conversion unit 65 reaches the reference voltage, outputs a signal to that effect to the end position detection unit 68. The end position detection unit 68 outputs the Z-axis position of the tip of the cutting edge 21-1 of the cutting blade 21 at the time of output from the voltage comparison unit 67 to the calculation unit 69. The calculation unit 69 outputs the difference between the Z-axis reference position of the tip of the cutting edge 21-1 of the cutting blade 21 stored in advance and the position output from the end position detection unit 68 to the position correction unit 70. The position correction unit 70 corrects the Z-axis position of the tip of the cutting edge 21-1 of the cutting blade 21 according to the value output from the calculation unit 69.

[0044] In this embodiment, the functions of the photoelectric conversion unit 65, the reference voltage setting unit 66, the voltage comparison unit 67, the calculation unit 69 and the position correction unit 70 are realized within the control unit 50 by the arithmetic processing unit of the control unit 50 executing a computer program stored in the memory device of the control unit 50.

[0045] In the wear amount measuring step 1004, the calculation unit 69 acquires the Z-axis position of the tip of the cutting edge 21-1 of the cutting blade 21 by the end position detection unit 68. In the wear amount measuring step 1004, the calculation unit 69 then calculates the difference between the Z-axis position of the tip of the cutting edge 21-1 of the cutting blade 21 acquired after the immediately preceding shaping step 1002 and the Z-axis position of the tip of the cutting edge 21-1 of the cutting blade 21 acquired before the immediately preceding shaping step 1002, detects the calculated difference as the radial wear amount (amount of wear) of the tip of the cutting edge 21-1 of the cutting blade 21 during the immediately preceding shaping preparation step 1001 and shaping step 1002, and outputs the detected wear amount to the control unit 50.

[0046] In addition, in the wear amount measuring step 1004, the present invention is not limited to the form of using the cutting blade detection unit 60, and the wear amount of the cutting edge 21-1 of the cutting blade 21 may be measured by utilizing the length of the groove formed in a specified board 300 by the cutting blade 21 by chopper cutting.

[0047] In the cutting blade shaping method according to the embodiment, in the second or subsequent shaping preparation step 1001, the control unit 50 moves the cutting blade 21 relative to the dresser board 200 in the direction approaching each other along the incision feed direction by an amount greater than the amount of wear of the cutting edge 21-1 of the cutting blade 21 acquired in the immediately preceding wear amount measurement step 1004, and causes the cutting edge 21-1 of the cutting blade 21 to incise the dresser board 200. As a result, in the second or subsequent shaping preparation step 1001, even if the cutting edge 21-1 of the cutting blade 21 is worn in the immediately preceding shaping preparation step 1001 and shaping step 1002, the cutting edge 21-1 of the cutting blade 21 can incise the dresser board 200 by a predetermined amount 201, taking into account the amount of wear.

[0048] In the method for shaping a cutting blade according to the embodiment, a series of steps of the method for shaping a cutting blade shown in FIG. 3 are carried out as described above on one surface 26 side of the tip of the cutting edge 21-1 of the cutting blade 21 (positive direction in the axial direction of the spindle 22) to form a desired inclined surface 28, and then, separately from this series of steps, a series of steps of the method for shaping a cutting blade shown in FIG. 3 are carried out as described above on the other surface 27 side of the tip of the cutting edge 21-1 of the cutting blade 21 (negative direction in the axial direction of the spindle 22) to form a desired inclined surface 29, thereby performing a shaping process to form the desired inclined surfaces 28, 29 on both surfaces 26, 27 of the cutting edge 21-1 of the cutting blade 21 shown in FIG. 4.

[0049] The method for shaping a cutting blade according to the embodiment having the above-mentioned configuration can easily form the inclined surfaces 28, 29 at the tip of the cutting blade 21 by simply cutting into the dresser board 200, which is commonly used for dressing the cutting blade 21 (for making it round and sharpening it), and lifting it at an angle, thereby achieving the advantageous effect of being able to easily and at low cost shape the diagonal shape of the cutting blade 21 without introducing new equipment or parts.

[0050] In addition, in the past, when a shaped cutting blade with a beveled tip was purchased from a manufacturer, when it was attached to a spindle, the center position of the outer edge of the cutting edge of the cutting blade and the center of rotation of the spindle were slightly misaligned, resulting in an eccentric state, but the cutting blade shaping method according to the embodiment shapes the cutting blade 21 after it is attached to the spindle 22, so that the shape of the cutting blade 21 is shaped without eccentricity. Furthermore, the cutting blade shaping method according to the embodiment also has the effect of easily reshaping the cutting blade 21 even if the shape of the cutting blade 21 becomes distorted.

[0051] [Modifications] The cutting blade shaping method according to the modified examples 1 and 2 of the present invention will be described with reference to the drawings. Figures 13 and 14 are cross-sectional views for explaining the cutting blade shaping method according to the modified examples 1 and 2, respectively. In Figures 13 and 14, the same parts as those in the embodiment are given the same reference numerals, and the description thereof will be omitted.

[0052] As shown in Fig. 4 and Fig. 13, the cutting blade shaping method according to the first modification is different from the cutting blade shaping method according to the embodiment in that the shape of the cutting blade 21 before shaping is different, and the other configurations are the same as those of the embodiment. In the first modification, the cutting blade 21 before shaping has inclined surfaces 28, 29 formed on the surfaces 26, 27 at the tip of the cutting edge 21-1, respectively, but the shape is destroyed by the cutting process of the workpiece 100 or the like. The cutting blade shaping method according to the first modification can shape the cutting blade 21 before shaping in such a shape into a shape in which the desired inclined surfaces 28, 29 are formed, in a manner completely similar to the cutting blade shaping method according to the embodiment.

[0053] As shown in Fig. 4 and Fig. 14, the cutting blade shaping method according to the second modification is different in the shape of the cutting blade 21 before and after shaping in the cutting blade shaping method according to the embodiment, and other configurations are the same as those of the embodiment. In the second modification, the cutting blade 21 before shaping has no inclined surface 29 formed on the surface 27 at the tip of the cutting blade 21-1, and has an inclined surface 28 of a width W1 larger than that of the embodiment and equivalent to the thickness of the cutting blade 21-1 formed on the surface 26 at the tip of the cutting blade 21-1, but the shape is destroyed by the cutting process of the workpiece 100, etc. In the second modification, the cutting blade 21 after shaping has no inclined surface 29 formed on the surface 27 at the tip of the cutting blade 21-1, and has a desired inclined surface 28 of a width W1 larger than that of the embodiment formed on the surface 26 at the tip of the cutting blade 21-1. In the method of shaping a cutting blade according to variant example 2, a cutting blade 21 before shaping into such a shape can be shaped into a shape having a desired inclined surface 28 by carrying out a method similar to that of the method of shaping a cutting blade according to the embodiment only on the tip surface 26 side of the cutting edge 21-1 of the cutting blade 21.

[0054] It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. [Explanation of symbols]

[0055] 1 Cutting equipment 10 Chuck table 20 Cutting unit 21 Cutting blade 22 Spindle 26,27 sides 28,29 Slope 30 Mobile Units 100 Workpiece 200 Dresser Board

Claims

1. A cutting blade shaping method for shaping a cutting blade using a cutting device including a chuck table that holds a workpiece on a holding surface, a cutting unit that cuts the workpiece held on the chuck table by mounting an annular cutting blade on a spindle having an axis parallel to the holding surface, and a moving unit that moves the chuck table and the cutting unit relatively, the method comprising: a shaping preparation step of cutting a tip of a rotating cutting blade into the dresser board held by the chuck table by a predetermined amount; and a shaping step of, after the shaping preparation step, lifting the cutting blade while moving the cutting blade in the axial direction of the spindle, to form an inclined surface on one side of the tip of the cutting blade. The cutting blade shaping method includes repeating the shaping preparation step and the shaping step until the inclined surface of the cutting blade has a desired angle or width.

2. 2. The method for shaping a cutting blade according to claim 1, wherein the shaping step is performed in both positive and negative directions in the axial direction of the spindle, and an inclined surface is formed at the tip of both one side and the other side of the cutting blade.

3. 3. A method for shaping a cutting blade as described in claim 1 or 2, further comprising a wear measurement step of measuring the amount of wear of the cutting blade after the shaping step and before performing the shaping preparation step again, so that even if the cutting blade is worn out, the cutting blade can cut in a predetermined amount in the shaping preparation step.

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