Heat generating device and heat utilization system

Abstract

The present invention provides: a novel heat generation device and a novel heat utilization system, each of which utilizes a low-cost, clean and safe energy source; and a film-like heat generation element which serves as a low-cost, clean and safe energy source. A heat generation device 10 according to the present invention is provided with: a hollow airtight container 11; a cylinder body 12 which is provided in a hollow part 26 that is formed by the inner surface of the airtight container 11; a heat generation element 13 which is provided on the outer surface of the cylinder body 12 and generates heat by means of absorption and desorption of hydrogen contained in a hydrogen-based gas that is supplied to the hollow part 26; and a flow path 14 which is formed by the inner surface of the cylinder body 12, and in which a fluid that exchanges heat with the heat generation element 13 passes through. The heat generation element 13 comprises: a pedestal that is formed of a hydrogen storage metal or the like; and a multilayer film that is provided on the pedestal. The multilayer film comprises: a first layer that is formed of a hydrogen storage metal or the like, while having a thickness of less than 1,000 nm; and a second layer that is formed of a hydrogen storage metal, which is different from the hydrogen storage metal of the first layer, or the like, while having a thickness of less than 1,000 nm.

Description

[Technical field]

[0001] The present invention relates to a heat generating device, a heat utilization system, and a film-shaped heating element. [Background technology]

[0002] In recent years, a heat generation phenomenon has been reported in which heat is generated by absorbing and releasing hydrogen using hydrogen storage metals and the like (for example, see Non-Patent Document 1). Hydrogen can be produced from water, making it an inexhaustible and inexpensive resource, and is considered a clean energy source because it does not generate greenhouse gases such as carbon dioxide. In addition, unlike nuclear fission reactions, heat generation phenomena using hydrogen storage metals and the like are considered safe because there is no chain reaction. The heat generated by the absorption and release of hydrogen can be used as heat as is, or can be converted into electricity for use, so it is expected to be an effective energy source. [Prior art documents] [Non-patent literature]

[0003] [Non-Patent Document 1] A. Kitamura, A. Takahashi, K. Takahashi, R. Seto, T. Hatano, Y. Iwamura, T. Itoh, J. Kasagi, M. Nakamura, M. Uchimura, H. Takahashi, S. Sumitomo, T. Hioki, T. Motohiro, Y. Furuyama, M. Kishida, H. Matsune, “Excess heat evolution from nanocomposite samples under exposure to “hydrogen isotope gases”, International Journal of Hydrogen Energy 43 (2018) 16187-16200. Summary of the Invention [Problem to be solved by the invention]

[0004] However, the mainstream energy sources are still thermal and nuclear power generation. Therefore, from the viewpoint of environmental and energy issues, there is a demand for novel heat generating devices and heat utilization systems that utilize inexpensive, clean, and safe energy sources.

[0005] Therefore, an object of the present invention is to provide a novel heat generating device and heat utilization system that utilizes an inexpensive, clean and safe energy source, and a film-shaped heating element as an inexpensive, clean and safe energy source. [Means for solving the problem]

[0006] The heat generating device of the present invention comprises a hollow sealed container, a cylinder provided in a hollow portion formed by the inner surface of the sealed container, a heating element provided on the outer surface of the cylinder and generating heat by absorbing and releasing hydrogen contained in a hydrogen-based gas supplied to the hollow portion, and a flow path formed by the inner surface of the cylinder through which a fluid that exchanges heat with the heating element flows, the heating element having a base formed of a hydrogen storage metal, a hydrogen storage alloy, or a proton conductor, and a multilayer film provided on the base, the multilayer film having a first layer formed of a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from the first layer and having a thickness of less than 1000 nm.

[0007] A heat utilization system of the present invention includes the above-described heat generating device, and a fluid utilization device that utilizes the fluid heated by the heat generating element.

[0008] The film-shaped heating element of the present invention comprises a film-shaped base formed from a hydrogen storage metal, a hydrogen storage alloy, or a proton conductor, and a film-shaped multilayer film provided on the base, the multilayer film having a first layer formed from a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed from a hydrogen storage metal, hydrogen storage alloy, or ceramic different from the first layer and having a thickness of less than 1000 nm. Effect of the Invention

[0009] According to the present invention, a heating element that generates heat by absorbing and releasing hydrogen is used as an energy source, so that energy can be supplied cheaply, cleanly, and safely. [Brief description of the drawings]

[0010] [Figure 1] FIG. 2 is a schematic diagram of the heat generating device according to the first embodiment. [Diagram 2] FIG. 2 is a perspective view showing a part of a sealed container in section. [Diagram 3] FIG. [Figure 4] FIG. 2 is an explanatory diagram for explaining a flow of a fluid in a sealed container. [Diagram 5] FIG. 2 is a cross-sectional view showing the structure of a heating element having a first layer and a second layer. [Figure 6] FIG. 1 is an explanatory diagram for explaining generation of excess heat. [Figure 7] FIG. 6 is a schematic diagram of a heat generating device according to a second embodiment. [Figure 8] FIG. 11 is a schematic diagram of a heat generating device according to a third embodiment. [Figure 9] 10 is a graph showing the relationship between entropy and pressure in a Rankine cycle including a heat generation device and a steam turbine according to a third embodiment. [Figure 10] 10 is a graph showing the relationship between entropy and temperature in a Rankine cycle including a heat generation device and a steam turbine according to a third embodiment. [Figure 11]10 is a graph showing the relationship between entropy and enthalpy in a Rankine cycle including a heat generation device and a steam turbine according to a third embodiment. [Figure 12] FIG. 13 is a schematic view of a heat generating device according to a fourth embodiment. [Figure 13] FIG. 13 is a schematic diagram of a heat generating device according to a fifth embodiment. [Figure 14] FIG. 13 is a schematic diagram of a heat generating device according to a sixth embodiment. [Figure 15] 13 is a graph showing the state of heat exchange in the boiler of the sixth embodiment. [Figure 16] 13 is a graph showing the relationship between entropy and pressure in a Rankine cycle including a heat generation device and a steam turbine according to a sixth embodiment. [Figure 17] 13 is a graph showing the relationship between entropy and temperature in a Rankine cycle including a heat generation device and a steam turbine according to a sixth embodiment. [Figure 18] 13 is a graph showing the relationship between entropy and enthalpy in a Rankine cycle including a heat generation device and a steam turbine according to a sixth embodiment. [Figure 19] 1 is a cross-sectional view showing the structure of a heating element having a first layer, a second layer, and a third layer. [Figure 20] 1 is a cross-sectional view showing the structure of a heating element having a first layer, a second layer, a third layer, and a fourth layer. [Figure 21] FIG. 2 is a perspective view of a cylindrical body provided with a plurality of heating elements. [Figure 22] FIG. 2 is a schematic diagram of a heating element manufacturing apparatus for manufacturing a heating element. [Figure 23] FIG. 2 is a perspective view of a heating unit in which cylindrical bodies each having a heating element formed thereon are connected to each other. [Figure 24] FIG. 2 is a perspective view of a film-shaped heating element. [Diagram 25] FIG. 2 is a schematic diagram of a film-shaped heating element manufacturing apparatus for manufacturing the film-shaped heating element. [Figure 26] FIG. 2 is a cross-sectional view showing the structure of a film-shaped heating element having a passivation film. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0011] [First embodiment] 1, heat generating device 10 includes sealed container 11, cylindrical body 12, heating element 13, flow path 14, fluid circulator 15, and controller 16. Heat generating device 10 includes heating element 13 provided outside cylindrical body 12, flow path 14 provided inside cylindrical body 12, and heats fluid flowing through flow path 14 with heating element 13 to generate high-temperature fluid.

[0012] The fluid includes at least one of a liquid and a gas. The fluid is preferably one that has excellent thermal conductivity and is chemically stable. Examples of the gas include helium gas, argon gas, freon gas, hydrogen gas, nitrogen gas, water vapor, air, and carbon dioxide. Examples of the liquid include water, molten salt (KNO3 (40%)-NaNO3 (60%), etc.), and liquid metal (Pb, etc.). In addition, the fluid may be a multiphase fluid in which solid particles are dispersed in a gas or liquid. The solid particles are metals, metal compounds, alloys, ceramics, etc. Examples of the metals include copper, nickel, titanium, and cobalt. Examples of the metal compounds include oxides, nitrides, and silicides of the above metals. Examples of the alloys include stainless steel and chromium molybdenum steel. Examples of the ceramics include alumina. The type of fluid can be appropriately selected depending on the application of the heating device 10.

[0013] In this embodiment, water is used as the fluid. The heat generating device 10 heats the water flowing through the flow path 14 with the heating element 13 to generate high-temperature, high-pressure water (hereinafter referred to as high-temperature, high-pressure water).

[0014] The sealed container 11 is configured to house the cylinder 12 and the heating element 13. The sealed container 11 has a hollow cylindrical shape. In this example, the shape of the sealed container 11 is cylindrical, but it can have various shapes such as an elliptical cylinder or a rectangular cylinder. The height of the sealed container 11 is, for example, 13 to 15 m. The diameter of the sealed container 11 is, for example, 3.1 m. The dimensions of the sealed container 11 are not particularly limited and can be designed appropriately.

[0015] The sealed container 11 is made of a material having heat resistance and pressure resistance. The material of the sealed container 11 can be appropriately selected according to the use conditions (for example, temperature, pressure, etc.). For example, carbon steel, austenitic stainless steel, heat-resistant non-ferrous alloy steel, etc. are used as the material of the sealed container 11. For example, SUS304L, SUS316L, SUS310S, etc., which are specified in JIS (Japanese Industrial Standards), are used as the austenitic stainless steel. For example, for the material of the sealed container 11, carbon steel is used when the use temperature is 350°C or less, SUS304L is used when the use temperature exceeds 350°C, SUS316L or SUS310S is used when the use temperature is 600 to 700°C, and a non-ferrous alloy according to heat resistance is used when the use temperature exceeds 700°C.

[0016] The sealed container 11 has a cylindrical main body 17, a fluid inlet chamber 18 provided at one end of the main body 17, and a fluid outlet chamber 19 provided at the other end of the main body 17. In the sealed container 11, the side of the main body 17 on which the fluid inlet chamber 18 is provided is the lower side, and the side of the main body 17 on which the fluid outlet chamber 19 is provided is the upper side.

[0017] The main body 17 has a gas inlet 21 which is an inlet for the hydrogen-based gas, and a gas outlet 22 which is an outlet for the hydrogen-based gas. The shape of the main body 17 is cylindrical in this example, but it can be various shapes such as an elliptical cylinder shape or a square cylinder shape. The fluid inflow chamber 18 has a fluid inlet 23 which is an inlet for the fluid. The fluid outflow chamber 19 has a fluid outlet 24 which is an outlet for the fluid.

[0018] Hydrogen-based gas means a gas containing hydrogen isotopes. As the hydrogen-based gas, at least one of deuterium gas and light hydrogen gas is used. Light hydrogen gas includes a mixture of naturally occurring light hydrogen and deuterium, that is, a mixture in which the abundance ratio of light hydrogen is 99.985% and the abundance ratio of deuterium is 0.015%. In the following description, when there is no distinction between light hydrogen and deuterium, it will be described as "hydrogen".

[0019] A hollow space 26 in which the cylindrical body 12 and the heating element 13 are disposed is provided inside the sealed container 11. The hollow space 26 is formed by the inner surface of the sealed container 11. Specifically, the hollow space 26 is a cylindrical space defined by the inner surface of the main body 17 and the outer surface of the heating element 13 described below.

[0020] The hollow portion 26 is connected to a gas supply unit 27 via the gas inlet 21. Although not shown, the gas supply unit 27 is composed of a gas cylinder for storing a hydrogen-based gas, a pipe connecting the gas cylinder and the hollow portion 26, a valve for adjusting the flow rate of the hydrogen-based gas and the pressure in the pipe, and the like, and supplies the hydrogen-based gas to the hollow portion 26.

[0021] The hollow portion 26 is connected to a gas exhaust portion 28 via the gas outlet 22. Although not shown, the gas exhaust portion 28 is composed of a vacuum pump, piping that connects the vacuum pump and the hollow portion 26, valves that adjust the flow rate of the hydrogen-based gas and the pressure in the piping, and the like, and performs vacuum evacuation of the hollow portion 26.

[0022] The cylindrical body 12 is provided in the hollow portion 26 of the sealed container 11. The cylindrical body 12 is a hollow pipe. The inside of the cylindrical body 12 is controlled to a predetermined pressure by the control unit 16 described later. In this embodiment, the pressure is controlled so that water remains in a liquid state at about 300°C without becoming steam. The pressure inside the cylindrical body 12 is set to 100 bar in this embodiment, but is not limited to this and can be designed as appropriate.

[0023] The cylindrical body 12 is formed of a material having heat resistance and pressure resistance. The material of the cylindrical body 12 can be appropriately selected depending on the conditions of use (for example, temperature, pressure, etc.). The same material as that of the sealed container 11, i.e., carbon steel, austenitic stainless steel, heat-resistant non-ferrous alloy steel, etc., is used as the material of the cylindrical body 12. The shape of the cylindrical body 12 can be various shapes such as a cylindrical shape, an elliptical cylindrical shape, a square cylindrical shape, etc. The various dimensions of the cylindrical body 12 are not particularly limited and can be designed appropriately. For example, the cylindrical body 12 can be a cylindrical shape with a length of 10 m, a thickness (wall thickness) of 0.005 to 0.010 m, and a diameter of 0.05 m. It is preferable that the thickness is appropriately designed based on the temperature and pressure of the fluid flowing inside the cylindrical body 12 (the flow path 14 described later). The cylindrical body 12 can be formed to a desired length, for example, by connecting multiple pipe materials in series. The number of the cylindrical bodies 12 is not particularly limited and may be one or more. For example, it is possible to install 800 cylinders 12 in the sealed container 11. In this embodiment, a plurality of cylinders 12 are provided in the hollow portion 26. That is, the heat generating device 10 includes a plurality of cylinders 12 provided in the hollow portion 26. Note that, in FIG. 1, for the sake of simplicity of the drawing, only one of the plurality of cylinders 12 is shown, and the other cylinders 12 are omitted.

[0024] The heating element 13 is provided on the outer surface of the cylindrical body 12. Therefore, the heating element 13 has a cylindrical shape. In this embodiment, one heating element 13 is provided for each of the multiple cylindrical bodies 12. That is, the heating device 10 includes multiple heating elements 13.

[0025] The heating element 13 is disposed in the hollow portion 26 and comes into contact with the hydrogen-based gas supplied to the hollow portion 26. The thickness (wall thickness) of the heating element 13 is not particularly limited and can be appropriately designed so as to obtain a desired output as the heating device 10, and is, for example, 0.005 to 0.010 m. One heating element 13 is provided on the entire outer surface of one cylindrical body 12. Note that a plurality of heating elements 13 may be provided on the outer surface of one cylindrical body 12 with intervals between them.

[0026] Heat generating element 13 generates heat by absorbing and releasing hydrogen contained in the hydrogen-based gas. Heat generating element 13 absorbs hydrogen contained in the hydrogen-based gas by supplying the hydrogen-based gas to hollow portion 26. Heat generating element 13 is heated with hollow portion 26 evacuated to a vacuum, and thus heats up to a temperature equal to or higher than the heating temperature, generating heat (hereinafter referred to as excess heat).

[0027] When the operation of the heat generating device 10 is started, the heat generating element 13 is heated by water (fluid) heated by the heating section 33 described later, and generates excess heat when it reaches a predetermined temperature. In this embodiment, it is assumed that the heat generating element 13 generates excess heat by being heated to, for example, 270 to 300°C. The temperature of the heat generating element 13 in the state of generating excess heat is, for example, within a range of 300°C to 1500°C.

[0028] The flow path 14 is provided inside the cylindrical body 12. The flow path 14 is formed by the inner surface of the cylindrical body 12. The flow path 14 passes a fluid that exchanges heat with the heating element 13. The flow path 14 is not connected to the hollow portion 26. Therefore, the flow of the fluid and the hydrogen-based gas between the flow path 14 and the hollow portion 26 is prevented.

[0029] When the heated fluid flows into the flow path 14, the heating element 13 is heated via the cylindrical body 12. This causes the heating element 13 to generate excess heat, and the fluid flowing through the flow path 14 is heated via the cylindrical body 12. As a result, a high-temperature, high-pressure fluid is generated in the flow path 14, and this high-temperature, high-pressure fluid flows out of the flow path 14. In the case of this embodiment, the water that flows into the flow path 14 is heated by the heating element 13, which generates excess heat, and flows out of the flow path 14 as high-temperature, high-pressure water of, for example, 300°C. Note that a part of the water in the flow path 14 may become water vapor.

[0030] The fluid circulation unit 15 has a circulation line 30 that is connected to the flow path 14 and circulates the fluid between the inside and outside of the cylindrical body 12. The circulation line 30 connects the fluid inlet 23 of the fluid inflow chamber 18 and the fluid outlet 24 of the fluid outflow chamber 19 on the outside of the sealed container 11.

[0031] A cooling section 32 for cooling the fluid and a heating section 33 for heating the fluid are provided in the circulation line 30. That is, the heat generating device 10 further includes the cooling section 32 and the heating section 33.

[0032] In this embodiment, in addition to the cooling unit 32 and the heating unit 33, a reservoir tank 36 for storing water and a pump 40 for circulating water are provided in the circulation line 30. Furthermore, a pressure gauge PI, a thermometer TI, and a flow meter FI are provided in each part of the circulation line 30. The number of the pressure gauges PI, the thermometers TI, and the flow meter FI is not particularly limited, but is preferably one or more. In each part of the circulation line 30 between the fluid outlet 24 and the fluid inlet 23 of the sealed container 11, a pressure gauge PI, a thermometer TI, the cooling unit 32, a thermometer TI, the reservoir tank 36, the pump 40, a thermometer TI, the heating unit 33, a thermometer TI, and a flow meter FI are provided in this order. The reservoir tank 36 is provided with a thermometer TI.

[0033] The cooling unit 32 is electrically connected to the control unit 16, and the driving thereof is controlled by the control unit 16. The cooling unit 32 cools the high-temperature, high-pressure water as a fluid flowing out from the flow path 14. In the cooling unit 32, for example, the high-temperature, high-pressure water of 300°C is cooled to 270°C.

[0034] In this example, the cooling unit 32 functions as a boiler. The cooling unit 32 as a boiler exchanges heat between high-temperature, high-pressure water and boiler water as a heat medium, and generates high-temperature, high-pressure steam (hereinafter referred to as superheated steam) from the boiler water. This superheated steam can be supplied to a steam turbine, and electricity can be generated by a generator connected to the steam turbine.

[0035] The heating unit 33 is electrically connected to the control unit 16, and the driving thereof is controlled by the control unit 16. The heating unit 33 heats water as a fluid to be caused to flow into the flow path .

[0036] The heating unit 33 is, for example, an electric furnace that generates heat by power supply. The heating unit 33 may be a fuel furnace that generates heat by burning fuel. When the operation of the heat generating device 10 is started, the heating unit 33 heats water to, for example, 270°C. When the fluid heated by the heating unit 33 flows into the flow path 14, the heating element 13 is heated to a predetermined temperature and generates excess heat. That is, the heating unit 33 functions as a start-up heater that heats the heating element 13 to a predetermined temperature when the operation of the heat generating device 10 is started.

[0037] In this embodiment, the heating unit 33 is provided directly in the circulation line 30, but may be provided in a branch line branched off from the circulation line 30. When the heating unit 33 is provided in the branch line, a part or all of the fluid flowing through the circulation line 30 is caused to flow into the branch line, and the fluid heated by the heating unit 33 is returned to the circulation line 30. This allows the heated fluid to flow into the flow path 14. By connecting the circulation line 30 and the branch line via a valve, the flow rate of water flowing into the branch line can be controlled.

[0038] The cooling section 32 and the heating section 33 are controlled to maintain the temperature of the fluid flowing into the flow path 14 within a predetermined range during operation of the heat generating device 10. For example, when the heat generating element 13 generates excess heat, the temperature of the water flowing into the flow path 14 is maintained at about 270°C. This keeps the temperature of the heat generating element 13 almost constant, and stabilizes the temperature and flow rate of the high-temperature, high-pressure water flowing out of the flow path 14.

[0039] The control unit 16 is electrically connected to each part of the heat generating device 10 and controls the operation of each part. The control unit 16 includes, for example, a central processing unit, and a storage unit such as a read only memory or a random access memory. The processing unit executes various types of arithmetic processing using, for example, programs and data stored in the storage unit.

[0040] The control unit 16 performs temperature reduction control by driving the cooling unit 32 and causing the fluid cooled by the cooling unit 32 to flow into the flow path 14 to reduce the temperature of the heating element 13, and temperature increase control by driving the heating unit 33 and causing the fluid heated by the heating unit 33 to flow into the flow path 14 to increase the temperature of the heating element 13. The control unit 16 adjusts the temperature of the fluid flowing into the flow path 14 by switching between temperature reduction control and temperature increase control based on the temperature of the fluid circulating through the circulation line 30.

[0041] The control unit 16 controls the temperature, pressure, flow rate, etc. of each part of the heat generating device 10 based on the detection results of the thermometer TI, the pressure gauge PI, the flow meter FI, etc. For example, when the heat generating element 13 generates excess heat at 270 to 300°C, the control unit 16 sets the temperature of the fluid flowing into the flow path 14 to 270°C and the pressure to 100 bar. The enthalpy of the fluid flowing into the flow path 14 is 283 kcal / kg, and is 28.3×10 8 kcal / h. The water that flows into the flow path 14 is heated to 300°C by the heating element 13 and flows out of the flow path 14 as high-temperature, high-pressure water. Note that since the saturation temperature of water when the pressure is 100 bar is 311°C, the water that flows into the flow path 14 does not become steam even when heated to 300°C.

[0042] Fig. 2 is a perspective view showing a partly cutaway portion of the sealed container 11. In Fig. 2, one of the multiple cylindrical bodies 12 and heating elements 13 is partially cut away to show its interior.

[0043] As shown in FIG. 2, the fluid circulation unit 15 has an external fluid line 45 in addition to the circulation line 30. Each cylinder 12 provided in the hollow portion 26 of the sealed container 11 is heated by the heat of the fluid flowing through the flow path 14 provided inside or the heat of the heating element 13 provided on the outer surface, and the temperature rises and the thermal expansion occurs. On the other hand, the main body 17 of the sealed container 11 is not in contact with the cylinder 12 and the heating element 13, and the temperature rise is suppressed more than that of the cylinder 12, so that the thermal expansion is smaller than that of the cylinder 12. Therefore, thermal stress occurs in the multiple cylinders 12 and the main body 17 of the sealed container 11. The external fluid line 45 is for preventing damage due to this thermal stress.

[0044] The external fluid line 45 is provided on the outer surface of the sealed container 11, and is connected to the circulation line 30 so that a part of the fluid flows through the external fluid line 45. The external fluid line 45 has a plurality of first pipes 47 provided on the outer surface of the sealed container 11, a first ring pipe 48 connecting one ends of the plurality of first pipes 47 to each other, a second ring pipe 49 connecting the other ends of the plurality of first pipes 47 to each other, a plurality of second pipes 50 connecting the first ring pipe 48 and the fluid inlet chamber 18, and a plurality of third pipes 51 connecting the second ring pipe 49 and the fluid outlet chamber 19.

[0045] The first pipes 47 each extend in the vertical direction of the sealed container 11 (Z direction in the figure). The first ring pipe 48 is provided on a flange at one end of the main body 17 of the sealed container 11. The second ring pipe 49 is provided on a flange at the other end of the main body 17 of the sealed container 11. The first ring pipe 48 and the second ring pipe 49 are formed in a ring shape along the outer periphery of the main body 17 from a pipe material, and are configured so that a fluid flows inside. The second pipes 50 guide the fluid in the fluid inflow chamber 18 to the first ring pipe 48. The fluid in the first ring pipe 48 passes through the first pipes 47 and moves to the second ring pipe 49. The third pipes 51 guide the fluid in the second ring pipe 49 to the fluid outflow chamber 19. The number of the first pipes 47, the second pipes 50, and the third pipes 51 is not particularly limited and can be changed as appropriate.

[0046] As shown in Fig. 3, the first pipes 47 are arranged at equal intervals in the circumferential direction of the sealed container 11. The cross-sectional shape of each of the first pipes 47 is semicircular in this embodiment, but is not limited thereto and may be rectangular, semi-elliptical, or the like. Fig. 3 is a cross-sectional view of the main body 17 of the sealed container 11 along the XY plane.

[0047] In the hollow portion 26, the multiple cylinders 12 are arranged in a staggered pattern at equal intervals. That is, the shapes of the centers of three adjacent cylinders 12 form equilateral triangles (shown by dotted lines in FIG. 3). The distance between the centers of adjacent cylinders 12 is 0.15 m.

[0048] The flow of fluid in the sealed container 11 will be described with reference to Fig. 4. The fluid flowing through the circulation line 30 flows into the fluid inlet chamber 18 from the fluid inlet 23. A part of the fluid in the fluid inlet chamber 18 flows from one end of the multiple cylinders 12 to the flow path 14. In the flow path 14, the fluid is heated by the heating element 13. The fluid heated in the flow path 14 flows from the other end of the multiple cylinders 12 to the fluid outlet chamber 19, and flows out from the fluid outlet 24 to the circulation line 30.

[0049] The remaining part of the fluid in the fluid inlet chamber 18 flows into the plurality of second pipes 50. The fluid in the plurality of second pipes 50 is guided to the plurality of first pipes 47 via a first ring pipe 48. In the plurality of first pipes 47, the fluid is heated by radiant heat from the heating element 13. The fluid heated in the plurality of first pipes 47 is guided to the fluid outlet chamber 19 via a second ring pipe 49 and a plurality of third pipes 51 in this order, and merges with the fluid heated in the flow path 14.

[0050] The above-described external fluid line 45, the sealed container 11, the cylindrical body 12, the heating element 13, and the flow path 14 constitute a heat generating module 55. The heat generating device 10 of the present embodiment includes one heat generating module 55, but the number of heat generating modules 55 is not particularly limited and may be two or more.

[0051] The details of the heating element 13 will be described with reference to Fig. 5. As shown in Fig. 5, the heating element 13 has a base 57 and a multilayer film 58.

[0052] The pedestal 57 is provided on the outer surface of the cylindrical body 12. The cylindrical body 12 is not shown in FIG. 5. The pedestal 57 is made of a hydrogen storage metal, a hydrogen storage alloy, or a proton conductor. Examples of hydrogen storage metals include Ni, Pd, V, Nb, Ta, and Ti. Examples of hydrogen storage alloys include LaNi5, CaCu5, MgZn2, ZrNi2, ZrCr2, TiFe, TiCo, Mg2Ni, and Mg2Cu. Examples of proton conductors include BaCeO3-based (e.g., Ba(Ce 0.95 Y 0.05 )O 3-6 ), SrCeO3 system (e.g. Sr(Ce 0.95 Y 0.05 )O 3-6 ), CaZrO3 system (e.g. CaZr 0.95 Y 0.05 O 3-α ), SrZrO3 series (e.g. SrZr 0.9 Y 0.1 O 3-α ), β Al2O3, β Ga2O3, etc. are used.

[0053] Multilayer film 58 is provided on the surface of pedestal 57. Multilayer film 58 is composed of a first layer 59 made of a hydrogen storage metal or a hydrogen storage alloy, and a second layer 60 made of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from that of first layer 59. A dissimilar material interface 61 is formed between pedestal 57 and first layer 59 and second layer 60.

[0054] The first layer 59 is formed of, for example, any of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, or an alloy thereof. The alloy forming the first layer 59 is preferably an alloy consisting of two or more of Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co. The alloy forming the first layer 59 may be an alloy in which an additive element is added to Ni, Pd, Cu, Mn, Cr, Fe, Mg, or Co.

[0055] The second layer 60 is formed of, for example, any of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, alloys thereof, and SiC. The alloy forming the second layer 60 is preferably an alloy consisting of two or more of Ni, Pd, Cu, Mn, Cr, Fe, Mg, and Co. The alloy forming the second layer 60 may be an alloy in which an additive element is added to Ni, Pd, Cu, Mn, Cr, Fe, Mg, or Co.

[0056] As a combination of the first layer 59 and the second layer 60, when the types of elements are expressed as "first layer 59-second layer 60 (second layer 60-first layer 59)", the following are preferable: Pd-Ni, Ni-Cu, Ni-Cr, Ni-Fe, Ni-Mg, Ni-Co. When the second layer 60 is made of ceramics, the "first layer 59-second layer 60" is preferably Ni-SiC.

[0057] The thickness of the first layer 59 and the thickness of the second layer 60 are preferably less than 1000 nm. If the thickness of each of the first layer 59 and the second layer 60 is 1000 nm or more, hydrogen is less likely to permeate the multilayer film 58. Furthermore, by making the thickness of each of the first layer 59 and the second layer 60 less than 1000 nm, a nanostructure that does not exhibit bulk characteristics can be maintained. It is more preferable that the thickness of each of the first layer 59 and the second layer 60 is less than 500 nm. By making the thickness of each of the first layer 59 and the second layer 60 less than 500 nm, a nanostructure that does not exhibit bulk characteristics at all can be maintained.

[0058] In FIG. 5, the multilayer film 58 has a configuration in which a first layer 59 and a second layer 60 are alternately laminated in this order on the surface of the base 57. The first layer 59 and the second layer 60 each have five layers. The number of layers of the first layer 59 and the second layer 60 may be changed as appropriate. The multilayer film 58 may have a configuration in which the second layer 60 and the first layer 59 are alternately laminated in this order on the surface of the base 57. The multilayer film 58 may have one or more first layers 59 and one or more second layers 60, and may have one or more different material interfaces 61.

[0059] As shown in Fig. 6, hydrogen atoms are allowed to permeate the dissimilar substance interface 61. Fig. 6 is a schematic diagram showing how hydrogen atoms in the metal lattice in the first layer 59 permeate the dissimilar substance interface 61 and move into the metal lattice of the second layer 60 when hydrogen is absorbed in the first layer 59 and the second layer 60 formed of a hydrogen storage metal having a face-centered cubic structure and then the first layer 59 and the second layer 60 are heated.

[0060] When hydrogen-based gas is supplied to the sealed container 11, the heating element 13 absorbs hydrogen through the pedestal 57 and the multilayer film 58. Even if the supply of hydrogen-based gas to the sealed container 11 is stopped, the heating element 13 maintains the state in which hydrogen is absorbed in the pedestal 57 and the multilayer film 58. When the heating element 13 starts to be heated by the fluid, the hydrogen absorbed in the pedestal 57 and the multilayer film 58 is released and quantum diffuses while hopping inside the multilayer film 58. It is known that hydrogen is light and quantum diffuses while hopping between sites (octohedral or tetrahedral sites) occupied by hydrogen in a certain substance A and a certain substance B. When the heating element 13 is heated in a vacuum state, hydrogen penetrates the heterogeneous substance interface 61 by quantum diffusion, generating excess heat above the temperature of the fluid.

[0061] An example of a manufacturing method of the heating element 13 will be described. The heating element 13 can be manufactured by, for example, a sputtering method. After forming a pedestal 57 on the outer surface of a cylindrical body 12, a first layer 59 and a second layer 60 are alternately formed on the pedestal 57 to obtain the heating element 13. When forming the pedestal 57, it is preferable to form it thicker than the first layer 59 and the second layer 60, and Ni is used as the material of the pedestal 57, for example. It is preferable to form the first layer 59 and the second layer 60 continuously in a vacuum state. As a result, no natural oxide film is formed between the first layer 59 and the second layer 60, and only the interface 61 of different materials is formed. The manufacturing method of the heating element 13 is not limited to the sputtering method, and a deposition method, a wet method, a thermal spraying method, an electroplating method, etc. can be used.

[0062] The heat generation method using the heat generation device 10 includes a hydrogen absorption step of supplying a hydrogen-based gas to the hollow portion 26 of the sealed container 11 to cause the heating element 13 to absorb hydrogen contained in the hydrogen-based gas, and a hydrogen release step of evacuating the hollow portion 26 of the sealed container 11 and heating the heating element 13 to release the hydrogen absorbed in the heating element 13. The hydrogen absorption step and the hydrogen release step may be performed repeatedly.

[0063] As described above, the heat generating device 10 generates a high-temperature fluid (high-temperature, high-pressure water) by performing heat exchange between the heat generating element 13 provided on the outer surface of the cylindrical body 12 and a fluid (water) flowing through the flow path 14 formed by the inner surface of the cylindrical body 12. The high-temperature, high-pressure water as a high-temperature fluid can be used to generate superheated steam in a boiler (cooling section 32). The superheated steam generated in the boiler can be used for a steam turbine. The heat generating element 13 generates heat using hydrogen, so it does not generate greenhouse gases such as carbon dioxide. In addition, the hydrogen used to generate heat in the heat generating element 13 is inexpensive because it can be generated from water. Furthermore, the heat generated by the heat generating element 13 is considered safe because it does not involve a chain reaction, unlike a nuclear fission reaction. Therefore, the heat generating device 10 uses the heat generating element 13 as an energy source, so it can supply energy inexpensively, cleanly, and safely.

[0064] In the heating device 10, since the external fluid line 45 is provided on the outer surface of the main body 17 of the sealed container 11, even when the main body 17 is heated by radiant heat from the heating element 13, the heat of the main body 17 is transferred to the fluid flowing through the external fluid line 45, thereby suppressing thermal expansion of the main body 17. In addition, since the flow path 14 is provided inside the cylindrical body 12, even when the cylindrical body 12 is heated by the heating element 13, the heat of the cylindrical body 12 is transferred to the fluid flowing through the flow path 14, thereby suppressing thermal expansion of the cylindrical body 12. In the heating device 10, even when the cylindrical body 12 and the main body 17 thermally expand, the extension of the cylindrical body 12 and the extension of the main body 17 are approximately the same, thereby preventing damage due to thermal stress.

[0065] In the heating device 10, the control unit 16 switches between temperature decreasing control and temperature increasing control, so that the temperature of the fluid circulating through the circulation line 30 is kept constant and the heat generation of the heating element 13 is stabilized.

[0066] [Second embodiment] In the first embodiment, high-temperature, high-pressure water is generated by heating water flowing into the flow passage 14 with the heating element 13, but in the second embodiment, water flowing into the flow passage 14 is heated with the heating element 13 to generate superheated steam, and this superheated steam is used as the working fluid of a steam turbine to generate power. The same reference numerals are used for the same members as in the first embodiment, and the description thereof is omitted.

[0067] As shown in FIG. 7, the heat generating device 70 includes one heat generating module 55, similar to the heat generating device 10 of the first embodiment. The heat generating device 70 is configured so that liquid (water) as a fluid flows into the flow path 14, and gas (steam) as a fluid flows out of the flow path 14. Specifically, when the heat generating device 70 starts operating, the water as a fluid is heated by the heating unit 33. The water heated by the heating unit 33 flows into the flow path 14, and the heat generating element 13 is heated through the cylindrical body 12. As a result, the heat generating element 13 generates excess heat. Then, the heat generating element 13 generates excess heat, and the water flowing through the flow path 14 is heated through the cylindrical body 12. As a result, superheated steam is generated in the flow path 14, and this superheated steam flows out of the flow path 14. Note that the water in the flow path 14 may not all become steam, and a part of the water may flow out of the flow path 14 as water. 7 shows a state in which water and water vapor flow out of the flow path 14, water accumulates below the fluid outflow chamber 19, and water vapor moves to above the fluid outflow chamber 19. The fluid outflow chamber 19 is provided with a pressure gauge PI, a thermometer TI, and a level gauge LI for detecting the height of the liquid level in the fluid outflow chamber 19.

[0068] In this embodiment, the pressure inside the cylinder 12 is controlled to 90 bar. When the heating element 13 generates excess heat at 270 to 300°C, the control unit 16 sets the temperature of the fluid flowing into the flow path 14 to 270°C and the pressure to 90 bar. The water that flows into the flow path 14 is heated by the heating element 13 and flows out of the flow path 14 as superheated steam at, for example, 304°C.

[0069] In the second embodiment, the circulation line 30 is provided with a cooling section 32, a heating section 33, and a steam turbine 71. The cooling section 32 cools the water vapor discharged from the steam turbine 71, condenses it, and condenses it. The lower the cooling temperature in the cooling section 32, the lower the back pressure of the steam turbine 71, and the higher the power generation efficiency of the generator connected to the steam turbine 71. The back pressure of the steam turbine 71 is controlled to, for example, 0.05 bar, and is determined based on the cooling method and heat medium of the cooling section 32. The heating section 33 is provided in a branch line 30a branched from the circulation line 30. The branch line 30a is connected to the circulation line 30 via a valve (not shown). When the heat generating device 70 starts operating, a part or all of the water flowing through the circulation line 30 flows into the branch line 30a, is heated by the heating section 33, and is returned to the circulation line 30. As a result, the water heated to, for example, 270°C in the heating section 33 flows into the flow path 14, and the heating element 13 generates excess heat.

[0070] The steam turbine 71 is a fluid utilization device that utilizes the superheated steam flowing out from the flow path 14 as a working fluid. The steam turbine 71 has a rotating shaft connected to a generator, and rotates about the rotating shaft when the superheated steam is supplied. The generator generates electricity when the steam turbine 71 rotates.

[0071] In the circulation line 30 of the heat generating device 70, in addition to the cooling section 32, the heating section 33, and the steam turbine 71, a steam tank 72, a reservoir tank 73, a deaerator 74, a preheater 75, control valves 76a, 76b, and pumps 77a, 77b are provided. In Fig. 7, in the circulation line 30, the control valve 76a, the steam tank 72, the steam turbine 71, the cooling section 32, the reservoir tank 73, the pump 77a, the deaerator 74, the pump 77b, the preheater 75, the heating section 33, and the control valve 76b are provided in this order from the fluid outlet 24 of the sealed container 11. The deaerator 74, the preheater 75, the control valves 76a, 76b, and the pumps 77a, 77b are electrically connected to the control section 16.

[0072] The steam tank 72 is for temporarily storing the water vapor generated in the flow path 14. The steam tank 72 is connected to a deaerator 74 via a deaeration pipe 30b, and is connected to a preheater 75 via a preheating pipe 30c.

[0073] The reservoir tank 73 is for storing the water condensed in the cooling unit 32. A thermometer TI is provided in the reservoir tank 73. The reservoir tank 73 is connected to a water supply source (not shown) and is configured to receive water from the supply source.

[0074] The deaerator 74 uses steam supplied from the steam tank 72 via the deaerator pipe 30b to remove oxygen from the water to be introduced into the flow path 14. Deaeration of the water prevents corrosion of the boiler. The water deaerated by the deaerator 74 is guided to the preheater 75.

[0075] The preheater 75 uses steam supplied from the steam tank 72 via the preheating piping 30c to preheat the water to be flowed into the flow path 14. In the preheater 75, the water is preheated to, for example, 270° C. The water preheated in the preheater 75 flows into the flow path 14.

[0076] The control valve 76a adjusts the flow rate and pressure of the steam flowing out from the flow path 14. The control valve 76b adjusts the flow rate and pressure of the water flowing into the flow path 14. The pump 77a is for sending the water in the reservoir tank 73 to the deaerator 74. The pump 77b is for sending the water in the deaerator 74 to the preheater 75.

[0077] As described above, the heat generating device 70 generates a high-temperature fluid (superheated steam) by performing heat exchange between the heat generating element 13 provided on the outer surface of the cylindrical body 12 and a fluid (water) flowing through the flow path 14 formed by the inner surface of the cylindrical body 12. The superheated steam as a high-temperature fluid can be used in the steam turbine 71. The heat generating device 70 and the steam turbine 71 as a fluid utilization device constitute a heat utilization system 79. Therefore, the heat generating device 70 and the heat utilization system 79 use the heat generating element 13 as an energy source, and can supply energy cheaply, cleanly, and safely.

[0078] As the fluid utilization device, a steam turbine 71 is suitable when the fluid flowing out from the flow path 14 is steam (superheated steam) as in this embodiment. By using the steam turbine 71 as the fluid utilization device, it becomes possible to recover the thermal energy obtained by the heat generating device 70 as electrical energy. In addition, when the fluid flowing out from the flow path 14 is a gas other than steam (for example, air, chlorofluorocarbon gas, helium gas, etc.), a gas turbine can be applied as the fluid utilization device. It is also possible to supply the fluid flowing out from the flow path 14 to a separately provided boiler, generate superheated steam in the boiler, and supply this superheated steam to a steam turbine to generate power. In addition, as the fluid utilization device, a preheater that preheats the combustion air in a combustion device that burns fuel and combustion air to generate heat can be applied. Examples of the combustion device include a boiler, a rotary kiln, a metal heat treatment furnace, a metal processing heating furnace, a hot air stove, a ceramics firing furnace, an oil refining tower, a dry distillation furnace, and a drying furnace.

[0079] [Third embodiment] The heat generating device 70 in the second embodiment is equipped with one heat generating module 55, but in the third embodiment, multiple heat generating modules 55 are connected. In this example, a case where three heat generating modules 55 are connected will be described, but the number of heat generating modules 55 is not particularly limited, and can be increased or decreased so as to obtain a desired output. The same reference numerals are used for the same members as in the above embodiments, and description thereof will be omitted.

[0080] As shown in Fig. 8, the heat generating device 80 includes three heat generating modules 55a to 55c. The configuration of each of the heat generating modules 55a to 55c is the same as that of the heat generating module 55 in the first embodiment, and therefore a description thereof will be omitted. Although not shown in Fig. 8, the heat generating device 80 includes a control unit 16, which controls the operation of each unit. A gas supply unit 27 and a gas exhaust unit 28 are connected to the hollow portion 26.

[0081] The heat generating device 80 further includes a distribution pipe 81 and a collecting pipe 82. The distribution pipe 81 is connected to the circulation line 30 and distributes the fluid to each of the heat generating modules 55a to 55c. The collecting pipe 82 is connected to the circulation line 30 and collects the fluid flowing out from each of the heat generating modules 55a to 55c.

[0082] The heat generating device 80 has a configuration in which three heat generating modules 55a to 55c are connected in parallel by a distribution pipe 81 and a collecting pipe 82. The three heat generating modules 55a to 55c are not limited to being connected in parallel, but may be connected in series. When the three heat generating modules 55a to 55c are connected in series, the fluid outlet 24 of the heat generating module 55a is connected to the fluid inlet 23 of the heat generating module 55b, and the fluid outlet 24 of the heat generating module 55b is connected to the fluid inlet 23 of the heat generating module 55c, without using the distribution pipe 81 and the collecting pipe 82. As a result, the fluid in the circulation line 30 passes through the heat generating module 55a, the heat generating module 55b, and the heat generating module 55c in order, and is returned to the circulation line 30 again.

[0083] The three heat generating modules 55a to 55c are detachable from the distribution pipe 81 and the collecting pipe 82. The distribution pipe 81 is provided with a control valve 76b corresponding to each of the heat generating modules 55a to 55c.

[0084] The heat generation device 80 has the same configuration as the heat generation device 70 of the second embodiment, except that the heat generation modules 55a to 55c are provided and each of the heat generation modules 55a to 55c is connected by a distribution pipe 81 and a collecting pipe 82. Therefore, the superheated steam generated by the heat generation device 80 is used for the steam turbine 71.

[0085] As described above, the heat generating device 80 has three heat generating modules 55a to 55c, and therefore can achieve high output. Furthermore, the heat generating device 80 has excellent maintainability, since the heat generating modules 55a to 55c are detachable and easily replaceable.

[0086] The heat generating device 80 and the steam turbine 71 as a fluid utilization device constitute a heat utilization system 89. The heat generating device 80 and the heat utilization system 89 utilize the heating element 13 as an energy source, and therefore can supply energy cheaply, cleanly, and safely.

[0087] The power generation efficiency was calculated when a steam turbine was operated using the heat generating device 80. The power generation efficiency of the steam turbine was calculated with a steam pressure of 80 to 100 bar, an exhaust pressure of the water vapor discharged from the steam turbine of 0.05 bar, an exhaust temperature of 32°C, and an exhaust humidity of 15%. The relationship between the steam pressure and the power generation efficiency is shown in Table 1.

[0088] [Table 1]

[0089] The lower the steam pressure, the lower the saturation temperature and the more water vapor is generated, while the higher the steam flow rate ratio, the more the enthalpy drop is suppressed, resulting in improved power generation efficiency of the steam turbine. For example, it can be seen that when the steam pressure is 80 bar, the steam temperature is 296°C. For this reason, assuming that the heating element 13 generates excess heat at a heating temperature of about 300°C, it is preferable that the steam pressure is greater than 80 bar. When the steam pressure is 90 bar, the steam temperature is 304°C, so the heating element 13 generates excess heat and the power generation efficiency of the steam turbine can achieve 21.1%.

[0090] FIG. 9 is a graph showing the relationship between entropy and pressure in a Rankine cycle including a heat generation device 80 and a steam turbine 71 of the third embodiment. In FIG. 9, the horizontal axis indicates entropy, and the vertical axis indicates pressure. FIG. 10 is a graph showing the relationship between entropy and temperature in a Rankine cycle including a heat generation device 80 and a steam turbine 71 of the third embodiment. In FIG. 10, the horizontal axis indicates entropy, and the vertical axis indicates temperature. FIG. 11 is a graph showing the relationship between entropy and enthalpy in a Rankine cycle including a heat generation device 80 and a steam turbine 71 of the third embodiment. In FIG. 11, the horizontal axis indicates entropy, and the vertical axis indicates enthalpy. In Figures 9 to 11, A indicates the fluid state at the inlet of the steam turbine 71, B indicates the fluid state at the outlet of the steam turbine 71, C indicates the fluid state in the cooling section 32, D indicates the fluid state in the pump 77a, E indicates the fluid state at the inlet of the preheater 75, F indicates the fluid state at the outlet of the preheater 75, G indicates the fluid state that has reached the saturation temperature in the flow path 14, and H indicates the fluid state flowing out of the flow path 14.

[0091] [Fourth embodiment] The fourth embodiment is configured to use a gas as the fluid. In this example, the case where air is used as the fluid will be described, but a gas other than air may be used. The same reference numerals will be used for the same members as in the above embodiments, and the description will be omitted.

[0092] As shown in FIG. 12, the heat generating device 90 includes one heat generating module 55, similar to the heat generating device 10 of the first embodiment. The heat generating device 90 is configured so that gas as a fluid flows into the flow path 14 and the gas as a fluid flows out from the flow path 14. Specifically, when the heat generating device 90 starts operating, air as a fluid is heated by the heating unit 33. The air heated by the heating unit 33 flows into the flow path 14, and the heat generating element 13 is heated through the cylindrical body 12. As a result, the heat generating element 13 generates excess heat. Then, the heat generating element 13 generates excess heat, and the air flowing through the flow path 14 is heated through the cylindrical body 12. As a result, high-temperature air (hereinafter referred to as high-temperature air) is generated in the flow path 14, and this high-temperature air flows out from the flow path 14.

[0093] Since the fourth embodiment is configured to use air as the fluid, excess heat can be generated from the heating element 13 in a lower pressure environment than when water is used as the fluid. For example, assuming that the heating element 13 generates excess heat by being heated to a high temperature of about 500°C, the temperature and pressure of the air flowing into the flow path 14 are, for example, 500°C and 1 bar. The temperature and pressure of the high-temperature air flowing out of the flow path 14 are, for example, 700°C and 1 bar. Note that the temperature and pressure of the air and the high-temperature air are not limited to those described above.

[0094] In the fourth embodiment, a cooling section 92 is provided in the circulation line 30 instead of the cooling section 32 in the first embodiment. The circulation line 30 is also provided with a heating section 33, similar to the first embodiment. A description of the heating section 33 will be omitted.

[0095] The cooling unit 92 is electrically connected to the control unit 16, and the driving thereof is controlled by the control unit 16. The cooling unit 92 cools the high-temperature air as a fluid flowing out from the flow path 14. In the cooling unit 92, for example, high-temperature air of 700°C is cooled to 300°C.

[0096] In this example, the cooling unit 92 functions as a boiler. The cooling unit 92 as a boiler exchanges heat between high-temperature air and boiler water as a heat medium, and generates superheated steam from the boiler water. For example, in the cooling unit 92, the pressure is maintained at 130 bar, and heat is exchanged between the boiler water at 250°C and the high-temperature air at 700°C, generating superheated steam at 560°C. The superheated steam generated in the boiler can be supplied to a steam turbine. The steam turbine is driven to generate electricity using a generator.

[0097] In the fourth embodiment, in addition to the cooling section 92 and the heating section 33, a buffer tank 94 for storing air, a blower 96 for sending air, a thermometer TI, a pressure gauge PI, a flow meter FI, and the like are provided in the circulation line 30.

[0098] As described above, the heat generating device 90 generates a high-temperature fluid (high-temperature air) by performing heat exchange between the heat generating element 13 provided on the outer surface of the cylindrical body 12 and a fluid (air) flowing through the flow path 14 formed by the inner surface of the cylindrical body 12. The high-temperature air as a high-temperature fluid can be used to generate superheated steam in the boiler (cooling section 92). The superheated steam generated in the boiler can be used for a steam turbine. Therefore, the heat generating device 90 uses the heat generating element 13 as an energy source, and can supply energy cheaply, cleanly, and safely.

[0099] [Fifth embodiment] In the fifth embodiment, high-temperature air is used to generate superheated steam in a boiler, and the superheated steam is used as the working fluid for a steam turbine to generate electricity. The same reference numerals are used for the same members as in the above embodiments, and the description thereof is omitted.

[0100] 13, the heat generating device 100 includes one heat generating module 55, similar to the heat generating device 90 of the fourth embodiment. A preheater 75 is provided in the circulation line 30 of the heat generating device 100, and air sent by the blower 96 is preheated by the preheater 75. The heat generating device 100 has the same configuration as the heat generating device 90 of the fourth embodiment, except that the preheater 75 is provided in the circulation line 30.

[0101] The heat generating device 100 is connected to a heat recovery line 101. The heat recovery line 101 is connected to a cooling unit 92 serving as a boiler provided in the circulation line 30, and is configured to circulate boiler water through the cooling unit 92.

[0102] The heat recovery line 101 is provided with a control valve 102 , a steam tank 103 , a steam turbine 104 , a condenser 105 , a reservoir tank 106 , a pump 107 , a buffer tank 108 , a deaerator 109 , a pump 110 , and a preheater 111 .

[0103] The control valve 102 adjusts the flow rate and pressure of the steam flowing out from the cooling section 92 as a boiler. The steam tank 103 is for temporarily storing the steam. A thermometer TI is provided in the steam tank 103. The temperature and pressure of the steam stored in the steam tank 103 are, for example, 560°C and 130 bar.

[0104] The steam tank 103 is connected to the buffer tank 108 via a preheating pipe 101a and a preheating pipe 101b. The preheating pipe 101a is connected to a preheater 111. The preheating pipe 101b is connected to a preheater 75. A part of the water vapor stored in the steam tank 103 is supplied to the preheater 111 via the preheating pipe 101a, and is supplied to the preheater 75 via the preheating pipe 101b.

[0105] The steam turbine 104 is a fluid utilization device that utilizes the superheated steam stored in the steam tank 103 as a working fluid. The steam turbine 104 has a rotating shaft connected to a generator, and rotates about the rotating shaft when superheated steam is supplied to the steam turbine 104. The generator generates electricity when the steam turbine 104 rotates. The water vapor discharged from the steam turbine 104 is cooled to, for example, 32.9°C and the pressure is reduced to 0.05 bar. This water vapor contains fine mist-like water droplets.

[0106] The steam turbine 104 is an extraction turbine configured to be able to extract a portion of steam from an extraction section provided midway through the turbine. The extraction section of the steam turbine 104 is connected to a deaerator 109 via an extraction pipe 101c. The water steam extracted from the extraction section of the steam turbine 104 flows through the extraction pipe 101c and is supplied to the deaerator 109. The temperature and pressure of the water steam flowing through the extraction pipe 101c are, for example, 251°C and 12 bar.

[0107] The condenser 105 cools and condenses the steam discharged from the steam turbine 104 to condense it. The reservoir tank 106 is for storing the boiler water condensed by the condenser 105. The pump 107 is for sending the boiler water in the reservoir tank 106 to the buffer tank 108. The temperature and pressure of the boiler water sent by the pump 107 are, for example, 32.9°C and 1 bar.

[0108] The buffer tank 108 is for storing boiler water. The buffer tank 108 is supplied with boiler water sent from the reservoir tank 106, boiler water generated by cooling the steam flowing through the preheating pipe 101a in the preheater 111, and boiler water generated by cooling the steam flowing through the preheating pipe 101b in the preheater 75. The boiler water stored in the buffer tank 108 is sent to the deaerator 109. The temperature and pressure of the boiler water sent to the deaerator 109 are, for example, 87.5°C and 2 bar.

[0109] The deaerator 109 uses steam supplied from the extraction section of the steam turbine 104 via the extraction piping 101c to remove oxygen from the boiler water sent from the buffer tank 108. The deaerator 109 is provided with a thermometer TI and a pressure gauge PI. The pump 110 is for sending the boiler water deaerated by the deaerator 109 to the preheater 111. The temperature and pressure of the boiler water sent by the pump 110 are, for example, 120°C and 2 bar.

[0110] The preheater 111 performs heat exchange between the steam flowing through the preheating pipe 101a and the boiler water supplied from the deaerator 109, thereby preheating the boiler water to be supplied to the cooling section 92. The steam flowing through the preheating pipe 101a is cooled by heat exchange in the preheater 111, condensed, and sent to the buffer tank 108 as boiler water. The temperature and pressure of the steam flowing through the preheating pipe 101a are, for example, 560°C and 130 bar. The temperature and pressure of the boiler water sent to the buffer tank 108 via the preheater 111 are, for example, 120°C and 2 bar.

[0111] The preheater 75 exchanges heat between the steam flowing through the preheating pipe 101b and the air sent by the blower 96, thereby preheating the air to be flowed into the flow path 14. The steam flowing through the preheating pipe 101b is cooled by heat exchange in the preheater 75, condensed, and sent to the buffer tank 108 as boiler water. The temperature and pressure of the steam flowing through the preheating pipe 101b are, for example, 560°C and 130 bar. The temperature and pressure of the boiler water sent to the buffer tank 108 via the preheater 75 are, for example, 120°C and 2 bar.

[0112] In the cooling section 92 serving as a boiler, for example, heat exchange is carried out between boiler water of 250°C and 130 bar supplied from the preheater 111 and high-temperature air of 700°C flowing out from the flow path 14, thereby generating superheated steam of 560°C and 130 bar from the boiler water.

[0113] As described above, the heat generating device 100 generates a high-temperature fluid (high-temperature air) in the same manner as the heat generating device 90 of the fourth embodiment. The high-temperature air as a high-temperature fluid can be used to generate superheated steam in a boiler (cooling section 92). The heat generating device 100 as described above and the steam turbine 104 as a fluid utilization device constitute a heat utilization system 119. The heat generating device 100 and the heat utilization system 119 utilize the heating element 13 as an energy source, and therefore can supply energy cheaply, cleanly, and safely.

[0114] [Sixth embodiment] The heat generating device 100 of the fifth embodiment is provided with one heat generating module 55, but in the sixth embodiment, a plurality of heat generating modules 55 are connected. In this example, a case where three heat generating modules 55a to 55c are connected will be described, but the number of heat generating modules 55 is not particularly limited, and can be increased or decreased so as to obtain a desired output. The same reference numerals are used for the same members as in the above embodiments, and description thereof will be omitted.

[0115] As shown in Fig. 14, the heat generating device 120 includes three heat generating modules 55a to 55c. Although not shown in Fig. 14, the heat generating device 120 includes a control unit 16, which controls the operation of each unit. A gas supply unit 27 and a gas exhaust unit 28 are connected to the hollow unit 26. The heat generating device 120 has a configuration in which the three heat generating modules 55a to 55c are connected in parallel by a distribution pipe 81 and a collecting pipe 82, but the three heat generating modules 55a to 55c can also be connected in series.

[0116] The heat generation device 120 has the same configuration as the heat generation device 100 of the fifth embodiment, except that it includes three heat generation modules 55a to 55c, and each of the heat generation modules 55a to 55c is connected by a distribution pipe 81 and a collecting pipe 82. The heat generation device 120 is also connected to a heat recovery line 101 in which a steam turbine 104 and the like are provided. Therefore, the high-temperature air generated by the heat generation device 120 is used to generate superheated steam in the boiler (cooling section 92).

[0117] As described above, heat generating device 120 has three heat generating modules 55a-55c, and therefore can achieve high output. Furthermore, heat generating device 120 has excellent maintainability because heat generating modules 55a-55c are detachable and can be easily replaced.

[0118] The heat generating device 120 and the steam turbine 104 as a fluid utilization device constitute a heat utilization system 129. The heat generating device 80 and the heat utilization system 129 utilize the heat generating element 13 as an energy source, and therefore can supply energy cheaply, cleanly, and safely.

[0119] FIG. 15 is a graph showing the state of heat exchange in the boiler (cooling section 92) of the sixth embodiment. FIG. 15 shows the temperature drop of high-temperature air and the temperature rise of boiler water when the high-temperature air and boiler water as a heat medium are in indirect countercurrent contact in the boiler with the pressure in the boiler set to 130 bar. In FIG. 15, the vertical axis shows the temperatures of the boiler water and air. The horizontal axis shows each part in the boiler, with "SH inlet" showing the inlet of the boiler's superheater (SH), "SH out / EVA in" showing the part between the outlet of the superheater and the inlet of the evaporator (EVA), "EVA out / ECO in" showing the part between the outlet of the evaporator and the inlet of the economizer (ECO), and "ECO out" showing the outlet of the economizer. "Boiler air" is high-temperature air. "Boiler steam" is boiler water or steam. The hot air is supplied to the boiler's superheater at 700°C, and after heat exchange with boiler water, is discharged from the economizer as air at 300°C. The boiler water is supplied to the boiler's economizer at 250°C, where it is heated to 331°C, the saturation temperature at 130 bar, and becomes steam in the evaporator. This steam is further heated by the superheater and discharged from the boiler as superheated steam at 560°C.

[0120] FIG. 16 is a graph showing the relationship between entropy and pressure in a Rankine cycle including the heat generation device 120 and the steam turbine 104 of the sixth embodiment. In FIG. 16, the horizontal axis indicates entropy, and the vertical axis indicates pressure. FIG. 17 is a graph showing the relationship between entropy and temperature in a Rankine cycle including the heat generation device 120 and the steam turbine 104 of the sixth embodiment. In FIG. 17, the horizontal axis indicates entropy, and the vertical axis indicates temperature. FIG. 18 is a graph showing the relationship between entropy and enthalpy in a Rankine cycle including the heat generation device 120 and the steam turbine 104 of the sixth embodiment. In FIG. 18, the horizontal axis indicates entropy, and the vertical axis indicates enthalpy. 16 to 18, A indicates the state of the heat medium at the inlet of the steam turbine 104, B indicates the state of the heat medium at the extraction section of the steam turbine 104, C indicates the state of the heat medium after leaving the extraction section of the steam turbine 104, D indicates the state of the heat medium at the outlet of the steam turbine 104, E indicates the state of the heat medium in the condenser 105, F indicates the state of the heat medium in the pump 107, G indicates the state of the heat medium at the outlet of the buffer tank 108, H indicates the state of the heat medium at the outlet of the deaerator 109, I indicates the state of the heat medium in the preheater 111, J indicates the state of the heat medium when heat exchange begins in the boiler (cooling section 92), K indicates the state of the heat medium in the boiler that has reached its saturation temperature, and L indicates the state of the heat medium in the superheater in the boiler.

[0121] The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

[0122] The heating element 13 in each of the above embodiments has a configuration in which a multilayer film 58 composed of a first layer 59 and a second layer 60 is provided on the surface of a base 57, but the configuration of the heating element is not limited to this. Other examples of the heating element will be described below.

[0123] For example, as shown in FIG. 19, the heating element 133 has a base 57 and a multilayer film 134. The multilayer film 134 further has a third layer 135 in addition to a first layer 59 and a second layer 60. The base 57, the first layer 59, and the second layer 60 will not be described. The third layer 135 is formed of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from the first layer 59 and the second layer 60. The thickness of the third layer 135 is preferably less than 1000 nm. In FIG. 19, the first layer 59, the second layer 60, and the third layer 135 are stacked on the surface of the base 57 in the order of the first layer 59, the second layer 60, the first layer 59, and the third layer 135. The first layer 59, the second layer 60, and the third layer 135 may be laminated on the surface of the base 57 in the order of the first layer 59, the third layer 135, the first layer 59, and the second layer 60. That is, the multilayer film 134 has a laminated structure in which the first layer 59 is provided between the second layer 60 and the third layer 135. The multilayer film 134 may have one or more third layers 135. The dissimilar material interface 136 formed between the first layer 59 and the third layer 135 allows hydrogen atoms to pass therethrough, similar to the dissimilar material interface 61.

[0124] The third layer 135 is formed of, for example, any one of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y2O3, TiC, and LaB6. The alloy forming the third layer 135 is preferably an alloy consisting of two or more of Ni, Pd, Cu, Cr, Fe, Mg, and Co. The alloy forming the third layer 135 may be an alloy in which an additive element is added to Ni, Pd, Cu, Cr, Fe, Mg, or Co.

[0125] In particular, the third layer 135 is preferably formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO. The heating element 133 having the third layer 135 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO has an increased hydrogen storage amount, and the amount of hydrogen permeating the dissimilar material interface 61 and the dissimilar material interface 136 increases, thereby achieving high output of excess heat. The third layer 135 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO is preferably 10 nm or less in thickness. This allows the multilayer film 134 to easily permeate hydrogen atoms. The third layer 135 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO may be formed in an island shape rather than in a complete film shape. In addition, the first layer 59 and the third layer 135 are preferably formed continuously in a vacuum state. As a result, no native oxide film is formed between the first layer 59 and the third layer 135, and only a different material interface 136 is formed.

[0126] Combinations of the first layer 59, the second layer 60, and the third layer 135, when the types of elements are expressed as "first layer 59-third layer 135-second layer 60", are as follows: Pd-CaO-Ni, Pd-Y2O3-Ni, Pd-TiC-Ni, Pd-LaB6-Ni, Ni-CaO-Cu, Ni-Y2O3-Cu, Ni-TiC-Cu, Ni-LaB6-Cu, Ni-Co-Cu, Ni-CaO-Cr, Ni-Y2O3-Cr, Ni-TiC-Cr, Ni-LaB6 -Cr, Ni-CaO-Fe, Ni-Y2O3-Fe, Ni-TiC-Fe, Ni-LaB6-Fe, Ni-Cr-Fe, Ni-CaO-Mg, Ni-Y2O3-Mg, Ni-TiC-Mg, Ni-LaB6-Mg, Ni-CaO-Co, Ni-Y2O3-Co, Ni-TiC-Co, Ni-LaB6-Co, Ni-CaO-SiC, Ni-Y2O3-SiC, Ni-TiC-SiC, and Ni-LaB6-SiC are preferred.

[0127] As shown in FIG. 20, the heating element 143 has a base 57 and a multilayer film 144. The multilayer film 144 further has a fourth layer 145 in addition to a first layer 59, a second layer 60, and a third layer 135. The fourth layer 145 is formed of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from the first layer 59, the second layer 60, and the third layer 135. The thickness of the fourth layer 145 is preferably less than 1000 nm. In FIG. 20, the first layer 59, the second layer 60, the third layer 135, and the fourth layer 145 are laminated on the surface of the base 57 in the order of the first layer 59, the second layer 60, the first layer 59, the third layer 135, the first layer 59, and the fourth layer 145. The first layer 59, the second layer 60, the third layer 135, and the fourth layer 145 may be laminated on the surface of the base 57 in the order of the first layer 59, the fourth layer 145, the first layer 59, the third layer 135, the first layer 59, and the second layer 60. That is, the multilayer film 144 has a laminated structure in which the second layer 60, the third layer 135, and the fourth layer 145 are laminated in any order, and the first layer 59 is provided between each of the second layer 60, the third layer 135, and the fourth layer 145. The multilayer film 144 may have one or more fourth layers 145. The heterogeneous material interface 146 formed between the first layer 59 and the fourth layer 145 allows hydrogen atoms to pass through, similar to the heterogeneous material interface 61 and the heterogeneous material interface 136.

[0128] The fourth layer 145 is formed of, for example, any one of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y2O3, TiC, and LaB6. The alloy forming the fourth layer 145 is preferably an alloy consisting of two or more of Ni, Pd, Cu, Cr, Fe, Mg, and Co. The alloy forming the fourth layer 145 may be an alloy in which an additive element is added to Ni, Pd, Cu, Cr, Fe, Mg, or Co.

[0129] In particular, the fourth layer 145 is preferably formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO. The heating element 143 having the fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO has an increased amount of hydrogen storage, and the amount of hydrogen permeating the dissimilar material interface 61, the dissimilar material interface 136, and the dissimilar material interface 146 increases, resulting in a high output of excess heat. The fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO is preferably 10 nm or less in thickness. This allows the multilayer film 144 to easily permeate hydrogen atoms. The fourth layer 145 formed of any one of CaO, Y2O3, TiC, LaB6, SrO, and BaO may be formed in an island shape rather than in a complete film shape. In addition, the first layer 59 and the fourth layer 145 are preferably formed continuously in a vacuum state. As a result, no native oxide film is formed between the first layer 59 and the fourth layer 145, and only a different material interface 146 is formed.

[0130] As for combinations of the first layer 59, the second layer 60, the third layer 135, and the fourth layer 145, when the types of elements are expressed as "first layer 59-fourth layer 145-third layer 135-second layer 60", the combinations are preferably Ni-CaO-Cr-Fe, Ni-Y2O3-Cr-Fe, Ni-TiC-Cr-Fe, and Ni-LaB6-Cr-Fe.

[0131] The configurations of various multilayer films such as the multilayer film 58, the multilayer film 134, and the multilayer film 144, for example, the ratio of thicknesses of each layer, the number of layers, and materials, may be appropriately changed depending on the temperature used.

[0132] In each of the above embodiments, one heating element 13 is provided on the entire outer surface of one cylindrical body 12, but as shown in FIG. 21, multiple heating elements 13 may be provided on the outer surface of one cylindrical body 12 at intervals. Since there are gaps between the heating elements 13, damage to each heating element 13 is prevented even when the cylindrical body 12 thermally expands. Also, multiple heating elements 133 (see FIG. 19) may be provided on the outer surface of one cylindrical body 12 at intervals. Multiple heating elements 143 (see FIG. 20) may be provided on the outer surface of one cylindrical body 12 at intervals.

[0133] Although the external fluid line 45 has a plurality of first pipes 47 in each of the above embodiments, it may be configured such that one first pipe 47 covers the entire outer surface of the main body 17. Also, it may be configured such that one first pipe 47 is wound in a spiral shape along the outer surface of the main body 17.

[0134] The first ring pipe 48 may have a through hole that connects to the fluid inlet chamber 18. Since the first ring pipe 48 and the fluid inlet chamber 18 are directly connected by the through hole, the second pipe 50 may be omitted.

[0135] The second ring pipe 49 may have a through hole that connects to the fluid outflow chamber 19. Since the second ring pipe 49 and the fluid outflow chamber 19 are directly connected by the through hole, the third pipe 51 may be omitted.

[0136] A fluid heated by any one of the heating elements 13, 133, and 143 can be used as a thermal energy source to separate carbon dioxide (CO2) from exhaust gas discharged from a combustion device such as a boiler. A fluid heated by a heating element can be supplied to a carbon dioxide separation and capture device that performs a chemical absorption method or a physical adsorption method to capture CO2 contained in the exhaust gas. In the chemical absorption method, CO2 contained in the exhaust gas is absorbed in an absorbing solution such as an aqueous solution of an amine compound, and the absorbing solution that has absorbed CO2 is heated to release CO2 from the absorbing solution. In the physical adsorption method, CO2 contained in the exhaust gas is adsorbed in an adsorbent such as activated carbon or zeolite, and the adsorbent to which CO2 has been adsorbed is heated to desorb CO2 from the adsorbent. In the chemical absorption method, a fluid heated by a heating element can be used as a thermal energy source for heating the absorbing solution that has absorbed CO2. In the physical adsorption method, a fluid heated by a heating element can be used as a thermal energy source for heating the adsorbent to which CO2 has been adsorbed.

[0137] Fluid heated by a heating element can be used as a thermal energy source to react with CO2 and hydrogen (H2) that have been separated and captured by a carbon dioxide capture device or the like, and convert them into methane (CH4). CH4 is produced from the raw gas containing CO2 and H2 by contacting the raw gas with a catalyst that promotes the reaction between CO2 and H2 (methanation reaction), but if the temperature of the raw gas is low, the reaction does not proceed sufficiently. Therefore, the fluid heated by a heating element can be used as a thermal energy source to heat the raw gas containing CO2 and H2, thereby promoting the methanation reaction.

[0138] In the IS cycle, which uses thermal energy to produce hydrogen from water, and the ISN cycle, which uses thermal energy to produce ammonia (NH3) from water and nitrogen (N2), a fluid heated by a heating element can be used as a thermal energy source. In the IS cycle, water, iodine (I), and sulfur (S) are reacted to produce hydrogen iodide (HI), which is then thermally decomposed to produce hydrogen. A fluid heated by a heating element can be used as a thermal energy source for thermally decomposing hydrogen iodide. In the ISN cycle, nitrogen is reacted with hydrogen iodide produced in the IS cycle to produce ammonium iodide (NH4I), which is then thermally decomposed to produce ammonia. A fluid heated by a heating element can be used as a thermal energy source for thermally decomposing ammonium iodide.

[0139] 22 shows a heating element manufacturing apparatus 150 that uses a sputtering method to manufacture the heating element 13. In this example, the heating element manufacturing apparatus 150 performs a DC (Direct Current) magnetron sputtering method as the sputtering method, and forms the heating element 13 directly on the outer surface of the cylindrical body 12.

[0140] The heating element manufacturing apparatus 150 has a load chamber 151 for carrying the cylindrical body 12, a preheating chamber 152 for preheating the cylindrical body 12, a sputter etching chamber 153 for sputter etching the surface of the cylindrical body 12, a base forming chamber 154 for forming a base 57 on the cylindrical body 12, a first layer forming chamber 155 for forming a first layer 59 on the base 57, a second layer forming chamber 156 for forming a second layer 60 on the base 57, and an unload chamber 157 for carrying out the cylindrical body 12. In this example, the heating element manufacturing apparatus 150 carries a plurality of cylindrical bodies 12 into the load chamber 151 and directly forms the heating element 13 on the outer surface of each cylindrical body 12, but it may also be a case where one cylindrical body 12 is carried into the load chamber 151 and the heating element 13 is directly formed on the outer surface of this cylindrical body 12.

[0141] In this example, the heating element manufacturing apparatus 150 has a first gate valve 161 provided between the load chamber 151 and the preheating chamber 152, a second gate valve 162 provided between the preheating chamber 152 and the sputter etching chamber 153, a third gate valve 163 provided between the sputter etching chamber 153 and the pedestal forming chamber 154, a fourth gate valve 164 provided between the pedestal forming chamber 154 and the first layer forming chamber 155, a fifth gate valve 165 provided between the first layer forming chamber 155 and the second layer forming chamber 156, and a sixth gate valve 166 provided between the second layer forming chamber 156 and the unloading chamber 157, and the load chamber 151, the preheating chamber 152, the sputter etching chamber 153, the pedestal forming chamber 154, the first layer forming chamber 155, the second layer forming chamber 156, and the unloading chamber 157 are each separated. Although not shown, the heating element manufacturing apparatus 150 further includes a transport mechanism that transports the cylindrical body 12 from the load chamber 151 to the unload chamber 157, and a rotation mechanism that rotates the cylindrical body 12 around the central axis of the cylindrical body 12.

[0142] The first gate valve 161 opens and closes a first loading / unloading portion 171 between the load chamber 151 and the preheating chamber 152. The second gate valve 162 opens and closes a second loading / unloading portion 172 between the preheating chamber 152 and the sputter etching chamber 153. The third gate valve 163 opens and closes a third loading / unloading portion 173 between the sputter etching chamber 153 and the pedestal forming chamber 154. The fourth gate valve 164 opens and closes a fourth loading / unloading portion 174 between the pedestal forming chamber 154 and the first layer forming chamber 155. The fifth gate valve 165 opens and closes a fifth loading / unloading portion 175 between the first layer forming chamber 155 and the second layer forming chamber 156. The sixth gate valve 166 opens and closes a sixth loading / unloading portion 176 between the second layer forming chamber 156 and the unloading chamber 157.

[0143] The heating element manufacturing apparatus 150 has a first vacuum generating section 181 which evacuates the load chamber 151, a second vacuum generating section 182 which evacuates the preheating chamber 152, a third vacuum generating section 183 which evacuates the sputter etching chamber 153, a fourth vacuum generating section 184 which evacuates the pedestal forming chamber 154, a fifth vacuum generating section 185 which evacuates the first layer forming chamber 155, a sixth vacuum generating section 186 which evacuates the second layer forming chamber 156, and a seventh vacuum generating section 187 which evacuates the unload chamber 157. As the first to seventh vacuum generating sections 181 to 187, for example, a dry pump or a turbo molecular pump is used.

[0144] The load chamber 151 has a carry-in section 191 for carrying in the cylindrical body 12, and after the cylindrical body 12 is carried in from the carry-in section 191, the load chamber 151 is evacuated to a vacuum by the first vacuum generating section 181 with the carry-in section 191 and the first gate valve 161 closed. After the load chamber 151 is evacuated to a vacuum, the first gate valve 161 is opened, and the cylindrical body 12 is transported from the load chamber 151 to the preheating chamber 152 via the first carry-in / out section 171.

[0145] The preheating chamber 152 is evacuated to, for example, about 1E-3 Pa by the second vacuum generating unit 182 with the first gate valve 161 and the second gate valve 162 closed. The preheating chamber 152 has a heating unit 192, and the heating unit 192 heats the cylindrical body 12 while rotating the cylindrical body 12. The heating unit 192 removes moisture adsorbed on the surface of the cylindrical body 12 by heating the cylindrical body 12 so that the surface temperature of the cylindrical body 12 becomes, for example, 200 to 350°C. The heating unit 192 is not particularly limited as long as it can heat the cylindrical body 12 to a desired temperature, and for example, a lamp heating system, an infrared heating system, an induction heating system, or the like can be used. After heating, the second gate valve 162 is opened, and the cylindrical body 12 is transported from the preheating chamber 152 to the sputter etching chamber 153 via the second carry-in / out unit 172.

[0146] The sputter etching chamber 153 is evacuated by the third vacuum generator 183 with the second gate valve 162 and the third gate valve 163 closed. The sputter etching chamber 153 has a sputter etching electrode 193, and while rotating the cylindrical body 12, the sputter etching electrode 193 performs sputter etching on the cylindrical body 12. The sputter etching electrode 193 removes organic matter, metal oxides, and the like on the surface of the cylindrical body 12 by adjusting the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa and applying a high frequency (RF; Radio Frequency) of 13.56 MHz, for example. After the sputter etching, the third gate valve 163 is opened, and the cylindrical body 12 is transported from the sputter etching chamber 153 to the pedestal formation chamber 154 via the third carry-in / out part 173.

[0147] The pedestal forming chamber 154 is evacuated by the fourth vacuum generating unit 184 with the third gate valve 163 and the fourth gate valve 164 closed. The pedestal forming chamber 154 has a pedestal forming sputtering electrode 194, and while rotating the cylindrical body 12, the pedestal forming sputtering electrode 194 forms the pedestal 57 on the cylindrical body 12. The pedestal forming sputtering electrode 194 has a target material (not shown) of a hydrogen storage metal, a hydrogen storage alloy, or a proton conductor that forms the pedestal 57. The front of the target material faces the cylindrical body 12. In this example, a magnet (not shown) is disposed on the back of the target material. The pedestal forming sputtering electrode 194 is, for example, configured to adjust the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa, and to apply a DC power of 0.1 to 500 kW / m 2 By applying a voltage of about 100 V, a pedestal 57 is formed on the cylindrical body 12. The thickness of the pedestal 57 can be controlled by adjusting the magnitude of the DC power and the rotation speed of the cylindrical body 12. After the pedestal 57 is formed, the fourth gate valve 164 is opened, and the cylindrical body 12 is transported from the pedestal formation chamber 154 to the first layer formation chamber 155 via the fourth load / unload part 174.

[0148] The first layer forming chamber 155 is evacuated to, for example, about 1E-5 Pa by the fifth vacuum generating unit 185 with the fourth gate valve 164 and the fifth gate valve 165 closed. The first layer forming chamber 155 has a first layer deposition sputtering electrode 195, and while rotating the cylindrical body 12, the first layer 59 is formed on the pedestal 57 by the first layer deposition sputtering electrode 195. The first layer deposition sputtering electrode 195 has a target material (not shown) of a hydrogen storage metal or a hydrogen storage alloy that forms the first layer 59. The front of the target material faces the pedestal 57. In this example, a magnet (not shown) is disposed on the back of the target material. The first layer deposition sputtering electrode 195 is, for example, configured to adjust the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa and to apply a DC power of 0.1 to 500 kW / m 2 A first layer 59 is formed on the pedestal 57 by applying a voltage of about 100 V. The thickness of the first layer 59 can be controlled by adjusting the magnitude of the DC power and the rotation speed of the cylindrical body 12. After the first layer 59 is formed, the fifth gate valve 165 is opened, and the cylindrical body 12 is transported from the first layer formation chamber 155 to the second layer formation chamber 156 via the fifth transfer part 175.

[0149] The second layer forming chamber 156 is evacuated to, for example, about 1E-5 Pa by the sixth vacuum generating unit 186 with the fifth gate valve 165 and the sixth gate valve 166 closed. The second layer forming chamber 156 has a second layer deposition sputtering electrode 196, and while rotating the cylindrical body 12, the second layer 60 is formed on the pedestal 57 by the second layer deposition sputtering electrode 196. The second layer deposition sputtering electrode 196 has a target material (not shown) of hydrogen storage metal, hydrogen storage alloy, or ceramics that forms the second layer 60. The front of the target material faces the pedestal 57. In this example, a magnet (not shown) is disposed on the back of the target material. The second layer deposition sputtering electrode 196 is, for example, configured to adjust the flow rate of Ar gas to set the Ar pressure to about 0.1 to 1 Pa, and to apply DC power of 0.1 to 500 kW / m 2A second layer 60 is formed on the pedestal 57 by applying a voltage of about 100 V. When ceramics is used as a target material for forming the second layer 60, the second layer deposition sputtering electrode 196 is configured to apply RF. In the second layer formation chamber 156, a multilayer film 58 (see FIG. 5) consisting of a first layer 59 and a second layer 60 is formed on the surface of the pedestal 57. In this manner, the heating element 13 is formed directly on the outer surface of the cylindrical body 12. The thickness of the second layer 60 can be controlled by adjusting the magnitude of the DC power and the rotation speed of the cylindrical body 12. After the second layer 60 is formed, the sixth gate valve 166 is opened, and the cylindrical body 12 is transported from the second layer formation chamber 156 to the unloading chamber 157 via the sixth transfer unit 176.

[0150] The unloading chamber 157 has an unloading part 197 for unloading the cylindrical body 12, and the sixth vacuum generating part 186 is opened to the atmosphere with the unloading part 197 and the sixth gate valve 166 closed. The cylindrical body 12 on which the heating element 13 is formed can be taken out from the unloading chamber 157, which is in an atmospheric pressure state, via the unloading part 197.

[0151] As described above, in the heating element manufacturing apparatus 150, the processing chambers of the load chamber 151, the preheating chamber 152, the sputter etching chamber 153, the pedestal forming chamber 154, the first layer forming chamber 155, the second layer forming chamber 156, and the unloading chamber 157 are separated by the first to sixth gate valves 161 to 166, so that the pedestal 57, the first layer 59, and the second layer 60 can be continuously formed in a vacuum state. Therefore, the heating element manufacturing apparatus 150 can directly form the heating element 13 on the outer surface of the cylindrical body 12, in which no natural oxide film is formed between the first layer 59 and the second layer 60 and only the dissimilar material interface 61 is formed.

[0152] 22, the heating element manufacturing apparatus 150 is provided with first to seventh vacuum generating parts 181 to 187 which evacuate each processing chamber, respectively, but a vacuum generating part may be shared by several processing chambers. When a vacuum generating part is shared by several processing chambers, the pressure in each processing chamber can be controlled by adjusting the flow rate of Ar gas using, for example, an orifice valve.

[0153] The rotation speed of the cylindrical body 12 is set based on the thickness of the film to be etched or formed, and the etching rate or film formation rate. If the thickness of the film to be etched or formed is X (nm) and the etching rate or film formation rate is Y (nm / min), it is desirable that the rotation speed Z (rpm) of the cylindrical body 12 satisfies Z>10×(Y / X). This is because the film thickness uniformity (thickness variation) of the heating element 13 can be suppressed to 10% or less. For example, when X=10 (nm) and Y=50 (nm / min), Z>50 (rpm).

[0154] 23 shows a heating unit 200 in which cylinders 12 on which heating elements 13 are formed are connected to each other. The cylinders 12 are connected to each other by, for example, welding. The output of the heating unit 200 can be changed by changing the number of cylinders 12 on which heating elements 13 are formed. Since the heating unit 200 has gaps between the heating elements 13, damage to each heating element 13 is prevented even when the cylinders 12 thermally expand.

[0155] The heating element manufacturing apparatus 150 can be configured to carry in a plurality of short cylinders 12, each having a length of, for example, about 50 cm to 2 m, thereby making the entire apparatus small. The heating unit 200 may be configured by connecting together short cylinders 12 on which the heating element 13 is formed.

[0156] Heating element manufacturing apparatus 150 is not limited to one that manufactures heating element 13 having a configuration in which multilayer film 58 is formed on pedestal 57. The heating element manufacturing apparatus may also be one that manufactures heating element 133 having a configuration in which multilayer film 134 is formed on pedestal 57, or heating element 143 having a configuration in which multilayer film 144 is formed on pedestal 57.

[0157] The heating element manufacturing apparatus for manufacturing the heating element 133 includes, in addition to the first layer formation chamber 155 and the second layer formation chamber 156, a third layer formation chamber having a third layer deposition sputtering electrode for forming the third layer 135 on the pedestal 57. The third layer deposition sputtering electrode has a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the third layer 135. As with the first layer deposition sputtering electrode or the second layer deposition sputtering electrode, the third layer deposition sputtering electrode can control the thickness of the third layer 135 by adjusting the magnitude of the DC power and the rotation speed of the cylinder 12.

[0158] The heating element manufacturing apparatus for manufacturing the heating element 143 includes, in addition to the first layer formation chamber 155, the second layer formation chamber 156, and the third layer formation chamber, a fourth layer formation chamber having a fourth layer deposition sputtering electrode for forming the fourth layer 145 on the pedestal 57. The fourth layer deposition sputtering electrode has a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the fourth layer 145. As with the first layer deposition sputtering electrode or the second layer deposition sputtering electrode, the thickness of the fourth layer 145 can be controlled by adjusting the magnitude of the DC power and the rotation speed of the cylinder 12 with the fourth layer deposition sputtering electrode.

[0159] The thickness of the base 57 constituting the heating element 13, 133, 143 is not particularly limited and can be changed as appropriate. The base 57 is thinned to have a film shape, and the multilayer film 58, 134, 144 is provided on the film-shaped base 57, thereby forming a film-shaped heating element (hereinafter referred to as a film-shaped heating element). The film-shaped heating element will be described in detail below.

[0160] 24, the film-shaped heating element 213 is wound around the outer surface of the cylindrical body 12. Although the film-shaped heating element 213 is wound in a spiral shape around the outer surface of the cylindrical body 12 with no gaps in the FIG. 24, it may be wound in a spiral shape with gaps around the outer surface of the cylindrical body 12. The film-shaped heating element 213 may also be wound in a spiral shape around the outer surface of the cylindrical body 12 such that at least a portion of the film-shaped heating elements 213 adjacent to each other in the direction of the central axis C of the cylindrical body 12 overlaps in the radial direction of the cylindrical body 12.

[0161] The film-shaped heating element 213 has the same structure as the heating element 13 (see FIG. 5). That is, the film-shaped heating element 213 has a base 57 and a multilayer film 58. The base 57 and the multilayer film 58 constituting the film-shaped heating element 213 are in the form of a film.

[0162] The thickness of the base 57 is preferably in the range of 1 μm to 5000 μm, more preferably in the range of 100 μm to 600 μm. The thickness of the multilayer film 58 is preferably in the range of 0.02 μm to 10 μm, more preferably in the range of 2 μm to 6 μm. The thickness of the film-shaped heating element 213 is preferably in the range of 1.02 μm to 5010 μm, more preferably in the range of 102 μm to 606 μm. The thicknesses of the base 57, the multilayer film 58, and the film-shaped heating element 213 are not limited to the above numerical values, and can be appropriately designed so that the desired output is obtained as a heating device using the film-shaped heating element 213.

[0163] In this example, the film-shaped heating element 213 has the same structure as the heating element 13, but it may also have the same structure as the heating element 133 (see FIG. 19), that is, the base 57 and the multilayer film 134. The film-shaped heating element 213 may also have the same structure as the heating element 143 (see FIG. 20), that is, the base 57 and the multilayer film 144. The multilayer film 134 or the multilayer film 144 constituting the film-shaped heating element 213 is in the form of a film.

[0164] The film-shaped heating element 213 and the cylindrical body 12 are joined by, for example, spot welding. For example, the film-shaped heating element 213 is wrapped around the outer surface of the cylindrical body 12 and spot-welded at equal intervals in the direction of the central axis C of the cylindrical body 12, thereby joining the film-shaped heating element 213 and the cylindrical body 12. The spot-welded portion becomes hot, but since the diameter of the spot-welded portion is about 1 mm and the time of the high-temperature state is only a few seconds, the characteristics of the film-shaped heating element 213 are hardly deteriorated. The place where the film-shaped heating element 213 and the cylindrical body 12 are joined is not particularly limited.

[0165] As described above, the film-shaped heating element 213 has the base 57 and the multilayer film 58, and therefore has the same effect as the heating element 13. That is, the film-shaped heating element 213 generates heat using hydrogen, and therefore does not generate greenhouse gases such as carbon dioxide. In addition, the hydrogen used to generate heat in the film-shaped heating element 213 can be produced from water, and is therefore inexpensive. Furthermore, unlike nuclear fission reactions, the heat generated by the film-shaped heating element 213 is considered safe because there is no chain reaction. Therefore, the film-shaped heating element 213 can be used as an inexpensive, clean, and safe energy source. Furthermore, since the base 57 and the multilayer film 58 are film-shaped, the film-shaped heating element 213 has flexibility and excellent conformability to curved surfaces.

[0166] 25 shows a film-shaped heating element manufacturing apparatus 215 that uses a sputtering method to manufacture a film-shaped heating element 213. In this example, the film-shaped heating element manufacturing apparatus 215 implements a DC magnetron sputtering method as the sputtering method. The film-shaped heating element manufacturing apparatus 215 forms a multilayer film 58 on the surface of the base 57 while continuously transporting the base 57, which is in the form of a long film, by a roller-to-roller method.

[0167] The film-shaped heating element manufacturing apparatus 215 has an unwinding chamber 217 that unwinds a long film-shaped base 57, a film-forming chamber 218 that forms a multilayer film 58 on the base 57, and a winding chamber 219 that winds up the base 57 with the multilayer film 58 formed thereon.

[0168] In this example, the film-shaped heating element manufacturing apparatus 215 is composed of a single vacuum chamber 220 and has a first partition plate 221 separating the unwinding chamber 217 and the film-forming chamber 218, a second partition plate 222 separating the film-forming chamber 218 and the winding chamber 219, and a third partition plate 223 separating the unwinding chamber 217 and the winding chamber 219.

[0169] The vacuum chamber 220 has a first vacuum generating unit 224 that evacuates the unwinding chamber 217 and a second vacuum generating unit 225 that evacuates the film forming chamber 218. The first vacuum generating unit 224 reduces the pressure of the unwinding chamber 217 to, for example, about 1E-4 Pa. The second vacuum generating unit 225 reduces the pressure of the film forming chamber 218 to, for example, about 1E-5 Pa, which is lower than the pressure of the unwinding chamber 217. For the first vacuum generating unit 224 and the second vacuum generating unit 225, for example, a dry pump or a turbo molecular pump is used. A sputtering gas is introduced into the vacuum chamber 220 after the pressure is reduced. In this example, the sputtering gas is argon (Ar) gas, but a known gas may be used. The pressure of Ar inside the vacuum chamber 220 can be adjusted by adjusting the flow rate of Ar gas. The shape and material of the vacuum chamber 220 are not particularly limited as long as they can withstand the reduced pressure state.

[0170] The unwinding chamber 217 has an unwinding roller 226 around which the long film-like base 57 is wound, a first conveyor roller section 227 that conveys the base 57 unwound from the unwinding roller 226, and a heating section 228 that heats the base 57 conveyed by the first conveyor roller section 227. The unwinding roller 226 has a motor (not shown) and is rotated by the drive of the motor. The first conveyor roller section 227 is composed of, for example, a free roller and a tension measuring roller.

[0171] The heating unit 228 removes moisture adsorbed on the surface of the pedestal 57 by heating the surface of the pedestal 57 to a surface temperature of, for example, 200 to 350° C. The heating unit 228 is not particularly limited as long as it can heat the pedestal 57 to a desired temperature, and for example, a lamp heating method, an infrared heating method, an induction heating method, or the like can be used.

[0172] The film forming chamber 218 has a film forming roller 229 that transports the base 57 transported from the unwinding chamber 217, a sputter etching electrode 230 that sputter etches the surface of the base 57, first layer film forming sputter electrodes 231A, 231B that form a first layer 59 on the base 57, and second layer film forming sputter electrodes 232A, 232B that form a second layer 60 on the base 57.

[0173] The film forming roller 229 has a motor (not shown) and is rotated by the drive of the motor. A coolant whose temperature is adjusted outside the vacuum chamber 220 circulates inside the film forming roller 229. Therefore, in the film forming chamber 218, the pedestal 57 is controlled to a constant temperature (for example, a temperature within a range of 50 to 300°C). The tension based on the difference in circumferential speed between the film forming roller 229 and the unwinding roller 226 is measured by a tension measuring roller of the first conveyor roller unit 227. The measurement data measured by the tension measuring roller is fed back to the unwinding roller 226, and the circumferential speed of the unwinding roller 226 is controlled.

[0174] The sputter etching electrode 230, the first layer deposition sputter electrodes 231A, 231B, and the second layer deposition sputter electrodes 232A, 232B are disposed at positions facing the surface of a pedestal 57 transported by a deposition roller 229. The sputter etching electrode 230, the first layer deposition sputter electrodes 231A, 231B, and the second layer deposition sputter electrodes 232A, 232B have a shield plate on the front side facing the surface of the pedestal 57.

[0175] The sputter etching electrode 230 removes organic matter, metal oxides, and the like on the surface of the pedestal 57, for example, by adjusting the flow rate of Ar gas to set the Ar pressure at about 0.1 to 1 Pa and applying an RF of 13.56 MHz.

[0176] The first layer deposition sputtering electrodes 231A and 231B have the same configuration. The first layer deposition sputtering electrodes 231A and 231B have a target material (not shown) of a hydrogen storage metal or a hydrogen storage alloy that forms the first layer 59. The front side of the target material faces the pedestal 57. In this example, a magnet (not shown) is disposed on the back side of the target material. The first layer deposition sputtering electrodes 231A and 231B are, for example, configured to adjust the flow rate of Ar gas to an Ar pressure of about 0.1 to 1 Pa and a DC power of 0.1 to 500 kW / m 2By applying a voltage of about 100 V, a first layer 59 is formed on the base 57. The thickness of the first layer 59 can be controlled by adjusting the magnitude of the DC power and the transport speed of the base 57.

[0177] The second layer deposition sputtering electrodes 232A and 232B have the same configuration. The second layer deposition sputtering electrodes 232A and 232B have a target material (not shown) of hydrogen storage metal, hydrogen storage alloy, or ceramics that forms the second layer 60. The front side of the target material faces the pedestal 57. In this example, a magnet (not shown) is disposed on the back side of the target material. The second layer deposition sputtering electrodes 232A and 232B are, for example, configured to adjust the flow rate of Ar gas to an Ar pressure of about 0.1 to 1 Pa and a DC power of 0.1 to 500 kW / m 2 By applying a DC power of about 100 volts, a second layer 60 is formed on the base 57. When ceramics is used as a target material for forming the second layer 60, the second layer deposition sputtering electrodes 232A and 232B are configured to apply RF. The thickness of the second layer 60 can be controlled by adjusting the magnitude of the DC power and the transport speed of the base 57.

[0178] In FIG. 25, the running direction of the pedestal 57 is indicated by a hollow arrow. In FIG. 25, the first layer deposition sputter electrode 231A, the second layer deposition sputter electrode 232A, the first layer deposition sputter electrode 231B, and the second layer deposition sputter electrode 232B are arranged in this order from the upstream side to the downstream side in the running direction of the pedestal 57. Therefore, the first layer deposition sputter electrode 231A forms a first layer 59 on the surface of the pedestal 57. The second layer deposition sputter electrode 232A forms a second layer 60 on the surface of the first layer 59 formed by the first layer deposition sputter electrode 231A. The first layer deposition sputter electrode 231B forms the first layer 59 on the surface of the second layer 60 formed by the second layer deposition sputter electrode 232A. The second layer deposition sputter electrode 232B forms a second layer 60 on the surface of the first layer 59 formed by the first layer deposition sputter electrode 231B. In this way, in the deposition chamber 218, a multilayer film 58 consisting of the first layer 59 and the second layer 60 is formed on the surface of the pedestal 57. In the following description, when the first layer deposition sputter electrode 231A and the first layer deposition sputter electrode 231B are not distinguished from each other, they are referred to as the first layer deposition sputter electrode 231, and when the second layer deposition sputter electrode 232A and the second layer deposition sputter electrode 232B are not distinguished from each other, they are referred to as the second layer deposition sputter electrode 232. If there is one or more first layer deposition sputter electrodes 231 and one or more second layer deposition sputter electrodes 232, a multilayer film 58 having one or more first layers 59 and one or more second layers 60 and having one or more different material interfaces 61 formed thereon is obtained. The number of layers in the first layer 59 , the number of layers in the second layer 60 , and the number of dissimilar material interfaces 61 can be changed by changing the number of first layer deposition sputter electrodes 231 and the number of second layer deposition sputter electrodes 232 .

[0179] The winding chamber 219 has a second conveying roller section 233 that conveys the base 57 carried out from the film forming chamber 218, and a winding roller 234 that winds up the base 57 conveyed by the second conveying roller section 233. The film-like material wound around the winding roller 234 is the film-like heating element 213. The second conveying roller section 233 is composed of, for example, a free roller and a tension measuring roller. The winding roller 234 has a motor (not shown) and rotates by the drive of the motor. The tension based on the difference in peripheral speed between the winding roller 234 and the film forming roller 229 is measured by the tension measuring roller of the second conveying roller section 233. The measurement data measured by the tension measuring roller is fed back to the winding roller 234, and the peripheral speed of the winding roller 234 is controlled. The film-like heating element 213 is obtained by returning the inside of the vacuum chamber 220 to atmospheric pressure and removing the winding roller 234 from the winding chamber 219.

[0180] As described above, the film-shaped heating element manufacturing apparatus 215 can continuously form the first layer 59 and the second layer 60 in a vacuum state on the pedestal 57 by alternately arranging the first layer deposition sputtering electrodes 231 and the second layer deposition sputtering electrodes 232 from the upstream side to the downstream side in the running direction of the long film-shaped pedestal 57. Therefore, the film-shaped heating element manufacturing apparatus 215 can manufacture a long film-shaped heating element 213 in which no natural oxide film is formed between the first layer 59 and the second layer 60 and only the different material interface 61 is formed. The long film-shaped heating element 213 has flexibility and is excellent in conformity to curved surfaces such as uneven shapes. In addition, the long film-shaped heating element 213 can be cut to a desired length for use, so it can be applied to a wider variety of applications.

[0181] A plurality of short film-shaped heating elements 213 may be prepared by cutting a long film-shaped heating element 213 to a predetermined length, and the plurality of short film-shaped heating elements 213 may be provided at intervals from each other on the outer surface of one cylindrical body 12.

[0182] The film-shaped heating element manufacturing apparatus 215 can perform a continuous process in which heating by the heating unit 228, sputter etching by the sputter etching electrode 230, and film formation by the first layer deposition sputter electrode 231 and the second layer deposition sputter electrode 232 are performed continuously, and a step process in which heating by the heating unit 228, sputter etching by the sputter etching electrode 230, and film formation by the first layer deposition sputter electrode 231 and the second layer deposition sputter electrode 232 are performed in separate steps. In the case of the continuous process, heating, sputter etching, and film formation are continued until film formation on one long film-shaped pedestal 57 is completed. In the case of the step process, the time for heating, sputter etching, and film formation can be set independently, for example, by turning the power supply on and off or adjusting the input power. The time for film formation may also be set by opening and closing a shutter that shields the target material.

[0183] The film-shaped heating element manufacturing apparatus 215 is not limited to one that manufactures the film-shaped heating element 213 having a configuration in which the multilayer film 58 is formed on the pedestal 57. The film-shaped heating element manufacturing apparatus may be one that manufactures a film-shaped heating element having a configuration in which the multilayer film 134 or the multilayer film 144 is formed on the pedestal 57.

[0184] The film-shaped heating element manufacturing apparatus for manufacturing a film-shaped heating element having a configuration in which a multilayer film 134 is formed on a pedestal 57 includes, in addition to a first layer deposition sputtering electrode 231 and a second layer deposition sputtering electrode 232, a third layer deposition sputtering electrode for forming a third layer 135 on the pedestal 57. The third layer deposition sputtering electrode has a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the third layer 135. As with the first layer deposition sputtering electrode 231 or the second layer deposition sputtering electrode 232, the third layer deposition sputtering electrode can control the thickness of the third layer 135 by adjusting the magnitude of the DC power and the transport speed of the pedestal 57.

[0185] The film-shaped heating element manufacturing apparatus for manufacturing a film-shaped heating element having a configuration in which a multilayer film 144 is formed on a pedestal 57 further includes a fourth layer deposition sputtering electrode for forming a fourth layer 145 on the pedestal 57, in addition to the first layer deposition sputtering electrode 231, the second layer deposition sputtering electrode 232, and the third layer deposition sputtering electrode. The fourth layer deposition sputtering electrode has a target material of a hydrogen storage metal or a hydrogen storage alloy for forming the fourth layer 145. As with the first layer deposition sputtering electrode 231 or the second layer deposition sputtering electrode 232, the fourth layer deposition sputtering electrode can control the thickness of the fourth layer 145 by adjusting the magnitude of the DC power and the transport speed of the pedestal 57.

[0186] The film-shaped heating element 243 shown in FIG. 26 includes, in addition to the base 57 and the multilayer film 58, a passivation film 244 that is provided on the surface of the multilayer film 58 and protects the surface of the multilayer film 58. The passivation film 244 is made of a material that is permeable to hydrogen, such as SiO2 or SiN. The passivation film 244 can be formed by, for example, a chemical vapor deposition (CVD) method. By including the passivation film 244, the film-shaped heating element 243 suppresses damage to the multilayer film 58. The passivation film 244 may be provided on the surface of the multilayer film 134 or the multilayer film 144. [Explanation of symbols]

[0187] 10,70,80,90,100,120 Heating device 11. Airtight containers 12 Cylinder 13,133,143 Heating element 14 Flow Path 15 Fluid circulation section 16 Control section 26 Hollow part 30 Circulation Line 32,92 Cooling section 33 Heating section 45 External Fluid Line 55,55a~55c Heat generating module 57 Pedestal 58,134,144 Multilayer film 59 1st layer 60 2nd layer 61,136,146 Different materials interface 71,104 Steam turbine (fluid utilization equipment) 79, 89, 119, 129 Heat Utilization System 101 Heat recovery line 135 3rd layer 145 4th layer 150 Heating element manufacturing equipment 213,243 Film-type heating element 215 Film-shaped heating element manufacturing equipment

Claims

1. A hollow sealed container; A cylindrical body provided in a hollow portion formed by an inner surface of the sealed container; a heating element provided on an outer surface of the cylindrical body and configured to generate heat by absorbing and releasing hydrogen contained in a hydrogen-based gas supplied to the hollow portion; a flow path formed by an inner surface of the cylindrical body, through which a fluid that exchanges heat with the heating element flows; a fluid circulation unit having a circulation line connected to the flow path to circulate the fluid between the inside and the outside of the cylindrical body; A cooling unit provided in the circulation line to cool the fluid; A heating unit provided in the circulation line for heating the fluid; a control unit that performs a temperature drop control in which the cooling unit is driven to lower the temperature of the heating element by the cooled fluid, and a temperature increase control in which the heating unit is driven to raise the temperature of the heating element by the heated fluid; Equipped with the heating element has a base made of a hydrogen storage metal, a hydrogen storage alloy, or a proton conductor, and a multilayer film provided on the base; The multilayer film is a heat generating device having a first layer formed of a hydrogen storage metal or a hydrogen storage alloy and having a thickness of less than 1000 nm, and a second layer formed of a hydrogen storage metal, hydrogen storage alloy, or ceramic different from the first layer and having a thickness of less than 1000 nm.

2. A plurality of cylindrical bodies including the cylindrical body, Each of the plurality of cylinders includes a heating element; The heating device according to claim 1 , wherein the plurality of cylindrical bodies are disposed in a staggered manner at equal intervals in the hollow portion.

3. A heating device as described in claim 1 or 2, wherein the multiple heating elements are arranged at intervals on the outer surface of the cylindrical body.

4. The heat generating device according to any one of claims 1 to 3, wherein the fluid circulation section is provided on an outer surface of the sealed container, and further comprises an external fluid line connected to the circulation line through which a portion of the fluid flows.

5. The sealed container has a cylindrical body, a fluid inlet chamber provided at one end of the body, and a fluid outlet chamber provided at the other end of the body, The fluid inlet chamber has a fluid inlet which is an inlet for the fluid, The fluid outflow chamber has a fluid outlet which is an outlet for the fluid, the circulation line connects the fluid inlet and the fluid outlet outside the sealed container; 5. The heat generating device according to claim 4, wherein the external fluid line comprises a first pipe provided on the outer surface of the sealed container, a first ring pipe connecting one ends of the first pipes to each other, a second ring pipe connecting the other ends of the first pipes to each other, a second pipe connecting the first ring pipe and the fluid inlet chamber, and a third pipe connecting the second ring pipe and the fluid outlet chamber.

6. The first layer is formed of any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, and an alloy thereof; The heating device according to any one of claims 1 to 5, wherein the second layer is made of any one of Ni, Pd, Cu, Mn, Cr, Fe, Mg, Co, an alloy thereof, and SiC.

7. The heating device according to claim 6, wherein the multilayer film has, in addition to the first layer and the second layer, a third layer formed of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from the first layer and the second layer, and having a thickness of less than 1000 nm.

8. The third layer is made of CaO, Y 2 O 3 , TiC, LaB 6 8. The heating device according to claim 7, which is made of any one of SrO and BaO.

9. 9. The heating device according to claim 8, wherein the multilayer film has, in addition to the first layer, the second layer, and the third layer, a fourth layer formed of a hydrogen storage metal, a hydrogen storage alloy, or a ceramic different from the first layer, the second layer, and the third layer, and having a thickness of less than 1000 nm.

10. The fourth layer is made of Ni, Pd, Cu, Cr, Fe, Mg, Co, alloys thereof, SiC, CaO, Y 2 O 3 , TiC, LaB 6 10. The heating device according to claim 9, which is made of any one of SrO and BaO.

11. the base and the multilayer film are in the form of a film, The heating device according to any one of claims 1 to 10, wherein the heating element is wrapped around an outer surface of the cylindrical body.

12. A heating device according to any one of claims 1 to 11, a fluid utilization device that utilizes the fluid heated by the heating element.

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