Inductor Components

Abstract

In the present invention, an inductor component comprises a glass substrate including a first main surface and a second main surface that face each other, and a coil provided on the glass substrate and wound in a helix along an axis. The coil includes: a plurality of first coil conductors arranged along the axis on the first main surface of the glass substrate; a plurality of second coil conductors arranged along the axis on the second main surface of the glass substrate; a plurality of first through conductors that penetrate the glass substrate from the first main surface toward the second main surface, and that are arranged along the axis; and a plurality of second through conductors that penetrate the glass substrate from the first main surface toward the second main surface, that are provided on the opposite side to the first through conductors relative to the axis, and that are arranged along the axis. The first coil conductors, the first through conductors, the second coil conductors, and the second through conductors are connected in the stated order to constitute at least a portion of the spiral. The plurality of first through conductors are arranged staggered along the axis, the plurality of second through conductors are arranged staggered along the axis, and the plurality of first coil conductors and / or the plurality of second coil conductors are formed in a repeated manner alternating between long and short lengths along the axis.

Description

[Technical field]

[0001] The present disclosure relates to inductor components. [Background technology]

[0002] Conventionally, an inductor component is described in JP 2020-174169 A (Patent Document 1). This inductor component has a substrate including a top surface and a bottom surface, and a coil provided on the substrate. The coil has a plurality of bottom conductors formed on the bottom surface of the substrate, a plurality of top conductors formed on the top surface of the substrate, and a plurality of first penetrating conductors and a plurality of second penetrating conductors that pass through through holes formed in the substrate. The bottom conductor, the first penetrating conductor, the top conductor, and the second penetrating conductor are connected in this order to form a single spiral shape. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-174169 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned conventional inductor components, if it is desired to increase the inductance value, it is necessary to increase the number of turns of the coil, which poses the problem of increasing the size of the board.

[0005] Therefore, an object of the present disclosure is to provide an inductor component that can improve the inductance value while avoiding an increase in size. [Means for solving the problem]

[0006] In order to solve the above problems, an inductor component according to one aspect of the present disclosure comprises: a glass substrate including a first main surface and a second main surface opposed to each other; a coil provided on the glass substrate and wound in a spiral shape along an axis; Equipped with The coil is a plurality of first coil conductors arranged along the axis on the first main surface of the glass substrate; a plurality of second coil conductors arranged along the axis on the second main surface of the glass substrate; a plurality of first through conductors that penetrate the glass substrate from the first main surface to the second main surface and are arranged along the axis; a plurality of second through conductors that penetrate the glass substrate from the first main surface to the second main surface, are provided on the opposite side of the axis from the first through conductors, and are arranged along the axis; Including, the first coil conductor, the first through conductor, the second coil conductor, and the second through conductor are connected in this order to form at least a part of the spiral shape; the plurality of first through conductors are arranged in a staggered manner along the axis, and the plurality of second through conductors are arranged in a staggered manner along the axis, At least one of the lengths of the plurality of first coil conductors and the plurality of second coil conductors is formed so as to alternately vary in length along the axis.

[0007] Here, "the multiple first penetrating conductors are arranged in a staggered manner" means that the central axes of the multiple first penetrating conductors do not overlap in the axial direction when viewed from a direction perpendicular to the first main surface, and the multiple first penetrating conductors are arranged in a zigzag (alternate left and right) along the axis. The same applies to the multiple second penetrating conductors.

[0008] According to the above aspect, the multiple first through conductors are arranged in a staggered manner along the axis, the multiple second through conductors are arranged in a staggered manner along the axis, and at least one of the multiple first coil conductors and the multiple second coil conductors is formed so that the length is alternately long and short along the axis. According to this, when it is desired to increase the number of turns of the coil to increase the inductance value of the inductor component, even if the interval between two axially adjacent first coil conductors is narrowed and the interval between two axially adjacent second coil conductors is narrowed, the contact between the two axially adjacent first through conductors can be avoided, and the contact between the two axially adjacent second through conductors can be avoided. In this way, the number of turns of the coil can be increased to increase the inductance value without increasing the size of the glass substrate. Therefore, the inductance value can be improved while avoiding the inductor component from becoming larger.

[0009] Furthermore, when it is desired to increase the Q value of the inductor component, even if the diameters of the first and second through conductors are increased, contact between two axially adjacent first through conductors can be avoided, and contact between two axially adjacent second through conductors can be avoided. In this way, the Q value can be increased by increasing the diameters of the first and second through conductors without increasing the size of the glass substrate. Therefore, the Q value can be improved while avoiding an increase in the size of the inductor component. Effect of the Invention

[0010] According to an inductor component according to one aspect of the present disclosure, the inductance value can be improved while avoiding an increase in size. [Brief description of the drawings]

[0011] [Figure 1] 1 is a perspective view showing a first embodiment of an inductor component as viewed from the top surface side. [Diagram 2] FIG. 2 is a top view of the inductor component as viewed from the top surface side. [Diagram 3] 2 is a bottom view of the inductor component as viewed from the bottom side. FIG. [Figure 4A]FIG. 13 is a top view of an inductor component when the number of turns of the coil is increased. [Figure 4B] FIG. 13 is a top view of an inductor component when the coil width is increased. [Diagram 5] 11 is a perspective view showing a second embodiment of an inductor component as viewed from the top surface side. FIG. [Figure 6] 6 is a cross-sectional view taken along line VI-VI of FIG. 5. [Figure 7] 1 is a top view of a coil of an inductor component as viewed from the top side. [Figure 8] 1 is a bottom view of a coil of the inductor component as viewed from the bottom side. FIG. [Figure 9] 13 is a top view of the coil of the inductor component when the number of top conductors is odd, as viewed from the top side. FIG. [Figure 10] 13 is a bottom view of a coil of an inductor component when the number of bottom conductors is an even number, as viewed from the bottom side. FIG. [Figure 11] FIG. 13 shows an inductor component according to a third embodiment, and is a bottom view of a coil of the inductor component as viewed from the bottom side. [Figure 12] 13 is a bottom view of a coil of an inductor component when the number of bottom conductors is an even number, as viewed from the bottom side. FIG. [Figure 13] FIG. 11 is a cross-sectional view showing a fourth embodiment of the inductor component. [Figure 14] 13 is a top view showing an inductor component according to a fifth embodiment, as viewed from the top surface side. FIG. [Figure 15] 2 is a bottom view of the inductor component as viewed from the bottom side. FIG. [Figure 16] FIG. 13 shows an inductor component according to a sixth embodiment, and is a top view of a coil of the inductor component as viewed from the top side. [Figure 17] 1 is a bottom view of a coil of the inductor component as viewed from the bottom side. FIG. [Figure 18] FIG. 18 is a cross-sectional view taken along line XVIII-XVIII of FIG. 16. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, an inductor component according to an embodiment of the present disclosure will be described in detail with reference to the drawings. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0013] First Embodiment (composition) FIG. 1 is a perspective view showing a first embodiment of the inductor component as viewed from the top side. FIG. 2 is a top view of the inductor component as viewed from the top side. FIG. 3 is a bottom view of the inductor component as viewed from the bottom side. As shown in FIGS. 1, 2, and 3, the inductor component 1 includes a glass substrate 10 and a coil 110 provided on the glass substrate 10. The inductor component 1 is a surface-mount type inductor component used in, for example, a high-frequency signal transmission circuit.

[0014] The glass substrate 10 is a rectangular parallelepiped having a length, a width, and a height. The glass substrate 10 has a first side surface 100s1 and a second side surface 100s2 at both ends in the length direction, a third side surface 100s3 and a fourth side surface 100s4 at both ends in the width direction, and a bottom surface 100b and a top surface 100t at both ends in the height direction. The first side surface 100s1 and the second side surface 100s2 face each other, the third side surface 100s3 and the fourth side surface 100s4 face each other, and the bottom surface 100b and the top surface 100t face each other. That is, the outer surface of the glass substrate 10 includes the first side surface 100s1 and the second side surface 100s2, the third side surface 100s3 and the fourth side surface 100s4, the bottom surface 100b, and the top surface 100t. The bottom surface 100b faces the mounting board when the inductor component 1 is mounted on the mounting board. The bottom surface 100b corresponds to an example of a first main surface described in the claims, and the top surface 100t corresponds to an example of a second main surface described in the claims.

[0015] As shown in the drawings, for the sake of convenience, the length direction (longitudinal direction) of the glass substrate 10, which is a direction from the first side surface 100s1 to the second side surface 100s2, is referred to as the X direction. The width direction of the glass substrate 10, which is a direction from the third side surface 100s3 to the fourth side surface 100s4, is referred to as the Y direction. The height direction of the glass substrate 10, which is a direction from the bottom surface 100b to the top surface 100t, is referred to as the Z direction. The X direction, Y direction, and Z direction are perpendicular to each other, and when arranged in the order of X, Y, Z, they form a left-handed system.

[0016] In this specification, the outer surface of the glass substrate 10 does not simply mean a surface facing the outer periphery of the glass substrate 10, but a surface that is a boundary between the outside and the inside of the glass substrate 10. In addition, "above the outer surface (top surface, bottom surface, side surface) of the glass substrate 10" does not mean an absolute direction such as vertically upward as determined by the direction of gravity, but refers to a direction toward the outside of the outside and the inside with the outer surface as a boundary, based on the outer surface. Therefore, "above the outer surface" is a relative direction determined by the orientation of the outer surface. In addition, "above" with respect to a certain element includes not only an upper side away from the element, that is, an upper position through another object on the element or an upper position with a space therebetween, but also a position directly above the element (on).

[0017] The glass substrate 10 has insulating properties. The glass substrate 10 is preferably a photosensitive glass substrate, such as Foturan II (registered trademark of Schott AG). By using photosensitive glass for the glass substrate 10, a thin through via with a high aspect ratio can be formed in the glass substrate 10. In particular, the glass substrate 10 preferably contains cerium oxide (ceria: CeO2), in which case the cerium oxide acts as a sensitizer, making processing by photolithography easier.

[0018] However, the glass substrate 10 may be a glass plate that does not have photosensitivity because it can be processed by mechanical processing such as drilling and sandblasting, dry / wet etching processing using a photoresist / metal mask, laser processing, etc. Also, the glass substrate 10 may be formed by sintering a glass paste, or may be formed by a known method such as a float method.

[0019] The coil 110 is wound in a spiral shape along an axis AX. The axis AX of the coil 110 is disposed parallel to the bottom surface 100b. The coil 110 includes a plurality of bottom surface conductors 11b, a plurality of top surface conductors 11t, a plurality of first through conductors 13, and a plurality of second through conductors 14. The bottom surface conductor 11b corresponds to an example of a "first coil conductor" as set forth in the claims, and the top surface conductor 11t corresponds to an example of a "second coil conductor" as set forth in the claims.

[0020] The multiple bottom conductors 11b are disposed above the bottom surface 100b. The multiple bottom conductors 11b are arranged along the axis AX in contact with the bottom surface 100b. The multiple top conductors 11t are disposed above the top surface 100t. The multiple top conductors 11t are arranged along the axis AX in contact with the top surface 100t.

[0021] Each of the first through conductors 13 is provided in the glass substrate 10 and penetrates from the bottom surface 100b to the top surface 100t. That is, each of the first through conductors 13 extends from the bottom surface conductor 11b to the top surface conductor 11t. The first through conductors 13 are arranged along the axis AX.

[0022] The second through conductors 14 are provided in the glass substrate 10 and penetrate from the bottom surface 100b to the top surface 100t. That is, the second through conductors 14 extend from the bottom surface conductor 11b to the top surface conductor 11t. The second through conductors 14 are arranged along the axis AX. The second through conductors 14 are provided on the opposite side of the axis AX to the first through conductor 13. The bottom surface conductor 11b, the first through conductor 13, the top surface conductor 11t, and the second through conductor 14 are electrically connected in this order to form at least a part of the spiral coil 110.

[0023] The bottom conductor 11b and the top conductor 11t are made of a conductive material such as copper, silver, gold, or an alloy thereof. The bottom conductor 11b and the top conductor 11t may be a metal film formed by plating, vapor deposition, sputtering, or the like, or may be a metal sintered body formed by applying and sintering a conductive paste. The first through conductor 13 and the second through conductor 14 are made of the same material as the bottom conductor 11b and the top conductor 11t.

[0024] The bottom conductor 11b and the top conductor 11t are preferably formed by a semi-additive method, which allows the bottom conductor 11b and the top conductor 11t to be formed with low electrical resistance, high precision, and high aspect ratio. The first penetrating conductor 13 and the second penetrating conductor 14 can be formed in through holes formed in advance in the glass substrate 10 using the materials and manufacturing methods exemplified for the bottom conductor 11b and the top conductor 11t.

[0025] When viewed from a direction perpendicular to the bottom surface 100b (Z direction), the top conductors 11t extend in a direction perpendicular to the axis AX (Y direction). All the top conductors 11t are arranged in parallel along the axis AX direction (X direction).

[0026] When viewed from the direction perpendicular to the bottom surface 100b (Z direction), the bottom conductors 11b extend in a direction inclined with respect to the direction perpendicular to the axis AX (Y direction). In other words, the bottom conductors 11b extend in the Y direction while being slightly inclined toward the X direction. All the bottom conductors 11b are arranged parallel to the axis AX direction (X direction).

[0027] The first penetrating conductor 13 is disposed on the fourth side surface 100s4 side with respect to the axis AX within the through hole of the glass substrate 10, and the second penetrating conductor 14 is disposed on the third side surface 100s3 side with respect to the axis AX within the through hole of the glass substrate 10. The first penetrating conductor 13 and the second penetrating conductor 14 each extend in a direction (Z direction) perpendicular to the bottom surface 100b and the top surface 100t.

[0028] When viewed from a direction perpendicular to the top surface 100t, the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14 are larger than the width of the top surface conductor 11t. The diameter of the end face of the first through conductor 13 is the circle equivalent diameter of the end face of the first through conductor 13, and the diameter of the end face of the second through conductor 14 is the circle equivalent diameter of the end face of the second through conductor 14. The width of the top surface conductor 11t is the size in the direction perpendicular to the extension direction of the top surface conductor 11t. Similarly, when viewed from a direction perpendicular to the bottom surface 100b, the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14 are larger than the width of the bottom surface conductor 11b.

[0029] All of the first through conductors 13 are arranged in a staggered manner along the axis AX. Specifically, when viewed from a direction perpendicular to the bottom surface 100b, the central axes 13a of all of the first through conductors 13 do not overlap in the direction of the axis AX, and all of the first through conductors 13 are arranged in a zigzag (alternately left and right) along the axis AX.

[0030] All the second through conductors 14 are arranged in a staggered manner along the axis AX. Specifically, when viewed from a direction perpendicular to the bottom surface 100b, the central axes 14a of all the second through conductors 14 do not overlap in the direction of the axis AX, and all the second through conductors 14 are arranged in a zigzag (alternate left and right) along the axis AX.

[0031] The lengths of all the top surface conductors 11t are formed so as to alternate between long and short lengths along the axis AX. Specifically, the number of the top surface conductors 11t is an even number of eight. When viewed from a direction perpendicular to the top surface 100t (bottom surface 100b), the top surface conductor 11t on one outer side in the axis AX direction (the uppermost side in FIG. 2) is a short top surface conductor 11t, and the top surface conductor 11t on the other outer side in the axis AX direction (the lowermost side in FIG. 2) is a long top surface conductor 11t.

[0032] On the other hand, all the bottom conductors 11b are formed to have the same length. Specifically, the number of bottom conductors 11b is an odd number, that is, seven, and the seven bottom conductors 11b have the same length.

[0033] According to the above configuration, the first through conductors 13 are arranged in a staggered manner along the axis AX, the second through conductors 14 are arranged in a staggered manner along the axis AX, and the lengths of the top surface conductors 11t are formed to alternately become longer and shorter along the axis AX. According to this, when it is desired to increase the number of turns of the coil 110 to increase the inductance value of the inductor component 1, even if the interval between the two bottom surface conductors 11b adjacent in the axis AX direction is narrowed and the interval between the two top surface conductors 11t adjacent in the axis AX direction is narrowed, contact between the two first through conductors 13 adjacent in the axis AX direction can be avoided, and contact between the two second through conductors 14 adjacent in the axis AX direction can be avoided.

[0034] Specifically, as shown in FIG. 4A, even if the number of top conductors 11t is increased to increase the number of turns of the coil 110, contact between two adjacent first penetrating conductors 13 in the axial direction AX can be avoided, and contact between two adjacent second penetrating conductors 14 in the axial direction AX can be avoided.

[0035] In this way, the inductance value can be increased by increasing the number of turns of the coil 110 without increasing the size of the glass substrate 10. Therefore, the inductance value can be improved while preventing the inductor component 1 from becoming large.

[0036] Furthermore, if it is desired to increase the Q value of the inductor component 1, even if the diameters of the first through conductor 13 and the second through conductor 14 are increased, contact between two adjacent first through conductors 13 in the axial direction AX can be avoided, and contact between two adjacent second through conductors 14 in the axial direction AX can be avoided.

[0037] 4B, even if the diameters of the first and second penetrating conductors 13 and 14 are increased, contact between two first penetrating conductors 13 adjacent to each other in the axial direction can be avoided, and contact between two second penetrating conductors 14 adjacent to each other in the axial direction can be avoided. Also, the width of the top surface conductor 11t can be increased within a range where the top surface conductor 11t does not contact the first penetrating conductors 13 and second penetrating conductors 14 adjacent to each other in the axial direction of the top surface conductor 11t.

[0038] In this way, the diameters of the first through conductor 13 and the second through conductor 14 can be increased to increase the Q value without increasing the size of the glass substrate 10. Furthermore, the widths of the top conductor 11t and the bottom conductor 11b can be increased to increase the Q value. Therefore, the Q value can be improved while preventing the inductor component 1 from becoming larger.

[0039] At least one of the lengths of all the bottom conductors 11b and all the top conductors 11t may be formed so that the lengths alternately increase and decrease along the axis AX. This can improve the inductance value while avoiding an increase in the size of the inductor component 1, and can also improve the Q value while avoiding an increase in the size of the inductor component 1.

[0040] Preferably, in two first through conductors 13 adjacent in the axis AX direction, a part of one first through conductor 13 and a part of the other first through conductor 13 overlap in a direction perpendicular to the axis AX when viewed from a direction perpendicular to the bottom surface 100b (top surface 100t). In two second through conductors 14 adjacent in the axis AX direction, a part of one second through conductor 14 and a part of the other second through conductor 14 overlap in a direction perpendicular to the axis AX when viewed from a direction perpendicular to the bottom surface 100b (top surface 100t). This makes it possible to narrow the interval between two bottom surface conductors 11b adjacent in the axis AX direction and to narrow the interval between two top surface conductors 11t adjacent in the axis AX direction, thereby increasing the number of turns of the coil 110.

[0041] (Manufacturing Method of Inductor Component 1) Next, a method for manufacturing the inductor component 1 will be described with reference to FIGS.

[0042] First, a glass substrate 10 is prepared. The glass substrate 10 is made of, for example, photosensitive glass, and is easy to process through holes and the like. For example, Foturan II can be used as the glass substrate 10. The glass substrate 10 generally contains oxides of silicon, lithium, aluminum, cerium, etc., making it compatible with high-precision photolithography.

[0043] Thereafter, through holes for providing the first through conductor 13 and the second through conductor 14 are formed in the glass substrate 10. For example, the through holes can be formed by irradiating the area where the through holes are to be formed with ultraviolet light to crystallize the area, and then removing the crystallized area by etching. The through holes may also be formed by laser irradiation.

[0044] At this time, the multiple through holes for providing the first through conductors 13 are arranged in a staggered manner along the X direction, and the multiple through holes for providing the second through conductors 14 are arranged in a staggered manner along the X direction.

[0045] Thereafter, the first through conductors 13 and the second through conductors 14 are formed in the through holes by, for example, electrolytic plating. At this time, the multiple first through conductors 13 are arranged in a staggered pattern along the X direction, and the multiple second through conductors 14 are arranged in a staggered pattern along the X direction.

[0046] Then, a top conductor 11t electrically connected to the through conductors 13, 14 is formed on the top surface 100t of the glass substrate 10, and a bottom conductor 11b electrically connected to the through conductors 13, 14 is formed on the bottom surface 100b of the glass substrate 10. The top conductor 11t and the bottom conductor 11b are formed, for example, by a semi-additive method. At this time, the lengths of all the top conductors 11t are formed so as to alternately increase and decrease along the axis AX. The lengths of all the bottom conductors 11b are formed so as to be the same. In this way, the inductor component 1 can be manufactured.

[0047] <Second embodiment> FIG. 5 is a perspective view showing a second embodiment of the inductor component as viewed from the top surface side. FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 5. FIG. 7 is a top view showing the coil of the inductor component as viewed from the top surface side, and FIG. 8 is a bottom view showing the coil of the inductor component as viewed from the bottom surface side. The second embodiment differs from the first embodiment in that a first protective layer, a first lead conductor, and a second lead conductor are provided. This different configuration will be described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0048] As shown in FIGS. 5, 6, 7 and 8, the inductor component 1A of the second embodiment further includes a first protective layer 15, a first lead conductor 21 and a second lead conductor 22. As shown in FIG.

[0049] The first protective layer 15 is provided on the bottom surface 100b of the glass substrate 10 and covers the bottom surface conductor 11b. The first protective layer 15 contacts the bottom surface 100b and the bottom surface conductor 11b. By covering the bottom surface conductor 11b, the first protective layer 15 protects the bottom surface conductor 11b from external forces and prevents damage to the bottom surface conductor 11b. In addition, since the first protective layer 15 covers the bottom surface 100b of the glass substrate 10, it is possible to protect the glass substrate 10. The first protective layer 15 has insulating properties and is made of a resin such as epoxy or polyimide. Note that a second protective layer that covers the top surface conductor 11t may be provided on the top surface 100t of the glass substrate 10.

[0050] The first lead conductor 21 is inserted into a through hole in the first protective layer 15 and connected to the outermost first through conductor 13 located at the first end of the coil 110. The first lead conductor 21 extends in a direction perpendicular to the bottom surface 100b.

[0051] The second lead conductor 22 is inserted into a through hole of the first protective layer 15 and connected to the outermost second through conductor 14 located at the second end of the coil 110. The second lead conductor 22 extends in a direction perpendicular to the bottom surface 100b.

[0052] The first lead conductor 21 and the second lead conductor 22 are made of, for example, the same material as the bottom conductor 11b. The first lead conductor 21 is connected, for example, to an L-shaped first terminal electrode 121 provided on the first protective layer 15. The second lead conductor 22 is connected, for example, to an L-shaped second terminal electrode 122 provided on the first protective layer 15. The first terminal electrode 121 and the second terminal electrode 122 are indicated by two-dot chain lines in FIG.

[0053] A first end face 211 of the first lead conductor 21 on the side of the first penetrating conductor 13 at the end is in contact with a first end face 131 of the first penetrating conductor 13 at the side of the first lead conductor 21. In FIG. 8, the first end face 211 of the first lead conductor 21 is indicated by a two-dot chain line. The diameter of the first end face 211 of the first lead conductor 21 is larger than the diameter of the first end face 131 of the first penetrating conductor 13 at the end. The diameter of the first end face 211 is the circle equivalent diameter of the first end face 211, and the diameter of the first end face 131 is the circle equivalent diameter of the first end face 131. Here, the glass substrate 10 and the first protective layer 15 are made of different materials, and in order to increase the reliability of the electrical connection between the glass substrate 10 and the first protective layer 15, the diameter of the first lead conductor 21 provided on the first protective layer 15 is set to be larger than the diameter of the first penetrating conductor 13 provided on the glass substrate 10.

[0054] According to the above configuration, when the first extraction conductor 21 is provided on the bottom surface 100b of the glass substrate 10 so as to be connected to the endmost first through conductor 13, even if the first extraction conductor 21 is misaligned, the diameter of the first end face 211 of the first extraction conductor 21 is larger than the diameter of the first end face 131 of the endmost first through conductor 13, so that the first extraction conductor 21 can be reliably connected to the endmost first through conductor 13.

[0055] Similarly, a first end face 221 of the second lead conductor 22 on the side of the second lead conductor 14 at the extreme end is in contact with a first end face 141 of the second lead conductor 14 on the side of the second lead conductor 22. In Fig. 8, the first end face 221 of the second lead conductor 22 is indicated by a two-dot chain line. The diameter of the first end face 221 of the second lead conductor 22 is larger than the diameter of the first end face 141 of the second lead conductor 14 at the extreme end. The diameter of the first end face 221 is the circle equivalent diameter of the first end face 221, and the diameter of the first end face 141 is the circle equivalent diameter of the first end face 141.

[0056] According to the above configuration, when the second extraction conductor 22 is provided on the bottom surface 100b of the glass substrate 10 so as to be connected to the endmost second through conductor 14, even if the second extraction conductor 22 is misaligned, the diameter of the first end face 221 of the second extraction conductor 22 is larger than the diameter of the first end face 141 of the endmost second through conductor 14, so that the second extraction conductor 22 can be reliably connected to the endmost second through conductor 14.

[0057] As shown in Fig. 8, like the first embodiment, all the first through conductors 13 are arranged in a zigzag pattern along the axis AX, and all the second through conductors 14 are arranged in a zigzag pattern along the axis AX. This can reliably prevent the first lead conductor 21 from contacting not the most extreme first through conductor 13 located directly above the first lead conductor 21, but the first through conductor 13 adjacent to the most extreme first through conductor 13 in the axis AX direction. Also, the second lead conductor 22 can reliably prevent contacting not the most extreme second through conductor 14 located directly above the second lead conductor 22, but the second through conductor 14 adjacent to the most extreme second through conductor 14 in the axis AX direction.

[0058] In other words, by arranging all the first penetrating conductors 13 in a zigzag manner rather than in a straight line along the axis AX, it is possible to increase the distance between the first lead conductor 21 and the first penetrating conductor 13 adjacent to the endmost first penetrating conductor 13 in the axial direction of the axis AX. By arranging all the second penetrating conductors 14 in a zigzag manner rather than in a straight line along the axis AX, it is possible to increase the distance between the second lead conductor 22 and the second penetrating conductor 14 adjacent to the endmost second penetrating conductor 14 in the axial direction of the axis AX.

[0059] As shown in Fig. 7 and Fig. 8, the number of top conductors 11t is an even number of eight, and the number of bottom conductors 11b is an odd number of seven. On the other hand, as shown in Fig. 9 and Fig. 10, the number of top conductors 11t is an odd number of seven, and the number of bottom conductors 11b is an even number of six. Thus, depending on whether the number of top conductors 11t in Fig. 7 is an even number or the number of top conductors 11t in Fig. 9 is an odd number, the length of the top conductor 11t at the end in the axial AX direction of the coil 110 is "longer" or "shorter". That is, the length of the top conductor 11t at the end in Fig. 7 is shorter, and the length of the top conductor 11t at the end in Fig. 9 is longer. In any case, the distance between the first extraction conductor 21 and the first penetrating conductor 13 adjacent to the endmost first penetrating conductor 13 in the axial direction AX can be increased, and the distance between the second extraction conductor 22 and the second penetrating conductor 14 adjacent to the endmost second penetrating conductor 14 in the axial direction AX can be increased.

[0060] As shown in Figures 7 and 8, when viewed from a direction perpendicular to the bottom surface 100b (top surface 100t), the bottom surface conductor 11b extends in a direction inclined with respect to the direction perpendicular to the axis AX, and the top surface conductor 11t extends in a direction perpendicular to the axis AX.

[0061] According to the above configuration, the first extension conductor 21 can be arranged so that the first extension conductor 21 overlaps an area (dead space) on the bottom surface 100b of the glass substrate 10 where the bottom surface conductor 11b does not exist when viewed from a direction perpendicular to the bottom surface 100b (top surface 100t). In this way, the first extension conductor 21 can be arranged while avoiding an increase in size of the glass substrate 10. Similarly, the second extension conductor 22 can be arranged so that the second extension conductor 22 overlaps an area (dead space) on the bottom surface 100b of the glass substrate 10 where the bottom surface conductor 11b does not exist when viewed from a direction perpendicular to the bottom surface 100b (top surface 100t). In this way, the second extension conductor 22 can be arranged while avoiding an increase in size of the glass substrate 10.

[0062] <Third embodiment> Fig. 11 shows a third embodiment of the inductor component, and is a bottom view of the coil of the inductor component as viewed from the bottom side. The third embodiment differs from the second embodiment (Fig. 8) in the positions of the first and second lead conductors. This difference in configuration will be described below. The other configurations are the same as those of the second embodiment, and description thereof will be omitted.

[0063] 11 , in the inductor component 1B of the third embodiment, when viewed from a direction perpendicular to the bottom surface 100b, the center 211a of the first end surface 211 of the first extraction conductor 21 is separated from the center 131a of the first end surface 131 of the outermost first penetrating conductor 13. The outermost first penetrating conductor 13 is directly connected to the first extraction conductor 21. The center 211a of the first end surface 211 is the center of gravity of the first end surface 211. The center 131a of the first end surface 131 is the center of gravity of the first end surface 131 and coincides with the central axis 13a of the first penetrating conductor 13.

[0064] Similarly, when viewed from a direction perpendicular to the bottom surface 100b, the center 221a of the first end surface 221 of the second extraction conductor 22 is separated from the center 141a of the first end surface 141 of the outermost second through conductor 14. The outermost second through conductor 14 is directly connected to the second extraction conductor 22. The center 221a of the first end surface 221 is the center of gravity of the first end surface 221. The center 141a of the first end surface 141 is the center of gravity of the first end surface 141 and coincides with the central axis 14a of the second through conductor 14.

[0065] According to the above configuration, the center 211a of the first end face 211 is offset from the center 131a of the first end face 131, which increases the degree of freedom in design compared to the case where the center 211a of the first end face 211 is aligned with the center 131a of the first end face 131 as shown in the second embodiment (FIG. 8). Similarly, the center 221a of the first end face 221 is offset from the center 141a of the first end face 141, which increases the degree of freedom in design compared to the case where the center 221a of the first end face 221 is aligned with the center 141a of the first end face 141 as shown in the second embodiment (FIG. 8). It is only necessary that at least the first lead conductor 21 of the first lead conductor 21 and the second lead conductor 22 satisfies the above configuration.

[0066] 11, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the center 211a of the first end surface 211 of the first extension conductor 21 is offset toward the axis AX with respect to the center 131a of the first end surface 131 of the outermost first penetrating conductor 13. According to the above configuration, the first extension conductor 21 having a larger diameter can be shifted toward the axis AX, and the width of the glass substrate 10 in the direction perpendicular to the axis AX can be reduced as shown from the dashed double-dashed line to the solid line in FIG.

[0067] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the center 221a of the first end surface 221 of the second extension conductor 22 is offset toward the axis AX with respect to the center 141a of the first end surface 141 of the outermost second penetrating conductor 14. According to the above configuration, the second extension conductor 22 having a larger diameter can be shifted toward the axis AX, and the width of the glass substrate 10 in the direction perpendicular to the axis AX can be reduced as shown from the dashed double-dashed line to the solid line in FIG.

[0068] 11, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the center 211a of the first end face 211 of the first extraction conductor 21 is eccentric outward in the axis AX direction from the center 131a of the first end face 131 of the endmost first penetrating conductor 13. The outward direction in the axis AX direction is the outer side of the inductor component 1B in the axis AX direction. According to the above configuration, the first extraction conductor 21 having a larger diameter can be shifted outward in the axis AX direction, and it is possible to prevent the first extraction conductor 21 from contacting the first penetrating conductor 13 adjacent in the axis AX direction to the endmost first penetrating conductor 13.

[0069] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, the center 221a of the first end surface 221 of the second lead conductor 22 is eccentric outward in the axis AX direction from the center 141a of the first end surface 141 of the endmost second through conductor 14. The outward in the axis AX direction is the outer side of the inductor component 1B in the axis AX direction. According to the above configuration, the second lead conductor 22 having a larger diameter can be shifted outward in the axis AX direction, and it is possible to prevent the second lead conductor 22 from contacting the second through conductor 14 adjacent in the axis AX direction to the endmost second through conductor 14.

[0070] In FIG. 11, the number of bottom conductors 11b is an odd number of seven. On the other hand, as shown in FIG. 12, the number of bottom conductors 11b is an even number of six. In FIG. 12, the positions of the first and second lead conductors are different from those of the second embodiment (FIG. 10). The positions of the first and second lead conductors 21 and 22 shown in FIG. 12 are the same as the positions of the first and second lead conductors 21 and 22 shown in FIG. 11. In this way, even if the number of bottom conductors 11b in FIG. 12 is an even number, the same effect as when the number of bottom conductors 11b in FIG. 11 is an odd number is obtained.

[0071] <Fourth embodiment> Fig. 13 is a cross-sectional view showing a fourth embodiment of the inductor component. The fourth embodiment differs from the second embodiment (Fig. 6) in that first and second via conductors and first and second terminal electrodes are provided. This different configuration will be described below. The other configurations are the same as those of the second embodiment, and description thereof will be omitted.

[0072] As shown in FIG. 13, an inductor component 1C of the fourth embodiment further includes a first via conductor 31, a second via conductor 32, a first terminal electrode 121, and a second terminal electrode 122.

[0073] The first terminal electrode 121 and the second terminal electrode 122 are provided on the side of the first protective layer 15 opposite the bottom surface 100b. The first terminal electrode 121 corresponds to an example of a "first connecting conductor" described in the claims, and the second terminal electrode 122 corresponds to an example of a "second connecting conductor." Note that the first connecting conductor may be a routed wiring instead of the first terminal electrode 121.

[0074] The first terminal electrode 121 is connected to a first end of the coil 110. The second terminal electrode 122 is connected to a second end of the coil 110. The first terminal electrode 121 is provided on the first protective layer 15 on the first side surface 100s1 side with respect to the center of the glass substrate 10 in the X direction. The second terminal electrode 122 is provided on the first protective layer 15 on the second side surface 100s2 side with respect to the center of the glass substrate 10 in the X direction.

[0075] The first via conductor 31 is inserted into a through hole of the first protective layer 15 and is located between the first lead conductor 21 and the first terminal electrode 121. A first end face 311 of the first via conductor 31 on the first terminal electrode 121 side is in contact with the first terminal electrode 121. The endmost first through conductor 13 is directly connected to the first lead conductor 21, and the first lead conductor 21 is directly connected to the first via conductor 31. The diameter of the first end face 311 of the first via conductor 31 is larger than the diameter of the first end face 131 of the endmost first through conductor 13. The diameter of the first end face 311 is the circle equivalent diameter of the first end face 311.

[0076] According to the above configuration, the diameter of the first end face 311 of the first via conductor 31 is large, so that the contact area between the first via conductor 31 and the first terminal electrode 121 can be increased, improving the connection reliability between the first via conductor 31 and the first terminal electrode 121. Furthermore, by providing the first via conductor 31, the first extraction conductor 21 can be formed to have a thickness approximately equal to that of the bottom conductor 11b, and the thickness of the first via conductor 31 can be reduced.

[0077] Similarly, the second via conductor 32 is inserted into a through hole of the first protective layer 15 and is located between the second lead conductor 22 and the second terminal electrode 122. A first end face 321 of the second via conductor 32 on the second terminal electrode 122 side is in contact with the second terminal electrode 122. The second through conductor 14 at the end is directly connected to the second lead conductor 22, and the second lead conductor 22 is directly connected to the second via conductor 32. The diameter of the first end face 321 of the second via conductor 32 is larger than the diameter of the first end face 142 of the second through conductor 14 at the end. The diameter of the first end face 321 is the circle equivalent diameter of the first end face 321.

[0078] According to the above configuration, since the diameter of the first end face 321 of the second via conductor 32 is large, it is possible to increase the contact area between the second via conductor 32 and the second terminal electrode 122, thereby improving the connection reliability between the second via conductor 32 and the second terminal electrode 122. Furthermore, by providing the second via conductor 32, it is possible to form the second extraction conductor 22 to have a thickness approximately equal to that of the bottom conductor 11b, and therefore the thickness of the second via conductor 32 can be reduced.

[0079] Of the first via conductors 31 and the second via conductors 32, at least the first via conductors 31 need to satisfy the above configuration.

[0080] Preferably, when viewed from a direction perpendicular to the bottom surface 100b, a recess 121a is provided in a region of the outer surface of the first terminal electrode 121 that overlaps with the first via conductor 31. With this, when the inductor component 1C is mounted on a mounting board via solder, the solder can enter the recess 121a, improving the adhesive strength of the first terminal electrode 121 to the mounting board.

[0081] Similarly, preferably, when viewed from a direction perpendicular to the bottom surface 100b, a recess 122a is provided in a region of the outer surface of the second terminal electrode 122 that overlaps with the second via conductor 32. With this, when the inductor component 1C is mounted on a mounting board via solder, the solder can enter the recess 122a, improving the adhesive strength of the second terminal electrode 122 to the mounting board.

[0082] <Fifth embodiment> Fig. 14 is a top view showing the fifth embodiment of the inductor component as viewed from the top side, and Fig. 15 is a bottom view showing the inductor component as viewed from the bottom side. The fifth embodiment differs from the first embodiment (Figs. 2 and 3) in the shapes of the top conductor 11t and the bottom conductor 11b. This difference in configuration will be described below. The other configurations are the same as those of the first embodiment, and description thereof will be omitted.

[0083] 14 and 15, in the inductor component 1D of the fifth embodiment, all the top conductors 11t are formed to have the same length. Specifically, the number of the top conductors 11t is an even number, six, and the six top conductors 11t have the same length.

[0084] Meanwhile, the lengths of all the bottom conductors 11b are formed so as to alternate between longer and shorter lengths along the axis AX. Specifically, the number of bottom conductors 11b is an odd number of five. When viewed from a direction perpendicular to the bottom surface 100b, the bottom conductor 11b on one outer side in the axis AX direction (the uppermost side in FIG. 15) is the long bottom conductor 11b, and the bottom conductor 11b on the other outer side in the axis AX direction (the lowermost side in FIG. 2) is the long bottom conductor 11b.

[0085] According to the above configuration, the lengths of all bottom conductors 11b are formed so as to alternately become longer and shorter along the axis AX, so that, as in the first embodiment, the inductance value can be improved while avoiding an increase in the size of the inductor component 1D, and the Q value can be improved while avoiding an increase in the size of the inductor component 1D.

[0086] As shown in FIG. 14, the top surface conductor 11t preferably has an extension portion 11t1 and a pad portion 11t2 provided on each of both ends of the extension portion 11t1. The width of the extension portion 11t1 is smaller than the diameter of the pad portion 11t2. The width of the extension portion 11t1 is a size in a direction perpendicular to the extension direction of the extension portion 11t1 when viewed from a direction perpendicular to the top surface 100t. The diameter of the pad portion 11t2 is a circle equivalent diameter of the pad portion 11t2 when viewed from a direction perpendicular to the top surface 100t.

[0087] The diameter of the pad portion 11t2 is larger than the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14. As a result, when a top surface conductor 11t is provided on the top surface 100t of the glass substrate 10 so as to be connected to the first through conductor 13 and the second through conductor 14, even if the top surface conductor 11t is misaligned, the pad portion 11t2 of the top surface conductor 11t can be reliably connected to the end face of the first through conductor 13 and the end face of the second through conductor 14.

[0088] When viewed from a direction perpendicular to the top surface 100t, the width of the extension portion 11t1 is smaller than the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14. This makes it possible to more reliably prevent contact between the top surface conductors 11t adjacent to each other in the axial direction AX. Note that when viewed from a direction perpendicular to the top surface 100t, the width of the extension portion 11t1 may be larger than the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14, thereby reducing the electrical resistance of the top surface conductor 11t.

[0089] As shown in FIG. 15, the bottom conductor 11b preferably has an extension 11b1 and a pad 11b2 provided on each of both ends of the extension 11b1. The width of the extension 11b1 is smaller than the diameter of the pad 11b2. The width of the extension 11b1 is a size in a direction perpendicular to the extension direction of the extension 11b1 when viewed from a direction perpendicular to the bottom surface 100b. The diameter of the pad 11b2 is a circle equivalent diameter of the pad 11b2 when viewed from a direction perpendicular to the bottom surface 100b.

[0090] The diameter of the pad portion 11b2 is larger than the diameter of the end face of the first through conductor 13 and the diameter of the end face of the second through conductor 14. As a result, when the bottom conductor 11b is provided on the bottom surface 100b of the glass substrate 10 so as to be connected to the first through conductor 13 and the second through conductor 14, even if the bottom conductor 11b is misaligned, the pad portion 11b2 of the bottom conductor 11b can be reliably connected to the end face of the first through conductor 13 and the end face of the second through conductor 14.

[0091] When viewed from a direction perpendicular to the bottom surface 100b, the width of the extension portion 11b1 is smaller than the diameter of the end face of the first penetrating conductor 13 and the diameter of the end face of the second penetrating conductor 14. This makes it possible to more reliably prevent contact between the bottom surface conductors 11b adjacent to each other in the axial AX direction. Note that when viewed from a direction perpendicular to the bottom surface 100b, the width of the extension portion 11b1 may be larger than the diameter of the end face of the first penetrating conductor 13 and the diameter of the end face of the second penetrating conductor 14, thereby reducing the electrical resistance of the bottom surface conductor 11b.

[0092] Sixth Embodiment FIG. 16 shows a sixth embodiment of the inductor component, and is a top view of the coil of the inductor component as viewed from the top side. FIG. 17 is a bottom view of the coil of the inductor component as viewed from the bottom side. FIG. 18 is a cross-sectional view taken along line XVIII-XVIII of FIG. 16. The sixth embodiment differs from the fourth embodiment (FIG. 13) in the positions of the first via conductor and the second via conductor. This different configuration will be described below. The other configurations are the same as those of the fourth embodiment, and description thereof will be omitted.

[0093] 16, 17, and 18, in an inductor component 1E of the sixth embodiment, a first extraction conductor 21 extends along the Y direction. A first end of the first extraction conductor 21 is connected to the outermost first through conductor 13, and a second end of the first extraction conductor 21 is connected to the first via conductor 31. When viewed from a direction perpendicular to the bottom surface 100b, the first via conductor 31 is separated from the outermost first through conductor 13 without overlapping therewith. This makes it possible to prevent stress generated by a difference in linear expansion coefficient between the outermost first through conductor 13 and the glass substrate 10 from being concentrated on the first via conductor 31, thereby improving reliability.

[0094] Similarly, the second extraction conductor 22 extends along the Y direction. A first end of the second extraction conductor 22 is connected to the outermost second through conductor 14, and a second end of the second extraction conductor 22 is connected to the second via conductor 32. When viewed from a direction perpendicular to the bottom surface 100b, the second via conductor 32 is separated from the outermost second through conductor 14 without overlapping therewith. This makes it possible to prevent stress generated by the difference in linear expansion coefficient between the outermost second through conductor 14 and the glass substrate 10 from being concentrated on the second via conductor 32, thereby improving reliability.

[0095] The shapes of the top conductor 11t and the bottom conductor 11b are the same as those of the top conductor 11t and the bottom conductor 11b in the fifth embodiment, and therefore a description thereof will be omitted.

[0096] The present disclosure is not limited to the above-mentioned embodiments, and design changes are possible within the scope of the present disclosure. For example, the features of the first to sixth embodiments may be combined in various ways. In the first to sixth embodiments, a surface-mounted inductor component is shown as the inductor component, but the inductor component may be built into the substrate. In this case, the first connecting conductor connected to the first via conductor may be a wiring that penetrates the substrate instead of the first terminal electrode, and the second connecting conductor connected to the second via conductor may be a wiring that penetrates the substrate instead of the second terminal electrode. [Explanation of symbols]

[0097] 1, 1A, 1B, 1C, 1D, 1E Inductor Components 10 Glass substrate 11b Bottom conductor (first coil conductor) 11b1 Extension 11b2 Pad section 11t Top conductor (second coil conductor) 11t1 Extension part 11t2 Pad section 13 First through conductor 13a Center axis 131 1st end face 131a center 14 Second through conductor 14a Center axis 141 First end surface 141a center 15 1st protective layer 21 First lead conductor 211 1st end face 211a center 22 Second lead conductor 221 1st end face 221a center 31 First via conductor 311 1st end face 32 Second via conductor 321 1st end face 100b Bottom surface (first main surface) 100t Top surface (second main surface) 100s1~100s4 1st to 4th sides 110 Coil 121 First terminal electrode (first connecting conductor) 121a Recess 122 Second terminal electrode (second connecting conductor) 122a Recess AX axis

Claims

1. a glass substrate including a first main surface and a second main surface opposed to each other; a coil provided on the glass substrate and wound in a spiral shape along an axis; Equipped with The coil is a plurality of first coil conductors arranged along the axis on the first main surface of the glass substrate; a plurality of second coil conductors arranged along the axis on the second main surface of the glass substrate; a plurality of first through conductors that penetrate the glass substrate from the first main surface to the second main surface and are arranged along the axis; a plurality of second through conductors that penetrate the glass substrate from the first main surface to the second main surface, are provided on the opposite side of the axis from the first through conductors, and are arranged along the axis; Including, the first coil conductor, the first through conductor, the second coil conductor, and the second through conductor are connected in this order to form at least a part of the spiral shape; the plurality of first through conductors are arranged in a staggered manner along the axis, and the plurality of second through conductors are arranged in a staggered manner along the axis, At least one of the lengths of the plurality of first coil conductors and the plurality of second coil conductors is formed so as to alternately vary in length along the axis; moreover, a first protective layer provided on the first main surface of the glass substrate and covering the first coil conductor; a first lead conductor that is inserted into the through hole of the first protective layer and is connected to a first through conductor at an extreme end located at a first end of the coil; Equipped with a first end surface of the first lead conductor on the side of the most distal first through conductor contacts a first end surface of the most distal first through conductor on the side of the first lead conductor; a diameter of the first end surface of the first lead conductor is larger than a diameter of the first end surface of the outermost first through conductor; An inductor component, wherein when viewed from a direction perpendicular to the first main surface, the center of the first end face of the first extraction conductor is eccentric outward in the axial direction relative to the center of the first end face of the endmost first penetrating conductor.

2. a first connection conductor provided on a side of the first protective layer opposite to the first main surface; a first via conductor inserted into the through hole of the first protective layer and positioned between the first lead conductor and the first connection conductor; Equipped with a first end surface of the first via conductor on the first connection conductor side contacts the first connection conductor; The inductor component according to claim 1 , wherein a diameter of the first end surface of the first via conductor is larger than a diameter of the first end surface of the outermost first through conductor.

3. moreover, a first protective layer provided on the first main surface of the glass substrate and covering the first coil conductor; a first lead conductor that is inserted into the through hole of the first protective layer and is connected to a first through conductor at an extreme end located at a first end of the coil; Equipped with When viewed from a direction perpendicular to the first main surface, the first coil conductor extends in a direction inclined with respect to a direction perpendicular to the axis, The inductor component according to claim 1 , wherein the second coil conductor extends in a direction perpendicular to the axis.

Images