Peeling device and peeling method

Abstract

To provide a peeling device and a peeling method, capable of stably forming a peeling start point when peeling a base material film having a fine adhesive layer.SOLUTION: A peeling device 1 includes: a sheet table 21; a blade 41c having a blade tip part 41d; a heater 41b; a movement mechanism 3; and a clamp mechanism 42 that grips a peeling start point S5 formed onto a lamination sheet S, and peels a fine adhesion film S2 from a sheet S1. In the movement mechanism, the blade tip part heated to a predetermined temperature is brought into contacted with the top of an outer edge part of a base material film that becomes a start position Ps so that a long direction of the blade tip part is orthogonal to a direction of a relative movement, and the blade tip part is slit from the start position to a termination position Pf positioned at an inner side of the base material film from the start position, and thereby the peeling start point that is peeled such that the fine adhesion film is wrapped is formed. A length Lsf from the start position to the termination position is set so that the length of the lamination sheet at a part where the tip end part is in contact therewith does not exceed a length Lb.SELECTED DRAWING: Figure 4

Description

[Technical field]

[0001] The present invention relates to a peeling device and a peeling method. [Background technology]

[0002] In the manufacturing process of multilayer ceramic electronic components having a multilayer structure (e.g., multilayer ceramic capacitors (MLCC), chip inductors, low temperature co-fired ceramics (LTCC), etc.), for example, a slurry is applied onto a base film (carrier film) to form a laminated sheet in which ceramic green sheets are laminated on a film base. Next, internal electrodes are appropriately printed on the ceramic green sheets. Next, the ceramic green sheets are peeled off from the base film, and multiple ceramic green sheets are laminated, heated, and pressed together to form a ceramic green sheet laminate.

[0003] Among these steps, a peeling device is used to peel the ceramic green sheet from the base film (see, for example, Patent Document 1).

[0004] In the peeling device disclosed in Patent Document 1, a notch is formed in the holding plate of a sheet table that holds the laminated sheet by suction, where the end of the laminated sheet is placed. The notch has an inclined surface that is separated from the end of the laminated sheet and creates a gap between the end and the notch. A blade is pressed against the end of the laminated sheet that is placed in the gap, forming a fold line at the end, and the portion of the base film outside the fold line is folded up against the ceramic green sheet. This folded up portion is a gripping allowance for the clamping mechanism and is the peeling starting point for peeling the base film from the ceramic green sheet. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2020-121855 A Summary of the Invention [Problem to be solved by the invention]

[0006] In this way, the peeling device disclosed in Patent Document 1 physically forms a fold line only in the base film and folds up only the end of the base film. Therefore, with this peeling device, for a base film having weak adhesion (for example, a base film having a weak adhesion layer on its surface), the peeling starting point cannot be stably formed due to the adhesion of the base film.

[0007] An object of the present invention is to provide a peeling device and a peeling method that can stably form a peeling starting point on a substrate film having a weak adhesive layer. [Means for solving the problem]

[0008] A peeling device in one embodiment of the present invention is a peeling device that peels off a weak adhesive film from a laminated sheet in which a sheet is laminated on a weak adhesive layer of the weak adhesive film having a base film and a weak adhesive layer formed on one surface of the base film, and includes a sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed facing upward, a blade having a cutting edge portion that is directed toward the base film of the laminated sheet adsorbed and held on the sheet table, a heater that heats the cutting edge portion to a predetermined temperature, and a sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed facing upward, ... and a clamping mechanism that grips a peeling starting point formed on the laminated sheet to peel off the weakly adhesive film from the sheet, and the moving mechanism brings the blade edge portion of the blade, which has been heated to the predetermined temperature, into contact with an outer edge portion of the base film that is a starting position, so that the longitudinal direction of the blade edge portion is perpendicular to the direction of the relative movement, and moves the blade edge portion from the starting position to an end position that is located inside the base film relative to the starting position with the blade edge portion in contact with the base film. In a direction parallel to the holding surface This peeling device slides the micro-adhesive film to form a peeling starting point where the micro-adhesive film is peeled off so that it curls up between the start position and the end position, and the length from the start position to the end position is set so that the length of the laminated sheet in the portion where the cutting edge contacts does not exceed the length of the cutting edge.

[0009] In one embodiment of the present invention, the peeling method is a peeling method performed by a peeling device that peels off a weak adhesive film from a laminated sheet in which a sheet is laminated on a weak adhesive layer of a weak adhesive film having a base film and a weak adhesive layer formed on one surface of the base film, the peeling device comprising a sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed facing upward, a blade having a cutting edge portion that is directed toward the base film of the laminated sheet adsorbed and held on the sheet table, a heater that heats the cutting edge portion to a predetermined temperature, and a front the peeling method includes a moving mechanism that moves the position of the blade relative to the sheet table, and a clamping mechanism that grips a peeling starting point formed on the laminated sheet to peel the weakly adhesive film from the sheet, and the peeling method includes a contacting step in which the peeling device contacts the blade edge portion of the blade, which has been heated to the predetermined temperature, with an outer edge portion of the base film, which is a starting position, so that the longitudinal direction of the blade edge portion is perpendicular to the direction of the relative movement, and a peeling device that, with the blade edge portion in contact with the base film, moves the blade edge portion to an end position that is located inside the base film from the start position. In a direction parallel to the holding surface and a starting point forming step of sliding the slightly adhesive film between the start position and the end position to peel the film so that the film curls up, thereby forming the peeling starting point, wherein in the starting point forming step, the length from the start position to the end position is set so that the length of the laminated sheet in the portion where the cutting edge contacts does not exceed the length of the cutting edge. Effect of the Invention

[0010] According to the present invention, it is possible to provide a peeling device and a peeling method that can stably form a peeling starting point on a substrate film having an adhesive layer. [Brief description of the drawings]

[0011] [Figure 1]FIG. 2A is a partially enlarged schematic plan view showing an example of a laminate sheet handled by a peeling device according to the present invention, and FIG. 2B is a partially enlarged schematic cross-sectional view taken along line AA of the laminate sheet in FIG. [Diagram 2] 1 is a schematic perspective view showing an embodiment of a peeling device according to the present invention. [Diagram 3] 3A is a schematic side view of a blade unit provided in the peeling device of FIG. 2, FIG. 3B is a partially enlarged schematic side view of part B of the blade unit of FIG. 2A, and FIG. 3C is a partially enlarged schematic front view of the blade unit of FIG. 2A as viewed from the arrow C. [Figure 4] 4 is a schematic plan view showing the relationship between the laminated sheet of FIG. 1 and the tip of the blade of FIG. 3. [Diagram 5] 3 is a schematic side view of a clamping mechanism included in the peeling device of FIG. 2. [Figure 6] 2 is a flowchart showing an example of a peeling method according to the present invention. [Figure 7] 4 is a partially enlarged schematic cross-sectional view of the state in which the tip end of the blade unit in FIG. 3 abuts on a start position. FIG. [Figure 8] 8 is a partially enlarged schematic cross-sectional view of the tip portion of FIG. 7 moving toward an end position. [Figure 9] 9 is a partially enlarged schematic cross-sectional view of the state in which the tip portion of FIG. 8 has been moved to an end position. [Figure 10] 10A is a schematic diagram illustrating the principle of formation of the peel starting point in FIG. 9, where (a) is a partially enlarged schematic cross-sectional view of the laminated sheet in a state in which the tip of the blade unit in FIG. 3 has moved a predetermined distance from the start position, and (b) is a partially enlarged schematic cross-sectional view of the laminated sheet in a state in which the tip has moved toward the end position further than (a). [Figure 11] 6 is a schematic diagram showing a state in which the clamp mechanism in FIG. 5 is brought close to the peel start point. FIG. [Figure 12] 12 is a schematic diagram showing a state in which a peeling starting point is gripped by the clamp mechanism of FIG. 11. FIG. [Figure 13] FIG. 1(a) is a schematic side view of the blade used in this example, and FIG. 1(b) is a schematic plan view showing the area where the blade slid against the laminated sheet. [Figure 14] FIG. 13 is a schematic diagram showing evaluation results of peeling start points under various formation conditions. [Figure 15] 1 is an image showing an example of a peeling origin formed by Examples 1 and 24. [Figure 16] 4(a) is a schematic side view showing a first modified example of the blade shape in FIG. 3, (b) is a schematic side view showing a second modified example, and (c) is a schematic side view showing a third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] An embodiment of a peeling apparatus (hereinafter referred to as "the apparatus") according to the present invention and a peeling method (hereinafter referred to as "the method") according to the present invention will be described below. In the following description, the drawings will be referred to as appropriate. In the drawings, the same members and elements are given the same symbols, and duplicated descriptions will be omitted. Furthermore, the dimensional ratios of each element may be exaggerated for the convenience of explanation, and are not limited to the ratios shown in the drawings.

[0013] In the following description and drawings, unless otherwise specified, when three mutually orthogonal axes in space are the X-axis, Y-axis, and Z-axis, the "X-axis direction" is the direction along the X-axis, for example the left-right direction, the "Y-axis direction" is the direction along the Y-axis, for example the front-back direction, and the "Z-axis direction" is the direction along the Z-axis, for example the up-down direction.

[0014] ● Peeling device ● Laminated sheet First, the laminated sheets handled by the present apparatus will be described.

[0015] FIG. 1(a) is a partially enlarged schematic plan view showing an example of a laminate sheet handled by the present apparatus, and (b) is a partially enlarged schematic cross-sectional view taken along line AA of the laminate sheet of (a). This figure shows an edge (corner) of the laminated sheet S in an enlarged manner.

[0016] The "laminate sheet S" is a sheet-like laminate in which a sheet S1 is laminated on one surface of a weak adhesive film S2. In a plan view, the shape of the laminate sheet S is rectangular.

[0017] The "sheet S1" is, for example, a sheet-like laminate to be laminated on the weak adhesive film S2 (the weak adhesive layer S4 described later). In a plan view, the shape of the sheet S1 is rectangular. The sheet S1 is, for example, a ceramic green sheet or an LCP (Liquid Crystal Polymer) sheet used in the manufacture of multilayer ceramic electronic components having a multilayer structure (for example, multilayer ceramic capacitors (MLCCs), chip inductors, low temperature co-fired ceramics (LTCCs), etc.).

[0018] The sheet S1 is formed, for example, by applying (stacking) a slurry in which a powder of a dielectric ceramic, a binder resin, and a solvent are wet-mixed on the slightly adhesive surface side (the slightly adhesive layer S4 side described later) of the slightly adhesive film S2 and drying it. On the sheet S1, a plurality of electrode patterns S1a made of a conductor (for example, copper) are appropriately formed by, for example, screen printing. The electrode patterns S1a are formed in a rectangular region (hereinafter referred to as the "pattern region S1b") on the inside of the outer edge of the sheet S1. On the sheet S1, a rectangular frame-shaped non-pattern region S1c in which the electrode pattern S1a is not formed is arranged on the outer side (outer edge side) of the pattern region S1b. In FIG. 1, the boundary between the pattern region S1b and the non-pattern region S1c is illustrated by a dashed line. In this embodiment, one sheet S1 is stacked on the slightly adhesive film S2.

[0019] In the present invention, a plurality of sheets S1 may be laminated on the weak adhesive film S2. Also, the electrode pattern S1a may not be printed on the sheet S1.

[0020] The "weak adhesive film S2" is a film-like substrate used for protecting and transporting the sheet S1. The weak adhesive film S2 includes a substrate film S3, which is a known carrier film of, for example, polyester, polypropylene, or polyethylene, and a weak adhesive layer S4 formed on one surface S3a of the substrate film S3. For example, a known acrylic weak adhesive having removability is applied to one surface S3a of the substrate film S3, so that a weak adhesive layer S4 made of the acrylic weak adhesive is formed on the same surface S3a. That is, the weak adhesive layer S4 is formed (laminated) on one surface S3a of the substrate film S3. In this embodiment, the substrate film S3 is, for example, a polyester carrier film, and is preferably a carrier film made of polyethylene terephthalate (PET). That is, the substrate film S3 is made of polyester or polyethylene terephthalate.

[0021] ●Composition of peeling device FIG. 2 is a schematic perspective view showing an embodiment of the present device. In the following description of the configuration of the present device 1, reference will be made to FIGS. 1 and 2 as appropriate.

[0022] The present apparatus 1 peels off the weak adhesive film S2 from the sheet S1 of the laminated sheet S. The present apparatus 1 includes a sheet conveying mechanism 2, a unit conveying mechanism 3, a peeling unit 4, and a control device 5. The unit conveying mechanism 3 is an example of the moving mechanism in the present invention.

[0023] The sheet conveying mechanism 2 conveys the laminated sheet S or the sheet S1 from which the low-adhesive film S2 has been peeled off. The sheet conveying mechanism 2 includes a sheet table 21 and a conveying rail 24. The sheet table 21 conveys the laminated sheet S. The sheet table 21 includes a base 22 and a holding plate 23. The base 22 supports the holding plate 23. The base 22 is attached to the conveying rail 24 and is configured to move back and forth along the conveying rail 24. The conveying rail 24 is arranged linearly along the X-axis and guides the movement (reciprocating movement) of the base 22 in the X-axis direction. The operation of the sheet conveying mechanism 2 is controlled by a control device 5.

[0024] The holding plate 23 suction-holds the laminated sheet S. The holding plate 23 is in the form of a plate parallel to the X-axis and Y-axis. The holding plate 23 is made of, for example, silicone-based rubber. The holding plate 23 has a holding surface 23a (surface) that suction-holds the laminated sheet S, and a plurality of suction holes 23b penetrating the holding plate 23 in the Z-axis direction. A known vacuum system composed of a vacuum pump, piping, etc. is connected to the suction holes 23b, and the inside of the suction holes 23b is reduced in pressure, allowing the holding plate 23 to suction-hold the laminated sheet S.

[0025] Here, as the material of the holding plate 23, a material having a low thermal conductivity that suppresses the conduction of heat from the laminated sheet S (particularly the weak adhesive layer S4) to the holding plate 23, which will be described later, is suitable. That is, for example, the thermal conductivity of the holding plate 23 is preferably 1.5 W / (m·K) or less, more preferably 1.0 W / (m·K) or less. In addition, in order to ensure the height of the peeling starting point S5 (see FIG. 5; the same applies below), which will be described later, the material of the holding plate 23 is more suitable to have a low elastic modulus. Specifically, the holding plate 23 is made of glass (e.g., quartz glass, borosilicate glass, soda glass) or rubber (e.g., silicon-based rubber) having heat resistance to a predetermined temperature, which will be described later, and more preferably is made of rubber.

[0026] In the present invention, it is sufficient that the holding surface 23a of the holding plate 23 is made of a material having low thermal conductivity (more preferably, a material that also has a low elastic modulus), and the material of other parts of the holding plate 23 may be different from the material of the holding surface 23a.

[0027] The unit transport mechanism 3 moves the peeling unit 4 in three axial directions (X-axis, Y-axis, and Z-axis). The unit transport mechanism 3 includes a first transport rail 31, a second transport rail 32, a third transport rail 33, a first base 34, a second base 35, and a third base 36. The first transport rail 31 is linearly arranged along the Y-axis and guides the movement (reciprocating movement) of the first base 34 in the Y-axis direction. The second transport rail 32 is linearly arranged along the X-axis and guides the movement (reciprocating movement) of the second base 35 in the X-axis direction. The second transport rail 32 is attached to the first base 34 and is movable together with the first base 34. The third transport rail 33 is linearly arranged along the Z-axis and guides the movement (reciprocating movement) of the third base 36 in the Z-axis direction. The third transport rail 33 is attached to the second base 35 and is movable together with the second base 35. The first base 34 is attached to the first transport rail 31 and configured to reciprocate along the first transport rail 31. The second base 35 is attached to the second transport rail 32 and configured to reciprocate along the second transport rail 32. The third base 36 is attached to the third transport rail 33 and configured to reciprocate along the third transport rail 33. The first base 34, the second base 35, and the third base 36 reciprocate using, for example, a servo motor as a power source. The operation of the unit transport mechanism 3 is controlled by a control device 5.

[0028] In the present invention, the power sources of the first base 34, the second base 35, and the third base 36 are not limited to servo motors.

[0029] The peeling unit 4 forms a peeling starting point S5, which will be described later, and peels the weak adhesive film S2 from the sheet S1 of the laminated sheet S. The peeling unit 4 includes a blade unit 41 and a clamp mechanism .

[0030] The "peeling starting point S5" is an end of the weak adhesive film S2 that is gripped by the clamp mechanism 42 and serves as a starting point for peeling when the weak adhesive film S2 is peeled off from the sheet S1. The position and shape of the peeling starting point S5 will be described in detail later.

[0031] Figure 3(a) is a schematic side view of the blade unit 41, (b) is a partially enlarged schematic side view of part B of the blade unit 41 in (a), and (c) is a partially enlarged schematic front view of the blade unit 41 in (a) as viewed from the arrow C.

[0032] The blade unit 41 forms a peeling starting point S5. The blade unit 41 has a structure similar to that of a known soldering iron, for example. That is, for example, the blade unit 41 includes a case 41a, a heater 41b, and a blade 41c. The case 41a houses and protects the heater 41b. The case 41a is, for example, cylindrical in shape. The heater 41b heats the blade 41c. The heater 41b is, for example, a known ceramic heater. The operation of the heater 41b is controlled by the control device 5. The blade 41c slides on the end of the weakly adhesive film S2 to form a peeling starting point S5 at the end of the weakly adhesive film S2. The blade 41c is, for example, blade-like (a shape similar to a so-called flat chisel). Specifically, the shape of the blade 41c is a flat and tapered pentagonal shape when viewed in the width direction "W" of the blade 41c, and is a rectangle when viewed in the thickness direction "D" of the blade 41c. The shape of the tip (lower end) 41d of the blade 41c is a long and thin semi-cylindrical shape along the width direction "W" of the blade 41c. That is, when viewed from below, the shape of the tip 41d is linear. The thickness direction "D" is perpendicular to the Z axis, inclined by θ1° (30° in this embodiment) with the width direction "W" as its axis. That is, the central axis C1 of the blade 41c (axis passing through the center of the thickness direction "D" and the width direction "W") is inclined by θ1° with respect to the Z axis. The tip 41d is an example of a cutting edge in the present invention.

[0033] 4 is a schematic plan view showing the relationship between the laminated sheet S and the tip 41d of the blade 41c. For ease of explanation, the tip 41d is shown by a thick two-dot chain line, a start position Ps and an end position Pf, which will be described later, are shown by black circles, and the non-patterned region S1c is shown in gray.

[0034] When viewed from above, the width direction "W" is along the direction of the Y axis rotated 45° clockwise around the Z axis. In the width direction "W", the length (width) "Lb" of the tip 41d is set to be greater than or equal to the length "Ls" of the laminated sheet S at the start position Ps and the length "Lf" of the laminated sheet S at the end position Pf. The length "Lb" of the tip 41d in the width direction "W" is an example of the length of the cutting edge in the present invention. The width direction "W" is an example of the longitudinal direction of the cutting edge in the present invention.

[0035] FIG. 5 is a schematic side view of the clamp mechanism 42. As shown in FIG. For ease of explanation, the figure also shows cross sections of the holding plate 23, the laminated sheet S, and the peeling start point S5.

[0036] The clamp mechanism 42, while gripping the peeling starting point S5, moves relative to the sheet table 21 to peel off the weakly adhesive film S2 from the sheet S1. The clamp mechanism 42 includes a raising member 42a, a clamp member 42b, and a slider 42c. The raising member 42a is a claw-shaped member that raises the peeling starting point S5 upward immediately before gripping it. The clamp member 42b is a claw-shaped member that grips the peeling starting point S5 together with the raising member 42a. The raising member 42a and the clamp member 42b are arranged to face each other in a direction rotated 45° around the Z axis (direction perpendicular to the width direction "W") with respect to the X axis and the Y axis. The slider 42c is a known air cylinder that reciprocates the clamp member 42b in a direction in which the clamp member 42b approaches and moves away from the raising member 42a. The operation of the slider 42c is controlled by the control device 5. The configuration of the clamp mechanism 42 is the same as that of a known clamp mechanism, and therefore a detailed description thereof will be omitted.

[0037] The control device 5 controls the overall operation of the device 1. The control device 5 is, for example, a personal computer. The control device 5 includes, for example, a processor such as a CPU (Central Processing Unit), a volatile memory such as a RAM (Random Access Memory) that functions as a working area for the CPU, and a non-volatile memory such as a ROM (Read Only Memory) that stores an operating program and the like.

[0038] In the present invention, the control device 5 is only required to be capable of controlling the operations of the sheet transport mechanism 2, the unit transport mechanism 3, and the peeling unit 4, and is not limited to a personal computer.

[0039] ● Operation of the peeling device The operation of the device 1, i.e. the method, will now be described.

[0040] FIG. 6 is a flow chart illustrating an example of the method. In the following description of the present method, FIGS. 1 to 6 will be referred to as appropriate.

[0041] First, the control device 5 controls the operation of the sheet conveying mechanism 2 to move the sheet table 21 on which the laminated sheet S is adsorbed and held to a predetermined peeling position (ST1). The laminated sheet S is placed on the adsorption plate 23 so that each side is aligned with the X-axis or Y-axis. The laminated sheet S is adsorbed and held on the holding plate 23 of the sheet table 21 with the sheet S1 facing downward and the weak adhesive film S2 (base film S3) facing upward. That is, when the laminated sheet S is conveyed, the front surface of the sheet S1 is the held surface adsorbed to the holding plate 23, and the back surface of the weak adhesive film S2 (base film S3) is the exposed surface exposed upward. At this time, the front surface of the laminated sheet S (base film S3) is parallel to the horizontal plane.

[0042] Next, the control device 5 controls the operation of the heater 41b to heat the tip 41d of the blade 41c to a predetermined temperature (ST2).

[0043] The "predetermined temperature" is set to a temperature that can affect the shrinkage of the base film S3 and / or the adhesion of the weak adhesive layer S4 (can reduce adhesion). The predetermined temperature is mainly determined by the melting point of the base film S3, the physical properties (thermal conductivity) of the sheet S1, and the thermal properties of the weak adhesive layer S4. That is, for example, when the base film S3 is made of polyethylene terephthalate, its melting point is about 264°C, and the maximum temperature of the predetermined temperature is set to less than 260°C. Also, the higher the thermal conductivity of the sheet S1, the more heat from the tip 41d is transferred to the holding plate 23 side via the sheet S1 and does not remain in the weak adhesive layer S4, so the predetermined temperature becomes higher. On the other hand, the lower the thermal conductivity, the more likely the heat from the tip 41d is to remain in the weak adhesive layer S4, so the predetermined temperature becomes lower. As an example, when sheet S1 is an LTCC sheet (thermal conductivity: 2.6 W / (m·K)), the predetermined temperature is approximately 220°C or higher and 250°C or lower, and when sheet S1 is an LPC sheet (thermal conductivity: 0.38 W / (m·K)), the predetermined temperature is approximately 170°C or higher and approximately 220°C or lower.

[0044] Next, the control device 5 controls the operation of the unit conveying mechanism 3 to move the blade 41c so that the tip 41d of the blade 41c is positioned directly above the start position Ps (ST3). In other words, the unit conveying mechanism 3 moves the position of the blade 41c relative to the sheet table 21. At this time, the tip 41d is directed toward the laminated sheet S (base film S3).

[0045] The "start position Ps" is the position (portion) where the tip 41d first comes into contact with the laminated sheet S (base film S3) when the peel start point S5 is formed by this method. The start position Ps is set on the outer edge of the laminated sheet S. As shown in FIG. 4, in this embodiment, the start position Ps is set on a corner of the laminated sheet S (base film S3).

[0046] Next, the control device 5 controls the operation of the unit conveying mechanism 3 to move the tip 41d of the blade 41c to the start position Ps of the laminated sheet S (base film S3) and bring it into contact with the start position Ps (ST4: contact step). At this time, the tip 41d is pressed against the laminated sheet S in a state inclined with respect to the laminated sheet S (base film S3) so that a predetermined load is applied to the laminated sheet S from the tip 41d. Also, as shown in FIG. 4, the width direction "W" of the tip 41d is arranged so as to be perpendicular to the imaginary line C2 passing through the positions inclined by θ2° and θ3° (both 45° in this embodiment) from each of the two sides forming the corner portion, which is the start position Ps, toward the inside of the laminated sheet S. That is, for example, when the laminated sheet S is square-shaped, the width direction "W" is arranged so as to be perpendicular to the diagonal line between the two sides forming the corner portion, which is the start position Ps. Furthermore, in the width direction "W" of the tip 41d, the center of the tip 41d is in contact with the start position Ps. Furthermore, because the tip 41d is heated to a predetermined temperature, the heat from the tip 41d is transferred from the portion in contact with the tip 41d to the laminated sheet S (mainly the base film S3 and the weak adhesive layer S4). As a result, as described later, it is presumed that the adhesiveness of the weak adhesive layer S4 located directly below the tip 41d is reduced.

[0047] FIG. 7 is a partially enlarged schematic cross-sectional view of the state in which the tip portion 41d abuts against the start position Ps. This figure shows a cross section of the laminated sheet S and the holding plate 23 taken along line EE in Figure 4. This figure also shows the blade 41c in a non-cross section.

[0048] The "predetermined load" is a shear stress "P ss" and frictional force is generated. The lower limit of the predetermined load is set to a value that allows the laminated sheet S (sheet S1 and the slightly adhesive film S2) located directly under the tip 41d to be elastically deformed, and is preferably set within a range in which the surface portion of the holding plate 23 located directly under the tip 41d is elastically deformed. On the other hand, the upper limit of the predetermined load is set within a range in which the laminated sheet S is not plastically deformed (is elastically deformable). Specifically, the predetermined load is preferably set to about 0.29N (30gf) to about 1.96N (200gf), preferably about 0.39N (40gf) to about 1.57N (160gf), and more preferably about 0.49N (50gf) to about 1.47N (150gf).

[0049] Next, the control device 5 controls the operation of the unit conveying mechanism 3 to slide the leading end 41d to the end position Pf while the leading end 41d is in contact with the laminated sheet S (base film S3) (ST5: starting point formation step). In other words, the unit conveying mechanism 3 moves the position of the leading end 41d relative to the laminated sheet S. The relative movement direction of the leading end 41d at this time is a direction perpendicular to the width direction "W" of the leading end 41d and the up-down direction (direction parallel to the virtual line C2). That is, the width direction "W" is perpendicular to the relative movement direction of the leading end 41d. While the leading end 41d moves from the start position Ps to the end position Pf, both ends 41e, 41f of the leading end 41d in the width direction "W" of the leading end 41d are not disposed on the laminated sheet S (base film S3) (both ends 41e, 41f are disposed outside the laminated sheet S when viewed from above). That is, while the tip portion 41d moves from the starting position Ps to the ending position Pf, the tip portion 41d abuts against the laminated sheet S (base film S3) so as to cross the laminated sheet S (base film S3) in a line (both ends 41e, 41f are not abutting against the laminated sheet S).

[0050] The "end position Pf" is the position (portion) where the tip 41d finally comes into contact with the laminated sheet S (base film S3) when the peeling start point S5 is formed by this method. The end position Pf is set to a position inside the laminated sheet S (the center side of the laminated sheet S in a plan view) from the start position Ps and away from each of the two sides forming the corner portion at the start position Ps. In this embodiment, the end position Pf is set on a virtual line C3 that connects points equidistant from the corner portion at each of the two sides forming the corner portion at the start position Ps. Here, the length "Lsf" from the start position Ps to the end position Pf is set so that the length of the laminated sheet S at the part where the tip 41d comes into contact does not exceed the length "Lb" of the tip 41d in the width direction "W" of the tip 41d. In addition, the same length "Lsf" is set to a length that allows the peeling start point S5 to be formed with a length (height) that can be gripped by the clamp mechanism 42.

[0051] Fig. 8 is a partially enlarged schematic cross-sectional view of the state in which the tip portion 41d in the state of Fig. 7 is moving toward the end position Pf. The figure shows a cross section of the laminated sheet S and the holding plate 23 taken along the line EE in Fig. 4. The figure also shows the blade 41c in a non-cross-sectional view. Fig. 9 is a partially enlarged schematic cross-sectional view of the state in which the tip portion 41d in the state of Fig. 8 has moved to the end position Pf. The figure shows a cross section of the laminated sheet S and the holding plate 23 taken along the line EE in Fig. 4. The figure also shows the blade 41c in a non-cross-sectional view.

[0052] While the tip 41d slides from the start position Ps to the end position Pf, the tip 41d is in contact with the laminated sheet S (base film S3), and a predetermined load is applied to the laminated sheet S from the tip 41d. At this time, the weak adhesive film S2 in the area where the tip 41d has passed is peeled off from the sheet S1 so as to curl upward from the start position Ps side in response to the movement of the tip 41d. Then, when the tip 41d moves to the end position Pf, the weak adhesive film S2 in the area where the tip 41d has passed forms a peeling starting point S5 where the weak adhesive film S2 is peeled off from the sheet S1 so as to curl upward.

[0053] FIG. 10 is a schematic diagram for explaining the principle of forming the peeling starting point S5, in which (a) is a partially enlarged schematic cross-sectional view of the laminated sheet S in a state where the tip portion 41d has moved slightly from the starting position Ps, and (b) is a partially enlarged schematic cross-sectional view of the laminated sheet S in a state where the tip portion 41d has moved further toward the end position Pf than (a). In this figure, the size of the black arrow indicates the magnitude of the shrinkage amount described later, and each stress "P z1 ,P ss ,P xy ,P z2 " is indicated by an arrow.

[0054] When the tip 41d comes into contact with the laminated sheet S, the heat from the tip 41d is conducted concentrically through the base film S3. At this time, the base film S3 slightly shrinks due to the heat from the tip 41d. Here, microscopically, the temperature inside the base film S3 becomes higher the closer it is to the tip 41d. Therefore, microscopically, the amount of shrinkage of the base film S3 due to heat becomes smaller from the tip 41d side toward the weak adhesive layer S4 side. That is, in the thickness direction (Z-axis direction) of the base film S3, there is a difference in the amount of shrinkage of the base film S3 between the front side and the back side of the base film S3. As a result, microscopically, a stress "P" that warps upward is generated in the base film S3 on the side of the start position Ps from the tip 41d. z1 " is presumed to be occurring.

[0055] Furthermore, in the traveling direction of the tip 41d, the length of the base film S3 is the same as the length of the sheet S1. Therefore, when the laminated sheet S is pressed from above by the tip 41d, the laminated sheet S is elastically deformed so as to become convex downward. At this time, on the side of the laminated sheet S closer to the start position Ps than the tip 41d, a stress is generated in the sheet S1 toward the tip 41d side relative to the base film S3, and a stress is generated in the base film S3 toward the start position Ps side relative to the sheet S1. As a result, a shear stress "P ss " is occurring.

[0056] Furthermore, since the tip portion 41d slides toward the end position Pf while being pressed against the laminate sheet S (base film S3) with a predetermined load, a frictional force is generated between the tip portion 41d and the surface of the base film S3, and a stress "P xy At this time, microscopically, the same stress "P xy " and an upward stress "P z2 " is presumed to be occurring.

[0057] Meanwhile, heat from the tip 41d is also conducted to the weak adhesive layer S4. As mentioned above, the lower the thermal conductivity of the sheet S1, the more heat conducted to the weak adhesive layer S4 remains within the weak adhesive layer S4. At this time, it is presumed that some of the molecules constituting the weak adhesive layer S4 are cut by the heat, and the adhesiveness of the weak adhesive layer S4 decreases. As a result, the weak adhesive layer S4 is resistant to the aforementioned stresses "Ps" on the side of the start position Ps from the tip 41d. z1 ,P ss ,P z2 " peels off from the sheet S1, and the weakly adhesive film S2 peels off from the sheet S1. As the tip 41d moves toward the end position Pf, this peeled portion is cooled in sequence from the start position Ps side, and solidifies in a state of being curled upward. In this way, a peeling starting point S5 that is shaped to be curled upward from the sheet S1 is formed.

[0058] Next, the control device 5 controls the operation of the unit transport mechanism 3 to move the blade unit 41 away from above the laminated sheet S and move the clamp mechanism 42 to the clamp position (ST6). At this time, the lower end of the raising member 42a is positioned in the gap between the sheet S1 and the peeling start point S5.

[0059] Fig. 11 is a partially enlarged schematic diagram showing a state in which the clamp mechanism 42 is brought close to the peeling start point S5. The figure shows a cross section of the laminated sheet S and the holding plate 23 taken along line EE in Fig. 4. The figure shows the clamp mechanism 42 in a non-cross section.

[0060] Next, the control device 5 controls the operation of the unit transport mechanism 3 and the clamp mechanism 42 to cause the clamp mechanism 42 to grip the peel starting point S5 (ST7). Specifically, the control device 5 controls the operation of the unit transport mechanism 3 to hook the tip of the raising member 42a onto the back surface of the peel starting point S5 to raise the peel starting point S5. Next, the control device 5 controls the operation of the slider 42c to move the clamp member 42b toward the raising member 42a to cause the raising member 42a and the clamp member 42b to grip the peel starting point S5.

[0061] In the present invention, the control device 5 may bring the clamp member 42b into contact with the rear surface of the peel starting point S5 multiple times before gripping the peel starting point S5, thereby raising the peel starting point S5 and enlarging the peel starting point S5.

[0062] In the present invention, the peel starting point S5 is warped upward due to the contraction of the base film S3 caused by heat. That is, the tip of the peel starting point S5 faces upward even without being raised. Therefore, the operation of raising the peel starting point S5 does not need to be performed.

[0063] Fig. 12 is a partially enlarged schematic diagram showing a state in which the peel starting point S5 is gripped by the clamp mechanism 42. The figure shows a cross section of the laminated sheet S and the holding plate 23 taken along line EE in Fig. 4. The figure shows the clamp mechanism 42 in a non-cross-sectional view.

[0064] Next, the control device 5 controls the operation of the unit transport mechanism 3 to peel off the weak adhesive film S2 from the sheet S1 (ST8). At this time, the control device 5, for example, moves the clamp mechanism 42 horizontally in the same direction as the traveling direction of the blade 41c.

[0065] In this manner, in the present device 1, the adhesiveness of the weak adhesive layer S4 is reduced by heat, and the blade 41c is used to apply the various stresses "S z1 ,S ss ,S z2" occurs, and thus a peeling starting point S5 is formed when the weak adhesive film S2 having the weak adhesive layer S4 is peeled off.

[0066] In this method, the leading end 41d may be heated before the laminated sheet S is transported, or may be heated at all times while the apparatus 1 is in operation.

[0067] Example: Next, the evaluation results when the formation conditions of the peeling starting point S5 are changed will be described below as examples of the present invention. In the following description, Figures 1 to 4 will be referred to as appropriate. In the following description, elements having functions common to the embodiment described above are given the same names and symbols for convenience of explanation.

[0068] FIG. 13(a) is a schematic side view of the blade 41c used in this example, and (b) is a schematic plan view showing the area where the blade 41c slides against the laminated sheet S. FIG. 14 is a schematic diagram showing the evaluation results of the peeling starting point S5 under each formation condition. In FIG. 14, the formation conditions of "Example 1" are used as a reference, and the formation conditions that have been changed from Example 1 in each example are shown in bold.

[0069] (Laminated sheet) In each example, "Film masking tape No. 605: #50: 55 μm thick, manufactured by Teraoka Seisakusho Co., Ltd." is used as the weak adhesive film S2. The weak adhesive film S2 includes a polyester base film S3 and an acrylic weak adhesive layer S4 (adhesive strength: 0.17 (N / 25 mm)) formed on one side S3a of the base film S3. In addition, as the laminated sheet S, an LCP sheet (62 μm thick) is laminated on one side of the weak adhesive film S2, and an LTCC sheet (145 μm thick) is laminated on one side of the weak adhesive film S2.

[0070] (blade) In each embodiment, a commercially available soldering iron unit is used as the blade 41c and the heater 41b. As shown in FIG. 13(a), the blade 41c is V-shaped with two unequal inclined surfaces in the thickness direction "D" of the blade 41c. The thickness of the blade 41c is "2 mm" and the width is "10.2 mm". The tip 41d of the blade 41c is semi-cylindrical with a radius of "0.5 mm".

[0071] (Evaluation environment) Three types of plate materials, a rubber plate (silicon-based rubber, hardness: 80°, thermal conductivity: 0.2 W / (m K)), a glass plate (soda glass), and a metal plate (SUS304), are used as the holding plate 23. During the evaluation, the laminated sheet S is placed on the plate material, which is then placed on the top plate of a commercially available electronic balance, and the formation of the peeling starting point S5 is performed on the electronic balance.

[0072] (Formation conditions) In each embodiment, the forming conditions that are variables are temperature (°C), movement direction, load (N), angle (°) of the central axis C1 of the blade 41c relative to the horizontal plane (laminated sheet S), movement speed (mm / sec) of the blade 41c, material of the holding plate 23, and type of sheet S1. The temperature of the tip 41d is the temperature displayed on the soldering iron unit. As shown in FIG. 13(b), a corner of the laminated sheet S is set as the start position Ps, and a virtual line C3 that connects points that are "5 mm" away from the corner on two sides that sandwich the corner is set as the end position Pf. The movement direction of the blade 41c is two directions from the start position Ps to the end position Pf (forward direction) and from the end position Pf to the start position Ps (reverse direction), and is along a direction of 45° from each of the two sides that sandwich the corner that is the start position Ps. The load is measured by an electronic balance. The load is adjusted to an average value of 0.49N (50gf) or 1.47N (150gf).

[0073] (Examples 1 to 6) In Examples 1 to 6, the temperature of the tip 41d is set to six types, 160°C, 170°C, 180°C, 200°C, 220°C, and 230°C. The conditions other than the temperature are: moving direction: forward, load: 0.49N (50gf), angle of the blade 41c: 45°, moving speed: 3.5mm / sec, material of the holding plate 23: rubber, and sheet S1: LCP sheet. At a temperature of 160°C, the probability of forming the peeling starting point S5 was 50%. At a temperature of 230°C, some melting (wrinkles) was observed in the base film S3. Within the temperature range of 170°C to 220°C, the probability of forming the peeling starting point S5 was 100%. Therefore, in other examples for the LCP sheet, the temperature is set to 200°C, which is approximately the intermediate value.

[0074] (Examples 1, 7 to 9) In Examples 1, 7 to 9, the moving speed of the tip 41d was set to four speeds: 7.1 mm / sec, 3.5 mm / sec, 1.8 mm / sec, and 1.2 mm / sec. In all Examples, the probability of forming the peeling starting point S5 was 100%, and no difference due to the moving speed was found. Since the start position Ps was set on a corner of the laminated sheet S (i.e., the area of ​​the start position Ps was extremely small), it is presumed that sufficient heat was conducted to the weakly adhesive layer S4 at the start position Ps when the tip 41d was located at the start position Ps.

[0075] (Examples 1, 10 to 13) In Examples 1, 10 to 13, the angle of the central axis C1 of the blade 41c relative to the horizontal plane (laminated sheet S) is set to five different angles: 30°, 45°, 90°, 120°, and 135°. When the angle of the blade 41c is an acute angle, the blade 41c is inclined toward the end position Pf, and when the angle is an obtuse angle, the blade 41c is inclined toward the start position Ps. In all Examples, the probability of the formation of the peeling starting point S5 was 100%, and no difference due to the angle was found. However, when the angle was 90°, the height of the peeling starting point S5 tended to be high, but the sheet S1 after the formation of the peeling starting point S5 was slightly warped. Therefore, it is preferable that the central axis C1 of the blade 41c is inclined relative to the horizontal plane (laminated sheet S).

[0076] (Examples 1, 14 to 16) In Examples 1, 14 to 16, the moving speed of the tip 41d and the angle of the central axis C1 of the blade 41c relative to the horizontal plane were set within the above-mentioned ranges. In all of the Examples, the probability of the formation of the peeling starting point S5 was 100%.

[0077] (Examples 9 and 17) In Examples 9 and 17, the load is set to two types, 0.49 N (50 gf) and 1.47 N (150 gf). In both Examples, the probability of the formation of the peeling start point S5 was 100%. When the load was 1.47 N, some warping was observed in the sheet S1 as well as the peeling start point S5. Therefore, in this Example, for these two loads, 0.49 N is preferable. However, with the original holding plate 23, it is presumed that this degree of warping would not occur because the sheet S1 is adsorbed by the suction holes 23b. In other words, it is presumed that, as long as the sheet S1 does not deform beyond the suction force of the suction holes 23b, the peeling start point S5 can be formed without warping of the sheet S1 even if the load exceeds 1.47 N (150 gf). Also, as described above, since the soldering iron is operated manually, the load fluctuates somewhat, and it is possible to form the peeling start point S5 without warping of the sheet S1. z1 ,S ss ,S z2 " occurs, it is estimated that the peeling origin S5 can be formed even with a load of less than 0.49 N.

[0078] (Examples 1, 18, and 19) In Examples 1, 18, and 19, the material of the holding plate 23 was set to three types: rubber, glass, and metal (SUS304). When the material was glass, the probability of the formation of the peeling start point S5 was 100%, but the height of the peeling start point S5 was lower than when the material was rubber. This is presumably due to the presence or absence of elastic deformation of the holding surface 23a. In other words, compared to when the material was rubber, the holding surface 23a did not deform due to the load, and the above-mentioned stress "S z2It is presumed that the peeling origin S5 was smaller. However, the peeling origin S5 was formed, and the formation of the peeling origin S5 is possible even when the material is glass. From this result, it can be presumed that when the material is rubber, the holding surface 23a is elastically deformed even when the load is 0.49 N (50 gf). On the other hand, when the material is metal, the peeling origin S5 was not formed. It is presumed that the heat required to reduce the adhesiveness of the weakly adhesive layer S4 did not remain in the weakly adhesive layer S4 because the thermal conductivity of metal (SuS304: approximately 16 W / (m·K)) is sufficiently greater than that of rubber and glass. It is presumed that the peeling origin S5 can be formed if the temperature is close to the melting point of the base film S3.

[0079] (Examples 1, 20 to 22) In Examples 1, 20 to 22, the direction of movement of the tip portion 41d was set to two types, the forward direction and the reverse direction. When the direction of movement was the reverse direction, the peeling starting point S5 was not formed. This is because of the above-mentioned stress "S z1 ,S ss ,S z2 Even if " " occurs, the adhesiveness of the weak adhesive layer S4 on the start position Ps side does not decrease, so it is presumed that the weak adhesive film S2 is not peeled off from the sheet S1.

[0080] (Examples 23 to 26) In Examples 23 to 26, an LTCC sheet was used for the sheet S1, and the temperature was set to four types: 200°C, 220°C, 230°C, and 250°C. When the sheet S1 was an LTCC sheet and the temperature was 200°C, the peeling starting point S5 was not formed. This is presumably because the thermal conductivity of the LTCC sheet (about 2.6 W / (m·K)) was higher than the thermal conductivity of the LCP sheet (about 0.38 W / (m·K)), and the heat required to reduce the adhesiveness of the weak adhesive layer S4 did not remain in the weak adhesive layer S4. In other words, it is presumed that the heat was quickly conducted to the LTCC sheet, and the adhesiveness did not decrease to a degree that would allow the peeling starting point S5 to occur. On the other hand, in the LTCC sheet, even at a high temperature of 250°C, the base film S3 did not melt, and a good peeling starting point S5 was formed. This is presumably because the thermal conductivity of the LTCC sheet is higher than that of the LCP sheet, so that the excess heat did not remain in the base film S3 (the excess heat was conducted to the LTCC sheet).

[0081] Example 27 In Example 27, a tip portion 41d having a short length (5.2 mm) in the width direction "W" is used. In the width direction "W", the length of the tip portion 41d is shorter than the length (about 7 mm) of the laminated sheet S at the end position Pf. Therefore, when the tip portion 41d is located at the end position Pf, the tip portion 41d does not protrude outside from the two sides forming the corner portion which is the start position Ps. Therefore, in Example 27, although a small peeling start point S5 was formed, a peeling start point S5 of a practical size (i.e., a size that can be held by the clamp mechanism 42) was not formed. This is presumably because, in the region from the start position Ps to the end position Pf, there is a region on the end position Pf side where the tip portion 41d does not abut, and therefore the heat required to reduce the adhesiveness of the weak adhesive layer S4 is not obtained. Thus, in Example 27, the size of the formed peeling start point S5 is not practical, so the formation probability of the peeling start point S5 is expressed as 0%.

[0082] FIG. 15 is an image showing an example of a peeling origin S5 formed in accordance with Examples 1 and 24. The left side of the figure shows an example of peeling initiation points S5 formed by Example 1, and the right side shows an example of peeling initiation points S5 formed by Example 24. Peeling initiation points S5 (circled areas) are formed in both the LCP sheet and the LTCC sheet.

[0083] Summary According to the embodiment described above, the device 1 includes the sheet table 21, the blade 41c, the heater 41b, the sheet conveying mechanism 2, the unit conveying mechanism 3, and the clamping mechanism 42. The sheet table 21 includes a holding surface 23a that adsorbs and holds the laminated sheet S so that the weak adhesive film S2 (base film S3) is exposed upward. The blade 41c includes a tip 41d that faces the base film S3 of the laminated sheet S adsorbed and held on the sheet table 21. The heater 41b heats the tip 41d to a predetermined temperature. The unit conveying mechanism 3 moves the position of the blade 41c (tip 41d) relative to the sheet table 21. The clamping mechanism 42 grips the peeling starting point S5 formed on the laminated sheet S to peel off the weak adhesive film S2 from the sheet S1. The unit conveying mechanism 3 brings the leading end 41d heated to a predetermined temperature into contact with the start position Ps so that the width direction "W" of the leading end 41d is perpendicular to the direction of the relative movement of the leading end 41d. Next, the unit conveying mechanism 3 slides the leading end 41d from the start position Ps to the end position Pf while the leading end 41d is in contact with the laminated sheet S (base film S3), thereby forming a peeling starting point S5 between the start position Ps and the end position Pf. The length "Lsf" from the start position Ps to the end position Pf is set so that the length of the laminated sheet S at the part where the leading end 41d is in contact does not exceed the length of the leading end 41d. According to this configuration, the present device 1 can stably and easily form the peeling starting point S5 by a simple operation of sliding the heated leading end 41d on the base film S3 from the start position Ps to the end position Pf.

[0084] According to the embodiment described above, the base film S3 is made of polyester or polyethylene terephthalate. The weak adhesive layer S4 is an acrylic adhesive. The holding surface 23a is made of a low heat conductive material. The predetermined temperature is 170°C or higher and 250°C or lower. According to this configuration, the device 1 can stably form the peeling starting point S5 by reducing the adhesiveness of the weak adhesive layer S4 without melting the base film S3.

[0085] Furthermore, according to the embodiment described above, when the sheet S1 is an LCP sheet, the predetermined temperature is 170° C. or more and 220° C. or less. When the sheet S1 is an LTCC sheet, the predetermined temperature is 220° C. or more and 250° C. or less. With this configuration, the apparatus 1 can stably form the peeling starting points S5 in the laminated sheet S in which LCP sheets or LTCC sheets are laminated.

[0086] Furthermore, according to the embodiment described above, the holding surface 23a is made of glass or rubber. With this configuration, the heat required to reduce the adhesiveness of the weakly adhesive layer S4 is likely to remain in the weakly adhesive layer S4. Furthermore, when the holding surface 23a is made of rubber, the laminated sheet S and the holding surface 23a are elastically deformed by the load from the tip portion 41d, so that a shear stress "P ss As a result, the present device 1 can stably form the peeling starting point S5.

[0087] Furthermore, according to the embodiment described above, when the tip portion 41d is in contact with the laminated sheet S (base film S3), the tip portion 41d is pressed against the laminated sheet S so that a predetermined load is applied to the laminated sheet S from the tip portion 41d. The predetermined load is set within a range in which the laminated sheet S can be elastically deformed. According to this configuration, a shear stress "P ss In addition, a stress "P xy " occurs inside the base film S3, and a stress "P z2As a result, the present device 1 can stably form the peeling starting point S5.

[0088] Furthermore, according to the embodiment described above, when the holding surface 23a is made of rubber, the predetermined load is set within a range in which the laminated sheet S and the holding surface 23a can be elastically deformed. According to this, a larger shear stress "P ss As a result, the height of the peeling starting point S5 increases.

[0089] Furthermore, according to the embodiment described above, the central axis of the blade 41c is inclined with respect to the laminated sheet S. With this configuration, no wrinkles are formed in the sheet S1 at the portion where the peel start points S5 are formed.

[0090] Furthermore, according to the embodiment described above, the shape of the laminated sheet S is rectangular in plan view. The start position Ps is a corner of the laminated sheet S, and the end position Pf is a position away from each of the two end sides forming the same corner among the four end sides of the laminated sheet S toward the inside of the laminated sheet S. According to this configuration, the tip portion 41d moves in the forward direction rather than the reverse direction. As a result, the present device 1 can stably and easily form the peeling start point S5.

[0091] Other embodiments In the present invention, the shape of the laminate sheet S is not limited to a rectangular shape in a plan view. That is, for example, the shape of the laminate sheet S may be a circle, a polygon, or a strip in a plan view.

[0092] In the present invention, the material of the weakly adhesive layer S4 may be any material that is a weakly adhesive type having removability and whose adhesiveness decreases when heated at 170° C. to 250° C., and is not limited to acrylic adhesives.

[0093] Furthermore, in the present invention, when the weak adhesive film S2 is peeled off from the sheet S1, the sheet conveying mechanism 2 may move the sheet table 21 so as to move the position of the blade 41c relative to the sheet table 21. In this case, the sheet conveying mechanism 2 functions as the moving mechanism in the present invention.

[0094] Furthermore, in the present invention, the shape of the tip portion 41d in a side view is not limited to a semi-cylindrical shape. That is, for example, the shape of the tip portion 41d may be sharp as long as it does not cut the slightly adhesive film S2.

[0095] Furthermore, in the present invention, the width direction "W" of the tip portion 41d does not have to be arranged so as to be perpendicular to the virtual line C2. That is, for example, in a plan view, the width direction "W" may be arranged so as to be slightly inclined and intersect with the virtual line C2. In this case, the moving direction of the tip portion 41d is a direction perpendicular to the width direction "W" and the up-down direction. Also, in a top view, while the tip portion 41d moves from the start position Ps to the end position Pf, both ends 41e, 41f are arranged outside the laminated sheet S.

[0096] Furthermore, this method is also capable of forming peel starting points S5 when performed on a conventional base film that does not have a weak adhesive layer S4.

[0097] Furthermore, in the present invention, the shape of the blade 41c is not limited to the embodiment described above.

[0098] Figure 16(a) is a schematic side view showing a first modified example of the shape of blade 41c, (b) is a schematic side view showing a second modified example, and (c) is a schematic side view showing a third modified example.

[0099] When viewed in the width direction "W" of blade 41c, the shape of blade 41c may be (a) an isosceles triangle with the apex angle facing downward, (b) a right-angled triangle with the hypotenuse facing away from the traveling direction of blade 41c, or (c) a right-angled triangle with the hypotenuse facing in the traveling direction of blade 41c.

[0100] ●Embodiments of the present invention● Next, the embodiments of the present invention that can be understood from the above-described embodiments will be described below, using the terms and symbols described in the respective embodiments.

[0101] A first embodiment of the present invention is a laminated sheet (for example, laminated sheet S) in which a sheet (for example, sheet S1) is laminated on a weak adhesive layer of a weak adhesive film (for example, a base film S3) having a base film and a weak adhesive layer (for example, a weak adhesive layer S4) formed on one side (for example, one side S3a) of the base film. The first embodiment of the present invention is a peeling device (for example, peeling device 1) that peels off the weak adhesive film from the sheet, and the weak adhesive film is peeled off from the sheet. The weak adhesive film is exposed upward from the base film of the weak adhesive film. The weak adhesive film is a sheet table (for example, sheet table 21) having a holding surface (for example, holding surface 23a) that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed upward, a blade (for example, blade 41c) having a cutting edge portion (for example, tip portion 41d) that is directed to the base film of the laminated sheet adsorbed and held on the sheet table, a heater (for example, heater 41b) that heats the cutting edge portion to a predetermined temperature, and a moving mechanism (for example, unit conveying mechanism) that moves the position of the blade relative to the sheet table. 3), and a clamp mechanism (e.g., clamp mechanism 42) that grips a peeling starting point (e.g., peeling starting point S5) formed on the laminated sheet to peel off the weakly adhesive film from the sheet, and the moving mechanism brings the blade tip portion of the blade, which has been heated to the predetermined temperature, into contact with the outer edge portion of the base film, which is a start position (e.g., start position Ps), so that the longitudinal direction (e.g., width direction "W") of the blade tip portion is perpendicular to the direction of the relative movement, and the blade tip portion is moved to the outer edge portion of the base film, which is a start position (e.g., start position Ps). a peeling device in which the blade tip is slid from the start position to an end position (e.g., end position Pf) that is located inside the base film from the start position while in contact with the film, thereby forming the peeling starting point where the weak adhesive film is peeled off so that it warps up between the start position and the end position, and the length from the start position to the end position (e.g., length "Lsf") is set so that the length of the laminated sheet in the portion where the blade tip is in contact does not exceed the length of the blade tip. According to this configuration, the present device can stably and easily form a peel start point by a simple operation of sliding the heated tip over the base film from the start position to the end position.

[0102] A second embodiment of the present invention is a peeling device according to the first embodiment, wherein the base film is made of polyester or polyethylene terephthalate, the weak adhesive layer is an acrylic adhesive, the holding surface is made of a low thermal conductive material, and the predetermined temperature is 170°C or higher and 250°C or lower. According to this configuration, the present device can reduce the adhesiveness of the weakly adhesive layer without melting the base film, and can stably form the peeling starting point.

[0103] A third embodiment of the present invention is the peeling apparatus of the second embodiment, wherein the sheet is an LCP sheet or an LTCC sheet, and when the sheet is the LCP sheet, the predetermined temperature is 170°C or more and 220°C or less, and when the sheet is the LTCC sheet, the predetermined temperature is 220°C or more and 250°C or less. According to this configuration, the device can stably form peeling start points in a laminated sheet in which LCP sheets or LTCC sheets are laminated.

[0104] A fourth embodiment of the present invention is the peeling device according to the second embodiment, wherein the holding surface is made of glass or rubber. According to this configuration, the present device can stably form the peeling starting point.

[0105] A fifth embodiment of the present invention is a peeling device according to the first embodiment, wherein, when the cutting edge portion is in contact with the base film, the cutting edge portion is pressed against the base film so that a predetermined load is applied from the cutting edge portion to the base film, and the predetermined load is set within a range in which the laminated sheet can elastically deform. According to this configuration, the present device can stably form the peeling starting point.

[0106] A sixth embodiment of the present invention is a peeling device in which, in the fifth embodiment, the specified load is set within a range in which the laminated sheet and the holding surface can elastically deform when the holding surface is made of rubber. According to this configuration, the height of the peeling starting point is increased.

[0107] A seventh embodiment of the present invention is the peeling device according to the fifth embodiment, wherein the blade is inclined with respect to the base film. According to this configuration, no wrinkles are formed in the sheet at the portion where the peel starting point is formed.

[0108] An eighth embodiment of the present invention is a peeling device which is any one of the first to seventh embodiments, and in a planar view, the shape of the laminated sheet is rectangular, the start position is a corner of the laminated sheet, and the end position is a position away from each of two of the four end edges of the laminated sheet that form the corner, on the inside of the laminated sheet. According to this configuration, the present device can stably and easily form the peeling starting point.

[0109] A ninth embodiment of the present invention is a peeling method performed by a peeling device that peels off the weak adhesive film from the sheet of a laminated sheet in which a sheet is laminated on the weak adhesive layer of a weak adhesive film having a base film and a weak adhesive layer formed on one side of the base film, and the peeling device has a sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed upward, a blade having a cutting edge portion that is directed to the base film of the laminated sheet adsorbed and held on the sheet table, a heater that heats the cutting edge portion to a predetermined temperature, a moving mechanism that relatively moves the position of the blade with respect to the sheet table, and a clamping mechanism that grips a peeling starting point formed on the laminated sheet and peels off the weak adhesive film from the sheet, and the peeling method is The peeling method includes a contact step (e.g., contact step ST4) in which the peeling device contacts the blade tip, which has been heated to the predetermined temperature, with the outer edge of the base film, which is a starting position, so that the longitudinal direction of the blade tip is perpendicular to the direction of the relative movement, and a start point formation step (e.g., start point formation step ST5) in which the peeling device, while the blade tip is in contact with the base film, slides the blade tip to an end position that is located more inward than the start position and peels the slightly adhesive film so that it curls up between the start position and the end position, thereby forming the peel start point, wherein in the start point formation step, the length from the start position to the end position is set so that the length of the laminated sheet in the portion where the blade tip is in contact does not exceed the length of the blade tip. According to this configuration, the present method can stably and easily form a peel start point by a simple action of sliding the heated tip portion on the base film from the start position to the end position. [Explanation of symbols]

[0110] 1 Peeling device 2 Sheet transport mechanism 21 Seat Table 23a Holding surface 3 Unit transport mechanism (moving mechanism) 41b Heater 41c Blade 41d Tip (cutting edge) 42 Clamping mechanism Pf end position Ps start position S Laminated Sheet S1 Seat S2 Lightly adhesive film S3 Base Film S3a side S4 Slight adhesive layer S5 Peeling origin

Claims

1. A peeling device for peeling off a weak adhesive film from a sheet in a laminated sheet in which a sheet is laminated on the weak adhesive layer of the weak adhesive film having a base film and a weak adhesive layer formed on one surface of the base film, A sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed upward; a blade having a cutting edge portion that is directed toward the base film of the laminate sheet that is adsorbed and held on the sheet table; A heater that heats the blade tip to a predetermined temperature; a movement mechanism that moves a position of the blade relative to the sheet table; A clamping mechanism that grasps a peeling starting point formed on the laminated sheet and peels the weak adhesive film from the sheet; and The moving mechanism includes: the blade tip portion of the blade that has been heated to the predetermined temperature is brought into contact with an outer edge portion of the base film that is to be a starting position such that the longitudinal direction of the blade tip portion is perpendicular to the direction of the relative movement; With the blade tip portion in contact with the base film, the blade tip portion is slid in a direction parallel to the holding surface from the start position to an end position that is located on the inside of the base film relative to the start position, thereby forming the peeling starting point where the weak adhesive film is peeled off so as to be warped up between the start position and the end position, The length from the start position to the end position is set so that the length of the laminated sheet at the portion where the cutting edge is in contact does not exceed the length of the cutting edge. Peeling device.

2. The base film is made of polyester or polyethylene terephthalate, The slightly adhesive layer is an acrylic adhesive, The holding surface is made of a low thermal conductive material; The predetermined temperature is 170° C. or higher and 250° C. or lower. The peeling device according to claim 1 .

3. The sheet is an LCP sheet or an LTCC sheet, When the sheet is an LCP sheet, the predetermined temperature is 170° C. or higher and 220° C. or lower; When the sheet is the LTCC sheet, the predetermined temperature is 220° C. or higher and 250° C. or lower. The peeling device according to claim 2 .

4. The holding surface is made of glass or rubber. The peeling device according to claim 2 .

5. When the blade tip is in contact with the base film, the blade tip is pressed against the base film such that a predetermined load is applied from the blade tip to the base film, The predetermined load is set within a range in which the laminated sheet can be elastically deformed. The peeling device according to claim 1 .

6. When the holding surface is made of rubber, the predetermined load is set within a range in which the laminated sheet and the holding surface can be elastically deformed. The peeling device according to claim 5 .

7. The blade is inclined with respect to the base film. The peeling device according to claim 5 .

8. In a plan view, the shape of the laminated sheet is rectangular, the start position is a corner of the laminated sheet, The end position is a position away from each of two end sides forming the corner portion among the four end sides of the laminated sheet toward the inside of the laminated sheet. The peeling device according to any one of claims 1 to 7.

9. A peeling method is carried out by a peeling device that peels off a weak adhesive film from a sheet in a laminated sheet in which a sheet is laminated on the weak adhesive layer of a weak adhesive film having a base film and a weak adhesive layer formed on one surface of the base film, The peeling device includes: A sheet table having a holding surface that adsorbs and holds the laminated sheet so that the base film of the weak adhesive film is exposed upward; a blade having a cutting edge portion that is directed toward the base film of the laminate sheet that is adsorbed and held on the sheet table; A heater that heats the blade tip to a predetermined temperature; a movement mechanism that moves a position of the blade relative to the sheet table; A clamping mechanism that grasps a peeling starting point formed on the laminated sheet and peels the weak adhesive film from the sheet; and The peeling method includes: a contacting step in which the peeling device contacts the blade tip portion of the blade, which has been heated to the predetermined temperature, with an outer edge portion of the base film, which is a starting position, such that a longitudinal direction of the blade tip portion is perpendicular to a direction of the relative movement; a peeling device, while the blade tip portion is in contact with the base film, slides the blade tip portion in a direction parallel to the holding surface to an end position located inside the base film from the start position, and peels the weak adhesive film so as to be warped upward between the start position and the end position, thereby forming the peeling start point; Including, In the starting point forming step, a length from the start position to the end position is set so that a length of the laminated sheet at a portion where the blade tip portion is in contact does not exceed a length of the blade tip portion. Peeling method.

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