Peltier element fixing mechanism and temperature control device

Abstract

To provide a Peltier element fixing mechanism in which a Peltier element is easily replaced, and a temperature adjustment device having the fixing mechanism.SOLUTION: A Peltier element fixing mechanism comprises: a stage plate on which a first surface of a Peltier element to be fixed abuts; a heat sink abutting on a second surface of the Peltier element; a plurality of springs which, when compressed to a predetermined length, produce a pressing force necessary to fix the Peltier element; and a pusher which pressurizes the heat sink via the spring. The Peltier element fixing mechanism fixes the Peltier element by moving the pusher from an unlocked position where the spring is longer than the predetermined length to a locked position where the spring is compressed to the predetermined length, while the Peltier element is sandwiched between the stage plate and the heat sink.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to a fixing mechanism for a Peltier element and a temperature adjustment device including the fixing mechanism. [Background technology]

[0002] A temperature control device is a device that adjusts the temperature of an object placed on a stage by changing the temperature of the stage. As a method of supplying heat to the stage to change the temperature of the stage, for example, a method using a heater and a Peltier element in combination is disclosed in Patent Document 1 and the like.

[0003] As shown in Fig. 12, the Peltier element 2 is attached by being sandwiched between a heat absorbing plate 3 (corresponding to a stage) that comes into contact with the object to be cooled and a heat sink 4. In this case, the heat dissipation surface of the Peltier element 2 and the heat sink 4, and the heat absorbing surface of the Peltier element 2 and the heat absorbing plate 3 (stage) are generally brought into contact with each other via a thin layer of thermally conductive grease, and the heat absorbing plate 3 is fixed to the heat sink 4 by screwing with a predetermined tightening torque (for example, 1.0 to 2.0 kgf cm). Since there is a risk of the Peltier element being damaged if there is an imbalance in the tightening force, in order to prevent this, the screws are generally placed on the outside near the center of each side of the approximately square Peltier element 2, as shown in Fig. 12. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2013-131344 A Summary of the Invention [Problem to be solved by the invention]

[0005] When a Peltier element is used in such a temperature control device and the temperature is repeatedly increased and decreased, the characteristics of the Peltier element may deteriorate due to the accumulation of damage caused by the thermal cycle. It is preferable to quickly replace a Peltier element with deteriorated characteristics to minimize the time the temperature control device is down.

[0006] However, in the above-mentioned screw-fastening method, when attaching the Peltier element, it is necessary to tighten the multiple screws in order to gradually apply torque so as not to cause uneven tightening force, which is difficult to do in a short time, and the replacement work requires skill. When the temperature control device is used in a production line, the temperature control device becoming unusable due to the replacement work of the Peltier element may directly lead to a decrease in the production efficiency of the entire production line, so a method that allows the replacement of the Peltier element to be performed easily in a short time is desired.

[0007] The present invention has been made in consideration of the above problems, and has an object to provide a fixing mechanism for a Peltier element that allows easy replacement of the Peltier element, and a temperature adjustment device including the fixing mechanism. [Means for solving the problem]

[0008] A fixing mechanism for a Peltier element according to one embodiment of the present invention includes a stage plate against which a first surface of a Peltier element to be fixed abuts, a heat sink against which a second surface of the Peltier element abuts, The fixing mechanism includes a plurality of springs that generate the pressing force required to fix the Peltier element when compressed to a predetermined length, and a pusher that presses the heat sink via the springs. With the Peltier element sandwiched between a stage plate and the heat sink, the fixing mechanism fixes the Peltier element by moving the pusher from a position in which the springs are longer than the predetermined length, in an unlocked state, to a position in which the springs are compressed to the predetermined length, in a locked state.

[0009] The present invention may further include a lever having a cam groove and rotating about a fixed shaft fixed to the stage plate as a rotation axis, and a cam follower provided on the pusher and engaging with the cam groove. The pusher may be moved by the movement of the cam follower along the cam groove in association with the rotation of the lever.

[0010] Alternatively, the device may further include a fixed member having a circular ring portion with a cam groove and a pressing portion that engages with the pusher, and a support portion that is provided at a fixed position with respect to the stage plate and has a cam follower that engages with the cam groove of the fixed member. In this case, the fixed member may be moved in the axial direction of rotation while engaged with the pusher by the pressing portion, by the movement of the cam follower along the cam groove as the fixed member rotates, thereby moving the pusher.

[0011] In the present invention, the plurality of springs may press within the area of ​​the heat sink where the Peltier element is in contact.

[0012] In the present invention, it is preferable to further include a fan attached to the pusher on the opposite side to the heat sink and drawing in air from the pusher side. The pusher is provided on the inside of the arrangement position of the multiple springs and has a vent hole with a diameter smaller than that of the fan. It is also preferable to provide an air chamber between the pusher and the fan to prevent air from entering without passing through the vent hole provided in the pusher.

[0013] Moreover, a temperature control device according to an embodiment of the present invention includes any one of the fixing mechanisms for the Peltier element described above, and the stage plate serves as a stage on which an object to be temperature controlled is placed. [Brief description of the drawings]

[0014] [Figure 1] 1 is an exploded perspective view of a temperature adjustment device 1 according to a first embodiment. [Diagram 2] 1 is a schematic diagram showing a schematic configuration of a temperature adjustment device 1 according to a first embodiment of the present invention. [Diagram 3]Fig. 3(a) is a perspective view showing a state in which the cooling unit 11 is removed from the temperature adjustment stage unit 10. Fig. 3(b) is a perspective view showing a locked state in which the Peltier element 20 is sandwiched and fixed between the temperature adjustment stage unit 10 and the cooling unit 11. [Figure 4] FIG. 2 is an exploded perspective view showing the configuration of a cooling unit 11. [Diagram 5] 5(a) is a plan view of the heat sink 111, and FIG. 5(b) is a cross-sectional view of the heat sink 111 taken along line AA in FIG. 5(a). [Figure 6] 2 is a diagram showing the airflow in the cooling unit 11 together with a cross section of the cooling unit 11. FIG. [Figure 7] Fig. 7(a) is a diagram showing the position of lever 103 in the unlocked state, and Fig. 7(b) is a diagram showing the position of lever 103 in the locked state. [Figure 8] Fig. 8(a) is a cross-sectional view showing the positional relationship of each component of the cooling unit 11 in an unlocked state, and Fig. 8(b) is a cross-sectional view showing the positional relationship of each component of the cooling unit 11 in a locked state. [Figure 9] 10 is a cross-sectional view showing a schematic state in which a Peltier element 20 is sandwiched between a temperature adjustment stage unit 10 and a cooling unit 11 in a temperature adjustment device 1A according to a second embodiment. FIG. [Figure 10] FIG. 10 is a perspective view showing an example of the appearance of the fixing member 14. As shown in FIG. [Figure 11] Fig. 11(a) is a schematic diagram showing a state in which fixed member 14 is attached to ring support part 104 so that cam follower 104A engages with cam groove 141A. Fig. 11(b) is a schematic diagram showing a state in which fixed member 14 is rotated from the state in Fig. 11(a) until cam follower 104A is positioned at the closed end of cam groove 141A. [Figure 12] FIG. 1 is an exploded perspective view showing a fixing structure of a typical Peltier element. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] Hereinafter, each embodiment of the present invention will be described with reference to the drawings. In this specification and each drawing, the same elements as those described above with reference to the previous drawings are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate.

[0016] [First embodiment] Fig. 1 is an exploded perspective view of a temperature adjustment device 1 according to a first embodiment of the present invention. Fig. 2 is a schematic diagram showing a general configuration of the temperature adjustment device 1 according to the first embodiment of the present invention.

[0017] 1 and 2, the temperature adjustment device 1 of this embodiment includes a temperature adjustment stage unit 10, a cooling unit 11, a control unit 12, a Peltier element 20, and a lower cover 13. The temperature adjustment device 1 has a structure in which the temperature adjustment stage unit 10, the cooling unit 11, the control unit 12, and the Peltier element 20 are housed in the lower cover 13. The main function of the temperature adjustment device 1, that is, the temperature adjustment function of the stage 101, is realized as follows.

[0018] The control unit 12 controls the power for driving the heater 107 of the temperature adjustment stage unit 10, the fan 115 of the cooling unit 11, and the Peltier element 20, based on the set target temperature and the temperature detected by the temperature sensor 109. When increasing the temperature of the stage 101, the control unit 12 may supply power to the heater 107. In addition, when increasing the temperature of the stage 101, the control unit 12 may use the Peltier element 20 together with the heater 120. For example, while heating to a temperature close to the target temperature by the heater 107, the Peltier element 20 may be driven while switching between heating (heat generation) and cooling (heat absorption) to fill the difference (excess or deficiency) between the target temperature and the temperature detected by the temperature sensor 109. In this way, the temperature of the stage 101 can be quickly brought to the target temperature and the temperature can be controlled with high accuracy. Also, when cooling the stage 101 to a low temperature, the control unit 12 may cut off the power supply to the heater 107 and drive the Peltier element 20 to perform cooling.

[0019] With this configuration, the temperature adjustment device 1 can control the temperature of the stage 101 to a desired target temperature.

[0020] As described above, the Peltier element 20 is used for temperature control in the temperature adjustment device 1, but repeated heating and cooling may cause the Peltier element 20 to deteriorate. A deteriorated Peltier element 20 needs to be replaced with a new one. To facilitate maintenance, including replacement of the Peltier element 20, the temperature adjustment device 1 is configured so that the temperature adjustment stage unit 10, the cooling unit 11, and the Peltier element 20 can be easily attached to and detached from the lower cover 13.

[0021] Fig. 3(a) is a perspective view showing a state in which the cooling unit 11 is removed from the temperature adjustment stage unit 10. Fig. 3(b) is a perspective view showing a locked state in which the Peltier element 20 is sandwiched and fixed between the temperature adjustment stage unit 10 and the cooling unit 11.

[0022] As shown in Fig. 3(b), the temperature adjustment stage unit 10, the cooling unit 11, and the Peltier element 20 are integrated by a mounting structure described below, with the Peltier element 20 sandwiched between the temperature adjustment stage unit 10 and the cooling unit 11. Then, as shown in Fig. 1, the temperature adjustment stage unit 10 is attached to the lower cover 13 and fixed by a fixing knob 13A so that the stage 101 of the temperature adjustment stage unit 10 is exposed and the entire cooling unit 11 is housed inside the lower cover 13.

[0023] The temperature control stage unit 10 includes a stage 101 on which an object to be temperature controlled is placed. The stage 101 is a flat metal plate, and is attached to the center of a flat base 102 that constitutes the housing of the temperature control device 1 together with the lower cover 13, penetrating the base 102. When cooling is performed by passing an electric current through the Peltier element 20, the stage 101 functions as a heat absorbing plate that absorbs heat from the object to be temperature controlled placed thereon. In order to prevent the transfer of heat between the base 102 and the stage 101 from interfering with the temperature increase and decrease of the stage 101, the base 102 supports the stage 101 via a heat insulating material 108. A heater 107 is embedded inside the stage 101. The heater 107 generates heat when current is applied, and contributes to the temperature increase of the stage 101. In addition, a temperature sensor 109 for temperature control is attached to the stage 101.

[0024] Hereinafter, in the temperature control stage unit 10, the side where the surface of the stage 101 on which the temperature control object is placed is exposed will be referred to as the front side, and the opposite side to this front side (i.e., the side housed inside the lower cover 13 and not exposed to the outside of the temperature control device 1) will be referred to as the back side. A lever 103 and a guide member 106 are provided on the back side of the temperature control stage unit 10.

[0025] The lever 103 is composed of two lever arms 103A and one gripping part 103C. On the back surface of the temperature adjustment stage unit 10, the two lever arms 103A are each supported with a fixed axis Ax as a rotation axis. The fixed axis Ax is provided at a fixed position relative to the stage 101 so as to be parallel to a line connecting approximately the centers of two opposing sides of the stage 101. In the following description, the direction along the fixed axis Ax is referred to as the x direction, the direction parallel to the front surface (and back surface) of the temperature adjustment stage unit 10 and perpendicular to the x direction is referred to as the y direction, and the direction perpendicular to the front surface (and back surface) of the temperature adjustment stage unit 10 is referred to as the z direction.

[0026] One end of the lever arm 103A is supported by a fixed shaft Ax, and the other end is connected to the gripper 103C. The gripper 103C is a portion that the user grips when rotating the lever 103, and the lever arm 103A is connected to both ends of the gripper 103C. With this structure, the lever 103 is attached to the back surface of the temperature control stage unit 10 so as to straddle the stage 101 by the lever arm 103A and the gripper 103C. The length of the lever arm 103A and the connection position of the lever arm 103A with the gripper 103C are configured so that the gripper 103C does not interfere with the cooling unit 11 when the cooling unit 11 and the Peltier element 20 are placed in a predetermined position and the lever 103 is rotated.

[0027] A substantially arc-shaped cam groove 103B having a substantially center on the fixed axis Ax is provided on the surface of the lever arm 103A adjacent to the stage 101 (the surfaces of the two lever arms 103A facing each other). The shape of the cam groove 103B will be described in detail later together with the fixing mechanism of the Peltier element 20 to the temperature control stage unit 10 and the procedure for attaching and detaching the Peltier element 20.

[0028] The guide member 106 regulates the movement of the cooling unit 11 attached to the rear surface of the temperature adjustment stage unit 10 in the y direction, and determines the attachment position of the cooling unit 11.

[0029] The Peltier element 20 is a substantially square plate-like element having two electrodes, and when a current flows between the two electrodes, one surface of the plate absorbs heat and the other surface generates heat. If the direction of the current is changed, the heat absorbing surface and the heat generating surface are reversed. In the temperature control device 1, basically, the surface in contact with the stage 101 is the heat absorbing surface, and the surface in contact with the cooling unit 11 is the heat generating surface. However, when the temperature of the stage 101 is to be rapidly increased, the current may be controlled so that the surface in contact with the stage 101 generates heat in addition to the heat generated by the heater 107. In the following description, the surface in contact with the stage 101 is the heat absorbing surface, and the surface in contact with the cooling unit 11 is the heat generating surface.

[0030] 4 is an exploded perspective view showing the configuration of the cooling unit 11. The cooling unit 11 includes a heat sink 111 and a fan 115 for dissipating heat from the heat generating surface of the Peltier element 20. The cooling unit 11 is attached to the rear surface of the temperature adjustment stage unit 10 so as to face the stage 101 with the Peltier element 20 sandwiched therebetween. The cooling unit 11 includes the following configuration so that the heat sink 111 is pressed against the Peltier element 20 with a predetermined pressing pressure when attached correctly.

[0031] FIG. 5(a) is a plan view of the heat sink 111, and FIG. 5(b) is a cross-sectional view of the heat sink 111 taken along the line AA in FIG. 5(a). The heat sink 111 has a first surface formed as a flat surface to be in contact with the Peltier element 20, and a large number of rod-shaped heat dissipation fins 111A are protruding from a second surface opposite to the first surface to increase the heat dissipation surface area and ensure an air flow path. The first surface of the heat sink 111 has a sufficient area to be in contact with the entire heat generating surface of the Peltier element 20. The Peltier element 20 is fixed so as to be in contact with the center of the first surface of the heat sink 111 so as not to cause unevenness in the heat dissipation performance. As shown in FIG. 5(b), a circular pressing region R is provided in the center of the second surface of the heat sink 111. The heat dissipation fins 111A are not provided in this pressing region R. It is preferable to provide the heat dissipation fins 111A in the inner region of the circular pressing region R. A screw hole 111B into which a spring shaft 116 is screwed is provided in the pressing region R, and a ring-shaped spring base 118 having approximately the same shape as the pressing region R is attached to the heat sink 111 by the spring shaft 116. A pressing force is applied from the pusher 112 via a spring 117 to the spring base 118 arranged in the pressing region R. The pressing region R is preferably provided directly behind the position where the first surface abuts against the Peltier element 20, and more preferably, the projection of the spring 117 in the z direction is included within the range where the Peltier element 20 abuts. In this way, a load can be applied within the surface of the Peltier element 20, so that the peripheral portion of the Peltier element 20 can be prevented from being damaged. In addition, it is particularly preferable that the spring base 118 (or the pressing region R) is provided so that the projection of the z direction is included within the range where the Peltier element 20 abuts. In this way, a load can be applied to the Peltier element 20 in a balanced manner.

[0032] The spring shaft 116 is a stripper bolt with only the tip of the shaft threaded. The spring shaft 116 passes through the pusher 112, the spring 117, and the spring base 118, and is screwed into the screw hole 111B of the heat sink 111. The through hole 118A of the spring base 118 through which the spring shaft 116 passes is formed to have a larger diameter than the threaded portion of the spring shaft 116 and a smaller diameter than the non-threaded shaft portion. Therefore, when the spring shaft 116 is screwed into the screw hole 111B of the heat sink 111, the end of the non-threaded shaft portion of the spring shaft 116 abuts against the spring base 118, fixing the spring base 118 to the heat sink 111. The non-threaded portion of the shaft of the spring shaft 116 functions as a guide for the movement of the pusher 112 in the z direction while holding the spring 117.

[0033] The pusher 112 is a member that transmits the pressing force that presses the heat sink 111 against the Peltier element 20 to the heat sink 111 via the spring 117, and also supports the air chamber 114 and the fan 115. An air vent 112A through which the air current from the fan 115 passes is provided in the center of the pusher 112. In addition, a through hole 112B into which the shaft portion of the spring shaft 116 is inserted is provided around the air vent 112A at a position corresponding to the screw hole of the heat sink 111. That is, the air vent 112A is provided inside the arrangement position of the multiple springs (in other words, at a position surrounded by the multiple springs). A cam follower 113 is provided at the center of each of the two side surfaces in the x direction of the pusher 112 (i.e., the side surfaces parallel to the yz plane). The cam follower 113 is a member that is fitted into the cam groove 103B of the lever arm 103A when the cooling unit 11 is attached to the temperature adjustment stage unit 10, and moves relatively inside the lever arm 103A as the lever arm 103A is rotated, thereby moving the heat sink 111 in the z direction. The cam follower 113 is configured to include a roller around a rotation axis fixed to the pusher 112 so that the cam follower 113 can move relatively inside the cam groove 103B with low frictional force.

[0034] The spring 117 is a coil spring that is sandwiched between the pusher 112 and the spring base 118 and penetrated by the spring 117. When the cooling unit 11 is attached to the temperature adjustment stage unit 10, the spring 117 is compressed by the pressing force of the pusher 112 pressed against the Peltier element 20, and transmits the pressing force to the heat sink 111. When the cooling unit 11 is correctly attached to the temperature adjustment stage unit 10, the spring 117 is compressed to a predetermined length and generates a reaction force to the heat sink 111 so as to apply a predetermined pressing force. Note that the state in which the spring 117 is compressed to the predetermined length is not the shortest (fully contracted) state, and further compression is possible. In this way, even if there is a dimensional error in the Peltier element 20 or a minute foreign object is sandwiched, the spring 117 is further compressed from the predetermined length, and the Peltier element 20 can be prevented from being damaged. In addition, the positions of pusher 112 and spring base 118 that come into contact with spring 117 (that is, the periphery of through hole 112B and through hole 118A) may be countersunk in an area approximately equal to the outer diameter of spring base 118 to ensure the positioning of spring base 118.

[0035] The fan 115 is attached to the pusher 112 on the opposite side to the heat sink 111 with the air chamber 114 interposed therebetween by screws or the like. For example, an axial fan, a sirocco fan, or the like can be used as the fan 115. The type of fan to be used may be determined according to the direction of exhaust from the lower cover 13, the required amount of air, and the like. The fan 115 draws air from the pusher 112 side and exhausts it to the opposite side to the pusher 112. The air chamber 114 has a side wall 114A and an air hole 114B having approximately the same diameter as the diameter of the flow path of the fan 115. The air chamber 114 ensures a space for the airflow that has passed through the relatively small diameter air hole 112A to spread over the flow path area of ​​the fan 115, and prevents air from the side that does not pass through the air hole 112A from flowing into the fan 115. 6, the fan 115 sucks in and expels air flowing in from the side of the heat sink 111 through the vent hole 112A provided in the center of the pusher 112 and the vent hole 114B provided widely in the air chamber 114. Therefore, the airflow generated by the fan 115 passes near the center of the heat sink 111 and reaches the fan 115. The heat generating surface of the Peltier element 20 is attached so as to abut on the center of the first surface of the heat sink 111, and therefore the heat sink 111 is likely to become hotter in the center. However, according to the above-mentioned configuration, the airflow can be reliably directed to the heat dissipation fins 111A located near the center (for example, inside the annular pressing area R), thereby enhancing the heat dissipation effect.

[0036] Next, a description will be given of a fixing mechanism for the Peltier element 20 to the temperature adjustment stage unit 10 and a procedure for attaching and detaching using the fixing mechanism in the temperature adjustment device 1 configured as above. As shown in Fig. 3(a), the Peltier element 20 and the cooling unit 11 are attached and detached to and from the temperature adjustment stage unit 10 when the temperature adjustment stage unit 10 is removed from the lower cover 13 and turned upside down.

[0037] Fig. 7(a) is a diagram showing the posture of the lever 103 when the lever 103 is raised and the pressing force pressing the cooling unit 11 against the Peltier element 20 and the stage 101 is released (unlocked state). Fig. 7(b) is a diagram showing the posture of the lever 103 when the lever 103 is lowered and a pressing force pressing the cooling unit 11 against the Peltier element 20 and the stage 101 is applied (locked state). Fig. 8(a) is a cross-sectional view showing the positional relationship of each component of the cooling unit 11 in the unlocked state. Fig. 8(b) is a cross-sectional view showing the positional relationship of each component of the cooling unit 11 in the locked state.

[0038] When mounting, first, with the lever 103 raised, the Peltier element 20 is placed at a predetermined position in the center of the back surface of the stage 101. Next, the cooling unit 11 is placed on the Peltier element 20. At this time, the cam follower 113 provided on the side surface of the pusher 112 is engaged with the cam groove 103B of the lever arm 103A, thereby positioning the cooling unit 11 in the x direction relative to the temperature adjustment stage unit 10. Also, the guide member 106 abuts against the side surface of the heat sink 111 in the y direction, thereby positioning the cooling unit 11 in the y direction relative to the temperature adjustment stage unit 10. As a result, the cam follower 113 of the cooling unit 11 can move only in the z direction when engaged with the cam groove 103B.

[0039] As shown in FIG. 7(a) and FIG. 7(b), the cam groove 103B is formed in a substantially arc shape with the fixed axis Ax as the approximate center and the distance from the fixed axis Ax gradually changing. The cam groove 103B is provided so that one end reaches the surface 103D of the lever arm 103A to form an open end. The surface 103D is oriented along the z-axis when the lever 103 is raised, and is a surface that is close to the back surface of the base 102 when the lever 103 is lowered. The distance from the fixed axis Ax to the cam groove 103B is the longest at the open end. The cam groove 103B is provided so that the longest position is set to 0 degrees in the rotation angle about the fixed axis Ax, and the distance from the fixed axis Ax to the cam groove 103B gradually decreases as the angle increases from 0 degrees to a predetermined angle (up to about 90 degrees), and the distance from the fixed axis Ax to the cam groove 103B is the shortest at the closed end (the position where the rotation angle becomes the above-mentioned predetermined rotation angle), which is the end of the cam groove 103B opposite to the open end.

[0040] In the state where the lever 103 is raised (unlocked state; Figs. 7(a) and 8(a)), the open end of the cam groove 103B, where the distance from the fixed axis Ax to the cam groove 103B is the longest, is located directly above the fixed axis Ax in the z direction. When attaching the cooling unit 11, the Peltier element 20 is sandwiched between the stage 101 and the heat sink 111, and the cam follower 113 is engaged with this open end. In this state, the distance dz to the cam groove 103B directly above the fixed axis Ax in the z direction is set to match the position of the cam follower 113 in a state where the spring 117 is not compressed when the cooling unit 11 is placed with the Peltier element 20 sandwiched therebetween. Therefore, in the unlocked state where the lever 103 is raised, only a load equivalent to the weight of the cooling unit 11 itself is applied to the Peltier element 20.

[0041] After cam follower 113 is engaged with the open end of cam groove 103B, when lever 103 is gradually tilted down, distance dz to cam groove 103B in the direction directly above fixed axis Ax in the z direction gradually shortens with the tilt of lever 103. As described above, cam follower 113 can only move in the z direction when engaged with cam groove 103B, so cam follower 113 and pusher 112 to which the shaft of cam follower 113 is attached are gradually pushed down in the z direction.

[0042] When the pusher 112 is pushed down, the Peltier element 20, the heat sink 111, and the spring base 118 do not move, and the spring 117 is compressed between the spring base 118 and the pusher 112. When the lever 103 is fully lowered (locked state; Fig. 7(b) and Fig. 8(b)), the cam follower 113 moves to the closed end of the innermost part of the cam groove 103B. The distance dz at this time is a length at which the spring 117 is compressed to a predetermined length and a predetermined pressing force is applied to the Peltier element 20. It is preferable that a minute depression (not shown) is formed in the outer wall of the cam groove 103B near the closed end of the cam groove 103B. In this way, when the lever 103 is fully lowered, a change in the reaction force of the spring 117 occurs that is different from that caused by the consistent diameter reduction of the cam groove 103B. The user can feel the change in the reaction force by hand through the grip part 103C, and can recognize that the lock state has been established. Furthermore, in order to raise lever 103 to release the locked state, a force is required for cam follower 113 to overcome this depression, so that the locked state can be prevented from being released unintentionally (for example, due to vibration, etc.).

[0043] When removing the cooling unit 11, the steps are reversed from the steps for installation. That is, the lever 103 is raised to release the pressure applied by the pusher 112, the cam follower 113 is removed from the cam groove 103B, and the cooling unit 11 is removed from the temperature adjustment stage unit 10, and the Peltier element 20 that was sandwiched between the cooling unit 11 and the temperature adjustment stage unit 10 is removed.

[0044] The fixing mechanism of the first embodiment as described above has the following advantages over the conventional method of tightening a number of screws in sequence: (1) Compared to the conventional fixing method, the Peltier element 20 can be quickly attached, detached, and replaced with a simple operation. (2) Since the multiple springs 117 are compressed simultaneously and the pressing force is increased evenly, the pressing force is less likely to become biased. (3) Since the pressing force is applied within the area of ​​the Peltier element 20, the Peltier element 20 is less likely to be damaged. (4) As the Peltier element 20 becomes larger, the necessary pressing force also becomes larger accordingly, and may reach 200 kg, but a sufficient load can be applied to the Peltier element 20 with a small operating force by using the principle of leverage.

[0045] In addition, the fixing mechanism is configured to provide vent hole 112A in the center of pusher 112 and to include air chamber 114 between fan 115 and pusher 112, so that the airflow generated by fan 115 flows into vent hole 112A via the center of heat sink 111. Therefore, heat generated by Peltier element 20 disposed directly behind the center of heat sink 111 can be efficiently dissipated.

[0046] Second Embodiment A temperature adjustment device 1A according to the second embodiment of the present invention differs from the temperature adjustment device 1 according to the first embodiment in the fixing mechanism of the Peltier element 20 to the temperature adjustment stage unit 10. The fixing mechanism in the temperature adjustment device 1A according to the second embodiment will be described below, and the configuration for realizing the temperature adjustment function will not be described since it is similar to that of the temperature adjustment device 1 according to the first embodiment. Furthermore, among the components of the temperature adjustment device 1A according to the second embodiment, those that are assigned the same reference numerals as the components of the temperature adjustment device 1 according to the first embodiment should be understood to have the same configuration as those described in relation to the first embodiment.

[0047] 9 is a cross-sectional view showing a state where the Peltier element 20 is sandwiched between the temperature control stage unit 10 and the cooling unit 11 in the temperature control device 1A according to the second embodiment. In the temperature control device 1 according to the first embodiment, the cam follower 113 of the pusher 112 is engaged with the cam groove 103B provided in the lever arm 103A, and the lever arm 103A is rotated about the fixed axis Ax as a rotation axis, so that the pusher 112 is pressed toward the stage 101, and the pressing force is applied to the Peltier element 20 via the spring 117 to fix the Peltier element 20. In contrast, in the temperature control device 1A according to the second embodiment, the lever arm 103A is not used, and the pressing force for fixing the Peltier element 20 is generated by using the fixing member 14.

[0048] As shown in FIG. 10, the fixing member 14 includes an annular portion 141, a pressing portion 142, and a connecting portion 143. The annular portion 141 is an annular member, and a plurality of cam grooves 141A are formed on its outer surface. When N cam grooves 141A are provided, each annular portion 141 is formed to fall within a range obtained by equally dividing the ring of the annular portion 141 into N. For example, when N=4 and four cam grooves 141A are provided, each cam groove 141A is formed within a range of 90 degrees on the annular portion 141. The cam grooves 141A are formed on the outer peripheral surface of the annular portion 141, inclined with respect to the circumferential direction. An open end is formed at one end of the annular portion 141 at a position where the outer peripheral surface and the lower surface intersect, and the end opposite to the open end is a closed end. A recess is provided on this closed end, similar to the recess in the cam groove 103B of the first embodiment. A pressing portion 142 is provided in the center of the inside of the annular portion 141. The lower surface of the pressing portion 142 abuts against a part of the upper surface of the pusher 112 of the cooling unit 11. The annular portion 141 and the pressing portion 142 are connected via a connecting portion 143 with sufficient strength.

[0049] The temperature adjustment stage unit 10 of the temperature adjustment device 1A is provided with a ring support part 104 having a cam follower 104A that engages with the cam groove 141A at a position corresponding to the cam groove 141A of the fixed member 14. The cam follower 104A is provided at a height (position in the z direction) where the lower surface of the pressing part 142 substantially abuts against the pusher 112 of the cooling unit 11 placed across the Peltier element 20 when the cam follower 104A engages with the cam groove 141A of the fixed member 14. Therefore, the position of the cam follower 104A relative to the stage 101 is fixed. Although not shown in FIG. 10, a guide member 106 is provided to guide the movement and posture change of the cooling unit 11 so as to allow only parallel movement in the z direction.

[0050] In the cooling unit 11 of the temperature adjustment device 1A, the pusher 112 does not have a cam follower 113. The pusher 112 is configured so that a part of its upper surface can engage with the lower surface of the pressing portion 142. The upper surface of the pusher 112 and the lower surface of the pressing portion 142 become sliding surfaces when attached, as described below. For this reason, in order to enable smooth sliding, it is preferable to use a material with a low friction coefficient for the upper surface of the pusher 112 and the lower surface of the pressing portion 142, or to perform a surface treatment to reduce the friction coefficient. Alternatively, the two surfaces may be abutted via a lubricant to reduce friction.

[0051] When mounting, first, the Peltier element 20 is placed at a predetermined position in the center of the back surface of the stage 101 with the fixed member 14 removed. Then, the cooling unit 11 is placed on the Peltier element 20. Then, as shown in FIG. 11(a), the fixed member 14 is mounted on the ring support part 104 so that the cam follower 104A engages with the cam groove 141A. In this state, the lower surface of the pressing part 142 of the fixed member 14 is located at a height that is almost in contact with a part of the upper surface of the pusher 112. Then, when the fixed member 14 is rotated so that the cam follower 104A moves relatively along the cam groove 141A, the fixed member 14 is gradually pushed downward in the z direction with the inclination of the cam follower 104A. Accordingly, the pusher 112 engaged with the pressing part 142 is also pushed downward.

[0052] When the pusher 112 is pressed down, the Peltier element 20, the heat sink 111, and the spring base 118 do not move, and the spring 117 is compressed between the spring base 118 and the pusher 112. As shown in Fig. 11(b), when the fixing member 14 is rotated until the cam follower 104A is positioned at the closed end of the cam groove 141A, the spring 117 is compressed to a predetermined length at which a predetermined pressing force is applied to the Peltier element 20 (locked state).

[0053] When removing the unit, the procedure for installation can be reversed. That is, the fixing member 14 is rotated in the opposite direction to that for installation to raise the fixing member 14 and the pusher 112. Then, the pressure applied by the pusher 112 is released, and the fixing member 14 and the cooling unit 11 are removed in that order, and finally the Peltier element 20 that was sandwiched between the temperature adjustment stage units 10 is removed.

[0054] According to the fixing mechanism of the second embodiment as described above, it is possible to obtain the same action and effect as the fixing mechanism of the first embodiment. In addition, in the first embodiment, the lever 103 is made large so as not to interfere with the cooling unit 11, and as a result, the temperature adjustment device 1 as a whole tends to be large, whereas in the fixing mechanism of this embodiment, the dimensional constraints are relaxed, and the temperature adjustment device 1 can be made smaller and lighter.

[0055] [Modifications of the embodiment] Although the embodiments have been described above, the present invention is not limited to these examples. For example, in the second embodiment, the cam groove 141A may be provided on the inner surface of the annular portion 141 instead of the outer surface. Furthermore, the lever 103 in the first embodiment and the fixed member 14 in the second embodiment may be rotated with a smaller operating force by extending the distance from the rotation axis to the point of force using a jig for attachment and detachment.

[0056] Furthermore, any combination of features of the above-described embodiments, in which a person of ordinary skill in the art has appropriately added or deleted components or modified the design, is also included within the scope of the present invention as long as it contains the gist of the present invention. [Explanation of symbols]

[0057] 1 Temperature control device 10 Temperature control stage unit 11 Cooling unit 12 Control unit 13 Lower cover 14 Fixing member 20 Peltier element

Claims

1. a stage plate against which a first surface of the Peltier element to be fixed abuts; a heat sink abutted against a second surface of the Peltier element; A plurality of springs that generate a pressing force necessary for fixing the Peltier element when compressed to a predetermined length; a pusher that presses the heat sink via the spring; Equipped with With the Peltier element sandwiched between the stage plate and the heat sink, the pusher is moved from a position in which the spring is in an unlocked state longer than the predetermined length to a position in which the spring is in a locked state compressed to the predetermined length, thereby fixing the Peltier element; a lever having a cam groove and rotating about a fixed shaft fixed to the stage plate as a rotation axis; a cam follower provided on the pusher and engaged with the cam groove; Further equipped with A fixing mechanism for a Peltier element, characterized in that the pusher is moved by the movement of the cam follower along the cam groove in association with the rotation of the lever.

2. A stage plate against which a first surface of a Peltier element to be fixed abuts; a heat sink abutted against a second surface of the Peltier element; A plurality of springs that generate a pressing force necessary for fixing the Peltier element when compressed to a predetermined length; a pusher that presses the heat sink via the spring; Equipped with With the Peltier element sandwiched between the stage plate and the heat sink, the pusher is moved from a position in which the spring is in an unlocked state longer than the predetermined length to a position in which the spring is in a locked state compressed to the predetermined length, thereby fixing the Peltier element; a fixing member having a circular ring portion provided with a cam groove and a pressing portion that engages with the pusher; a support portion provided at a fixed position relative to the stage plate and having a cam follower that engages with the cam groove of the fixed member; Further equipped with a fixing mechanism for a Peltier element, characterized in that the cam follower moves along the cam groove as the fixed member rotates, thereby moving the fixed member in the axial direction of the rotation while engaging with the pusher by the pressing portion, thereby moving the pusher.

3. The present invention further comprises a fan attached to the pusher on an opposite side to the heat sink and adapted to draw air from the pusher side; 3. The fixing mechanism for a Peltier element according to claim 1, wherein the pusher is provided inside an arrangement position of the plurality of springs, and has an air hole having a diameter smaller than a diameter of the fan.

4. A stage plate against which a first surface of the Peltier element to be fixed abuts; a heat sink abutted against a second surface of the Peltier element; A plurality of springs that generate a pressing force necessary for fixing the Peltier element when compressed to a predetermined length; a pusher that presses the heat sink via the spring; Equipped with With the Peltier element sandwiched between the stage plate and the heat sink, the pusher is moved from a position in which the spring is in an unlocked state longer than the predetermined length to a position in which the spring is in a locked state compressed to the predetermined length, thereby fixing the Peltier element; a fan attached to the pusher on a side opposite to the heat sink and configured to draw air from the pusher side; A fixing mechanism for a Peltier element, wherein the pusher is provided inside the position where the plurality of springs are arranged and has an air vent having a diameter smaller than that of the fan.

5. A fixing mechanism for a Peltier element as described in claim 3 or 4, characterized in that an air chamber is provided between the pusher and the fan to prevent air from entering without passing through the air vent provided in the pusher.

6. 6. The fixing mechanism for a Peltier element according to claim 1, wherein the plurality of springs press an area of ​​the heat sink where the Peltier element is in contact.

7. 7. A temperature control device comprising the fixing mechanism for a Peltier element according to claim 1, wherein the stage plate serves as a stage on which an object to be temperature-controlled is placed.

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