Substrate transport robot and substrate transport device

Abstract

To provide a substrate transfer robot capable of preventing the rotation range of a base link from being restricted in a configuration where a guide rail cover covering the upper part of the guide rail is provided.SOLUTION: A substrate transfer robot 100 includes: a robot arm 10; and an elevation drive mechanism 20 that raises and lowers the robot arm 10. The elevation drive mechanism 20 includes: a fixed portion 21 provided with guide rails 21a extending along a vertical direction; and a lifting unit 22 that moves up and down along the guide rails 21a. The robot arm 10 includes a base link 2 that is connected to the lifting unit 22 and that can pivot horizontally. The substrate transfer robot 100 also includes a guide rail cover 2a that laterally covers upper portions 21h included respectively in the guide rails 21a and exposed laterally when the lifting unit 22 is lowered. The guide rail cover 2a is provided on the base link 2.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a substrate transport robot and a substrate transport apparatus, and more particularly to a substrate transport robot and a substrate transport apparatus that are provided with a lifting drive mechanism that lifts and lowers a robot arm. [Background technology]

[0002] Conventionally, a substrate transport robot and a substrate transport device that are provided with a lifting drive mechanism for lifting and lowering a robot arm are known (see, for example, Patent Document 1).

[0003] The above-mentioned Patent Document 1 discloses a substrate transport robot (substrate transport device) including a robot arm and a lifting drive mechanism for lifting and lowering the robot arm. The lifting drive mechanism of the substrate transport robot is provided with a guide rail extending in the vertical direction and a lifting section that is lifted and lowered along the guide rail. The substrate transport robot is also provided with a guide rail cover for covering the exposed upper portion of the guide rail from the side when the lifting section is lowered. The guide rail cover is provided on the lifting section separately from the base link at a position horizontally facing a base link of the robot arm that is horizontally rotatable. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] JP 2017-148925 A Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the substrate transport robot (substrate transport device) described in Patent Document 1, the guide rail cover is provided on the lifting section separately from the base link at a position horizontally facing the base link of the robot arm that is horizontally rotatable. Therefore, when the base link rotates, the base link and the guide rail cover come into contact with each other, which may limit the rotation range of the base link. Therefore, there is a need for a substrate transport robot and a substrate transport device that can prevent the rotation range of the base link from being limited when a guide rail cover that covers the top of the guide rail is provided.

[0006] The present invention has been made to solve the problems described above, and one object of the present invention is to provide a substrate transport robot and a substrate transport device that are capable of preventing the rotation range of the base link from being restricted when a guide rail cover is provided to cover the upper part of the guide rail. [Means for solving the problem]

[0007] In order to achieve the above object, a substrate transport robot according to a first aspect of the present invention comprises a robot arm having a holding part at its tip for holding a substrate, and a lifting drive mechanism for raising and lowering the robot arm, the lifting drive mechanism including a fixed part having a guide rail extending along the vertical direction, and a lifting part which moves up and down along the guide rail, the robot arm including a base link connected to the lifting part and rotatable in the horizontal direction, and a tip side link connected to the base link and rotatable in the horizontal direction, having a tip part and having one or more arm members, the robot arm further comprising a guide rail cover laterally covering an upper part of the guide rail which is exposed laterally when the lifting part is lowered, the guide rail cover being provided on the base link.

[0008] In the substrate transport robot according to the first aspect of the present invention, as described above, the guide rail cover is provided on the base link. This allows the guide rail cover to rotate integrally with the base link even when the base link rotates horizontally, preventing the guide rail cover from interfering with the rotating base link. As a result, when a guide rail cover is provided to cover the upper portion of the guide rail, it is possible to prevent the rotation range of the base link from being restricted.

[0009] Further, a substrate transport apparatus according to a second aspect of the present invention comprises a substrate transport robot including a robot arm having a holding part at its tip for holding a substrate, and a lifting drive mechanism for raising and lowering the robot arm, and a robot accommodation part in which the substrate transport robot is accommodated, the lifting drive mechanism including a fixed part having a guide rail extending along the vertical direction, and a lifting part which moves up and down along the guide rail, the robot arm including a base link connected to the lifting part and rotatable in the horizontal direction, and a tip side link connected to the base link and rotatable in the horizontal direction, having a tip part and having one or more arm members, the substrate transport robot including a guide rail cover which covers from the side an upper part of the guide rail which is exposed laterally when the lifting part is lowered, the guide rail cover being provided on the base link.

[0010] In the substrate transport device according to the second aspect of the present invention, as described above, the guide rail cover is provided on the base link. This allows the guide rail cover to rotate integrally with the base link even when the base link rotates horizontally, preventing the guide rail cover from interfering with the rotating base link. As a result, it is possible to provide a substrate transport device that can prevent the rotation range of the base link from being limited when a guide rail cover that covers the upper part of the guide rail is provided. Effect of the Invention

[0011] According to the present invention, when a guide rail cover that covers the upper part of the guide rail is provided as described above, it is possible to prevent the rotation range of the base link from being restricted. [Brief description of the drawings]

[0012] [Figure 1] 1 is a plan view showing a semiconductor manufacturing apparatus provided with a substrate transport robot according to a first embodiment. [Diagram 2] 1 is a schematic side view showing a semiconductor manufacturing apparatus provided with a substrate transport robot according to a first embodiment. [Diagram 3] FIG. 2 is a plan view showing a base link (a guide rail cover) according to the first embodiment. [Figure 4] 3 is a cross-sectional view showing a base link (a guide rail cover), a fixed portion, and a lifting portion according to the first embodiment. FIG. [Diagram 5] FIG. 5 is a cross-sectional view taken along line 300-300 in FIG. [Figure 6] 4. FIG. 4 is a cross-sectional view taken along line 400-400 in FIG. [Figure 7] 4 is a cross-sectional view showing a base link (a guide rail cover), a fixed portion, and a lifting / lowering portion when the lifting / lowering portion is raised according to the first embodiment. FIG. [Figure 8] 3 is a side view showing a base link (a guide rail cover), a fixed portion, and a lifting portion according to the first embodiment. FIG. [Figure 9] FIG. 11 is a plan view showing a base link and a guide rail cover according to the second embodiment. [Figure 10] 13 is a cross-sectional view showing a base link (a guide rail cover), a fixed portion, and a lifting portion according to a second embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0013] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

[0014] [First embodiment] The configurations of a substrate transport robot 100 and a substrate transport apparatus 200 according to a first embodiment will be described with reference to FIGS.

[0015] 1, the substrate transfer robot 100 is used in, for example, a semiconductor manufacturing apparatus 101 installed in a clean room. The semiconductor manufacturing apparatus 101 is equipped with a wafer processing apparatus 102 that processes semiconductor wafers W, a FOUP 103 that is a container for storing the wafers W, and a substrate transfer apparatus 200 that transfers the wafers W between the wafer processing apparatus 102 and the FOUP 103. The substrate transfer robot 100 is also equipped in the substrate transfer apparatus 200. The wafer W is an example of a "substrate" in the claims.

[0016] Unprocessed or processed wafers W are stored in the FOUP 103. In the wafer processing apparatus 102, the wafers W are subjected to processes such as heat treatment, impurity introduction treatment, thin film formation treatment, lithography treatment, cleaning treatment, and planarization treatment.

[0017] The wafer processing apparatus 102 includes a processing space forming section 102b in which the processing space 102a is formed, a processing apparatus main body (not shown) that is disposed inside the processing space 102a and processes the wafer W, and a processing space adjusting device (not shown) that adjusts the ambient gas filled in the processing space 102a.

[0018] The substrate transfer device 200 includes a preparation space forming section 200b in which the preparation space 200a is formed, a substrate transfer robot 100 arranged in the preparation space 200a, and an aligner 200c arranged in the preparation space 200a and adjusting the orientation of the wafer W. The substrate transfer device 200 also includes a preparation space adjusting device (not shown) that adjusts the atmospheric gas filled in the preparation space 200a. The preparation space forming section 200b is an example of a "robot accommodating section" in the claims.

[0019] The preparation space forming portion 200b is formed in a rectangular box shape. The substrate transport robot 100 is disposed in approximately the center of the preparation space 200a in the longitudinal direction (X direction).

[0020] Furthermore, when the substrate transfer robot 100 transfers the wafer W from the FOUP 103 to the wafer processing apparatus 102, the substrate transfer robot 100 temporarily transfers the wafer W taken out of the FOUP 103 to the aligner 200c. Then, the substrate transfer robot 100 inserts the wafer W, the orientation of which has been adjusted in the aligner 200c, into the wafer processing apparatus 102.

[0021] The substrate transport robot 100 is a horizontal articulated SCARA type robot. The substrate transport robot 100 (substrate transport device 200) includes a robot arm 10 and an elevation drive mechanism 20 to which a base end of the robot arm 10 is connected. The elevation drive mechanism 20 raises and lowers the robot arm 10.

[0022] The robot arm 10 has a robot hand (end effector) 1 at a tip 10a for holding (grasping) a wafer W. The robot arm 10 also includes a base link 2 that is connected to a lifting unit 22 described later and is rotatable in a horizontal direction. The base link 2 is disposed at the top of a movable casing 22a (see FIG. 4) described later. The robot arm 10 also includes a tip side link 3 that is connected to the base link 2 and is rotatable in a horizontal direction, has a tip 10a, and has one or more arm members. Specifically, the tip side link 3 has a first link 3a connected to the base link 2 and a second link 3b connected to the first link 3a and the robot hand 1. The robot hand 1 is an example of a "holding unit" in the claims. Each of the first link 3a and the second link 3b is an example of an "arm member" in the claims.

[0023] As shown in Fig. 2, the lifting drive mechanism 20 includes a fixed part 21 provided with a guide rail 21a (see Fig. 3) extending in the up-down direction (Z direction). The lifting drive mechanism 20 also includes a lifting part 22 that moves up and down along the guide rail 21a. Note that in Fig. 2, the base link 2 and the tip link 3 that have been moved upward are shown by dashed lines. Also, in Fig. 2, the fixed part 21 and the lifting part 22 are illustrated as being aligned in the Y direction, but this is merely an example and is not limited to this configuration.

[0024] The lifting / lowering unit 22 is formed in a cylindrical shape and is provided so as to extend in the vertical direction. The upper part of the lifting / lowering unit 22 becomes the upper part of the lifting / lowering drive mechanism 20. As the lifting / lowering unit 22 moves up and down, the position of the robot hand 1 provided at the tip end 10a of the robot arm 10 changes up and down.

[0025] 3, the fixed part 21 includes a fixed-side casing 21b having an outer shape of a substantially rectangular parallelepiped (see FIG. 4) that is elongated in the vertical direction (Z direction). In addition, on the side of the fixed part 21 to which the lifting part 22 is connected, two guide rails 21a are arranged in parallel with each other at a predetermined interval.

[0026] As shown in FIG. 4, the lifting section 22 includes a movable casing 22a having an outer shape of a substantially rectangular parallelepiped elongated in the vertical direction (Z direction). The bottom of the movable casing 22a is open, and the ceiling surface and four side surfaces are connected by plate-shaped members. The movable casing 22a is provided with a support member 22b connected to a nut member 21d (described later) in the fixed casing 21b, and a block-shaped moving body 22c that engages with the guide rail 21a and moves up and down. Two moving bodies 22c are provided in series on each of the two guide rails 21a for stability and reliability of travel. In FIG. 4, for simplification, the robot arm 10 is illustrated in its outer shape rather than in a cross-sectional view.

[0027] Inside the fixed-side casing 21b, there are provided a ball screw 21c for raising and lowering the lifting section 22, and a nut member 21d that engages with the ball screw 21c and rises and falls by the rotation of the ball screw 21c. Inside the fixed-side casing 21b, there are provided a motor 21e for rotating the ball screw 21c, and a pulley mechanism 21f, which is a power transmission mechanism for transmitting the driving force of the motor 21e to the ball screw 21c. Inside the fixed-side casing 21b, there is provided a fan 21g for generating a downward airflow inside the fixed-side casing 21b at the lower part. This allows the air inside the fixed-side casing 21b to be discharged from below to the outside.

[0028] As shown in FIG. 3, the substrate transport robot 100 is provided with a guide rail cover 2a that covers, from the side (from the Y2 side), the upper portion 21h of the guide rail 21a that is exposed to the side (Y2 side) when the lifting / lowering part 22 is lowered (see FIG. 4).

[0029] Furthermore, the fixed casing 21b is provided with a side wall 21i (see FIG. 5) on the side connected to the lifting / lowering unit 22. The side wall 21i is provided with an opening 21j (see FIG. 5) through which the support member 22b passes. The support member 22b is raised and lowered in the vertical direction while passing through the opening 21j. The opening 21j is a vertically elongated opening with a length corresponding to the lifting stroke of the lifting / lowering unit 22.

[0030] Further, inside the movable casing 22a, there is provided a cable arrangement area 22d (see FIG. 4) in which power supply cables and signal cables are routed to servo motors and the like arranged inside the base link 2 and the tip link 3. Further, inside the movable casing 22a, there is provided a cable processing part 22e (see FIG. 5) for processing the above-mentioned cables when the lifting part 22 is lifted and lowered.

[0031] Also, as shown in FIG. 4, when the robot arm 10 is in the lowest position, the height of the upper surface 22f of the movable casing 22a is set so that the upper surface 2e of the base link 2 is approximately the same height as the upper surface 21k of the fixed casing 21b.

[0032] That is, when the lifting unit 22 is lowered to the lowest point, the upper surface 22f of the movable casing 22a is located at a position lower than the upper surface 21k of the fixed casing 21b by the height (thickness) of the base link 2. When the lifting unit 22 is lowered to the lowest point, the upper portion 21h of the guide rail 21a is exposed, and in order to prevent the preparation space 200a from being contaminated by dust or the like, the guide rail cover 2a, the ceiling cover 23, and a pair of side covers 24 described later are provided.

[0033] Here, in the first embodiment, as shown in FIG. 3, the guide rail cover 2a is provided on the base link 2. Specifically, the guide rail cover 2a is provided on the base link 2 by being the housing 2b of the base link 2. More specifically, the guide rail cover 2a is a side part of the housing 2b of the base link 2. As a result, when the base link 2 rotates, the guide rail cover 2a rotates integrally with the base link 2. Note that a gap C1 (see FIG. 4) of about 1 to 2 mm is provided between the base link 2 (guide rail cover 2a) and the movable side casing 22a. As a result, the guide rail cover 2a can be rotated smoothly. Also, the housing 2b is an example of the "first housing" in the claims.

[0034] In detail, the base link 2 includes a circular portion 2c having a circular shape when viewed from above, and an extension portion 2d connected to the circular portion 2c and extending in the opposite direction to the guide rail cover 2a. The guide rail cover 2a is a portion of the housing 2b that corresponds to the circular portion 2c.

[0035] That is, in the first embodiment, the guide rail cover 2a has an arc shape when viewed from above. Specifically, the guide rail cover 2a has a perfect circular arc shape (i.e., a circular arc shape) when viewed from above.

[0036] In addition, in a direction (X direction in FIG. 3) perpendicular to the extension direction of extension portion 2d, the maximum value of width W1 of circular portion 2c (ie, the diameter of the above-mentioned perfect circle) is larger than the maximum value of width W2 of extension portion 2d.

[0037] In the first embodiment, the guide rail cover 2a has an arc shape constituting a part of a circle centered on the rotation axis α (see FIG. 4) of the base link 2 when viewed from above. As a result, when viewed from above, the distance D1 between the rotation center O of the guide rail cover 2a and the guide rail cover 2a is a constant distance D1 (the radius of the circle) regardless of the part of the guide rail cover 2a. The distance D1 is ½ of the maximum value of the width W1 of the circular portion 2c. When viewed from above, the rotation axis α of the base link 2 is provided so as to coincide with the rotation center O of the guide rail cover 2a. That is, the base link 2 rotates around the rotation center O.

[0038] In the first embodiment, the guide rail cover 2a has an arc shape with a central angle θ of greater than 180 degrees when viewed from above. Specifically, the central angle θ of the guide rail cover 2a is approximately 270 degrees. As a result, the rotation center O of the guide rail cover 2a is surrounded by the guide rail cover 2a when viewed from above.

[0039] The substrate transport robot 100 also includes a ceiling cover 23 (hatched portion in FIG. 3) that covers the upper portion 21h of the guide rail 21a from above (Z2 side). The ceiling cover 23 is provided on the fixed portion 21. The ceiling cover 23 is provided in a position adjacent to the guide rail cover 2a when viewed from above. Specifically, the ceiling cover 23 is provided in a position where the end portion 23a does not overlap the guide rail cover 2a when viewed from above.

[0040] Here, in the first embodiment, the end 23a of the ceiling cover 23 on the guide rail cover 12a side has an arc shape corresponding to the arc shape of the guide rail cover 2a when viewed from above. Specifically, the end 23a of the ceiling cover 23 and the guide rail cover 2a have arc shapes as parts of circles having the same curvature and radius when viewed from above.

[0041] In the first embodiment, the guide rail cover 2a is provided to rotate with the gap C2 between the end 23a of the ceiling cover 23 and the guide rail cover 2a being kept constant when viewed from above. That is, the end 23a of the ceiling cover 23 has an arc shape that is curved (parallel) along the guide rail cover 2a when viewed from above. The gap C2 is, for example, about 1 to 2 mm. Since the gap C2 is kept relatively small, it is possible to keep the pressure inside the fixed casing 21b negative. As a result, it is possible to prevent impurities such as grease (oil) of the robot arm 10 from leaking out of the fixed casing 21b. The grease, etc. is discharged from an exhaust port (hole) (not shown) provided on the floor of the clean room by an air flow flowing downward formed by the fan 21g arranged in the fixed casing 21b. Since the gap C2 is kept relatively small, it is possible to prevent dust, etc. from entering the fixed casing 21b through the gap C2.

[0042] The substrate transport robot 100 also includes a pair of side covers 24 arranged to sandwich the upper portion 21h of the guide rail 21a from the sides (X direction). Each of the pair of side covers 24 is arranged to extend along the Y direction (a direction perpendicular to the X direction when viewed from above) when viewed from above. The lengths of each of the pair of side covers 24 along the Y direction are equal to each other (length L). Each of the pair of side covers 24 is also provided on the fixing portion 21.

[0043] In the first embodiment, the rotation center O of the base link 2 and the guide rail cover 2a is provided at a position P corresponding to the center between the pair of side covers 24 in the direction (X direction) in which the pair of side covers 24 are arranged. Moreover, the rotation center O is provided at a position outside the area between the pair of side covers 24 in the Y direction when viewed from above.

[0044] In the first embodiment, the guide rail cover 2a is arranged to rotate while maintaining a constant gap C3 between the end 24a of each of the pair of side covers 24 on the guide rail cover 2a side when viewed from above. The gap C3 is, for example, about 1 to 2 mm, which is the same as the gap C2. This makes it possible to more reliably maintain the pressure inside the fixed casing 21b at a negative pressure and more reliably prevent dust and the like from entering the fixed casing 21b through the gap C3.

[0045] In the first embodiment, the guide rail cover 2a having an arc shape is provided so as to rotate with at least a part of the arc portion (circular portion 2c) inserted into the region between the pair of side covers 24 when viewed from above. Specifically, the guide rail cover 2a (base link 2) has at least a part of the arc portion (circular portion 2c) inserted into the region so that the gap C3 between the guide rail cover 2a and each end 24a of the pair of side covers 24 is a predetermined value (for example, 1 to 2 mm). Also, the distance D2 in the X direction between the pair of side covers 24 is smaller than the maximum value of the width W1 of the circular portion 2c.

[0046] 4, the fixed-side casing 21b is provided with a fixed-side cover 25 including a side surface 25a that covers the movable-side casing 22a from the Y1 side when the lifting section 22 is lowered to the lowest point, a pair of side surfaces 25b (see FIGS. 5 and 6) that cover the movable-side casing 22a from the X1 side and the X2 side, and a bottom surface 25c. The side surface 25a, the pair of side surfaces 25b, and the bottom surface 25c are integrally formed. The fixed-side casing 21b and the fixed-side cover 25 form a part of a cover means for covering the lifting drive mechanism 20.

[0047] As shown in Fig. 7, the upper part of the fixed-side cover 25 is open so that the movable-side casing 22a can enter and exit. When the lifting / lowering part 22 is positioned downward (see Fig. 4), the guide rail 21a is sealed in a space mainly formed by the guide rail cover 2a, the front surface 22g (the side surface of the connection part with the fixed part 21) of the movable-side casing 22a, the ceiling cover 23, and the pair of side covers 24. When the lifting / lowering part 22 is raised and positioned upward, the guide rail 21a is sealed in a space mainly formed by the front surface 22g of the movable-side casing 22a, the fixed-side cover 25, the ceiling cover 23, and the pair of side covers 24.

[0048] This prevents the surface of the guide rail 21a from being exposed during the entire lifting stroke of the lifting unit 22. As a result, it is possible to maintain a clean atmosphere in the preparation space 200a.

[0049] As shown in FIG. 8, each of the pair of side covers 24 and the fixed-side cover 25 (side surface 25b) are provided integrally.

[0050] [Effects of the first embodiment] In the first embodiment, the following effects can be obtained.

[0051] In the first embodiment, as described above, in the substrate transport robot 100, the guide rail cover 2a is provided on the base link 2. With this, even when the base link 2 rotates in the horizontal direction, the guide rail cover 2a also rotates integrally with the base link 2, so that it is possible to prevent the guide rail cover 2a from interfering with the rotating base link 2. As a result, when the guide rail cover 2a that covers the upper portion 21h of the guide rail 21a is provided, it is possible to prevent the rotation range of the base link 2 from being restricted.

[0052] In the first embodiment, as described above, the guide rail cover 2a is provided on the base link 2 by being the housing 2b (first housing) of the base link 2. As a result, since the guide rail cover 2a is a part of the base link 2, it is possible to reliably prevent the guide rail cover 2a from interfering with the rotating base link 2. Also, since the guide rail cover 2a is the housing 2b itself, it is possible to reduce the number of parts and simplify the structure of the base link 2 compared to the case where a separate member is attached.

[0053] In the first embodiment, as described above, the guide rail cover 2a has an arc shape when viewed from above. This allows both end portions of the guide rail cover 2a to be positioned closer to the rotation center O of the guide rail cover 2a than when the guide rail cover 2a is provided in a straight line when viewed from above. As a result, when the guide rail cover 2a rotates, it is possible to easily prevent the both end portions of the guide rail cover 2a from interfering with members (for example, the pair of side covers 24) arranged around the guide rail cover 2a. As a result, the guide rail cover 2a can be easily arranged close to the above-mentioned members.

[0054] In the first embodiment, as described above, the guide rail cover 2a has an arc shape constituting a part of a circle centered on the rotation axis α of the base link 2 when viewed from above. This makes it possible to make the distance D1 between the guide rail cover 2a and the rotation axis α (rotation center O) constant regardless of the part of the guide rail cover 2a when viewed from above. As a result, the size of the gap (C2, C3) between the guide rail cover 2a and the members (e.g., the ceiling cover 23 and the pair of side covers 24) arranged around the guide rail cover 2a can be easily made constant regardless of the rotation direction of the guide rail cover 2a.

[0055] In the first embodiment, as described above, the substrate transport robot 100 includes the ceiling cover 23 that is provided on the fixed part 21 and covers the upper part 21h of the guide rail 21a from above. This makes it possible for the ceiling cover 23 to prevent dust and the like from entering the space (fixed side casing 21b) in which the guide rail 21a is disposed from above. Also, the end 23a of the ceiling cover 23 on the guide rail cover 2a side has an arc shape corresponding to the arc shape of the guide rail cover 2a when viewed from above. This makes it possible to easily reduce the gap C2 between the ceiling cover 23 and the guide rail cover 2a. As a result, it is possible to prevent dust and the like from entering through the gap between the ceiling cover 23 and the guide rail cover 2a, and when the fan 21g creates a negative pressure in the space (fixed side casing 21b) in which the guide rail 21a is disposed, the above space can be easily maintained at a negative pressure.

[0056] In the first embodiment, as described above, the end 23a of the ceiling cover 23 and the guide rail cover 2a each have an arc shape when viewed from above. The guide rail cover 2a is provided so as to rotate while the gap C2 between the end 23a of the ceiling cover 23 and the guide rail cover 2a is kept constant when viewed from above. This keeps the gap C2 constant, thereby making it possible to keep the pressure in the space (fixed casing 21b) in which the guide rail 21a is disposed constant.

[0057] In the first embodiment, as described above, the substrate transport robot 100 is provided with a pair of side covers 24 that are provided on the fixed part 21 and sandwich the upper part 21h of the guide rail 21a from the sides. The rotation center O of the base link 2 and the guide rail cover 2a is provided at a position corresponding to the center of the pair of side covers 24 in the direction in which the pair of side covers 24 are arranged. This makes it possible to make the size of the gap C3 between the guide rail cover 2a and each of the pair of side covers 24 equal to each other. As a result, it is possible to prevent the pressure in the space (fixed side casing 21b) in which the guide rail 21a is arranged from being uneven between the one side cover 24 side and the other side cover 24 side. In addition, since the distances between each of the pair of side covers 24 and the rotation center O are equal to each other, the size of the gap C3 between the guide rail cover 2a and each of the pair of side covers 24 can be made equal to each other even if the lengths L of the pair of side covers 24 are not made different from each other. As a result, the same types of side covers 24 can be provided, making it possible to suppress an increase in the number of types of parts.

[0058] In the first embodiment, as described above, the guide rail cover 2a has an arc shape when viewed from above, and is provided to rotate with the gap C3 between the end 24a of each of the pair of side covers 24 on the guide rail cover 2a side being kept constant. This keeps the gap C3 constant, so that the pressure in the space (fixed side casing 21b) in which the guide rail 21a is arranged can be kept constant more reliably.

[0059] In the first embodiment, as described above, the guide rail cover 2a having an arc shape is provided so as to rotate when viewed from above with at least a part of the arc portion inserted into the area between the pair of side covers 24. This allows the guide rail cover 2a to be disposed closer to the pair of side covers 24, so that the gap C3 between each of the pair of side covers 24 and the guide rail cover 2a can be easily reduced.

[0060] In the first embodiment, as described above, the guide rail cover 2a has an arc shape with a central angle θ of greater than 180 degrees when viewed from above. This allows the length of the guide rail cover 2a (the circumferential length when viewed from above) to be greater than when the central angle θ is 180 degrees or less. As a result, the area covered by the guide rail cover 2a when the base link 2 rotates can be increased. This allows the guide rail cover 2a to easily cover the upper portion 21h of the guide rail 21a even when the rotation angle of the guide rail cover 2a (base link 2) is increased.

[0061] In the first embodiment, as described above, in the substrate transport device 200, the guide rail cover 2a is provided on the base link 2. As a result, even when the base link 2 rotates horizontally, the guide rail cover 2a also rotates integrally with the base link 2, so that it is possible to prevent the guide rail cover 2a from interfering with the rotating base link 2. As a result, it is possible to provide the substrate transport device 200 that can prevent the rotation range of the base link 2 from being restricted when the guide rail cover 2a that covers the upper portion 21h of the guide rail 21a is provided.

[0062] [Second embodiment] Next, configurations of a substrate transport robot 500 and a substrate transport device 600 according to a second embodiment will be described with reference to Figures 9 and 10. In the substrate transport robot 500 and the substrate transport device 600, unlike the first embodiment in which a guide rail cover 2a is provided on a housing 2b of a base link 2, a guide rail cover 12a is attached to a base link 12. Note that the same components as those in the first embodiment are denoted by the same reference numerals and detailed description thereof will be omitted.

[0063] As shown in FIG. 9, the robot arm 110 includes a base link 12 that is connected to a lifting section 22 so as to be pivotable in the horizontal direction.

[0064] The substrate transport robot 500 (substrate transport device 600) includes a guide rail cover 12a that covers, from the side (from the Y2 side), the upper portion 21h of the guide rail 21a that is exposed to the side (Y2 side) when the lifting / lowering part 22 is lowered. The guide rail cover 12a is formed of, for example, sheet metal.

[0065] Here, in the second embodiment, the guide rail cover 12a is attached to the base link 12, and thereby is provided integrally with the base link 12. Specifically, the guide rail cover 12a is provided so as not to move relative to the base link 12, and thereby is fixed to the base link 12. In other words, the guide rail cover 12a is provided separately from the base link 12, and is capable of rotating integrally with the base link 12.

[0066] Further, the guide rail cover 12a is provided so as to cover (surround) the end 12b of the base link 12 when viewed from above. Note that, in Fig. 9, the end 12b of the base link 12 is illustrated as having an arc shape when viewed from above, but this is only an example, and the base link 12 may have a shape other than the arc shape (for example, a rectangular shape).

[0067] In the second embodiment, the guide rail cover 12a is connected to the housing 12c of the base link 12 by a connection portion 12d. Specifically, the connection portion 12d is provided so as to extend linearly between the housing 12c of the base link 12 and the guide rail cover 12a when viewed from above. That is, the guide rail cover 12a and the base link 12 are disposed apart from each other. The connection portion 12d fixes the housing 12c of the base link 12 and the guide rail cover 12a by, for example, screw fastening, welding, or the like. The housing 12c of the base link 12 is formed of a metal such as aluminum. The housing 12c is an example of a "second housing" in the claims.

[0068] Also, a plurality of connection parts 12d are provided. For example, the connection parts 12d are provided (i.e., three connection parts 12d) so as to connect both ends of the guide rail cover 12a and the center part of the guide rail cover 12a to the housing 12c of the base link 12 when viewed from above. Note that the number of connection parts 12d may be one or more than three.

[0069] 10, when the robot arm 110 is at the lowest position, the height of the upper surface 22f of the movable casing 22a is set so that the upper surface 12e of the base link 12 and the upper surface 12f of the guide rail cover 12a are at substantially the same height as the upper surface 21k of the fixed casing 21b. For simplification, FIG. 10 shows the outline of the robot arm 110 instead of a cross-sectional view.

[0070] Other configurations of the second embodiment are similar to those of the first embodiment.

[0071] [Effects of the second embodiment] In the second embodiment, the following effects can be obtained.

[0072] In the second embodiment, as described above, the guide rail cover 12a is attached to the base link 12, and thus provided to the base link 12. This allows the guide rail cover 12a to rotate integrally with the base link 12, making it possible to prevent the guide rail cover 12a from interfering with the rotating base link 12. Also, unlike the case where the base link 12 itself is used as the guide rail cover, it is possible to prevent the shape of the base link 12 from becoming complicated.

[0073] In the second embodiment, as described above, the guide rail cover 12a is provided separately from the base link 12 and can rotate integrally with the base link 12, and is connected to the housing 12c (second housing) of the base link 12 by the connecting portion 12d. This allows the guide rail cover 12a and the base link 12 to be easily integrated by the connecting portion 12d.

[0074] Other effects of the second embodiment are similar to those of the first embodiment.

[0075] [Variations] The embodiments disclosed herein should be considered to be illustrative and not restrictive in all respects. The scope of the present invention is indicated by the claims, not by the description of the embodiments above, and further includes all modifications (variations) within the meaning and scope of the claims.

[0076] For example, in the above-mentioned first and second embodiments, the guide rail cover (2a, 12a) has an arc shape (circular arc shape) when viewed from above, but the present invention is not limited to this. The guide rail cover (2a, 12a) may have a shape other than an arc shape (circular arc shape) when viewed from above (for example, a flat plate shape extending linearly when viewed from above).

[0077] In the above first and second embodiments, the guide rail cover (2a, 12a) has an arc shape that constitutes a part of a circle centered on the rotation axis α of the base link (2, 12) when viewed from above, but the present invention is not limited to this. For example, the guide rail cover (2a, 12a) may have an arc shape that does not overlap with a circle centered on the rotation axis α when viewed from above.

[0078] In the above first and second embodiments, the gap C2 between the end 23a of the ceiling cover 23 and the guide rail cover (2a, 12a) is kept constant, but the present invention is not limited to this. The gap C2 may change depending on the rotation direction of the guide rail cover (2a, 12a).

[0079] In the above first and second embodiments, the rotation center O of the base link (2, 12) and the guide rail cover (2a, 12a) is provided in the center of the pair of side covers 24, but the present invention is not limited to this. The rotation center O may be provided closer to either of the pair of side covers 24. In this case, it is preferable to make the length of the side cover 24 closer to the rotation center O as viewed from above shorter than the length of the side cover 24 farther from the rotation center O as viewed from above. This makes it possible to make the gaps C3 between each of the pair of side covers 24 and the guide rail cover (2a, 12a) equal to each other even when the rotation center O is provided closer to either of the pair of side covers 24.

[0080] In the above first and second embodiments, the gap C3 between each of the pair of side covers 24 and the guide rail cover (2a, 12a) is kept constant, but the present invention is not limited to this. The gap C3 may change depending on the rotation direction of the guide rail cover (2a, 12a).

[0081] In the above first and second embodiments, an example has been shown in which at least a part of the arc-shaped portion of the guide rail cover 2a is inserted into the area between the pair of side covers 24 when viewed from above, but the present invention is not limited to this. The entire guide rail cover (2a, 12a) may be provided outside the area.

[0082] In the above first and second embodiments, the guide rail covers (2a, 12a) have an arc shape with a central angle θ of greater than 180 degrees when viewed from above, but the present invention is not limited to this. The central angle θ of the guide rail covers (2a, 12a) may be 180 degrees or less.

[0083] In the first and second embodiments, the tip side link 3 is formed of two link members (the first link 3a and the second link 3b), but the present invention is not limited to this. For example, the tip side link 3 may be formed of three or more link members.

[0084] In the second embodiment, the guide rail cover 12a is connected to the housing 12c (second housing) of the base link 12 by the connecting portion 12d, but the present invention is not limited to this. For example, the guide rail cover 12a provided separately from the housing 12c of the base link 12 may be directly attached to the housing 12c. In this case, for example, the guide rail cover 12a and the housing 12c may be bonded with an adhesive or the like, or the guide rail cover 12a and the housing 12c may be connected by engaging with each other. [Explanation of symbols]

[0085] 1 Robot hand (holding part) 2, 12 Base link 2a, 12a Guide rail cover 2b Case (First Case) 3 Tip link 3a First link (arm member) 3b Second link (arm member) 10 Robot Arm 10a Tip 12c cabinet (2nd cabinet) 20 Lifting drive mechanism 21 Fixed part 21a Guide rail 21h top 22 Lifting section 23 Ceiling cover 23a End (end of ceiling cover) 24 Side cover 24a End (end of side cover) 100, 500 Substrate transport robot 200, 600 Substrate transport device 200b Preparation space forming section (robot accommodation section) C1 Gap (gap between the edge of the ceiling cover and the guide rail cover) C2 Gap (gap between the end of the side cover and the guide rail cover) W Wafer (substrate) α rotation axis θ central angle

Claims

1. a robot arm having a holder at a tip thereof for holding a substrate; a lifting drive mechanism for lifting and lowering the robot arm, the lifting drive mechanism includes a fixed portion provided with a guide rail extending along a vertical direction, and a lifting portion that moves up and down along the guide rail, the robot arm includes a base link connected to the lifting section and rotatable in a horizontal direction, and a tip side link connected to the base link and rotatable in a horizontal direction, the tip side link having the tip portion and one or more arm members, A guide rail cover is provided to cover, from the side, an upper portion of the guide rail that is exposed to the side when the lifting unit is lowered, The guide rail cover is provided on the base link.

2. 2 . The substrate transport robot according to claim 1 , wherein the guide rail cover is a first housing of the base link, or is attached to the base link, thereby being provided on the base link.

3. The substrate transport robot according to claim 1 , wherein the guide rail cover has an arc shape when viewed from above.

4. 4. The substrate transport robot according to claim 3, wherein the guide rail cover has an arc shape constituting a part of a circle centered on the rotation axis of the base link when viewed from above.

5. A ceiling cover is provided on the fixed portion and covers the upper portion of the guide rail from above.

5. The substrate transport robot according to claim 3, wherein an end portion of said ceiling cover on said guide rail cover side has an arc shape corresponding to an arc shape of said guide rail cover when viewed from above.

6. Each of the end portion of the ceiling cover and the guide rail cover has an arc shape when viewed from above, 6. The substrate transport robot according to claim 5, wherein the guide rail cover is arranged to rotate while a gap between the guide rail cover and the end of the ceiling cover is kept constant when viewed from above.

7. A pair of side covers are provided on the fixed portion so as to sandwich the upper portion of the guide rail from the sides, The substrate transport robot according to any one of claims 3 to 6, wherein the rotation center of the base link and the guide rail cover is provided at a position corresponding to the center between the pair of side covers in the direction in which the pair of side covers are aligned.

8. 8. The substrate transport robot of claim 7, wherein the guide rail cover has an arc shape when viewed from above, and is configured to rotate while maintaining a constant gap between each end of the pair of side covers on the guide rail cover side.

9. 9. The substrate transport robot according to claim 7, wherein the guide rail cover having an arc shape is configured to rotate with at least a portion of the arc portion inserted into the area between the pair of side covers when viewed from above.

10. 10. The substrate transport robot according to claim 3, wherein the guide rail cover has an arc shape with a central angle of greater than 180 degrees when viewed from above.

11. The substrate transport robot according to any one of claims 2 to 10, wherein the guide rail cover is provided separately from the base link and is capable of rotating integrally with the base link, and is connected to a second housing of the base link by a connection portion.

12. The substrate transport robot according to any one of claims 1 to 11, further comprising a ceiling cover provided on the fixed portion and covering the upper portion of the guide rail from above.

13. a substrate transport robot including a robot arm having a holding portion at a tip end thereof for holding a substrate, and an elevation drive mechanism for raising and lowering the robot arm; a robot accommodation unit in which the substrate transport robot is accommodated, the lifting drive mechanism includes a fixed portion provided with a guide rail extending along a vertical direction, and a lifting portion that moves up and down along the guide rail, the robot arm includes a base link connected to the lifting section and rotatable in a horizontal direction, and a tip side link connected to the base link and rotatable in a horizontal direction, the tip side link having the tip portion and one or more arm members, the substrate transport robot includes a guide rail cover that covers, from a side, an upper portion of the guide rail that is exposed laterally when the lifting unit is lowered; The guide rail cover is provided on the base link,

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