Panel storage container

The panel storage container design addresses the complexity and cost issues of existing containers by integrating a connecting member to secure support and rail members, reducing parts and enhancing structural integrity and storage capacity.

JP7662567B2Active Publication Date: 2025-04-15SHIN ETSU POLYMER CO LTD
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Patent Information

Application Number
JP2022051211
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Filing Date
2022-03-28
Publication Date
2025-04-15
Estimated Expiration
2042-03-28

AI Technical Summary

Technical Problem

Existing panel storage containers require a large number of separate parts for assembly, including connecting members, support members, and rail members, which increases complexity and costs.

Method used

A panel storage container design that integrates a connecting member to secure both the support member and the rail member, reducing the number of individual parts needed for assembly and eliminating the need for fastening members like bolts.

Benefits of technology

The integrated connecting member reduces the overall number of parts required, simplifies the assembly process, and enhances the structural integrity of the container by allowing the side walls to separate from the support member, thereby expanding the storage space.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a panel storage container that can reduce the number of components.SOLUTION: A panel storage container includes a bottom plate 22 and a side wall 23 defining a storage space for storing a plurality of panels, a support member 26a provided on the bottom plate 22 and supporting the bottom plate 22, a rail member 27 that places the panel storage container on a transport device, and a frame 44 that connects the bottom plate 22 and the side wall 23 and fixes the support member 26a and the rail member 27.SELECTED DRAWING: Figure 5
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Description

[Technical field]

[0001] The present disclosure relates to a panel enclosure. [Background technology]

[0002] In manufacturing processes that handle panels such as glass substrates for liquid crystal panels, panel storage containers that store multiple panels are used when transferring rectangular panels from one manufacturing device to another manufacturing device for a different process, and when temporarily storing the panels. For example, Patent Document 1 describes a panel storage container that includes a container body that stores the panels, and a lid that can be opened and closed to cover an opening provided in the container body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-31297 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the panel storage container described in Patent Document 1, a container body is formed by combining a plurality of parts. For example, when the top plate, side walls, bottom plate, and back wall of the container body are each formed of separate members, a connecting member is used to connect these members. The container body may include a structure provided under the bottom plate, and a rail member for placing the panel storage container on a conveyor or the like when it is transported. In this case, a part is further used to attach these members to the bottom plate. In this technical field, it is desirable to reduce the number of parts.

[0005] The present disclosure describes a panel enclosure that allows for reduced part count. [Means for solving the problem]

[0006] A panel storage container according to one aspect of the present disclosure is a panel storage container for storing a plurality of panels, and comprises a bottom plate and side walls that define a storage space for storing the plurality of panels, a support member provided on the bottom plate for supporting the bottom plate, a rail member for loading the panel storage container onto a conveying device, and a connecting member that connects the bottom plate and the side walls and secures the support member and rail member.

[0007] In this panel storage container, the connecting members not only connect the bottom plate and the side walls, but also fix the support members and the rail members. Therefore, there is no need to prepare separate parts for fixing the support members and parts for fixing the rail members. As a result, it is possible to reduce the number of parts.

[0008] In some embodiments, the connecting member may be provided with a first engagement groove for holding the bottom plate and a second engagement groove for holding the side wall. In this case, the bottom plate and the side wall are connected to each other simply by inserting the bottom plate into the first engagement groove and the side wall into the second engagement groove. Therefore, the bottom plate and the side wall can be connected to each other without using fastening members such as bolts. As a result, the number of parts can be further reduced.

[0009] In some embodiments, the connecting member may include a connecting portion that connects the bottom plate and the side wall, a fixing portion that fixes the support member and the rail member, and a connecting portion that connects the connecting portion and the fixing portion. The fixing portion may be attached to an end surface of the support member. The connecting portion may connect the connecting portion and the fixing portion such that the side wall is separated from the end surface of the support member. In this case, it is possible to expand the storage space compared to a configuration in which the side wall is disposed near the end surface of the support member. Effect of the Invention

[0010] According to the present disclosure, the number of parts can be reduced. [Brief description of the drawings]

[0011] [Figure 1] FIG. 1 is an exploded perspective view of a panel storage container according to one embodiment. [Diagram 2] FIG. 2 is a perspective view of the panel storage container shown in FIG. 1 as viewed from below. [Diagram 3] FIG. 3 is an enlarged view showing the connection structure between the frames shown in FIG. [Figure 4] FIG. 4 is a view showing the connection structure shown in FIG. 3 with the connection members removed. [Diagram 5] FIG. 5 is a cross-sectional view taken along line VV in FIG. [Figure 6] FIG. 6 is a perspective view of the frame shown in FIG. [Figure 7] FIG. 7 is a perspective view of the connecting member shown in FIG. [Figure 8] Fig. 8(a) is a diagram for explaining a connection structure in the panel storage container shown in Fig. 1. Fig. 8(b) is a diagram for explaining a connection structure in a panel storage container of a comparative example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Hereinafter, an embodiment of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated descriptions are omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction is a direction intersecting (here, perpendicular to) the X-axis direction and the Z-axis direction. The Z-axis direction is a direction intersecting (here, perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction). For convenience of description, the terms "front", "rear", "up", "down", "left", and "right" are used, but are not limited to these directions.

[0013] A panel storage container according to an embodiment will be described with reference to FIGS. 1 and 2. FIG. 1 is an exploded perspective view of a panel storage container according to an embodiment. FIG. 2 is a perspective view of the panel storage container shown in FIG. 1 as viewed from below. The panel storage container 1 shown in FIGS. 1 and 2 is a container for storing a plurality of panels. The panel storage container 1 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. Examples of the panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panel has a rectangular shape. Examples of the panel size include 510 mm×515 mm and 600 mm×600 mm. The number of panels that can be stored in the panel storage container 1 is determined arbitrarily, and may be, for example, 6, 12, 16, or 24.

[0014] The panel storage container 1 is used, for example, in a manufacturing device that manufactures electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, a process of sealing these electronic components with epoxy resin or the like, a process of peeling the sealed electronic components from the carrier panel in panel form, and a process of cutting out the panel-form electronic components individually. The panel storage container 1 is used to transport panels between these processes.

[0015] The panel storage container 1 includes a container body 2 and a lid body 3.

[0016] The container body 2 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 2 is a front-open box-type container with an opening 2a on the front face. The container body 2 stores a plurality of panels. Specifically, the container body 2 stores a plurality of panels arranged in the vertical direction. The panels are inserted into and removed from the container body 2 via the opening 2a. Details of the container body 2 will be described later.

[0017] The lid body 3 is a member for closing the opening 2a of the container body 2. The lid body 3 airtightly closes the opening 2a of the container body 2 via a sealing member such as a gasket. The lid body 3 is detachably attached to a flange 25 that defines the opening 2a. The lid body 3 includes a lid main body 31 and a locking mechanism 32. The lid main body 31 is a main body portion of the lid body 3. The lid main body 31 is a rectangular plate material. The lid main body 31 is made of a metal material such as aluminum and magnesium alloy. The lid main body 31 may be made of a thermoplastic resin such as polycarbonate resin. A keyhole 31h is provided on the front surface of the lid main body 31. A key (not shown) is inserted into the keyhole 31h.

[0018] The locking mechanism 32 locks or unlocks the lid 3 by operating a key inserted in a keyhole 31h. The locking mechanism 32 includes a latch (not shown). With the lid 3 attached to the flange 25, the latch is inserted into a locking hole 25h provided in the flange 25 by operating the key, thereby locking the lid 3. With the lid 3 locked, the latch is pulled out of the locking hole 25h by operating the key, thereby unlocking the lid 3.

[0019] The container body 2 and the lid 3 are constructed by combining a plurality of parts molded from metal materials or resin materials. Examples of resins contained in the molding material of the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may be used as the resins contained in the molding material of the resin material.

[0020] Conductive materials and various antistatic agents may be added to these resins. The conductive materials may be, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. As the antistatic agent, anionic, cationic, and nonionic antistatic agents may be used. Benzotriazole, salicylate, cyanoacrylate, oxalic acid anilide, and hindered amine ultraviolet absorbers may be added. Glass fibers or carbon fibers that improve rigidity may also be selectively added.

[0021] Next, a detailed description will be given of the container body 2. The container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a rear wall 24, a flange 25, a base portion 26, a pair of rail members 27, and a pair of handles 28.

[0022] The top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 are rectangular plate materials. The top plate 21 and the bottom plate 22 face each other in the up-down direction and are arranged substantially parallel to each other. The pair of side walls 23 face each other in the left-right direction and are arranged substantially parallel to each other. The rear wall 24 faces the lid body 3 in the front-rear direction when the lid body 3 closes the opening 2a. The top plate 21, the bottom plate 22, the pair of side walls 23, and the rear wall 24 define a storage space 20 for storing multiple panels.

[0023] The top plate 21, the bottom plate 22, and the side walls 23 are made of, for example, a metal material such as aluminum or stainless steel. The rear wall 24 is made of, for example, a transparent resin material that allows the storage space 20 to be visually observed from the outside of the container body 2. A part of the rear wall 24 may be made of a transparent resin material. Examples of transparent resin materials include acrylic resin, polycarbonate, vinyl chloride resin, and cycloolefin polymer.

[0024] The flange 25 is a rectangular frame body, and is provided across the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of the pair of side walls 23. The flange 25 defines the opening 2a. The flange 25 is made of, for example, the above-mentioned resin material or a metal material such as aluminum or stainless steel. The upper and lower frame parts of the flange 25 are each provided with two locking holes 25h arranged at a distance in the left-right direction. The locking hole 25h in the upper frame part and the locking hole 25h in the lower frame part are provided in positions facing each other in the up-down direction.

[0025] The pedestal portion 26 is a portion that serves as the base of the container body 2. The pedestal portion 26 is provided on the underside of the bottom plate 22 in order to support the container body 2 (bottom plate 22). The pedestal portion 26 is made of a metal material such as aluminum or stainless steel. The pedestal portion 26 is made by combining a plurality of columnar support members 26a. Each support member 26a is a columnar member that extends in the left-right direction.

[0026] The pair of rail members 27 are members for placing the panel storage container 1 on a transport device such as a conveyor. Each rail member 27 is a plate-shaped member extending in the front-rear direction. Each rail member 27 is made of, for example, the resin material described above. The pair of rail members 27 are provided below the base portion 26 at both left and right ends of the container body 2.

[0027] The pair of handles 28 are members used when the transport device transports the panel storage container 1. The pair of handles 28 are provided on both left and right ends of the top plate 21. The transport device can transport the panel storage container 1 by grasping the pair of handles 28 and lifting up the panel storage container 1.

[0028] Next, there will be described the members provided at the bottom of the container body 2. As shown in FIG.

[0029] The positioning member 51 is a member used by an external device such as a conveying device or a processing device to position the panel storage container 1 (container body 2). The positioning member 51 is made of a metal material such as aluminum or stainless steel. The positioning member 51 is a V-shaped plate material. The positioning member 51 is recessed (upward) toward the bottom plate 22. A V-shaped groove is defined by the V-shaped surface of the positioning member 51. The V-shaped surface may be subjected to a surface treatment to improve wear resistance and slidability as necessary. In this embodiment, the panel storage container 1 includes three positioning members 51. The number and arrangement of the positioning members 51 may be changed as appropriate.

[0030] The supply and exhaust mechanism 52 is a mechanism for supplying gas into the storage space 20 and exhausting gas from the storage space 20 in order to maintain cleanliness and low humidity inside the panel storage container 1 (the storage space 20). An example of the gas supplied into the storage space 20 is an inert gas. In this embodiment, the panel storage container 1 includes four supply and exhaust mechanisms 52. In this embodiment, the two supply and exhaust mechanisms 52 provided at the front exhaust gas from the storage space 20, and the two supply and exhaust mechanisms 52 provided at the rear supply gas to the storage space 20. The number, arrangement, and function of the supply and exhaust mechanisms 52 may be changed as desired.

[0031] Next, the configuration inside the storage space 20 will be briefly described. As shown in FIG. 1, the panel storage container 1 further includes a plurality of support parts 61 and a plurality of support parts 62. The support part 61 is a part for supporting a central part of the panel in the left-right direction. The support part 62 is a part for supporting both ends of the panel in the left-right direction. Each of the support parts 61 and 62 includes a columnar (e.g., cylindrical) shaft extending in the front-rear direction and a plurality of annular (e.g., annular) elastic bodies provided on the outer circumferential surface of the shaft. Each shaft is fixed to a support (not shown) provided between a pair of frames 43 described later. The shaft of the support part 62 is supported by a support provided on the side of the storage space 20. The number of the support parts 61 and the support parts 62 is changed according to the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel storage container 1 includes one support part 61 and two support parts 62 per panel.

[0032] Next, a method of connecting the members of the container body 2 will be described with further reference to Figs. 3 to 7. Fig. 3 is an enlarged view showing the connecting structure between the frames shown in Fig. 1. Fig. 4 is a view showing the connecting structure shown in Fig. 3 with the connecting member removed. Fig. 5 is a cross-sectional view taken along line VV in Fig. 2. Fig. 6 is a perspective view of the frame shown in Fig. 1. Fig. 7 is a perspective view of the connecting member shown in Fig. 3.

[0033] 1 to 3, the container body 2 further includes a pair of frames 41, a pair of frames 42, a pair of frames 43, a pair of frames 44 (connecting members), four block members 45, and four cover members 46. Each of the frames 41 to 44 is made of, for example, a metal material. Examples of the metal material include aluminum and stainless steel. Each of the frames 41 to 44 is formed, for example, by extrusion molding.

[0034] Each frame 41 is a member that connects the top plate 21 and the side wall 23. Each frame 41 is a long L-shaped member that extends in the front-rear direction. A pair of frames 41 are disposed on both the left and right ends of the top plate 21. The left frame 41 extends over the entire length of the left edge of the top plate 21 and also extends over the entire length of the upper edge of the left side wall 23. The right frame 41 extends over the entire length of the right edge of the top plate 21 and also extends over the entire length of the upper edge of the right side wall 23.

[0035] As shown in FIG. 4, each frame 41 is provided with an engagement groove 41a for holding the top plate 21 and an engagement groove 41b for holding the side wall 23. The engagement groove 41a is provided at the tip of the portion of the frame 41 that protrudes toward the other frame 41, opens toward the other frame 41, and extends in the front-rear direction. The engagement groove 41b is provided at the lower end of the portion of the frame 41 that protrudes downward, opens downward, and extends in the front-rear direction. The left end of the top plate 21 is inserted into the engagement groove 41a of the left frame 41. The upper end of the left side wall 23 is inserted into the engagement groove 41b of the left frame 41. The right end of the top plate 21 is inserted into the engagement groove 41a of the right frame 41. The upper end of the right side wall 23 is inserted into the engagement groove 41b of the right frame 41.

[0036] Each frame 42 is a member that connects the side wall 23 and the rear wall 24. Each frame 42 is a long L-shaped member extending in the up-down direction. A pair of frames 42 is disposed on both the left and right ends of the rear wall 24. The left frame 42 extends over the entire length of the rear edge of the left side wall 23 and also extends over the entire length of the left edge of the rear wall 24. The right frame 42 extends over the entire length of the rear edge of the right side wall 23 and also extends over the entire length of the right edge of the rear wall 24.

[0037] As shown in FIG. 4, each frame 42 is provided with an engagement groove 42a for holding the side wall 23 and an engagement groove 42b for holding the rear wall 24. The engagement groove 42a is provided at the front end of the portion of the frame 42 that protrudes forward, opens forward, and extends in the vertical direction. The engagement groove 42b is provided at the tip of the portion of the frame 42 that protrudes toward the other frame 42, opens toward the other frame 42, and extends in the vertical direction. The rear end of the left side wall 23 is inserted into the engagement groove 42a of the left frame 42. The left end of the rear wall 24 is inserted into the engagement groove 42b of the left frame 42. The rear end of the right side wall 23 is inserted into the engagement groove 42a of the right frame 42. The right end of the rear wall 24 is inserted into the engagement groove 42b of the right frame 42.

[0038] Each frame 43 is a member that connects the top plate 21 and the rear wall 24. Each frame 43 is a long L-shaped member extending in the left-right direction. A pair of frames 43 is disposed at both the upper and lower ends of the rear wall 24. The upper frame 43 extends over the entire length of the rear edge of the top plate 21, and also extends over the entire length of the upper edge of the rear wall 24. The lower frame 43 extends over the entire length of the rear edge of the bottom plate 22, and also extends over the entire length of the lower edge of the rear wall 24.

[0039] As shown in FIG. 4, each frame 43 is provided with an engagement groove 43a for holding the rear wall 24. The engagement groove 43a is provided at the tip of the portion of the frame 43 that protrudes toward the other frame 43, opens toward the other frame 43, and extends in the left-right direction. The upper end of the rear wall 24 is inserted into the engagement groove 43a of the upper frame 43. The lower end of the rear wall 24 is inserted into the engagement groove 43a of the lower frame 43. The upper frame 43 is further provided with an engagement groove (not shown) for holding the top plate 21, and the rear end of the top plate 21 is inserted into the engagement groove. The lower frame 43 is further provided with an engagement groove (not shown) for holding the bottom plate 22, and the rear end of the bottom plate 22 is inserted into the engagement groove.

[0040] Each frame 44 is a member that connects the bottom plate 22 and the side wall 23 and fixes the support member 26a and the rail member 27. Each frame 44 is a long member extending in the front-rear direction. A pair of frames 44 is disposed on both left and right ends of the bottom plate 22. The left frame 44 extends over the entire length of the left edge of the bottom plate 22 and also extends over the entire length of the lower edge of the left side wall 23. The right frame 44 extends over the entire length of the right edge of the bottom plate 22 and also extends over the entire length of the lower edge of the right side wall 23.

[0041] As shown in FIGS. 5 and 6 , each frame 44 includes a coupling portion 71 , a fixing portion 72 , and a connecting portion 73 .

[0042] The connecting portion 71 is a portion that connects the bottom plate 22 and the side wall 23. The connecting portion 71 has an L-shape extending in the front-rear direction. The connecting portion 71 is provided with an engagement groove 71a (first engagement groove) for holding the bottom plate 22 and an engagement groove 71b (second engagement groove) for holding the side wall 23. The engagement groove 71b is provided at the upper end of the portion of the connecting portion 71 that protrudes upward, opens upward, and extends in the front-rear direction. The engagement groove 71a is provided at the tip of the portion of the connecting portion 71 that protrudes toward the other frame 44, opens toward the other frame 44, and extends in the front-rear direction. The left end of the bottom plate 22 is inserted into the engagement groove 71a of the left frame 44. The lower end of the left side wall 23 is inserted into the engagement groove 71b of the left frame 44. The right end of the bottom plate 22 is inserted into the engagement groove 71a of the right frame 44. The lower end of the right side wall 23 is inserted into the engagement groove 71b of the right frame 44.

[0043] The fixing portion 72 is a portion that fixes the support member 26a and the rail member 27. The fixing portion 72 has a plate shape extending in the front-rear direction. The fixing portion 72 is disposed on the upper surface of the rail member 27, and is provided across all of the support members 26a included in the base portion 26. The fixing portion 72 is attached to the end surfaces of each support member 26a and the upper surface of the rail member 27.

[0044] Specifically, the fixing portion 72 of the left frame 44 is placed on the upper surface of the left rail member 27 and overlapped so as to contact the left end faces of the support members 26a in the left-right direction. In this state, a fastening member such as a bolt is inserted into an insertion hole penetrating the fixing portion 72 in the left-right direction, and the fastening member is screwed into a screw hole provided in the left end face of the support member 26a. Furthermore, a fastening member such as a bolt is inserted into an insertion hole penetrating the rail member 27 in the up-down direction, and the fastening member is screwed into a screw hole provided in the lower surface of the fixing portion 72.

[0045] Similarly, the fixing portion 72 of the right frame 44 is placed on the upper surface of the right rail member 27 and overlapped so as to be in contact with the right end faces of the support members 26a in the left-right direction. In this state, a fastening member such as a bolt is inserted into an insertion hole penetrating the fixing portion 72 in the left-right direction, and the fastening member is screwed into a screw hole provided in the right end face of the support member 26a. Furthermore, a fastening member such as a bolt is inserted into an insertion hole penetrating the rail member 27 in the up-down direction, and the fastening member is screwed into a screw hole provided in the lower surface of the fixing portion 72.

[0046] The connection portion 73 is a portion that connects the linking portion 71 and the fixed portion 72. The connection portion 73 has a plate-like shape extending in the front-rear direction. Specifically, the connection portion 73 connects the tip of the portion of the linking portion 71 that protrudes toward the other frame 44 to the upper end of the fixed portion 72. The connection portion 73 is inclined (toward the outside of the container body 2) so as to move upward and away from the end face of the support member 26a in the left-right direction. In other words, the connection portion 73 connects the linking portion 71 and the fixed portion 72 so that the side wall 23 moves away from the end face (of the support member 26a) to which the fixed portion 72 is attached in the left-right direction.

[0047] Each block member 45 is a member for connecting three frames. Since all block members 45 connect three frames in substantially the same manner, the block member 45 connecting the right frame 41, the right frame 42, and the upper frame 43 will be described here. As shown in FIG. 4, each of the frames 41 to 43 has an L-shape, and is arranged so that the corner of the L faces the outside of the container body 2. A space 40 is defined by the rear end surface of the frame 41, the upper end surface of the frame 42, and the right end surface of the frame 43, and an opening 40a that communicates the space 40 with the storage space 20 is defined by the L-shaped recesses of each end surface. The block member 45 is accommodated in the space 40 and fixed to each end surface.

[0048] As shown in FIG. 7, the block member 45 includes a fixing portion 74 and a protruding portion 75 .

[0049] The fixed portion 74 is a portion that is fixed to the end faces of the frames 41 to 43. The fixed portion 74 includes a backing plate 74a, a backing plate 74b, and a backing plate 74c. Each of the backing plates 74a to 74c has a rectangular plate shape. The backing plates 74b and 74c are provided on the upper surface (main surface) of the backing plate 74a along two adjacent edges of the backing plate 74a. The backing plates 74a and 74b and 74c form substantially right angles with each other. The backing plates 74b and 74c form substantially right angles with each other.

[0050] Each of the backing plates 74a to 74c has an insertion hole penetrating the backing plate in the thickness direction. The inner diameter of the insertion hole is larger than the outer diameter of the shaft of a fastening member such as a bolt. A slit 74s is provided on the surface (back surface) of the backing plate 74b opposite to the backing plate 74a, into which a corner of the side wall 23 is fitted. A slit 74s is provided on the surface (back surface) of the backing plate 74c opposite to the backing plate 74a, into which a corner of the back wall 24 is fitted. Each slit 74s is substantially perpendicular to the upper surface of the backing plate 74a.

[0051] The protrusion 75 is a portion for holding the frames 41 to 43 from the accommodation space 20. The protrusion 75 has a shape that follows the periphery of the opening 40a. The protrusion 75 includes a fitting piece 75a, a fitting piece 75b, and a fitting piece 75c. The fitting piece 75a is provided on the back surface of the backing plate 74a, and has a shape that follows the L-shaped recess of the frame 42 to which the backing plate 74a is fixed. The fitting piece 75b is provided on the back surface of the backing plate 74b, and has a shape that follows the L-shaped recess of the frame 41 to which the backing plate 74b is fixed. The fitting piece 75c is provided on the back surface of the backing plate 74c, and has a shape that follows the L-shaped recess of the frame 43 to which the backing plate 74c is fixed.

[0052] The block member 45 thus configured is accommodated in the space 40. Specifically, the backing plate 74a is placed over the upper end surface of the frame 42, the backing plate 74b (its back surface) is placed over the rear end surface of the frame 41, and the backing plate 74c (its back surface) is placed over the right end surface of the frame 43. At this time, the protrusion 75 is fitted into the opening 40a, the corners of the side wall 23 are inserted into the slits 74s of the backing plate 74b, and the corners of the rear wall 24 are inserted into the slits 74s of the backing plate 74c.

[0053] In this state, a fastening member such as a bolt is inserted through the insertion hole of the backing plate 74a, and the fastening member is screwed into a screw hole provided in the upper end surface of the frame 42. Furthermore, a fastening member such as a bolt is inserted through the insertion hole of the backing plate 74b, and the fastening member is screwed into a screw hole provided in the rear end surface of the frame 41. Furthermore, a fastening member such as a bolt is inserted through the insertion hole of the backing plate 74c, and the fastening member is screwed into a screw hole provided in the right end surface of the frame 43.

[0054] Since the inner diameter of each insertion hole is larger than the outer diameter of the shaft of the fastening member, the fixing part 74 positions each frame in the fastening direction but not in other directions. For example, frame 41 is positioned in the front-rear direction because it abuts against backing plate 74b in the front-rear direction. Frame 42 is positioned in the up-down direction because it abuts against backing plate 74a in the up-down direction, and frame 43 is positioned in the left-right direction because it abuts against backing plate 74c in the left-right direction.

[0055] In the block member 45, the protrusions 75 are fitted into the openings 40a, so that the protrusions 75 press each frame against the accommodation space 20. For example, the frame 41 abuts against the edge of the fitting piece 75b in the up-down and left-right directions, so is positioned in the up-down and left-right directions. The frame 42 abuts against the edge of the fitting piece 75a in the front-back and left-right directions, so is positioned in the front-back and left-right directions. The frame 43 abuts against the edge of the fitting piece 75c in the up-down and front-back directions, so is positioned in the up-down and front-back directions.

[0056] As a result, each frame is positioned in the up-down, front-back, and left-right directions.

[0057] Each cover member 46 is a member for preventing particles from accumulating on the backing plate 74a. Each cover member 46 is made of, for example, the above-mentioned resin material. The cover member 46 is provided so as to cover the block member 45. The cover member 46 is provided with a through hole for reducing residual water and improving drying properties.

[0058] Next, the function and effect of the panel storage container 1 will be described with reference to Fig. 8(a) and Fig. 8(b). Fig. 8(a) is a diagram for explaining the connection structure in the panel storage container shown in Fig. 1. Fig. 8(b) is a diagram for explaining the connection structure in a panel storage container of a comparative example. As shown in Fig. 8(b), the panel storage container of the comparative example differs from the panel storage container 1 mainly in that it includes connection members 144 and 145 instead of the frame 44, and in that the lower end of the side wall 23 is bent outward.

[0059] The connecting member 144 is an L-shaped member extending in the front-rear direction. The connecting member 145 is a member having a male screw at the lower end and a female screw (screw hole) at the upper end. In the panel storage container of the comparative example, the side wall portion of the connecting member 144 is overlapped so as to contact the right end surface of each support member 26a in the left-right direction. In this state, a fastening member such as a bolt is inserted into an insertion hole penetrating the side wall portion of the connecting member 144 in the left-right direction, and the fastening member is screwed into a screw hole provided in the right end surface of the support member 26a.

[0060] Furthermore, the male screw of the connecting member 145 is screwed into the screw hole provided in the rail member 27, and the connecting member 144 is arranged on the rail member 27 so that the screw hole of the connecting member 145 and the insertion hole provided in the upper plate portion of the connecting member 144 overlap. The side end of the bottom plate 22 is placed on the upper surface of the upper plate portion of the connecting member 144, and the lower end of the side wall 23 is overlapped on the side end of the bottom plate 22. In this state, fastening members such as bolts are inserted into the insertion holes of the lower end of the side wall 23, the insertion holes of the side end of the bottom plate 22, and the insertion holes of the upper plate portion of the connecting member 144, and a screw is screwed into the screw hole of the connecting member 145. As a result, the side end of the bottom plate 22 is clamped by the lower end of the side wall 23 and the upper plate portion of the connecting member 144. As a result, the bottom plate 22 and the side wall 23 are connected, and the base portion 26 (support member 26a) and the rail member 27 are fixed.

[0061] 8(a), in the panel storage container 1, the frame 44 not only connects the bottom plate 22 and the side wall 23, but also fixes the support member 26a and the rail member 27. Therefore, there is no need to separately prepare a part for fixing the support member 26a and a part for fixing the rail member 27. As a result, it is possible to reduce the number of parts.

[0062] The connecting portion 71 of the frame 44 is provided with an engagement groove 71a for holding the bottom plate 22 and an engagement groove 71b for holding the side wall 23. According to this configuration, the bottom plate 22 and the side wall 23 are connected to each other simply by inserting the bottom plate 22 into the engagement groove 71a and the side wall 23 into the engagement groove 71b. Therefore, the bottom plate 22 and the side wall 23 can be connected to each other without using fastening members such as bolts. As a result, the number of parts can be further reduced. Furthermore, since there is no need to bend the lower end of the side wall 23, the structure of the side wall 23 can be simplified.

[0063] Similarly, the upper frame 41 is provided with an engagement groove 41a for holding the top plate 21 and an engagement groove 41b for holding the side wall 23. The lower frame 41 is provided with an engagement groove 41a for holding the bottom plate 22 and an engagement groove 41b for holding the side wall 23. The frame 42 is provided with an engagement groove 42a for holding the side wall 23 and an engagement groove 42b for holding the rear wall 24. The upper frame 43 is provided with an engagement groove 43a for holding the rear wall 24 and an engagement groove (not shown) for holding the top plate 21. The lower frame 43 is provided with an engagement groove 43a for holding the rear wall 24 and an engagement groove (not shown) for holding the bottom plate 22. The top plate 21, the bottom plate 22, the side wall 23, and the rear wall 24 are connected to each other simply by inserting them into the respective engagement grooves. Therefore, the top plate 21, the bottom plate 22, the side walls 23, and the rear wall 24 can be connected together without using fastening members such as bolts, etc. As a result, it is possible to further reduce the number of parts.

[0064] In the panel storage container of the comparative example, the side end of the bottom plate 22 is sandwiched between the upper plate portion of the connecting member 144 and the lower end portion bent outward of the side wall 23, and the side wall portion of the connecting member 144 is attached to the end surface of the support member 26a. Therefore, the side wall 23 is located near the end surface of the support member 26a in the left-right direction. On the other hand, in the panel storage container 1, the connection portion 73 connects the coupling portion 71 and the fixing portion 72 so that the side wall 23 is separated in the left-right direction from the end surface of the support member 26a to which the fixing portion 72 is attached. With this configuration, it is possible to expand the storage space 20 compared to the panel storage container of the comparative example. In addition, the positions of the inner peripheral surface and the outer peripheral surface of the flange 25 are determined in the SEMI standard. Therefore, the position of the side wall 23 can be adjusted between the inner peripheral surface and the outer peripheral surface of the flange 25 in the left-right direction. Therefore, the storage space 20 can be expanded by moving the side wall 23 closer to the outer peripheral surface of the flange 25.

[0065] Since the frames 41 to 44 are formed by extrusion molding, it is possible to increase the thickness of the frames 41 to 44. As a result, it is possible to improve the strength of the frames 41 to 44.

[0066] The panel storage container according to the present disclosure is not limited to the above embodiment.

[0067] In the above embodiment, two engagement grooves are provided in each of the frames 41 to 44, but three or more engagement grooves may be provided. For example, at least one of the top plate 21, the bottom plate 22, the side wall 23, and the rear wall 24 may be provided in double layers.

[0068] The connecting portion 73 may connect the coupling portion 71 and the fixed portion 72 such that the coupling portion 71 is located directly above the fixed portion 72 . [Explanation of symbols]

[0069] 1...panel storage container, 2...container body, 20...storage space, 21...top plate, 22...bottom plate, 23...side wall, 24...rear wall, 26...base portion, 26a...support member, 27...rail member, 44...frame (connecting member), 71...connecting portion, 71a...engagement groove (first engagement groove), 71b...engagement groove (second engagement groove), 72...fixing portion, 73...connecting portion.

Claims

1. A panel storage container for storing a plurality of panels, a bottom plate and side walls defining a storage space for storing the plurality of panels; A support member provided on the bottom plate for supporting the bottom plate; a rail member for placing the panel storage container on a transport device; a connecting member that connects the bottom plate and the side wall and fixes the support member and the rail member; A panel storage container comprising:

2. The panel storage container according to claim 1 , wherein the connecting member is provided with a first engagement groove for holding the bottom plate and a second engagement groove for holding the side wall.

3. the connecting member includes a connecting portion that connects the bottom plate and the side wall, a fixing portion that fixes the support member and the rail member, and a connecting portion that connects the connecting portion and the fixing portion, The fixing portion is attached to an end surface of the support member, The panel storage container according to claim 1 or 2, wherein the connection portion connects the coupling portion and the fixing portion such that the side wall is spaced apart from the end face.

Citation Information

Patent Citations

  • Cassette for substrate

    JP1998203584A

  • Sealed substrate cassette and manufacturing device, using the same

    JP1999145269A

  • Substrate container

    JP2000306988A

  • Glass substrate carrying box

    JP2003128180A

  • Panel storage container

    JP2019031297A