Image sensor, spectral division and filtering device, and image sensor manufacturing method

Abstract

[0003] Embodiments of the present application provide an image sensor, a spectral splitting and filtering device, and an image sensor manufacturing method for improving the utilization efficiency of light incident on the image sensor. The image sensor includes a metasurface, a substrate, and a photoelectric conversion unit. An array in the metasurface is disposed on top of the substrate. The metasurface includes multiple subunits. Each subunit includes an array including multiple columnar structures. The bottom of the substrate is disposed on the surface of the photoelectric conversion unit of the image sensor. The metasurface includes at least two media with different refractive indices. Each color unit corresponds to one of the multiple subunits. The photoelectric conversion unit includes an array for photoelectric conversion. The array of photoelectric conversion units is divided into multiple color regions. The metasurface is configured to refract incident light and send the refracted light to a corresponding color region in the array of photoelectric conversion units through the substrate. Additionally, each subunit refracts the incident light and then sends the refracted light to a color region in the corresponding color unit.

Description

[Technical field]

[0001] This application claims priority to International Application No. PCT / CN2019 / 130438, entitled “IMAGE SENSOR AND MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE,” filed with the China National Intellectual Property Office on December 31, 2019, the entire contents of which are incorporated herein by reference.

[0002] This application further claims priority to International Application No. PCT / CN2020 / 130020, entitled "IMAGE SENSOR, SPECTRAL DIVISION AND FILTERING DEVICE, AND IMAGE SENSOR MANUFACTURING METHOD," filed with the China National Intellectual Property Office on November 19, 2020, the entire contents of which are incorporated herein by reference.

[0003] The present application relates to the field of imaging, and in particular to image sensors, spectral splitting and filtering devices, and methods for manufacturing image sensors. [Background technology]

[0004] Image sensors can convert optical images into electrical signals and are widely applied in various electronic devices, such as digital cameras. The hardware of a digital camera mainly includes a lens module, an image sensor, and an electrical signal processor, etc. The lens module is configured to focus an optical image on the image sensor. The image sensor is configured to convert the optical signal of the image into an analog electrical signal, and input the analog electrical signal into the electrical signal processor. The electrical signal processor converts the analog electrical signal into a digital signal, and outputs a photo after data processing. As an optical-to-electrical converter, the image sensor is one of the core components of a digital camera, and the performance of the image sensor directly determines the quality of the output photo.

[0005] The photoelectric conversion element of the image sensor can convert light signals with different intensities into electrical signals with different intensities. However, the photoelectric conversion element itself cannot distinguish between light frequencies, i.e., cannot distinguish between colors. Therefore, an image directly acquired using an image sensor without a color collection layer is black and white. For the purpose of acquiring a color picture, a color filtering system needs to be used as a color collection layer to acquire color information of the picture. For example, based on the characteristic that the human eye is sensitive to the red, green, and blue (red green blue, RGB) spectrum, an RGB color filter is disposed on the photoelectric conversion element to form an RGB mosaic Bayer color filter system, so that a color picture can be acquired. However, in the conventional solution, the light utilization rate is relatively low, for example, the total light utilization rate in the case of white light incidence is only about 25%, the light utilization rate in the case of red light or blue light incidence is only about 15%, and the light utilization rate in the case of green light incidence is about 30%. Therefore, how to improve the light utilization rate has become an urgent problem to be solved. Summary of the Invention [Means for solving the problem]

[0006] SUMMARY OF THE DISCLOSURE The embodiments of the present application provide an image sensor, a spectral splitting and filtering device, and an image sensor manufacturing method to improve the utilization of light incident on the image sensor.

[0007] In consideration of this, a first aspect of the present application provides an image sensor including a metasurface, a substrate, and a photoelectric conversion unit. The metasurface includes a plurality of subunits. Each subunit includes an array including a plurality of columnar structures. The array in the metasurface is disposed on the top of the substrate. The bottom of the substrate is disposed on the surface (also referred to as the top) of the photoelectric conversion unit. The metasurface includes at least two media having different refractive indices. The photoelectric conversion unit includes an array for photoelectric conversion. The array of the photoelectric conversion unit is divided into a plurality of color regions. The metasurface is configured to refract incident light and send the refracted light through the substrate to a corresponding color region in the array of the photoelectric conversion unit.

[0008] The array of photoelectric conversion units can be divided into a number of color units, each color unit including at least four color regions, each color unit corresponding to one subunit, each subunit refracting incident light and then sending the refracted light to a color region in the corresponding color unit.

[0009] Therefore, in this embodiment of the present application, the incident light can be refracted using an array of metasurfaces including at least two media with different refractive indexes, so that light of different spectral bands can be refracted toward corresponding color regions in the photoelectric conversion unit, thereby improving light utilization. In addition, compared with the case where a Bayer color filter is arranged, the metasurface of the image sensor provided in the present application can refract light of multiple different spectral bands toward corresponding color regions, thereby avoiding the problem of low light utilization caused by filtering. This can be understood as follows: the metasurface can diffract the incident light so that light of different spectral bands can be sent to corresponding color regions in the photoelectric conversion unit, thereby improving light utilization.

[0010] In a possible embodiment, a color filtering structure is further disposed between the photoelectric conversion unit and the substrate, and the color filtering structure is divided into a plurality of color filtering areas, each color filtering area covers a corresponding one color area, and the color corresponding to each color area is the same as the color passing through the color filtering area covering the color area.

[0011] In this embodiment of the present application, a color filtering structure may be further disposed between the photoelectric conversion unit and the substrate to filter out signals different from signals of light in the spectral band corresponding to the color region, thereby reducing crosstalk.

[0012] In a possible embodiment, a lens is further disposed between each color filtering region and the substrate. In the present application, a lens may be further disposed between each color filtering region and the substrate to focus light incident on the color filtering region.

[0013] In a possible embodiment, the light of the multiple spectral bands corresponding to the multiple color regions includes one or more of green, red, blue, or infrared light. Therefore, in this embodiment of the present application, the photoelectric conversion unit can convert the light signals of the multiple spectral bands into electrical signals, and then generate images of more color channels.

[0014] In a possible embodiment, the material of the metasurface comprises one or more of the following: titanium dioxide, gallium nitride, or silicon carbide.

[0015] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the columnar structures included in the regions in the metasurface corresponding to each color unit form an angularly symmetric shape.

[0016] Therefore, for every four color regions arranged in the matrix, at least two of the same colors may correspond, and the colors corresponding to the two symmetric color regions may be the same. This embodiment provides a possible arrangement method that can be applied to an array of metasurfaces.

[0017] According to a second aspect, the present application provides a spectral splitting and filtering device including a metasurface and a substrate.

[0018] The metasurface includes a plurality of subunits. Each subunit includes an array including a plurality of pillar-like structures. The array in the metasurface is disposed on top of a substrate. The metasurface includes at least two media having different refractive indices. The metasurface is configured to refract incident light. The substrate is configured to transmit the light refracted by the metasurface.

[0019] Therefore, in this embodiment of the present application, the incident light can be refracted using an array of metasurfaces including at least two media with different refractive indexes, so that light of different spectral bands can be refracted toward different regions, thereby improving light utilization. In addition, compared with the case where a Bayer color filter is arranged, the metasurface of the spectral splitting and filtering device provided in the present application can refract light of multiple different spectral bands toward corresponding color regions, thereby avoiding the problem of low light utilization caused by filtering.

[0020] In a possible embodiment, the spectral splitting and filtering device can be applied to an image sensor. The image sensor includes a photoelectric conversion unit. A substrate is disposed on the surface of the photoelectric conversion unit. The photoelectric conversion unit includes an array for photoelectric conversion. The array of the photoelectric conversion units is divided into a plurality of color regions. The metasurface refracts the incident light and sends the refracted light through the substrate to the corresponding color regions in the array of the photoelectric conversion units. This can be understood as follows: the metasurface can diffract the incident light such that light of different spectral bands can be sent to the corresponding color regions in the photoelectric conversion unit, thereby improving the light utilization rate.

[0021] The array of photoelectric conversion units may be divided into a plurality of color units, each color unit including at least four color regions, each color unit corresponding to one subunit in the metasurface, each subunit refracts the incident light and then sends the refracted light to the color region in the corresponding color unit. In a possible embodiment, a color filtering structure is further disposed between the photoelectric conversion units and the substrate, the color filtering structure is divided into a plurality of color filtering regions, each color filtering region covers a corresponding one color region, and the color corresponding to each color region is the same as the color passing through the color filtering region covering the color region. In this embodiment of the present application, the color filtering structure may be further disposed between the photoelectric conversion units and the substrate to filter out signals different from the signals of the light in the spectral band corresponding to the color region, thereby reducing crosstalk.

[0022] In a possible embodiment, a lens is further disposed between each color filtering region and the substrate. In the present application, a lens may be further disposed between each color filtering region and the substrate to focus light incident on the color filtering region.

[0023] In a possible embodiment, the light of the multiple spectral bands corresponding to the multiple color regions includes one or more of green, red, blue, or infrared light. Therefore, in this embodiment of the present application, the photoelectric conversion unit can convert the light signals of the multiple spectral bands into electrical signals, and then generate images of more color channels.

[0024] In a possible embodiment, the material of the metasurface comprises one or more of the following: titanium dioxide, gallium nitride, or silicon carbide.

[0025] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the columnar structures included in the regions in the metasurface corresponding to each color unit form an angularly symmetric shape.

[0026] According to a third aspect, the present application provides an image sensor manufacturing method, comprising: A step of manufacturing a photoelectric conversion unit, the photoelectric conversion unit being configured to convert an optical signal into an electrical signal, the photoelectric conversion unit including an array for photoelectric conversion, the array of the photoelectric conversion unit being divided into a plurality of color regions; fabricating a spectral splitting and filtering device on a surface of a photoelectric conversion unit, the spectral splitting and filtering device comprising a metasurface and a substrate, the metasurface comprising a plurality of subunits, each of the subunits comprising an array comprising a plurality of columnar structures, the array in the metasurface being disposed on a top of the substrate, the bottom of the substrate being disposed on the surface of the photoelectric conversion unit, the metasurface comprising at least two media having different refractive indices, the photoelectric conversion unit comprising an array for photoelectric conversion, the surface of the photoelectric conversion unit being a surface for receiving an optical signal, the array of the photoelectric conversion unit being divided into a plurality of color regions, the metasurface being configured to refract incident light towards a corresponding color region in the array of the photoelectric conversion unit; The present invention provides a method for manufacturing an image sensor, comprising:

[0027] The array of photoelectric conversion units can be divided into a plurality of color units, each color unit including at least four color regions, each color unit corresponding to one subunit in the metasurface, each subunit refracts the incident light and then sends the refracted light to the color region in the corresponding color unit. Thus, in this embodiment of the present application, the metasurface of the spectral division and filtering device in the image sensor obtained by manufacturing has an array including at least two media with different refractive indexes to refract the incident light, so that the light of different spectral bands can be refracted toward the corresponding color region in the photoelectric conversion unit, thereby improving the light utilization rate. In addition, compared with the case where the Bayer color filter is arranged, the metasurface of the spectral division and filtering device provided in the present application can refract the light of multiple different spectral bands toward the corresponding color region, thereby avoiding the problem of low light utilization rate caused by filtering.

[0028] In a possible embodiment, before the step of manufacturing a spectral dividing and filtering device on the surface of the photoelectric conversion unit, the method further includes the steps of determining a plurality of arrays to obtain a plurality of spectral dividing structures and using the plurality of arrays as structures of the metasurface of the spectral dividing and filtering device; obtaining a plurality of evaluation values ​​that correspond one-to-one to the plurality of spectral dividing structures using a predetermined evaluation function, where the evaluation function is a function for calculating the light utilization efficiency of the spectral dividing structures; and selecting a first spectral dividing structure as the structure of the spectral dividing and filtering device from the plurality of spectral dividing structures if the plurality of evaluation values ​​includes at least one evaluation value that is greater than the predetermined value, where the evaluation value of the first spectral dividing structure is greater than the predetermined value.

[0029] Therefore, in this embodiment of the present application, the light utilization efficiency of each array can be calculated using a pre-established simulation model to obtain an array with a light utilization efficiency exceeding a preset value, and further, by manufacturing, to obtain an image sensor with a light utilization efficiency exceeding a preset value. This can be understood as follows: In order to improve the light utilization efficiency of the spectral splitting and filtering device and the image sensor, an array that meets the light utilization efficiency requirement target can be obtained inversely based on the specified light utilization efficiency requirement target using an optimization algorithm such as a genetic algorithm, a simulated annealing algorithm, or a gradient descent method.

[0030] In a possible embodiment, the method may further include a step of determining a plurality of arrays anew when the plurality of evaluation values ​​does not include at least one evaluation value greater than a predetermined value, and determining a spectral division structure as a structure of the spectral division and filtering device based on the newly determined plurality of arrays.

[0031] Therefore, in this embodiment of the present application, if the multiple arrays do not include an array whose evaluation value is greater than the preset value, the multiple arrays may be updated to obtain new multiple arrays until an array whose evaluation value is greater than the preset value is obtained.

[0032] In a possible embodiment, the step of determining the plurality of arrays may include the steps of determining a modification rate corresponding to each of the plurality of arrays based on the values ​​of the plurality of evaluation values, and modifying the plurality of arrays based on the modification rate corresponding to each of the arrays to obtain the plurality of updated arrays. In this embodiment of the present application, new arrays may be obtained by modification until an array having an evaluation value greater than a preset value is obtained.

[0033] In a possible implementation, the modification rate corresponding to each of the arrays includes a shape modification rate and / or a height modification rate, where the shape modification rate includes a probability or percentage of shape modification of each of the arrays and the height modification rate includes a probability or percentage of height modification of each of the arrays. Thus, in this embodiment of the present application, the arrays can be modified in different dimensions, such as shape or height, to obtain a number of different array configurations.

[0034] In a possible embodiment, the step of determining a new plurality of arrays may include the steps of: determining a probability value corresponding to each of the plurality of arrays based on the values ​​of the plurality of evaluation values; performing multiple samplings on the plurality of arrays based on the probability values ​​corresponding to each of the arrays to obtain a plurality of intermediate structures; determining modification rates of the plurality of intermediate structures based on the evaluation values ​​of the plurality of intermediate structures; and modifying the plurality of intermediate structures based on the modification rates corresponding to the plurality of intermediate structures to obtain a new plurality of arrays.

[0035] Therefore, in this embodiment of the present application, a probability value corresponding to each array may be determined based on the evaluation value of the array, and then sampling is performed based on the probability value of each array to select an array having a larger evaluation value, and the selected array is changed to obtain a new array until an array having an evaluation value larger than a preset value is obtained.

[0036] In a possible embodiment, the method may further include a step of manufacturing a color filtering structure between the photoelectric conversion unit and the substrate, wherein the color filtering structure is divided into a plurality of color filtering areas, each of the color filtering areas covers one corresponding color area, the color corresponding to each of the color areas is the same as the color passing through the color filtering area covering the color area, and each of the color filtering areas is for filtering out light of a color other than the color corresponding to the color area covered by the color filtering area.

[0037] In a possible embodiment, the method may further include fabricating a lens between each color filtering region and the substrate. In the present application, a lens may further be disposed between each color filtering region and the substrate to focus light incident on the color filtering region.

[0038] In a possible embodiment, the light of the multiple spectral bands corresponding to the multiple color regions includes one or more of green, red, blue, or infrared light. Therefore, in this embodiment of the present application, the photoelectric conversion unit can convert the light signals of the multiple spectral bands into electrical signals, and then generate images of more color channels.

[0039] In a possible embodiment, the material of the metasurface comprises one or more of the following: titanium dioxide, gallium nitride, or silicon carbide.

[0040] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the columnar structures included in the regions in the metasurface corresponding to each color unit form an angularly symmetric shape.

[0041] According to a fourth aspect, the present application further provides an electronic device, which may include the image sensor of the first aspect, or the image sensor obtained by manufacture of the third aspect.

[0042] According to a fifth aspect, the present application provides an array structure determination method applied to an image sensor. The image sensor includes a spectral splitting and filtering device and a photoelectric conversion unit. The spectral splitting and filtering device includes a metasurface and a substrate. The photoelectric conversion unit includes an array for photoelectric conversion. The array in the metasurface includes a plurality of subunits. Each subunit includes an array including a plurality of columnar structures. The array in the metasurface is disposed on a top of the substrate. The bottom of the substrate is disposed on a surface of the photoelectric conversion unit. The metasurface includes at least two media having different refractive indices. The array of the photoelectric conversion unit is divided into a plurality of color regions. The metasurface is configured to refract incident light toward a corresponding color region in the array of the photoelectric conversion unit. The method includes steps of determining a structure of the multiple arrays; evaluating the structures of the multiple arrays using an evaluation function to obtain an evaluation value corresponding to each of the multiple arrays, the evaluation function being a function for calculating the light utilization efficiency of the spectral division and filtering device when the multiple arrays are used as a metasurface of the spectral division and filtering device; and determining the structure of the metasurface of the spectral division and filtering device based on the evaluation value.

[0043] The array of photoelectric conversion units can be divided into multiple color units, each color unit including at least four color regions, each color unit corresponding to one subunit in the metasurface, and each subunit refracts incident light and then sends the refracted light to a color region in the corresponding color unit.

[0044] In a possible embodiment, the step of determining an array structure of the metasurface of the spectral division and filtering device based on the evaluation value may include a step of selecting one array from the at least one array whose evaluation value is greater than a preset value as the array structure of the metasurface of the spectral division and filtering device when the multiple arrays include at least one array whose evaluation value is greater than a preset value, or a step of updating the multiple arrays and determining an array structure of the metasurface of the spectral division and filtering device based on the updated multiple arrays when the multiple arrays do not include an array whose evaluation value is greater than the preset value.

[0045] In a possible implementation, the step of updating the plurality of arrays may include determining a change rate corresponding to each of the plurality of arrays based on values ​​of the plurality of evaluation values, and modifying the plurality of arrays based on the change rate corresponding to each of the arrays to obtain an updated plurality of arrays.

[0046] In a possible implementation, the change rate corresponding to each of the arrays includes a shape change rate and / or a height change rate, the shape change rate including a probability or percentage of shape change for each of the arrays, and the height change rate including a probability or percentage of height change for each of the arrays.

[0047] In a possible embodiment, the step of updating the multiple arrays may include the steps of determining a probability value corresponding to each of the multiple arrays based on values ​​of the multiple evaluation values; performing multiple samplings on the multiple arrays based on the probability values ​​corresponding to each of the arrays to obtain multiple intermediate structures; determining modification rates of the multiple intermediate structures based on the evaluation values ​​of the multiple intermediate structures; and modifying the multiple intermediate structures based on the modification rates corresponding to the multiple intermediate structures to obtain new multiple arrays.

[0048] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the columnar structures included in the regions in the metasurface corresponding to each color unit form an angularly symmetric shape.

[0049] According to a sixth aspect, the present application provides an array structure construction apparatus, comprising: a first determination unit configured to determine a structure of the plurality of arrays; an evaluation unit configured to evaluate a structure of the plurality of arrays using an evaluation function to obtain an evaluation value corresponding to each of the plurality of arrays, the evaluation function being a function for calculating a light utilization rate of the spectral splitting and filtering device when the plurality of arrays are used as a metasurface of the spectral splitting and filtering device; a second determining unit configured to determine a structure of a metasurface of the spectral division and filtering device based on the evaluation value, the spectral division and filtering device being included in an image sensor, the image sensor including a spectral division and filtering device and a photoelectric conversion unit, the spectral division and filtering device including a metasurface and a substrate, the photoelectric conversion unit including an array for photoelectric conversion, the spectral division and filtering device including a metasurface and a substrate, the array in the metasurface being disposed on a top of the substrate and a bottom of the substrate being disposed on a surface of the photoelectric conversion unit, the metasurface including an array including at least two media having different refractive indices, the array in the metasurface including a plurality of subunits, each subunit including an array including a plurality of columnar structures, the array of the photoelectric conversion unit being divided into a plurality of color regions, and the metasurface being configured to refract incident light toward a corresponding color region in the array of the photoelectric conversion unit; The present invention provides an array structure construction device comprising:

[0050] The array of photoelectric conversion units can be divided into multiple color units, each color unit including at least four color regions, each color unit corresponding to one subunit in the metasurface, and each subunit refracts incident light and then sends the refracted light to a color region in the corresponding color unit.

[0051] In a possible embodiment, the first determination unit is particularly configured to, when the multiple arrays include at least one array having an evaluation value greater than a preset value, select one array from the at least one array having an evaluation value greater than a preset value as the array structure of the metasurface of the spectral division and filtering device.

[0052] The array structure construction apparatus may further include an updating unit configured to update the plurality of arrays when the plurality of arrays does not include an array with an evaluation value greater than a preset value.

[0053] The second determining unit is further configured to determine an array structure of the metasurface of the spectral splitting and filtering device based on the updated plurality of arrays.

[0054] In a possible implementation, the update unit is particularly configured to determine a modification rate corresponding to each of the plurality of arrays based on values ​​of the plurality of evaluation values, and to modify the plurality of arrays based on the modification rate corresponding to each of the arrays to obtain an updated plurality of arrays.

[0055] In a possible implementation, the update unit is particularly configured to: determine a probability value corresponding to each of the plurality of arrays based on values ​​of the plurality of evaluation values; perform a plurality of samplings on the plurality of arrays based on the probability values ​​corresponding to each of the arrays to obtain a plurality of intermediate structures; determine modification rates of the plurality of intermediate structures based on the evaluation values ​​of the plurality of intermediate structures; and modify the plurality of intermediate structures based on the modification rates corresponding to the plurality of intermediate structures to obtain a new plurality of arrays.

[0056] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the columnar structures included in the regions in the metasurface corresponding to each color unit form an angularly symmetric shape.

[0057] According to a seventh aspect, an embodiment of the present application provides an array structure construction apparatus. The array structure construction apparatus may also be referred to as a digital processing chip or chip. The chip includes a processing unit and a communication interface. The processing unit obtains program instructions via the communication interface. The program instructions are executed by the processing unit. The processing unit is configured to perform a processing-related function according to the fifth aspect or any one of the optional implementations of the fifth aspect.

[0058] According to an eighth aspect, an embodiment of the present application provides a computer-readable storage medium comprising instructions which, when executed on a computer, enable the computer to perform a method according to the fifth aspect or any one of the optional implementations of the fifth aspect.

[0059] According to a ninth aspect, an embodiment of the present application provides a computer program product comprising instructions, which when executed on a computer, enable the computer to perform a method according to the fifth aspect or any one of the possible implementations of the fifth aspect. [Brief description of the drawings]

[0060] [Figure 1] FIG. 1 is a schematic diagram of a structure of an electronic device according to an embodiment of the present application. [Diagram 2] 1 is a schematic diagram of the structure of an image sensor according to the present application; [Diagram 3] 1 shows the structure of a Bayer color filter according to the present application. [Figure 4] 3 illustrates another Bayer color filter structure according to the present application. [Diagram 5]1 is a schematic diagram of optical signal transmission of spectral channels. [Figure 6] 1 is a schematic diagram of refraction and reflection of an optical signal according to the present application; [Figure 7] 1 is a schematic diagram of the structure of a spectral splitting and filtering device according to the present application; [Figure 8] 1 is a schematic diagram of the structure of an image sensor according to the present application; [Figure 9A] FIG. 2 is a schematic diagram of the structure of another spectral splitting and filtering device according to the present application. [Figure 9B] FIG. 1 is a schematic diagram of the structure of a metasurface according to the present application. [Figure 10] FIG. 2 is a schematic diagram of another image sensor structure according to the present application. [Figure 11] FIG. 2 is a schematic diagram of the structure of a photoelectric conversion unit according to the present application. [Figure 12] FIG. 2 is a schematic diagram of another image sensor structure according to the present application. [Figure 13] FIG. 2 is a schematic diagram of another image sensor structure according to the present application. [Figure 14] 1 is a schematic flow chart of an array structure determination method according to the present application. [Figure 15] FIG. 1 is a schematic diagram of the structure of another metasurface according to the present application. [Figure 16] 1 is a schematic flow chart of an image sensor manufacturing method according to the present application. [Figure 17] 1 is a schematic flow chart of an image sensor manufacturing method according to the present application. [Figure 18] FIG. 2 is a schematic diagram of the light utilization spectrum of a spectral splitting and filtering device according to the present application. [Figure 19] 2 is a schematic diagram of the distribution of light intensity in a photoelectric conversion unit according to the present application; [Figure 20] 1 is a schematic diagram of the structure of an array structure construction apparatus according to the present application; DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0061] The following describes the technical solutions of the embodiments of the present application with reference to the accompanying drawings of the embodiments of the present application. Obviously, the described embodiments are only some, but not all, of the embodiments of the present application. All other embodiments obtained by those skilled in the art based on the embodiments of the present application without creative efforts shall be within the protection scope of the present application.

[0062] In the present specification, claims, and accompanying drawings of this application, terms such as "first," "second," "third," and "fourth," if any, are intended to distinguish between similar objects and do not necessarily indicate a particular order or sequence. Where used in such a manner, they are interchangeable where appropriate, and thus it should be understood that the embodiments described herein may be performed in a different order than illustrated or described herein. Furthermore, the terms "comprise," "comprise," and any other variations thereof are meant to refer to a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a list of steps or units is not necessarily limited to those steps or units and may include other steps or units that are not expressly listed or that are inherent to such process, method, product, or device.

[0063] In the description of this application, "plurality" means two or more, unless specified otherwise precisely and specifically.

[0064] In this application, unless expressly specified and limited otherwise, terms such as "attached," "connected," "connected," "fixed," and "set" should be understood broadly, for example, may be a fixed connection, a removable connection, an integrated connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection through an intermediate medium, an internal communication between two elements, or an interactive relationship between two elements. Those skilled in the art may understand the specific meaning of the aforementioned terms in this application based on the specific situation.

[0065] In the description of this application, it will be understood that orientations or positional relationships indicated by terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inside," or "outside" are orientations or positional relationships as shown in the accompanying drawings, are intended merely to explain and simplify the description of this application, and are not intended to indicate or imply that the devices or components shown have a particular orientation or are to be formed and operated in a particular orientation, and therefore should not be understood as limitations on this application.

[0066] Some terms are used in the present specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different terms to name the same components. In this specification and the following claims, components are not distinguished based on differences in names, but instead, differences in the functions of the components are used as the basis for distinction. "Including" or "comprising" referred to in this specification and the claims are open-ended terms and should therefore be interpreted as "including but not limited to" or "comprising but not limited to".

[0067] For ease of understanding, the following will first explain and explain technical terms used in this application.

[0068] Metamaterial: Broadly speaking, a metamaterial is defined as a composite of artificially designed unit structures that possess physical properties not found in conventional natural materials. The physical properties of metamaterials are determined primarily by the structure and arrangement of the subwavelength (much shorter than the wavelength) unit structures.

[0069] Metasurface: A metasurface is a two-dimensional form of metamaterial. In this application, a metasurface is: a focal point, where when a light beam passes through the metasurface structure, the light beam converges to some point behind the metasurface structure, and the some point where the light beam converges is the focal point; and A measurement method for measuring the convergence or divergence of light in an optical system. In an embodiment of the present application, the focal length is the distance from the optical center of the metasurface structure to the focal point when an object at infinity is imaged and forms a clear image on the focal plane through the metasurface structure, and can also be understood as the vertical distance from the optical center of the metasurface structure to the focal plane. Includes.

[0070] The technical solutions of the present application are described below with reference to the accompanying drawings.

[0071] The electronic device provided in the embodiments of the present application may be a handheld device, an in-vehicle device, a wearable device, a computing device, or another processing device connected to a wireless modem, or may be a digital camera, a cellular phone, a smartphone, a personal digital assistant (PDA) computer, a tablet computer, a laptop computer, a machine type communication (MTC) terminal, a point of sales (POS), an in-vehicle computer, a head-mounted device, a wearable device (such as a wristband or smartwatch), a security device, a virtual reality (VR) device, an augmented reality (AR) device, or another electronic device with imaging capabilities.

[0072] A digital camera is used as an example. A digital camera is a camera that uses a photoelectric sensor to convert an optical image into a digital signal. Traditional cameras record images based on the changes in photosensitive chemicals on the film. Meanwhile, the sensor of a digital camera is a photosensitive charge-coupled device (CCD) or complementary metal-oxide-semiconductor (CMOS). Compared with traditional cameras, digital cameras directly use photoelectric conversion image sensors, and thus have advantages such as higher convenience, high speed, repeatability, and higher timeliness. With the development of CMOS processing technology, digital cameras have become more and more powerful in function, almost completely replacing traditional film cameras, and are very widely applied in fields such as home appliances, security protection, human-computer interaction, computer vision, and autonomous driving.

[0073] 1 is a schematic diagram of an electronic device according to the present application. As shown in the figure, the electronic device may include a lens module 110, an image sensor 120, and an electrical signal processor 130. The electrical signal processor 130 may include an analog-to-digital (A / D) converter 131 and a digital signal processor 132. The analog-to-digital converter 131 is an analog-to-digital converter configured to convert an analog electrical signal into a digital electrical signal.

[0074] It should be understood that the electronic device shown in Figure 1 is not limited to including the aforementioned components, and may further include more or less other components, such as a battery, a flash, a button, and a sensor. Although only an electronic device with an image sensor 120 attached thereto is used as an illustrative example in this embodiment of the present application, the elements attached to the electronic device are not limited thereto.

[0075] The optical signal reflected by the object is collected through the lens module 110, and the object is imaged at the image sensor 120. The image sensor 120 converts the optical signal into an analog electrical signal. The analog electrical signal is converted into a digital electrical signal using an analog-to-digital (A / D) converter 131 in the electrical signal processor 130, and the digital electrical signal is processed using the digital signal processor 132, for example, the digital electrical signal is optimized by a series of complex mathematical algorithm operations to finally output an image. The electrical signal processor 130 may further include an analog signal pre-processor 133 configured to pre-process the analog electrical signal sent by the image sensor and then output the pre-processed analog electrical signal to the analog-to-digital converter 131.

[0076] The performance of the image sensor 120 affects the quality of the final output image. The image sensor 120 may also be called a photosensitive chip or photosensitive element, and contains hundreds of thousands to millions of photoelectric conversion elements. When the image sensor is exposed to light, an electric charge is generated, which is converted into a digital signal using an analog-to-digital conversion chip.

[0077] Typically, the image sensor 120 may use a color filtering system to obtain color information of an image. The color filtering system may be a Bayer color filter system. Specifically, the Bayer color filter covers the photoelectric conversion elements of the image sensor 120 to form a color filtering system. The photoelectric conversion elements may be photodiodes. The Bayer color filter may also be called a Bayer light filter. FIG. 2 is a schematic diagram of an image sensor based on a Bayer color filter system. The image sensor includes a microlens 121, a Bayer color filter 122, and a photodiode 123. The Bayer color filter 122 includes an RGB color filter. The RGB color filter is arranged on the grid of the photodiode to form an RGB mosaic color filtering system. Mimicking the biological characteristic that the number of green-sensitive photoreceptor cells on the retina of the human eye is maximum, the Bayer color filter is usually arranged in the form of RGGB.

[0078] FIG. 3 shows the structure of an image sensor based on a Bayer color filter system, and FIG. 4 is a schematic diagram of the structure of one color pixel unit of the image sensor. As shown in FIG. 3 or FIG. 4, one color pixel unit includes four color filters 122 and four photodiode 123 pixel cells corresponding to the four color filters. The four color filters 122 are arranged in the form of RGGB, that is, a red color filter and a blue color filter are arranged diagonally, and two green color filters are arranged diagonally. The photosensitive area of ​​the photodiode 123 is at a central position within the area occupied by the photodiode pixel cell, therefore the color pixel unit further includes an array of microlenses 121 above the color filters 122. The array of microlenses 121 is configured to focus the optical signal on the photosensitive area of ​​the photodiode 123 to ensure light utilization. The array of microlenses 121 focuses the incident optical signal on the four color filters 122 separately. After the optical filtering by four color filters 122, the filtered optical signal is sent to the photodiode 123 covered by the four color filters respectively, and further, the light intensity information and approximate color information of the image are obtained simultaneously. Then, the color image closest to reality can be obtained by optimization and restoration using software interpolation algorithm.

[0079] However, the light utilization rate of image sensors based on the Bayer color filter system is very low. For each color pixel channel, sometimes called a spectral channel, more than 70% of the light signal is filtered out by the Bayer color filter, and only less than 30% of the light can reach the photodiode and be converted into an electrical signal for final computational imaging. Figure 5 is a schematic diagram of the light flux of the spectral channel in the color pixel unit. As shown in Figure 5, for the color pixel unit arranged in the RGGB format, when the incident light is white light, i.e., when it contains light signals of all wavelengths in the range of 400 nanometers to 700 nanometers, if the color filter has an ideal color filtering effect, the theoretical maximum of the light flux after color filtering is only 1 / 3 of the incident light flux, when the incident light is red light or blue light, the theoretical maximum of the light flux after color filtering is 1 / 4 of the incident light flux, and when the incident light is green light, since there are two green channels, the theoretical maximum of the light flux after color filtering is 1 / 2 of the incident light flux. Moreover, in reality, the color filtering effect of the color filter cannot be perfect in reality, that is, the color filtering and light transmission efficiency of the color filter cannot reach 100%, so that the actual light utilization rate is lower. When the incident light is white light, the total light utilization rate is only about 25%. When the incident light is red light or blue light, the light utilization rate is about 15%. When the incident light is green light, the light utilization rate is about 30%.

[0080] Alternatively, in some scenarios, metasurfaces with spectral splitting functions are used instead of color filtering systems. According to the generalized Snell's law, the direction of reflected and transmitted light depends not only on the refractive index of the interface material but also on the phase gradient distribution of the interface. For example, as shown in FIG. 6, the phase gradient distribution can be calculated using an equation such as n1sin(θ2)-n2sin(θ1)=(λ0 / 2π)(dφ / dx). The required spatial phase distribution can be calculated based on the spectral splitting function of the metasurface and the generalized Snell's law, and then the required geometric phase is generated at the required wavelength using an anisotropic nanofin structure, thereby implementing the spectral splitting function. However, all metasurfaces implement the spectral splitting function using the geometric phase generated by the anisotropic nanofin structure, and the inherent property of the geometric phase is that the geometric phase only works on one type of circularly polarized light, while another type of circularly polarized light becomes undesired stray light and cannot be utilized, resulting in up to 50% of the light being utilized. In addition, another inherent property of nanofin structure is that each nanofin structure generates the same geometric phase for different frequency light, therefore, in order to use the geometric phase generated by the nanofin structure to perform the spectral division function of different frequency light, different sized nanofins need to be arranged inside one unit structure, and each sized nanofin acts on different spectral bands, thereby achieving the spectral division effect. However, this method will definitely result in a very low light utilization rate, since different sized nanofins have a negative scattering effect on the light that is not in the corresponding operating band.

[0081] Therefore, the present application provides a spectral splitting and filtering device applied to an image sensor to improve light utilization efficiency. An efficient pixel-level spectral splitting function is implemented by using an integrated pixel-level spectral splitting and filtering device, thereby improving the light utilization efficiency of a color image sensor.

[0082] In the following, the spectral dividing and filtering device, the image sensor, and the image sensor manufacturing method provided in the present application will be described in detail separately.

[0083] First, the present application provides an image sensor, which includes a spectral splitting and filtering device and a photoelectric conversion unit, the spectral splitting and filtering device being configured to refract incident light such that light in different spectral bands can be sent to corresponding color regions of the photoelectric conversion unit.

[0084] Provided in this application, the structure of a spectral splitting and filtering device applied to an image sensor is described.

[0085] FIG. 7 is a schematic diagram of the structure of a spectral splitting and filtering device according to the present application.

[0086] The spectral splitting and filtering device includes a metasurface 701 and a substrate 702.

[0087] The array of metasurfaces 701 is disposed on top of a substrate 702, i.e., the top of the substrate 702 is for supporting the metasurfaces.

[0088] The metasurface 701 includes an array including at least one pillar structure. The array of metasurfaces 701 is configured to refract light. The metasurface 701 includes two media having different refractive indices. For example, the metasurface may be divided into multiple gratings, where each grating is filled with one type of medium, such as titanium dioxide or air.

[0089] The metasurface includes a plurality of subunits, each of which includes an array including a plurality of pillar structures.

[0090] Optionally, the top surface of each of the plurality of pillar structures may include one of a triangle, a square, or a hexagon, etc., and the shapes of all of the plurality of pillar structures may be the same or different. This may be understood as follows, where the shape of the top surface of each pillar structure of the metasurface is a shape that can be seamlessly joined, and the top surface faces the metasurface and is in a direction that is perpendicular to the metasurface.

[0091] In addition, the metasurface may include an array including a plurality of pillar structures, and the shape of the top surface of each pillar structure of the metasurface may be seamlessly joined such that the pillar structures are adjacent to each other such that the pillar structures may be joined into a larger structure, for example, the pillar structures may be full cube structures, and the adjacent full cubes may be joined into a rectangular parallelepiped shape or another irregular shape, etc.

[0092] The substrate 702 typically includes a material with a light transmittance greater than a certain value, such as silicon dioxide, polymethyl methacrylate (PMMA), or polycarbonate (PC), etc. Alternatively, the substrate 702 may be a hollow structure to ensure high transmittance.

[0093] The structure of the image sensor including the spectral splitting and filtering device may be that shown in FIG. 8, in which the bottom of the substrate is disposed on the surface or top of the photoelectric conversion unit 703 of the image sensor. The photoelectric conversion unit 703 includes an array for photoelectric conversion. The array of the photoelectric conversion units is divided into a plurality of color regions. The metasurface is configured to refract the incident light and send the refracted light through the substrate to the corresponding color region in the array of the photoelectric conversion units. For example, each pixel unit of the photoelectric conversion unit may be divided into four color regions, such as red, green, green, and blue (RGGB). In this case, after the incident light is refracted by the metasurface, the red light is sent to the R region of the photoelectric conversion unit through the substrate, the green light is sent to the G region through the substrate, and the blue light is sent to the B region through the substrate.

[0094] The array of photoelectric conversion units may be divided into a number of color units (sometimes called pixel units or color pixel units). Each color unit includes at least four color regions. Each color unit corresponds to one subunit in the metasurface. Each subunit refracts incident light and then sends the refracted light through the substrate to a color region in the corresponding color unit. This may be understood as follows, where the metasurface may be understood as being disposed above the surface of the photoelectric conversion units, and the region in the metasurface corresponding to each color unit includes a number of columnar structures, and the number of columnar structures are for reflecting the incident light to a corresponding color region in the color unit below the number of columnar structures.

[0095] It will be understood that the structure of the metasurface 701 shown in Fig. 8 is one subunit, and the photoelectric conversion unit 703 can be understood as one color unit including four color regions. One subunit corresponds to one color unit, and the subunit is configured to refract incident light and then send the refracted light to a corresponding color region in the color unit through the substrate 702.

[0096] It should be noted that the metasurface may include multiple subunits, each subunit includes an array including multiple columnar structures, and each subunit may have the same array structure. After the structure of one subunit is determined, the structure of the metasurface of the image sensor is determined. Of course, each subunit may alternatively have a different array structure. This may be specifically adjusted based on the actual application scenario. In the following embodiments of the present application, the structure of only one subunit is used as an example for explanation, and the details will not be described again below.

[0097] Therefore, in the spectral splitting and filtering device provided in the embodiment of the present application, light of different colors is refracted using an array in the metasurface, including a columnar structure, and when the spectral splitting and filtering device is applied to a sensor, the incident light is refracted by the metasurface to perform spectral splitting, and then sent to the corresponding color region in the photoelectric conversion unit. This can be understood as follows: the spectral splitting and filtering device has a medium metasurface or a medium diffractive surface, has a two-dimensional barcode type structural characteristic, and has multiple spectral channels to perform spectral splitting of multiple colors and perform the function of efficient spectral splitting. In addition, the array of metasurface structures can refract the incident light, thereby reducing the scattering phenomenon and improving the light utilization rate. This can also be understood as follows: the metasurface performs diffraction of the incident light, so that light of different spectral bands can be sent to the corresponding color region in the photoelectric conversion unit, especially in a sub-wavelength scenario. The metasurface diffracts the incident light, and compared with the Bayer color filter and the nanofin metasurface structure, the metasurface provided in the present application can perform diffraction of light of different spectral bands, thereby improving the light utilization rate.

[0098] Specifically, the array structure of the metasurface 701 may include at least two media having different refractive indices. Using two media as an example, at least one of the two media may constitute a columnar structure to constitute the array of the metasurface.

[0099] Optionally, the material of the metasurface includes one or more of the following: titanium dioxide, gallium nitride, silicon carbide, or another material with a high refractive index. For example, the array of the metasurface may include a columnar structure including titanium dioxide, where the columnar structures constitute the array, and air may be selected as another type of medium in the metasurface. For example, the metasurface may include titanium dioxide and air. The refractive index of titanium dioxide is greater than that of air. In this case, the structure of the metasurface may be that shown in FIG. 9A, the material of the columnar structures may be titanium dioxide, and the other type of medium may be air. This may be understood as follows, where air and the columnar structures including titanium dioxide form an array. The top view of the array may be that shown in FIG. 9B. This corresponds to the following, where the metasurface may be divided into multiple lattices, where the size of the lattices may be the same or different. Here, an example is used in which the lattices are square lattices of the same size. Specifically, for example, the height of the columnar structure of the metasurface 701 may be 500 nm, the width of each square grating may be 100 nm, and the transparent substrate 702 includes silicon dioxide glass and has a thickness of 3.5 μm. The pixel value of the sensor in which the metasurface is used is 800 nm, that is, the metasurface size corresponding to one pixel unit is 1.6 μm. Then, once the spectral splitting and filtering device is fabricated, the metasurface can be obtained by filling the grating with a medium. Each type of medium may be in a columnar structure, and the columnar structures may have the same size and shape or different sizes and shapes. Furthermore, one type of medium may be air, and the other type of medium may be a material whose refractive index is different from that of air. This may save material and improve the manufacturing efficiency of the spectral splitting and filtering device.

[0100] For example, a method of sending incident light refracted by a metasurface will be described using an example. As shown in FIG. 10, FIG. 10(a) is a schematic diagram of a structure of one color pixel unit according to an embodiment of the present application. As shown in FIG. 10(a), one color pixel unit may include one metasurface 701 and four adjacent photoelectric conversion elements arranged two-dimensionally, which are arranged under the metasurface structure. The four photoelectric conversion elements correspond to the photoelectric conversion element A, the photoelectric conversion element B, the photoelectric conversion element C, and the photoelectric conversion element D in FIG. 10(b), respectively. The four photoelectric conversion elements may be arranged in a RGGB manner. For example, the photoelectric conversion element A, the photoelectric conversion element B, the photoelectric conversion element C, and the photoelectric conversion element D may correspond to three spectral bands of red light, green light, green light, and blue light, respectively. The metasurface 701 can focus the red light, green light, and blue light on the photosensitive positions of the photoelectric conversion element A, the photoelectric conversion element B, the photoelectric conversion element C, and the photoelectric conversion element D, respectively. The following will be described with reference to the transmission paths of the refracted light and the reflected light when the spatial transmission phase gradient of the interface is zero as shown in FIG. 6, and the transmission paths of the refracted light and the reflected light when the spatial transmission phase gradient of the interface is not zero. The spatial transmission phase is generated in the tangential direction of the array of the metasurface 701 to obtain the spatial transmission phase gradient. The spatial transmission phase gradient is for sending the optical signal of each spectral band to the photoelectric conversion element corresponding to the spectral band. In this embodiment of the present application, the transmission phase may also be called the transmission phase.

[0101] Due to the existence of the spatial transmission phase gradient, the incident optical signal and the metasurface 701 can form a certain resonance effect. When the optical signals of different spectral bands pass through the metasurface 701, different transmission phase changes occur in the metasurface 701, which changes the refraction angle of the optical signal. That is, the propagation direction of the optical signal is controlled so as to send the optical signals of different spectral bands to the photoelectric conversion elements corresponding to the different spectral bands.

[0102] It should be understood that the above-mentioned spectral band values ​​are merely used as reference data for explanation, and should not be considered as limitations on the embodiments of the present application. The specific frequency range of each spectral channel is subject to the actual overall spectral design of the image sensor and the actual spectral response range of the photoelectric conversion element. The number of photoelectric conversion elements in one color pixel unit shown in FIG. 10 is merely an example, and does not constitute a limitation on the embodiments of the present application.

[0103] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the surfaces of the columnar structures included in the metasurface region above each color unit form an angularly symmetric shape.

[0104] For example, the colors corresponding to every four pixel cells arranged as a matrix in the photoelectric conversion unit may be arranged in an RGGB manner. For example, the colors corresponding to the color regions in the upper left and upper right corners are green, and the colors corresponding to the other two corners are red and blue. Correspondingly, with respect to the structure of the metasurface shown in Figures 7 to 9B, the top view of the array including the structure in the metasurface may be a symmetric structure, so that the incident light can be refracted by the structure of the metasurface and then sent to the corresponding color region in the photoelectric conversion unit.

[0105] 11 is a schematic diagram of an array of photoelectric conversion units 703. As shown in FIG. 11, each photoelectric conversion unit 703 may correspond to four photoelectric conversion elements, and the four photoelectric conversion elements are arranged in an RGGB manner. In addition, an anti-reflection plate may be further arranged on the photoelectric conversion unit to reduce the reflection of the optical signal by the photoelectric conversion unit, thereby further improving the light utilization rate.

[0106] It should be understood that the number of photoelectric conversion elements in one photoelectric conversion unit 703 shown in Figures 10 and 11 is merely an example. Alternatively, the actual number of photoelectric conversion elements may be more or less. The four photoelectric conversion elements mentioned herein do not constitute a limitation on the embodiments of the present application.

[0107] Therefore, in the embodiment of the present application, an array including a columnar structure is arranged on the metasurface of the spectral splitting and filtering device to refract light of different spectral bands. Compared with the conventional Bayer color filter, in the present application, light of different spectral bands is refracted, so that the light of each spectral band is sent to a corresponding region in the photoelectric conversion unit, thereby avoiding the low light utilization rate caused by the filtering of the color filter.

[0108] Usually, refracting light using nanofin structures is effective only for one type of circularly polarized light, and another type of circularly polarized light becomes unwanted stray light and cannot be utilized. As a result, the light utilization efficiency is greatly reduced. On the other hand, the spectral splitting and filtering device provided in the present application can refract all incident polarizations, not just one type of circularly polarized light, and has little polarization dependency. Therefore, the spectral splitting and filtering device provided in the present application can greatly improve the light utilization efficiency.

[0109] In addition, when the nanofin structure is for refracting light, each nanofin structure generates the same geometric phase for light of different frequencies, therefore, in order to use the geometric phase generated by the nanofin structure to perform the spectral division function of light of different frequencies, nanofins of different sizes need to be arranged inside one unit structure, and each size of nanofin acts on a different spectral band, thereby achieving the spectral division effect. However, this method will certainly result in a very low light utilization rate, since nanofins of different sizes have a negative scattering effect on light that is not in the corresponding operating band. Meanwhile, in the embodiment of the present application, the array structure of the metasurface may include at least two media with different refractive indexes, and the columnar structure has the required response to light of different spectral bands, thereby avoiding the problem of low utilization rate of unrefracted light for nanofins of different sizes to refract light of different spectral bands. In this way, the light utilization rate is further improved.

[0110] Optionally, in order to reduce the reflection of incident light and improve light utilization efficiency, the surface of the photoelectric conversion unit may further include an anti-reflection layer, or the anti-reflection layer is disposed between the surface of the photoelectric conversion unit and the substrate.

[0111] In a possible embodiment, a color filtering structure is further disposed between the photoelectric conversion unit 703 and the substrate 702, and the color filtering structure is divided into a plurality of color filtering regions, each color filtering region covers a corresponding one color region, and the color corresponding to each color region is the same as the color passing through the color filtering region covering the color region. For example, the color filtering structure may be four color filters, or another medium through which light of a specified spectral band passes.

[0112] For example, as shown in Fig. 12, a color filter 704 may be disposed between the photoelectric conversion unit and the substrate, and the color filter may be divided into a plurality of color filtering regions for filtering out light other than light in a particular spectral band. For example, if the color region corresponding to the color filter is green, green may pass through the color filter, and colors other than green are filtered out by the color filter.

[0113] Therefore, in this embodiment of the present application, a color filtering structure may be added to filter the light sent to each color region within the photoelectric conversion unit and filter out light that is not in a specific spectral band, thereby avoiding interference with the optical signal conversion performed by the photoelectric conversion unit and further improving light utilization.

[0114] In a possible embodiment, a lens is further disposed between each color filtering region and the substrate.

[0115] For example, as shown in Fig. 13, a micro convex lens 705 (abbreviated as microlens) is disposed between each color filtering region and the substrate. Usually, the size of each microlens is the same as the size of the color filtering region covered by the microlens, so as to converge the light sent to the color filtering region, thereby reducing the scattering of the light sent to the color region, and further improving the light utilization rate. Therefore, in this embodiment of the present application, color filters and microlenses can be used in the spectrum splitting and filtering device to reduce the crosstalk of each channel.

[0116] In a possible implementation, the multiple spectral bands of light of colors corresponding to the multiple color regions include one or more of green, red, blue, or infrared (IR) radiation.

[0117] For example, the number of spectral splitting spectral channels of the spectral splitting and filtering device provided in the present application is 2 or more, and the spectral bands range from ultraviolet to near infrared, depending on the purpose of the image sensor and the spectral response range of the photosensitive layer. The number of spectra and the channel arrangement depend on the purpose of the image sensor. For example, when the image sensor is used for visible light imaging, the spectral band range is the visible light range of 400-700 nm, the number of spectra is 3, and the channel arrangement is RGGB; when the image sensor is used for multispectral imaging, the spectral band range may be 400-700 nm, and the number of spectra may be 7; when the image sensor is used for visible light and near infrared imaging, the spectral band range may be 400-1000 nm, the number of spectra is 4, and the channel arrangement may be RGB and IR. Therefore, in this embodiment of the present application, multiple types of visible or invisible light spectral splitting may be implemented to adapt to multiple scenarios. The generalization ability is strong.

[0118] The structure of the spectrum splitting and filtering device provided in the present application has been described above using an example. From the above structure, it can be known that the metasurface of the spectrum splitting and filtering device plays an important role in improving light utilization, and there are multiple array arrangement methods for the metasurface. In the following, a method for determining the array structure of the metasurface of the spectrum splitting and filtering device is described.

[0119] With reference to Figure 14, the present application provides an array structure determination method applied to an image sensor. The image sensor includes a spectrum division and filtering device and a photoelectric conversion unit. The spectrum division and filtering device can refer to the spectrum division and filtering device of Figures 7 to 13, and details are not described here again. The following describes the detailed steps of the array structure determination method applied to the image sensor provided in the present application.

[0120] 1401. Determine the structure of multiple arrays.

[0121] The structures of the multiple arrays may be obtained by searching a preset search space, or may be randomly generated structures. Each array may be a mesh structure, a honeycomb structure, etc. The heights of the structures may be the same or different. The heights of each structure may also be obtained by searching a preset search space. It will be understood that different array structures and ranges of height values ​​may be preset in the search space, and then the multiple array structures and the heights corresponding to each array structure are obtained by sampling from the search space.

[0122] For example, in order to quickly obtain multiple arrays, multiple array structures may be generated in advance to form a search space, and then an available array structure may be selected based on a practical application scenario, thereby improving the efficiency of obtaining multiple arrays. In another example, one or more two-dimensional barcode images may be randomly generated, and multiple arrays are constructed based on the multiple two-dimensional barcode images. Specifically, for example, as shown in FIG. 15, the size of the metasurface to be constructed may be preset, and then the metasurface is divided into a square grid or a hexagonal grid, etc., and then each grid is randomly filled to obtain an array structure.

[0123] 1402. Evaluate the structure of the plurality of arrays using an evaluation function to obtain an evaluation value corresponding to each of the plurality of arrays.

[0124] The evaluation function is a function for calculating the light utilization efficiency of the spectral dividing and filtering device to obtain the light utilization efficiency corresponding to each array when multiple arrays are used as the metasurface of the spectral dividing and filtering device, and then, based on the evaluation value, the array structure of the metasurface of the spectral dividing and filtering device is determined.

[0125] For example, N initial two-dimensional barcode structures may be randomly generated. Each two-dimensional barcode structure includes N*N square regions. Each region may be made of one of two medium materials, for example, air and titanium dioxide, to form a second-order matrix containing N*N 0 / 1 to represent the structure. The height of the structure is a random height within 1 μm. In this embodiment, 1 represents titanium dioxide and 0 represents air. A simulation model is established based on the spectrum division function of RGGB, and Maxwell's equation is solved by simulation to obtain the average light utilization rate by calculation as the following evaluation function:

number

[0126] where λ r1 ~λ r2 , λ g1 ~λ g2 , and λ b1 ~λ b2 are the spectra of red, green, and blue light, respectively, and T r , T g , and T b are the transmittances of the cell regions corresponding to red light, green light, and blue light, respectively. Specifically, for example, an image sensor corresponding to N two-dimensional barcode structures may be generated by simulation, and then the light utilization ratio of each simulated image sensor is calculated using an evaluation function to obtain the light utilization ratio corresponding to each array. Of course, the light utilization ratio may alternatively be calculated by manufacturing an image sensor corresponding to each array. This is not limited in the present application.

[0127] 1403. Determine whether the multiple arrays include at least one array whose evaluation value is greater than a preset value; if so, execute step 1404; if not, execute step 1405.

[0128] After the evaluation value of each of the plurality of arrays is obtained, it is determined whether the plurality of arrays includes an array whose evaluation value is greater than a preset value. If the plurality of arrays includes at least one array whose evaluation value is greater than a preset value, one array from among the arrays whose evaluation value is greater than a preset value may be selected as an array structure of the metasurface of the spectral division and filtering device. If the plurality of arrays does not include an array whose evaluation value is greater than a preset value, a new array may be obtained until an array whose evaluation value is greater than a preset value is obtained.

[0129] 1404. Select one array as the array structure of the metasurface of the spectral dividing and filtering device from among the at least one array having an evaluation value greater than a preset value.

[0130] An array may be selected as the array structure of the metasurface of the spectral splitting and filtering device from among one or more arrays whose evaluation value is greater than a preset value.

[0131] For example, when there are multiple arrays with evaluation values ​​greater than 50%, the array with the highest evaluation value may be selected as the array structure of the metasurface of the spectral division and filtering device from among the multiple arrays with evaluation values ​​greater than 50%, or one array is randomly selected as the array structure of the metasurface of the spectral division and filtering device from among the multiple arrays with evaluation values ​​greater than 50%.

[0132] 1405. Update multiple arrays.

[0133] If there is no array among the multiple arrays whose evaluation value is greater than the preset value, the multiple arrays are updated, and the array structure of the metasurface of the spectral dividing and filtering device is determined based on the updated multiple arrays, i.e., steps 1402 and 1403 are repeatedly performed until an array whose evaluation value is greater than the preset value is obtained.

[0134] There can be multiple ways to update the arrays. Below, some possible implementations are described.

[0135] In a possible embodiment, the change rate corresponding to each of the multiple arrays may be determined based on the values ​​of the multiple evaluation values. The change rate may specifically include a shape change rate or a height change rate, etc. The shape change rate is a probability or rate of changing the shape of the array structure. The height change rate is a probability or rate of changing the height of the array. Then, the multiple arrays are changed based on the change rate corresponding to each array to obtain the updated multiple arrays. Specifically, the shape of the multiple arrays may be changed based on the shape change rate, or the height of the multiple arrays is changed based on the height change rate, etc. Typically, the evaluation value of each array may be used to represent the light utilization rate obtained after the array is replaced by the image sensor by simulation. A higher light utilization rate indicates a lower corresponding change rate. The relationship between the light utilization rate and the change rate may be a linear relationship, an exponential relationship, etc. Specifically, this relationship may be adjusted based on the actual application scenario. A higher change rate indicates a larger change rate of the array. For example, if the shape change rate is 20%, 20% of the area in the array may be changed to obtain the changed array. The specific modification method may be to rearrange the columnar structures of a part of the area in the array, or to exchange the structures with a part of the area in another array, etc. The specific modification method may be adjusted based on the actual application scenario. If the height modification rate is 10%, the array height is increased or decreased by 10% to obtain the modified height. The specific modification method may be adjusted based on the actual application scenario.

[0136] Therefore, in this embodiment of the present application, the shape and height change rate of each array can be determined based on the evaluation value of the array to perform the change of the array. An array with a larger evaluation value corresponds to a lower change rate. In this way, the array structure is adjusted so that the new array structure approaches the preset value in order to later select an array corresponding to a higher light utilization rate.

[0137] In another possible embodiment, a probability value corresponding to each of the plurality of arrays is determined based on the values ​​of the plurality of evaluation values, then sampling is performed on the plurality of arrays based on the probability value corresponding to each array to obtain a plurality of intermediate structures, then modification rates, including shape modification rates or height modification rates, etc., of the plurality of intermediate structures are determined based on the evaluation values ​​of the plurality of intermediate structures, and then the plurality of intermediate structures are modified based on the modification rates corresponding to the plurality of intermediate structures to obtain new plurality of arrays. A specific modification method may be rearranging a columnar structure of a part of an area in an array, or exchanging a structure with a part of an area in another array, etc. A specific modification method may be adjusted based on an actual application scenario.

[0138] For example, if the light utilization rate corresponding to array 1 is 25%, the light utilization rate corresponding to array 2 is 30%, and the light utilization rate corresponding to array 3 is 26%, then, to obtain multiple arrays, i.e., multiple intermediate structures, a sampling probability is set for each array based on the light utilization rate value corresponding to the array, for example, the probability of array 1 is 10%, the probability of array 2 is 25%, and the probability of array 3 is 13%, and then sampling can be performed one or more times based on the probability of each array. Specifically, for example, the method of setting the corresponding probability for each array is as follows: Pi=F i n / (ΣF i n ), where i represents the i-th two-dimensional barcode structure, and F i is the evaluation function of the i-th structure, and n can be an integer equal to or greater than 1.

[0139] When sampling is performed multiple times, each sampling may be performed based on the probability of each array, and the arrays that may be obtained by different samplings may be the same or different. Thus, in this embodiment of the present application, the probability of each array may be set based on the light utilization rate corresponding to the array, such that an array corresponding to a higher light utilization rate has a higher probability of being sampled during a subsequent sampling, and the array obtained by sampling is changed to obtain a new array.

[0140] In another possible implementation, a search space may be preset, and if an array whose evaluation value is greater than the preset value is not obtained by selection, multiple arrays may be obtained by searching the search space again.

[0141] In the method provided in the present application, in order to improve the light utilization efficiency of the spectral splitting and filtering device and the image sensor, an array that satisfies the light utilization requirement target can be inversely obtained based on a specified light utilization requirement target using an optimization algorithm such as a genetic algorithm, a simulated annealing algorithm, or a gradient descent method.

[0142] The above is a detailed description of the spectral division and filtering device, the image sensor, and the array structure determination method applied to the image sensor provided in the present application. In the following, the image sensor manufacturing method provided in the present application will be described in detail based on the above-described spectral division and filtering device, the image sensor, and the array structure determination method applied to the image sensor.

[0143] FIG. 16 is a schematic flow chart of an image sensor manufacturing method according to the present application, as described below.

[0144] 1601. Manufacture a photoelectric conversion unit, the photoelectric conversion unit being configured to convert an optical signal into an electrical signal, the photoelectric conversion unit including an array for photoelectric conversion, and the array of the photoelectric conversion unit being divided into a plurality of color regions.

[0145] 1602. Fabricate a spectral splitting and filtering device on the surface of the photoelectric conversion unit.

[0146] The spectral splitting and filtering device includes a metasurface and a substrate. The array in the metasurface is disposed on the top of the substrate. The bottom of the substrate is disposed on the surface or top of the photoelectric conversion unit. The metasurface includes a plurality of subunits, each subunit includes an array including a plurality of columnar structures, and the metasurface includes at least two media having different refractive indices. The photoelectric conversion unit includes an array for photoelectric conversion. The array of photoelectric conversion units is divided into a plurality of color regions. The metasurface is configured to refract incident light toward a corresponding color region in the array of photoelectric conversion units.

[0147] The array of photoelectric conversion units can be divided into multiple color units, each color unit includes at least four color regions, each subunit in the metasurface corresponds to one color unit, each subunit refracts the incident light and then sends the refracted light to the color region in the corresponding color unit. Usually, the array structures in the subunits can be the same or different.

[0148] For example, the array of photoelectric conversion units and the array of metasurface structures can be integrated and fabricated using a CMOS process. Specifically, for example, the metasurface can include an array containing two media, titanium dioxide and air, and the pillar structures containing titanium dioxide can be filled into the array after the array structure of the metasurface is determined.

[0149] For example, step 1602 may include depositing a substrate over the array of photoelectric conversion units and fabricating a microstructure on the substrate.

[0150] Therefore, in this embodiment of the present application, a substrate can be fabricated on the surface of the photoelectric conversion unit, and an array of metasurfaces can be fabricated on top of the substrate. Different colors of light are refracted using an array in the metasurface, including a columnar structure, and the incident light is refracted by the metasurface to perform spectral division, and then sent to the corresponding color region in the photoelectric conversion unit. This can be understood as follows: the spectral division and filtering device has a medium metasurface or a medium diffraction surface, has a two-dimensional two-dimensional barcode type structural characteristic, and has multiple spectral channels to perform spectral division of multiple colors and perform the function of efficient spectral division. In addition, the array of metasurface structures can refract the incident light, thereby reducing the scattering phenomenon and improving the light utilization rate of the image sensor.

[0151] In a possible embodiment, a color filtering structure can be further fabricated between the photoelectric conversion unit and the substrate. The color filtering structure is divided into a plurality of color filtering regions, each color filtering region covers one corresponding color region, the color corresponding to each color region is the same as the color passing through the color filtering region covering the color region, and each color filtering region is for filtering out the light of a color other than the color corresponding to the color region covered by the color filtering region.

[0152] In a possible embodiment, a lens may further be fabricated between each color filtering region and the substrate.

[0153] In a possible implementation, the multiple spectral bands of light of colors corresponding to the multiple color regions include one or more of green, red, blue, or infrared light.

[0154] In a possible embodiment, the material of the metasurface comprises one or more of the following: titanium dioxide, gallium nitride, or silicon carbide.

[0155] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the surfaces of the columnar structures included in the metasurface region above each color unit form an angularly symmetric shape.

[0156] In addition, the array structure of the metasurface may be further constructed before the fabrication of the metasurface. For example, referring to FIG. 17, in the following, the process of the image sensor fabrication method provided in the present application will be described in more detail as follows, with reference to the method for constructing the array structure of the metasurface.

[0157] 1701. Determine the structure of multiple arrays.

[0158] 1702. Evaluate the structure of the plurality of arrays using an evaluation function to obtain an evaluation value corresponding to each of the plurality of arrays.

[0159] 1703. Determine whether the multiple arrays include at least one array whose evaluation value is greater than a preset value; if so, execute step 1705; if not, execute step 1704.

[0160] 1704. Update multiple arrays.

[0161] 1705. Select one array as a structure of a metasurface of the spectral splitting and filtering device from among the at least one array having an evaluation value greater than a preset value.

[0162] For steps 1701 to 1705, please refer to steps 1401 to 1405. The details will not be described again here.

[0163] 1706. Manufacture photoelectric conversion units.

[0164] 1707. Fabricating a spectral splitting and filtering device on the surface of a photoelectric conversion unit.

[0165] For steps 1706 and 1707, please refer to steps 1601 and 1602. The details will not be described again here.

[0166] Therefore, in this embodiment of the present application, in order to obtain an image sensor with a higher light utilization ratio, the array structure of the metasurface may be further determined before the fabrication of the metasurface, which may be understood as follows: Based on a specified light utilization ratio requirement target, an array that satisfies the light utilization ratio requirement target may be obtained inversely using an optimization algorithm such as a genetic algorithm, a simulated annealing algorithm, or a gradient descent method to improve the light utilization ratio of the spectral splitting and filtering device and the image sensor.

[0167] The light utilization of the image sensor referred to in this application will be explained in more detail below using more specific application scenarios.

[0168] For example, FIG. 18 is a spectrum graph of the light utilization rate of the spectrum division device in the visible light band range of 400-700 nm, where the abscissa represents the wavelength and the ordinate represents the transmittance. Tb represents the light transmittance reaching the blue light-sensitive pixel cell in the lower right corner, Tg and Tg2 represent the light transmittance reaching the two light-sensitive pixel cells in the upper right corner and the lower left corner, respectively, and Tr represents the transmittance reaching the red light-sensitive pixel cell in the upper left corner. As shown in FIG. 18, this embodiment enhances the light utilization rate of visible light to 55.9%, which is about 224% of the light utilization rate of the conventional color filter. The light utilization rate of red light is 73.7%, which is about 393% of that of the conventional color filter. The light utilization rate of green light is 47.9%, which is about 127% of that of the conventional color filter. The light utilization rate of blue light is 47.3%, which is about 252% of that of the conventional color filter.

[0169] The light intensity distribution in the plane at a distance of 3.5 μm from the bottom of the medium layer of the spectral splitting device is shown in Figure 19, where A, B, and C correspond to wavelengths of 450 nm, 536 nm, and 640 nm, respectively. It can be seen that the three colors, i.e., red, green, and blue light, are focused on the four light-sensitive pixel cell positions of the RGGB arrangement method, i.e., bottom right, bottom left, top right, and top left, respectively. The spectral crosstalk is eliminated by adding a color filter layer, and the amount of scattered light is relatively small.

[0170] Obviously, from the above analysis, it can be known that the light utilization rate of the image sensor provided in the present application is higher than that of the Bayer color filter or nanofin structure. Therefore, in this embodiment of the present application, compared with the Bayer color filter using color filtering method to obtain color information, in order to overcome the theoretical limit of the light utilization rate of the monochromatic filtering system by spectral division and improve the light utilization rate of the color image sensor in principle, the present application uses a pixel-level spectral division device. For the metasurface technology of the nanofin structure, a function-driven inverse design algorithm is used in the present invention to design a two-dimensional two-dimensional barcode type structure, which has the advantages of high spectral division efficiency, low polarization dependency, and matching with smaller photosensitive pixel cells. In addition, the light utilization rate of the image sensor is improved, thereby increasing the signal-to-noise ratio during the shooting performed using the image sensor, improving the quality of the image taken under weak light conditions, and improving the performance of shooting under weak light conditions.

[0171] Referring to FIG. 20, the present application further provides an array structure construction apparatus configured to perform the method of FIG. 14, the apparatus comprising: a first determining unit 2001 configured to determine a structure of a plurality of arrays; an evaluation unit 2002 configured to evaluate a structure of the plurality of arrays using an evaluation function to obtain an evaluation value corresponding to each of the plurality of arrays, the evaluation function being a function for calculating a light utilization rate of the spectral division and filtering device when the plurality of arrays are used as a metasurface of the spectral division and filtering device; a second determining unit 2003 configured to determine a structure of a metasurface of the spectral division and filtering device based on the evaluation value, the spectral division and filtering device being included in an image sensor, the image sensor including a spectral division and filtering device and a photoelectric conversion unit, the spectral division and filtering device including a metasurface and a substrate, the photoelectric conversion unit including an array for photoelectric conversion, the spectral division and filtering device including a metasurface and a substrate, the array in the metasurface being disposed on a top of the substrate, and a bottom of the substrate being disposed on a surface or a top of the photoelectric conversion unit, the metasurface including an array including at least two media having different refractive indices, the array in the metasurface including an array including at least one columnar structure, the array of the photoelectric conversion units being divided into a plurality of color regions, and the metasurface being configured to refract incident light toward a corresponding color region in the array of the photoelectric conversion units; may include.

[0172] The array of photoelectric conversion units can be divided into a number of color units, each color unit including at least four color regions, each color unit corresponding to one subunit, each subunit refracting incident light and then sending the refracted light to a color region in the corresponding color unit.

[0173] In a possible embodiment, the first determination unit 2001 is particularly configured to, when the multiple arrays include at least one array having an evaluation value greater than a preset value, select one array from the at least one array having an evaluation value greater than a preset value as the array structure of the metasurface of the spectral division and filtering device.

[0174] The array structure construction apparatus may further include an updating unit 2004 configured to update the plurality of arrays when the plurality of arrays does not include an array whose evaluation value is greater than a preset value.

[0175] The second determining unit is further configured to determine an array structure of the metasurface of the spectral splitting and filtering device based on the updated plurality of arrays.

[0176] In a possible implementation, the update unit 2004 is particularly configured to determine a modification rate corresponding to each of the plurality of arrays based on values ​​of the plurality of evaluation values, and modify the plurality of arrays based on the modification rate corresponding to each of the arrays to obtain an updated plurality of arrays.

[0177] In a possible embodiment, the update unit 2004 is particularly configured to: determine a probability value corresponding to each of the plurality of arrays based on values ​​of the plurality of evaluation values; perform multiple samplings on the plurality of arrays based on the probability values ​​corresponding to each of the arrays to obtain a plurality of intermediate structures; determine modification rates of the plurality of intermediate structures based on the evaluation values ​​of the plurality of intermediate structures; and modify the plurality of intermediate structures based on the modification rates corresponding to the plurality of intermediate structures to obtain a new plurality of arrays.

[0178] In a possible embodiment, the colors corresponding to each color unit include at least two of the same colors, and the surfaces of the columnar structures included in the metasurface region above each color unit form an angularly symmetric shape.

[0179] Therefore, at least two of the same colors may correspond to at least four color regions arranged in the matrix, and the colors corresponding to the two symmetric color regions may be the same. This embodiment provides a possible arrangement method that can be applied to an array of metasurfaces.

[0180] The above description is only an optional embodiment of the present application, and is not intended to limit the present application. Any modifications, equivalent replacements, or improvements made without departing from the principles of the present application shall be within the protection scope of the present application. [Explanation of symbols]

[0181] 110 Lens module 120 Image Sensor 121 Micro Lens 122 Bayer Color Filter 123 Photodiode 130 Electrical Signal Processor 131 Analog-to-Digital Converter 132 Digital Signal Processor 133 Analog Signal Preprocessor 701 Metasurface 702 Substrate 703 Photoelectric conversion unit 704 Color Filter 705 Micro Convex Lens 2001 First Decision Unit 2002 Evaluation Unit 2003 Second Decision Unit 2004 Updated Unit

Claims

1. 1. A method for manufacturing an image sensor, comprising: A step of manufacturing a photoelectric conversion unit, the photoelectric conversion unit being configured to convert an optical signal into an electrical signal, the photoelectric conversion unit having an array for photoelectric conversion, the array of the photoelectric conversion unit being divided into a plurality of color regions; and fabricating a spectral splitting and filtering device on a surface of the photoelectric conversion unit, the spectral splitting and filtering device comprising a metasurface and a substrate, the metasurface comprising a plurality of subunits, each of the plurality of subunits comprising an array comprising a plurality of columnar structures, the array in the metasurface being disposed on a top of the substrate, a bottom of the substrate being disposed on the surface of the photoelectric conversion unit, the metasurface comprising at least two media having different refractive indices, one of the at least two media being air, the surface of the photoelectric conversion unit being a surface for receiving an optical signal, the array of the photoelectric conversion units being divided into a plurality of color units, each of the plurality of color units comprising at least four color regions, each of the plurality of color units corresponding to one of the plurality of subunits, the metasurface being configured to refract incident light towards a corresponding color region in the array of the photoelectric conversion units, each of the plurality of subunits refracting incident light and then directing the refracted light through the substrate to the color region in the corresponding color unit, Prior to the step of fabricating a spectral splitting and filtering device on a surface of the photoelectric conversion unit, the method further comprises: determining a plurality of arrays to obtain a plurality of spectral splitting structures and using the plurality of arrays as structures of a metasurface of the spectral splitting and filtering device; a step of acquiring a plurality of evaluation values ​​corresponding one-to-one to the plurality of spectral division structures by using a preset evaluation function, the evaluation function being a function for calculating a light utilization efficiency of the spectral division structure; selecting a first spectral partitioning structure from among the plurality of spectral partitioning structures as the structure of the spectral partitioning and filtering device if the plurality of evaluation values ​​includes at least one evaluation value greater than a preset value, wherein the evaluation value of the first spectral partitioning structure is greater than the preset value.

2. 2. The method of claim 1, further comprising the steps of: determining a plurality of arrays anew when the plurality of evaluation values ​​does not include at least one evaluation value greater than a preset value; and determining a spectral division structure as the structure of the spectral division and filtering device based on the newly determined plurality of arrays.

3. Determining the plurality of arrays anew includes: determining a rate of change corresponding to each of the plurality of arrays based on the plurality of evaluation values; and modifying the plurality of arrays based on the modification rate corresponding to each of the plurality of arrays to obtain an updated plurality of arrays.

4. 4. The method of claim 3, wherein the change rate corresponding to each of the plurality of arrays comprises a shape change rate and / or a height change rate, the shape change rate comprising a probability or percentage of shape change for each of the plurality of arrays, and the height change rate comprising a probability or percentage of height change for each of the plurality of arrays.

5. Determining the plurality of arrays anew includes: determining a probability value corresponding to each of the plurality of arrays based on the plurality of evaluation values; performing a plurality of samplings on the plurality of arrays based on the probability values ​​corresponding to each of the plurality of arrays to obtain a plurality of intermediate structures; determining a modification rate of the plurality of intermediate structures based on the evaluation values ​​of the plurality of intermediate structures; and modifying the intermediate structures based on the modification rates corresponding to the intermediate structures to obtain new arrays.

6. 6. The method of claim 1, further comprising the step of manufacturing a color filtering structure between the photoelectric conversion unit and the substrate, the color filtering structure being divided into a plurality of color filtering regions, each of the plurality of color filtering regions covering one corresponding color region, a color corresponding to each color region being the same as a color passing through the color filtering region covering the color region, and each of the plurality of color filtering regions filtering out light of a color other than the color corresponding to the color region covered by the color filtering region.

7. The method of claim 6 , wherein the method further comprises fabricating a lens between each of the plurality of color filtering regions and the substrate.

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