Nitride semiconductor, wafer, semiconductor device, and method for manufacturing nitride semiconductor

Abstract

To provide a nitride semiconductor capable of improving characteristics, a wafer, a semiconductor device, and a manufacturing method for the nitride semiconductor.SOLUTION: The nitride semiconductor includes a first nitride area containing Alx1Ga1-x1N (0<x1≤1), a second nitride area containing Alx2Ga1-x2N (0<x2<1, x2<x1) and including carbon, and a third nitride area. The second nitride area is located between the first nitride area and the third nitride area. The third nitride area includes Al, Ga, and N. The third nitride area does not include carbon. Alternatively, the third carbon concentration in the third nitride area is lower than the second carbon concentration in the second nitride area.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Embodiments of the present invention relate to a nitride semiconductor, a wafer, a semiconductor device, and a method for manufacturing a nitride semiconductor.

Background Art

[0002] For example, in a semiconductor device based on a nitride semiconductor, improvement in characteristics is desired.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] Embodiments of the present invention provide a nitride semiconductor, a wafer, a semiconductor device, and a method for manufacturing a nitride semiconductor capable of improving characteristics.

Means for Solving the Problems

[0005] According to an embodiment of the present invention, the nitride semiconductor includes The nitride member includes: Al x1 Ga 1-x1 a first nitride region containing N (0 < x1 ≤ 1), Al x2 Ga 1-x2 a second nitride region containing N (0 < x2 < 1, x2 < x1) and containing carbon, and a third nitride region. The second nitride region is between the first nitride region and the third nitride region. The third nitride region contains Al, Ga, and N. The third nitride region does not contain carbon. Or, a third carbon concentration in the third nitride region is lower than a second carbon concentration in the second nitride region.

Brief Description of the Drawings

[0006] [Figure 1]FIG. 1 is a schematic cross-sectional view illustrating the nitride semiconductor according to the first embodiment. [Diagram 2] FIG. 2 is a graph illustrating the characteristics of a nitride semiconductor. [Diagram 3] FIG. 3 is a graph illustrating the characteristics of a nitride semiconductor. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the nitride semiconductor according to the first embodiment. As shown in FIG. [Diagram 5] FIG. 5 is a graph illustrating the nitride semiconductor according to the first embodiment. [Figure 6] 6(a) and 6(b) are graphs illustrating the nitride semiconductor according to the first embodiment. [Figure 7] FIG. 7 is a schematic view illustrating the nitride semiconductor according to the first embodiment. [Figure 8] FIG. 8 is a graph illustrating the characteristics of a nitride semiconductor. [Figure 9] FIG. 9 is a schematic cross-sectional view illustrating the semiconductor device according to the third embodiment. [Figure 10] FIG. 10 is a schematic cross-sectional view illustrating the semiconductor device according to the third embodiment. [Figure 11] FIG. 11 is a flowchart illustrating the method for manufacturing a nitride semiconductor according to the fourth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios of each part may be different depending on the drawing. In this specification and each drawing, elements similar to those described above with reference to the previous drawings are given the same reference numerals and detailed descriptions thereof will be omitted as appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating a nitride semiconductor according to the first embodiment. As shown in FIG. 1, the nitride semiconductor 110 according to the embodiment includes a nitride member 10M. The nitride member 10M includes a first nitride region 11, a second nitride region 12, and a third nitride region 13. The nitride member 10M may include a fourth nitride region 14 and a fifth nitride region 15. The fourth nitride region 14 and the fifth nitride region 15 correspond to functional regions. The fourth nitride region 14 and the fifth nitride region 15 are provided as necessary and may be omitted. The nitride semiconductor 110 may include a substrate 18s.

[0009] The first nitride region 11 contains Al x1 Ga 1-x1 N (0 < x1 ≤ 1). The composition ratio x1 of Al in the first nitride region 11 is, for example, 0.35 or more and 1 or less. In one example, the first nitride region 11 contains AlN. The first nitride region 11 may include, for example, a plurality of AlGaN films having different composition ratios of Al. The first nitride region 11 may include, for example, an AlN film and an Al 0.35 Ga 0.65 N film.

[0010] The second nitride region 12 contains Al x2 Ga 1-x2 N (0 < x2 < 1, x2 < x1) and contains carbon. The composition ratio x2 of Al in the second nitride region 12 is, for example, 0.08 or more and 0.28 or less. The second nitride region 12 is, for example, AlGaN (for example, Al 0.15 Ga 0.85 N).

[0011] There is a second nitride region 12 between the first nitride region 11 and the third nitride region 13. The third nitride region 13 contains Al, Ga, and N . rear As described above, the third nitride region 13 may include, for example, a laminated film having different Al composition ratios. The third nitride region 13 does not contain carbon. Or, the concentration of carbon (third carbon concentration) in the third nitride region 13 is lower than the concentration of carbon (second carbon concentration) in the second nitride region 12.

[0012] The direction from the first nitride region 11 to the second nitride region 12 is defined as the first direction. The first direction corresponds to, for example, the stacking direction. The first direction is defined as the Z-axis direction. One direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction. For example, the first to third nitride regions 11 to 13 are in the form of layers extending substantially parallel to the XY plane. For example, the first to third nitride regions 11 to 13 are films extending substantially parallel to the XY plane.

[0013] When the substrate 18s is provided, the first nitride region 11 is between the substrate 18s and the third nitride region 13. The substrate includes, for example, silicon. The substrate 18s may include at least one selected from the group consisting of silicon, sapphire, silicon carbide (SiC), aluminum nitride (AlN), and gallium nitride (GaN). The substrate 18s is, for example, a silicon substrate.

[0014] The wafer 210 according to the embodiment includes the nitride semiconductor 110 according to the embodiment and a substrate 18s. In the wafer 210, the first nitride region 11 is between the substrate 18s and the third nitride region 13.

[0015] As already described, the nitride member 10M may include a fourth nitride region 14 and a fifth nitride region 15. The fourth nitride region 14 is Al x4 Ga 1-x4 N (0≦x4<1). The Al composition ratio x4 in the fourth nitride region 14 is, for example, 0 or more and 0.5 or less. The fourth nitride region 14 includes, for example, GaN. The Al composition ratio x4 in the fourth nitride region 14 is lower than the Al composition ratio in the third nitride region 13.

[0016] As shown in FIG. 1, the fourth nitride region 14 may include a first film region 14a and a second film region 14b. The first film region 14a is between the third nitride region 13 and the second film region 14b. The first film region 14a contains carbon. The second film region 14b does not contain carbon. Or, the carbon concentration in the second film region 14b is lower than the carbon concentration in the first film region 14a. By providing the first film region 14a containing carbon, for example, it becomes easier to obtain a low dislocation density. With the second film region 14b having a low carbon concentration, for example, it becomes easier to obtain a high electron mobility.

[0017] The fifth nitride region 15 contains Al x5 Ga 1-x5 N (0 < x5 ≤ 1, x4 < x5). The composition ratio x5 of Al in the fifth nitride region 15 is, for example, 0.05 or more and 0.35 or less. The fifth nitride region 15 is, for example, AlGaN. The third nitride region 13 is between the first nitride region 11 and the fifth nitride region 15. The fourth nitride region 14 is between the third nitride region 13 and the fifth nitride region 15.

[0018] For example, a carrier region is formed in a portion of the fourth nitride region 14 facing the fifth nitride region 15. The carrier region is, for example, a two-dimensional electron gas. In a semiconductor device based on the nitride semiconductor 110, the carrier region is used for the operation of the semiconductor device.

[0019] In the embodiment, as described above, the second nitride region 12 containing carbon is provided. Thereby, for example, in the nitride member 10M, a low dislocation density can be obtained. This is presumably because in the second nitride region 12 containing carbon, the direction of the dislocations bends and the dislocations extending upward from the second nitride region 12 decrease. Since the carbon concentration in the second nitride region 12 is higher than the carbon concentration in the third nitride region 13, for example, the strain applied to the third nitride region 13 increases. Thereby, the dislocation density is reduced.

[0020] The nitride member 10M is formed by, for example, MOCVD (metal organic chemical vapor deposition) using a source gas containing a group III element (Al or Ga) and a source gas containing a group V element (N). In forming the second nitride region 12, for example, depending on the processing conditions, carbon contained in the source gas is easily incorporated into the nitride. This makes it possible to increase the carbon concentration in the second nitride region 12. Depending on the processing conditions, the carbon concentration in the second nitride region 12 can be controlled.

[0021] FIG. 2 is a graph illustrating the characteristics of a nitride semiconductor. 2, the horizontal axis represents the carbon concentration (second carbon concentration CC2) in the second nitride region 12. The vertical axis represents the dislocation density DD in the fourth nitride region 14. In the example of FIG. 2, the carbon concentration (third carbon concentration) in the third nitride region 13 is about 5×10 18 / cm 3 It is.

[0022] As shown in Fig. 2, the second carbon concentration CC2 is 8 × 10 18 / cm 3 In the above, the dislocation density DD is reduced. This is believed to be because the propagation direction of dislocations is more likely to bend in the second nitride region 12. When the carbon concentration is high in the second nitride region 12, the lateral growth of the second nitride region 12 is promoted. As a result, dislocations are bent, and the dislocation density DD is reduced.

[0023] As shown in Figure 2, when the second carbon concentration CC2 is excessively high, the dislocation density DD increases. This is thought to be because an excessively high carbon content causes carbon to mix between the crystal lattices, resulting in poor crystal quality.

[0024] In the embodiment, for example, the second carbon concentration CC2 is 1×10 19 / cm 3 For example, the second carbon concentration CC2 is preferably 8×10 19 / cm 3It is preferable that the dislocation density DD is less than 100%. A low dislocation density DD can be obtained. A nitride semiconductor with improved characteristics can be provided.

[0025] For example, in the formation of the second nitride region 12, the oxygen contained in the source gas is less likely to be incorporated into the nitride depending on, for example, the process conditions. This makes it possible to reduce the concentration of oxygen contained in the second nitride region 12. The concentration of oxygen contained in the second nitride region 12 can be controlled depending on the process conditions. Oxygen may be contained in, for example, the source gas. A gas containing oxygen may be supplied separately from the above-mentioned source gas.

[0026] FIG. 3 is a graph illustrating the characteristics of a nitride semiconductor. 3, the horizontal axis represents the oxygen concentration (second oxygen concentration CO2) in the second nitride region 12. The vertical axis represents the dislocation density DD. In the example of FIG. 3, the oxygen concentration (third oxygen concentration) in the third nitride region 13 is 6×10 16 / cm 3 It is.

[0027] As shown in FIG. 3, the second oxygen concentration CO2 is 4×10 16 / cm 3 In the following, the dislocation density DD is reduced. This is believed to be due to the reduction in lattice relaxation in the second nitride region 12. When the oxygen concentration is low, the lattice relaxation is reduced in the second nitride region 12. As a result, the dislocation density is believed to be reduced. When the oxygen concentration is low, the strain applied to the third nitride region 13 is large. When the oxygen concentration in the second nitride region 12 is lower than the oxygen concentration in the third nitride region 13, for example, the strain applied to the third nitride region 13 is large. This reduces the dislocation density.

[0028] In an embodiment, for example, the second oxygen concentration CO2 is 4×10 16 / cm 3 The second oxygen concentration CO2 is preferably 3×10 14 / cm 3 The second oxygen concentration CO2 does not have to be excessively low.

[0029] Thus, it is preferable that the second nitride region 12 does not contain oxygen. Alternatively, it is preferable that the oxygen concentration CO (second oxygen concentration) in the second nitride region 12 is lower than the oxygen concentration CO (third oxygen concentration) in the third nitride region 13. A nitride semiconductor capable of improving characteristics can be provided.

[0030] For example, the Al composition ratio in the third nitride region 13 is higher than the Al composition ratio (composition ratio x2) in the second nitride region 12, and the Al composition ratio in the first nitride region 11 (composition ratio x 1 ) is preferably lower than the average composition ratio in each nitride region. The composition ratio may be the average composition ratio in each nitride region. Due to such a relationship of the composition ratio, appropriate stress or strain is easily generated, and a low dislocation density DD is easily obtained.

[0031] The Al composition ratio in the third nitride region 13 is preferably not less than 0.18 and not more than 0.38. At such a composition ratio, appropriate stress or strain is likely to be generated, and a low dislocation density DD is likely to be obtained.

[0032] In the embodiment, the Al composition ratio (composition ratio x2) in the second nitride region 12 is preferably, for example, not less than 0.08 and not more than 0.28. At such a composition ratio x2, appropriate stress or strain is likely to occur, and a low dislocation density DD is likely to be obtained.

[0033] 1, the first nitride region 11 has a thickness (first nitride region thickness tr1) along a first direction (Z-axis direction). The first nitride region thickness tr1 is, for example, not less than 10 nm and not more than 1500 nm. In one example, the first nitride region thickness tr1 is about 150 nm.

[0034] 1, the second nitride region 12 has a thickness along the first direction (second nitride region thickness tr2). The second nitride region thickness tr2 is, for example, 50 nm or more and 2000 nm or less. In one example, the second nitride region thickness tr2 is about 200 nm.

[0035] As shown in FIG. 1, the third nitride region 13 has a thickness along the first direction (the thickness tr3 of the third nitride region). The thickness tr3 of the third nitride region is, for example, 100 nm or more and 7000 nm or less. In one example, the thickness tr3 of the third nitride region is about 3000 nm.

[0036] FIG. 4 is a schematic cross-sectional view illustrating a nitride semiconductor according to the first embodiment. As shown in FIG. 4, in the nitride semiconductor 111 and the wafer 211 according to the embodiment, the third nitride region 13 has a stacked structure.

[0037] For example, the third nitride region 13 includes a plurality of first regions 13a and a plurality of second regions 13b. In the first direction (Z-axis direction) from the first nitride region 11 to the second nitride region 12, one of the plurality of first regions 13a is between one of the plurality of second regions 13b and another one of the plurality of second regions 13b. The above-mentioned one of the plurality of second regions 13b is between the above-mentioned one of the plurality of first regions 13a and another one of the plurality of first regions 13a. For example, the first region 13a and the second region 13b are alternately provided along the Z-axis direction.

[0038] The first region 13a contains Al y1 Ga 1-y1 N (0 < y1 ≤ 1). The second region 13b contains Al y2 Ga 1-y2 N (0 ≤ y2 < y1).

[0039] The Al composition ratio (composition ratio y1) in the first region 13a is, for example, 0.75 or more and 1 or less. In one example, the first region 13a is AlN.

[0040] The Al composition ratio (composition ratio y2) in the second region 13b is, for example, 0.06 or more and 0.3 or less. In one example, the second region 13b is Al 0.13 Ga 0.87 N.

[0041] In one example, the composition ratio y1 is equal to or less than the composition ratio x1. In one example, the composition ratio y2 is higher than the composition ratio x2.

[0042] For example, one of the multiple first regions 13a may be in contact with the second nitride region 12. For example, one of the multiple second regions 13b may be in contact with the second nitride region 12. For example, one of the multiple first regions 13a may be in contact with the fourth nitride region 14. For example, one of the multiple second regions 13b may be in contact with the fourth nitride region 14. The multiple first regions 13a and the multiple second regions 13b may form, for example, a superlattice structure. The absolute value of the difference between the number of the multiple first regions 13a and the number of the multiple second regions 13b may be 0 or 1. The number of the multiple first regions 13a is, for example, 10 or more and 200 or less.

[0043] Each of the multiple first regions 13a has a first region thickness t1 along the first direction (Z-axis direction). For example, the first region thickness t1 is thinner than a second nitride region thickness tr2 along the first direction of the second nitride region 12. Each of the multiple second regions 13b has a second region thickness t2 along the first direction. For example, the second region thickness t2 is thinner than the second nitride region thickness tr2. For example, the first region thickness t1 is thinner than the second region thickness t2.

[0044] For example, a first region thickness t1 along the first direction of each of the multiple first regions 13a is thinner than a first nitride region thickness tr1 along the first direction of the first nitride region 11. A second region thickness t2 along the first direction of each of the multiple second regions 13b is thinner than the first nitride region thickness tr1.

[0045] The first region thickness t1 is, for example, 3 nm or more and 10 nm or less. In one example, the first region thickness t1 is 5 nm. The second region thickness t2 is, for example, 15 nm or more and 40 nm or less. In one example, the second region thickness t2 is 25 nm.

[0046] In the third nitride region 13 having such a structure, for example, dislocations are more likely to bend at the interface between the first region 13a and the second region 13b. A lower dislocation density DD is more likely to be obtained. By providing a plurality of regions with different Al composition ratios, for example, a high breakdown voltage is more likely to be obtained.

[0047] The effective Al composition ratio za3 in the third nitride region 13 including the multiple first regions 13a and the multiple second regions 13b is obtained as follows. As already described, each of the multiple first regions 13a has a first region thickness t1 along the first direction. Each of the multiple second regions 13b has a second region thickness t2 along the first direction. Using the first region thickness t1, the second region thickness t2, the composition ratio y1, and the composition ratio y2, the effective Al composition ratio za3 in the third nitride region 13 is given by: za3 = (y1 t1 + y2 t2) / (t1 + t2) It is expressed as:

[0048] The effective Al composition ratio za3 can be regarded as the average Al composition ratio in the third nitride region 13 including the multiple first regions 13a and the multiple second regions 13b.

[0049] In the embodiment, the effective Al composition ratio za3 in the third nitride region 13 is preferably higher than the Al composition ratio (composition ratio x2) in the second nitride region 12. For example, the composition ratio x2, the first region thickness t1, the second region thickness t2, the composition ratio y1, and the composition ratio y2 are expressed as follows: x2<{(y1 t1 + y2 t2) / (t1 + t2)} It is preferable that the following is satisfied.

[0050] In the embodiment, the effective Al composition ratio za3 in the third nitride region 13 is preferably lower than the Al composition ratio (composition ratio x1) in the first nitride region 11. For example, the composition ratio x2, the first region thickness t1, the second region thickness t2, the composition ratio y1, and the composition ratio y2 are expressed as follows: {(y1 t1 + y2 t2) / (t1 + t2)} <x1 It is preferable that the following is satisfied.

[0051] FIG. 5 is a graph illustrating the nitride semiconductor according to the first embodiment. The horizontal axis of FIG. 5 is the Al composition ratio C(Al). The vertical axis is the position pZ in the Z-axis direction. As shown in FIG. 5, the effective Al composition ratio za3 in the third nitride region 13 is between the composition ratio y1 and the composition ratio y2. For example, the Al composition ratio za3 is higher than the composition ratio x2. This makes it easier to obtain a low dislocation density DD. For example, the Al composition ratio za3 is lower than the composition ratio x1. This makes it easier to obtain a low dislocation density DD. The effective Al composition ratio za3 in the third nitride region 13 is preferably, for example, 0.18 or more and 0.28 or less. This makes it easier to obtain a low dislocation density DD.

[0052] 6(a) and 6(b) are graphs illustrating the nitride semiconductor according to the first embodiment. These figures show examples of secondary ion mass spectrometry (SIMS) analysis results of the nitride semiconductor 111. In these figures, the horizontal axis represents the position pZ in the Z-axis direction. The vertical axis in Fig. 6(a) represents the carbon concentration CC or the oxygen concentration CO. The vertical axis in Fig. 6(b) represents the secondary ion intensity Int_Al of Al.

[0053] As shown in FIG. 6(b), even when the first region 13a and the second region 13b having different Al composition ratios are provided in the third nitride region 13, the secondary ion intensity Int_Al of Al in the third nitride region 13 may be observed to be substantially constant, depending on the analysis conditions.

[0054] 6(a), the carbon concentration CC in the second nitride region 12 is higher than the carbon concentration CC in the third nitride region 13. As shown in FIG 6(a), the oxygen concentration CO in the second nitride region 12 is lower than the oxygen concentration CO in the third nitride region 13. With this configuration, a low dislocation density is easily obtained.

[0055] For example, the carbon concentration CC in the second nitride region 12 is higher than the carbon concentration CC in the first nitride region 11. The oxygen concentration CO in the second nitride region 12 is lower than the oxygen concentration CO in the first nitride region 11.

[0056] The carbon concentration CC in the second nitride region 12 is, for example, 1×10 19 / cm 3 8×10 or more 19 / cm 3 Less than or equal to (for example, about 3.9 × 10 19 / cm 3 The oxygen concentration CO in the second nitride region 12 is, for example, 0.4×10 16 / cm 3 More than 4×10 16 / cm 3 Less than (e.g., about 1.4 × 10 16 / cm 3 ).

[0057] The carbon concentration CC in the third nitride region 13 is, for example, 1×10 19 / cm 3 More than 2×10 19 / cm 3 Less than (approximately 1.5 x 10 19 / cm 3 The oxygen concentration CO in the third nitride region 13 is, for example, 3×10 16 / cm 3 5×10 or more 16 / cm 3 Less than or equal to (for example, about 3.9 × 10 16 / cm 3 ).

[0058] Thus, the carbon concentration CC in the second nitride region 12 is higher than the carbon concentration CC in the third nitride region 13. For example, the oxygen concentration CO in the second nitride region 12 is lower than the oxygen concentration CO in the third nitride region 13.

[0059] FIG. 7 is a schematic view illustrating the nitride semiconductor according to the first embodiment. 7 is a reciprocal lattice space mapping diagram in the (20-24) asymmetric reflection of the nitride semiconductor 111. The horizontal axis of FIG. 7 is the reciprocal Qx of the lattice constant in the <20-20> direction. The vertical axis is <0004> The reciprocal Qz of the lattice constant in the direction A large reciprocal Qz corresponds to a high Al composition ratio.

[0060] As shown in FIG. 7, the Al composition ratio (composition ratio x2) in the second nitride region 12 is lower than the effective Al composition ratio (composition ratio za3) in the third nitride region 13.

[0061] FIG. 8 is a graph illustrating the characteristics of a nitride semiconductor. The horizontal axis of FIG. 8 is the Al composition ratio (composition ratio x2) in the second nitride region 12. The vertical axis is the dislocation density DD in the fourth nitride region 14. In the example of FIG. 8, the Al composition ratio (composition ratio y1) in the first region 13a of the third nitride region 13 is 1. The first region thickness t1 of the first region 13a is 5 nm. The Al composition ratio (composition ratio y2) in the second region 13b of the third nitride region 13 is 0.13. The second region thickness t2 of the second region 13b is 25 nm. The number of the first regions 13a is 101. The number of the second regions 13b is 100. The effective Al composition ratio za3 in the third nitride region 13 is 0.275.

[0062] 8, when the composition ratio x2 is lower than the Al composition ratio za3, the dislocation density DD is low. When the composition ratio x2 is equal to or lower than the Al composition ratio za3, the strain applied to the third nitride region 13 becomes tensile strain. In the region close to the interface between the second nitride region 12 and the third nitride region 13, the bending effect of dislocations is increased. This is believed to reduce dislocations.

[0063] 8, when the composition ratio x2 is lower than the composition ratio y2, an even lower dislocation density DD is obtained. When the composition ratio x2 is lower than the composition ratio y2, tensile strain is effectively introduced into the second region 13b. It is believed that a dislocation bending effect is obtained at the interface between the first region 13a and the second region 13b.

[0064] Second embodiment The second embodiment relates to a wafer. The wafer according to the embodiment (wafer 210 or wafer 211) includes at least a part of the nitride semiconductor according to the first embodiment (nitride semiconductor 110 or nitride semiconductor 111) and a substrate 18s (see FIG. 1 or FIG. 4). The first nitride region 11 is between the substrate 18s and the third nitride region 13. According to the embodiment, it is possible to provide a wafer capable of improving characteristics.

[0065] Third embodiment The third embodiment relates to a semiconductor device. FIG. 9 is a schematic cross-sectional view illustrating the semiconductor device according to the third embodiment. As shown in FIG. 9, the semiconductor device 120 according to the embodiment includes the nitride semiconductor according to the first embodiment (in this example, the nitride semiconductor 110), a first electrode 51, a second electrode 52, a third electrode 53, and an insulating member 61.

[0066] The direction from the first electrode 51 to the second electrode 52 is along a second direction intersecting the first direction (Z-axis direction). The second direction is, for example, the X-axis direction. The position of the third electrode 53 in the second direction is between the position of the first electrode 51 in the second direction and the position of the second electrode 52 in the second direction.

[0067] The nitride member 10M includes first to fifth nitride regions 11 to 15. The fourth nitride region 14 includes a first partial region 10a, a second partial region 10b, a third partial region 10c, a fourth partial region 10d, and a fifth partial region 10e. The direction from the first partial region 10a to the first electrode 51 is along the first direction (Z-axis direction). The direction from the second partial region 10b to the second electrode 52 is along the first direction. The third partial region 10c is between the first partial region 10a and the second partial region 10b in the second direction (X-axis direction). The direction from the third partial region 10c to the third electrode 53 is along the first direction. The fourth partial region 10d is between the first partial region 10a and the third partial region 10b in the second direction (X-axis direction). c The fifth partial region 10e is located between the third partial region 10c and the second partial region 10b in the second direction.

[0068] The fifth nitride region 15 includes a sixth partial region 15f and a seventh partial region 15g. The direction from the fourth partial region 10d to the sixth partial region 15f is along the first direction (Z-axis direction). The direction from the fifth partial region 10e to the seventh partial region 15g is along the first direction.

[0069] The insulating member 61 is between the nitride member 10M and the third electrode 53. For example, the insulating member 61 includes a first insulating region 61p. The first insulating region 61p is provided between the third partial region 10c and the third electrode 53 in the first direction (the Z-axis direction).

[0070] The semiconductor device 120 may include a nitride semiconductor 111. In the semiconductor device 120, a current flowing between the first electrode 51 and the second electrode 52 can be controlled by the potential of the third electrode 53. The potential of the third electrode 53 is, for example, a potential based on the potential of the first electrode 51. The first electrode 51 functions as, for example, a source electrode. The second electrode 52 functions as, for example, a drain electrode. The third electrode 53 functions as, for example, a gate electrode. In one example, the semiconductor device 120 is a HEMT (High Electron Mobility Transistor). According to the embodiment, a semiconductor device capable of improving characteristics can be provided.

[0071] In the semiconductor device 120, at least a portion of the third electrode 53 is between the sixth partial region 15f and the seventh partial region 15g in the second direction (e.g., the X-axis direction). At least a portion of the third electrode 53 may be between the fourth partial region 10d and the fifth partial region 10e in the second direction (e.g., the X-axis direction). The semiconductor device 120 is, for example, a normally-off type.

[0072] FIG. 10 is a schematic cross-sectional view illustrating the semiconductor device according to the third embodiment. As shown in FIG. 10, the semiconductor device 121 according to the embodiment includes a nitride semiconductor according to the first embodiment (in this example, the nitride semiconductor 110), a first electrode 51, a second electrode 52, a third electrode 53, and an insulating member 61. In the semiconductor device 121, the third electrode 53 does not overlap with the sixth partial region 15f and the seventh partial region 15g in the second direction (for example, the X-axis direction). The third electrode 53 does not overlap with the fourth partial region 10d and the fifth partial region 10e in the second direction (for example, the X-axis direction). The semiconductor device 121 is, for example, of a normally-on type.

[0073] (Fourth Embodiment) The fourth embodiment relates to a method for manufacturing a nitride semiconductor. The method for manufacturing a nitride semiconductor according to the fourth embodiment may be applied to a method for manufacturing a wafer or a method for manufacturing a semiconductor device.

[0074] FIG. 11 is a flowchart illustrating a method for manufacturing a nitride semiconductor according to the fourth embodiment. As shown in FIG. 11, the method for manufacturing a nitride semiconductor according to the embodiment includes forming a second nitride region 12 (step S110) and forming a third nitride region 13 (step S120).

[0075] In the formation of the second nitride region 12, Al x1 Ga 1-x1 On the first nitride region 11 containing N (0 < x1 ≤ 1), a second nitride region 12 containing Al x2 Ga 1-x2 N (0 < x2 < 1, x2 < x1) and containing carbon is formed.

[0076] In the formation of the third nitride region 13, the third nitride region 13 is formed on the second nitride region 12. The third nitride region 13 contains Al, Ga, and N. The third nitride region 13 does not contain carbon. Or, the third carbon concentration in the third nitride region 13 is lower than the second carbon concentration in the second nitride region 12.

[0077] The carbon concentration in the second nitride region 12 can be controlled by, for example, at least one of the supply amount of the source gas used in forming the second nitride region 12 and the growth temperature. The source gas includes, for example, TMAl (trimethylaluminum) and TMGa (trimethylgallium). For example, increasing the supply amount of the source gas increases the carbon concentration in the second nitride region 12. Lowering the growth temperature increases the carbon concentration in the second nitride region 12. The carbon concentration in the third nitride region 13 can be controlled by, for example, at least one of the supply amount of the source gas used in forming the third nitride region 13 and the growth temperature. The source gas includes, for example, TMAl and TMGa. For example, increasing the supply amount of the source gas increases the carbon concentration in the third nitride region 13. Lowering the growth temperature increases the carbon concentration in the third nitride region 13. According to the embodiment, a method for manufacturing a nitride semiconductor capable of improving characteristics can be provided.

[0078] The third oxygen concentration in the third nitride region 13 may be higher than the second oxygen concentration in the second nitride region 12. The oxygen concentration in the second nitride region 12 can be controlled by, for example, at least one of the supply amount of the source gas used in forming the second nitride region 12 and the growth temperature. The source gas includes, for example, ammonia. For example, when the supply amount of the source gas is reduced, the oxygen concentration in the second nitride region 12 decreases. When the growth temperature is increased, the oxygen concentration in the second nitride region 12 decreases. The oxygen concentration in the third nitride region 13 can be controlled by, for example, at least one of the supply amount of the source gas used in forming the third nitride region 13 and the growth temperature. The source gas includes, for example, ammonia. For example, when the supply amount of the source gas is reduced, the oxygen concentration in the third nitride region 13 decreases. When the growth temperature is increased, the oxygen concentration in the third nitride region 13 decreases. According to the embodiment, a method for manufacturing a nitride semiconductor capable of improving characteristics can be provided.

[0079] In a semiconductor device using a nitride semiconductor, low on-resistance and high breakdown voltage can be obtained. In the semiconductor device, by reducing dislocations occurring in the crystal, better characteristics can be obtained. According to the embodiment, for example, dislocations can be reduced.

[0080] In the embodiment, information on the shape of the nitride region is obtained by, for example, electron microscope observation. Information on the composition and element concentration in the nitride region is obtained by, for example, EDX (Energy Dispersive X-ray Spectroscopy) or SIMS (Secondary Ion Mass Spectrometry). Information on the composition in the nitride region may be obtained by, for example, reciprocal space mapping.

[0081] According to the embodiments, it is possible to provide a nitride semiconductor, a wafer, a semiconductor device, and a method for manufacturing a nitride semiconductor that can improve characteristics.

[0082] In this specification, "electrically connected" includes a state in which multiple conductors are in physical contact with each other and a current flows between the multiple conductors. "Electrically connected" includes a state in which a conductor is inserted between multiple conductors and a current flows between the multiple conductors.

[0083] The above describes the embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements, such as the nitride region and the substrate, contained in the nitride semiconductor are included in the scope of the present invention as long as a person skilled in the art can carry out the present invention in a similar manner and obtain similar effects by appropriately selecting from the known range.

[0084] Furthermore, any combination of two or more elements of each of the specific examples, within the scope of technical feasibility, is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0085] In addition, all nitride semiconductors, wafers, semiconductor devices, and methods for manufacturing nitride semiconductors that can be implemented by a person skilled in the art by appropriate design modifications based on the nitride semiconductors, wafers, semiconductor devices, and methods for manufacturing nitride semiconductors described above as the embodiments of the present invention also fall within the scope of the present invention, so long as they include the gist of the present invention.

[0086] In addition, within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and these modifications and alterations are also considered to fall within the scope of the present invention.

[0087] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included in the scope and spirit of the invention, and are included in the scope of the invention and its equivalents described in the claims. [Explanation of symbols]

[0088] 10M...nitride member, 10a-10e...first to fifth partial regions, 11-15...first to fifth nitride regions, 13a, 13b...first and second regions, 14a, 14b...first and second film regions, 15f...sixth partial region, 15g...seventh partial region, 18s...substrate, 51-53...first to third electrodes, 61...insulating member, 61p...first insulating region, 110, 111...nitride semiconductor, 120...semiconductor device, 210, 211...wafer, C(Al)...Al composition ratio, CC2...second carbon concentration, CO...oxygen concentration, CO2...second oxygen concentration, DD...dislocation density, Int_Al...secondary ion intensity, Qx...inverse, Qz...inverse, pZ...position, t1, t2...first and second region thicknesses, tr1 to tr3: thickness of the first to third nitride regions, x1, x2, y1, y2: composition ratio, za3: composition ratio

Claims

1. A ｘ１ G １－ｘ１ a first nitride region including N, where 0<x1≦1; A ｘ２ G １－ｘ２ a second nitride region including N (0<x2<1, x2<x1) and including carbon; a third nitride region, the second nitride region being between the first nitride region and the third nitride region, the third nitride region containing Al, Ga and N, the third nitride region containing no carbon or a third carbon concentration in the third nitride region being lower than a second carbon concentration in the second nitride region; a nitride member including the second nitride region comprises oxygen; A nitride semiconductor, wherein a second oxygen concentration in the second nitride region is lower than a third oxygen concentration in the third nitride region.

2. The second carbon concentration is 1×10 １９ / cm ３ Above 8 x 10 １９ / cm ３ The nitride semiconductor according to claim 1 , wherein:

3. The third oxygen concentration is 3×10 １６ / cm ３ Above 5 x 10 １６ / cm ３ The nitride semiconductor according to claim 1 , wherein:

4. The second oxygen concentration is 4×10 １６ / cm ３ The nitride semiconductor according to claim 3 , wherein:

5. The nitride semiconductor according to any one of claims 1 to 4, wherein x2 is equal to or greater than 0.08 and equal to or less than 0.

28.

6. The nitride semiconductor according to any one of claims 1 to 5, wherein an Al composition ratio in the third nitride region is higher than an Al composition ratio in the second nitride region and lower than an Al composition ratio in the first nitride region.

7. The nitride semiconductor according to claim 6 , wherein the Al composition ratio in the third nitride region is not less than 0.18 and not more than 0.

38.

8. A ｘ１ G １－ｘ１ a first nitride region including N, where 0<x1≦1; A ｘ２ G １－ｘ２ a second nitride region including N (0<x2<1, x2<x1) and including carbon; a third nitride region, the second nitride region being between the first nitride region and the third nitride region, the third nitride region being free of carbon or a third carbon concentration in the third nitride region being lower than a second carbon concentration in the second nitride region; a nitride member including the second nitride region comprises oxygen; a second oxygen concentration in the second nitride region is lower than a third oxygen concentration in the third nitride region; the third nitride region includes a plurality of first regions and a plurality of second regions; in a first direction from the first nitride region to the second nitride region, one of the plurality of first regions is between one of the plurality of second regions and another one of the plurality of second regions, and the one of the plurality of second regions is between the one of the plurality of first regions and another one of the plurality of first regions; The first region is Al ｙ１ G １－ｙ１ N (0<y1≦1), The second region is Al ｙ２ G １－ｙ２ N (0≦y2<y1).

9. The nitride semiconductor according to claim 8 , wherein y2 is higher than x2.

10. The nitride semiconductor according to claim 8 , wherein y1 is equal to or less than x1.

11. a first region thickness along the first direction of each of the plurality of first regions is smaller than a second nitride region thickness along the first direction of the second nitride region; The nitride semiconductor according to claim 8, wherein a second region thickness along the first direction of each of the plurality of second regions is thinner than the second nitride region thickness.

12. a first region thickness along the first direction of each of the plurality of first regions is smaller than a first nitride region thickness along the first direction of the first nitride region; The nitride semiconductor according to claim 8, wherein a second region thickness along the first direction of each of the second regions is thinner than the first nitride region thickness.

13. Each of the plurality of first regions has a first region thickness t1 along the first direction, Each of the plurality of second regions has a second region thickness t2 along the first direction, The x2, the t1, the t2, the y1 and the y2 are x2<{(y1・t1+y2・t2) / (t1+t2)} The nitride semiconductor according to any one of claims 8 to 10, which satisfies the above.

14. Each of the plurality of first regions has a first region thickness t1 along the first direction, Each of the plurality of second regions has a second region thickness t2 along the first direction, The x1, the t1, the t2, the y1, and the y2 are {(y1・t1+y2・t2) / (t1+t2)}<x1 The nitride semiconductor according to claim 13 ,

15. Further comprising a substrate; The nitride semiconductor according to any one of claims 1 to 14, wherein the first nitride region is between the substrate and the third nitride region.

16. The nitride member is A ｘ４ G １－ｘ４ a fourth nitride region including N (0≦x4<1); and A ｘ５ G １－ｘ５ a fifth nitride region including N (0<x5≦1, x4<x5); Further comprising: the third nitride region is between the first nitride region and the fifth nitride region; the fourth nitride region is between the third nitride region and the fifth nitride region; The nitride semiconductor according to any one of claims 1 to 14.

17. the fourth nitride region includes a first film region and a second film region; the first film region is between the third nitride region and the second film region; the first film region includes carbon; The nitride semiconductor according to claim 16 , wherein the second film region does not contain carbon, or the carbon concentration in the second film region is lower than the carbon concentration in the first film region.

18. A nitride semiconductor according to any one of claims 1 to 14, A substrate; Equipped with the first nitride region is between the substrate and the third nitride region.

19. A nitride semiconductor according to any one of claims 1 to 7, A first electrode; A second electrode; A third electrode; An insulating member; Equipped with The nitride member is A ｘ４ G １－ｘ４ a fourth nitride region including N (0≦x4<1); and A ｘ５ G １－ｘ５ a fifth nitride region including N (0<x5≦1, x4<x5); Further comprising: the third nitride region is between the first nitride region and the fifth nitride region; the fourth nitride region is between the third nitride region and the fifth nitride region; a direction from the first electrode to the second electrode along a second direction that intersects a first direction from the first nitride region to the second nitride region; a position of the third electrode in the second direction is between a position of the first electrode in the second direction and a position of the second electrode in the second direction, the fourth nitride region includes a first sub-region, a second sub-region, a third sub-region, a fourth sub-region, and a fifth sub-region; A direction from the first partial region to the first electrode is along the first direction, a direction from the second partial region to the second electrode is along the first direction; the third partial region is between the first partial region and the second partial region in the second direction, and a direction from the third partial region to the third electrode is along the first direction; the fourth partial region is between the first partial region and the third partial region in the second direction, the fifth partial region is between the third partial region and the second partial region in the second direction, the fifth nitride region includes a sixth sub-region and a seventh sub-region, a direction from the fourth partial region to the sixth partial region is along the first direction; a direction from the fifth partial region to the seventh partial region is along the first direction; The insulating member is between the nitride member and the third electrode.

20. A nitride semiconductor according to any one of claims 8 to 14, A first electrode; A second electrode; A third electrode; An insulating member; Equipped with The nitride member is A ｘ４ G １－ｘ４ a fourth nitride region including N (0≦x4<1); and A ｘ５ G １－ｘ５ a fifth nitride region including N (0<x5≦1, x4<x5); Further comprising: the third nitride region is between the first nitride region and the fifth nitride region; the fourth nitride region is between the third nitride region and the fifth nitride region; a direction from the first electrode to the second electrode is along a second direction intersecting the first direction; a position of the third electrode in the second direction is between a position of the first electrode in the second direction and a position of the second electrode in the second direction, the fourth nitride region includes a first sub-region, a second sub-region, a third sub-region, a fourth sub-region, and a fifth sub-region; A direction from the first partial region to the first electrode is along the first direction, a direction from the second partial region to the second electrode is along the first direction; the third partial region is between the first partial region and the second partial region in the second direction, and a direction from the third partial region to the third electrode is along the first direction; the fourth partial region is between the first partial region and the third partial region in the second direction, the fifth partial region is between the third partial region and the second partial region in the second direction, the fifth nitride region includes a sixth sub-region and a seventh sub-region, a direction from the fourth partial region to the sixth partial region is along the first direction; a direction from the fifth partial region to the seventh partial region is along the first direction; The insulating member is between the nitride member and the third electrode.

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