Substrate processing system and group management device

Abstract

To provide a substrate processing system capable of suppressing an excess of a total flow rate of process liquid used by a plurality of substrate processing apparatuses over a maximum flow rate of process liquid that can be supplied by power facilities.SOLUTION: A substrate processing system 100 includes a plurality of substrate processing apparatuses 1 and a group management device 2. The substrate processing apparatus 1 is provided with a plan creation part 53. The plan creation part 53 creates a plan showing timing at which the process liquid is used and flow rate of the process liquid. The plurality of substrate processing apparatuses 1 are supplied with the process liquid by a shared power facilities PF. The group management device 2 is provided with a processing part 203. The processing part 203 determines on the basis of plans created by the respective plurality of substrate processing apparatuses 1 whether or not a total flow rate of the process liquid used by the plurality of substrate processing apparatuses 1 exceed a threshold TH, and when it is determined that the total flow rate exceeds the threshold TH, instructs one of the plurality of substrate processing apparatuses 1 to adjust the plan. The plan creation part 53 of the substrate processing apparatus 1 that is instructed to adjust the plan creates a plan where the total flow rate is the threshold or less.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a substrate processing system and a group management apparatus. [Background technology]

[0002] There is known a substrate processing apparatus that processes a substrate using a processing liquid. The substrate processing apparatus is installed in a clean room of a factory. The processing liquid is supplied to the substrate processing apparatus from a utility facility installed in the factory (for example, see Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2001-102425 A Summary of the Invention [Problem to be solved by the invention]

[0004] Generally, a factory is equipped with a plurality of substrate processing apparatuses. Therefore, when the plurality of substrate processing apparatuses process substrates simultaneously, processing liquid is supplied to the plurality of substrate processing apparatuses simultaneously from the utility equipment of the factory. However, in this case, the total flow rate of the processing liquid used by the plurality of substrate processing apparatuses may exceed the maximum flow rate of the processing liquid that can be supplied from the utility equipment. When the total flow rate of the processing liquid used by the plurality of substrate processing apparatuses exceeds the maximum flow rate of the utility equipment, an alarm is issued from the plurality of substrate processing apparatuses, and the plurality of substrate processing apparatuses are stopped.

[0005] The present invention has been made in consideration of the above-mentioned problems, and its object is to provide a substrate processing system and a group management device that can prevent the total flow rate of processing liquid used by multiple substrate processing apparatuses from exceeding the maximum flow rate of processing liquid that can be supplied from a utility facility. [Means for solving the problem]

[0006] According to one aspect of the present invention, a substrate processing system includes a plurality of substrate processing apparatuses for processing substrates, and a group management device for managing the plurality of substrate processing apparatuses. Each of the plurality of substrate processing apparatuses includes a plan creation unit and a first communication unit. The plan creation unit creates a plan indicating a timing for using a processing liquid and a flow rate of the processing liquid. The first communication unit communicates with the group management device and transmits the plan to the group management device. The processing liquid is supplied to the plurality of substrate processing apparatuses from a common utility facility. The group management device includes a storage unit, a second communication unit, and a processing unit. The storage unit stores a threshold value for a flow rate of the processing liquid supplied from the utility facility. The second communication unit communicates with the plurality of substrate processing apparatuses and receives the plan from each of the plurality of substrate processing apparatuses. The processing unit acquires a total flow rate of the processing liquid used by the plurality of substrate processing apparatuses based on the plan received by the second communication unit, and determines whether the total flow rate exceeds the threshold value. In response to determining that the total flow rate exceeds the threshold, the processor instructs one of the substrate processing apparatuses to adjust the plan via the second communication unit. The plan creation unit of an instruction target apparatus, which is a substrate processing apparatus that has been instructed to adjust the plan, creates the plan in which the total flow rate is equal to or less than the threshold.

[0007] In one embodiment, when instructing an adjustment of the plan, the processor transmits the plan or the total flow rate of the processing liquid of the plurality of substrate processing apparatuses to the instruction target apparatus via the second communication unit, and the plan creation unit of the instruction target apparatus creates the plan based on the plans of the plurality of substrate processing apparatuses or the total flow rate of the processing liquid, such that the total flow rate is equal to or less than the threshold value.

[0008] In one embodiment, the processor generates adjustment amount information indicating an adjustment amount for making the total flow rate equal to or less than the threshold value based on the plans or a total flow rate of the processing liquid of the plurality of substrate processing apparatuses, and transmits the adjustment amount information to the instruction target apparatus via the second communication unit when instructing an adjustment of the plan. The plan creation unit of the instruction target apparatus creates the plan for making the total flow rate equal to or less than the threshold value based on the adjustment amount information.

[0009] In one embodiment, the plan creation unit of the instruction target apparatus adjusts the plan corresponding to the substrate before processing begins.

[0010] In one embodiment, the processing section determines the instruction target apparatus based on a transmission timing, which is a timing at which the plurality of substrate processing apparatuses transmit the plan to the group management apparatus.

[0011] In one embodiment, the processing unit determines, as the instruction target apparatus, the substrate processing apparatus having the latest transmission timing among the plurality of substrate processing apparatuses.

[0012] In one embodiment, the plan indicates a substrate processing time that is a time from when the substrate is carried into the substrate processing apparatus from outside to inside the substrate processing apparatus to when the substrate is carried out to the outside of the substrate processing apparatus. The processing unit determines the target apparatus based on the substrate processing time.

[0013] In one embodiment, the processing section determines, as the instruction target apparatus, the substrate processing apparatus having the shortest substrate processing time among the plurality of substrate processing apparatuses.

[0014] In one embodiment, the plan indicates a processing end timing when the processing of the substrate is ended or a substrate unloading timing when the substrate is unloaded from the substrate processing apparatus, and the processing unit determines the instruction target apparatus based on the processing end timing or the substrate unloading timing.

[0015] In one embodiment, the processor determines, as the instruction target apparatus, the substrate processing apparatus having the latest processing end timing or substrate unloading timing among the plurality of substrate processing apparatuses.

[0016] In one embodiment, the plan indicates a processing start timing at which processing of the substrate starts, or a substrate carry-in timing at which the substrate is carried into the substrate processing apparatus from outside, and the processing unit determines the instruction target apparatus based on the processing start timing or the substrate carry-in timing.

[0017] In one embodiment, the processor determines, as the instruction target apparatus, the substrate processing apparatus having the latest processing start timing or substrate carry-in timing among the plurality of substrate processing apparatuses.

[0018] According to another aspect of the present invention, a group management device manages a plurality of substrate processing apparatuses for processing substrates. A processing liquid is supplied to each of the substrate processing apparatuses from a common utility facility. The group management device includes a memory unit, a communication unit, and a processing unit. The memory unit stores a threshold value for a flow rate of the processing liquid supplied from the utility facility. The communication unit communicates with the substrate processing apparatuses and receives a plan indicating a timing for using the processing liquid and a flow rate of the processing liquid from each of the substrate processing apparatuses. The processing unit obtains a total flow rate of the processing liquid used by the substrate processing apparatuses based on the plan received by the communication unit, and determines whether the total flow rate exceeds the threshold value. In response to determining that the total flow rate exceeds the threshold value, the processing unit instructs one of the substrate processing apparatuses to adjust the plan via the communication unit.

[0019] In one embodiment, the processing unit generates adjustment amount information indicating an adjustment amount for making the total flow rate below the threshold value based on the plan or the total flow rate of the processing liquid of the multiple substrate processing apparatuses, and when instructing an adjustment to the plan, transmits the adjustment amount information via the communication unit to the substrate processing apparatus that instructs the adjustment to the plan. Effect of the Invention

[0020] The substrate processing system and group management device according to the present invention can prevent the total flow rate of processing liquid used by a plurality of substrate processing apparatuses from exceeding the maximum flow rate of processing liquid that can be supplied from the power utility facility. [Brief description of the drawings]

[0021] [Figure 1] 1 is a diagram showing a substrate processing system according to an embodiment of the present invention; [Diagram 2] 1 is a diagram showing a substrate processing system according to an embodiment of the present invention; [Diagram 3] 1 is a diagram showing a substrate processing system according to an embodiment of the present invention; [Figure 4] 1 is a diagram showing a substrate processing system according to an embodiment of the present invention; [Diagram 5] FIG. 2 is a schematic plan view showing the substrate processing apparatus. [Figure 6] FIG. 2 is a block diagram showing a configuration of a computer of the substrate processing apparatus. [Figure 7] 1 is a block diagram showing a configuration of a group management device according to an embodiment of the present invention. [Figure 8] 5 is a flowchart showing the flow of processing executed by a processing unit provided in the group management device according to the embodiment of the present invention. [Figure 9] 4 is a flowchart showing a flow of processing executed by a control unit of a computer included in the substrate processing apparatus. [Figure 10] FIG. 11 illustrates a first example of a determination process. [Figure 11] FIG. 11 illustrates a second example of the determination process. [Figure 12] FIG. 11 illustrates a third example of the determination process. [Figure 13] FIG. 13 is a diagram illustrating a fourth example of the determination process. [Figure 14] FIG. 13 illustrates a fifth example of the determination process. [Figure 15] FIG. 13 is a diagram illustrating a sixth example of the determination process. [Figure 16]5 is a diagram showing an example of a time schedule created by a control unit of the substrate processing apparatus; FIG. [Figure 17] 13 is a diagram showing an example of an adjusted time schedule created by a control unit of the substrate processing apparatus; FIG. [Figure 18] 5 is a diagram showing an example of a time schedule created by a control unit of the substrate processing apparatus; FIG. [Figure 19] 13 is a diagram showing an example of an adjusted time schedule created by a control unit of the substrate processing apparatus; FIG. [Figure 20] FIG. 13 is a schematic view of a substrate processing apparatus according to another embodiment of the present invention. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Hereinafter, an embodiment of the substrate processing system and group management device of the present invention will be described with reference to the drawings (FIGS. 1 to 20). However, the present invention is not limited to the following embodiment, and can be embodied in various forms without departing from the gist of the present invention. Note that where explanations are repeated, they may be omitted as appropriate. Also, in the drawings, the same or corresponding parts are denoted by the same reference symbols, and explanations will not be repeated.

[0023] The "substrate" in the embodiment of the present invention can be any of various substrates such as a semiconductor wafer, a glass substrate for a photomask, a glass substrate for a liquid crystal display, a glass substrate for a plasma display, a substrate for an FED (Field Emission Display), a substrate for an optical disk, a substrate for a magnetic disk, and a substrate for a magneto-optical disk. In the following, the embodiment of the present invention will be described mainly using a substrate processing system and a group control device used for processing a disk-shaped semiconductor wafer as an example, but the present invention can be similarly applied to the processing of the various substrates exemplified above. In addition, various substrate shapes can be applied.

[0024] First, a substrate processing system 100 and a group management device 2 of the present embodiment will be described with reference to Figures 1 to 4. Figure 1 is a diagram showing a substrate processing system 100 of the present embodiment. As shown in Figure 1, the substrate processing system 100 includes a plurality of substrate processing apparatuses 1 and a group management device 2.

[0025] Each of the multiple substrate processing apparatuses 1 processes a substrate W (see FIG. 5) using a processing liquid. The group management device 2 manages the multiple substrate processing apparatuses 1. Specifically, the group management device 2 is communicatively connected to the multiple substrate processing apparatuses 1 via a network NW (see FIG. 6), receives various information from the multiple substrate processing apparatuses 1, and manages the multiple substrate processing apparatuses 1. The group management device 2 is, for example, a host computer or a server.

[0026] More specifically, the group management apparatus 2 manages a plurality of substrate processing apparatuses 1 divided into a plurality of areas A. In each of the plurality of areas A, a plurality of substrate processing apparatuses 1 are installed.

[0027] A processing liquid is supplied from a common utility facility PF through a common line L to a plurality of substrate processing apparatuses 1 installed in each of a plurality of areas A. A group management device 2 sets an area A in units of a plurality of substrate processing apparatuses 1 to which a processing liquid is supplied from the common utility facility PF, and manages the plurality of substrate processing apparatuses 1 for each area A.

[0028] In this embodiment, the group management device 2 manages a plurality of substrate processing apparatuses 1 installed in the first area A1 and a plurality of substrate processing apparatuses 1 installed in the second area A2. Note that, although the number of areas A is two in this embodiment, the number of areas A is not particularly limited. The number of areas A may be one, or may be three or more.

[0029] The utility facility PF includes a first utility facility PF1 and a second utility facility PF2. The first utility facility PF1 supplies pure water DIW to a plurality of substrate processing apparatuses 1 installed in the first area A1 via a first line L1. Similarly, the second utility facility PF2 supplies pure water DIW to a plurality of substrate processing apparatuses 1 installed in the second area A2 via a second line L2. The pure water DIW is, for example, deionized water. In the following, an embodiment of the present invention will be described taking as an example a case where pure water DIW is supplied from a common utility facility PF to a plurality of substrate processing apparatuses 1 installed in the same area A. The pure water DIW is an example of a "processing liquid."

[0030] Next, the substrate processing system 100 of the present embodiment will be described with reference to Fig. 2. Fig. 2 is a diagram showing the substrate processing system 100 of the present embodiment. However, for the sake of simplicity of explanation, Fig. 2 shows a plurality of substrate processing apparatuses 1 installed in the first area A1 shown in Fig. 1. In the following, the embodiment of the present invention will be described by taking the plurality of substrate processing apparatuses 1 installed in the first area A1 as an example.

[0031] As shown in Fig. 2, in this embodiment, the multiple substrate processing apparatuses 1 include four substrate processing apparatuses 1A to 1D. The substrate processing apparatuses 1A to 1D are installed in a first area A1 (the same area A), and are supplied with deionized water DIW from a first power utility facility PF1 (see Fig. 1). The substrate processing apparatuses 1A to 1D are an example of "substrate processing apparatuses 1 installed in the same area A." In the following, an embodiment of the present invention will be described taking the substrate processing apparatuses 1A to 1D as examples.

[0032] In this embodiment, the number of substrate processing apparatuses 1 installed in the first area A1 is four, but the number of substrate processing apparatuses 1 installed in the same area A is not particularly limited as long as it is more than one. The number of substrate processing apparatuses 1 installed in the same area A may be two or three, or may be five or more.

[0033] Each of the substrate processing apparatus 1 transmits a usage plan of the pure water DIW to the group control apparatus 2 via the network NW (see FIG. 6). Hereinafter, the usage plan of the pure water DIW may be referred to as a "DIW usage plan." The DIW usage plan indicates the timing at which the substrate processing apparatus 1 uses the pure water DIW and the flow rate of the pure water DIW per unit time. Specifically, the DIW usage plan indicates the timing at which the substrate processing apparatus 1 uses the pure water DIW in a chronological order. In other words, the DIW usage plan indicates the time at which the substrate processing apparatus 1 uses the pure water DIW. The flow rate of the pure water DIW per unit time indicates the amount of the pure water DIW used by the substrate processing apparatus 1 per unit time. Hereinafter, the flow rate of the pure water DIW per unit time may be referred to as a "flow rate of the pure water DIW."

[0034] In detail, the DIW usage plan indicates the timing of using the DIW water in a plan after the current time and the flow rate of the DIW water. Each substrate processing apparatus 1 creates a DIW usage plan and transmits it to the group management apparatus 2, for example, every time a new substrate W is placed on its load port LP (see FIG. 5).

[0035] In this embodiment, each of the substrate processing apparatuses 1 creates a time schedule P for each of its components and transmits it to the group management device 2. The components of the substrate processing apparatus 1 include, for example, a loading section 3, a discharge section 7, a buffer unit BU, a transport mechanism CV, and a processing unit SP, which will be described later with reference to FIG. 5. The time schedule P indicates the scheduled start time of the operation of each component and the scheduled end time of the operation of each component. The time schedule P includes the timing of using the pure water DIW and the flow rate of the pure water DIW.

[0036] As shown in FIG. 2, the group management device 2 generates total flow rate information AFR indicating the total flow rate per unit time of the pure water DIW used by the substrate processing devices 1A to 1D in a chronological order based on the DIW usage plan (time schedule P) transmitted from the substrate processing devices 1A to 1D. Hereinafter, the total flow rate per unit time of the pure water DIW may be referred to as the "total flow rate of pure water DIW" or the "total DIW flow rate." The total DIW flow rate indicates the sum of the usage amounts of the pure water DIW used per unit time by the multiple substrate processing devices 1 installed in the same area A. The total flow rate information AFR indicates the total DIW flow rate along the time axis. More specifically, the total flow rate information AFR indicates the total DIW flow rate planned after the current time.

[0037] Specifically, the group management device 2 generates management information ASC that summarizes the DIW usage plans (time schedule P) transmitted from the substrate processing apparatuses 1A to 1D, and manages the substrate processing apparatuses 1A to 1D based on the management information ASC. Furthermore, the group management device 2 generates total flow rate information AFR based on the management information ASC.

[0038] FIG. 3 is a diagram showing the substrate processing system 100 of this embodiment. As shown in FIG. 3, the group management device 2 judges whether the total DIW flow rate exceeds a threshold value TH based on the total flow rate information AFR. Here, the threshold value TH indicates a threshold value for the flow rate of the pure water DIW supplied from the utility facility PF (see FIG. 1). For example, the threshold value TH may indicate a threshold value for the maximum flow rate per unit time of the pure water DIW that can be supplied from the utility facility PF (see FIG. 1). Hereinafter, the process of judging whether the total flow rate of the pure water DIW exceeds the threshold value TH may be referred to as a "threshold value judgment process". Also, the maximum flow rate per unit time of the pure water DIW may be referred to as a "maximum flow rate of the pure water DIW". Note that the threshold value TH is set for each utility facility PF.

[0039] When the group management device 2 determines that the total DIW flow rate exceeds the threshold value TH as a result of the threshold determination process, it transmits a readjustment command RA to one of the substrate processing devices 1A to 1D to instruct the adjustment of the DIW usage plan. Hereinafter, the substrate processing device 1 instructed to adjust the DIW usage plan may be referred to as the "instruction target device."

[0040] Specifically, the group management device 2 identifies the substrate processing apparatus 1 that uses the pure water DIW during the time period when the total DIW flow rate exceeds the threshold value TH based on the management information ASC. Then, one of the substrate processing apparatuses 1 that uses the pure water DIW at the time when the total DIW flow rate exceeds the threshold value TH is determined as the instruction target apparatus. Hereinafter, the process of determining the instruction target apparatus may be referred to as the "determination process."

[0041] 3, the group management apparatus 2 transmits a readjustment command RA to the substrate processing apparatus 1B. In the following, an embodiment of the present invention will be described taking as an example a case in which the substrate processing apparatus 1B is an instruction target apparatus.

[0042] Fig. 4 is a diagram showing the substrate processing system 100 of this embodiment. For the sake of simplicity, however, Fig. 4 shows a substrate processing apparatus 1B, which is an instruction target apparatus, and a group control apparatus 2.

[0043] As shown in Fig. 4, in this embodiment, the group management apparatus 2 transmits the management information ASC described with reference to Fig. 2 to the substrate processing apparatus 1B (instruction target apparatus). The substrate processing apparatus 1B (instruction target apparatus) adjusts the DIW usage plan (time schedule P) by referring to the management information ASC. In detail, the substrate processing apparatus 1B adjusts its own DIW usage plan (time schedule P) by referring to the DIW usage plans (time schedule P) of the other substrate processing apparatuses 1 (substrate processing apparatuses 1A, 1C, and 1D) installed in the first area A1.

[0044] The substrate processing apparatus 1B transmits the adjusted DIW use plan (time schedule P) to the group control apparatus 2. The group control apparatus 2 updates the DIW use plan (time schedule P) of the substrate processing apparatus 1B to the adjusted DIW use plan (time schedule P) and performs the threshold determination process described with reference to FIG. 3 again. As a result, when it is determined that the DIW total flow rate exceeds the threshold value TH, the group control apparatus 2 transmits a readjustment command RA to the substrate processing apparatus 1B (instruction target apparatus). That is, the group control apparatus 2 transmits the readjustment command RA to the substrate processing apparatus 1B (instruction target apparatus) until the DIW total flow rate does not exceed the threshold value TH. Therefore, according to this embodiment, the total flow rate of the pure water DIW used by the multiple substrate processing apparatuses 1 can be prevented from exceeding the maximum flow rate of the pure water DIW that can be supplied from the power utility facility PF.

[0045] Next, the substrate processing system 100 and the group management apparatus 2 of this embodiment will be further described with reference to Figs. 5 to 19. First, the configuration of the substrate processing apparatus 1 will be described with reference to Fig. 5. Fig. 5 is a schematic plan view showing the substrate processing apparatus 1. As shown in Fig. 5, in this embodiment, the substrate processing apparatus 1 is of a batch type and processes a plurality of substrates W collectively. Specifically, the substrate processing apparatus 1 processes the substrates W in units of lots. A lot is made up of a plurality of substrates W. For example, one lot is made up of 25 substrates W. In this embodiment, the substrate processing apparatus 1 performs pre-processing, cleaning processing, etching processing, and drying processing on the substrates W of each lot.

[0046] As shown in FIG. 5, the substrate processing apparatus 1 includes a loading section 3, a discharge section 7, a buffer unit BU, a transport mechanism CV, a processing unit SP, and a computer CM1.

[0047] The processing unit SP includes a plurality of tanks TA. In this embodiment, the plurality of tanks TA include two first chemical liquid tanks CHB1, CHB2, four second chemical liquid tanks ONB1-ONB4, and two drying tanks LPD1, LPD2. That is, in this embodiment, the processing unit SP includes eight tanks TA. Note that the number of tanks TA is not limited to eight, and may be any number between one and seven, or may be nine or more.

[0048] The transport mechanism CV includes a first transport mechanism CTC and a second transport mechanism WTR. The transport mechanism CV further includes sub-transport mechanisms LF1, LF2, LF3, LF4, LF5, and LF6. The number of sub-transport mechanisms is changed depending on the number of tanks TA.

[0049] The computer CM1 controls the multiple storage units 10, the input unit 3, the output unit 7, the buffer unit BU, the transport mechanism CV, and the processing unit SP.

[0050] Each of the multiple storage units 10 stores multiple substrates W. Each substrate W is stored in the storage unit 10 in a horizontal position. Specifically, each storage unit 10 stores one lot of substrates W. The storage unit 10 is, for example, a front opening unified pod (FOUP).

[0051] The accommodation part 10 for storing the unprocessed substrate W is placed in the input part 3. Specifically, the input part 3 includes a plurality of load ports LP. The accommodation part 10 for storing the unprocessed substrate W is placed in the load port LP of the input part 3.

[0052] The accommodation unit 10 for storing the processed substrate W is placed on the discharge unit 7. Specifically, the discharge unit 7 includes a plurality of load ports LP. The accommodation unit 10 for storing the processed substrate W is placed on the load port LP of the discharge unit 7.

[0053] The buffer unit BU is disposed adjacent to the input section 3 and the discharge section 7. The buffer unit BU takes in the storage section 10 placed in the input section 3. A shelf (not shown) is provided inside the buffer unit BU, and the buffer unit BU places the storage section 10 placed in the input section 3 on the shelf. The buffer unit BU takes out the unprocessed substrate W from the storage section 10 placed on the shelf, and hands it over to the transport mechanism CV.

[0054] The buffer unit BU also takes in the accommodation section 10 placed on the discharge section 7 and places it on the shelf. The buffer unit BU receives the processed substrate W from the transport mechanism CV and stores it in the accommodation section 10 placed on the shelf. The buffer unit BU also discharges the accommodation section 10 containing the processed substrate W to the discharge section 7.

[0055] Specifically, the buffer unit BU has a transfer mechanism 11. The transfer mechanism 11 transfers the storage units 10 between the input unit 3 and the discharge unit 7 and the shelf. The transfer mechanism 11 also transfers the substrates W between the transport mechanism CV and the shelf. Specifically, the transfer mechanism 11 takes out unprocessed substrates W from the two storage units 10 placed on the shelf and transfers them to the transport mechanism CV. That is, the transfer mechanism 11 transfers two lots of unprocessed substrates W as a set to the transport mechanism CV. The transfer mechanism 11 also receives two lots of processed substrates W from the transport mechanism CV and stores the processed substrates W in each lot in each of the two storage units 10 placed on the shelf. Hereinafter, two lots of substrates W may be referred to as a "set of substrates W". One set of substrates W is, for example, made up of 50 substrates W.

[0056] The transport mechanism CV loads a set of substrates W into the processing unit SP. The transport mechanism CV also loads the set of substrates W out of the processing unit SP. Specifically, the transport mechanism CV loads the set of substrates W into each of the tanks TA of the processing unit SP. The transport mechanism CV also loads the set of substrates W out of each of the tanks TA of the processing unit SP. The processing unit SP performs pre-processing, cleaning processing, etching processing, and drying processing on the set of substrates W. The pre-processing, cleaning processing, etching processing, and drying processing are examples of "substrate processing".

[0057] More specifically, the delivery mechanism 11 delivers a set of substrates W to and from the first transport mechanism CTC. The first transport mechanism CTC converts the orientation of the set of substrates W received from the delivery mechanism 11 from a horizontal orientation to a vertical orientation, and then delivers the set of substrates W to the second transport mechanism WTR. In addition, the first transport mechanism CTC receives a set of processed substrates W from the second transport mechanism WTR, and then converts the orientation of the set of substrates W from a vertical orientation to a horizontal orientation, and delivers the set of substrates W to the delivery mechanism 11.

[0058] The second transport mechanism WTR transfers a set of substrates W among the sub-transport mechanisms LF1, LF2, LF3, LF4, LF5, and LF6. The second transport mechanism WTR also transports a set of substrates W into the drying tanks LPD1 and LPD2, and transports a set of substrates W out of the drying tanks LPD1 and LPD2.

[0059] The sub-transport mechanism LF1 carries a set of substrates W into the second chemical liquid tank ONB1 and carries the set of substrates W out of the second chemical liquid tank ONB1. The sub-transport mechanism LF2 carries a set of substrates W into the first chemical liquid tank CHB1 and carries the set of substrates W out of the first chemical liquid tank CHB1. The sub-transport mechanism LF3 carries a set of substrates W into the second chemical liquid tank ONB2 and carries the set of substrates W out of the second chemical liquid tank ONB2. The sub-transport mechanism LF4 carries a set of substrates W into the first chemical liquid tank CHB2 and carries the set of substrates W out of the first chemical liquid tank CHB2. The sub-transport mechanism LF5 carries a set of substrates W into the second chemical liquid tank ONB3 and carries the set of substrates W out of the second chemical liquid tank ONB3. The sub-transport mechanism LF6 carries a set of substrates W into the second chemical liquid bath ONB4, and carries the set of substrates W out of the second chemical liquid bath ONB4.

[0060] The first chemical liquid tanks CHB1 and CHB2 perform a pretreatment using a chemical liquid on a pair of substrates W. The pretreatment is a treatment using a chemical liquid that is performed before an etching treatment (specifically, a wet etching treatment). In this embodiment, the pretreatment is a treatment for removing a native oxide film from the substrates W. In this case, the chemical liquid may be, for example, diluted hydrofluoric acid (DHF).

[0061] Specifically, the first chemical tanks CHB1 and CHB2 each include a processing tank that stores a chemical liquid. The sub-transport mechanism LF2 carries a set of substrates W into the first chemical tank CHB1 and immerses the set of substrates W in the chemical liquid stored in the processing tank. As a result, pre-processing is performed on the set of substrates W. Thereafter, the sub-transport mechanism LF2 lifts the set of substrates W out of the chemical liquid in the processing tank and carries the set of substrates W out of the first chemical tank CHB1. The sub-transport mechanism LF4 operates in a similar manner.

[0062] The first chemical baths CHB1 and CHB2 further include ultrasonic generators that generate ultrasonic waves to vibrate the chemical baths stored in the processing baths, thereby making it possible to efficiently remove native oxide films from the substrates W.

[0063] Specifically, the ultrasonic generator is disposed outside the treatment tank. Pure water DIW for propagating ultrasonic waves to the treatment tank is circulated between the ultrasonic generator and the treatment tank. Hereinafter, the pure water DIW for propagating ultrasonic waves may be referred to as "propagating water DIW". In this embodiment, the DIW use plan described with reference to FIG. 2 indicates the use timing of the propagating water DIW in the first chemical tanks CHB1 and CHB2 and the flow rate of the propagating water DIW in the first chemical tanks CHB1 and CHB2. That is, the time schedule P described with reference to FIG. 2 indicates the use timing of the propagating water DIW in the first chemical tanks CHB1 and CHB2 and the flow rate of the propagating water DIW in the first chemical tanks CHB1 and CHB2. Here, the use timing of the propagating water DIW indicates the time when the flow of the propagating water DIW starts and the time when the flow of the propagating water DIW ends. That is, the use timing of the propagating water DIW indicates the period from when the flow of the propagating water DIW starts to when it ends.

[0064] The chemicals in the first chemical tanks CHB1 and CHB2 are replaced as needed. When replacing the chemicals, pure water DIW is introduced into the processing tank for cleaning. The DIW use plan described with reference to FIG. 2 may further indicate the use timing of the pure water DIW used when cleaning the first chemical tanks CHB1 and CHB2 and the flow rate of the pure water DIW used when cleaning the first chemical tanks CHB1 and CHB2. Here, the use timing of the pure water DIW indicates the time to start introducing the pure water DIW into the processing tank and the time to end introducing the pure water DIW into the processing tank. In other words, the use timing of the pure water DIW indicates the period from the start to the end of introducing the pure water DIW into the processing tank.

[0065] The second chemical liquid tanks ONB1 to ONB4 perform a cleaning process using a rinsing liquid and an etching process using an etching liquid on a set of substrates W. Specifically, each of the second chemical liquid tanks ONB1 to ONB4 includes a shower nozzle and a processing tank.

[0066] The shower nozzle discharges droplets of the rinse liquid toward a set of substrates W positioned above the processing tank. As a result, the set of substrates W is subjected to a cleaning process using the rinse liquid. The rinse liquid contains pure water (DIW). The rinse liquid is, for example, pure water (DIW), ozone water, nitrogen water, or warm pure water. Ozone water is a rinse liquid obtained by mixing ozone into pure water (DIW). Nitrogen water is a rinse liquid obtained by mixing nitrogen into pure water (DIW). Warm pure water is a rinse liquid obtained by heating pure water (DIW).

[0067] The processing tank stores an etching solution. A set of substrates W is immersed in the etching solution in the processing tank. As a result, the set of substrates W is subjected to an etching process using the etching solution. The etching solution contains pure water (DIW). The etching solution is an aqueous solution containing tetramethylammonium hydroxide (TMAH), an aqueous solution containing trimethyl-2-hydroxyethylammonium hydroxide (TMY), or ammonium hydroxide (aqueous ammonia).

[0068] The sub-transport mechanism LF1 loads a set of substrates W into the second chemical liquid bath ONB1 and moves the set of substrates W above the processing bath. The shower nozzle ejects droplets of rinsing liquid toward the set of substrates W held by the sub-transport mechanism LF1, cleaning the set of substrates W with the rinsing liquid. As a result, the rinsing liquid accumulates in the processing bath. After cleaning with the rinsing liquid, the rinsing liquid in the processing bath is discharged.

[0069] After the rinsing liquid is discharged, an etching liquid is supplied into the processing tank. As a result, the etching liquid is stored in the processing tank. When the etching liquid is stored in the processing tank, the sub-transport mechanism LF1 moves the set of substrates W into the processing tank. As a result, the set of substrates W is immersed in the etching liquid in the processing tank, and the set of substrates W is etched. Thereafter, the sub-transport mechanism LF1 lifts the set of substrates W out of the etching liquid in the processing tank, and transports the set of substrates W out of the second chemical liquid tank ONB1. The etching liquid in the processing tank is discharged from the processing tank after the set of substrates W is lifted out of the etching liquid.

[0070] The second chemical liquid tanks ONB2 to ONB4 and the sub-transport mechanisms LF3, LF5, and LF6 operate in the same manner as the second chemical liquid tank ONB1 and the sub-transport mechanism LF1, and therefore a description thereof will be omitted.

[0071] In this embodiment, the DIW use plan described with reference to Fig. 2 indicates the timing of discharge of the rinsing liquid (timing of use of the shower nozzle) in the second chemical liquid tank ONB1 to the second chemical liquid tank ONB4, and the flow rate of the pure water DIW used when discharging the rinsing liquid. That is, the time schedule P described with reference to Fig. 2 indicates the timing of use of the shower nozzle in the second chemical liquid tank ONB1 to the second chemical liquid tank ONB4, and the flow rate of the pure water DIW used when discharging the rinsing liquid. Here, the discharge timing of the rinsing liquid indicates the time to start discharging the rinsing liquid and the time to end discharging the rinsing liquid. That is, the discharge timing of the rinsing liquid indicates the period from the start to the end of discharging the rinsing liquid.

[0072] The DIW usage plan described with reference to FIG. 2 indicates the timing of supplying the etching liquid to the processing tanks, the second chemical tank ONB1 to the second chemical tank ONB4, and the flow rate of the pure water DIW used when supplying the etching liquid. That is, the time schedule P described with reference to FIG. 2 indicates the timing of supplying the etching liquid to the processing tanks, the second chemical tank ONB1 to the second chemical tank ONB4, and the flow rate of the pure water DIW used when supplying the etching liquid. Here, the timing of supplying the etching liquid indicates the time to start supplying the etching liquid to the processing tanks and the time to end supplying the etching liquid to the processing tanks. That is, the timing of supplying the etching liquid indicates the period from the start to the end of supplying the etching liquid to the processing tanks.

[0073] The second chemical liquid tanks ONB1 to ONB4 further include ultrasonic generators, similar to the first chemical liquid tanks CHB1 and CHB2. In this embodiment, the DIW use plan described with reference to Fig. 2 indicates the use timing of the transfer water DIW in the second chemical liquid tanks ONB1 to ONB4 and the flow rates of the transfer water DIW in the second chemical liquid tanks ONB1 to ONB4. That is, the time schedule P described with reference to Fig. 2 indicates the use timing of the transfer water DIW in the second chemical liquid tanks ONB1 to ONB4 and the flow rates of the transfer water DIW in the second chemical liquid tanks ONB1 to ONB4.

[0074] The drying tanks LPD1 and LPD2 perform a drying process on a set of substrates W. In detail, the drying tanks LPD1 and LPD2 each include a gas nozzle and a processing tank.

[0075] The gas nozzle ejects vapor of an organic solvent toward a set of substrates W positioned above the processing tank. As a result, the set of substrates W can be dried. The vapor of the organic solvent is, for example, vapor of isopropyl alcohol (IPA). The processing tank stores pure water (DIW). The set of substrates W is immersed in the pure water (DIW) in the processing tank, and the set of substrates W is rinsed.

[0076] The second transport mechanism WTR transports the set of substrates W into the drying tank LPD1 and immerses the set of substrates W in the pure water DIW stored in the processing tank. As a result, the set of substrates W is rinsed. Thereafter, the second transport mechanism WTR lifts the set of substrates W from the pure water DIW in the processing tank. When the set of substrates W is lifted from the pure water DIW in the processing tank, the pure water DIW is discharged from the processing tank. After the pure water DIW is discharged from the processing tank, vapor of an organic solvent is discharged from a gas nozzle. As a result, the set of substrates W is dried. The second transport mechanism WTR transports the set of substrates W after drying out of the drying tank LPD1.

[0077] The operation of the drying tank LPD2 and the operation of the second transport mechanism WTR relative to the drying tank LPD2 are similar to the operation of the drying tank LPD1 and the operation of the second transport mechanism WTR relative to the drying tank LPD1, and therefore description thereof will be omitted.

[0078] The processing tanks of the drying tanks LPD1 and LPD2 are supplied with pure water DIW before the second transport mechanism WTR carries in a set of substrates W into the drying tanks LPD1 and LPD2. In this embodiment, the DIW use plan described with reference to FIG. 2 indicates the timing of supplying pure water DIW to the processing tanks of the drying tanks LPD1 and LPD2 and the flow rate of the pure water DIW supplied to the processing tanks of the drying tanks LPD1 and LPD2. That is, the time schedule P described with reference to FIG. 2 indicates the timing of supplying pure water DIW to the processing tanks of the drying tanks LPD1 and LPD2 and the flow rate of the pure water DIW supplied to the processing tanks of the drying tanks LPD1 and LPD2. Here, the timing of supplying pure water DIW indicates the time to start supplying pure water DIW to the processing tanks and the time to end supplying pure water DIW to the processing tanks. That is, the timing of supplying pure water DIW indicates the period from the start to the end of supplying pure water DIW to the processing tanks.

[0079] Next, the substrate processing apparatus 1 will be further described with reference to Fig. 5. As shown in Fig. 5, the substrate processing apparatus 1 further includes a cleaning tank CHCL. The cleaning tank CHCL cleans the second transport mechanism WTR. In this embodiment, the hand of the second transport mechanism WTR is washed with pure water DIW in the cleaning tank CHCL. Therefore, the substrate processing apparatus 1 uses pure water DIW when cleaning the second transport mechanism WTR.

[0080] In this embodiment, the DIW usage plan described with reference to Fig. 2 indicates the timing for cleaning the second transport mechanism WTR and the flow rate of the DIW pure water used when cleaning the second transport mechanism WTR. That is, the time schedule P described with reference to Fig. 2 indicates the timing for cleaning the second transport mechanism WTR and the flow rate of the DIW pure water used when cleaning the second transport mechanism WTR.

[0081] More specifically, the cleaning tank CHCL includes a shower nozzle and a processing tank. The shower nozzle discharges droplets of pure water DIW toward a hand of a second transport mechanism WTR located above the processing tank. The processing tank stores the pure water DIW. The hand of the second transport mechanism WTR is immersed in the pure water DIW in the processing tank. The DIW usage plan described with reference to FIG. 2 indicates the timing of discharging the pure water DIW in the cleaning tank CHCL (timing of using the shower nozzle) and the flow rate of the pure water DIW used when discharging the pure water DIW. The DIW usage plan described with reference to FIG. 2 also indicates the timing of supplying the pure water DIW to the processing tank of the cleaning tank CHCL and the flow rate of the pure water DIW used when supplying the pure water DIW.

[0082] Next, the computer CM1 of the substrate processing apparatus 1 will be described with reference to Fig. 6. Fig. 6 is a block diagram showing the configuration of the computer CM1 of the substrate processing apparatus 1. As shown in Fig. 6, the computer CM1 includes a communication unit 51, a storage unit 52, and a control unit 53. Hereinafter, the communication unit 51 of the substrate processing apparatus 1 may be referred to as a "first communication unit 51". Also, the storage unit 52 of the substrate processing apparatus 1 may be referred to as a "first storage unit 52".

[0083] The first communication unit 51 is connected to the network NW by wire or wirelessly. The network NW includes, for example, the Internet, a LAN (Local Area Network), and a public telephone network. The first communication unit 51 is a communication device, for example, a network interface controller. The first communication unit 51 communicates with the group management device 2 connected to the network NW.

[0084] The first communication unit 51 transmits the DIW usage plan described with reference to Fig. 2 to the group management device 2. In this embodiment, the first communication unit 51 transmits the time schedule P described with reference to Fig. 2 to the group management device 2. The first communication unit 51 also receives the readjustment command RA described with reference to Fig. 3 from the group management device 2. Furthermore, the first communication unit 51 receives management information ASC from the group management device 2, as described with reference to Fig. 4.

[0085] The first memory unit 52 stores various data and various computer programs. The various data include recipe data. The recipe data indicates a plurality of recipes. Each of the plurality of recipes specifies, for example, the processing content and processing procedure of the substrate W. For example, each of the plurality of recipes specifies the use timing of the processing liquid and the flow rate per unit time of the processing liquid when the processing unit SP processes the substrate. The use timing of the processing liquid indicates the time to start using the processing liquid and the time to end using the processing liquid. In other words, the use timing of the processing liquid indicates the period from the start to the end of using the processing liquid. The flow rate per unit time of the processing liquid indicates the amount of processing liquid used per unit time.

[0086] The first storage unit 52 includes a main storage device. The main storage device is, for example, a semiconductor memory. The first storage unit 52 further includes an auxiliary storage device. The auxiliary storage device includes, for example, at least one of a semiconductor memory and a hard disk drive. The first storage unit 52 may include a removable medium.

[0087] The control unit 53 includes a processor. The control unit 53 includes, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit) as the processor. The control unit 53 controls the operation of each unit of the substrate processing apparatus 1 based on the computer program and data stored in the first storage unit 52.

[0088] 2 based on the recipe data stored in the first storage unit 52. Then, the control unit 53 causes the first communication unit 51 to transmit the created DIW usage plan. In this embodiment, the control unit 53 creates the time schedule P described with reference to FIG. 2 based on the recipe data, and causes the first communication unit 51 to transmit the time schedule P. The control unit 53 is an example of a "plan creation unit."

[0089] Furthermore, when the control unit 53 receives the readjustment command RA and the management information ASC via the first communication unit 51, the control unit 53 refers to the management information ASC to create a DIW usage plan (time schedule P) in which the total DIW flow rate is equal to or less than the threshold value TH. In detail, as described with reference to Fig. 4, the control unit 53 refers to the DIW usage plans (time schedule P) of other substrate processing apparatuses 1 installed in the same area A to adjust the DIW usage plan (time schedule P) of its own apparatus. Also, as described with reference to Fig. 4, the control unit 53 repeatedly updates (adjusts) the DIW usage plan (time schedule P) to create a DIW usage plan (time schedule P) in which the total DIW flow rate is equal to or less than the threshold value TH.

[0090] Next, the group management device 2 will be described with reference to Fig. 7. Fig. 7 is a block diagram showing the configuration of the group management device 2 of this embodiment. As shown in Fig. 7, the group management device 2 includes a communication unit 201, a memory unit 202, and a processing unit 203. Hereinafter, the communication unit 201 of the group management device 2 may be referred to as a "second communication unit 201". Furthermore, the memory unit 202 of the group management device 2 may be referred to as a "second memory unit 202".

[0091] The second communication unit 201 is connected to the network NW in a wired or wireless manner. The second communication unit 201 is a communication device, for example, a network interface controller. The second communication unit 201 communicates with a plurality of substrate processing apparatuses 1 connected to the network NW.

[0092] The second communication unit 201 receives the DIW usage plan described with reference to Fig. 2 from each of the substrate processing apparatuses 1. In this embodiment, the second communication unit 201 receives the time schedule P described with reference to Fig. 2 from each of the substrate processing apparatuses 1. The second communication unit 201 also transmits the readjustment command RA described with reference to Fig. 3 to the instruction target apparatus. Furthermore, the second communication unit 201 transmits management information ASC to the instruction target apparatus as described with reference to Fig. 4.

[0093] The second storage unit 202 stores various data and various computer programs. The various data include the threshold value TH described with reference to FIG. 3. More specifically, the second storage unit 202 stores the threshold value TH for each power utility facility PF. The second storage unit 202 has a main storage device. The main storage device is, for example, a semiconductor memory. The second storage unit 202 further has an auxiliary storage device. The auxiliary storage device includes, for example, at least one of a semiconductor memory and a hard disk drive. The second storage unit 202 may include a removable medium.

[0094] The processing unit 203 includes a processor. The processing unit 203 includes, for example, a CPU or an MPU as a processor. The processing unit 203 executes various processes based on the computer programs and data stored in the second storage unit 202. Specifically, the processing unit 203 generates the total flow rate information AFR and the management information ASC described with reference to FIG. 2. The processing unit 203 also executes the threshold judgment process and the determination process described with reference to FIG. 3. Furthermore, the processing unit 203 transmits the readjustment command RA and the management information ASC to the instruction target device via the second communication unit 201 as described with reference to FIGS. 3 and 4.

[0095] Next, the processing executed by the processing unit 203 of the group management apparatus 2 will be described with reference to Fig. 8. Fig. 8 is a flowchart showing the flow of the processing executed by the processing unit 203 included in the group management apparatus 2 of this embodiment. The processing shown in Fig. 8 starts in response to the second communication unit 201 receiving a DIW usage plan (time schedule P). For ease of understanding, the processing shown in Fig. 8 will be described below by taking the substrate processing apparatuses 1A to 1D described with reference to Figs. 1 to 4 as examples.

[0096] 8, when the second communication unit 201 receives a DIW usage plan of any of the substrate processing apparatuses 1A to 1D, the processing unit 203 acquires the total DIW flow rate of the first area A1 based on the DIW usage plan received from the substrate processing apparatuses 1A to 1D, and generates total flow rate information AFR of the first area A1 (step S1). More specifically, the processing unit 203 compiles the DIW usage plans (time schedule P) of the substrate processing apparatuses 1A to 1D to generate management information ASC of the first area A1. Then, the processing unit 203 generates the total flow rate information AFR of the first area A1 based on the management information ASC.

[0097] After generating the total flow rate information AFR for the first area A1, the processing unit 203 determines whether the total DIW flow rate for the first area A1 exceeds the threshold value TH based on the total flow rate information AFR and the threshold value TH (step S2).

[0098] When the processor 203 determines that the total DIW flow rate in the first area A1 does not exceed the threshold TH (No in step S2), the processor 203 ends the process shown in Fig. 8. On the other hand, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold TH (Yes in step S2), the processor 203 determines one of the substrate processing apparatuses 1A to 1D as an instruction target apparatus (step S3). Then, the processor 203 instructs the instruction target apparatus to adjust the DIW usage plan via the second communication unit 201 (step S4), and ends the process shown in Fig. 8.

[0099] More specifically, the processing unit 203 identifies the substrate processing apparatus 1 that uses the pure water DIW during the time period when the total DIW flow rate exceeds the threshold value TH based on the management information ASC. Then, based on a predetermined condition, the processing unit 203 determines one of the substrate processing apparatuses 1 that uses the pure water DIW during the time period when the total DIW flow rate exceeds the threshold value TH as the instruction target apparatus (determination process). After executing the determination process, the processing unit 203 transmits a readjustment command RA to the instruction target apparatus via the second communication unit 201.

[0100] In this embodiment, when transmitting the readjustment command RA, the processing unit 203 transmits the management information ASC of the first area A1 (area A where the instruction target apparatus is installed) to the instruction target apparatus via the second communication unit 201. As a result, the DIW usage plan (time schedule P) of the other substrate processing apparatus 1 installed in the first area A1 (area A where the instruction target apparatus is installed) is transmitted to the instruction target apparatus.

[0101] Next, the process executed by the control unit 53 of the computer CM1 included in the substrate processing apparatus 1 will be described with reference to Fig. 9. Fig. 9 is a flowchart showing the flow of the process executed by the control unit 53 of the computer CM1 included in the substrate processing apparatus 1. The process shown in Fig. 9 starts in response to the first communication unit 51 receiving a readjustment command RA. That is, the process shown in Fig. 9 shows the flow of the process executed by the control unit 53 of the instruction target apparatus. In the following, for ease of understanding, the process shown in Fig. 9 will be described taking as an example a case where the substrate processing apparatus 1B described with reference to Figs. 1 to 4 is determined as the instruction target apparatus.

[0102] 9, when the first communication unit 51 receives the readjustment command RA, the control unit 53 adjusts the DIW usage plan (time schedule P) (step S11). In this embodiment, the control unit 53 adjusts the DIW usage plan (time schedule P) by referring to the management information ASC. Specifically, the control unit 53 adjusts the DIW usage plan (time schedule P) of the substrate processing apparatus 1B by referring to the DIW usage plans (time schedule P) of the other substrate processing apparatuses 1 (substrate processing apparatuses 1A, 1C, 1D) installed in the first area A1.

[0103] When the DIW usage plan (time schedule P) is adjusted, the control unit 53 transmits the adjusted DIW usage plan (time schedule P) to the group management device 2 via the first communication unit 51 (step S12), and ends the processing shown in Fig. 9. When the processing unit 203 of the group management device 2 receives the adjusted DIW usage plan (time schedule P), it starts the processing described with reference to Fig. 8.

[0104] Next, the determination process (step S3 in FIG. 8) executed by the processing unit 203 of the group management apparatus 2 will be described with reference to FIGS. 10 to 15. For ease of understanding, the determination process will be described below using the substrate processing apparatuses 1A to 1D described with reference to FIGS. 1 to 4 as examples.

[0105] 10 is a diagram showing a first example of the determination process. In the first example of the determination process, the processor 203 determines the instruction target apparatus based on the timing at which the substrate processing apparatus 1 transmits the DIW usage plan (time schedule P) to the group management apparatus 2. Hereinafter, the timing at which the substrate processing apparatus 1 transmits the DIW usage plan (time schedule P) to the group management apparatus 2 may be referred to as the "transmission timing."

[0106] 10, when the processing unit 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processing unit 203 acquires the reception time at which the second communication unit 201 received the DIW usage plan from the substrate processing apparatus 1A to 1D (step S301). In more detail, when the second communication unit 201 receives the DIW usage plan (time schedule P), the processing unit 203 stores the reception time of the DIW usage plan (time schedule P) in the second storage unit 202. The processing unit 203 acquires the reception time from the second storage unit 202.

[0107] The processor 203 determines one of the substrate processing apparatuses 1A to 1D as the instruction target apparatus based on the reception time of the DIW usage plan from the substrate processing apparatuses 1A to 1D (step S302). As a result, the process shown in FIG. 10 ends.

[0108] For example, the processing unit 203 may determine, as the instruction target apparatus, the substrate processing apparatus 1 having the latest transmission timing among the substrate processing apparatuses 1A to 1D. Specifically, the processing unit 203 may determine, as the instruction target apparatus, the substrate processing apparatus 1 having the latest reception time of the DIW usage plan among the substrate processing apparatuses 1A to 1D. As a result, it is possible to give priority to substrate processing by the substrate processing apparatus 1 having created the time schedule P relatively early among the substrate processing apparatuses 1A to 1D, and to suppress a decrease in throughput of the substrate processing apparatus 1 having created the time schedule P relatively early.

[0109] Alternatively, the processing unit 203 may determine, as the instruction target apparatus, the substrate processing apparatus 1 having the earliest transmission timing among the substrate processing apparatuses 1A to 1D. Specifically, the processing unit 203 may determine, as the instruction target apparatus, the substrate processing apparatus 1 having the earliest reception time of the DIW usage plan among the substrate processing apparatuses 1A to 1D. As a result, it is possible to suppress a decrease in throughput of the substrate processing apparatus 1 having created the time schedule P relatively late among the substrate processing apparatuses 1A to 1D, and to equalize the throughput of the entire area A in which the instruction target apparatuses are installed.

[0110] 11 is a diagram showing a second example of the determination process. In the second example of the determination process, the processor 203 determines the instruction target apparatus based on the substrate processing time. The substrate processing time includes the time from when the substrate W is carried into the substrate processing apparatus 1 from the outside to when the substrate W is carried out of the substrate processing apparatus 1. In detail, the substrate processing time includes the time from when the substrate W placed on the load port LP of the substrate processing apparatus 1 is transported into the substrate processing apparatus 1, processed in the substrate processing apparatus 1, and then placed on another load port LP of the substrate processing apparatus 1.

[0111] In the substrate processing apparatus 1 shown in Figure 5, the substrate processing time indicates the time from when two storage sections 10 are loaded from the input section 3 into the buffer unit BU, when unprocessed substrates W (a set of substrates W) taken out of the two storage sections 10 are processed by the processing unit SP, when the processed substrates W (a set of substrates W) are stored in the two storage sections 10, and when the two storage sections 10 containing the processed substrates W are discharged to the discharge section 7.

[0112] 11, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processor 203 calculates a substrate processing time from the time schedule P (management information ASC) of the substrate processing apparatuses 1A to 1D (step S311). Then, the processor 203 determines one of the substrate processing apparatuses 1A to 1D as an instruction target apparatus based on the substrate processing time (step S312). As a result, the process shown in FIG. 11 ends.

[0113] For example, the processor 203 may determine the substrate processing apparatus 1 having the shortest substrate processing time as the instruction target apparatus among the substrate processing apparatuses 1A to 1D. As a result, the throughput of the entire area A in which the instruction target apparatuses are installed can be made uniform.

[0114] Alternatively, the processor 203 may determine the substrate processing apparatus 1 having the longest substrate processing time among the substrate processing apparatuses 1A to 1D as the substrate processing target apparatus. As a result, the substrate processing can be preferentially performed by the substrate processing apparatus 1 having the relatively short substrate processing time among the substrate processing apparatuses 1A to 1D, and a decrease in the throughput of the substrate processing apparatus 1 having the relatively short substrate processing time can be suppressed.

[0115] Fig. 12 is a diagram showing a third example of the determination process. In the third example of the determination process, the processor 203 determines the instruction target apparatus based on the processing end timing at which the processing of the substrates W ends. In the substrate processing apparatus 1 shown in Fig. 5, the processing end timing indicates the timing at which a set of substrates W after being processed by the processing unit SP is accommodated in the two accommodation parts 10.

[0116] 12, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processor 203 acquires the processing end time from the time schedule P (management information ASC) of the substrate processing apparatuses 1A to 1D (step S321). In the substrate processing apparatus 1 shown in FIG. 5, the processing end time indicates the time when a set of substrates W after being processed by the processing unit SP is accommodated in the two accommodation sections 10.

[0117] The processing unit 203 determines one of the substrate processing apparatuses 1A to 1D as the instruction target apparatus based on the processing end time (step S322), and as a result, the processing shown in FIG.

[0118] For example, the processor 203 may determine the substrate processing apparatus 1 having the latest processing end timing (processing end time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the substrate processing can be preferentially performed by the substrate processing apparatus 1 having the relatively early processing end timing (processing end time) among the substrate processing apparatuses 1A to 1D, and a decrease in the throughput of the substrate processing apparatus 1 having the relatively early processing end timing (processing end time) can be suppressed.

[0119] Alternatively, the processor 203 may determine the substrate processing apparatus 1 having the earliest processing end timing (processing end time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the throughput of the entire area A in which the instruction target apparatuses are installed can be made uniform.

[0120] Fig. 13 is a diagram showing a fourth example of the determination process. In the fourth example of the determination process, the processor 203 determines the instruction target device based on the substrate unloading timing, which is the timing at which the substrate W is unloaded outside the substrate processing apparatus 1. In detail, the substrate unloading timing indicates the timing at which the processed substrate W is placed on the load port LP of the substrate processing apparatus 1. In the substrate processing apparatus 1 shown in Fig. 5, the substrate unloading timing indicates the timing at which the two accommodation parts 10, which accommodate a set of substrates W after being processed by the processing unit SP, are unloaded to the unloading part 7.

[0121] 13, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processor 203 acquires the substrate unloading time from the time schedule P (management information ASC) of the substrate processing apparatuses 1A to 1D (step S331). In the substrate processing apparatus 1 shown in FIG. 5, the substrate unloading time indicates the time when the two accommodation parts 10, which accommodate a set of substrates W after being processed by the processing unit SP, are unloaded to the unloading part 7.

[0122] The processing unit 203 determines one of the substrate processing apparatuses 1A to 1D as the instruction target apparatus based on the substrate unloading time (step S332), and as a result, the process shown in FIG.

[0123] For example, the processor 203 may determine the substrate processing apparatus 1 having the latest substrate unloading timing (substrate unloading time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the substrate processing can be preferentially performed by the substrate processing apparatus 1 having the relatively early substrate unloading timing (substrate unloading time) among the substrate processing apparatuses 1A to 1D, and a decrease in the throughput of the substrate processing apparatus 1 having the relatively early substrate unloading timing (substrate unloading time) can be suppressed.

[0124] Alternatively, the processing unit 203 may determine the substrate processing apparatus 1 having the earliest substrate unloading timing (substrate unloading time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the throughput of the entire area A in which the instruction target apparatuses are installed can be made uniform.

[0125] Fig. 14 is a diagram showing a fifth example of the determination process. In the fifth example of the determination process, the processor 203 determines the instruction target apparatus based on the processing start timing at which processing of substrates W is started. In the substrate processing apparatus 1 shown in Fig. 5, the processing start timing indicates the timing at which processing of two lots of unprocessed substrates W is started to be combined into one set.

[0126] 14, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processor 203 acquires a processing start time from the time schedule P (management information ASC) of the substrate processing apparatuses 1A to 1D (step S341). In the substrate processing apparatus 1 shown in FIG. 5, the processing start time indicates the time at which processing begins to combine two lots of unprocessed substrates W into one set.

[0127] The processing unit 203 determines one of the substrate processing apparatuses 1A to 1D as the instruction target apparatus based on the processing start time (step S342), and as a result, the processing shown in FIG.

[0128] For example, the processor 203 may determine the substrate processing apparatus 1 having the latest processing start timing (processing start time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the substrate processing can be preferentially performed by the substrate processing apparatus 1 having the relatively earliest processing start timing (processing start time) among the substrate processing apparatuses 1A to 1D, and a decrease in the throughput of the substrate processing apparatus 1 having the relatively earliest processing start timing (processing start time) can be suppressed.

[0129] Alternatively, the processor 203 may determine the substrate processing apparatus 1 having the earliest processing start timing (processing start time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the throughput of the entire area A in which the instruction target apparatuses are installed can be made uniform.

[0130] Fig. 15 is a diagram showing a sixth example of the determination process. In the sixth example of the determination process, the processor 203 determines the instruction target device based on a substrate carry-in timing, which is the timing at which the substrate W is carried in from the outside of the substrate processing apparatus 1 to the inside. Specifically, the substrate carry-in timing indicates the timing at which the substrate W placed on the load port LP of the substrate processing apparatus 1 is transported into the inside of the substrate processing apparatus 1. In the substrate processing apparatus 1 shown in Fig. 5, the substrate carry-in timing indicates the timing at which the accommodation section 10 is loaded from the loading section 3 into the buffer unit BU. Specifically, of the loading timings of the two accommodation sections 10 that store the substrates W to be combined into a pair of substrates W, the earlier loading timing corresponds to the substrate carry-in timing.

[0131] 15, when the processor 203 determines that the total DIW flow rate in the first area A1 exceeds the threshold value TH (Yes in step S2 in FIG. 8), the processor 203 acquires the substrate loading time from the time schedule P (management information ASC) of the substrate processing apparatuses 1A to 1D (step S351). In the substrate processing apparatus 1 shown in FIG. 5, the substrate loading time indicates the time when the accommodation section 10 is loaded from the loading section 3 into the buffer unit BU. In detail, the earlier loading time of the two accommodation sections 10 that store the substrates W to be combined into a set of substrates W corresponds to the substrate loading time.

[0132] The processing unit 203 determines one of the substrate processing apparatuses 1A to 1D as the instruction target apparatus based on the substrate carry-in time (step S352), and as a result, the process shown in FIG.

[0133] For example, the processor 203 may determine the substrate processing apparatus 1 having the latest substrate carry-in timing (substrate carry-in time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the substrate processing can be preferentially performed by the substrate processing apparatus 1 having the relatively early substrate carry-in timing (substrate carry-in time) among the substrate processing apparatuses 1A to 1D, and a decrease in the throughput of the substrate processing apparatus 1 having the relatively early substrate carry-in timing (substrate carry-in time) can be suppressed.

[0134] Alternatively, the processing unit 203 may determine the substrate processing apparatus 1 having the earliest substrate loading timing (substrate loading time) among the substrate processing apparatuses 1A to 1D as the instruction target apparatus. As a result, the throughput of the entire area A in which the instruction target apparatuses are installed can be made uniform.

[0135] Next, with reference to Figs. 16 and 17, the time schedule P created by the control unit 53 of the substrate processing apparatus 1 will be described using the substrate processing apparatus 1B as an example. Fig. 16 is a diagram showing an example of the time schedule P created by the control unit 53 of the substrate processing apparatus 1B. Fig. 17 is a diagram showing an example of an adjusted time schedule P created by the control unit 53 of the substrate processing apparatus 1B. In Figs. 16 and 17, the vertical axis indicates resources and the horizontal axis indicates time t. The resources indicate objects to be controlled by the control unit 53. The time schedule P shown in Figs. 16 and 17 includes time schedules P1 to P5.

[0136] Figures 16 and 17 further show an example of the total flow rate information AFR generated by the processing unit 203 of the group management device 2. In Figures 16 and 17, the vertical axis indicates the total DIW flow rate, and the horizontal axis indicates time t.

[0137] Time schedules P1 to P5 each show the processing flow for a set of substrates W. Specifically, time schedules P1 to P3 and time schedule P5 show a plan for a set of substrates W to pass through the first chemical liquid tank CHB2, the second chemical liquid tank ONB2, the second chemical liquid tank ONB4, and the drying tank LPD2, in that order. Time schedule P4 shows a plan for a set of substrates W to pass through the first chemical liquid tank CHB1, the second chemical liquid tank ONB1, the second chemical liquid tank ONB3, and the drying tank LPD1, in that order. The processing flows defined by time schedules P1 to P5 start in this order.

[0138] 16, from time t11 to time t12, a part of the process defined in the time schedule P3 and a part of the process defined in the time schedule P4 are simultaneously executed, and the total DIW flow rate exceeds the threshold value TH. Also, from time t13 to time t14, a part of the process defined in the time schedule P3, a part of the process defined in the time schedule P4, and a part of the process defined in the time schedule P5 are simultaneously executed, and the total DIW flow rate exceeds the threshold value TH. When the substrate processing apparatus 1B is determined as the instruction target apparatus, the control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P.

[0139] 17, the control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P to delay the time schedules P4 and P5. Specifically, the control unit 53 delays the time schedules P4 and P5 so that only the processes defined in the time schedule P3 are executed from time t11 to time t12. The control unit 53 of the substrate processing apparatus 1B also delays the time schedules P4 and P5 so that only the processes defined in the time schedule P3 are executed from time t13 to time t14. As a result, as shown in FIG. 17, the total DIW flow rate is equal to or less than the threshold value TH at all times.

[0140] 16 and 17, the adjustment amount calculation process executed by the control unit 53 of the substrate processing apparatus 1 will be described using the substrate processing apparatus 1B as an example. The control unit 53 of the substrate processing apparatus 1B calculates the adjustment amounts of the time schedules P4 and P5 based on the management information ASC so that the total DIW flow rate during the period from time t11 to time t12 becomes the threshold value TH. The adjustment amount indicates the amount of movement of the time schedule P (DIW usage plan) along the time axis. The control unit 53 of the substrate processing apparatus 1B adjusts the time schedules P4 and P5 based on the adjustment amount. That is, the control unit 53 of the substrate processing apparatus 1B moves the time schedules P4 and P5 along the time axis by the adjustment amount.

[0141] Specifically, the control unit 53 of the substrate processing apparatus 1B calculates, as the adjustment amount, a delay amount (delay time) for changing the start time of the time schedule P4 to time t12 or later. Then, a time schedule P is created by delaying the time schedules P4 and P5 based on the delay amount, and transmitted to the group management device 2. Thereafter, the control unit 53 again acquires the readjustment command RA and management information ASC from the group management device 2, and calculates a delay amount for changing the start time of the time schedule P4 to time t14 or later. Then, a time schedule P is created by delaying the time schedules P4 and P5 based on the delay amount. As a result, the time schedule P is adjusted as shown in FIGS. 16 and 17.

[0142] Next, with reference to Figs. 18 and 19, the time schedule P created by the control unit 53 of the substrate processing apparatus 1 will be described using the substrate processing apparatus 1B as an example. Fig. 18 is a diagram showing an example of the time schedule P created by the control unit 53 of the substrate processing apparatus 1B. Fig. 19 is a diagram showing an example of an adjusted time schedule P created by the control unit 53 of the substrate processing apparatus 1B. In Figs. 18 and 19, the vertical axis indicates resources, and the horizontal axis indicates time t. The time schedule P shown in Figs. 18 and 19 includes time schedule P1 to time schedule P3. Note that the number of the processing step is indicated after "-".

[0143] 18 and 19, a time schedule P1 shows the process flow for two lots 1 and 2. A time schedule P2 shows the process flow for two lots 3 and 4. A time schedule P3 shows the process flow for two lots 5 and 6.

[0144] Time schedule P1 includes processing steps P1-1 to P1-6. Time schedule P2 includes processing steps P2-1 to P2-6. Time schedule P3 includes processing steps P3-1 to P3-6. The processing flows defined by time schedules P1 to P3 start in this order.

[0145] 18 and 19, a time schedule P1 shows a plan for using pure water DIW. Specifically, the time schedule P1 shows the use of pure water DIW in processing steps P1-3 to P1-5. More specifically, the time schedule P1 shows a period during which pure water DIW is used. Time schedules P2 and P3 also show plans for using pure water DIW.

[0146] Processing step P1-1 indicates a processing step of combining substrates W of lots 1 and 2 into one set in the buffer unit BU. Processing step P1-2 indicates a pre-processing step using the first chemical liquid tank CHB2. Processing step P1-3 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB2. Processing step P1-4 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB4. Processing step P1-5 indicates a drying processing step using the drying tank LPD2. Processing step P1-6 indicates a processing step of separating a set of substrates W into lots 1 and 2 in the buffer unit BU.

[0147] Processing step P2-1 indicates a processing step of combining substrates W of lots 3 and 4 into one set in the buffer unit BU. Processing step P2-2 indicates a pre-processing step using the first chemical liquid tank CHB1. Processing step P2-3 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB1. Processing step P2-4 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB3. Processing step P2-5 indicates a drying processing step using the drying tank LPD1. Processing step P2-6 indicates a processing step of separating a set of substrates W into lots 3 and 4 in the buffer unit BU.

[0148] Processing step P3-1 indicates a processing step of combining substrates W of lots 5 and 6 into one set in the buffer unit BU. Processing step P3-2 indicates a pre-processing step using the first chemical liquid tank CHB2. Processing step P3-3 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB2. Processing step P3-4 indicates a cleaning processing step and an etching processing step using the second chemical liquid tank ONB4. Processing step P3-5 indicates a drying processing step using the drying tank LPD1. Processing step P3-6 indicates a processing step of separating the set of substrates W into lots 5 and 6 in the buffer unit BU.

[0149] In the example shown in FIG. 18, the process defined in the time schedule P3 starts at time ts1. That is, the process step P3-1 starts at time ts1. Therefore, time ts1 indicates the start time of the process defined in the time schedule P3. Also, the process defined in the time schedule P3 ends at time t E 1. In other words, the process P3-6 ends at time t E 1. Therefore, at time t E 1 indicates the end time of the processing defined in the time schedule P3. Hereinafter, the start time of the processing defined in the time schedule P3 may be referred to as the "processing start time of the time schedule P3." Also, the end time of the processing defined in the time schedule P3 may be referred to as the "processing end time of the time schedule P3."

[0150] In the example shown in Fig. 18, time tc is the current time. Hereinafter, time tc may be referred to as "current time tc." At the current time tc, the processes defined in the time schedules P1 and P2 have already started, and the process defined in the time schedule P3 has not yet started.

[0151] 18, processing steps P2-4 and P3-4 are simultaneously performed from time t21 to time t22, and the total DIW flow rate exceeds the threshold value TH. When the substrate processing apparatus 1B is determined as the instruction target apparatus, the control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P.

[0152] The control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P in which processing has not started at the current time tc, among the time schedules P1 to P3. That is, the control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P corresponding to the unprocessed substrate W. In the example shown in FIG. 18, the time schedule P in which processing has not started at the current time tc is the time schedule P3. Therefore, as shown in FIG. 19, the control unit 53 of the substrate processing apparatus 1B delays the time schedule P3.

[0153] Specifically, the time schedule P3 is delayed so that the time when the pure water DIW is used in the processing step P3-4 is different from the time when the pure water DIW is used in the processing step P2-4. As a result, the total DIW flow rate is equal to or less than the threshold value TH at all times. In addition, as a result of delaying the time schedule P3, the processing start time of the time schedule P3 is delayed from time ts1 to time ts2, and the processing end time of the time schedule P3 is delayed from time ts3 to time ts4. E 1 to time t E Delay to 2.

[0154] Here, with reference to FIG. 18 and FIG. 19, the adjustment amount calculation process executed by the control unit 53 of the substrate processing apparatus 1 will be described by taking the substrate processing apparatus 1B as an example. The control unit 53 of the substrate processing apparatus 1B calculates an adjustment amount of the time schedule P3 based on the management information ASC so that the total DIW flow rate during the period from time t21 to time t22 becomes the threshold value TH. Then, the control unit 53 of the substrate processing apparatus 1B adjusts the time schedule P3 based on the adjustment amount. Specifically, the control unit 53 of the substrate processing apparatus 1B calculates a delay amount that causes the start time of the processing process P3-4 to be after time t22. Alternatively, the control unit 53 of the substrate processing apparatus 1B calculates a delay amount that causes the start time of the processing process P3-4 to be after the end time of the processing process P2-4. Then, the control unit 53 of the substrate processing apparatus 1B creates a time schedule P in which the time schedule P3 is delayed based on the delay amount. As a result, the time schedule P is adjusted as shown in FIG. 18 and FIG. 19.

[0155] The embodiments of the present invention have been described above with reference to the drawings (FIGS. 1 to 19). However, the present invention is not limited to the above embodiments, and can be implemented in various aspects without departing from the gist of the present invention. In addition, the components disclosed in the above embodiments can be modified as appropriate. For example, a certain component among all the components shown in one embodiment may be added to a component of another embodiment, or some components among all the components shown in one embodiment may be deleted from the embodiment.

[0156] The drawings are mainly schematic illustrations of each component to facilitate understanding of the invention, and the thickness, length, number, spacing, etc. of each component shown in the drawings may differ from the actual ones due to the convenience of creating the drawings. Furthermore, the configurations of each component shown in the above embodiment are merely examples and are not particularly limited, and it goes without saying that various modifications are possible within a range that does not substantially deviate from the effects of the present invention.

[0157] 1 to 19, the DIW usage plan (time schedule P) is adjusted so that the total flow rate of the pure water DIW supplied from the utility facility PF is equal to or less than the threshold value TH, but the object of control is not limited to the total flow rate of the pure water DIW. For example, the total flow rate of the chemicals supplied from the utility facility may be controlled.

[0158] 1 to 19, the control unit 53 of the substrate processing apparatus 1 (instruction target apparatus) adjusts the DIW usage plan (time schedule P) by referring to the management information ASC, but the control unit 53 of the substrate processing apparatus 1 (instruction target apparatus) may adjust the DIW usage plan (time schedule P) by referring to the total DIW flow rate. In this case, the processing unit 203 of the group management apparatus 2 transmits the total flow rate information AFR together with the readjustment command RA to the instruction target apparatus via the second communication unit 201.

[0159] 1 to 19, the control unit 53 of the substrate processing apparatus 1 (instruction target apparatus) calculates the adjustment amount (delay amount) of the DIW use plan (time schedule P), but the processing unit 203 of the group management apparatus 2 may calculate the adjustment amount (delay amount) of the DIW use plan (time schedule P) based on the management information ASC or the total DIW flow rate. In this case, the processing unit 203 of the group management apparatus 2 transmits adjustment amount information indicating the adjustment amount (delay amount) of the DIW use plan (time schedule P) together with the readjustment command RA to the instruction target apparatus via the second communication unit 201. As a result, the control unit 53 of the instruction target apparatus creates a DIW use plan (time schedule P) in which the total DIW flow rate is equal to or less than the threshold value TH based on the adjustment amount information.

[0160] Furthermore, in the embodiment described with reference to Figs. 1 to 19, the substrate processing apparatus 1 is of a batch type, but the substrate processing apparatus 1 may be of a single-wafer type. Hereinafter, the substrate processing apparatus 1 of another embodiment will be described with reference to Fig. 20. Fig. 20 is a schematic diagram of the substrate processing apparatus 1 of another embodiment. More specifically, Fig. 20 is a schematic plan view of the substrate processing apparatus 1 of the other embodiment. Hereinafter, the substrate processing apparatus 1 shown in Fig. 20 may be referred to as "substrate processing apparatus 1E". The substrate processing apparatus 1E processes substrates W. More specifically, the substrate processing apparatus 1E is of a single-wafer type, and performs substrate processing for each substrate W.

[0161] As shown in FIG. 20, the substrate processing apparatus 1E includes a plurality of processing units 301, a fluid cabinet 302, a plurality of fluid boxes 303, a plurality of load ports LP, an indexer robot IR, a center robot CR, and a computer CM2.

[0162] A substrate W is placed on each of the load ports LP. More specifically, the accommodation unit 10 described with reference to FIG. 5 is placed on each of the load ports LP. The indexer robot IR transports the substrate W between the load port LP and the center robot CR. More specifically, the indexer robot IR transports the substrate W between the accommodation unit 10 placed on the load port LP and the center robot CR. The center robot CR transports the substrate W between the indexer robot IR and the processing unit 301. Note that a placement stage (path) on which the substrate W is temporarily placed may be provided between the indexer robot IR and the center robot CR, and the device may be configured to indirectly transfer the substrate W between the indexer robot IR and the center robot CR via the placement stage.

[0163] The processing units 301 form a plurality of towers TW (four towers TW in FIG. 20). The towers TW are arranged to surround the center robot CR in a plan view. Each tower TW includes a plurality of processing units 301 (three processing units 301 in FIG. 20) stacked vertically.

[0164] The fluid cabinet 302 contains a processing liquid. Each of the fluid boxes 303 corresponds to one of the towers TW. The processing liquid in the fluid cabinet 302 is supplied to all of the processing units 301 included in the tower TW corresponding to the fluid box 303 via one of the fluid boxes 303.

[0165] Each of the processing units 301 supplies a processing liquid to the substrate W to process the substrate W. The processing liquid includes deionized water (DIW) and a chemical liquid.

[0166] The computer CM2 controls the operation of each part of the substrate processing apparatus 1E. For example, the computer CM2 controls the load port LP, the indexer robot IR, the center robot CR, and the processing unit 301.

[0167] 1 to 19, computer CM2 creates a DIW usage plan (time schedule P) and transmits it to the group management device 2. Also, like computer CM1 described with reference to Figures 1 to 19, when computer CM2 receives a readjustment command RA and management information ASC from the group management device 2, computer CM2 refers to the management information ASC and creates a DIW usage plan (time schedule P) in which the total DIW flow rate is equal to or less than a threshold value TH. The configuration of computer CM2 and the processing executed by computer CM2 are similar to those of computer CM1 described with reference to Figures 1 to 19, and therefore detailed description thereof will be omitted.

[0168] 11 includes the time from when an unprocessed substrate W placed on a load port LP of the substrate processing apparatus 1 is transported into the substrate processing apparatus 1 by the indexer robot IR, processed by the processing unit 301, and then placed by the indexer robot IR on another load port LP of the substrate processing apparatus 1. More specifically, the substrate processing time includes the time from when an unprocessed substrate W accommodated in an accommodation unit 10 placed on a load port LP of the substrate processing apparatus 1 is transported into the substrate processing apparatus 1 by the indexer robot IR, processed by the processing unit 301, and then placed by the indexer robot IR on another load port LP of the substrate processing apparatus 1.

[0169] Furthermore, when the substrate processing apparatus 1 is of the single-wafer type, the processing end timing is the substrate unloading timing. That is, the processing end timing indicates the timing when the processed substrate W is placed on the load port LP by the indexer robot IR. More specifically, the processing end timing indicates the timing when the processed substrate W is accommodated in the accommodation unit 10 placed on the load port LP. Similarly, when the substrate processing apparatus 1 is of the single-wafer type, the processing start timing is the substrate load timing. That is, the processing start timing indicates the timing when the unprocessed substrate W placed on the load port LP is transported into the substrate processing apparatus 1 by the indexer robot IR. More specifically, the processing start timing indicates the timing when the unprocessed substrate W is transported from the accommodation unit 10 placed on the load port LP into the substrate processing apparatus 1 by the indexer robot IR. [Industrial Applicability]

[0170] The present invention is useful in the field of substrate processing. [Explanation of symbols]

[0171] 1: Substrate processing equipment 2:Group control device 51: First Communications Department 52: 1st memory section 53: Control section 100: Substrate processing system 201: 2nd Communications Department 202:Second memory section 203: Processing section AFR: Total flow information CM1: Computer CM2: Computer P: Time Schedule PF: Utility equipment RA: Readjustment instruction W: Substrate

Claims

1. A substrate processing system including a plurality of substrate processing apparatuses for processing substrates, and a group management device for managing the plurality of substrate processing apparatuses, Each of the plurality of substrate processing apparatuses includes: a schedule generator for generating a schedule indicating the timing of use of the treatment liquid and the flow rate of the treatment liquid; a first communication unit that communicates with the group management device and transmits the plan to the group management device; Equipped with the processing liquid is supplied to the plurality of substrate processing apparatuses from a common utility facility; The group management device includes: a storage unit that stores a threshold value for a flow rate of the treatment liquid supplied from the power utility facility; a second communication unit that communicates with the plurality of substrate processing apparatuses and receives the plan from each of the plurality of substrate processing apparatuses; a processing unit that acquires a total flow rate of the processing liquid used by the plurality of substrate processing apparatuses based on the plan received by the second communication unit, and determines whether the total flow rate exceeds the threshold value; Equipped with the processing unit instructs one of the plurality of substrate processing apparatuses to adjust the plan via the second communication unit in response to determining that the total flow rate exceeds the threshold value; A substrate processing system, comprising: a substrate processing apparatus that is instructed to adjust the plan among the plurality of substrate processing apparatuses; and a plan creation unit of the substrate processing apparatus that creates the plan in which the total flow rate is equal to or less than the threshold value.

2. the processor transmits the plan or a total flow rate of the processing liquid of the plurality of substrate processing apparatuses to the instruction target apparatus via the second communication unit when instructing an adjustment of the plan; The substrate processing system according to claim 1 , wherein the plan creation unit of the instruction target apparatus creates the plan based on the plans of the plurality of substrate processing apparatuses or a total flow rate of the processing liquid, so that the total flow rate is equal to or less than the threshold value.

3. the processing unit generates adjustment amount information indicating an adjustment amount for making the total flow rate equal to or less than the threshold value based on the plan or a total flow rate of the processing liquid of the plurality of substrate processing apparatuses, and transmits the adjustment amount information to the instruction target apparatus via the second communication unit when instructing an adjustment of the plan; The substrate processing system according to claim 1 , wherein the plan creation unit of the instruction target apparatus creates the plan based on the adjustment amount information so that the total flow rate is equal to or less than the threshold value.

4. The substrate processing system according to claim 1 , wherein the plan creation unit of the instruction target apparatus adjusts the plan corresponding to the substrate before processing is started.

5. The substrate processing system according to claim 1 , wherein the processing unit determines the target device based on a transmission timing, which is a timing at which the plurality of substrate processing devices transmit the plan to the group management device.

6. The substrate processing system according to claim 5 , wherein the processing unit determines, as the instruction target apparatus, the substrate processing apparatus having the latest transmission timing among the plurality of substrate processing apparatuses.

7. the plan indicates a substrate processing time that is a time from when the substrate is carried into the substrate processing apparatus from the outside to the inside of the substrate processing apparatus to when the substrate is carried out to the outside of the substrate processing apparatus; The substrate processing system according to claim 1 , wherein the processing section determines the instruction target device based on the substrate processing time.

8. 8. The substrate processing system according to claim 7, wherein the processing section determines, as the instruction target apparatus, the substrate processing apparatus having the shortest substrate processing time among the plurality of substrate processing apparatuses.

9. the plan indicates a processing end timing at which the processing of the substrate is ended or a substrate unloading timing at which the substrate is unloaded from the substrate processing apparatus, The substrate processing system according to claim 1 , wherein the processing section determines the instruction target device based on the processing end timing or the substrate unloading timing.

10. 10. The substrate processing system according to claim 9, wherein the processor determines, as the instruction target apparatus, the substrate processing apparatus having the latest processing end timing or the latest substrate unloading timing among the plurality of substrate processing apparatuses.

11. the plan indicates a processing start timing at which processing of the substrate starts, or a substrate carry-in timing at which the substrate is carried from the outside of the substrate processing apparatus into the inside of the substrate processing apparatus, The substrate processing system according to claim 1 , wherein the processor determines the instruction target device based on the processing start timing or the substrate loading timing.

12. The substrate processing system according to claim 11 , wherein the processor determines, as the instruction target apparatus, the substrate processing apparatus having the latest processing start timing or the latest substrate carry-in timing among the plurality of substrate processing apparatuses.

13. A group management device for managing a plurality of substrate processing apparatuses for processing substrates, a processing solution is supplied to each of the plurality of substrate processing apparatuses from a common utility facility; The group management device includes: a storage unit that stores a threshold value for a flow rate of the treatment liquid supplied from the power utility facility; a communication unit that communicates with the plurality of substrate processing apparatuses and receives from each of the plurality of substrate processing apparatuses a schedule indicating a timing for using the processing liquid and a flow rate of the processing liquid; a processing unit that acquires a total flow rate of the processing liquid used by the plurality of substrate processing apparatuses based on the plan received by the communication unit, and determines whether the total flow rate exceeds the threshold value; Equipped with The processing unit instructs one of the plurality of substrate processing apparatuses to adjust the plan via the communication unit in response to determining that the total flow rate exceeds the threshold value.

14. The group management device of claim 13, wherein the processing unit generates adjustment amount information indicating an adjustment amount for making the total flow rate below the threshold value based on the plan or the total flow rate of the processing liquid of the multiple substrate processing apparatuses, and when instructing an adjustment to the plan, transmits the adjustment amount information via the communication unit to the substrate processing apparatus that instructs the adjustment to the plan.

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