Chemical substance detection device and chemical substance detection method

Abstract

To efficiently inspect by a simple configuration.SOLUTION: A chemical substance detector comprises: a heating device 1 that heats a wiping member, with chemical substances sticking to an inspection object wiped off; an ion source 5 that ionizes chemical substance-related steam having occurred in the heating device 1 as the wiping member is heated; a mass spectrometer 61 that analyzes the ion generated by the ion source 5; an intake pump 302 that draws in the steam generated in the heating device 1; pipings 201-203 that connect the heating device 1 and the intake pump 302; and a branch part BR which is disposed in the pipings 201-203, and branches the piping 201 into two so that one is connected to the ion source 5 and the other is connected to the intake pump 302.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a technique for a chemical substance detection device and a chemical substance detection method. [Background technology]

[0002] Trace testing is one of the methods to prevent explosives and illegal drugs from being brought into the country. For example, if explosives or drugs are found on the outside of a bag, there is a possibility that they are hidden inside the bag. Therefore, a test is performed in which the surface of the test object is wiped, the attached matter is sampled, and identified by chemical analysis. Ion mobility analysis and mass spectrometry are often used for analysis in such trace testing.

[0003] Patent Document 1 discloses a method and device for detecting specific drugs, comprising: "a step of heating a test strip having a sample collected from a test subject attached thereto; a step of aspirating gas generated from the heated test strip as sample gas; a step of ionizing the aspirated sample gas; a first analysis step of analyzing the mass of ions in the ionized sample gas to obtain a mass spectrum; a first judgment step of determining whether or not ions of a first specific m / z value are present; a second analysis step of performing tandem mass spectrometry according to the judgment result of the first judgment step; and a second judgment step of determining whether or not ions of a second specific m / z value are present in the mass spectrum obtained by the tandem mass spectrometry, wherein the step of heating the test strip comprises inserting the test strip between two heating plates arranged opposite to each other with a gap therebetween and heating the test strip" (see claim 1).

[0004] Patent Document 2 discloses a mass spectrometer comprising "a first electrode, a second electrode, a dielectric section provided between the first and second electrodes and having an inlet and outlet section for a sample and a discharge gas, a power source that applies an AC voltage to either the first or second electrode and ionizes the sample by a discharge generated between the first and second electrodes, and a mass analysis section that analyzes the ions discharged from the outlet section, wherein the discharge is performed at a pressure of 2 Torr or more and 300 Torr or less" (see claim 1).

[0005] Patent Document 3 discloses a drug detection device which "includes a vaporization chamber (1) for vaporizing the test sample, a heater (16) for heating the test sample, an analyzer (3) for analyzing the vaporized and ionized sample, and a setting device for setting information relating to the heating temperature of the heater and the gas flow to the vaporization chamber, the setting device setting the heating conditions and gas flow for any time range, and controlling the heater and the suction device based on the set information" (see abstract). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent No. 3800422 [Patent Document 2] Patent No. 5622751 [Patent Document 3] JP 2016-173332 A Summary of the Invention [Problem to be solved by the invention]

[0007] In order to miniaturize the trace inspection device, a technology has been disclosed in which chemical substances are ionized in an ion source under reduced pressure. However, in order to ionize chemical substances under reduced pressure, it is necessary to introduce the chemical substances into the ion source through a thin capillary tube in order to isolate the discharge section where the ionization takes place from the outside, which is at atmospheric pressure. However, such a configuration requires a long time for inspection, and therefore improvement was necessary.

[0008] In view of the above problems, an object of the present invention is to perform efficient inspection with a simple change in configuration. [Means for solving the problem]

[0009] In order to solve the above-mentioned problems, the present invention provides a device comprising: a first heating unit that heats a medium used to wipe off a chemical substance adhering to an object to be inspected; an ion source unit that ionizes vapor related to the chemical substance generated in the first heating unit by heating the medium; a first analysis unit that analyzes the ions generated in the ion source unit; a suction unit that suctions the vapor generated in the first heating unit; a pipe that connects the first heating unit and the suction unit; and a branch unit that is provided in the pipe and branches the pipe so that one end is connected to the ion source unit and the other end is connected to the suction unit. an adsorption section having an adsorbent for adsorbing the chemical substance is provided between the branching section and the suction section, and a flow path control section is provided between the branching section and the adsorption section for switching between a first flow path through which the vapor flows toward the suction section and a second flow path through which the vapor flows toward the adsorption section, and a control section is provided for controlling the flow path control section, and the control section causes the flow path control section to switch the flow path so that the vapor flowing through the first flow path flows to the second flow path upon detection of a predetermined chemical substance by the first analysis section. It is characterized by: Other solutions will be described in the embodiments as appropriate. Effect of the Invention

[0010] According to the present invention, efficient inspection can be performed by simply changing the configuration. [Brief description of the drawings]

[0011] [Figure 1] 1 is a diagram showing a configuration of a trace inspection device according to a first embodiment. [Diagram 2] FIG. 2 is a diagram illustrating a configuration example of a heating device. [Diagram 3] 4 is a flowchart showing a procedure of a process performed by the trace inspection device in the first embodiment. [Figure 4]FIG. 13 is a diagram illustrating a configuration example of a trace inspection device in a comparative example. [Diagram 5] FIG. 2 is a diagram showing a configuration example of an ion source used in the trace inspection device. [Figure 6] FIG. 13 is a diagram illustrating an example of the configuration of a trace inspection device according to a second embodiment. [Figure 7] 10 is a flowchart showing a procedure of a process performed by a trace inspection device in a second embodiment. [Figure 8] FIG. 13 is a diagram showing a configuration of a trace inspection device according to a third embodiment. [Figure 9] 13 is a flowchart showing a procedure of a process performed by a trace inspection device in a third embodiment. [Figure 10] FIG. 13 is a diagram showing a configuration of a trace inspection device according to a fourth embodiment. [Figure 11A] 13 is a flowchart (part 1) showing the procedure of processing performed by a trace inspection device in the fourth embodiment. [Figure 11B] 13 is a flowchart (part 2) showing the procedure of processing performed by the trace inspection device in the fourth embodiment. [Figure 12] FIG. 2 is a diagram illustrating a hardware configuration of a control device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0012] Next, a mode for carrying out the present invention (referred to as an "embodiment") will be described in detail with reference to the drawings as appropriate.

[0013] [First embodiment] <System configuration> Fig. 1 is a diagram showing the configuration of a trace inspection device T according to the first embodiment, and Fig. 2 is a diagram showing the configuration of a heating device 1. As shown in FIG. 1, the trace inspection device (chemical substance detection device) T includes a heating device (first heating unit) 1, a flow control device 301, an intake pump (suction unit) 302, an ion source (ion source unit) 5, a mass spectrometer (first analysis unit) 61, an exhaust pump 62, a control device (control unit) 71, and an alarm device (alarm unit) 72. A barrier discharge ion source 5A (see FIG. 5) is used as the ion source 5. The mass spectrometer 61 and the control device 71 are communicatively connected via a signal line 801. Furthermore, the control device 71 and the alarm device 72 are communicatively connected via a signal line 802. The heating device 1 is connected to the flow control device 301 via a pipe 201 and a pipe 202. Furthermore, the flow control device 301 is connected to the intake pump 302 via a pipe 203. That is, the pipe 201 and the pipe 202 are pipes that connect the heating device 1 and the intake pump 302. Furthermore, the heating device 1 is connected to the ion source 5 via the pipe 201 and the thin tube 401. The branching portion BR will be described later. In this embodiment, the heating device 1 side is appropriately referred to as the upstream side, and the suction pump 302 or the ion source 5 side is appropriately referred to as the downstream side.

[0014] <Heating device 1> First, the configuration of the heating device 1 will be described with reference to FIG. 2, and the configuration other than the heating device 1 in FIG. 1 will be described later. As shown in Fig. 2, the heating device 1 includes an upper heating section 110 and a lower heating section 120. The lower heating section 120 is movable in the vertical direction (white arrow 141) by a movable rod 131. The upper heating section 110 is fixed. However, the lower heating section 120 may be fixed and the upper heating section 110 may be movable in the vertical direction. Alternatively, both the upper heating section 110 and the lower heating section 120 may be movable in the vertical direction. Incidentally, when the heating device 1 is installed in the trace inspection device T, the ground side is the bottom and the opposite direction to the ground side is the top.

[0015] The lower heating section 120 and the upper heating section 110 are heated to about 200° C. by a heater (not shown). The lower heating section 120 is provided with an opening 121 for taking in air. The upper heating section 110 is connected to the pipe 201 by providing a through hole at the connection part with the pipe 201. The pipe 201 is heated to about 200° C. to prevent the adsorption of chemical substances.

[0016] The wiper W (medium that wipes off chemical substances adhering to the test object) that has wiped the surface (part of interest) of the test object such as a bag is inserted into the heating device 1 by the tester. When the wiper W is inserted into the heating device 1, the lower heating unit 120 is raised by the movable rod 131. As a result, the wiper W is sandwiched between the upper heating unit 110 and the lower heating unit 120, which are heated respectively. The wiper W is heated by being sandwiched between the upper heating unit 110 and the lower heating unit 120. Chemical substances adhering to the wiper W are vaporized by heat and sent to the piping 201 through a through hole provided in the upper heating unit 110. The chemical substances introduced into the piping 201 are sent to the ion source 5 (see FIG. 1) through a thin tube 401 (see FIG. 1) (white arrow 142).

[0017] The configuration of the first embodiment will be described below with reference to FIG. 1 and also with reference to FIG. 2 as appropriate. First, an inspector inserts a wiping member W, such as a cloth used to wipe an inspection object such as a bag, into the heating device 1. In the heating device 1, the wiping member W is heated by being sandwiched from above and below by the heated upper heating section 110 and the lower heating section 120. As a result, chemical substances attached to the wiping member W are vaporized by the heat of the upper heating section 110 and the lower heating section 120. The vaporized chemical substance vapor is sucked in by the suction pump 302 through the pipes 201 to 203. In short, the suction pump 302 sucks in the chemical substance vapor generated in the heating device 1. A flow rate control device 301 for adjusting the flow rate of the intake air is preferably provided between the heating device 1 and the suction pump 302. Incidentally, in order to efficiently suck in the chemical substance vapor (hereinafter referred to as vapor), the flow rate by the suction pump 302 is preferably controlled to about 1,000 mL / min. In this manner, the heating device 1 heats the medium from which the chemical substances adhering to the test object have been wiped off.

[0018] A branching part BR is provided between the heating device 1 and the flow rate control device 301. At the branching part BR, the pipe 201 branches into a pipe 202 that flows steam in the direction of the flow rate control device 301 and a thin tube 401 that flows steam to the ion source 5 via the thin tube 401. That is, the branching part BR is provided in the pipe 201, and branches the pipe 201 so that one end is connected to the ion source 5 and the other end is connected to the suction pump 302. When a barrier discharge ion source 5A (see FIG. 5) is used as the ion source 5, the pipe connected from the branching part BR to the barrier discharge ion source 5A is used for the barrier discharge ion source 5A and is a thin tube 401 that is thinner than the pipe 201 from the heating device 1 to the branching part BR.

[0019] At the branch point BR, most of the vapor of the chemical substance generated in the heating device 1 is exhausted by the suction pump 302 through the pipes 202 and 203. From the branch point BR, a part of the vapor of the chemical substance is introduced into the ion source 5 through the thin tube 401. The flow rate introduced into the ion source 5 is determined by the inner diameter and length of the thin tube 401, but is preferably about 1 mL / min to 100 mL / min. Note that the diameter of the pipes 201, 202 is >> the diameter of the thin tube 401. Incidentally, the inner diameter of the thin tube 401 is about 0.1 mm to 0.2 mm.

[0020] The ion source 5 generates ions of a chemical substance by ionizing the introduced vapor. That is, the ion source 5 ionizes the vapor related to the chemical substance generated by the heating device 1 by heating the wiping member W. The ions generated by the ion source 5 are sent to the mass spectrometer 61 and mass analyzed. That is, the mass spectrometer 61 analyzes the ions generated by the ion source 5. The inside of the mass spectrometer 61 is evacuated to a vacuum by the exhaust pump 62. The mass analysis result obtained by the mass spectrometer 61 is sent to the control device 71 via a signal line 801. The control device 71 has a database in which data on components (e.g., components of dangerous substances) of chemical substances to be detected, such as illegal drugs, are stored. The control device 71 judges whether or not the mass analysis result by the mass spectrometer 61 matches the data on components (e.g., components of dangerous substances) stored in the database. If they match, the control device 71 instructs the alarm device 72 to issue an alarm via a signal line 802. The alarm device 72 that receives the instruction issues an alarm.

[0021] <Flowchart> FIG. 3 is a flowchart showing the procedure of the process performed by the trace inspection device T in the first embodiment. First, an inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S101). Step S101 is a medium heating step in which the wiping member W, which is a medium, is heated by the heating device 1, which is a first heating section. Then, the suction pump 302 sucks in the steam generated by the heating device 1 (S102). At this time, when the wiping member W is detected by a sensor (not shown) provided in the heating device 1, the suction pump 302 may start suctioning. Alternatively, the suction pump 302 may continue to perform suction while the power of the trace inspection device T is on. Step S102 is a suction process in which the suction pump 302 sucks in the steam generated from the wiping member W.

[0022] The vapor sucked from the heating device 1 is branched at the branching part BR (S103). A part of the branched vapor is introduced into the ion source 5 via the narrow tube 401, and the other part is exhausted by the intake pump 302. The vapor introduced into the ion source 5 is ionized in the ion source 5 and then analyzed by the mass spectrometer 61 (S104). Step S104 is a first analysis step in which a portion of the vapor branched off at the branching portion BR is analyzed by the mass spectrometer 61. Next, the control device 71 determines whether or not the detection target component has been detected based on the analysis result by the mass spectrometer 61 (S111). Step S111 is a determination step of determining whether or not the detection target component has been detected as a result of the analysis by the mass spectrometer 61. If not detected (S111→No), the inspector removes the wiping member W from the heating device 1 (S113), and the process ends. When the detection target component is detected by the mass spectrometer 61 (S111→Yes), the control device 71 instructs the alarm device 72 to issue an alarm. The alarm device 72 that has received the instruction issues an alarm (S112). Step S112 is a first alarm step in which the alarm device 72 issues an alarm when the mass spectrometer 61 detects the detection target component as a result of the determination step. Thereafter, the inspector removes the wiping member W from the heating device 1 (S113), and the process ends.

[0023] [Comparative Example] Next, a conventional trace inspection device Tz will be described as a comparative example for this embodiment with reference to FIGS.

[0024] <Trace inspection device Tz> FIG. 4 is a diagram showing a configuration example of a trace inspection device Tz in a comparative example. In the trace inspection device Tz in FIG. 4, the same components as those in FIG. 1 are given the same reference numerals, and the description thereof will be omitted. The trace inspection device Tz in FIG. 4 differs significantly from the trace inspection device T shown in FIG. 1 in the following points. That is, the pipe 201a connecting the heating device 1 and the ion source 5 does not have the branch portion BR shown in Fig. 1. Therefore, most of the vapor of the chemical substance evaporated in the heating device 1 is introduced into the ion source 5 through the thin tube 401. In addition, the trace inspection device Tz does not include the flow control device 301 and the intake pump 302 shown in Fig. 1.

[0025] The control device 71 controls the heating device 1 via a signal line 811. Furthermore, the control device 71 controls the ion source 5 via a signal line 812. And the control device 71 controls the exhaust pump 62 via a signal line 813. Incidentally, in the trace inspection device T in FIG. 1, the trace inspection device Ta in FIG. 6, the trace inspection device Tb in FIG. 8, and the trace inspection device Tc in FIG. 10, the control device 71 controls the heating device 1, the ion source 5, and the exhaust pump 62, as in FIG. 4. However, in order to avoid complicating the drawings, the signal lines 811 to 813 shown in FIG. 4 are omitted in FIGS. 1, 6, 8, and 10.

[0026] First, an inspector inserts a wiping member W (see FIG. 2) that has been used to wipe the surface of an inspection target into the heating device 1. Chemical substances adhering to the wiping member W are vaporized by the heat of the heating device 1. The vapor of the chemical substance generated by this vaporization is introduced into the ion source 5 via the piping 201a. The piping 201a is heated to prevent adsorption of the chemical substance. The ion source 5 ionizes the vapor introduced to generate ions of the chemical substance.

[0027] Then, as in FIG. 1, the ions of the chemical substance generated by the ion source 5 are introduced into the mass spectrometer 61 and mass analyzed. The inside of the mass spectrometer 61 is evacuated to a vacuum by the exhaust pump 62. As described above, the heating device 1, the ion source 5, the mass spectrometer 61, and the exhaust pump 62 are each controlled by the control device 71 via signal lines 801, 811 to 813. The result of the mass analysis (mass analysis result) is compared with data of components (e.g., components of dangerous substances) stored in a database (not shown) installed in the control device 71. Then, when the control device 71 determines that the data of the components detected by the mass analysis matches the data of the components stored in the database (not shown), the control device 71 instructs the alarm device 72 to issue an alarm via the signal line 802. The alarm device 72 that receives the instruction issues an alarm.

[0028] <Ion source 5> FIG. 5 is a diagram showing a configuration example of an ion source 5 used in the trace inspection device Tz. 5 shows a barrier discharge ion source 5A that generates a barrier discharge under reduced pressure as an example of the ion source 5. FIG. 4 will be referred to as appropriate. Incidentally, the barrier discharge ion source 5A shown in FIG. 5 as the ion source 5 is the ion source 5 used not only in the comparative example but also in the first to fourth embodiments. The ion source 5 includes a discharge tube 511, an outer cylindrical electrode 512, a heating section 514, an inner cylindrical electrode 515, and an orifice electrode 522. In addition, in FIG. 5, the differential pumping section 531, the high vacuum section 532, the apertured electrode 541, and the DC power supply 543 constitute a mass spectrometer 61.

[0029] In general, in the trace inspection device Tz, an atmospheric pressure chemical ionization method, which ionizes chemical substances by chemical reactions in the atmosphere, is commonly used as the ion source 5, which is different from the barrier discharge ion source 5A. In such an atmospheric pressure chemical ionization method, ions generated in the atmosphere are introduced into the vacuum inside the mass spectrometer 61 through a tube. However, if the tube for introducing the ions generated in the atmosphere into the vacuum of the mass spectrometer 61 is narrowed, many ions are lost in the tube, so the tube cannot be narrowed. Since the tube communicating with the atmospheric pressure cannot be narrowed, the exhaust volume of the exhaust pump 62 needs to be increased in order to increase the degree of vacuum of the mass spectrometer 61.

[0030] Here, in order to miniaturize the trace inspection device Tz, it is necessary to miniaturize the exhaust pump 62. However, if the exhaust pump 62 is miniaturized, the degree of vacuum of the mass spectrometer 61 will be reduced in the ion source 5 using the atmospheric pressure chemical ionization method.

[0031] Therefore, in the barrier discharge ion source 5A, the exhaust pump 62 for depressurizing the inside of the mass spectrometer 61 can be made smaller by depressurizing the ionization region in the ion source 5. In the barrier discharge ion source 5A, a suction pump for depressurizing the ionization region in the ion source 5 is required in addition to the exhaust pump 62. However, since the exhaust pump 62 can be significantly made smaller, the entire trace inspection device Tz can be made smaller even if a suction pump for depressurizing the ionization region in the ion source 5 is added. In the barrier discharge ion source 5A, in order to isolate the low-pressure ionization region from the atmosphere, vapor of vaporized chemical substances is introduced into the ionization region through a thin tube 401. Since what passes through the thin tube 401 is not ions but vapor before ionization, the sensitivity of the mass spectrometer 61 is not affected even if the thin tube 401 is made thinner.

[0032] In this way, for the purpose of miniaturizing the trace inspection device Tz, the barrier discharge ion source 5A is used instead of the atmospheric pressure chemical ionization ion source 5. The configuration of the barrier discharge ion source 5A will be further described below.

[0033] In the barrier discharge ion source 5A (ion source 5) shown in FIG. 5, a thin tube 401 having an inner diameter of about 0.1 mm to 0.2 mm and a length of about 10 mm to 100 mm is connected. The thin tube 401 is connected to a pipe 201a connected to a heating device 1 (see FIG. 2). A chemical vapor is introduced from the heating device 1 to the thin tube 401 through the pipe 201a. Furthermore, the chemical vapor is introduced into the inside of a discharge tube 511 made of an insulating material such as glass through the thin tube 401. Incidentally, the pipe 201a connected to the heating device 1 and the thin tube 401 are connected to each other by a conversion connector CN for converting the diameters of the pipe 201a and the thin tube 401. Furthermore, the pipe 201a, the thin tube 401, and the conversion connector CN are heated to about 200° C.

[0034] A cylindrical outer tube electrode 512 is provided on the outside of the discharge tube 511. This outer tube electrode 512 is connected to a high-frequency power source 513. A heating unit 514 is provided further outside the discharge tube 511. The discharge tube 511 is also heated to about 200°C by the heating unit 514. An orifice electrode 522 with an orifice 521 opening therein is provided on the end of the discharge tube 511 opposite the end connected to the thin tube 401. A cylindrical inner tube electrode 515 is provided inside the discharge tube 511 at the end of the discharge tube 511 on the orifice electrode 522 side.

[0035] The inner cylindrical electrode 515 and the orifice electrode 522 are electrically connected to a DC power supply 523. Between the orifice electrode 522 and the apertured electrode 541 is a differential pumping section 531 that is evacuated by an exhaust pump 62 (white arrow A2). Note that the differential pumping section 531 is actually a closed space. As described above, the differential pumping section 531 constitutes the mass spectrometer 61.

[0036] When a high frequency of about ±2 kV at 10 kHz to 20 kHz is applied to the outer cylindrical electrode 512, a discharge occurs between the outer cylindrical electrode 512 and the inner cylindrical electrode 515 (discharge section DS). The vapor of the chemical substance introduced into the inside of the discharge tube 511 is exposed to plasma in the discharge section DS and ionized. For example, when measuring positive ions, a voltage of about 20 to 30 V is applied to the orifice electrode 522 by the DC power supply 523. In this way, the inside of the discharge tube 511 becomes an ionization region.

[0037] A voltage of about 5 to 10 V is applied to apertured electrode 541 constituting mass spectrometer 61 by DC power supply 543. As a result, positive ions that have passed through orifice 521 drift toward apertured electrode 541 in differential pumping section 531. Ions (white arrow A1) that have passed through aperture 542 provided in apertured electrode 541 are analyzed by mass spectrometer 61 equipped with high vacuum section 532.

[0038] The high vacuum section 532 constituting the mass spectrometer 61 is evacuated by an exhaust pump 62 (white arrow A3). The high vacuum section 532 is actually a closed space. The inside of the discharge tube 511 is evacuated through an orifice 521 by a suction pump different from the exhaust pump 62, so the pressure is reduced to about 1 / 10 to 1 / 100 of the atmospheric pressure.

[0039] When analyzing negative ions, a voltage with the polarity reversed to the above voltage is applied to the orifice electrode 522 and the apertured electrode 541. That is, a voltage of about -20 to -30 V is applied to the orifice electrode 522, and a voltage of about -5 V to -10 V is applied to the apertured electrode 541. This causes the negative ions that have passed through the orifice 521 to drift in the direction of the apertured electrode 541 in the differential pumping section 531.

[0040] In this way, in the barrier discharge ion source 5A, the vapor is ionized in the discharge section DS, which is depressurized. This makes it possible to reduce the pressure difference between the ionization region (inside the discharge tube 511) and the high vacuum section 532 constituting the mass spectrometer 61 (see FIG. 4) compared to the ion source 5 using atmospheric pressure chemical ionization, which ionizes at atmospheric pressure. As a result, ions can be easily introduced to the mass spectrometer 61 even if the exhaust pump 62 is made small. In the ion source 5 (barrier discharge ion source 5A) shown in FIG. 5, the flow rate of gas taken in from the atmosphere can be suppressed by making the narrow tube 401 narrower or longer, and the ionization region can be kept at a low pressure. This makes it possible to perform analysis with high sensitivity even if a small exhaust pump 62 is used.

[0041] However, the flow rate that can be drawn into the barrier discharge ion source 5A through the thin tube 13 is limited to approximately 1 mL / min to 100 mL / min. When the heating device 1 and the ion source 5, which is the barrier discharge ion source 5A, are directly connected as shown in Fig. 4, the flow rate that can be drawn into the ion source 5 is limited, so that it takes time for the vapor related to the chemical substance generated by the heating device 1 to reach the ion source 5, preventing rapid testing.

[0042] By configuring the trace inspection device T shown in the first embodiment as in FIG. 1, the flow rate between the heating device 1 and the branching portion BR can be increased by the suction of the intake pump 302. As a result, the time for the vapor to flow between the heating device 1 and the branching portion BR can be ignored. That is, the time for the vapor to flow between the heating device 1 and the branching portion BR can be shortened. As a result, the vapor of the chemical substance generated in the heating device 1 can be introduced into the ion source 5 quickly through the thin tube 401. Therefore, as in the comparative example of FIG. 4, the heating device 1 and the ion source 5 are directly connected without providing the branching portion BR, and a quick inspection can be performed with a simple change in the configuration. That is, the vapor of the chemical substance generated in the heating device 1 can be introduced into the ion source 5 quickly through the thin tube 401, and the response of the mass spectrometer 61 can be improved. In short, the vapor related to the chemical substance generated in the heating device 1 can be quickly transported to the inlet of the thin tube 401 of the ion source 5, and the inspection can be completed in a short time. Therefore, even if a barrier discharge ion source 5A that generates ions under reduced pressure is used to reduce the size of the trace inspection device T, a quick inspection can be performed.

[0043] In addition, by adopting the configuration shown in the first embodiment, the speed of the vapor of the chemical substance generated in the heating device 1 flowing through the inside of the pipe 201 can be increased. This makes it possible to prevent the chemical substance contained in the vapor from adhering to the inside of the pipe 201.

[0044] Furthermore, in the conventional trace inspection device Tz, the suction pump 302 for sucking in the steam generated in the heating device 1 was not provided. Therefore, the steam generated in the heating device 1 was dissipated inside the heating device 1. According to the trace inspection device T of the first embodiment, the steam generated in the heating device 1 is sucked into the piping 201 by the suction of the suction pump 302. Therefore, the trace inspection device T of the first embodiment can prevent the steam generated in the heating device 1 from dissipating. Furthermore, by using a barrier discharge ion source 5A as the ion source 5, the trace inspection device T can be made smaller in size.

[0045] In the technology described in Patent Document 3, a three-way valve is provided at a location corresponding to the branching portion BR in Fig. 1. This is for exhausting a sample when an excessively high concentration sample is introduced, and has a different purpose from that of the branching portion BR in this embodiment. In this embodiment, no valve is provided at the branching portion BR, and the purpose of using the branching portion BR is completely different from that of the technology described in Patent Document 3.

[0046] [Second embodiment] Next, a second embodiment of the present invention will be described with reference to FIGS.

[0047] <Trace inspection device Ta> FIG. 6 is a diagram showing an example of the configuration of a trace inspection device Ta according to the second embodiment. 6, the same components as those in FIG. 1 are denoted by the same reference numerals and the description thereof will be omitted. 6 differs from the trace inspection device T shown in FIG 1 in that a spectroscopic analyzer (second analysis unit, spectroscopic analysis unit) 311 is provided between the branching unit BR and the flow control device 301. That is, the spectroscopic analyzer 311 is provided between the branching unit BR and the intake pump 302. The downstream side of the spectroscopic analyzer 311 is connected to the flow control device 301 by the piping 204. In addition, the spectroscopic analyzer 311 is connected to the control device 71 via a signal line 821 so as to be able to communicate with the control device 71.

[0048] In the trace inspection device T shown in Fig. 1, the vapor of the chemical substance generated in the heating device 1 is sucked in by the suction pump 302 and is branched at the branching part BR. Then, a part of the vapor is introduced into the ion source 5. As described above, this allows the trace inspection device T shown in Fig. 1 to perform rapid inspection. However, most of the vapor of the chemical substance generated in the heating device 1 flows in the direction from the branching part BR to the flow control device 301, and therefore improvement is desired. Therefore, in the trace inspection device Ta shown in Fig. 6, a spectroscopic analyzer 311 is provided between the branching part BR and the flow control device 301.

[0049] The spectroscopic analyzer 311 may be an infrared absorption spectrometer, a Raman spectrometer, or a terahertz spectrometer, which are excellent in the ability to identify substances. Information about the structure of substances can be obtained by such spectroscopic analyzer 311. Then, before the main test, a preliminary test is performed in which data on the components of the chemical substance to be detected is acquired in advance by the spectroscopic analyzer 311. Incidentally, the main test is a test performed on the test object such as a bag, and the preliminary test is a test performed before the main test for preparing a database before the test of the test object. Then, the data (spectroscopic analysis results) of the spectroscopic analysis results of the preliminary test are sent to the control device 71 via the signal line 821. The control device 71 registers the sent spectroscopic analysis results of the preliminary test in the database.

[0050] During the actual test, the control device 71 acquires mass analysis result data obtained by the mass spectrometer 61 via signal line 801, and acquires data obtained by the spectroscopic analyzer 311 via signal line 821. The control device 71 compares the mass analysis result of the actual test with the database of mass analysis results, and compares the spectroscopic analysis result of the actual test with the database of spectroscopic analysis results. When the component data stored in the database for at least one of the mass analysis result and spectroscopic analysis result of the actual test match, the control device 71 instructs the alarm device 72 to issue an alarm via signal line 802. The alarm device 72 that has received the instruction issues an alarm.

[0051] <Flowchart> 7 is a flowchart showing the procedure of the process performed by the trace inspection device Ta in the second embodiment. The process shown in FIG. 7 is the process performed in the main inspection. First, an inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S201). Then, the suction pump 302 sucks in the steam generated by the heating device 1 (S202). As in Fig. 3, when the wiping member W is detected by a sensor (not shown) provided in the heating device 1, the suction pump 302 may start suctioning. Alternatively, the suction pump 302 may continue suctioning while the power of the trace inspection device Ta is on.

[0052] The vapor sucked from the heater 1 is branched at the branching part BR (S203). As in FIG. 3, a part of the branched vapor is introduced into the ion source 5 via the narrow tube 401, and the other part is exhausted by the intake pump 302. The vapor introduced into the ion source 5 is ionized by the ion source 5 and then analyzed by the mass spectrometer 61 (S204). Note that the processes in steps S201 to S204 are similar to the processes in steps S101 to S104 in FIG.

[0053] Furthermore, of the steam branched off at the branch portion BR, the steam that flows toward the flow control device 301 is analyzed by the spectroscopic analyzer 311 (S205). It is desirable to perform steps S204 and S205 simultaneously. Step S205 is a second analysis step in which the steam branched off at the branch portion BR that has not been analyzed by the mass spectrometer 61 is analyzed by the spectroscopic analyzer 311. Then, the control device 71 determines whether or not the detection target component has been detected in at least one of the mass analysis results by the mass spectrometer 61 and the spectroscopic analysis results by the spectroscopic analyzer 311 (S211). In the determination process of step S211, the control device 71 determines whether or not the detection target component has been detected in at least one of the mass spectrometer 61 and the spectroscopic analyzer 311. If not detected (S211→No), the inspector removes the wiping member W from the heating device 1 (S213), and the process ends. When the detection target component is detected in at least one of the mass analysis result and the spectroscopic analysis result (S211→Yes), the control device 71 instructs the alarm device 72 to issue an alarm. The alarm device 72 that has received the instruction issues an alarm (S212). Step S212 is a second alarm step in which the alarm device 72 issues an alarm when it is determined in the determination step of step S211 that the detection target component has been detected by at least one of the mass spectrometer and the spectroscopic analysis device 311. Thereafter, the inspector removes the wiping member W from the heating device 1 (S213), and the process ends.

[0054] With this configuration, the steam flowing toward the flow rate control device 301 can be effectively utilized, and the accuracy of the inspection can be further improved.

[0055] [Third embodiment] Next, a third embodiment of the present invention will be described with reference to FIGS. FIG. 8 is a diagram showing the configuration of a trace inspection device Tb according to the third embodiment. In FIG. 8, the same components as those in FIG. 1 are denoted by the same reference numerals and the description thereof will be omitted. The trace inspection device Tb shown in FIG. 6 differs from the trace inspection device T shown in FIG. 1 in the following points. (1) A branch portion BR1 is provided between the branch portion BR and the flow control device 301. The branch portion BR1 causes the pipe 202 to branch into a pipe (first flow path) 205, which is a flow path toward the flow control device 301, and a branch pipe (second flow path) 211, which is a flow path toward a direction different from the direction of the flow control device 301. A first valve (flow path control unit) 901, which is, for example, a three-way valve, is provided at the branch portion BR1, and controls the airflow (including steam) toward the pipe 205 and the airflow toward the branch pipe 211. The first valve 901 is controlled by the control device 71 via a signal line 831. (2) Branch pipe 211 is provided with adsorption device 321 as an adsorption section having an adsorbent that adsorbs chemical substances contained in the steam. Branch pipe 212 connected to the downstream side of adsorption device 321 merges with pipe 205. In this manner, adsorption device 321 having an adsorbent that adsorbs chemical substances is provided between branch portion BR and intake pump 302. In this manner, a first valve 901 is provided between branch portion BR and adsorption device 321 for switching between pipe 205, through which steam flows in the direction of intake pump 302, and branch pipe 211, through which steam flows in the direction of adsorption device 321.

[0056] In the trace inspection device T shown in Fig. 1, the vapor of the chemical substance generated in the heating device 1 is branched at a branching portion BR. One of the branched vapors is introduced into the ion source 5, which allows for rapid inspection, but most of the vapor of the chemical substance generated in the heating device 1 flows from the branching portion BR in the direction of the flow rate control device 301. For this reason, improvements are desired.

[0057] When the heating device 1 generates vapor of the chemical substance, first, the flow from the pipe 202 to the branch pipe 211 is stopped, and the first valve 901 is controlled by the control device 71 so that the vapor flows in the direction from the pipe 202 to the pipe 205. That is, the control device 71 controls the first valve 901. As a result, the vapor is sucked by the first valve 901 from the branch part BR1 to the flow control device 301 in the direction of the flow path A (first flow path). Then, when the control device 71 determines that the mass spectrometer 61 has detected the detection target component as a result of the analysis by the mass spectrometer 61, the alarm device 72 issues an alarm. Then, together with issuing the alarm, the control device 71 switches the first valve 901. At this time, the first valve 901 is controlled to stop the flow in the direction of the pipe 205, and to allow the vapor to flow in the direction of the branch pipe 211 (flow path B). As a result, the vapor flows in the direction of the adsorption device 321. That is, when the mass spectrometer 61 detects a predetermined chemical substance, the control device 71 switches the flow path by the first valve 901 so that the steam flowing through the pipe 205 flows into the branch pipe 211 .

[0058] By flowing the steam into branch pipe 211 (flow path B: second flow path), the chemical substance contained in the steam is adsorbed by the adsorbent in adsorption device 321. Usually, the generation of chemical substance vapor from heating device 1 continues for about 10 seconds. Therefore, after allowing the chemical substance contained in the steam to be adsorbed by the adsorbent in adsorption device 321 for a guideline of 10 seconds, control device 71 returns first valve 901 to its original position to prepare for the next inspection. Returning first valve 901 means allowing the steam to flow in the direction of pipe 205 (flow path A) and preventing the steam from flowing in the direction of branch pipe 211 (flow path B).

[0059] After that, the inspector removes the adsorption device 321 that adsorbed the chemical substances, and extracts the chemical substances adsorbed in the adsorbent by heating the adsorbent or by subjecting it to solvent extraction. The extracted chemical substances are then analyzed by precision analysis means such as a gas chromatograph / mass spectrometer. This analysis is separate from the analysis by the mass spectrometer 61.

[0060] <Flowchart> FIG. 9 is a flowchart showing the procedure of processing performed by the trace inspection device Tb in the third embodiment. First, an inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S301). Then, the suction pump 302 sucks in the steam generated by the heating device 1 (S302). As in Fig. 1, the suction pump 302 may start suctioning when the wiping member W is detected by a sensor (not shown) provided in the heating device 1. Alternatively, the suction pump 302 may continue suctioning while the power of the trace inspection device Tb is on.

[0061] The vapor sucked from the heating device 1 is branched at the branching part BR (S303). At this time, the first valve 901 is controlled so that the vapor generated in the heating device 1 flows in the direction of the flow path A in Fig. 8. A part of the branched vapor is introduced into the ion source 5 via the narrow tube 401, and the other part is exhausted by the intake pump 302. The vapor introduced into the ion source 5 is ionized in the ion source 5 and then analyzed by the mass spectrometer 61 (S304). Next, the control device 71 determines whether or not the detection target component has been detected based on the analysis result by the mass spectrometer 61 (S311). If not detected (S311→No), the inspector removes the wiping member W from the heating device 1 (S312), and the process ends. Incidentally, steps S301 to S304, S311, and S312 in Fig. 9 are similar to steps S101 to S104, S111, and S113 in Fig. 3.

[0062] When the detection target component is detected by the mass spectrometer 61 (S311→Yes), the control device 71 instructs the alarm device 72 to issue an alarm. The alarm device 72 that receives the instruction issues an alarm (S321). Furthermore, the control device 71 switches the first valve 901 (S322). In step S322, the control device 71 switches the first valve 901 so that the vapor generated in the heating device 1 flows in the direction from flow path A to flow path B in Fig. 8. Step S322 is a first flow path switching step of switching the flow path so that, when a detection target component is detected in step S311, the vapor branched at the branching part BR that has not been analyzed by the mass spectrometer 61 flows to the adsorption device 321. Thereafter, the chemical substances contained in the vapor are adsorbed by the adsorbent provided in the adsorption device 321 (S323). Then, the control device 71 determines whether a desired time (for example, 10 seconds) has elapsed (S324). If the desired time has not elapsed (S324→No), the control device 71 returns the process to step S323, and the adsorption of the chemical substance into the adsorbent continues. If the desired time has elapsed (S324→Yes), the control device 71 returns the first valve 901 to its original state (S325). Returning the first valve 901 to its original state means that the steam is made to flow in the direction of flow path A in FIG.

[0063] Then, the inspector removes the wiping member W from the heating device 1 (S326) and replaces the suction device 321 (S327), completing the process.

[0064] In the third embodiment, the components of the chemical substance adsorbed to the adsorbent provided in the adsorption device 321 can be analyzed in detail. In this way, it is possible to analyze in detail whether the trace inspection device Tb correctly reacted to the detection target component (hazardous material, etc.) or whether it was a false alarm, and if it was a false alarm, which component caused the false alarm. The analysis result of the chemical substance adsorbed to the adsorbent is reflected in the judgment logic and database in the control device 71, making it possible to build a highly accurate trace inspection device Tb with fewer false alarms. In addition, the chemical substance that was not sent to the ion source 5 out of the steam branched off at the branching section BR can be effectively utilized.

[0065] [Fourth embodiment] Next, a fourth embodiment of the present invention will be described with reference to FIGS. 10, 11A and 11B.

[0066] FIG. 10 is a diagram showing the configuration of a trace inspection device Tc according to the fourth embodiment. 10, the same components as those in FIG. 8 are denoted by the same reference numerals and the description thereof will be omitted. In the trace inspection device Tc, a branching section BR for branching the vapor of the chemical substance generated in the heating device 1 is provided, as in Fig. 8. Also, as in Fig. 8, a branching section BR1 is provided between the branching section BR and a flow control device 301 for controlling the flow rate of the intake pump 302. The branching section BR1 branches the airflow (including vapor) flowing from the heating device 1 into a pipe 205 for flowing in the direction of the flow control device 301 and a branch pipe 221 for flowing in a direction different from the flow control device 301. As in Fig. 8, a first valve 901 is provided in the branching section BR1, and the first valve 901 controls the airflow toward the pipe 205 and the airflow toward the branch pipe 221.

[0067] 8, the trace inspection device Tc shown in Fig. 10 is provided with a branch portion BR2 between the branch portion BR1 and the adsorption device 321. In the branch portion BR2, the branch pipe 221 connected to the branch portion BR1 and the branch pipe 222 connected to the carrier gas supply device 331 merge into the branch pipe 223 equipped with the adsorption device 321.

[0068] The branching part BR2 is provided with a second valve (flow path control part) 911, which is, for example, a three-way valve, and the second valve 911 controls the airflow from the branching part BR1 to the adsorption device 321 and the airflow of carrier gas from the carrier gas supplying device (carrier gas supplying part) 331 to the adsorption device 321. Incidentally, the carrier gas supplying device 331 is a device that supplies carrier gas. The carrier gas is a gas that carries chemical substances. In other words, the carrier gas supplying device 331 supplies a carrier gas that carries chemical substances.

[0069] Furthermore, a branching section BR3 is provided downstream of the adsorption device 321. The branching section BR3 branches the airflow, which flows from the adsorption device 321 and flows through a branch pipe 224 connected downstream of the adsorption device 321, into a branch pipe 226 that flows the airflow to a junction with the pipe 205, and a branch pipe 225 that flows the airflow to a gas chromatograph-mass spectrometer (third analysis section) 332 that analyzes chemical substances. The branching section BR3 is provided with a third valve (flow path control section) 912 that is, for example, a three-way valve. The third valve 912 controls the airflow from the branch pipe 224 to the branch pipe 226 and the airflow from the branch pipe 224 to the branch pipe 225.

[0070] The adsorption device 321 is provided with a temperature regulator (second heating section) 333 for heating / cooling the adsorption device 321 (heating the adsorption device 321).

[0071] The first valve 901, the second valve 911, and the third valve 912 are each controlled by the control device 71 (signal lines 831, 841, and 842). Furthermore, the control device 71 controls the temperature adjustment device 333 via a signal line 851. In addition, the control device 71 controls the carrier gas supply device 331 via a signal line 861.

[0072] With such a configuration, the trace inspection device Tc is characterized by automatically carrying out a precise analysis of the chemical substances adsorbed by the adsorbent provided in the adsorption device 321.

[0073] When the heating device 1 generates vapor of the chemical substance, first, the flow to the branch pipe 221 is stopped, and the first valve 901 is controlled by the control device 71 so that the vapor flows to the pipe 205. As a result, the vapor is sucked by the first valve 901 from the branch part BR1 to the flow control device 301 in the direction of the flow path A. Then, when the control device 71 determines that the mass spectrometer 61 has detected the detection target component as a result of the analysis by the mass spectrometer 61 (as the mass spectrometer 61 detects a predetermined chemical substance), the alarm device 72 issues an alarm. Then, together with issuing an alarm, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912. At this time, the control device 71 controls the first valve 901 and the second valve 911 so that the vapor flows in the direction from the first valve 901 to the adsorption device 321. Furthermore, the control device 71 controls the third valve 912 so that the vapor flows in the direction from the adsorption device 321 to the pipe 205. As a result, when an alarm is issued from alarm device 72, the vapor of the chemical substance flows into a flow path (flow path B) passing through adsorption device 321, and the chemical substance contained in the vapor is adsorbed by the adsorbent provided in adsorption device 321.

[0074] After the adsorbent of the adsorption device 321 adsorbs the chemical substance for a desired time (for example, 10 seconds), the control device 71 returns the first valve 901 to its original state. That is, the control device 71 controls the first valve 901 so that the steam flows through the flow path A. Then, the inspector removes the wiping member W from the heating device 1.

[0075] Thereafter, the control device 71 switches the second valve 911 and the third valve 912 so that the flow path becomes the flow path (flow path C) of the carrier gas supply device 331 → the adsorption device 321 → the gas chromatograph-mass spectrometer 332. In other words, the control device 71 controls the second valve 911 and the third valve 912 so that the steam generated in the heating device 1 does not flow into the adsorption device 321 and the carrier gas flows from the carrier gas supply device 331 through the adsorption device 321 into the gas chromatograph-mass spectrometer 332.

[0076] Furthermore, the control device 71 causes the carrier gas supply device 331 to supply carrier gas. As a result, a carrier gas such as helium flows from the carrier gas supply device 331 to the adsorption device 321 via the flow path C. At the same time, the control device 71 heats the adsorption device 321 by the temperature adjustment device 333, and desorbs the chemical substance adsorbed to the adsorbent of the adsorption device 321. That is, the control device 71 heats the adsorption device 321 by the temperature adjustment device 333. Incidentally, when the carrier gas flows through the flow path from the carrier gas supply device 331 to the adsorption device 321 to the gas chromatograph-mass spectrometer 332, the control device 71 controls the first valve 901 so that the steam generated in the heating device 1 flows through the flow path from the heating device 1 to the flow rate control device 301 (flow path D). That is, the first valve 901, the second valve 911, and the third valve 912 are controlled so that air flows through each of the flow paths C and D.

[0077] The chemical substances desorbed from the adsorbent of the adsorption device 321 are introduced together with the carrier gas into the gas chromatograph / mass spectrometer 332 for precise analysis. After the analysis by the gas chromatograph / mass spectrometer 332 is performed for a desired time, the control device 71 cools the adsorption device 321 by the temperature regulator 333 and returns the second valve 911 and the third valve 912 to their original states. Returning the second valve 911 and the third valve 912 to their original states means that the control device 71 controls the second valve 911 and the third valve 912 so that gas flows in the direction of flow path B. This stops the inflow of carrier gas into the adsorption device 321, and the inspector replaces the adsorption device 321 in preparation for the next inspection.

[0078] <Flowchart> 11A and 11B are flowcharts showing the procedure of processing performed by the trace inspection device Tc in the fourth embodiment. First, an inspector inserts the wiping member W into the heating device 1, and heating is performed by the heating device 1 (S401 in FIG. 11A). Then, the suction pump 302 sucks in the steam generated by the heating device 1 (S402). As in Fig. 1, the suction pump 302 may start suctioning when the wiping member W is detected by a sensor (not shown) provided in the heating device 1. Alternatively, the suction pump 302 may continue suctioning while the power of the trace inspection device Tc is on.

[0079] The vapor sucked from the heating device 1 is branched at the branching part BR (S403). At this time, the first valve 901 is controlled so that the vapor flows in the direction of the flow path A in Fig. 8. A part of the branched vapor is introduced into the ion source 5 via the narrow tube 401, and the other part is exhausted by the intake pump 302. The vapor introduced into the ion source 5 is ionized in the ion source 5 and then analyzed by the mass spectrometer 61 (S404). Next, the control device 71 determines whether or not the detection target component has been detected based on the analysis result by the mass spectrometer 61 (S411). If not detected (S411→No), the inspector removes the wiping member W from the heating device 1 (S422), and the process ends. Incidentally, steps S401 to S404, S411, and S412 in FIG. 9 are the same processes as steps S101 to S104, S111, and S113 in FIG.

[0080] When the detection target component is detected by the mass spectrometer 61 (S411→Yes), the control device 71 instructs the alarm device 72 to issue an alarm. The alarm device 72 receiving the instruction issues an alarm (S421). 10. In addition, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912 (valves) (S422). In step S422, the control device 71 switches the first valve 901, the second valve 911, and the third valve 912 so that steam flows in the direction from flow path A to flow path B in FIG. Thereafter, the chemical substances contained in the vapor are adsorbed by the adsorbent provided in the adsorption device 321 (S423). Then, the control device 71 determines whether a desired time (for example, 10 seconds) has elapsed (S424). If the desired time has not elapsed (S424→No), the control device 71 returns the process to step S423, and the adsorption of the chemical substance into the adsorbent continues. If the desired time has elapsed (S424→Yes), the control device 71 returns the first valve 901 to its original state (S425). Returning the first valve 901 to its original state means that the first valve 901 is returned to a state in which steam flows in the direction of flow path A in FIG. Then, the inspector removes the wiping member W from the heating device 1 (S426). The processes in steps S421 to S426 are similar to those in steps S321 to S326 in FIG.

[0081] Next, the control device 71 switches the second valve 911 and the third valve 912 (S431). At this time, the control device 71 switches the second valve 911 and the third valve 912 so that the flow path becomes the flow path (flow path C) of the carrier gas supply device 331 → the adsorption device 321 → the gas chromatograph-mass spectrometer 332. Step S431 is a second flow path switching step in which the control device 71 switches the flow path after step S422 (first flow path switching step) so that the steam generated in the heating device 1 does not flow into the adsorption device 321 and the carrier gas flows from the carrier gas supply device 331 to the gas chromatograph-mass spectrometer 332 via the adsorption device 321. Furthermore, the control device 71 causes the carrier gas supply device 331 to supply the carrier gas to the branch pipes 222, 223, thereby introducing the carrier gas into the adsorption device 321 (S432). Step S432 is a carrier gas supply step in which the control device (control unit) 71 causes the carrier gas supply device 331 to supply the carrier gas after step S431. Furthermore, the control device 71 causes the temperature adjustment device 333 to heat the adsorption device 321, thereby heating the adsorbent provided in the adsorption device 321 and desorbing the chemical substance (S433 in FIG. 11B). Step S433 is an adsorption section heating step in which the temperature adjustment device 333 heats the adsorption device 321 after step S432.

[0082] The desorbed chemical substances are introduced into the gas chromatograph / mass spectrometer (GC / MS) 332 via the branch pipe 224 → the third valve 912 → the branch pipe 225. As a result, the gas chromatograph / mass spectrometer (GC / MS) 332 analyzes the desorbed chemical substances (S441). Step S441 is a second analysis step in which analysis is performed by the gas chromatograph / mass spectrometer 332. Then, the control device 71 judges whether or not a desired time has elapsed (S442). The desired time in step S442 is the time required for analysis by the gas chromatograph-mass spectrometer 332. If the desired time has not elapsed (S442→No), the control device 71 returns the process to step S441, so that the analysis by the gas chromatograph-mass spectrometer 332 continues.

[0083] If the desired time has elapsed (S442→Yes), the control device 71 controls the temperature adjustment device 333 to cool the adsorption device 321 (S443). Furthermore, the control device 71 returns the second valve 911 and the third valve 912 to their original states (S444). Returning the second valve 911 and the third valve 912 to their original states means controlling the second valve 911 and the third valve 912 so that the flow path becomes flow path B in FIG. Thereafter, the inspector replaces the suction device 321 in preparation for the next measurement (S445), and the process ends.

[0084] In the trace inspection devices T, Ta to Tc of the first to third embodiments, when an alarm is issued by the alarm device 72, an opening inspection of the inspection object (bag, etc.) is performed to confirm the inside of the inspection object such as a bag. In contrast, according to the fourth embodiment, the result of the precision analysis by the gas chromatograph-mass spectrometer 332 can be obtained within a few minutes after the alarm is issued. In other words, since the result of the precision analysis is known while preparations are being made for the opening inspection, etc., if the alarm is a false alarm, the time-consuming opening inspection, etc. can be stopped. This makes it possible to eliminate unnecessary inspection and speed up the trace inspection.

[0085] [Hardware configuration] FIG. 12 is a diagram showing a hardware configuration of the control device 71. As shown in FIG. The control device 71 is configured with a PC (Personal Computer) or the like, and includes a memory 711 which is a main storage device, and a CPU (Central Processing Unit) 712 which is an arithmetic device. The control device 71 also includes a storage device 713 which is a secondary storage device and is configured with an HD (Hard Disk) and an SSD (Solid State Drive), a communication device 714 which communicates with the mass spectrometer 61, the alarm device 72, the first valve 901, the second valve 911, the third valve 912, the carrier gas supply device 331, the temperature adjustment device 333, and the like.

[0086] Then, a program stored in storage device 713 is loaded into memory 711 and executed by CPU 712, thereby executing the processes shown in FIGS. 3, 7, 9, 11A, and 11B.

[0087] The present invention is not limited to the above-described embodiment, and includes various modified examples. For example, the above-described embodiment has been described in detail to clearly explain the present invention, and is not necessarily limited to all of the configurations described. In addition, it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment, and it is also possible to add the configuration of another embodiment to the configuration of one embodiment. In addition, it is possible to add, delete, or replace a part of the configuration of each embodiment with another configuration.

[0088] 8 merges with pipe 205 on the downstream side. However, this is not limiting, and a configuration in which branch pipe 212 does not merge with pipe 205 may be adopted by providing an intake pump other than intake pump 302 on the downstream side of branch pipe 212. The same applies to branch pipe 226 in FIG.

[0089] In addition, in this embodiment, a barrier discharge ion source 5A is used as the ion source 5, but the present invention is also applicable to an ion source 5 that uses atmospheric pressure chemical ionization.

[0090] Further, the above-mentioned configurations, functions, control device 71, database, etc. may be realized in hardware by designing some or all of them as an integrated circuit, for example. Further, the above-mentioned configurations, functions, etc. may be realized in software by a processor such as CPU 712 interpreting and executing a program that realizes each function. Information such as the program, table, file, etc. that realizes each function can be stored in a recording device such as memory 711 or SSD (Solid State Drive), or a recording medium such as an IC (Integrated Circuit) card, SD (Secure Digital) card, or DVD (Digital Versatile Disc), in addition to being stored in an HD (Hard Disk). In addition, in each embodiment, the control lines and information lines are those that are considered necessary for the explanation, and not all control lines and information lines in the product are necessarily shown. In reality, it can be considered that almost all components are connected to each other. [Explanation of symbols]

[0091] 1 Heating device (first heating section) 5 Ion source (ion source section) 5A barrier discharge ion source (ion source part) 61 Mass spectrometer (first analytical section) 71 Control device (control unit) 72 Alarm device (alarm unit) 201~205,201a Piping 211,212,221~226 Branch pipe 301 Flow Control Device 302 Suction pump (suction section) 311 Spectroscopic analysis device (second analysis section) 321 Adsorption device (adsorption part) 331 Carrier gas supply device (carrier gas supply section) 332 Gas chromatograph-mass spectrometer (third analytical section) 333 Temperature control device (second heating section) 401 Thin tube 901 First valve (flow path control section) 911 Second valve (flow path control section) 913 3rd valve (flow path control section) BR, BR1~BR3 branching section A flow path (first flow path) B flow path (second flow path) C,D flow path T,Ta~Tc,Tz Trace Inspection Device (Chemical Substance Detection Device) W Wiping material (media) S101 Insertion heating (medium heating process) S102 Suction of generated steam (suction process) S104 Analysis by mass spectrometer (first analysis step) S112: Issue an alarm (first alarm step) S205 Analysis by optical analysis device (second analysis step) S212 Issue an alarm (second alarm process) S322 Switch the first valve (first flow path switching process) S431 Switching the second and third valves (second flow path switching process) S432 Carrier gas is introduced into the adsorption device (carrier gas supply process) S433 Heat the adsorption device to desorb chemical substances (adsorption part heating process) S441 Analyze the desorbed chemicals by GC / MS (second analysis step)

Claims

1. a first heating unit that heats a medium from which chemical substances adhering to the inspection object have been wiped off; an ion source unit that ionizes vapor related to the chemical substance generated by the first heating unit by heating the medium; a first analysis unit that analyzes ions generated in the ion source unit; a suction unit that sucks the steam generated in the first heating unit; A pipe connecting the first heating unit and the suction unit; a branching section provided in the piping, the branching section branching the piping so that one end is connected to the ion source section and the other end is connected to the suction section; having an adsorption section having an adsorbent that adsorbs the chemical substance is provided between the branching section and the suction section; a flow path control unit is provided between the branch unit and the adsorption unit, the flow path control unit switching between a first flow path through which the steam flows toward the suction unit and a second flow path through which the steam flows toward the adsorption unit, A control unit for controlling the flow path control unit, The control unit is When the first analysis unit detects a predetermined chemical substance, the flow path control unit switches the flow path so that the vapor flowing through the first flow path flows to the second flow path. A chemical substance detection device comprising:

2. A carrier gas supply unit that supplies a carrier gas that carries the chemical substance; A third analysis unit that analyzes the chemical substance; a second heating unit that heats the adsorption unit; having The control unit is When the first analysis unit detects a predetermined chemical substance, the flow path control unit is controlled so that the vapor generated in the first heating unit does not flow into the adsorption unit and the carrier gas flows from the carrier gas supply unit to the third analysis unit via the adsorption unit, and the carrier gas supply unit is caused to supply the carrier gas, and the adsorption unit is heated by the second heating unit.

2. The chemical substance detection device according to claim 1 .

3. the ion source unit is a barrier discharge ion source, The pipe connected from the branching portion to the barrier discharge ion source is used for the barrier discharge ion source and is a thin tube thinner than the pipe from the first heating portion to the branching portion.

2. The chemical substance detection device according to claim 1 .

4. a first heating unit that heats a medium that wipes off chemical substances adhering to the inspection object; an ion source unit that ionizes vapor related to the chemical substance generated by the first heating unit by heating the medium; a first analysis unit that analyzes ions generated in the ion source unit; a suction unit that sucks the steam generated in the first heating unit; A pipe connecting the first heating unit and the suction unit; a branching section provided in the piping, the branching section branching the piping so that one end is connected to the ion source section and the other end is connected to the suction section; having a chemical substance detection device including an adsorption section having an adsorbent for adsorbing the chemical substance between the branching section and the suction section, a medium heating step of heating the medium by the first heating unit; a suction step of suctioning the steam generated from the medium by the suction part; a first analysis step of analyzing a portion of the steam branched off at the branching section in the first analysis section; a determination step of determining whether or not a detection target component has been detected as a result of the analysis in the first analysis unit; a first flow path switching step of switching a flow path so that the vapor that has not been analyzed by the first analysis unit among the vapor branched at the branching unit flows to the adsorption unit when a detection target component is detected in the determination step; A chemical substance detection method comprising the steps of:

5. a second analysis section is provided between the branching section and the suction section; a second analysis step of analyzing, in the second analysis section, the steam branched by the branching section that has not been analyzed by the first analysis section; 5. The method for detecting chemical substances according to claim 4, further comprising the steps of:

6. In the determination step, It is determined whether or not the detection target component is detected in at least one of the first analysis section and the second analysis section.

6. The method for detecting chemical substances according to claim 5.

7. a first alarm step in which an alarm unit issues an alarm when the first analysis unit detects a detection target component as a result of the determination step; 5. The method for detecting chemical substances according to claim 4, further comprising the steps of:

8. a second alarm step in which an alarm unit issues an alarm when it is determined in the determination step that at least one of the first analysis unit and the second analysis unit has detected the detection target component; 7. The method for detecting chemical substances according to claim 6, further comprising the steps of:

9. a carrier gas supply unit that supplies a carrier gas that carries the chemical substance to the adsorption unit; A third analysis unit that analyzes the chemical substance; a second heating unit that heats the adsorption unit; having a second flow path switching step of switching the flow path after the first flow path switching step so that the steam generated in the first heating unit does not flow into the adsorption unit and the carrier gas flows from the carrier gas supply unit to the third analytical unit via the adsorption unit; a carrier gas supplying step of supplying the carrier gas from the carrier gas supply unit after the second flow path switching step; an adsorption unit heating step of heating the adsorption unit by the second heating unit after the carrier gas supplying step; a second analysis step of performing an analysis by the third analysis unit; 5. The method for detecting chemical substances according to claim 4, further comprising the steps of:

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