Semiconductor Device

Abstract

To secure insulation of the reverse side of a control chip.SOLUTION: A semiconductor device 10 comprises: power semiconductor chips 102a; a resin case 300 which has a space SP where the power semiconductor chips 102a are located; a lead terminal 400a which is arranged on the resin case 300; control chips 200 which are arranged at a first part of the resin case 300 not overlapping with the lead terminal 400a in plan view from a perpendicular direction with respect to a top surface TPa of the lead terminal 400a so as to control the power semiconductor chips 102a; and a wire 500a which has one end connected to the lead terminal 400a and the other end connected to the control chips 200.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a semiconductor device. [Background technology]

[0002] There is known a semiconductor device in which a power semiconductor chip including a power semiconductor element such as an IGBT (Insulated Gate Bipolar Transistor) is housed in a resin case. This type of semiconductor device further includes a control chip such as a control IC (Integrated Circuit) that controls the power semiconductor chip, and lead terminals extending from the inside to the outside of the resin case. Patent Document 1 discloses a semiconductor device in which the control chip is disposed on the lead terminals via an insulating layer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2013-239479 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the semiconductor device as described above, it is required to ensure insulation of the back surface of the control chip. [Means for solving the problem]

[0005] A semiconductor device according to a preferred embodiment of the present invention comprises a first semiconductor chip, a resin case in which a space is formed in which the first semiconductor chip is located, a lead terminal arranged in the resin case, a second semiconductor chip arranged in a first portion of the resin case that does not overlap with the lead terminal in a planar view from a direction perpendicular to an upper surface of the lead terminal, and controlling the first semiconductor chip, and wiring having one end connected to the lead terminal and the other end connected to the second semiconductor chip.

[0006] A semiconductor device according to another preferred embodiment of the present invention comprises a first semiconductor chip, a resin case in which a space is formed in which the first semiconductor chip is located, a lead terminal arranged in the resin case, a second semiconductor chip that controls the first semiconductor chip, and wiring having one end connected to the lead terminal and the other end connected to the second semiconductor chip, wherein the lead terminal has a second upper surface that is recessed with respect to a first upper surface to which the wiring is connected, the resin case includes a first portion formed on the second upper surface of the lead terminal, and the second semiconductor chip is arranged in the first portion of the resin case so as not to contact the lead terminal. Effect of the Invention

[0007] According to the semiconductor device of the present invention, insulation of the back surface of the control chip can be ensured. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic diagram of a semiconductor device according to a first embodiment. [Diagram 2] 2 is an explanatory diagram for explaining a through hole and a base portion shown in FIG. 1. FIG. [Diagram 3] 3 is a cross-sectional view showing an example of a cross section of the semiconductor device taken along line B1-B2 shown in FIG. 2. [Figure 4] FIG. 2 is an explanatory diagram for explaining an example of a semiconductor device according to a first comparative example. [Diagram 5] 2 is an explanatory diagram for explaining a manufacturing method of the semiconductor device shown in FIG. [Figure 6] FIG. 11 is an explanatory diagram for explaining an example of a semiconductor device according to a second embodiment. [Figure 7] FIG. 7 is an explanatory diagram for explaining an example of the lead terminal shown in FIG. 6. [Figure 8] FIG. 13 is an explanatory diagram for explaining an example of a semiconductor device according to a third embodiment. [Figure 9] 9 is an explanatory diagram for explaining a recess and a base portion shown in FIG. 8. FIG. [Figure 10]FIG. 11 is an explanatory diagram for explaining an example of a semiconductor device according to a second comparative example. [Figure 11] FIG. 11 is an explanatory diagram for explaining an example of a semiconductor device according to a first modified example. [Figure 12] FIG. 13 is an explanatory diagram for explaining an example of a semiconductor device according to a second modified example. [Figure 13] FIG. 13 is an explanatory diagram for explaining an example of a semiconductor device according to a third modified example. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] Hereinafter, the embodiments of the present invention will be described with reference to the drawings. In each drawing, the dimensions and scale of each part are appropriately different from the actual ones. In addition, since the embodiments described below are preferred specific examples of the present invention, various technically preferable limitations are attached, but the scope of the present invention is not limited to these embodiments unless otherwise specified in the following description to the effect that the present invention is limited.

[0010] A. Embodiment DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an example of an outline of a semiconductor device 10 according to a first embodiment will be described with reference to FIG.

[0011] A1: First embodiment FIG. 1 is a schematic diagram of a semiconductor device 10 according to the first embodiment.

[0012] For convenience of explanation, a three-axis Cartesian coordinate system having an X-axis, a Y-axis, and a Z-axis that are mutually orthogonal is introduced below. Hereinafter, the direction indicated by the X-axis arrow is referred to as the +X direction, and the opposite direction of the +X direction is referred to as the -X direction. Hereinafter, the direction indicated by the Y-axis arrow is referred to as the +Y direction, and the opposite direction of the +Y direction is referred to as the -Y direction. Hereinafter, the +Y direction and the -Y direction may be referred to as the Y direction without any particular distinction, and the +X direction and the -X direction may be referred to as the X direction without any particular distinction. Hereinafter, the +Z direction and the -Z direction may be referred to as the Z direction without any particular distinction. Hereinafter, the +Z direction may be referred to as the upper side, and the -Z direction may be referred to as the lower side.

[0013] In addition, hereinafter, viewing an object from a specific direction may be referred to as a planar view. Fig. 1 shows a plan view of the semiconductor device 10 viewed from the +Z direction, and a cross-sectional view of the semiconductor device 10 taken along line A1-A2 in the plan view. In the following, the planar view from the +Z direction may be simply referred to as a "planar view." Note that the planar view from the +Z direction corresponds to a planar view from a direction perpendicular to the top surface TPa of the lead terminal 400a.

[0014] The semiconductor device 10 is, for example, a power semiconductor device including a power semiconductor element such as a switching element. Examples of the switching element include a power MOSFET (Metal Oxide Semiconductor Field Effect Transistor) and an IGBT (Insulated Gate Bipolar Transistor). Also, an example of the power semiconductor device is an inverter device including a switching element and a control circuit that controls the switching element. In this embodiment, the semiconductor device 10 may be an IPM (Intelligent Power Module) in which the switching element, the control circuit, and the like are housed in one package.

[0015] For example, the semiconductor device 10 has a plurality of chip pairs 100, a plurality of control chips 200, a resin case 300, and a plurality of lead terminals 400 (400a, 400b, and 400c). Furthermore, the semiconductor device 10 has a circuit layer 120, a connection portion 130, an insulating metal substrate 140, a plurality of wires 500 (500a, 500b, 500c, and 500d), and a sealing resin 700. The chip pair 100 is a set of a power semiconductor chip 102a and a power semiconductor chip 102b. Hereinafter, the power semiconductor chips 102a and 102b may be collectively referred to as a power semiconductor chip 102. In the plan view of FIG. 1, the resin case 300 is indicated by shading.

[0016] The power semiconductor chip 102a is an example of a "first semiconductor chip." For example, the power semiconductor chip 102a is a power MOSFET, an IGBT, or the like. Also, for example, the power semiconductor chip 102b is a diode such as a free wheeling diode (FWD) connected in inverse parallel to the power semiconductor chip 102a. The inverse parallel connection of a diode to a switching element means that the diode is connected in parallel to the switching element such that the forward direction of the diode is opposite to the forward direction of the switching element. Note that a set of a switching element and a diode may be one semiconductor chip as a so-called RC-IGBT (Reverse Conducting IGBT).

[0017] In the example shown in FIG. 1, the chip pairs 100 are arranged at intervals in the Y direction, and are connected to the lead terminals 400c by the wires 500c. The power semiconductor chips 102a and 102b are arranged on the circuit layer 120 at intervals in the X direction. The circuit layer 120 is a layer on which a wiring pattern or the like is formed. As shown in the cross-sectional view of FIG. 1, the chip pairs 100 are connected to the circuit layer 120 by the connection parts 130. The connection parts 130 may be, for example, a conductive brazing material or solder material containing a metal material such as silver. The circuit layer 120 is arranged on an insulated metal substrate 140 (more specifically, an insulating layer 144 described later). The insulated metal substrate 140 includes a metal substrate 142 formed of a metal material, and an insulating layer 144 formed on the metal substrate 142 by an insulating material. For example, the insulating layer 144 is a ceramic substrate, and the metal substrate 142 functions as a heat sink for dissipating heat generated by the chip pair 100 .

[0018] The control chip 200 is an example of a "second semiconductor chip." The control chip 200 controls the power semiconductor chips 102a and 102b. For example, the control chip 200 is a semiconductor chip on which an integrated circuit that controls the conduction and non-conduction of the power semiconductor chips 102a and 102b is formed. In this embodiment, the control chip 200 may be a High Voltage Integrated Circuit (HVIC). Note that, assuming a circuit in which two switching elements are connected in series between two wirings, for example, the HVIC is an integrated circuit that drives the gate of a switching element connected to the wiring with the higher voltage of the two wirings. Note that the integrated circuit that drives the gate of a switching element connected to the wiring with the lower voltage of the two wirings is also called a Low Voltage Integrated Circuit (LVIC).

[0019] The lead terminals 400 are formed of, for example, a metal material. For example, the lead terminals 400 are integrally formed with the resin case 300 by insert molding. As a result, the lead terminals 400 are disposed in the resin case 300. For example, each of the lead terminals 400 includes an end portion located on the resin case 300 and an end portion located outside the resin case 300 in a plan view. That is, the lead terminals 400 extend from the inside to the outside of the resin case 300.

[0020] Each of the plurality of lead terminals 400b extends, for example, in the X direction. The plurality of lead terminals 400b are arranged in the Y direction at the edge of the resin case 300 in the +X direction. Each of the plurality of lead terminals 400c extends, for example, in the X direction. The plurality of lead terminals 400c are arranged in the Y direction at the edge of the resin case 300 in the -X direction. For example, the plurality of chip pairs 100 are arranged between the plurality of lead terminals 400b and the plurality of lead terminals 400c. The lead terminal 400a is formed so as to pass through the edge of the resin case 300 in the +X direction from the region between the plurality of chip pairs 100 and the plurality of lead terminals 400b. That is, the lead terminal 400a includes a portion extending in the arrangement direction (Y direction) of the plurality of chip pairs 100 on the resin case 300.

[0021] In addition, in the portion of the lead terminal 400a extending in the Y direction, for example, a plurality of through holes HL are formed at intervals from each other in the Y direction. For example, the plurality of through holes HL are formed corresponding to the plurality of control chips 200. Note that the lead terminal 400a is an example of a "lead terminal", and the through holes HL are an example of a "through hole".

[0022] The resin case 300 is a case formed of, for example, a thermoplastic resin. Examples of the thermoplastic resin include polyphenylene sulfide (PPS) resin, polybutylene terephthalate (PBT) resin, polybutylene succinate (PBS) resin, polyamide (PA) resin, and acrylonitrile butadiene styrene (ABS) resin.

[0023] Also, for example, the resin case 300 includes a pedestal portion ST located inside each of a plurality of through holes HL formed in the lead terminal 400a. For example, as shown in the cross-sectional view of FIG. 1, the pedestal portion ST of the resin case 300 is formed inside the through hole HL so as to fill the through hole HL. The control chip 200 is bonded to a surface SF1a of the pedestal portion ST by an insulating adhesive 600. The resin case 300 is an example of a "resin case", and the pedestal portion ST is an example of a "first portion".

[0024] In this embodiment, since the multiple through holes HL are formed corresponding to the multiple control chips 200, the multiple base portions ST are also formed corresponding to the multiple control chips 200. Each of the multiple control chips 200 is disposed on the corresponding base portion ST among the multiple base portions ST so as not to contact the lead terminals 400a. That is, each of the multiple control chips 200 is disposed on the base portion ST of the resin case 300 that does not overlap with the lead terminals 400a in a plan view.

[0025] The control chip 200 arranged on the base portion ST is connected to the lead terminal 400a by a wire 500a, to the lead terminal 400b by a wire 500b, and to the power semiconductor chip 102a by a wire 500d. In this way, the control chip 200 is electrically connected to the lead terminals 400a, etc. A voltage such as a ground voltage common to the multiple control chips 200 is supplied to the lead terminal 400a. The wire 500 is made of a metal material. The wire 500a is an example of "wiring".

[0026] In this manner, in this embodiment, the control chip 200 is disposed in the base portion ST located inside the through hole HL formed in the lead terminal 400a of the resin case 300, and therefore the lead terminal 400a does not exist below the control chip 200. Therefore, in this embodiment, insulation between the control chip 200 and the lead terminal 400a can be ensured.

[0027] In addition, in this embodiment, since the control chip 200 is located inside the through hole HL of the lead terminal 400a in a plan view, it is possible to prevent the distance between the power semiconductor chip 102a, the lead terminals 400a and 400b, and the control chip 200 from increasing. As a result, in this embodiment, it is possible to prevent the wires 500a, 500b, 500d, etc. connected to the control chip 200 from becoming long.

[0028] Here, for example, the resin case 300 is grasped as a rectangular frame surrounding the multiple chip pairs 100 in a plan view. For example, as shown in the cross-sectional view of FIG. 1, the resin case 300 is composed of a first frame-shaped portion FR1, a second frame-shaped portion FR2, and a third frame-shaped portion FR3. The second frame-shaped portion FR2 is a rectangular frame-shaped portion in which an opening is formed. The first frame-shaped portion FR1 is a rectangular frame-shaped portion protruding in the +Z direction from the periphery of the first surface SF1 of the second frame-shaped portion FR2. The third frame-shaped portion FR3 is a rectangular frame-shaped portion protruding in the -Z direction from the periphery of the second surface SF2 of the second frame-shaped portion FR2.

[0029] The lead terminals 400a, 400b, and 400c are disposed between the first frame portion FR1 and the second frame portion FR2. For example, the first surface SF1 of the second frame portion FR2, the upper surface TPb of the lead terminal 400b, and the upper surface TPc of the lead terminal 400c are located in the same plane. The upper surface TPa of the lead terminal 400a may also be located in the same plane as the first surface SF1 of the second frame portion FR2. Note that "multiple surfaces located in the same plane" means that the multiple surfaces are parallel to each other and that the positions in the direction perpendicular to the multiple surfaces are the same for the multiple surfaces. However, "parallel" includes not only strict parallelism but also substantial parallelism (for example, parallelism within a margin of error). Also, "same" includes not only strict sameness but also substantial sameness (for example, the difference in the positions of the multiple surfaces is within a margin of error).

[0030] Further, a plurality of chip pairs 100 are located in a space SP within the opening of the second frame-shaped portion FR2. The space SP is defined by an inner wall surface WS of the second frame-shaped portion FR2. An upper end of the inner wall surface WS intersects with a first surface SF1 of the second frame-shaped portion FR2. A control chip 200 is disposed on the first surface SF1 of the second frame-shaped portion FR2 (more specifically, the portion surrounded by the first frame-shaped portion FR1). A plurality of lead terminals 400 are also disposed on the first surface SF1. The plurality of lead terminals 400 may be embedded in the first surface SF1 and may constitute a part of it. The second frame-shaped portion FR2 has a base portion ST inside a through hole HL formed in the lead terminal 400a. For example, the base portion ST is formed so that a surface SF1a of the base portion ST is continuous with an upper surface TPa of the lead terminal 400a without any step. As a result, the surface SF1a of the pedestal portion ST and the upper surface TPa of the lead terminal 400a are located in the same plane. Since the pedestal portion ST is a part of the second frame-shaped portion FR2, the surface SF1a of the pedestal portion ST is a part of the first surface SF1 of the second frame-shaped portion FR2.

[0031] Moreover, the insulating metal substrate 140 is connected to the second surface SF2 of the second frame portion FR2 (more specifically, the portion surrounded by the third frame portion FR3) by a connecting portion not shown. As a result, the insulating metal substrate 140 is disposed in the space within the opening of the third frame portion FR3. In this manner, the resin case 300 is joined to the insulating metal substrate 140 such that the multiple chip pairs 100 (power semiconductor chips 102a and 102b) are positioned within the space SP. In the following, the connecting portion that connects the insulating metal substrate 140 to the resin case 300 (more specifically, the second surface SF2 of the second frame portion FR2) is also referred to as a substrate joint portion.

[0032] By joining the insulating metal substrate 140 to the resin case 300, for example, the lower opening of the resin case 300 is blocked, and the material of the sealing resin 700 can be injected into the space in the resin case 300 from the upper opening. The material of the sealing resin 700 is, for example, a thermosetting resin such as an epoxy resin. The space in the resin case 300 is, for example, a space surrounded by the first frame-shaped part FR1 and the second frame-shaped part FR2. The sealing resin 700 is filled into the space in the resin case 300 from the upper opening of the resin case 300, and the circuit layer 120, the chip pair 100 (the power semiconductor chips 102a and 102b), the control chip 200, the wires 500, and the like are sealed with the sealing resin 700. The shape of the resin case 300 is not limited to the above example. For example, the third frame-shaped part FR3 may not be frame-shaped, but may have a bottom surface that blocks the opening of the second frame-shaped part FR2.

[0033] Next, the through-hole HL of the lead terminal 400a and the seat portion ST of the resin case 300 will be described with reference to FIG.

[0034] Fig. 2 is an explanatory diagram for explaining the through hole HL and the pedestal portion ST shown in Fig. 1. The plan view of Fig. 2 is a plan view of an area AR1 surrounded by a dashed line shown in the plan view of Fig. 1. The A1-A2 exploded cross-sectional view shows a schematic exploded cross-section of the semiconductor device 10 along the A1-A2 line in the plan view of the area AR1. In Fig. 2, wires 500 and the like are omitted in order to make the drawing easier to see.

[0035] In this embodiment, as shown in the A1-A2 exploded cross-sectional view, the lead terminal 400a has a through hole HL penetrating the lead terminal 400a. In this embodiment, the lead terminal 400a is integrally formed with the resin case 300 by insert molding, and therefore a portion of the resin case 300 is formed as a seat portion ST inside the through hole HL of the lead terminal 400a.

[0036] The front surface SF1a of the base portion ST of the first surface SF1 of the second frame portion FR2 and the back surface BS of the control chip 200 are bonded by the adhesive 600. The control chip 200 is arranged so as not to contact the lead terminal 400a. For example, as shown in the plan view of the region AR1, the through hole HL of the lead terminal 400a is grasped as a rectangular space in a plan view. The control chip 200 does not overlap the lead terminal 400a in a plan view. Specifically, the control chip 200 is arranged so that the outer periphery of the control chip 200 is located inside the inner periphery of the through hole HL in a plan view. More specifically, the control chip 200 is arranged so that a constant interval is secured over the entire circumference between the outer periphery of the control chip 200 and the inner periphery of the through hole HL in a plan view. For this reason, the through hole HL of the lead terminal 400a is formed, for example, such that the width WX10 in the X direction is larger than the width WX20 in the X direction of the control chip 200, and the width WY10 in the Y direction is larger than the width WY20 in the Y direction of the control chip 200. Note that the widths WX102 and WX104 in the X direction of the portion of the lead terminal 400a where the through hole HL is formed may be the same size as each other or different sizes.

[0037] In addition, in this embodiment, the entire control chip 200 is located inside the through hole HL formed in the lead terminal 400a in a plan view, so that the control chip 200 is surrounded by the lead terminal 400a. As a result, in this embodiment, the distance between the control chip 200 and the lead terminal 400a can be reduced over the entire circumference of the edge of the control chip 200. Therefore, in this embodiment, even if a terminal to which the wire 500a is connected is provided on the edge of the control chip 200 along the X direction, for example, the distance between the terminal of the control chip 200 and the lead terminal 400a can be prevented from becoming large. That is, in this embodiment, the wire 500a connecting the terminal of the control chip 200 and the lead terminal 400a can be prevented from becoming long. As a result, in this embodiment, the process of connecting the wire 500a to the terminal of the control chip 200 and the lead terminal 400a (for example, the fifth step S500 of FIG. 5 described later) can be prevented from becoming complicated.

[0038] In addition, in this embodiment, the width WX100 in the X direction in a portion of the lead terminal 400a where the through hole HL is not formed in the Y direction is larger than the width WX10 in the X direction of the through hole HL and the width WX20 in the X direction of the control chip 200. Therefore, in this embodiment, a connection area for connecting the wire 500a can be easily secured in a portion of the upper surface TPa of the lead terminal 400a where the through hole HL is not formed in the Y direction (a portion whose width in the X direction is WX100, which is larger than the width WX20, etc.). As a result, in this embodiment, it is possible to prevent the process of connecting the wire 500a to the upper surface TPa of the lead terminal 400a from becoming difficult.

[0039] Next, a cross section of the semiconductor device 10 taken along line B1-B2 in the plan view of the region AR1 will be described with reference to FIG.

[0040] Fig. 3 is a cross-sectional view showing an example of a cross section of the semiconductor device 10 taken along the line B1-B2 shown in Fig. 2. Note that, in Fig. 3 as well, wires 500 and the like are omitted in order to make the drawing easier to see.

[0041] As shown in FIG. 3, the top surface TPa of the lead terminal 400a is not covered by the resin case 300 and is exposed from the resin case 300. For example, the top surface TPa of the lead terminal 400a and the first surface SF1 of the second frame-shaped portion FR2 are continuous with each other without any step. That is, the first surface SF1 of the second frame-shaped portion FR2 and the top surface TPa of the lead terminal 400a are located in the same plane. In addition, the side surface SDY of the lead terminal 400a close to the space SP and the inner wall surface WS of the second frame-shaped portion FR2 are continuous with each other without any step. That is, the inner wall surface WS of the second frame-shaped portion FR2 and the side surface SDY of the lead terminal 400a are located in the same plane.

[0042] Further, a wire 500a is connected to a portion of the upper surface TPa of the lead terminal 400a that is exposed from the resin case 300. In this embodiment, the control chip 200 is not disposed on the upper surface TPa of the lead terminal 400a. Next, as a form to be compared with the first embodiment exemplified above, a form in which the control chip 200 is disposed on the upper surface TPa of the lead terminal 400a (hereinafter also referred to as the first comparative example) will be described with reference to FIG.

[0043] Fig. 4 is an explanatory diagram for explaining an example of a semiconductor device 10Z according to a first comparative example. Fig. 4 shows a cross section of the semiconductor device 10Z at a location corresponding to the cross section of the semiconductor device 10 taken along line A1-A2 shown in Fig. 2. In Fig. 4 as well, wires 500 and the like are omitted in order to make the drawing easier to see.

[0044] The semiconductor device 10Z is similar to the semiconductor device 10, except that the semiconductor device 10Z has a lead terminal 400Z instead of the lead terminal 400a shown in FIG. 1. The lead terminal 400Z is similar to the lead terminal 400a, except that the through hole HL shown in FIG. 1 is not formed. Therefore, the second frame-shaped portion FR2Z of the resin case 300 is similar to the second frame-shaped portion FR2, except that the pedestal portion ST shown in FIG. 1 is not formed. In the semiconductor device 10Z, the control chip 200 is bonded to the upper surface TPa of the lead terminal 400Z by an insulating adhesive 600.

[0045] For example, the thickness of the adhesive 600 is determined by the diameter of the filler (not shown) contained in the adhesive 600. Therefore, if there is a bias in the distribution of the filler diameters in the adhesive 600, there will be a portion where the adhesive 600 is thin, and the control chip 200 may tilt. In this case, the distance between the control chip 200 and the lead terminals 400Z will be shortened in the portion where the adhesive 600 is thin, and there is a risk that insulation between the control chip 200 and the lead terminals 400Z will not be ensured.

[0046] If insulation between the control chip 200 and the lead terminal 400Z is not ensured, the withstand voltage between the control chip 200 and the lead terminal 400Z decreases. That is, in the first comparative example, there is a risk that the withstand voltage between the control chip 200 and the lead terminal 400Z is not ensured. The withstand voltage is, for example, a durability performance that maintains electrical insulation even when a high voltage is applied to an insulator. Note that in a configuration in which the filler in the adhesive 600 is limited to a filler having a diameter equal to or larger than a predetermined value, the cost of the adhesive 600 increases.

[0047] In contrast, in this embodiment, the lead terminal 400a does not exist on the lower side of the control chip 200. Therefore, in this embodiment, even in the part where the thickness of the adhesive 600 that bonds the control chip 200 to the resin case 300 is thin, the insulation of the back surface BS of the control chip 200 can be ensured. That is, in this embodiment, the insulation of the back surface BS of the control chip 200 can be ensured regardless of the thickness of the adhesive 600. Therefore, in this embodiment, the insulation of the back surface BS of the control chip 200 can be ensured without increasing the cost of the adhesive 600. As a result, in this embodiment, for example, the withstand voltage between the control chip 200 and the lead terminal 400a can be reliably ensured. As a result, in this embodiment, the destruction of the control chip 200 due to a surge voltage or the like from the outside of the semiconductor device 10 can be suppressed.

[0048] Next, a method for manufacturing the semiconductor device 10 will be described with reference to FIG.

[0049] FIG. 5 is an explanatory diagram for explaining a manufacturing method of the semiconductor device 10 shown in FIG.

[0050] First, in a first step S100, a lead frame including a plurality of lead terminals 400 is inserted into a mold for a resin case 300. Before the first step S100 is performed, through holes HL may be formed in the lead terminals 400a included in the lead frame.

[0051] Next, in the second step S200, insert molding is performed to form the multiple lead terminals 400 together with the resin case 300. For example, in the second step S200, a resin such as PPS resin is injected into a mold into which a lead frame is inserted, and after the resin is cured, the lead frame is divided into the multiple lead terminals 400 to form the resin case 300 into which the multiple lead terminals 400 are inserted. In this manner, the resin case 300 into which the multiple lead terminals 400 are inserted is formed by curing the resin injected into the mold. For example, in the second step S200, the resin case 300 is formed in which the seat portion ST is located inside the through hole HL of the lead terminal 400a.

[0052] Next, in a third step S300, an insulating adhesive 600 is applied to a portion of the base portion ST of the resin case 300 where the control chip 200 is to be placed, and the control chip 200 is placed on the portion to which the adhesive 600 is applied. That is, in the third step S300, the control chip 200 is placed on the base portion ST of the resin case 300 that does not overlap with the lead terminals 400a in a plan view.

[0053] Next, in a fourth step S400, the insulating metal substrate 140 is bonded to the resin case 300 so as to close the lower opening of the resin case 300. For example, before the fourth step S400 is performed, the circuit layer 120 may be disposed on the insulating metal substrate 140, and a plurality of chip pairs 100 (power semiconductor chips 102a and 102b) may be bonded to the circuit layer 120. That is, in the fourth step S400, the power semiconductor chip 102a is disposed in the space SP of the resin case 300.

[0054] Next, in a fifth step S500, wire bonding is performed to connect the wires 500 to the terminals of the power semiconductor chip 102a, the terminals of the power semiconductor chip 102b, the terminals of the control chip 200, the lead terminals 400, etc. For example, in the fifth step S500, one end of the wire 500a is connected to the lead terminal 400a, and the other end of the wire 500a is connected to the control chip 200.

[0055] Here, in this embodiment, since the seat portion ST of the resin case 300 is located inside the through hole HL of the lead terminal 400a, it is possible to prevent the lead terminal 400a from shifting in the X direction and the Y direction. As a result, in this embodiment, it is possible to prevent the position of the lead terminal 400a from shifting even during wire bonding, for example. Therefore, in this embodiment, it is possible to stably perform wire bonding to connect the wire 500 to the lead terminal 400a, for example.

[0056] Next, in a sixth step S600, a sealing process is performed to seal the circuit layer 120, the chip pair 100 (power semiconductor chips 102a and 102b), the control chip 200, the wires 500, and the like with sealing resin 700. For example, in the sealing process, a liquid resin (material of the sealing resin 700) is injected into the space inside the resin case 300 from an opening on the upper side of the resin case 300, and a heat curing process is performed to heat and harden the resin injected into the resin case 300. As a result, the semiconductor device 10 shown in FIG. 1 is obtained.

[0057] The manufacturing method of the semiconductor device 10 is not limited to the example shown in FIG. 5. For example, a heat curing process step may be performed as appropriate to heat and harden the adhesive 600 that bonds the control chip 200 to the resin case 300 and the substrate bonding portion that bonds the insulating metal substrate 140 to the resin case 300. Specifically, after the fourth step S400 is performed and before the fifth step S500 is performed, a heat curing process step may be performed to heat and harden the adhesive 600 and the substrate bonding portion. Also, for example, the order of performing the third step S300 and the fourth step S400 may be reversed from the order shown in FIG. 5.

[0058] As described above, in this embodiment, the semiconductor device 10 includes the power semiconductor chip 102a, the resin case 300 in which the space SP in which the power semiconductor chip 102a is located is formed, the lead terminals 400a arranged in the resin case 300, the control chip 200, and the wires 500a. The control chip 200 is arranged in a pedestal portion ST of the resin case 300 that does not overlap with the lead terminals 400a in a plan view from a direction perpendicular to the upper surface TPa of the lead terminals 400a (Z direction), and controls the power semiconductor chip 102a. One end of the wire 500a is connected to the lead terminals 400a, and the other end of the wire 500a is connected to the control chip 200.

[0059] Thus, in this embodiment, the control chip 200 is disposed in the base portion ST of the resin case 300, which does not overlap with the lead terminals 400a in a plan view. Therefore, in this embodiment, insulation of the back surface BS of the control chip 200 can be ensured. As a result, in this embodiment, the reliability of the semiconductor device 10 in which the control chip 200 and the lead terminals 400a are disposed on the resin case 300 can be improved.

[0060] In this embodiment, a through hole HL is formed in the lead terminal 400a. The seat portion ST of the resin case 300 is located inside the through hole HL of the lead terminal 400a. This makes it possible to prevent the lead terminal 400a from being misaligned in the X and Y directions in this embodiment.

[0061] A2: Second embodiment Fig. 6 is an explanatory diagram for explaining an example of a semiconductor device 10 according to a second embodiment. Fig. 6 shows a plan view of the semiconductor device 10 as viewed from the +Z direction, and a cross-sectional view of the semiconductor device 10 taken along line A1-A2 in the plan view. Elements similar to those described in Figs. 1 to 5 are given the same reference numerals, and detailed description thereof will be omitted.

[0062] The semiconductor device 10 shown in Fig. 6 is similar to the semiconductor device 10 shown in Fig. 1, except that it has a lead terminal 400a1 instead of the lead terminal 400a shown in Fig. 1. The following description will focus on the lead terminal 400a1.

[0063] The lead terminal 400a1 is similar to the lead terminal 400a shown in Fig. 1, except that a notch CT is formed instead of the through hole HL shown in Fig. 1. For example, as shown in the plan view of Fig. 6, a plurality of notches CT are formed at intervals from each other in the Y direction in a portion of the lead terminal 400a1 extending in the Y direction. Note that the lead terminal 400a1 is an example of a "lead terminal", and the notches CT are an example of a "notch".

[0064] Moreover, the pedestal portion ST of the resin case 300 is located inside the notch CT of the lead terminal 400a1. For example, as shown in the cross-sectional view of FIG. 6, the pedestal portion ST of the resin case 300 is formed inside the notch CT so as to fill the notch CT. In this embodiment, the side surface of the pedestal portion ST close to the space SP is located in the same plane as the inner wall surface WS of the second frame-shaped portion FR2. Moreover, the control chip 200 is bonded to the surface SF1a of the pedestal portion ST located inside the notch CT by an insulating adhesive 600. For example, each of the multiple control chips 200 is arranged on the corresponding pedestal portion ST of the multiple pedestal portions ST so as not to contact the lead terminal 400a1.

[0065] In this manner, in this embodiment, the control chip 200 is disposed in the base portion ST located inside the notch CT formed in the lead terminal 400a1 of the resin case 300, and therefore the lead terminal 400a1 does not exist below the control chip 200. Therefore, in this embodiment, insulation between the control chip 200 and the lead terminal 400a1 can be ensured.

[0066] In addition, in this embodiment, since the control chip 200 is located inside the notch CT of the lead terminal 400a1 in a plan view, it is possible to prevent the distance between the power semiconductor chip 102a, the lead terminals 400a1 and 400b, and the control chip 200 from increasing. As a result, in this embodiment as well, it is possible to prevent the wires 500a, 500b, 500d, etc. connected to the control chip 200 from becoming long.

[0067] Next, the notch CT of the lead terminal 400a1 will be described with reference to FIG.

[0068] Fig. 7 is an explanatory diagram for explaining an example of the lead terminal 400a1 shown in Fig. 6. Fig. 7 is a plan view of the lead terminal 400a1 as viewed from the +Z direction. The dashed rectangle in Fig. 7 indicates a chip arrangement region PAR in which the control chip 200 is arranged.

[0069] A plurality of notches CT opening in the -X direction are formed at intervals in the Y direction in a portion of the lead terminal 400a1 extending in the Y direction. More specifically, the plurality of notches CT opening in the -X direction are formed in a side surface SDY located in the -X direction of two side surfaces of the lead terminal 400a1 along the Y direction. Note that a space SP is located in the -X direction from the side surface SDY of the lead terminal 400a1 (see FIG. 6). That is, in this embodiment, the notches CT of the lead terminal 400a1 open toward the space SP in a plan view.

[0070] Here, for example, the lead terminal 400a1 has a plurality of wide portions LP1 and a plurality of narrow portions NP1 whose width WX122 in the X direction is smaller than the width WX120 in the X direction of the wide portions LP1. The narrow portions NP1 connect the adjacent wide portions LP1. The space surrounded in three directions (+Y direction, -Y direction, and +X direction) by two wide portions LP1 adjacent to each other in the Y direction and one narrow portion NP1 connecting the two wide portions LP1 corresponds to the notch CT. Note that the notch CT differs from the through hole HL surrounded in four directions (+Y direction, -Y direction, +X direction, and -X direction) by a portion of the lead terminal 400a1 in that the notch CT is surrounded in three directions by a portion of the lead terminal 400a1 (the wide portions LP1 and the narrow portions NP1).

[0071] Also, for example, the region inside the notch CT (the region where the pedestal portion ST is formed) is understood to be rectangular in plan view. Also, the side surface SDY of the lead terminal 400a1 close to the space SP (the side surface SDY of the portion where the notch CT is not formed) is located in the same plane as the inner wall surface WS of the second frame portion FR2, similar to the side surface SDY of the lead terminal 400a described in FIG.

[0072] In this embodiment, the entire control chip 200 is located inside the notch CT of the lead terminal 400a1 in a plan view. Therefore, the notch CT of the lead terminal 400a1 is formed, for example, so that the width WX12 in the X direction is larger than the width WX20 of the control chip 200 in the X direction and the width WY12 in the Y direction is larger than the width WY20 of the control chip 200 in the Y direction. The notch CT is formed in an elongated shape in which the width WY12 in the Y direction is larger than the width WX12 in the X direction. The width WX12 of the notch CT is larger than the width WX122 of the narrow portion NP1 of the lead terminal 400a1.

[0073] In this manner, in the present embodiment, since the notch CT is formed in the lead terminal 400a1, it is possible to arrange the control chip 200 so as not to overlap the lead terminal 400a1 in a plan view while suppressing a reduction in the width WX120 in the X direction of the lead terminal 400a1. Therefore, in the present embodiment, it is possible to suppress a process of connecting the wire 500a to the upper surface TPa of the lead terminal 400a1 from becoming difficult.

[0074] In addition, in this embodiment, since the pedestal portion ST is formed inside the cutout CT that opens in the -X direction, the lead terminal 400a1 does not exist in the -X direction of the pedestal portion ST. Therefore, in this embodiment, the width WX120 of the lead terminal 400a1 can be made smaller than in a form in which a part of the lead terminal 400a is disposed in the +X direction and the -X direction of the pedestal portion ST (for example, the above-mentioned first embodiment). However, it is preferable that the width WX120 of the lead terminal 400a1 is a width that does not make it difficult to connect the wire 500a to the lead terminal 400a1.

[0075] In addition, in this embodiment, since the width WX120 of the lead terminal 400a1 can be reduced, even if the width WX120 of the lead terminal 400a1 is smaller than the width that allows the through hole HL to be formed, the notch CT can be formed in the lead terminal 400a1. As a result, in this embodiment, the semiconductor device 10 can be miniaturized.

[0076] Furthermore, in this embodiment, since the notch CT of the lead terminal 400a1 is open in the -X direction, the lead terminal 400a1 does not exist in the -X direction of the control chip 200. Therefore, in this embodiment, the control chip 200 can be disposed closer to the power semiconductor chip 102a than in a configuration in which a part of the lead terminal 400a1 is disposed in the -X direction of the control chip 200. As a result, in this embodiment, the distance between the control chip 200 and the power semiconductor chip 102a can be reduced.

[0077] In this embodiment, an example in which the notch CT of the lead terminal 400a1 is open in the -X direction has been shown, but the notch CT of the lead terminal 400a1 may be open in the +X direction (the opposite direction to the direction in which the space SP is located). In a configuration in which the notch CT is open in the +X direction, a part (narrow width part NP1) of the lead terminal 400a1 is arranged in the -X direction of the control chip 200. Even in a configuration in which the notch CT is open in the +X direction, the width WX120 of the lead terminal 400a1 can be made smaller than a configuration in which a part of the lead terminal 400a is arranged in the +X and -X directions of the base part ST (for example, the first embodiment described above).

[0078] As described above, in this embodiment, the lead terminal 400a1 has a notch CT formed therein. Furthermore, at least a portion of the pedestal portion ST of the resin case 300 is located inside the notch CT of the lead terminal 400a1. In this embodiment as well, the control chip 200 is disposed in the pedestal portion ST that does not overlap with the lead terminal 400a1 in a plan view. For example, in this embodiment, the entire control chip 200 is located inside the notch CT of the lead terminal 400a1 in a plan view. In this embodiment as well, the same effects as those of the first embodiment described above can be obtained.

[0079] In addition, in this embodiment, the notch CT of the lead terminal 400a1 opens toward the space SP in a plan view. Therefore, in this embodiment, the lead terminal 400a1 is not disposed between the base portion ST and the space SP. Therefore, in this embodiment, the control chip 200 can be disposed near the space SP where the power semiconductor chip 102a is located.

[0080] A3: Third embodiment FIG. 8 is an explanatory diagram for explaining an example of the semiconductor device 10 according to the third embodiment. FIG. 8 shows a plan view of the semiconductor device 10 as viewed from the +Z direction, and a cross-sectional view of the semiconductor device 10 along the A1-A2 line in the plan view. Elements similar to those described in FIG. 1 to FIG. 7 are given the same reference numerals, and detailed description is omitted. In FIG. 8, the upper surface TPa of the lead terminal 400a2 is also referred to as the upper surface TPa1 or the upper surface TPa2. The lead terminal 400a2 is an example of a "lead terminal". The upper surface TPa1 is an example of a "first upper surface", and the upper surface TPa2 is an example of a "second upper surface".

[0081] The semiconductor device 10 shown in Fig. 8 is similar to the semiconductor device 10 shown in Fig. 1, except that a lead terminal 400a2 is provided instead of the lead terminal 400a shown in Fig. 1, and the control chip 200 is disposed at a position overlapping with the lead terminal 400a2 in a plan view. The following description will focus on the lead terminal 400a2.

[0082] The lead terminal 400a2 is similar to the lead terminal 400a shown in Fig. 1, except that a recess VL is provided instead of the through hole HL shown in Fig. 1. For example, as shown in the plan view of Fig. 8, a plurality of recesses VL are provided at intervals in the Y direction in a portion of the lead terminal 400a2 extending in the Y direction. For example, the plurality of recesses VL are provided corresponding to the plurality of control chips 200. The recesses VL of the lead terminal 400a2 will be described later in Fig. 9.

[0083] 8, the pedestal portion ST of the resin case 300 is located between the upper surface TPa2 of the lead terminal 400a2 and the control chip 200. The control chip 200 is adhered to a surface SF1a of the pedestal portion ST located on the upper surface TPa2 of the lead terminal 400a2 by an insulating adhesive 600. For example, each of the multiple control chips 200 is disposed on a corresponding one of the multiple pedestal portions ST so as not to contact the lead terminal 400a2.

[0084] Next, the recess VL of the lead terminal 400a2 and the seat portion ST of the resin case 300 will be described with reference to FIG.

[0085] Fig. 9 is an explanatory diagram for explaining the recess VL and the pedestal portion ST shown in Fig. 8. The plan view of Fig. 9 is a plan view of the area AR2 surrounded by a dashed line shown in the plan view of Fig. 1. The C1-C2 cross-sectional view shows a cross section of the semiconductor device 10 taken along the line C1-C2 in the plan view of the area AR2. In Fig. 9, wires 500 and the like are omitted in order to make the drawing easier to see.

[0086] As shown in the C1-C2 cross-sectional view, the lead terminal 400a2 has an upper surface TPa1 to which the wire 500a is connected, and an upper surface TPa2 recessed from the upper surface TPa1. Furthermore, the lead terminal 400a2 has a side surface SD connecting the upper surface TPa1 and the upper surface TPa2. For example, the upper surface TPa2 is parallel to the upper surface TPa1 and is located in the -Z direction from the upper surface TPa1. Furthermore, the side surface SD may be an inclined surface inclined at a predetermined angle with respect to the upper surface TPa2. A recess VL is formed by a step between the upper surface TPa1 and the upper surface TPa2. That is, the recess VL of the lead terminal 400a2 is defined by the upper surface TPa2 and the side surface SD. For example, the upper surface TPa2 of the lead terminal 400a2 corresponds to the bottom surface of the recess VL, and the side surface SD of the lead terminal 400a2 corresponds to the side surface of the recess VL. The recess VL is formed across the entire width of the lead terminal 400a2.

[0087] Also, the pedestal portion ST of the resin case 300 is formed on the upper surface TPa2 of the lead terminal 400a2 so as to fill the recess VL of the lead terminal 400a2. For example, the surface SF1a of the pedestal portion ST, the upper surface TPa1 of the lead terminal 400a2, and the first surface SF1 of the second frame-shaped portion FR2 are located in the same plane. Also, the surface SF1a of the pedestal portion ST located on the upper surface TPa2 of the lead terminal 400a2 and the back surface BS of the control chip 200 are bonded by the adhesive 600. Note that, for example, the cross section of the pedestal portion ST parallel to the YZ plane is trapezoidal (in the example shown in FIG. 9, isosceles trapezoidal).

[0088] As shown in the plan view of the region AR2, the range of the pedestal portion ST in the X direction covers the entire width of the lead terminal 400a2. The range of the pedestal portion ST in the Y direction is from the boundary between one of the two side surfaces SD and the top surface TP1a to the boundary between the other of the two side surfaces SD and the top surface TP1a. That is, the pedestal portion ST is a portion that overlaps the top surface TPa2 and the side surface SD in a plan view. The pedestal portion ST is continuous with other portions of the resin case 300 in the +X direction (for example, a portion of the resin case 300 between the lead terminal 400a2 and the lead terminal 400b, etc.). The side surface of the pedestal portion ST in the -X direction is located in the same plane as the inner wall surface WS of the second frame-shaped portion FR2, as shown in the cross-sectional view of FIG. 8 described above.

[0089] As described above, the control chip 200 is disposed on the surface SF1a of the base portion ST. For example, in a plan view, the entire control chip 200 is located on the base portion ST of the resin case 300. Furthermore, in a plan view, the entire control chip 200 may be located within the upper surface TPa2 of the lead terminals 400a2. In this embodiment, the lead terminals 400a2 are formed such that, for example, the width WX140 in the X direction is larger than the width WX20 of the control chip 200 in the X direction, and the interval DY1 of the upper surface TPa1 is larger than the width WY20 of the control chip 200 in the Y direction. The width WX140 of the lead terminals 400a2 corresponds to the width of the base portion ST in the X direction, and the interval DY1 of the upper surface TPa1 corresponds to the width of the base portion ST in the Y direction.

[0090] Note that the width WX140 of the lead terminal 400a2 may be smaller than the width WX20 of the control chip 200 as long as it does not make it difficult to connect the wire 500a to the upper surface TPa1 of the lead terminal 400a2. In other words, in a plan view, a part of the control chip 200 may be located within the upper surface TPa2 of the lead terminal 400a2.

[0091] Thus, in this embodiment, the base portion ST of the resin case 300 is present between the control chip 200 and the lead terminal 400a2. In addition, the control chip 200 does not overlap the upper surface TPa1 of the lead terminal 400a2 in a plan view. As a result, in this embodiment, for example, even in a portion where the thickness of the adhesive 600 is thin, the distance between the control chip 200 and the lead terminal 400a2 can be secured by the thickness of the base portion ST in the Z direction. Therefore, in this embodiment, the control chip 200 and the lead terminal 400a2 can be reliably insulated from each other without increasing the cost of the adhesive 600. As a result, in this embodiment, the withstand voltage between the control chip 200 and the lead terminal 400a2 can be reliably secured. As a result, in this embodiment, the control chip 200 can be prevented from being destroyed by a surge voltage or the like from the outside of the semiconductor device 10.

[0092] Here, in the first comparative example shown in FIG. 4 described above, a configuration (hereinafter also referred to as a second comparative example) in which the seat portion ST of the resin case 300 is interposed between the control chip 200 and the lead terminals 400Z is considered.

[0093] Fig. 10 is an explanatory diagram for explaining an example of a semiconductor device 10Z according to a second comparative example. Fig. 10 shows a cross section of the semiconductor device 10Z at a location corresponding to the cross section of the semiconductor device 10 taken along line A1-A2 shown in Fig. 8. In Fig. 10 as well, wires 500 and the like are omitted in order to make the drawing easier to see.

[0094] The semiconductor device 10Z according to the second comparative example is similar to the semiconductor device 10Z according to the first comparative example (the semiconductor device 10Z shown in FIG. 4) except that a pedestal portion ST is formed in the second frame-shaped portion FR2Za of the resin case 300. Therefore, the recess VL is not formed in the lead terminal 400Z. For example, in the second comparative example, the lead frame including the multiple lead terminals 400 is planar, so that the upper surface TPa of the lead terminal 400Z and the upper surface TPb of the lead terminal 400b are located in the same plane. Therefore, in the second comparative example, the surface SF1a of the pedestal portion ST formed on the lead terminal 400Z is located in the +Z direction from the upper surface TPa of the lead terminal 400Z.

[0095] In contrast, in this embodiment, as described in FIG. 9 above, a recess VL is formed in the lead terminal 400a2, and a pedestal portion ST is formed inside the recess VL. Therefore, in this embodiment, for example, the position in the Z direction of the surface SF1a of the pedestal portion ST is the same as the position in the Z direction of the upper surface TPa1 of the lead terminal 400a2. Therefore, in this embodiment, the height of the second frame portion FR2 including the pedestal portion ST is smaller than the second frame portion FR2Za of the second comparative example. As a result, in this embodiment, the height in the Z direction of the semiconductor device 10 can be made smaller than that of the second comparative example.

[0096] As described above, in this embodiment, the semiconductor device 10 includes the power semiconductor chip 102a, the resin case 300 in which the space SP in which the power semiconductor chip 102a is located is formed, the lead terminal 400a2 arranged in the resin case 300, the control chip 200, and the wire 500a. The lead terminal 400a2 has an upper surface TPa2 recessed with respect to an upper surface TPa1 to which the wire 500a is connected. The resin case 300 also includes a pedestal portion ST formed on the upper surface TPa1 of the lead terminal 400a2. The control chip 200 is arranged on the pedestal portion ST of the resin case 300 so as not to come into contact with the lead terminal 400a2, and controls the power semiconductor chip 102a.

[0097] Thus, in this embodiment, the base portion ST of the resin case 300 is between the control chip 200 and the lead terminal 400a2. Therefore, in this embodiment, insulation of the back surface BS of the control chip 200 (for example, insulation between the control chip 200 and the lead terminal 400a2) can be reliably ensured.

[0098] In addition, in this embodiment, the entire control chip 200 is located within the upper surface TPa2 of the lead terminal 400a2 in a plan view. Therefore, in this embodiment as well, it is possible to prevent the distance between the power semiconductor chip 102a, the lead terminals 400a2 and 400b, and the control chip 200 from becoming large. As a result, in this embodiment as well, it is possible to prevent the wires 500a, 500b, 500d, etc. connected to the control chip 200 from becoming long.

[0099] B: Variation The above-described embodiment may be modified in various ways. Specific modified aspects that may be applied to the above-described embodiment are illustrated below. Two or more aspects selected from the following examples may be combined to the extent that they are not mutually contradictory.

[0100] B1: First modified example In the above-described first embodiment, the case where the width WX100 in the X direction of the portion of the lead terminal 400a between the through holes HL is larger than the width WX10 in the X direction of the through holes HL has been illustrated, but the present invention is not limited to such an embodiment. For example, the width in the X direction of the portion of the lead terminal 400a between the through holes HL may be smaller than the width WX10 in the X direction of the through holes HL.

[0101] Fig. 11 is an explanatory diagram for explaining an example of a semiconductor device 10 according to a first modified example. Fig. 11 is a plan view of the semiconductor device 10 as viewed from the +Z direction. Elements similar to those explained in Figs. 1 to 10 are given the same reference numerals, and detailed explanations are omitted.

[0102] The semiconductor device 10 shown in Fig. 11 is similar to the semiconductor device 10 shown in Fig. 1, except that it has a lead terminal 400a3 instead of the lead terminal 400a shown in Fig. 1. The following description will focus on the lead terminal 400a3.

[0103] The lead terminal 400a3 has a wide portion LP2 in which a through hole HL is formed, and a narrow portion NP2 connecting adjacent wide portions LP2. The width WX110 of the narrow portion NP2 in the X direction is smaller than the width WX100 of the wide portion LP2 in the X direction. However, it is preferable that the width WX110 of the narrow portion NP2 in the X direction is such that the process of connecting the wire 500a to the lead terminal 400a3 is not difficult.

[0104] As described above, in this modified example as well, the same effects as those of the first embodiment described above can be obtained.

[0105] B2: Second variant In the above-described second embodiment, the entire control chip 200 is located inside the notch CT of the lead terminal 400a1 in a plan view, but the present invention is not limited to this. For example, a part of the control chip 200 may protrude from the notch CT of the lead terminal 400a1 in a plan view.

[0106] FIG. 12 is an explanatory diagram for explaining an example of a semiconductor device 10 according to a second modified example. Elements similar to those explained in FIG. 1 to FIG. 11 are given the same reference numerals, and detailed explanations are omitted. FIG. 12 is a plan view of a lead terminal 400a4 as viewed from the +Z direction. The dashed rectangle in FIG. 12 indicates a chip arrangement region PAR in which the control chip 200 is arranged. Also, the two-dot chain line in FIG. 12 indicates the position of the inner wall surface WS (see FIG. 1) of the second frame-shaped portion FR2 as viewed from the plan view. A space SP is located in the -X direction from the two-dot chain line.

[0107] The semiconductor device 10 according to the second modification is similar to the semiconductor device 10 shown in FIG. 6, except that the semiconductor device 10 has a lead terminal 400a4 instead of the lead terminal 400a1 shown in FIG.

[0108] The lead terminal 400a4 is similar to the lead terminal 400a1 shown in Fig. 7 except that the width WX124 in the X direction is smaller than the width WX120 in the X direction of the lead terminal 400a1 shown in Fig. 7. For example, a plurality of notches CT opening in the -X direction are formed at intervals in the Y direction in a portion of the lead terminal 400a4 extending in the Y direction.

[0109] In this modification, in plan view, a portion of the chip arrangement region PAR is located inside the notch CT of the lead terminal 400a4, and another portion is located outside the notch CT. The chip arrangement region PAR is included in the pedestal portion ST of the resin case 300. Therefore, in this modification, a portion of the pedestal portion ST of the resin case 300 is located inside the notch CT of the lead terminal 400a4.

[0110] In the example shown in FIG. 12, the width WX122 in the X direction of the portion of the lead terminal 400a4 where the notch CT is formed is the same as the width WX122 of the lead terminal 400a1 shown in FIG. 7. The width WX14 in the X direction of the notch CT of the lead terminal 400a4 is smaller than the width WX12 in the X direction of the notch CT of the lead terminal 400a1 shown in FIG. 7. Therefore, the width WX124 in the X direction of the lead terminal 400a4 is smaller than the width WX120 in the X direction of the lead terminal 400a1 shown in FIG. 7. In this manner, in this modification, for example, the width WX124 of the lead terminal 400a4 can be made smaller than that of the second embodiment described above. However, it is preferable that the width WX124 of the lead terminal 400a4 is a width that does not make it difficult to connect the wire 500a to the lead terminal 400a4.

[0111] In this modification, the side surface SDY of the lead terminal 400a4 close to the space SP is not exposed to the space SP. Therefore, in this modification, for example, in the second step S200 of integrally forming the lead terminal 400a4 with the resin case 300 by insert molding, it is possible to prevent the lead terminal 400a4 from getting caught on the die when the die for forming the resin case 300 is removed.

[0112] As described above, in this modified example as well, the same effects as those of the second embodiment described above can be obtained.

[0113] B3: Third variant In the above-described embodiment and modifications, a semiconductor chip on which an integrated circuit (eg, LVIC) different from the integrated circuit (eg, HVIC) formed on the control chip 200 is formed may be disposed on the lead terminals 400a.

[0114] Fig. 13 is an explanatory diagram for explaining an example of the semiconductor device 10 according to the third modification. Fig. 13 is a plan view of the semiconductor device 10 according to the third modification when viewed from the +Z direction. Elements similar to those described in Figs. 1 to 12 are given the same reference numerals, and detailed description thereof will be omitted.

[0115] The semiconductor device 10 shown in Fig. 13 is similar to the semiconductor device 10 shown in Fig. 1, except that a lead terminal 400a5 is provided instead of the lead terminal 400a shown in Fig. 1, and the control chip 220 is disposed on the lead terminal 400a5. Note that in Fig. 13, the power semiconductor chip 102, wires 500, lead terminals 400, etc. connected to the control chip 220 are omitted for ease of viewing. The following will mainly describe the main differences between the semiconductor device 10 shown in Fig. 13 and the semiconductor device 10 shown in Fig. 1.

[0116] In this modification, it is assumed that the integrated circuit formed in the control chip 200 is an HVIC, and the integrated circuit formed in the control chip 220 is an LVIC. The lead terminal 400a5 is similar to the lead terminal 400a shown in FIG. 1, except that it has an area in which the control chip 200 is disposed. For example, the control chip 220 is bonded to the lead terminal 400a5 by a conductive connection part. That is, there is no resin case 300 (for example, the base part ST) between the control chip 220 and the lead terminal 400a5.

[0117] Similarly to the control chip 200, the control chip 220 may be attached by adhesive 600 to a base portion ST that does not overlap with the lead terminal 400a5 in a plan view, and may be connected to the lead terminal 400a5 by a wire 500a.

[0118] As described above, in this modified example as well, the same effects as those of the above-described embodiment and modified example can be obtained.

[0119] B4: Fourth variant In the above-mentioned second embodiment and second modified example, the case where the notch CT is formed in the lead terminal 400a1 or 400a4 is exemplified, but the present invention is not limited to such an embodiment. For example, in the lead terminal 400a4 shown in FIG. 12, the part of the lead terminal 400a4 extending in the Y direction may extend in the Y direction with a substantially constant width WX122 without the notch CT being formed. In this case, for example, in a plan view, the control chip 200 is disposed in a part between the inner wall surface WS (two-dot chain line in FIG. 12) of the second frame portion FR2 and the lead terminal 400a4, not overlapping with the lead terminal 400a4. As described above, in this modified example, the same effects as those of the above-mentioned second embodiment and second modified example can be obtained. [Explanation of symbols]

[0120] 10...semiconductor device, 100...chip pair, 102...power semiconductor chip, 120...circuit layer, 130...connection portion, 140...insulated metal substrate, 142...metal substrate, 144...insulating layer, 200...control chip, 300...resin case, 400...lead terminal, 500...wire, 600...adhesive, 700...sealing resin, CT...notch, FR1...first frame-shaped portion, FR2...second frame-shaped portion, FR3...third frame-shaped portion, HL...through hole, LP1, LP2...wide portion, NP1, NP2...narrow portion, SP...space, ST...pedestal portion, TPa, TPa1, TPa2, TPb, TPc...top surface, VL...recess.

Claims

1. A first semiconductor chip; a resin case having a space in which the first semiconductor chip is located; A lead terminal disposed in the resin case; a second semiconductor chip that controls the first semiconductor chip and is disposed in a first portion of the resin case that does not overlap with the lead terminals in a plan view from a direction perpendicular to an upper surface of the lead terminals, so as not to come into contact with the lead terminals; a wiring having one end connected to the lead terminal and the other end connected to the second semiconductor chip; Equipped with Semiconductor device.

2. the resin case has an inner wall surface that defines the space, the lead terminal and the second semiconductor chip are disposed on a surface that intersects with an upper end of the inner wall surface; The semiconductor device according to claim 1 .

3. The lead terminal has a through hole formed therein, the first portion of the resin case is located inside the through hole of the lead terminal; The semiconductor device according to claim 1 .

4. The lead terminal has a notch formed therein, At least a part of the first portion of the resin case is located inside the notch of the lead terminal. The semiconductor device according to claim 1 .

5. the second semiconductor chip is entirely located inside the notch of the lead terminal in the plan view; The semiconductor device according to claim 4.

6. The notch of the lead terminal is open toward the space in the plan view.

6. The semiconductor device according to claim 4 or 5.

7. A first semiconductor chip; a resin case having a space in which the first semiconductor chip is located; A lead terminal disposed in the resin case; a second semiconductor chip that controls the first semiconductor chip; a wiring having one end connected to the lead terminal and the other end connected to the second semiconductor chip; Equipped with The lead terminal is a second upper surface recessed relative to a first upper surface to which the wiring is connected; The resin case is a first portion formed on the second upper surface of the lead terminal; The second semiconductor chip is a resin case disposed in the first portion so as not to come into contact with the lead terminals; Semiconductor device.

8. the second semiconductor chip is entirely located within the second upper surface of the lead terminal in a plan view from a direction perpendicular to the first upper surface of the lead terminal; The semiconductor device according to claim 7.

Images