Semiconductor device and overcurrent protection device

Abstract

The present invention suppresses oscillation occurring in a detection signal of a sense electric current outputted from a semiconductor element for electric current monitoring.　Collectors of a main IGBT (1a) and a sense IGBT (1b) are connected to an electric power supply voltage via a terminal (C). An emitter of the main IGBT (1a) is connected to a load (2) via a terminal (E). A sense emitter of the sense IGBT (1b) is connected to a terminal (SE). A gate of the main IGBT (1a) is connected to one end of a capacitance (C0) and a terminal (G), and the other end of the capacitance (C0) is connected to a gate of the sense IGBT (1b). When a turn-on instruction for the main IGBT (1a) by a driving signal (s0) has been issued, the sense IGBT (1b) allows a sense electric current, which is proportional to the electric current flowing through the main IGBT (1a), to flow from the collector to the sense emitter.

Description

[Technical field]

[0001] The present invention relates to a semiconductor device and an overcurrent protection device. [Background technology]

[0002] 2. Description of the Related Art In recent years, development of next-generation semiconductor elements such as silicon carbide (SiC) compound semiconductor elements and gallium nitride compound semiconductor (GaN) elements has been progressing as next-generation technologies for IGBTs (Insulated Gate Bipolar Transistors), which are power semiconductor elements.

[0003] As a related technology, for example, a technology has been proposed in which a transient sense period of a sense current detection signal is detected in response to the turning on of a semiconductor element, and the semiconductor element is controlled based on the sense current detection signal during the transient sense period (Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] International Publication No. 2018 / 211840 Summary of the Invention [Problem to be solved by the invention]

[0005] A semiconductor device called an IPS (Intelligent Power Switch) is equipped with a main IGBT, which is a power semiconductor element for operating a load, and a sense IGBT, which is a power semiconductor element for monitoring a current and supplies a sense current proportional to the current flowing through the main IGBT. The IPS also includes an overcurrent detection circuit that detects an overcurrent in the main IGBT using a detection signal of the sense current (sense current detection signal).

[0006] However, in the conventional IPS configuration, oscillations accompanied by overshoots occur in the sense current detection signal during the period from the transient rise to the fall of the sense current detection signal (transient sense period). In this case, for example, if oscillations of a voltage value exceeding the rated value occur, this may cause malfunction of the overcurrent detection circuit or destruction of devices such as IGBTs, resulting in a problem of reduced reliability of device operation.

[0007] In one aspect, the present invention has an object to provide a semiconductor device and an overcurrent protection device that suppresses oscillations occurring in a detection signal of a sense current output from a current monitoring power semiconductor element. [Means for solving the problem]

[0008] In order to solve the above problems, a semiconductor device is provided. The semiconductor device has an output element, a current monitor element, and a capacitor. The output element operates a load by switching based on a drive signal. The current monitor element monitors a current flowing through the output element. One end of the capacitor is connected to the gate of the output element, and the other end is connected to the gate of the current monitor element. The semiconductor device also has a voltage divider circuit including a first resistor and a second resistor that divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element, the gate of the output element is connected to one end of the capacitor and one end of the first resistor, the gate of the current monitor element is connected to the other end of the capacitor, the other end of the first resistor and one end of the second resistor, and the sense emitter of the current monitor element is connected to the other end of the second resistor.

[0009] Also, to solve the above problems, a semiconductor device is provided. The semiconductor device has an output element, a current monitor element, a voltage divider circuit, and a capacitor. The output element operates a load by switching based on a drive signal. The current monitor element monitors a current flowing through the output element. The voltage divider circuit divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element. One end of the capacitor is connected to the gate of the current monitor element, and the other end is connected to the sense emitter of the current monitor element. The voltage divider circuit also includes a first resistor and a second resistor, the gate of the output element is connected to one end of the first resistor, the gate of the current monitor element is connected to one end of the capacitor, the other end of the first resistor and one end of the second resistor, and the sense emitter of the current monitor element is connected to the other end of the capacitor and the other end of the second resistor.

[0010] Furthermore, to solve the above problem, an overcurrent protection device is provided. The overcurrent protection device has an output element, a current monitor element, a capacitor, a control circuit, a current detection resistor, and an overcurrent detection circuit. The output element is connected to a power supply voltage via a power supply terminal, connected to a load via an output terminal, and switches on and off based on a drive signal to operate the load. The current monitor element monitors the current flowing through the output element. The capacitor has one end connected to the gate of the output element and the other end connected to the gate of the current monitor element. The control circuit outputs a drive signal to control the switching of the output element. The current detection resistor outputs a sense current detection signal obtained by converting the sense current output from the current monitor element into a voltage. The overcurrent detection circuit detects an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage. The overcurrent protection device also has a voltage divider circuit including a first resistor and a second resistor that divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitoring element, wherein the gate of the output element is connected to one end of the capacitor and one end of the first resistor, the gate of the current monitoring element is connected to the other end of the capacitor, the other end of the first resistor and one end of the second resistor, and the sense emitter of the current monitoring element is connected to the other end of the second resistor.

[0011] Furthermore, in order to solve the above problems, an overcurrent protection device is provided. The overcurrent protection device has an output element, a current monitor element, a capacitor, a voltage divider circuit, a control circuit, a current detection resistor, and an overcurrent detection circuit. The output element is connected to a power supply voltage via a power supply terminal, and to a load via an output terminal, and operates the load by switching based on a drive signal. The current monitor element monitors a current flowing through the output element. The capacitor has one end connected to the gate of the current monitor element and the other end connected to the sense emitter of the current monitor element. The voltage divider circuit divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element. The control circuit outputs a drive signal to control the switching of the output element. The current detection resistor outputs a sense current detection signal obtained by converting a sense current output from the current monitor element into a voltage. The overcurrent detection circuit detects an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage. The voltage divider circuit also includes a first resistor and a second resistor, the gate of the output element is connected to one end of the first resistor, the gate of the current monitor element is connected to one end of the capacitor, the other end of the first resistor and one end of the second resistor, and the sense emitter of the current monitor element is connected to the other end of the capacitor and the other end of the second resistor. Effect of the Invention

[0012] According to one aspect, it is possible to suppress oscillation occurring in a detection signal of a sense current output from a current monitoring power semiconductor element. The above and other objects, features and advantages of the present invention will become apparent from the following description taken in conjunction with the accompanying drawings illustrating preferred embodiments of the present invention. [Brief description of the drawings]

[0013] [Figure 1] 1A and 1B are diagrams illustrating an example of a semiconductor device. [Diagram 2] 1 is a diagram illustrating an example of a configuration of a semiconductor device including an overcurrent protection circuit. [Diagram 3] FIG. 13 is a diagram for explaining self-charging of a sense IGBT. [Figure 4] FIG. 13 is a diagram showing an example of a simulation waveform. [Diagram 5] FIG. 13 is a diagram showing a modified example of the semiconductor device. [Figure 6] 1 is a diagram illustrating an example of a configuration of a semiconductor device including an overcurrent protection circuit. [Figure 7] FIG. 13 is a diagram showing a modified example of the semiconductor device. [Figure 8] 1 is a diagram illustrating an example of a configuration of a semiconductor device including an overcurrent protection circuit. [Figure 9] FIG. 1 is a diagram illustrating an example of the configuration of an overcurrent protection device. [Figure 10] FIG. 1 is a diagram illustrating an example of the configuration of an overcurrent protection device. [Figure 11] FIG. 1 is a diagram illustrating an example of the configuration of an overcurrent protection device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] Hereinafter, the present embodiment will be described with reference to the drawings. In this specification and the drawings, elements having substantially the same functions are denoted by the same reference numerals, and duplicated description may be omitted.

[0015] FIG. 1 is a diagram for explaining an example of a semiconductor device. The semiconductor device 1 includes an output element 1a, a current monitor element 1b, and Capacitor Equipped with C0. The output element 1a and the current monitor element 1b are, for example, an IGBT, or an RC (Reverse Conducting)-IGBT in which an IGBT and an FWD (Free Wheeling Diode) are integrated into one chip. Alternatively, a SiC device may be used. Examples of SiC devices include SiC-MOSFETs (Metal-Oxide-Semiconductor Field-Effect Transistors). In the following description, the output element is called the main IGBT, and the current monitor element is called the sense IGBT.

[0016] The collector of the main IGBT 1a and the collector of the sense IGBT 1b are connected to the power supply voltage Vcc via a terminal C. The emitter of the main IGBT 1a is connected to the load 2 via a terminal E.

[0017] The sense emitter of the sense IGBT 1b is connected to the terminal SE. The gate of the main IGBT 1a is Capacitor C0 and terminal G. Capacitor The other end of C0 is connected to the gate of sense IGBT1b.

[0018] Here, the main IGBT1a operates the load 2 by switching based on the drive signal s0. In this case, when the drive signal s0 instructs the main IGBT1a to be turned on, the main IGBT1a turns on and causes a current to flow from the collector to the emitter. The sense IGBT1b is an element that monitors the current of the main IGBT1a, and when the drive signal s0 instructs the main IGBT1a to be turned on, a sense current proportional to the current flowing through the main IGBT1a flows from the collector to the sense emitter.

[0019] 2 is a diagram showing an example of the configuration of a semiconductor device including an overcurrent protection circuit. CapacitorC0 and an overcurrent protection circuit 10. The overcurrent protection circuit 10 includes a resistor Rs (a current detection resistor) and an overcurrent detection circuit 11. One end of the resistor Rs is connected to the sense emitter of the sense IGBT 1b and an input end of the overcurrent detection circuit 11, and the other end of the resistor Rs is connected to the emitter of the main IGBT 1a and a load 2.

[0020] A sense current detection signal Vsense, which is a voltage obtained by converting the sense current output from the sense IGBT 1b, is output from one end of the resistor Rs. In addition, the overcurrent detection circuit 11 detects an overcurrent state of the main IGBT 1a by comparing the sense current detection signal Vsense with a reference voltage.

[0021] In the semiconductor device 1-1 as described above, the gate of the main IGBT 1a and the gate of the sense IGBT 1b are Capacitor C0, it is possible to suppress oscillation occurring in the sense current detection signal Vsense during a transient sensing period of the sense current detection signal Vsense.

[0022] <Self-charging of sense IGBT> 3 is a diagram for explaining self-charging of the sense IGBT. In a power semiconductor element such as an IGBT, a phenomenon called self-charging occurs when the IGBT is turned on.

[0023] Self-charging is a phenomenon in which holes injected from the collector of the IGBT charge the gate oxide film around the trench, raising the gate voltage. When self-charge occurs, not only does the gate voltage rise due to the charge chg0 of the drive signal s0 output from the gate driver, but the gate voltage also rises due to the self-charge charge chg1.

[0024] Also, the chip area of ​​the sense IGBT1b is usually smaller than the chip area of ​​the main IGBT1a. As described above, there is a relationship in size between the chip area of ​​the main IGBT1a and the chip area of ​​the sense IGBT1b, so the parasitic GE (gate-emitter) capacitance of the main IGBT1a is different from the parasitic GE capacitance of the sense IGBT1b.

[0025] For this reason, when a command to turn on the main IGBT1a is issued by the drive signal s0, the sense IGBT1b completes charging and starts turning on earlier than the main IGBT1a, so the sense IGBT1b turns on before the main IGBT1a. As a result, the sense IGBT1b is affected by the electromotive force due to the physical difference in the wiring path around the IGBTs before the main IGBT1a.

[0026] In this way, the gate voltage of the sense IGBT1b increases due to the self-charge chg1. 、 Main IGBT1a The gate voltage rises due to the self-charge charge chg1 For this reason, in the sense current detection signal Vsense output based on the sense current flowing from the sense emitter of the sense IGBT1b, an oscillation occurs in which the waveform rises due to the self-charge charge chg1 during the transient sense period.

[0027] Furthermore, if the oscillation voltage level is high and the oscillation period is long, as described above, it may cause malfunction of the overcurrent detection circuit and destruction of devices such as IGBTs. Capacitor The aim is to suppress oscillation by connecting the above.

[0028] <Simulation waveform> 4 is a diagram showing an example of a simulation waveform, in which the left vertical axis represents the voltage (V) of the sense current detection signal Vsense, the right vertical axis represents the collector current Ic (A), and the horizontal axis represents time (s).

[0029] [Waveform k1] This is the collector current Ic flowing through the collector of the main IGBT1a and the collector of the sense IGBT1b. When the main IGBT1a and the sense IGBT1b are turned on, the collector current Ic flows at time T1.

[0030] As described above, the increase in gate voltage due to the drive signal s0 is supplemented by the increase in gate voltage due to self-charging, so the collector current Ic increases and reaches a peak. After that, the increase in gate voltage due to self-charging decreases, so the collector current Ic also decreases and remains at a constant value.

[0031] [Waveform k2] Capacitor 13 is an oscillation waveform of a sense current detection signal Vsense of a semiconductor device (conventional device) that does not have C0. As the collector current Ic increases, oscillation occurs in the sense current detection signal Vsense.

[0032] [Waveform k3] The gate of the main IGBT1a and the gate of the sense IGBT1b Capacitor 13 shows an oscillation waveform of a sense current detection signal Vsense of the semiconductor device 1-1 of the present invention connected via C0.

[0033] In the semiconductor device 1-1, the gate of the main IGBT 1a and the gate of the sense IGBT 1b are connected together to function as a low-pass filter. Capacitor Because it has a configuration where it is connected via C0, Capacitor C0 can delay the charging of the gate voltage of the sense IGBT 1b for a predetermined time, thereby suppressing the oscillation of the sense current detection signal Vsense that accompanies an increase in the collector current Ic.

[0034] That is, the oscillation voltage of the sense current detection signal Vsense of the waveform k3 is reduced compared to the oscillation voltage of the sense current detection signal Vsense of the waveform k2 (oscillation voltage reduction A). Furthermore, the oscillation period of the sense current detection signal Vsense of the waveform k3 is shortened compared to the oscillation period of the sense current detection signal Vsense of the waveform k2 (oscillation period shortened B).

[0035] In this way, the configuration of the present invention makes it possible to suppress oscillations occurring in the sense current detection signal Vsense during the transient sensing period of the sense current detection signal Vsense. Capacitor C0 is not a parasitic capacitance that exists between the gate and emitter of the IGBT, and is unrelated to the expansion of the depletion layer during IGBT operation or the opening and closing of the channel due to the gate voltage.

[0036] <Modifications of the semiconductor device> 5 is a diagram showing a modified example of the semiconductor device. The semiconductor device 1-2 includes a main IGBT 1a, a sense IGBT 1b, Capacitor C0 and a voltage dividing circuit 1c. The voltage dividing circuit 1c includes a resistor R1 (a first resistor) and a resistor R2 (a second resistor).

[0037] The collector of the main IGBT 1a and the collector of the sense IGBT 1b are connected to the power supply voltage Vcc via a terminal C. The emitter of the main IGBT 1a is connected to the load 2 via a terminal E.

[0038] The gate of the main IGBT1a is terminal G. Capacitor The gate of the sense IGBT1b is connected to one end of C0 and one end of resistor R1. Capacitor The other end of C0 is connected to the other end of resistor R1 and one end of resistor R2. The other end of resistor R2 is connected to the sense emitter of sense IGBT1b and terminal SE.

[0039] 6 is a diagram showing an example of the configuration of a semiconductor device including an overcurrent protection circuit. Capacitor C0, resistors R1 and R2 and an overcurrent protection circuit 10.

[0040] The overcurrent protection circuit 10 includes a resistor Rs (current detection resistor) and an overcurrent detection circuit 11. One end of the resistor Rs is connected to the sense emitter of the sense IGBT 1b, the other end of the resistor R2, and an input end of the overcurrent detection circuit 11, and the other end of the resistor Rs is connected to the emitter of the main IGBT 1a and the load 2.

[0041] In the semiconductor device 1-2a as described above, the gate of the main IGBT 1a and the gate of the sense IGBT 1b are Capacitor The sense IGBT 1b has resistors R1 and R2 connected via C0, which divide the gate voltage of the main IGBT 1a and apply the divided voltage to the gate of the sense IGBT 1b.

[0042] This makes it possible to suppress oscillations occurring in the sense current detection signal Vsense during the transient sense period of the sense current detection signal Vsense. In addition, since the gate voltage of the sense IGBT 1b can be adjusted by the voltage dividing resistor, a more flexible design is possible for oscillation suppression control.

[0043] 7 is a diagram showing a modified example of the semiconductor device. The semiconductor device 1-3 includes a main IGBT 1a, a sense IGBT 1b, Capacitor The voltage divider circuit 1c includes a resistor R1 and a resistor R2.

[0044] The collector of the main IGBT 1a and the collector of the sense IGBT 1b are connected to the power supply voltage Vcc via a terminal C. The emitter of the main IGBT 1a is connected to the load 2 via a terminal E.

[0045] The gate of the main IGBT 1a is connected to the terminal G and one end of the resistor R1. The gate of the sense IGBT 1b is Capacitor The sense emitter of the sense IGBT 1b is connected to one end of C1, the other end of the resistor R1, and one end of the resistor R2. CapacitorIt is connected to the other end of C1 and the other end of resistor R2.

[0046] 8 is a diagram showing an example of the configuration of a semiconductor device including an overcurrent protection circuit. Capacitor The overcurrent protection circuit 10 includes a resistor Rs (current detection resistor) and an overcurrent detection circuit 11. One end of the resistor Rs is connected to the sense emitter of the sense IGBT 1b, the other end of the resistor R2, Capacitor The other end of C1 is connected to the input end of the overcurrent detection circuit 11, and the other end of the resistor Rs is connected to the emitter of the main IGBT 1 a and the load 2.

[0047] In the semiconductor device 1-3a as described above, the gate of the sense IGBT 1b and the sense emitter of the sense IGBT 1b are Capacitor The sense IGBT 1b has resistors R1 and R2 connected via C1, which divide the gate voltage of the main IGBT 1a and apply the divided voltage to the gate of the sense IGBT 1b. Even with this configuration, it is possible to suppress oscillations occurring in the sense current detection signal Vsense during the transient sensing period of the sense current detection signal Vsense.

[0048] < Capacitor Capacity> The semiconductor device shown in Figs. Capacitor The capacitance (F) of C0 can be effectively suppressed in the range of 1E-12 to 1E-07. Capacitor The capacity (F) of C0 is preferably 1E-10.

[0049] In addition, the semiconductor device shown in FIG. Capacitor The capacitance (F) of C1 can be effectively suppressed in a range of, for example, 1E-11 to 1E-04. Capacitor The capacity (F) of C1 is preferably 1E-9, 1E-8, or 1E-7.

[0050] Note that the above is just an example. Capacitor The effective range of the capacitance is determined by matching the oscillation frequency (overshoot frequency during the transient sense period) with the input capacitance (Cies) of the IGBT.

[0051] <Overcurrent protection device> An overcurrent protection device to which the semiconductor device of the present invention is applied will be described below. Fig. 9 is a diagram showing an example of the configuration of an overcurrent protection device. An overcurrent protection device 10-1 includes an input terminal IN, an output terminal OUT, a power supply terminal VT, and a ground terminal GND.

[0052] A pulse-shaped control signal output from a microcomputer or the like is input to the input terminal IN. A load 2 is connected to the output terminal OUT. A power supply voltage Vcc is connected to the power supply terminal VT, and a ground (GND) is connected to the ground terminal GND.

[0053] The overcurrent protection device 10-1 includes a main IGBT 1a, a sense IGBT 1b, Capacitor The device includes C0, a resistor Rs, an overcurrent detection circuit 11, and a control circuit 12. The control circuit 12 includes a logic circuit 12a and a gate driver 12b.

[0054] The logic circuit 12a receives a control signal input through the input terminal IN and generates a logic signal that turns the main IGBT 1a on or off. The gate driver 12b generates a drive signal s0 that turns the main IGBT 1a on or off based on the logic signal output from the logic circuit 12a and applies the drive signal s0 to the gate of the main IGBT 1a.

[0055] The resistor Rs is connected between the sense emitter of the sense IGBT 1b and the emitter of the main IGBT 1a, and detects a potential generated when a sense current flowing out from the sense emitter flows through the resistor Rs, whereby the sense current is detected as a sense current detection signal Vsense.

[0056] The overcurrent detection circuit 11 detects whether the main IGBT 1a is in an overcurrent state by comparing the sense current detection signal Vsense with a reference voltage, and outputs an overcurrent detection signal s1 when an overcurrent state is detected. When the logic circuit 12a detects the overcurrent detection signal s1, it turns off the main IGBT 1a.

[0057] In this way, the overcurrent protection device 10-1 having the configuration of the semiconductor device 1 in FIG. 1 can suppress oscillation of the sense current detection signal Vsense, thereby preventing malfunction of the overcurrent detection circuit 11 due to oscillation and enabling highly accurate overcurrent detection and protection.

[0058] 10 is a diagram showing an example of the configuration of an overcurrent protection device. The overcurrent protection device 10-2 includes a main IGBT 1a, a sense IGBT 1b, Capacitor The overcurrent protection device 10-2 includes C0, resistors R1, R2, and Rs, an overcurrent detection circuit 11, and a control circuit 12. The overcurrent protection device 10-2 is an application of the semiconductor device 1-2 in Fig. 5. The overcurrent protection device 10-2 can also suppress oscillation of the sense current detection signal Vsense, and can prevent malfunction of the overcurrent detection circuit 11 due to oscillation, thereby enabling highly accurate overcurrent detection and protection.

[0059] 11 is a diagram showing an example of the configuration of an overcurrent protection device. The overcurrent protection device 10-3 includes a main IGBT 1a, a sense IGBT 1b, Capacitor The overcurrent protection device 10-3 includes C1, resistors R1, R2, Rs, an overcurrent detection circuit 11, and a control circuit 12. The overcurrent protection device 10-3 is an application of the semiconductor device 1-3 in Fig. 7. The overcurrent protection device 10-3 can also suppress oscillation of the sense current detection signal Vsense, and prevents malfunction of the overcurrent detection circuit 11 due to oscillation, thereby enabling highly accurate overcurrent detection and protection.

[0060] As described above, according to the present invention, it is possible to reduce the oscillation voltage and shorten the oscillation period for the oscillation occurring in the sense current detection signal output from the current monitoring power semiconductor element, thereby making it possible to suppress the oscillation. In addition, since the oscillation can be effectively suppressed by passive components with a small number of elements, a complex circuit for detecting and controlling the oscillation is not required, and an effect of suppressing an increase in the circuit size is also achieved.

[0061] Although the embodiments have been described above, the configurations of the parts shown in the embodiments can be replaced with other parts having similar functions. Any other components or steps may be added. Furthermore, any two or more configurations (features) of the above-mentioned embodiments may be combined.

[0062] The foregoing merely illustrates the principles of the present invention. Further, since numerous modifications and changes are possible to those skilled in the art, the present invention is not limited to the exact construction and application shown and described above, and all corresponding modifications and equivalents are deemed to be within the scope of the present invention according to the appended claims and their equivalents. [Explanation of symbols]

[0063] 1 Semiconductor device 1a Output element (main IGBT) 1b Current monitor element (sense IGBT) 2. Load s0 Drive signal C0 Capacitor G Terminal connected to the gate of the output element C Terminal connected to the collector of the output element and the current monitor element E Terminal connected to the emitter of the output element SE Terminal connected to the sense emitter of the current monitor element

Claims

1. an output element that operates a load by switching based on a drive signal; a current monitor element for monitoring a current flowing through the output element; a capacitor having one end connected to the gate of the output element and the other end connected to the gate of the current monitor element; a voltage dividing circuit including a first resistor and a second resistor, which divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element; a gate of the output element is connected to one end of the capacitor and one end of the first resistor; a gate of the current monitor element is connected to the other end of the capacitor, the other end of the first resistor, and one end of the second resistor; a sense emitter of the current monitor element is connected to the other end of the second resistor; Semiconductor device.

2. The output element and the current monitor element are power semiconductor elements, and are one of an IGBT (Insulated Gate Bipolar Transistor), an RC (Reverse Conducting)-IGBT, and a SiC (Silicon carbide) device. The semiconductor device according to claim 1.

3. a current detection resistor for outputting a sense current detection signal obtained by converting the sense current output from the current monitor element into a voltage; and an overcurrent detection circuit for detecting an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage. The semiconductor device according to claim 1.

4. The sense emitter of the current monitor element is further connected to one end of the current detection resistor and to an input end of the overcurrent detection circuit, a collector of the output element is connected to a collector of the current monitor element and to a power supply voltage; The emitter of the output element is connected to the other end of the current detection resistor and the load.

4. The semiconductor device according to claim 3.

5. an output element that operates a load by switching based on a drive signal; a current monitor element for monitoring a current flowing through the output element; a voltage divider circuit that divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element; a capacitor having one end connected to the gate of the current monitor element and the other end connected to the sense emitter of the current monitor element; the voltage divider circuit includes a first resistor and a second resistor; a gate of the output element is connected to one end of the first resistor; a gate of the current monitor element is connected to one end of the capacitor, the other end of the first resistor, and one end of the second resistor; a sense emitter of the current monitor element is connected to the other end of the capacitor and the other end of the second resistor; Semiconductor device.

6. a current detection resistor for outputting a sense current detection signal obtained by converting the sense current output from the current monitor element into a voltage; and an overcurrent detection circuit for detecting an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage.

6. The semiconductor device according to claim 5.

7. The sense emitter of the current monitor element is further connected to one end of the current detection resistor and to an input end of the overcurrent detection circuit, a collector of the output element is connected to a collector of the current monitor element and to a power supply voltage; The emitter of the output element is connected to the other end of the current detection resistor and the load.

7. The semiconductor device according to claim 6.

8. an output element connected to a power supply voltage via a power supply terminal and to a load via an output terminal, and switching on the basis of a drive signal to operate the load; a current monitor element for monitoring a current flowing through the output element; a capacitor having one end connected to the gate of the output element and the other end connected to the gate of the current monitor element; a control circuit that outputs the drive signal to control switching of the output element; a current detection resistor for outputting a sense current detection signal obtained by converting the sense current output from the current monitor element into a voltage; an overcurrent detection circuit that detects an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage; a voltage dividing circuit including a first resistor and a second resistor, which divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element; a gate of the output element is connected to one end of the capacitor and one end of the first resistor; a gate of the current monitor element is connected to the other end of the capacitor, the other end of the first resistor, and one end of the second resistor; a sense emitter of the current monitor element is connected to the other end of the second resistor; Overcurrent protection device.

9. The sense emitter of the current monitor element is further connected to one end of the current detection resistor and to an input end of the overcurrent detection circuit, a collector of the output element is connected to a collector of the current monitor element and to the power supply voltage; The emitter of the output element is connected to the other end of the current detection resistor and the load.

9. The overcurrent protection device of claim 8.

10. an output element connected to a power supply voltage via a power supply terminal and to a load via an output terminal, and switching on the basis of a drive signal to operate the load; a current monitor element for monitoring a current flowing through the output element; a capacitor having one end connected to the gate of the current monitor element and the other end connected to the sense emitter of the current monitor element; a voltage divider circuit that divides the gate voltage of the output element and applies the divided voltage to the gate of the current monitor element; a control circuit that outputs the drive signal to control switching of the output element; a current detection resistor for outputting a sense current detection signal obtained by converting the sense current output from the current monitor element into a voltage; an overcurrent detection circuit that detects an overcurrent state of the output element by comparing the sense current detection signal with a reference voltage; the voltage divider circuit includes a first resistor and a second resistor; a gate of the output element is connected to one end of the first resistor; a gate of the current monitor element is connected to one end of the capacitor, the other end of the first resistor, and one end of the second resistor; a sense emitter of the current monitor element is connected to the other end of the capacitor and the other end of the second resistor; Overcurrent protection device.

11. The sense emitter of the current monitor element is further connected to one end of the current detection resistor and to an input end of the overcurrent detection circuit, a collector of the output element is connected to a collector of the current monitor element and to the power supply voltage; The emitter of the output element is connected to the other end of the current detection resistor and the load.

11. The overcurrent protection device of claim 10.

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