Solid Source Precursor Container

Abstract

To provide ready access to reactant vapor while providing improved serviceability (e.g., recharging) of a solid source precursor vessel.SOLUTION: The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of a compressed precursor material that typically have higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases capacity of the source vessel resulting in longer intervals between replacement and / or refilling the source vessel.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates generally to gas phase reactors and systems. In particular, the present disclosure relates to an apparatus for delivering reactant gases from a solid source precursor. [Background technology]

[0002] Gas phase reactor systems, such as chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and atomic layer deposition (ALD), can be used for a variety of applications involving depositing and etching materials on a substrate surface (e.g., a semiconductor wafer). For example, gas phase reactor systems can be used to deposit and / or etch layers on a substrate to form semiconductor devices, flat panel display devices, photovoltaic devices, microelectromechanical systems (MEMS), and the like.

[0003] In a gas-phase reactor system, reactant gases (also referred to herein as "precursor gases") of different reactants are delivered to one or more substrates in a reaction chamber. The reaction chamber typically contains one or more substrates supported on one or more substrate holders (such as susceptors), with the substrates and substrate holders maintained at a desired process temperature. The reactant gases can react with each other or with the surface of the substrate to form a thin film on the substrate, with the growth rate being controlled by, among other things, the temperature or amount of the reactant gases.

[0004] In some applications, the reactant gases are stored in gaseous form in the reactant source vessel. In such applications, the reactant vapors are often gaseous at ambient (i.e., normal) pressure and temperature. Examples of such gases include nitrogen, oxygen, hydrogen, and ammonia. However, in some cases, vapors of source chemicals ("precursors") that are liquids or solids at ambient pressure and temperature are used. These source chemicals may have to be heated to produce sufficient vapors for the reaction process. Some solid materials (referred to herein as "solid source precursors") have very low vapor pressures at room temperature and therefore must be heated and / or maintained at very low pressures to produce sufficient reactant vapors.

[0005] A typical solid source precursor delivery system includes a solid source precursor container and a heating system (e.g., radiant heat lamps, resistive heaters, etc.). The container contains a solid precursor (e.g., in powder form). The heating system heats the container to increase the vapor pressure of the precursor gas in the container. Unless otherwise stated, the heating system heats the solid precursor such that it evaporates (e.g., sublimes). Thus, the container is sometimes referred to as a sublimator. The container has an inlet and an outlet for flowing an inert carrier gas (e.g., nitrogen) through the container to transport the evaporated precursor to a substrate reaction chamber. Typically, the path through the container is a non-direct path to increase the distance the carrier gas travels through the container, thereby increasing the saturation of the carrier gas with the evaporated precursor. The carrier gas pushes the precursor vapor with it through the container outlet and ultimately to the substrate reaction chamber. The container typically includes an isolation valve to fluidically isolate the contents of the container from the exterior of the container.

[0006] Any discussion set forth in this section, including the discussion of problems and solutions, is included in this disclosure solely to provide context to the disclosure and should not be taken as an admission that any or all of the discussion was known at the time the invention was made or otherwise constitutes prior art. Summary of the Invention [Means for solving the problem]

[0007] This Summary is provided to introduce a selection of concepts in a simplified form. These concepts are described in more detail below in the Detailed Description of Example Embodiments of the Disclosure. This Summary is not intended to necessarily identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0008] The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor container that is utilized to vaporize a quantity of solid precursor stored within the container. The disclosed source container replaces a single serpentine channel used to store a quantity of precursor and direct a carrier gas through the container with multiple individual cavities or pockets within the interior of the container. Each individual pocket can be filled with precursor. In one configuration, the pockets can be filled with a preformed block of compressed precursor that typically has a higher density than can be achieved when packing a powdered precursor into the serpentine channel. The increased density of the solid precursor material increases the volume of the source container, resulting in longer intervals between replacement and / or refilling of the source container.

[0009] In one configuration, a reactant source vessel is provided that includes a container body and a lid. The lid is configured to attach to the container body to enclose an interior region of the container body defined by one or more sidewalls and a bottom surface. A plurality of individual pockets are formed within the interior region of the container body, each configured to hold a quantity of solid source precursor. In one configuration, the pockets can be of uniform size (e.g., have common dimensions). The individual pockets can have any configuration. For example, the pockets can be cylindrical, rectangular prismatic, etc. In general, each pocket has a closed lower or bottom end, one or more sidewalls, and an open top end. In one such configuration, the pockets can receive a preformed block of compressed solid precursor (e.g., through the open top end). This configuration facilitates filling the source vessel. Each of the plurality of individual pockets within the interior of the source vessel is exposed to a fluid flow path that passes through the interior of the vessel between a fluid path inlet end and a fluid path outlet end. The fluid path passes over each individual pocket within the source vessel, enabling transport of the evaporated precursor from the source vessel. To define a fluid pathway over the open end of each pocket, the pathway may be non-direct (eg, serpentine) between the fluid pathway inlet end and the fluid pathway outlet end.

[0010] In one configuration, the container body has a two-piece construction. In this configuration, the container body can have a base that receives an insert having a plurality of pockets formed therein. In a further configuration, the insert can be formed in multiple layers that are stacked to form a plurality of pockets. Such a configuration can be beneficial when working with hard and / or friable materials.

[0011] In another configuration, the plurality of pockets may be formed by a plurality of intersecting divider walls that collectively define a matrix of pockets within the interior of the container body. In one configuration, the divider walls may be evenly spaced to enhance heat transfer throughout the container body. In one such configuration, the container body may have a high degree of symmetry.

[0012] These and other embodiments will become readily apparent to those skilled in the art from the following detailed description of several embodiments, which refer to the accompanying drawings, in which: The present disclosure is not limited to any particular embodiment disclosed.

[0013] A more complete understanding of the exemplary embodiments of the present disclosure can be obtained by reference to the detailed description and claims when considered in conjunction with the following illustrative drawings. [Brief description of the drawings]

[0014] [Figure 1] FIG. 1 illustrates one embodiment of a gas phase reactor system. [Diagram 2] FIG. 1 illustrates one embodiment of a solid precursor source vessel. [Figure 3A] FIG. 1 illustrates a container body of a prior art solid precursor source vessel. [Figure 3B] FIG. 1 illustrates a container body of a prior art solid precursor source vessel. [Figure 4] FIG. 1 illustrates one embodiment of a two-piece container body for a solid precursor source vessel. [Figure 5A] FIG. 5 shows an insert for use in the two-piece container body of FIG. 4. [Figure 5B] FIG. 5B shows a first cross-sectional view of FIG. 5A. [Figure 5C] FIG. 5B shows a second cross-sectional view of FIG. 5A. [Figure 6] FIG. 1 shows a multi-piece insert. [Figure 7] FIG. 1 illustrates an embodiment of a one-piece container body for a solid source precursor vessel. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0015] It will be understood that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to help improve understanding of the illustrated embodiments of the present disclosure.

[0016] The description of exemplary embodiments provided below is merely exemplary and intended for illustrative purposes only. The following description is not intended to limit the scope of the disclosure or claims. Additionally, the description of multiple embodiments having stated features is not intended to exclude other embodiments having additional features or incorporating different combinations of the stated features.

[0017] The present disclosure relates generally to improved solid source precursor vessels, apparatus and methods. The disclosed embodiments facilitate providing improved serviceability (e.g., refilling) of solid source precursor vessels while maintaining ready availability of reactant vapors.

[0018] FIG. 1 illustrates a schematic diagram of an exemplary gas-phase reactor system 100, which includes a reactor 102, which includes a reaction chamber 104, a susceptor 106 for holding a substrate 116 during processing, a gas distribution system 108 for distributing one or more reactants to the surface of the substrate 116, a solid reactant source 110, a second reactant source 112, and a carrier / purge gas source 114. The reactant source and the carrier / purge gas source are fluidly coupled to the reaction chamber 104 via fluid conduits and various valves or controllers. The system also includes a vacuum source 118. The solid reactant source is configured to deliver generated gas-phase reactants from a solid precursor source vessel 20 into the gas-phase reactor 102. The solid source vessel 20 contains a precursor or source chemical (not shown), which is solid under standard conditions (i.e., room temperature and atmospheric pressure). The solid precursor is evaporated in the source vessel 20, which can be maintained at or above the evaporation temperature of the precursor. The resulting vaporized reactants are then delivered into a reaction chamber 104. The source vessels 20 can be disposed in a reactant source cabinet 12, which can be individually evacuated and / or thermally controlled. The exemplary system 100 can be used for deposition, such as, but not limited to, chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), or atomic layer deposition (ALD).

[0019] As seen in FIG. 1, precursor source vessel 20 is fluidly coupled to reactor 102 via conduit 22. Selective opening of valve 24 in conduit 22 allows for the supply of a gas-phase reactant (e.g., vaporized solid precursor) from precursor source vessel 20 to reactor 102. An inert or inert gas is preferably used as a carrier gas for the vaporized precursor. A carrier gas (e.g., nitrogen or argon) can be supplied into precursor source vessel 20 through carrier gas supply conduit 26. In this regard, precursor source vessel 20 includes at least one inlet valve 44 for connection to carrier gas supply conduit 26 and at least one outlet valve 42 for connection to reactor 102 via conduit 22. Carrier gas supply conduit 26 includes at least one valve 28, which can be used to fluidly isolate the interior of source vessel 20 from a source of carrier gas (not shown).

[0020] The precursor source vessels 20 may be disposed within the reactant source cabinet 12. The interior space 18 of the cabinet 12 may be maintained at a reduced pressure, for example, to promote radiative heating of components (e.g., source vessels) within the cabinet 12 and to thermally isolate such components from one another to facilitate a uniform temperature field. In other variations, the cabinet is not evacuated and includes convection enhancing devices (e.g., fans, crossflows, etc.). The illustrated cabinet 12 includes one or more heating devices 8, such as radiative heaters. In addition, reflectors (not shown) may be provided that may be configured to surround the components within the cabinet 12 and reflect radiative heat generated by the heating devices 8 to the components disposed within the cabinet 12. Reflectors may be provided on the interior walls, ceiling, and / or floor of the cabinet 12. Additional heaters (not shown) may be provided to heat the conduits 22 and any valves between the cabinet 12 and the reactor 102 to prevent the precursor gases from condensing.

[0021] FIG. 2 illustrates one embodiment of a solid precursor source vessel 20. As shown, the precursor source vessel 20 includes a container body 30 and a lid 40. As shown, the lid 40 is removed from the container body 30. However, it will be understood that the lid 40 is secured to the container body 30 when assembled. The illustrated vessels 20 are secured together by fastening elements (not shown), such as a screw or nut and bolt combination. The fastening elements are adapted to extend into or through an array of mating holes (e.g., bolt holes) that extend around the periphery of the lid and around the flange of the container body 30. Those skilled in the art will appreciate that the assembly can be secured together by a variety of alternative methods. As described herein, the container body 30 is configured to hold a quantity of solid precursor. The lid 40 is configured to direct a gas flow (e.g., carrier gas) through the internal flow passages of the container body to remove the evaporated precursor (e.g., reactant gas). When a solid source precursor becomes depleted and needs to be replaced, it is customary to replace the entire source vessel 20 with a new one having the full amount of source chemical.

[0022] In the illustrated embodiment, the vessel lid 40 includes an inlet valve 44 and an outlet valve 42. The inlet valve 44 has an inlet that receives carrier gas via the carrier gas conduit 26 (see FIG. 1). The inlet valve 44 has an outlet that is in fluid communication with an inlet end of an internal flow path through the container body. That is, the outlet of the inlet valve 44 connects to a fluid passage through the lid that is in communication with the interior of the container body when the source vessel is assembled. The outlet valve 42 has an inlet that is in fluid communication (e.g., via a fluid passage through the lid) with an outlet end of an internal flow path through the container body. The outlet valve has an outlet that is in fluid communication with a fluid conduit 22 that extends between the source vessel 20 and the reactor. Various valves, manifolds, and conduits can be disposed between the fluid conduits and the outlet valve. In use, carrier gas flows through the inlet valve 44 into the source vessel, through the interior of the container body 30, out the outlet valve 42, and out of the source vessel. In the illustrated embodiment, the lid 40 further includes a vent or purge valve 46 disposed between the inlet and outlet valves 44, 42. The purge valve 46 has an inlet in fluid communication (e.g., via a fluid passage through the lid) with an intermediate portion of the internal flow path through the container body. The purge valve also has an exhaust outlet. In use, the purge valve can be opened to allow gas flow from the internal flow path to exit the vessel, and has an inlet connectable to a source of purge gas (not shown) and an outlet in fluid communication with an intermediate portion of the internal flow path through the container body. In operation, the purge valve can be used to expel gas (e.g., carrier gas and / or reactant gas) from the interior of the source vessel 20.

[0023] Each of the valves 42, 44 and 46 (if utilized) preferably includes a valve porting block 43, 45 and 47, respectively, that includes a gas flow passageway that can be restricted or opened by the valve. For example, the porting block 45 of the inlet valve 44 preferably includes an internal gas flow passageway that extends from the side of the porting block to a restrictor region that includes a valve seat and an internal device (not shown) for restricting the flow of gas, such as a movable restrictor or diaphragm. In one embodiment, the movable internal restrictor or diaphragm can be moved by turning a knob (e.g., the larger cylindrical top of the valve 44) either manually or in an automated manner. Another internal gas flow passageway preferably extends from the restrictor region through the opposite side of the porting block 45 to an inlet passageway that extends through the lid 40 and into the source container 20.

[0024] 3A and 3B show one embodiment of a flow path through the interior of the container body 30. As shown, the container body includes a flow path 38, which is a continuous, serpentine path extending between an inlet end 32 and an outlet end 34. When the source container is assembled, the inlet end 32 is disposed below the inlet valve of the lid, and the outlet end 34 is disposed below the outlet valve of the lid. Thus, when the source container is assembled, the inlet and outlet ends 34, 32 of the flow path 38 are in fluid communication with the inlet and outlet valves of the lid, respectively. In the illustrated embodiment, an intermediate portion of the flow path 38 includes a purge port manifold 36, which is in fluid communication with the purge valve when the source container is assembled. As shown, the flow path 38 extends between the front and rear walls of the container body in a series of parallel channels connected at alternating adjacent ends. The flow path defines a tortuous, or serpentine, path that the carrier gas must travel as it flows through the container body 30. In use, the flow path 38 contains a solid precursor source, such as a powder. For example, a solid source precursor / chemical can be packed into the bottom of the channel. Heating the source vessel can vaporize at least a portion of the solid precursor in the channel. The carrier gas is forced to carry the reactant vapor by exposing it to the vaporized precursor while passing it through a long, serpentine flow path 38 between the inlet end 32 and the outlet end 34. That is, because the carrier gas is required to flow along a longer path while exposed to the precursor source, it is exposed to the precursor source for a longer period of time and is therefore more likely to become saturated with the vaporized precursor.

[0025] Although the carrier body shown in Figures 3A and 3B is effective for producing gas-phase reactants from solid precursors, this embodiment of the carrier body has many drawbacks. In particular, the narrow and deep channels used to form the serpentine flow path make it difficult to remove and replace the solid source precursor (e.g., compacted powder). Furthermore, the narrow and deep channels limit the amount of solid precursor that can be held in the container body of the source vessel. That is, a significant amount of the container body's internal volume is utilized to form the dividing walls that define the serpentine flow path. Aspects of the present disclosure are based in part on the recognition that increasing the surface area of ​​the solid precursor allows the container body to hold an increased amount of solid precursor while effectively saturating the carrier gas over a shorter flow path.

[0026] FIG. 4 illustrates one embodiment of a two-piece container body 130 according to various aspects of the disclosure. Although illustrated as a two-piece container body, it will be understood that this embodiment is provided by way of example and not limitation. It will be understood that along these lines, the container body can be a single-piece container body similar to that described above. It will be further understood that the container body 130 of FIG. 4 can be substituted for the container body 30 of FIG. 2. That is, the lid of FIG. 2 can be utilized for the container body 130. In the illustrated embodiment, the container body 130 includes a base member 132 and an insert tray 150. The base member 132 is a generally rectangular element having four side walls 134a-d, a bottom surface 136, and a generally open top surface. The side walls and bottom surface collectively define an opening / recess (e.g., interior area) sized to receive the insert tray 150. In the illustrated embodiment, the base member 132 further includes a shelf 138 disposed within its interior proximate the front wall 134a. The shelf 138 includes an inlet manifold 144, an outlet manifold 142, and a purge valve manifold 146. When the tray insert 150 is placed within the interior of the base member 132, an opening in the side wall of the inlet manifold 144 opens into an opening 155b at a first end of a flow path (not shown) extending through the insert tray 150. Similarly, when the insert tray 150 is placed within the base member 132, an opening in the outlet manifold 142 opens into a second opening 155a at a second end of the flow path extending through the insert tray. Similarly, an opening in the side wall of the purge manifold 146 opens into a third opening 155c located in a middle portion of the flow path through the insert tray 150. When the lid 40 is attached to the container body (see, for example, FIG. 2), the inlet manifold 144 is located below the inlet valve 44 and the outlet manifold 142 is located below the outlet valve 42.

[0027] In the illustrated embodiment, the outer surface of the tray insert 150 is molded to correspond to the interior surface of the base member as defined by the sidewalls and bottom surface. When inserted, the upper edge of the tray insert is generally flush with the upper edge of the base member 132. The tray insert 150 includes a number of individual pockets 152, each configured to hold a quantity of solid source precursor. Each of the individual pockets is formed into the tray insert, extending from an open top end adjacent the upper edge of the tray insert to a closed bottom end adjacent the bottom surface of the tray insert. In one embodiment, all of the pockets 152 have the same dimensions (e.g., length, width, and depth) to enable the pockets to receive the same pre-prepared amount (e.g., a compressed block) of solid precursor. However, this is not a strict requirement.

[0028] 5A-5C respectively show a perspective view of the insert tray 150, a cross-sectional view of the insert tray along section line A-A' in FIG. 5A, and a cross-sectional view of the insert tray along section line B-B' in FIG. 5A. In the illustrated embodiment, the tray insert 150 includes four outer walls 154a-d (hereafter 154 unless otherwise noted) that define a generally rectangular perimeter of the tray insert 150. Each of the outer walls extends from a solid bottom surface 156 to an upper edge. The upper edge of the tray insert 150 is configured to engage a bottom surface of a lid when the sauce container is assembled. To provide the multiple pockets 152, the illustrated tray insert includes a first plurality of dividing walls 162a-f (hereafter 162 unless otherwise noted) that extend between the front wall 154a and the rear wall 154c of the tray insert 150. The tray insert also includes a second plurality of divider walls 164a-e (hereafter 164 unless otherwise noted) extending between side walls 154b and 154d of the tray insert 150. In the illustrated embodiment, the first and second plurality of divider walls 162 and 164 are evenly spaced between pairs of their respective outer side walls and are generally parallel to their respective outer side walls. That is, the first plurality of divider walls 162 can substantially intersect the second plurality of divider walls 164. In this configuration, the two sets of divider walls 162, 164 define a matrix of equally sized pockets 152. Although discussed as being formed by the intersection of transverse divider walls, it will be understood that the pockets can be defined in other manners. By way of example, each individual pocket can be a cylindrical hole recessed into the tray insert (i.e., if a two-piece container body is utilized) or into the container body (i.e., if a one-piece container body is utilized). However, the use of transverse dividing walls that define a matrix of equal-sized pockets results in a more symmetrical container body, which can provide a more uniform thermal performance when the source vessel is heated.

[0029] In the illustrated embodiment, each of the pockets 152 has approximately the same cross-sectional dimensions. That is, each pocket 152 can have the same length "L" as measured between two opposing sidewalls and the same width "W" as measured between another pair of opposing sidewalls. See FIG. 5B. Additionally, each pocket can have the same depth "D" as measured from the closed bottom 156 to the open top 158 of the pocket. As illustrated, using pockets of common size allows the pockets to be filled with a preformed amount of solid precursor. That is, rather than filling the bottom of a deep, narrow channel (e.g., a serpentine flow path) with powder and compacting the powder at the bottom of the channel, a preformed compressed block 172 of precursor material can be inserted into each of the pockets 152. For example, the precursor powder can be compacted into a block 172 sized to fit within the interior of the pocket 152. The use of the compressed block 172 increases the density of the precursor within the source vessel. As an example, packing a precursor powder of hafnium chloride (HfCl4) into the deep, narrow channels of the flow passage 38 shown in Figures 3A and 3B typically resulted in a maximum precursor density of about 2 grams per cubic centimeter (g / cc). By utilizing a compressed block, precursor densities of 3 g / cc or more are often achieved. Assuming equal internal volumes for the container body 30 of Figure 3A and the container body 130 of Figure 4, the use of a pre-compressed precursor block increases the source vessel capacity by 50%. This increase in source vessel capacity results in longer intervals between source vessel replacement and / or refilling. This in turn reduces downtime in the manufacturing process.

[0030] Notably, the top edge or open end 158 of each of the pockets 152 is typically located below the top edge of the insert tray 150 or container 30. More specifically, there must be space above each of the pockets to allow carrier gas to flow over the top surface of the pocket between the inlet and outlet of the container body. As best shown in FIG. 5A, the dividing walls 162, 164 and the outer wall 154 collectively define a flow path 170 through the insert tray 150. This flow path extends above the top surface (e.g., open end 158) of each of the pockets 152 to allow carrier gas to transport evaporated precursor from each pocket when the source vessel is in use. The outer wall 154 typically has a full height such that it contacts the bottom surface of the lid of the source vessel when assembled. The dividing wall 162 is variously configured to have a height equal to the top edge of the outer wall or a lower height (e.g., the same height as the top edge of the pocket 152) to direct fluid flow through the vessel. In the illustrated embodiment, each pocket 152 is defined by four side walls. Two of the side walls are full height so as to contact the lid when the sauce container is assembled, while the two other side walls have a smaller height to define a flow path across the top surface of the pocket 152. Figure 5A shows one non-limiting embodiment of a flow path 170 that extends over the top surface of each pocket 152 between an inlet and an outlet.

[0031] As shown in Figures 5A-5C, the insert tray 150 can be an integrally formed element. For example, the insert tray can be milled from a single block of material or cast in a single piece. Other fabrication techniques are possible.

[0032] FIG. 6 shows an alternative embodiment of the insert tray 150. In this embodiment, the insert tray is formed from three layers of wall fasteners 160a, 160b, and 160c. These layers of wall fasteners 160a-c can be stacked to produce the insert tray. In one embodiment, the wall fasteners can each define a matrix of pockets having top and bottom open ends. In one such embodiment, the fasteners can be stacked on a flat plate that forms the bottom of the insert tray. In another embodiment, the lowest wall fastener 160c can include the bottom surface. Although shown as having three layers, it will be understood that the multi-layer insert tray can have more or fewer layers. Constructing the insert tray from separate layers can be particularly beneficial with insert trays made from ceramic materials, such as, but not limited to, aluminum nitride and silicon carbide. It will be further understood that the insert tray and / or container body can be made from a variety of materials, including ceramic and stainless steel.

[0033] 7 illustrates another embodiment of the container body 230. In this embodiment, the container body has a one-piece construction; that is, the pockets 152 are integrally formed within the container body 30. In such a configuration, the pockets 152 again have common dimensions to facilitate filling the pockets with a common sized block of compressed precursor. As shown, the flow passage 170 again passes over the open top surface of each of the pockets, passing between the inlet manifold 144 and the outlet manifold 142. As described above, when the source vessel is assembled, these manifolds are in fluid communication with the inlet and outlet valves.

[0034] While exemplary embodiments of the present disclosure are described herein, it should be understood that the disclosure is not so limited. Various modifications, variations, and enhancements of the systems and methods described herein may be made without departing from the spirit and scope of the present disclosure. The subject matter of the present disclosure includes all novel and non-obvious combinations and subcombinations of the various systems, components, and configurations and other features, functions, acts, and / or properties disclosed herein, and all equivalents thereof. [Explanation of symbols]

[0035] 8 Heating Devices 12 Reactant Source Cabinet 18 Interior Space 20 Solid precursor source container 22 Fluid conduit 24 valves 26 Carrier gas supply pipe 28 Valves 30 Container body 32 Inlet end 34 Outlet end 36 Purge port manifold 38 Flow Path 40 Lid 42 Outlet valve 43 Valve porting block 44 Inlet valve 45 Valve Porting Block 46 Purge valve 47 Valve Porting Block 100 Gas Phase Reactor System 102 Gas Phase Reactor 104 Reaction Chamber 106 Susceptor 108 Gas Distribution System 110 Solid reactant source 112 Second reactant source 114 Carrier / Purge Gas Source 116 Board 118 Vacuum Source 130 Two-piece container body 132 Foundation members 134a~134d side wall 136 Bottom 138 Shelf 142 Outlet manifold 144 Inlet manifold 146 Purge valve manifold 150 Insert Tray 152 individual pockets 154a front wall 154b side wall 154c back wall 154d side wall 155a Second opening 155b First end opening 155c Third opening 156 Bottom 158 Apex 160a~c wall fixings 162a-f first plurality of dividing walls 164a-e Second plurality of dividing walls 170 Flow Path 172 Preformed Compressed Blocks 230 Container body

Claims

1. a container body having an outer wall and a bottom surface defining an interior region of the container body; a plurality of pockets disposed within the interior region of the container body, each of the plurality of pockets configured to contain a quantity of a solid source precursor; a lid configured to engage the container body, the lid enclosing the interior region of the container body when connected to the container body; and a fluid flow path within the interior region of the container body, the fluid flow path being formed above the plurality of pockets and below a bottom surface of the lid, the fluid flow path extending between an inlet end and an outlet end along a path passing over at least a portion of each of the plurality of pockets; a first plurality of parallel divider walls extending between a first set of opposed side walls of the container body; a second plurality of parallel divider walls extending between a second set of opposed side walls of the container body, the first and second plurality of divider walls intersecting to define the matrix of pockets; and a reactant source vessel comprising:

2. an inlet valve and an outlet valve attached to a top surface of the lid, each valve connecting to a fluid passageway through the lid; The container of claim 1 further comprising:

3. 3. The vessel of claim 2, wherein when the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid flow passage and the outlet valve is in fluid communication with the outlet end of the fluid flow passage.

4. Each of the plurality of pockets comprises: A closed bottom end; An open top end; at least one sidewall surface extending between the closed bottom end and the open top end, the closed bottom end, the open top end and the at least one sidewall surface defining an interior volume of the pocket; The container of claim 1 comprising:

5. The container of claim 4 , wherein each pocket of the plurality of pockets has a common size.

6. The container of claim 4 , wherein each pocket of the plurality of pockets comprises a rectangular prism.

7. an insert configured for placement within the interior region of the container body, the plurality of pockets being formed within the insert; The container of claim 1 further comprising:

8. 8. The container of claim 7, wherein the insert comprises at least a first layer and a second layer, the first and second layers stacked within the interior region of the container body to collectively define the plurality of pockets.

9. 8. The container of claim 7, wherein the first and second layers of the insert are formed from a ceramic material.

10. The container of claim 1 , wherein the flow path comprises a non-direct flow path between the inlet end and the outlet end.

11. 2. The container of claim 1, wherein the first and second plurality of divider walls are equally spaced between the first and second sets of opposed side walls, respectively.

12. 10. The vessel of claim 1, wherein the first and second plurality of dividing walls vary in height to define the fluid flow path between the inlet end and the outlet end.

13. a container body having an outer wall and a bottom surface defining an interior region of the container body; a first plurality of parallel divider walls extending between a first set of opposed side walls of the container body; a second plurality of parallel divider walls extending between a second set of opposed side walls of the container body, the first and second plurality of divider walls intersecting to define a matrix of pockets within the interior region of the container body, each of the matrix of pockets configured to contain a quantity of a solid source precursor; a lid configured to engage the container body, the lid enclosing the interior region of the container body when connected to the container body; and a fluid flow path defined by a bottom surface of the lid, the outer wall of the container, and the first and second plurality of dividing walls, the fluid flow path extending between an inlet end and an outlet end and passing over a top surface of each of the matrix of pockets; a reactant source vessel comprising:

14. 14. The container of claim 13, wherein said matrix of pockets each have a common dimension.

15. 14. The container of claim 13, wherein the fluid flow path comprises a non-direct flow path between the inlet end and the outlet end.

16. an inlet valve and an outlet valve attached to a top surface of the lid, each valve connected to a fluid passageway through the lid, such that when the lid is connected to the container body, the inlet valve is in fluid communication with the inlet end of the fluid passageway and the outlet valve is in fluid communication with the outlet end of the fluid passageway; 14. The container of claim 13, further comprising:

17. 1. A method for use with a reactant source vessel, comprising: accessing an interior region of a container body of the reactant source vessel, the interior region including a plurality of individual pockets; inserting a pre-formed block of compressed solid precursor into each of said plurality of discrete pockets; attaching a lid to the container body to enclose the interior region; elevating the temperature of the reactant source vessel while directing a carrier gas through a channel extending through the interior region of the reactant source vessel between a channel inlet end and a channel outlet end, the carrier gas removing evaporated precursor from the vessel; Including, The reactant source vessel comprises: a first plurality of parallel divider walls extending between a first set of opposed side walls of the container body; a second plurality of parallel divider walls extending between a second set of opposed side walls of the container body, the first and second plurality of divider walls intersecting to define a matrix of the plurality of individual pockets; Including, method.

18. The method of claim 17 , wherein the carrier gas is directed over a top surface of each of the plurality of discrete pockets as the carrier gas passes between the channel inlet end and the channel outlet end.

19. The method of claim 17 , wherein the carrier gas is directed over an at least partially serpentine path between the channel inlet end and the channel outlet end.

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